JP2000300921A - Air filter material and air filter unit using the same - Google Patents
Air filter material and air filter unit using the sameInfo
- Publication number
- JP2000300921A JP2000300921A JP11392199A JP11392199A JP2000300921A JP 2000300921 A JP2000300921 A JP 2000300921A JP 11392199 A JP11392199 A JP 11392199A JP 11392199 A JP11392199 A JP 11392199A JP 2000300921 A JP2000300921 A JP 2000300921A
- Authority
- JP
- Japan
- Prior art keywords
- air filter
- fiber
- filter medium
- ptfe
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ポリテトラフルオ
ロエチレン（以下、「ＰＴＦＥ」という）多孔質膜を用
いたエアフィルタ濾材に関し、さらに詳しくは、例え
ば、半導体工業や薬品工業等のクリーンルームで使用さ
れる空気や気体中の浮遊粒子の捕獲に用いるフィルタ濾
材、ハードディスク内部に進入する塵埃やハードディス
ク内部で発生する塵埃の捕獲に用いるフィルタ濾材（例
えば、ベントフィルタ濾材）、または掃除機により吸引
した塵埃の捕獲に用いるフィルタ濾材として好ましく使
用できるエアフィルタ濾材およびそれを用いたエアフィ
ルタユニットに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air filter medium using a porous polytetrafluoroethylene (hereinafter, referred to as "PTFE") membrane, and more particularly, to an air filter medium used in a clean room such as a semiconductor industry or a chemical industry. Filter material used to trap airborne particles in air or gas, filter material used to capture dust entering the hard disk or dust generated inside the hard disk (eg, vent filter material), or dust sucked by a vacuum cleaner TECHNICAL FIELD The present invention relates to an air filter medium which can be preferably used as a filter medium used for trapping air, and an air filter unit using the same.
【０００２】[0002]
【従来の技術】従来、クリーンルーム等で使用されるエ
アフィルタユニットには、ガラス繊維にバインダーを加
えて抄紙したエアフィルタ濾材が多く使用されている。
しかし、このような濾材には、例えば、濾材中の付着小
繊維の存在や、加工による折り曲げ時の自己発塵という
ような問題がある。また、前記自己発塵を防止するため
に、バインダー量を増加させると、その圧力損失が増大
する等のおそれもある（特開昭６３−１６０１９号公
報）。さらに、このような濾材は、フッ酸等のある種の
化学薬品と接触すると、ガラスおよびバインダーが劣化
して発塵するという問題もある。2. Description of the Related Art Conventionally, an air filter unit used in a clean room or the like often uses an air filter medium formed by adding a binder to glass fiber and making paper.
However, such a filter medium has problems such as the presence of attached small fibers in the filter medium and self-dusting during bending due to processing. Further, when the amount of the binder is increased to prevent the self-dusting, the pressure loss may be increased (Japanese Patent Application Laid-Open No. 63-16019). Furthermore, such a filter medium has a problem that when it comes into contact with a certain chemical such as hydrofluoric acid, the glass and the binder are deteriorated and dust is generated.
【０００３】一方、ＰＴＦＥはクリーンな材料で、耐薬
品性にも優れている。そこで、近年、前記ＰＴＦＥ多孔
質膜が、エアフィルタ濾材として種々の分野で使用され
ており、特に、厳しい清浄環境が要求されている半導体
製造等の分野におけるエアフィルタ濾材として有用であ
る。On the other hand, PTFE is a clean material and has excellent chemical resistance. Therefore, in recent years, the PTFE porous membrane has been used in various fields as an air filter medium, and is particularly useful as an air filter medium in fields such as semiconductor manufacturing where a severe clean environment is required.
【０００４】前記ＰＴＦＥ多孔質膜は、例えば、シート
状ＰＴＦＥ成形体を作製し、これを二軸延伸して多孔質
化することにより製造できる。このようにして製造され
たＰＴＦＥ多孔質膜は、圧力損失が非常に低く、捕集効
率が非常に高いため、塵埃捕集性能に優れている。しか
しながら、前記ＰＴＦＥ多孔質膜は、延伸によりその厚
みが薄くなるため強度が弱く、それ単独ではエアフィル
タ濾材として使用が困難である。このため、前記ＰＴＦ
Ｅ多孔質膜に、補強材として通気性多孔材を複合または
積層化したものがエアフィルタ濾材として使用されてい
る（国際公開番号ＷＯ９４／１６８０２号公報）。[0004] The porous PTFE membrane can be produced, for example, by preparing a sheet-like PTFE molded article, and biaxially stretching it to make it porous. The porous PTFE membrane produced in this manner has a very low pressure loss and a very high collection efficiency, and thus has excellent dust collection performance. However, the PTFE porous membrane has a low strength because the thickness is reduced by stretching, and it is difficult to use the PTFE porous membrane alone as an air filter medium. Therefore, the PTF
A composite material or a laminate of a porous material as a reinforcing material and an E porous film is used as an air filter material (International Publication No. WO94 / 16802).
【０００５】前記補強材としては、ＰＴＦＥ多孔質膜と
のラミネート時に収縮せず、プリーツ加工等に対しても
適度な剛性が得られることから、一般的に、ポリエチレ
ン（ＰＥ）製の合成繊維で構成された、芯鞘構造のスパ
ンボンドタイプ不織布が用いられている。例えば、前記
ＰＴＦＥ多孔質膜に前記不織布等の補強材を積層したフ
ィルタ濾材をプリーツ加工して用いたエアフィルタユニ
ットでは、粒径０．１μｍの粒子に対する捕集効率が９
９．９９９９９９％以上と非常に優れた塵埃捕集性能を
有し、これによりクリーンルーム等の清浄環境を一段と
向上することが可能となっている。しかしながら、前記
補強材は、塵埃をほとんど捕獲せずに透過させてしまう
ため、ＰＴＦＥ多孔質膜において、捕獲した塵埃による
目詰まりが起こり易く、使用しているうちにその圧力損
失が大きく上昇するという問題がある。As the reinforcing material, a synthetic fiber made of polyethylene (PE) is generally used because it does not shrink during lamination with a porous PTFE membrane and has an appropriate rigidity even when pleating. A configured spunbonded nonwoven fabric having a core-sheath structure is used. For example, in an air filter unit using a filter medium obtained by laminating a reinforcing material such as the nonwoven fabric on the porous PTFE membrane and using the filter medium, the collection efficiency for particles having a particle size of 0.1 μm is 9%.
It has a very excellent dust collection performance of 9.999999% or more, which makes it possible to further improve a clean environment such as a clean room. However, since the reinforcing material transmits dust without capturing it, the porous PTFE membrane is likely to be clogged with the captured dust, and the pressure loss increases during use. There's a problem.
【０００６】[0006]
【発明が解決しようとする課題】そこで、本発明の目的
は、圧力損失の上昇が抑制されたエアフィルタ濾材およ
びそれを用いたエアフィルタユニットの提供である。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an air filter medium in which an increase in pressure loss is suppressed and an air filter unit using the same.
