TW201102450A - Hollow columnar target and assembly thereof - Google Patents
Hollow columnar target and assembly thereof Download PDFInfo
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- TW201102450A TW201102450A TW98127792A TW98127792A TW201102450A TW 201102450 A TW201102450 A TW 201102450A TW 98127792 A TW98127792 A TW 98127792A TW 98127792 A TW98127792 A TW 98127792A TW 201102450 A TW201102450 A TW 201102450A
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- tube
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- 239000000463 material Substances 0.000 claims abstract description 55
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000013077 target material Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 12
- 229910052709 silver Inorganic materials 0.000 description 12
- 239000004332 silver Substances 0.000 description 12
- 229910001220 stainless steel Inorganic materials 0.000 description 9
- 239000010935 stainless steel Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 241000357293 Leptobrama muelleri Species 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 206010023230 Joint stiffness Diseases 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004941 influx Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 230000009916 joint effect Effects 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
Description
201102450 六、發明說明： 【發明所屬之技術領域】 本發明係一種中空柱狀㈣，尤其是一種能夠使得乾 材材料和背襯管緊密結合^程簡單的中空柱狀姆。 【先如技術】201102450 VI. Description of the Invention: [Technical Field] The present invention is a hollow column shape (IV), and in particular, a hollow column shape which can make a dry material and a backing tube tightly combined. [First as technology]
在典型使用平面靶材的磁 集中在切線磁場最強的乾材表 痕跡’因而降低乾材的使用率 用率僅為35%到50%。 控濺射製程中，濺射行為會 面區域’形成跑道式的侵蝕 叙而言，平面乾材的使 透過使用旋轉㈣可得到均勻的餘刻表面，除了將使 =提升至70%到8G%之外，對薄膜品f的改善也有幫助。 提间靶材使用壽命和利用率可以降低製造成本、提高製程 產量、降低靶材購買費肖，並能夠延長有效生產時間。 但是旋轉靶材的靶材材料與背襯管的接合技術比一般 平面靶材與背板的接合技術複雜許多。一般的做法是利用 低熔點金屬作為焊料填入旋轉靶材與背襯管之間的間隙， 以達到接合的目的。使用低融點金屬作為焊料具有熱應力 較小的優點，然而，由於中空柱狀的靶材不易在焊合時施 力壓力，接合力較差，容易在—定溫度的沉積製程進行中 發生耙材材料與背襯管脫落的危險。其他常見的方式還包 括： a. 喷鍍技術：將靶材的材料以電漿或高壓喷鍍的方式 鍍在背襯管的外管壁，以形成靶材。然而，喷鍍法容易在 靶材中產生氣孔，導致靶材密度的降低。 b. 鑄造技術：將一管狀模具套在背襯管之外，將熔融 201102450 注入管狀模具與背概管之間，以形成靶材。而 制則是僅能用於低熔點材料的靶材製造。 的靶材材料 禱造法的限 c•電錢：將背襯管置於電鍍液中，利用電鍛的方式將 ㈣材料鍍在背襯管的外管壁，以形成㈣1有良好的 附者性’但電鑛法的沉積速度慢，幻冗積的厚度有限制。 $在+美國第5,435,965號專利案中揭露利用注聚技術在 。曰…、以及背襯貧之間注入靶材材料後，再藉由熱均壓In the magnetic concentration of a typical flat target, the trace of the dry material with the strongest tangent magnetic field is reduced, thus reducing the utilization rate of dry materials by only 35% to 50%. In the controlled sputtering process, the sputtering behavior meeting area is formed to form a runway-type erosion. In the case of the surface dry material, a uniform residual surface can be obtained by using the rotation (4), except that it will be raised to 70% to 8G%. In addition, the improvement of the film product f is also helpful. The service life and utilization of the target can reduce manufacturing costs, increase process throughput, reduce target purchase costs, and extend effective production time. However, the bonding technique of the target material of the rotating target and the backing tube is much more complicated than the bonding technique of the general planar target and the backing plate. It is common practice to use a low melting point metal as a solder to fill the gap between the rotating target and the backing tube for bonding