JP2011136390A - Multifunctional machine inside measuring device in working machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multifunctional machine inside measuring device capable of performing various kinds of measurements for a machined workpiece by a measuring unit, in a working machine such as an NC machine tool capable of performing various kinds of machining for the workpiece without re-chucking. <P>SOLUTION: In this multifunctional machine inside measuring device, a horizontal shaft unit 5 mounted with a grinding tool 32 with a shaft, a Y-axis unit 4 mounted with tool holder parts 25 and 26 which can be changed into a vertical shaft state or an inclined shaft state and a machine inside measuring unit 6 are disposed in an X-axis slide 2. The one machine inside measuring unit 6 includes functions of a touch sensor for measuring shape dimensions of the workpiece such as an inner diameter, outer shape and a difference in level for the machined workpiece 19, and a displacement sensor for measuring a surface shape of an end face, etc. of a spherical surface or a non-spherical surface by tracing. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention, for example, in a processing machine in which at least an in-machine measurement unit is disposed on an X-axis slide that moves relative to a spindle that grips a work, the dimensions of the workpiece such as the outer diameter, inner diameter, and step of the work are measured by one in-machine measurement unit. Further, the present invention relates to a multi-function in-machine measuring apparatus in a processing machine capable of measuring a surface error such as a spherical shape and an aspherical shape on a surface such as an end face and measuring a shape error thereof.

  Conventionally, in a processing machine such as a lathe, a grinding machine, or an NC machine tool, the workpiece is processed into a predetermined drawing shape, the workpiece is once removed from the processing machine, and each processing state is measured by an external measuring instrument. This is generally confirmed. There are also known processing machines that measure the workpiece in the processing machine without unchucking and perform correction processing again on the workpiece if the target shape is not reached. There are two methods: touch sensor type and displacement meter type. Touch sensor mainly measures the shape, length, step, etc. of the processed workpiece, and displacement sensor type is processed. A surface shape such as a spherical shape or an aspherical shape or a shape error thereof is measured by tracing a surface such as an end face of the workpiece.

  Conventionally, a free curved surface shape measuring method for measuring a free curved surface shape of a machined workpiece is known. The free-form surface shape measuring method is such that a displacement measuring device is attached to an orthogonal three-axis machine having a workpiece spindle and a tool spindle, and a workpiece measuring point and a line vertically lowered from the measuring point to the probe center axis of the displacement measuring device. The shape of the free-form surface of a workpiece is measured by performing 3-axis control of an orthogonal 3-axis machine so that the angle formed by the vector connecting the intersection points and the normal vector of the free-form surface at the measurement point is constant. Yes (see, for example, Patent Document 1).

  In addition, in a processing apparatus that processes a spherical surface, an aspherical surface, and a free curved surface such as a mold, a free curved surface processing apparatus that measures a processed surface with a contact-type measuring instrument while being fixed to a workpiece is known. The free-form surface processing apparatus separates the contact-type measuring instrument from the tool during processing, and in the Z-axis and X-axis directions so that the protruding direction line of the probe intersects the rotation axis during measurement and the protruding amount of the probe is constant. Scan and measure the shape of the work surface of the workpiece as Z and X axis data and save. After measuring up to a predetermined measurement range including the rotation axis, the workpiece is rotated 180 °, measured again, stored as Z and X axis data, and the machining surface shape is calculated (for example, Patent Document 2). reference).

  Further, as a calibration device for an in-machine measuring instrument of a lathe, one that measures the outer diameter of a processed workpiece while it is mounted on a spindle and calibrates a set value of a measured value correction amount is known. The calibration device for the in-machine measuring instrument is a self-operating NC lathe equipped with an in-machine measuring instrument for measuring the dimensions of the work held on the spindle and a gantry loader. Calibration loader command means for mounting the master work of the stationary part to the main shaft with a gantry loader, and calibration execution means for updating the set value of the measurement correction amount of the in-machine measuring instrument by measuring this mounted master work with the in-machine measuring instrument (For example, refer to Patent Document 3).

