201020081 六、發明說明： 【發明所屬之技術領域】 本發明係關於—種搬送特定之搬送對象物之產業用機器 人。 【先前技術】 -直以來，搬送特定之搬送對象物（工件）之產業用機器 人得以廣泛使用。作為該種產業用機器人，已知包括搭載 工件之機械手及兩條機械臂之產業用機器人（例如，參照 專利文獻1)。於專利文獻1所記載之產業用機器人中，在 第一機械臂之前端側連結有機械手之基端側，在第二機械 臂之前端側連結有第一機械臂之基端側。 又，於專利文獻1所記載之產業用機器人中，將用於對 機械手上搭載有工件時之機械手、第一機械臂及第二機械 臂所產生之撓曲加以修正的撓曲修正機構設置於機械手與 第一機械臂之連結部位。該撓曲修正機構包括：固定於第 ❹一機械臂上之凸輪板、及可旋轉地安裝於機械手上之凸輪 從動件。於該產業用機器人中’凸輪板之上表面形成為使 其高度位置沿圓周方向而變化，並隨著第一機械臂及第二 機械臂之伸縮動作，凸輪從動件在凸輪板之上表面向圓周 方向一邊滚動一邊移動，藉此來修正機械手、第一機械臂 及第二機械臂所產生之撓曲。 [專利文獻1]日本專利特開2003-136442號公報 【發明内容】 [發明所欲解決之問題] 143383.doc 201020081 然而，專利文獻i所記載之產業用機器人中，因為隨著 第一機械臂及第二機械臂之伸縮動作，凸輪從動件在凸輪 板之上表面向圓周方向一邊滾動一邊移動，藉此來修正機 械手等所產生之撓曲，所以，機械手等所產生之撓曲之修 正值係根據凸輪板之上表面之形狀所決定。即，該產業用 機器人中，若不更換凸輪板，則機械手等所產生之撓曲之 修正值為固定。因此，當搭载於機械手上之工件之重量有 所變動會產生無法適切地修正機&手等所產生之挽曲 之情況。 因此’本發明之目的在於提供—種即使搬送對象物之重 量有所變動亦能適切地修正搭載於機械手上之搬送對象物 之傾斜的產業用機器人。 [解決問題之技術機械手段] 為解決上述問題，本發明之產業㈣器人之特徵在於： =括·搭栽搬送對象物之機械手；及對搭載有搬送對象物 時之機械手之撓曲所引起的搬送對象物之傾斜加以修正之 傾斜修正機構；傾斜修正㈣“：料驅㈣之傾斜修 :用馬達；與傾斜修正用馬達之輸出轴連結之偏心旋轉構 構：安裝於偏心旋轉構件上之連桿構件;安裝有連 ;= 側之安裝構件；及支點部，其係作為旋動 起上下移隨♦偏心旋轉構件之旋轉而與連桿構件一 ^㈣件，來使韻手朝著使_對象物之 傾斜發生變化之方向進行旋動。 對象物之 本發明之產業用機器人中，傾斜修正機構係利用隨著與 143383.doc 201020081 用馬達之輸出軸連結之偏心旋轉構件之旋轉而與 =件-起上下移動之安裝構件，來使機械手以支點部 =動中心朝著使搬送對象物之傾斜發生變化的方向進行 =動。因此’㈣偏心旋轉構件之旋轉量（即，傾斜修正 :馬：之旋轉量)，以控制安裝構件之上下方向之移動 量，藉此可控制以支點部為旋動中心之機械手之旋動量。 ^以，本發明中，根據搬送對象物之重量來控制傾斜修正 馬達之旋轉量’藉此可控制以支點部為旋動中心之機械 手之旋動量，從而能適切地修正搬送對象物之傾斜。即， :發明中，即使搬送對象物之重量有所變動，亦能適切地 多正搭載於機械手上之搬送對象物之傾斜。 參 在本發明中，較好的是，偏心旋轉構件係偏心轴；連桿 構件之-端側經由轴承而可旋動地安裝於偏心轴之外周 側，連桿構件之另-端側經由軸承而可旋動地安裝於安裝 構件上。如此構成後，可減輕連桿構件之向偏心轴之安裝 部分及向安裝構件之安裝部分的滑動阻力，從而可抑制於 連桿構件之兩端側產生塵埃。因此，能在無塵室等清潔之 環境下使用產業用機器人。又’由在轴承之兩端側配置有 密封構件而能防止塵埃飛散，因此，可簡化塵埃飛散防止 結構。 在本發明中，產業用機器人包括例如：支持機械手之基 端側之第-支持部；支持第一支持部之第二支持部·及使 第二支持部上下移動之升降機構。於該情況下，第一支持 部例如係使機械手朝水平方向以直線狀移動之線性驅動 143383.doc 201020081 部，或者係將機械手之基端側保持為可旋動並且含有複數 個機械臂且朝水平方向伸縮之多關節機械臂部。 在本發明中’較好的是，傾斜修正用馬達及偏心旋轉構 件係女裝於第一支持部；安裝構件係安裝於第一支持部; 支點部係形成於第—支持部與第二支持部間之連結部。如 ，構成後’即使在機械手上搭載有搬送對象物時第—支持 部已產生撓曲’亦能利用傾斜修正機構來修正由該第—支 持部之撓曲所引起的搬送對象物之傾斜。 參 入，如此構成後，可修正第—支持部之傾斜，因此，即 使第-支持部已產生撓曲，亦能藉由與升降機構引起之第 二支持部之料動作的組合來對機械手之移祕跡進行微 調整。而且’與將傾斜修正用馬達及偏心旋轉構件安裝於 第-支持部上、將安裝構件絲於機械手上、並且將支點 部形成於第-支持部與機械手之連結部之㈣相比較，容 易確保用於配置傾斜修正機構之空間，故而可提高傾斜修 正機構之剛性。 另外’可使能成為塵埃產生部位之傾斜修正機構與機械❹ 手之間拉開距離’因此容易確保搭載於機械手上之搬送對 象物之清潔度。 在本發明中，較好的是，安裝構件係在機械手之移動方 向上’配置在與機械手之前端最遠離支點部時之機械手相 對於支點部之相反側。^此構成後，可防止產㈣機器人 之重心偏向於前端最遠離支點部時之機械手之前端側，從 而可使產業用機器人穩定。 H3383.doc -6 - 201020081 在本發明中，較好的是’產業用機器人包括控制部，其 對構成升降機構並作為用以使第二支持部進行上下移動2 驅動源之升降用馬達及傾斜修正用馬達進行控制，該控制 部係根據傾斜修正用馬達之旋轉量來驅動升降用馬達。 如此構成後，即使在因傾斜修正機構之傾斜修正而使搭 載於機械手上之搬送對象物之高度發生變化時，亦能藉由 升降機構引起之機械手之升降動作來調整搭載於機械手上 之搬送對象物之高度。因此，即使利用傾斜修正機構來修 正搬送對象物之傾斜，亦能使搭載於機械手上之搬送對象 物之高度保持固定。 [發明之效果] 如上所述，對於本發明之產業用機器人，即使搬送對象 物之重量有所變動，亦能適切地修正搭載於機械手上之搬 送對象物之傾斜。 【實施方式】 以下’根據隨附圖式來說明本發明之實施形態。 (產業用機器人之概略構成） 圖1係本發明之實施形態之產業用機器人丨之俯視圖。圖 2係從圖1之E-E方向表示產業用機器人】之示圖。圖3係從 圖1之F-F方向表示產業用機器人丨之示圖。 本實施形態之產業用機器人1(以下，稱為「機器人丨」） 係用於搬送特定之搬送對象物2的機器人。本實施形態之 搬送對象物2例如係曝光裝置所使用之昂貴的遮罩。因 此’以下將搬送對象物2表記為「遮罩2」。如圖1〜圖3所 143383.doc 201020081 支持機械手3 支持線性驅 移動之方式 不’該機11人1包括：搭«罩2之機械手3 ; 之基端側之作為第—支持部的線性驅動部4 ; 動部4之本體部5 ;將本體部$以能於水平方玲 加以支持的底座構件6。 體P5匕括.支持線性駆動部4並且作為能上下移動 第二支持部的支持構件7;用於將支持構件7以能於上下方 向移動之方式加以支持的柱狀構件8;構成本體部5之下端 部分並且能相對於底座構件6而水平移動之基台9、及將柱 狀構件8之下端加以固定並且能相對於基台9而回 構件10。 、機械手3包括用於搭載遮罩2之兩個爪部12。該機械手3 被線性驅動部4保持為以相對於線性驅動部4而能在圖！之 左右方向上進行相對移動。 又機器人1包括.使支持構件7進行上下移動之升降機 構16(參照圖4);及用於對搭載有遮罩2時之機械手3及線性 驅動部4之撓曲所引起的遮罩2之傾斜加以修正之傾斜修正 機構17。以下，對升降機構丨6、線性驅動部4及傾斜修正參 機構17之構成及其周邊部分之構成加以說明。 (升降機構及其周邊部分之構成） 圖4係用於說明圖丨所示之柱狀構件8及升降機構16之構 成的示圖。圖5係圖4之G部之放大圖。 升降機構16包括：用於使支持構件7進行上下移動之作 為驅動源的升降用馬達20;及連結升降用馬達20之滾珠螺 桿21 °滾珠螺桿21係將上下方向作為長度方向而安裝於柱 143383.doc 201020081 狀構件8上。具體而言，滾珠螺桿21係可旋轉地支持於柱 狀構件8之上下兩端侧所固定之兩個軸承22上。 而且，升降機構16包括螺合於滾珠螺桿21而進行上下移 動之螺母構件23。螺母構件23固定於支持構件7上。本實 施形態中，藉由滾珠螺桿21及螺母構件23·而使·支持構件7 於上下方向上移動。進而，升降機構16包括用於使支持構 件7停止之兩個升降制動機構24。如圖5所示，在升降用馬 達20之輸出軸上’固定有滑輪28，在滾珠螺桿21之上端， 固定有比滑輪28之直徑大的滑輪29。在滑輪28、29上，架 設有皮帶30。 (線性驅動部及其周邊部分之構成） 圖6(A)係用於從上方說明圖1所示之線性驅動部4之構成 之示圖’圖6(B)係用於從圖6(A)之H-H方向說明線性驅動 部4之構成之示圖。圖7係用於從圖6之j_j方向說明線性驅 動部4之構成之示圖。 線性驅動部4整體形成為細長之大致長方體狀，其中心 部分可旋動地支持於支持構件7。該線性驅動部4包括使機 械手3朝圖6之左右方向以直線狀移動之線性驅動機構24。 線性驅動機構24包括：線性驅動用馬達25(參照圖7)、 及連結線性驅動用馬達25之滾珠螺桿26。滾珠螺桿26係將 圖6之左右方向作為長度方向而固定於線性驅動部*之框架 27上。具體而言’滾珠螺桿26係可旋轉地支持於框架27之 左右兩端侧所固定之兩個軸承28上。 而且，線性驅動機構24包括：螺合於滾珠螺桿26並於水 143383.doc 201020081 平方向移動之螺母構件29;及固定螺母構件29之移動底座 3〇。在移動底座30之上表面，固定有機械手3之基端側之 底面。本實施形態中，藉由滾珠螺桿26及螺母構件29而使 固定於移動底座30上之機械手3於水平方向移動。又，在 移動底座30之底面上，固定有電纜拖鏈（cableveyor)3 1之一 端。此外，線性驅動機構24還包括用於使移動底座30停止 之制動機構、及用於在水平方向上導引移動底座3〇之導引 機構。 如圖7所示’在線性驅動用馬達25之輸出軸上，固定有❻ 滑輪32。又，在滾珠螺桿26之端部，固定有比滑輪32之直 徑大的滑輪33。在滑輪；32、33上，架設有皮帶34。 (傾斜修正機構及其周邊部分之構成） 圖8係圖2之K部之放大圖。圖9係圖8之M-M剖面之剖面 圖。圖10係圖8之N-N剖面之剖面圖。圖11係用於從圖1〇之 P-P方向說明連桿構件40之構成的示圖。圖12係用於說明 圖8所示之傾斜修正機構17之作用的示圖。 傾斜修正機構17配置於線性驅動部4與支持構件7之連結粵 部位。該傾斜修正機構17係藉由使機械手3及線性驅動部4 以形成於線性驅動部4與支持構件7之連結部上之支點部36 為旋動中心朝圖8之逆時針方向旋動，來調整機械手3及線 性驅動部4相對於圖8之左右方向之傾斜，以修正搭載於機 械手3上之遮罩2之傾斜。 如圖9、圖10所示，傾斜修正機構17包括：作為驅動源 之傾斜修正用馬達37 ;經由減速機38而連結於傾斜修正用 143383.doc 201020081 馬達37之輸出轴37a的作為偏心旋轉構件之偏心轴（曲柄 軸）39，下端側安裝於偏心軸39上之連桿構件4〇 ;及安裝 有連桿構件40之上端側之安裝構件41。 如圖8所示，支持部36係由固定於支持構件7之下端側的 支點軸43、及固定於線性驅動部4之框架27之底面上的支 點塊44所構成。支點軸43係以朝圖8之紙面近前側突出之 方式固定於支持構件7之下端側。在支點塊44上，形成有 • 軸承配置孔44a ’該軸承配置孔44a内配置有供支點轴43插 通之轴承（未圖示）。在配置於軸承配置孔44a内之軸承中插 入有支點軸43，以使支點塊44相對於支點轴43而可旋動。 傾斜修正用馬達37及減速機38固定於支持構件7之下端 側。而且’傾斜修正用馬達37及減速機38配置於圖8中之 支點部36之左方，並且配置於線性驅動部4之下方。本實 施形態之傾斜修正用馬達37係伺服馬達（脈波馬達）。另 外’本實施形態之減速機38係行星減速機，更具體而言， φ 其使用RV減速機。傾斜修正用馬達37之輸出轴37a連結於 減速機38之輸入側。 偏心轴39係以圖8之紙面垂直方向作為轴方向而配置。 該偏心轴39之一端（圖9之上端）連結於減速機38之輸出側。 又’偏心轴39之另一端侧可旋轉地支持於轴承46，該轴承 46係配置於構成支持構件7之轴支持構件45之内部。在軸 承46之兩端侧，配置有密封構件47。如圖9所示，在偏心 軸39之軸方向中間部，形成有圓柱狀之偏心部39a，該偏 心部39a係以從偏心轴39之旋轉中心轴CL1偏離距離X之軸 143383.doc •11 201020081 CL2作為中心。即，偏心量為χ之偏心部39a形成於偏心軸 · 39之軸方向中間部。再者，於圖8等中，省略軸支持構件 4 5等之圖示。 於連桿構件40之下端侧，形成有供偏心轴39之偏心部 39a插通之插通孔，連桿構件4〇之下端側係經由轴承48而 可旋動地安裝於偏心部39a之外周側。在軸承48之兩端 側’配置有密封構件49。又，在連桿構件40之上端側，形 成有供構成安裝構件41之下述的固定軸51插通之插通孔， 連桿構件40之上端側係經由轴承5〇而可旋動地安裝於固定糁 轴51上。 安裝構件41包括：插通連桿構件4〇之上端側之固定轴 5 1、及支持固定軸5 1之兩端侧之轴支持構件52。固定轴5 1 係被配置成其軸方向與偏心軸39之旋轉中心轴CL1平行。 轴支持構件52固定於線性驅動部4之框架27之底面上。具 體而言，軸支持構件52固定於框架27之底面之較圖8之支 點部36更左側。 本實施形態中，在圖2之線性驅動部4之右端側配置有機鲁 械手3時，機械手3之前端最遠離支點部刊。因此，在圖2 之左右方向上，支點部36係配置在當機械手3之前端最遠 離支點部36時之機械手3與安裝構件41之間。即，安裝構 件係在機械手3之移動方向上，相對於支點㈣而配置 成與前端最遠離支點部36時之機械手3為相反侧。 再者，本實施形態中，例如在嬙 列如在機械手3之前端最遠離支 點部36時’機械手3藉由升降播播〗^L <丨 符两邛陣機構16而上升，並於機械手3 143383.doc •12· 201020081 支^f遮罩2。又，在圖2之左右方向上，在前端最遠離 部36時機械手3之基端與支點部36間的距離比支點部 36與安裝構件41間的距離長。 