purposes. The use of a low-melting point metal as a solder has the advantage of less thermal stress. However, since the hollow columnar target is not easy to apply pressure during soldering, the bonding force is poor, and it is easy to occur in the deposition process of the constant temperature. Risk of material and backing tube detachment. Other common methods include: a. Spraying technique: The material of the target is plated on the outer wall of the backing tube by plasma or high pressure spraying to form a target. However, the sputtering method easily generates pores in the target, resulting in a decrease in the density of the target. b. Casting technique: A tubular mold is placed outside the backing tube, and molten 201102450 is injected between the tubular mold and the back tube to form a target. The system is only for the manufacture of targets for low melting materials. The limit of the target material praying method • The electric money: the backing tube is placed in the plating solution, and the (4) material is plated on the outer tube wall of the backing tube by electric forging to form (4) 1 with good attachment. Sexuality's deposition rate is slow, and the thickness of the phantom redundancy is limited. The use of polycondensation techniques is disclosed in US Patent No. 5,435,965.注入..., and the backing of the poor between the injection of the target material, followed by thermal pressure equalization
,私提升靶材的密度；然而，熱均壓製程設備昂貴， 加靶材製造的成本。 曰 在曰本特開平1 1-71667號專利案中則揭露利用熱脹冷 =原理將背襯管直接插人銅製㈣材料中，以機械的力 量完f接合；然而’其咬合量設定在〇.〇1麵〜〇 5咖，並 未考量靶材尺寸與咬合量之間的關聯。但由George M.The density of the target is increased privately; however, the heat-averaged press equipment is expensive, and the cost of the target manufacturing is increased. In the patent application No. 1 1-71667, the patent discloses that the backing tube is directly inserted into the copper (4) material by the thermal expansion and cooling = principle, and the mechanical strength is used to complete the joint; however, the amount of the bite is set in the crucible. 〇1 face ~ 〇 5 coffee, did not consider the relationship between the target size and the amount of bite. But by George M.
Wltyak 的研究論文（Performance Comparison of silverWltyak's research paper (Performance Comparison of silver
Sleeved Rotary Targets with Planar Targets > George M.Sleeved Rotary Targets with Planar Targets > George M.
Wityak，Society of Vacuum Coaters，49th AnnualWityak, Society of Vacuum Coaters, 49th Annual
Technical Conference Proceedings (2005))中可以看出， 靶材尺寸以及咬合量若無經過適當設計，靶材與背襯管雖 不至於鬆脫，但由濺鍍製程中的靶材溫度變化以及電弧發 生的次數可以觀察出其導熱性以及導電性不佳。 另外’在美國公開第2004/0074770號專利案中，揭 4 種將乾材材料加熱而使之膨脹，再將其罩套於背襯管 外，之後再降溫而完成接合。然而其並未考慮到靶材材料 與背襯官之間各種參數的關係，故此方法仍然無法讓背襯 管和乾材材料之間有緊密的結合。 201102450 f發明内容】 法使= : = :: =料與背襯管的接合技術無 材的製作方法其他具有背觀管之" ，、.ς於發明出此中空柱妹材。 牙 本發明之目的在於提供一種能夠使 管緊密結合且製程簡單的中空柱狀乾材。#料和“ 其係=亡Γ襯的、本發明提供—…柱狀乾材組件， 管’該背襯管為内管，該内管係用以接合”=為外 ::::管分離的狀態下，内管之外徑大於:::彳:* 徑之—材材::降 之間卜官之内徑再乘以-係數Ν，Ν值介於1至 p該ΙΜ才材料及背襯管材料皆係選自於由金屬 組陶咖、氮化物 '氧化物及其組合所組成之Ϊ 其中 其中 其中 其中 該外管之内管壁具有凹槽。 該内管之外管壁具有凹槽。 及外g之内g 土和該内官之外管壁皆具有凹枰 該中空柱狀靶材組件尚包括—介曰。 導電材料，其係設置於該外管和内管…1質為 °亥外管和内管間之凹槽内。 5者係叹置於 本發明又關於一種中空柱狀靶材，1 桎狀粑材組件’且該内管係接合於該外管内，述中空 201102450 本發明藉由㈣材料和背襯管之材質的不同性質 調整内管之外徑和外管之内•，使其差值等於乾材材料而 降伙應變乘以外管之内徑再乘以—係數N，並控制 1至10之間’才能使得作為外管和内管得以緊密接合。在 【實施方式】 爲了降低中空柱狀乾材製造成本以及改善乾材材料血 背襯管間的接合強i ’本發明提出一種中空柱狀乾材以： 其製作方式。在本發明巾’乾材材料為外管而背襯管 管，而該内管之外徑和外管之内徑之差值需等於靶 之降伏應變乘以外管之内徑再乘以—係數N，N值介於] 至10之間；在接合前，令外管之内徑略小於内管的外徑； 接合時在内外管施予適當之溫度差，令外管溫度高於内：： 利用熱脹冷縮的原理使外管的内徑大於内管之外徑，在此 溫度差下將内管插入外管中進行接合，當内外管恢復原始 溫度後即完成接合。 