【０００７】[0007]
【課題を解決するための手段】前記目的を達成するため
に、本発明のエアフィルタ濾材は、ＰＴＦＥ多孔質膜と
繊維製通気性多孔材とを含むエアフィルタ濾材であっ
て、前記多孔質膜の気体の流れの上流側に前記繊維製通
気性多孔材が配置され、前記繊維製通気性多孔材は、そ
の繊維径が１〜１５μｍの範囲、その気孔率が７０％以
上、その目付け量が６０ｇ／ｍ2以上であることを特徴
とする。In order to achieve the above object, an air filter medium of the present invention is an air filter medium including a porous PTFE membrane and a gas-permeable porous material made of fiber, wherein the porous membrane is provided. The fiber-permeable gas-permeable porous material is disposed on the upstream side of the gas flow of the above, and the fiber-permeable gas-permeable porous material has a fiber diameter in the range of 1 to 15 μm, a porosity of 70% or more, and a basis weight. It is characterized by being at least 60 g / m 2 .
【０００８】前記物性を有する繊維製通気性多孔材は、
補強材としての機能を有することに加え、それ自身も塵
埃捕集機能を有し、プレフィルターとして作用する。こ
のため、本発明のエアフィルタ濾材は、ＰＴＦＥ多孔質
膜における目詰まりが防止され、これに起因する圧力損
失の上昇を抑制でき、その使用寿命も長くなる。なお、
従来の通気性多孔材が塵埃をほとんど捕獲できないの
は、その繊維径が約２０μｍ以上と太いことが一因であ
ると、本発明者らは推察している。[0008] The fiber-permeable porous material having the physical properties described above,
In addition to having a function as a reinforcing material, it itself has a dust collecting function and acts as a pre-filter. For this reason, the air filter medium of the present invention can prevent clogging of the PTFE porous membrane, can suppress an increase in pressure loss due to the clogging, and prolong the service life of the air filter medium. In addition,
The present inventors speculate that the reason that the conventional air-permeable porous material can hardly capture dust is partly because the fiber diameter is as large as about 20 μm or more.
【０００９】また、前記繊維製通気性多孔材において、
前記繊維径は１〜５μｍの範囲、前記気孔率は７０〜９
０％の範囲、前記目付け量は６０〜２００ｇ／ｍ2の範
囲であることがそれぞれ好ましい。Further, in the above-mentioned fiber-permeable porous material,
The fiber diameter is in the range of 1 to 5 μm, and the porosity is 70 to 9
The weight is preferably in the range of 0%, and the basis weight is preferably in the range of 60 to 200 g / m 2 .
【００１０】本発明のエアフィルタユニットは、本発明
のエアフィルタ濾材を用いることを特徴とする。本発明
のエアフィルタ濾材を用いたエアフィルタユニットは、
捕獲した塵埃による目詰まりが起こりにくく、使用寿命
も長くなることから、低コスト化を図ることができる。
特に、厳しい清浄環境が要求される半導体製造等におい
て使用するエアフィルタユニットとして有用である。[0010] The air filter unit of the present invention uses the air filter medium of the present invention. The air filter unit using the air filter medium of the present invention,
Clogging due to the captured dust is unlikely to occur and the service life is prolonged, so that cost reduction can be achieved.
In particular, it is useful as an air filter unit used in semiconductor manufacturing or the like that requires a severe clean environment.
【００１１】[0011]
【発明の実施の形態】本発明のエアフィルタ濾材は、前
述のようにＰＴＦＥ多孔質膜と前記物性の繊維製通気性
多孔材とを含み、前記多孔質膜の上流側に前記繊維製通
気性多孔材が配置されている。DETAILED DESCRIPTION OF THE INVENTION The air filter medium of the present invention comprises a porous PTFE membrane and the above-mentioned fiber-permeable porous material as described above, and the above-mentioned fiber-permeable porous material is provided upstream of the porous membrane. A porous material is disposed.
【００１２】前記ＰＴＦＥ多孔質膜としては、使用用途
に応じた性能が発揮されるものであれば、特に制限され
ないが、例えば、半導体製造用クリーンルーム等におけ
るエアフィルタ濾材に使用する場合は、塵埃捕集性能を
表すＰｅｒｆｏｒｍａｎｃｅｏｆ ｆｉｌｔｅｒ（Ｐ
Ｆ）値が、１５より大きいことが好ましく、２０〜４０
の範囲がより好ましい。なお、前記ＰＦ値は、下記式
（数１）より求めることができ、下記式（数１）におけ
る捕集効率および圧力損失は、後述する方法により求め
ることができる。The porous PTFE membrane is not particularly limited as long as it exhibits performance in accordance with the intended use. For example, when the porous PTFE membrane is used as an air filter medium in a clean room for manufacturing semiconductors, the PTFE porous membrane may be used as a dust trap. Performance of filter (P
F) The value is preferably larger than 15, 20 to 40
Is more preferable. The PF value can be obtained from the following equation (Equation 1), and the collection efficiency and the pressure loss in the following equation (Equation 1) can be obtained by a method described later.
【００１３】[0013]
【数１】ＰＦ値＝−［Ｌｏｇ（１−捕集効率）］×１０
０／圧力損失 捕集効率の単位： ％ 圧力損失の単位： ｍｍＨ2ＯPF value = − [Log (1−collection efficiency)] × 10
0 / pressure loss Unit of collection efficiency:% Unit of pressure loss: mmH 2 O
【００１４】前記ＰＴＦＥ多孔質膜において、その厚み
は、作製するエアフィルタ濾材の大きさ等により適宜決
定されるが、例えば、２〜１００μｍの範囲であり、そ
の孔径は、例えば、０．５〜５０μｍの範囲である。The thickness of the porous PTFE membrane is appropriately determined depending on the size of the air filter medium to be produced, for example, in the range of 2 to 100 μm, and the pore size is, for example, 0.5 to 100 μm. The range is 50 μm.
【００１５】前記ＰＴＦＥ多孔質膜の製造方法は特に制
限されず、例えば、特開平１０−０３００３１号公報、
国際公開番号ＷＯ９４／１６８０２号公報等に記載され
ている製造方法があげられる。The method for producing the PTFE porous membrane is not particularly limited. For example, JP-A-10-030031 discloses
Production methods described in International Publication No. WO 94/16802 and the like can be mentioned.
【００１６】前記ＰＴＦＥ多孔質膜の製造方法の一例を
以下に示す。まず、未焼成のＰＴＦＥ微粉末に液状潤滑
剤を加えて混合する。前記ＰＴＦＥ微粉末としては、特
に制限されず、市販のものが使用できる。前記液状潤滑
剤としては、前記ＰＴＦＥ微粉末の表面をぬらすことが
でき、後で除去できるものであれば特に制限されず、ナ
フサ、ホワイトオイル、流動パラフィン、トルエン、キ
シレン等の炭化水素油や、アルコール類、ケトン類およ
びエステル類の溶媒等が使用できる。また、これらは、
二種類以上併用してもよい。An example of the method for producing the porous PTFE membrane will be described below. First, a liquid lubricant is added to unfired PTFE fine powder and mixed. The PTFE fine powder is not particularly limited, and a commercially available PTFE fine powder can be used. The liquid lubricant is not particularly limited as long as it can wet the surface of the PTFE fine powder and can be removed later. Naphtha, white oil, liquid paraffin, toluene, hydrocarbon oil such as xylene, Solvents such as alcohols, ketones and esters can be used. These are also
Two or more types may be used in combination.