如上所述構叙傾斜修正機構17巾，在傾斜修正用馬達 7旋轉時，經由減速機38而連結於輸出轴^之偏心_ 轉隨著偏轴39之旋轉，連桿構件4〇及安裝構件4】201020081 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an industrial robot that transports a specific object to be transported. [Prior Art] - Industrial robots that transport specific objects (workpieces) are widely used. An industrial robot including a robot for mounting a workpiece and two robot arms is known as such an industrial robot (see, for example, Patent Document 1). In the industrial robot described in Patent Document 1, the proximal end side of the manipulator is coupled to the front end side of the first arm, and the proximal end side of the first arm is coupled to the front end side of the second arm. Further, in the industrial robot described in Patent Document 1, the deflection correction mechanism for correcting the deflection generated by the robot, the first robot arm, and the second robot arm when the workpiece is mounted on the robot hand is used. It is disposed at the joint between the robot and the first arm. The deflection correcting mechanism includes a cam plate fixed to the first arm and a cam follower rotatably attached to the robot. In the industrial robot, the upper surface of the 'cam plate is formed such that its height position changes in the circumferential direction, and the cam follower is on the upper surface of the cam plate as the first arm and the second arm move. The movement of the robot, the first robot arm, and the second robot arm is corrected by moving while rolling in the circumferential direction. [Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-136442 [Draft of the Invention] [Problems to be Solved by the Invention] 143383.doc 201020081 However, in the industrial robot described in Patent Document i, since the first robot arm And the telescopic movement of the second arm, the cam follower moves while the upper surface of the cam plate rolls in the circumferential direction, thereby correcting the deflection caused by the robot or the like, and therefore the deflection caused by the robot or the like The correction value is determined according to the shape of the upper surface of the cam plate. In other words, in the industrial robot, if the cam plate is not replaced, the correction value of the deflection generated by the robot or the like is fixed. Therefore, when the weight of the workpiece mounted on the robot is changed, it is impossible to appropriately correct the bending caused by the machine & hand. Therefore, the object of the present invention is to provide an industrial robot capable of appropriately correcting the inclination of the object to be transported on the robot hand, even if the weight of the object to be conveyed is changed. [Mechanical Means for Solving the Problem] In order to solve the above problems, the industry of the present invention is characterized by: a robot that carries and transports an object; and a deflection of a robot when the object to be transported is mounted. Tilt correction mechanism for correcting the inclination of the object to be transported; tilt correction (4) ": tilting of the material drive (4): motor; eccentric rotation structure coupled to the output shaft of the tilt correction motor: mounted on the eccentric rotating member a link member; a mounting member; a side mounting member; and a fulcrum portion that is rotated up and down as the eccentric rotating member rotates with the link member to make the rhyme toward In the industrial robot of the present invention, the tilt correction mechanism utilizes the rotation of the eccentric rotating member coupled with the output shaft of the motor with 143383.doc 201020081. The mounting member that moves up and down with the = member causes the manipulator to move in the direction in which the inclination of the object to be conveyed changes with the fulcrum portion = the moving center. Therefore, (4) The amount of rotation of the heart rotating member (ie, the tilt correction: the amount of rotation of the horse:) to control the amount of movement of the mounting member in the up and down direction, thereby controlling the amount of rotation of the robot with the fulcrum portion as the center of rotation. In the present invention, the amount of rotation of the tilt correction motor is controlled based on the weight of the object to be conveyed, whereby the amount of rotation of the robot with the fulcrum portion as the center of rotation can be controlled, and the inclination of the object to be conveyed can be appropriately corrected. In the invention, even if the weight of the object to be conveyed is changed, the inclination of the object to be transported on the robot can be appropriately adjusted. In the present invention, it is preferable that the eccentric rotating member is an eccentric shaft. The end side of the link member is rotatably attached to the outer peripheral side of the eccentric shaft via a bearing, and the other end side of the link member is rotatably attached to the mounting member via a bearing. The sliding resistance of the connecting member to the mounting portion of the eccentric shaft and the mounting portion to the mounting member can suppress dust generation on both end sides of the link member. Therefore, it can be cleaned in a clean room or the like. In the environment, the industrial robot is used. In addition, since the sealing member is disposed on both end sides of the bearing to prevent dust from scattering, the dust scattering prevention structure can be simplified. In the present invention, the industrial robot includes, for example, a support robot. a first support portion on the proximal end side; a second support portion supporting the first support portion; and an elevating mechanism for moving the second support portion up and down. In this case, the first support portion is, for example, such that the robot is oriented in the horizontal direction. The linear drive linear drive 143383.doc 201020081, or the multi-joint mechanical arm portion that holds the base end side of the manipulator as a rotatable and which has a plurality of mechanical arms and is horizontally stretched and contracted. Preferably, the tilt correction motor and the eccentric rotating member are attached to the first support portion; the mounting member is attached to the first support portion; and the fulcrum portion is formed at a connection portion between the first support portion and the second support portion. For example, after the configuration, the tilting correction