TW200946245A - Tape attaching apparatus, liquid material applying system, and masking tape - Google Patents

Abstract

A second masking tape is laminated on a first masking tape. A first lower edge of the first masking tape is located on a liquid applying-inhibited area, and the first lower edge is apart from the border between the liquid applying-inhibited area and a liquid applying-required area. An eaves portion of a second masking tape, the eaves portion protruding out to the outside of the first masking tape, covers an exposed area in the liquid applying-inhibited area. With this structure, an organic EL liquid ejected onto the substrate is prevented to adhering on the exposed area of the liquid applying-inhibited area and formation of a meniscus caused by adhesion of the organic EL liquid on a side surface of the first masking tape is prevented. As a result, it is possible to prevent occurrence of meniscus on the border between the liquid applying-inhibited area and the liquid applying-required area easily.

Description

4 200946245 VI. Description of the Invention: [Technical Field] The present invention relates to a tape sticking device for adhering a non-coated region on a main surface of a substrate to a masking tape for preventing a fluid material from adhering to a non-coated region. The coating system with an adhesive device, which applies a fluid material to the substrate, and a masking tape which is adhered to the non-coated region on the main surface of the substrate and prevents the fluid material from adhering to the non-coated region. [Prior Art] The development of an organic EL display device using an organic EL (ElectrOl Lmninescence) material, for example, in the manufacture of an active matrix driven organic EL display device using a polymer organic EL material, The glass substrate (hereinafter referred to as "substrate") is sequentially applied: TFT (Thin Film Transistor) circuit formation, anode IT (Indium Tin)

