JP2008000678A - Mask member, coating apparatus, coating system and coating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce the size of the meniscus formed on the side surface of a masking tape. <P>SOLUTION: The masking tape 1 is equipped with a tape-like base material 11, a pressure-sensitive adhesive layer 12 and the absorbent members 13 provided on both sides 103 of the masking tape 1. The masking tape 1 is pasted on the main surface 90 of a substrate 9 while its under surface edge 105 is allowed to coincide with the boundary of the coating region and non-coating region 92 on a substrate 9. In the side surface 103 of the masking tape 1, the lateral edge surface of the pressure-sensitive adhesive layer 12 becomes a non-absorbing region 1031 non-absorbent with respect to an organic EL liquid and the exposure region in each of the side surfaces 103 of the absorbent member 13 becomes an absorbing region 1032 absorbent with respect to the organic EL liquid. When the substrate 9 is coated with the organic EL liquid the organic EL liquid 93 adhered to the side surfaces 103 of the masking tape 1 is absorbed by the absorbent members 13. By this constitution, the height of the meniscus 94 formed on each of the side surfaces 103 of the masking tape 1 can be reduced. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention applies a flowable material to a mask member that adheres to a non-application area on a main surface of a substrate and prevents the flowable material from adhering to the non-application area, and a substrate to which the mask member is adhered. Regarding technology.

  2. Description of the Related Art Conventionally, an organic EL display device using an organic EL (Electro Luminescence) material has been developed. For example, in the production of an active matrix drive type organic EL display device using a polymer organic EL material, a glass substrate is used. (Hereinafter simply referred to as “substrate”), formation of TFT (Thin Film Transistor) circuits, formation of ITO (Indium Tin Oxide) electrodes as anodes, formation of barrier ribs, fluid materials including hole transport materials (Hereinafter referred to as “hole transport liquid”), formation of a hole transport layer by heat treatment, flowable material containing an organic EL material (hereinafter referred to as “organic EL liquid”), heat treatment The organic EL layer, the cathode, and the insulating film are sequentially sealed.

  In the manufacture of an organic EL display device, as one of devices for applying a hole transport liquid or an organic EL liquid to a substrate, as shown in Patent Document 1 and Patent Document 2, a plurality of fluid materials are continuously discharged. 2. Description of the Related Art There is known an apparatus for applying a flowable material in a stripe shape on a substrate by moving a nozzle relative to the substrate in a main scanning direction and a sub scanning direction.

  On the surface of the substrate for the organic EL display device, there is a region where a driver circuit is incorporated around a coating region (that is, a light emitting region) where a fluid material such as a hole transport liquid or an organic EL liquid is to be applied. A region necessary for sealing with an insulating film is provided. In the production of an organic EL display device, there is a possibility that a fluid material may adhere to a region around these application regions (hereinafter referred to as “non-application region”) in the process of forming a hole transport layer or an organic EL layer. When the post-process is performed in a state where the fluid material is attached, there is a possibility that the electrode characteristic deterioration or sealing failure may occur. Therefore, it is necessary to prevent the flowable material from adhering to the non-application area of the substrate.

On the other hand, in patent document 3, the adhesive tape for masking which is affixed on the to-be-adhered surface and covers a mask area | region is disclosed, and the side surface (namely, side surface of a base material and an adhesive layer) of the said adhesive tape is made of a liquid absorbent material. Covered. According to Patent Document 3, when the paint is applied to the non-mask area and the adhesive tape with the brush, the liquid absorbent material absorbs the paint applied to the side surface of the adhesive tape, thereby The material is prevented from absorbing the paint. In the pressure-sensitive adhesive tape, penetration of the paint between the pressure-sensitive adhesive layer and the adherend surface is prevented inside the liquid absorbent material by absorption of the paint by the liquid absorbent material. Patent Document 3 also discloses a technique for preventing the coating applied to the side surface of the adhesive tape by the liquid absorbent material at the boundary between the mask area and the non-mask area on the surface to be adhered, and for peeling the adhesive tape cleanly. It is disclosed.
JP 2004-111073 A JP 2004-89771 A JP 2005-524726 A

  By the way, in the application of the flowable material to the substrate for the organic EL display device, when the masking tape is applied to the non-application area to prevent the adhesion of the flowable material to the non-application area, a normal masking tape is used. The fluid material adhered to the side surface of the masking tape forms a meniscus due to the influence of surface tension and gravity.

  In the application of the flowable material by the nozzle as disclosed in Patent Document 1 and Patent Document 2, since the flowable material supplied on the substrate is a very small amount, the flowable material after application is dried in a short time. Harden. Then, the meniscus formed on the side surface of the masking tape protrudes from the thin film of fluid material that has been applied to other regions on the substrate and dried. For this reason, when the masking tape is peeled off, the meniscus may be left on the substrate in a state of protruding from the thin film of the fluid material.

  As described above, in the manufacture of an organic EL display device, various thin films are stacked on a substrate. For example, when the above meniscus is formed when forming the organic EL layer, the thickness of the organic EL layer becomes larger than a predetermined thickness in the vicinity of the edge of the coating region, and the cathode formed in the next step The thickness of the coating may be insufficient in the vicinity of the edge of the application region.

  This invention is made | formed in view of the said subject, and makes it the main objective to make small the meniscus formed in the side surface of a masking tape.

  The invention described in claim 1 is a tape-like or thin plate-like mask member that adheres to a non-application area on a main surface of a substrate and prevents adhesion of a flowable material to the non-application area, and adheres to the substrate A lower surface, an upper surface opposite to the lower surface, and a side surface extending vertically from an edge of the upper surface to an edge of the lower surface, the side surface being in contact with the edge of the lower surface and the edge of the lower surface And a non-absorbing region that is non-absorbable with respect to the flowable material applied to the substrate, and an absorbing region that is absorbable with respect to the flowable material on the upper surface side of the non-absorbing region. With.

  Invention of Claim 2 is a mask member of Claim 1, Comprising: The said upper surface is one main surface on a tape-shaped base material, What is said one main surface of the said base material? The pressure-sensitive adhesive layer is formed on the surface on the opposite side, and the lower surface is the surface on the opposite side to the substrate of the pressure-sensitive adhesive layer.

  Invention of Claim 3 is a mask member of Claim 2, Comprising: The said non-absorbing area | region is a side end surface of the said adhesive layer which is non-absorbable with respect to the said fluid material, The said absorption area | region is the side end surface of the said base material which has an absorptivity with respect to the said fluid material.

  Invention of Claim 4 is a mask member of Claim 2, Comprising: The absorptive member with a higher absorbability with respect to the said fluid material than the said base material and the said adhesive layer is provided in the said side surface. The non-absorbing region is a side end surface of the pressure-sensitive adhesive layer that is non-absorbing with respect to the flowable material, and the absorbing region is an exposed region on the side surface of the absorbent member.

  Invention of Claim 5 is a mask member of Claim 2, Comprising: The sheet-like absorptive member with a higher absorbability with respect to the said fluid material than the said base material and the said adhesive layer is the said group. Provided between the material and the pressure-sensitive adhesive layer, the non-absorbing region is a side end surface of the pressure-sensitive adhesive layer that is non-absorbable with respect to the flowable material, and the absorbing region is the absorbent It is an exposure area | region in the said side surface of a member.

  A sixth aspect of the present invention is the mask member according to the fourth or fifth aspect, wherein the base material is non-absorbable with respect to the flowable material.

  A seventh aspect of the present invention is the mask member according to any one of the first to sixth aspects, further comprising a non-absorbing region and an absorbing region similar to the side surface on the side opposite to the side surface. A side is further provided.

