KR101256191B1 - Transferring system for magnetic levitation - Google Patents

Abstract

A magnetic levitation transfer system is disclosed. Maglev-type transfer system of the present invention, the transfer body coupled to the loading unit is loaded with the object to be conveyed; A track rail forming a path through which the conveying body is conveyed; A floating unit connected to the transfer main body to float the transfer main body by a predetermined height with respect to the track rail; A propulsion unit connected to the transfer body and providing a propulsion force to move the floating transfer body along a path of the track rail; A power supply unit for supplying power to the floating unit and the pushing unit; And it is characterized in that it comprises a landing roller coupled to the conveying main body is in rolling contact with the track rail when the conveying main body is landed on the track rail. According to the present invention, by applying the magnetic levitation method, which is one of the non-contact methods in transferring various conveyed materials including cassettes, especially large-sized conveyed materials, the problem of particle generation can be solved as well as friction and wear. It can solve the problem of damage of parts and noise, and also lead to stable landing of the conveying body with respect to the track rail.

Description

Transfer system for magnetic levitation

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic levitation conveying system, and more particularly, to generating particles by applying a magnetic levitation method, which is one of the non-contact methods, for transferring various conveyed objects including cassettes, particularly large conveyed objects. In addition to solving the problem, it is possible to solve the problem of damage to the parts due to friction, wear, and noise, and also to provide a maglev transport system that can induce a stable landing of the transport body with respect to the track rail. will be.

The conveying system is a device for conveying a conveyed object. Here, the object to be transported includes a substrate including a liquid crystal display (LCD), a plasma display panel (PDP) and organic light emitting diodes (OLED), a wafer for semiconductors, a tray for receiving and supporting a substrate or a wafer. In addition to being a cassette or a carrier, it can be various various logistic products including a general box. Hereinafter, the transfer object will be described as a cassette.

Transfer systems for transferring cassettes can be largely divided into a contact type and a non-contact type.

The contact type can be further divided into a conveyor type, a roller type, a rail type, and the like. Since the contact type transfer system can generate a large number of particles during the transfer process, for example, a cassette loaded with an LCD substrate is used. The transfer may cause contamination of the substrate by the particles and contamination of the clean room.

In addition, the contact type transfer system is a wear or friction occurs in the contact portion of the transfer structure or the power transmission structure because of frequent damage to the parts, and also causing severe noise, there is a problem that high-speed transfer over a certain level is impossible.

In contrast, the non-contact conveying system not only solves the problem of particle generation, but also solves the problem of damage of parts due to friction, wear, and noise, and can also transfer the conveyed material at high speed. Because of the advantages, there is an active research on the non-contact transfer system.

A magnetic levitation transfer system can be considered as a non-contact transfer system. Magnetic levitation technology uses the principle of attraction and repulsion of magnets (magnets), and it is known that magnetic levitation technology is applied to railway vehicles. There is a delay.

As such, the magnetic levitation technology is applied to a magnetic levitation train that transports people but has not yet been applied to a transport system that loads and transports a transported object such as a cassette. Therefore, in order to apply the magnetic levitation technology to a conveying system for loading and transporting a conveyed object such as a cassette, it is necessary to develop a new technology in many parts from the magnetic levitation train.

In spite of the need for the development of new technologies in many areas, the development of a magnetic levitation conveying system can solve the problem of particle generation in transporting various conveyed materials including cassettes, especially large conveyed materials. However, it is expected that the development of the parts is expected to be solved because it is expected to solve the problem of damage to the parts due to friction, wear, and noise.

On the other hand, in the development of a transport system for loading and transporting the object to be conveyed by using the magnetic levitation technology, various means that can ensure the stable transport of the conveying body transported along the path of the track rail by mounting the object to be conveyed In particular, there is a need for the development of a technology that enables a stable landing of the transfer body can be brought into contact with the track rail when the transfer body is landed on the track rail.

It is an object of the present invention to solve the problem of particle generation as well as to solve the problem of particle generation by applying the magnetic levitation method, which is one of the non-contact methods for transporting a variety of conveyed objects including cassettes, in particular large conveyed objects. It is possible to solve the problem of damage and noise caused by the components, and also to provide a magnetic levitation transport system that can induce a stable landing of the transport body with respect to the track rail.

The object is, according to the present invention, the transfer body coupled to the loading unit is loaded; A track rail forming a path through which the transfer body is transferred; A floating unit connected to the transfer main body to float the transfer main body by a predetermined height with respect to the track rail; A propulsion unit connected to the transfer body and providing a propulsion force to move the floating transfer body along the path of the track rail; A power supply unit for supplying power to the floating unit and the pushing unit; And a landing roller coupled to the transfer body, the roller being in rolling contact with the track rail when the transfer body lands on the track rail.

Here, the landing roller may be further coupled with an electronic breaker for selectively restraining the rolling motion of the landing roller.

