201107023 、 六、發明說明： 本申凊案主張2009年6月19曰申請之美國臨時申請案號 61/218,730之權利，本申請案之全文係以引用的方式併入 本申請案中。 【先前技術】 . 用於半導體工業中之清潔浴可含有腐蝕性且氧化化學 • 品。一些此等清潔浴可排氣且可產生氣體及氣泡。此一清 潔浴之一實例為一 SPM浴。SPM浴溶液含有（Κ2804/Η2〇2/ ΗζΟ )且係用於從晶圓移除金屬離子及有機物質。此等清 潔浴之過濾使用具有如PTFE及類似物之惰性材料之多孔 隔膜之過濾器。在使用期間，在形成氣體之清潔浴中，該 過濾隔膜之去濕可發生且在一些情況中通過該過濾器之洛 化學品之流率之一劣化可發生。此可導致該浴之降低清潔 效率。 具有各種皺褶樣式之皺褶過濾器已揭示包含大主皺褶 (Ρ)及一或多個副皺褶（S)。舉例而言，美國專利申請案公 開案第20050045553號揭示具有主皺褶Ρ及副皺褶S1及S2之 . 皺褶的一重複樣式’在該樣式Ρ、SI、S2·.·中，Ρ、si及S2 之高度比在諸如3:2:1之一比中。威克斯（Wicks)的美國專 利第2,627,350號揭示主皺褶及副皺褶之重複樣式，例如 ?、81、32、81...(見美國專利第2,627,350號之圖3，其中 S1<S2) ; P、Sl...(見美國專利第 2,627,350號之圖 5) ; P、 SI、S2...(見美國專利第2,627,350號之圖6，其中S1<S2)。 曰本專利JP-11347329揭示重複皺褶樣式Ρ、P、S1、 149106.doc 201107023 S2...(見日本專利jp_U347329之圖】，其中S1<S2) ; Μ· 17307揭示一重複皺褶樣式1>、1>、1)、1>、81、82、81(見 斤64-17307之圖4，其中51<32);圩64-17307揭示重複皺 褶樣式卩、31、32...(見】？64_173〇7之圖2，其中81<32)。 曰本實用專利第H02-7〇7〇6號揭示如本申請案之圖6中所顯 示之重複皺褶樣式。在圖6中，該皺褶重複樣式p、p、p、 P、P、S2、S1、S3".顯示皺褶4a為一副皺褶且不為一主皺 褶4。此外，如圖6之插圖（B)中可見，皺褶钧不觸碰用參 考數字5標記之芯部：S3>S2>S1。 奥爾森（Olsen)的美國專利第6,315，13〇號描述與以一均勻 頻率升起之相同高度短皺褶產生之重複且均勻皺褶樣式關 聯之問題。奥爾森針對重複皺褶樣式所指出之一問題為縮 短皺褶之遷移及低於最佳皺褶密度。奥爾森揭示一不重複 皺褶配置或主皺褶及副皺褶之一分佈，該等副皺褶之高度 係經計算使得所有該等副皺褶具有不同高度❶在一些情況 中，由於實際原因（打褶機操作、在籠内配合過濾組合件 之能力）’ 一些副赦指具有相同最小高度或係從該過濾組 合件省略。 連續存在減少皺褶過濾器之流率劣化之一需要，尤其在 例如用於製造％境中之清潔浴或化學組合物之腐蝕性且氣 體產生環境中。 【發明内容】 雖然描述各種組合物及方法，但應理解本發明不限於該 等描述特殊分子、組合物、方法論或協定，因為其等可能 149106.doc 201107023 變化。亦應理解用於該描述中之術語係僅用於描述該等特 殊型式或實施例之目的，且不意欲限制僅由隨附技術方案 所限制之本發明之範嘴。 亦必須注意如此處及該等隨附技術方案中所使用，除非 本文另有清楚地指示，單數形式「一」、「一個」及「該」 包含複數參考。因此，舉例而言’參考一「皺褶」係意指 參考熟習此項技術者所已知的一或多個皺褶及其等效物， 及等等。除非另有定義，此處所使料所有技術及科學術 語具有如由一般熟習技術者所共同理解之相同意思。相似 於或等於此處所描述者之方法及材料可用於本發明之實施 例之實踐或測試中。此處所提及的所有公開案係以引用的 方式併入。本文絕不被視為承認由於先前發明使本發明無 早於此揭示内容之權益。「可選」或「視需要」意指後續 描述事件或情況可或可不發生，且該描述包含其中該事件 發生之實例及該事件不發生之實例。無論是否明確指示， ,處所有數值可由術語「約」或「大體上」修飾。術語 「約」或「大體上」大致意指熟習此項技術者將視為等於 該列舉值（亦即具有相同功能或結果）之一數字範圍。在一 些實施例術語「約」或「大體上」指經陳述值之 ±10%。在其他實施例中，術語「約」或「大體上」意指 經陳述值之±2%。雖然組合物及方法係針對「包括j各= 組件或步驟(解譯為意指「包含，但不限於」）描述，但該 等組合物及方法料「基本上由」或「由」該等各種組： 及步驟組成，此術語應解譯為界定基本上封閉式部件群 149106.doc 201107023 爲了減小通過各種過滤應用中之皺褶過濾器之液體流量 劣化’根據加濕過濾器之氮氣清洗測試，一且士 丹，猎由不同 高度之一或多個副敏糟所分開之一或多個主皺稽之—交替 重複樣式（該等副皺褶係配置於該等主皺糟之間的—重 樣式中）之過渡器’如與具有其他重複皺褶樣式之過據器 比較，已發現減小該過濾器中之該液體流量劣化。 【實施方式】 在該專利說明書之各種繪示及圖式中，應理解儘管各皺 指之該尖端係繪示為一點，若該皺褶為一「v」形狀，7 尖端實際上可如記錄之-些引用以牛中所顯示略微成^ 形。該尖端之半徑可由用於在一片過濾材料中建立皺褶之 該實施之特徵以及該過濾材料片之厚度而決定。在本發明 之型式中，該皺褶材料可由多個片組成。舉例而言該過 濾材料片可為放置於一或多個排洩層片及/或支撐層片之 間的一多孔、微孔或奈米孔隔膜。 壓縮率係在該過濾器之一圓周方向中的該等皺褶之一厚 度方向中測量。該壓縮率為該等皺褶在一厚度方向中壓縮 至何程度之一測量。 皺褶過濾器結構之該氮氣清洗處理可用於測量不同皺褶 結構之流量劣化。在此測試中，針對該測試使用以下程序 來氮氣清洗該等預濕過濾器：在用水的重量之6〇%的ipA 預/…D亥過遽隔膜之後，施加在6kg/cm2之一壓力下的氮氣 至泫隔膜（以大氣壓釋放）。此循環係重複1 5次且接著該過 149106.doc 201107023 慮器經特知支化為諸如使用水在 圖2及圖3中所顯示之流率下 之流動效率。 圖U、員不可用於包含一皺褶微孔隔膜之一過濾器中之皺 權之一重複樣式。該重複樣式可包括主Μ及副皺褶之-重複樣式（或實質上由其’或由其）組成。該等主皺褶具有 在該過濾器之—内芯部與該過濾器之一外籠之間測量的一 问度Ρ 第一副皺褶具有一高度S1且一第二副皺褶具有 问度S2，SU系與S2不同且S1及S2兩者小於Ρ。主皺褶及 副皺褶之該重複樣式可由標記（？、1>、81、1>、82 )表 示，其令Ρ表示該主皺褶，31及82表示該等副皺褶，且該 ^ …J指不該樣式重複。舉例而言，圖1中之該皺褶 樣式之兩個循環將由該標記P ' P、S1、Ρ、S2、ρ、Ρ、 SI、P、S2及等等表示。如由，中之該表示法可見存在 由不同高度之一或多個副皺褶分開之一或多個主皺褶之— 父替重複樣式，該等副皺褶係配置於該等主皺褶之間的— 童複樣式中。在此型式中，一對主皺褶卩及p係藉由一第一 副皺褶S1而與另-單主皺褶？分開且此單主皺褶係藉由具 有與該第一副皺褶之一不同高度的一第二副皺糟S2而與另 一對主皺褶1>及1>(圖中僅顯示一主皺褶之一部分）分開。 當具有圖！中所說明之本發明皺糟結構之樣品過滤器（此 等係由圖！中之該表中之參考數字指定為20083294、 2_银2、2__229_3、2_银4)係藉由加速氣氣清 洗處=或測試而與具有-「1/2M」敏褶結構（見圖5)之— 過濾器比較時，具有圖1之該皺稽結構之該等過滤器顯示 149106.doc 201107023 極少或不顯示在該氮氣清洗之後橫跨該等過濾器之差壓中 之增加（在2008-229-3及2008-229-4之兩種情況中甚至為降 低）而具有該「1/2M」皺褶結構的標準過濾器N8M707134 之该過濾器則顯示差壓中之一明顯增加（〇 2 1 kg/psi(預濕） 至約0.26 kg/psi(在氮氣清洗之後））。 