【００１７】前記ＰＴＦＥ微粉末に対する液状潤滑剤の
添加割合は、前記ＰＴＦＥ微粉末の種類、液状潤滑油の
種類および後述するシート成形の条件等により適宜決定
されるが、例えば、ＰＴＦＥ微粉末１００重量部に対し
て、液状潤滑剤１５〜３５重量部の範囲である。The addition ratio of the liquid lubricant to the PTFE fine powder is appropriately determined according to the type of the PTFE fine powder, the type of the liquid lubricating oil and the sheet forming conditions described later. Parts by weight of the liquid lubricant is in the range of 15 to 35 parts by weight.
【００１８】つぎに、前記混合物を未焼成状態でシート
状に成形する。前記成形方法としては、例えば、前記混
合物をロッド状に押し出した後、対になったロールによ
り圧延する圧延法や、板状に押し出してシート状にする
押し出し法があげられる。また、前記両方法を組み合せ
てもよい。このシート状成形体の厚みは、後に行う延伸
の条件等により適宜決定されるが、例えば、０．１〜
０．５ｍｍの範囲である。Next, the mixture is formed into a sheet in an unfired state. Examples of the forming method include a rolling method in which the mixture is extruded into a rod shape and then rolling with a pair of rolls, and an extruding method in which the mixture is extruded into a plate shape to form a sheet. Further, the above two methods may be combined. The thickness of the sheet-like molded body is appropriately determined depending on conditions for stretching performed later, for example, from 0.1 to
The range is 0.5 mm.
【００１９】なお、得られたシート状成形体に含まれる
前記液状潤滑剤は、続いて行う延伸工程前に、加熱法ま
たは抽出法等により除去しておくことが好ましい。前記
抽出法に使用する溶媒は、特に制限されないが、例え
ば、ノルマルデカン、ドデカン、ナフサ、ケロシン、ス
モイル等があげられる。It is preferable that the liquid lubricant contained in the obtained sheet-like molded body is removed by a heating method or an extraction method before the subsequent stretching step. The solvent used in the extraction method is not particularly limited, and includes, for example, normal decane, dodecane, naphtha, kerosene, smoil and the like.
【００２０】つぎに、前記シート状成形物に対して延伸
を行う。この延伸は、二軸延伸が好ましい。例えば、前
記シート状成形物の長手方向において、その長さが２〜
６０倍の範囲になるように、温度１５０〜３９０℃で延
伸し、続いて、前記シート状成形物の幅方向において、
その長さが１０〜６０倍の範囲になるように、温度４０
〜１５０℃で延伸する。以上のようにして、ＰＴＦＥ多
孔質膜が製造できる。Next, the sheet-like molded product is stretched. This stretching is preferably biaxial stretching. For example, in the longitudinal direction of the sheet-like molded product, the length is 2 to
It is stretched at a temperature of 150 to 390 ° C. so as to be in a range of 60 times, and subsequently, in the width direction of the sheet-like molded product,
Temperature 40 so that the length is in the range of 10 to 60 times
Stretch at ~ 150 ° C. As described above, a PTFE porous membrane can be manufactured.
【００２１】なお、ＰＴＦＥ多孔質膜の製造方法は特に
制限されず、前述のように用途に応じた性能が発揮され
るＰＴＦＥ多孔質膜を製造できればよい。The method for producing the PTFE porous membrane is not particularly limited, as long as the PTFE porous membrane exhibiting the performance according to the intended use can be produced as described above.
【００２２】つぎに、前記繊維製通気性多孔材は、前述
のような繊維径、気孔率および目付け量であれば、これ
以外の性質、構造、形態等は特に制限されないが、通気
性に優れた材料である不織布、織布、メッシュ（網目状
シート）等が使用でき、この中でも、強度、柔軟性、作
業性の点で優れることから不織布がより好ましい。ま
た、その繊維は、単繊維や、フィラメントからなるもの
があげられ、好ましくは、使用中にエアフィルタから繊
維が脱落することを防止できることから、前記フィラメ
ントからなるものである。Next, the above-described fiber-permeable porous material is not particularly limited in its properties, structure, form, etc. as long as it has the above-mentioned fiber diameter, porosity and basis weight, but is excellent in air permeability. Nonwoven fabrics, woven fabrics, meshes (mesh-like sheets) and the like can be used, and among these, nonwoven fabrics are more preferable because of their excellent strength, flexibility and workability. The fibers include single fibers and filaments. Preferably, the fibers are made of the filaments because the fibers can be prevented from falling off from the air filter during use.
【００２３】前記繊維の材質としては、特に制限されな
いが、例えば、ＰＥ、ポリプロピレン（ＰＰ）、ポリエ
チレンテレフタレート（ＰＥＴ）およびこれらの複合材
等があげられる。また、前記繊維は、芯鞘構造の複合繊
維であり、芯部分が鞘部分よりも相対的に融点が高い合
成繊維であることが好ましい。このような芯鞘構造の繊
維からなる繊維製通気性多孔材を用いれば、ＰＴＦＥ多
孔質膜と加熱によりラミネートしても、収縮することを
防止できる。前記芯鞘構造の繊維としては、例えば、芯
部分がＰＥＴ製で、鞘部分がＰＥ製であるものや、芯部
分がＰＰ製で、鞘部分がＰＥ製であるものがあげられ
る。The material of the fiber is not particularly limited, and examples thereof include PE, polypropylene (PP), polyethylene terephthalate (PET), and composites thereof. Further, the fiber is preferably a composite fiber having a core-sheath structure, and is preferably a synthetic fiber whose core portion has a relatively higher melting point than that of the sheath portion. By using a fiber-permeable porous material made of such a core-sheath structure fiber, shrinkage can be prevented even when laminated with a PTFE porous membrane by heating. Examples of the fiber having a core-sheath structure include a fiber having a core portion made of PET and a sheath portion made of PE, and a fiber having a core portion made of PP and a sheath portion made of PE.
【００２４】つぎに、本発明のエアフィルタ濾材は、例
えば、前記ＰＴＦＥ多孔質膜の気体の流れの上流側に前
記繊維製通気性多孔材を積層することにより製造でき
る。前記積層方法としては、特に制限されないが、例え
ば、加熱処理により接着する方法や、接着材料により接
着する方法等があげられる。Next, the air filter medium of the present invention can be produced, for example, by laminating the fiber-permeable porous material on the upstream side of the gas flow of the porous PTFE membrane. The lamination method is not particularly limited, and examples thereof include a method of bonding by heat treatment and a method of bonding with an adhesive material.
【００２５】前記加熱処理により積層する場合は、例え
ば、前記ＰＴＦＥ多孔質膜と前記繊維製通気性多孔材と
を重ね合わせ、これを加熱部材と接触させ、前記繊維製
通気性多孔材の一部を溶融させて接着することにより行
うことができる。特に、前記両者を重ね合わせ、これを
加熱したロール間に通す方法は、加熱作業を連続して実
施できるため好ましい。前記加熱処理の条件は、前記繊
維製通気性多孔材の材質等により適宜決定されるが、例
えば、処理温度は前記繊維製通気性多孔材の融点以上が
好ましい。In the case of laminating by the heat treatment, for example, the PTFE porous membrane and the fiber permeable porous material are overlapped and brought into contact with a heating member to form a part of the fiber permeable porous material. By melting and bonding. In particular, a method in which the above two are superimposed and passed between heated rolls is preferable because the heating operation can be performed continuously. The conditions of the heat treatment are appropriately determined depending on the material of the fiber-permeable gas-permeable porous material and the like. For example, the treatment temperature is preferably equal to or higher than the melting point of the fiber-permeable gas-permeable porous material.