  By the way, the applicant of the present invention does not need to re-chuck the work on the NC machine tool, but performs various grinding and cutting operations on the work by changing the tool orientation or replacing it with another tool. In parallel, we developed what can be achieved quickly with high accuracy, and filed a patent application first. The NC machine tool is provided with a spindle that is rotatably arranged on the spindle stock and to which a chuck for gripping a workpiece is attached, and an X-axis slide that is movable in the X-axis direction orthogonal to the Z-axis direction in which the spindle moves. A horizontal axis unit on which a grindstone with a shaft is mounted and a Y axis unit on which a tool unit that can be changed to a vertical axis state or an oblique axis state is mounted on an X-axis slide. When the tool unit is in the vertical axis state, the holder base of the Y axis unit is set parallel to the X axis direction, and when the tool unit is in the oblique axis state, the holder base is set perpendicular to the X axis direction. . Further, in the NC machine tool, the Y-axis unit is attached to a turning plate that is turnably attached to a base plate fixed to the X-axis slide, and the position of the holder base is adjusted by rotating the turning plate by 90 ° on the base plate. The base plate is provided with an adjustment plate for guiding the turning of the turning plate. In addition, when the NC machine tool is mounted on the Y-axis unit in the oblique axis state, the NC machine tool lowers the tool unit by a predetermined amount on the holder base, and then the predetermined amount. And the tool unit can be fixed to the Y-axis unit for setting (see, for example, Patent Document 4).

JP 2006-43779 A JP 2005-103667 A Japanese Patent Laid-Open No. 5-208344 Japanese Patent Laid-Open No. 2007-253306

  However, in Patent Document 4 disclosing the NC machine tool according to the applicant, the measurement of various dimensions such as the outer shape of the workpiece by the in-machine measuring device is performed on the workpiece subjected to various grinding and cutting processes, The measurement of the surface shape such as the shape error was not disclosed. In addition, conventional in-machine measuring devices have different usage methods depending on the type of sensor, and there is a problem that one measuring unit cannot perform all in-machine measurements on various external shapes and surface shapes of workpieces. When the measuring unit is installed in a processing machine such as an NC machine tool, the effective space for machining in the machine becomes narrower, there is no extra space in the conventional machine, and there are large restrictions on the installation location of the measuring unit. At present, it is impossible to install a plurality of measurement units. In addition, in machining machines such as NC machine tools, even a highly accurate ultra-precision machining machine can cause wear of the blade when machining the workpiece. Errors in the external dimensions and surface shape occur in the processing, and as a result, reliable and highly accurate workpiece processing cannot be performed, which is a problem.

  An object of the present invention is to solve the above-described problems. For example, in a processing machine such as an NC machine tool disclosed in Japanese Patent Application Laid-Open No. 2007-253306 developed by the present applicant, On the other hand, it is possible to measure the shape of the workpiece, such as the diameter and level difference, and to measure the surface shape such as the spherical shape, aspherical shape, and shape error of the workpiece with one in-machine measurement unit. When the in-machine measurement unit is used as a touch sensor for measuring the external dimensions such as the outer diameter, inner diameter, taper, step, etc. of the workpiece, the slider is fixed to the slider base of the air hydrostatic slide unit using the slider fixing jig. Measurements are made with reference to the coordinates when the non-machined workpiece is in contact with the built-in touch sensor. Also, the spherical shape, aspherical shape of the workpiece, When using as a displacement sensor to measure the shape and error of workpieces by tracing other various surface shapes, the slider of the air hydrostatic slide unit is not fixed, but the back and forth movement is read through the touch probe in contact with the workpiece. It is possible to measure various types of workpieces with a single in-machine measurement unit with high accuracy, and the equipment itself is compact, shortening the workpiece measurement time and producing workpiece machining. It is an object of the present invention to provide a multi-function in-machine measuring apparatus in a processing machine characterized by improving the performance.