圖3中顯示在各種流率下的此等相同過濾器在氮氣清洗 處理之後的通量比測試。具有該r 1/2M」皺褶結構之該標 準過濾器N8M707134清楚地顯示從約6(L/min/m2 Δρ)至小 於5(L/min/m2 ΔΡ)之一降低，即效率的至少16%之一降低， 而使用本發明之該皺褶結構之一型式的樣品2〇〇8_229_2、 2008-229-3 ' 2008-229-4顯示極少或不顯示效率降低（樣品 2008 229·3實際上顯不效率增加）。如由該氮氣清洗測試所 測夏’具有本發明之型式中之該皺糟結構之過遽器基本上 效率未受影響。不希望被理論所束縛，據信該氮氣清洗測 試可用作一過濾器中之皺褶變形之一測量；在過濾期間， 皺褶之相似變形可發生於各種清潔浴中且導致流量隨時間 衰退。具有如由該等非限制實例所描述且說明之本發明之 型式中之該皺褶結構之過遽器型式抵制此變形，如由圖3 中之該等結果所繪示之幾乎值定過遽效率所指示。 ▲^發明之型式中之重複皺褶樣式中之該等主皺褶之間的 之-度之順序係不限於任何特殊順序只要該樣 ;…I?例而言，從左移至右，圖1中之該等副敞稽 社構所顯示之該等副敏稍之相反順序。在該皺褶 、-。構之—錢中，該等主皺褶之間的該等副皺權之順序: 149106.doc 201107023 以任何樣式配置，只要續桡彳 晋樣式重複遍及該過濾器；該等副 皴梢之尺寸不需要以—增加或降低順序。 雖」本發月之型式巾之主㈣及副皺稽之樣式為重複， 但不需要整數的一皺褶循環’諸如呈現於一過遽器中之 (P S1 P S2…）。舉例而言，當該芯部與籠之間的 該敵權過渡器之配合係藉由省略_些敵褶（諸如但不限於 該最終Μ循環中之1>及82)而促進時，具有此等敗權過滤 器之過滤H係視為由於該等技術方案及專利說明書之目的 而重複。 S玄等主皺褶及副皺褶係由一打褶機製成。皺褶尺寸中之 細小變化，諸如一副皺褶之該平均高度之±5%或更小（在一 些情况中士 1 /〇或更小）’係視為由於該專利說明書及技術方 案之目的而提供副皺褶之一重複樣式。 圖1中說明本發明之一型式且其為包括一皺褶微孔隔膜 之一皺褶過濾器，該皺褶微孔隔膜具有主敵褶及副敞褶之 一重複樣式，該等主皺褶具有一高度p，該高度p係在該過 濾器之一内怒部與該過濾器之一外籠之間測量的距離。該 皺褶過滤裔包含一第一副皺褶及一第二副敵褶，該第一副 敵4習具有攸该散至該敵糟之該内尖峰所測量之一高度s 1且 該第二副敏權具有從該籠至該皺褶之該内尖峰所測量之一 高度S2。在該皺褶過濾器中，S1係與S2不同且S1及S2兩者 小於P。主皺褶及副皺褶之該重複樣式可由該標記（p、p、 SI ' P、S2...)描述。如圖1中所說明，si具有p/3之一高度 且S2具有2P/3之一高度。 149l06.doc •9· 201107023 在本發明之諸型式中，該微孔隔膜可包括主皺褶及副皺 褶之該重複樣式（或實質上由其，或由其組成）。 在本發明之一些型式中，通過在一氮氣清洗處理之後具 有該重複皺褶樣式之該過濾器之流量劣化或損失係小於 15%。 舉例而言，如圖1、圖4及圖5中所繪示，本發明之另一 变式為包括一敵指微孔隔膜之一皺褶過遽器，該皺權微孔 隔膜具有包含主皺褶及副皺褶之皺褶之一重複樣式。如圖 4中所繪示，皺褶之該重複樣式具有n(n等於4)對鄰接主皺 褶及n+1個主皺褶（PI、P2、P3、P4、P5)。各主皺褶具有 在該過遽器之一内芯部與該過遽器之一外籠之間測量的一 高度P。諸皺褶之該重複樣式具有在（η-1)對主皺褶之間的 (η-1)個副皺褶（S1、S2、S3)。此係由圖4中之對2、對3及 對4之間的3 (η-1)個副皺褶說明。一對主皺褶，對1為在ρ工 與P2之間不存在或不具有一副皺褶。在本發明之一些型式 中，該等（n-1)個副皺褶之高度係由（p/n)、（2P/n)...((n-1 )P/n)決定》在本發明之一些型式中，「η」為3，或4，或 5 ;在其他型式中，「η」為3。 儘管可混合該重複樣式中之該等副敵褶之高度（副皺褶 之相同混合樣式重復地發生），在本發明之一些型式中， 該·^副赦禪之向度逐步增加。 在本發明之一型式中，對於皺褶之該重複樣式，η為3， 主皺褶及副皺褶之該重複樣式係由（ρ、Ρ、S1、Ρ、S2…） 指定’且S1之高度為（Ρ/3)且S2之高度為（2Ρ/3)。 149106.doc •10· 201107023 圖5忒明一標準皺褶、一 ％ M皺褶及本發明之一型式之 一皺褶結構之間的皺褶結構差異；此等繪示中之該皺褶結 構之該芯部側係在該底部上而該套管側係在頂部上。截面 中之一繪示過濾器濾筒中顯示該等皺褶隔膜之該芯部側及 套管側（内圓周表示一芯部，較大外徑圓周表示一籠該 表含有與圖1之相同資訊。 儘管本發明已相當詳細地參考本發明之某些較佳實施例 描述，但可能具有其他型式。因此，該等隨附技術方案之 精神及範疇不應限於含納於此專利說明書内的該描述且該 等較佳型式》 【圖式簡單說明】 圖1說明與一標準過濾器比較之本發明之一型式中之敏 褶結構； 圖2顯示對於一標準過濾器與具有本發明之型式中之敵 指結構之過濾器比較之加速氮氣清洗測試之結果； 圖3顯示在氮氣清洗之前及之後的通量比評估之結果· 圖4說明本發明之一型式中之一皺褶結構； 圖5比較標準皺褶與本發明之型式中之皺褶結構之繪 示；及 圖6係來自一記錄文件之一皺褶結構之一繪示。 【主要元件符號說明】 4 主皺褶 4a 皺褶 5 芯部 149106.doc -11 - 201107023 P 高度 PI 主皺褶 P2 主皺褶 P3 主皺褶 P4 主皺褶 P5 主皺褶 SI 副皺褶 S2 副皺褶 S3 副皺褶 149106.doc - 12-</ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; [Prior Art] . Cleaning baths used in the semiconductor industry can contain corrosive and oxidizing chemicals. Some of these cleaning baths can be vented and can generate gases and bubbles. An example of such a clean bath is an SPM bath. The SPM bath solution contains (Κ2804/Η2〇2/ΗζΟ) and is used to remove metal ions and organic materials from the wafer. The filtration of such cleaning baths uses a filter having a porous membrane of an inert material such as PTFE and the like. During use, in the cleaning bath that forms the gas, dehumidification of the filter membrane can occur and in some cases deterioration of one of the flow rates through the filter can occur. This can result in reduced cleaning efficiency of the bath. A pleated filter having various pleat patterns has been disclosed to include large primary pleats (Ρ) and one or more secondary pleats (S). For example, U.S. Patent Application Publication No. 20050055553 discloses a repeating pattern of wrinkles having main pleats and secondary pleats S1 and S2. In this style SI, SI, S2·.