TW201114671A - Transferring system for magnetic levitation - Google Patents

Transferring system for magnetic levitation Download PDF

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Publication number
TW201114671A
TW201114671A TW99136081A TW99136081A TW201114671A TW 201114671 A TW201114671 A TW 201114671A TW 99136081 A TW99136081 A TW 99136081A TW 99136081 A TW99136081 A TW 99136081A TW 201114671 A TW201114671 A TW 201114671A
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TW
Taiwan
Prior art keywords
suspension
unit
sub
propulsion
magnetic suspension
Prior art date
Application number
TW99136081A
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Chinese (zh)
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TWI432370B (en
Inventor
Gyeong-Nam Lee
Jun-Wan Park
Jae-Sig Jang
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Sfa Engineering Corp
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Priority claimed from KR1020090102730A external-priority patent/KR101256190B1/en
Priority claimed from KR1020090102729A external-priority patent/KR101256189B1/en
Priority claimed from KR1020090102731A external-priority patent/KR101256191B1/en
Application filed by Sfa Engineering Corp filed Critical Sfa Engineering Corp
Publication of TW201114671A publication Critical patent/TW201114671A/en
Application granted granted Critical
Publication of TWI432370B publication Critical patent/TWI432370B/en

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  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Non-Mechanical Conveyors (AREA)

Abstract

Disclosed is a transferring system for magnetic levitation. The transferring system for magnetic levitation includes: a common support frame to which a loading unit to be loaded with an object is coupled; a rail which forms a course where the common support frame is transferred; a levitation unit which includes a plurality of sub levitation units spaced apart from each other and connecting with the common support frame, and levitates the common support frame as high as a preset height with regard to the rail; a propulsion unit which connects with the common support frame and provides a propulsive force so that the levitated common support frame can be transferred along the course of the rail; and a power supply unit which supplies power to the levitation unit and the propulsion unit. With this, a magnetic levitation method is employed as one of non-contact type method in transferring various objects including a cassette, specially, a large-sized object, to thereby solve a problem of damaging components due to friction and abrasion and a problem of causing noise as well as solving a problem of generating particles, and also easily and correctly control a levitation unit.

Description

201114671 i 六、發明說明: 【發明所屬之技術領域】 本發明涉及一種磁力懸浮傳送系統,更具體而言,涉及一種如 下的磁力懸浮傳送系統:其在傳送各種物體(包括傳送盒)、特別 是大尺寸的物體時採用磁力懸浮方法作為其中一種非接觸型方 法’從而解決由於摩擦及磨損而損壞元件的問題及造成雜訊的問 題以及解決產生微粒⑭〗題,並且可W且正確地控㈣浮單元。 【先前技術】 傳送系統是-種用於傳送物體的裳置。此處’物體可不僅包括 用於液晶顯示器(liquid crystal dispIay ; lcd ) '等離子體顯示面 板(to diSpIay panel ; PDp)、有機發光二極體(一 p一 _ ; OLED )等的基板、用於半導體器件的晶圓、用於 谷置和支擇基板或晶圓的托盤、傳送盒或載具,而且還包括各種 物件’例如常用的盒子。以下,將以傳送盒作為物體進行說明。 用於傳送盒的傳送系統分為接觸型傳送系統及非接觸型傳送系 統0 軌、酋型統又分為傳送機型傳送系統、滚筒型傳送系統、 ‘3”統等。這種接觸型傳送系統可能會在傳送過程中在 因此’例如’如果使用接觸型傳送系統來 ;!有咖基㈣傳送盒,職板及淨化室可能會被微粒污 此外, 接觸型傳送系統會在傳送結 構或輸電結構的接觸部件中 201114671201114671 i VI. Description of the Invention: [Technical Field] The present invention relates to a magnetic suspension transmission system, and more particularly to a magnetic suspension transmission system that transmits various objects (including a transport box), particularly Large-sized objects use magnetic suspension as one of the non-contact methods' to solve the problem of damage to components due to friction and wear and the problem of noise and solve the problem of generating particles, and can be properly controlled (4) Floating unit. [Prior Art] The transport system is a kind of skirt for transporting objects. Here, the object may include not only a substrate for a liquid crystal display (liquid crystal dispIay; lcd) 'to diSpIay panel (PDp), an organic light emitting diode (a p-type OLED), but also Wafers for semiconductor devices, trays, transfer boxes or carriers for valleys and substrate or wafers, but also various items such as commonly used boxes. Hereinafter, the transfer case will be described as an object. The conveying system for the transfer box is divided into a contact type conveying system and a non-contact type conveying system 0 rail, the Emirates type is further divided into a conveyor type conveying system, a drum type conveying system, a '3" system, etc. This type of contact type transmission The system may be in the process of transmission, for example, if using a contact-type conveyor system; there is a coffee-based (four) conveyor box, the job board and the clean room may be contaminated by particulates. In addition, the contact-type conveyor system will be in the transmission structure or transmission. Structure of the contact parts 201114671

V 產生磨損或摩擦,因此存在元件頻繁地損壞、造成可怕的雜吨 以及無法以南於預定水準的速度進行傳送等問題。 其解決了由於摩擦及 相反,非接觸型傳送系統具有以下優點 產生微粒的問 直在積極地研 磨損而損壞元件的問題及造成雜訊的問題並解決了 題,並且可以高速傳送物體。因此,近來,人們— 究非接觸型傳送系統。 作為非接觸型傳送系統,可考慮磁力懸浮傳送系統。磁力懸浮 技術是基於磁體(電磁體)的吸引及排斥。當前,已知一種應用 磁力懸浮技術的磁懸浮列車。然而,磁懸浮列車的商業啟動一直 因各種問題而被推遲。 這樣,磁力懸浮技術僅僅應用於載人的磁懸浮列車而尚未應 用於用於裝載和傳送物體(例如傳送盒)的傳送系統。因此,為 將磁力懸浮技術應用到用於裝載和傳送物體(例如傳送盒)的傳 送系統’需要在許多方面開發不同於磁懸浮列車技術的新技術。 儘管須在許多方面開發新技術,然而新技術的開發非常重要, 因為在開發磁力懸浮傳送系統時,預期應解決由於摩擦及磨損而 損壞元件的問題.、造成雜訊的問題以及在傳送各種物體(包括傳 送丑)、尤其是大尺寸的物體時產生微粒的問題。 同時’對於開發此種磁力懸浮傳送系統而言,首要的是開發用 於容易且正確地控制懸浮單元的技術。 么另外,對於開發採用磁力懸浮技術來裝載和傳送物體的傳送系 •先而。S提供電力來操作料單元的懸浮電磁體以及推進單元 201114671 的推進電磁體時’會產生高頻’從而造成震動。如果不適當地阻 尼(或減小)此種震動,便難以保證傳送主體的穩定傳送並且在 某些情形中還可能會損壞物體。因此,需要開發阻尼技術,以防 止震動從懸浮電磁體或推進電磁體通過傳送主體直接傳遞至裝載 單元。 此外’對於開發採用磁力懸浮技術來裝載和傳送物體的傳送系 統而言’需要提供許多用於保證裝載有物體並沿軌道傳送送 主體被穩定地傳送的手段,尤其是開發詩使傳送主體在軌道上 著陸時可通過傳送主體與軌道之間的滾動接觸而穩定著陸的技 術。 【發明内容】 本發明提供一種磁力懸浮傳送系統,其在傳送各種物體(包括 傳送盒)、特別是大尺寸的物體時制磁力懸浮方法作為其中一種 非接觸型方法’從而解決由於摩擦及磨損而損壞元件的問題及造 成雜訊的_以及解決產生微粒的問題,並且還可容易且正確地 控制懸浮單元。 本發明的另-方面提供-種磁力B浮傳送系統,其在傳送各種 々體(包括傳运盒)、特別是大尺寸的物體時採用磁力懸浮方法作 為/、中種非接㈣方法,從而解決由於料及磨損*損壞元件 :問題及造成㈣的_以及解決產生微㈣問題,並且還有效 ”且尼通過裝載有物體並沿軌道傳送的傳送主體傳遞至裝載單元 的震動。 衣戰早兀 本發明的又一 方面提供一種磁力懸浮傳送系統,其在傳送各種V causes wear or friction, so there are problems such as frequent component damage, terrible miscellaneous tons, and inability to transmit at a predetermined speed. It solves the problem that the non-contact type conveying system has the following advantages due to friction and, on the contrary, the problem of generating particles is actively studying the problem of damaging the components due to wear and the problems of the noise, and solving the problem, and the object can be transported at a high speed. Therefore, recently, people have studied non-contact transmission systems. As a non-contact type conveying system, a magnetic suspension conveying system can be considered. Magnetic suspension technology is based on the attraction and repulsion of magnets (electromagnets). Currently, a magnetic levitation train using magnetic suspension technology is known. However, the commercial launch of maglev trains has been delayed due to various problems. Thus, the magnetic levitation technique is only applied to manned maglev trains and has not been applied to transport systems for loading and transporting objects such as transport boxes. Therefore, the application of magnetic suspension technology to a transport system for loading and transporting objects (e.g., transport boxes) requires development of new technologies in many respects that are different from maglev train technology. Although new technologies must be developed in many respects, the development of new technologies is very important because when developing magnetic suspension conveyor systems, it is expected to solve the problem of damage to components due to friction and wear, problems with noise, and transmission of various objects. (including the transmission of ugliness), especially when large objects are produced. At the same time, the first thing to develop such a magnetic suspension conveyor system is to develop a technique for easily and correctly controlling the suspension unit. In addition, for the development of transmission systems that use magnetic suspension technology to load and transport objects. S provides power to operate the suspended electromagnet of the material unit and when propelling the electromagnet of the propulsion unit 201114671 'will generate high frequency' and cause vibration. If such vibrations are improperly retarded (or reduced), it is difficult to ensure a stable transfer of the transport body and, in some cases, damage to the object. Therefore, it is necessary to develop a damping technique to prevent vibration from being directly transmitted from the floating electromagnet or the propelling electromagnet through the transport body to the loading unit. In addition, 'for the development of a transmission system that uses magnetic levitation technology to load and transport objects', it is necessary to provide a number of means for ensuring that objects are loaded and transported along the track. The development of poetry allows the transmission body to be in orbit. A technique for stabilizing landing by rolling contact between the main body and the track when landing. SUMMARY OF THE INVENTION The present invention provides a magnetic suspension transport system that utilizes a magnetic suspension method as one of the non-contact methods when transporting various objects (including transport boxes), particularly large-sized objects, thereby solving damage due to friction and wear. The problem of the components and the problems that cause the noise and the problem of particle generation, and the suspension unit can be easily and correctly controlled. Another aspect of the present invention provides a magnetic B-float transport system that uses a magnetic suspension method as a /, a medium non-contact (four) method when transporting various carcasses (including transport boxes), particularly large-sized objects, thereby Solve the damage caused by the material and wear * damage to the component: the problem and the resulting (4) _ and solve the problem of micro (4), and also effective "and the vibration transmitted to the loading unit by the transport body loaded with the object and transported along the track. Yet another aspect of the invention provides a magnetic suspension transport system that transmits various