mechanism can correct the tilt of the object to be transported due to the deflection of the first support portion even when the object to be transported is mounted on the robot. . With this configuration, the inclination of the first support portion can be corrected. Therefore, even if the first support portion is deflected, the robot can be combined with the material action of the second support portion caused by the lifting mechanism. Move the secret to make minor adjustments. Further, in comparison with (4) in which the tilt correction motor and the eccentric rotation member are attached to the first support portion, the attachment member is screwed to the robot hand, and the fulcrum portion is formed in the connection portion between the first support portion and the robot, It is easy to ensure the space for arranging the tilt correction mechanism, so that the rigidity of the tilt correction mechanism can be improved. Further, the distance between the tilt correcting mechanism that can be a dust generating portion and the mechanical gripper can be made ', so that the cleanliness of the transporting object mounted on the robot can be easily ensured. In the present invention, it is preferable that the mounting member is disposed in the moving direction of the manipulator on the opposite side of the manipulator relative to the fulcrum portion when the front end of the manipulator is farthest from the fulcrum portion. ^This configuration prevents the center of gravity of the (4) robot from being biased toward the front end of the robot when the front end is farthest from the fulcrum, thereby stabilizing the industrial robot. H3383.doc -6 - 201020081 In the present invention, it is preferable that the industrial robot includes a control unit that functions as a lifting and lowering mechanism and a tilting motor for tilting the second support portion. The correction is controlled by a motor that drives the lifting motor in accordance with the amount of rotation of the tilt correction motor. According to this configuration, even when the height of the object to be transported on the robot is changed by the tilt correction of the tilt correcting mechanism, the robot can be adjusted and mounted on the robot by the lifting operation of the robot by the lifting mechanism. The height of the object to be transported. Therefore, even if the inclination of the object to be conveyed is corrected by the tilt correction mechanism, the height of the object to be transported on the robot can be kept constant. [Effects of the Invention] As described above, in the industrial robot of the present invention, even if the weight of the object to be transported varies, the inclination of the object to be transported on the robot can be appropriately corrected. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. (Schematic Configuration of Industrial Robot) FIG. 1 is a plan view of an industrial robot 实施 according to an embodiment of the present invention. Fig. 2 is a view showing an industrial robot from the E-E direction of Fig. 1; Fig. 3 is a view showing the industrial robot 从 from the F-F direction of Fig. 1. The industrial robot 1 (hereinafter referred to as "robot") of the present embodiment is a robot for transporting a specific object 2 to be transported. The object 2 to be transported in the present embodiment is, for example, an expensive mask used in an exposure apparatus. Therefore, the object 2 to be transported will be referred to as "mask 2". As shown in Fig. 1 to Fig. 3, 143383.doc 201020081 supports the manipulator 3 to support the linear drive to move the way. 'The machine 11 people 1 includes: take the cover 2 robot 2; the base end side as the first - support The linear drive unit 4; the main body portion 5 of the movable portion 4; and the base member 6 which is supported by the horizontal portion. The body P5 includes a support member 7 that supports the linear sway portion 4 and that can move the second support portion up and down, a columnar member 8 for supporting the support member 7 so as to be movable in the up and down direction, and a body portion 5 The lower end portion and the base 9 which is horizontally movable relative to the base member 6 and the lower end of the columnar member 8 are fixed and can be returned to the member 10 with respect to the base 9. The robot 3 includes two claw portions 12 for mounting the mask 2. The robot 3 is held by the linear drive unit 4 so as to be able to be in the figure with respect to the linear drive unit 4! Relative movement in the left and right direction. Further, the robot 1 includes an elevating mechanism 16 (see FIG. 4) for moving the support member 7 up and down, and a mask 2 for bending the robot 3 and the linear driving portion 4 when the mask 2 is mounted. The tilt correction mechanism 17 is corrected by tilting. Hereinafter, the configuration of the elevating mechanism 丨6, the linear drive unit 4, and the tilt correction reference mechanism 17 and the configuration of the peripheral portion thereof will be described. (Configuration of the elevating mechanism and its peripheral portion) Fig. 4 is a view for explaining the configuration of the columnar member 8 and the elevating mechanism 16 shown in Fig. Fig. 5 is an enlarged view of a portion G of Fig. 4. The elevating mechanism 16 includes a lifting/lowering motor 20 as a driving source for moving the supporting member 7 up and down, and a ball screw 21 that connects the elevating motor 20 to the ball screw 21, and the ball screw 21 is attached to the column 143383 in the vertical direction. .doc 201020081 on the member 8. Specifically, the ball screw 21 is rotatably supported on the two bearings 22 fixed to the upper and lower ends of the columnar member 8. Further, the elevating mechanism 16 includes a nut member 23 that is screwed to the ball screw 21 and moved up and down. The nut member 23 is fixed to the support member 7. In the present embodiment, the support member 7 is moved in the vertical direction by the ball screw 21 and the nut member 23·. Further, the elevating mechanism 16 includes two elevating brake mechanisms 24 for stopping the support member 7. As shown in Fig. 5, a pulley 28 is fixed to the output shaft of the lifting motor 20, and a pulley 29 larger than the diameter of the pulley 28 