· The height ratio of si and S2 is in a ratio such as 3:2:1. U.S. Patent No. 2,627,350 to the disclosure of U.S. Patent No. 2,627,350, issued to U.S. Patent No. 2,627,350, the disclosure of which is incorporated herein by reference to U.S. Pat. P, S1... (see Figure 5 of U.S. Patent No. 2,627,350); P, SI, S2... (see Figure 6 of U.S. Patent No. 2,627,350, in which S1 < S2). Japanese Patent JP-11347329 discloses a repeating wrinkle pattern Ρ, P, S1, 149106.doc 201107023 S2... (see Japanese Patent Jp_U347329), where S1<S2); Μ·17307 reveals a repeating wrinkle pattern 1> ;, 1>, 1), 1>, 81, 82, 81 (see Fig. 4 of Fig. 64-17307, where 51 <32); 圩 64-17307 reveals repeated wrinkle patterns 31, 31, 32... See Fig. 2 of 64_173〇7, where 81<32). The repetitive wrinkle pattern as shown in Fig. 6 of the present application is disclosed in the utility model No. H02-7〇7〇6. In Fig. 6, the wrinkle repeating pattern p, p, p, P, P, S2, S1, S3 " shows that the wrinkles 4a are a pair of wrinkles and are not a main wrinkle 4. Further, as seen in the inset (B) of Fig. 6, the wrinkles do not touch the core marked with reference numeral 5: S3 > S2 > S1. U.S. Patent No. 6,315,13 to Olsen describes the problem associated with repeated and uniform pleat patterns resulting from short wrinkles of the same height raised at a uniform frequency. One of Olson's problems with repeated wrinkle patterns is the reduction of wrinkle migration and below the optimal wrinkle density. Olson reveals a non-repetitive pleat configuration or a distribution of primary pleats and secondary pleats that are calculated such that all of the secondary pleats have different heights, in some cases, due to the actual Cause (the operation of the pleating machine, the ability to fit the filter assembly in the cage) 'Some of the secondary fingers have the same minimum height or are omitted from the filter assembly. There is a continuing need to reduce the flow rate degradation of the pleated filter, especially in corrosive and gas generating environments such as those used in the manufacture of cleaning baths or chemical compositions in %. DETAILED DESCRIPTION OF THE INVENTION While various compositions and methods are described, it is to be understood that the invention is not limited to such particular exemplifications, compositions, methods, or conventions, as they may vary 149106.doc 201107023. It is also to be understood that the terminology used in the description is only for the purpose of describing the particular embodiments or embodiments, and is not intended to limit the scope of the invention as limited by the accompanying claims. The singular forms "a", "an" and "the" Thus, by way of example, ""wrinkle" is meant to refer to one or more pleats and their equivalents known to those skilled in the art, and the like. All technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art, unless otherwise defined. Methods and materials similar to or equivalent to those described herein can be used in the practice or testing