It may further include a left and right guide roller coupled to the transfer body, for guiding the movement of the transfer body in the left and right direction with respect to the track rail.

The floating unit may include a floating electromagnet, and may further include an anti-collision roller coupled to the transfer main body to prevent a collision of the floating electromagnet with respect to the track rail.

The damping unit may include an air spring coupled to an upper region of the transfer body to damp vibration in the vertical direction.

The damping unit may include a sensing unit provided around the air spring to sense an air filling amount in the air spring; An air pump disposed around the air spring and supplying air to the air spring; And it may include a pump driving unit for selectively driving the air pump.

The pump drive unit, the seesaw lever operated by the seesaw by the load from the loading side; A switch connected to the seesaw lever and on / off operation of the air pump based on the seesaw lever operation; And a lever pusher connected to the loading part and extending toward the seesaw lever to operate the seesaw lever by a load.

The damping unit may further include an auxiliary damper provided around the air spring.

The auxiliary damper may be a shock absorber having both ends coupled to the floating unit and the transfer body.

The floating unit may include a plurality of unit floating units spaced apart from each other, the transfer body may be a common support frame connected to the plurality of unit floating units, and the propulsion units may be spaced apart from each other to support the common support. It may include a plurality of unit propulsion units connected with the frame.

The unit floating unit and the unit pushing unit may be integrally formed to form a unit floating / propelling unit.

Four unit flotation / propulsion units may be provided and connected to the common support frame, and each of the unit flotation / promotion units may include two floating electromagnets; And a magnetic linear motor provided at an upper portion of the floating electromagnet and having one propulsion electromagnet disposed long along the longitudinal direction of the track rail.

The damping unit may further include a vibration transmission unit coupled to the unit floating / propulsion unit to transfer vibration from the floating electromagnet or the propulsion electromagnet toward the air spring.

The vibration transmitting unit may be connected to the side of the unit floating / propulsion unit in a direction crossing the direction in which the common support frame moves along the track rail, and the vibration from the floating electromagnet or the propulsion electromagnet is the unit floating / propulsion. It may include a plurality of vertical freedom allowing the hinge member to guide in the vertical direction while preventing the unit from facing in the left and right directions.

The plurality of upper and lower degrees of freedom hinge members may include at least one pair of upper and lower degrees of freedom hinge members provided symmetrically on both sides of the unit floating / propulsion unit.

The vibration transmission unit may further include a connection bar connecting the pair of upper and lower degrees of freedom allowing the hinge member.

The power supply unit may include: an induction rail disposed to be spaced apart from the track rail; And a pickup unit connected to the transfer main body so as to be adjacent to the induction rail, and receiving power by applying a constant current in a non-contact state by an electromagnetic induction law to supply power to the floating unit and the propulsion unit.

The pickup unit may have an English capital letter E shape, and the pickup unit may be elongated along a longitudinal direction of the track rail in a central region of the transfer body.

The object to be transferred may be a cassette on which a liquid crystal display (LCD) substrate is loaded.

According to the present invention, by applying the magnetic levitation method, which is one of the non-contact methods for transferring various conveyed materials including cassettes, especially large-sized conveyed materials, the particle generation problem can be solved as well as friction and abrasion. It can solve the problem of damage of parts and noise, and also lead to stable landing of the conveying body with respect to the track rail.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

1 is a perspective view of a magnetic levitation transfer system according to an embodiment of the present invention, Figure 2 is a partially exploded perspective view of Figure 1, Figure 3 is an enlarged perspective view of the common support frame, Figure 4 is an enlarged perspective view of the floating unit 5 to 8 are a plan view, a rear view, a left side view and a front view of FIG. 4, respectively, and FIG. 9 is an enlarged perspective view of one unit floating / propelling unit in the floating unit shown in FIG. 4. FIG. 11 is a perspective view illustrating FIG. 9 from another angle, FIG. 12 is a view of a floating unit mounted on a track rail, FIG. 13 is an enlarged structural diagram of a landing roller region, and FIG. 14 is a roller region for right and left guides. 15 is an enlarged structural diagram of an anti-collision roller area, and FIG. 16 is a control block diagram of a maglev transport system according to an embodiment of the present invention.

As shown in these figures, the magnetic levitation transfer system of the present embodiment, the transfer body 120 to which the loading unit 110 on which the object to be conveyed is loaded is coupled, and forms a path through which the transfer body 120 is transferred. Is connected to the track rail 101 and the conveying main body 120, the floating unit 130 to raise the conveying body 120 by a predetermined height relative to the track rail 101, and is connected to the conveying body 120 The propulsion unit 140 provides a propulsion force so that the injured transport main body 120 moves along the path of the track rail 101, and a power supply unit supplying power to the flotation unit 130 and the propulsion unit 140 ( 150 and a landing roller 171 coupled to the transfer body 120 to make a rolling contact with the track rail 101 when the transfer body 120 lands on the track rail 101 (see FIGS. 9 to 15). ).

