201044623 六、發明說明： 【發明所屬之技術領域】 本發明係關於製造黃銅礦化合物系積體型薄膜太陽電池 時之溝槽加工工具。 此處’黃銅礦化合物除指CIGS(Cu(In，Ga)Se2)外，還包 含 CIGSS(Cu(In，Ga)(Se，S)2)、CIS(CuInS2)等黃銅礦化合 物。 【先前技術】 在將黃銅礦化合物半導體作為光吸收層使用之薄膜太陽 電池中’ 一般係為在基板上亊聯連接複數個單元電池而成 之積體型構造。 就先前之黃銅礦化合物系積體型薄膜太陽電池之製造方 法進行說明。圖6係顯示CIGS薄膜太陽電池之製造步驟之 模式圖。首先，如圖6(a)所示，藉由濺鍍法，於包含鹼石 灰玻璃（SLG)等之絕緣基板丨上，形成成為正極側之下部電 ❹極之M〇電極層2後，藉由劃刻加工，而相對於光吸收層形 成前之薄膜λ陽電池基板形成下#電極分離用之溝槽s。 其後，如圖6(b)所示，藉由蒸鍍法、濺鍍法等，於㈣電 ‘極層2上形成包含化合物半導體（CIGS)薄膜之光吸收層3， 且藉由CBD法（化學浴沉積法）形成包含用於異質接合之 如薄膜等之緩衝層4,且於其上形成包含Zn〇薄膜之_ 層5。而後，相對於透明電極層形成前之薄膜太陽電池， 在從下部電極分離用之溝槽s於橫向離開特定距離之位 置，藉由劃刻加工而形成達於遍電極層2之電極間接觸用 146242.doc 201044623 之溝槽Ml。 之=⑷所示’從絕緣層5上形成作為包含⑽·· 轉換之發電^ I極之相電極層61料«利用光電 加工形=:要之各機能層之太陽電池基板，藉由劃刻 在上过。電極層2之電極分離用溝槽M2。 1述之製造積體型薄膜太陽電池之步驟_，作為夢由 而將電極分離用之溝槽⑷及奶予以溝抑： 技術，迄今使用的是雷射劃刻法與機械劃刻法。曰加 等文獻1中所揭示，雷射劃刻法係藉由電孤燈 :之連續放電燈，照射激發Nd:YAG結晶所發送之雷射 t而形成電極分離用之溝槽。該方法相對於光吸收層形 後之薄膜太陽電池基板形成溝槽之際，劃刻時因雷射光 之熱，而有光吸收層3之光電轉換特性劣化之虞。 例如如專利文獻2及3中所揭示，機械劃刻法係將前端呈 朝前漸細狀之金屬針（針具）等之溝槽加工工具之刃緣，一 面施與特定之壓力壓接於基板，一面使其移動，藉此而將 電極分離用之溝槽加工之技術。目前該機械劃刻法多被使 用。 [先行技術文獻] [專利文獻] [專利文獻1]曰本特開平^-3^815號公報 [專利文獻2]日本特開2002-94089號公報 [專利文獻3]曰本特開2004_1 15356號公報 【發明内容】 146242.doc 201044623 [發明所欲解決之問題] 在先前之機械劃刻法中所使用之溝槽加卫玉具包含專利 讀2及專利文獻3中揭示者，且以於主體之前端部設置有 a個刃緣之形狀構成1如此形狀之溝槽加工工具安裝固 =割《置之保持具’並使溝槽加工工具一面壓接於薄 二广電池’ -面沿著劃刻預定線相對地移動，藉此可進 仃溝槽加工。 Ο ❹ 以單一之刃緣所形成之溝槽加工工具，因使用而 予以拆知或刀刃缺損之情科，有必要每次都從保持具 拆卸研磨、或更換新品，裝卸實為麻煩。 因此’本發明之首要目的在於提供一種太陽電池之溝槽 本^工具’其在刀緣磨耗時，可在無須更換溝槽加工工且 本身下，簡單地置換成新的刀緣。 八 又’在專利文獻2及專利文獻3 使、隻掸士 j文獻3所揭不之機械劃刻法’係 /工具之刀緣之形狀為前端漸細之針狀，嚴謹而 g，為使虔接於薄膜太陽電池 厫謹而 甘‘ |刀擴大接觸面積，乃脾 、珂端水平截斷成平坦的形態。 ' 分係形成為㈣吻⑽端部 輝形面的截頭圓錐形。 藉由使用前端部分為截頭圓錐形之溝槽加工卫具進 d ’由於與基板之接觸面_ 从 觸面積邊大’故可相對安定地進行溝 二·，若加工之溝槽深度略微加深，則割刻時截 頭圓錐形之側面之錐形面與基板之接觸面積變大= :阻力致使薄膜不規則地大幅剝離，：摩 要之部分，且有降低太陽電池之特性及良品率Γ虞 346242.doc 201044623 因此，本發明之第二目的在於提供—種溝槽加工工具， 其即使在加工之溝槽深度略微加深之情況時’亦可使刀缓 與基板之接觸面積不會變大 、' A攸而不易發生摩擦阻力所導 致之不規則地剝離。 ^ v201044623 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a groove processing tool for manufacturing a chalcopyrite compound-based thin film solar cell. Here, the chalcopyrite compound includes, in addition to CIGS (Cu(In, Ga)Se2), a chalcopyrite compound such as CIGSS (Cu(In, Ga)(Se, S) 2), CIS (CuInS2). [Prior Art] In a thin film solar cell in which a chalcopyrite compound semiconductor is used as a light absorbing layer, "in general, it is an integrated structure in which a plurality of unit cells are connected in series on a substrate. A description will be given of a method of manufacturing a prior chalcopyrite compound-based thin film solar cell. Fig. 6 is a schematic view showing the manufacturing steps of a CIGS thin film solar cell. First, as shown in FIG. 6(a), an M〇 electrode layer 2 which becomes an electric gate of the lower side of the positive electrode side is formed on an insulating substrate including soda lime glass (SLG) by a sputtering method. By the scribe process, the trench s for the electrode separation is formed with respect to the thin film λ anode cell substrate before the formation of the light absorbing layer. Thereafter, as shown in FIG. 6(b), a light absorbing layer 3 containing a compound semiconductor (CIGS) film is formed on the (four) electric 'pole layer 2 by a vapor deposition method, a sputtering method, or the like, and is subjected to the CBD method. (Chemical bath deposition method) A buffer layer 4 containing a film or the like for heterojunction is formed, and a layer 5 containing a Zn ruthenium film is