TW200941138A - Photosensitive composition, photosensitive film, photosensitive laminate, method of forming permanent pattern, and printed board - Google Patents

Photosensitive composition, photosensitive film, photosensitive laminate, method of forming permanent pattern, and printed board Download PDF

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TW200941138A
TW200941138A TW98102473A TW98102473A TW200941138A TW 200941138 A TW200941138 A TW 200941138A TW 98102473 A TW98102473 A TW 98102473A TW 98102473 A TW98102473 A TW 98102473A TW 200941138 A TW200941138 A TW 200941138A
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photosensitive
compound
photosensitive composition
substituent
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TW98102473A
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Chinese (zh)
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Kimi Ikeda
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Fujifilm Corp
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Abstract

The photosensitive resin composition of the present invention is characterized in comprising binder, polymeric compound, oxime derivative, and ion adsorbent. Preferably the ion adsorbent is an aspect comprising zirconium phosphate, the photosensitive composition is an aspect further comprising filler, the photosensitive composition is an aspect further comprising heat crosslinking agent.

Description

.200941138 六、發明說明: 【發明所屬之技術領域】 本發明係有關於一種適合作爲防焊阻劑材料用以藉由 雷射曝光來進行畫像形成之感光性組成物、感光性薄膜、 感光性積層體、永久圖案形成方法及印刷基板。 【先前技術】 先前,在形成防焊阻劑等的永久圖案時’係使用藉由 在支撐體上塗布感光性組成物並乾燥形成感光層而成之感 Ο 光性薄膜。此種永久圖案的形成方法係例如藉由在形成永 久圖案之覆銅積層板等的基體上,使感光性薄膜積層而形 成積層體,並對該該積層體之感光層進行曝光,且在該曝 ^ 光後將感光層顯像使其形成圖案,隨後進行硬化處理等來 形成永久圖案。 前述防焊阻劑形成用的感光性組成物係例如含有五氧 化銻水合物等的離子吸附劑之感光性組成物(參照特開 2000-1 59859 號公報)。 ® 又,高敏感度的感光性組成物之聚合引發劑已知有肟 衍生物(參照特開2007-23 1 000號公報)。 目前,希望能夠提供一種對數位影像(DI)曝光具有充 分的敏感度及優良的活性保存性,同時更具備有優良的絕 緣信賴性之感光性組成物等。 【發明内容】 本發明係鑒於此種現狀而進行,其課題係解決先前之 前述各種問題點,來達成以下的目的。亦即本發明之目的 •200941138 係提供一種高敏感度及活性保存性,同時高絕緣信賴性的 感光性組成物、感光性薄膜、感光性積層體、永久圖案形 成方法及印刷基板。 解決前述課題的手段如下,亦即 &lt;1&gt; 一種感光性組成物,其特徵係含有黏合劑、聚合性化合 物、肟衍生物及離子吸附劑而構成。 &lt;2&gt;如前述&lt;1&gt;之感光性組成物,其中離子吸附劑含有磷酸 錯。 &lt;3&gt;如前述&lt;1&gt;或&lt;2&gt;之感光性組成物,其中更含有塡料。 &lt;4&gt;如前述&lt;1&gt;至&lt;3&gt;中任一項之感光性組成物,其中更含 有熱交聯劑。 &lt;5&gt;如前述&lt;1&gt;至&lt;4&gt;中任一項之感光性組成物,其中肟衍 生物係如下述通式(1)所示,BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photosensitive composition, a photosensitive film, and a photosensitive property suitable for use as a solder resist material for image formation by laser exposure. A laminate, a permanent pattern forming method, and a printed substrate. [Prior Art] In the prior art, when a permanent pattern such as a solder resist is formed, a photosensitive film obtained by applying a photosensitive composition on a support and drying to form a photosensitive layer is used. In the method of forming such a permanent pattern, for example, a photosensitive film is laminated on a substrate such as a copper clad laminate in which a permanent pattern is formed to form a laminate, and the photosensitive layer of the laminate is exposed. After exposure, the photosensitive layer is developed to form a pattern, followed by a hardening treatment or the like to form a permanent pattern. The photosensitive composition for forming the solder resist is, for example, a photosensitive composition containing an ion adsorbent such as ruthenium pentoxide hydrate (see JP-A-2000-1 59859). Further, a polymerization initiator of a highly sensitive photosensitive composition is known as an anthracene derivative (refer to JP-A-2007-23 1 000). At present, it is desired to provide a photosensitive composition having sufficient sensitivity to digital image (DI) exposure and excellent activity retention, and an excellent insulating property. SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and an object of the present invention is to solve the above various problems and achieve the following objects. That is, the object of the present invention is to provide a photosensitive composition having high sensitivity and active storage stability and high insulation reliability, a photosensitive film, a photosensitive laminate, a permanent pattern forming method, and a printed substrate. The means for solving the above problems is as follows: <1> A photosensitive composition comprising a binder, a polymerizable compound, an anthracene derivative, and an ion adsorbent. &lt;2&gt; The photosensitive composition of &lt;1&gt;, wherein the ion adsorbent contains phosphoric acid. &lt;3&gt; The photosensitive composition according to the above &lt;1&gt; or &lt;2&gt;, further containing a dip. The photosensitive composition according to any one of the above-mentioned <1> to <3>, which further contains a thermal crosslinking agent. The photosensitive composition of any one of the above-mentioned <1> to <4>, wherein the 肟 derivative system is represented by the following formula (1),