請參考第一圖，R、r分別為外管（1〇)之初始内徑以及 内管（20)之初始外徑，且r>R;在内、外管（1〇2〇)施予溫 度差時，根據熱脹冷縮的公式，R，約等於Rx ( 1+κ 丁）， 約等於「X (1+KbTb)，其中R，、r，為熱脹或冷縮之後的外 管（10)内徑以及内管（20)外徑，Ka與叭分別為外管（1〇)及 内管（20)之熱膨脹係數’ Ta與Tb則分別為外管提升的 溫度差以及内管（20)提升的溫度差。在外管（1〇)溫度足夠高 於内管（20)，使R’>r’時’即可進行接合製程。 初始外管内徑R與内管外徑r之差異（r_R)稱為咬合 量，即該内管之外徑滅去外管之内徑的差值，該内管之外 201102450 徑和外管之内徑之差值範圍（咬合量）的大小會 度以及内外管承受之機械應力。 。的強 咬合量的設計與材料的機械性質以及靶材的 切的關係’較佳的情況下會將應變量設定在令材料 伏應變之後’若乾材材料的應變量小： :因接合的緊密性不足造成的導熱以及導電性不 = =二在製程中引發乾材溫度上升以及多次異常放電.二 應變里右大於材料的破壞應變，則會因為過古 造成乾材的變形或破壞“法#用會二 機械應力 圾而無法使用。因此經過實驗讲办 =應變量設定絲材材料發生降 ：伏 下會有較佳的接合效果;則咬合:;卩= 材材料之降伏應變乘 I哥於祀Technical Conference Proceedings (2005)) can be seen that if the target size and the bite amount are not properly designed, the target and the backing tube are not loose, but the target temperature change and arcing occur in the sputtering process. The number of times can be observed as thermal conductivity and poor electrical conductivity. Further, in the U.S. Patent Application Publication No. 2004/0074770, four types of dry material are heated and expanded, and then placed over the backing tube, and then cooled to complete the joining. However, it does not take into account the various parameters of the target material and the backing officer, so this method still does not allow a tight bond between the backing tube and the dry material. 201102450 fInventive content] The law makes = : = :: = the bonding technology of the material and the backing tube is not made of the material. Others have the back tube, "," invented the hollow column sister material. Teeth An object of the present invention is to provide a hollow columnar dry material which is capable of tightly joining tubes and having a simple process. #料和"其系=死Γ衬, the present invention provides -... columnar dry material assembly, tube 'the backing tube is the inner tube, the inner tube is used for joining" = outer:::: tube separation In the state of the inner tube, the outer diameter of the inner tube is greater than:::彳:* The diameter of the material is: the diameter of the material is reduced by the coefficient of 卜, and the value is between 1 and p. The backing tube material is selected from the group consisting of metal group ceramics, nitride 'oxides and combinations thereof, wherein the inner tube wall of the outer tube has a groove. The outer tube wall of the inner tube has a groove. Both the g soil and the inner wall of the inner girth have a concave 枰. The hollow cylindrical target component further includes a mediator. The conductive material is disposed in the outer tube and the inner tube. The first material is in the groove between the outer tube and the inner tube. The present invention relates to a hollow cylindrical target, a 桎-shaped coffin assembly 'and the inner tube is engaged in the outer tube, the hollow 201102450. The invention is made of (4) material and material of the backing tube Different properties adjust the outer diameter of the inner tube and the inside of the outer tube, so that the difference is equal to the dry material and the strain is multiplied by the inner diameter of the outer tube and multiplied by the coefficient N, and the control between 1 and 10' This allows the outer tube and the inner tube to be tightly joined. [Embodiment] In order to reduce the manufacturing cost of the hollow columnar dry material and to improve the joint strength between the dry backing material