formed thereon. Then, the thin film solar cell before the formation of the transparent electrode layer is formed by the scribe process to form the contact between the electrodes of the pass electrode layer 2 at a position separated from the lower electrode by a certain distance in the lateral direction. Groove Ml of 146242.doc 201044623. = (4) shows a phase electrode layer 61 which is formed as a (10)··-converted power generation electrode from the insulating layer 5, which is formed by photo-processing: = solar cell substrate of each functional layer, by scribing On the past. The electrode separation trench M2 of the electrode layer 2. The step of manufacturing an integrated type thin film solar cell is described in the following paragraphs. As a dream, the groove (4) for separating the electrodes and the milk are used for the ditch: The technique has been the use of the laser scribing method and the mechanical scribing method. In addition, as disclosed in Document 1, the laser scribe method forms a trench for electrode separation by irradiating a laser beam excited by Nd:YAG crystal by a continuous discharge lamp of an electric lamp. When the method forms a groove with respect to the thin film solar cell substrate after the light absorbing layer is formed, the photoelectric conversion characteristics of the light absorbing layer 3 are deteriorated due to the heat of the laser light at the time of scribing. For example, as disclosed in Patent Documents 2 and 3, the mechanical scribing method is to apply a specific pressure to a blade edge of a groove forming tool such as a metal needle (needle) which is tapered toward the front end. The technique of processing the groove for electrode separation by moving the substrate on one side. This mechanical scribing method is currently used. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent Laid-Open Publication No. JP-A No. 2002-94089 [Patent Document 2] Bulletin [Summary of the Invention] 146242.doc 201044623 [Problems to be Solved by the Invention] The groove-assisted jade used in the prior mechanical scribing method includes those disclosed in Patent Reading 2 and Patent Document 3, and The front end is provided with a shape of a blade edge. The groove processing tool of such a shape is mounted and fixed. The cutting device is placed on the side of the battery. The predetermined line is moved relatively, thereby allowing the groove to be processed. Ο 沟槽 The groove processing tool formed by a single edge is used for disassembly or cutting of the blade. It is necessary to remove the grinding from the holder or replace it with new ones. It is troublesome to load and unload. Therefore, the primary object of the present invention is to provide a groove for a solar cell which can be easily replaced with a new blade edge without the need to replace the groove cutter when the blade edge is worn. In the case of the patent document 2 and the patent document 3, the mechanical scribe method of the knuckle of the syllabus is not the shape of the knives of the knives, and the shape of the knives of the knives is sharp and sharp, so that It is connected to the thin-film solar cell. The knife expands the contact area, and the spleen and the scorpion end are cut into a flat shape. The 'segment is formed as (f) the end of the kiss (10) and the frusto-conical