【００２６】また、前記接着材料により積層する場合
は、例えば、前記ＰＴＦＥ多孔質膜と前記繊維製通気性
多孔材との間に接着材料を介在させればよい。前記接着
材料としては、例えば、低融点のＰＥパウダー等が使用
できる。In the case of laminating with the adhesive material, for example, an adhesive material may be interposed between the PTFE porous membrane and the fiber permeable porous material. As the adhesive material, for example, low melting point PE powder or the like can be used.
【００２７】本発明のエアフィルタ濾材の構造は、前述
のように、前記多孔質膜の気体の流れの上流側に前記繊
維製通気性多孔材が配置されていればよく、その他の構
成は特に制限されない。例えば、ＰＴＦＥ多孔質膜は１
層でもよいし、２層以上でもよい。前記ＰＴＦＥ多孔質
膜の積層体を有する場合、その積層数は、例えば、２〜
１０層の範囲である。前記ＰＴＦＥ多孔質膜は、同一の
ＰＴＦＥ多孔質膜を使用してもよいし、異なるＰＴＦＥ
多孔質膜を使用してもよい。前記ＰＴＦＥ多孔質膜相互
を積層する方法としては、例えば、前記ＰＴＦＥ多孔質
膜の成膜時に圧着積層する方法や、熱融着する方法等が
あげられる。As described above, the structure of the air filter medium of the present invention may be such that the fiber-permeable porous material is disposed on the upstream side of the gas flow of the porous membrane. Not restricted. For example, the porous PTFE membrane is 1
It may be a layer or two or more layers. When having a laminate of the PTFE porous membrane, the number of laminates is, for example, 2 to
The range is 10 layers. As the PTFE porous membrane, the same PTFE porous membrane may be used, or different PTFE porous membranes may be used.
A porous membrane may be used. Examples of the method of laminating the PTFE porous films include a method of laminating by pressure bonding when forming the PTFE porous films, a method of heat fusion, and the like.
【００２８】また、ＰＴＦＥ多孔質膜の下流側には、上
流側と同様に、前記繊維製通気性多孔材が配置されても
よいし、異なる通気性多孔材が配置されてもよい。Further, the fiber permeable porous material may be disposed downstream of the porous PTFE membrane, as in the upstream side, or a different permeable porous material may be disposed thereon.
【００２９】このように、本発明のエアフィルタ濾材の
構成は特に制限されず、例えば、図１に示すように、Ｐ
ＴＦＥ多孔質膜１の気体の流れ（矢印）の上流側の面に
のみ繊維製通気性多孔材２が配置されてもよいし、図２
に示すように、ＰＴＦＥ多孔質膜１の両面に繊維製通気
性多孔材２が配置されてもよい。また、図３に示すよう
に、ＰＴＦＥ多孔質膜１の気体の流れ（矢印）の上流側
の面に接着層３を介して繊維製通気性多孔材２が配置さ
れてもよい。As described above, the configuration of the air filter medium of the present invention is not particularly limited. For example, as shown in FIG.
The air-permeable porous material 2 made of fiber may be arranged only on the surface of the TFE porous membrane 1 on the upstream side of the gas flow (arrow), and FIG.
As shown in FIG. 1, a fiber-permeable porous material 2 may be arranged on both surfaces of the PTFE porous membrane 1. Further, as shown in FIG. 3, the gas-permeable porous material 2 made of fiber may be disposed on the upstream surface of the gas flow (arrow) of the PTFE porous membrane 1 via the adhesive layer 3.
【００３０】本発明のエアフィルタ濾材の全体厚みは、
例えば、厚み０．２〜２．０ｍｍの範囲であり、好まし
くは、０．２５〜１．０ｍｍの範囲である。The total thickness of the air filter medium of the present invention is:
For example, the thickness is in the range of 0.2 to 2.0 mm, and preferably in the range of 0.25 to 1.0 mm.
【００３１】つぎに、本発明のエアフィルタユニット
は、本発明のエアフィルタ濾材を使用する以外は、常法
により製造でき、例えば、本発明のエアフィルタ濾材を
連続したＷ字状にひだ折り加工（プリーツ加工）し、こ
れに枠付けすれば製造できる。Next, the air filter unit of the present invention can be manufactured by a conventional method except that the air filter medium of the present invention is used. For example, the air filter medium of the present invention is folded in a continuous W shape. (Pleating process), and it can be manufactured if it is framed.
【００３２】[0032]
【実施例】つぎに、本発明の実施例について、比較例と
併せて説明する。なお、実施例および比較例における繊
維製通気性多孔材およびエアフィルタ濾材の各特性の測
定方法は、以下に示すとおりである。Next, examples of the present invention will be described together with comparative examples. In addition, the measuring method of each characteristic of the air-permeable porous material made of fiber and the air filter material in Examples and Comparative Examples is as shown below.
【００３３】（１）繊維径 繊維製通気性多孔材の表面を走査顕微鏡（ＳＥＭ）写真
に撮り、その繊維径を測定した。(1) Fiber Diameter The surface of the fiber permeable porous material was photographed with a scanning microscope (SEM) and the fiber diameter was measured.
【００３４】（２）目付け量 繊維製通気性多孔材を１００ｃｍ2にサンプリングし、
その重さを電子天秤により測定して１ｍ2当たりの質量
（ｇ）を求めた。(2) Weight per unit area The fiber permeable porous material was sampled to 100 cm 2 ,
The weight was measured with an electronic balance to determine the mass (g) per 1 m 2 .
【００３５】（３）気孔率 繊維製通気性多孔材の厚みを、ダイヤルシックネスゲー
ジ（測定子径：１０φ、最小目盛り：１０μｍ）を用い
て５点測定し、その平均値を求めた。前記厚みの平均値
と前記繊維製通気性多孔材の目付け量の値とを下記式
（数２）に代入して気孔率を算出した。(3) Porosity The thickness of the permeable porous material made of fiber was measured at five points using a dial thickness gauge (measurement element diameter: 10φ, minimum scale: 10 μm), and the average value was obtained. The porosity was calculated by substituting the average value of the thickness and the value of the basis weight of the air-permeable porous material made of fiber into the following equation (Equation 2).
【００３６】[0036]
【数２】気孔率（％）＝［Ａ−（Ｂ／Ｃ）］／Ａ Ａ ： 繊維製通気性多孔材に用いた材質の真比重（ｇ
／ｍ2） Ｂ ： 目付け量（ｇ／ｍ2） Ｃ ： 平均厚み（μｍ）Porosity (%) = [A− (B / C)] / A A: The true specific gravity (g) of the material used for the permeable porous material made of fiber
/ M 2 ) B: Weight per unit area (g / m 2 ) C: Average thickness (μm)
【００３７】（４）圧力損失 サンプル（ＰＴＦＥ多孔質膜またはエアフィルタ濾材、
以下同じ）を有効面積１００ｃｍ2の円形ホルダーにセ
ットし、入口側から大気塵を供給しつつ、前記入口側と
出口側に圧力差を与え、前記サンプルの透過流速を５．
３ｃｍ／秒に調整して前記大気塵を透過させ、一定時間
毎の圧力損失（単位：ｍｍＨ2Ｏ）を圧力計（マノメー
ター）で測定した。エアフィルタ濾材の場合、サンプル
は、大気塵を供給する入口側に、エアフィルタ濾材の上
流側（繊維製通気性多孔材側）が位置するようにセット
した。なお、前記大気塵とは、雰囲気中に浮遊している
塵埃をいう。(4) Pressure drop sample (PTFE porous membrane or air filter medium,
The same shall apply hereinafter) was set in a circular holder having an effective area of 100 cm 2 , and while supplying atmospheric dust from the inlet side, a pressure difference was applied between the inlet side and the outlet side to set the permeation flow rate of the sample to 5.