通式(1) 其中,上述通式(1)中,R1係表示氫原子、亦可具有取 代基之醯基、烷氧基羰基及芳氧基羰基之任一者,R2係各 自獨立地表示鹵素原子、烷基、芳基、烷氧基、芳氧基、 院硫基、芳硫基及胺基之任一者。m係表示〇〜4的整數, 2個以上時亦可互相連結而形成環。A係表示4、5、6及:7 員環之任一者。 &lt;6&gt;如前述&lt;5&gt;之感光性組成物’其中肟衍生物係如下述通 式(2)所示, .200941138 通式(2) ❹In the above formula (1), R1 represents a hydrogen atom, a mercapto group which may have a substituent, an alkoxycarbonyl group and an aryloxycarbonyl group, and R2 each independently represents Any of a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a thiol group, an arylthio group, and an amine group. The m system represents an integer of 〇4, and when two or more, it may be linked to each other to form a ring. The A series indicates any of the 4, 5, 6 and 7-member rings. &lt;6&gt; The photosensitive composition of the above &lt;5&gt; wherein the anthracene derivative is represented by the following formula (2), .200941138 Formula (2) ❹

其中,上述通式(2)中,R1係表示氫原子、亦可具有取 代基之醯基、烷氧基羰基及芳氧基羰基之任一者,R2係各 自獨立地表示鹵素原子、烷基、芳基、烷氧基、芳氧基、 烷硫基、芳硫基及胺基之任一者,m係表示0〜4的整數。 X係表示CH2、0及8之任—者。丨係表示1〜3的整數。 &lt;7&gt;如前述&lt;5 &gt;之感光性組成物’其中肟衍生物爲下述通式 (3)及(4)之任一者所示’In the above formula (2), R1 represents a hydrogen atom, a mercapto group which may have a substituent, an alkoxycarbonyl group and an aryloxycarbonyl group, and R2 each independently represents a halogen atom or an alkyl group. Any of an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amine group, and m represents an integer of 0 to 4. The X system represents the CH2, 0, and 8. The 丨 indicates an integer from 1 to 3. &lt;7&gt; The photosensitive composition of the above &lt;5 &gt; wherein the anthracene derivative is represented by any one of the following general formulae (3) and (4)

其中,上述通式(3)及(4)中,R1係表示氫原子、亦可 具有取代基之醯基、院氧基類基及芳氧基羯基之任一者’ R2係各自獨立地表示鹵素原子、院基、芳基、院氧基、芳 氧基、烷硫基、芳硫基及胺基之任一者’ m係表示0〜4的 整數。X係表示CH2、Ο及S之任一者。1係表示1〜3的 .200941138 整數。 &lt;8&gt;如前述&lt;6&gt;或&lt;7&gt;之感光性組成物,其中通式(2)、(3)及 (4)中,X係表示Ο及S之任一者,1係1及2之任一者, R1係表示亦可具有取代基之醯基及烷氧基羰基之任一者。 &lt;9&gt;如前述&lt;1&gt;至&lt;5&gt;中任一項之感光性組成物,其中聚合 性化合物的I/O値的重量平均爲〇.5以下。 &lt;10&gt; —種感光性薄膜,其特徵係在支撐體上具有由前述&lt;1&gt; 至&lt;9&gt;中任一項之感光性組成物所構成之感光層而構成。 &lt;11 &gt; 一種感光性積層體,其特徵係在基體上具有由前述&lt;1&gt; 至&lt;9&gt;中任一項之感光性組成物所構成之感光層而構成。 &lt;12&gt;—種永久圖案形成方法,其特徵係至少含有對使用前 述&lt;1&gt;至&lt;9&gt;中任一項之感光性組成物所形成的感光層進行 曝光。 &lt;13&gt;如前述&lt;12&gt;之永久圖案形成方法,其中曝光係通過配 列微透鏡而成的微透鏡陣列來進行,該微透鏡具有非球面 其能夠修正在藉由光調變手段將光線調變後,因在該光調 變手段之描繪部的射出面的變形所產生的偏差。 &lt;14&gt;如前述&lt;12&gt;或&lt;13&gt;之永久圖案形成方法,其中進行曝 光後,進行感光層的顯像。 &lt;15&gt;如前述&lt;12&gt;之永久圖案形成方法,其中進行顯像後’ 進行感光層的硬化處理。 &lt;16&gt;—種印刷基板,其特徵係依照前述&lt;12&gt;至&lt;15&gt;中任一 項之永久圖案形成方法來形成永久圖案。 依照本發明,能夠解決先前之問題,能夠提供一種敏 .200941138 感度及優良的活性保存性’同時具備高絕緣信賴性之感光 性組成物、感光性薄膜、感光性積層體、永久圖案形成方 法及印刷基板。 【實施方式】 [感光性組成物] 感光性組成物含有黏合劑、聚合性化合物、肟衍生物 及離子吸附劑,較佳是含有塡料、熱交聯劑,且進而按照 必要含有其他成分。 (黏合劑) 前述黏合劑可適合使用在側鏈含有酸性基及乙烯性不 飽和鍵之高分子化合物、環氧丙烯酸酯化合物等,該等之 中,以使用在側鏈含有酸性基及乙烯性不飽和鍵之高分子 化合物爲特佳。 -在側鏈含有酸性基及乙烯性不飽和鍵之高分子化合物- 前述酸性基可舉出羧基、磷酸基、磺酸基等,就原料 容易取得而言,以羧基爲佳。 又,前述黏合劑能夠使用在分子內至少1個能夠聚合 之雙鍵、例如(甲基)丙烯酸酯基或(甲基)丙烯醯胺基等的丙 烯醯基、羧酸的乙烯酯、乙烯醚、烯丙醚等的各種聚合性 雙鍵。更具體地,酸性基可舉出在含有羧基之丙烯酸樹脂, 加添含環狀醚基的聚合性化合物、例如丙烯酸環氧丙酯、 甲基丙烯酸環氧丙酯、桂皮酸等不飽和脂肪酸的環氧丙 酯、或具有脂環族環氧基(例如,在同一分子中,氧化環己 烯等的環氧基)及(甲基)丙烯醯基之化合物等含環氧基的聚 .200941138 合性化合物而得到的化合物等。又,亦可舉出在含有酸性 基及羥基之丙烯酸樹脂,加添異氰酸(甲基)丙烯酸乙酯等 含有異氰酸酯基的聚合性化合物而得到的化合物、在含有 酐基之丙烯酸樹脂,加添含有(甲基)丙烯酸羥基烷酯等含 有羥基之聚合性化合物而得到的化合物等。又,亦可舉出 將甲基丙烯酸環氧丙酯等含環狀醚的聚合性化合物與(甲 基)丙烯醯烷酯等乙烯系單體共聚合,來使(甲基)丙烯酸加 添在側鏈的環氧基而得到的化合物等。 該等可舉出例如特許 2763775號公報、特開平 3-172301號公報、特開2000-232264號公報等》 該等之中,前述黏合劑以選自使含環狀醚基(例如在部 分結構具有環氧基、氧雜環丁烷基之基)的聚合性化合物加 添在高分子化合物的酸性基之一部分而成者,及使含羧基 的聚合性化合物加添在高分子化合物的環狀醚基的一部分 或全部而成者的任一者之高分子化合物爲更佳。此時,酸 性基與具有環狀醚基之化合物之加成反應係以在觸媒存在 下實施爲佳,特別是該觸媒以選自酸性化合物及中性化合 物者爲佳。 其中,就感光性組成物的經時之顯像安定性而言,黏 合劑以在側鏈含有亦可含有羧基及雜環之芳香族基及在側 鏈含有乙烯性不飽合鍵之高分子化合物爲佳。 --亦可含有雜環之芳香族基-- 亦可含有雜環之芳香族基(以下,亦簡稱爲「芳香族 基」),可舉出例如苯環、2個至3個苯環形成稠環而成者, .200941138 苯環與5員不飽和環形成稠環而成者等。 前述芳香族基的具體例可舉出苯基、萘基、蒽基、菲 基、茚基、苊基、莠基、苯并吡咯環基、苯并呋喃環基、 苯并噻吩環基、吡唑(pyrazole)環基、異噚唑環基、異噻唑 環基、吲唑環基、苯并異噚唑環基、苯并異噻唑環基、咪 唑環基、噚唑環基、噻唑環基、苯并咪唑環基、苯并噚唑 環基、苯并噻唑環基、噻唑環基、吡啶環基、喹啉環基、 異喹啉環基、嗒畊環基、嘧啶環基、吡啶環基、酞畊環基、 喹唑啉環基、喹噚啉環基、吖環丙烷環基、菲啶環基、咔 唑環基、嘌呤環基、吡喃環基、哌啶環基、哌畊環基、吲 哄環基、D引哄哄環基、色嫌(chromene)環基、哮咐環基、 吖啶環基、啡噻畊環基、四唑環基、三畊環基等。該等之 中,以烴芳香族基爲佳,以苯基、萘基爲更佳。 前述芳香族基亦可具有取代基,前述取代基可舉出例 如鹵素原子、亦可具有取代基之胺基、烷氧基羰基、羥基、 醚基、硫醇基、硫醚基、矽烷基、硝基、氰基、各自亦可 具有取代基之烷基、烯基、炔基、芳基、雜環基等。 前述烷基可舉出例如碳原子數1〜20之直鏈狀的烷 基、分枝狀的烷基及環狀的烷基等。 前述烷基的具體例可舉出甲基、乙基、丙基、丁基、 戊基、己基、庚基、辛基、壬基、癸基、十一基、十二基、 十三基、十六基、十八基、二十基、異丙基、異丁基、第 二丁基、第三丁基、異戊基、新戊基、甲基丁基、異己 基、2-乙基己基、2-甲基己基、環己基、環戊基、2-降萡基 200941138 等。