shape of the façade. By using the front end portion as a frusto-conical grooved processing aid into the d' due to the contact surface with the substrate _ from the side of the contact area is large, the groove 2 can be relatively stable, if the groove depth of the processing is slightly deepened The contact area between the tapered surface of the frustoconical side and the substrate becomes larger when cutting. The resistance causes the film to be peeled off irregularly, and the part of the surface is reduced, and the characteristics and yield of the solar cell are lowered.虞 346242.doc 201044623 Therefore, a second object of the present invention is to provide a groove processing tool which can reduce the contact area of the blade with the substrate even when the groove depth of the process is slightly deepened. , 'A攸 is not prone to irregular peeling caused by frictional resistance. ^ v
再者，刀緣磨耗時，可纟n _ & Y J將溝槽加工工具從保持具拆 予研磨修補後再度利用路& ^ 傻丹度利用雖為經濟，但若前端部 錐形時，則研磨將致使 ”戴頭圓 板中，將劃刻線之線寬堆 ^•池基 計上所預期之品質（光 霄見。又 (尤电轉換效率）及提高品質 現性）而言至Α番亜 m J注（再 為重要’因此必須固定薄膜之剝離程度。 因此，本發明之第二 之溝样加工工【提供一種薄膜太陽電池用 曰 八，其對已經磨耗之刀緣，亦可藉由 使劃刻線之線寬維持於— 研磨， Ύ ' 疋而再度利用。 [解決問題之技術手段] 為解決上述問題而6 4、 之溝槽加工工具之構:之本發明積體型薄膜太陽電池用 ^ κ ^ , 為，在圓盤狀之主體之外周部，沿 者因周方向以等間隔 邙，日iTL π 另菌輪狀連續之複數個凹部、凸 4，且該凸部之切線方 ^ 緣而形成。 之至少任一方之角部係作為刃 又’為解決上述問題 電池之溝槽加工方、去| 本發明之積體型薄膜太陽 之劃刻預定線，係沿著積體型薄膜太陽電池基板 太陽電池基板或溝槽加m ”之刃緣g，一面使 上形成劃刻線者；且溝柄/、相對地移動，而於太陽電池 曰加工工具係在可旋轉並可固定地 I46242.doc 201044623 安裝於劃刻裝置之保持具上之圓盤狀主體之外周部上，、八 著圓周方向以等間隔形成有齒輪狀連續之複數個凹部、凸 部，且以該凸部之切線方向上之至少任一方之角部作為 、緣而齡使刃緣朝上述移動方向配置’以—次之移動： 藉由複數個刀緣同時進行不同深度之溝槽加工。 Ο ❹ 根據本發明，圓盤狀之主體之直徑及形成於其周面的凸 部之突出高度或數量係對應於應加工之溝槽之深度而預先 設定，藉此，進行溝槽加工時，從溝槽之淺部分以至深邹 分，可以採用不同之2〜3個刃緣依序切削薄膜的方式、 行’以使摩擦阻力不會增大。 [發明效果] 本發明之積體㈣膜太陽電池製造方法，其在進 加工時，由於使用將形成有齒輪狀連續之凸部 ^ 刀緣的形狀之溝槽加工工具，並 為 象朝移動方向配置， 並化數個刀緣同時進行溝槽加工，故溝槽部係以複數個 刃緣逐步被切削。即，在接觸於溝槽部而發揮作用之 2料，藉由位於行進方向前方側之上段刀緣依料是以 阻：二刃緣徐徐切削，藉此而減少溝槽 =二:使=則之薄膜之剝離不會發生，= 直線狀且漂売之劃刻線。又， J办成 圓盤狀之主體旋轉特定肖度，以下—個^刀缺損時，將 加工部位即可，藉此可無須更換溝槽加工二緣成^籌槽 設置成新的刀緣，從而可消除更換作業之繁雜’而間早地 (用於解決其他之問題之手段及效果）ί。 146242.doc 201044623 ,較佳實施形態為’使溝槽加工工具之凸部之左右側面， 形成為一對相互平行之面。 此情況下，刃緣磨耗時，由於即使研磨凸部之頂面，刀 刃之左右寬度之尺寸亦不會產生變化，故即使是研磨後， 亦可將所刻之溝槽寬度維持於與研磨前相同，藉此，所 有之刃緣磨耗時，皆可研磨修補再度利用。Furthermore, when the edge is worn, 纟n _ & YJ removes the groove processing tool from the holder to the grinding and repairs and then uses the road & ^ silly use is economical, but if the front end is tapered, Then the grinding will result in "the head of the circular plate, the line width of the scribe line will be piled up on the basis of the expected quality of the pool base (see the light, and the efficiency of the electric conversion) and the quality of the present). Panyu m J Note (re-importantly) Therefore, it is necessary to fix the degree of peeling of the film. Therefore, the second groove-like processing worker of the present invention provides a film solar cell for use in the case of an already worn edge. By maintaining the line width of the scribe line in -grinding, Ύ ' 疋 and reusing it. [Technical means for solving the problem] In order to solve the above problem, the structure of the groove processing tool of the present invention: the integrated film of the present invention For the solar cell, ^ κ ^ , is a peripheral portion of the disk-shaped body, and the edges are unequal in the circumferential direction, and the plurality of concave portions and convex portions 4 are continuous, and