TW201112345A - Protection device for release film of wafer film laminator - Google Patents
Protection device for release film of wafer film laminator Download PDFInfo
- Publication number
- TW201112345A TW201112345A TW98133084A TW98133084A TW201112345A TW 201112345 A TW201112345 A TW 201112345A TW 98133084 A TW98133084 A TW 98133084A TW 98133084 A TW98133084 A TW 98133084A TW 201112345 A TW201112345 A TW 201112345A
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- cavity
- film
- upper cavity
- release film
- Prior art date
Links
- 238000007664 blowing Methods 0.000 claims abstract description 19
- 230000001681 protective effect Effects 0.000 claims description 10
- 238000010030 laminating Methods 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 4
- 241000282320 Panthera leo Species 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000013265 extended release Methods 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract description 66
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000003475 lamination Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000007717 exclusion Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 210000000003 hoof Anatomy 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98133084A TW201112345A (en) | 2009-09-30 | 2009-09-30 | Protection device for release film of wafer film laminator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98133084A TW201112345A (en) | 2009-09-30 | 2009-09-30 | Protection device for release film of wafer film laminator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201112345A true TW201112345A (en) | 2011-04-01 |
| TWI387036B TWI387036B (https=) | 2013-02-21 |
Family
ID=44909239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98133084A TW201112345A (en) | 2009-09-30 | 2009-09-30 | Protection device for release film of wafer film laminator |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201112345A (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1174164A (ja) * | 1997-08-27 | 1999-03-16 | Canon Inc | 基板処理装置、基板支持装置及び基板処理方法並びに基板の製造方法 |
| JP4354029B2 (ja) * | 1998-09-04 | 2009-10-28 | 日清紡ホールディングス株式会社 | ラミネート装置における搬送装置 |
| JP3098003B2 (ja) * | 1998-09-24 | 2000-10-10 | 日清紡績株式会社 | 太陽電池におけるラミネート装置 |
| JP3742000B2 (ja) * | 2000-11-30 | 2006-02-01 | 富士通株式会社 | プレス装置 |
| JP4250488B2 (ja) * | 2003-09-16 | 2009-04-08 | キヤノン株式会社 | 熱圧着方法 |
-
2009
- 2009-09-30 TW TW98133084A patent/TW201112345A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWI387036B (https=) | 2013-02-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106004002B (zh) | 一种背光撕膜装置 | |
| KR101352484B1 (ko) | 진공 적층 시스템 및 진공 적층 성형 방법 | |
| JP2012096403A5 (https=) | ||
| CN104483767B (zh) | 一种剥边角装置、剥膜设备及剥膜方法 | |
| TW201725166A (zh) | 積層體之剝離裝置及剝離方法與電子裝置之製造方法 | |
| KR20140007284A (ko) | 점착 테이프, 점착 테이프의 부착 방법 및 점착 테이프 부착 장치 | |
| WO2017096904A1 (zh) | 一种带状金属层薄膜冲切装置及其方法 | |
| EP3138682A1 (en) | Thermoforming apparatus | |
| TW201317116A (zh) | 貼合裝置及貼合方法 | |
| TWI659849B (zh) | 積層體之剝離裝置及剝離方法、與電子裝置之製造方法 | |
| TWI629770B (zh) | 軟性顯示器與承載基板分離之方法 | |
| KR102064727B1 (ko) | 시트 부착 장치 및 장치의 대형화 방지 방법 | |
| CN102169814B (zh) | 晶圆压膜机离形膜保护机构 | |
| TWI632982B (zh) | Plate retaining device | |
| TW201112345A (en) | Protection device for release film of wafer film laminator | |
| JP2014031270A (ja) | シート貼付方法及びシート貼付装置 | |
| TW201545891A (zh) | 積層體之剝離裝置及剝離方法以及電子元件之製造方法 | |
| CN102514352B (zh) | 底胶贴合机及贴合方法 | |
| CN117382213B (zh) | 一种内框复合膜产品制备方法 | |
| JP2003324144A (ja) | 静電チャック及びそれを用いたフラットパネル用基板の貼り合わせ装置 | |
| TWI652731B (zh) | Stripping device and peeling method of laminated body, and manufacturing method of electronic component | |
| JP2014183169A (ja) | シート貼付装置および貼付方法 | |
| KR101635601B1 (ko) | 명판 제작장치 | |
| KR101430667B1 (ko) | 기능성 필름 부착장치 | |
| CN109264123B (zh) | 板材的保持装置 |