此等之中,以碳原子數1至12之直鏈狀的烷基、碳原 子數3至12之分枝狀的烷基、和碳原子數5至10之環狀 的烷基爲佳。 前述亦可具有烷基之取代基,可舉出例如除了氫以外 之1價的非金屬原子團所構成之基,此種取代基可舉出例 如鹵素原子(-F、-Br、-Cl、-I)、羥基、烷氧基、芳氧基、 锍基、烷硫基、芳硫基、烷二硫基、芳二硫基、胺基、N-烷胺基、N,N-二烷胺基、N-芳胺基、N,N-二芳胺基、N-烷 〇 基-N-芳胺基、醯氧基、胺基甲醯氧基、N-烷基胺基甲醯氧 基、N-芳基胺基甲醯氧基、N,N-二烷基胺基甲醯氧基、Ν,Ν-二芳基胺基甲醯氧基、Ν-烷基-Ν-芳基胺基甲醯氧基、烷基 ' 硫氧(alkyl sulfoxy)基、芳基硫氧(aryl sulfoxy)基、酿硫 . (acylthio)基、醯胺基、n_烷基醯胺基、N·芳基醯胺基、脲 基、Ν’-烷脲基、N’,N,-二烷脲基、Ν’-芳脲基、N’,N,-二芳 脲基、Ν’-烷基-Ν’-芳脲基、N-烷脲基、N-芳脲基、Ν’-烷 ^ 基-Ν-烷脲基、Ν’-烷基-Ν-芳脲基、Ν,,Ν,-二烷基-Ν-烷脲 基、Ν’,Ν’·二烷基-Ν-芳脲基' Ν,-芳基-Ν-烷脲基、Ν,-芳基 -Ν-芳脲基、Ν’,Ν’-二芳基-Ν-烷脲基、Ν’,Ν’-二芳基-Ν-芳 脲基、Ν’-烷基-Ν-芳基-Ν-烷脲基、Ν’-烷基-Ν,-芳基-Ν-芳 脲基、烷氧基碳醯胺基、芳氧基碳醯胺基、Ν-烷基-Ν-烷氧 基碳醯胺基、Ν-烷基-Ν-芳氧基碳醯胺基、Ν-芳基-Ν-烷氧 基碳醯胺基、Ν-芳基-Ν-芳氧基碳醯胺基、甲醯基、醯基、 羧基、烷氧基羰基、芳氧基羰基、胺基甲醯基、Ν-烷基胺 基甲醯基、Ν,Ν-二烷基胺基甲醯基、Ν-芳基胺基甲醢基、 -10- 200941138 N,N-二芳基胺基甲醯基、N-烷基-N-芳基胺基甲醯基、烷基 亞磺酸基、芳基亞磺酸基、烷基磺醢基、芳基磺醯基、磺 酸基(-SChH)及其共軛鹼基(以下稱爲磺酸根基)、烷氧基磺 醯基、芳氧基磺醯基、胺亞磺醯基、N-烷基胺亞磺醯基、 N,N-二烷基胺亞磺醯基、N_芳基胺亞磺醯基、N,N-二芳基 胺亞磺醯基、N-烷基-N-芳基胺亞磺醯基、胺磺醯基、N-烷基胺磺醯基、N,N-二烷基胺磺醯基、N-芳基胺磺醯基、 Ν,Ν·二芳基胺磺醯基、N_烷基-N_芳基胺磺醯基、膦酸基 (-P〇3H2)及其共軛鹸基(以下稱爲膦酸根基)、二烷基膦酸基 (-P03(alky 1)2)(以下,「aikyl」係意味著烷基)、二芳基膦酸 基(-P03 (ary 1)2)(以下,「aryi」係意味著芳基)、烷基芳基 膦酸基(-P〇3 (alky l)(aryl))、單烷基膦酸基(-P〇3 (alkyl))及 其共軛鹼基(以下稱爲烷基膦酸根基)、單芳基膦酸基 (-P03H(aryl))及其共軛鹼基(以下稱爲芳基膦酸根基)、膦醯 氧基(-OPOsH2)及其共軛鹼基(以下稱爲膦酸根氧基)、二烷 基膦醯氧基(-〇P〇3(alkyl)2)、二芳基膦醯氧基 (-0P03(aryl)2)、烷基芳基膦醯氧基(_OP〇3(alkyl)(aryl))、 單烷基膦醯氧基(-〇p〇3H(alkyl))及共軛鹼基(以下稱爲烷 基膦酸根氧基基)、單芳基膦醯氧基(-〇p〇3H(aryl))及共軛 鹼基(以下稱爲芳基膦酸根氧基)、氰基、硝基、芳基、烯 基、炔基、雜環基、矽烷基等。 在該等取代基之烷基的具體例可舉出前述烷基。 在前述取代基之芳基的具體例可舉出苯基、聯苯基、 萘基、甲苯基、二甲苯基、茱基、異丙苯基、氯苯基、溴 .200941138 苯基、氯甲基苯基、羥苯基'甲氧基苯基、乙氧基苯基、 苯氧基苯基、乙醯氧基苯基、苯甲醯氧基苯基、甲硫基苯 基、苯硫基苯基、甲胺基苯基、二甲胺基苯基、乙醯胺基 苯基、羧苯基、甲氧基羰基苯基、乙氧基羰基苯基、本氧 基羰基苯基、N-苯基胺基甲醯基苯基、氰基苯基、磺酸基 苯基、磺酸根基苯基、膦酸基苯基及膦酸根基苯基等。 在前述取代基之烯基可舉出例如乙嫌基、1_丙稀基、 1-丁烯基、肉桂基、2-氯-1-乙烯基等。 ® 在前述取代基之炔基可舉出例如乙炔基、1_丙炔基、 1-丁炔基、三甲基矽烷基乙炔基等。 在前述取代基之醯基(rQ1c〇-)之R&lt;)1可舉出例如氫原 . 子、前述的烷基、芳基等。 該等取代基中,以鹵素原子(-F、_Br、_C1、_1)、烷氧 基、芳氧基、烷硫基、芳硫基、N-烷胺基、N,N-二院胺基、 醯氧基、N-烷基胺基甲醯氧基、芳基胺基甲醯氧基、酸 胺基、甲醯基、醯基、羧基、烷氧基羰基、芳氧基羯基、 ❹ 胺基甲醯基、N-烷基胺基甲醯基、Ν,Ν·二烷基胺基甲酿基、 Ν-芳基胺基甲醯基、Ν-烷基-Ν-芳基胺基甲醯基、磺酸基、 磺酸根基、胺磺醯基、Ν-烷基胺磺醯基、Ν,Ν_二烷基胺磺 醯基、Ν-芳基胺磺醯基、Ν-烷基-Ν-芳基胺磺醯基、膦酸基、 膦酸根基、二烷基膦酸基、二芳基膦酸基、單烷基膦酸基、 烷基膦酸根基、單芳基膦酸基、芳基膦酸根基、膦醯氧基、 膦酸根氧基、芳基、烯基等爲佳。 又,在前述取代基之雜環基可舉出例如吡啶基、哌啶 -12- .200941138 基等,在前述取代基之矽烷基可舉出例如三甲基矽烷基等。 另一方面,在前述烷基之伸烷基可舉出例如從前述碳 數1〜20之烷基上脫除氫原子中之任一個,而成爲2價的有 機殘基之物,以例如碳原子數1至12之直鏈狀、碳原子數 3〜12之分枝狀及碳原子數5〜10之環狀的伸烷基等爲佳。 藉由組合此種取代基與伸烷基而得到之取代基,較佳 取代烷基之具體例可舉出氯甲基、溴甲基、2-氯乙基、三 氟甲基、甲氧基甲基、異丙氧基甲基、丁氧基甲基、第二 丁氧基丁基、甲氧基乙氧基乙基、芳氧基甲基、苯氧基甲 基、甲硫基甲基、甲苯硫基甲基、吡啶基甲基、四甲基哌 啶基甲基、N-乙醯基四甲基哌啶基甲基、三甲基矽烷基甲 基、甲氧基乙基'乙胺基乙基'二乙胺基丙基、味啉丙基、 乙醯氧基甲基、苯甲醯氧基甲基、N-環己基胺基甲醯氧基 乙基、N-苯基胺基甲醯氧基乙基、乙醯胺基乙基、N-甲基 苯甲醯胺基丙基、2-側氧乙基、2-側氧丙基、羧丙基、甲 氧基羰基乙基、芳氧基羰基丁基、氯苯氧基羰基甲基、胺 基甲醯基甲基、N-甲基胺基甲醯基乙基、N,N-二丙基胺基 甲醯基甲基、N-(甲氧基苯基)胺基甲醯基乙基、N-甲基 _N-(磺酸基苯基)胺基甲醯基甲基、磺酸基丁基、磺酸根基 丁基、胺磺醯基丁基、N-乙基胺磺醯基甲基、N,N-二丙基 胺磺醯基丙基、N_甲苯基胺磺醯基丙基、N-甲基-N-(膦酸 基苯基)胺磺醯基辛基、膦酸基丁基、膦酸根基己基、二乙 基膦酸基丁基、二苯基隣酸基丙基、甲基膦酸基丁基、甲 基隣酸根基丁基、甲苯基膦酸基己基、甲苯基膦酸根己基、 -13- 200941138 膦醯氧基丙基、膦酸根氧基丁基、苄基、苯乙基、α-甲基 苄基、1·甲基-1-苯基乙基、對甲基苄基、肉桂基、烯丙基、 1-丙烯基甲基、2-丁烯基、2-甲基烯丙基、2-甲基丙烯基甲 基、2-丙炔基、2-丁炔基、3-丁炔基等。 前述芳基可舉出例如苯環、2個至3個苯環形成稠環 者、苯環與5員不飽和環形成稠環者等。 前芳基的具體例可舉出例如苯基、萘基、蒽基、菲基、 茚基、苊基、蒹基等。此等之中,以苯基、萘基爲佳。 ® 前述烷基亦可具有取代基,此種具有取代基的芳基(以 下,亦簡稱爲「取代芳基」),例如在前述芳基的環形成碳 原子上之取代基,可舉出具有由氫原子以外的一價非金屬 . 原子團所構成之基者。 前述芳基亦可具有的取代基,以例如前述的烷基、取 代烷基、顯示作爲前述烷基亦可具有的取代基者爲佳》 前述取代芳基的較佳具體例,可舉出聯苯基、甲苯基、 二甲苯基、茱(mesityl)基、異丙苯基(cumenyl)、氯苯基、 溴苯基、氟苯基、氯甲基苯基、三氟甲基苯基、羥苯基、 甲氧基苯基、甲氧基乙氧基苯基、烯丙氧基苯基、苯氧基 苯基、甲硫基苯基、甲苯硫基苯基、乙胺基苯基、二乙胺 基苯基、味啉苯基、乙醯氧基苯基、苯甲醯氧基苯基、N_ 環己基胺基甲醯氧基苯基、N-苯胺基甲醯氧基苯基、乙醯 基胺基苯基、N-甲基苯甲醯基胺基苯基、羧苯基、甲氧基 羰基苯基、芳氧基羰基苯基、氯苯氧基羰基苯基、胺基甲 醯基苯基、N -甲基胺基甲醯基苯基、N,N-二丙基胺基甲醯 • 14 · 200941138 基苯基、N-(甲氧基苯基)胺基甲醯基苯基、N_甲基-N-(磺酸 基苯基)胺基甲醯基苯基、磺酸基苯基、膦酸根基苯基、胺 磺醯基苯基、N-乙基胺磺醯基苯基、N_N_二丙基胺磺醯基 苯基、N-甲苯基胺磺醯基苯基、N_甲基_N_ (膦酸基苯基)胺 磺醯基苯基、膦酸基苯基、膦酸根基苯基、二乙基膦酸基 苯基、二苯基膦酸基苯基、甲基膦酸基苯基、甲基膦酸根 基苯基、甲苯基膦酸基苯基、甲苯基膦酸根基苯基、烯丙 基苯基、1-丙烯基甲基苯基、2_ 丁烯基、2-甲基烯丙基苯基、 2 -甲基丙烯基苯基、2 -丙烯基苯基、2 -丁炔基苯基及3 -丁 決基苯基等。 前述烯基(-C(R02) = C(R03)(R04))及炔基(-C三C(R05))可 舉出例如ΙΙΰ2、RQ3、RQ4及R〇5係由一價的非金屬原子團所 構成的之基者。 前述RG2、RG3、RG4、可舉出例如氫原子、鹵素原 子、烷基、取代烷基、芳基、取代芳基等。該等的具體例 可舉出目丨i述顯不作爲例子者。該等之中,以氫原子、_素 原子、碳原子數1〜10之直鏈狀的烷基、分枝狀的烷基、 環狀的烷基爲佳。 前述烯基及炔基的較佳具體例可舉出乙烯基、1-丙烯 基、1-丁烯基、1-戊烯基、1-己烯基、1-辛烯基、1-甲基-1-丙烯基、2-甲基-1-丙烯基、2-甲基-1-丁烯基、2-苯基-1-乙烯基、2-氯-1-乙烯基、乙快基、1-丙炔基、丨_丁炔基、 苯基乙炔基等。 前述雜環基例如可舉出已例示作爲取代烷基的取代基 -15- 200941138 之吡啶基等。 前述氧基(RG60-)可舉出RC6係由除了氫原子以外的非 金屬原子團所構成者。 此種氧基以例如烷氧基、芳氧基、醯氧基、胺基甲醯 氧基、N-烷基胺基甲醯氧基、N-芳基胺基甲醯氧基、N,N -二烷基胺基甲醯氧基、N,N-二芳基胺基甲醯氧基、Ν·烷基 -Ν-芳基胺基甲醯氧基 '烷基硫氧(alkyl sulf0Xy)基、芳基 硫氧基、膦醯氧基、膦酸根氧基等爲佳。 〇 w 在該等之烷基及芳基可舉出前述舉出作爲烷基、取代 烷基、芳基及取代芳基者。又,在醯氧基之醯基(rG7co·;), R〇7可舉出先前的例子所舉出的烷基、取代烷基、芳基及取 _ 代芳基者。該等取代基之中,以烷氧基、芳氧基、醯氧基、 芳基硫氧基爲更佳。 