TW519504B - 3D errors measurement device and method - Google Patents

Abstract

A 3D measurement device for determining the 3D positioning and motion errors of multi-axis CNC machine tools. An invented zero point setting device is used to initialize the 3D measurement probe. The 3D measurement device includes one 3D probe, one extension bar, one support bar and one center point ball base. With the help of this 3D measurement device, the kinematic chain of the multi-axis machine tool becomes closed. The 3D probe is then driven on a predefined spherical measuring surface with the center of the center point ball as center. The radius of the spherical measuring surface is equal to the distance between the zero point of the 3D probe and the center of the center point ball. The output of the 3D probe is the resultant 3D positioning and motion errors.

Description

519504 V. Description of the invention (1) Reference patents US04, 435, 905 3/1 984 US05, 214, 857 6/1993 US0 5, 428, 446 6/1 995 US05, 533, 27 1 7/1 996 US05, 3 1 3, 403 3/1 994 US05, 841, 668 1 1/1 998 US06, 049, 377 4/2000 Other publications

Bryan33 / 1 8 1R McMurtry et al. 33/502 Ziegert et al. 356/358 Callaghan, Jr. 33/502 Fujita et al .. 364/474. 26 Pahk et al. 364 / 551.01 Lau et a 1. " Methods for performance Evaluation of Computer Numerically controlled Machining Centers ", ASME B5. 54-1992 The invention relates to a three-dimensional error measurement device and related measurement methods, which are used to directly measure a computer numerical control (CNC) multi-axis machine tool The error of the positioning or movement of the tool or tool relative to the workpiece in space. The multi-axis machine tools referred to here include computer-controlled five-axis simultaneous machine tools, parallel link mechanism machine tools, robots, and other machines driven by more than five axes at the same time.

c: \ Three-dimensional probe error measurement device and method. ptd page 5 519504 V. Description of the invention (2) ^ The tool or tool moves relative to the workpiece or is positioned on a predetermined path Machine. 〃 u < After the machine is assembled, the numerical control machine will check the accuracy of the motion components of each axis in accordance with a certain inspection standard, such as the verticality, parallelism, and deflection of the spindle (ASME, etc.). Beta 5.54). In order to improve the positioning accuracy of the linear motion control axes, the laser interferometer will be used to calculate the error data. After statistical analysis, the pitch error and backlash error can be obtained. ^ Enter the beans into the controller for correction. The positioning error of the rotary motion control axis is measured using an optical polygon mirror, and the statistical analysis results are also input into the controller for correction. In the high-performance CNC controller, in addition to the traditional pitch and backlash error correction, a more complete machine geometric error model can also be established to correct some or all of the static geometric errors and thermal deformation errors. In the US patent US06, 〇49, 377 is a laser measurement device that can simultaneously measure six positioning errors of a linear motion axis, including axial displacement errors, and straightness errors in the straight direction, and three Rotation errors. In the US patents US04, 435, 905 and US 05, 2 1 4, 857, it is known that the dual-ball talent circularity measuring instrument (DBB) is used to check the static and dynamic motion errors of the three-axis machine tool table, including geometric errors. Such as bed verticality, backlash and dynamic errors such as misalignment, stealth, driving parameter mismatch, etc., can be measured from the C: \ three-dimensional probe error measurement device and method.ptd page 6 5195504 Description of the invention

It was identified in it. Although, the circular measuring instrument H system, complex & ^ θ circle into 1 instrument, a fairly good error measurement system is used to measure the axis of the device. During machine tool error measurement, the dimensional distance of σ s varies. -% s between tool and workpiece

Pr〇be head) 刖 3D scanning probes (Scanning surface: Wei 浐: contact / type) of commercially available CNC machine tools to offset the probe sensor in the three-dimensional direction. The two 90-degree angles usually use optical incremental encoders. The output two phase difference is' i 1 wave measurement signal. In addition, it is also possible to use linear ίϊ This type :, LVDT), the output voltage is proportional to the change in displacement: ί ”Put gray old φ Η is used for passive I type Relative incremental measurement, so there is no corresponding reference zero signal output in the test zero point.-No rod is set, and when measuring at the head, different long-range households are installed on the three-dimensional probe. The thread can be fixed with the probe, and there is a ball with a leftward accuracy under the measuring rod. However, after the ^ and the cable are jealously locked, the probe cone does not pass through the ball ... Rod: C, the distance from the center surface to the center of the ball) due to the unrefined green factor of the assembly; the position of the end lock in the coordinate system of the measuring probe // the ball probe cannot be determined as A㉝γ t. Just so, = Newton's relative materials' are only used for relative displacement measurement; Ϊ 1 The operation of the two-axis CNC machine tool that is turned out is mostly a relative method. The workpiece is in the LV position of Qing A, i. Test probe with one-axis universal contact