The atmospheric dust was permeated at 3 cm / sec and the pressure loss (unit: mmH 2 O) was measured at regular intervals with a pressure gauge (manometer). In the case of the air filter medium, the sample was set such that the upstream side (the fiber-permeable porous material side) of the air filter medium was positioned on the inlet side for supplying atmospheric dust. Note that the atmospheric dust refers to dust floating in the atmosphere.
【００３８】（５）Ｄｕｓｔ Ｈｏｌｄｉｎｇ Ｃａｐ
ａｃｉｔｙ（ＤＨＣ） 圧力損失の測定方法と同様にしてサンプルに大気塵を透
過させ、一定時間毎に、前記サンプルの重量変化を電子
天秤で測定した。(5) Dust Holding Cap
activity (DHC) Atmospheric dust was permeated through the sample in the same manner as in the method of measuring pressure loss, and the weight change of the sample was measured at regular intervals by an electronic balance.
【００３９】（６）捕集効率 圧力損失の測定方法と同様にしてサンプルをセットし
た。そして、サンプルの透過速度を５．３ｃｍ／秒にし
て、前記サンプルの上流側に、粒径０．５μｍ以上の多
分散ジオクチルフタレート（以下、「ＤＯＰ」という）
粒子を約１０7個／リットルになるように供給し、前記
上流側のＤＯＰ粒子濃度とサンプルを透過してきた下流
側のＤＯＰ粒子濃度とをパーティクルカウンターで測定
して下記式（数３）により捕集効率を求めた。ただし、
対象粒子は、粒径０．５μｍ以上の範囲のものとした。(6) Collection Efficiency A sample was set in the same manner as in the method for measuring pressure loss. Then, the transmission speed of the sample is set to 5.3 cm / sec, and a polydispersed dioctyl phthalate having a particle size of 0.5 μm or more (hereinafter, referred to as “DOP”) is provided upstream of the sample.
The particles are supplied so as to be about 10 7 particles / liter, and the concentration of the DOP particles on the upstream side and the concentration of the DOP particles on the downstream side that have passed through the sample are measured by a particle counter, and are captured by the following equation (Equation 3). Collection efficiency was determined. However,
The target particles had a particle size of 0.5 μm or more.
【００４０】[0040]
【数３】捕集効率（％）＝［１−（下流側濃度／上流側
濃度）］×１００ 下流側濃度の単位：粒子個数／リットル 上流側濃度の単位：粒子個数／リットル## EQU3 ## Collection efficiency (%) = [1- (downstream concentration / upstream concentration)] × 100 Unit of downstream concentration: number of particles / liter Unit of upstream concentration: number of particles / liter
【００４１】（実施例１）ＰＴＦＥファインパウダー
（フルオンＣＤ−１２３、旭・ＩＣＩフロロポリマーズ
社製）１００重量部に対して液状潤滑剤（流動パラフィ
ン）３０重量部を均一に混合し、この混合物を圧力２０
ｋｇ／ｃｍ2で予備成形した。ついで、予備成形物をロ
ッド状に押し出し成形し、このロッド状物を一対の金属
製圧延ロール間に通して、厚み０．２ｍｍの長尺のシー
ト状ＰＴＦＥ成形体を得た。つぎに、ノルマルデカンを
用いた抽出法により、前記シート状ＰＴＦＥ成形体から
前記液状潤滑剤を除去した後、これを管状芯体にロール
状に捲回した。Example 1 30 parts by weight of a liquid lubricant (liquid paraffin) was uniformly mixed with 100 parts by weight of PTFE fine powder (Fluon CD-123, manufactured by Asahi ICI Fluoropolymers Co., Ltd.). Pressure 20
It was preformed at kg / cm 2 . Next, the preform was extruded into a rod shape, and the rod-like material was passed between a pair of metal rolling rolls to obtain a long sheet-like PTFE molded body having a thickness of 0.2 mm. Next, after the liquid lubricant was removed from the sheet-like PTFE molded body by an extraction method using normal decane, the liquid lubricant was wound around a tubular core in a roll shape.
【００４２】前記捲回したシート状ＰＴＦＥ成形体を、
ロール延伸法により、その長さが長手方向に２０倍にな
るように、３７０℃で延伸を行った。続いて、このシー
ト状ＰＴＦＥ成形体を、テンターを用いて、その長さが
幅方向に１０倍になるように１００℃で延伸し、焼成状
態のＰＴＦＥ多孔質膜を得た。The wound sheet-like PTFE molded article is
The film was stretched at 370 ° C. by a roll stretching method so that the length became 20 times in the longitudinal direction. Subsequently, this sheet-like PTFE molded body was stretched at 100 ° C. using a tenter so that the length became 10 times in the width direction, to obtain a fired PTFE porous membrane.
【００４３】前記ＰＴＦＥ多孔質膜の上流側に配置する
繊維製通気性多孔材として、表示規格が繊維径約１０μ
ｍ、目付け量６０ｇ／ｍ2の市販のＰＰ不織布を用い
た。そして、前記ＰＴＦＥ多孔質膜の上流側に、前記繊
維製通気性多孔材を重ね、前記ＰＴＦＥ多孔質膜の下流
側に、繊維径２０μｍ、目付け量３０ｇ／ｍ2のＰＥ／
ＰＥＴ芯鞘不織布を重ねた後、これを１４５℃に加熱し
た一対のロール間に通過させることによりラミネートを
行い、エアフィルタ濾材を作製した。As a fiber permeable porous material disposed on the upstream side of the porous PTFE membrane, the display standard is a fiber diameter of about 10 μm.
m, a commercially available PP nonwoven fabric having a basis weight of 60 g / m 2 was used. Then, the air-permeable porous material made of fiber is laminated on the upstream side of the porous PTFE membrane, and the PE / PE having a fiber diameter of 20 μm and a basis weight of 30 g / m 2 is provided on the downstream side of the porous PTFE membrane.
After laminating the PET core-sheath nonwoven fabric, this was passed between a pair of rolls heated to 145 ° C. to perform lamination, thereby producing an air filter medium.
【００４４】（実施例２）ＰＴＦＥ多孔質膜の上流側に
積層する繊維製通気性多孔材として、表示規格が繊維径
約１０μｍ、目付け量８０ｇ／ｍ2の市販のＰＰ不織布
を用いた以外は、前記実施例１と同様にして、ＰＴＦＥ
多孔質膜の作製およびエアフィルタ濾材の作製を行っ
た。(Example 2) As a fiber permeable porous material laminated on the upstream side of the porous PTFE membrane, a commercially available PP nonwoven fabric having a fiber diameter of about 10 µm and a basis weight of 80 g / m 2 was used. In the same manner as in Example 1, PTFE
A porous membrane and an air filter medium were prepared.
