TW519504B - 3D errors measurement device and method - Google Patents
3D errors measurement device and method Download PDFInfo
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- TW519504B TW519504B TW90104954A TW90104954A TW519504B TW 519504 B TW519504 B TW 519504B TW 90104954 A TW90104954 A TW 90104954A TW 90104954 A TW90104954 A TW 90104954A TW 519504 B TW519504 B TW 519504B
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519504 五、發明說明(1) 參考文獻 專利 US04, 435, 905 3/ 1 984 US05, 214, 857 6/1993 US0 5, 428, 446 6/ 1 995 US05, 533, 27 1 7/ 1 996 US05, 3 1 3, 403 3/ 1 994 US05, 841,668 1 1 / 1 998 US06, 049, 377 4/2000 其它出版文獻519504 V. Description of the invention (1) Reference patents US04, 435, 905 3/1 984 US05, 214, 857 6/1993 US0 5, 428, 446 6/1 995 US05, 533, 27 1 7/1 996 US05, 3 1 3, 403 3/1 994 US05, 841, 668 1 1/1 998 US06, 049, 377 4/2000 Other publications
Bryan33/ 1 8 1R McMurtry et al. 33/502 Ziegert et al. 356/358 Callaghan, Jr. 33/502 Fujita et al.. 364/474. 26 Pahk et al.364/551.01 Lau et a 1. "Methods for performance Evaluation of Computer Numerically controlled Machining Centers", ASME B5. 54-1992 本發明涉及一三維誤差量測裝置及相屬之量測方法, 用於直接量測電腦數值控制(CNC )多軸工具機工具或刀 具相對於工件在空間定位及運動之誤差。此處所稱之多軸 工具機器包括電腦數值控制之五軸同動工具機、平行連桿 機構工具機、機器人,及其他藉由五軸以上同時驅動,以Bryan33 / 1 8 1R McMurtry et al. 33/502 Ziegert et al. 356/358 Callaghan, Jr. 33/502 Fujita et al .. 364/474. 26 Pahk et al. 364 / 551.01 Lau et a 1. " Methods for performance Evaluation of Computer Numerically controlled Machining Centers ", ASME B5. 54-1992 The invention relates to a three-dimensional error measurement device and related measurement methods, which are used to directly measure a computer numerical control (CNC) multi-axis machine tool The error of the positioning or movement of the tool or tool relative to the workpiece in space. The multi-axis machine tools referred to here include computer-controlled five-axis simultaneous machine tools, parallel link mechanism machine tools, robots, and other machines driven by more than five axes at the same time.
c:\三維探頭誤差量測裝置及方法.ptd 第5頁 519504 五、發明說明(2) ^工具或刀具相對於工件運動或定位於預定路徑 機器。 〃 u < 電$數值控制工具機在機體組裝後,會依一定檢驗標 私序,對各軸運動組件進行精度檢驗,例如床台之垂 直度、、平行度、主軸之偏擺等(ASME Β5·54 )。為增進各 線丨生運動控制軸的定位精度,會以雷射干涉儀進行誤差量 數據經統計分析後可得節距誤差及背隙誤差,^將豆 輸入控制器中進行補正。旋轉運動控制軸之定位誤差則^ j例如光學多面鏡進行量測,其統計分析結果也輸入控 裔内加以補正。 高性能之CNC控制器中,除了傳統之節距及背隙誤差 補正外,亦可建立更完整之機器幾何誤差模型,對部份或 全部之靜態幾何誤差及熱變型誤差,進行誤差補正。 曰在美國專利US06, 〇49, 377中為一雷射量測裝置,可同 時量測線性運動軸之六項定位誤差,包括軸向位移誤差, 另们孟直方向之直線度誤差,及三個轉動誤差。 在美國專利US04, 435, 905及US 05, 2 1 4, 857中可知雙球 才干循圓畺測儀(DBB ),用來檢驗三軸工具機工作台靜態 及動悲運動誤差,包括幾何誤差如床台垂直度、背隙及動 態誤差如失位、潛行、驅動參數不匹配等,均可從量測數 C:\三維探頭誤差量測裝置及方法.ptd 第6頁 5l95〇4 五、發明說明⑶c: \ Three-dimensional probe error measurement device and method. ptd page 5 519504 V. Description of the invention (2) ^ The tool or tool moves relative to the workpiece or is positioned on a predetermined path Machine. 〃 u < After the machine is assembled, the numerical control machine will check the accuracy of the motion components of each axis in accordance with a certain inspection standard, such as the verticality, parallelism, and deflection of the spindle (ASME, etc.). Beta 5.54). In order to improve the positioning accuracy of the linear motion control axes, the laser interferometer will be used to calculate the error data. After statistical analysis, the pitch error and backlash error can be obtained. ^ Enter the beans into the controller for correction. The positioning error of the rotary motion control axis is measured using an optical polygon mirror, and the statistical analysis results are also input into the controller for correction. In the high-performance CNC controller, in addition to the traditional pitch and backlash error correction, a more complete machine geometric error model can also be established to correct some or all of the static geometric errors and thermal deformation errors. In the US patent US06, 〇49, 377 is a laser measurement device that can simultaneously measure six positioning errors of a linear motion axis, including axial displacement errors, and straightness errors in the straight direction, and three Rotation errors. In the US patents US04, 435, 905 and US 05, 2 1 4, 857, it is known that the dual-ball talent circularity measuring instrument (DBB) is used to check the static and dynamic motion errors of the three-axis machine tool table, including geometric errors. Such as bed verticality, backlash and dynamic errors such as misalignment, stealth, driving parameter mismatch, etc., can be measured from the C: \ three-dimensional probe error measurement device and method.ptd page 6 5195504 Description of the invention
據中辨識出。雖然,循圓量測儀H 統,复& ^ θ 圓里成1儀疋一相當好之誤差量測系 用在^是只能反應循圓之徑向誤差量,以此量測裝置 軸工具機之誤差量測時,σ s 之〜維距離變化。 -% s測到工具與工件間It was identified in it. Although, the circular measuring instrument H system, complex & ^ θ circle into 1 instrument, a fairly good error measurement system is used to measure the axis of the device. During machine tool error measurement, the dimensional distance of σ s varies. -% s between tool and workpiece
Pr〇be目)刖市售CNC工具機三維掃描式探頭(Scanning 麵:維浐:接觸/式使探頭感測器在三維方向偏移。此 90度之二丄通常採用光學增量編碼器,輸出二相位差為 ‘i 1波量測訊號。另,,也可能使用線性ίϊ 此類:、LVDT),輸出與位移變化成比例之電壓:ί” 置灰老φ Η用於被動I式之相對增量量測,故均i >考零點’也沒有相對應之參考零點訊號輸出。-未設 桿,頭量測時’在三維探頭上安裝不同長户,、 一古梓上鳊有一螺紋可與探頭固定,測桿下沪則又之剩 向精度之圓球。然而, 而、^配合有 線一妒而上 仕列幹鎖固後,探頭錐唐沾‘ 不通過圓球的球…測桿 :C、 心面至球心的距離)由於裝配的不精綠因素;端鎖 在里測探頭座標系内之位置 /、圓球球 探頭在作A㉝γ t 無法確疋。僅管如此,=紐 相對之料’只作相對位移量測,;Ϊ 1之、里汛唬即可滿足應用上的需求。 輪出 之安二軸CNC工具機之操作多為相對方式,工件在庆A 之女裝位置i甬堂LV盡、真加L 丨卞任床台卜 k㊉以+迖态或量測探頭,以軸向上 一人夕万向觸Pr〇be head) 刖 3D scanning probes (Scanning surface: Wei 浐: contact / type) of commercially available CNC machine tools to offset the probe sensor in the three-dimensional direction. The two 90-degree angles usually use optical incremental encoders. The output two phase difference is' i 1 wave measurement signal. In addition, it is also possible to use linear ίϊ This type :, LVDT), the output voltage is proportional to the change in displacement: ί ”Put gray old φ Η is used for passive I type Relative incremental measurement, so there is no corresponding reference zero signal output in the test zero point.-No rod is set, and when measuring at the head, different long-range households are installed on the three-dimensional probe. The thread can be fixed with the probe, and there is a ball with a leftward accuracy under the measuring rod. However, after the ^ and the cable are jealously locked, the probe cone does not pass through the ball ... Rod: C, the distance from the center surface to the center of the ball) due to the unrefined green factor of the assembly; the position of the end lock in the coordinate system of the measuring probe // the ball probe cannot be determined as A㉝γ t. Just so, = Newton's relative materials' are only used for relative displacement measurement; Ϊ 1 The operation of the two-axis CNC machine tool that is turned out is mostly a relative method. The workpiece is in the LV position of Qing A, i. Test probe with one-axis universal contact