of the dry material, the present invention proposes a hollow columnar dry material to: In the towel of the present invention, the dry material is an outer tube and the tube is backed, and the difference between the outer diameter of the inner tube and the inner diameter of the outer tube is equal to the drop strain of the target multiplied by the inner diameter of the tube and multiplied by a coefficient. The N, N value is between 10 and 10; before the joint, the inner diameter of the outer tube is slightly smaller than the outer diameter of the inner tube; when the joint is applied, the appropriate temperature difference is applied to the inner and outer tubes to make the outer tube temperature higher than the inner: The principle of thermal expansion and contraction is adopted to make the inner diameter of the outer tube larger than the outer diameter of the inner tube. Under this temperature difference, the inner tube is inserted into the outer tube for jointing, and the inner and outer tubes are joined after the original temperature is restored. Please refer to the first figure. R and r are the initial inner diameter of the outer tube (1〇) and the initial outer diameter of the inner tube (20), respectively, and r>R; inner and outer tubes (1〇2〇) When the temperature is different, according to the formula of thermal expansion and contraction, R is approximately equal to Rx (1+κ丁), which is approximately equal to "X (1+KbTb), where R, r is the outer tube after thermal expansion or contraction. (10) Inner diameter and outer diameter of the inner tube (20), Ka and the horn are the outer tube (1 〇) and the inner tube (20) respectively, and the thermal expansion coefficients 'Ta and Tb are the temperature difference between the outer tube and the inner tube respectively. (20) Increased temperature difference. When the temperature of the outer tube (1〇) is sufficiently higher than the inner tube (20) to make R'>r', the joint process can be performed. The initial outer tube inner diameter R and the inner tube outer diameter r The difference (r_R) is called the bite amount, that is, the difference between the outer diameter of the inner tube and the inner diameter of the outer tube, and the difference between the inner diameter of the inner tube and the inner diameter of the outer tube (biting amount) The size of the meeting and the mechanical stress on the inner and outer tubes. The design of the strong bite amount and the mechanical properties of the material and the cut relationship of the target 'better case will set the strain after the material is strained' The strain of several materials is small: heat conduction and conductivity due to insufficient tightness of joints == two causes the rise of dry material temperature and multiple abnormal discharges in the process. The right strain is greater than the failure strain of the material. It will be impossible to use because of the deformation or damage of dry materials caused by the ancients. Therefore, after the experiment, the strain should set the wire material to drop: there will be better joint effect under the volt; then the bite: 卩 = the material of the material will be multiplied by I.