S 6 201114671 物體(包括傳;^盒)、制是大尺寸的物體時採用磁力懸浮方法作 為”中種非接觸型方法,從而解決由於摩擦及磨損而損壞元件 的問題及造成雜訊的問題以及解決產生微粒的問題,並且還導引 傳送主體在執道上穩定地著陸。 根據本發明的一方面,提供一種磁力懸浮傳送系統,該磁力懸 洋傳送系統包括:共用支撐框架,欲裝載有物體的裝載單元搞合 縣Ί…支撐框木,軌道,形成用於傳送共用支撐框架的路線; 二Γ早70 ’包括多個相互間隔開並與共用支撐框架相連接的子懸 =凡’並用於使共用支撐框架相對於軌道懸浮至預設高度·推 曾H與料支肋㈣目連接則於提供推進力,使得可沿軌 =轉㈣浮的共較撐框H及電源單元,用於向懸浮 單7L及推進單元供電。 很像本發明的另一方 殮π 面美仪―種磁力懸浮傳送系統,該磁 二送:傳=載有物__合. 與傳送主體相連接並使傳送7 4主體的路線;懸浮單元 進單元,與傳送主體相==於軌道懸浮至預設高度;彳 路線值、f 連接亚用於提供推進力,使得可沿軌道έ 元供電、::Γ傳达主體;電源單元,用於向懸浮單元及推進, 與傳送一一尼來… 根據本發明的又_ 懸浮傳送系統包括:傳送二:Γ磁力懸浮傳送系統,該磁力 該傳送主體;軌道,形成:衣載有物體的裝載單元耦合至 ^ ;傳送傳送主體的路線;懸浮單元, 201114671 與傳送主體相連接並使傳送主體㈣於軌道懸浮至預設高度;推 進單元’與傳送主體相連接並用於提供推進力,使得可沿軌道的 路線傳达料的傳送主體;電源單元,用於向懸浮單元及推進單 元供電;以及著陸滾輪’輕合至傳送主體並用於當傳送主體在軌 道上著陸時與執道進行滾動接觸。 為讓上述目的、技術特徵、和優點能更明顯易懂,下文係以較 佳實施例配合所附圖式進行詳細說明。 【實施方式】 為充刀地理解本發明及其優點,以下將參照用於例示本發明實 施例的附圖。 ' j下文中’將通過參照_解釋本發明的實施例來對本發明進 行詳、.、田。尤明。各圖式中的相同參考編號表示相同元件。 第圖為根據本發明貫例性實施例的磁力懸浮傳送系統的立體 圖’第2圖為第丨圖的局部分解立體圖;第3圖為第1圖中的共 用支樓框架的放大圖;第4圖為_單元㈣大立體圖;第5 _ 至第8圖為第4圖的平面圖、後視圖、左侧視圖以及前視圖;第9 圖為第4圖所示㈣浮單元中的子懸浮/推進單元的放大立體圖; 第10圖及第11圖為第9圖的不同角度的立體圖;第12圖顯示懸 子單兀位於執道上;第13圖為用於著陸的滾輪區域的放大結構 圖’第14圖為用於左右導引的滾輪區域的放大結構圖;第b圖 為用於防止碰撞的滾輪區域的放大結構圖;以及第16圖為根據本 發明貫例性實施例的磁力m浮傳送系統的控制方塊圖。 201114671 如圖所示,磁力懸浮傳送系統包括:傳送主體⑶,欲 體的裝載單元110柄合至該傳送主體12〇;轨道⑻,形^用於 送傳送主體12〇的路線;懸浮單元13G,與傳送主體⑶相連接並 使傳送主體12〇相對於軌道1G1懸浮至預設高度;推進單元⑽ 與傳送主體12〇相連接並用於提供推進力,使得可沿軌道⑼的 路線傳送由懸浮單it no懸浮的傳送主體12G;電源單元15〇 ,用 於向懸浮單以30及推進單元140供電;以及阻尼單元⑽,盘傳 达主體U0相連接並用於阻尼來自懸浮單元13〇及推進單元刚 的震動。 傳送主冑120是在被懸浮單$ 13〇懸浮的同時沿軌道⑻行進 並傳送物體的元件’這形成本實例性實施例的基本框架。傳送主 體120可具有各種配置及形狀。在本實例性實施例中傳送主體 120用作共用支撐框架’用於成—體地支撐並連接四個子懸浮/推 進單元⑶(將在稍後進行說明),因此在下文中將傳送主體… 稱為共用支撐框架120。 在依序說明這些^件之前,首先將對軌道igi (參見第η圖) 進行說明。軌道101形成用於移動(即傳送)共用支標框架120 的路線’裝載|元1H)在—側輕合至該共用支樓框架⑶。 在本實例性實施财,軌道⑻是以直㈣形式提供。這是因 為、用支撐框架12G的區域具有3 m或更大的長度/寬度。然而, 軌道101可以是以閉環形式而不是直線形式提供的橢圓環形軌道。 執道101疋由導體中具有高強度及耐腐钱性的不銹鋼、非導體 令的紹(Ai)、以及某些其他金屬的適當組合製造而成。換句話說, 201114671 執道101須與懸浮單元13〇及推 減ο I、 料早7014G相互作財能懸浮或 :(P驅動)共用支撐框架12〇’因此軌道1〇1需 材 料特徵。僅當軌道⑻具有上述材料特徵時,電場或磁場才可縣 洋和推動共用支樓框架120。如第12圖所示,軌道101由軌道^ 揮腳103支標在地面上。 裝載單元m是欲裳载物體的元件,如第i圖至第3圖所示。 在本實例性實施例中,物體是指褒載有液晶顯示器(咖仏咖 —lay; LCD)基板的傳送盒,並且尤其是指裝載有長度/寬度約 為^或3m左右的大尺寸LCD基板的大尺寸傳❹,但並不僅 限於此。作為另外-種選擇,物體可不僅包括用於⑽、等離子 體顯示面板(plasma display panel; PDp)、有機發光二極體(〇啊^ nght emitting diode ; OLED )等的基板、用於半導體器件的晶圓、 用於容置和支«板或晶圓的托盤、傳送盒或載具,而且還包括 各種物品,例如常用的盒子、電氣設備等。 欲裝載有作為物體的傳送盒的裝載單元11〇包括裝載主體⑴ 以及裝載板112。裝載主體⑴與制支撐㈣12()的上部框架 121的四個拐角區域中的每一者相連接並向上傾斜。裝載板ιΐ2在 水準方向上設置於裝載主體⑴的上端部並用於支撑物體的底部。 裝載主體111可具有實心杆結構。然而,在本實例性實施例中, 裝載主體ill具有中空的管道結構(參見第3圖的放大部分)。裝 載板112可形成有多個真空孔】】3,如第1圖的所大體顯示。在此 種情形中,通過具有管道結構的裝載主體u丨對真空孔進行抽真 空,從而使傳送盒可被牢固地吸附並固定在裝載板112上。當然, 201114671 =僅為實例。作為另外—種選擇,傳送盒可不需由真空吸附和 ,^裝^板U2的周邊上,防分離突出部ιΐ4向上突出並防止傳 时離突以卩114可具冑‘L,形狀錢置於周邊的— 力口刀,但衫僅限於此^作為另外—種選擇,可提供簡單的掷 ,型2早元(圖未示出)來代替本實例性實施例中所示的裝載 早兀110,從而裝載傳送盒。 此外,外部封蓋U7圍繞裝載單元11〇設置,以環繞除裝載單 疋U〇之外的共用支樓框架120的外側。此外,多個維修出入口 118搞合至外部封蓋117的表面,以使其可被打開及_。因此, 工人可通過維修出入口 118維修元件。 外。P封盘117用以保護共用支撐框架12〇的上部區域以及共用 支撐框架12〇’而共用支撐框架12〇的下部結構則是由第ι圖及第 2圖所示的保護封蓋119進行保護。 保護封蓋119延伸至軌道101的橫向側,並局部地保護放置在 其中的共用支樓框帛120的下部結構。保護封蓋119的區域中可 存在各種結構。具體而言,懸浮單元13G及推進單元⑽放置在 此區域中,以使保護封蓋119可保護懸浮單元13〇及推進單元 不又外部影響。保護封蓋119具有朝向執道1〇1彎曲的下端部以 及形成有多個孔119a的表面。當然,保護封蓋119是可選元件, 而不是必不可少的。 共用支撐框架〖20是用於支撐裝載單元11〇及懸浮單元13〇的 11 201114671 、. 元件’這形成磁力懸浮傳送系統的基本框架。共用支撐框架⑽ 可被形成為單—本體。然而,在本實例性實施例中,如第2圖所 不共用支撐框架120被劃分成放置在懸浮單元13〇上方的上部 框架㈣以及放置在懸浮單元13㈣—側處並連接懸浮單元⑽ 與上部框架m的側面框架122。上部框架121及側面框架⑵ 中的每-者均是通過焊接管道而形成,這可降低材料的成本或重 曼〇 懸洋單元130用以使共用支掠框架12〇相對於軌道1〇1懸浮至 預設尚度Η (參照第12圖)。 在本實例性實施例中,懸浮單幻3G包括多個子懸浮單元⑶, 例如如第4圖至第8圖所示的四個懸浮單元131。在懸浮單元BO 包括該多個子懸浮單幻31的情形中,可防止—個子懸浮單元⑶ 的震動影響另—子懸浮單元131 ’從而實現正確且容易的控制。 $果懸浮單元130使共用支撐框架12〇懸浮超過預設高度Η(參 見第12圖),則共用支撐框架12〇可與軌道ι〇ι碰撞或可預期導 致浪費功耗。 因此’调整共用支撐框架12〇通過懸浮單元13〇所懸浮的高度Η 頗為重要。為此,懸浮單幻3〇還包括間隙感測器(圖未示出), 以用於基於制支揮框架12(Μ目對於軌道igi懸浮的高度Η來感 測間隙。間隙感測器可允許的間隙範圍可為共用支樓框架⑶的 懸浮面度Η。 同時,通過執道101與懸浮單元130之間的相互作用而使傳送 Τ' — a*;* 12 201114671S 6 201114671 Objects (including transmissions; ^ boxes), the use of magnetic suspension method as a "non-contact type of magnetic suspension method" for large-sized objects, to solve the problem of damage to components due to friction and wear and the problem of noise and Solving the problem of generating particles, and also guiding the transport body to land stably on the road. According to an aspect of the invention, a magnetic suspension transport system is provided, the magnetic suspension transport system comprising: a common support frame to be loaded with an object The loading unit engages with the county... supporting the frame wood, the track, forming a route for transmitting the common support frame; the second 70' includes a plurality of sub-hangers that are spaced apart from each other and connected to the shared support frame. The common support frame is suspended relative to the track to a preset height. The connection between the pusher H and the material support rib (four) is to provide propulsion, so that the common frame H and the power supply unit can be floated along the rail = turn (four) for suspension Single 7L and propulsion unit power supply. Much like the other side of the present invention, 殓 π 面 美仪--type magnetic suspension transmission system, the magnetic two transmission: transmission = carrying material __ combination. The connection is made and the route of the main body is transmitted; the suspension unit enters the unit, and the transmission body is == the track is suspended to the preset height; the 彳 route value, the f connection is used to provide the propulsion force, so that the power can be supplied along the track unit. ,:: Γ communication body; power unit, for levitation unit and propulsion, and transmission. The _ suspension transmission system according to the present invention includes: transmission 2: Γ magnetic suspension transmission system, the magnetic force is transmitted a main body; a track, forming: a loading unit loaded with an object coupled to the ^; a route conveying the conveying body; a floating unit, 201114671 connected to the conveying body and suspending the conveying body (4) to a preset height; the propulsion unit' The main body is connected and used to provide propulsion so that the transport body of the material can be conveyed along the track; the power supply unit is used to supply power to the suspension unit and the propulsion unit; and the landing roller is 'lighted to the transport body and used when the transport body is Rolling contact with the obedience when landing on the track. In order to make the above objects, technical features, and advantages more apparent, the following is a preferred embodiment. The present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail, and the same reference numerals will be used to refer to the same elements in the drawings. FIG. 2 is a perspective view of a magnetic suspension transmission system according to an exemplary embodiment of the present invention. a partial exploded perspective view of the second diagram; FIG. 3 is an enlarged view of the common branch frame in FIG. 1; FIG. 4 is a large perspective view of the unit (four); and FIGS. 5 to 8 are plan views of the fourth diagram, Rear view, left side view, and front view; FIG. 9 is an enlarged perspective view of the sub-suspension/propulsion unit in the floating unit shown in FIG. 4; FIG. 10 and FIG. 11 are perspective views of different angles of FIG. 9; Fig. 12 is a view showing an enlarged structure of a roller region for landing; Fig. 14 is an enlarged structural view of a roller region for guiding left and right; and Fig. b is for preventing Amplification structure of the collision roller area Figure 16 and Figure 16 are control block diagrams of a magnetic m-floating system in accordance with an exemplary embodiment of the present invention. 201114671 As shown, the magnetic suspension transport system includes: a transport body (3), a loading unit 110 of the desired body is coupled to the transport body 12A; a track (8), a path for transporting the transport body 12〇; a suspension unit 13G, Connected to the transport body (3) and suspends the transport body 12〇 relative to the track 1G1 to a preset height; the propulsion unit (10) is coupled to the transport body 12〇 and is used to provide propulsive force so that the route along the track (9) can be transmitted by the suspension unit it No suspended transport body 12G; power supply unit 15A for supplying power to the suspension unit 30 and the propulsion unit 140; and a damping unit (10) for connecting the main body U0 and for damping the suspension unit 13〇 and the propulsion unit shock. The transfer master 120 is an element that travels along the track (8) and transports the object while being suspended by the floating order $13, which forms the basic framework of the present exemplary embodiment. The transfer body 120 can have a variety of configurations and shapes. In the present exemplary embodiment, the transport body 120 serves as a common support frame 'for supporting and connecting four sub-suspension/propulsion units (3) (which will be described later), and therefore the transfer body is hereinafter referred to as The support frame 120 is shared. Before describing these components in sequence, the track igi (see Figure η) will be described first. The track 101 forms a route 'Load|Element 1H' for moving (i.e., transmitting) the common sub-frame 120 to the side of the shared branch frame (3). In this exemplary implementation, the track (8) is provided in a straight (four) form. This is because the area of the support frame 12G has a length/width of 3 m or more. However, the track 101 may be an elliptical circular track provided in a closed loop rather than a straight line. Essence 101 is manufactured from a combination of high strength and corrosion resistant stainless steel, non-conductor Ai, and certain other metals in the conductor. In other words, the 201114671 ruling 101 must be associated with the levitation unit 13 推 and the ο I, the early 7014G for the financial suspension or the : (P drive) shared support frame 12 〇 ' so the track 1 〇 1 requires material characteristics. Only when the track (8) has the above material characteristics, an electric field or a magnetic field can drive the common building frame 120. As shown in Fig. 12, the track 101 is supported on the ground by the track 103. The loading unit m is an element for carrying an object, as shown in Figures i to 3. In the present exemplary embodiment, an object refers to a transport box carrying a liquid crystal display (LCD) substrate, and particularly refers to a large-sized LCD substrate loaded with a length/width of about ^ or 3 m. The big size is passed down, but it is not limited to this. As an alternative, the object may include not only a substrate for (10), a plasma display panel (PDp), an organic light emitting diode (OLED), but also a semiconductor device. Wafers, trays, transfer boxes or carriers for accommodating and supporting sheets or wafers, but also various items such as commonly used boxes, electrical equipment, and the like. The loading unit 11 to which the transfer case as an object is to be loaded includes the loading body (1) and the loading plate 112. The loading body (1) is connected to each of the four corner regions of the upper frame 121 of the support (four) 12 () and is inclined upward. The loading plate ι 2 is disposed at the upper end portion of the loading body (1) in the horizontal direction and serves to support the bottom of the object. The loading body 111 may have a solid rod structure. However, in the present exemplary embodiment, the loading body ill has a hollow pipe structure (see the enlarged portion of Fig. 3). The loading plate 112 can be formed with a plurality of vacuum holes, 3, as shown in the general view of Fig. 1. In this case, the vacuum hole is evacuated by the loading body u丨 having the pipe structure, so that the transfer case can be firmly adsorbed and fixed on the loading plate 112. Of course, 201114671 = only an instance. As an alternative, the transfer box can be placed on the periphery of the U2 without the vacuum suction, and the separation preventing protrusion ι4 protrudes upward and prevents the time from being separated. Peripheral - force knife, but the shirt is limited to this ^ as an alternative, a simple throw can be provided, type 2 early (not shown) instead of the loading early 110 shown in the example embodiment , thereby loading the transfer box. Further, an outer cover U7 is disposed around the loading unit 11A to surround the outer side of the shared branch frame 120 other than the loading unit 〇U〇. In addition, a plurality of service access ports 118 engage the surface of the outer closure 117 so that it can be opened and _. Therefore, the worker can repair the component by repairing the access port 118. outer. The P closing plate 117 is for protecting the upper region of the common supporting frame 12A and the common supporting frame 12'', and the lower structure for sharing the supporting frame 12'' is protected by the protective cover 119 shown in FIGS. 1 and 2 . The protective cover 119 extends to the lateral side of the rail 101 and partially protects the lower structure of the common branch frame 120 placed therein. Various structures may exist in the area of the protective cover 119. Specifically, the suspension unit 13G and the propulsion unit (10) are placed in this area so that the protective cover 119 can protect the suspension unit 13 and the propulsion unit from external influences. The protective cover 119 has a lower end portion bent toward the lane 1〇1 and a surface on which a plurality of holes 119a are formed. Of course, the protective cover 119 is an optional component and is not essential. The common support frame 〖20 is used to support the loading unit 11 〇 and the levitation unit 13 2011 11 201114671 , . . . which forms the basic framework of the magnetic suspension transmission system. The common support frame (10) can be formed as a single body. However, in the present exemplary embodiment, the shared support frame 120 as shown in Fig. 2 is divided into an upper frame (four) placed above the suspension unit 13A and placed at the side of the suspension unit 13 (four) and connected to the suspension unit (10) and the upper portion. Side frame 122 of frame m. Each of the upper frame 121 and the side frame (2) is formed by welding a pipe, which can reduce the cost of the material or the heavy mantle suspension unit 130 for suspending the common pulsing frame 12 〇 relative to the track 〇1 To the preset Η (see Figure 12). In the present exemplary embodiment, the floating single magic 3G includes a plurality of sub-floating units (3), for example, four floating units 131 as shown in FIGS. 4 to 8. In the case where the suspension unit BO includes the plurality of sub-suspension single illusions 31, it is possible to prevent the vibration of the sub-suspension unit (3) from affecting the other sub-suspension unit 131' so as to achieve correct and easy control. The fruit suspension unit 130 suspends the common support frame 12〇 beyond the preset height Η (see Fig. 12), and the shared support frame 12〇 can collide with the track ι〇ι or can be expected to result in wasted power consumption. Therefore, it is important to adjust the height at which the shared support frame 12 is suspended by the suspension unit 13A. To this end, the floating single phantom 3 〇 also includes a gap sensor (not shown) for sensing the gap based on the yoke frame 12 (the height Η of the track igi levitation). The gap sensor can The allowable clearance range may be the suspension surface Η of the shared branch frame (3). At the same time, the transmission Τ' — a*;* 12 201114671 is achieved by the interaction between the obstruction 101 and the suspension unit 130.