the convex portion is The tangential line is formed by the edge. At least one of the corners is In order to solve the above problem, the groove processing of the battery is performed, and the planned line of the sun of the integrated type film of the present invention is along the edge of the solar cell substrate or the groove of the integrated type thin film solar cell substrate. g, one side of the scribe line is formed; and the groove handle /, relatively moved, and the solar cell processing tool is rotatably and fixedly mounted on the holder of the scribe device I46242.doc 201044623 In the outer peripheral portion of the disk-shaped main body, a plurality of concave portions and convex portions continuous in a gear shape are formed at equal intervals in the circumferential direction, and at least one of the corner portions in the tangential direction of the convex portion is used as the edge. The edge is disposed in the moving direction as follows: the movement of the groove is performed at the same time by a plurality of edges. ❹ ❹ According to the invention, the diameter of the disk-shaped body and the circumferential surface thereof are formed. The protruding height or the number of the convex portions is preset corresponding to the depth of the groove to be processed, whereby when the groove processing is performed, from the shallow portion to the deep portion of the groove, different 2-3 blades can be used. edge The method of cutting the film in order to prevent the frictional resistance from increasing. [Effect of the invention] The method for manufacturing a composite (four) film solar cell of the present invention, which is formed into a gear-like continuous convex portion during use. ^ The groove machining tool of the shape of the edge of the blade is arranged for the moving direction of the image, and the groove is machined at the same time. Therefore, the groove portion is gradually cut by a plurality of edges. The material that functions as the groove portion is cut by the edge of the upper edge of the upper side in the traveling direction by the resistance: the two edges are gradually cut, thereby reducing the groove=two: the film is not peeled off It will happen, = straight line and crepe scribe line. In addition, J can be turned into a disc-shaped body to rotate a specific degree of shaving, the following - a ^ knife defect, the processing part can be used, thereby eliminating the need to replace the groove The processing of the two edges into the groove is set to a new edge, which can eliminate the complicated operation of the replacement work, and early (for the solution of other problems and effects). 146242.doc 201044623, in a preferred embodiment, the left and right side faces of the convex portion of the groove processing tool are formed as a pair of mutually parallel faces. In this case, when the edge is worn, even if the top surface of the convex portion is polished, the size of the left and right widths of the blade does not change. Therefore, even after polishing, the groove width can be maintained before polishing. The same, by the way, all the edge wear, can be polished and repaired again.