The present invention includes a main shaft that is rotatably provided on the headstock and rotatably supports a workpiece, and an X-axis slide that is movable at least in the X-axis direction orthogonal to the Z-axis direction that is the axis of the main shaft. In the processing machine
The X-axis slide is provided with at least an in-machine measuring unit,
The in-machine measurement unit includes a unit base fixed to the X-axis slide, a slider base attached to the unit base, and an air hydrostatic slide unit composed of a slider slidable with respect to the slider base, the slider A touch probe attached to a touch sensor body fixed to the main body and extending toward the main shaft so as to contact the workpiece, a displacement sensor coupled to the slider, and a slider fixing for fixing or releasing the slider and the slider base And a touch sensor configured to measure a shape dimension such as an outer dimension of the work while the touch probe is in contact with the work in a state where the slider is fixed to the slider base by the slider fixing means. Slider fixing means for moving the slider to the slider base The displacement of the touch probe measured by tracing the surface shape such as the end surface of the workpiece is transmitted via the slider, and the displacement sensor The present invention relates to a multi-function in-machine measuring apparatus in a processing machine characterized by being configured.

  In this multi-function in-machine measuring device, the measurement object of the workpiece measured by the touch sensor is the outer diameter, the inner diameter, the step of the workpiece, or the shape dimension of the absolute value of the corner R, and the displacement sensor The measurement target of the workpiece measured by is the surface shape such as a spherical shape, an aspherical shape, a shape error of the workpiece, or an end surface with a continuous shape composed of a step, a taper, a spherical surface, or the like.

  In the multi-function in-machine measuring apparatus, the slider and the displacement sensor are connected by a connecting rod fixed to the slider, and a joint for connecting the connecting rod and the displacement sensor.

  In addition, the multi-function in-machine measuring device is configured to adjust an inclination of the air static pressure slide unit with respect to the unit base while the slider base of the air static pressure slide unit is connected to the unit base. And a height adjusting unit that adjusts the height of the air hydrostatic slide unit with respect to the unit base.

  Further, in this multi-function in-machine measuring device, the connecting rod fixed to the slider passes through a central space formed in the inclination adjusting unit and the height adjusting unit to the displacement sensor. It extends. The slider fixing means is composed of a slider fixing plate for fixing the slider to the slider base. Further, the pressing force of the touch probe against the workpiece is adjusted by a contact pressure adjusting spring provided in the air static pressure slide unit.

  In the multi-function measuring device in this processing machine, the X-axis slide is attached to the horizontal axis unit that is driven by the first grinding spindle and to which the first grinding wheel is attached, and is driven by the second grinding spindle and to which the second grinding wheel is attached. Each of the Y-axis units is mounted, and a holder base provided in the Y-axis unit is provided with a tool holder portion that can be changed to either the vertical axis state or the oblique axis state. Further, the in-machine measurement unit is disposed on the X-axis slide at a position between the horizontal axis unit and the Y-axis unit.

  Alternatively, in the multi-function in-machine measuring apparatus in this processing machine, at least one holder base is attached to the X-axis slide adjacent to the in-machine measuring unit, and various tool bits are attached to the holder base. Is fixed.

  Since the multi-function in-machine measuring device in the processing machine according to the present invention is configured as described above, it is possible to process a workpiece including a dimension or shape error when machining the workpiece due to wear of the cutting tool. The measurement of all dimensional errors and shape errors can be measured with a single in-machine measurement unit, and the workpiece can be corrected without removing the workpiece from the spindle. Errors can be easily measured with high accuracy. For optical molds, for example, general processing of outer diameter, inner diameter, end face, etc., and spherical processing and aspherical processing of lens parts are realized simultaneously. After machining a workpiece such as a lens, all measurements can be performed in the machine without unchucking.