主體120懸淫的士、I 用吸引力的吸幻方^義地劃分為利用排斥力的排斥方法和利 極1Q1和_單元m相同的極性(例如N 單元〗3。了“極和叫,以使連接至制支撑框架12。的懸浮 斥- ,、用支#框& 12G懸浮。可制任-方法, 然而在本實例性實施例中採用前面的排斥方法。 單7C 140連捿至共用支樓框架12〇並提供推進力,以 懸浮單元⑽懸浮的共用概架㈣可沿執道ΐ()ι的路線傳送。 在執道m與懸浮單元130之間相互作用(即_ 果在丛用支曰^而使共用支撑框架120懸浮的狀態令,如 縣浮料用支牙^力120前面的執道1〇1的磁極變為具有S極,則 心,于的,、用支撐框架120便沿執道1〇1傳送。為應用此種方法, 須對整個軌道1G1應用電磁體 4 制才能即刻地改變電磁體的磁極。而要實貝上硬雜且精確的控 因此、,本實例性實施例採用磁力線性電動機⑽作為推進單元 推進電^上述U的控制裝置或結構,磁力線性電動機140具有 體,以用於使用基於與軌道m的相互作用的電磁 力進仃線性驅動。 在使用磁力線性電動機14〇作為推進單元14〇的情形中, 力線性電動機14〇使用從電源單元15〇接收到的電力而運行日: 磁力線性電動機刚與軌道1G1之間會產生電場或磁場,並且 201114671 此會產生基於與電場或磁場的關係的排斥力。因此,不需要複雜 的結構便可在軌道101上方傳送共用支擇框架12〇。 當,用此種推進單元140時,可在共用支撑單元120中共用該 推進早70 (圖未示幻。然:而,在本實例性實施例中,設置有多個 相互間隔開並與共用支標框架12〇相連接的子推進單元140。 該多個子推進單元14〇與該多個子懸浮單元ΐ3ι設置成一體, 從而形成子懸稀進單元131。作為參考,儘管子懸浮單元^ 在名稱上與子懸稀進單元131不同,然而由於子懸浮單元131 與子推進單幻4G被形成為子懸浮/推進單元131這—單—本體, 因而賦予子料單A 131及子懸稀進單元i3i㈣的參考編 旎。在下文中’將以子懸浮/推進單元ΐ3ι代表子懸浮單元⑶來 進行說明.。 參第9圖至第U gj,本實施例中的四個子懸浮/推進單元⑶ 構成一個懸浮單元130,並連接至共用支撐框架12〇。 所有這四個子懸浮/推進單幻31均具有相同的結構,其中每— 者均包括兩個懸浮電磁體13Ga以及—個推進電磁體i他。推進電 磁體140a放置在這兩個懸浮電磁體13〇a上方並在執道⑻的長 度方向上縱向地佈置,執道⑻的長度足以連接這兩個懸浮電磁 體 130a。 電源單元150是用於向懸浮單元13〇及推進單元14〇供電的元 件。在本實施例中,電源單元150使用非接觸型供電方法。 參照第I2圖及第Ιό圖,電源單元⑽包括沿軌道ι〇ι較長地The main body 120 suspends the taxi, I is divided into the repulsive force repelling method by the repulsive force and the same polarity as the Lem 1Q1 and the _ unit m (for example, N unit 〖3. In order to connect the suspension to the support frame 12, the suspension can be made by the support of the frame & 12G. However, the previous rejection method is employed in the present exemplary embodiment. The single 7C 140 is connected to The shared branch frame 12〇 provides propulsion, and the shared frame (4) suspended by the suspension unit (10) can be transmitted along the route of the roadway )(). The interaction between the road m and the suspension unit 130 (ie, The state in which the support frame 120 is suspended by the support is used, for example, the magnetic pole of the front road of the county floating material force force 120 becomes the S pole, and the heart, the body, and the support The frame 120 is transported along the road 1. In order to apply this method, the electromagnet 4 must be applied to the entire track 1G1 to instantly change the magnetic pole of the electromagnet. The present exemplary embodiment uses a magnetic linear motor (10) as a propulsion unit to propel the power of the above U The magnetic linear motor 140 has a body for linear driving using an electromagnetic force based on interaction with the track m. In the case where the magnetic linear motor 14 is used as the propelling unit 14A, the force linear motor 14〇 Operation day using power received from the power supply unit 15〇: An electric field or a magnetic field is generated between the magnetic linear motor and the track 1G1, and 201114671 generates a repulsive force based on a relationship with an electric field or a magnetic field. A complex structure is required to transmit the shared support frame 12A above the track 101. When such a propulsion unit 140 is used, the advancement can be shared in the common support unit 120 as early as 70 (not shown). In the present exemplary embodiment, a plurality of sub-propulsion units 140 are spaced apart from each other and connected to the common sub-frame 12〇. The plurality of sub-propulsion units 14〇 are integrally formed with the plurality of sub-suspension units ΐ3ι, thereby The sub-suspension unit 131 is formed. As a reference, although the sub-floating unit ^ is different in name from the sub-drilling unit 131, the sub-suspension unit 131 The sub-propulsion single magic 4G is formed as a sub-suspension/propulsion unit 131, which is a single-body, thus giving a reference compilation of the sub-list A 131 and the sub-drilling unit i3i (4). In the following, the sub-suspension/propulsion unit will be used. Ϊ́3ι is represented by the sub-suspension unit (3). Referring to Figures 9 to U gj, the four sub-suspension/propulsion units (3) in this embodiment constitute a suspension unit 130 and are connected to the common support frame 12〇. Each of the sub-suspension/propulsion single phantoms 31 has the same structure, each of which includes two suspension electromagnets 13Ga and one propulsion electromagnet i. The propulsion electromagnet 140a is placed above the two suspension electromagnets 13〇a And arranged longitudinally in the length direction of the lane (8), the length of the lane (8) is sufficient to connect the two suspension electromagnets 130a. The power supply unit 150 is an element for supplying power to the suspension unit 13A and the propulsion unit 14A. In the present embodiment, the power supply unit 150 uses a non-contact type power supply method. Referring to Figure I2 and Figure, the power unit (10) includes a long track along the track