又’溝槽加工工且夕播4、U 八 <構成較佳為以超硬合金或金剛石形 成。 藉此，由於工呈之皇人曰 八之哥°卩長，且少有變形，故在長期間内 了精度良好地進行劃刻加工。 【實施方式】 :下’基於顯示本發明之實施形態之圖式， 先就女’有本發明之溝槽加工工且之 剎刻裝置之整體構成，進行說明。 、 圖1係顯示使用本發明 陽電池用割刻裝置之實二具之積體型薄膜太 平a 、 實鉍形恶的立體圖。劃刻裝置具備有 内：、可於大致水平方向(γ方向)移動，且在水平面 内可旋轉90度及自声a _ , 十面 W之保持機構。 ’ °咐貝上形成太陽電池基板 20橋：件Μ係以夾著平台18而設置之兩側之支撐柱2〇、 方式向延伸之導桿21構成，且以橫跨平台18上的 二叹置保持具支撐體23係沿著形成於導ρ 可蒋私沾〜壯 有心成於V杯21之導軌22 女、，且藉由馬達24之旋轉可於χ方向移動。 於保持具支撐體23卜f 士毒， 虹23上5又置有劃刻頭7，於劃刻頭7之下 146242.doc 201044623 部，设置有保持具9,供保持將載置於平台18上之太陽電 池基板W的薄膜表面予以劃刻加工之溝槽加工工具8。保 持具9被設為可調整安裝角度，藉由調整該安裝角度，可 調整溝槽加X工具8與太陽電池基板w之角度。 在可於X方向及γ方向移動之台座12、13上， 設置有攝像機10、U。台座12、13係在支揮台13上，沿著 延设於X方向之導執15移動。攝像機10、U可以手動操作 Ο Ο 上下移動’從而可調整攝像之焦點。以攝像機1〇、U拍攝 之圖像係顯示於監視器1 6、1 7。 半在載置：平台18上之太陽電池基板W上，存在有藉由各 '驟在月j步驟中形成，且可從表面觀察之劃刻線等。因 ^ ’在各步驟中’將太陽電池基板W進行劃刻時，可將在 前步驟中所形成之劃刻線等作為用於特定割刻位置之標記 =用例如’在經劃刻之下部電極層（Mo電極層）2上形成 光吸收層3、緩衝層4及絕緣層5之太陽電池基㈣上， 形成上下電極接觸用之溝槽時’係將形成於上下電極層2 之劃刻線作為用於㈣溝槽形成位置之標記❹。即，曰 由攝像m〇、u拍攝形成於上下電極層2之劃刻 調整太陽電池基板W之位置。具體而言，將形成於可‘ 撐於平台18之太陽電池基板貿表面觀察之下部電極 ==攝像機Μ1拍攝而特定出形成於下部θ電極 層2之劃刻線之位置。基於特定之形成於下部電極 刻線之位置，首屮廡浓# u π A 曰义sj 置r出應形成上下電極接觸用之 (劃刻位置），而調整太陪雷、4 1 置 1太％電池基板w之位置，藉此調整劃 146242.doc 201044623 刻位置。 且在每次於γ方向以特定之間距移動平台18時，令劃 刻頭7下降，而將溝槽加工工具8之刃_接於太陽電池基 板W之表面之狀態了’令平台18於乂方向移動，將太陽電 池基板W之表面沿著又方向進行劃刻加工。將太陽電池基 板W之表面沿著丫方向進行劃m，係使平㈣旋轉 90度’進行與上述相同之動作。 其次，就本發明之溝槽加工工具進行說明。 圖2及圖3係'顯示本發明之—例之溝槽加工工具8。圖^係 側視圖，圖3係正視圖。該溝槽加工工具8係在以超硬合金 或金剛石（燒結金剛石（pCD)等）等之硬質材料所製造的圓 盤狀之主㈣之外周部，沿著圓周方向以等間隔形成齒輪 狀連續之複數個凹部82、凸部83。該凸部83之切線方向上 之任-方之角部係作為刃緣84而形成。又，於圓盤狀之主 體81之中心，設置有對於劃刻裝置之保持具9之安裴孔 85，經由該安裂孔85，以可旋轉且可固定之方式安裝:圖 1所示之保持具9。 將上述溝槽加工工具8安裝於保持具9時，如圖4所示， 刀緣84相對於太陽電池基板w係面向行進方向側而配置， 並以複數個刃，緣’在本實施例中係以三個刃緣同時進行溝 槽加工。為此’將圓盤狀主體81之直徑或其周面形成之凹 部82、凸部83之尺寸及其數量，以對應於應加工之溝槽之 深度或寬度之方式而預先設定。 具體而言，例如，主體81之直徑設為丨〜2〇 mm，厚度u 146242.doc -10- 201044623 設為20μιη〜lmm，凸部83之高度H設為5〜5〇〇μηι左右。 在上述構成中，如圖4所示，進行溝槽加工時，以複數 個刃緣84徐徐切削基板W之薄膜。即，在接觸於基板發揮 .作用之複數個刃緣中’從位於行進方向前方側之上段之刃 、緣依序再以位於下段側之刃緣徐徐切肖彳，藉此可顯著減少 溝槽加工時之摩擦阻力，消除不規則之薄膜之剝離的發 生從而可形成直線狀且漂亮之劃刻線。 0 又刀緣磨耗或刀刀缺損時，使圓盤狀之主體81旋轉特 疋角度α固定，以使下一個新的刃緣位於溝槽加工部位。 本實施例之情況，由於係以3個刀緣進行切削，故位置改 換成新的刃緣時之上述特定角度〇1為3個刃緣份之角度。 根據本發明，由於以複數個刀緣同時進行溝槽加工， 故使薄膜由複數個刀緣84…徐徐切削。在接觸於溝槽部發 揮作用之複數個刃緣中，從位於行進方向前方側之上段之 刃緣依序再以位於下段側之刀緣徐徐切削。藉此可減少溝 〇#加工時之摩擦Ρ且力’防止發生不規則之薄膜之剝離，從 而可开/成直線狀且漂亮之劃刻線。又，使用之刃緣磨耗或 刀刀缺損時，使圓盤狀之主體81旋轉特定角度，以使其次 , t新的37緣位於溝槽加工部位即可，藉此可無須更換溝槽 加工工具，即可簡單地設置成新的刀緣，從而可消除更換 作業之繁雜。 圖5係顯示本發明之溝槽加工之其他之實施例，其係將 凸。卩83之左右側面83a、83b以成為相互平行之一對面的方 式形成。 146242.doc -11 - 201044623 在該實施例尹，刀緣磨耗 面，刀刀之左太宮挣 夺，由於即使研磨凸部83之頂 a之尺寸U亦不會產生變化，故即使研 磨後亦可將所劃刻之溝槽寬 此，所有之刀緣磨耗時可予研磨修補再度利用。 胃 4 =之實施例中，係使劃刻頭7於X方向移動，藉而實 廿里!刻加工’但由於口主查ιϊ 由於/、要劃刻頭7與太陽電池基板1可相 對地移動即可，故也可W定太陽電池基㈣之狀 使劃刻頭7於X方向及γ方闩妙Α 〜 门及¥方向移動，亦可不移動劃刻頭7， 而僅使太陽電池基板貿於乂方向及γ方向移動。 以上’已說明本發明之代表性之實施例，但本發明並非 僅限於上述之實施例構造。例如溝槽加卫卫具8之相對保 持具9之女裝機構只要可使溝槽加工工具8依序每次均旋轉 特定角度《，且可在設定位置確實固定者，任何機構皆可 抹用。又，在上述實施例中，係將凸部们之一方之角部作 為刃緣84’但亦可將左右兩方之角部均作為刀緣形成。 另在本毛明中，在可達成其目的，且不脫離申請專利範 圍之範圍内，可進行適當之修正、變更。 [產業上之可利用性] 本發明係適用於使用黃銅礦化合物系半導體膜之積體型 薄膜太陽電池之製造方法，且可適用於可利用於該方法中 之溝槽加工工具。 【圖式簡單說明】 圖1係顯示使用本發明之溝槽加工工具之積體型薄膜太 陽電池用劃刻裝置之一實施形態的立體圖； 146242.doc -12· 201044623 圖2係本發明之溝槽加工工具之侧視圖； 圖3係上述溝槽加工工具之正視圖； 圖4係顯示利用本發 夕查“,说 ％ θ之溝槽加工工具之太胃電池基板 之J刻線的加工狀態之模式圖； 圖5係‘%’頁不本發明之溝槽加工工具之其他之實施例的要 部之剖面圖； Ο Ο 圖6(aHc)係顯示一般之CIGS系之薄膜太陽電池之製造 步驟的模式圖；及 圖7係顯示 先韵之溝槽加工工且 【主要元件符號說明】 7 劃刻頭 8 溝槽加工工具 9 保持具 81 主體 82 凹部 83 凸部 83a、83b 凸部之左右側面 84 刀緣 W 太陽電池基板 146242.doc •13-Further, the groove processing tool is preferably formed of a super hard alloy or diamond. In this way, since the Emperor of the Workers’ 曰 之 哥 卩 , , , , , , , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Embodiment] The following is a description of an overall configuration of a brake device having a groover of the present invention based