The conveying main body 120 forms a skeleton of the magnetic levitation conveying system of this embodiment as a part for conveying the object to be conveyed while traveling along the track rail 101 in a state of being injured by the floating unit 130. It can have various forms and shapes. In the present embodiment, since the transfer main body 120 is applied as a common support frame 120 for integrally supporting and connecting four unit floating / propulsion units 131 to be described later, the transfer main body 120 is referred to as a common support frame. It will be described as (120).

The track rails 101 (see FIG. 12) form a path through which the common support frame 120 to which the loading unit 110 is coupled is moved (transferred).

In this embodiment, the track rail 101 is provided with a straight straight rail. This is because the area of the common support frame 120 is larger than the horizontal / vertical 3 meters (m). However, the track rail 101 may be an elliptical circulation rail in the form of a closed loop rather than a straight straight rail.

The track rail 101 is made of a material in which a combination of stainless steel, which is particularly strong and corrosion resistant, non-conductive aluminum, and some other metal materials is used. That is, since the track rail 101 must interact with the floating unit 130 for floating the common support frame 120 and the pushing unit 140 for driving (driving) the common support frame 120, Must have a material feature, so that the rise and propulsion of the common support frame 120 based on the electric or magnetic field is possible. As shown in FIG. 12, the track rail 101 is supported on the ground by a rail support foot 103.

Next, the loading unit 110 is a portion on which the object to be transported is loaded, as shown in FIGS. 1 to 3. In this embodiment, the object to be conveyed is a cassette on which a liquid crystal display (LCD) substrate is loaded, particularly a large LCD substrate on which a large LCD substrate having a length and width of about 2 meters (m) or 3 meters (m) is loaded. It means a cassette, but the invention need not be limited thereto. In other words, the object to be transported includes a substrate including a liquid crystal display (LCD), a plasma display panel (PDP) and organic light emitting diodes (OLED), a wafer for semiconductors, a tray for receiving and supporting a substrate or a wafer. In addition to being a cassette or a carrier, it can be various various logistic products or electronic products including a general box.

The stacking unit 110 on which the cassette as the object to be transported is loaded, the stacking body 111 connected to the four corner regions of the upper frame 121 of the common support frame 120 upwardly inclined, and the stacking body 111 of the stacking body 111. The upper end is provided with a mounting plate 112 disposed in the horizontal direction to support the lower end of the object to be conveyed.

The loading main body 111 may have a simple bar structure in which the inside is not empty, but in this embodiment, the loading main body 111 is provided in a duct structure having an empty interior (see an enlarged part of FIG. 3). As shown in FIG. 1, a plurality of vacuum holes 113 may be formed on the plate surface of the loading plate 112. In this case, the vacuum plate 113 may be vacuumed through the loading main body 111 of the duct structure. As it is formed, the cassette seated on the stacking plate 112 may be firmly adsorbed and fixed. Of course, this is only one embodiment, and the cassette does not necessarily need to be fixed by suction by vacuum.

A periphery of the stacking plate 112 is formed to protrude upwards to prevent the separation of the cassette 114. The leaving stop jaw 114 is provided in the form of Hangul 'b' only on a part of the circumference of the loading plate (112). Since the scope of the present invention does not need to be limited thereto, a cassette may be loaded by providing a simple shelf type loading unit (not shown) instead of the loading unit 110 shown.

The exterior cover 117 is provided around the loading unit 110 to surround the outside of the common support frame 120 except for the loading unit 110. A plurality of maintenance doors 118 are coupled to the plate surface of the exterior cover 117 so as to be openable and closed. Thus, the worker can enter the interior through the maintenance door 118 to maintain the components.

If the exterior cover 117 serves to protect the upper region of the common support frame 120, including the common support frame 120, the lower structure of the common support frame 120 is the protective net shown in Figs. Protected by a cover 119.

Guard net cover 119 extends to the side of the track rail 101 serves to partially protect the lower structure of the common support frame 120 disposed there. The structure of the guard net cover 119 region can vary, in particular the guard unit cover 119 is mounted from the outside as the float unit 130 and the propulsion unit 140 is disposed therefrom. It also serves as a protection. The guard net cover 119 has a structure in which the lower end is bent toward the track rail 101 side, the plate surface is formed with a plurality of holes (119a). Of course, the protection net cover 119 is optional and is not necessarily a component to be provided.

Next, the common support frame 120 is a portion for supporting the loading unit 110 and the floating unit 130 to form a substantial skeleton of the magnetic levitation transfer system of this embodiment. The common support frame 120 may be formed as a single body, but in the present embodiment, the upper frame 121 and the floating unit are disposed on the common support frame 120 on the floating unit 130 as shown in FIG. 2. It is disposed on the side of the 130 is provided with a side frame 122 for connecting the floating unit 130 and the upper frame 121. The upper frame 121 and the side frame 122 both form a structure in which a pipe is welded, which may be a method for reducing material cost or weight.