14 201114671 設置的感應軌道151以及拾取單元152,拾取單元152連接至共用 支撐框架120以在不接觸感應執道151的情況下鄰近感應軌道151 放置、並通過基於電磁感應以非接觸狀態接收恒定電流來向懸浮 單元130及推進單元140供電。 感應軌迢15 1包括一對相互間隔開且相互平行的軌道突出部 15 1 a。對應於感應軌道151,拾取單元152具有類似字母“£,’的 形狀,並包括分別置於該一對執道突出部151a之間及該一對執道 突出部151a外側的電動勢產生指狀物(―价⑽〇tive f〇rce generating finger) 152a。 因此,當對感應軌道151施加高頻交流(AC)電力時,可通過 電磁感應在鄰近感應軌道151的拾取單元152中產生電動勢,且 可使用此種電動勢作為用於操作懸浮單元13〇及推進單元的 動力源。 根據實例性實施例’磁力懸浮傳送系統的非接觸型電源15〇包 括調節器153以及電源154 ’調節器153從拾取單元152接收電麼 (電動勢)電源154則連接至調節II丨53並將電壓分配給懸浮單 兀13〇及推進單元14〇 (參見第16圖)。 通過此種結構’例如,如果從鄰近感應軌道i5i的拾取單元⑸ 接收到電廢(電動勢)的調節器153向電源、154供應· V的直 .流(DC)電壓’則電源154的分配電路⑸將該電產以DC 12V、 DC 24 V、DC 48V等形式分配給懸浮單元13〇及推進單元刚, 以使懸浮單元13 0月、仓- 及推進早7L 140可發揮其各自的功能。如果如 第16圖所示’電源154被配置成與分配電路155整合在一起並從 bn' 15 201114671 周即m 153接收電座’則可有繼使實财式變得簡單、使維護 簡便易订、使控制相對容易、以及通過非接觸方法穩定且安全地 供電。 同時’當子懸浮/推進單元131的懸浮電磁體⑽及推進電磁體 *被t、以電力k,其會運行並產生高頻,從而造成震動。須適 當地阻尼(或減小)此種震動,以使共用支撐框架i2g可穩定地 傳遞至衣載單疋11〇上的傳送盒的震動也可被減小,從 而防止傳达Α _的LCD基板被損壞。換句話說子懸浮/推進單元 131 _合至共用支撐框架12()作為單—本體。如果它們搞合為單 本體則由於子懸洋/推進單元131的每—震動均被直接傳遞至 共収掉框架m,因而須將震動的傳遞最小化。只要震動的傳遞 被取小化’制支#框架12G就可穩定地移動並且傳遞至裝載單 兀H0上的傳送盒的震動就可被減小從而防止傳送盒中的⑽ 基板被損壞。為此,提供阻尼單元160。 如第4圖及第9圖所示,阻尼單元16〇連接至子懸浮/推進單元 13卜並阻尼來自懸浮電磁體丨施及推進電磁體〗他的震動。 在本實施例中,阻尼單元⑽包括空氣彈簧ΐ6ι。空氣彈菩⑹ 夹置於共用支撐框架120與子懸浮/推進單元131之間並用以阻 尼垂直震動。空氣彈簧⑹是為每一懸浮/推進單元ΐ3ι提供,铁 =必要時,可為每-懸浮/推進單元⑶提供多於—個空氣彈箸 必要時,空氣彈簧161須在内部被供以空氣,因為其可具在内 顿充有空氣的管狀結構。為此,本實舰實施例巾的阻尼單元 a···*·' 16 201114671 160包括感測器162、空氣泵163以及泵驅動器164。感測器i62 鄰近空氣彈簧161放置並用於感測空氣彈簧161中所填充的空氣 量’空氣泵163鄰近空氣彈簧161放置並用於向空氣彈簧16丨提 供空氣,泵驅動器164則用於選擇性地驅動空氣泵163。 泵驅動器164包括往復式杠杆164a、開關16仆以及杠杆推按器 164c。往復式杠杆164a用於通過來自裝載單元u〇的載荷進行往 復運動,卩祕連接至往復式杠杆164a並用於根據往復式杠 杆164a的操作而打開/關閉氣果163的運行,杠杆推按器队則 連接至裝載單元110並朝向往復式杠杆16如延伸以根據載荷來操 作在復式杠杆164a。 ' 如果空氣彈簧⑹中所填充的空氣量較小,則來自裝載單元ιι〇 的載待變付u (即出現向下推動),從而使杜杆推按器⑹〇向 :移動並推動往復式杠杆164a。因此,開關_動作以打開空 錄163的運行,並且因此空氣彈f 161被填充以由空氣栗163 提么、的工風。然而,除此種機械系統之外可根據感測器⑹的 感測結果以電子方式控制開關祕的操作,以打開泵163來運行。 _同時’如第4圖所示,空氣彈簧161分別放置在子懸浮/推進單 凡⑶i,使得在緩衝並支撐傳送盒的載荷的同時,可毫不困難 地阻尼來自上側的震動。 、 —然而’ 上所述’如果懸浮電磁體咖及推進電磁體14〇&運 :亚產生尚頻’則會造成震動。此種震動也須由空氣彈簧16 讀尼。在此種情形巾,如果來自料電磁體1術及推進電磁體 施的震動在子懸浮/推進單元131的垂直方向上進行傳遞則空 201114671 氣彈簧161可適當地阻尼該震動。然而,如果震動在子懸浮/推進 早凡⑶的水準方向上進行傳遞,則放置在子懸浮/推進單元⑶ 上的空氧彈簧161難以阻尼該震動。 換句話說,儘管子懸浮/推進單元⑶與共用支撐框架12〇通過 空氣彈簧161相連接,'然而仍非常難以阻尼在子懸浮/推進單元⑶ 的左右方向上傳遞的震動。作為另外—種選擇,如果將空氣彈菩 ⑹進^安=子懸浮/推進單元131的_側,則可適當地阻尼 在子懸汁/推進早凡⑶的水準方向上傳遞的震動。然而,在此種 情形中’可能會出現費用或空間方面的問題。 因此,在本實例性實施例中,阻尼單元16〇還包括震動傳遞單 凡脱’以朝向空氣彈簧161傳遞來自懸浮電㈣咖及推進電 磁體^0a的震動。換句話說,震動傳遞單元166轉合至子懸浮/ 推進早凡131,並用以朝向空氣彈簧⑹(即在子懸浮/推進單元 131的上T方向上)傳遞來自懸浮電磁體咖及推進電磁體i術 的震動。 具有上述功能的震動傳遞單元ί66包括可允許垂直自由度的錢 鏈構件166a,可允許垂直自由度的鉸鏈構件驗在與共用支撲框 =〇 軌at 1GI移動的方向橫交的方向上連接至子懸浮/推進單 的側攸而可防止來自懸浮電磁體13〇a及推進電磁體 触的震動在子懸浮/推進單元131的水準方向上傳遞並可在垂直 方向上導引該震動。 兩個可允°午垂直自由度的鉸鏈構件16如在子懸浮/推進單元13i 的各側處垂直方向設置。換句話說,兩個可允許垂直自由度的 201114671 鉸鏈構件166a對稱地放置在子懸浮/推進單元131的相對側處。結 果,為每-子懸浮/推進單元131提供四個可允許垂直自由度的欽 鏈構件咖。對稱地設置在子懸浮/推進單元⑶兩側處的可允許 垂直自由度的鉸鏈構件⑽是成對設置的並通過連杆祕連 接’從而可使每一對可允許垂直自由度的鉸鍵構件咖具有相同 的操作。 除上述配置之外,本實例性實施例中的阻尼單元16〇還包括鄰 近空氣彈簧161設置的輔助阻尼器168。如第4圖所示,輔助阻尼 器168可通過減震器168實現,減震器168具有兩個分別麵合至 子懸浮/推進單元m及共用支揮框架12G的端部。此時,作為減 震器168,輔助阻尼器168可在相關位置傾斜。 取後’著陸滾輪171搞合至共用支撐框帛12〇 (即傳送主體 120)’並當共用支撐框架12〇在軌道ι〇ι上著陸時與軌道⑻進 行滾動接觸。 如第9圖所示,當子懸浮/推進單元131處於正常狀態下時,兩 個著陸滾輪m放置在上部相對側處並相互間隔開。 ^第9圖至第η圖以及第13圖所示,著陸滾輪⑺並不是在 平常使用’而是當共用支撐框架12〇停止以向共用支撐框架⑽ 的4載單7L 11G裝載傳送盒或從共用支標框架12Q的裝載單元 却載傳送盒時使用。在此種情形中,當著陸滚輪m在軌道101 亡著陸並被執道101支撐時,應防止著陸滾輪ΐ7ι滾動。為此, 者陸滾輪m與電子制動器心_合,並且其滾動被強制地制 動。由於電子制動器ma另外搞合至著陸滾輪171,因而必要時 19 201114671 可採用著陸滾輪171作為緊急制動器。 可卜,根據實例性實施例的磁力懸浮傳送系統還 =括對於共用編架12〇 (即傳送主體12。)的购 口牛以及作為用於防止愈縣肖:f u 能滾輪(圖未示出)。 ㈣13°3碰撞的裝置的多個功 在k些功&滾輪中’其中—個是用於在相對於軌道⑻而言的 工向上V引共用支撐框架12()的移動的左右導引滾輪μ參 照第Μ圖),另一個則是用於防止懸 碰 撞的防碰撞滾輪173(參見第15圖)。 歲】01石亚 一個防碰撞滾輪173設 則佑罢Ρ 在下刺的中央,兩個左右導引滾輪172 ^在者陸滾輪171與防碰撞滾輪⑺之間並相互間隔開。此 夺古者陸滾輪171及防碰撞滾輪173被提供為沿上下方向佈置的 “衷輪左右㈣滾輪172則被提供為水準滾輪。 a參見第9圖至第11圓以及第13圖’著陸滚輪171並不是在平 Π吏^而是當共用支撐框架120停止以向共用支撐框架120的 、早:⑽裝載傳送盒或從共用支標框架12〇的裝載單元別 P載傳运_時使用,或當共用支撐框架12〇由於某些原因而未被 "洋在軌道101上方時用來防止推進電磁體U〇a接觸軌道101。 在此種情形中,著陸滚輪171在軌道⑻上著㈣㈣道⑻支 ^ 要時須防止著陸滾輪⑺滾動。因此,電子制動器⑺a搞 &至^陸滾輪171並強制地制動著陸滾輪⑺的滾動。由於電子 制動為171a另外柄合至著陸滾輪i7i ’因而必要時可採用著陸滾 輪171作為緊急制動器。14 201114671 The sensing track 151 and the pickup unit 152 are provided, and the pickup unit 152 is connected to the common support frame 120 to be placed adjacent to the sensing track 151 without contacting the sensing channel 151, and receives a constant current in a non-contact state by electromagnetic induction. The power is supplied to the suspension unit 130 and the propulsion unit 140. The sensing rim 15 1 includes a pair of track projections 15 1 a spaced apart from each other and parallel to each other. Corresponding to the sensing track 151, the pickup unit 152 has a shape similar to the letter "£," and includes electromotive force generating fingers respectively disposed between the pair of lane protrusions 151a and outside of the pair of lane protrusions 151a. ( 价 ( 〇 〇 〇 〇 generating generating generating generating 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 152 Such an electromotive force is used as a power source for operating the suspension unit 13A and the propulsion unit. The non-contact type power supply 15A of the magnetic suspension transmission system according to an exemplary embodiment includes a regulator 153 and a power supply 154 'Regulator 153 from the pickup unit 152 receiving power (electromotive force) power supply 154 is then connected to regulation II 丨 53 and the voltage is distributed to the suspension unit 13 〇 and the propulsion unit 14 〇 (see Figure 16). By this structure 'for example, if from the adjacent sensing track The pickup unit (5) of the i5i receives the electric waste (electromotive force) regulator 153 supplies the direct current (DC) voltage of the V to the power supply 154, and the distribution circuit (5) of the power supply 154 will The electric power is distributed to the suspension unit 13〇 and the propulsion unit just in the form of DC 12V, DC 24 V, DC 48V, etc., so that the suspension unit 13 months, the warehouse - and the advancement 7L 140 can perform their respective functions. As shown in Fig. 16, the power supply 154 is configured to be integrated with the distribution circuit 155 and receive the electric seat from bn' 15 201114671, i.e., m 153, which makes it easy to make the maintenance simple and easy to maintain. The control is relatively easy, and the power is supplied stably and safely by the non-contact method. Meanwhile, when the suspended electromagnet (10) and the propellant electromagnet* of the sub-suspension/propulsion unit 131 are operated by electric power k, they generate high frequencies. Thereby causing vibration. Such vibration should be appropriately damped (or reduced) so that the vibration of the transmission case in which the common support frame i2g can be stably transmitted to the clothes cassette 11 can be reduced, thereby preventing communication. The LCD substrate of Α _ is damaged. In other words, the sub-suspension/propulsion unit 131_ is coupled to the common support frame 12() as a single-body. If they are combined into a single body, each of the sub-suspension/propulsion units 131 is Vibration is transmitted directly to the total The frame m is dropped, so that the transmission of the vibration must be minimized. As long as the transmission of the vibration is minimized, the frame 12G can be stably moved and the vibration transmitted to the transfer box on the loading unit H0 can be reduced. Thereby, the (10) substrate in the transfer case is prevented from being damaged. To this end, the damper unit 160 is provided. As shown in Figs. 4 and 9, the damper unit 16 is connected to the sub-suspension/propulsion unit 13 and damped from the floating electromagnet 丨Applying the propulsion electromagnet to his vibration. In the present embodiment, the damping unit (10) includes an air spring ΐ6ι. The air bomb (6) is sandwiched between the common support frame 120 and the sub-suspension/propulsion unit 131 and is used to resist vertical vibration. The air spring (6) is provided for each suspension/propulsion unit ,3ι, and iron = if necessary, more than one air magazine is provided for each suspension/propulsion unit (3). If necessary, the air spring 161 is internally supplied with air, Because it can have a tubular structure filled with air inside. To this end, the damping unit of the actual ship embodiment towel a···*·' 16 201114671 160 includes a sensor 162, an air pump 163, and a pump driver 164. A sensor i62 is placed adjacent to the air spring 161 and is used to sense the amount of air filled in the air spring 161. The air pump 163 is placed adjacent to the air spring 161 and is used to supply air to the air spring 16 ,, and the pump driver 164 is used to selectively The air pump 163 is driven. The pump driver 164 includes a reciprocating lever 164a, a switch 16 servant, and a lever pusher 164c. The reciprocating lever 164a is for reciprocating movement by a load from the loading unit u〇, secretly connected to the reciprocating lever 164a and used to open/close the operation of the fruit 163 according to the operation of the reciprocating lever 164a, the lever pusher team It is then coupled to the loading unit 110 and extends toward the reciprocating lever 16 to operate on the double lever 164a in accordance with the load. ' If the amount of air filled in the air spring (6) is small, the load from the loading unit ιι is to be changed u (ie, downward push), thereby causing the push rod pusher (6) to move: move and push the reciprocating Lever 164a. Therefore, the switch_acts to open the operation of the empty recording 163, and thus the air bomb f 161 is filled with the work wind lifted by the air pump 163. However, in addition to such a mechanical system, the operation of the switch secret can be electronically controlled in accordance with the sensing result of the sensor (6) to open the pump 163 for operation. _At the same time, as shown in Fig. 4, the air springs 161 are respectively placed in the sub-suspension/propulsion unit (3) i, so that the vibration from the upper side can be damped without difficulty while buffering and supporting the load of the transport box. - However, the above-mentioned 'suspension electromagnets and propellant electromagnets 14 〇& This vibration must also be read by the air spring 16 . In this case, if the vibration from the electromagnet 1 and the propelling electromagnet is transmitted in the vertical direction of the sub-suspension/propulsion unit 131, the air 201114671 gas spring 161 can appropriately dampen the vibration. However, if the vibration is transmitted in the horizontal direction of the sub-suspension/propulsion (3), the air-oxygen spring 161 placed on the sub-suspension/propulsion unit (3) is difficult to dampen the vibration. In other words, although the sub-suspension/propulsion unit (3) is connected to the common support frame 12A via the air spring 161, it is still very difficult to dampen the vibration transmitted in the left-right direction of the sub-suspension/propulsion unit (3). Alternatively, if the air is bombarded (6) into the _ side of the sub-suspension/propulsion unit 131, the vibration transmitted in the horizontal direction of the sub-suspension/propulsion (3) can be appropriately damped. However, in such cases, there may be cost or space issues. Therefore, in the present exemplary embodiment, the damper unit 16A further includes a shock transmission unit to transmit vibrations from the floating electric (four) coffee and the propelling electromagnet ^0a toward the air spring 161. In other words, the shock transmitting unit 166 is coupled to the sub-suspension/propulsion 131 and is used to transfer the suspended electromagnet and the propelling electromagnet toward the air spring (6) (i.e., in the upper T direction of the sub-suspension/propulsion unit 131). The vibration of the i. The shock transmitting unit ί66 having the above function includes a money chain member 166a that allows vertical degrees of freedom, and allows the hinge member of the vertical degree of freedom to be connected in a direction transverse to the direction in which the common flap frame = rail at 1GI moves The side suspension of the sub-suspension/propulsion single can prevent the vibration from the suspension electromagnet 13〇a and the propellant electromagnet from being transmitted in the horizontal direction of the sub-suspension/propulsion unit 131 and can guide the vibration in the vertical direction. The hinge members 16 of the two allowable vertical degrees of freedom are disposed in a vertical direction at each side of the sub-suspension/propulsion unit 13i. In other words, two 201114671 hinge members 166a that allow vertical degrees of freedom are symmetrically placed at opposite sides of the sub-suspension/propulsion unit 131. As a result, four sub-floating/propelling units 131 are provided with four interlocking members that allow vertical degrees of freedom. The hinge members (10) symmetrically disposed at both sides of the sub-suspension/propulsion unit (3) are allowed to be vertically connected and connected by a link so that each pair of hinge members capable of allowing vertical degrees of freedom The coffee has the same operation. In addition to the above configuration, the damper unit 16A in the present exemplary embodiment further includes an auxiliary damper 168 disposed adjacent to the air spring 161. As shown in Fig. 4, the auxiliary damper 168 can be realized by a damper 168 having two ends that are respectively joined to the sub-suspension/propulsion unit m and the common yoke frame 12G. At this time, as the damper 168, the auxiliary damper 168 can be tilted at the relevant position. The trailing landing roller 171 is engaged to the common support frame 帛 12 〇 (i.e., the transport body 120)' and is in rolling contact with the track (8) when the common support frame 12 lands on the track ι〇ι. As shown in Fig. 9, when the sub-suspension/propulsion unit 131 is in a normal state, the two landing rollers m are placed at the opposite sides of the upper portion and spaced apart from each other. ^ Figure 9 to Figure η and Figure 13 show that the landing roller (7) is not used in normal use, but instead the common support frame 12 〇 stops to load the transport box or the slave carrier 7L 11G to the shared support frame (10) The loading unit of the shared sub-frame 12Q is used when carrying the transport cassette. In this case, when the landing roller m is landed on the track 101 and supported by the road 101, the landing roller ΐ7 should be prevented from rolling. For this reason, the land roller m is engaged with the electronic brake core, and its rolling is forcibly braked. Since the electronic brake ma is additionally engaged to the landing roller 171, the landing roller 171 can be used as an emergency brake if necessary. In addition, the magnetic suspension transport system according to an exemplary embodiment further includes a purchaser for the shared rack 12 (ie, the transport body 12) and as a roller for preventing the Yuxian: fu (not shown) ). (4) A plurality of functions of the 13° 3 collision device, wherein the one is a left and right guide roller for moving the support frame 12 () in the work direction relative to the track (8). μ refers to the figure )), and the other is the anti-collision roller 173 for preventing the hang collision (see Fig. 15). Years old] 01 Shiya An anti-collision roller 173 is set in the center of the lower spur, two left and right guide rollers 172 ^ between the land roller 171 and the anti-collision roller (7) and are spaced apart from each other. The ancient land roller 171 and the anti-collision roller 173 are provided as "horizontal wheel left and right (four) rollers 172 which are arranged in the up and down direction, and are provided as level rollers. A see Figs. 9 to 11 and Fig. 13 'landing roller 171 is not used in the flat state, but is used when the common support frame 120 is stopped to be transported to the common support frame 120, (10), or from the loading unit of the shared support frame 12, Or when the common support frame 12 is not used for some reason to prevent the propelling electromagnet U〇a from contacting the track 101. In this case, the landing roller 171 is on the track (8) (4) (4) The road (8) must prevent the landing roller (7) from rolling. Therefore, the electronic brake (7)a engages the & land roller 171 and forcibly brakes the rolling of the landing roller (7). Since the electronic brake is 171a, the handle is further slid to the landing roller i7i'. The landing roller 171 can be used as an emergency brake if necessary.

