TW200951448A - Probe card provided with contact units, and method of exchanging contact units - Google Patents

Probe card provided with contact units, and method of exchanging contact units

Info

Publication number
TW200951448A
TW200951448A TW98106979A TW98106979A TW200951448A TW 200951448 A TW200951448 A TW 200951448A TW 98106979 A TW98106979 A TW 98106979A TW 98106979 A TW98106979 A TW 98106979A TW 200951448 A TW200951448 A TW 200951448A
Authority
TW
Taiwan
Prior art keywords
contact units
probe card
card provided
exchanging
units
Prior art date
Application number
TW98106979A
Other languages
English (en)
Inventor
Yuji Nakamura
Original Assignee
Yamaichi Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaichi Electronics Co Ltd filed Critical Yamaichi Electronics Co Ltd
Publication of TW200951448A publication Critical patent/TW200951448A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW98106979A 2008-03-07 2009-03-04 Probe card provided with contact units, and method of exchanging contact units TW200951448A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008058502A JP2009216466A (ja) 2008-03-07 2008-03-07 接触子ユニットを備えるプローブカード、および、接触子ユニットの交換方法

Publications (1)

Publication Number Publication Date
TW200951448A true TW200951448A (en) 2009-12-16

Family

ID=41055952

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98106979A TW200951448A (en) 2008-03-07 2009-03-04 Probe card provided with contact units, and method of exchanging contact units

Country Status (3)

Country Link
JP (1) JP2009216466A (zh)
TW (1) TW200951448A (zh)
WO (1) WO2009110392A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI583959B (zh) * 2011-10-17 2017-05-21 Tokyo Electron Ltd Contact terminals and probe cards

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5320309B2 (ja) * 2010-01-15 2013-10-23 日本電子材料株式会社 プローブカード
JP6220596B2 (ja) * 2013-08-01 2017-10-25 東京エレクトロン株式会社 プローバ
KR102228317B1 (ko) * 2020-10-26 2021-03-16 주식회사 프로이천 웨이퍼 테스트용 프로브 카드

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690185B1 (en) * 1997-01-15 2004-02-10 Formfactor, Inc. Large contactor with multiple, aligned contactor units
JP2001119136A (ja) * 1999-10-18 2001-04-27 Nec Corp Ｓｍｔリペア方法および装置
JP2003202350A (ja) * 2001-12-28 2003-07-18 Tokyo Cathode Laboratory Co Ltd プローブカード用探針、プローブカード用探針ユニット、プローブカード及びそれらの製造方法
JP2004138452A (ja) * 2002-10-16 2004-05-13 Japan Electronic Materials Corp プローブカード

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI583959B (zh) * 2011-10-17 2017-05-21 Tokyo Electron Ltd Contact terminals and probe cards

Also Published As

Publication number Publication date
WO2009110392A1 (ja) 2009-09-11
JP2009216466A (ja) 2009-09-24

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