TW200942643A - Surface treatment material for semiconductor manufacturing system and method for producing same - Google Patents
Surface treatment material for semiconductor manufacturing system and method for producing sameInfo
- Publication number
- TW200942643A TW200942643A TW097148769A TW97148769A TW200942643A TW 200942643 A TW200942643 A TW 200942643A TW 097148769 A TW097148769 A TW 097148769A TW 97148769 A TW97148769 A TW 97148769A TW 200942643 A TW200942643 A TW 200942643A
- Authority
- TW
- Taiwan
- Prior art keywords
- fluorine
- anodic oxidation
- oxidation coating
- treatment material
- semiconductor manufacturing
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J27/00—Cooking-vessels
- A47J27/04—Cooking-vessels for cooking food in steam; Devices for extracting fruit juice by means of steam ; Vacuum cooking vessels
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
- C25D11/246—Chemical after-treatment for sealing layers
-
- A—HUMAN NECESSITIES
- A23—FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
- A23L—FOODS, FOODSTUFFS, OR NON-ALCOHOLIC BEVERAGES, NOT COVERED BY SUBCLASSES A21D OR A23B-A23J; THEIR PREPARATION OR TREATMENT, e.g. COOKING, MODIFICATION OF NUTRITIVE QUALITIES, PHYSICAL TREATMENT; PRESERVATION OF FOODS OR FOODSTUFFS, IN GENERAL
- A23L5/00—Preparation or treatment of foods or foodstuffs, in general; Food or foodstuffs obtained thereby; Materials therefor
- A23L5/10—General methods of cooking foods, e.g. by roasting or frying
- A23L5/13—General methods of cooking foods, e.g. by roasting or frying using water or steam
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J27/00—Cooking-vessels
- A47J27/14—Cooking-vessels for use in hotels, restaurants, or canteens
- A47J27/16—Cooking-vessels for use in hotels, restaurants, or canteens heated by steam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24C—DOMESTIC STOVES OR RANGES ; DETAILS OF DOMESTIC STOVES OR RANGES, OF GENERAL APPLICATION
- F24C15/00—Details
- F24C15/32—Arrangements of ducts for hot gases, e.g. in or around baking ovens
- F24C15/322—Arrangements of ducts for hot gases, e.g. in or around baking ovens with forced circulation
- F24C15/327—Arrangements of ducts for hot gases, e.g. in or around baking ovens with forced circulation with air moisturising
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Food Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Nutrition Science (AREA)
- Combustion & Propulsion (AREA)
- Polymers & Plastics (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Drying Of Semiconductors (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008044144 | 2008-02-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200942643A true TW200942643A (en) | 2009-10-16 |
Family
ID=40911493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097148769A TW200942643A (en) | 2008-02-26 | 2008-12-15 | Surface treatment material for semiconductor manufacturing system and method for producing same |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP5452034B2 (ja) |
KR (1) | KR20090092228A (ja) |
CN (1) | CN101521145A (ja) |
DE (1) | DE102009004402A1 (ja) |
SG (1) | SG155111A1 (ja) |
TW (1) | TW200942643A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI741320B (zh) * | 2018-07-18 | 2021-10-01 | 日商日本發條股份有限公司 | 電漿處理裝置用構件 |
JP6585863B1 (ja) * | 2019-01-23 | 2019-10-02 | 株式会社Uacj | アルミニウム部材及びその製造方法 |
CN115449777A (zh) * | 2022-09-28 | 2022-12-09 | 上海积塔半导体有限公司 | 半导体反应部件及其制造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5069938A (en) | 1990-06-07 | 1991-12-03 | Applied Materials, Inc. | Method of forming a corrosion-resistant protective coating on aluminum substrate |
US5192610A (en) | 1990-06-07 | 1993-03-09 | Applied Materials, Inc. | Corrosion-resistant protective coating on aluminum substrate and method of forming same |
JPH07273053A (ja) | 1994-03-31 | 1995-10-20 | Tokyo Electron Ltd | 処理装置及びアルミ系部材のコーティング方法 |
US5756222A (en) | 1994-08-15 | 1998-05-26 | Applied Materials, Inc. | Corrosion-resistant aluminum article for semiconductor processing equipment |
JP3608707B2 (ja) | 1997-06-09 | 2005-01-12 | 株式会社神戸製鋼所 | 真空チャンバ部材及びその製造方法 |
WO1999002759A1 (en) * | 1997-07-11 | 1999-01-21 | Magnesium Technology Limited | Sealing procedures for metal and/or anodised metal substrates |
JP3094000B2 (ja) | 1997-09-12 | 2000-10-03 | 昭和電工株式会社 | フッ化表面層を有する金属材料もしくは金属皮膜ならびにフッ化方法 |
JPH11229185A (ja) * | 1998-02-13 | 1999-08-24 | Kobe Steel Ltd | 耐熱割れ性および耐食性に優れたAl材料 |
JP3891815B2 (ja) | 2001-10-12 | 2007-03-14 | 昭和電工株式会社 | 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法 |
JP3871544B2 (ja) | 2001-10-12 | 2007-01-24 | 昭和電工株式会社 | 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法 |
JP4744099B2 (ja) * | 2004-06-15 | 2011-08-10 | 株式会社アルバック | 真空容器の内壁用のアルミニウム材の表面処理方法 |
-
2008
- 2008-12-03 SG SG200808957-5A patent/SG155111A1/en unknown
- 2008-12-15 TW TW097148769A patent/TW200942643A/zh unknown
-
2009
- 2009-01-13 DE DE102009004402A patent/DE102009004402A1/de not_active Withdrawn
- 2009-02-16 CN CN200910006390A patent/CN101521145A/zh active Pending
- 2009-02-17 JP JP2009034660A patent/JP5452034B2/ja not_active Expired - Fee Related
- 2009-02-20 KR KR1020090014126A patent/KR20090092228A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP2009228132A (ja) | 2009-10-08 |
DE102009004402A1 (de) | 2009-09-03 |
CN101521145A (zh) | 2009-09-02 |
SG155111A1 (en) | 2009-09-30 |
KR20090092228A (ko) | 2009-08-31 |
JP5452034B2 (ja) | 2014-03-26 |
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