T-V 20 201114671 參…第9圖至第U圖以及第14目,當共用支撐框架沿軌 道1〇1移動時,左右導引滾輪172並不總是而是在必要時才與執 運⑻才目接觸地旋轉。如果不為軌道1〇1提供左右導引滚輪Μ , 則預期共用㈣框架12G可能會自路線上分離1而,在本實例 料施例中,如第14圖所心在左右導引滾輪172被佈置成如同 被谷置在執道101中一樣的狀態中,必要時會在左右導引滾輪口2 與軌運ιοί _壁之間實現滾動接觸,從而使制支撐框架12〇 可沿軌道101傳送而不會離開路線。 參見第9圖至第η圖以及第15圖,提供防碰撞滾輪173,以用 於防止懸浮電磁體咖與軌道⑼碰撞,這可防止懸浮電磁體 咖與執遏101相接觸,即使共用支標框架12〇沿軌道⑽移動 2止在軌道ΗΗ上時也如此。換句話說,當懸.浮電磁體⑽過 料接近執道ΗΠ_,防碰撞滾輪173首先接觸軌道⑻並防止 =電磁體咖與軌道⑻之間發生碰撞,從而保護懸浮電磁體TV 20 201114671 Referring to Fig. 9 to Fig. U and Fig. 14, when the common support frame moves along the track 1〇1, the left and right guide rollers 172 are not always and only when necessary (8) Rotate in contact. If the left and right guide rollers 不 are not provided for the track 1〇1, it is expected that the shared (four) frame 12G may be separated 1 from the route. In the embodiment of the present example, the left and right guide rollers 172 are Arranged in the same state as being placed in the road 101, if necessary, a rolling contact is made between the left and right guide roller ports 2 and the rails, so that the support frame 12 can be transported along the track 101. Without leaving the route. Referring to Figures 9 to η and Figure 15, an anti-collision roller 173 is provided for preventing the suspension of the electromagnet from colliding with the track (9), which prevents the suspended electromagnet from contacting the stagnation 101 even if the spur is shared. This is also the case when the frame 12 is moved 2 along the track (10) and stopped on the track. In other words, when the suspended floating electromagnet (10) is approaching the enthalpy, the anti-collision roller 173 first contacts the track (8) and prevents the collision between the electromagnet and the track (8), thereby protecting the floating electromagnet.

^因此,伽碰減輪173可被鱗具㈣㈣形 弹性塊結構。 J 通過此種配置,以下將對磁力縣淫值 心予得迗系統進行簡要說明。 將上述單元組裝並放置在軌 〇1 益在軌運101的某一點 處將傳送盒裝載到裝載單元uo。 ‘·· :、、、:後,對感應軌道151施加高頻AC電溽,其h 1,, λλ, 原基於電磁感應在鄰近 这應執運151的拾取單元152中產生 厓玍电動勢。電動勢被提供 於操作懸浮k 13G及推進單元14G的動力 定且 安全地供電。 k疋且^ Therefore, the gamma reduction wheel 173 can be constructed of a scale (four) (four)-shaped elastic block. J With this configuration, the following is a brief description of the system of the magnetic county. The above unit is assembled and placed on the rail 1. At some point in the rail transport 101, the transport cassette is loaded to the loading unit uo. After '·· :, , , :, a high-frequency AC power is applied to the sensing track 151, and h 1, λλ, which was originally based on electromagnetic induction, generates a cliff electromotive force in the pickup unit 152 adjacent to the carrier 151. . The electromotive force is supplied to operate the suspension k 13G and the propulsion unit 14G in a safe and safe manner. k疋