  The invention according to claim 8 is a coating apparatus for applying a fluid material to a substrate, wherein the mask member according to any one of claims 1 to 7 is a boundary between a non-coated region and a coated region on the substrate. A substrate holding part that holds the substrate that is in close contact with the non-application area while matching the edge of the lower surface, a nozzle that continuously discharges a flowable material toward the substrate, and the nozzle The fluid material is applied to a region including the mask member on the substrate by moving relative to the substrate in a main scanning direction parallel to the principal surface of the substrate and intersecting the edge. A scanning mechanism; and a sub-scanning mechanism that moves the nozzle relative to the substrate in a sub-scanning direction that is parallel to the main surface of the substrate and perpendicular to the main scanning direction.

  A ninth aspect of the present invention is the coating apparatus according to the eighth aspect, wherein the fluid material includes a pixel forming material for a flat display device.

  A tenth aspect of the present invention is the coating apparatus according to the ninth aspect, wherein the pixel forming material is an organic EL material or a hole transport material for an organic EL display device.

  The invention according to claim 11 is an application system for applying a flowable material to a substrate, wherein the mask member according to any one of claims 1 to 7 is a boundary between a non-application area and an application area on the substrate. A mask member contact device for bringing the edge of the lower surface into close contact with the non-application region, a coating device according to any one of claims 8 to 10, and a mask member from a substrate coated with a flowable material A mask member peeling device for peeling the substrate, and a substrate carrying mechanism for carrying the substrate sequentially to the mask member contact device, the coating device, and the mask member peeling device.

  A twelfth aspect of the present invention is a coating method in which a fluid material is coated on a substrate, and a) the mask member according to any one of the first to seventh aspects includes a non-coated region and a coated region on the substrate. The nozzle is parallel to the main surface of the substrate while continuously ejecting a fluid material from the nozzle toward the substrate that is in close contact with the non-application area while aligning the edge of the lower surface with the boundary of Applying the flowable material to a region including the mask member on the substrate by moving relatively in a main scanning direction intersecting the edge; and b) applying the nozzle to the main of the substrate. A step of moving relatively in the sub-scanning direction parallel to the surface and perpendicular to the main scanning direction, and c) a step of repeating the step a) and the step b).

  A thirteenth aspect of the present invention is the coating method according to the twelfth aspect, wherein the fluid material includes a pixel forming material for a flat display device.

  The invention according to claim 14 is the coating method according to claim 13, wherein the pixel forming material is an organic EL material or a hole transport material for an organic EL display device.

  In the present invention, the meniscus formed on the side surface of the masking tape can be reduced. In the inventions according to claims 8 to 14, the fluid material can be applied onto the substrate while improving the uniformity of the film thickness.

  FIG. 1 is a diagram showing a configuration of an application system 8 that applies a fluid material to a substrate to which a masking tape according to a first embodiment of the present invention is attached. The coating system 8 is a system for coating a fluid material containing a pixel forming material on a glass substrate (hereinafter simply referred to as “substrate”) for a flat display device. In the present embodiment, in the coating system 8, a fluid material containing an organic EL material (hereinafter referred to as “organic EL liquid”) is coated on a substrate for an active matrix driving type organic EL (Electro Luminescence) display device. Is done. The organic EL liquid contains an organic solvent such as xylene and mesitylene (in this embodiment, xylene) in addition to the organic EL material.

  FIG. 2 is a plan view showing the substrate 9 on which the masking tape 1 which is a tape-like mask member is attached. In FIG. 2, parallel oblique lines are given to a region 91 (hereinafter referred to as “application region”) to which the organic EL liquid is applied by the coating system 8 (see FIG. 1). In the present embodiment, four application regions 91 are provided on the substrate 9, and four substrates for an organic EL display device are manufactured from one substrate 9. The lattice-shaped region 92 around the four application regions 91 is a region where the organic EL liquid should not be applied because it is used for incorporating a driver circuit or sealing with an insulating film in a later process. "Non-application area 92". As shown in FIG. 2, the masking tape 1 is affixed (that is, in close contact) to the non-application area 92 on the main surface 90 of the substrate 9 to prevent the organic EL liquid from adhering to the non-application area 92.

  As shown in FIG. 1, the coating system 8 includes a tape applicator 2 that applies a masking tape 1 (see FIG. 2) to a non-application area 92 on the substrate 9, and an organic coating toward the substrate 9 to which the masking tape 1 is applied. The coating apparatus 3 for applying the organic EL liquid to the region including the masking tape 1 by moving the nozzle relative to the substrate 9 while continuously discharging the EL liquid from the nozzle, and the organic EL liquid was applied A tape peeling device 4 for peeling the masking tape 1 from the substrate 9 is provided.

  The coating system 8 further includes a fixed transfer robot 6 between the tape applying device 2 and the coating device 3 and between the coating device 3 and the tape peeling device 4. In the coating system 8, the two transport robots 6 are substrate transport mechanisms that transport the substrate 9 in order to the tape applying device 2, the coating device 3, and the tape peeling device 4.

  FIG. 3 is a cross-sectional view of the masking tape 1 and a part of the substrate 9 shown in FIG. 2 which are cut perpendicularly to the longitudinal direction of the masking tape 1 at the position AA in FIG. As shown in FIG. 3, the masking tape 1 is a tape-like base material 11 and one surface 112 of the base material 11 (that is, the lower surface in FIG. 3, hereinafter referred to as “base material lower surface 112”). .) The pressure-sensitive adhesive layer 12 formed thereon, and the groove portions extending in the longitudinal direction formed in the side surfaces 103 on both sides of the masking tape 1 (specifically, formed on the sides of the base material 11 and the pressure-sensitive adhesive layer 12). A) an absorbent member 13 provided.

  The absorptive member 13 is formed of a material having higher absorbability with respect to the organic EL liquid than the base material 11 and the pressure-sensitive adhesive layer 12. In this Embodiment, the base material 11 and the adhesive layer 12 are formed with the material which is substantially non-absorbable with respect to organic EL liquid. Here, the substantial non-absorbability of the base material 11 and the pressure-sensitive adhesive layer 12 with respect to the organic EL liquid means that a small amount of the organic EL liquid applied to the masking tape 1 by the coating device 3 is in a short time (for example, several seconds). This means that the organic EL liquid is hardly (or not) absorbed by the substrate 11 and the pressure-sensitive adhesive layer 12 during drying.

  The base material 11 is formed of, for example, a plastic film. Examples of the plastic film used as the substrate 11 include polyolefin films such as polyethylene and polypropylene, polyester films such as polyethylene terephthalate and polybutylene terephthalate, polyamide films such as nylon, triacetyl cellulose film, and polyimide film. is there. From the viewpoint of solvent resistance, water resistance and the like, the base material 11 is preferably formed from a polyester film, and from the viewpoint of heat resistance, the base material 11 is preferably formed from a polyimide film. In the present embodiment, the substrate 11 is formed of polyethylene terephthalate (PET).

  The pressure-sensitive adhesive layer 12 is formed of, for example, a polyester pressure-sensitive adhesive or an acrylic pressure-sensitive adhesive. As the polyester-based pressure-sensitive adhesive, from the viewpoint of improving the wettability of the pressure-sensitive adhesive layer 12, for example, a diol compound selected from polycarbonate diol, polycaprolactone diol, and the like (preferably a hydroxyl value of 35 to 130 KOHmg / g (more Preferably, those containing polyesters obtained from sebacic acid, adipic acid, azelaic acid and dibasic acid selected from phthalic acid are preferred.