值介於】至10之間外官之内徑再乘以一係數N，此N 變形可使内1 = ^官與内管之間由於應力造成的塑性 媒介，但仍能夠：拖：接ί:因此並不必要存在焊料作為 外管間t ^ Q進行前在内外管間增加介質辅助内 ^間電、熱的傳導或著增加附著的能力。 請參看第二及二圖杯_ ^ 省焊料的目的，更；:：：’爲了達到製程的方便以及節 之外管壁（叫或上㉛ ⑽之内㈣⑴）或时（2〇) 於凹槽（122W < —者設置凹槽（12,22)，再將焊料填 外，亦可在接合後進充谭料的步驟除了可在接合前進行 清參看第四圖所千 凹槽可為複數分別形二中内：(2。)為例’爾^ (22)。 、这内官（2〇)之兩端部（23)的凹槽 201102450 管（20)之外管壁（21)之兩端或單 壁（11)之兩端的凹槽，在加工上 亦可為單一環繞於該内 一環繞於該外管（1〇)之内管 更為簡便。 再請參看第五圖所#，所形成之凹槽可為複數自該内 B之端4 (23)貫穿至另一端部（23)的凹槽（22，），以填 充更多的焊料’使得内管與外管之間接合得更為緊密。其 凹槽貫穿的方式不限於直線，亦可能以螺旋的方式自該内 管之一端部貫穿至另一端部。 實施例 實施例一： 提供長度為i_.Qmm，内徑為132 5_的管狀絲 材”長度為1400.〇mm，外徑為133 〇_的管狀不鑛鋼The value is between 】 and 10 between the outer diameter of the outer officer and multiplied by a coefficient N. This N deformation can make the internal medium 1 ^ ^ plastic medium between the official and the inner tube due to stress, but still able to: drag: connect ί Therefore, it is not necessary to have the ability to increase the adhesion of the medium between the inner and outer tubes before the outer tube is used to increase the adhesion. Please refer to the second and second cups _ ^ for the purpose of soldering, more;::: 'In order to achieve the convenience of the process and the wall outside the section (called or within 31 (10) (4) (1)) or when (2 〇) The groove (122W < - the groove (12, 22) is set, and then the solder is filled, and the step of filling the material after the bonding can be performed before the bonding. In the shape of the second two: (2.) for the example 'er ^ (22)., the inner end of the official (2 〇) (23) groove 201102450 tube (20) outside the wall (21) The grooves at the two ends or the ends of the single wall (11) can be processed in a single way around the inner tube which surrounds the outer tube (1〇). Please refer to the fifth figure. The groove formed may be a plurality of grooves (22,) extending from the end 4 (23) of the inner B to the other end (23) to fill more solder 'interconnecting the inner tube and the outer tube The manner in which the groove is penetrated is not limited to a straight line, and may also spirally penetrate from one end of the inner tube to the other end. Embodiment Example 1: Providing a length i_.Qmm, tubular wire with an inner diameter of 132 5_" tubular length of 1400.〇mm, outer diameter of 133 〇_
背襯管進行接合。因銀的熱膨脹係數約為i9 5xiq 6/k，將 銀靶材由室溫25t加熱至5〇〇。〇後，銀靶材内徑變為 微7麵，此時將維持室溫奶之残射㈣插入絲 ㈣，待㈣材冷卻至室溫即完成接合，内管之外徑和外 管之内徑之差值(咬合量鸿〇5_。接合後之管狀銀靶材 其偏轉度以及垂直度均小於〇 〇5咖，同心度可小於 1 .Omm。銀的降伏應轡约幺 n oc〇/ θ 、 粑殳約為0·25%，該咬合量設定對於内 徑U2_5mm的應變量約為Q 38%，約為降伏應變之η (Ν=1.5)。 實施例二： 提供長度為85〇.〇mm，内徑為7() 〇麵的管狀氧化鋼 201102450The backing tube is joined. Since the thermal expansion coefficient of silver is about i9 5xiq 6/k, the silver target is heated from room temperature to 25 Torr to 5 Torr. After the crucible, the inner diameter of the silver target becomes micro 7 side, at this time, the residual of the room temperature milk (4) is inserted into the wire (4), and the joint is completed after cooling to room temperature, the outer diameter of the inner tube and the outer tube are completed. The difference in diameter (biting amount is 5_. The tubular silver target after joining has a degree of deflection and perpendicularity less than 〇〇5 coffee, and the concentricity can be less than 1.0 mm. The fluctuation of silver should be about 幺n oc〇/ θ and 粑殳 are about 0. 25%, and the amount of occlusion is set to be about 38% for the inner diameter U2_5mm, and about η (Ν=1.5) of the undulation strain. Embodiment 2: The length is 85〇. 〇mm, inner diameter of 7 () inside the tubular oxide steel 201102450