【００４５】（実施例３）ＰＴＦＥ多孔質膜の上流側に
積層する繊維製通気性多孔材として、表示規格が繊維径
約１０μｍ、目付け量１００ｇ／ｍ2の市販のＰＰ不織
布を用いた以外は、前記実施例１と同様にして、ＰＴＦ
Ｅ多孔質膜の作製およびエアフィルタ濾材の作製を行っ
た。Example 3 As a fiber-permeable air-permeable porous material laminated on the upstream side of a porous PTFE membrane, a commercially available PP nonwoven fabric having a fiber diameter of about 10 μm and a basis weight of 100 g / m 2 was used. In the same manner as in Example 1, PTF
Production of an E porous membrane and production of an air filter medium were performed.
【００４６】（実施例４）ＰＴＦＥ多孔質膜の上流側に
積層する繊維製通気性多孔材として、表示規格が繊維径
約３μｍ、目付け量１００ｇ／ｍ2の市販のＰＰ不織布
を用いた以外は、前記実施例１と同様にして、ＰＴＦＥ
多孔質膜の作製およびエアフィルタ濾材の作製を行っ
た。Example 4 As a fiber permeable porous material laminated on the upstream side of a PTFE porous membrane, a commercially available PP nonwoven fabric having a fiber diameter of about 3 μm and a basis weight of 100 g / m 2 was used. In the same manner as in Example 1, PTFE
A porous membrane and an air filter medium were prepared.
【００４７】（比較例１）ＰＴＦＥ多孔質膜の上流側に
積層する繊維製通気性多孔材として、表示規格が繊維径
約２０μｍ、目付け量７０ｇ／ｍ2の市販のＰＰ不織布
を用いた以外は、前記実施例１と同様にして、ＰＴＦＥ
多孔質膜の作製およびエアフィルタ濾材の作製を行っ
た。Comparative Example 1 A commercially available PP nonwoven fabric having a fiber diameter of about 20 μm and a basis weight of 70 g / m 2 was used as a fiber permeable porous material laminated on the upstream side of a porous PTFE membrane. In the same manner as in Example 1, PTFE
A porous membrane and an air filter medium were prepared.
【００４８】実施例および比較例において、エアフィル
タ濾材の作製前に、ＰＴＦＥ多孔質膜の上流側に積層す
る繊維製通気性多孔材について、繊維径、目付け量、気
孔率および捕集効率を測定した結果を下記表１に示す。
また、実施例および比較例において作製したエアフィル
タ濾材について、圧力損失およびＤＨＣを測定した結果
を図４に示す。In the examples and comparative examples, before producing the air filter medium, the fiber diameter, the basis weight, the porosity and the collection efficiency of the fiber-permeable porous material laminated on the upstream side of the PTFE porous membrane were measured. The results obtained are shown in Table 1 below.
FIG. 4 shows the results of measuring the pressure loss and DHC of the air filter media produced in the examples and comparative examples.
【００４９】[0049]
【表１】 目付け量 気孔率 繊維径 捕集効率 （ｇ／ｍ2） （％） （μｍ） （％） 実施例１ ６０ ７８．２ ７．５〜１１．２ ８２ 実施例２ ８０ ８０．０ ７．５〜１１．２ ８９ 実施例３ １００ ８２．１ ７．５〜１１．２ ９０ 実施例４ １００ ８５．０ ３．０〜 ４．０ ９０ 比較例１ ７０ ６８．９ ２０．０ １０Table 1 Weight per unit area Porosity Fiber diameter Collection efficiency (g / m 2 ) (%) (μm) (%) Example 1 60 78.2 7.5 to 11.2 82 Example 2 80 80.0 7.5 to 11.89 89 Example 3 100 82.1 7.5 to 11.2 90 Example 4 100 85.0 3.0 to 4.0 90 Comparative Example 1 70 68.9 20.0 10
【００５０】前記表１に示すように、各実施例で使用し
た通気性多孔性材料は、比較例１の繊維製通気性多孔材
に比べて、それぞれ繊維径が細く、粒径０．５μｍ以上
の塵埃の捕集効率が高かった。このような捕集効率の高
い繊維製通気性多孔材を使用した各実施例のエアフィル
タ濾材は、図４に示すように、比較例のエアフィルタ濾
材に比べて、同じＤＨＣ値における圧力損失の上昇が低
かった。また、実施例１、２、３からわかるように、使
用した繊維製通気性多孔材の目付け量が大きいほど、同
じＤＨＣ値におけるエアフィルタ濾材の圧力損失はさら
に低くなり、実施例３、４からわかるように、使用した
繊維製通気性多孔材の繊維径が細いほど、同じＤＨＣ値
におけるエアフィルタ濾材の圧力損失がさらに低くなっ
た。As shown in Table 1, the air-permeable porous material used in each of the examples has a smaller fiber diameter and a particle diameter of 0.5 μm or more as compared with the air-permeable porous material made of fiber of Comparative Example 1. The dust collection efficiency was high. As shown in FIG. 4, the air filter medium of each example using such a fiber permeable porous material having high collection efficiency has a lower pressure loss at the same DHC value than the air filter medium of the comparative example. The rise was low. Also, as can be seen from Examples 1, 2, and 3, as the basis weight of the used air permeable porous material made of fiber increases, the pressure loss of the air filter medium at the same DHC value further decreases. As can be seen, the smaller the fiber diameter of the fiber permeable porous material used, the lower the pressure loss of the air filter medium at the same DHC value.
【００５１】[0051]
【発明の効果】以上のように、本発明のエアフィルタ濾
材は、ＰＴＦＥ多孔質膜の上流側に、繊維径が１〜１５
μｍ、気孔率７０％以上、目付け量６０ｇ／ｍ2以上の
繊維製通気性多孔材を積層することにより、捕獲した塵
埃による目詰まりが起こり難く、圧力損失の上昇を抑制
できるため、使用寿命を長くできる。このようなエアフ
ィルタ濾材を、例えば、半導体製造におけるクリーンル
ームのエアフィルタユニットに使用すれば、フィルタの
目づまりが起こり難く、その寿命も長いため、低コスト
化を図ることが可能である。As described above, the air filter medium of the present invention has a fiber diameter of 1 to 15 on the upstream side of the porous PTFE membrane.
By laminating a fiber permeable porous material having a pore size of 70 μm, a porosity of 70% or more, and a basis weight of 60 g / m 2 or more, clogging by the captured dust is unlikely to occur, and an increase in pressure loss can be suppressed. Can be long. If such an air filter medium is used in, for example, an air filter unit in a clean room in semiconductor manufacturing, clogging of the filter hardly occurs and its life is long, so that cost reduction can be achieved.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明のエアフィルタ濾材の一例の構成概略を
示す断面図である。FIG. 1 is a cross-sectional view showing a schematic configuration of an example of an air filter medium of the present invention.
【図２】本発明のエアフィルタ濾材のその他の例の構成
概略を示す断面図である。FIG. 2 is a cross-sectional view showing a schematic configuration of another example of the air filter medium of the present invention.