of embodiments of the invention. All publications mentioned herein are incorporated by reference. This document is not to be taken as an admission that the invention "Optional" or "as needed" means that a subsequent description of an event or circumstance may or may not occur, and that the description includes instances in which the event occurred and instances in which the event does not occur. All numerical values may be modified by the terms "about" or "substantially", whether or not explicitly indicated. The term "about" or "substantially" generally means that one of the numerical ranges is considered to be equal to the listed value (ie, having the same function or result). In some embodiments the term "about" or "substantially" refers to ±10% of the stated value. In other embodiments, the term "about" or "substantially" means ± 2% of the stated value. And the compositions and methods are described as "substantially by" or "by", and are intended to be described as "comprising" or "comprising". Various groups: and steps, this term should be interpreted as defining a substantially closed component group 149106.doc 201107023 in order to reduce liquid flow degradation through the pleated filter in various filtration applications 'Nitrogen cleaning according to humidification filter Test, one, and Shi Dan, hunting one or more main wrinkles separated by one or more sub-minors of different heights - alternating repeating patterns (the secondary wrinkles are arranged between the main wrinkles) The transitioner of the -heavy pattern has been found to reduce the deterioration of the liquid flow in the filter as compared to a filter having other repeating pleat patterns. [Embodiment] In the various drawings and drawings of the patent specification, it should be understood that although the tip of each wrinkle is shown as a point, if the wrinkle is in a "v" shape, the 7 tip can actually be recorded as a record. These references are slightly different from those shown in the cattle. The radius of the tip can be determined by the features of the implementation for establishing wrinkles in a piece of filter material and the thickness of the sheet of filter material. In a version of the invention, the pleated material can be comprised of a plurality of sheets. For example, the sheet of filter material can be a porous, microporous or nanoporous membrane placed between one or more drainage plies and/or support plies. The compression ratio is measured in the thickness direction of one of the wrinkles in one circumferential direction of the filter. The compression ratio is measured as one of the extent to which the wrinkles are compressed in a thickness direction. This nitrogen purge treatment of the pleated filter structure can be used to measure flow degradation of different pleated structures. In this test, the pre-wet filter was purged with nitrogen for the test using the following procedure: after the ipA pre-/...D of the weight of water was passed through the diaphragm, applied at a pressure of 6 kg/cm2 Nitrogen to helium diaphragm (released at atmospheric pressure). This cycle is repeated 15 times and then the 149106.doc 201107023 is known to be branched into flow efficiencies such as the flow rate shown in Figures 2 and 3 using