較佳氧基的具體例可舉出甲氧基、乙氧基、丙氧基、 異丙氧基、丁氧基、戊氧基、己氧基、十二烷氧基、苄氣 _ 基、烯丙氧基、苯乙基氧基、羧乙基氧基、甲氧基羰基^In the above formulae (3) and (4), R1 represents a hydrogen atom, or a substituent which may have a substituent, an anthracene group, and an aryloxy anthracene group. The halogen atom, the aryl group, the aryl group, the alkoxy group, the aryloxy group, the alkylthio group, the arylthio group and the amine group 'm) represent an integer of 0 to 4. The X system indicates any of CH2, Ο and S. The 1 series represents the integer of 1 to 3 .200941138. &lt;8&gt; The photosensitive composition of the above &lt;6&gt; or &lt;7&gt;, wherein, in the general formulae (2), (3) and (4), X represents either Ο or S, 1 series In any of 1 and 2, R1 represents any of an alkyl group and an alkoxycarbonyl group which may have a substituent. The photosensitive composition of any one of the above-mentioned <1> to <5>, wherein the weight average of the I/O値 of the polymerizable compound is 〇.5 or less. &lt;10&gt; A photosensitive film comprising a photosensitive layer composed of the photosensitive composition according to any one of the above items <1> to <9> on the support. &lt;11&gt; A photosensitive laminate comprising a photosensitive layer comprising the photosensitive composition according to any one of the above items <1> to <9>. &lt;12&gt; A method of forming a permanent pattern, which comprises at least exposing a photosensitive layer formed using the photosensitive composition according to any one of &lt;1&gt; to &lt;9&gt;&lt;13&gt; The permanent pattern forming method according to the above &lt;12&gt;, wherein the exposure is performed by a microlens array formed by arranging microlenses having an aspherical surface capable of correcting light rays by means of light modulation After the modulation, there is a variation due to deformation of the exit surface of the drawing portion of the light modulation means. &lt;14&gt; The permanent pattern forming method of &lt;12&gt; or &lt;13&gt;, wherein the exposure of the photosensitive layer is performed after exposure. &lt;15&gt; The method of forming a permanent pattern according to the above &lt;12&gt;, wherein after the development is performed, the hardening treatment of the photosensitive layer is performed. &lt;16&gt; A printed circuit board characterized in that the permanent pattern is formed in accordance with the permanent pattern forming method of any one of the above &lt;12&gt; to &lt;15&gt;. According to the present invention, it is possible to provide a photosensitive composition, a photosensitive film, a photosensitive laminate, a permanent pattern forming method, and the like, which have high sensitivity and excellent storage stability, and have high insulation reliability. Printed substrate. [Embodiment] [Photosensitive composition] The photosensitive composition contains a binder, a polymerizable compound, an anthracene derivative, and an ion adsorbent, and preferably contains a binder, a thermal crosslinking agent, and further contains other components as necessary. (Binder) The above-mentioned binder can be suitably used as a polymer compound having an acidic group and an ethylenically unsaturated bond in a side chain, an epoxy acrylate compound, etc., among which an acid group and an ethyl group are used in the side chain. A polymer compound having an unsaturated bond is particularly preferred. - A polymer compound having an acidic group and an ethylenically unsaturated bond in the side chain - The acidic group may, for example, be a carboxyl group, a phosphoric acid group or a sulfonic acid group, and a carboxyl group is preferred because the raw material is easily obtained. Further, as the binder, at least one polymerizable double bond in the molecule, for example, an acryloyl group such as a (meth) acrylate group or a (meth) acrylamide group, a vinyl ester of a carboxylic acid, or a vinyl ether can be used. Various polymerizable double bonds such as allyl ether. More specifically, the acidic group may be an acrylic resin containing a carboxyl group, and a polymerizable compound containing a cyclic ether group, for example, an unsaturated fatty acid such as glycidyl acrylate, glycidyl methacrylate or cinnamic acid may be added. Glycidyl ester, or an epoxy group-containing polycondensate having an alicyclic epoxy group (for example, an epoxy group such as cyclohexene oxide in the same molecule) and a (meth) acrylonitrile group. 