C ·· \三維探麟差量職置及方法⑽ 第7頁 519504 五、發明說明(4) 發(Touch)得到,並輸入CNC中設定工件座 行NC加工。在此,工件座標與機器軸座標之相對關係可 量出’機器機構中無其他未知或不 工件㈣常有額外的兩個旋轉軸,使工具能相對 疋 壬位置及方向上。此時,因機哭麵庙;):Φ愈 有ΐί”;雜之機構轉換關係,:需有確: 會二;;而=:轉轴間之線性及轉動誤差*,其誤差 由於五軸工具機多由二/ & 干涉儀加以量測,轉動軸之節距 以量測,但多軸同動時之機數#二 光學多面鏡加 之量測方法。多軸同動後,工^ =差,則未有簡單可行 動之靜/動態總成三維誤差,/、/目對工件的定位及路徑運 運動及空間限制,迄今仍去又限於工具與工件之相對 法。 未有直接量測其誤差的量測方 在前一屬同一申請人之庐 華民國專利11丨6 86號),以=5、:球1測裝置專利中(中, 具機定位及運動之三維誤差了維置測探頭量測五軸同動工 中心圓球球心在工件座標内但因底座無特定置放位置, 、之位置為未知,另外,延伸桿 C:v 、維探頭誤差量測裝置及方法.ptd 第8頁 519504 五、發明說明(5) 末端球承中心在探頭座標系内 統不能直接量出機器起始量測二為ί知,因而,此系 軸工具機定位及運動時,相 疋位决差,只能量測五 透過特殊量測路徑,建立誤罢=始量測點之定位誤差,再 而後异出機器起始量測點之、,進行置測數據分析, 為複雜,所得結果受到處理方差。此誤差分析過程極 万式的影響。 因而,本發明之任務是, 曰 法,以直接量測多軸工具機工一 I測裝置及相應之方 定位及運動誤差。 一或刀具相對於工件之三維 本任務以發明方式,藉一二 、 裝置包括固定在五軸或多軸工^機【測裝置加以解決,此 頭,及固定在多軸工具機承工、軸上之二維量測探 之中心圓球座,量測時,以發 之移動或轉動工作台上 座標原點,定位點及方向,‘ —2 f法,定義刀長,卫件 中心圓球座,藉轉動運動不受測探頭支承桿末端盥 軸工具機形成一封閉之機構鏈:之球接點(軸承),使多 多軸工具機定位時,_定香产 (Cutter locati〇n ρ〇ίη"及罝之工具,其工具中心點, 標内之一定位置及一定指向上,告、夕曰向破定位在工件座 時,亦即機器無誤差時,工具中:::工具機為理想機器 位點應為同一點。若定義工具 ^共此工件座標内之定 〃向為工件座標内定位位置 519504 五、發明說明(6) 一 __ 之向量方向,則 心點於此向量^南具軸向與位置向量之方向重合,工具中 即與工件座標原點方向,延伸位置位置向量之長度, 在此發 代工具,並 心’例如中 此發明中為 及此定位位 量測探頭, 件,例如中 維量測裝置 差,三維量 亦即三維量 差讀值應為 明中利 在發明 心圓球 二維量 置相應 延伸桿 心圓球 均為理 測探頭 測探頭 零。 用上述 之方法中心, 測探頭 之位置 ’支承 ’連成 想時, 支承桿 錐度中 關係, 中以中 定義工 ’定位 向量方 桿及中 封閉機 亦即機 末端之 心軸線 以發明之 心圓球座 件座標原 在工件座 向’如此 心圓球座 構鏈。在 器及三維 配合件中 上,且三 三維量 上實體 點,將 標内之 機器即 及其上 多軸工 量測裝 心,應 維量測 測探頭取 配合件中 工具,在 一位置, 可藉三維 之配合 具機及三 置均無誤 位在工具 探頭之誤 始設二::伴在=:!測之前,三維量測探頭先加以初 在三維量二;則探頭支承桿 裝參考面有一已知:η亡’且配合件中心距工具安 點之:知輪向長度處,被定義:三中 :二三維量測探頭感測器之誤差讀值面之半 為令,另彳,為準4定義中心圓球 广:點被起始化 上之配合件中心,例 。:\三維探頭 519504 五、發明說明(Ό 如中心圓球球心在多軸工具機承載工件之 台座標糸内之座標值,中心圓球座 動或轉動 么今叶有安梦夂I ^义 上針對移動或轉動工作 台汉冲韦女表參考面,配合發明之 竹 球座上之配合件中,。,例如中心圓;證中心: 台座標系内為已知。 / '。之座軚值在工作 在一有利之發明實施例中,二 零點信號,在三維量測探頭之校:時輸出” 觸發並重置各量測軸位移計數器之=此參考零點信唬 量測零點與參考零點間之偏移值,也;^正;維量測探頭 a在权正過程中量出。 附磁力大 圓球被永 球穴之支 台維持封 衡延伸桿 思義之五轴 最好以球軸 明實施例中 ,在中心圓 測探頭延伸 實施例中, 於三維量測 久磁鐵吸著 承桿與中心 閉之機構鏈 之重力外無 為造 末端與中 制,在一 不受限制 心圓球, 穴。在另 圓球之吸 力,中心 程中,具 軸與工作 成除了平 成有量測 心圓球座 偏好之發 之球接點 在三維量 偏好之C ·· \ Three-dimensional exploration of the difference position and method ⑽ Page 7 519504 V. Description of the invention (4) Get (Touch), and enter the workpiece set in the CNC for NC machining. Here, the relative relationship between the workpiece coordinate and the machine axis coordinate can be measured. There are no other unknown or non-existent workpieces in the machine mechanism. There are usually two additional rotary axes, so that the tool can be in the relative position and direction. At this time, the temple was crying because of the machine;): Φ is more and more "; the transformation mechanism of the miscellaneous mechanism is: need to be sure: will be two ;; and =: the linear and rotational error between the rotating shafts *, the error is due to the five-axis Machine tools are mostly measured by two & interferometers, and the pitch of the rotating axis is measured, but the number of machines when multi-axis simultaneous movement #two optical polygon mirror plus the measurement method. After multi-axis simultaneous movement, the work ^ = Poor, there is no simple actionable three-dimensional error of the static / dynamic assembly, /, / the positioning of the workpiece and the path movement and space limitations of the workpiece, so far it is still limited to the relative method of the tool and the workpiece. There is no direct quantity The measurement method for measuring the error is in the previous patent No. 11 丨 6 86 of the Republic of China, which belongs to the same applicant. In the patent for measuring device 5 =: ball 1 (medium, the three-dimensional error of the machine positioning and movement is dimensioned. The measuring probe is used to measure the five-axis simultaneous construction center. The center of the ball is within the workpiece coordinates, but because the base does not have a specific placement position, the position of is unknown. In addition, the extension rod C: v, dimension probe error measurement device and method. ptd Page 8 519504 5. Description of the invention (5) The end ball bearing center cannot be within the probe coordinate system. The measurement of the machine's initial measurement is known. Therefore, when the machine tool is positioned and moved, the relative positions are different. Only five can be measured through a special measurement path to establish a false strike = initial measurement point. The positioning error is then different from the initial measurement point of the machine, and the analysis of the measured data is complicated, and the obtained result is subject to the processing variance. This error analysis process is extremely affected. Therefore, the task of the present invention is, Said method is to directly measure a multi-axis machine tool-I measuring device and the corresponding square positioning and motion error. One or three-dimensional of the tool relative to the workpiece. This task is invented by means of one or two. The device includes fixed on five or more axes. Axis machine ^ machine [measurement device to solve this head, and the center of the two-dimensional measurement probe fixed on the shaft of the multi-axis machine tool, the center of the ball seat, when measuring, move or rotate the table Coordinate origin, positioning point and direction, '— 2 f method, define the knife length, the center ball seat of the guard, and by the end of the rotational movement is not measured by the probe, the shaft tool machine forms a closed mechanism chain: the ball joint Point (bearing) make a lot When the machine tool is positioned, _ 定 香 产 (Cutter locati〇n ρ〇ίη " and 罝 of the tool, its tool center point, a certain position within the standard and a certain point up, when the position is located on the workpiece seat, That is, when the machine has no errors, the tool ::: machine tool is the ideal machine. The position should be the same point. If the tool is defined, the orientation in the workpiece coordinate is the positioning position in the workpiece coordinate 519504 5. Description of the invention (6 ) A vector direction of __, then the center point is at this vector ^ The direction of the south axis coincides with the direction of the position vector. In the tool, it is the direction of the origin of the workpiece coordinate, and the length of the position vector