water. Figure U, the member is not available for one of the wrinkle weights in a filter containing one of the pleated microporous membranes. The repeating pattern may comprise (or consist essentially of) or a repeating pattern of the primary and secondary pleats. The primary pleats have a degree of measurement measured between the inner core of the filter and one of the outer cages of the filter. The first secondary pleat has a height S1 and a second secondary pleat has a degree of doubt. S2, SU is different from S2 and both S1 and S2 are smaller than Ρ. The repeating pattern of the main pleats and the secondary pleats may be represented by marks (?, 1>, 81, 1>, 82), which indicates that the main wrinkles are indicated by Ρ, and 31 and 82 indicate the sub-wrinkles, and the ^ ...J means that the style should not be repeated. For example, the two cycles of the wrinkle pattern in Figure 1 will be represented by the indicia P ' P, S1, Ρ, S2, ρ, Ρ, SI, P, S2, and the like. As can be seen in the representation, there is one or more primary pleats separated by one or more secondary pleats of different heights - a parental repeating pattern, the secondary pleats being disposed on the primary pleats Between the - child complex style. In this version, a pair of primary pleats and p-series are separated from the other-single main pleat by a first secondary pleat S1. Separately and the single main wrinkle is formed by a second secondary wrinkle S2 having a different height from one of the first secondary gathers and the other pair of primary gathers 1> and 1> Part of the wrinkles) separate. When with the map! The sample filter of the wrinkle structure of the present invention described in the drawings (these numbers are designated as 20083294, 2_silver 2, 2__229_3, 2_silver 4 in the table in Fig.!) by accelerating gas The cleaning station = or test and compared with the filter with - 1/2M pleat structure (see Figure 5) - the filter with the crease structure of Figure 1 shows 149106.doc 201107023 Very little or no Showing the increase in the differential pressure across the filters after the nitrogen purge (even in the two cases 2008-229-3 and 2008-229-4) with the "1/2M" wrinkles The filter of the standard filter N8M707134 of the structure shows a significant increase in one of the differential pressures (〇2 1 kg/psi (pre-wet) to about 0.26 kg/psi (after nitrogen cleaning)). The flux ratio test of these same filters at various flow rates after nitrogen purge treatment is shown in FIG. The standard filter N8M707134 having the r 1/2M" pleated structure clearly shows a decrease from about 6 (L/min/m2 Δρ) to less than 5 (L/min/m2 ΔΡ), ie at least 16 in efficiency. One of the % is lowered, and the sample 2〇〇8_229_2, 2008-229-3 '2008-229-4 using one of the wrinkled structures of the present invention shows little or no display efficiency reduction (sample 2008 229·3 actually Significant increase in efficiency). The efficiency of the crucible having the wrinkle structure in the type of the present invention as measured by the nitrogen purge test is not substantially affected. Without wishing to be bound by theory, it is believed that the nitrogen purge test can be used as one of the wrinkle deformations in a filter; during filtration, similar