Oxide, indium tin oxide) formation of an electrode, formation of a partition wall, application of a fluid material containing a hole transporting material (hereinafter referred to as "hole transport liquid"), formation of a hole transport layer by heat treatment by twisting The application of a fluid material (hereinafter referred to as "organic EL liquid") containing an organic EL material, formation of an organic EL layer by heat treatment, formation of a cathode, and sealing by an insulating film. In the manufacture of an organic EL display device, one of the devices for applying a hole transporting liquid or an organic EL or a liquid to a substrate is known as a Japanese Patent Laid-Open Publication No. 2004-111073 (Document No.) and a special opening. In the case of a plurality of nozzles for continuously discharging a fluid material, the substrate is moved relative to the sub-scanning direction in the main scanning direction and the sub-scanning direction, and the fluidity is applied to the substrate in a stripe shape as shown in the publication No. 4_89771 (Document 2). Material device. On the surface of the substrate for the organic EL display device, a region where the group driver circuit is provided or a seal coat is applied around the application region (ie, the light-emitting region) of the fluid material such as the hole transport liquid or the organic EL liquid. The area necessary for the cloth area - the domain. In the production of the organic EL display device, in the step of forming the hole transport layer or the organic anal layer, a region surrounding the coated regions (hereinafter referred to as "non-coated cloth region") may have a flowable pure material. It is a secret that if the step is performed in the state in which the fluid material is attached, the electrode characteristics may deteriorate, and the sealing may be poor. Therefore, it is necessary to prevent the fluid material from adhering to the non-coated region on the substrate. Japanese Laid-Open Patent Publication No. Hei. No. 2-216414 (Document 3) discloses a technique of selectively applying a coating liquid in a component forming region by adhering a masking tape to an uncoated region on a substrate for an organic EL device. In the method for producing an organic EL device according to Document 3, by making the contact angle with the coating liquid on the side surface of the masking tape larger than the contact angle between the substrate and the coating, it is possible to suppress the coating liquid on the side surface of the masking tape. When the surface is formed, it is possible to prevent the shortage of the cathode film thickness which may occur in the subsequent step due to the protrusion of the f liquid surface. However, in the method for producing an organic EL device described in Document 3, since the material that can be used as the masking tape is limited, the cost of the masking tape is limited to be limited because the substrate is hydrophilized before the coating liquid is applied. (For example, solvent cleaning, ultraviolet irradiation, and electricity irradiation), the production efficiency of the 098108393 200946245 el component of the organic EL element is also limited. The manufacturing steps are complicated and organic. [Invention] The present invention is directed to a tape sticking device for adhering a non-coating region on a main surface of a substrate to prevent the flow of the material from being attached to the uncoated region. The tape sticking device is provided with a base holding portion listening mechanism, and the county (four) holding portion holds the substrate, and the bonding mechanism is such that the lower edge of the lower edge of the i-th shielding tape is located on the main surface of the substrate. a boundary between the 钸 region and the coating region is further located at an inner side of the non-coated region, and the ninth masking tape is adhered to the uncoated region in parallel with the boundary, so as to be the lower edge of the second masking tape 2, the lower edge is located further outward than the upper edge of the first masking strip above the lower edge of the second corner, and the second masking strip is adhered to the upper surface of the first masking strip in parallel with the boundary A part of the second masking tape that is separated from the main surface of the substrate from the β-thickness tape toward the outside is provided as a crotch portion on the substrate. According to the invention, in the substrate to which the masking tape for preventing the fluid material from adhering to the non-coated region is adhered, the second masking tape leaving the region is removed from the region of the uncoated region exposed from the first masking strip. The crotch portion is covered, and the meniscus at the boundary between the non-coated region and the coated region can be easily prevented. In a preferred embodiment of the present invention, the side of the second masking tape is substantially parallel to the main surface of the substrate. In another preferred embodiment of the present invention, 'the first masking tape is 098108393 6 200946245 attached to the non-coated region, and the lower edge of the first ι mask is located in the uncoated region. And the second masking strip is adhered to the upper side of the first masking strip to the inner side of the non-coating region, and the third masking region of the other coating region is flush with the boundary of the first masking strip (2) the second lower edge of the masking tape is located further outward than the upper edge of the first masking tape located above the edge of the other lower working edge, and protrudes from the first masking tape toward the outer side and simultaneously A part of the second masking tape that is separated from the substrate and has a main surface is provided on the substrate as another portion. More preferably, each of the i-th shielding tape and the second shielding tape is included. The line substantially overlaps the centerline of the non-coated area described above. More preferably, the width of the second masking τ is equal to the width of the non-coated region. According to still another preferred embodiment of the present invention, the adhesion of the second masking tape to the first masking tape is greater than the adhesion of the first masking tape to the substrate. Thereby, the first masking tape and the second masking tape can be easily peeled off. In another preferred embodiment, the adhesive mechanism includes: an ith adhesive mechanism that adheres the first mask to the main surface of the substrate; and adheres the second mask to the second mask a second adhesive mechanism of the upper surface of the first masking tape on the main surface of the substrate; and the first adhesive bonding mechanism includes a first tape supply portion that winds up the first masking tape; a first gripping portion of the first masking tape that is taken up from the first tape supply unit toward the non-coating region; and the second bonding mechanism is provided with the second tape that is wound out of the second masking tape a tape supply unit; and a second pressing portion that is pressed from the second tape supply portion of the 098108393 7 200946245 2 masking tape to the first masking tape that has been adhered to the non-coating region, ·The above! The pasting mechanism and the second meaning mechanism are provided with a moving mechanism for causing the substrate to face the uncoated region in a state where the i-th shielding tape is pressed by the ith urging portion The moving direction in which the above-mentioned boundaries are parallel is relatively moved to the first pressing portion, and the above-mentioned first! The masking tape is sequentially adhered along the boundary, and while the second masking tape is pressed by the second pressing portion, the substrate is moved relative to the second pressing portion in the moving direction. The second masking tape is sequentially adhered to the boundary along the boundary. According to still another preferred embodiment of the present invention, the adhesion mechanism includes: a first tape supply unit, a second tape supply unit, a tape bonding unit, a gripping unit, and a moving mechanism 'the first tape supply unit roll The second i-ray mask is provided, and the second tape supply unit winds out the second rhythm band; and the (four) warfare is a portion (four) of the second masking tape that is unwound from the first tape supply unit to the second mask The urging portion is configured such that the ith shielding tape and the (10) sash (four) position are attached to the non-coated region under the substrate, and the moving mechanism is The i-th shielding tape and the second shielding tape are moved in the (4) state by the pressing portion, and the substrate is relatively moved toward the pressing portion in a moving direction parallel to the boundary of the non-coated region. 1 The masking tape and the second masking tape are sequentially adhered along the boundary. The tape-attaching device of the present invention is provided with an ith tape 098108393 8 200946245, a second tape bonding device, and a conveying mechanism, wherein the j-th tape bonding device includes a first substrate holding portion that holds the substrate And the first lower edge which is an edge of the lower surface of the i-th shielding tape is located on the inner side of the non-coating region from the boundary between the non-coating region and the coating region on the main surface of the substrate, and the above-mentioned first a mask-bonding mechanism that is adhered to the uncoated region in parallel with the boundary, the second tape bonding device includes a second substrate holding portion that holds the substrate, and an edge that serves as a lower edge of the second masking tape The second lower edge is located further outward than the upper edge of the first mask above the first lower edge, and the second mask is adhered to the first mask in parallel with the boundary In the above, the second masking tape that protrudes from the first masking strip toward the outer side and simultaneously away from the main surface of the substrate is used as a second adhesive layer provided on the substrate. Structure 'means the transfer line to the substrate 1 is unloaded from the first adhesive tape to the apparatus while carrying the second tape pasting means. The invention relates to a money system for applying a fluid material (4) to a substrate, and a masking tape for preventing a fluid material from adhering to the non-coating region by adhering to a non-coating region on the main surface of the substrate. The above and other objects, features, aspects and advantages of the present invention will become more apparent from the Detailed Description. [Embodiment] Fig. 1 is a view showing a configuration of a coating system 8 with an adhesive device according to a first embodiment of the present invention. The coating system 8 is a system in which a glass substrate (hereinafter referred to as "substrate") is used to apply a cooling material containing a pixel forming material to a flat display device 098108393 9 200946245 to which a mask tape is attached. In the present embodiment, the coating system 8 is applied to an active matrix-driven organic EL (Electro Luminescence) substrate, and a fluid material containing an EL material is applied (hereinafter referred to as "organic EL". liquid"). The organic EL liquid contains an organic solvent such as diphenylbenzene or 2-phenylene in addition to the organic EL material (in the present embodiment, xylene is shown in Fig. 2 as a masking tape as a belt-shaped shielding member). A plan view of the substrate 9. In Fig. 2, a region (hereinafter referred to as "coating region") 91 to which the organic EL liquid is applied to the coating line 8 (refer to 1) is added with parallel oblique lines. In the present embodiment, on the substrate 9. Four coating regions 91 are provided, and four substrates for an organic EL display device are produced from the ruthenium substrate 9. The lattice-like regions 92 around the four application regions 91 are used for the group of the driving circuit or the insulating film in the subsequent step. Since it is a seal or the like, it is an area where the organic liquid is not applied, hereinafter referred to as "non-coated area 92." The mask 1 is attached (+Z) to the (+Z) side of the substrate 9 as shown in FIG. The non-coating area 92' on the main surface 90 prevents the organic liquid from adhering to the non-coating area 92. As shown in Fig. 1, the coating system 8 is provided with a tape attaching device 2, a coating device 3, and a tape stripping device. 4. The tape application device 2 adheres the mask tape (refer to FIG. 2) to the non-coating region 92 on the substrate 9, and the coating The apparatus 3 continuously ejects the organic liquid from the nozzle toward the substrate 9 to which the masking tape 1 is adhered, and relatively moves the nozzle to the substrate 9, and applies an organic EL liquid to the region including the masking tape 1. The peeling device 4 peels the masking tape 1 from the substrate 9 coated with the organic liquid 098108393 10 200946245. The coating system 8 is between the tape applying device 2 and the coating device 3, and the coating device 3 and the tape peeling device 4 Further, the fixed transfer robot 81 is further provided. In the coating system 8, the two transfer robots 81 are substrate transfer mechanisms for sequentially transporting the substrate 9 toward the tape attaching device 2, the coating device 3, and the tape peeling device 4. Fig. 3 is a cross-sectional view showing a portion of the masking tape 1 and the substrate 9 shown in Fig. 2 taken at a direction AA in Fig. 2 toward the longitudinal direction of the masking tape 1 (i.e., the Y direction in Fig. 2). As shown in FIG. 3, the masking tape 1 is provided with a first masking tape 11 that is directly adhered to the substrate 9, and a first masking tape 11 that is adhered to the upper surface 1111 of the first masking tape 11 (that is, a surface on the (+Z) side in FIG. 3). The second masking tape 12. As the second masking tape 12, No. 31B manufactured by Nitto Denko Corporation can be used. The first masking tape 11 is provided with a tape substrate Π1 and an adhesive layer 112 formed on the lower surface 1112 of the substrate 111 (i.e., the surface on the (-Z) side), and the second masking tape 12 is also provided. a strip-shaped substrate 121 and an adhesive layer 122 formed on the lower surface 1212 of the substrate 121 (ie, the surface on the (_z) side). In the masking tape 1, the first masking tape u and the second masking tape 12 are along the edge The entire length in the longitudinal direction has the same shape as the cross section shown in Fig. 3. The base materials 111 and 121 are formed of a plastic film, and are used as a substrate 丨. The transfer film of -121 is, for example, polyethylene, polypropylene, or the like. Olefin film; poly-p-phthalate, polybutylene terephthalate, etc.; i-type film such as nylon; and cellulose triacetate film, polyaniline film, And the plastic film may also be any one of 098108393 200946245 without stretching film and extending (uniaxially extending or biaxially extending) film. In the present embodiment, the base material 111 is T100N38 which is produced as a polyester film by Mitsubishi Chemical Polyester Film Co., Ltd., and the base material 121 is also a polyester film. It is also possible to perform the detachment treatment on the upper surface 1111 of the base material 111 (that is, the upper surface of the first shielding tape U). However, from the viewpoint of increasing the adhesion of the second shielding tape 12 to the first shielding tape 11, it is preferable to perform, for example, easy adhesion treatment. Prevent surface treatment such as electrification treatment, corona treatment, plasma treatment, photocatalytic treatment. In the present embodiment, the upper surface 1111 of the substrate 111 is subjected to a charge-preventing treatment. Further, the upper surface 1211 of the base material 121 (that is, the upper surface of the second shielding tape 12) may be similarly subjected to the detachment treatment. However, when the masking tape i is peeled off, the peeling tape 45 (see FIG. 13A) is added to the second masking tape. From the viewpoint of adhesion of 12, it is preferable to perform surface treatment such as easy adhesion treatment, prevention of electrification treatment, corona treatment, plasma treatment, photocatalytic treatment, and the like. In the lower surfaces 1112, 1212 of the substrates 111, 121, in order to improve the adhesion of the substrates lu, 121 and the adhesive layers 112, 122, respectively, it is preferable to perform such as adhesion treatment, electrification treatment, corona treatment, plasma treatment. In the surface treatment such as photocatalytic treatment, it is particularly preferable to perform corona treatment in the present embodiment. The adhesive layers 112 and 122 are formed, for example, by a polyg-type adhesive, an acrylic adhesive, a polyoxynoxy adhesive, a natural rubber adhesive, or a synthetic rubber adhesive. It is formed using an acrylic adhesive. In the production of the acrylic adhesive forming the adhesive layer 112, a 4-separate flask equipped with a spoiler, a thermometer and a reaction by-product separation tube was charged with 2-ethylhexyl acrylate (2- EHA) 100% by weight, and propylene 098108393 12 200946245 Acid (AA) 4% by weight, polymerized by a usual solution (ethyl acetate) to produce an acrylic polymer having a weight average molecular weight of 600,000. Then, an epoxy-based crosslinking agent (TETRAD c manufactured by Mitsubishi Gas Chemical Co., Ltd.) was added in an amount of 3.5 wt%, and an isocyanate-based crosslinking agent (NIPPON POLYURETHANE Industrial Co., Ltd.) was added to 100% by weight of the acrylic polymer. Co., Ltd. made CORONATE L) 1% by weight to form an acrylic adhesive as a material for the adhesive layer 112. © 2 towels with adhesive device, as shown in Figure 2, masking tape! (i.e., the second masking strip 12 and the i-th masking strip u shown in Fig. 3) are coated on both sides of the non-coated region 92 on the main surface 9 of the substrate 9 and on the sides of the non-coated region 92. The cloth region 91 _ 2 borders 92G are adhered to the non-coating region 92 in a state of being oriented in the γ direction in parallel. As shown in Fig. 3, the lower surface 1123 of the lower surface 1122 of the 帛1 masking tape U (i.e., the surface of the first masking tape doping layer II2 on the (7) side) is located at the edge of the (+χ) side. It is located at the boundary 92 between the non-coated area 92 and the coated area 91 of the non-coated area 92 (in FIG. 3, which is represented by dots according to the inconvenience), and is not coated. The (9) side of the inner side of the cloth region 92. In addition, the other side located on the (·Χ) side of the lower surface 1122 of the first masking belt 11! The lower-face edge 1123 is located at a boundary 920 between the non-coated area % and the other coated area 91 located on the (-X) side of the uncoated area. Boundary) '(χχ) side of the inside of the non-coated area. In the masking tape 1, the lower surface 1222 of the second masking tape 12 (i.e., the surface of the second mask 098108393 13 200946245 adhesive layer 122 of the belt 12 on the (-Z) side) is located at an edge on the (+χ) side. The second lower edge 1223 is located on the upper surface 1111 of the first masking strip 11 that is positioned above the first lower edge 1123 on the (+χ) side (that is, the surface of the base material 111 of the first masking strip 11 on the (+Ζ) side. The first upper edge 1113 of the (+Χ) side edge is further on the outer (+Χ) side. As a result, the i-th shield band u is protruded toward the fourth side, and the second mask band 12 that is separated from the main surface 90 of the substrate 9 is provided on the substrate 9 as the crotch portion 120. The other second lower edge 1223 of the lower surface 1222 of the masking strip 12 on the (_χ) side is located on the (i) side of the first masking strip 11 located above the (i)th lower edge 1123. The edge 1113 is further on the outer side (-X) side. Thereby, the second masking strip 12 portion which protrudes from the first masking tape n toward the (_) side while leaving the main surface 90 of the substrate 9 serves as the other portion 120 is disposed on the substrate 9. The (+) side of the second masking strip 12 and the lower surface 1202' of the (_χ) side jaw portion 120 are parallel to the main surface 9〇 of the substrate 9. In the masking strip 1, the first masking strip The sides 11〇3 on both sides and the side faces 1203 on both sides of the second masking strip 12 are slightly perpendicular to the main surface 9〇 of the substrate 9. Further, the width of the second masking strip 12 in the X direction is equal to that of the non-coating layer. The direction width of the region 92, the second lower edge 1223 on both sides of the second masking strip 12 in the other direction, overlaps the boundary between the two sides of the non-coating region 92 in plan view. That is, after passing through the second masking strip 12 The line to the center (hereinafter referred to as "center line") is superposed on the center line of the non-coating area 92 in plan view. The center line of the ι mask 11 also overlaps the center line of the non-coated area 92 in plan view. 098108393 200946245 In the present embodiment, the thickness of the base material lu and the adhesive layer 112 of the i-th shielding tape u are about 38 μm and about 15, respectively, and the substrate m of the second masking tape u and the adhesive layer 122. The thickness of the i-shielding band u and the second masking band 12 are respectively 4 mm and 6 mm' f 2 respectively. In other words, in FIG. 3, for the convenience of illustration, the thickness of the second masking strip 12 of the first masking strip is depicted as being thicker than the actual thickness (the same is true in FIG. 11A). The thicknesses of the base material (1) and the 121 of the first masking tape u and the second masking tape 12 are preferably 1 以上 or more and 3 〇〇 _ or less (more preferably 2 or more and 1 〇〇 μιη, and most preferably 25 μm or more). 〇μιη below), the thickness of the adhesive layer 、?, (2) is preferably 1 μιηη or more and below m (better than $哗6〇μιη, optimal l(^m) In the above, the thickness of the first masking tape Π and the second masking tape 12 can be maintained, and the strength can be easily handled. As described above, the profile of the masking tape 1 is elongated along the long side. Since the shape is the same, the above description of the shape of the masking tape shown in Fig. 3 is the same as the arbitrary cross section perpendicular to the longitudinal direction of the masking tape Π, that is, the first masking tape η and the second masking tape 12). 6 is a plan view, a front view, and a left side view, respectively, of the tape attaching device 2. As shown in FIGS. 4 to 6, the tape sticking device 2 includes a substrate holding device 21, a substrate moving mechanism 22, a first tape bonding head 23, a second tape bonding head 23a, and a head moving mechanism 24, which are held by the substrate. The portion 21 is a holding base 098108393 15 200946245, and the substrate shaft mechanism 22 is such that the remainder 9 and the substrate holding portion 21 are parallel to the predetermined moving direction of the main surface 9q of the substrate 9 (see FIG. 2) (ie, FIG. 4 to FIG. In the Y direction of 6 and the movement direction of the armpit, the i-th adhesive head 23 is a non-coating region 92 on the main surface 9 of the substrate 9 before the application of the organic EL liquid (see FIG. 2). Adhering to the first masking tape 11 (see FIG. 3), the second tape bonding head 23a is attached to the i-th shielding tape 11 of the non-coating region 92, and the second masking tape 12 is attached. 3) The head moving mechanism 24 individually moves the first tape bonding head 23 and the second tape bonding head 23a in the direction _ 4 perpendicular to the scanning direction to the χ direction in FIG. 6 . In the tape attaching device 2, the substrate holding portion 21 and the substrate 9 are moved in the horizontal direction of the slide 221 by the substrate moving mechanism 22. Further, the head moving mechanism 24 moves the first tape attaching head 23 and the second tape attaching head 23a in the horizontal direction along the slide rail 241 above the moving path of the substrate 9. Fig. 7A is an enlarged left side view of the first tape applicator head 23, and Fig. 7B is an enlarged left side view of the second tape applicator head 23a. 7A and 7B respectively depict the internal configuration of the ith tape attaching head 23 and the second tape attaching head 23& In the second tape bonding head 23, the first masking tape 11 is adhered to the second tape bonding head 23a by the two-layer component tape 27 holding the first masking tape 11 on the base tape 271 (so-called "separating sheet"). The second masking tape 12 is adhered to the surface of the base tape 271 by the two-layered component tape 27a holding the second masking tape 12. In the belt 27, the first mask 098108393 16 200946245 the adhesive layer m of the belt 11 has a lower surface 1122 (see FIG. 3) adhered to the base tape 271, and in the belt 27a, the lower surface of the adhesive layer 122 of the second masking tape 12 is 1222 (refer to the figure). 3) Adhered to the base tape 271. The thickness of the base tape 271 is preferably 1 〇μηι or more and 3 〇〇μιη or less, more preferably 2 〇μιη or more ΙΟΟμηι, and preferably 38 μιη or more and 75 μηι or less. In the present embodiment, the base tape 271 has a thickness of about 50 μm. The base tape 271 is similar to the base material m of the first shielding tape U and the base material 121 of the second shielding tape 12, such as a polyethylene-based film such as polyethylene or polypropylene, or polyterephthalic acid. A polyester film such as ethylene glycol or polybutylene terephthalate or a polyamide film such as nylon or a plastic film such as a cellulose triacetate film or a polyimide film, in the present embodiment A corona-treated polyester film (s_1〇5, manufactured by TORAY Co., Ltd.) was used. In order to increase the peeling property of the first masking strip 11 or the second masking strip 12 from the surface of the base tape 271 that holds the first masking tape u or the second masking tape 12, it is also possible to perform, for example, a money collecting process, C. (4) Oxygen treatment, long-chain alkyl treatment, fluorine treatment, etc., in the present embodiment, in the present embodiment, after the corona-treated surface of the polyester film is coated with a polyfluorene-coating solution, at 14 〇t: It was dried for 1 minute to carry out a polyoxygen treatment. The heavy enthalpy of the polysiloxane layer after drying was about 0.07 g/cm2. 'The above-mentioned poly Wei Weipu is in the second? Kewei Burning (KS-36〇1, manufactured by Shin-Etsu Chemical Co., Ltd.) 100% by weight, adding B-fast system as a control agent (CAT_PLR_1 manufactured by Shin-Etsu Chemical Co., Ltd.) 2 weights 098108393 17 200946245, acetylene 1% by weight of a reaction control agent (CAT-PLR-2 manufactured by Shin-Etsu Chemical Co., Ltd.), and a solvent (manufactured by Maruzen Co., Ltd., and n-heptane manufactured by Toagosei Co., Ltd.) and stirred for 2 minutes. Further, a catalyst (CAT-PL-50T manufactured by Shin-Etsu Chemical Co., Ltd.) was added in an amount of 5 wt% and stirred for 1 minute to form. The tape 27 is formed by applying an acrylic adhesive to the substrate ηι of the first masking tape u and drying at 130 ° C for 1 minute to form the adhesive layer 112, and then adhering the base tape 271 to the adhesive layer 112. . As shown in FIG. 7A, the 'the second tape refilling head 23 is provided with a first supply reel 232, a first pressing portion 233, a first recovery reel 234, and a casing 23, and the first supply reel 232 is The first tape supply unit that winds up the unused tape 27 and winds the tape 27 (that is, the first shielding tape 11 and the base tape 271), and the first pressing portion 233 is unwound from the first supply reel 232. The belt 27 separates the first masking belt U, and simultaneously separates the separated portion (i.e., the portion of the first masking belt 11 that is unwound from the first supply reel 232) toward the non-coated region 92 of the substrate 9 (see Fig. 2). The first recovery reel 234 is a first tape collection unit that winds up and collects the tape 27 (that is, the base tape 271) after the separation of the first shielding tape u, and the casing 231 accommodates the configuration. As shown in FIG. 7B, the second tape attaching head 23a is substantially the same as the first tape attaching head 23 shown in FIG. 7A, and includes a second supply reel 232a, a second peg portion 233a, and a second recycling. The reel 234a and the casing 23, the second supply reel 232a, is a second tape supply unit that winds up the belt 27a holding the second shielding tape 098108393 18 200946245 12 on the main surface 271. The portion of the second masking strip 12 that is unwound from the second supply reel 232a is only 23% of the nip portion, and the ith i-shield belt U of the non-coated region 92 is slid by the second collecting reel 234a. The second tape collecting portion that is taken up and recovered by the base wire 271 is housed in the casing 231. In the tape application device 2, the second tape bonding head u and the first tape bonding head 23 are disposed to face each other. & ❹