It is a top view which shows the NC machine tool carrying the multifunctional in-machine measuring device by this invention. It is a top view which shows the state which inclined the Y-axis unit in the NC machine tool of FIG. It is a side view which shows the multifunctional in-machine measuring apparatus in the NC machine tool of FIG. FIG. 4 is an enlarged side view showing the multifunctional in-machine measuring device of FIG. 3. It is a top view which shows the multi-function in-machine measuring apparatus of FIG. FIG. 6 is an enlarged plan view of a partially broken portion of the multi-function in-machine measuring device of FIG. 5. It is a rear view which shows the multifunctional in-machine measuring apparatus of FIG. It is a top view which shows processing machines, such as a lathe, carrying the multifunctional in-machine measuring apparatus by this invention.

  Hereinafter, with reference to the drawings, an example of an NC machine tool among processing machines equipped with the multi-function in-machine measuring device according to the present invention will be described. This multi-function in-machine measuring device can be applied to various types of processing machines. The NC machine tool includes, for example, a spindle base 11 that rotatably supports a spindle 10 installed on a Z-axis slide 3 and a Z-axis slide 3 disposed on a bed 1 so as to be reciprocally movable in the Z-axis direction, and An X-axis slide 2 is provided independently of the Z-axis table 3 on the bed 1 and is movable in the X-axis direction orthogonal to the Z-axis direction in which the Z-axis slide 3 reciprocates. The Z-axis slide 3 is configured to reciprocate in the Z-axis direction on a bed 1 by a motor (not shown) such as a servomotor. Further, the spindle 10 rotatably supported on the spindle stock 11 is driven to rotate by, for example, a spindle motor. A chuck 12 that grips the workpiece 19 is provided at the tip of the main shaft 10. The work 19 is gripped by the chuck 12 and rotated by the rotational drive of the main shaft 10. Further, the X-axis slide 2 is movable on the X-axis direction orthogonal to the Z-axis direction of the Z-axis table 3 and is disposed on the bed 1 so as to face the work 19 attached to the chuck 12 of the main shaft 10. ing. The X-axis slide 2 constitutes a tool post unit, and is configured to reciprocate in the X-axis direction on a bed 1 by a motor (not shown) such as a servo motor.

  This NC machine tool has two types of turrets, a horizontal axis unit 5 and a Y axis unit 4 positioned so as to be spaced apart from the horizontal axis unit 5, adjacent to the X axis slide 2, FIG. Then, an in-machine measuring unit 7 constituting the multi-function in-machine measuring device which is a feature of the present invention is disposed at an intermediate position. In this NC machine tool, a grinding spindle 13 is incorporated in the horizontal axis unit 5 and the Y axis unit 4 so as to drive a tool such as a grindstone for grinding the workpiece 19.

  The horizontal axis unit 5 includes a holder 64 that can change the horizontal direction with respect to the base 24 fixed to the X-axis slide 2, and the holder 64 is attached with a tool holder portion 25 that can be attached so that the attachment angle can be changed. The horizontal direction of the tool holder portion 25 can be changed by rotating the holder 64 on the base 24 and fixing the holder 64 to the base 24. The holder 64 is provided with a tool holder portion 25 for attaching a tool such as a grindstone 32 with a shaft in an integral structure. In addition, a tool holder portion 26 whose posture can be changed to either the vertical axis state or the oblique axis state is mounted on the holder bases 15 and 16 provided in the Y-axis unit 4. When the cylindrical holder 18 is mounted on the collet tool 14 (FIG. 2) mounted on the tool holder 26 when the tool holder 26 is mounted on the Y-axis unit 4 in an oblique axis posture, It is suitable for machining the workpiece 19. The tool holder portion 26 can be attached to the Y-axis unit 4 in two kinds of states, that is, postures via the holder bases 15 and 16. In this NC machine tool, when the tool holder portion 26 is mounted on the Y-axis unit 4 in the vertical axis state, the X-axis is set so that the holder bases 15 and 16 of the Y-axis unit 4 are parallel to the X-axis direction. Set to slide 2. Further, when the tool holder portion 26 is mounted on the Y-axis unit 4 in an inclined posture, the holder bases 15 and 16 of the Y-axis unit 4 are set to the X-axis slide 2 perpendicular to the X-axis direction. It is.