C ·· \ Three-dimensional exploration of the difference position and method ⑽ Page 7 519504 V. Description of the invention (4) Get (Touch), and enter the workpiece set in the CNC for NC machining. Here, the relative relationship between the workpiece coordinate and the machine axis coordinate can be measured. There are no other unknown or non-existent workpieces in the machine mechanism. There are usually two additional rotary axes, so that the tool can be in the relative position and direction. At this time, the temple was crying because of the machine;): Φ is more and more "; the transformation mechanism of the miscellaneous mechanism is: need to be sure: will be two ;; and =: the linear and rotational error between the rotating shafts *, the error is due to the five-axis Machine tools are mostly measured by two & interferometers, and the pitch of the rotating axis is measured, but the number of machines when multi-axis simultaneous movement #two optical polygon mirror plus the measurement method. After multi-axis simultaneous movement, the work ^ = Poor, there is no simple actionable three-dimensional error of the static / dynamic assembly, /, / the positioning of the workpiece and the path movement and space limitations of the workpiece, so far it is still limited to the relative method of the tool and the workpiece. There is no direct quantity The measurement method for measuring the error is in the previous patent No. 11 丨 6 86 of the Republic of China, which belongs to the same applicant. In the patent for measuring device 5 =: ball 1 (medium, the three-dimensional error of the machine positioning and movement is dimensioned. The measuring probe is used to measure the five-axis simultaneous construction center. The center of the ball is within the workpiece coordinates, but because the base does not have a specific placement position, the position of is unknown. In addition, the extension rod C: v, dimension probe error measurement device and method. ptd Page 8 519504 5. Description of the invention (5) The end ball bearing center cannot be within the probe coordinate system. The measurement of the machine's initial measurement is known. Therefore, when the machine tool is positioned and moved, the relative positions are different. Only five can be measured through a special measurement path to establish a false strike = initial measurement point. The positioning error is then different from the initial measurement point of the machine, and the analysis of the measured data is complicated, and the obtained result is subject to the processing variance. This error analysis process is extremely affected. Therefore, the task of the present invention is, Said method is to directly measure a multi-axis machine tool-I measuring device and the corresponding square positioning and motion error. One or three-dimensional of the tool relative to the workpiece. This task is invented by means of one or two. The device includes fixed on five or more axes. Axis machine ^ machine [measurement device to solve this head, and the center of the two-dimensional measurement probe fixed on the shaft of the multi-axis machine tool, the center of the ball seat, when measuring, move or rotate the table Coordinate origin, positioning point and direction, '— 2 f method, define the knife length, the center ball seat of the guard, and by the end of the rotational movement is not measured by the probe, the shaft tool machine forms a closed mechanism chain: the ball joint Point (bearing) make a lot When the machine tool is positioned, _ 定 香 产 (Cutter locati〇n ρ〇ίη " and 罝 of the tool, its tool center point, a certain position within the standard and a certain point up, when the position is located on the workpiece seat, That is, when the machine has no errors, the tool ::: machine tool is the ideal machine. The position should be the same point. If the tool is defined, the orientation in the workpiece coordinate is the positioning position in the workpiece coordinate 519504 5. Description of the invention (6 ) A vector direction of __, then the center point is at this vector ^ The direction of the south axis coincides with the direction of the position vector. In the tool, it is the direction of the origin of the workpiece coordinate, and the length of the position vector is extended. For example, in the invention, the position measurement probe is in the same position as the positioning probe. For example, the medium-dimensional measuring device is inferior. The three-dimensional quantity, that is, the three-dimensional quantity difference reading value should be Ming Zhongli's corresponding two-dimensional quantity in the invention. The center ball of the extension rod is a physical probe. Using the above method center, when the position of the measuring probe is 'supported', the relationship between the taper of the support rod, the definition of the position of the vector square rod and the center of the closing machine, that is, the center axis of the end of the machine, is the center of the invention. The ball seat coordinate is originally in the workpiece seat toward the center of the ball seat. On the device and the three-dimensional fitting, and three-dimensional and three-dimensional solid points, the machine inside the target and the multi-axis measurement on it are centered. The measurement probe should be taken from the tool in the fitting, at a position. You can use the three-dimensional coordinated machine and three sets without misalignment. The error of the tool probe is set. 2 :: Accompanied by = :! Before the measurement, the three-dimensional measurement probe is firstly measured in three-dimensional measurement; then the probe support rod is installed on the reference surface. There is a known: η 死 'and the center of the mating part from the tool's anchor point: the length of the known wheel direction is defined: three middle: two and a half of the error reading surface of the three-dimensional measuring probe sensor is ordered, and the other, Defining the center of the sphere as wide as 4: the center of the mating part on which the point is initialized, for example. : \ 3-dimensional probe 519504 V. Description of the invention (Ό For example, if the center ball sphere center is within the coordinate of the multi-axis machine tool carrying the workpiece coordinate 台, is the center ball moving or rotating? On the reference surface of the Hanchongwei women's watch for moving or rotating the table, with the matching pieces on the bamboo ball seat of the invention, such as the center circle; certificate center: The table is known in the coordinate system. / '. 的 座 軚When working in an advantageous embodiment of the invention, the 2020 point signal is output in the calibration of the three-dimensional measurement probe: "time trigger" and reset the displacement counter of each measurement axis = this reference zero point to measure the zero point and reference The offset value between the zero points is also positive; the dimensional measurement probe a is measured during the weighting process. The large magnetic ball is maintained by the support of the Yongqiu cave to seal the balance extension rod. In the embodiment of the invention, in the embodiment of the center circle measuring probe extension, the gravity of the long-term magnet attracting the bearing rod and the center-closed mechanism chain is measured in three dimensions to create the end and the system. In the suction of the other ball, in the center In addition to working with shaft Heisei have made measurements of the heart of the ball joint ball seat Preference Preference amount of three-dimensional