200941138 A compound obtained by synthesizing a compound or the like. In addition, a compound obtained by adding a polymerizable compound containing an isocyanate group such as ethyl isocyanate (meth)acrylate to an acrylic resin containing an acidic group and a hydroxyl group, and an acrylic resin containing an anhydride group may be added. A compound obtained by adding a polymerizable compound having a hydroxyl group such as a hydroxyalkyl (meth)acrylate is added. Further, a copolymerizable compound containing a cyclic ether such as glycidyl methacrylate may be copolymerized with a vinyl monomer such as (meth) propylene sulfoxide to add (meth)acrylic acid. A compound obtained by an epoxy group of a side chain or the like. In the above-mentioned, the binder is selected from a cyclic ether group (for example, in a partial structure), etc., in the above-mentioned adhesives, etc. A polymerizable compound having an epoxy group or an oxetane group is added to one part of the acidic group of the polymer compound, and a carboxyl group-containing polymerizable compound is added to the ring of the polymer compound. A polymer compound of any one or all of the ether groups is more preferable. In this case, the addition reaction of the acid group with the compound having a cyclic ether group is preferably carried out in the presence of a catalyst, and particularly preferably the catalyst is selected from the group consisting of an acidic compound and a neutral compound. In the case of the development stability of the photosensitive composition over time, the binder contains a polymer compound which may also contain a carboxyl group and a hetero ring in the side chain, and a polymer compound which contains an ethylenic unsaturated bond in the side chain. It is better. - an aromatic group which may also contain a heterocyclic ring - may also contain a heterocyclic aromatic group (hereinafter also referred to simply as "aromatic group"), and examples thereof include a benzene ring and two to three benzene rings. The fused ring is formed, .200941138 The benzene ring and the 5-membered unsaturated ring form a thick ring. Specific examples of the aromatic group include a phenyl group, a naphthyl group, an anthracenyl group, a phenanthryl group, a fluorenyl group, a fluorenyl group, a fluorenyl group, a benzopyrrole group, a benzofuran ring group, a benzothiophene group, and a pyridyl group. Pyrazole ring group, isoxazole ring group, isothiazole ring group, indazole ring group, benzisoxazole ring group, benzisothiazole ring group, imidazole ring group, indazole ring group, thiazole ring group , benzimidazole ring group, benzoxazole ring group, benzothiazole ring group, thiazole ring group, pyridine ring group, quinoline ring group, isoquinoline ring group, hydrazine ring group, pyrimidine ring group, pyridine ring Base, argon ring group, quinazoline ring group, quinoxaline ring group, indole cyclopropyl ring group, phenanthridine ring group, indazole ring group, indole ring group, pyrancycloyl group, piperidinyl group, piperazine Cultivating ring group, anthracene ring group, D ring fluorene ring group, chromene ring group, croup ring group, acridine ring group, morphine ring group, tetrazolium ring group, three tillage ring group, etc. . Among these, a hydrocarbon aromatic group is preferred, and a phenyl group or a naphthyl group is more preferred. The aromatic group may have a substituent, and examples of the substituent include a halogen atom, an amine group which may have a substituent, an alkoxycarbonyl group, a hydroxyl group, an ether group, a thiol group, a thioether group, a decyl group, and the like. A nitro group, a cyano group, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, a heterocyclic group, etc. which each may have a substituent. The alkyl group may, for example, be a linear alkyl group having 1 to 20 carbon atoms, a branched alkyl group or a cyclic alkyl group. Specific examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a decyl group, a decyl group, an eleven group, a dodecyl group, and a thirteen group. Hexadecyl, octadecyl, eicosyl, isopropyl, isobutyl, t-butyl, tert-butyl, isopentyl, neopentyl, methylbutyl, isohexyl, 2-ethyl Hexyl, 2-methylhexyl, cyclohexyl, cyclopentyl, 2-norbornyl 200941138, and the like. Among these, a linear alkyl group having 1 to 12 carbon atoms, a branched alkyl group having 3 to 12 carbon atoms, and a cyclic alkyl group having 5 to 10 carbon atoms are preferred. The substituent which may have an alkyl group, for example, may be a group composed of a monovalent non-metal atomic group other than hydrogen, and examples of such a substituent include a halogen atom (-F, -Br, -Cl, - I), hydroxy, alkoxy, aryloxy, decyl, alkylthio, arylthio, alkyldithio, aryldithio, amine, N-alkylamino, N,N-dialkylamine , N-arylamino, N,N-diarylamino, N-alkylindenyl-N-arylamino, decyloxy, aminomethyl methoxy, N-alkylaminomethyl