  A multi-function in-machine measuring device in a processing machine according to the present invention is provided in the NC machine tool. In this NC machine tool, the X-axis slide 2 is driven by a grinding spindle 13 and mounted with a grindstone 32 with a shaft for machining the workpiece 19, and is driven by the grinding spindle 13 and machining the workpiece 19. In-machine measurement constituting a multi-function in-machine measuring device arranged between the Y-axis unit 4, which is a vertical axis unit to which the abacus-type grindstone 17 or the cylindrical grindstone 18 is attached, and the horizontal axis unit 5 and the Y-axis unit 4. Each unit 6 is placed or arranged. The Y-axis unit 4 is provided with a tool holder portion 26 that can be changed to either a vertical axis state or an oblique axis state on holder bases 15 and 16 provided thereon.

  The in-machine measurement unit 6 is attached to the X-axis slide 2 via a unit base 20. The in-machine measuring unit 6 includes a slider base 45 attached to a unit base 20 fixed to the X-axis slide 2 and a slider 21 that can slide on the slider base 45. The touch probe 8 is attached to the touch sensor main body 7 fixed by the holding jigs 36 and 37 and extends toward the main shaft 10 so as to be able to come into contact with the work 19, the displacement sensor 9 connected to the slider 21, and the slider 21 and the slider. Slider fixing means such as a slider fixing plate 30 for fixing or releasing the base 45 is provided. The in-machine measuring unit 6 measures the outer and inner diameters of the workpiece 19 such as the outer diameter, the inner diameter, and the steps of the workpiece 19 that have been subjected to various grinding processes, and the spherical shape and aspherical shape of the workpiece 19. The surface shape can be traced and measured, and their shape errors can be measured. This multi-function in-machine measuring device constitutes a touch sensor in which the touch probe 8 measures a shape dimension such as the outer shape of the work 19 in a state where the slider 21 is fixed to the slider base 45 by the slider fixing plate 30, and the slider In a sliding state in which the slider 21 is released from the slider base 45 by the fixing plate 30, the touch probe 8 traces and measures the surface shape such as the end face of the work 19, and the axial variation of the touch probe 8 is caused to pass through the slider 21. The surface shape of the workpiece 19 is measured by the displaced displacement sensor 9. In other words, this multi-function in-machine measuring device is capable of measuring two different types of workpieces 19, that is, shape dimensions and surface shapes. In this multi-function in-machine measuring device, the air static pressure slide unit 22 is reinforced by a pair of reinforcing plates 55 fixed to the air static pressure slide unit 22 and the slide member 40 of the inclination adjusting unit 27 to increase the rigidity. Yes.

  A pair of springs 23 are provided on the upper part of the air static pressure slide unit 22 in the in-machine measuring unit 6 for adjusting the contact pressure of the touch probe 8 against the work 19. The spring 23 has a function of adjusting a contact pressure that is a pressing force of the touch probe 8 against the work 19. In the contact pressure adjusting mechanism, end plates 60 are fixed on the front and rear sides of the slider 21, and spring hooks 58 for hanging one end of the spring 23 are attached to the both end plates 60. An adjustment plate 57 is slidably attached to the upper surface of the slider 21. A spring hanging rod 59 for hanging the other end of the spring 23 is attached to the adjustment plate 57. As shown in FIG. 5, in the in-machine measuring unit 6, a fixing screw 62 is inserted into a long hole 61 that is an adjustment hole provided in the adjustment plate 57, whereby the adjustment plate 57 is adjusted to a predetermined position adjusted by the slider 21. It is fixed by the fixing screw 62.