C: V In the error measurement, the center of the center sphere is set as the original workpiece coordinate • Dimensional probe error measurement device and method · ptd Page 11 519504 V. Description of the invention (8) points, so it is necessary to refine the workpiece. Example of a good linear shift center ball seat. The center ball seat is designed to move the center sleeve. The center ball seat is equipped with a kinematic axis, such as a test surface. To define this, you can determine this. The center of the ball center of the table 'When there is a reference surface for the workpiece, the geometric dimension is closed'. This reference plane is parallel to the X axis. In addition, the center ball center is at the center, the ball seat is at the rotation coordinate zero point on the multi-axis machine. The coordinate position within the bearing coordinate system. In order to accurately set the coordinate values, the reference surface and the center of the spherical ball and the center of the spherical surface and the coordinate system of the multi-axis machine tool are measured on a three-dimensional measuring bed when the offset table is a rotating table. The center ball seat is designed with a height of automatic centering axis, such as the position on the table. The through hole is fixed to the surface, and the embodiment is to rotate the flat seat. In the slot, there are five mounted on the ball seat and fixed to the reed five-axis machine tool to carry the women's workpiece. The central axis of this central test surface is located on the rotating table. The center hole of the center ball seat is referenced to the preference of the week. In the conventional embodiment, the sleeve with an inner bevel is linearly moved by a shaft or a multi-axis machine tool. The rotary table on which a linear workpiece of a precision multi-axis machine tool is designed is provided with a central 4-hole peripheral surface. It should also be used as a reference for the detection device. It should coincide with the rotation axis. The position of the center circle must be accurately known. A preference ^ is designed with a precision automatic centering mechanism, the f-plane is automatically centered, and the fixed center sphere is' this automatic centering mechanism is an expansion fixed center squeezed on the peripheral surface of the g bevel. Orb

There are other mechanism types, and the workpiece may be in a preferred embodiment, in the middle Λ multi-test surface, in order to move the center ball seat on the workpiece coordinate system on the work table.

519504 V. Description of the invention (9) It is known that the position where the center ball center is fixed on the linear moving table is 'otherwise' so that the 3D measurement probe can be initialized and set the measurement zero point of the 3D measurement probe. Inventive way, create a probe to measure the zero point setting. This probe measurement zero point setting device has one end with the same push-pull interface as the three-dimensional measurement probe, and the other end has a mating piece complementary to the end-piece fitting of the support rod of the three-dimensional measurement probe. The zero point setting device for probe measurement ensures that the central axis of the push-pull passes through the center of the mating part. For this reason, the center of the mating part can preferably be adjusted by its two driving platforms. In order to make it easy to set the two-dimensional measurement probe into the probe measurement zero-point setting device, it is better to set a motion measurement platform that is movable in the orthogonal direction, for example, in the probe measurement zero-point setting device. During calibration, move the center ball to the side position ’so that the 3D measurement probe is inserted, and then move the center ball back to the original measurement zero setting position. Therefore, it is best to have a position reading device on the motion platform. In addition, the precision of general machine tools is in the micrometer range, and the resolution is preferably in the submicron range. The measuring device for measuring the zero point of the probe and the center position of the center ball of the center ball are measured and adjusted on a two-dimensional measuring bed. Since the actual use is in the factory state, in order to avoid errors caused by temperature differences, these = By Qiao Free :: Deformation. Deformation caused by temperature in the axial direction: The thermal deformation compensation is made by the amount of room temperature and device temperature.

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V. Description of the invention (10) The probe measurement zero point setting device determines the tool length when setting the zero point of the three-dimensional measurement probe. Therefore, it is better to set the tool length setting reference on the probe measurement zero point setting. surface. ^ In addition to the above-mentioned three-dimensional measuring probe measuring device and probe measuring zero setting device, the present invention also includes corresponding measuring methods. In accordance with the characteristics of the five-axis mechanism, the positioning or movement path of the five-axis simultaneous motion is best defined on the spherical surface of the spherical contact measurement. In the embodiment of the invention of a partial #, the center of the center ball on the center ball seat is f to measure the center of the semi-sphere, and the distance between the measurement zero point of the measurement probe and the center of the center ball is Fengqing ' 1. Define the semi-spherical surface for measurement, and drive the tool, that is, the three-dimensional measurement probe on the curved path of the measuring surface. The error caused by the positioning and movement of the tool relative to the workpiece can be measured by the three-dimensional measurement probe. Out. The method is: within the hole bearing seat _ on the center of the ball, and record = < 3D knife long base 5 will be nested in the practical three-dimensional cone surface of the tool to measure the probe, the level of the plane to the amount of movement In the case of a detecting machine, in the sensor embodiment, the ternary measuring bed finds the heart line. The center ball table is used to read the center ball and the ball head sensor reads. It is best to adjust the axial direction of the tool to a dimension measurement. The probe measures the center of the inner cone of the two linear ball center position taking devices to set the machine motion to be flat or to measure the zero point with the head to set the movement platform to read the value on the inner cone surface and the center line of the surface to zero. The movement of the three-dimensional platform is performed by the software. The inner cone of the device is fine-tuned. The centerline is the distance of the inner cone bore. The measuring probe is the axial and three conversion meters.