is fixed to the upper end of the ball screw 21. On the pulleys 28, 29, a belt 30 is provided. (Structure of linear drive unit and its peripheral portion) Fig. 6(A) is a view for explaining the configuration of the linear drive unit 4 shown in Fig. 1 from above. Fig. 6(B) is for use from Fig. 6 (A) The HH direction of the ) is a diagram illustrating the configuration of the linear drive unit 4. Fig. 7 is a view for explaining the configuration of the linear driving portion 4 from the j_j direction of Fig. 6. The linear drive portion 4 is formed in an elongated substantially rectangular parallelepiped shape, and its central portion is rotatably supported by the support member 7. The linear drive unit 4 includes a linear drive mechanism 24 that moves the robot hand 3 linearly in the left-right direction of Fig. 6. The linear drive mechanism 24 includes a linear drive motor 25 (see FIG. 7) and a ball screw 26 that connects the linear drive motor 25. The ball screw 26 is fixed to the frame 27 of the linear drive unit* in the longitudinal direction of Fig. 6 as a longitudinal direction. Specifically, the ball screw 26 is rotatably supported on the two bearings 28 fixed to the left and right end sides of the frame 27. Further, the linear drive mechanism 24 includes a nut member 29 screwed to the ball screw 26 and moved in the flat direction of the water 143383.doc 201020081, and a moving base 3〇 of the fixed nut member 29. On the upper surface of the moving base 30, the bottom surface of the base end side of the robot 3 is fixed. In the present embodiment, the robot hand 3 fixed to the movable base 30 is moved in the horizontal direction by the ball screw 26 and the nut member 29. Further, on the bottom surface of the moving base 30, one end of a cable driver 31 is fixed. Further, the linear drive mechanism 24 further includes a brake mechanism for stopping the moving base 30, and a guiding mechanism for guiding the moving base 3 in the horizontal direction. As shown in Fig. 7, the pulley 32 is fixed to the output shaft of the linear drive motor 25. Further, at the end of the ball screw 26, a pulley 33 having a larger diameter than the pulley 32 is fixed. On the pulleys 32, 33, a belt 34 is placed. (Structure of the tilt correction mechanism and its peripheral portion) Fig. 8 is an enlarged view of a portion K of Fig. 2. Figure 9 is a cross-sectional view of the M-M section of Figure 8. Figure 10 is a cross-sectional view taken along the line N-N of Figure 8. Fig. 11 is a view for explaining the configuration of the link member 40 from the P-P direction of Fig. 1A. Fig. 12 is a view for explaining the action of the tilt correction mechanism 17 shown in Fig. 8. The tilt correction mechanism 17 is disposed in the connection portion between the linear drive unit 4 and the support member 7. The tilt correction mechanism 17 rotates the manipulator 3 and the linear drive unit 4 counterclockwise in FIG. 8 by using the fulcrum portion 36 formed on the joint portion between the linear drive portion 4 and the support member 7 as a center of rotation. The inclination of the manipulator 3 and the linear drive unit 4 with respect to the left-right direction of FIG. 8 is adjusted to correct the inclination of the mask 2 mounted on the robot 3. As shown in FIGS. 9 and 10, the tilt correction mechanism 17 includes a tilt correction motor 37 as a drive source, and is connected to the output shaft 37a of the tilt correction 143383.doc 201020081 as an eccentric rotating member via the speed reducer 38. The eccentric shaft (crankshaft) 39 has a lower end side of a link member 4A attached to the eccentric shaft 39, and a mounting member 41 to which the upper end side of the link member 40 is attached. As shown in Fig. 8, the support portion 36 is composed of a fulcrum shaft 43 fixed to the lower end side of the support member 7, and a fulcrum block 44 fixed to the bottom surface of the frame 27 of the linear drive portion 4. The fulcrum shaft 43 is fixed to the lower end side of the support member 7 so as to protrude toward the front side of the paper surface of Fig. 8. A bearing arrangement hole 44a' is formed in the fulcrum block 44. A bearing (not shown) through which the fulcrum shaft 43 is inserted is disposed in the bearing arranging hole 44a. A fulcrum shaft 43 is inserted into a bearing disposed in the bearing arrangement hole 44a so that the fulcrum block 44 is rotatable relative to the fulcrum shaft 43. The tilt correction motor 37 and the speed reducer 38 are fixed to the lower end side of the support member 7. Further, the tilt correction motor 37 and the speed reducer 38 are disposed to the left of the fulcrum portion 36 in Fig. 8, and are disposed below the linear drive portion 4. The tilt correction motor 37 of the present embodiment is a servo motor (pulse motor). Further, the reduction gear 38 of the present embodiment is a planetary reducer, and more specifically, φ uses an RV reducer. The output shaft 37a of the tilt correction motor 37 is coupled to the input side of the reduction gear 38. The eccentric shaft 39 is disposed with the vertical direction of the paper surface of FIG. 8 as the axial direction. One end of the eccentric shaft 39 (the upper end of FIG. 9) is coupled to the output side of the speed reducer 38. Further, the other end side of the eccentric shaft 39 is rotatably supported by a bearing 46 which is disposed inside the shaft support member 45 constituting the support member 7. Sealing members 47 are disposed on both end sides of the bearing 46. As shown in Fig. 9, a cylindrical eccentric portion 39a is formed in the intermediate portion of the eccentric shaft 39 in the axial direction, and the eccentric portion 39a is offset from the rotation center axis CL1 of the eccentric shaft 39 by the distance X. 143383.doc • 11 201020081 CL2 as the center. In other words, the eccentric portion 39a whose eccentric amount is χ is formed at the intermediate portion in the axial direction of the eccentric shaft 39. In addition, in Fig. 8 and the like, illustration of the shaft supporting member 45 and the like is omitted. An insertion hole through which the eccentric portion 39a of the eccentric shaft 39 is inserted is formed on the lower end side of the link member 40, and the lower end side of the link member 4 is