TW201115676A - Substrate positioning apparatus and method of positioning substrate using the same - Google Patents

Substrate positioning apparatus and method of positioning substrate using the same Download PDF

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Publication number
TW201115676A
TW201115676A TW098144948A TW98144948A TW201115676A TW 201115676 A TW201115676 A TW 201115676A TW 098144948 A TW098144948 A TW 098144948A TW 98144948 A TW98144948 A TW 98144948A TW 201115676 A TW201115676 A TW 201115676A
Authority
TW
Taiwan
Prior art keywords
substrate
pad
unit
platform
perforation
Prior art date
Application number
TW098144948A
Other languages
English (en)
Chinese (zh)
Inventor
Jong-Hyoun Park
Original Assignee
Top Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Top Eng Co Ltd filed Critical Top Eng Co Ltd
Publication of TW201115676A publication Critical patent/TW201115676A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
TW098144948A 2009-10-20 2009-12-25 Substrate positioning apparatus and method of positioning substrate using the same TW201115676A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090099540A KR20110042733A (ko) 2009-10-20 2009-10-20 기판위치결정장치 및 방법

Publications (1)

Publication Number Publication Date
TW201115676A true TW201115676A (en) 2011-05-01

Family

ID=43909571

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098144948A TW201115676A (en) 2009-10-20 2009-12-25 Substrate positioning apparatus and method of positioning substrate using the same

Country Status (3)

Country Link
KR (1) KR20110042733A (ko)
CN (1) CN102043288A (ko)
TW (1) TW201115676A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101133467B1 (ko) * 2009-10-20 2012-04-09 강경호 차량용 거치대
KR102068000B1 (ko) * 2012-11-19 2020-01-20 주식회사 탑 엔지니어링 증착 장치용 기판 로딩 장치
KR102605917B1 (ko) * 2016-04-07 2023-11-27 주식회사 탑 엔지니어링 스크라이빙 장치
KR20170115636A (ko) * 2016-04-07 2017-10-18 주식회사 탑 엔지니어링 스크라이빙 장치

Also Published As

Publication number Publication date
CN102043288A (zh) 2011-05-04
KR20110042733A (ko) 2011-04-27

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