deformation of the wrinkles can occur in various cleaning baths and cause the flow to decay over time. . The type of the damper having the pleated structure of the type of the invention as described and illustrated by the non-limiting examples resists this deformation, as illustrated by the results of Figure 3, which is almost fixed. Indicated by efficiency. ▲^ The order of the degree between the main pleats in the repeated pleat pattern in the type of invention is not limited to any special order as long as the sample; ...I?, from left to right, The sub-sensitive organizations shown in 1 are slightly reversed in order. In the wrinkles, -. In the form of money, the order of the secondary wrinkles between the main wrinkles: 149106.doc 201107023 In any style configuration, as long as the continuous style is repeated throughout the filter; the size of the secondary tips There is no need to increase or decrease the order. Although the style of the main (4) and the secondary crease of the type of the present month is repeated, an integer wrinkle cycle is not required, such as being presented in a filter (P S1 P S2...). For example, when the cooperation of the enemy flow transition between the core and the cage is facilitated by omitting some of the enemy pleats (such as but not limited to 1 > and 82 in the final enthalpy cycle), The filtering of the equal weight filter is considered to be repeated for the purposes of these technical solutions and patent specifications. S Xu and other main wrinkles and secondary wrinkles are made by a pleating machine. Small variations in the size of the wrinkles, such as ±5% or less of the average height of a pair of wrinkles (in some cases ± 1 /〇 or less) are considered to be due to the purpose of the patent specification and technical solution A repeat pattern of one of the secondary pleats is provided. One version of the invention is illustrated in Figure 1 and is a pleated filter comprising a pleated microporous membrane having a repeat pattern of primary pleats and secondary pleats, the primary pleats There is a height p which is the distance measured between the anger in one of the filters and the outer cage of one of the filters. The wrinkle filter includes a first pair of wrinkles and a second auxiliary pleat, the first adversity 4 having a height s 1 measured by the inner peak of the enemy, and the second The secondary sensitivity has a height S2 measured from the cage to the inner peak of the wrinkle. In the pleated filter, the S1 system is different from S2 and both S1 and S2 are smaller than P. This repeating pattern of the main pleats and the secondary pleats can be described by the marks (p, p, SI ' P, S2...). As illustrated in Figure 1, si has a height of one p/3 and S2 has a height of 2P/3. 149l06.doc • 9· 201107023 In the versions of the invention, the microporous membrane may comprise (or consist essentially of, or consist of) the repeating pattern of primary pleats and secondary pleats. In some versions of the invention, the flow rate degradation or loss of the filter having the repeating pleat pattern after a nitrogen purge process is less than 15%. For example, as illustrated in FIGS. 1, 4, and 5, another variation of the present invention includes a wrinkle filter comprising