methoxy , N-arylaminomethyl methoxy, N,N-dialkylaminomethyl methoxy, hydrazine, fluorenyl-diarylaminomethyl methoxy, hydrazine-alkyl-hydrazine-arylamine Methyl methoxy, alkyl 'alkyl sulfoxy group, aryl sulfoxy group, acylthio group, guanylamino group, n-alkyl guanylamino group, N · aryl Alkylamino, ureido, Ν'-alkylureido, N',N,-dialkylureido, Ν'-arylureido, N',N,-diarylureido, Ν'-alkyl- Ν'-arylureido, N-alkylureido, N-arylureido, Ν'-alkyl- oxime-alkylurea, Ν'-alkyl-oxime-arylureido, oxime, oxime, - Dialkyl-indole-alkylurea Ν',Ν'·Dialkyl-fluorene-arylureido' Ν,-aryl-Ν-alkylureido, fluorene,-aryl-fluorene-arylureido, Ν', Ν'-diaryl- Ν-alkylureido, Ν', Ν'-diaryl-fluorene-arylureido, Ν'-alkyl-oxime-aryl-oxime-alkylurea, Ν'-alkyl-oxime, -aryl - anthracene-arylurea group, alkoxycarbamoylamino group, aryloxycarbamoylamino group, fluorenyl-alkyl-hydrazine-alkoxycarbenylamino group, fluorenyl-alkyl-fluorene-aryloxycarbazide Amino, fluorene-aryl-fluorenyl-alkoxycarbenylamine, fluorenyl-aryl-fluorene-aryloxycarbenylamine, indolyl, fluorenyl, carboxy, alkoxycarbonyl, aryloxy Carbonyl, aminomethyl decyl, fluorenyl-alkylaminomethyl fluorenyl, fluorene, fluorenyl-dialkylaminomethyl fluorenyl, fluorenyl-arylaminomethyl fluorenyl, -10-200941138 N, N-di Arylaminomethyl indenyl, N-alkyl-N-arylaminomethylindenyl, alkylsulfinic acid, arylsulfinic acid, alkylsulfonyl, arylsulfonyl, sulfonate Acid group (-SChH) and its conjugate base (hereinafter referred to as sulfonate group), alkoxysulfonyl group, aryloxysulfonyl group, amine sulfinyl group, N-alkylamine sulfinyl group , N,N-dialkylamine sulfinylene, N_arylamine Indenyl, N,N-diarylamine sulfinyl, N-alkyl-N-arylamine sulfinyl, amine sulfonyl, N-alkylamine sulfonyl, N,N-di Alkylamine sulfonyl, N-arylamine sulfonyl, anthracene, fluorene diarylamine sulfonyl, N-alkyl-N-arylsulfonyl, phosphonic acid (-P〇3H2 And its conjugated thiol group (hereinafter referred to as phosphonate group), dialkylphosphonic acid group (-P03 (alky 1) 2) (hereinafter, "aikyl" means alkyl group), diarylphosphonic acid group (-P03 (ary 1) 2) (hereinafter, "aryi" means aryl), alkyl arylphosphonic acid (-P〇3 (alky) (aryl), monoalkylphosphonic acid group ( -P〇3 (alkyl)) and its conjugated base (hereinafter referred to as alkylphosphonate), monoarylphosphonate (-P03H (aryl)) and its conjugated base (hereinafter referred to as aryl) Phosphonate), phosphinomethoxy (-OPOsH2) and its conjugated base (hereinafter referred to as phosphonateoxy), dialkylphosphoniumoxy (-〇P〇3 (alkyl) 2), diaryl Alkylphosphonium oxy (-0P03 (aryl) 2), alkyl aryl phosphinomethoxy (_OP 〇 3 (alkyl) (aryl), monoalkyl phosphinooxy (-〇p〇 3H (alkyl) And conjugated bases (hereinafter referred to as alkylphosphonic acids) Oxyl group), monoarylphosphonium oxy group (-〇p〇3H(aryl)) and conjugated base (hereinafter referred to as arylphosphonateoxy group), cyano group, nitro group, aryl group, alkenyl group , alkynyl, heterocyclic, decyl and the like. Specific examples of the alkyl group of the substituent include the above alkyl group. Specific examples of the aryl group of the above substituent include a phenyl group, a biphenyl group, a naphthyl group, a tolyl group, a xylyl group, a decyl group, a cumyl group, a chlorophenyl group, and a bromine group. 200941138 phenyl group, chloro group Phenyl, hydroxyphenyl 'methoxyphenyl, ethoxyphenyl, phenoxyphenyl, ethoxylated phenyl, benzamidine phenyl, methylthiophenyl, phenylthio Phenyl, methylaminophenyl, dimethylaminophenyl, acetaminophen phenyl, carboxyphenyl, methoxycarbonylphenyl, ethoxycarbonylphenyl, presentoxycarbonylphenyl, N- Phenylaminopyristylphenyl, cyanophenyl, sulfonylphenyl, sulfonylphenyl, phosphonicphenyl and phosphophenyl. The alkenyl group of the above substituent may, for example, be an ethyl thiophene group, a 1-propylidene group, a 1-butenyl group, a cinnamyl group or a 2-chloro-1-vinyl group. The alkynyl group in the above substituent may, for example, be an ethynyl group, a 1-propynyl group, a 1-butynyl group or a trimethyldecyl ethynyl group. R&lt;)1 of the fluorenyl group (rQ1c〇-) of the above substituent may, for example, be a hydrogen atom, an alkyl group or an aryl group as described above. Among these substituents, a halogen atom (-F, _Br, _C1, _1), an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group, an N-alkylamino group, an N,N-diamine group , methoxy, N-alkylaminomethyl methoxy, arylaminomethyl methoxy, acid amine, methionyl, fluorenyl, carboxy, alkoxycarbonyl, aryloxy fluorenyl, hydrazine Aminomethyl fluorenyl, N-alkylaminomethyl fluorenyl, anthracene, fluorene dialkylaminomethyl