錫：，與長度為⑽〇·〇_，外徑為7〇15_的管狀不鏽 鋼背襯官進行接合。因氧化銦錫的熱膨脹係數約為75僧 Μ，不鏽鋼管熱膨脹係數約為1Q5x1q.6/k，將氧化姻錫乾 由室溫25t加熱至525 t後，氧化銦錫靶内徑變為 70.26mm;將不鏽鋼管由室溫25χ：冷凍至at後不鏽 鋼管内徑變為70.08mm;此時將不鑛鋼背襯管插入氧化銦 錫靶内，待氧化銦錫靶以及不鏽鋼管恢復至室溫即完成接 合，咬合量為0.15mm。接合後之管狀氧化銦錫靶其偏轉度 以及垂直度均小於〇.〇5mm，@心度可小於]〇mm。氧化 銦錫的降伏應變約為〇_21%，該咬合量設定對於内徑7〇〇匪 的應貪里約為0.21 °/〇，約為降伏應變之1倍（n= 1. 〇)。 實施例三： 提供長度為10〇〇.〇mm，内徑為100 〇mm的管狀鋁靶 材，與長度為1400.〇mm，外徑為1〇1〇mm的管狀不鏽鋼 背概官進行接合。因鋁的熱膨脹係數約為23 2x1〇-6/k，將 紹把材由室溫25°C加熱至525。(：後，鋁靶材内徑變為 101.2mm ’此時將維持室溫25°C之不鏽鋼背櫬管插入鋁靶 材内’待紹靶材冷卻至室溫即完成接合，内管之外徑和外 官之内徑之差值（咬合量）為1〇mm。接合後之管狀鋁靶材 其偏轉度以及垂直度均小於〇.〇5mm，同心度可小於 1.0mm。銘的降伏應變約為〇 25%，該咬合量設定對於内 徑100.0mm的應變量約為，約為降伏應變之4倍（N=4)。 201102450 對照例一： 提供長度為io〇〇.〇mm，内徑為132 6mm的管狀銀靶 材，與長度為140〇_〇mm，外徑為132 8mm的管狀不鏽鋼 背襯管進行接合。因銀的熱膨脹係數為19 5χ1〇_6/κ ,將銀 靶材由室溫25°C加熱至500Τ：後，銀靶材内徑變為 1 33.8mm，此時將維持室溫25。〇之不鏽鋼背襯管插入銀靶 材内’待銀無材冷卻至室溫即完成接合，咬合量為〇.2mm。 接合後之官狀銀靶材其偏轉度以及垂直度均小於〇 〇5mm， 同心度可小於1.〇mm。該咬合量設定對於内徑132 6mm的 應變量約為0.15% ’約為降伏應變之0.6倍（N=0 6)。 將實施例一、二、三以及對照例一中接合完成之靶材 以相同之濺鍍參數進行濺鍍測試，實施例一、二、三之乾 材在減鍍功率由1 kW調整至5 kW時靶材溫度仍維持在5 〇 以下；但對照例一之靶材在濺鍍功率僅彳kVV時，靶材溫度 已大於1 50°C ’顯示其接合緊密度不足造成導熱效果不佳。 由上述實施例與對照例可知，實施例一令咬合量設計 相對於靶材内徑的應變量約為降伏應變之1 ·5倍，實施例 二中咬合量設計相對於靶材内徑的應變量約為降伏應變之 1.0倍’實施例三中咬合量設計相對於輕材内徑的應變量 約為降伏應變之4 · 0倍’而對照例約為降伏應變之〇 6倍； 實施例中接合完成的靶材導電性及散熱性良好，而對照例 則有嚴重散熱不良的問題。因此本發明藉由控制内管和外 管的材料以及咬合量’即能以熱漲冷縮的基本原理解決既 有製作中空柱狀靶材的困難，且利用簡單的製程製作出具 201102450 有緊密接合之靶材材料和背襯管的靶材，以供產業上利 用。 【圖式簡單說明】 第一圖係本發明之外管與内管組合前的端視示意圖。 第二圖係本發明之内管的端視剖面圖。 第三圖係本發明之外管的端視剖面圖。 第四圖係本發明之内管一態樣的立體圖。 第五圖係本發明之内管另一態樣的立體圖。 【主要元件符號說明】 (1 1)内管壁 (20)内管 (23)端部 (1〇)外管 (12)凹槽 (22) (22')凹槽 11Tin: Jointed with a tubular stainless steel backing with a length of (10) 〇·〇_ and an outer diameter of 7〇15_. Since the thermal expansion coefficient of indium tin oxide is about 75 僧Μ, the thermal expansion coefficient of the stainless steel tube is about 1Q5x1q.6/k, and the inner diameter of the indium tin oxide target is 70.26 mm after the oxidation of the tin oxide is heated from room temperature to 25 Torr. The stainless steel tube is cooled from room temperature to 25 °: after freezing to at least the inner diameter of the stainless steel tube is changed to 70.08 mm; at this time, the non-mineral steel backing tube is inserted into the indium tin oxide target, and the indium tin oxide target and the stainless steel tube are returned to room temperature. The joint was completed and the bite amount was 0.15 mm. The tubular indium tin oxide target after bonding has a degree of deflection and a perpendicularity of less than 〇.〇5 mm, and @心度 may be less than 〇mm. The influx strain of indium tin oxide is about 〇 _ 21%, and the occlusion amount is set to be about 0.21 ° / 〇 for the inner diameter of 7 〇, which is about 1 times the undulating strain (n = 1. 〇). Example 3: A tubular aluminum target having a length of 10 〇〇.〇mm and an inner diameter of 100 〇mm is provided, and is joined with a tubular stainless steel back having a length of 1400.〇mm and an outer diameter of 1〇1〇mm. . Since the coefficient of thermal expansion of aluminum is about 23 2x1 〇 -6 / k, the material is heated from room temperature 25 ° C to 525. (: After that, the inner diameter of the aluminum target becomes 101.2mm.) At this time, the stainless steel back pipe with a room temperature of 25 °C is inserted into the aluminum target. The target is cooled to room temperature and the joint is completed. The difference between the diameter of the diameter and the outer diameter of the outer officer (bite amount) is 1〇mm. The degree of deflection and perpendicularity of the tubular aluminum target after joining are less than 〇.