Next, the floating unit 130 serves to lift the common support frame 120 by the predetermined height (H, see Fig. 12) with respect to the track rail (101).

In this embodiment, the floating unit 130 is shown in Figures 4 to 8, the floating unit 130 is provided with a plurality of ie four unit floating unit 131. As such, when the floating unit 130 is provided as a plurality of unit floating units 131, it is possible to prevent the influence of the vibration of any one unit floating unit 131 on other unit floating units 131. There is an advantage that the control can be accurate and facilitated.

When the common support frame 120 is lifted by the floating unit 130, it may hit the track rail 101 again if it deviates from the predetermined height H (see FIG. 12), and unnecessary power consumption may be expected. have.

Therefore, the height of the floating height (H) of the common support frame 120 by the floating unit 130 may be important, for this purpose, the floating unit 130 of the common support frame 120 for the track rail 101 A gap sensor (not shown) for detecting a gap according to the floating height H is further provided. The range of the preferred gap by the gap sensor may be the floating height H of the common support frame 120.

On the other hand, the way in which the common support frame 120 is floated by the interaction between the track rail 101 and the floating unit 130 can be largely divided into a repulsion type using the repulsive force and a suction type using the attraction force.

The rebound type gives rise to the track rail 101 and the floating unit 130 with different polarities, such as the north pole and the south pole, or the south pole and the south pole, so as to be connected to the common support frame 120 with respect to the track rail 101. The unit 130 is a method of floating, and the suction type is a method of floating the common support frame 120 as a structure opposite to the rebound type, but any method may be applied, but in the present embodiment, the former type is adopted. .

Next, the propulsion unit 140 is connected to the common support frame 120 and the portion providing a propulsion force to be moved along the path of the track rail 101, the common support frame 120 injured by the floating unit 130. to be.

As described above, in the state where the common support frame 120 is injured by the interaction between the track rail 101 and the floating unit 130, that is, the N pole and the N pole, the front of the common support frame 120 When the magnetism of the track rail 101 is changed to the S pole, the injured common support frame 120 is moved along the track rail 101. In order to apply this method, an electromagnet must be applied to the entire track rail 101, and a substantially complicated and precise control is required to instantly change the polarity of the electromagnet.

Therefore, in the present embodiment, instead of such a complicated control device or structure, a magnetic linear motor having a propulsion electromagnet 140a for linearly driving the propulsion unit 140 by electromagnetic force by interaction with the track rail 101 ( 140).

When the propulsion unit 140 is provided by the magnetic linear motor 140 as described above, the magnetic linear motor 140 is operated by the power supplied from the power supply unit 150, so that the electric field is separated from the track rail 101. Alternatively, since a magnetic field is generated and a propulsion force is generated based on the correlation with the electric field or the magnetic field, the common support frame 120 can be driven on the track rail 101 without a complicated structure.

In applying the propulsion unit 140, but may be used to apply a pushing unit (not shown) commonly applied to the common support frame 120, in the present embodiment is arranged spaced apart from each other connected to the common support frame 120 A plurality of unit propulsion units 140 are provided.

In this case, the plurality of unit propulsion units 140 are integrally provided with the plurality of unit floating units 131 described above to form the unit floating / propelling unit 131. For reference, although the terms of the unit floating unit 131 and the unit floating / propulsion unit 131 are different from each other, the unit pushing unit 140 is integrated into the unit floating unit 131 so that one unit floating / propelling unit 131 is provided. Therefore, the same reference numerals are given to the unit floating unit 131 and the unit floating / propulsion unit 131. Hereinafter, the unit injury / promotion unit 131 will be described instead of the unit injury unit 131.

9 to 11, in the present embodiment, four unit injury / promotion units 131 are provided to form a single injury unit 130, and these four unit injury / promotion units 131 are commonly supported. Is connected to the frame 120.

The four unit flotation / propulsion units 131 all have the same structure, and each unit flotation / promotion unit 131 is provided with two flotation electromagnets 130a and one propulsion electromagnet 140a. The propelling electromagnet 140a is provided on the two floating electromagnets 130a, and has a length that connects the two floating electromagnets 130a and is disposed long along the longitudinal direction of the track rail 101.

Next, the power supply unit 150 is a part for supplying power to the floating unit 130 and the pushing unit 140. In this embodiment, the power supply unit 150 applies a contactless power supply method.

12 and 16, the power supply unit 150 is provided to the induction rail 151 which is elongated along the track rail 101 and to the induction rail 151 without being in contact with the induction rail 151. It is connected to the common support frame 120 to be disposed adjacent to the pick-up unit 152 is supplied with a constant current in a non-contact state by the law of electromagnetic induction to supply power to the floating unit 130 and the pushing unit 140. .