21 201114671 當懸浮單元130及推進單元刚運行時,通過軌道101與懸浮 單元130之間的相互作用,使共用支樓框架120懸浮至預設高度η (參照第12圖)。 接著通過軌if 1〇1與推進單元14〇之間的相互作用來提供推 進力,使得可沿軌道傳送共用支撐框架12〇,從而將傳送盒傳送至 另一個所期望的點。在本實例性實施财,如上所述,採用四個 子心牙/推進單凡131 (其中每一者均包括被形成為單-本體的懸 斤電磁體130a及推進電磁體14〇a)來使共用支樓框架12〇懸浮並 接著行進,從而可更精確且容易地控制懸浮及行進。 同日f通過阻尼單元⑽阻尼在共用支撐框架㈣移動的同時 以機械方式產生的震動或由懸浮電磁體1施及推進電磁體MM 產生的震動。 體而σ通過空氣彈簧161阻尼由懸浮電磁體13〇a及推進電 磁體14Ga產生的震動。此時,由於連接至子懸浮/推進單元⑶ 兩側的可允斗垂直自由度的錄鏈構件防止懸浮電磁體1地 及推進電磁體14Ga的震動在子懸浮/推進單元131的水準方向上傳 遞並在垂直方向上引導該震動,從而能更有效地阻尼震動。 —除空亂彈黃161之外,可通過減震器168執行機械減震、與載 荷有關的減震、或阻尼操作。 在阻尼操作期間,如果空氣彈簧161中所填充的空氣量不足, 則來自裝載單7〇 1〇〇的載荷變大,即被向下壓。此時,权杆推按 〇。164c向下移動並推動往復式杠杆16如’以使開關工⑽打開空 'XZr·' 22 201114671 氣泵3從而以空氣泵163所提供的空氣填充空氣彈簧16卜 社種機械方去之外,如上所述,可通過根據感測器162的感 、果电子方式控制開_ 164b的操作而打開空氣泵163。 5、/、用支撐框架12〇接近軌道1〇1的期望點時,切斷施 轨k 151白勺呵頻Ac電源,使得懸浮的共用支樓框架no向下 移動並通過著陸滾輪171而在軌道⑻上著陸。 加_地_電子制動器ma的旋轉,從而使共用支樓框 (P傳达主體12〇)在執道101上穩定地著陸。在此種狀態 完成傳送盒的傳送’並進行另-新的傳送工作。 乂上㈣顯而易見’提供—種磁力懸浮傳送系統其在傳送 =物體(包括傳达盒)、特別是大尺寸的物體時採用磁力懸浮方 ’、種非接觸型方法’從而解決由於摩擦及磨損而損壞 1的問錢造絲訊的問題以及解決產生微粒的問題,並且還 月匕谷易且正確地控制懸浮單元。 =’、提供1磁力懸浮傳送系統,其在傳送各種物體(包括 | 4寸別疋大尺寸的物體時採用磁力懸浮方法作為其中一種 ^觸型方法,從而解決由於摩擦及磨損而損Μ件的問題及造 以及解決產生微粒的問題,並且觀有效地阻尼通 衣載有物體並沿軌道傳送的傳送主體傳遞至裝載單元的震動。 ^ ’提供-種磁力懸浮傳送线,其在傳送各種物體( =二:是Α尺寸的物體時採用磁力懸浮方法作為其中-種 接觸以法,從而解決由於摩擦及磨損而損壞元件的問題及造 23 201114671 成雜訊的問題以及解決產生微粒的問題,並且還能導引傳送主體 在軌道上穩定地著陸。 ;'儘s已參照本發明的實例性實施例對本發明進行了具體顯示和 說明然而應理解,在不背離上述實施方式的精神和範圍的情況 下可對其作出形式及細節上的各種改變。 【圖式簡單說明】 π圖為根據本發明貫例性實施例的磁力懸浮傳送系統的立體 圖; 第2圖為第1圖的局部分解立體圖; 第3圖為第1圖中的共用支撐框架的放大圖; 第4圖為懸浮單元的放大立體圖; 圖至第8圖為第4圖的平面圖、後視圖、左側視圖以 視圖; γ Θ為第4圖所不懸浮單元中的子懸浮/推進單元的放大立體 圖, 第10圖及第11圖為第9圖的不同角度的立體圖; 第12圖顯示懸浮單元位於軌道上; 弟13圖為用於著陸的滾輪區域的放大結構圖; 第14圖為用於左右導引的滚輪區域的放大結構圖; 弟15圖為用於防止碰撞的滾輪區域的放大結構圖;以及 24 201114671 第16圖為根據本發明實例性實施例的磁力懸浮傳送系統的控制 方塊圖。 【主要元件符號說明】 101 110 112 114 118 119a 120 121 130 131 140 140a 151 152 153 155 161 163 164a 164c 103 軌道支撐腳 111 裝載主體 113 真空孔 117 外部封蓋 119 Ψ' 保護封蓋 122 側面框架 130a 懸浮電磁體 1浮單元 々機 150 電源單元 151a 軌道突出部 152a 電動勢產生指狀物 154 電源 160 随尼單元 162 感測器 164 系·驅動器 164b 開關 166 震動傳遞單元 軌道 裝載單元 裝載板 防分離突出部 維修出入口 孔 傳送主體/共用 上部框架 懸浮單元 推進電磁體 感應軌道 拾取單元 調節器 分配電路 空氣彈簧 空氣泵 住復式杠杆 杠杆推按器 25 1"- 201114671 166a 可允許垂直自由度的鉸鏈構件 166b 連杆 168 輔助阻尼器 171 著陸滾輪 171a 電子制動器 172 左右導引滚輪 173 防碰撞滾輪 H 預設高度 2621 201114671 When the suspension unit 130 and the propulsion unit are just operating, the common branch frame 120 is suspended to a preset height η by the interaction between the track 101 and the suspension unit 130 (refer to Fig. 12). The pushing force is then provided by the interaction between the rail if 1〇1 and the propulsion unit 14〇 so that the common support frame 12〇 can be transported along the track to convey the transfer cassette to another desired point. In the present exemplary implementation, as described above, four sub-cardiac/pushing units 131 (each of which includes a jack-electromagnet 130a and a propelling electromagnet 14〇a formed as a single-body) are used. The shared branch frame 12 is suspended and then traveled so that suspension and travel can be controlled more accurately and easily. On the same day f, the damping unit (10) dampens the vibration generated mechanically while the common supporting frame (4) is moving or the vibration generated by the propelling electromagnet MM by the floating electromagnet 1 . The body σ dampens the vibration generated by the floating electromagnet 13a and the propelling electromagnet 14Ga by the air spring 161. At this time, the vibration of the suspension electromagnet 1 and the propelling electromagnet 14Ga is prevented from being transmitted in the horizontal direction of the sub-suspension/propulsion unit 131 due to the link member that can be connected to the vertical suspension of the sub-suspension/propulsion unit (3). The vibration is guided in the vertical direction to more effectively dampen the vibration. - Mechanical shock absorption, load-related shock absorption, or damping operation may be performed by the damper 168 in addition to the airborne yellow 161. During the damping operation, if the amount of air filled in the air spring 161 is insufficient, the load from the loading sheet 7 〇 1 变 becomes large, that is, it is pressed downward. At this point, the right lever pushes 〇. 164c moves downward and pushes the reciprocating lever 16 such as 'to enable the switcher (10) to open the empty 'XZr·' 22 201114671 air pump 3 to fill the air spring 16 with the air provided by the air pump 163, as above The air pump 163 can be turned on by controlling the operation of the opening 164b according to the sense of the sensor 162. 5. When the support frame 12 is approaching the desired point of the track 1〇1, the power supply of the rail k 151 is cut off, so that the suspended common branch frame no moves downward and passes the landing roller 171. Landing on the track (8). The rotation of the electronic brake ma is performed so that the common branch frame (P communication main body 12A) stably land on the road 101. In this state, the transfer of the transfer cassette is completed and another new transfer operation is performed. (4) It is obvious that 'providing a kind of magnetic suspension transmission system uses a magnetic suspension method ', a non-contact type method' in transmitting the object (including the communication box), especially the large-sized object, thereby solving the problem due to friction and wear. Damage to the question of asking for money and solving the problem of particle generation, and also the control of the suspension unit. = ', provides a magnetic suspension transmission system, which uses magnetic suspension method as one of the touch methods when transmitting various objects (including 4 inch large objects), thereby solving the damage of the components due to friction and wear. Problem and build and solve the problem of generating particles, and the effect is to effectively dampen the vibration of the transport body carrying the object and transporting it along the track to the loading unit. ^ 'Providing a magnetic suspension line that transmits various objects ( = 2: It is a magnetic suspension method used as a medium-sized contact method to solve the problem of damage to components due to friction and wear, and the problem of generating noise and solving the problem of generating particles, and also It is possible to guide the transport body to land stably on the track. The present invention has been specifically shown and described with reference to the exemplary embodiments of the present invention. However, it should be understood that without departing from the spirit and scope of the embodiments. Various changes in form and detail can be made. [Simplified illustration] The π map is a practical example according to the present invention. Fig. 2 is a partially exploded perspective view of Fig. 1; Fig. 3 is an enlarged view of the common support frame in Fig. 1; Fig. 4 is an enlarged perspective view of the suspension unit; 8 is a plan view, a rear view, and a left side view of FIG. 4; γ Θ is an enlarged perspective view of the sub-suspension/propulsion unit in the non-suspended unit of FIG. 4, and FIGS. 10 and 11 are FIG. Figure 12 shows the suspension unit on the track; Figure 13 shows the enlarged structure of the roller area for landing; Figure 14 shows the enlarged structure of the roller area for the left and right guidance; An enlarged structural view of a roller area for preventing collision; and 24 201114671 FIG. 16 is a control block diagram of a magnetic suspension transmission system according to an exemplary embodiment of the present invention. [Main Element Symbol Description] 101 110 112 114 118 119a 120 121 130 131 140 140a 151 152 153 155 161 163 164a 164c 103 Track support foot 111 Loading body 113 Vacuum hole 117 Outer cover 119 Ψ' Protection cover 122 Side frame 130a Hanging Electromagnet 1 floating unit 150 150 power supply unit 151a rail protrusion 152a electromotive force generating finger 154 power supply 160 NIS unit 162 sensor 164 system driver 164b switch 166 vibration transmission unit rail loading unit loading plate anti-separation protrusion maintenance Entrance and exit hole transfer body/common upper frame suspension unit propulsion electromagnet induction track pickup unit adjuster distribution circuit air spring air pumping double lever lever pusher 25 1"- 201114671 166a Allowable vertical degree of freedom hinge member 166b link 168 Auxiliary damper 171 Landing roller 171a Electronic brake 172 Left and right guide roller 173 Anti-collision roller H Preset height 26

Claims (1)