is extended. For example, in the invention, the position measurement probe is in the same position as the positioning probe. For example, the medium-dimensional measuring device is inferior. The three-dimensional quantity, that is, the three-dimensional quantity difference reading value should be Ming Zhongli's corresponding two-dimensional quantity in the invention. The center ball of the extension rod is a physical probe. Using the above method center, when the position of the measuring probe is 'supported', the relationship between the taper of the support rod, the definition of the position of the vector square rod and the center of the closing machine, that is, the center axis of the end of the machine, is the center of the invention. The ball seat coordinate is originally in the workpiece seat toward the center of the ball seat. On the device and the three-dimensional fitting, and three-dimensional and three-dimensional solid points, the machine inside the target and the multi-axis measurement on it are centered. The measurement probe should be taken from the tool in the fitting, at a position. You can use the three-dimensional coordinated machine and three sets without misalignment. The error of the tool probe is set. 2 :: Accompanied by = :! Before the measurement, the three-dimensional measurement probe is firstly measured in three-dimensional measurement; then the probe support rod is installed on the reference surface. There is a known: η 死 'and the center of the mating part from the tool's anchor point: the length of the known wheel direction is defined: three middle: two and a half of the error reading surface of the three-dimensional measuring probe sensor is ordered, and the other, Defining the center of the sphere as wide as 4: the center of the mating part on which the point is initialized, for example. : \ 3-dimensional probe 519504 V. Description of the invention (Ό For example, if the center ball sphere center is within the coordinate of the multi-axis machine tool carrying the workpiece coordinate 台, is the center ball moving or rotating? On the reference surface of the Hanchongwei women's watch for moving or rotating the table, with the matching pieces on the bamboo ball seat of the invention, such as the center circle; certificate center: The table is known in the coordinate system. / '. 的 座 軚When working in an advantageous embodiment of the invention, the 2020 point signal is output in the calibration of the three-dimensional measurement probe: "time trigger" and reset the displacement counter of each measurement axis = this reference zero point to measure the zero point and reference The offset value between the zero points is also positive; the dimensional measurement probe a is measured during the weighting process. The large magnetic ball is maintained by the support of the Yongqiu cave to seal the balance extension rod. In the embodiment of the invention, in the embodiment of the center circle measuring probe extension, the gravity of the long-term magnet attracting the bearing rod and the center-closed mechanism chain is measured in three dimensions to create the end and the system. In the suction of the other ball, in the center In addition to working with shaft Heisei have made measurements of the heart of the ball joint ball seat Preference Preference amount of three-dimensional
C:V 在誤差量測時,中心圓球球心被設定為工件座標 之原 •維探頭誤差量測裝置及方法· ptd 第11頁 519504 五、發明說明(8) 點,所以要精 工件之線性移 中心圓球座上 好之實施例中 心圓球座設計 動對心之套筒 裝中心圓球座 運動軸,例如 考面,以定義 此,可確定中 確設定此_工件 動或轉動工作台 中心圓球球心之 ’當承载工件之 有一參考面,此 間之幾何尺寸關 時’將此參考面 X軸平行,另外 中心圓球球心在 心圓球座在轉動 座標零點在多軸工具機承載 座標系内之座標位置。為使 座標值能準確設定,在一偏 工作台為轉動工作台時’中 參考面與中心圓球球心及自 係在三次元量床上量出’安 調整與多軸工具機之/線性 ,中心圓球座上設計有一參 自動對心軸向之高度’如 工作台上之位置。 通 孔,以 面,參 座固定 實施例 轉動平 座。在 槽,具 五 安裝在 圓球座 固定於 苇五軸工具機承載 女裝工件,此中央 考面之中心轴,理 在轉動工作台上之 中,中心圓球座上 台之中央孔參考周 偏好之貫施例中 内斜面之套筒,以 軸或多軸工具機亦 線性移動工作台上 上设計有精密之安 多軸工具機之線性 工件之轉動工作台上設計有中4 孔周面亦做為檢測器具之參考 想時應與轉動軸重合。中心圓 位置必須準確已知,在一偏好^ 設計有精密自動對心機構,利f 面自動對心,且固定中心圓球 ’此自動對心機構是在周面上g 斜面擠壓擴張固定中心圓球座C: V In the error measurement, the center of the center sphere is set as the original workpiece coordinate • Dimensional probe error measurement device and method · ptd Page 11 519504 V. Description of the invention (8) points, so it is necessary to refine the workpiece. Example of a good linear shift center ball seat. The center ball seat is designed to move the center sleeve. The center ball seat is equipped with a kinematic axis, such as a test surface. To define this, you can determine this. The center of the ball center of the table 'When there is a reference surface for the workpiece, the geometric dimension is closed'. This reference plane is parallel to the X axis. In addition, the center ball center is at the center, the ball seat is at the rotation coordinate zero point on the multi-axis machine. The coordinate position within the bearing coordinate system. In order to accurately set the coordinate values, the reference surface and the center of the spherical ball and the center of the spherical surface and the coordinate system of the multi-axis machine tool are measured on a three-dimensional measuring bed when the offset table is a rotating table. The center ball seat is designed with a height of automatic centering axis, such as the position on the table. The through hole is fixed to the surface, and the embodiment is to rotate the flat seat. In the slot, there are five mounted on the ball seat and fixed to the reed five-axis machine tool to carry the women's workpiece. The central axis of this central test surface is located on the rotating table. The center hole of the center ball seat is referenced to the preference of the week. In the conventional embodiment, the sleeve with an inner bevel is linearly moved by a shaft or a multi-axis machine tool. The rotary table on which a linear workpiece of a precision multi-axis machine tool is designed is provided with a central 4-hole peripheral surface. It should also be used as a reference for the detection device. It should coincide with the rotation axis. The position of the center circle must be accurately known. A preference ^ is designed with a precision automatic centering mechanism, the f-plane is automatically centered, and the fixed center sphere is' this automatic centering mechanism is an expansion fixed center squeezed on the peripheral surface of the g bevel. Orb
有其他機構型式,其工件可能4 二在一偏好之實施例中,在中Λ 多考面,以將中心圓球座精Ζ 移動工作台上之工件座標系内There are other mechanism types, and the workpiece may be in a preferred embodiment, in the middle Λ multi-test surface, in order to move the center ball seat on the workpiece coordinate system on the work table.