Induction rail 151 is provided with a pair of rail jaw 151a spaced apart from each other and arranged side by side. The pickup unit 152 has an English capital letter E shape so as to correspond to the induction rail 151, that is, the electromotive force generating fingers 152a disposed between and outside the pair of rail jaws 151a, respectively.

Thus, when a high frequency AC power is applied to the induction rail 151, electromotive force may be generated to the pickup unit 152 adjacent to the induction rail 151 by the law of electromagnetic induction, and the electromotive force may be generated by the floating unit 130 and the propulsion. It can be used as a power source for the operation of the unit 140.

As an example, in the magnetic levitation transfer system of the present embodiment, the non-contact power supply unit 150 includes a regulator 153 (REGULATOR) to which a voltage (electromotive force) is applied from the pickup unit 152, as shown in FIG. A power supply 154 connected to the regulator 153 and having a distribution circuit 155 for distributing the voltage to the floating unit 140 and the propulsion unit 150 may be further provided.

With this structure, for example, when the regulator 153, which receives the voltage (electromotive force) from the pickup unit 152 adjacent to the induction rail 151, applies a voltage of DC 300V to the power supply 154, the power supply ( The distribution circuit 155 of 154 may distribute this voltage to, for example, DC 12V, DC 24V, DC 48V, and the like to provide the floating unit 130 and the propulsion unit 140 to perform their respective functions. have. If the distribution circuit 155 is integrally provided in the power supply 154 and the voltage from the regulator 153 is implemented as shown in FIG. 16 so that the power supply 154 is applied as shown in FIG. It is easy to repair, relatively easy to control, and in particular, there is an advantage in that it is possible to stably and safely supply power by a non-contact method.

Meanwhile, when power is applied to the floating electromagnets 130a and the propelling electromagnets 140a of the unit floating / propelling units 131, high frequency is generated and vibration is caused. This vibration must be damped (attenuated) appropriately, so that stable movement of the common support frame 120 can be achieved, and attenuation of vibration transmitted to the cassette on the stacking unit 110 can be attenuated so that the LCD substrate in the cassette is broken. It can be prevented. That is, the unit flotation / propulsion units 131 are coupled to the common support frame 120 to form a body. When they are integrally combined, the vibration of each of the unit flotation / promotion units 131 is shared support frame 120. This should be minimized since it is passed on to the. Only then, the common support frame 120 can be stably moved, and the vibration transmitted to the cassette on the loading unit 110 can be attenuated, thereby preventing the LCD substrate in the cassette from being damaged. To this end, a damping unit 160 is provided.

As shown in FIGS. 4 and 9, the damping unit 160 is connected to the unit floating / propulsion unit 131 and serves to damp vibrations from the floating electromagnet 130a and the propelling electromagnet 140a.

In this embodiment, the main configuration of the damping unit 160 is provided with an air spring 161. The air spring 161 is disposed between the common support frame 120 and the unit flotation / propulsion unit 131 to damp vibration in the vertical direction. One air spring 161 is provided per unit flotation / propulsion unit 131, but more numbers may be applied if necessary.

Since the air spring 161 may have a structure such as a tube filled with air therein, it is necessary to supply air into the air spring 161 as necessary. To this end, the damping unit 160 of the present embodiment is provided around the air spring 161 and disposed around the air spring 161 and the sensing unit 162 for detecting the air filling amount in the air spring 161. An air pump 163 for supplying air to the air spring 161 and a pump drive unit 164 for selectively driving the air pump 163 are provided.

The pump driving unit 164 is connected to the seesaw lever 164a and the seesaw lever 164a and is operated based on the operation of the seesaw lever 164a by the load from the loading unit 110. A switch 164b for turning on / off an operation of the pump 163 and a load part 110 connected to the loading unit 110 and extending toward the seesaw lever 164a to move the seesaw lever 164a by a load. A lever pusher 164c to operate is provided.

Therefore, when the air filling amount in the air spring 161 is small, since the load from the loading part 110 side becomes larger, that is, it is further pressed downward, the seesaw lever 164a moves downward while the lever pusher 164c moves downward. ), The switch 164b is operated to turn on the operation of the air pump 163 to supply air from the air pump 163 to the air spring 161 to be filled. However, in addition to the mechanical method, the operation of the switch 164b may be electronically controlled according to the detection result of the sensing unit 162 to turn on the operation of the pump 163.

On the other hand, since the air spring 161 is individually disposed one by one on the top of the unit floating / propulsion unit 131, as shown in Figure 4 to damp the vibration from the top while buffering the load of the cassette There is no crowd.