519504 V. Description of the invention (11) Calculation. Drive a multi-axis machine tool during measurement to position or move the measurement zero point of the three-dimensional measurement probe on a defined measurement sphere. In a preferred embodiment, the tool direction is defined on the normal of the sphere. In this way, the assembly error of the relative positioning and movement of the tool and the workpiece can be measured by the three-dimensional measuring probe. The size of the measuring hemisphere is determined by the length of the extension rod. In order to measure the error of different movement positions, it is best to have different lengths of extension rods. In order to make the error measurement have a specific effect, various specific measurement paths can be designed on the measurement sphere. When this measuring device is used for error measurement of a five-axis machine tool, when the center ball is placed on the axis of the rotating shaft, only four axes will move together. Therefore, the installation position of the center ball is preferably offset from the rotating shaft. Set the amount to cause the five-axis simultaneous motion 0 as follows: Figure 1 is a two-dimensional error picture—one is the one in FIG. 1. The two is in FIG. 1.

519504 5. Description of the invention (12) The seat is installed on the rotary table of a 5-axis machine tool; Figure 6 is a measuring hemisphere for error measurement of a 5-axis machine tool; Figure 7 is a combination of the zero point setting device for probe measurement Figure 8 Figure 8 is a detailed view of the tapered bore seat assembly in Figure 7; Figure 9 is a detailed view of the motion platform assembly component of Figure 7; Figure 10 is a detailed view of the center ball assembly of Figure 7; Figure 11 is The three-dimensional measuring probe is combined with the probe to measure the zero-point setting device. Figure 12 is a diagram illustrating the measurement of the center position of the center sphere. Figure 13 is the four measurement paths on the spherical surface. Figure 14 The center ball seat is another application type. Component symbol description 1 3D measuring probe 2 Probe mandrel 3 Extension rod 4 Support rod 41 Sleeve 4 2 Permanent magnet 4 3 Three-point support ball seat 5 Center ball seat

C: \ Three-dimensional probe error measurement device and method. Ptd page 16 519504 V. Description of the invention (13) 5 1 Center ball 5 2 Extension rod 5 3 Bolt 54 Base 5 5 Inner cone hole 56 Groove 5 7 Outer periphery Face 58 inner bore surface 59 sleeve 5 1 2 spherical center 5 1 3 cylindrical centerline 5 1 4 spherical centerline and cylindrical centerline 5 1 5 reference surface 5 1 6 reference surface 5 1 7 reference surface 518 reference surface 6 fixed Screw 61 Nut 6 2 Outer cone 63 Screw 64 Washer I 0 Probe measuring zero setting device II Inner taper socket 111 Knife length setting reference surface

(:: \ Three-dimensional probe error measurement device and method.ptd page 17 519504

11 2 Inner cone surface 11 3 Centerline 1 3 Side pillars 14 Base 1 5 Linear motion platform group 1 51 Motion platform 152 centimeters 1 6 Linear motion group 1 6 1 Motion platform 162 centimeters 17 Extension rod 1 8 Center circle Ball 1 81 Ball center 19 Bolt One In Figure 1, the components of this device can be seen, including three-dimensional measuring clams, probe mandrel 2, extension rod 3, support rod 4, center ball seat 5, clothes pin screw 6, and A computer that receives two-dimensional measurement probe displacement measurement signals. In the embodiment, the center ball seat 5 is fixed on the rotary table of the machine tool. In another embodiment, the center ball seat 5 is fixed to a mobile worker '-see Fig. + Shisuo *, which will be described later. z, dimension 'The three-dimensional measuring probe used by a general machine tool is similar to that of the master. Here it is BT40, which is fixed on the spindle. The three-dimensional measuring surface is pushed.