rotatably attached to the outer periphery of the eccentric portion 39a via the bearing 48. side. A sealing member 49 is disposed on both end sides of the bearing 48. Further, on the upper end side of the link member 40, an insertion hole through which the fixed shaft 51 constituting the attachment member 41 is inserted is formed, and the upper end side of the link member 40 is rotatably mounted via the bearing 5? On the fixed cymbal 51. The mounting member 41 includes a fixed shaft 51 that is inserted into the upper end side of the link member 4A, and a shaft support member 52 that supports both end sides of the fixed shaft 51. The fixed shaft 5 1 is arranged such that its axial direction is parallel to the central axis of rotation CL1 of the eccentric shaft 39. The shaft support member 52 is fixed to the bottom surface of the frame 27 of the linear drive portion 4. Specifically, the shaft support member 52 is fixed to the bottom surface of the frame 27 to the left side of the fulcrum portion 36 of Fig. 8. In the present embodiment, when the organic robot 3 is disposed on the right end side of the linear drive unit 4 of Fig. 2, the front end of the robot 3 is farthest from the fulcrum portion. Therefore, in the left-right direction of Fig. 2, the fulcrum portion 36 is disposed between the robot 3 and the mounting member 41 when the front end of the robot 3 is farthest from the fulcrum portion 36. That is, the mounting member is disposed on the opposite side of the manipulator 3 when the front end is farthest from the fulcrum portion 36 with respect to the fulcrum (four) in the moving direction of the manipulator 3. Further, in the present embodiment, for example, when the front end of the manipulator 3 is farthest from the fulcrum portion 36, the 'manipulator 3 is raised by the hoisting and lowering mechanism ^L < For the robot 3 143383.doc •12· 201020081 ^f mask 2. Further, in the left-right direction of Fig. 2, the distance between the base end of the manipulator 3 and the fulcrum portion 36 when the distal end is farthest from the portion 36 is longer than the distance between the fulcrum portion 36 and the attachment member 41. When the tilt correction motor 7 is rotated as described above, the tilt correction motor 7 is coupled to the eccentricity of the output shaft via the speed reducer 38, and the rotation of the off-axis 39, the link member 4 and the mounting member 4]
會如圖11之虛線所示而下降，或者如圖u之雙點劃線 所示而上升。 在連桿構件40及女裝構件41下降時，例如圖i2(A)所 不機械手3及線性驅動部4會以支點部36為旋動中心朝逆 時針方向旋動。另外’在連桿構件4〇及安裝構件41上升 時，例如圖12(B)所示，機械手3及線性驅動部4會以支點 部36為旋動中心朝順時針方向旋動。如此一來，藉由隨著 偏心軸39之旋轉而上下移動之連桿構件4〇及安裝構件4ι， 使得機械手3及線性驅動部4以支點部36為旋動中心朝著使 搭載於機械手3上之遮罩2之傾斜發生變化的方向旋動。 在機械手3上搭載有遮罩2時，機械手3及線性驅動部4會 因遮罩2之重量而撓曲成使遮罩2朝圖2之右下傾斜（即，遮 罩2之右端下降）。因此，本實施形態中，在機械手3上搭 載有遮罩2時，驅動偏心軸39之傾斜修正用馬達37會旋轉 成讓遮罩2成為水平。即，在機械手3上搭載有遮罩2時， 傾斜修正用馬達37係以讓連桿構件40及安裝構件41下降而 使機械手3及線性驅動部4以支點部36為旋動中心朝逆時針 方向旋動的方式進行旋轉。 143383.doc •13- 201020081 (控制部之構成） 13係圖i所示之產業用機器人i之控制部6〇及其相關部 分之方塊圖。再者’圖13中’圖示出與升降用馬達及傾 斜修正用馬達3 7之控制相關之控制部6〇的構成。 如圖13所示，作為與升降用馬達2〇及傾斜修正用馬達37 之控制相關之構成，控制部6〇包括〔控制升降用馬達之 升降用馬達控制部61、及控制傾斜修正用馬達”之傾斜修 正用馬達控制部62。 ^ 如上所述，在機械手3上搭載有遮罩2時，傾斜修正用馬參 達37係以使機械手3及線性㈣部4以支㈣⑽㈣& 朝逆時針方向旋動之方式進行旋轉。該傾斜修正用馬達π 之旋轉量藉由傾斜修正用馬達控制部62來控制。具體而 言’由於本實施形態之傾斜修正用馬達37係飼服馬達，因 此將特定脈波數之驅動信號從傾斜修正用馬達控制部㈣ 入至傾斜修正用馬達37,從而傾斜修正用馬達37響應該驅 動信號而旋轉特定量。再者，從傾斜修正用馬達控制部Μ 輸出之驅動信號中之脈波數係根據搭載於機械手^上之遮❹ 罩2之重量而設定。 此處’為了修正遮罩2之傾斜而使機械手3及線性驅動部 4以支點部36為旋動中心朝逆時針方向旋動時會有搭載 於機械手3上之遮罩2之高度發生變化的情況。當搭載於機 械手3上之遮罩2之高度發生變化時，存在收納有遮罩2之 收納部與搭載於機械手3上之遮罩2接觸之虞。 因此，本實施形態中，升降用馬達控制部Η根據傾斜修 I43383.doc •14- 201020081 正用馬達37之旋轉量來驅動升降用馬達2〇,以防止搭載於 機械手3上之遮罩2與遮罩2之收納部接觸。具體而言，在 從修正用馬達控制部62朝傾斜修正用馬達37發送驅動信號 時，將與從修正用馬達控制部62朝傾斜修正用馬達37輸出 之脈波數相關之資訊輸入至升降用馬達控制部61，根據該 資訊，升降用馬達控制部61驅動升降用馬達2〇，使機械手 3進行上下移動。 (本實施形態之主要效果） 如上所說明，本實施形態中，傾斜修正機構1 7係藉由隨 著連結於傾斜修正用馬達37之偏心軸39之旋轉而上下移動 之連桿構件40及安裝構件41，來使機械手3以支點部刊為 方疋動中心朝著使遮罩2之傾斜發生變化的方向旋動。因 此，控制傾斜修正用馬達37之旋轉量，以控制安裝構件Μ 之上下方向之移動量，藉此可控制以支點部36為旋動中心 之機械手3之旋動量。因此’本實施形態中，根據遮罩2之 〇 重量來控制傾斜修正用馬達37之旋轉量，藉此可控制以支 點部36為旋動中心之機械手3之旋動量。其結果為，於本 實施形態中，即使遮罩2之重量有所變動，亦能適切地修 正搭載於機械手3上之遮罩2之傾斜。 又，傾斜修正機構17對遮罩2之傾斜修正量係根據偏心 轴39之偏心量所決定，故而即使傾斜修正用馬達η產生誤 動作，機械手3及遮罩2亦不會過度傾斜。因此，即使傾斜 修正用馬達37產生誤動作，亦能防止遮罩2從機械手3 落。 143383.doc -15- 201020081 本實施形態中，連桿構件40之下端側係經由轴承48而可 旋動地女裝於偏心轴3 9之偏心部3 9 a之外周側，連桿構件 40之上端側係經由軸承50而可旋動地安裝於固定軸51上。 因此，可減輕連桿構件40之向偏心轴39之安裝部分及向安 裝構件41女裝部分的滑動阻力，從而可抑制於連桿構件4 〇 之兩端側產生塵埃。因此，能在無塵室等清潔之環境下使 用機器人1。 本實施形態中，偏心軸39之另一端側係由配置於轴支持 構件45内部之轴承46可旋轉地支持。又，連桿構件4〇之下 端側係經由軸承48而可旋動地安裝於偏心轴39之偏心部 39a之外周側。因此，根據在軸承邨、48之兩端側配置有 密封構件47、49之簡易的構成，即使在偏心轴39之另一端 側之支持部分或連桿構件40之向偏心轴39之安裝部分產生 有塵埃，亦能防止塵埃之飛散。 本實施形態中，傾斜修正用馬達37及偏心軸39係安裝於 支持構件7上，安裝構件41係固定於線性驅動部4之框架27 之底面上。又，支點部36係形成於線性驅動部4與支持構 件7之連結部。因此，在機械手3上搭載有遮罩2時即使由 於線性驅動部4所產生之撓曲而引起遮罩2傾斜，亦能利用 傾斜修正機構17來修正該傾斜。 又，由於可修正線性驅動部4整體之傾斜，故而即使線 性驅動部4已產生撓曲，亦能藉由與升降機構16引起之支 持構件7之升降動作的組合來對機械手3之移動軌跡進行微 調整。即，即使線性驅動部4已產生撓曲，亦能利用傾斜 143383.doc 201020081 L正機構17來修正線性驅動部4整體之傾斜，因此，經由 該修正動作與支持構件7之升降動作之組合，能對沿著線 &驅動以直線狀移動之機械手3之移動軌跡進行微調 整再者，可在機械手3沿線性驅動部4進行移動之狀態下 使倾斜t正機構17及升降機構16發揮作用以進行機械手3 之移動軌跡之微調整，亦可在機械手3相對於線性驅動部4 停止之狀態下使傾斜修正機構17及升降機構16發揮作用以 ^ 進行機械手3之移動軌跡之微調整。 又，與將傾斜修正用馬達37及偏心轴39安裝於線性驅動 部4上將女裝構件41固定於機械手3之底面上、並且將支 點部36形成於線性驅動部4與機械手3之連結部之情形相比 較，容易確保用於配置傾斜修正機構17之空間，故而可提 咼傾斜修正機構17之剛性。另外，可使能成為塵埃產生部 位之傾斜修正機構17與機械手3之間拉開距離，因此容易 確保搭載於機械手3上之遮罩2之清潔度。 φ 本實施形態中，安裝構件41係在機械手3之移動方向 上’相對於支點部36而配置在與前端最遠離支點部36時之 機械手3為相反側。因此，可防止機器人丨之重心偏向於前 端最遠離支點部3 6時之機械手3之前端側（圖2之右侧），從 而可使機器人1穩定。另外’在圖2之左右方向上，前端最 遠離支點部36時機械手3之基端與支點部36間的距離比支 點部36與安裝構件41間的距離長，因此，即使減小偏心軸 39之偏心量X，亦能增大搭載有機械手3之遮罩2之傾斜修 正量。 1433B3.doc -17- 201020081 本實施形態中’升降用馬達控制部61係根據傾斜修正用 馬達37之旋轉量來驅動升降用馬達2〇。因此，如上所述， 即使在藉由傾斜修正機構17對遮罩2之傾斜修正而使搭載 於機械手3上之遮罩2之高度有所改變時，亦能利用升降機 構16引起之機械手3之升降動作來調整遮罩2之高度，使搭 載於機械手3上之遮罩2之高度保持固定。因此，可防止例 如搭載於機械手3上之遮罩2與遮罩2之收納部接觸。 再者’本實施形態中，可藉由變更支點部36之配置位 置、安裝構件41之配置位置、及/或由線性驅動機構24引鲁 起之機械手3之移動量等來變更遮罩2之傾斜修正量。而 且’本實施形態中’可藉由使傾斜修正用馬達3 7連續旋 轉’來使遮罩2以支點部36為中心在上下方向上擺動。本 實施形態中，若使傾斜修正用馬達37朝一個方向連續旋 轉’則可使遮罩2以支點部3 6為中心在上下方向上擺動， 故而即便在遮罩2於上下方向上擺動之情況下，亦容易進 行傾斜修正用馬達37之控制。另外，即便使傾斜修正用馬 達37連續旋轉，遮罩2之擺動量亦為固定，故而能確保安魯 全性。進而，本實施形態中，藉由增大偏心轴39之偏心量 X以增大機械手3之旋動量，便可利用傾斜修正機構17將遮 罩2從遮罩2之收納部提起及將遮罩2載置於遮罩2之收納 部。 (其他實施形態） 上述實施形態為本發明之較佳實施形態之一例，但並不 限定於此，在不變更本發明主旨之範圍内可進行各種變形 143383.doc •18· 201020081 實施。 於上述實施形態中，傾斜修正用馬達37及偏心轴39係安 裝於支持構件7上，安裝構件41係固定於線性驅動部4之框 架27之底面上，並且支點部36係形成於線性驅動部4與支 持構件7之連結部。除此之外，例如亦可將傾斜修正用馬 達37及偏心軸39安裝於線性驅動部4上，將安裝構件“固 定於機械手3之底面上，並且將支點部36形成於線性驅動 部4與機械手3之連結部。 於上述實施形態中，安裝構件41係在機械手3之移動方 向上，相對於支點部36而配置在與前端最遠離支點部36時 之機械手3為相反側。除此之外，例如安裝構件4丨亦可在 機械手3之移動方向上，相對於支點部36而配置在與前端 最遠離支點部36時之機械手3為相同側。