519504 五、發明說明(9) 知 使中心圓球球心固定在線性移動工作台上之位置為已 另外’為使三維量測探頭能疋確初始化及設定三維量 測探頭之量測零點,以發明方式,創作一探頭量測零點設 疋t置。此探頭量測零點設定裝置,一端有與三維量測探 頭相同之推拔介面,另一端有與三維量測探頭支承桿末端 配合件互補之配合件。探頭量測零點設定裝置,保證推拔 中心軸通過配合件中心,為此之故,配合件中心最好可以 二驅動平台調整其位置。 為使二維量測探頭易於置入探頭量測零點設定裝置内 進行設定’最好在探頭量測零點設定裝置設置例如在直交 方向可移動之運動平台。在校正時,移動中心圓球至側邊 位置’以便三維量測探頭置入,再將中心圓球移回原量測 零點設定位置,因此,運動平台上最好有位置讀取裝置。 此外,一般工具機的精度為微米等級,此位 析度最好為次微米等級。 探頭量測零點設定裝置及中心圓球座之中心圓球球心 位ΐ在二次元量床上量測與調校,因實際使用時是在工廠 機态上,為避免溫度差異造成誤差,這些 =由巧免::之變形。在軸向因溫;;造成之變形冉 :耩由…包括室溫及裝置溫度之量剛,進行熱變形補 償。519504 V. Description of the invention (9) It is known that the position where the center ball center is fixed on the linear moving table is 'otherwise' so that the 3D measurement probe can be initialized and set the measurement zero point of the 3D measurement probe. Inventive way, create a probe to measure the zero point setting. This probe measurement zero point setting device has one end with the same push-pull interface as the three-dimensional measurement probe, and the other end has a mating piece complementary to the end-piece fitting of the support rod of the three-dimensional measurement probe. The zero point setting device for probe measurement ensures that the central axis of the push-pull passes through the center of the mating part. For this reason, the center of the mating part can preferably be adjusted by its two driving platforms. In order to make it easy to set the two-dimensional measurement probe into the probe measurement zero-point setting device, it is better to set a motion measurement platform that is movable in the orthogonal direction, for example, in the probe measurement zero-point setting device. During calibration, move the center ball to the side position ’so that the 3D measurement probe is inserted, and then move the center ball back to the original measurement zero setting position. Therefore, it is best to have a position reading device on the motion platform. In addition, the precision of general machine tools is in the micrometer range, and the resolution is preferably in the submicron range. The measuring device for measuring the zero point of the probe and the center position of the center ball of the center ball are measured and adjusted on a two-dimensional measuring bed. Since the actual use is in the factory state, in order to avoid errors caused by temperature differences, these = By Qiao Free :: Deformation. Deformation caused by temperature in the axial direction: The thermal deformation compensation is made by the amount of room temperature and device temperature.
5l95〇45l95〇4
五、發明說明(10) 探頭量測零點設定裝置在設定三維量測探頭之量測零 點時,同時也決定了刀具長度,因此,探頭量測零點設定 较置上最好設有刀具長度設定基準面。 ^ 本發明除了上述之三維量測探頭量測裝置及探頭量測 零點設定裝置外,也包括相應之量測方法。因應五轴機構 特性,五軸同動之定位或運動路徑最好是在以此球接點中 、為球心之量測球面上定義出。在一偏#之發明實施例 以中心圓球座上之中心圓球球心為f測半圓球球心, ^ _量測探頭之量測零點與中心圓球球心間之距離為丰 清’、定義量測半圓球面,將工具,亦即三維量測探頭在量 日士壞面上之曲線路徑上驅動,工具相對工件之定位及運動 t所產生之誤差即可被三維量測探頭量測出。 法為:應 孔承座之内 ' _球球心 上 ,並記錄 = <刀長基 5後將三維 戈巢於工具 為骛測探頭 好之實 用三次 錐面中 位置, 運動平 準面至 量測探 機時, 感測器 施例中,三 元量床找出 心線,利用 直到中心圓 台組位置讀 中心圓球球 頭感測器讀 最好將工具 之軸向調成 維量測探 探頭量測 兩個線性 球球心位 取裝置之 心沿内錐 值設定為 機運動平 一致或以 頭量測零 零點設定 運動平台 於内錐面 讀值,及 面中心線 零。三維 台之運動 軟體進行 裝置内錐 組微調中 中心線 内錐孔承 之距離, 量測探頭 軸向與三 轉換計V. Description of the invention (10) The probe measurement zero point setting device determines the tool length when setting the zero point of the three-dimensional measurement probe. Therefore, it is better to set the tool length setting reference on the probe measurement zero point setting. surface. ^ In addition to the above-mentioned three-dimensional measuring probe measuring device and probe measuring zero setting device, the present invention also includes corresponding measuring methods. In accordance with the characteristics of the five-axis mechanism, the positioning or movement path of the five-axis simultaneous motion is best defined on the spherical surface of the spherical contact measurement. In the embodiment of the invention of a partial #, the center of the center ball on the center ball seat is f to measure the center of the semi-sphere, and the distance between the measurement zero point of the measurement probe and the center of the center ball is Fengqing ' 1. Define the semi-spherical surface for measurement, and drive the tool, that is, the three-dimensional measurement probe on the curved path of the measuring surface. The error caused by the positioning and movement of the tool relative to the workpiece can be measured by the three-dimensional measurement probe. Out. The method is: within the hole bearing seat _ on the center of the ball, and record = < 3D knife long base 5 will be nested in the practical three-dimensional cone surface of the tool to measure the probe, the level of the plane to the amount of movement In the case of a detecting machine, in the sensor embodiment, the ternary measuring bed finds the heart line. The center ball table is used to read the center ball and the ball head sensor reads. It is best to adjust the axial direction of the tool to a dimension measurement. The probe measures the center of the inner cone of the two linear ball center position taking devices to set the machine motion to be flat or to measure the zero point with the head to set the movement platform to read the value on the inner cone surface and the center line of the surface to zero. The movement of the three-dimensional platform is performed by the software. The inner cone of the device is fine-tuned. The centerline is the distance of the inner cone bore. The measuring probe is the axial and three conversion meters.
519504 五、發明說明(11) 算。 在量測時驅動多軸工具機,使三維量測探頭之量測零 點在定義之量測球面上之路徑定位或運動,在一偏好之實 施例中,工具方向被定義在球面之法線上,如此工具與工 件相對定位及運動之總成誤差可被三維量測探頭量出。量 測半圓球之大小決定於延伸桿之長度,為了量不同運動位 置之誤差,最好是延伸桿有不同長度。為使誤差量測有特 定之效果,可在量測球面上設計各種特定之量測路徑。 此量測裝置用於五軸工具機之誤差量測時,當中心圓 球被置於轉動軸軸線上,只會造成四軸同動,因而,中心 圓球安裝位置最好與轉動軸有一偏置量,以造成五軸同 動0 如 下: 圖 一 為 二 維 誤 圖 —一 為 圖 一 中 圖 二 為 圖 一 中 圖 四 為 圖 一 中 圖 五 為 二 維 誤 圖 其 中 之組合 中心圓球519504 V. Description of the invention (11) Calculation. Drive a multi-axis machine tool during measurement to position or move the measurement zero point of the three-dimensional measurement probe on a defined measurement sphere. In a preferred embodiment, the tool direction is defined on the normal of the sphere. In this way, the assembly error of the relative positioning and movement of the tool and the workpiece can be measured by the three-dimensional measuring probe. The size of the measuring hemisphere is determined by the length of the extension rod. In order to measure the error of different movement positions, it is best to have different lengths of extension rods. In order to make the error measurement have a specific effect, various specific measurement paths can be designed on the measurement sphere. When this measuring device is used for error measurement of a five-axis machine tool, when the center ball is placed on the axis of the rotating shaft, only four axes will move together. Therefore, the installation position of the center ball is preferably offset from the rotating shaft. Set the amount to cause the five-axis simultaneous motion 0 as follows: Figure 1 is a two-dimensional error picture—one is the one in FIG. 1. The two is in FIG. 1.