on the embodiment showing the embodiment of the present invention. Fig. 1 is a perspective view showing the solid-type film of the solid type of the dicing device for a positive electrode of the present invention. The scribe device has a holding mechanism that can move in a substantially horizontal direction (γ direction) and can rotate 90 degrees in the horizontal plane and self-acoustic a _ , ten faces W . The solar cell substrate 20 is formed on the 咐 咐 : : : : : 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳 太阳The holder support body 23 is formed along the guide rail 22 formed on the V cup 21 along the guide ρ, and can be moved in the χ direction by the rotation of the motor 24. In the holder support body 23, the red 23 is placed with a scribe head 7, and under the kerf 7 is 146242.doc 201044623, a holder 9 is provided for holding on the platform 18 A groove processing tool 8 for dicing the film surface of the solar cell substrate W thereon. The holder 9 is set to an adjustable mounting angle, and by adjusting the mounting angle, the angle between the groove plus X tool 8 and the solar cell substrate w can be adjusted. Cameras 10 and U are provided on the pedestals 12 and 13 that are movable in the X direction and the γ direction. The pedestals 12, 13 are attached to the support table 13 and are moved along the guide 15 extending in the X direction. The camera 10, U can be manually operated Ο Ο move up and down to adjust the focus of the camera. The images taken with the cameras 1〇, U are displayed on the monitors 16 and 17. Half mounted on the solar cell substrate W on the stage 18, there are scribe lines which are formed by the steps in the month j and which can be viewed from the surface. When the solar cell substrate W is scribed in each step, the scribe line or the like formed in the previous step can be used as a mark for a specific dicing position = for example, 'under the scribed portion When the light-absorbing layer 3, the buffer layer 4, and the solar cell base (4) of the insulating layer 5 are formed on the electrode layer (Mo electrode layer) 2, when the trench for the upper and lower electrode contacts is formed, the pattern is formed on the upper and lower electrode layers 2 The line serves as a mark for the position of the (four) groove formation. That is, 曰 the position of the solar cell substrate W is adjusted by the imaging of the upper and lower electrode layers 2 by imaging m〇, u. Specifically, it is formed at a position where the bottom electrode of the solar cell substrate can be held on the platform 18 and the camera Μ1 is photographed to define a scribe line formed on the lower θ electrode layer 2. Based on the position formed at the lower electrode scribe line, the first 屮庑 屮庑 u u u s s 置 置 置 置 置 置 置 置 置 应 应 应 应 应 应 应 应 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下 上下% of the position of the battery substrate w, thereby adjusting the position of the 146242.doc 201044623. And each time the platform 18 is moved at a specific distance in the γ direction, the scribe head 7 is lowered, and the edge of the groove processing tool 8 is attached to the surface of the solar cell substrate W. The direction is moved to scribe the surface of the solar cell substrate W in the other direction. The surface of the solar cell substrate W is drawn in the x direction, and the flat (four) is rotated by 90 degrees to perform the same operation as described above. Next, the groove processing tool of the present invention will be described. 