〇5mm, and the concentricity can be less than 1.0mm. It is about %25%, and the occlusion amount is set to about 100.0 mm of the inner diameter, which is about 4 times of the strain (N=4). 201102450 Comparative Example 1: The length is io〇〇.〇mm, A tubular silver target with a diameter of 132 6 mm is joined to a tubular stainless steel backing tube having a length of 140 〇 〇 mm and an outer diameter of 132 8 mm. The silver has a thermal expansion coefficient of 19 5 χ 1 〇 _6 / κ , and the silver target The material is heated from room temperature to 25 ° C to 500 Τ: after, the inner diameter of the silver target becomes 1 33.8 mm, at which time the room temperature will be maintained at 25. The stainless steel backing tube of the crucible is inserted into the silver target. The joint is completed at room temperature, and the bite amount is 〇.2mm. The jointed silver target has a degree of deflection and perpendicularity less than 〇〇5mm, and the concentricity can be 1. 〇mm. The occlusion amount is set to be about 0.15% for the inner diameter of 132 6 mm, which is about 0.6 times the approximate strain (N = 6). Embodiments 1, 2, 3 and Comparative Example 1 The bonded target was sputter tested with the same sputtering parameters. The target materials of Examples 1, 2, and 3 were maintained at 5 kW when the deplating power was adjusted from 1 kW to 5 kW; In the first example, when the sputtering power is only 彳kVV, the target temperature has been greater than 150 ° C. 'The joint tightness is insufficient to cause poor thermal conductivity. From the above examples and the comparative examples, the first embodiment is occluded. The amount of the design relative to the inner diameter of the target is about 1.5 times the strain of the drop. In the second embodiment, the amount of the bite is designed to be about 1.0 times the strain of the inner diameter of the target. The occlusion in the third embodiment The amount of the design relative to the inner diameter of the light material is about 0.4 times the strain of the drop and the comparative example is about 6 times the strain of the drop; in the example, the conductivity and heat dissipation of the bonded target are good, and the control is good. For example, there is a problem of severe heat dissipation. Therefore, the present invention controls The material of the inner and outer tubes and the amount of the bite can solve the difficulty of making the hollow cylindrical target by the basic principle of heat expansion and contraction, and use the simple process to produce the 201102450 closely bonded target material and back. The target of the liner is for industrial use. [Simplified illustration of the drawings] The first figure is a schematic end view of the outer tube and the inner tube of the present invention. The second figure is the end view of the inner tube of the present invention. Fig. 3 is a perspective view showing the outer tube of the present invention. Fig. 4 is a perspective view showing an aspect of the inner tube of the present invention. Fig. 5 is a perspective view showing another aspect of the inner tube of the present invention. [Explanation of main component symbols] (1 1) Inner pipe wall (20) Inner pipe (23) End (1〇) Outer pipe (12) Groove (22) (22') Groove 11
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| KR101137906B1 (en) * | 2006-08-03 | 2012-05-03 | 삼성코닝정밀소재 주식회사 | Rotatable target assembly |
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