〔: \ Three-dimensional probe error measurement device and method.ptd page 18

519504 V. Description of the invention (15) The housing has a three-dimensional phase measuring device. Probes with a difference of 90 degrees are using LVDT bit voltage signals. The three Ren i shaw SP2-1 are combined, and the extension of the spindle 2 of the head 1 and the outer 3D measuring probe is in the general direction of the spring preloaded 3D measuring probe. The other end of 3 has a locking thread with j, and the other precision lock The position value of this relative movement is sensed by displacement :: For optical encoders, the audio-visual film of the position measurement output, "丨 Ϊ is a sine wave with a difference of 90 degrees, if three-dimensional measurement Bei: When performing relative displacement measurement, the output is dimension 1. The probe can be a commercial 3D probe, for example. In order to keep the center ball 5 丨 tightly connected to the support rod 4 = 3 deformation caused by the measurement system error, the three-dimensional measurement The smaller the preload of the retaining spring in the two directions, the better. If it is located in a certain direction, such as the vertical direction, the weight of the mandrel 2, the extension rod 3, and the support rod 4 can be balanced here. The mandrel 2 and the extension rod 3 It is connected by threads. The extension rod-the positioning surface of the precision measuring probe mandrel 2 has a screw hole at the end, and the screw at one end of the support rod 4 can be connected to it. The second display does not support the rod 4 and the end ball contact point. In the bearing embodiment, the support rod 4 is composed of a sleeve 41 and a permanent magnet fixed in the sleeve. The iron 42 is composed of a three-point support tee. The center ball seat 5 is provided with a high-precision center ball 5 丨, which is connected to the two-point support ball seat 4 3 of the support cup 4 by magnetic attraction, and the magnetic force of the permanent magnet is large enough to make the support rod 4 It can keep close contact with the center ball 5 丨. 3 and 4 are schematic diagrams of the center ball seat 5 and the fixed screw 6. The center ball seat 5 is fixed on the rotary table of the machine tool. The center ball seat 5 is composed of a center ball 51, an extension rod 52, a bolt 53 and a base 54. The base

(:: \ Three-dimensional probe error measurement device and method. Ptd page 19 5195504. Invention_ (16) " ------ 54 is provided with a sleeve 5g on the side opposite to the center ball 51 , Which includes the inner and groove 56; the fixed screw 6 is composed of a nut 61, an outer cone 62, and a J-ring 64, wherein the outer cone 62 has the same taper as the inner cone hole 55 and the outer cone 6 is pulled down to make the outer cone 6 2 is closely matched with the inner taper hole 5 5, and the sleeve and the inner taper hole 55 are enlarged, so that the outer peripheral surface 57 of the sleeve 59 and the surface 5 8 of the rotary table are closely connected, and the centering and locking are automatically performed. FIG. 5 is a combination diagram of the above-mentioned three-dimensional error measuring device installed on a five-axis machine tool. The three-dimensional measuring probe is installed on the main shaft of the machine tool, and the center ball seat 5 is placed on a rotating shaft rotating table. The installation method here is "the center ball center 51 is offset from the center axis of the rotary table. There is a reference surface 515 on the side, see Figure 12 for adjusting the center ball seat during installation to make the center circle The reference surface 515 of the tee 5 is parallel to an offset linear axis such as the X axis. The center ball 51 may also be fixed on the extension rod 3 and the support rod 4 may be fixed On the center ball seat 5, the main point is that a ball seat 4 3 and a center ball 5 1 are provided between the probe end and the workpiece end of the three-dimensional measurement. The center ball 5 1 has a center 5 1 2 and is defined as a semi-spherical surface. The center, center ball 5 1 ball center 5 1 2 to the zero point of the three-dimensional measuring probe is the radius of the semi-spherical surface, as shown in Figure 6. The center ball is tightly sealed in the tee, and There is no interference when measuring the relative motion of the hemisphere space. In Fig. 7, Fig. 8, Fig. 9 and Fig. 10, it can be seen that the probe measurement zero point setting

519504 V. Description of the invention (17)-Fixing device 10 and its components, including inner cone hole seat 丨 丨 side pillar 13, base 14, linear motion platform groups 15 and 16, extension rod 17, center ball 18 and bolts 1 9. This inner tapered hole seat is the same as the inner tapered hole commonly used to measure the length of a knife. The seat is the same, with a tapered surface push. Here is BT40. This tapered surface push has the manufacturing precision of South, and can be matched with the push and pull of the three-dimensional measuring probe concentrically, that is, the inner tapered hole mandrel of the inner tapered hole socket 11 can be regarded as the three-dimensional measuring probe push heart $. The cutter length setting reference plane U1 on the inner tapered hole socket U is perpendicular to the inner shaft of the inner tapered hole. When the three-dimensional measuring probe is installed on the inner tapered hole socket 11, it can be defined from the tool length setting reference plane 1 to the zero point of the three-dimensional measuring probe measurement as the tool length setting value of the CNC machine tool. There is a side pillar 13 at one end of the white tapered bore socket 11 and the bolt is used to lock it. Because the side pillar 13 has a considerable length, the adjustment of this device is the standard for temperature and humidity in the measurement laboratory. It will be implemented under the conditions. After the adjustment, this equipment will be carried to the work site. The temperature and humidity will be the same as the conditions during the original adjustment. In order to maintain the accuracy after adjustment, the above-mentioned factors affecting the accuracy of measuring the zero point of the probe :: clothing set 10 will be reduced, the material of the device should use the material of the thermal expansion system. In addition, this probe measurement zero setting device 10 is best equipped with a counter to avoid thermal expansion errors in the lateral direction, and thermal errors in the axial direction can be compensated by software through temperature measurement. The other end of the moving side pillar 1 3 is also combined with the base i 4 by bolts. The base 4 is a fixed seat of two linear motion platform groups 15 and 16, and the base 14 is flat and linear. Group 15 is bolted together. Linear motion platform group 1 of 5, 16