However, as described above, when the floating electromagnet 130a and the propelling electromagnet 140a are operated, high frequency is generated to cause vibration, and such vibration must also be damped by the air spring 161. In this case, when vibrations from the floating electromagnet 130a and the propelling electromagnet 140a are transmitted in the up and down direction of the unit floating / propulsion unit 131, the air spring 161 may appropriately damp it, but the unit floating / propulsion When delivered to the left and right directions of the unit 131, it is difficult for the air spring 161 disposed above the unit floating / propulsion unit 131 to damp it.

In other words, even when the unit floating / propulsion units 131 and the common support frame 120 are connected to each other via the air spring 161, the vibrations transmitted to the left and right directions of the unit floating / promotion units 131 are damped. There is no shortage of. Of course, if the air spring 161 is further installed on the side of the unit flotation / propulsion unit 131, the vibration transmitted to the left and right directions of the unit flotation / promotion unit 131 can also be appropriately damped. Cost or space problems arise.

Thus, in the present embodiment, the vibration transmission unit 166 is further applied to the damping unit 160 to transmit vibrations from the floating electromagnet 130a and the propelling electromagnet 140a toward the air spring 161. In other words, the vibration transmission unit 166 is coupled to the unit floating / propulsion unit 131 so that vibrations from the floating electromagnet 130a and the propelling electromagnet 140a are directed toward the air spring 161, that is, the unit floating / propulsion unit ( 131 serves to be delivered in the vertical direction.

The vibration transmission unit 166 which plays this role is connected to the side of the unit floating / propulsion unit 131 in a direction intersecting the direction in which the common support frame 120 moves along the track rail 101, but the floating electromagnet ( 130a) and a vertical freedom allowable hinge member 166a which guides the vibration from the propulsion electromagnet 140a in the vertical direction while preventing the vibration from the unit floating / propelling unit 131 in the horizontal direction.

Two up and down freedom allowable hinge members 166a are provided along the vertical direction at the side of the unit floating / propulsion unit 131, and are provided symmetrically on both sides of the unit floating / propulsion unit 131. As a result, four vertical freedom allowable hinge members 166a per unit floating / propulsion unit 131 are applied. These upper and lower degrees of freedom allowable hinge members 166a are connected by a pair of connecting bars 166b which are symmetrical to both sides of the unit floating / propulsion unit 131, to induce the same operation by pair. .

In addition to the above configuration, the damping unit 160 of the present embodiment further includes an auxiliary damper 168 provided around the air spring 161 as an auxiliary configuration. As shown in FIG. 4, the auxiliary damper 168 may be applied to a shock absorber 168 having both ends coupled to the unit floating / propelling unit 131 and the common support frame 120. In this case, the auxiliary damper 168 as the shock absorber 168 may be disposed to be inclined at the corresponding position.

Finally, the landing roller 171 is coupled to the common support frame 120 as the conveying body 120 so that the rolling support with respect to the track rail 101 when the common support frame 120 is landed on the track rail 101 It acts as a contact.

When the unit floating / propelling unit 131 is viewed in a normal state as shown in FIG. 9, two landing rollers 171 are provided on both sides of the upper side to be spaced apart from each other.

Such a landing roller 171 is not normally used, as shown in FIGS. 9 to 11 and 13, a cassette is placed on the loading unit 110 of the common support frame 120 or the common support frame. It is used when the common support frame 120 is stopped to lower the cassette from 120. In this case, the landing roller 171 is supported on the track rail 101, but the landing roller 171 should not be rotated at this time. To this end, the electronic breaker 171a is further coupled to the landing roller 171 to forcibly prevent its rotation. Since the electronic breaker 171a is further coupled to the landing roller 171 as described above, the landing roller 171 may be used for emergency braking as necessary.

On the other hand, the magnetic levitation transfer system of the present embodiment, in addition to the landing roller 171 for the movement or stop guide for the common support frame 120 as the main body 120, and for preventing collision with the floating electromagnet (130a) A plurality of functional rollers (not shown) are further provided as a means.

One of these functional rollers is the left and right guide rollers 172 (see FIG. 14) for guiding the movement of the common support frame 120 in the left and right directions with respect to the track rail 101, and the other is for the track rail 101. It is an anti-collision roller 173 (refer FIG. 15) which prevents the collision of the floating electromagnet 130a.

One anti-collision roller 173 is provided at the center of the lower side, and two left and right guide rollers 172 are provided to be spaced apart from each other between the landing roller 171 and the anti-collision roller 173. At this time, the landing roller 171 and the collision prevention roller 173 is provided as a vertical roller which is disposed and rotated along the vertical direction, while the left and right guide rollers 172 are provided as horizontal rollers.

9 to 11 and 13, the landing roller 171 is not normally used, the cassette is mounted on the loading unit 110 of the common support frame 120 or the common support frame 120 The propulsion electromagnet 140a does not come into contact with the track rail 101 when the common support frame 120 is stopped to unload the cassette from or when the common support frame 120 is not lifted on the track rail 101 for some reason. To be used. In this case, the landing roller 171 is supported on the track rail 101, but the landing roller 171 should not be rotated when necessary. Therefore, the electronic breaker 171a is further coupled to the landing roller 171 to forcibly prevent its rotation. Since the electronic breaker 171a is further coupled to the landing roller 171 as described above, the landing roller 171 may be used for emergency braking as necessary.