When the first masking tape u is adhered to the substrate 9 by the tape bonding apparatus 2, first, the i-th tape bonding head 23 is moved in the X direction by the head moving mechanism 24 shown in FIGS. 4 to 6 to move it on the substrate 9. Above the path. At this time, the substrate 9 is located on the (9) side of the i-th tape bonding head 23. Adhesively, the substrate moving mechanism 22 is used to move the substrate 9 in the (+Y) direction so as to be at the beginning of the pasting position shown in Fig. When the substrate 9 is at the position where the bonding is started, the cutting portion 235 of the first pressing portion 233 of the tape bonding head 23 cuts the i-th shielding tape u only on the side opposite to the cutting portion 235 of the tape 27. ^The first masking tape U of the knife is broken by the first! The supply reel 232 and the recovery reel 234 are rotated counterclockwise in FIG. 7A, and are separated from the tape of the base tape 271 which is fed into the first pressing portion 233 - ^ , ^ b front end of the bait member 236 at the front end Wherein, the first masking strip 11 is peeled off from the base strip 271 by being introduced on the side substantially opposite to the feeding substrate strip), and the front end portion is moved from the lower opening 237 of the housing 231 toward the substrate 9. . In parallel with this, the air cylinder 238 is used to move the adhesive (4) downward through the lower opening claw, as shown in Fig. 7C, the front end of the masking belt 11 is 098108393 19 200946245 22 (refer to Fig. 6). : Pressing and pasting, while the substrate moving mechanism 11 is used to press the substrate 9 239 while the first masking plate moving mechanism 22 is pressed by the first pressing unit: 27', and the base substrate 9 is used for non-coating. Area 2) Parallel scanning direction (ie (4) (4) movement, (Part 90 will be the first! Masking 丨 主 主 。 依 依 边界 边界 边界 边界 边界 边界 边界 边界 边界 边界 边界 边界 二 二 二 二 二 二 : : : : : : : : : : : : In the crucible, the first masking strip U' on the A-plate is adhered to the first masking strip U' by the first masking strip 11=;9 to the rear end portion, and the third masking strip is adhered to the substrate. In the tape placement device 2, the substrate moving machine (4) and the first tape bonding head 23 are the first bonding tape which adheres the first mask tape to the non-coating area % of the main surface 90 of the substrate 9 In addition, the first masking tape η is pasted and adhered to the substrate 9 which is moved at the same speed as the feeding speed of the belt 27 under the supply belt 27. In addition, in the first belt (four) head 23, when the end portion and the rear end portion of the first surface belt 11 are pasted, the first mask (four) must be pressed toward the substrate 9 by the bonding roller 239 of the second pressing portion 233. However, when the front end portion and the rear end portion are pasted, the adhesive tape 239 may be retracted from the casing 231 to release the masking tape. The first tape bonding mechanism of the I tape bonding device 2 In the case where at least the front end portion and the rear end portion of the first masking strip η are pasted, the mask 9 is attached to the substrate 9 in a state where the mask U is pressed against the substrate 9 by the substrate 9 The first pressing portion 233 of the head 23 is relatively moved in the sweeping direction, and the first masking tape U is adhered to the non-coating region 92 on the substrate 9. ❹田 uses the lion device 2 on the first rhyme band u When the second masking tape I2 is pasted, the head moving mechanism 24 shown in FIGS. 4 to 6 is used to move the i-th adhesive head Μ in the (-X) direction and retreat from the moving path of the substrate 9, and the first 2 The adhesive head 23a moves in the (9) direction and is located above the path. At this time, the pure 9 is located at the 2nd__23a (+= the second adhesive tape 12 is adhered to the upper and lower sides) The first masking tape 11 is the same as that of the first masking tape 233a. The front end portion of the masking tape 12 is pressed against the upper surface of the first masking tape u while using the substrate moving mechanism. 22 (refer to Fig. 6), the substrate 9 is moved toward the beginning. Then, in a state where the second masking tape 12 is pressed by the bonding light 239 of the second pressing portion 233, the substrate moving mechanism 2a is used to face the non-coating. The boundary of the cloth region 92 (refer to FIG. 2) is moved in the parallel two directions (ie, the (9) direction), whereby the field mask 12 is sequentially adhered to the upper surface of the ith mask U along the boundary 920 on the main surface 9 of the substrate 9. on. By this, the lion mine on the transfer area 92 of the substrate 9