519504 V. Description of the invention (18) ^-$ -bit accuracy and reproducibility are high, and the available resolution is sub-micron grade t card 1 5 2, 1 6 2 to manually drive the motion platform 丨 5 丨, i 6 1; also profit = servo motor drive, but the cost is higher. In this embodiment, the linear motion platform groups 1 ^ 5, 16 are locked with bolts, and the two are vertically overlapped and combined. The linear motion ΐ t group 丨 6 is provided with an extension rod 17 which is long enough to facilitate the installation and removal of the three-dimensional measuring probe. A matching piece is provided at the end of the extension rod 丨 7, here is the center ball 1 8 ′. This center ball 丨 8 and the support rod 4 ′ at the end of the extension rod 3 of the three-dimensional measuring probe are magnetically attracted to each other. The calibration method of this probe measuring zero-point setting device 10 is: firstly place the probe measuring zero-point setting device 10 on a high-precision three-dimensional measuring bed, and first set the length of the knife on the inner tapered hole socket 11 to the reference surface丨 11 is adjusted to be parallel to any movement axis of the three-dimensional measuring bed. This can effectively reduce the error caused by measuring the position of any coordinate 'because the probe's movement direction is not perpendicular to the workpiece contact surface when it touches the workpiece. Then use the coordinate measurement to find the center line 11 3 of the inner conical surface 11 2 (BT40 or other taper), and set the intersection of this center line 11 3 and the tool length setting reference surface 111 as the zero point of the working coordinate system, and This center line is one axis of the working coordinate system, and then the coordinate position of the center ball 18, the center of the ball 18, and 1 is measured. If the center of the ball 1 81 is not on the center line 11 3, then the position of the center of the ball 1 81 can be adjusted by using two linear motion platform groups 1 5 and 16 according to the offset until the center line 11 3 passes through the center of the ball 1 81. Record the distance between the knife length setting reference plane 111 and the center of the ball 1 8 1 on the center line 11 3 and the readings of the linear motion platform group 15 5, 16 centimeters 1 5 2 and 16 2 at this time.

c: \ Three-dimensional probe error measurement device and method · ptd page 22 519504 V. Description of the invention (19) At the machine site, put the three-dimensional measurement probe into this setting device, as shown in Figure 11. In order to avoid interference, before the 3D measurement probe 1 is placed in the setting device, the linear motion platform group 丨 6 of the motion platform 丨 6 1 can be used to move the center ball 1 8 side to an appropriate distance before placing the 3D measurement probe. 1. Bolt 1 9 Fix the 3D measurement probe 丨 so that the 3D measurement probe 1 is pushed into the inner cone surface 11 2 on the inner cone hole socket 11 and then the center of the ball is centered; [8 1 调Return to the center line of the inner cone hole, so that the supporting rod 4 ball seat of the three-dimensional measuring probe 1 is closely matched with the center ball 18. Then set the reading value of the 3D measuring probe 1 measurement system in the computer to zero 'to achieve the setting of the 3D measuring probe 1 measurement zero point. Before the error measurement of the five-axis machine tool, the position of the center ball 5 1 and the center of the ball 5 1 2 within the coordinate system of the rotary table of the machine tool should be accurately found. When the center ball seat 5 is mounted on the rotating table of a machine tool, the method is shown in Figure 12. Place the center ball seat 5 on a three-dimensional measuring bed so that the reference surface 515 and the three-dimensional measuring bed One axis is parallel, and the center point of the cylindrical centerline 5 1 3 and the reference plane 5 1 6 is the origin of the working coordinate system, and the cylindrical center line $ 1 3 is one axis of the working coordinate system. Measure the center ball 5 i The vertical distance R from the center of the sphere 5 1 2 to the cylindrical centerline 5 1 3, the angle A between the vertical line of the center of the sphere 5 1 2 to the cylindrical centerline 51 3 and the reference surface 5 1 5 and the reference surface 51 6 to the center of the sphere 5 1 2 The height 在 on the centerline of the cylinder 5 1 3. Then place this device on the rotating table of the machine tool, and adjust the reference surface 5 1 5 to be parallel to the X axis of the machine tool by using a dial indicator attached to the main shaft, and then pull the screw 6 3 downward to make the outside The downward movement of the cone 6 2 causes the inner cone hole 55 to expand outward, so that its outer peripheral surface 57 and the inner surface of the center of the rotary table 5 8 are closely matched and automatically centered. The center of the center ball 5 1 2 is opposite to