519504 五、發明說明(12) 座則安裝於五軸工具機的轉動工作台上; 圖六 為五軸工具機誤差量測時之量測半圓球; 圖七 為探頭量測零點設定裝置之組合圖; 圖八 為圖七之内錐孔承座組件之細部圖; 圖九 為圖七之運動平台組組件之細部圖; 圖十 為圖七之中心圓球組件之細部圖; 圖十一 為三維量測探頭置入探頭量測零點設定裝置之組 合圖; 圖十二 為中心圓球球心位置量測之說明圖; 圖十三 為量測球面上之四種量測路徑; 圖十四為另一應用型式之中心圓球座。 元件符號說明 1 三維量測探頭 2 探頭心軸 3 延伸桿 4支承桿 41套筒 4 2 永久磁鐵 4 3 三點支撐球座 5中心圓球座519504 5. Description of the invention (12) The seat is installed on the rotary table of a 5-axis machine tool; Figure 6 is a measuring hemisphere for error measurement of a 5-axis machine tool; Figure 7 is a combination of the zero point setting device for probe measurement Figure 8 Figure 8 is a detailed view of the tapered bore seat assembly in Figure 7; Figure 9 is a detailed view of the motion platform assembly component of Figure 7; Figure 10 is a detailed view of the center ball assembly of Figure 7; Figure 11 is The three-dimensional measuring probe is combined with the probe to measure the zero-point setting device. Figure 12 is a diagram illustrating the measurement of the center position of the center sphere. Figure 13 is the four measurement paths on the spherical surface. Figure 14 The center ball seat is another application type. Component symbol description 1 3D measuring probe 2 Probe mandrel 3 Extension rod 4 Support rod 41 Sleeve 4 2 Permanent magnet 4 3 Three-point support ball seat 5 Center ball seat
C: \三維探頭誤差量測裝置及方法.ptd 第16頁 519504 五、發明說明(13) 5 1 中心圓球 5 2延伸桿 5 3 螺栓 54基座 5 5 内錐孔 56溝槽 5 7 外周面 58内孔面 59套筒 5 1 2 球心 5 1 3圓柱中心線 5 1 4 球心與圓柱中心線連線 5 1 5 參考面 5 1 6 參考面 5 1 7 參考面 518 參考面 6固定螺桿 61螺帽 6 2 外錐筒 63 螺桿 64 墊圈 I 0 探頭量測零點設定裝置 II 内錐孔承座 111刀長設定基準面C: \ Three-dimensional probe error measurement device and method. Ptd page 16 519504 V. Description of the invention (13) 5 1 Center ball 5 2 Extension rod 5 3 Bolt 54 Base 5 5 Inner cone hole 56 Groove 5 7 Outer periphery Face 58 inner bore surface 59 sleeve 5 1 2 spherical center 5 1 3 cylindrical centerline 5 1 4 spherical centerline and cylindrical centerline 5 1 5 reference surface 5 1 6 reference surface 5 1 7 reference surface 518 reference surface 6 fixed Screw 61 Nut 6 2 Outer cone 63 Screw 64 Washer I 0 Probe measuring zero setting device II Inner taper socket 111 Knife length setting reference surface
(::\三維探頭誤差量測裝置及方法.ptd 第17頁 519504(:: \ Three-dimensional probe error measurement device and method.ptd page 17 519504
11 2内錐面 11 3中心線 1 3侧支柱 14底座 1 5線性運動平台組 1 51運動平台 152分釐卡 1 6線性運動組 1 6 1運動平台 162分釐卡 17延伸桿 1 8中心圓球 1 81球心 19螺栓 一在圖一中,可見此裝置之組成元件,包括三維量蜊 、探頭心軸2、延伸桿3、支承桿4、中心圓球座5,衣 疋螺桿6,及接收二維量測探頭位移量測信號之電腦。 實施例中,中心圓球座5是固定在工具機的轉動工作台 上。在另一實施例中,中心圓球座5是固定在移動工 上’一參見圖+四所*,以後會再加以說明。z、維量' 1人一般工具機使用之三維量測探頭類似, 碩 此處為BT40,以固定在主軸上。三維量面推拔, 、J休碩1之心軸可11 2 Inner cone surface 11 3 Centerline 1 3 Side pillars 14 Base 1 5 Linear motion platform group 1 51 Motion platform 152 centimeters 1 6 Linear motion group 1 6 1 Motion platform 162 centimeters 17 Extension rod 1 8 Center circle Ball 1 81 Ball center 19 Bolt One In Figure 1, the components of this device can be seen, including three-dimensional measuring clams, probe mandrel 2, extension rod 3, support rod 4, center ball seat 5, clothes pin screw 6, and A computer that receives two-dimensional measurement probe displacement measurement signals. In the embodiment, the center ball seat 5 is fixed on the rotary table of the machine tool. In another embodiment, the center ball seat 5 is fixed to a mobile worker '-see Fig. + Shisuo *, which will be described later. z, dimension 'The three-dimensional measuring probe used by a general machine tool is similar to that of the master. Here it is BT40, which is fixed on the spindle. The three-dimensional measuring surface is pushed.
〔:\三維探頭誤差量測裝置及方法.ptd 第18頁〔: \ Three-dimensional probe error measurement device and method.ptd page 18
519504 五、發明說明(15) 對外殼有三維相 器加以量測,感 號為相差90度之 探頭使用LVDT位 比電壓訊號。三 Ren i shaw SP2-1 合,及避免延伸 頭1之心軸2與外 三維量測探頭總 方向以彈簧預力 三維量測探頭之 3之另一端有與j 鎖緊螺紋,另一 精密鎖定 、、則哭么二此相對運動之位置值以位移感測 ::為光學編碼器時,位置量測輸出之訊 聽片、、’丨Ϊ是相差9〇度之弦波,若三維量測 ”貝:态進行相對位移量測時,輸出為 維1測探頭可以是商用之3D探頭,例如 。為保持中心圓球5丨與支承桿4緊密接 =3變形造成量測系統誤差,三維量測探 了間二方向之固持彈簧預力愈小愈好。若 是位於一定方向,例如垂直方向,可在此 平衡心軸2、延伸桿3及支承桿4之重量。 心軸2與延伸桿3係以螺紋相接合。延伸桿 -維畺測探頭心軸2精密連接之定位面,及 端則有螺孔,支承桿4 一端之螺桿可與之 ,二顯不支承桿4及末端球接點軸承實施例,支承桿4 由套筒41及固定於套筒内之永久磁鐵42與三點支撐球座“ 組成。而中心圓球座5上則設有高精度之中心圓球5丨,其 與支承杯4之二點支標球座4 3藉磁力吸附連接,且永久磁 鐵之磁力夠大,使支承桿4與中心圓球5丨能保持密合。 圖三及圖四為中心圓球座5及固定螺桿6之示意圖。此 中心圓球座5是固定在工具機轉動工作台上,中心圓球座5 是由中心圓球51、延伸桿52、螺栓53及基座54組成,基座519504 V. Description of the invention (15) The housing has a three-dimensional phase measuring device. Probes with a difference of 90 degrees are using LVDT bit voltage signals. The three Ren i shaw SP2-1 are combined, and the extension of the spindle 2 of the head 1 and the outer 3D measuring probe is in the general direction of the spring preloaded 3D measuring probe. The other end of 3 has a locking thread with j, and the other precision lock The position value of this relative movement is sensed by displacement :: For optical encoders, the audio-visual film of the position measurement output, "丨 Ϊ is a sine wave with a difference of 90 degrees, if three-dimensional measurement Bei: When performing relative displacement measurement, the output is dimension 1. The probe can be a commercial 3D probe, for example. In order to keep the center ball 5 丨 tightly connected to the support rod 4 = 3 deformation caused by the measurement system error, the three-dimensional measurement The smaller the preload of the retaining spring in the two directions, the better. If it is located in a certain direction, such as the vertical direction, the weight of the mandrel 2, the extension rod 3, and the support rod 4 can be balanced here. The mandrel 2 and the extension rod 3 It is connected by threads. The extension rod-the positioning surface of the precision measuring probe mandrel 2 has a screw hole at the end, and the screw at one end of the support rod 4 can be connected to it. The second display does not support the rod 4 and the end ball contact point. In the bearing embodiment, the support rod 4 is composed of a sleeve 41 and a permanent magnet fixed in the sleeve. The iron 42 is composed of a three-point support tee. The center ball seat 5 is provided with a high-precision center ball 5 丨, which is connected to the two-point support ball seat 4 3 of the support cup 4 by magnetic attraction, and the magnetic force of the permanent magnet is large enough to make the support rod 4 It can keep close contact with the center ball 5 丨. 3 and 4 are schematic diagrams of the center ball seat 5 and the fixed screw 6. The center ball seat 5 is fixed on the rotary table of the machine tool. The center ball seat 5 is composed of a center ball 51, an extension rod 52, a bolt 53 and a base 54. The base