即，傾斜修正用 馬達37、偏心轴39、連桿構件40及安裝構件41亦可配置於 圖8之支點部36之右方。 ❹ 於上述實施形態中，在傾斜修正用馬達37之輸出轴37a 上經由減速機3 8而連結有偏心抽（曲柄轴）3 9。除此之外， 例如亦可在傾斜修正用馬達37之輸出轴37a上經由減速機 38而連結凸輪板（偏心凸輪）。 於上述實施形態中’連桿構件40之上端側係經由軸承5〇 而可旋動地安裝於固定軸51上。除此之外，例如亦可將經 由轴承而可旋動地支持於轴支持構件52之旋動軸固定在連 桿構件40之上端側。 於上述實施形態中’由線性驅動部4支持機械手3之基端 143383.doc -19- 201020081 朝水平方向伸缩1:可由包括複數個機械臂及關節部並 側。即，支持申縮之多關節機械臂部支持機械手3之基端 節機械臂部，，：3之基端側之第_支持部亦可為多關 基端側保持為可旋動’多關節機械臂部將機械手3之 :上述：施形態中，升降機構16包括滾珠螺桿η及螺母 牛方藉由該滾珠螺桿21及螺母構件23而使支持搆件7 二方向移動。除此之外，例如升降機構16亦可包括# '、齒輪，並藉由該齒條及小齒輪而使支持構件7於上 下:向移動。例如’亦可在柱狀構件8上固定齒條，並將 於該#條之小齒輪及驅動小齒輪之馬達安|於支持構 再者备機器人1為大型機器人時，亦可將嚙合於 齒條之複數個小齒輪安裝於支持構件7上，並且將與複數 個小齒輪各自進行各料結之複數個馬達絲於支持構件 7上。 於上述實施形態中，傾斜修正用馬達37係伺服馬達，但 傾斜修正用馬達37並不限定於伺服馬達，例如亦可為步進 馬達。另外，上述實施形態中，機器人丨所搬送之搬送對 象物為遮罩2，但搬送對象物亦可為液晶顯示器用玻璃基 板或半導體晶片等。 【圖式簡單說明】 圖1係本發明之實施形態之產業用機器人之俯視圖； 圖2係從圖1之E-E方向表示產業用機器人之示圖； 圖3係從圖1之F-F方向表示產業用機器人之示圖； 143383,d〇( •20· 201020081 圖4係用於說明圖1所示之柱狀構件及升降機構之構成之 示圖； 圖5係圖4之G部之放大圖； 圖6(A)係用於從上表面說明圖1所示之線性驅動部之構 成之示圖，圖6(B)係用於從圖6(A)之H-H方向說明線性驅 動部之構成之示圖； 圖7係用於從圖6之J-J方向說明線性驅動部之構成之示 圖， ® 圖8係圖2之K部之放大圖； 圖9係圖8之M-M剖面之剖面圖； 圖10係圖8之N-N剖面之剖面圖； 圖11係用於從圖1〇之p_p方向說明連桿構件之構成之示 圖， 圖12(A)、（B)係用於說明圖8所示之傾斜修正機構之作 用之示圖；及 Φ 圖13係圖1所示之產業用機器人之控制部及其相關部分 之方塊圖。 【主要元件符號說明】 1 機器人（產業用機器人） 2 遮罩（搬送對象物） 3 機械手 4 線性驅動部（第一支持部） 7 支持構件（第二支持部） 16 升降機構 143383.doc •21 · 傾斜修正機構 升降用馬達 支點部 傾斜修正用馬達 輸出轴 偏心軸（偏心旋轉構件） 連桿構件 安裝構件It will fall as indicated by the dotted line in Fig. 11, or as shown by the double-dotted line in Fig. u. When the link member 40 and the wearer member 41 are lowered, for example, the robot 3 and the linear drive unit 4 in Fig. i2(A) are rotated counterclockwise with the fulcrum portion 36 as a center of rotation. Further, when the link member 4A and the attachment member 41 are raised, for example, as shown in Fig. 12(B), the manipulator 3 and the linear drive unit 4 are rotated clockwise with the fulcrum portion 36 as a center of rotation. In this manner, the link member 4 and the attachment member 4i that move up and down with the rotation of the eccentric shaft 39 cause the robot 3 and the linear drive unit 4 to be mounted on the machine with the fulcrum portion 36 as a center of rotation. The direction in which the tilt of the mask 2 on the hand 3 changes is swung. When the mask 2 is mounted on the robot 3, the robot 3 and the linear drive unit 4 are deflected by the weight of the mask 2 so that the mask 2 is tilted to the lower right side of FIG. 2 (ie, the right end of the mask 2) decline). Therefore, in the present embodiment, when the mask 2 is placed on the robot 3, the tilt correction motor 37 that drives the eccentric shaft 39 is rotated so that the mask 2 is level. In other words, when the mask 2 is mounted on the robot 3, the tilt correction motor 37 lowers the link member 40 and the attachment member 41, and the robot 3 and the linear drive unit 4 are pivoted toward the fulcrum portion 36. Rotate in a counterclockwise direction. 143383.doc •13- 201020081 (Composition of Control Unit) 13 is a block diagram of the control unit 6〇 of the industrial robot i shown in Figure i and its related parts. Further, 'Fig. 13' shows the configuration of the control unit 6A related to the control of the lifting motor and the tilt correction motor 37. As shown in FIG. 13, the control unit 6 includes a control motor 61 for controlling the elevation motor, and a motor for controlling the inclination correction, as a configuration related to the control of the lift motor 2A and the tilt correction motor 37. The tilt correction motor control unit 62. As described above, when the mask 2 is mounted on the robot 3, the tilt correction horse is 37 so that the robot 3 and the linear (four) portion 4 are supported by (4) (10) (4) & The rotation correction motor π is rotated by the tilt correction motor control unit 62. Specifically, the tilt correction motor 37 of the present embodiment feeds the motor. The drive signal of the specific pulse wave number is input from the tilt correction motor control unit (4) to the tilt correction motor 37, and the tilt correction motor 37 is rotated by a specific amount in response to the drive signal. Further, the tilt correction motor control unit Μ The number of pulses in the output drive signal is set according to the weight of the concealer cover 2 mounted on the robot. Here, the robot 3 and the linear drive are used to correct the tilt of the mask 2. When the fulcrum portion 36 is rotated in the counterclockwise direction as the center of rotation, the height of the mask 2 mounted on the robot 3 may change. The height of the mask 2 mounted on the robot 3 changes. In this case, the storage unit in which the mask 2 is housed is in contact with the mask 2 mounted on the robot 3. Therefore, in the present embodiment, the elevation motor control unit ΗI43383.doc •14- 201020081 The lifting motor 2 is driven by the amount of rotation of the motor 37 to prevent the mask 2 mounted on the robot 3 from coming into contact with the housing portion of the mask 2. Specifically, the correction is performed from the correction motor control unit 62 toward the tilt. When the drive signal is transmitted by the motor 37, the information relating to the pulse wave number outputted from the correction motor control unit 62 to the tilt correction motor 37 is input to the elevation motor control unit 61, and the elevation motor control unit 61 is based on the information. The lift motor 2 is driven to move the robot 3 up and down. (Main effect of the present embodiment) As described above, in the present embodiment, the tilt correction mechanism 17 is connected to the tilt correction motor 37. Partial The link member 40 and the attachment member 41 that move up and down by the rotation of the shaft 39 cause the robot 3 to rotate in a direction in which the inclination of the mask 2 is changed by the fulcrum portion as a square swaying center. By correcting the amount of rotation of the motor 37 to control the amount of movement of the mounting member 之上 in the up and down direction, the amount of rotation of the robot 3 with the fulcrum portion 36 as the center of rotation can be controlled. Therefore, in the present embodiment, according to the mask The amount of rotation of the tilt correction motor 37 is controlled by the weight of 2, whereby the amount of rotation of the robot 3 with the fulcrum portion 36 as the center of rotation can be controlled. As a result, in the present embodiment, even the mask 2 When the weight is changed, the inclination of the mask 2 mounted on the robot 3 can be appropriately corrected. Further, the amount of tilt correction of the tilt correction mechanism 17 to the mask 2 is determined based on the amount of eccentricity of the eccentric shaft 39, so that even The tilt correction motor η malfunctions, and the robot 3 and the mask 2 are not excessively tilted. Therefore, even if the tilt correction motor 37 malfunctions, the mask 2 can be prevented from falling from the robot 3. 