  The weight average molecular weight (Mw) of the polyester may be 10,000 or more (more preferably 20,000 or more) from the viewpoint of ensuring cohesion as an adhesive and improving heat resistance and durability. Preferably, from the viewpoint of preventing the viscosity from becoming excessively high and facilitating the formation of the pressure-sensitive adhesive layer 12, the viscosity is preferably 100,000 or less (more preferably 80,000 or less). Here, a weight average molecular weight means the weight average molecular weight of standard polystyrene conversion by gel permeation chromatography (GPC).

  As an acrylic adhesive, what contains the acrylic polymer which contains (meth) acrylic-acid alkylester and a hydrophilic monomer as a monomer unit, for example is preferable. The weight average molecular weight of the acrylic polymer is preferably 300,000 or more (more preferably 500,000 or more) from the viewpoint of ensuring cohesion as an adhesive and improving heat resistance and durability. From the viewpoint of preventing the viscosity from becoming excessively high and facilitating the formation of the pressure-sensitive adhesive layer 12, the viscosity is preferably 2 million or less (more preferably 1.7 million or less).

  As the alkyl group of the (meth) acrylic acid alkyl ester, those having 2 to 14 carbon atoms (more preferably 4 to 8 carbon atoms) are preferable, for example, ethyl group, propyl group, isopropyl group, butyl group, isobutyl. Group, isoamyl group, hexyl group, heptyl group, 2-ethylhexyl group, isooctyl group, isononyl group, isodecyl group are used.

  Examples of the hydrophilic monomer include hydroxyl group-containing monomers such as 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, and (meth) acrylic acid. Amino group-containing monomers such as dimethylaminoethyl, diethylaminoethyl (meth) acrylate, t-butylaminoethyl (meth) acrylate, (meth) acrylamide, N, N-diethyl (meth) acrylamide, N, N- Dimethyl (meth) acrylamide, N-methylol (meth) acrylamide, N-methoxymethyl (meth) acrylamide, N-butoxymethyl (meth) acrylamide, N, N-methylenebis (meth) acrylamide, N-isopropylacrylamide, N, N -Amino acids such as dimethylaminopropylacrylamide Dod group-containing monomers are used. (Meth) acrylonitrile, N- (meth) acryloylmorpholine, N-vinyl-2-pyrrolidone, N-vinylcaprolactam, N-cyclohexylmaleimide, N-phenylmaleimide and the like are also used as hydrophilic monomers. Furthermore, two or more of the above hydrophilic monomers may be used in combination.

  As the absorbent member 13, for example, a porous polymer used for a membrane filter or the like is used. In this case, in order to prevent generation of particles from the absorbent member 13, it is preferable that the porous polymer is provided with a particle prevention measure.

  In the masking tape 1 shown in FIG. 3, the base material lower surface 112 and the main surface 111 of the base material 11 opposite to the base material lower surface 112 (the upper surface in FIG. 3, hereinafter “base material upper surface 111”). )), That is, the thickness of the substrate 11 is about 37 μm. Further, the main surface 121 (upper surface in FIG. 3) on the base material 11 side of the pressure-sensitive adhesive layer 12 and the main surface 122 (lower surface in FIG. 3) opposite to the base material 11 side, Hereinafter, the distance to the “adhesive layer lower surface 122”, that is, the thickness of the adhesive layer 12 is about 15 μm. In FIG. 3, for the sake of illustration, the thickness of the masking tape 1 is drawn thicker than the actual thickness compared to the width (the same applies to FIGS. 16.A to 16.C, FIGS. 18 and 19).

  In the masking tape 1, the adhesive layer lower surface 122 is a lower surface that is in close contact with the main surface 90 of the substrate 9 of the masking tape 1, and the base material upper surface 111 is opposite to the lower surface of the masking tape 1 and is parallel to the lower surface. It becomes the upper surface. The side surfaces 103 on both sides of the masking tape 1 are masked from edges 104 (hereinafter referred to as “upper surface edges 104”) extending in the longitudinal direction on both sides in the width direction of the upper surface (base material upper surface 111) of the masking tape 1. 1 on both sides in the width direction of the lower surface (adhesive layer lower surface 122) of the lower surface (hereinafter referred to as “lower surface edge 105”) extending vertically.

  As shown in FIG. 2, each of the three masking tapes 1 is configured such that at least one of the lower surface edges 105 on both sides in the width direction coincides with the boundary between the coating region 91 and the non-coating region 92 on the substrate 9. Affixed to the main surface 90.

  As shown in FIG. 3, on the side surfaces 103 on both sides of the masking tape 1, the side end surface 1031 of the adhesive layer 12 extending along the lower surface edge 105 of the masking tape 1 is applied to the organic EL liquid applied to the substrate 9. The exposed region 1032 on the side surface 103 of the absorbent member 13 is a region having absorbability with respect to the organic EL liquid above the side end surface 1031 of the pressure-sensitive adhesive layer 12. Hereinafter, the side end face 1031 of the pressure-sensitive adhesive layer 12 is referred to as “non-absorbing region 1031”, and the exposed region 1032 of the absorbent member 13 is referred to as “absorbing region 1032”.

  In other words, both side surfaces 103 of the masking tape 1 (that is, the one side surface 103 and the side surface 103 opposite to the one side surface 103) are in contact with the lower surface edge 105 of the masking tape 1 and along the lower surface edge 105. A non-absorbing region 1031 exists, and an absorbing region 1032 disposed away from the lower surface edge 105 is provided above the non-absorbing region 1031 (that is, the base material upper surface 111 side which is the upper surface of the masking tape 1).

  4 to 6 are a plan view, a front view, and a left side view, respectively, showing the configuration of the tape applicator 2. As shown in FIGS. 4 to 6, the tape applicator 2 includes a substrate holding unit 21 that holds the substrate 9, a substrate moving mechanism 22 that moves the substrate 9 together with the substrate holding unit 21, and before the organic EL liquid is applied. A tape applying head 23 for applying the masking tape 1 (see FIG. 2) to the non-application area 92 on the substrate 9, and a head moving mechanism 24 for moving the tape applying head 23 in a direction perpendicular to the moving direction of the substrate 9. Prepare.

  In the tape applicator 2, the substrate moving mechanism 22 causes the substrate 9 to move in the horizontal direction along the rails 221 together with the substrate holding unit 21 and to rotate about a rotation axis that faces the vertical direction. Further, the tape moving head 23 is moved in the horizontal direction along the rail 241 above the moving range of the substrate 9 by the head moving mechanism 24.

  FIG. A is an enlarged left side view of the configuration of the tape applying head 23. FIG. FIG. In A, the internal structure accommodated in the housing 231 of the tape sticking head 23 is drawn. In the tape application head 23, the masking tape 1 is applied using a two-layer tape 25 in which the masking tape 1 is held on one main surface of the base tape 251.

  FIG. As shown in A, the tape sticking head 23 has the supply reel 232 around which the unused tape 25 is wound, the sticking part 233 for separating the masking tape 1 from the tape 25 and sticking it to the substrate 9, and the masking tape 1 separated. A recovery reel 234 that winds and collects the subsequent tape 25 (that is, the base tape 251), and a housing 231 that accommodates these components are provided.

  When the masking tape 1 is applied to the substrate 9 by the tape applying apparatus 2, first, the tape applying head 23 is moved by the head moving mechanism 24 shown in FIGS. To do. At this time, the board | substrate 9 is located in the right side of the tape sticking head 23 in FIG. Subsequently, the substrate moving mechanism 22 moves the substrate 9 to the left in FIG. It is located at the sticking start position shown in A. When the substrate 9 is located at the sticking start position, only the masking tape 1 is cut on the side facing the cutting part 235 of the tape 25 by the cutting part 235 of the sticking part 233 of the tape sticking head 23.