2 and 3 are 'showing the groove processing tool 8 of the present invention. Figure 2 is a side view, and Figure 3 is a front view. The groove processing tool 8 is formed in a gear-like continuous shape at equal intervals in the circumferential direction in a disk-shaped main portion (four) made of a hard material such as cemented carbide or diamond (sintered diamond (pCD)). A plurality of concave portions 82 and convex portions 83. The corner portion of the convex portion 83 in the tangential direction is formed as the blade edge 84. Further, at the center of the disc-shaped main body 81, an ampoule 85 for the holder 9 for the scribing device is provided, via which the rotatable and fixable mounting is carried out: the holding shown in Fig. 1 With 9. When the groove processing tool 8 is attached to the holder 9, as shown in FIG. 4, the blade edge 84 is disposed on the side in the traveling direction with respect to the solar cell substrate w, and has a plurality of blades, and the edge 'in this embodiment The groove is processed simultaneously with three edges. For this reason, the size and the number of the concave portion 82 and the convex portion 83 which are formed by the diameter of the disk-shaped main body 81 or its peripheral surface are set in advance so as to correspond to the depth or width of the groove to be processed. Specifically, for example, the diameter of the main body 81 is set to 丨2 to 2 mm, the thickness u 146242.doc -10- 201044623 is set to 20 μm to 1 mm, and the height H of the convex portion 83 is set to about 5 to 5 〇〇μηι. In the above configuration, as shown in Fig. 4, when the groove processing is performed, the film of the substrate W is gradually cut by a plurality of cutting edges 84. In other words, in the plurality of cutting edges that are in contact with the substrate, the blade is edged from the edge of the upper side in the forward direction of the traveling direction, and the edge is located on the lower side, thereby significantly reducing the groove. The frictional resistance during processing eliminates the occurrence of irregular film peeling and thus forms a straight and beautiful scribe line. 0 When the edge wear or the knife is missing, the disc-shaped main body 81 is rotated at a specific angle α so that the next new edge is located at the groove processing portion. In the case of this embodiment, since the cutting is performed by three cutting edges, the specific angle 〇1 when the position is changed to a new cutting edge is the angle of the three edge portions. According to the present invention, since the groove processing is performed simultaneously with a plurality of cutting edges, the film is gradually cut by a plurality of cutting edges 84. Among the plurality of cutting edges which are in contact with the groove portion, the cutting edge from the upper portion on the front side in the traveling direction is sequentially cut by the edge on the lower side. Thereby, the friction and the force during the processing of the groove can be reduced, and the peeling of the irregular film can be prevented, so that the straight line and the beautiful scribe line can be