【図３】本発明のエアフィルタ濾材のさらにその他の例
の構成概略を示す断面図である。FIG. 3 is a cross-sectional view showing a schematic configuration of still another example of the air filter medium of the present invention.
【図４】本発明の一実施例におけるエアフィルタ濾材の
ＤＨＣと圧力損失との関係を示すグラフである。FIG. 4 is a graph showing the relationship between DHC and pressure loss of an air filter medium according to one embodiment of the present invention.
１ ： ＰＴＦＥ多孔質膜 ２ ： 繊維製通気性多孔材 ３ ： 接着剤層 1: porous PTFE membrane 2: breathable porous material made of fiber 3: adhesive layer
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｂ０１Ｄ 69/12 Ｂ０１Ｄ 69/12 71/36 71/36 (72)発明者 川野 栄三 大阪府茨木市下穂積１丁目１番２号 日東 電工株式会社内 Ｆターム(参考） 4D006 GA44 HA41 JA03A JA03B JA03C KA01 KA16 KA41 KB14 MA03 MA08 MB03 MC30 MC30X PA05 PB17 PC05 4D019 AA01 BA13 BB02 BB03 BB08 BB10 BD01 CA02 CB04 DA03 DA06 4D058 JA13 JB14 JB23 JB24 JB25 JB39 KA23 KA25 KB02 SA04──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) B01D 69/12 B01D 69/12 71/36 71/36 (72) Inventor Eizo Kawano Shimohozumi, Ibaraki-shi, Osaka 1-1-2 1-2 Nitto Denko Co., Ltd. F-term (reference) 4D006 GA44 HA41 JA03A JA03B JA03C KA01 KA16 KA41 KB14 MA03 MA08 MB03 MC30 MC30X PA05 PB17 PC05 4D019 AA01 BA13 BB02 BB03 BB08 BB10 BD01 JA03 JB24 JB25 JB39 KA23 KA25 KB02 SA04
Claims (3)
繊維製通気性多孔材とを含むエアフィルタ濾材であっ
て、前記多孔質膜の気体の流れの上流側に前記繊維製通
気性多孔材が配置され、前記繊維製通気性多孔材は、そ
の繊維径が１〜１５μｍの範囲、その気孔率が７０％以
上、その目付け量が６０ｇ／ｍ2以上であることを特徴
とするエアフィルタ濾材。1. An air filter medium including a porous polytetrafluoroethylene membrane and a permeable porous material made of fiber, wherein the permeable porous material made of fiber is arranged on the upstream side of a gas flow of the porous membrane. An air filter medium, wherein the fiber permeable porous material has a fiber diameter of 1 to 15 μm, a porosity of 70% or more, and a basis weight of 60 g / m 2 or more.
項１に記載のエアフィルタ濾材。2. The air filter medium according to claim 1, wherein the fiber permeable porous material is a non-woven fabric.
濾材を用いたエアフィルタユニット。3. An air filter unit using the air filter medium according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11392199A JP2000300921A (en) | 1999-04-21 | 1999-04-21 | Air filter material and air filter unit using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11392199A JP2000300921A (en) | 1999-04-21 | 1999-04-21 | Air filter material and air filter unit using the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008189775A Division JP5094610B2 (en) | 2008-07-23 | 2008-07-23 | Air filter medium and air filter unit using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000300921A true JP2000300921A (en) | 2000-10-31 |
Family
ID=14624538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11392199A Pending JP2000300921A (en) | 1999-04-21 | 1999-04-21 | Air filter material and air filter unit using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000300921A (en) |
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002301343A (en) * | 2001-04-05 | 2002-10-15 | Daikin Ind Ltd | Filter medium, filter pack and air filter unit which use the medium, and method for manufacturing filter medium |
| WO2002081056A1 (en) * | 2001-04-05 | 2002-10-17 | Daikin Industries, Ltd. | Filtering material for filter, filter pack and air filter unit using the same, and method for preparing filtering material |
| JP2002370009A (en) * | 2001-06-13 | 2002-12-24 | Nitto Denko Corp | Suction filter medium for turbine and use method therefor |
| JP2002370020A (en) * | 2001-06-13 | 2002-12-24 | Nitto Denko Corp | Suction filter medium for turbine, its using method and manufacturing method therefor |
| JP2005205305A (en) * | 2004-01-22 | 2005-08-04 | Nitto Denko Corp | Air filter medium |
| JP2005266004A (en) * | 2004-03-16 | 2005-09-29 | Nitto Denko Corp | Ventilation filter for toner container, ventilation member, toner container using them and ventilation filter assembly for the toner container |
| JP2005288368A (en) * | 2004-04-01 | 2005-10-20 | Nitto Denko Corp | Dust collecting filter material for cleaner and dust collecting filter unit for cleaner using the same |
| JP2006289174A (en) * | 2005-04-06 | 2006-10-26 | Nitto Denko Corp | Suction filter filtering medium and its using method |
| JP2006326579A (en) * | 2005-04-26 | 2006-12-07 | Nitto Denko Corp | Filter medium, process for producing the same, method of use thereof, and filter unit |
| JP2007330882A (en) * | 2006-06-14 | 2007-12-27 | Nitto Denko Corp | Filter medium, filter unit using it, and using method of the filter unit |
| CN100372974C (en) * | 2005-08-23 | 2008-03-05 | 陈维军 | High-efficient diaphragm and mfg. method |
| JP2009540481A (en) * | 2006-06-07 | 2009-11-19 | ゴア エンタープライズ ホールディングス，インコーポレイティド | Improved recirculation filter |
| WO2012086717A1 (en) | 2010-12-21 | 2012-06-28 | ダイキン工業株式会社 | Polytetrafluoroethylene mixture |
| WO2012086710A1 (en) | 2010-12-21 | 2012-06-28 | ダイキン工業株式会社 | Polytetrafluoroethylene mixture |
| WO2013031228A1 (en) | 2011-08-31 | 2013-03-07 | ダイキン工業株式会社 | Filter medium for air filter and air filter unit |
| WO2013031229A1 (en) | 2011-08-31 | 2013-03-07 | ダイキン工業株式会社 | Filter medium for air filter, air filter unit, and method for producing filter medium for air filter |
| WO2015080290A1 (en) | 2013-11-29 | 2015-06-04 | ダイキン工業株式会社 | Porous body, polymer electrolyte membrane, filter material for filter, and filter unit |
| WO2015080291A1 (en) | 2013-11-29 | 2015-06-04 | ダイキン工業株式会社 | Biaxially-oriented porous film |
| WO2017056508A1 (en) * | 2015-09-30 | 2017-04-06 | 日東電工株式会社 | Air filter material, air filter pack, and air filter unit |
| WO2018062111A1 (en) | 2016-09-30 | 2018-04-05 | 日東電工株式会社 | Air filter material, air filter pack, and air filter unit |
| CN108749219A (en) * | 2018-08-02 | 2018-11-06 | 江苏金由新材料有限公司 | A kind of MULTILAYER COMPOSITE filter material on air filter |
| KR20190056374A (en) | 2016-09-30 | 2019-05-24 | 닛토덴코 가부시키가이샤 | Air filter medium, air filter pack and air filter unit |
| KR20190056373A (en) | 2016-09-30 | 2019-05-24 | 닛토덴코 가부시키가이샤 | Air filter medium, air filter pack and air filter unit |
-
1999
- 1999-04-21 JP JP11392199A patent/JP2000300921A/en active Pending
Cited By (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7387700B2 (en) | 2001-04-05 | 2008-06-17 | Daikin Industries, Ltd. | Method for preparing filtering material |