  The cut masking tape 1 has a supply reel 232 and a recovery reel 234 shown in FIG. By rotating counterclockwise in A, it is sent together with the base tape 251 to the leading end of the tape separating member 236 of the sticking portion 233, and at the leading end, on the opposite side to the direction in which the base tape 251 has been sent. By being guided, the masking tape 1 is peeled off from the base tape 251, and the tip portion thereof moves from the lower opening 237 of the housing 231 toward the substrate 9.

  In parallel with this, the air cylinder 238 causes the sticking roller 239 to move downward through the lower opening 237, and FIG. As shown to B, the front-end | tip part of the masking tape 1 is pressed and stuck toward the main surface 90 of the board | substrate 9 from an upper side. At the same time, the substrate 9 is moved by the substrate moving mechanism 22 (see FIG. 6). Start moving to the left of A. Then, as the tape 25 is continuously fed out from the supply reel 232 and the substrate 9 continues to move, FIG. As shown in B, the masking tape 1 is stuck on the main surface 90 of the substrate 9.

  FIG. In the tape applying head 23 shown in A, only the masking tape 1 on the tape 25 is cut again by the cutting portion 235, and the masking tape 1 is attached to the substrate 9 up to the rear end portion. Close contact with the surface 90. In the tape application head 23, the application roller 239 may be retracted into the housing 231 except when the leading end and the rear end of the masking tape 1 are applied. Alternatively, the masking tape 1 may be started to be applied to the substrate 9 that is moving leftward at a speed equal to the supply speed of the tape 25 while supplying the tape 25.

  In the tape applicator 2, as shown in FIG. 2, among the lattice-shaped non-application areas 92 of the substrate 9, three areas extending in parallel to the moving direction of the substrate 9 by the substrate moving mechanism 22 (that is, in FIG. 2). The masking tape 1 is attached only to the region extending in the vertical direction), and the masking tape 1 is not applied to the region extending perpendicularly to the moving direction of the substrate 9 (that is, the region extending in the left-right direction in FIG. 2). As will be described later, in the coating system 8, the organic EL liquid is not applied to the area where the masking tape 1 is not applied.

  8 and 9 are a plan view and a front view showing the configuration of the coating apparatus 3. As shown in FIG. 9, the coating apparatus 3 includes a substrate holding portion 31 that holds the substrate 9 on which the masking tape 1 (see FIG. 2) is attached (that is, in close contact) with the non-application region 92. The holding unit 31 includes a heating mechanism (not shown) using a heater. In FIG. 8 and FIG. 9, illustration of the masking tape 1 affixed on the main surface 90 of the substrate 9 is omitted for convenience of illustration.

  Further, as shown in FIGS. 8 and 9, the coating apparatus 3 is configured so that the substrate holding portion 31 is in a predetermined direction parallel to the main surface of the substrate 9 (that is, the vertical direction in FIG. A substrate moving mechanism 32 that moves horizontally in the direction and rotates about an axis that faces in the vertical direction, and a mark detection unit 33 that picks up and detects a position adjustment mark (not shown) formed on the substrate 9. The coating head 34, which is a discharge mechanism that continuously discharges the organic EL liquid from the three nozzles 37 toward the substrate 9 on the substrate holding unit 31, and the coating head 34 is parallel to the main surface of the substrate 9 and is A head moving mechanism 35 that horizontally moves in a direction perpendicular to the scanning direction (that is, the horizontal direction in FIG. 8 and hereinafter referred to as “main scanning direction”), is provided on both sides of the substrate holder 31 in the main scanning direction. Together with the application head 34 Two liquid receiving part 36 for receiving the organic EL solution, and comprises a flowable material supply unit 38 supplies the organic EL solution three nozzles 37 of the coating head 34. In the coating apparatus 3, the head moving mechanism 35 and the substrate moving mechanism 32 are a main scanning mechanism and a sub scanning mechanism that move the three nozzles 37 relative to the substrate 9 in the main scanning direction and the sub scanning direction.

  In the coating head 34, the three nozzles 37 are arranged substantially linearly apart in the left-right direction in FIG. 8 (that is, the main scanning direction) and in the up-down direction in FIG. 8 (that is, the sub-scanning direction). The organic EL liquid that is disposed slightly shifted and is discharged from these nozzles 37 is applied to the grooves between the partition walls that extend in the main scanning direction and are formed in advance in the application region 91 (see FIG. 2) of the substrate 9. The In the present embodiment, the distance in the sub-scanning direction between the two adjacent nozzles 37 is equal to the pitch between the partition walls (hereinafter referred to as “partition wall pitch”). In the coating head 34, three types of organic EL liquids each including three types of organic EL materials having different colors from red (R), green (G), and blue (B) are discharged from the three nozzles 37.

  FIG. 10 is a diagram showing a flow of an organic EL liquid application operation by the coating apparatus 3. When the organic EL liquid is applied by the coating device 3, first, the substrate 9 having the masking tape 1 (see FIG. 2) attached to the non-application region 92 by the tape applying device 2 is placed on the substrate holding unit 31. Then, the substrate moving mechanism 32 is driven based on the output from the mark detection unit 33, and the substrate 9 is positioned at the application start position indicated by the solid line in FIG. 8 (step S11). The coating head 34 is previously positioned at a position indicated by a solid line in FIGS.

  Subsequently, the organic EL liquid is supplied from the fluid material supply unit 38 to the coating head 34, and the discharge of the organic EL liquid is started from the nozzle 37, and the head moving mechanism 35 is driven to move the coating head 34. Be started. In the coating device 3, the organic EL liquid is continuously discharged from the nozzle 37 toward the substrate 9, and the nozzle 37 is attached to the substrate 9 from the left side to the right side in FIG. By moving relative to the upper edge 104 and the lower edge 105 (see FIG. 3) of the masking tape 1 in the main scanning direction, three adjacent grooves between the partition walls of the substrate 9 and the masking tape 1 An organic EL solution is applied to the substrate (step S12).

  When the coating head 34 moves to the position indicated by the two-dot chain line in FIGS. 8 and 9, the substrate moving mechanism 32 is driven, and the substrate 9 is moved together with the substrate holding portion 31 in FIG. (Ii) Move by a distance 3 times the partition pitch (step S13). At this time, in the coating head 34, the organic EL liquid is continuously discharged from the three nozzles 37 toward the liquid receiving unit 36.

  When the movement of the substrate 9 in the sub-scanning direction is completed, it is confirmed whether or not the substrate 9 and the substrate holder 31 have moved to the application end position indicated by the two-dot chain line in FIG. 8 (step S14). If not, the coating head 34 returns to step S12 and moves from the right side to the left side in FIG. 8 while discharging the organic EL liquid (that is, in the main scanning direction). Three types of organic EL liquids are applied to (Step S12). Then, after the substrate 9 is moved again in the sub-scanning direction, it is confirmed whether or not the substrate 9 has moved to the coating end position (steps S13 and S14).

  FIG. 11 is a plan view showing the substrate 9 to which the masking tape 1 is attached, and FIG. 12 is a cross-sectional view of the masking tape 1 and the substrate 9 at the position BB in FIG. In the coating apparatus 3, the movement of the coating head 34 in the main scanning direction and the movement of the coating head 34 in the main scanning direction are performed until the substrate 9 is located at the coating end position. The pitch movement is repeated (steps S12 to S14). As a result, as shown in FIGS. 11 and 12, the region including the masking tape 1 on the substrate 9 (that is, on the masking tape 1 affixed to the non-application region 92). And the groove between the partition walls of the application region 91) are applied in stripes. And when the board | substrate 9 moves to the application completion position shown with a dashed-two dotted line in FIG. 8, discharge of the organic EL liquid from the nozzle 37 is stopped, and application | coating of the organic EL liquid with respect to the board | substrate 9 is complete | finished. In FIG. 11, for convenience of illustration, the width and pitch of the organic EL liquid 93 applied on the substrate 9 are drawn larger than actual.