  The slider 21 can be adjusted and moved slightly forward and backward, for example, about ± 1 mm. A dial gauge is applied to the front surface of the slider 21, the center is set to the stroke center, the spring 23 is hung on the spring hanging rods 58 and 59, and the adjustment plate 57 is adjusted to the stroke center. The touch probe 8 can also use an extension bar (not shown) when the protruding length is short. The air static pressure slide unit 22 has its lower surface supported in a mounted state on the unit base 20 by a support member 56 such as a set screw or a ball plunger, thereby ensuring stability.

  The in-machine measuring unit 6 fixes the slider 21 to the slider base 45 by a slider fixing means that can be constituted by a plate, and urges the touch sensor built in the touch sensor body 7 so that the outer diameter, inner diameter, step, etc. The size of the workpiece 19 is measured, the slider 21 is released from the slider base 45 by the slider fixing means, the change of the touch probe 8 is transmitted to the displacement sensor 9 and the displacement sensor 9 is energized, and the spherical shape of the workpiece 19 is measured. The surface shape such as an aspherical shape is traced to measure the shape error. This multi-function in-machine measuring device uses a built-in touch sensor to perform measurement using the coordinates at the time of contact of the non-machined workpiece 19 to measure the surface shape of the workpiece 19 such as a spherical shape or an aspherical shape. To do so, the slider 21 in the air hydrostatic slide unit 22 is released without being fixed to the slider base 45 and functions as a displacement sensor 9 that reads back and forth movement through the touch probe 8 in contact with the workpiece 19 to trace the workpiece shape. To measure. The displacement sensor 9 is set by penetrating the inside of the case 54, and for example, a sensor having a resolution of 0.01 μm is used.

  Further, in this multi-function in-machine measuring device, the slider 21 and the displacement sensor 9 are connected by a connecting rod 35 fixed to the slider 21 and a joint 34 for connecting the connecting rod 35 and the displacement sensor 9. Further, in this multi-function in-machine measuring device, the air static pressure slide unit 22 is attached to the unit base 20 via a height adjusting unit 28 and an inclination adjusting unit 27. The height state of the touch probe 8 with respect to the work 19 is adjusted by the height adjustment unit 28, and the inclination state is adjusted by the inclination adjustment unit 27. Accordingly, the height of the air hydrostatic slide unit 22 is adjusted with respect to the unit base 20 by the height adjusting unit 28, and the inclination is adjusted with respect to the unit base 20 by the inclination adjusting unit 27. It is configured. The slider 21 to which the touch sensor body 7 is fixed has a connecting rod that passes through a central space 52 such as a central hole of the height adjusting unit 28 and a central space 53 such as a central hole of the inclination adjusting unit 27. 35 is fixed. The connecting rod 35 and the displacement sensor 9 are connected by a joint 34. Therefore, the slider 21 and the displacement sensor 9 are connected via the connecting rod 35 and the joint 34. Accordingly, when the touch probe 8 comes into contact with the work 19 and changes in the axial direction according to the surface shape of the work 19, the change in the axial direction is transmitted to the slider 21 to move in the axial direction of the slider 21. The movement in the axial direction is transmitted to the displacement sensor 9 via the connecting rod 35.

  In this multifunctional in-machine measuring device, the height adjusting unit 28 includes a fixing member 43 attached to a plate 44 fixed to the unit base 20 on the height guide stage, and a height adjusting knob with respect to the fixing member 43. 48 and a slide member 42 that moves in the height direction. The height direction is adjusted with the height adjusting knob 48, and then the slide member 40 is fixed with the fixing screw 31. The height adjustment knob 48 is a micro type, and is set such that, for example, the slide member 42 moves downward when the knob 48 is adjusted downward, and the slide member 42 moves upward when the knob 48 is adjusted upward. Has been. The knob 48 and the slide member 42 are in contact with each other and are not fixed to each other. The slide member 42 is configured such that a spring 63 is incorporated between the slide member 42 and the fixing member 43, and returns to its original position by the spring force of the spring 63 when the fixing by the fixing screw 31 is released. . The inclination adjusting unit 27 includes a fixing member 41 fixed to the slide member 42 of the height adjusting unit 28 and a slide member 40 attached to the air static pressure slide unit 22. The convex surface 47 of the slide member 40 is slid with respect to 46 by the tilt adjusting knob 49 to set the position of the air static pressure slide unit 22 and fixed by the fixing screw 33. The slide member 40 is configured to return to its original position by a spring force when the fixing by the fixing screw 33 is released. The operation of the inclination adjusting knob 49 is the same as that of the height adjusting knob 48 except that the inclination state is adjusted. The movement of the slide member 40 is the same as the movement of the slide member 42 except that the inclination state is adjusted.