(::\三維探頭誤差量測裝置及方法.ptd 第19頁 5l95〇4 五、發明_ (16) " ---—-- 54在與中心圓球51相對之側設有套筒5g,其包括内 及溝槽56 ;固定螺桿6則由螺帽61、外錐筒62、 J圈64組成,其中外錐筒62與内錐孔55之錐度相同干 干6 3下拉使外錐筒6 2與内錐孔5 5緊密配合,並將套兮’、 内錐孔55擴大,使套筒59外周面57與轉動工作台中=之 面5 8密接,自動對心及鎖固。 、孔 圖五為將上述三維誤差量測裝置安裝於五軸工具機上 之組合圖,三維量測探頭丨安裝於工具機之主軸上,中心 圓球座5則被置於轉動軸轉動工作台上。在此之安裝方“ 式’中心圓球球心5 1與轉動工作台中心軸間有偏移。侧面 有參考面515,參見圖十二,用以安裝時調整中心圓球 座,使中心圓球座5之參考面515與偏置之線性軸例如X軸 平行。 也可將中心圓球51固定在延伸桿3上,而將支承桿4固 定在中心圓球座5上,重點是三維量測探頭端與工件端之 間設有球座4 3及中心圓球5 1,中心圓球5 1球心5 1 2被定義 為量測半圓球面中心,中心圓球5 1球心5 1 2到三維量測探 頭量測零點之距離為量測半圓球面之半徑,如圖六所示。 中心圓球在球座内有密合,而且在量測半球面空間相對運 動時沒有干涉。 在圖七、圖八、圖九及圖十中,可見探頭量測零點設(:: \ Three-dimensional probe error measurement device and method. Ptd page 19 5195504. Invention_ (16) " ------ 54 is provided with a sleeve 5g on the side opposite to the center ball 51 , Which includes the inner and groove 56; the fixed screw 6 is composed of a nut 61, an outer cone 62, and a J-ring 64, wherein the outer cone 62 has the same taper as the inner cone hole 55 and the outer cone 6 is pulled down to make the outer cone 6 2 is closely matched with the inner taper hole 5 5, and the sleeve and the inner taper hole 55 are enlarged, so that the outer peripheral surface 57 of the sleeve 59 and the surface 5 8 of the rotary table are closely connected, and the centering and locking are automatically performed. FIG. 5 is a combination diagram of the above-mentioned three-dimensional error measuring device installed on a five-axis machine tool. The three-dimensional measuring probe is installed on the main shaft of the machine tool, and the center ball seat 5 is placed on a rotating shaft rotating table. The installation method here is "the center ball center 51 is offset from the center axis of the rotary table. There is a reference surface 515 on the side, see Figure 12 for adjusting the center ball seat during installation to make the center circle The reference surface 515 of the tee 5 is parallel to an offset linear axis such as the X axis. The center ball 51 may also be fixed on the extension rod 3 and the support rod 4 may be fixed On the center ball seat 5, the main point is that a ball seat 4 3 and a center ball 5 1 are provided between the probe end and the workpiece end of the three-dimensional measurement. The center ball 5 1 has a center 5 1 2 and is defined as a semi-spherical surface. The center, center ball 5 1 ball center 5 1 2 to the zero point of the three-dimensional measuring probe is the radius of the semi-spherical surface, as shown in Figure 6. The center ball is tightly sealed in the tee, and There is no interference when measuring the relative motion of the hemisphere space. In Fig. 7, Fig. 8, Fig. 9 and Fig. 10, it can be seen that the probe measurement zero point setting
519504 五、發明說明(17) -- 定裝置1 0及其組成元件,包括内錐孔承座丨丨,側支柱13, 底座14,線性運動平台組15及16,延伸桿17,中心圓球18 及螺栓1 9。此内錐孔承座丨丨與一般用於量測刀長之内錐孔 ,座相同,有錐面推拔,此處為BT40。此一錐面推拔具有 南製造精度,可與三維量測探頭之推拔同心配合,亦即可 將内錐孔承座11之内錐孔心軸視為三維量測探頭推拔心 $。内錐孔承座U上的刀長設定基準面U1與内錐孔心軸 垂直。三維量測探頭安裝於内錐孔承座11上時,可定義自 刀長設定基準面1丨丨至三維量測探頭量測零點 離為CNC工具機刀長設定值。 ㈣白之距 内錐孔承座11之一端有側支柱13,以螺栓與其結合鎖 盥由於側支柱13有相當之長度,而此一裝置之調校是溫 濕度都在量測實驗室之標準條件下施行,調校後此裝 _被攜至工作現場,其溫度與濕度與原調校時之條件存 抑f ί。為維持調校後之精度,使上述影響探頭量測零點 ::衣置1 0精度之因素降低,裝置之材質應使用熱膨脹係 —之材質。另外,此探頭量測零點設定裝置1 〇最好有對 計、,以避免側面方向之熱膨脹誤差,軸線方向之熱誤 可透過溫度量測以軟體加以補償。 作為 運動 側支柱1 3之另一端亦用螺栓與底座i 4結合,底座丨4是 兩個線性運動平台組15,16之固定座,底座14與線性 平。組1 5用螺栓鎖固結合。線性運動平台組1 5,1 6之519504 V. Description of the invention (17)-Fixing device 10 and its components, including inner cone hole seat 丨 丨 side pillar 13, base 14, linear motion platform groups 15 and 16, extension rod 17, center ball 18 and bolts 1 9. This inner tapered hole seat is the same as the inner tapered hole commonly used to measure the length of a knife. The seat is the same, with a tapered surface push. Here is BT40. This tapered surface push has the manufacturing precision of South, and can be matched with the push and pull of the three-dimensional measuring probe concentrically, that is, the inner tapered hole mandrel of the inner tapered hole socket 11 can be regarded as the three-dimensional measuring probe push heart $. The cutter length setting reference plane U1 on the inner tapered hole socket U is perpendicular to the inner shaft of the inner tapered hole. When the three-dimensional measuring probe is installed on the inner tapered hole socket 11, it can be defined from the tool length setting reference plane 1 to the zero point of the three-dimensional measuring probe measurement as the tool length setting value of the CNC machine tool. There is a side pillar 13 at one end of the white tapered bore socket 11 and the bolt is used to lock it. Because the side pillar 13 has a considerable length, the adjustment of this device is the standard for temperature and humidity in the measurement laboratory. It will be implemented under the conditions. After the adjustment, this equipment will be carried to the work site. The temperature and humidity will be the same as the conditions during the original adjustment. In order to maintain the accuracy after adjustment, the above-mentioned factors affecting the accuracy of measuring the zero point of the probe :: clothing set 10 will be reduced, the material of the device should use the material of the thermal expansion system. In addition, this probe measurement zero setting device 10 is best equipped with a counter to avoid thermal expansion errors in the lateral direction, and thermal errors in the axial direction can be compensated by software through temperature measurement. The other end of the moving side pillar 1 3 is also combined with the base i 4 by bolts. The base 4 is a fixed seat of two linear motion platform groups 15 and 16, and the base 14 is flat and linear. Group 15 is bolted together. Linear motion platform group 1 of 5, 16