  In the coating apparatus 3, the organic EL liquid 93 is continuously discharged from the nozzles 37 (see FIGS. 8 and 9) of the coating head 34 while the organic EL liquid 93 is being applied. In the coating apparatus 3, the non-coating region 92 extends in a direction perpendicular to the moving direction of the substrate 9 (that is, a region extending in the left-right direction in FIG. 11 and the masking tape 1 is omitted). The substrate 9 is moved in the sub-scanning direction by a distance equal to the width of the region (that is, the vertical width in FIG. 11) while the coating head 34 is kept on the liquid receiving unit 36. Application of the organic EL liquid 93 to the region is avoided.

  FIG. 13 is a plan view showing the configuration of the tape peeling device 4. As shown in FIG. 13, the tape peeling device 4 includes a tape peeling head 43 instead of the tape sticking head 23 of the tape sticking device 2 shown in FIGS. 4 to 6. Other configurations of the tape peeling device 4 are substantially the same as those of the tape applying device 2.

  The tape peeling device 4 includes a substrate holding unit 41 that holds the substrate 9, a substrate moving mechanism 42 that moves the substrate 9 together with the substrate holding unit 41, a tape peeling head 43 that holds and peels the masking tape 1 (see FIG. 2), In addition, a head moving mechanism 44 that moves the tape peeling head 43 in a direction perpendicular to the moving direction of the substrate 9 is provided. In the tape peeling device 4, the substrate moving mechanism 42 causes the substrate 9 to move in the horizontal direction along the rails 421 together with the substrate holding portion 41 and to rotate about a rotation axis that faces in the vertical direction. Further, the tape moving head 43 is moved horizontally along the rail 441 above the moving range of the substrate 9 by the head moving mechanism 44.

  FIG. A is an enlarged left side view of the configuration of the tape peeling head 43. FIG. FIG. Even in A, FIG. Similarly to A, the internal configuration of the housing 431 of the tape peeling head 43 is depicted. FIG. As shown to A, the tape peeling head 43 adheres to the masking tape 1, the peeling tape 45 holding at least a part of the masking tape 1, and the peeling tape 45 with the adhesive surface of the peeling tape 45 facing the masking tape 1 An adhesive mechanism 433 that is a peeling tape guide portion that guides 45 to sequentially adhere to the masking tape 1 on the substrate 9, a supply reel 432 that is a peeling tape supply portion that supplies the unused peeling tape 45 to the adhesive mechanism 433, A recovery reel 434, which is a peeling tape recovery unit for collecting the tape 45 from the substrate 9 together with the masking tape 1 adhered to the release tape 45, and a housing 431 for housing these components are provided. The adhesion mechanism 433 includes an air cylinder 436 and a pressing roller 437. Further, the width of the peeling tape 45 is larger than the width of the masking tape 1.

  When the masking tape 1 is peeled from the substrate 9 by the tape peeling device 4, first, the substrate 9 and the tape peeling head 43 are moved by the substrate moving mechanism 42 and the head moving mechanism 44 (see FIG. 13) to start the peeling start position. Located in. That is, the tip of the masking tape 1 to be peeled is positioned below the lower opening 435 of the housing 431 of the tape peeling head 43.

  Subsequently, the pressure roller 437 is moved downward through the lower opening 435 by the air cylinder 436, and the peeling tape 45 is pressed against the tip of the masking tape 1 from the upper side (that is, the side opposite to the adhesive surface of the peeling tape 45). And stick. Next, the substrate 9 is moved by the substrate moving mechanism 42 as shown in FIG. Start moving to the left in A. At the same time, the supply reel 432 and the recovery reel 434 shown in FIG. When the clockwise rotation in A is started and the peeling tape 45 wound around the supply reel 432 is sent out, the pressing roller 437 moves upward and returns to the original position, so that FIG. As shown in B, the tip of the masking tape 1 adhered to the peeling tape 45 peels from the substrate 9. Then, the peeling tape 45 is continuously fed from the supply reel 432 and the substrate 9 continues to move, whereby the masking tape 1 on the substrate 9 is peeled off from the substrate 9 while being adhered to the peeling tape 45, and the recovery reel 434. Is wound up and collected.

  FIG. 15 is a cross-sectional view of the substrate 9 corresponding to FIG. In the tape peeling apparatus 4, the masking tape 1 is peeled from the substrate 9 on which the organic EL liquid 93 is applied, so that the organic EL liquid 93 is left only on the application region 91 of the substrate 9 as shown in FIG. The As described above, in the tape peeling device 4 shown in FIG. 13, the substrate 9 is moved along the direction in which the masking tape 1 is applied by the substrate moving mechanism 42 while the masking tape 1 is held and lifted by the tape peeling head 43. The masking tape 1 is peeled from the substrate 9 by moving.

  In the tape peeling device 4, the upper surface of the masking tape 1 to which the organic EL liquid is adhered is covered with the peeling tape 45 and the masking tape 1 is peeled off from the substrate 9, so that the organic EL liquid adhered on the masking tape 1 drops on the substrate 9. The masking tape 1 can be recovered without causing it. Note that the start of adhesion of the release tape 45 to the masking tape 1 may be performed on the substrate 9 that is moving at a speed equal to the supply speed of the release tape 45 while supplying the release tape 45.

  As described above, in the coating system 8, the tape sticking device 2 and the tape peeling device 4 are each a mask member contact device that causes the masking tape 1 as a mask member to closely contact the non-application region 92 (see FIG. 2) of the substrate 9. In addition, a mask member peeling apparatus for peeling the mask member from the substrate 9 is provided.

  Next, the operation of applying the organic EL liquid to the substrate 9 by the application system 8 will be described. In the coating system 8, first, the substrate 9 is carried into the tape applicator 2 shown in FIGS. On the substrate 9, a TFT circuit, an ITO electrode, a partition wall and a hole transport layer are formed in advance. Subsequently, after the masking tape 1 is sequentially applied to the non-application area 92 on the substrate 9 in the tape applying device 2, the substrate 9 is unloaded from the tape applying device 2 by the transport robot 6 (see FIG. 1). And it carries in to the coating device 3 shown in FIG.

  In the coating device 3, the organic EL liquid is discharged toward the substrate 9 on which the masking tape 1 is applied to the non-application region 92, and the region on the substrate 9 including the masking tape 1 (that is, the region on the masking tape 1, and The organic EL liquid is applied in stripes to the grooves between the partition walls of the application region 91.

  FIG. A and FIG. B is a cross-sectional view showing a part of the substrate 9 coated with the organic EL liquid 93 together with a part of the masking tape 1. FIG. A shows a state immediately after the organic EL liquid 93 is applied to the substrate 9, and FIG. B shows a state after a short time (for example, several seconds) has elapsed since the application of the organic EL liquid 93. FIG. A and FIG. In B, for convenience of illustration, the thickness of the organic EL liquid 93 is drawn larger than the actual thickness (the same applies to FIG. 16C described later).

  FIG. As shown in A, the organic EL liquid 93 immediately after application has a substantially uniform thickness on the main surface 90 of the substrate 9 and the base material upper surface 111 of the masking tape 1. Due to the influence, the lower surface edge 105 side is thicker than the upper surface edge 104 side.