  This multi-function measuring device uses the slider fixing plate 30 for the slider 21 in the air hydrostatic slide unit 22 when measuring the outer shape such as the outer diameter, inner diameter, and step of the workpiece 19 processed by the touch sensor. The above-mentioned various kinds of workpieces 19 processed by a normal measurement method are attached to the air hydrostatic slide unit 22 with screws or the like, the slider 21 is fixed to the slider base 45 by the slider fixing plate 30, and the touch probe 8 functions as a touch sensor. Measure the shape dimensions. In measuring the shape dimension of the work 19, information obtained by bringing the touch probe 8 into contact with the outer shape of the work 19 and functioning as a touch sensor is processed by a computer to measure the shape and other dimensions of the work 19.

  When measuring the surface shape of the processed workpiece 19 such as a spherical shape or an aspherical shape, the slider fixing plate 30 is released from the slider 21 in the air static pressure slide unit 22 in order to release the fixation of the air static pressure slide unit. Then, the slider 21 is set free or slid with respect to the slider base 45, the touch probe 8 in the touch sensor is used as the tentacle of the displacement sensor 9, and the slight change in the position of the touch probe 8 in the front-rear direction is detected. Is transmitted to the displacement sensor 9 through the slider 21 and the connecting rod 35, and the surface shape of the workpiece 19 is traced and measured by the fluctuation of the displacement sensor 9 in the front-rear direction. That is, when measuring the surface shape of the processed workpiece 19, the air static pressure slide unit 22 is made free, and the touch probe 8 traces the surface of the workpiece 19 and performs trace measurement, and analyzes the data, that is, information by a computer. , Express the step or uneven shape. Next, a correction program that takes into account the program once processed and its error is created, the surface of the workpiece 19 is processed, and the shape error of the processed surface of the workpiece 19 is corrected. In the conventional machining method, when the curved surface of the workpiece 19 is machined, only the absolute value of the corner R is measured by the touch sensor, and the trace of the machining surface is measured outside the machine. It had to be installed in the machine, which required time and errors. However, in this multi-function in-machine measuring device, the trace by the displacement sensor 9 is easy to understand the surface state of the processing surface such as a spherical surface, and can be fed back to the processing to continue accurate processing. As a result, there is no occurrence of misalignment of the center of the workpiece or setup time.

  Next, with reference to FIG. 8, another embodiment of the multi-function in-machine measuring apparatus in the processing machine according to the present invention will be described. This embodiment is applied to a lathe as a processing machine. The X-axis slide 2 functioning as the tool post unit 65 has at least one (two in FIG. 8) adjacent to the in-machine measurement unit 6. A holder base 66 is attached, and a tool holder 67 to which various (two types in FIG. 8) tools B1, B2, B3, B4 are attached is fixed to the holder base 66. The in-machine measuring unit 6 in this embodiment can perform the same function as in the above embodiment.

  The multi-function in-machine measuring device in this processing machine is applied to processing machines such as lathes, grinders, NC machine tools, etc. that cut workpieces with tools such as tools and grindstones. It is preferable to apply to the measurement of the surface shape such as the shape such as the inner diameter, the spherical shape, and the aspherical shape.