| WO2002081056A1 (en) * | 2001-04-05 | 2002-10-17 | Daikin Industries, Ltd. | Filtering material for filter, filter pack and air filter unit using the same, and method for preparing filtering material |
| JP2002301343A (en) * | 2001-04-05 | 2002-10-15 | Daikin Ind Ltd | Filter medium, filter pack and air filter unit which use the medium, and method for manufacturing filter medium |
| JP2002370009A (en) * | 2001-06-13 | 2002-12-24 | Nitto Denko Corp | Suction filter medium for turbine and use method therefor |
| JP2002370020A (en) * | 2001-06-13 | 2002-12-24 | Nitto Denko Corp | Suction filter medium for turbine, its using method and manufacturing method therefor |
| JP2005205305A (en) * | 2004-01-22 | 2005-08-04 | Nitto Denko Corp | Air filter medium |
| JP2005266004A (en) * | 2004-03-16 | 2005-09-29 | Nitto Denko Corp | Ventilation filter for toner container, ventilation member, toner container using them and ventilation filter assembly for the toner container |
| JP2005288368A (en) * | 2004-04-01 | 2005-10-20 | Nitto Denko Corp | Dust collecting filter material for cleaner and dust collecting filter unit for cleaner using the same |
| JP2006289174A (en) * | 2005-04-06 | 2006-10-26 | Nitto Denko Corp | Suction filter filtering medium and its using method |
| JP2006326579A (en) * | 2005-04-26 | 2006-12-07 | Nitto Denko Corp | Filter medium, process for producing the same, method of use thereof, and filter unit |
| CN100372974C (en) * | 2005-08-23 | 2008-03-05 | 陈维军 | High-efficient diaphragm and mfg. method |
| JP2009540481A (en) * | 2006-06-07 | 2009-11-19 | ゴア エンタープライズ ホールディングス，インコーポレイティド | Improved recirculation filter |
| JP2007330882A (en) * | 2006-06-14 | 2007-12-27 | Nitto Denko Corp | Filter medium, filter unit using it, and using method of the filter unit |
| WO2012086710A1 (en) | 2010-12-21 | 2012-06-28 | ダイキン工業株式会社 | Polytetrafluoroethylene mixture |
| WO2012086717A1 (en) | 2010-12-21 | 2012-06-28 | ダイキン工業株式会社 | Polytetrafluoroethylene mixture |
| WO2013031228A1 (en) | 2011-08-31 | 2013-03-07 | ダイキン工業株式会社 | Filter medium for air filter and air filter unit |
| WO2013031229A1 (en) | 2011-08-31 | 2013-03-07 | ダイキン工業株式会社 | Filter medium for air filter, air filter unit, and method for producing filter medium for air filter |
| US9242201B2 (en) | 2011-08-31 | 2016-01-26 | Daikin Industries, Ltd. | Filter medium for air filter and filter unit |
| WO2015080290A1 (en) | 2013-11-29 | 2015-06-04 | ダイキン工業株式会社 | Porous body, polymer electrolyte membrane, filter material for filter, and filter unit |
| WO2015080291A1 (en) | 2013-11-29 | 2015-06-04 | ダイキン工業株式会社 | Biaxially-oriented porous film |
| KR20180059806A (en) | 2015-09-30 | 2018-06-05 | 닛토덴코 가부시키가이샤 | Air filter medium, air filter pack and air filter unit |
| WO2017056508A1 (en) * | 2015-09-30 | 2017-04-06 | 日東電工株式会社 | Air filter material, air filter pack, and air filter unit |
| WO2018062111A1 (en) | 2016-09-30 | 2018-04-05 | 日東電工株式会社 | Air filter material, air filter pack, and air filter unit |
| KR20190054079A (en) | 2016-09-30 | 2019-05-21 | 닛토덴코 가부시키가이샤 | Air filter medium, air filter pack and air filter unit |
| KR20190056374A (en) | 2016-09-30 | 2019-05-24 | 닛토덴코 가부시키가이샤 | Air filter medium, air filter pack and air filter unit |
| KR20190056373A (en) | 2016-09-30 | 2019-05-24 | 닛토덴코 가부시키가이샤 | Air filter medium, air filter pack and air filter unit |
| US11213782B2 (en) | 2016-09-30 | 2022-01-04 | Nitto Denko Corporation | Air filter medium, air filter pack, and air filter unit |
| US11406927B2 (en) | 2016-09-30 | 2022-08-09 | Nitto Denko Corporation | Air filter medium, air filter pack, and air filter unit |
| US11427690B2 (en) | 2016-09-30 | 2022-08-30 | Nitto Denko Corporation | Air filter medium, air filter pack, and air filter unit |
| CN108749219A (en) * | 2018-08-02 | 2018-11-06 | 江苏金由新材料有限公司 | A kind of MULTILAYER COMPOSITE filter material on air filter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000300921A (en) | Air filter material and air filter unit using the same | |
| KR100517888B1 (en) | Filter medium and air filter unit using the same | |
| KR101353726B1 (en) | Process for production of polytetrafluoroethylene porous membrane, filter medium and filter unit | |
| EP1005891B1 (en) | Filter medium | |
| CA2999397C (en) | Air filter medium, air filter pack, and air filter unit | |
| JP2000079332A (en) | Filter medium for air filter | |
| JP5784458B2 (en) | Air filter media | |
| JPH1030031A (en) | Polytetrafluoroethylene porous membrane, its production, sheetlike polytetrafluoroethylene molded material and filtering material for air filter | |
| JP6292920B2 (en) | Air filter medium manufacturing method, air filter medium and air filter pack | |
| EP3520873B1 (en) | Air filter medium, air filter pack, and air filter unit | |
| EP3520874B1 (en) | Air filter medium, air filter pack, and air filter unit | |
| WO2006115270A1 (en) | Filter medium, process for producing the same, method of use thereof, and filter unit | |
| TW201311342A (en) | Porous polytetrafluoroethylene film and air filter filtration material | |
| JP2007075739A (en) | Filter unit and method for use of filter medium | |
| JP2007160275A (en) | Filter unit and its manufacturing method | |
| JP2008055407A (en) | Method for manufacturing polytetrafluoroethylene porous film and air filter filtering medium | |
| JP2002370020A (en) | Suction filter medium for turbine, its using method and manufacturing method therefor | |
| JP2004188355A (en) | Filtering material for air filter, its using method, air filter unit, and air permeable supporting material | |
| JP2001170424A (en) | Filter material for air filter and air filter unit using the same | |
| JP2002346319A (en) | Suction filter medium for turbine | |
| JP2005169167A (en) | Air filter filtering medium | |
| JP2005205305A (en) | Air filter medium | |
| JPH10211409A (en) | Filter media for air filter and air filter | |
| JP2005246233A (en) | Air filter medium for cleaner, and air filter unit for cleaner using the same | |
| JP5094610B2 (en) | Air filter medium and air filter unit using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060127 |
|
| A977 | Report on retrieval |
Effective date: 20071012 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20071018 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071214 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080610 |