CΛ three-dimensional probe error measurement device and method.ptd m

Page 23 519504 V. Description of the invention (20) The position of the coordinate system of the five-axis machine tool can be set to set the center circle of the center ball seat 5 when the three-dimensional error measuring device is used for error measurement of the multi-axis machine tool. The sphere 5 1 sphere center 5 1 2 is determined as the measurement spherical sphere center, and the distance from the center sphere sphere center 5 1 2 to the zero point measured by the three-dimensional measurement probe is the radius, which defines the measurement hemisphere. In addition, the direction of the tool or cutter is defined as the direction of the spherical normal 'and then the multi-axis machine tool is driven to make the three-dimensional measuring probe measure the zero point to move or position on a predetermined measuring path of the spherical surface. The displacement sensor of the two-dimensional measuring probe outputs the displacement deviation of three degrees of freedom for measurement. The zero-point setting device for measuring the probe is used to set the three-dimensional measuring probe: After that, the main shaft and the workbench are connected by the above components. , Forming a closed mechanism chain, the three-dimensional measuring probe invades the positioning error of the measurement starting point. t three-dimensional quantity;;: Positioning of the taxi machine When the spherical surface is moving, the positioning error of the multi-axis machine tool is measured by the displacement sensor at zero. p can be measured by a two-dimensional measuring head on a multi-axis simultaneous motion machine tool. Error measurement is set on the axis of rotation, such as the axis of the C-axis. The source can have four simultaneous motion axes, for example, the C axis is offset by a distance, 9. The path of rotation of the center sphere 51 including the path of the meridians on the semi-spherical surface will move simultaneously on the five axes. The circular path jade, ′, spring path, spiral path, and U path where the special sphere intersects with any plane are shown in Figure 13.

519504

In the above embodiments, the workpiece is a fixed-axis simultaneous movement, such as a workpiece on a rotary table of a five-axis simultaneous machine tool, but drives the tool outline, or == when not driving the tool and the workpiece, the tool and / The masonry and cymbal / shafts are driven by the construction type, and the corresponding center ball seat and three or three denier workpieces are designed for installation and positioning. Towel center, B1 ball seat, and three-dimensional measurement probe ^ board head are fixed and installed above The example illustrates that the two-dimensional measuring probe 1 created by this invention is a general tool 1 ^ 'BT40 ^ mounting surface; in addition, the measuring path can also be a spherical surface ^ doutan = proper = the measuring signal of the measuring probe is also It can be output in three dimensions, = path '. 'The movement platform of the head zero measurement setting device 10 can also convince the motor drive to replace the manual centimeter card to make the measurement zero setting ;: * / J ^ 5 * " J, 512 position can also be measured by other methods Decide on a three-dimensional measuring bed. In addition, the above error measuring device is applied to Γ γ, ZA, c, the five-axis machine and machine of the mechanism, and the five-axis or multi-axis machine tool can be designed accordingly when the center ball seat is And three-dimensional measuring probes are fixed at the two ends of the tool, respectively. The two ends are connected by the three-dimensional measuring probe and the center ball seat 5. The machine tool forms a closed mechanism chain, and then drives the multi-axis machine tool. The error caused by the positioning and movement of the measuring tool relative to the workpiece in space ^. in

C: \ 3D dimensional error control device and method.ptd Section I ---

Claims (1)