  Here, instead of the masking tape 1, FIG. A masking tape 71 of a comparative example in which an absorbent member is not provided on the side surface shown in A (that is, a masking tape 71 composed only of a base material 711 and an adhesive layer 712 that are non-absorbable with respect to the organic EL liquid) When the organic EL liquid 793 is applied to the liquid crystal, the organic EL liquid 793 flows under the influence of the surface tension and gravity of the substrate 79 and the masking tape 71, and FIG. A meniscus 794 is formed on the side surface 7103 of the masking tape 71.

  Specifically, on the side surface 7103 of the masking tape 71, the organic EL liquid 793 attached to the side surface 7103 is pulled by gravity from the upper surface edge 7104 side to the lower surface edge 7105 side, but also in the opposite direction by the surface tension (that is, The film of the organic EL liquid 793 is formed as a meniscus 794 on the side surface 7103. Further, the organic EL liquid 793 flows to the side away from the upper surface edge 7104 on the base material upper surface 7111 of the masking tape 71 due to surface tension, and in the direction away from the lower surface edge 7105 of the masking tape 71 on the main surface 790 of the substrate 79. And flow.

  On the other hand, in the masking tape 1, FIG. As shown in B, since the absorption region 1032 by the absorbent member 13 is provided in the side surface 103, the organic EL liquid 93 attached to the side surface 103 is quickly absorbed by the absorbent member 13 immediately after application. Thereby, the height of the meniscus 94 formed on the side surface 103 of the masking tape 1 (that is, the height from the main surface 90 of the substrate 9) can be reduced to the same level as the height of the non-absorbing region 1031.

  In the masking tape 1, a non-absorbing region 1031 is provided between the absorbing region 1032 and the lower surface edge 105 on the side surface 103, and the absorbent member 13 is further covered by the non-absorbing adhesive layer 12 with the main surface of the substrate 9. Therefore, the organic EL liquid 93 once absorbed by the absorbent member 13 is prevented from seeping out from the lower side of the masking tape 1 and adhering to the non-application area 92 of the substrate 9. Can do. Further, it is possible to prevent a part of the absorbent member 13 that has become brittle due to the absorption of the organic EL liquid from falling off the masking tape 1 and remaining as a residue on the main surface 90 of the substrate 9.

  When the application of the organic EL liquid is completed, the substrate 9 is unloaded from the coating apparatus 3 by the transfer robot 6 shown in FIG. On the substrate 9, the solvent component of the organic EL liquid applied by the coating apparatus 3 is evaporated by the heating mechanism of the substrate holding unit 31 (see FIG. 9) of the coating apparatus 3, and the masking tape is in a state where the organic EL liquid is dried. 1 and the coating area 91 are attached.

  The substrate 9 coated with the organic EL liquid is carried into the tape peeling device 4 shown in FIG. 13 by the transport robot 6, and the masking tape 1 coated with the organic EL liquid is peeled from the substrate 9. In the coating system 8, when the peeling of the masking tape 1 from the substrate 9 is completed, the substrate 9 is unloaded from the tape peeling device 4 to the outside of the coating system 8, and the application of the organic EL liquid to the substrate 9 is completed. Note that in the coating system 8, the organic EL liquid is actually continuously applied to a plurality of substrates.

  FIG. C is a cross-sectional view showing a part of the substrate 9 from which the masking tape 1 has been peeled off. FIG. B is a cross-sectional view showing a part of the substrate 79 from which the masking tape 71 of the comparative example has been peeled off. As described above, in the coating apparatus 3, FIG. Since the organic EL liquid 93 is absorbed by the absorbent member 13 on the side surface 103 of the masking tape 1 as shown in FIG. As shown in FIG. 17C, the height of the meniscus 94 of the organic EL liquid 93 remaining in the vicinity of the edge of the application region 91 (that is, in the vicinity of the non-application region 92 of the application region 91) after the masking tape 1 is peeled off. It can be made smaller than the meniscus 794 on the substrate 79 of the comparative example shown in B. That is, the coating apparatus 3 can apply the organic EL liquid onto the substrate 9 while improving the uniformity of the film thickness of the organic EL liquid.

  Thereby, in the post process (baking process), when the substrate 9 is heated to completely evaporate the solvent component from the organic EL liquid 93 and fix the organic EL layer on the substrate 9, the vicinity of the edge of the coating region 91 is obtained. It can suppress that the thickness of the organic EL layer becomes thick due to the organic EL material included in the meniscus 94. As a result, it is possible to prevent the thickness of the other layer (in this embodiment, the cathode layer) laminated on the organic EL layer in the subsequent steps from being insufficient in the vicinity of the edge of the application region 91. .

  By the way, the content rate of the organic EL material in the organic EL liquid is usually about 2% to 3%, and the thickness of the organic EL layer formed by baking is smaller than the thickness of the organic EL liquid 93 before baking. Become. Moreover, since the thickness of the organic EL layer greatly affects the performance of the organic EL display device, it needs to be controlled with high accuracy. Therefore, it can be said that the coating apparatus 3 that can reduce the height of the meniscus 94 and improve the uniformity of the film thickness of the organic EL layer is particularly suitable for the application of the organic EL liquid.

  In the masking tape 1, FIG. As shown in B, the absorbent member 13, which is a separate member from the base material 11 and the pressure-sensitive adhesive layer 12, is provided in the side surface 103 to form an absorption region 1032. Therefore, as a material for forming the absorption region 1032, a material having high absorbability with respect to the organic EL liquid can be used without being limited to specifications required for the base material 11 or the pressure-sensitive adhesive layer 12. Thereby, the absorptivity with respect to the organic EL liquid in the side surface 103 of the masking tape 1 can be made higher.

  In particular, in the application of the organic EL liquid by discharging from the nozzle 37 as in the coating apparatus 3, since the organic EL liquid supplied onto the substrate 9 is very small, the organic EL liquid after application is dried in a short time. Harden. As described above, the masking tape 1 has high absorbability with respect to the organic EL liquid on the side surface 103, and can absorb the organic EL liquid after coating quickly before drying. It is particularly suitable for application of the organic EL liquid in the application device 3 that discharges and the application system 8 that includes the application device 3.

  In the masking tape 1, the absorbent member 13 is provided on the side of the base material 11 and the pressure-sensitive adhesive layer 12, whereby the lower end of the absorption region 1032 can be brought close to the lower surface edge 105 of the masking tape 1, The absorption region 1032 can be formed in a large area across the base material 11 and the pressure-sensitive adhesive layer 12. As a result, the height of the meniscus 94 can be further reduced.

  Next, a masking tape according to the second embodiment of the present invention will be described. FIG. 18 is a cross-sectional view of the masking tape 1a according to the second embodiment cut along with a part of the substrate 9 perpendicularly to the longitudinal direction. As shown in FIG. 18, the masking tape 1a includes an absorbent member 13a that is different in shape and arrangement from the absorbent member 13 of the masking tape 1 shown in FIG. Other configurations are the same as those in FIG. 3, and the same reference numerals are given in the following description.

  As shown in FIG. 18, in the masking tape 1a, a sheet-like absorbent member 13a is provided between the base material 11 and the pressure-sensitive adhesive layer 12, and the base material 11 and the pressure-sensitive adhesive layer 12 are formed by the absorbent member 13a. Connected. The base material 11 and the pressure-sensitive adhesive layer 12 are formed of a material that is substantially non-absorbable with respect to the organic EL liquid 93, as in the first embodiment. Further, it is made of a material having higher absorbability with respect to the organic EL liquid 93 than the pressure-sensitive adhesive layer 12. Further, on both side surfaces 103 of the masking tape 1a, the side end surfaces of the pressure-sensitive adhesive layer 12 become non-absorbing regions 1031 and the exposed regions on the side surfaces 103 of the absorbent member 13a become absorbing regions 1032.