201114671 七、申請專利範圍: 1. 一種磁力懸浮傳送系統,包括: 共用支撐框架 支撐框架; 欲裝載有物體的裝載單核合至該共用 形攻用於傳送該共用支撐框架的路線; =浮單s ’包括多個相互_開並與該共用支撐框架相 至預設=單71 ’並使該共用編架相對於該執道懸浮 推進單元’與該共用支撐框架相連接並用於提供推進 力’使得可沿純道㈣路線傳送該懸浮的共用支撐框架; 以及 電源單元,用於向該懸浮單元及該推進單元供電。 2.如:求項丨所述的磁力懸浮傳送系統,其中,該推進單元包 括夕個相互間隔開並與該共用支撐框架相連接的子推進單 元。 3·如請求項2所述的磁力懸浮傳送系統,其中,該子懸浮單元 與該子推進單元被形成為單一本體並構成子懸浮/推進單元。 4.如請求項3所述的磁力懸浮傳送系統,其中,該子懸浮/推進 單元包括四個子懸浮/推進單元並連接至該共用支樓框架,每 一子懸浮/推進單元均包括: 兩個懸浮電磁體;以及 —個磁力線性電動機,具有放置在該懸浮電磁體上方並 〜5亥執逭的長度方向較長地佈置的推進電磁體。 5.如請求項4所述的磁力懸浮傳送系統,其中,還包括阻尼單 £ 27 201114671 元,該阻尼單元連接該子懸浮/推進單元並用於阻尼來自該懸 浮電磁體或該推進電磁體的震動。 6.如請求項5所述的磁力懸浮傳送系統,其中,該阻尼單元包 括二氣彈簧,該空氣彈簀夾置於該共用支撐框架與該子懸浮/ 推進單元之間並用於阻尼垂直震動。 7·如請求項6所述的磁力懸浮傳送系統,其中,該阻尼單元包 括: 感測器,鄰近該空氣彈簧放£並用於感測該空氣彈菁中 所填充的空氣量; 〃空氣泵’鄰近該空氣彈簧放置並用於向該空氣彈晉提供 空氣;以及 8. 9. 主泵驅動器,用於選擇性地驅動該空氣泵。 3玄果驅動器包 如4求項7所述的磁力懸浮傳送系統,其中, 括: ’、 運動往復式杠杆,用於通過來自該裝鮮元的載荷進行往復 二該往復式杠杆的操作 4杆推扣益,連接至該裝載單元並朝向哕往德1 據該_來操作該往復式杠杆朝W起式杠杆延 括震動傳遞單元^7〜傳运糸統,其中,該阻尼單元包 並用於向該空氣彈編至該子懸浮/推進單元 的該震”傳遞來自㈣浮電磁體或該推進電磁體 28 201114671 ι〇_如請求項9所述的磁力懸浮傳送系統,其中,該震動傳遞單 元包括多個可允許垂直自由度的鉸鏈構件,該多個可允許垂 直自由度的鉸鏈構件在與該共用支撐框架沿該軌道移動的方 向楦父的方向上連接至該子懸浮/推進單元的一側,從而可防 止來自該懸浮電磁體或該推進電磁體的該震動在該子懸浮/推 進單元的水準方向上傳遞並可在垂直方向上導引該震動。 11 如請求項10所述的磁力懸浮傳送系統,其中,該多個可允許 垂直自由度的鉸鏈構件包括至少一對可允許垂直自由度的鉸 鏈構件,4至少-對可允許垂直自由度的鉸鏈構件對稱地放 置在該子懸浮/推進單元的相對側處。 月长項11所述的磁力懸浮傳送系統’其中,該震動傳遞單 元還包括連杆,該連杆連接該—對可允許垂直自由度的绞鍵 構件。 13.如請求項6所述的磁力懸浮傳送系統,其中,該阻尼單元還 包括鄰近該空氣彈篑設置的伽阻尼器。 A t請求項13所述的磁力懸浮傳送系統,其中,該輔助阻尼器 =括,震器,該減震器包括兩個端部,分別耦合至該子懸浮/ 推進早兀及該共用支撐框架。 如。月求項4所述的磁力縣淫值样金β „ 、 心予傳迗系統,其中,該子懸浮/推進 早凡進—步與多個功能滾輪相轉合。 士。月求項15所述的磁力雖洋值、矣多从 輪包括. 心傳、糸統,其中,該多個功能滾 Ζ陸浪輪,供該共用切框架在該軌道上著陸時使用; 二右導引滾輪’用於在相對於該軌道而言的左右方向上 29 201114671 導引該共用支樓框架的移動;以及 防碰撞滚輪’用於防止《浮電磁體與該執道碰撞。 17·如請求項16所述的磁力懸浮傳送系統,其中,該著陸滾輪進 一步與電子制動器相耦合。 月求員1所述的磁力懸浮傳送系統,其中,該電源單元包 括: 感應執道,與該執道間隔開;以及 九取單7L,連接至該共用支撐框架以鄰近該感應軌道放 置亚用於通過基於電磁感應而在非接觸狀態中接收恒定電 *來向_洋單元及該推進單元供電。 19. 士 D月求項18所述的磁力懸浮傳送系統其中, D亥拾取單元具有類似字母‘E,的形狀,並且 拕取單元放置在該共用支撐框架的中心區域中並沿哼 執道的長度方向較長地設置。 … 2〇·如印求項1所述的磁力懸浮傳送系統,其中,該共用支撐框 架包括: 上部框架’放置在該懸浮單元上方;以及 面忙罙,放置在該懸淨單元的一側處並連接該懸浮單 凡及該上部框架。 頁20所述的磁力懸浮傳送系統,其中,該裝載單元包 括: 王e逼結構的裝載主體,與上部框架的四個拐角區域中 的每者相連接並向上傾斜;以及 载板在水準方向上設置於該裝載主體的上端部處並 S 30 201114671 22. 用於支撐該物體的底部。 如請求項21所述的磁力懸浮傳送系統,其中 有多個真空孔。 該裴载板形成 23. 如請求項21所述的磁力懸浮傳送系統其令, 突出部’該防分離突出部在該裝載板的外周邊 用於防止傳送盒分離。 還包括防分離 上向上突出並 24. 月求項1所述的磁力料傳m % 外部封蓋,_合成環繞除職鮮元之外的該共用支 撐框撕側並具有表面,至少一個維修出 面以便打開及關閉;以及 主。玄表 25. 保護封蓋,用於局部地㈣該制支撐框架的下部結構, 5亥物體包括裝財液晶顯示ϋ基板的傳送盒 一種磁力懸浮傳送系統,其中,包括: 麗 傳=主體,欲裂载有物體的裝載單元輕合至該傳送主體; 軌逼’形成用於傳送該傳送主體的路線; 』懸$早7L ’與該傳送主體相連接並使該傳送主體相對於 該軌道懸浮至預設高度; 、 β推進單71’與該傳送主體相連接並用於提供推進力,使 得可沿該執道的該路線傳送該懸浮的傳送主體; 電源單7L,用於向該料單元及該推進單元供電;以及 °° /、j傳送主體相連接並用於阻尼來自該懸浮 單元或該推進單元的震動。 〜 如:t項所述的磁力懸浮傳送系統’其中,該阻尼單元包 ^ °亥二氣彈簧耦合至該傳送主體的上部區域並用 bn 由· 31 26. 201114671 於阻尼垂直震動。 27.如請求項26所述的磁力懸浮傳送系統,其中’該阻尼單元包 空氣彈簧中 感測器,鄰近該空氣彈簧放置並用於感測該 所填充的空氣量; Λ 空氣泵’鄰近該空氣彈簧放置並用於向該 空氣;以及 ”扠L 泵驅動器,用於選擇性地驅動該空氣泵。 28·如請求項27所述的磁力懸浮傳送系統其中該果驅動器包 括. 運動 往復式杠杆’詩通過來自該裝載單元的載荷進行往復 開關’連接至該往復式杠杆並根據該往復式杠杆的操作 而打開/關閉該空氣泵的運行;以及 、 杠杆推按器,連接至職載單元並朝向該往復式杠杆延 ,以根據該載荷操作該往復式杠杆。 29’ ==二述!"力懸浮傳送系統,其中,該阻尼單元還 钟k °亥工氣彈簧設置的辅助阻尼器。 30.如請求項29所述的磁力 包 。 代乐、、苑其中,该輔助阻尼器 減心,該減震器包括兩個端部,分㈣合至該懸浮單 兀及该傳送主體。 31·如請求項25所述的磁力懸浮傳送系統,其中, 違懸洋單元包括多個相互㈣_子懸浮單元, 該傳送主體包括與該多個子懸浮單元相連接的共用支擇 32 201114671 框架,並且 間隔開的子推進單元並與該共 該推進單元包括多個相互 用支撐框架相連接。 32. 33. 如請求項3!所述的磁力懸浮傳送系統,其中,該子懸浮單元 及該子推進單元被形成為單一本體並構成子懸浮/推進單元。 如請求項32所述的磁力懸浮傳送系統,其中,該子懸浮/推進 早4括四個子懸浮/推進單元並連接至該共用支撐框架, 每一子懸浮/推進單元均包括: 兩個懸浮電磁體;以及 個磁力、.桌H甩動機,具有放置在該懸浮電磁體上方並 沿該軌道的長度方向較長地佈置的推進電磁體。 34‘如請求項33所述的磁力懸浮傳送系統,其中,該阻尼單元包 括辰動傳遞單70 ’該震動傳遞單元耗合至該子懸浮/推進單元 亚用於m氣彈簀傳遞來自該懸浮電磁體或該推進電磁體 的該震動。 35. 如請求項34所述的磁力懸浮傳送系統,其中,該震動傳遞單 一巴括夕個可允卉垂直自由度的鉸鏈構件,該多個可允許垂 直自由度的叙鏈構件在與該共用支撐框架沿該軌道移動的方 向杈父的方向上連接至該子懸浮/推進單元的—側,從而可防 止來自§亥懸洋電磁體或該推進電磁體的該震動在該子懸浮/推 進單疋的水準方向上傳遞並可在垂直方向上導引該震動。 36. 如請求項35所述的磁力懸浮傳送系統,其中,該多個可允許 垂直自由度的鉸鏈構件包括至少一對可允許垂直自由度的鉸 鏈構件,該至少一對可允許垂直自由度的鉸鏈構件對稱地放 33 201114671 置在該子懸浮/推進單元的相對側處。 37. 如請求項36所述的 元還勺. 心,子傳送系統,其中,該震動傳遞單 構件。 錢杆連接該—對可允許垂直自由度的鉸鏈 38. 一種磁力懸浮傳送系統,其中,包括: 2送主體’㈣載有物體的㈣單域合至該傳送主體; 形成用於傳送該傳送主體的路線; 1軌j早70 4雜衫體相連接域該料主體相對於 δ亥軌道懸洋至預設高度; 得可二I:的:3亥傳送主體相連接並用於提供推進力,使 玄軌道的該路線傳送該懸浮的傳送主體; 電源單元’用於向該懸浮單元及該推進單元供電;以及 =滾輪1合至該傳送主體並用於當該傳送主體在該 # ^上者陸時與該軌道進行滾動接觸。 -如^項38所述的磁力懸浮傳送系統,其卜該著陸滾輪進 動’以選擇性地限制該著陸滚輪的滾 抓如請求項38所述的磁力懸浮傳送系統,射 —送: 如5月求項3 8所述的磁力辟浮傳步糸 括懸浮電磁體,力^傳达系統,其中,該懸浮單元包 ,該傳送系統還包括防碰撞滾輪,該防碰撞滚輪輕合至該 傳运主體並用於防止該懸浮電磁體與該轨道碰撞。 " 41 34 5' 201114671 42·如請求項38所述的磁力懸浮傳送系統,其中,該傳送系統還 包括阻尼單元,該阻尼單元與該傳送主體相連接並用於阻尼 來自該懸浮單元或該推進單元的震動,且該阻尼單元包括空 氣彈簧,該空氣彈簧耦合至該傳送主體的上部區域並用於阻 尼垂直震動。 43.如請求項42所述的磁力懸浮傳送系統,其中,該阻尼單元包 括: 感測器,鄰近該空氣彈簀放置並用於感測該空氣彈菁中 所填充的空氣量; ^ 提供 空氣泵,鄰近該空氣彈簧放置並用於向該空氣彈簧 空氣;以及 、 泵驅動器,用於選擇性地驅動該空氣泵。 括: 44.如請求項43所述的磁力懸浮傳送系統,其令,該粟驅動器包 往復式杠杆,用於通過來自該裝載 運動; 單元的載荷進行往復 開關’連接至該往復式杠杆並根㈣往復奸杆的操作 而打開/關閉該空氣泵的運行;以及 延 杠杆推按器’連接至該裝載單元並朝向該往復式杠杆 伸,以根據該載荷操作該往復式杠杆。 該阻尼單元還 45. 如請求項42所述的磁力懸浮傳送系統,其中, 包括鄰近該空氣彈簧設置的輔助阻尼器。 46. 如請求項45所述的磁力懸浮傳送系統,1 句括靖啦$ # #个 ,、甲该輔助阻尼器 包括兩個端部’分_合至該懸浮單 201114671 元及該傳送主體。 47.如明求項42所述的磁力懸浮傳送系統,其中, 遠懸洋單元包括多個相互間隔開的子懸浮單元, 该傳送主體包括與該多個子懸浮單元相連接的共用支撐 框架,並且 该推進單元包括多個相互間隔開的子推進單元並與該共 用支撐框架相連接。 48.如。月求項47所述的磁力懸浮傳送系統,其中,該子懸浮單元 子推進單元被形成為單一本體並構成子懸浮/推進單元。 仪^請求項48所述的磁力懸浮傳送系統,其中,該子懸浮綠進 早兀包括四個子懸浮/推進單元並連接至該共用支標框架, 每一子懸浮/推進單元均包括·· 兩個懸浮電磁體;以及 —個磁力線性電動機,具有放置在該懸浮電磁體上方並 沿該執道的長度方向較長地佈置的推進電磁體。 讥如請求項49所述的磁力懸浮傳送系統’其中,該阻尼單元包 括震動傳遞單元’該震動傳遞單元轉合至該子懸浮/推進單= 並用於向該空氣彈簧傳遞來自該懸浮電磁體或該推進電磁體 的該震動。 a 51·如請求項50所述的磁力懸浮傳送系統,其中,該震動傳遞單 凡包括多個可允許垂直自由度的鉸鏈構件,該多個可允許垂 直自由度的鉸鏈構件在與該共用支撐框架沿該軌道移動的方 向橫交的方向上連接至該子懸浮/推進單^的—側,使得可卜 止來自該懸浮電磁體或該推進電磁體的該震動在該子n201114671 VII. Patent application scope: 1. A magnetic suspension transmission system, comprising: a common support frame support frame; a load single core to be loaded with an object to the shared shape to transmit the route of the common support frame; s 'includes a plurality of mutual-openings and is associated with the common support frame to a preset=single 71' and connects the common carrier to the shared support frame with respect to the common suspension support unit and is used to provide propulsive force' The shared support frame that can be transported along the pure lane (four) route; and a power supply unit for supplying power to the suspension unit and the propulsion unit. 2. The magnetic suspension transport system of claim 2, wherein the propulsion unit comprises a sub-propulsion unit spaced apart from each other and coupled to the common support frame. 3. The magnetic suspension transport system of claim 2, wherein the sub-suspension unit and the sub-propulsion unit are formed as a single body and constitute a sub-suspension/propulsion unit. 4. The magnetic suspension transport system of claim 3, wherein the sub-suspension/propulsion unit comprises four sub-suspension/propulsion units and is connected to the common branch frame, each sub-suspension/propulsion unit comprising: two a suspended electromagnet; and a magnetic linear motor having a propellant electromagnet disposed longitudinally above the suspended electromagnet and longitudinally disposed. 5. The magnetic suspension transmission system of claim 4, further comprising a damping unit of $27 201114671, the damping unit being coupled to the sub-suspension/propulsion unit and for damping vibration from the suspension electromagnet or the propulsion electromagnet . 6. The magnetic suspension delivery system of claim 5, wherein the damping unit comprises a two-gas spring interposed between the common support frame and the sub-suspension/propulsion unit and for damping vertical vibration. The magnetic suspension transmission system of claim 6, wherein the damping unit comprises: a sensor adjacent to the air spring and used to sense an amount of air filled in the air bomb; 〃 air pump Adjacent to the air spring and used to supply air to the air bomb; and 8. 9. a main pump driver for selectively driving the air pump. The esoteric drive package of claim 4, wherein the magnetic reciprocating transmission system comprises: ', a motion reciprocating lever for reciprocating by the load from the fresh element, and the reciprocating lever is operated by four strokes. Pushing the buckle unit to the loading unit and operating the reciprocating lever toward the W-type lever to extend the vibration transmitting unit 27 to the transport system, wherein the damping unit is packaged and used for The shock transmission to the sub-suspension/propulsion unit is transmitted from the (four) floating electromagnet or the propulsion electromagnet 28 201114671 ι〇_ the magnetic suspension transmission system according to claim 9, wherein the vibration transmission unit A plurality of hinge members that allow vertical degrees of freedom, the plurality of hinge members that allow vertical degrees of freedom are coupled to one of the sub-suspension/propulsion units in a direction from the common support frame in a direction in which the track moves in the direction of the master The side prevents the vibration from the suspended electromagnet or the propelling electromagnet from being transmitted in the horizontal direction of the sub-suspension/propulsion unit and can guide the vibration in the vertical direction. The magnetic suspension transport system of claim 10, wherein the plurality of hinge members that allow vertical degrees of freedom comprise at least one pair of hinge members that allow vertical degrees of freedom, 4 at least - a hinge that allows vertical degrees of freedom The member is symmetrically placed at the opposite side of the sub-suspension/propulsion unit. The magnetic suspension transmission system of the moon length item 11 wherein the vibration transmission unit further includes a connecting rod that connects the pair to allow vertical freedom 13. The magnetic suspension transmission system of claim 6, wherein the damping unit further comprises a gamma damper disposed adjacent to the air magazine. The magnetic suspension transmission system of claim 13 Wherein the auxiliary damper includes a shock absorber, the shock absorber comprising two ends coupled to the sub-suspension/propulsion early and the common support frame respectively. For example, the magnetic county described in Item 4 The kinky value of the sample β „ , the heart to the 迗 system, in which the sub-suspension / advancement of the advance - step with multiple functional rollers. Shi. The magnetic force described in Item 15 of the present invention includes the ocean value, the 从 multi-wheel includes. The heart, the cymbal, wherein the plurality of functions roll the land wheel for use when the common cutting frame is landed on the track; The right guide roller 'is used to guide the movement of the common branch frame in the left-right direction relative to the track 29 201114671; and the anti-collision roller' is used to prevent the floating electromagnet from colliding with the obstruction. The magnetic suspension transport system of claim 16, wherein the landing roller is further coupled to the electronic brake. The magnetic suspension transmission system of claim 1, wherein the power supply unit comprises: an induction channel spaced apart from the road; and a nine order 7L connected to the common support frame to be placed adjacent to the induction track. The power supply to the ocean unit and the propulsion unit is received by receiving a constant power* in a non-contact state based on electromagnetic induction. 