519504 6. Scope of patent application The coordinates of the ball (5 1) and the center of the ball (5 1 2) installed on a linear or rotary table are known. 4. The device as described in item 1 of the scope of the patent application, characterized in that the center ball seat (5) has a reference surface designed for a rotary table for a multi-axis machine tool to carry a workpiece to accurately set the center ball seat ( 5) The center of the fitting on the coordinate position in the coordinate system of the workbench. 5. The device as described in item 4 of the scope of patent application, characterized in that the center ball seat (5) is provided with an automatic centering fixing mechanism designed for the center hole of the rotary table for the multi-axis machine tool to carry the workpiece, so that the center The ball seat (5) is accurately fixed in the positioning reference center hole of the rotary table of the multi-axis machine tool. 6. The device according to item 4 of the scope of patent application, characterized in that the automatic centering mechanism is a groove (59) which is slotted on the peripheral surface and is fixed and expanded with an inclined surface. 7. The device as described in item 4 of the scope of patent application, characterized in that the center ball seat (5) has a reference plane (5 1 5), and this surface is parallel to one of the linear motion axes of the machine during installation. 8. The device as described in item 4 of the scope of patent application, characterized in that the center ball seat (5) has a reference plane (5 1 6) to define that the center ball center (5 1) is automatically centered Axial height. Page 27 519504 VI Scope of patent application 9 · The device described in item 1 of the scope of the U.S. patent application, characterized in that the center ball seat (5) has a mounting reference surface (5 丨 5, 5 1 7, 5 1 8) to precisely fix the center ball seat (5) on the linear moving table of a multi-axis machine tool. I 0 · The device as described in item 1 of the aforementioned patent application range, characterized in that a permanent magnet (4 2) is provided in the ball seat (4 3) at the end of the support rod (4) to attract the central ball (5 i). II. The device according to item 1 of the aforementioned patent application range, characterized in that each measuring axis of the three-dimensional measuring probe has an output reference zero signal. 1 2 · The device described in item 1 丨 of the aforementioned patent application scope, characterized in that: the offset value between the reference point formed by the zero point signal of each measuring axis of the three-dimensional measuring probe and the measured zero point is known \ 13 Taxi • The device described in item 11 of Shenjing's patent scope is characterized in that each measurement axis of the three-dimensional measurement probe is triggered by a reference zero signal, and the measurement values of the displacement counters of each measurement axis are reset. The device described in the first item of the patent scope of Wei Jiao ’s feature is that the two points of the summer measurement probe are set before measurement to perform the absolute error measurement. Page 28 519504 VI. Patent application scope 1 5. The device described in item 1 of the patent application scope is characterized in that the center ball (5 1) is not on the center axis of the center ball seat (5). 16 The device according to item 1 of the scope of patent application, characterized in that the center ball (5 1) is on the center axis of the center ball seat (5). 1 7 · The device described in item 1 of the scope of patent application, characterized in that the measuring device is compensated for thermal deformation. 1 8 · —A device for zero-point correction of a three-dimensional measuring probe, the components of which include:-an inner tapered bore socket (1 1), which is pushed concentrically with the three-dimensional measuring probe; ~ a side pillar ( 1 3), which fixes the side of the inner cone hole socket (ij);-the base (14), which is at the other end of the side pillar (1 3), and is opposite to the inner cone hole socket (11); Two vertical overlapping combination linear motion platform groups (5i, seat (14); 'you f — extension rod (17), which is fixed on the linear motion platform group (i5, i6), and, on the extension rod (1) The center sphere at the other end (1 8). 1 9. The device described in item 18 of the scope of patent application, which is characterized by 519504 6. Scope of patent application The hole socket (11) is provided with a reference plane (m) for setting the knife length. 20. The device according to item 18 of the scope of patent application, characterized in that: the motion platform (151, 161) of the linear motion platform group (15, 16) is provided with a position reading device. 2 1. — A method for setting the zero point of a three-dimensional measuring probe, which is-placing the probe measuring zero setting device (1 0) on a three-dimensional measuring bed, and measuring its inner cone surface (11 2) the centerline (113);-using the two linear motion platform groups (1, 15, 6), adjust the position of the center of the center ball (1 8) to the center line (11 3); -Measure the distance from the reference plane (111) to the center of the sphere (1 81) along the center line (11 3) of the length of the measuring knife, and record the reading of the displacement measuring device (1 52, 1 62);-At the machine site, The three-dimensional measuring probe (1) is inserted into the measuring zero setting device (1 0) of the probe, and the three-dimensional measuring probe is pushed and pushed to the inner conical surface (11) of the inner conical hole socket (11) by bolts (19). ) Closely;-Connect the center ball (1 8) and the ball seat (43) of the support rod (4) of the three-dimensional measurement probe (1);-Set the measurement value of the three-dimensional measurement probe to zero to complete the three-dimensional measurement Setting of probe measurement zero point. 2 2. —A tool for measuring the spatial positioning of a multi-axis machine tool relative to a workpiece Page 30 519504 6. The scope of patent application and the error generated during the movement, its △ I ball seat (5) is fixed to the multi-axis machine tool to rotate or work linearly / ^ set / input on the machine CN (: controller The coordinate position of the center ball (51) on the workbench; ί 2: 3D measurement probe (1) for measuring zero point is placed in a multi-axis tool: the 2D measurement probe is used to confirm the measurement The relationship between the measuring coordinate system and the linear coordinate system of the machine; a connecting rod (4) at the end of the three-dimensional measuring probe (1) and the center on the worktable = the center ball of the ⑸), so that the spindle of the multi-axis machine tool and The working mouth forms a closed mechanism chain. With the center of the circle ~ 5 sphere (5 i 2) as the center of the circle, a measuring hemisphere = is defined, and its radius is equal to the center of the circle (512) to the measuring point of the three-dimensional measuring probe (1). Distance; • If the multi-axis machine tool is moved, the three-dimensional measuring probe (丨) is moved or positioned on a predetermined path and direction of the measuring sphere; a computer reads and records the measurement error value of the three-dimensional measuring probe. 2 3 · The method described in item 22 of the patent application scope, which is characterized by: · a measuring probe measuring coordinate system is in line with the machine's linear coordinate system ^ line 1 three-dimensional 24 · as described in the patent application scope item 22 The method is characterized in that the path is an arbitrary meridian path on the spherical surface. 25. The method according to item 22 of the scope of patent application, characterized in that, 519504 6. Scope of patent application The path is an arbitrary parallel path measured on the sphere. 2 6. The method as described in item 22 of the scope of patent application, characterized in that the measurement path is a spiral path that measures any rising or falling surface on the sphere. 2 7. The method according to item 22 of the scope of patent application, characterized in that the measuring path is a measuring circular path where the spherical surface and the plane intersect. 2 8. The method according to item 22 of the scope of patent application, characterized in that the direction of the three-dimensional measuring probe during measurement is defined in the normal direction of the measuring sphere. Page 32