  The flow of application of the organic EL liquid by the application device 3 (see FIG. 8) to the substrate 9 to which the masking tape 1a is attached is the same as that in the first embodiment. In the application of the organic EL liquid, as in the first embodiment, the absorption region 1032 is provided in the side surface 103 of the masking tape 1a, so that the organic EL liquid adhering to the side surface 103 is quickly absorbed immediately after the application. can do. Thereby, the height of the meniscus formed on the side surface 103 of the masking tape 1a can be reduced to the same level as the height of the non-absorbing region 1031. In particular, the masking tape 1a can be easily formed by laminating the base material 11, the absorbent member 13a, and the pressure-sensitive adhesive layer 12 in the thickness direction.

  Next, a masking tape according to a third embodiment of the present invention will be described. FIG. 19 is a cross-sectional view of the masking tape 1b according to the third embodiment cut along with the substrate 9 perpendicularly to the longitudinal direction. As shown in FIG. 19, the masking tape 1 b is an organic EL liquid instead of the absorbent member 13 on both sides of the masking tape 1 shown in FIG. 3 and the base material 11 that is non-absorbable with respect to the organic EL liquid. The base material 11a which has absorptivity is provided. Other configurations are the same as those in FIG. 3, and the same reference numerals are given in the following description. The substrate 11a is formed of, for example, a fibrous material such as paper, and quickly absorbs a small amount of organic EL liquid applied to the masking tape 1b by the coating device 3 (see FIG. 8).

  As shown in FIG. 19, on both side surfaces 103 of the masking tape 1b, the side end surfaces of the pressure-sensitive adhesive layer 12 become non-absorbing regions 1031 and the side end surfaces of the base material 11a become absorbing regions 1032. In the application of the organic EL liquid by the coating apparatus 3, as in the first embodiment, the organic EL liquid adhered to the side surface 103 of the masking tape 1b is rapidly absorbed immediately after the application from the absorption region 1032 of the base material 11a. The For this reason, the height of the meniscus formed on the side surface 103 of the masking tape 1b can be reduced to the same level as the height of the non-absorbing region 1031. Since the masking tape 1b is formed only by the base material 11a and the adhesive layer 12, in particular, the structure of the masking tape 1b can be simplified.

  Next, a mask member according to a fourth embodiment of the present invention will be described. 20 is a plan view showing the thin plate-like mask member 1c according to the fourth embodiment together with the substrate 9. FIG. 21 is a cross-sectional view of the mask member 1c and the substrate 9 at the position CC in FIG. FIG. In FIG. 21, for the convenience of illustration, the thickness of the mask member 1c is drawn thicker than the actual thickness compared to the width.

  As shown in FIG. 20, the mask member 1c has a lattice shape that is the same shape as the non-application area 92 of the substrate 9 in a plan view, and as shown in FIG. In close contact. The close contact between the mask member 1c and the main surface 90 of the substrate 9 is performed using, for example, electrostatic force. The mask member 1c is provided on the member main body 14 that is non-absorbable with respect to the organic EL liquid, and the side surface 103a of the four openings 140 (see FIG. 20) of the lattice-shaped member main body 14, and with respect to the organic EL liquid. An absorptive member 13b having absorptivity (that is, a higher absorptivity for the organic EL liquid than the member main body 14) is provided.

  In the mask member 1c, the side end surface of the member main body 14 on one side surface 103a extending vertically from the edge 104 of the upper surface 101 parallel to the lower surface 102 to the edge 105 of the lower surface 102 (hereinafter referred to as “lower surface edge 105”). However, the non-absorbing region 1031 that is non-absorbing with respect to the organic EL liquid is formed, and the exposed region on the side surface 103a of the absorbing member 13b is the absorbing region 1032 that is absorbing with respect to the organic EL liquid. On the side surface 103a, as in the first embodiment, the non-absorbing region 1031 is in contact with the lower surface edge 105 of the mask member 1c and exists along the lower surface edge 105, and the absorbing region 1032 is on the upper surface 101 side of the non-absorbing region 1031. Are spaced apart from the lower edge 105.

  In the coating system according to the present embodiment, instead of the tape applicator 2 of the coating system 8 shown in FIG. 1, the mask member 1 c is placed on the side surface 103 a at the boundary between the non-coated region 92 and the coated region 91 on the substrate 9. A mask member contact device is provided that causes the lower surface edge 105 on the side to be in close contact with the non-application region 92 by electrostatic force. Moreover, it replaces with the tape peeling apparatus 4, and the mask member peeling apparatus which peels the mask member 1c from the board | substrate 9 with which organic EL liquid was apply | coated is provided.

  In the application of the organic EL liquid by the coating device 3 to the substrate 9 to which the mask member 1c is adhered, the organic EL liquid attached to the side surface 103a of the mask member 1c is absorbed by the absorbent member 13b, as in the first embodiment. It is absorbed quickly from the absorption region 1032 immediately after application. For this reason, the height of the meniscus formed on the side surface 103a of the mask member 1c can be reduced to the same level as the height of the non-absorbing region 1031.

  In the coating system 8, since the whole non-coating region 92 can be covered with a single mask member 1c, the adhesion process and the peeling process of the mask member 1c to the substrate 9 can be performed quickly. In addition, the mask member 1c can be easily handled when the mask member 1c is closely attached to the substrate 9 or peeled off from the substrate 9.

  On the other hand, when the masking tape 1 is used as a mask member for covering the non-application area 92 of the substrate 9 as in the first embodiment, the masking tape 1 can be cut into various lengths. Therefore, even if the non-application area 92 has various sizes and shapes, it can be easily handled, and the non-application area 92 can be reliably covered.

  As mentioned above, although embodiment of this invention has been described, this invention is not limited to the said embodiment, A various change is possible.

  For example, in the masking tape 1 according to the first embodiment, the upper side of the absorbent member 13 is covered with a part of the base material 11, but the upper surface of the absorbent member 13 coincides with the upper surface 111 of the base material. In other words, the upper surface of the absorbent member 13 may be provided so as to be exposed on the upper surface of the masking tape 1.

  Moreover, in the masking tape 1, the absorption region 1032 is not necessarily provided on the side surfaces 103 on both sides in the width direction, and the absorption region 1032 may be provided on the side surface 103 only on one side in the width direction. Such a masking tape, for example, makes the lower surface edge 105 on one side coincide with the boundary between the application region 91 and the non-application region 92 of the substrate 9, and the lower surface edge 105 on the other side corresponds to the non-application region of the substrate 9. 92 is a region that is not used as a product because it is cut when obtaining a plurality of substrates for an organic EL display device from one substrate 9, and is located between adjacent coating regions 91. It is located at the approximate center of the non-application area 92).

  In the coating apparatus 3 of the coating system 8 according to the above embodiment, the number of nozzles provided in the coating head 34 is not limited to three, and it is not always necessary to apply three types of organic EL liquids simultaneously. . For example, the same type of organic EL liquid may be simultaneously ejected from three or more nozzles and applied to the substrate 9. In this case, the distance in the sub-scanning direction between two adjacent nozzles is set equal to three times the partition wall pitch.

  The masking tapes 1, 1 a, 1 b and the mask member 1 c are fluid materials (hereinafter referred to as “hole transport”) including a hole transport material with respect to the substrate 9 for an organic EL display device, in addition to the application of the organic EL liquid. When applying the “liquid”), it may be used for preventing adhesion of the hole transport liquid to the non-application region 92. Here, the “hole transport material” is a material that forms a hole transport layer of an organic EL display device, and the “hole transport layer” is a positive electrode that is formed into an organic EL layer formed of an organic EL material. It means not only a narrowly defined hole transport layer that transports holes, but also includes a hole injection layer that injects holes.