143383.doc -15- 201020081 In the present embodiment, the lower end side of the link member 40 is rotatably attached to the outer peripheral side of the eccentric portion 39a of the eccentric shaft 39 via the bearing 48, and the link member 40 The upper end side is rotatably attached to the fixed shaft 51 via a bearing 50. Therefore, the mounting portion of the link member 40 to the eccentric shaft 39 and the sliding resistance to the wearing portion of the mounting member 41 can be alleviated, so that generation of dust on both end sides of the link member 4 can be suppressed. Therefore, the robot 1 can be used in a clean environment such as a clean room. In the present embodiment, the other end side of the eccentric shaft 39 is rotatably supported by a bearing 46 disposed inside the shaft support member 45. Further, the lower end side of the link member 4 is rotatably attached to the outer peripheral side of the eccentric portion 39a of the eccentric shaft 39 via the bearing 48. Therefore, according to the simple configuration in which the seal members 47 and 49 are disposed on both end sides of the bearing villages and 48, even the support portion on the other end side of the eccentric shaft 39 or the attachment portion of the link member 40 to the eccentric shaft 39 is generated. Dust can also prevent dust from scattering. In the present embodiment, the tilt correction motor 37 and the eccentric shaft 39 are attached to the support member 7, and the attachment member 41 is fixed to the bottom surface of the frame 27 of the linear drive unit 4. Further, the fulcrum portion 36 is formed in a joint portion between the linear drive portion 4 and the support member 7. Therefore, when the mask 2 is mounted on the robot 3, even if the mask 2 is tilted due to the deflection caused by the linear drive unit 4, the tilt correction mechanism 17 can correct the tilt. Further, since the inclination of the entire linear drive unit 4 can be corrected, even if the linear drive unit 4 is deflected, the movement of the robot 3 can be performed by the combination of the lifting operation of the support member 7 by the elevating mechanism 16. Make minor adjustments. That is, even if the linear drive unit 4 has been deflected, the inclination of the entire linear drive unit 4 can be corrected by the inclination 143383.doc 201020081 L positive mechanism 17, and therefore, by the combination of the correction operation and the lifting operation of the support member 7, The movement trajectory of the robot 3 that moves linearly along the line & drive can be finely adjusted, and the tilting positive mechanism 17 and the lifting mechanism 16 can be made while the robot 3 is moved along the linear drive unit 4. The tilting correction mechanism 17 and the lifting mechanism 16 are activated to perform the movement of the robot 3 in a state where the movement of the robot 3 is slightly adjusted, and the robot 3 is stopped with respect to the linear driving unit 4. Micro adjustment. Further, the tilt correction motor 37 and the eccentric shaft 39 are attached to the linear drive unit 4, and the wearer member 41 is fixed to the bottom surface of the robot 3, and the fulcrum portion 36 is formed in the linear drive unit 4 and the robot 3. In comparison with the case of the joint portion, it is easy to secure the space for arranging the tilt correction mechanism 17, so that the rigidity of the tilt correction mechanism 17 can be improved. Further, since the distance between the tilt correcting mechanism 17 which can be a dust generating portion and the robot 3 can be made small, it is easy to ensure the cleanliness of the mask 2 mounted on the robot 3. φ In the present embodiment, the attachment member 41 is disposed on the opposite side of the robot 3 when the distal end is farthest from the fulcrum portion 36 with respect to the fulcrum portion 36 in the moving direction of the manipulator 3. Therefore, it is possible to prevent the center of gravity of the robot from being biased toward the front end side of the robot 3 (the right side in Fig. 2) when the front end is farthest from the fulcrum portion 36, so that the robot 1 can be stabilized. Further, in the left-right direction of FIG. 2, the distance between the base end of the robot 3 and the fulcrum portion 36 when the front end is farthest from the fulcrum portion 36 is longer than the distance between the fulcrum portion 36 and the mounting member 41, and therefore, even if the eccentric shaft is reduced The eccentricity X of 39 can also increase the tilt correction amount of the mask 2 on which the robot 3 is mounted. 1433B3.doc -17-201020081 In the present embodiment, the "elevating motor control unit 61" drives the lifting motor 2A in accordance with the amount of rotation of the tilt correction motor 37. Therefore, as described above, even when the tilt of the mask 2 is corrected by the tilt correction mechanism 17, the height of the mask 2 mounted on the robot 3 is changed, and the robot can be caused by the lift mechanism 16. The height of the mask 2 is adjusted by the lifting operation of 3, and the height of the mask 2 mounted on the robot 3 is kept constant. Therefore, it is possible to prevent the mask 2 mounted on the robot 3 from coming into contact with the accommodating portion of the mask 2, for example. In the present embodiment, the mask 2 can be changed by changing the arrangement position of the fulcrum portion 36, the arrangement position of the attachment member 41, and/or the amount of movement of the robot 3 by the linear drive mechanism 24. The amount of tilt correction. Further, in the present embodiment, the mask 2 can be swung in the vertical direction around the fulcrum