figure 2). In the tape attaching device 2, the substrate moving mechanism 22 and the second tape attaching 23a are the second covering tape 12 adhered to the main surface 9 of the substrate 9 (the second surface 1111 of the first masking tape 11) Adhesive mechanism. In other words, in the tape 098108393 21 200946245, the second bonding means and the second bonding means share the substrate moving mechanism 22 (i.e., the substrate moving mechanism 22) for moving the substrate 9 in the scanning direction. Further, in the second bonding mechanism with the bonding device 2, in the same manner as the above-described i-th bonding mechanism, at least the front end portion of the second shielding tape 12 and the rear creeping portion are attached to the second shielding tape 12 When the masking tape U is pressed, the second tape 12 is adhered to the first masking tape by moving the substrate 9 to the second pressing portion 233& of the second tape applying head 23a in the scanning direction. In the tape-attaching device 2, as shown in FIG. 2, in the lattice-shaped uncoated region 92 of the substrate 9, only three regions extending in the scanning direction parallel to the direction in which the substrate $ is moved by the substrate moving mechanism 22 are shown. (i.e., the region extending in the γ direction in Fig. 2) is adhered to the masking tape i (i.e., the i-th band U and the second masking band 12). Further, in the non-coated region 92, 'the region extending perpendicularly to the scanning direction is not That is, the i-th shielding band u and the 帛❹ 2 shielding tape 12 are adhered to the region extending in the X direction in FIG. 2. As will be described later, in the case of coating pure 8, the first masking band 11 and the second layer are omitted from the uncoated region. The area where the masking tape 12 is adhered 'does not apply the organic EL liquid. In the coating system 8 shown in Fig. 1, the third masking tape u and the second layer are adhered. The substrate 9 (see Fig. 2) of the masking tape 12 is carried out from the tape-attaching device 2 by the transfer robot and carried into the coating device 3. The coating apparatus 3 which coats the organic EL liquid on the substrate 9 is 098108393 22 200946245. 8 and 9 are plan and front views of the coating apparatus 3. As shown in FIG. 9, the 'coating|setting 3 system is provided with the substrate holding portion Μ, and the substrate holding portion 31 holds the masking tape (ie, the second masking tape) and the masking tape I2). The coating area % refers to the substrate 9 of the drawing. In the drawings and FIG. 9, for convenience of illustration, the illustration of the masking tape 1 on the main surface (10) of the substrate 9 is omitted. The core substrate moving mechanism 32, the mark detecting unit 33, the coating head 34, the head moving mechanism 35, the two liquid receiving portions %, and the fluid material supply portion 38'. The substrate moving mechanism 32 makes the substrate holding portion 31 toward the substrate. The predetermined direction parallel to the main surface 90 of 9 (i.e., in the following direction: "sub-scanning direction" in FIG. 8) is horizontally moved while rotating about the vertical axis, and the mark detecting portion 33 is formed on the photographing substrate 9. The position adjustment flag (not shown) is detected, and the application head 34 is a discharge mechanism that continuously ejects the organic liquid from the three nozzles 37 toward the substrate 9 on the substrate holding portion 31. The main surface 9G of the substrate 9 is parallel and perpendicular to the sub-scanning direction (ie, X in FIG. 8) The coating head 34 is horizontally moved, hereinafter referred to as "main scanning direction", and the liquid receiving portions are placed on both sides of the substrate holding portion 31 with respect to the main scanning direction 3, and at the same time, the organic material from the coating head is received. In the EL liquid, the fluid material supply unit 38 supplies the organic liquid to the three nozzles 37 of the coating head 34. In the coating device 3, the towel moving mechanism 35 and the substrate moving mechanism 32 are configured to move the three nozzles 37 of the coating head 34 relative to the substrate 9 in the main scanning direction while the substrate 9 is applied to the coating head 34. 3 098108393 23 200946245 A moving mechanism in which the nozzles 37 are relatively moved in the sub-scanning direction. In the finishing head 34, the three nozzles 37 are arranged in a slightly linear relationship with respect to the scanning direction in Fig. 8 at the same time, and the direction (i.e., the main projection is shifted toward the same direction in Fig. 8 (i.e., the sub-scanning direction). The arrangement is carried out, and the EL liquid from the nozzles 37 is applied to the coating area of the substrate 9, and the groove between the partition walls extending in the main scanning direction is formed by the prelude of FIG. 2). In the middle of the 'two adjacent nozzles 37' in the sub-scanning direction, = the distance between the walls (hereinafter referred to as "the partition wall spacing"). In the coating head ,, the three types of organic EL liquids of the EL materials, which are different in color, such as red (R), green (G), and blue (8), are discharged from the three nozzles 37. When the cloth device 3 is coated with the organic EL liquid, first, the tape is adhered to the non-coated region by the adhesive tape 2 (see FIGS. 4 to 6). The substrate 9 (see Fig. 2) is placed on the substrate holding portion 31 and held, and the substrate moving mechanism 32 is driven by the output from the mark detecting portion 33 so that the substrate 9 is positioned at the start application position indicated by the solid line in Fig. 8. The coating head 34 is located at the position shown by the solid line in Figs. 8 and 9. Then, the organic liquid liquid is supplied from the fluid material supply unit 38 to the coating head 34, and the organic anal liquid is discharged from the nozzle 37, and the head moving mechanism is driven to start moving the coating head 34. In the coating device 3, the organic EL liquid is continuously discharged from the nozzle 37 toward the substrate 9, and the nozzle 37 is applied to the substrate 9 from the (·) side of FIG. 8 toward the (four) side (that is, the i-th shielding tape adhered to the substrate 9). And the second scanning zone has a relative movement in the main scanning direction in which the longitudinal direction intersects vertically, and the organic rainbow 098108393 24 200946245 is applied to the three adjacent grooves between the partition walls of the substrate 9 and the second shielding of the shielding tape 1 Belt 12 on. When the coating head 34 is moved to the position shown by the two-dot chain line in FIGS. 8 and 9, the substrate moving mechanism 32 is driven to bring the substrate 9 and the substrate holding portion 31 toward the (+Y) side in FIG. 8 ( That is, the sub-scanning direction) only moves 3 pieces of the distance between the partition walls. At this time, in the coating head 34, the organic EL liquid is continuously discharged from the three nozzles 37 toward the liquid receiving portion. © When the end substrate 9 is moved in the sub-scanning direction, the coating head 34 ejects the organic EL liquid while moving from the (+x) side to the (_x) side (ie, the main scanning direction) in FIG. 8 <RTIgt; After three kinds of organic EL liquids are applied onto the substrate 9, the substrate 9 is again moved in the sub-scanning direction. Figure 10 is a plan view of the substrate 9 to which the masking tape 1 is attached. In the coating device 3, the movement of the coating head 34 in the main scanning direction and the application of the coating head 34 are repeated until the substrate 9 is positioned at the end of the coating position indicated by the two-dot chain line in FIG. When the substrate 9 is moved in the main scanning direction once, the substrate 9 is moved in the sub-scanning direction, and as shown in FIG. 1A, the first shielding tape 11 (see FIG. 3) and the second shielding tape 12 are included on the substrate 9. The region (i.e., the region adhered to the masking tape 1 of the non-coating region 92 and the partition wall between the coating regions 91) is strip-coated with the organic EL liquid 93. Further, in Fig. 10, in order to facilitate the illustration, the width and pitch of the organic EL liquid 93 applied on the substrate 9 are drawn to be larger than actual. In the coating device 3, during the application of the organic EL liquid 93, the organic EL liquid 93 is continuously discharged from the nozzle 37 (see Figs. 8 and 9) of the head 34 of 098108393 25 200946245. In the coating device 3, 'the region extending perpendicularly to the moving direction of the substrate 9 in the non-coating region 92 (that is, the region extending in the X direction in FIG. 10, omitting the region where the masking tape 1 is adhered) is used to make the coating head In the state in which the liquid receiving portion 36 stands by, the substrate 9 is moved only in the sub-scanning direction by a distance equal to the width of the region (that is, the width in the Y direction in FIG. 1A), whereby the application of the organic EL to the region can be avoided. Liquid 93. Fig. 11A shows a cross-sectional view of a masking tape 1 coated with an organic EL liquid and a portion of the substrate 9 taken along the line B-B in Fig. 10, which corresponds to Fig. 3. Further, Fig. 11B is a cross-sectional view showing a case where only one masking tape 71 equal to the width of the non-coating region 792 is adhered to the non-coated region 792, and the organic EL liquid 793 is applied. As shown in FIG. 11B, in the substrate 79 of the comparative example, the organic EL liquid 793 is attached to the side surface 713 of the masking tape 71 located on the boundary 7920 between the non-coating region 792 and the coating region 791 to form a meniscus 794. As shown in FIG. 11C, in the organic EL material film 795 remaining on the substrate 79 after the masking tape 71 is peeled off, at the boundary 7920 between the non-coating region 792 and the coating region 791, and the meniscus 794 (refer to Figure 11B) The corresponding portion 796 is highlighted. As a result, in the latter step, the thickness of the other film (e.g., the cathode film) formed on the film of the organic material may be insufficient in the protrusion.

In contrast to the masking tape i adhered to the substrate 9 by the tape applying device 2 (see FIGS. 4 to 6) of the coating system 8 of the present embodiment, as shown in FIG. UA 098108393 26 200946245, the film is adhered to the non-coated film. The lower edge 1123 of the i-th light belt of the silk field 92 is closer to the (+X) side than the boundary 920 between the non-coated Q domain 92 and the non-coated region 92 = region 91. Further, the second portion 120 that protrudes from the first masking belt 11 toward the (9) side is separated from the non-coated region 92.

A region 921 (hereinafter referred to as "Xiashan Old ub" (hereinafter referred to as an exposed region 921)) which is exposed from the first shielding tape U on the side of the masking tape ll (-X) covers the exposed region 921. Referring to FIG. 8 and FIG. 9) from the nozzle of the coating device 3, the organic liquid 93 discharged from the substrate 9 adheres to the exposed region 921 of the non-coated region %, and also prevents adhesion to the non-coated region. Adhering to the (_x) side side 1103 of the masking zone π. As a result, it is possible to easily prevent the meniscus from occurring at the boundary between the non-coated region 92 and the (-X)-side coated region 91, and it is possible to prevent the thickness of other films formed on the organic anal material film from being insufficient in the subsequent step. And other bad conditions. Further, in the masking tape 1, the (four) side W lower edge 1123' of the first masking tape U is located closer to the boundary 920 between the non-coated region 92 and the (+χ) side coating region 91 (·Χ On the side, the portion U0 of the second masking tape 12 that protrudes from the (i)th side of the i-th shield band u is separated from the (+X) side exposed region 921 of the first masking band 11 in the non-coated region %, and By covering the exposed region 92, the organic EL liquid 93 can be prevented from adhering to the (+χ) side exposed region 92 of the non-coating region 92, and the organic EL liquid 93 is attached to the (+乂) side of the i-th shielding band u. Side 1103. As a result, it is also easy to prevent the bend (4) from also occurring at the boundary 920 between the non-coating zone 098108393 27 200946245 domain 92 and the (+X) side coating zone 91. Further, in the coating device 3, since the nozzle 37 moves at a high speed and the organic liquid is discharged, the (_x) side of the first masking belt 11 is moved when the nozzle 37 moves in the (+X) direction and the organic EL liquid is applied. (ie, the upstream side of the direction in which the nozzle 37 moves) The exposed area 921 +, some micro organic EL liquid adheres to the vicinity of the boundary 92 ,, but the amount of adhesion does not have a slight degree of influence on the subsequent steps, so the organic EL is considered The adhesion of the liquid 93 to the non-coated region 92 can be substantially prevented by the first shielding tape 11 and the second shielding tape 12 . Further, when the organic EL liquid is applied while the nozzle 37 is moved in the (-X) direction, some micro organic liquid adheres to the vicinity of the boundary 920 of the (+X) side exposed region 921 of the i-th shielding band u, but In this case as well, it is considered that the first masking tape u and the second masking tape 12 can substantially prevent the organic rainbow 93 from adhering to the non-coating region 92. On the other hand, when the organic EL liquid is applied while the nozzle π is moving in the (+x) direction, in the coating region 91 on the masking belt 1 (+x) side (i.e., the downstream side in the moving direction of the nozzle 37), The initial application position of the organic anal fluid 93 to the coated area % is a slight distance from the boundary 920. However, the region near the boundary 920 of the coating region is not utilized as the pixel region of the organic display device, and the distance of the organic liquid crystal 93 is not applied near the boundary 92 of the coating region 91, which is smaller than that. It is utilized as the width of the region of the pixel region, so that the slight departure of the above-described starting coating position from the boundary 920 does not affect the performance of the organic EL display device. Further, at the nozzle 37 toward (_) 098108393 28 200946245

When the organic EL liquid is applied in the direction of the movement, the organic EL liquid is thrown from the coating area 91 of the pair of coating regions 91 in the coating region 91 on the masking belt 1 (-X) side. The position will leave the boundary 920 a few micro-distances, and the distance between the gamma and the L-square is not affected by the performance of the organic EL display device. In the tape attaching device 2, as described above, the 第, the upper sleeve 1 and the second mask 12 are overlapped with the center line of the non-coated region 92, respectively.