  The hole transport liquid is usually a fluid material in which a hole transport material is dissolved (or mixed) in water. When such an aqueous fluid material is applied to the substrate 9, the absorbent members provided on the masking tapes 1 and 1a and the mask member 1c are water-absorbing polymers (for example, SAP (Super Absorbent Polymer)) and the like. It is formed of a material having high absorbability.

  Further, the masking tapes 1, 1a, 1b and the mask member 1c are not necessarily used only when applying a fluid material containing an organic EL material or a hole transport material for an organic EL display device as a pixel forming material. For example, when a fluid material containing other types of pixel forming materials such as a coloring material and a fluorescent material is applied to a substrate for a flat display device such as a liquid crystal display device or a plasma display device, or other fluidity It may be used when applying a material. Furthermore, it may be used when applying a flowable material to various substrates such as an organic thin film solar cell substrate, a semiconductor wafer, and an optical disk substrate.

  In the above embodiment, the method of continuously discharging and applying the fluid material from the nozzle toward the substrate has been described. However, the masking tapes 1, 1a, 1b and the mask member 1c may be applied by other application methods (for example, , An ink jet method or a spin coat method) may be used when a fluid material is applied to a substrate.

It is a figure which shows the structure of the coating system which concerns on 1st Embodiment. It is a top view of a board | substrate. It is sectional drawing of a board | substrate. It is a top view of a tape sticking apparatus. It is a front view of a tape sticking apparatus. It is a left view of a tape sticking apparatus. It is a left view which expands and shows a tape sticking head. It is a left view which expands and shows a part of tape sticking head. It is a top view of a coating device. It is a front view of a coating device. It is a figure which shows the flow of application | coating of organic electroluminescent liquid. It is a top view of a masking tape and a board | substrate. It is sectional drawing of a masking tape and a board | substrate. It is a top view of a tape peeling apparatus. It is a left view which expands and shows a tape peeling head. It is a left view which expands and shows a part of tape peeling head. It is sectional drawing of a board | substrate. It is sectional drawing which shows a part of masking tape and a board | substrate. It is sectional drawing which shows a part of masking tape and a board | substrate. It is sectional drawing which shows a part of board | substrate. It is sectional drawing which shows a part of masking tape of a comparative example, and a board | substrate. It is sectional drawing which shows a part of board | substrate of a comparative example. It is sectional drawing of the masking tape which concerns on 2nd Embodiment. It is sectional drawing of the masking tape which concerns on 3rd Embodiment. It is a top view of the mask member and substrate concerning a 4th embodiment. It is sectional drawing which shows a mask member and a part of board | substrate.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,1a, 1b Masking tape 1c Mask member 2 Tape sticking device 3 Coating device 4 Tape peeling device 6 Conveyance robot 8 Coating system 9 Substrate 11, 11a Base material 12 Adhesive layer 13, 13a, 13b Absorbing member 31 Substrate holding part 32 Substrate moving mechanism 35 Head moving mechanism 37 Nozzle 90 Main surface 91 Application region 92 Non-application region 93 Organic EL liquid 101 Upper surface 102 Lower surface 103, 103a Side surface 104 Upper surface edge 105 Lower surface edge 111 Base material upper surface 122 Adhesive layer lower surface 1031 Non-absorbing Region 1032 Absorption Region S11-S14 Steps

Claims (14)

A tape-like or thin plate-like mask member that adheres to a non-application region on a main surface of a substrate and prevents adhesion of a flowable material to the non-application region,
A bottom surface closely contacting the substrate;
An upper surface opposite to the lower surface;
A side surface extending vertically from the edge of the upper surface to the edge of the lower surface;
With
The side surface is
A non-absorbing region that is in contact with the edge of the lower surface and exists along the edge of the lower surface and is non-absorbing with respect to the flowable material applied to the substrate;
An absorption region having absorbency with respect to the flowable material on the upper surface side of the non-absorption region;
A mask member comprising: The mask member according to claim 1,
The upper surface is one main surface on a tape-like substrate;
An adhesive layer is formed on the surface of the substrate opposite to the one main surface,
The mask member, wherein the lower surface is a surface of the adhesive layer opposite to the base material. The mask member according to claim 2,
The non-absorbing region is a side end surface of the pressure-sensitive adhesive layer that is non-absorbing with respect to the flowable material;
The mask member, wherein the absorption region is a side end surface of the base material having absorbability with respect to the flowable material. The mask member according to claim 2,
An absorbent member having higher absorbability for the flowable material than the base material and the pressure-sensitive adhesive layer is provided in the side surface,
The non-absorbing region is a side end surface of the pressure-sensitive adhesive layer that is non-absorbing with respect to the flowable material;
The mask member, wherein the absorption region is an exposed region on the side surface of the absorbent member. The mask member according to claim 2,
A sheet-like absorbent member having higher absorbability for the fluid material than the base material and the pressure-sensitive adhesive layer is provided between the base material and the pressure-sensitive adhesive layer;
The non-absorbing region is a side end surface of the pressure-sensitive adhesive layer that is non-absorbing with respect to the flowable material;
The mask member, wherein the absorption region is an exposed region on the side surface of the absorbent member. The mask member according to claim 4 or 5, wherein
The mask member, wherein the base material is non-absorbable with respect to the flowable material. The mask member according to any one of claims 1 to 6,
The mask member further comprising another side surface provided with a non-absorbing region and an absorbing region similar to the side surface on the side opposite to the side surface. An application device for applying a flowable material to a substrate,
The mask member according to claim 1 holds the substrate that is in close contact with the non-application area while matching the edge of the lower surface with a boundary between the non-application area and the application area on the substrate. A substrate holding part to be
A nozzle that continuously discharges a flowable material toward the substrate;
By moving the nozzle relative to the substrate in a main scanning direction that is parallel to the main surface of the substrate and intersects the edge, the flowable material is formed in a region including the mask member on the substrate. A main scanning mechanism for applying
A sub-scanning mechanism for moving the nozzle relative to the substrate in a sub-scanning direction parallel to the main surface of the substrate and perpendicular to the main scanning direction;
A coating apparatus comprising: The coating apparatus according to claim 8,
The coating apparatus, wherein the fluid material includes a pixel forming material for a flat display device. The coating apparatus according to claim 9, wherein
The coating device, wherein the pixel forming material is an organic EL material or a hole transport material for an organic EL display device. An application system for applying a flowable material to a substrate,
A mask member contact apparatus for bringing the mask member according to any one of claims 1 to 7 into close contact with the non-application area while aligning the edge of the lower surface with a boundary between the non-application area and the application area on the substrate;
A coating apparatus according to any one of claims 8 to 10,
A mask member peeling device for peeling the mask member from a substrate coated with a flowable material;
A substrate transport mechanism for transporting the substrate in order to the mask member contact device, the coating device, and the mask member peeling device;
An application system comprising: An application method for applying a flowable material to a substrate,
a) The substrate in which the mask member according to any one of claims 1 to 7 is in close contact with the non-application area while the edge of the lower surface coincides with a boundary between the non-application area and the application area on the substrate. The nozzle is moved relative to the main scanning direction parallel to the main surface of the substrate and intersecting the edge while continuously discharging the flowable material from the nozzle. Applying the flowable material to a region including the mask member;
b) moving the nozzle relatively in a sub-scanning direction parallel to the main surface of the substrate and perpendicular to the main scanning direction;
c) repeating step a) and step b);
A coating method comprising: It is the application | coating method of Claim 12, Comprising:
The coating method, wherein the fluid material includes a pixel forming material for a flat display device. It is the application | coating method of Claim 13, Comprising:
The pixel forming material is an organic EL material or a hole transport material for an organic EL display device.

Images