a hostile microporous membrane having a main inclusion One of the folds of the wrinkles and the secondary wrinkles repeats the pattern. As illustrated in Figure 4, the repeating pattern of wrinkles has n (n equals 4) pairs of adjacent main pleats and n+1 primary pleats (PI, P2, P3, P4, P5). Each of the main pleats has a height P measured between the core of one of the dampers and one of the outer cages of the damper. This repeating pattern of the wrinkles has (η-1) secondary wrinkles (S1, S2, S3) between (η-1) and main wrinkles. This is illustrated by the pair of (n-1) secondary pleats between pairs 2, 3 and 4 in Figure 4. A pair of main pleats, the pair 1 is neither present nor having a pair of pleats between ρ and P2. In some versions of the invention, the height of the (n-1) secondary pleats is determined by (p/n), (2P/n)...((n-1)P/n) In some versions of the invention, "η" is 3, or 4, or 5; in other versions, "η" is 3. Although the height of the secondary pleats in the repeating pattern can be mixed (the same blending pattern of the secondary pleats occurs repeatedly), in some versions of the present invention, the directionality of the 赦 赦 逐步 is gradually increased. In one form of the invention, for the repeating pattern of wrinkles, η is 3, and the repeating pattern of the main wrinkles and the secondary gathers is designated by (ρ, Ρ, S1, Ρ, S2, ...) and S1 The height is (Ρ/3) and the height of S2 is (2Ρ/3). 149106.doc •10· 201107023 Figure 5 illustrates the difference in wrinkle structure between a standard wrinkle, a % M wrinkle, and one of the wrinkled structures of one form of the present invention; the wrinkle structure in such depiction The core side is attached to the bottom and the sleeve side is attached to the top. One of the cross-sections shows the core side and the sleeve side of the filter cartridge in the filter cartridge (the inner circumference represents a core portion, and the larger outer diameter circumference represents a cage. The table contains the same information as in FIG. Although the present invention has been described in considerable detail with reference to certain preferred embodiments of the present invention, it may have other forms. Therefore, the spirit and scope of the accompanying technical solutions should not be limited to the ones included in the patent specification. DESCRIPTION OF THE PREFERRED EMBODIMENT [FIG. 1 illustrates a pleated structure in one version of the present invention compared to a standard filter; FIG. 2 shows a version of the standard filter and the present invention. The results of the accelerated nitrogen purge test of the filter of the enemy finger structure; Figure 3 shows the results of the flux ratio evaluation before and after the nitrogen purge. Figure 4 illustrates one of the wrinkle structures in one version of the present invention; Comparing the standard pleats with the pleat structure in the form of the present invention; and Fig. 6 is one of the pleated structures from one of the recorded documents. [Main component symbol description] 4 main wrinkles 4a wrinkles 5 core 149106.doc -11 - 201107023 P main corrugation height PI P2 P3 main pleats main pleats P4 P5 main pleats main pleats pleats SI S2 sub sub sub corrugation folds S3 149106.doc - 12-