2 X-axis slide 4 Y-axis unit 5 Horizontal-axis unit 6 In-machine measurement unit 7 Touch sensor body 8 Touch probe 9 Displacement sensor 10 Spindle 11 Spindle 12 Chuck 13 Grinding spindle 15, 16 Holder base 17 Abacus-type grindstone 18 Cylindrical grindstone 19 Workpiece 20 Unit base 21 Slider 22 Air hydrostatic slide unit 23 Contact pressure adjusting spring 25, 26 Tool holder 27 Inclination adjusting unit 28 Height adjusting unit 30 Slider fixing plate 32 Shaft with shaft 34 Joint 35 Connecting rod 45 Slider base 52, 53 Central space 65 Tool post unit 66 Holder base 67 Bite holder B1, B2, B3, B4 Bite

Claims (10)

In a processing machine comprising a main shaft rotatably provided on a headstock and rotatably supporting a workpiece, and an X-axis slide movable at least in an X-axis direction orthogonal to a Z-axis direction that is an axis of the main shaft ,
The X-axis slide is provided with at least an in-machine measuring unit,
The in-machine measurement unit includes a unit base fixed to the X-axis slide, a slider base attached to the unit base, and an air hydrostatic slide unit composed of a slider slidable with respect to the slider base, the slider A touch probe attached to a touch sensor body fixed to the main body and extending toward the main shaft so as to contact the workpiece, a displacement sensor coupled to the slider, and a slider fixing for fixing or releasing the slider and the slider base And a touch sensor configured to measure a shape dimension such as an outer dimension of the work while the touch probe is in contact with the work in a state where the slider is fixed to the slider base by the slider fixing means. Slider fixing means for moving the slider to the slider base The displacement of the touch probe measured by tracing the surface shape such as the end surface of the workpiece is transmitted via the slider, and the displacement sensor A multi-function in-machine measuring device in a processing machine characterized by comprising.   The workpiece measurement object measured by the touch sensor is the outer diameter, inner diameter, step, or absolute shape of the corner R of the workpiece, and the workpiece measurement measured by the displacement sensor. The object is the surface shape such as a spherical shape, an aspherical shape, a shape error, or an end surface with a continuous shape composed of a step, a taper, a spherical surface, or the like. Multi-function in-machine measuring device for processing machines.   3. The processing according to claim 1, wherein the slider and the displacement sensor are connected by a connecting rod fixed to the slider, and a joint that connects the connecting rod and the displacement sensor. Multi-function in-machine measuring device. In the middle of the connection between the slider base and the unit base of the air hydrostatic slide unit, an inclination adjusting unit for adjusting the inclination of the air hydrostatic slide unit with respect to the unit base, and the unit base The multifunctional in-machine measurement device for a processing machine according to any one of claims 1 to 3, further comprising a height adjustment unit that adjusts a height of the air static pressure slide unit. The connecting rod fixed to the slider extends through the central space formed in the inclination adjusting unit and the height adjusting unit to the displacement sensor. 5. A multi-function in-machine measuring device in the processing machine according to 4. 6. The multi-function in-machine measuring device for a processing machine according to claim 1, wherein the slider fixing means includes a slider fixing plate for fixing the slider to the slider base. . 7. The processing machine according to claim 1, wherein a pressing force of the touch probe against the workpiece is adjusted by a contact pressure adjustment spring provided in the air static pressure slide unit. Multifunctional in-flight measuring device.   The X-axis slide is mounted with a horizontal axis unit that is driven by the first grinding spindle and to which the first grindstone is attached, and a Y-axis unit that is driven by the second grinding spindle and to which the second grindstone is attached. 8. The tool holder portion that can be changed to either the vertical axis state or the oblique axis state is mounted on the holder base provided in the Y-axis unit, according to claim 1. Multifunctional in-machine measuring device for the processing machine described.   The multi-function in-machine measurement device for a processing machine according to claim 8, wherein the in-machine measurement unit is disposed on the X-axis slide at a position between the horizontal axis unit and the Y-axis unit. .   2. The X-axis slide is attached with at least one holder base adjacent to the in-machine measurement unit, and a tool holder to which various tools are attached is fixed to the holder base. A multi-function in-machine measuring device in the processing machine according to any one of?

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