19. The magnetic suspension transport system of claim 18, wherein the D-hai pick-up unit has a shape similar to the letter 'E, and the pick-up unit is placed in a central area of the common support frame and along the shackles The length direction is set long. The magnetic suspension transport system of claim 1, wherein the common support frame comprises: an upper frame 'placed above the suspension unit; and a busy surface placed at one side of the suspension unit And connecting the suspension to the upper frame. The magnetic suspension transmission system of page 20, wherein the loading unit comprises: a loading body of the king e-force structure, connected to each of the four corner regions of the upper frame and inclined upward; and the carrier plate is in the horizontal direction Provided at the upper end of the loading body and S 30 201114671 22. Used to support the bottom of the object. The magnetic suspension transport system of claim 21, wherein there are a plurality of vacuum holes. The load plate formation 23. The magnetic suspension transfer system of claim 21, wherein the projections are provided at the outer periphery of the loading plate for preventing separation of the transfer cassette. Also includes an anti-separation upwardly protruding and 24. The magnetic material described in Item 1 is transmitted with a m% outer cover, _ synthesizing the common support frame other than the deprived fresh element, and has a surface, at least one repair surface In order to open and close; and the main. The black cover 25. The protective cover is used for partially (4) the lower structure of the support frame, and the 5 hai object includes a transfer box for the liquid crystal display ϋ substrate, wherein the magnetic suspension transmission system includes: a load unit that splits the object is lightly coupled to the transport body; the rail force 'forms a route for transporting the transport body; hangs $7 7' to connect with the transport body and suspends the transport body relative to the track a preset height; a beta propulsion unit 71' coupled to the transport body and configured to provide propulsive force such that the suspended transport body can be transported along the route of the obedience; a power supply unit 7L for the unit and the The propulsion unit supplies power; and the °/, j transfer body is coupled and used to damp vibrations from the suspension unit or the propulsion unit. ~ The magnetic suspension transmission system of item t, wherein the damping unit is coupled to the upper region of the transfer body and is damped to a vertical vibration by bn by 31.201114671. 27. The magnetic suspension delivery system of claim 26, wherein 'the damper unit encloses a sensor in the air spring adjacent to the air spring and is used to sense the amount of air that is filled; Λ the air pump is adjacent to the air a spring is placed and used for the air; and a "fork L pump driver" for selectively driving the air pump. 28. The magnetic suspension transfer system of claim 27, wherein the fruit drive comprises: a moving reciprocating lever' poem Reciprocating switch is connected to the reciprocating lever by a load from the loading unit and opens/closes operation of the air pump according to operation of the reciprocating lever; and a lever pusher is coupled to the carrying unit and facing the The reciprocating lever is extended to operate the reciprocating lever according to the load. 29' == two! " force suspension transmission system, wherein the damping unit is also an auxiliary damper provided by the k ° hp gas spring. The magnetic package as claimed in claim 29, wherein the auxiliary damper is centered, the shock absorber includes two ends, and the four (4) are coupled to the suspension The magnetic suspension transmission system of claim 25, wherein the contraband unit comprises a plurality of mutual (four)_sub-suspension units, the transmission body including the plurality of sub-suspension units The magnetic suspension suspension system of claim 31, wherein the plurality of sub-propulsion units are spaced apart from each other, and the plurality of mutually adjacent support frames are connected. 32. 33. The magnetic suspension transmission system of claim 3, wherein The sub-suspension unit and the sub-propulsion unit are formed as a single body and constitute a sub-suspension/propulsion unit. The magnetic suspension transmission system of claim 32, wherein the sub-suspension/propulsion includes four sub-suspension/propulsion units And connected to the common support frame, each sub-suspension/propulsion unit comprises: two suspended electromagnets; and a magnetic force, a table H 甩 motive, placed above the suspended electromagnet and along the length of the track The magnetic suspension transmission system of claim 33, wherein the damping unit comprises a cessation transmission unit 70 The shock transfer unit is coupled to the sub-suspension/propulsion unit for the transmission of the vibration from the suspended electromagnet or the propulsion electromagnet. The vibration transmits a hinge member of a vertical degree of freedom that allows the vertical degree of freedom of the link member to be connected to the common support frame in the direction of the uncle in which the common support frame moves. The side of the sub-suspension/propulsion unit, thereby preventing the vibration from the sus-suspension electromagnet or the propelling electromagnet from being transmitted in the horizontal direction of the sub-suspension/propulsion unit and guiding the direction in the vertical direction 36. The magnetic suspension delivery system of claim 35, wherein the plurality of hinge members that allow vertical degrees of freedom include at least one pair of hinge members that allow vertical degrees of freedom, the at least one pair allowing vertical freedom The hinge members of the degree are symmetrically placed 33 201114671 placed at the opposite side of the sub-suspension/propulsion unit. 37. The method of claim 36, wherein the heart, the sub-transport system, wherein the vibration is transmitted by a single member. The money rod is connected to a hinge 38 that allows vertical degrees of freedom. A magnetic suspension transport system includes: 2 a main body '(4) carrying a (4) single object to the transport body; forming a transport body for transporting The route; 1 track j early 70 4 miscellaneous body body connection domain The material body is suspended to the preset height relative to the δ-Hai track; DEK II:: 3H transmission body is connected and used to provide propulsion, so that The route of the sinuous track conveys the suspended transport body; the power unit ' is used to supply power to the levitation unit and the propulsion unit; and = the wheel 1 is coupled to the transport body and is used when the transport subject is on the #^ Rolling contact with the track. The magnetic suspension transport system of claim 38, wherein the landing roller is precessed to selectively limit the rolling of the landing roller as described in claim 38, the magnetic suspension transport system, such as: The magnetic drifting step described in the above-mentioned claim 38 includes a suspension electromagnet, a force transmission system, wherein the suspension unit package, the transmission system further comprises an anti-collision roller, and the anti-collision roller is lightly coupled to the transmission The main body is used to prevent the suspended electromagnet from colliding with the track. The magnetic suspension transmission system of claim 38, wherein the transmission system further comprises a damping unit coupled to the delivery body and configured to damp the suspension unit or the propulsion The unit is vibrated and the damper unit includes an air spring coupled to the upper region of the transfer body and for damping vertical shock. The magnetic suspension transmission system of claim 42, wherein the damping unit comprises: a sensor disposed adjacent to the air magazine and configured to sense an amount of air filled in the air bomb; Adjacent to the air spring and for supplying air to the air spring; and a pump driver for selectively driving the air pump. The magnetic suspension transport system of claim 43, wherein the mill drive package reciprocating lever is configured to be coupled to the reciprocating lever by a load from the loading movement; (4) The operation of the reciprocating stalker opens/closes the operation of the air pump; and the extended lever pusher' is coupled to the loading unit and extends toward the reciprocating lever to operate the reciprocating lever according to the load. The damper unit is further a magnetic suspension transmission system according to claim 42, wherein the auxiliary damper disposed adjacent to the air spring is included. 46. The magnetic suspension transmission system of claim 45, wherein the auxiliary damper comprises two end portions _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ 47. The magnetic suspension transport system of claim 42, wherein the remote suspension unit comprises a plurality of spaced apart sub-suspension units, the transfer body comprising a common support frame coupled to the plurality of sub-suspension units, and The propulsion unit includes a plurality of sub-propulsion units spaced apart from one another and coupled to the common support frame. 48. For example. The magnetic suspension transport system of claim 47, wherein the sub-suspension unit propulsion unit is formed as a single body and constitutes a sub-suspension/propulsion unit. The magnetic suspension transmission system of claim 48, wherein the sub-suspension green advance comprises four sub-suspension/propulsion units and is connected to the common support frame, each sub-suspension/propulsion unit includes two a suspension electromagnet; and a magnetic linear motor having a propulsion electromagnet placed above the suspension electromagnet and arranged long along the length of the obstruction. The magnetic suspension transmission system of claim 49, wherein the damping unit comprises a vibration transmission unit that is coupled to the sub-suspension/propulsion unit = and is used to deliver the suspension electromagnet or The vibration of the propulsion electromagnet. The magnetic suspension transmission system of claim 50, wherein the vibration transmission includes a plurality of hinge members that allow vertical degrees of freedom, and the plurality of hinge members that allow vertical degrees of freedom are associated with the common support The frame is connected to the side of the sub-suspension/propulsion unit in a direction transverse to the direction in which the rail moves, such that the vibration from the suspended electromagnet or the propulsion electromagnet can be arrested in the sub-n 36 201114671 _的水準方向上傳遞並可在垂直方向上導引該震動。 52. 如凊求項51所述的磁力懸浮傳送系統,其中,該多個可允許 垂直自由度的鉸鏈構件包括至少—對可允許垂直自由度的錢 鏈構件,該至少—對可允許垂直自由度的鉸鏈構件對稱地放 置在4子科/推進單元的相對側處。 53. 如凊求項52所述的磁力懸浮傳送系統,其中,該震動傳遞單 兀运包括連杆’該連杆連接該―對可允㈣直自由度的鉸鏈 構件。 54·如請求項38所述的磁力懸浮傳送系統,其中’該電源單元包 括. 感應軌道’與該軌道間隔開;以及 ,L取早(,連接至該傳送主體以鄰近該感應執道放置, 通絲於電磁感應而在非接觸狀態中接收恒定電流來 向5玄懸子早兀及該推進單元供電。 55. 如請求項54所述的磁力懸浮傳送系統,其卜 該拾取單元具有類似字 可 Ε 的形狀,並且 該拾取單元放置在該傳 的長度方向較長地設置。體的中心、區域中並沿該軌道 3736 201114671 _ is transmitted in the horizontal direction and can guide the vibration in the vertical direction. 52. The magnetic suspension delivery system of claim 51, wherein the plurality of hinge members that allow vertical degrees of freedom include at least - a pair of money chain members that allow vertical degrees of freedom, the at least one pair allowing vertical freedom The hinge members of the degree are placed symmetrically at opposite sides of the 4 subfamily/propulsion unit. 53. The magnetic suspension transport system of claim 52, wherein the shock transmitting single transport comprises a link' that connects the hinge member to the (four) straight degree of freedom. 54. The magnetic suspension delivery system of claim 38, wherein 'the power supply unit comprises: an inductive track' is spaced apart from the track; and L is taken early (connected to the transmitting body to be placed adjacent to the sensing track, The wire receives electromagnetic current and receives a constant current in a non-contact state to supply power to the 5th suspension and the propulsion unit. 55. The magnetic suspension transmission system of claim 54, wherein the pickup unit has a similar word Shape, and the pick-up unit is placed long in the length direction of the pass. The center, the area of the body and along the track 37
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