519504 五、發明說明(18) ^- $位精度及重現性精度高,可用解析度為次微米等級之分 t卡1 5 2,1 6 2,以手動方式驅動運動平台丨5丨,i 6 1 ;也可利 =伺服馬達驅動,但成本較高。此實施例中,線性運動平 台組1^5, 1 6間用螺栓鎖固,且兩兩垂直交疊組合。線性運 動ΐ t組丨6上裝有延伸桿1 7,其夠長,以利三維量測探頭 之安t及拆卸。延伸桿丨7末端設有配合件,此處為中心圓 球1 8 ’此中心圓球丨8與三維量測探頭延伸桿3末端之支承 桿4 ’以磁力相互吸著密合。 此一探頭量測零點設定裝置1 〇之校正方法是:首先將 探頭量測零點設定裝置1〇置於高精度之三次元量床上,先 將内錐孔承座11上之刀長設定基準面丨11調成與三次元量 床之任一運動軸·平行,如此可有效降低在量取任一座標位 置’因探頭碰觸工件時其運動方向與工件接觸面未垂直所 造成之誤差。接著利用座標量測找出内錐面11 2 ( BT40或 其他錐度)之中心線11 3,並將此中心線11 3與刀長設定基 準面111 之交點設定為工作座標系之零點,且以此中心線 為工作座標系之一軸,再量取中心圓球1 8球心1 8 1之座標 位置。若球心1 81不在中心線11 3上,則可依偏移量,利用 兩個線性運動平台組1 5,1 6調整球心1 81位置,直至中心線 11 3穿過球心1 81。記錄此時刀長設定基準面111至球心1 8 1 在中心線11 3上之距離及線性運動平台組1 5,1 6分釐卡1 5 2,1 6 2之讀值。519504 V. Description of the invention (18) ^-$ -bit accuracy and reproducibility are high, and the available resolution is sub-micron grade t card 1 5 2, 1 6 2 to manually drive the motion platform 丨 5 丨, i 6 1; also profit = servo motor drive, but the cost is higher. In this embodiment, the linear motion platform groups 1 ^ 5, 16 are locked with bolts, and the two are vertically overlapped and combined. The linear motion ΐ t group 丨 6 is provided with an extension rod 17 which is long enough to facilitate the installation and removal of the three-dimensional measuring probe. A matching piece is provided at the end of the extension rod 丨 7, here is the center ball 1 8 ′. This center ball 丨 8 and the support rod 4 ′ at the end of the extension rod 3 of the three-dimensional measuring probe are magnetically attracted to each other. The calibration method of this probe measuring zero-point setting device 10 is: firstly place the probe measuring zero-point setting device 10 on a high-precision three-dimensional measuring bed, and first set the length of the knife on the inner tapered hole socket 11 to the reference surface丨 11 is adjusted to be parallel to any movement axis of the three-dimensional measuring bed. This can effectively reduce the error caused by measuring the position of any coordinate 'because the probe's movement direction is not perpendicular to the workpiece contact surface when it touches the workpiece. Then use the coordinate measurement to find the center line 11 3 of the inner conical surface 11 2 (BT40 or other taper), and set the intersection of this center line 11 3 and the tool length setting reference surface 111 as the zero point of the working coordinate system, and This center line is one axis of the working coordinate system, and then the coordinate position of the center ball 18, the center of the ball 18, and 1 is measured. If the center of the ball 1 81 is not on the center line 11 3, then the position of the center of the ball 1 81 can be adjusted by using two linear motion platform groups 1 5 and 16 according to the offset until the center line 11 3 passes through the center of the ball 1 81. Record the distance between the knife length setting reference plane 111 and the center of the ball 1 8 1 on the center line 11 3 and the readings of the linear motion platform group 15 5, 16 centimeters 1 5 2 and 16 2 at this time.
c:\三維探頭誤差量測裝置及方法·ptd 第22頁 519504 五、發明說明(19) 在機器現場,將三維量測探頭置入此設定裝置,如圖 十一所示。為避免干涉,三維量測探頭1置入設定裝置 前’可先利用線性運動平台組丨6上之運動平台丨6 1,將中 心圓球1 8側移適當距離後再置入三維量測探頭1,螺栓1 9 固定三維量測探頭丨,使三維量測探頭1之推拔與内錐孔承 座11上之内錐面11 2密合,再將中心圓球球心;[8 1調回至内 錐孔中心線上,使三維量測探頭1之支承桿4球座緊密與中 心圓球1 8配合。再將電腦内三維量測探頭1量測系統讀值 設定為零’達成三維量測探頭1量測零點之設定。 進行五軸工具機誤差量測前,應精確找出中心圓球5 1 球心5 1 2在工具機轉動工作台座標系内之位置。當中心圓 球座5是裝在工具機轉動工作台上時,其方法如圖十二所 示··將中心圓球座5置於三次元量床上,使參考面515與三 次元量床之一軸平行,並以圓柱中心線5 1 3及參考面5 1 6之 父點ό丁為工作座標系原點,且以圓柱中心線$ 1 3為工作座 標系之一軸,量測中心圓球5 i球心5 1 2至圓柱中心線5 1 3之 垂直距離R、球心5 1 2至圓柱中心線51 3之垂直線與參考面 5 1 5之夾角A及參考面51 6至球心5 1 2在圓柱中心線5 1 3上之 高度Η。接著將此裝置置於工具機轉動工作台上,利用例 如吸附於主軸之千分表,將參考面5 1 5調整至與工具機X軸 平行’接著藉螺桿6 3向下之拉力,使外錐筒6 2向下移動造 成内錐孔55向外擴張,使其外周面57與轉動工作台中央内 孔周面5 8緊密配合而自動對心,中心圓球球心5 1 2相對於c: \ Three-dimensional probe error measurement device and method · ptd page 22 519504 V. Description of the invention (19) At the machine site, put the three-dimensional measurement probe into this setting device, as shown in Figure 11. In order to avoid interference, before the 3D measurement probe 1 is placed in the setting device, the linear motion platform group 丨 6 of the motion platform 丨 6 1 can be used to move the center ball 1 8 side to an appropriate distance before placing the 3D measurement probe. 1. Bolt 1 9 Fix the 3D measurement probe 丨 so that the 3D measurement probe 1 is pushed into the inner cone surface 11 2 on the inner cone hole socket 11 and then the center of the ball is centered; [8 1 调Return to the center line of the inner cone hole, so that the supporting rod 4 ball seat of the three-dimensional measuring probe 1 is closely matched with the center ball 18. Then set the reading value of the 3D measuring probe 1 measurement system in the computer to zero 'to achieve the setting of the 3D measuring probe 1 measurement zero point. Before the error measurement of the five-axis machine tool, the position of the center ball 5 1 and the center of the ball 5 1 2 within the coordinate system of the rotary table of the machine tool should be accurately found. When the center ball seat 5 is mounted on the rotating table of a machine tool, the method is shown in Figure 12. Place the center ball seat 5 on a three-dimensional measuring bed so that the reference surface 515 and the three-dimensional measuring bed One axis is parallel, and the center point of the cylindrical centerline 5 1 3 and the reference plane 5 1 6 is the origin of the working coordinate system, and the cylindrical center line $ 1 3 is one axis of the working coordinate system. Measure the center ball 5 i The vertical distance R from the center of the sphere 5 1 2 to the cylindrical centerline 5 1 3, the angle A between the vertical line of the center of the sphere 5 1 2 to the cylindrical centerline 51 3 and the reference surface 5 1 5 and the reference surface 51 6 to the center of the sphere 5 1 2 The height 在 on the centerline of the cylinder 5 1 3. Then place this device on the rotating table of the machine tool, and adjust the reference surface 5 1 5 to be parallel to the X axis of the machine tool by using a dial indicator attached to the main shaft, and then pull the screw 6 3 downward to make the outside The downward movement of the cone 6 2 causes the inner cone hole 55 to expand outward, so that its outer peripheral surface 57 and the inner surface of the center of the rotary table 5 8 are closely matched and automatically centered. The center of the center ball 5 1 2 is opposite to
CΛ三維探頭誤差量測裝置及方法.ptd mCΛ three-dimensional probe error measurement device and method.ptd m