opened. Moreover, when the edge wear or the blade is used, the disk-shaped main body 81 is rotated by a specific angle so that the new 37 edge is located at the groove processing portion, thereby eliminating the need to replace the groove processing tool. , you can simply set up a new edge, which can eliminate the complexity of the replacement work. Fig. 5 is a view showing another embodiment of the groove processing of the present invention which is convex. The left and right side faces 83a, 83b of the cymbal 83 are formed to be opposite to each other in parallel. 146242.doc -11 - 201044623 In this embodiment, Yin, the edge wear surface, the left side of the knife is earned, because even if the size U of the top a of the polishing protrusion 83 does not change, even after grinding The groove can be widened, and all the edges can be ground and repaired when worn. In the embodiment of the stomach 4 =, the scribing head 7 is moved in the X direction, and the engraving process is performed. However, since the mouth is inspected by the mouth, the head 7 is relatively movable with the solar cell substrate 1 It can be used, so it is also possible to set the shape of the solar cell base (4) so that the scribe head 7 moves in the X direction and the γ-square 〜 门 门 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Move in the 乂 direction and γ direction. The above has described a representative embodiment of the present invention, but the present invention is not limited to the configuration of the above embodiment. For example, the women's mechanism of the relative holder 9 of the groove Guarding Guard 8 can be used as long as the groove processing tool 8 can be rotated by a certain angle each time, and can be fixed at the set position. . Further, in the above embodiment, the corner portion of one of the convex portions is used as the blade edge 84', but the corner portions of both the right and left sides may be formed as the blade edge. In addition, within the scope of this patent, the appropriate modifications and changes may be made within the scope of the patent application. [Industrial Applicability] The present invention is applicable to a method of manufacturing an integrated thin film solar cell using a chalcopyrite compound-based semiconductor film, and is applicable to a trench processing tool which can be used in the method. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an embodiment of a sculpt device for an integrated thin film solar cell using the trench processing tool of the present invention; 146242.doc -12· 201044623 FIG. 2 is a trench of the present invention Fig. 3 is a front view of the above-mentioned groove processing tool; Fig. 4 is a view showing the processing state of the J-line of the solar cell substrate of the groove processing tool of % θ Figure 5 is a cross-sectional view of the main part of another embodiment of the groove processing tool of the present invention; Ο Ο Figure 6 (aHc) shows the manufacturing steps of a general CIGS-based thin film solar cell. Fig. 7 shows the groove processing of the first rhyme and [the main component symbol description] 7 scribe head 8 groove processing tool 9 holder 81 main body 82 concave portion 83 convex portion 83a, 83b left and right sides of the convex portion 84 knife edge W solar cell substrate 146242.doc • 13-