The adhesion 'the first masking tape U and the second masking tape 12 are line-symmetric with respect to the center line of the non-coated area %. Thereby, in the coating device 3, when the organic liquid liquid is applied while the nozzle 37 is moved in the (10) direction, and the organic EL liquid is applied while the nozzle 37 is moved in the (9) direction, the organic EL liquid can be mixed. The two micro-adhesion of the region 92 and the initial application position of the organic EL liquid in the application region 91 are slightly the same as the boundary 92G. As a result, the organic EL liquid can be applied to both sides of the non-coating region 92. The coating area % (four) cloth quality is uniformized. Further, 'in the tape application device 2', the width of the f 2 masking tape 12 is equal to the non-coated region 92, and the width is the width of the second shielding tape 12. The boundary 920 on both sides of the non-coating region 92 is overlapped. Thereby, the adhesion of the organic EL liquid to the non-coating region 92 can be more reliably prevented. In the masking tape 1, by the crotch portion of the second masking tape 12 The lower surface 1202 of the 120 is parallel to the main surface 9 of the substrate 9, and the organic EL liquid 93 adhering to the side surface 03 of the second masking strip 12 is prevented from flowing along the lower surface 1202 of the crotch portion 120 to the side surface 1103 of the first masking strip 11 and attached thereto. Side surface 1103. As a result, adhesion of 098108393 29 200946245 to the organic EL liquid 9 on the side 1203 of the second masking strip 12 can be prevented. 3 is attached to the non-coated region 92 via the lower surface 1202 of the crotch portion ι2 and the side surface 1103 of the first shielding tape 11. In the masking tape 1, the width of each crotch portion 120 (i.e., the i-th shielding band 11 shown in FIG. 3) Preferably, the distance between the first upper edge 1113 and the second lower edge 1223 of the second mask 12 is 〇5 mm or more and 3 mm or less. By setting the width of each ridge 12〇 to 0.5 mm or more Further, the accuracy of preventing the adhesion of the organic EL liquid to the side surface 1103 of the first masking strip 11 can be further improved. Further, by setting the width of each of the flange portions 12 to 3 mm or less, the strength of the flange portion 120 can be sufficiently ensured, and the flaw can be prevented. The portion 120 is suspended toward the main surface 90 of the substrate 9. In the coating system 8 shown in Fig. 1, the substrate 9 of the organic EL liquid is applied by the coating device 3, and the transfer robot 81 is carried out from the coating device 3 and carried into the belt. Peeling device 4. Fig. 12 is a plan view of the tape peeling device 4. As shown in Fig. 12, the tape peeling device 4 is provided with a first adhesive tape 23 and a third adhesive tape device 2 instead of the adhesive tape device 2 shown in Figs. 2 one tape peeling head 43 with a bonding head 23a. The other structure of the tape peeling device 4 is substantially the same as that of the tape bonding device 2. The off device 4 includes a substrate (four) portion 41, a substrate moving mechanism 42, a tape peeling head 43, and a head moving mechanism 44 that holds the substrate 9 and the substrate moving mechanism 42 that causes the substrate 9 together with the substrate holding portion 41. Moving in the Y direction in Fig. 12, the tape peeling head 43 holds and peels off the mask tape (i.e., the first tape U and the second mask tape 12 shown in Fig. 3). The head moving machine 098108393 30 200946245 The tape peeling head 43 is moved in a direction perpendicular to the moving direction of the substrate 9 (i.e., the X direction in Fig. 12). In the tape peeling device 4, the substrate moving mechanism 42 is used to move the substrate 9 together with the substrate holding portion 41 in the horizontal direction along the slide 421 while rotating in the vertical direction. Further, by the head moving mechanism 44, the tape peeling head 43 is moved in the horizontal direction along the slide 441 over the moving range of the substrate 9.

An enlarged left side view of the tether stripping head 43 shown in Fig. 13A is shown. Similarly to Fig. 7A, the inside of the casing with the peeling head 43 is shown in Fig. 7A. As shown in FIG. 13A, the tape peeling head 43 is provided with a peeling tape β 15 adhesive mechanism 433, a supply reel 432, a take-up reel 434, and a body 431 which is adhered to the mask tape. The second masking tape q shields at least a portion of the tape 1 , and the adhesive mechanism 433 is held to adhere to the second masking tape 12 and to guide the peeling tape 45 to the peeling 2

The peeling tape of the second masking tape 12 on the substrate 9 is adhered to the reel 432 to supply the unused peeling tape 45 to the adhesive mechanism: the supply tape is supplied, and the take-up reel 434 $ will be peeled off. The mask tape 45 of the tape 45 and the tape strip 45 (ie, the io tape mask u and the second mask tape are pulled up to the peeling tape recovery portion recovered from the substrate 9 and recovered, the casing 2) And so on. The adhesive mechanism 433 is provided with a cylinder and a pusher. The width of the peeling tape 45 is larger than the masking tape! The second shielding tape 12 437. When the tape stripping device 4 is used from the substrate 9 to the masking tape i, the width is . The substrate moving (four) 42 and the head moving mechanism shown in Fig. 12 are moved to the peeling start position by moving the tape peeling head 43 with the tape peeling head 43. At this time, as shown in Fig. ,, the front end of the masking tape 1 as the object to be peeled is located below the lower opening 43 5 of the casing 431 with the peeling head 43. Next, the pressing roller 437 is moved downward by the lower opening 435 by the air cylinder 436, and the peeling tape 45 is pressed from the upper side (that is, the side opposite to the adhesive surface of the peeling tape 45) toward the front end portion of the second shielding tape 12 of the masking tape 1. And sticking. Next, the substrate 9 is moved in the (+γ) direction in FIG. 13A by the substrate moving mechanism 42 (see FIG. 12). At the same time, the supply reel 432 and the recovery reel 434 start the clockwise rotation in FIG. 13A, and feed the peeling tape 45 wound on the supply reel 432, as shown in FIG. The pressing roller 437 is moved to the upper position and returned to the original position so that the front end portion of the second masking tape 12 adhered to the peeling tape 45 is held toward the (+ζ) side together with the i-th shielding tape u, and the first masking tape 11 is held. The front end is peeled off from the substrate 9. Then, by continuously feeding the peeling tape 45 from the supply reel 432 shown in FIG. 13A while continuously moving the substrate 9, the second masking tape u and the second masking tape 12 on the substrate 9 are adhered to the peeling tape 45. It is peeled off from the substrate 9 and taken up by the take-up reel 434 and recovered. In the tape peeling device 4, the i-th shielding tape 11 and the second masking tape 12 are peeled off from the substrate 9 coated with the organic EL liquid, and only the organic EL liquid remains on the coating region 91 of the substrate 9. As described above, in the tape peeling device 4 shown in FIG. 12, the substrate 9 is moved in the direction in which the substrate 9 is adhered by the substrate moving mechanism 42 while the mask tape is held by the tape peeling head 43 and held up, 098108393 32 200946245 Thereby, the masking tape 1 is peeled off from the substrate 9. In the coating system 8, in the masking tape 1 adhered to the substrate 9 by the tape bonding apparatus 2, the adhesion of the second masking tape 12 to the first masking tape u is larger than that of the first masking tape 11 to the substrate 9. The adhesion of the coating area 92. In the present embodiment, the adhesive force of the first masking tape 11 to the non-coating region 92 is 0_01N/20 mm or more and 1.2 N/20 mm or less. Preferably, it is preferably 〇2N/20 mm or more and 0.8 N/20 mm or less (more preferably 〇 .〇3N/20mm or more 0.4N/20mm to participate in the next). The adhesion is such that the first masking tape having a width of 20 mm is adhered to the non-coated region by a laminator having a bonding speed of 0.3 m/min and a linear pressure of 78.4 N/cm under the conditions of a temperature of 23 ° C and a relative humidity of 50%. 92. After 30 minutes from the pasting, the tensile tester was used to peel the angle 180. Further, when the stretching speed is a3 m/min, the force is released when the front end of the first masking tape is stretched at a speed of 〇3 m/min and peeled off in a direction overlapping the remaining portion of the first masking belt 11. Further, the adhesion of the second ❹ masking tape 12 to the first masking tape U is greater than or equal to 1 N/2 〇 mm or more than the adhesion of the first masking tape 11 to the non-coated region 92. Thus, by making the adhesion of the second masking strip 12 to the masking strip 11 larger than the adhesion of the first masking strip 11 to the substrate 9, the stripping device 4 is held by the peeling strip 45. When the masking tape 12 is shielded, the first shielding tape can be prevented from being soiled. 11 is peeled off from the second shielding tape 12 and remains on the substrate 9, so that the first shielding tape 11 and the second shielding tape 12 can be easily picked up (i.e., by a single time) Peeling action) peeling. Further, in the tape peeling device 4, the second cover 098108393 33 200946245 on which the organic EL liquid adheres is covered with the peeling tape 45 and the mask tape 1 is peeled off from the substrate 9, so that the second mask is not attached. The organic EL liquid on the belt 12 falls onto the substrate 9 to recover the masking tape 1. Further, the peeling tape 45 is adhered to the beginning of the masking tape 1, and may be performed on the substrate 9 which is moved at a speed equal to the supply speed of the peeling tape 45 under the supply peeling tape 45. In the coating system 8 shown in Fig. 1, when the masking tape 1' is peeled off from the substrate 9, the substrate 9 is carried out from the tape peeling device 4 to the outside of the coating system 8, and the application of the organic EL liquid to the substrate 9 is completed. Further, in the coating system 8, actually, the adhesion of the masking tape 1, the application of the organic EL liquid, and the peeling of the masking tape i are continuously performed on the plurality of substrates. As described above, in the coating system 8 shown in Fig. 1, the boundary between the uncoated region 92 and the coating region 91 can be prevented by the tape bonding device 2, the coating device 3, and the tape peeling device 4. The meniscus is generated and the substrate 9 coated with the organic EL liquid only in the coating region 91 can be easily obtained. However, the film thickness of the organic EL layer formed on the substrate for the organic EL display device (that is, the film thickness of the organic EL material formed by drying the organic EL liquid) has a large influence on the display performance of the flat display device, and the like. Control with high precision. Therefore, the coating system 8 which prevents the occurrence of the meniscus and improves the uniformity of the film thickness of the organic EL layer is particularly suitable for application of the organic EL liquid to the substrate for an organic EL display device. Further, even in a flat display device other than the organic rainbow display device, as in the case of the organic EL display device, the film thickness of the pixel formation material formed on the substrate must be high-precision (iv), 098108393 34 200946245, so that the coating system 8 can be said It is also suitable for applying a fluid material comprising a pixel forming material for a flat display device. The tape applicator of the coating system according to the second embodiment of the present invention will be described. ® 14 is a plan view of the second embodiment with a slim % device. In the belt (4) device 2a, the first tape bonding head 23 with the first tape bonding head 23 and the second tape bonding head 23 shown in Fig. 4 are provided. The other configuration of the tape-attaching device 2a is the same as that of the tape-attaching device 2 shown in Figs. 4 to 2, which means that the components corresponding to the same components are the same. Fig. 15A is an enlarged left side view showing the structure of the tape attaching head 2, and in Fig. 15A, the internal configuration of the case 231 with the adhesive head 23b is depicted in the same manner as Fig. 7A and Fig. 7B. As shown in FIG. 15A, the tape attaching head 23b further includes a second supply reel 232a, a second recovery reel 234a, and a tape bonding portion 23, in addition to the configuration of the first tape attaching head 23 shown in FIG. 7A. The second supply supply reel 232a is a second tape supply unit that winds up the tape 27a holding the second shielding tape 12 on the main surface of the base tape 271, and the second recovery reel 23 is a take-up tape 27a. The second tape collecting portion that is collected by the base tape 271 adheres the second masking tape 12 to the first masking tape 11 . The other components of the adhesive tape are the same as those of the first tape bonding head 23 shown in Fig. 7A, and the same components are denoted by the corresponding components in the following description. Further, the tape attaching head 23b is disposed in the same direction as the i-th tape attaching head 23 shown in Fig. 7A. When the second cover 098108393 35 200946245 band 11 and the second mask band 12 are adhered to the substrate 9 by the tape attaching device 2a shown in FIG. 14, first, the head moving mechanism 24 shown in FIG. 14 is used to move the tape sticking head 2_χ direction. On the other hand, the substrate 9 is positioned above the moving path, and the substrate 9 is moved in the (+γ) direction by the substrate moving mechanism 22, and is located at the beginning of the pasting position shown in FIG. In the tape bonding head 23b, a portion of the second masking tape 12 that is unwound from the second supply reel and peeled off from the base tape 271 is unwound from the first supply reel 232 as the second tape supply unit. The belt 27 (i.e., the base tape 271 and the first masking tape 11 held on the main surface of the base tape 271) are clamped together with the rollers 2301 and 2302 of the tape fitting portion 230, whereby the second tape is disposed at the second tape. The substrate 11111 (see FIG. 3) is adhered to the lower layer 1222 of the adhesive layer 122 of the second masking tape 12 (see FIG. 3). Next, the first masking tape η is cut by the cutting portion 235' of the pressing portion 233. The second shielding tape 12 is cut from the second shielding tape 12 side, and the first shielding tape η and the second shielding tape 12 ′ are separated from the base tape 271 at the front end of the tape separating member 236, and the front end portion thereof is from the lower portion of the casing 231. The opening 237 is moved toward the substrate 9. Further, 'in parallel with this, the adhesive roller 239 is moved downward by the lower opening 237 by the air cylinder 238 of the pressing portion 233, and the first shielding tape 11 and the second surface are bonded as shown in Fig. 15A. The front end portion of the masking tape 12 is placed such that the adhesive layer 112 (see FIG. 3) of the first masking tape 11 faces the substrate 9 and is formed from the substrate 121 of the second masking strip 12 ( Referring to Fig. 3), the main surface 90 of the substrate 9 is pressed and adhered, and the substrate 9 starts moving in the direction of Fig. 15 (+Υ). Then, 'from the first supply reel 232 and the second supply reel 232a, respectively, 098108393 36 200946245 The feeding belt 27 and the belt 27a' are continuously fed, and the second moving belt 12 and the second shielding belt 12 are pressed by the bonding roller 239 of the pressing portion 233, and the substrate moving mechanism 22 shown in Fig. 14 is used. The boundary of the substrate 9 is recorded at the boundary of the recording area % (〇2), and the parallel object is moved (ie, (+γ) direction), thereby causing the 主!, by the #嫌^& masking tape on the main surface 90 of the substrate 9. 11 and the second masking tape ΐ 2 (i.e., the masking tape 1) are attached to the uncoated region % along the boundary 92G.