第23頁 519504 五、發明說明(20) 五軸工具機轉動工作台座標系之位置即可設定 以三維誤差量測裝置進行多軸工具機誤差量測時,將 中心圓球座5之中心圓球5 1球心5 1 2定為量測球面球心,中 心圓球球心5 1 2至三維量測探頭量測零點之距離為半徑, 如此定義量測半球面。另外,定義工具或刀具之方向為球 面法線方向’然後驅動多軸工具機,使三維量測探頭量測 零點在球面預定之量測路徑上運動或定位。 二維量測探頭之位移感測器輸出三個量測自由度之位 移偏差量,利用探頭量測零點設定裝置丨〇設定三維量測探 爐:後將主軸與工作台藉上述之元件之連接, 形成封閉機構鏈,三維量測探頭之起 疋侵 於量測起始點之定位誤差。t三維量;;:即士機器定位 球面上運動時,多軸工具機之定位誤差二士量測零點在 之位移感測器讀出。 p可由二維量測頭 進行多軸同動工具機誤差量測 置在轉動軸,例如C軸之軸線上,、此日士’口可將中心圓球51設 果,量測數據中之誤差來源可以 t 有四軸同動效 動軸,例如C軸偏置一距離, 9 。將中心圓球51對轉 路徑包括在半圓球面之經線路徑、於五轴均會同動。特殊 球面與任意平面相交之圓路玉、’、、泉路徑、螺旋路徑及 U路徑,如圖十三所示。Page 23 519504 V. Description of the invention (20) The position of the coordinate system of the five-axis machine tool can be set to set the center circle of the center ball seat 5 when the three-dimensional error measuring device is used for error measurement of the multi-axis machine tool. The sphere 5 1 sphere center 5 1 2 is determined as the measurement spherical sphere center, and the distance from the center sphere sphere center 5 1 2 to the zero point measured by the three-dimensional measurement probe is the radius, which defines the measurement hemisphere. In addition, the direction of the tool or cutter is defined as the direction of the spherical normal 'and then the multi-axis machine tool is driven to make the three-dimensional measuring probe measure the zero point to move or position on a predetermined measuring path of the spherical surface. The displacement sensor of the two-dimensional measuring probe outputs the displacement deviation of three degrees of freedom for measurement. The zero-point setting device for measuring the probe is used to set the three-dimensional measuring probe: After that, the main shaft and the workbench are connected by the above components. , Forming a closed mechanism chain, the three-dimensional measuring probe invades the positioning error of the measurement starting point. t three-dimensional quantity;;: Positioning of the taxi machine When the spherical surface is moving, the positioning error of the multi-axis machine tool is measured by the displacement sensor at zero. p can be measured by a two-dimensional measuring head on a multi-axis simultaneous motion machine tool. Error measurement is set on the axis of rotation, such as the axis of the C-axis. The source can have four simultaneous motion axes, for example, the C axis is offset by a distance, 9. The path of rotation of the center sphere 51 including the path of the meridians on the semi-spherical surface will move simultaneously on the five axes. The circular path jade, ′, spring path, spiral path, and U path where the special sphere intersects with any plane are shown in Figure 13.
519504519504
在以上貫施例中,工件是固定 軸同動例如五軸同動工具機之轉工作台上 件,而是帶動工具綱,或==不是帶動工 具及工件轉動時,也可依工具及/戋工、冓/軸分別帶動工 式,設計相應之中心圓球座及三3旦工件之安裝定位方 面,將巾心、B1球座及三、維量測探頭^板頭固定安裝介 以上以實例說明了此發明創作之 二維量測探頭1在此為一般工具 1 ^ ' BT40 ^ 安裝面;另外,量測路徑也可是球面上^豆叹=適=的 量測探頭之量測信號也可以其他方弋、=路徑’三維 出。‘頭篁測零點設定裝置10之運動平台也可以言 服馬達驅動取代手動分釐卡,使量測零點之設定;;: */J ^5 * "J , 512位置也可以其他量測方法在三維量床上決定。另外, 以上之誤差量測裝置是應用於Γ γ,ZA,c,機構之五軸工且 機,五軸或多軸工具機為其他機構型式時,可作相應之設 計,將中心圓球座及三維量測探頭分別固定在工具^幾= 機構鏈之二末端,二末端以三維量測探頭丨及中心圓球座5 連接後工具機形成封閉之機構鏈,再驅動多軸工具機,量 測工具相對工件於空間定位及運動時所產生之誤^。 里In the above embodiments, the workpiece is a fixed-axis simultaneous movement, such as a workpiece on a rotary table of a five-axis simultaneous machine tool, but drives the tool outline, or == when not driving the tool and the workpiece, the tool and / The masonry and cymbal / shafts are driven by the construction type, and the corresponding center ball seat and three or three denier workpieces are designed for installation and positioning. Towel center, B1 ball seat, and three-dimensional measurement probe ^ board head are fixed and installed above The example illustrates that the two-dimensional measuring probe 1 created by this invention is a general tool 1 ^ 'BT40 ^ mounting surface; in addition, the measuring path can also be a spherical surface ^ doutan = proper = the measuring signal of the measuring probe is also It can be output in three dimensions, = path '. 'The movement platform of the head zero measurement setting device 10 can also convince the motor drive to replace the manual centimeter card to make the measurement zero setting ;: * / J ^ 5 * " J, 512 position can also be measured by other methods Decide on a three-dimensional measuring bed. In addition, the above error measuring device is applied to Γ γ, ZA, c, the five-axis machine and machine of the mechanism, and the five-axis or multi-axis machine tool can be designed accordingly when the center ball seat is And three-dimensional measuring probes are fixed at the two ends of the tool, respectively. The two ends are connected by the three-dimensional measuring probe and the center ball seat 5. The machine tool forms a closed mechanism chain, and then drives the multi-axis machine tool. The error caused by the positioning and movement of the measuring tool relative to the workpiece in space ^. in
C:\三維綱誤差制裝置及方法.ptd 第I ---C: \ 3D dimensional error control device and method.ptd Section I ---
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102303284A (en) * | 2011-06-09 | 2012-01-04 | 苏州大学 | Method for measuring machine main shaft zero point and grinding head radius of computerized numerical control (CNC) grinding machine |
TWI504476B (en) * | 2013-01-16 | 2015-10-21 | Tongtai Machine & Tool Co Ltd | Method for detecting center of rotation of machine tool |
TWI513538B (en) * | 2011-04-11 | 2015-12-21 | Nt Tool Kk | Tool holder for adapting a tool for its measurement and measuring arrangement and method for its calibration |
CN106226347A (en) * | 2016-08-17 | 2016-12-14 | 中钢集团洛阳耐火材料研究院有限公司 | A kind of displacement measurement system of the vertical high temperature thermal dilatometer |
CN114260757A (en) * | 2021-10-29 | 2022-04-01 | 中国航发西安动力控制科技有限公司 | Zero point alignment tool and alignment method for horizontal machining center |
TWI774504B (en) * | 2021-08-06 | 2022-08-11 | 國立陽明交通大學 | Ballbar testing tune-up method for machine tool |
TWI819777B (en) * | 2022-09-06 | 2023-10-21 | 晟進科技股份有限公司 | Magnetic edge finder |
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2001
- 2001-03-02 TW TW90104954A patent/TW519504B/en not_active IP Right Cessation
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI513538B (en) * | 2011-04-11 | 2015-12-21 | Nt Tool Kk | Tool holder for adapting a tool for its measurement and measuring arrangement and method for its calibration |
CN102303284A (en) * | 2011-06-09 | 2012-01-04 | 苏州大学 | Method for measuring machine main shaft zero point and grinding head radius of computerized numerical control (CNC) grinding machine |
TWI504476B (en) * | 2013-01-16 | 2015-10-21 | Tongtai Machine & Tool Co Ltd | Method for detecting center of rotation of machine tool |
CN106226347A (en) * | 2016-08-17 | 2016-12-14 | 中钢集团洛阳耐火材料研究院有限公司 | A kind of displacement measurement system of the vertical high temperature thermal dilatometer |
CN106226347B (en) * | 2016-08-17 | 2023-09-08 | 中钢集团洛阳耐火材料研究院有限公司 | Displacement measurement system of vertical high-temperature thermal expansion instrument |
TWI774504B (en) * | 2021-08-06 | 2022-08-11 | 國立陽明交通大學 | Ballbar testing tune-up method for machine tool |
CN114260757A (en) * | 2021-10-29 | 2022-04-01 | 中国航发西安动力控制科技有限公司 | Zero point alignment tool and alignment method for horizontal machining center |
TWI819777B (en) * | 2022-09-06 | 2023-10-21 | 晟進科技股份有限公司 | Magnetic edge finder |
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