9 to 11, and 14, the left and right guide rollers 172 are not necessarily the same when the common support frame 120 is moved along the track rail 101, but the track rail 101 as necessary. Rotates in contact with If the left and right guide rollers 172 are not provided with respect to the track rail 101, the path deviation of the common support frame 120 may be expected. However, in the present embodiment, as shown in FIG. 14, since the left and right guide rollers 172 are placed in the track rails 101 as if they are accommodated, they are brought into contact with the side walls of the track rails 101 as needed, so that the support frame is shared. 120 may be transported along the track rail 101 without deviating from the path.

9 to 11 and 15, the anti-collision roller 173 is provided to prevent the collision of the floating electromagnet (130a) with respect to the track rail 101, the common support frame 120 is a track rail ( Moving along the 101 or the common support frame 120 is not in contact with the track rail 101 even if stopped on the track rail (101). In other words, the anti-collision roller 173 is a case in which the common support frame 120 is excessively injured, that is, when the floating electromagnet 130a excessively approaches the track rail 101 side, the anti-collision roller 173 is the track rail By first contacting the 101, the collision of the floating electromagnet 130a and the track rail 101 is prevented, thereby protecting the floating electromagnet 130a. Therefore, at least the collision preventing roller 173 may have a structure of a block made of an elastic material other than the shape of the roller.

The operation of the magnetic levitation transfer system having such a configuration will be briefly described as follows.

Each of the above-described units are assembled and placed on the track rail 101, and the cassette is loaded on the stacking unit 110 at one point of the track rail 101.

Then, when a high frequency AC power is applied to the induction rail 151, electromotive force is generated by the law of electromagnetic induction to the pickup unit 152 adjacent to the induction rail 151, which is the floating unit 130 and the propulsion unit. It is provided as a power source for the operation of 140. Thus, power can be supplied stably and safely.

When the floating unit 130 and the pushing unit 140 are operated, first, the common support frame 120 is moved by a predetermined height H (see FIG. 12) by the interaction between the track rail 101 and the floating unit 130. Injured.

Then, the driving force is provided by the interaction between the track rail 101 and the pushing unit 140 so that the common support frame 120 is transferred along the track rail 101 to transfer the cassette to a desired other point. At this time, in the present embodiment, as described above in detail, the floating support electromagnet (130a) and the propulsion electromagnet 140a by using the four unit flotation / propulsion unit 131 is integrated to injure the common support frame 120 Since the vehicle is driven afterwards, it is possible to more precisely and easily control the degree of injury and running.

The vibration generated from the mechanical or floating electromagnets 130a and the propelling electromagnets 140a during the movement of the common support frame 120 is damped by the damping unit 160. In particular, the vibration generated from the floating electromagnet 130a and the propelling electromagnet 140a is damped through the air spring 161, in which case the upper and lower degrees of freedom allowing the hinge member 166a coupled to both sides of the unit floating / propelling unit 131. Since the vibrations from the upper electromagnets 130a and the propelling electromagnets 140a are guided in the vertical direction while preventing the vibration of the unit floating / propelling unit 131 in the left and right directions, the vibration can be more effectively damped. Of course, the shock or damping action by the mechanical or load is performed by the shock absorber 168 in addition to the air spring 161.

On the other hand, when the common support frame 120 reaches the desired point of the track rail 101, the high frequency AC power applied to the induction rail 151 is cut off, the injured common support frame 120 is lowered to the track rail ( It lands on 101 by the roller 171 for a landing.

At this time, since the rotation of the electronic breaker 171a is forcibly restrained, the common support frame 120 as the transporting body 120 is guided with a stable landing on the track rail 101. In this state, the cassette is moved and a new transport operation is performed again.

As described above, according to the present embodiment, the problem of particle generation can be solved by applying the magnetic levitation method, which is one of the non-contact methods, for transferring various conveyed objects including cassettes, especially large-sized conveyed objects. It is possible to solve the problem of damage to the parts due to wear and noise, and also to induce a stable landing of the transfer body 120 with respect to the track rail (101).

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

1 is a perspective view of a magnetic levitation transfer system according to an embodiment of the present invention.

2 is a partially exploded perspective view of FIG. 1.

3 is an enlarged perspective view of the common support frame.

4 is an enlarged perspective view of the floating unit.

5 to 8 are a plan view, a rear view, a left side view and a front view of FIG. 4, respectively.

FIG. 9 is an enlarged perspective view of one unit floating / propelling unit in the floating unit shown in FIG. 4. FIG.

10 and 11 are perspective views of FIG. 9 from different angles.