In the tape sticking head shown in FIG. 15A, the second masking tape u and the second masking tape η on the base tape 271 are again cut by the cutting portion, and the first masking tape 11 and the second masking layer are shielded. The tape 12 is adhered to the substrate 9 to the rear end portion, and the first masking tape 11 of the masking tape 1 is adhered to the main surface 90 of the substrate 9. In the tape bonding apparatus 2 & shown in FIG. 14, the substrate moving mechanism 22 and the tape bonding head are attached to the non-coating region 92 of the main surface 90 of the substrate 9 by the second masking tape u and the second masking tape u. Adhesive mechanism. Further, the opening of the i-th shield band u and the second mask band 12 shown in Fig. 15A can also be performed on the substrate 9 which is moved at a speed equal to the feed speed of the tapes under the supply belt 27 and the belt 27a. Further, in the case of the adhesive head, it is also possible to cancel the pressing of the first and second rear ends of the second masking tape U and the second masking tape 12; The shielding tape u and the second shielding tape 12 are provided. In other words, 'In the pasting mechanism with the adhesive device 2a, #贴贴第! When the shielding tape 11 and the second shielding tape 12 are at least the front end portion and the rear end portion, the i-th shielding tape and the second shielding (four) are held! When the pair of substrates 9 are pressed, the substrate 9 is relatively moved toward the sweeping direction by the pressing portion 233 of the adhesive head 23b, whereby the first masking strip 11 and the second masking strip 12 are adhered to the substrate by 098108393 37 200946245. 9 non-coated area 92. Adhesively attached to the tape-attaching device 2a! In the substrate 9 of the masking tape u and the second masking tape 12, similarly to the second embodiment (see FIG. 3), the i-th shielding tape 11 is on both sides in the width direction (ie, the (+χ) side and the (_χ) side). The i-th lower edge 1123 is located on the inner side of the non-coated region 92 between the non-coated region 92 and the coating region 91, and the second lower edge 1223 on both sides of the second shielding tape 12 is located at the first The first upper edge 1113 of the masking tape is further outside. Thereby, the second shielding tape 12 protruding from the first shielding tape U toward the outside in the width direction is partially formed as the crotch portion 12A. In the tape sticking device 2a of the second embodiment, since the first masking tape 11 and the second masking tape 12 are bonded to each other by the tape bonding head 23b, the substrate moving mechanism 22 moves in the Y direction every time. The first masking tape u and the second masking tape 12 are simultaneously adhered to the uncoated region 92 of the substrate 9 . As a result, rapid adhesion of the masking tape 1 to the substrate 9 can be achieved. On the other hand, in the tape sticking device 2 of the first embodiment, the structure of the first tape bonding head 23 and the second tape bonding head 23a is made simple, and the structure of the two tape bonding heads is further advanced. The structure of the tape-attaching device 2 can be simplified. In the coating system of the second embodiment, the substrate 9 having the masking tape 1 (that is, the first shielding tape u and the second shielding tape 12) having the crotch portion 120 (see FIG. 11A) is adhered to the non-coating region 92, It is carried out from the tape-attaching device 2a and carried into the cloth device 3 of 098108393 38 200946245. Then, in the same manner as in the i-th embodiment, after the organic EL liquid is applied, it is carried into the tape stripping device 4 to peel off the masking tape i. In the coating system of the second embodiment, the mask 37 from the coating device 3 can be prevented by the masking tape 1' adhered by the tape bonding device 2 & in the same manner as in the first embodiment (see Figs. 8 and 9). The organic EL liquid discharged onto the substrate 9 adheres to the exposed region 921 of the non-coating region 92 (see FIG. 11A), and also prevents the two sides of the first masking tape 11 from adhering to the non-coating region 92. Face u〇3 (refer to Fig. 11A). As a result, it is possible to easily prevent the meniscus from occurring at the boundary 92 between the non-coating region 92 and the both-side coating regions 91, and it is possible to prevent the thickness of other films formed on the film of the organic EL material from being insufficient in the subsequent step, and the like. Bad situation. In the tape attaching device 2a, as in the first embodiment, the first masking tape 11 and the second masking tape 12 are adhered so as to overlap the center line of the non-coating region 92 with the respective center lines. The slight adhesion of the el liquid to the non-coated region reference 92 and the initial application position of the organic EL liquid in the coated region 91 are the same as those of the boundary 920. As a result, the coating quality of the organic EL liquid to the two coating regions 91 on both sides of the non-coating region 92 can be made uniform. Further, by making the width of the second masking strip 12 equal to the width of the non-coating region 92, the second masking strip 12 is adhered to the edge 920 of the non-coated region 92 in a plan view, and the edge of the second masking strip 12 is overlapped. Further, it is possible to more surely prevent the organic EL liquid from adhering to the non-coating region 92. In the masking belt 1, as in the first embodiment, the second masking belt 12 can be prevented from adhering to the second masking belt 12 by making the lower surface 1202 of the second portion 098108393 39 200946245 belt 12 parallel to the main surface 90 of the substrate 9. The organic EL liquid on the side surface 1203 (see FIG. 11A) adheres to the side surface 1103 of the first masking strip 11 and the non-coating region 92. Furthermore, in the coating system of the second embodiment, the second masking tape 12 is applied to the first masking tape 11 in the masking tape 1 which is adhered to the substrate 9 by the tape bonding apparatus 2a, similarly to the first embodiment. The adhesion is greater than the adhesion of the first masking strip 11 to the substrate 9. Thereby, in the tape peeling apparatus, the first masking tape 11 and the second masking tape 12 can be easily peeled off (i.e., by a single peeling operation). Next, the tape application device of the coating system according to the third embodiment of the present invention will be described. Fig. 16 is a plan view showing the tape-attaching device 2b of the third embodiment. As shown in Fig. 16, the tape attaching device 2b is provided with a first tape attaching device 201a, a second tape attaching device 201b, and a transport mechanism 202, and the transport mechanism 202 is disposed in the first! The substrate 9 is carried out from the first tape bonding device 201a and the second tape bonding device 2〇1b is carried out between the tape bonding device 2〇1a and the second tape bonding device 201b. The first tape attaching device 201a has the same configuration as that of the tape attaching device 2 shown in Figs. 4 to 6 except that the second tape attaching head 23a is not provided. Further, the second tape attaching device 2 〇 lb has the same configuration as that of the tape attaching device 2 shown in Figs. 4 to 6 except that the first tape attaching head 23 is not provided. Similarly to the tape-attaching device 2 shown in FIG. 4, the first tape attaching device 2A includes a substrate holding portion 21, a substrate moving mechanism 22, a third tape bonding head 098108393 200946245 23, and a head moving (four) 24, which holds the substrate. The portion 2i holds the substrate g, and the substrate moving mechanism 22 moves the substrate 9 in the sweeping direction (that is, in the direction of ¥ in FIG. 16), and the first tape bonding head 23 is adhered to the non-coating region 92 on the substrate 9. In the first masking belt 11 (see FIG. 3), the head moving mechanism 24 moves the first tape bonding head 23 in a direction perpendicular to the scanning direction (that is, in the direction of FIG. 16fx (4). In the first tape bonding device 2, The substrate moving mechanism 22 and the first tape bonding head 23 are the first bonding means for adhering the i-th shielding tape u to the non-coating region 92 of the main surface of the substrate 9. The second tape bonding device 201b is also the i-th tape. Similarly, the bonding apparatus 2 〇 1 & is provided with the substrate holding part 21 which hold|maintains the board|substrate 9, and the board|substrate movement mechanism 22 which moves the board|substrate 9 in the scanning direction, and the upper surface 1111 of the masking tape 11 adhered on the board|substrate 9 Adhering to the second tape bonding head 23a of the second masking tape 12 (see FIG. 3) and bonding the second tape The head 23 & a head moving mechanism 24 that moves in a direction perpendicular to the scanning direction. In the second tape attaching device 2 〇 lb, the substrate 10 moving mechanism 22 and the second tape applying head 23a adhere the second masking tape 12 to the second masking tape 12 a second bonding mechanism that is adhered to the upper surface 11u of the first masking tape η of the main surface 90 of the substrate 9. In the tape attaching device 2b of the third embodiment, the first tape mounting device 2b is placed on the first tape. In the same manner as in the first embodiment (see FIG. 3), the first lower edge 1123 on both sides in the width direction of the first masking tape u (ie, the (+X) side and the (-X) side) is located in the non-coated region 92 and The boundary 920 between the coating regions 91 is further inside the non-coated region 92, and the first masking strip 11 and the boundary 920 are placed in parallel with each other at 098108393 41 200946245 uncoated region 92. The substrate 9 to which the first masking tape 11 is adhered The conveyance mechanism 202 is carried out from the first tape application device 201a and carried into the second tape attachment device 201b. Then, the second tape attachment device 201b is used to make the second tape mask 12 on the both sides in the width direction. The edge 1223 is located outside the first upper edge 1113 of the first masking band u, and the second masking band 12 is bordered 920 is adhered to the upper surface 1111 of the first masking strip 11 in parallel. Thereby, the second masking strip 12 protruding outward from the i-th shielding strip 11 is partially formed as the crotch portion 120 on both sides in the width direction. In the coating system of the embodiment, as in the first embodiment, the organic EL liquid discharged from the nozzle 37 (see FIGS. 8 and 9) of the coating device 3 to the substrate 9 can be prevented from adhering to the non-coated region. The exposed area 921 of 92 (see FIG. LiA) can also prevent the side surfaces 1103 of the first masking strip 11 from adhering to the non-coated area % (see FIG. 11A). Thereby, it is possible to easily prevent the meniscus from occurring at the boundary 920 between the non-coating region 92 and the both-side coating regions 91. Next, a tape applying device of a coating system according to a fourth embodiment of the present invention will be described. The tape sticking device of the fourth embodiment has the same configuration as that of the tape attaching device 2 except that the second tape attaching head 23a is omitted from the tape sticking device 2 shown in Figs. 4 to 6, and the following description will be given. In the meantime, the corresponding component symbols are assigned to the corresponding components. In the tape sticking apparatus of the fourth embodiment, the mask tape 1 (see FIG. 3) in which the second masking tape 12 is adhered to the top surface of the second masking tape u 098108393 42 200946245 1111 is held on the surface of the base tape 271. In the state, the first supply reel 232 is wound around the base tape 271 in the first tape attaching head 23 shown in Fig. 7A. Then, the lower surface 1122 (see FIG. 3) of the first masking strip 11 is opposed to the substrate 9, and the first masking strip 11 and the second masking strip 12 adhered in parallel to the first masking strip 11 are pressed against the substrate 9. In the state of the main surface 90, the substrate 9 is moved in the scanning direction by the substrate moving mechanism 22, whereby the masking tape 1 is adhered to the non-coating region 92 of the substrate 9 (that is, the first masking strip 11 and the second masking strip 12). . In the masking tape 1 as in the case where the first masking tape 11 and the second masking tape 12 are formed by sequentially adhering to the substrate 9 by the tape sticking device 2 of the first embodiment, the side portions on both sides in the width direction are formed. The second lower edge 1223 of the second masking strip 12 is located outside the first upper edge m3 of the first masking strip 11. Thereby, the portion of the second masking belt 12 that protrudes outward from the first masking belt 11 in the width direction, that is, the dam portion 120 is located on the main surface of the substrate 9® 90 (that is, the plane including the U22 below the first masking tape η). ) More on top. As a result, similarly to the first embodiment, it is possible to easily prevent the meniscus from occurring at the boundary 920 between the non-coating region 92 and the both side application regions 91. The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and various modifications are possible. For example, in the masking tape 1 adhered to the non-coated region 92 of the substrate 9, the side surfaces 1103 of the first masking strip 11 are not necessarily perpendicular to the main surface 90 of the substrate 9 (ie, slightly perpendicular to the first masking strip 11). In the following 1122), as long as the first upper edge 1113 of the first shielding 098108393 43 200946245 belt 11 is located on the second lower edge 1223 of the second shielding tape 12, and further inward in the width direction, the main surface 90 of the substrate 9 may be accompanied. It is inclined toward the inside or outside of the width direction. Similarly, in the second masking strip 12, the side surfaces 1202 of the second masking strip 12 are not necessarily perpendicular to the main surface 9 of the substrate 9 (i.e., slightly perpendicular to the lower surface 1222 of the second masking strip 12). It may be inclined toward the inner side or the outer side in the width direction with the main surface 9〇 of the substrate 9 being separated. However, by making the maximum width of the second masking strip 12 equal to the width of the non-coated region 92, and overlapping the widthwise edges of the second masking strip 12 in a plan view and overlapping the boundary 920 on both sides of the non-coated region 92, It is more sure to prevent the organic EL liquid from adhering to the non-coated area %.丨 In the masking belt! In the middle, the heart 2 of the Zhan section 120 is not necessarily parallel to the main surface 90 of the base phase 9, but by making the lower surface 12 of the Zhan section 120 substantially parallel to the main surface 90 of the substrate 9, the organic rainbow can be prevented as described above. The liquid adheres to the side and uncoated regions 92 of the work mask 11 . In addition, the i-th shield tape ^