portion 36 by continuously rotating the tilt correction motor 37. In the present embodiment, when the tilt correction motor 37 is continuously rotated in one direction, the mask 2 can be swung in the vertical direction around the fulcrum portion 36, so that the mask 2 is swung in the vertical direction. Next, the control of the tilt correction motor 37 is also easy. Further, even if the tilt correction motor 37 is continuously rotated, the amount of swing of the mask 2 is fixed, so that the integrity can be ensured. Further, in the present embodiment, by increasing the eccentric amount X of the eccentric shaft 39 to increase the amount of rotation of the manipulator 3, the tilt correction mechanism 17 can be used to lift the mask 2 from the housing portion of the mask 2 and cover it. The cover 2 is placed in the housing portion of the mask 2. (Other Embodiments) The above-described embodiments are examples of preferred embodiments of the present invention, but are not limited thereto, and various modifications can be made without departing from the scope of the present invention. 143383.doc • 18· 201020081 Implementation. In the above embodiment, the tilt correction motor 37 and the eccentric shaft 39 are attached to the support member 7, the attachment member 41 is fixed to the bottom surface of the frame 27 of the linear drive portion 4, and the fulcrum portion 36 is formed in the linear drive portion. 4 is a joint portion with the support member 7. In addition to this, for example, the tilt correction motor 37 and the eccentric shaft 39 may be attached to the linear drive unit 4, the mounting member may be "fixed to the bottom surface of the robot 3, and the fulcrum portion 36 may be formed in the linear drive portion 4. In the above embodiment, the attachment member 41 is disposed in the moving direction of the robot 3, and is disposed on the opposite side of the robot 3 when the distal end is farthest from the fulcrum portion 36 with respect to the fulcrum portion 36. In addition, for example, the attachment member 4 may be disposed on the same side of the robot 3 as the distal end of the fulcrum portion 36 in the moving direction of the robot 3 with respect to the fulcrum portion 36. That is, the tilt correction The motor 37, the eccentric shaft 39, the link member 40, and the attachment member 41 may be disposed to the right of the fulcrum portion 36 of Fig. 8. In the above embodiment, the output shaft 37a of the tilt correction motor 37 is decelerated. In addition, the cam plate (eccentric cam) may be connected to the output shaft 37a of the tilt correction motor 37 via the speed reducer 38, for example, in the above-described implementation. 'link member The upper end side of the 40 is rotatably attached to the fixed shaft 51 via a bearing 5A. Alternatively, for example, a rotary shaft that is rotatably supported by the shaft support member 52 via a bearing may be fixed to the joint. The upper end side of the rod member 40. In the above embodiment, the base end 143383.doc -19-201020081 of the manipulator 3 is supported by the linear drive unit 4 to expand and contract in the horizontal direction by one side: a plurality of robot arms and joint portions may be included. That is, the multi-joint mechanical arm supporting the contraction supports the base end arm of the manipulator 3, and the _support portion of the base end side of the 3 can also be kept rotatable for the multi-base end side. The joint arm portion of the robot 3: In the above-described embodiment, the lift mechanism 16 includes the ball screw η and the nut cow, and the ball screw 21 and the nut member 23 move the support member 7 in both directions. In addition, for example, the lifting mechanism 16 may also include a gear, and the support member 7 is moved up and down by the rack and pinion. For example, the rack may be fixed on the column member 8 and The pinion of the ## and the motor of the drive pinion| When the robot 1 is a large robot, a plurality of pinion gears meshed with the rack gear may be mounted on the support member 7, and a plurality of motor wires each of which is coupled to the plurality of pinion gears may be connected to the support member 7 In the above embodiment, the tilt correction motor 37 is a servo motor, but the tilt correction motor 37 is not limited to the servo motor, and may be, for example, a stepping motor. In the above embodiment, the robot is transported and transported. The target object is the mask 2, but the object to be transported may be a glass substrate for a liquid crystal display, a semiconductor wafer, or the like. [Brief Description of the Drawings] Fig. 1 is a plan view of an industrial robot according to an embodiment of the present invention; The EE direction of 1 indicates a diagram of an industrial robot; FIG. 3 is a diagram showing an industrial robot from the FF direction of FIG. 1; 143383, d〇 (•20· 201020081 FIG. 4 is a diagram for explaining the column shown in FIG. FIG. 5 is an enlarged view of a portion G of FIG. 4; FIG. 6(A) is a view for explaining the configuration of the linear driving portion shown in FIG. 1 from the upper surface, 6(B) is used FIG. 7 is a view for explaining the configuration of the linear drive unit from the HH direction of FIG. 6(A); FIG. 7 is a view for explaining the configuration of the linear drive unit from the JJ direction of FIG. 6, and FIG. 8 is the K portion of FIG. FIG. 9 is a cross-sectional view of the MM cross section of FIG. 8; FIG. 10 is a cross-sectional view of the NN cross section of FIG. 8; FIG. 11 is a view for explaining the configuration of the link member from the p_p direction of FIG. 12(A) and 12(B) are diagrams for explaining the action of the tilt correction mechanism shown in Fig. 8; and Fig. 13 is a block diagram of the control unit of the industrial robot shown in Fig. 1 and its related parts. . [Description of main component symbols] 1 Robot (industrial robot) 2 Mask (transport object) 3 Robot 4 Linear drive unit (first support unit) 7 Support member (second support unit) 16 Lifting mechanism 143383.doc • 21 · Tilt correction mechanism lifting motor fulcrum part tilt correction motor output shaft eccentric shaft (eccentric rotation member) Link member mounting member
軸承 轴承 控制部Bearing bearing control department
-22--twenty two-