12 is a view of a floating unit mounted on a track rail.

13 is an enlarged structural diagram of the landing roller region.

14 is an enlarged structural diagram of the roller region for right and left guides.

15 is an enlarged structural diagram of an anti-collision roller region.

16 is a control block diagram of a magnetic levitation transfer system according to an embodiment of the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS

101: track rail 110: loading part

120: common support frame 130: floating unit

131: unit floating / propulsion unit 140: propulsion unit

150: power supply unit 160: damping unit

161: air spring 166: vibration transmission unit

168: auxiliary damper 171: landing roller

172: left and right guide roller 173: anti-collision roller

Claims (19)

A transfer body to which a loading unit on which the object to be transferred is coupled is coupled; A track rail forming a path through which the transfer body is transferred; A floating unit connected to the transfer main body to float the transfer main body by a predetermined height with respect to the track rail; A propulsion unit connected to the transfer body and providing a propulsion force to move the floating transfer body along the path of the track rail; A power supply unit for supplying power to the floating unit and the pushing unit; A landing roller coupled to the conveying body and brought into rolling contact with the track rail when the conveying body is landed on the track rail; A left and right guide roller coupled to the transfer body and configured to guide the movement of the transfer body in a horizontal direction with respect to the track rail; An anti-collision roller coupled to the transfer body to prevent collision of the floating electromagnet with the track rail; And One side is connected to the transfer body and includes a damping unit for damping the vibration from the floating unit or the pushing unit, The landing roller is coupled to an electronic breaker for selectively restraining the rolling motion of the landing roller, The damping unit, An air spring coupled to an upper region of the transfer body to damp vibration in a vertical direction; A sensing unit provided around the air spring to sense an air filling amount in the air spring; An air pump disposed around the air spring and supplying air to the air spring; And And a pump drive for selectively driving said air pump. delete delete delete delete delete The method of claim 1, The pump drive unit, A seesaw lever operated by a seesaw by a load from the loading side; A switch connected to the seesaw lever and on / off operation of the air pump based on the seesaw lever operation; And And a lever pusher connected to the loading portion and extending toward the seesaw lever to operate the seesaw lever by a load. The method of claim 1, The damping unit further includes an auxiliary damper provided around the air spring. 9. The method of claim 8, The auxiliary damper is a magnetic levitation transfer system, characterized in that the shock absorber coupled to the floating unit and the transfer body at both ends. The method of claim 1, The floating unit has a plurality of unit floating units spaced apart from each other, The transfer body is a common support frame connected to the plurality of unit floating unit, The propulsion unit is a magnetic levitation transport system, characterized in that it comprises a plurality of unit propulsion units spaced apart from each other connected to the common support frame. The method of claim 10, And the unit floating unit and the unit pushing unit are integrally formed to form a unit floating / propelling unit. 12. The method of claim 11, Four unit flotation / propulsion units are provided and connected to the common support frame, Each of the unit flotation / propulsion unit, Two wound electromagnets; And And a magnetic linear motor provided at an upper portion of the floating electromagnet and having a propulsion electromagnet disposed long along the longitudinal direction of the track rail. The method of claim 12, The damping unit further comprises a vibration transmission unit coupled to the unit floating / propulsion unit for transmitting vibration from the floating electromagnet or the propulsion electromagnet toward the air spring. 14. The method of claim 13, The vibration transmitting unit may be connected to the side of the unit floating / propulsion unit in a direction crossing the direction in which the common support frame moves along the track rail, and the vibration from the floating electromagnet or the propulsion electromagnet is the unit floating / propulsion. Maglev conveying system, characterized in that it comprises a plurality of vertical freedom allowable hinge member for guiding in the vertical direction while preventing the unit from facing in the left and right direction. The method of claim 14, The plurality of vertical freedom allowable hinge member is a magnetic levitation transport system, characterized in that it comprises at least a pair of vertical freedom allowable hinge members provided symmetrically on both sides of the unit floating / propulsion unit. 16. The method of claim 15, The vibration transmission unit, the magnetic levitation transfer system further comprises a connection bar for connecting the pair of upper and lower degrees of freedom allowable hinge member. The method of claim 1, The power supply unit, An induction rail disposed to be spaced apart from the track rail; And It is connected to the conveying main body so as to be disposed adjacent to the induction rail, characterized in that it comprises a pickup unit for supplying power to the floating unit and the propulsion unit by receiving a constant current in a non-contact state by the law of electromagnetic induction Floating transport system. 18. The method of claim 17, The pickup unit has a capital letter E shape, The pickup unit is a magnetic levitation transfer system, characterized in that provided in the central region of the conveying body along the longitudinal direction of the track rail. The method of claim 1, The object to be transported is a magnetic levitation transfer system, characterized in that the cassette (cassette) on which a liquid crystal display (LCD) substrate is loaded.

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