It is not necessary to overlap the center line of the non-coated area % with the center line of the second masking band 12, but the center lines of the first masking strip U and the second masking strip 12 are substantially centered on the center of the charm area 92, respectively. The i-th shielding tape U and the second masking tape 12 are adhered to the non-coating region 92 by the wire, and as described above, the organic EL liquid can be made uniform for the non-coating region. - Two coated areas on the both sides (four) coated article In the first embodiment of the first embodiment, the substrate moving mechanism 22 may be used to make the substrate 9 toward the broadcaster 1 The movement is changed so that the first tape is pasted 098108393 44 200946245 = the second tape bonding head 23a is moved toward the sweeping direction, thereby achieving the relative shift based on the scanning direction to the first: the pressing portion 233 ;a relative movement. In addition, it is also possible to replace: head shift = make the i-th adhesive head 23 and the second adhesive head 23 & move: movement = 9 with the substrate holding portion 21 in the direction perpendicular to the scanning direction e ❹ = in the pasting device 2 'When the first tape is attached _ and the second tape is moved in the direction of the ^ direction, when the substrate 9 is moved in the (A direction (or (+) direction), and the first tape is used, the second tape is used. Adhesive head 23a is adhered to the second: the masking strip 11 is in parallel, and the other center strips of the cloth region 92 are JH: to be adhered to the non-coated male belt 11. Further, in the tape-attaching device 2, the tape-attachment head 23 and the second tape-adhesive head 仏 are configured to be perpendicular to the scanning direction: in the tape-attaching device of the second embodiment, Alternatively, instead of using the head moving mechanism 24, the substrate 9 may be moved in the scanning direction by the use of the structure 22, and the tape bonding head may be moved; 3b is moved toward the direction of the drawing. The tape-adhesive head movement is changed so that the substrate 9 and the substrate holding portion 21_ move in a direction perpendicular to the scanning direction. = The masking tape η is not necessarily held by the base (10) 1' before being adhered to the substrate 9 (10), and the first masking strip 11 can be held by the adhesive tape (the same applies to the masking tape 12 of 098108393 45 200946245 2). The masking tape 1 can also be constructed by laminating three or more masking tapes. For example, in the case where the masking tape is constituted by three layers of masking tapes, when the width of the intermediate layer masking tape is smaller than the width of the uppermost masking tape, the masking tape of the intermediate layer can be regarded as the first one together with the masking tape of the lowermost layer. Masking tape. Further, when the width of the masking layer of the intermediate layer is larger than the width of the masking tape of the lowermost layer, the masking tape of the intermediate layer can be regarded as the second masking tape together with the masking tape of the uppermost layer. In the coating apparatus 3 of the coating system of the above embodiment, the number of nozzles provided in the coating head 〇 34 is not limited to three, and the three kinds of organic EL liquids are not necessarily coated at the same time. For example, the same type of organic EL liquid may be simultaneously discharged from three or more nozzles and applied to the substrate 9. In this case, the distance between the adjacent two nozzles in the sub-scanning direction is equal to three times the spacing of the partition walls. Further, it is not necessary to form a closed wall in the coating region of the substrate 9, and the organic coating liquid may be applied to the coating region 9 where no partition wall is provided, at a predetermined interval. Furthermore, in the coating system, it is also possible to replace the two fixed type transfer robots ❹ 81 (see Fig. 1) to be self-propelled! The (or plural) transport robots are configured to sequentially transport the substrate 9 to the tape-attaching device 2, the coating device 3, and the substrate transfer mechanism with the peeling device 4. In addition to the application of the organic EL liquid, the above-mentioned coating system can also be used to apply a fluid material (hereinafter referred to as "hole transport liquid") containing a hole transporting material to the substrate 9 for an organic EL display device. The case where the hole transporting liquid adheres to the non-coating region 92. Here, the term "hole-wheeling material" means the formation of 098108393 46 200946245 organic £L· display

It is not only the organic EL formed by the narrow-shaped electric wheel organic EL material of the material of the so-called "hole transport layer" of the hole-conveying layer. The coating is continued to cover the word injection. The hole is injected into the layer. The organic disorder material or electricity t is used only for coating containing a material for an organic display device, for example, a flat display device such as a fluid material for forming a material, SB', and a device or a plasma display device.