aryl, fluorenyl-arylaminomethyl fluorenyl, fluorenyl-alkyl-hydrazine-arylamino Mercapto, sulfonate, sulfonate, sulfonyl, hydrazine-alkylamine sulfonyl, hydrazine, hydrazine-dialkylamine sulfonyl, fluorene-arylamine sulfonyl, decane Base-fluorene-arylsulfonyl, phosphonic acid, phosphonate, dialkylphosphonic acid, diarylphosphonic acid, monoalkylphosphonic acid, alkylphosphonic acid, monoarylphosphine An acid group, an arylphosphonate group, a phosphinomethoxy group, a phosphonate group, an aryl group, an alkenyl group or the like is preferred. In addition, examples of the heterocyclic group of the above-mentioned substituent include a pyridyl group, a piperidine-12-.200941138 group, and the like. The alkyl group of the above substituent may, for example, be a trimethyldecyl group. On the other hand, the alkyl group of the alkyl group may, for example, be one which removes any one of hydrogen atoms from the alkyl group having 1 to 20 carbon atoms and becomes a divalent organic residue, for example, carbon. A linear form of 1 to 12 atoms, a branched form having 3 to 12 carbon atoms, and a cyclic alkyl group having 5 to 10 carbon atoms are preferred. Specific examples of the substituted alkyl group by a combination of such a substituent and an alkyl group include a chloromethyl group, a bromomethyl group, a 2-chloroethyl group, a trifluoromethyl group, and a methoxy group. Methyl, isopropoxymethyl, butoxymethyl, second butoxybutyl, methoxyethoxyethyl, aryloxymethyl, phenoxymethyl, methylthiomethyl ,toluylthiomethyl, pyridylmethyl, tetramethylpiperidinylmethyl, N-ethinyltetramethylpiperidinylmethyl, trimethyldecylmethyl, methoxyethyl 'B Aminoethyl 'diethylaminopropyl, morpholinyl propyl, ethoxymethyloxy, benzhydryloxymethyl, N-cyclohexylaminomethyloxyethyl, N-phenylamine Methyl methoxyethyl, acetaminoethyl, N-methylbenzimidyl propyl, 2-sided oxyethyl, 2-sided oxypropyl, carboxypropyl, methoxycarbonyl , aryloxycarbonylbutyl, chlorophenoxycarbonylmethyl, aminomethylmethylmethyl, N-methylaminomethylmethyl, N,N-dipropylaminocarboxamide , N-(methoxyphenyl)aminocarbamidoethyl, N-methyl-N-(sulfophenyl)amino Mercaptomethyl, sulfonate butyl, sulfonyl butyl, acesulfonyl butyl, N-ethylamine sulfonylmethyl, N,N-dipropylamine sulfonylpropyl, N _Tolylamine sulfonylpropyl, N-methyl-N-(phosphonophenyl)amine sulfonyl octyl, phosphonic butyl, phosphonic hexyl, diethylphosphonyl butyl , diphenylo-o-propyl, methylphosphonic butyl, methyl ortho-butyl, tolylphosphonic hexyl, tolylphosphonate, -13- 200941138 phosphinomethoxypropyl, Phosphonate oxybutyl, benzyl, phenethyl, α-methylbenzyl, 1-methyl-1-phenylethyl, p-methylbenzyl, cinnamyl, allyl, 1-propenyl Methyl, 2-butenyl, 2-methylallyl, 2-methylpropenylmethyl, 2-propynyl, 2-butynyl, 3-butynyl, and the like. Examples of the aryl group include a benzene ring, two to three benzene rings to form a fused ring, a benzene ring and a 5-membered unsaturated ring to form a fused ring. Specific examples of the aryl group include a phenyl group, a naphthyl group, an anthracenyl group, a phenanthryl group, an anthracenyl group, an anthracenyl group, a fluorenyl group and the like. Among these, a phenyl group or a naphthyl group is preferred. The alkyl group may have a substituent, and such a substituted aryl group (hereinafter also referred to as a "substituted aryl group"), for example, a substituent on the ring-forming carbon atom of the aryl group may be exemplified. A base composed of a monovalent non-metal atomic group other than a hydrogen atom. The substituent which the aryl group may have, for example, the above-mentioned alkyl group or substituted alkyl group, which is preferably a substituent which the above-mentioned alkyl group may have, is preferably a preferred specific example of the above substituted aryl group, and may be exemplified. Phenyl, tolyl, xylyl, mesityl, cumenyl, chlorophenyl, bromophenyl, fluorophenyl, chloromethylphenyl, trifluoromethylphenyl, hydroxy Phenyl, methoxyphenyl, methoxyethoxyphenyl, allyloxyphenyl, phenoxyphenyl, methylthiophenyl, tolylthiophenyl, ethylaminophenyl, two Ethylaminophenyl, porphyrin phenyl, ethoxylated phenyl, benzhydryloxyphenyl, N-cyclohexylaminomethyloxyphenyl, N-anilinylmethyloxyphenyl, B Nonylaminophenyl, N-methylbenzhydrylaminophenyl, carboxyphenyl, methoxycarbonylphenyl, aryloxycarbonylphenyl, chlorophenoxycarbonylphenyl, aminoguanidine Phenylphenyl, N-methylaminocarbamiphenyl, N,N-dipropylaminocarbamyl • 14 · 200941138 Phenyl, N-(methoxyphenyl)aminoformamidobenzene Base, N_methyl-N-(sulfonic acid phenyl Aminomethylphenyl phenyl, sulfonyl