Other types of substrates such as fD _+, which have a coloring material or a fluorescent material battery, and semi-conducting π mura are used for coating various substrates such as wafers and optical disk substrates for organic film solar materials. The detailed description is merely illustrative and not limiting. Therefore, many variations and aspects may be made without departing from the scope of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a configuration diagram of a coating system according to a first embodiment. 2 is a plan view of a substrate. Figure 3 is a cross-sectional view of a portion of the masking tape and the substrate. Figure 4 is a plan view of the tape-attaching device. Figure 5 is a front view of the tape applicator. Figure 6 is a left side view of the tape applicator. Fig. 7 is an enlarged left side view circle of the first tape bonding head. 098108393 47 200946245 Figure 7B is an enlarged left side view of the second tape-adhesive head. Fig. 7C is an enlarged left side view of a portion of the first tape sticking head. Figure 8 is a plan view of the coating apparatus. Figure 9 is a front view of the coating apparatus. Figure 10 is a plan view of the masking tape and the substrate. Figure 11A is a cross-sectional view of a portion of the masking tape and the substrate. Fig. 11B is a cross-sectional view showing a portion of the mask tape and the substrate of the comparative example. Fig. 11C is a cross-sectional view showing a part of the substrate of the comparative example. Figure 12 is a plan view of the tape stripping device. Figure 13A is an enlarged left side view of the stripping head. Figure 13B is an enlarged left side view of a portion with a peeling head. Fig. 14 is a plan view showing the tape applicator of the second embodiment. Figure 15A is an enlarged left side view of the adhesive head. Figure 15B is an enlarged left side view of a portion of the adhesive head. Fig. 16 is a plan view showing the tape applicator of the third embodiment. [Description of main component symbols] 1 ' 71 masking tape 2, 2a, 2b with adhesive device 3 coating device 4 stripping device 8 coating system 9 substrate 098108393 48 200946245 11 first masking strip 12 second masking strip 21, 31, 41 substrate holding portion 22 ' 32 ' 42 substrate moving mechanism 23 first tape bonding head 23a second tape bonding head 23b tape bonding head φ 24, 35, 44 head moving mechanism 27, 27a belt 33 mark detecting portion 34 coating head 36 Liquid receiving portion 37 Nozzle 38 Fluid material supply portion © 43 Stripping head 45 Peeling strip 79 Comparative example substrate 81 Transfer robot 90 Substrate main surface 91 Application area 92, 792 Uncoated area 93 > 793 Organic EL liquid 098108393 49 200946245 111 , 121 Substrate 112 , 122 Adhesive layer 120 檐 201a 1st tape attaching device 201b 2nd tape attaching device 202 Transporting mechanism 221 , 241 Slide rail 230 with bonding portion 231 ' 431 Housing 232 1st supply roll Disk 232a second supply reel 233 first pressing portion 233a second pressing portion 234 first recovery reel 234a second recovery reel 235 cutting portion 236 with separation members 237, 435 Lower opening 238, 436 cylinder 239 Adhesive roller 271 Substrate tape 432 Supply reel 098108393 50 200946245 433 Adhesive mechanism 434 Reel reel 437 713 794 796 920 , 7920 © 921 1103 1111 1113 1122 1123 1202 ® 1203 Press roll cover side bend Part of the boundary of the liquid surface corresponding to the meniscus exposed area, the side of the first masking strip, the upper side of the first masking strip, the first upper edge, the lower side of the first masking strip, the first lower edge, the side of the second masking strip below the second masking strip 1212 Lower 1222 Adhesive layer underside 1223 Second lower edge 2301 ' 2302 Roller with 098108393 51

Claims (1)

200946245 VII. Patent application scope: 1. The type of adhesive tape device is attached to the non-coated area on the main surface of the substrate to prevent the fluid material from adhering to the uncoated area (_king tape); The substrate holding portion holds the substrate; and the bonding mechanism ′ is such that the first lower edge which is an edge of the lower surface of the first mask is located on the boundary between the uncoated region and the coating region on the main surface of the substrate. The inner side of the region is adhered to the uncoated region in parallel with the edge boundary, so that the second lower edge which is an edge of the lower surface of the second mask is located above the lower edge of the ith. The upper surface of the first shielding tape is further outward, and the second shielding tape is adhered to the upper surface of the second shielding tape in parallel with the boundary, thereby moving the first shielding tape toward the loading side. A part of the second masking tape from the main surface of the prescription substrate is provided on the substrate as a portion. ❹ 2. If you apply for the patent scope! The tape attaching device of the present invention, wherein the lower portion of the wide portion of the second masking tape is substantially parallel to the main surface of the substrate. ^ If you apply for a patent range! The tape sticking device, wherein the first shadow edge of the first mask is located at the boundary between the uncoated region and the other body region B by adhering the mask layer to the non-coated region. The other parallel boundary is further located on the inner side of the uncoated region 098108393 52 200946245 by the second masking tape being adhered to the upper surface of the second masking strip, so that the second lower edge of the second masking strip is located a second masking strip that protrudes from the i-th shielding strip toward the outer side and simultaneously leaves the main surface of the substrate while the outer edge of the fifth (5) strip above the other first lower edge is further outside A part of the tape-attaching device of the third aspect of the invention, wherein the first summer shielding tape and the second shielding tape are read in each of the above-mentioned substrates. The center line of the uncoated region. The adhesive tape device of claim 4, wherein the width of the second masking tape is equal to the width of the non-coated region. 6. The tape-adhesive device according to any one of claims 1 to 5, wherein the adhesion of the second masking tape to the first tape is greater than the adhesion of the first masking tape to the substrate. 7. The tape sticking device according to any one of the preceding claims, wherein the tape sticking mechanism includes: a first bonding mechanism affixes the first masking tape to the main surface of the substrate; and a second The adhesion mechanism affixes the second masking tape to the upper surface of the first masking tape that has been adhered to the main surface of the substrate; and the first bonding mechanism includes a first tape supply unit, 098108393 53 200946245, Rolling out the first shielding tape; and the first pressing portion, and pressing the portion of the i-th shielding tape that is unwound from the third tape supply portion toward the non-coating region; the second bonding mechanism is provided with : the second tape supply unit winds up the second masking tape; and the second pressing portion, the portion of the second masking tape that is unwound from the second tape supply unit is adhered to the non-coated region The first masking belt is pressed The first bonding mechanism and the second bonding mechanism are provided with a moving mechanism/moving mechanism in a state where the i-th shielding tape is pressed by the ith urging portion, by causing the substrate to face the non-coating The moving direction parallel to the boundary of the region is relatively moved to the first pressing portion, and the first shielding tape is sequentially adhered along the boundary, and the second shielding tape is pressed by the second pressing portion. Then, the second shielding tape is sequentially attached to the second pressing portion by moving the substrate toward the moving direction, and the second shielding tape is sequentially adhered along the edge boundary. The tape sticking device according to any one of the preceding claims, wherein the tape attaching mechanism includes: a first tape supply unit that winds up the first tape; and a tape supply unit that winds out the second mask tape; (4) °°卩a portion of the first masking tape that is unwound from the first tape supply portion is adhered to the second masking tape; 098108393 54 200946245 with a portion facing the non-coating masking tape and the second masking tape on the substrate Pressed, in The first masking area is affixed to the first position; and the persimmon structure 'in the first masking strip and the second masking strip are in the state of the armor", by causing the substrate to face the non-coating The movement direction parallel to the boundary of the decorative region is relatively moved to the above-mentioned grip portion, and the cover tape and the second masking tape are sequentially adhered along the boundary. 9. A tape-attaching device is attached to a non-coated region on a main surface of a substrate to prevent flow: a masking tape to which the material adheres to the non-coated region; and the device includes: a π-adhesive device having a holding substrate The first substrate holding portion and the first lower edge which is the lower surface of the first masking tape are located on the inner side of the non-coating region at a boundary between the non-coating region and the coating region on the main surface of the substrate And attaching the first masking tape to the first bonding mechanism of the non-coating region in parallel with the boundary; the second tape bonding device includes the second substrate holding portion for holding the substrate, and the second shielding layer a second lower edge of the lower edge of the belt is located further outward than an upper edge of the first masking tape positioned above the first lower edge, and the second masking tape is adhered to the first layer in parallel with the boundary The upper surface of the masking tape, wherein the second shielding tape that protrudes from the first shielding tape toward the outer side and simultaneously away from the main surface of the substrate serves as a second adhesive layer provided on the substrate And a transfer mechanism that carries the substrate from the first tape attaching device and simultaneously moves the 098108393 55 200946245 into the second tape attaching device. 10. A coating system for coating a substrate with a fluid material; the device comprising: the adhesive tape device of any one of claims 1 to 5; the coating device, the first mask tape is adhered to a layer of the second masking tape on the substrate of the second masking tape is coated with a fluid material; and a tape peeling device is used to peel off the i-th masking tape and the second masking tape from the substrate coated with the fluid material; The substrate transfer mechanism sequentially transports the substrate to the tape attaching device, the coating device, and the tape peeling device, and the coating device includes a discharge mechanism that continuously discharges a fluid material toward the substrate. When moving in the main scanning direction, the substrate is relatively moved in the sub-scanning direction perpendicular to the main scanning direction. The moving mechanism moves the discharge mechanism to the substrate in a main scanning direction that is parallel to the main surface of the substrate and intersects with the second shielding strip, and the discharge machine 11 is as described in the patent application.丄 V丄< 13·—the kind of shielding tape, which is closely connected to the main substrate a non-coated area on the surface and a rubbing-proof area; the first masking strip having a lower surface facing the substrate; and the second masking strip 'parallel to the i-th masking strip _ on the masking tape © ' 1 in the first masking zone and the second rhyme-side portion, the second masking is performed by making the lower edge of the second tape smaller than the upper edge of the i-th shielding tape (4) The portion protruding from the outer side of the above-mentioned outer surface is located above the plane including the 4 ® surface of the first masking strip. 卞14. The masking strip of claim 13 of the patent application, wherein the second section The adhesive force to the above-mentioned first masking tape is greater than the above-mentioned i-th shielding tape: the adhesion of the substrate. ❹ 098108393 57