phenyl, phosphonate phenyl, sulfonyl phenyl, N-ethylamine sulfonyl phenyl, N-N-dipropylamine sulfonyl phenyl , N-tolylamine sulfonylphenyl, N-methyl_N_(phosphonophenyl)amine sulfonylphenyl, phosphonic phenyl, phosphonate phenyl, diethylphosphonic acid Phenyl, diphenylphosphonylphenyl, methylphosphonic phenyl, methylphosphonic phenyl, tolylphosphonic phenyl, tolylphosphonic phenyl, allyl phenyl, 1-propenylmethylphenyl, 2-butenyl, 2-methylallylphenyl, 2-methylpropenylphenyl, 2-propenylphenyl, 2-butynylphenyl and 3- Butyl phenyl and the like. The above alkenyl group (-C(R02) = C(R03)(R04)) and alkynyl group (-C3C(R05)) may, for example, be ΙΙΰ2, RQ3, RQ4 and R〇5 are monovalent non-metals. The base of the atomic group. Examples of the RG2, RG3, and RG4 include a hydrogen atom, a halogen atom, an alkyl group, a substituted alkyl group, an aryl group, and a substituted aryl group. Specific examples of these may be mentioned as examples. Among these, a hydrogen atom, a sulfonium atom, a linear alkyl group having 1 to 10 carbon atoms, a branched alkyl group or a cyclic alkyl group is preferred. Preferable specific examples of the above alkenyl group and alkynyl group include a vinyl group, a 1-propenyl group, a 1-butenyl group, a 1-pentenyl group, a 1-hexenyl group, a 1-octenyl group, and a 1-methyl group. -1-propenyl, 2-methyl-1-propenyl, 2-methyl-1-butenyl, 2-phenyl-1-vinyl, 2-chloro-1-vinyl, ethyl fast radical, 1-propynyl, 丨-butynyl, phenylethynyl and the like. The above heterocyclic group may, for example, be a pyridyl group of the substituent -15-200941138 which is a substituted alkyl group. The oxy group (RG60-) is exemplified by a non-metal atomic group other than a hydrogen atom. Such an oxy group is, for example, an alkoxy group, an aryloxy group, a decyloxy group, an aminomethyl methoxy group, an N-alkylaminomethyl methoxy group, an N-arylaminomethyl methoxy group, N, N. -dialkylaminomethyl methoxy, N,N-diarylaminomethyl methoxy, Ν-alkyl-fluorene-arylaminomethyl methoxy 'alkyl sulfoxyl group An arylthiooxy group, a phosphinyloxy group, a phosphonic acid group or the like is preferred. 〇 w The alkyl group and the aryl group are exemplified by the above-mentioned alkyl group, substituted alkyl group, aryl group and substituted aryl group. Further, in the fluorenyloxy group (rG7co·;), R〇7 may, for example, be an alkyl group, a substituted alkyl group, an aryl group or an aryl group as exemplified in the above examples. Among these substituents, an alkoxy group, an aryloxy group, a decyloxy group or an arylthio group is more preferred. Specific examples of the preferred oxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a dodecyloxy group, and a benzyl group. Allyloxy, phenethyloxy, carboxyethyloxy, methoxycarbonyl^

❹ C 基氧基、乙氧基羰基乙基氧基、甲氧基乙氧基、苯氧基乙 氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、味咐 乙氧基、味啉丙氧基、烯丙氧基乙氧基乙氧基、苯氧基、 甲苯基氧基、二甲苯基氧基、采基氧基、異丙苯基氧基、 甲氧基苯氧基、乙氧基苯氧基、氯苯氧基、溴苯氧基、乙 醯氧基、苯甲醯氧基、萘氧基、苯基磺醯氧基、膦醯氧基、 膦酸根氧基等。 亦可含有醯胺基之胺基(RG8NH-、(RM^rO^n-)可舉出 -16 - 200941138 例如RM、及RG1()係由除了氫原子以外的非金屬原子團 所構成之基者。又,RM與以115亦可鍵結而形成環。 前述胺基可舉出例如N-烷胺基、N,N-二烷胺基、N-芳 胺基、Ν,Ν-二芳胺基、N-烷基-N-芳胺基、醯胺基、N-烷基 醯胺基、Ν-芳基醯胺基、脲基、Ν’·烷脲基、Ν’,Ν’-二烷脲 基、Ν’-芳脲基、Ν’,Ν’-二芳脲基、Ν’·烷基-Ν’-芳脲基' Ν-烷脲基、Ν-芳脲基、Ν’-烷基-Ν-烷脲基、Ν’-烷基-Ν-芳脲 基、Ν’,Ν’-二烷基-Ν-烷脲基、Ν’-烷基-Ν’-芳脲基、Ν’,Ν’-二烷基-Ν-烷脲基、Ν’,Ν’-二烷基-Ν’-芳脲基、Ν’-芳基-Ν-烷脲基、Ν’-芳基-Ν-芳脲基、Ν’,Ν’-二芳基-Ν-烷脲基、 Ν’,Ν’-二芳基-Ν-芳脲基、Ν’·烷基-Ν’-芳基-Ν-烷脲基、Ν,-烷基-Ν’-芳基-Ν-芳脲基、烷氧基碳醯胺基、芳氧基碳醯胺 基、Ν-烷基-Ν-烷氧基碳醯胺基、Ν-烷基-Ν-芳氧基碳醯胺 基、Ν-芳基-Ν-烷氧基碳醯胺基、Ν-芳基-Ν-芳氧基碳醯胺 基等。在該等之烷基及芳基可舉出前述的烷基、取代烷基、 芳基及取代芳基》又,醯胺基、Ν-烷基醯胺基、Ν-芳基醯 氧基之醯基(R^CO-)的R”係如前述。該等之中,以Ν-院 胺基、N,N-二烷胺基、N-芳胺基、醯胺基爲更佳。 較佳胺基的具體例可舉出甲胺基、乙胺基、二乙胺基、 味啉基、哌啶基、吡咯啶基、苯胺基、苯甲醯胺基、乙_ 胺基等》 前述磺醯基(Reil-S〇2·)可舉出例如V11係由一價的非 金屬原子團所構成之基者。 此種磺醯基以例如烷基磺醯基、芳基磺醯基等爲佳。 -17- 200941138 在該等之烷基及芳基可舉出前述顯示作爲烷基、取代院 基、芳基及取代芳基者。 前述磺醯基的具體例可舉出丁基磺醯基'苯基磺醢 基、氯苯基磺醯基等。 前述磺酸根基(_S〇3-)係如前述’係意味著磺酸基 (-S03H)的共軛鹼基陰離子基’通常係與相對陽離子一同使 用爲佳。 此種相對陽離子能夠適當地選擇通常已知者’例如鎗 ❹ 類(例如銨類、鏑類、鱗類、碘鐵類、吖哄鑰類等)、金屬 離子類(例如 Na+、K+、Ca2+、Zn2 +等)。 前述羰基(R^U-CO-)可舉出例如R*113係由一價的非金 . 屬原子團所構成之基者。 此種羰基可舉出例如甲醯基、醯基、羧基、烷氧基羰 基、芳氧基羰基、胺基甲醯基、N-烷基胺基甲醯基、N,N-二烷基胺基甲醯基、N-芳基胺基甲醯基、N,N_二芳基胺基 甲醯基、N-烷基-Ν’-芳基胺基甲醯基等。該等之烷基及芳 基可舉出前述顯示作爲烷基、取代烷基、芳基及取代芳基 者。 前述羰基以甲醯基、醯基、羧基、烷氧基羰基、芳氧 基羰基、胺基甲醯基、Ν-烷基胺基甲醯基、Ν,Ν-二烷基胺 基甲醯基、Ν-芳基胺基甲醯基爲佳,以甲醯基、醯基、烷 氧基羰基、芳氧基羰基爲更佳。 前述羰基的具體例可適合舉出甲醯基、乙醯基、苯甲 醯基、羧基、甲氧基羰基、乙氧基羰基、芳氧基羰基、二 -18- 200941138 甲胺基苯基乙烯基羰基、甲氧基羰基甲氧基羰基、N-甲® 胺基甲醯基、N-苯基胺基甲醯基、N,N-二乙基胺基甲醯基、 味啉羰基等。 前述亞磺醯基(RQ14-SO-)可舉出R^14係由一價的非金 屬原子團所構成之基者。 此種亞磺醯基可舉出例如烷基亞磺醯基、芳基亞擴酸 基、胺亞磺醯基、N-烷基胺亞磺醯基、N,N-二烷基胺亞磺 醯基、N-芳基胺亞磺醯基、N,N-二芳基胺亞磺醢基、N-烷 基-N-芳基胺亞磺醯基等。在該等之烷基及芳基可舉出前述 顯示作爲烷基、取代烷基、芳基、取代芳基者。該等之中 以烷基亞磺醯基、芳基亞磺醯基爲佳。 前述取代亞磺醯基的具體例可適合舉出己基亞磺醯 基、苄基亞磺醯基、甲苯基亞磺醯基等。 前述膦酸基係意味著膦酸基上的羥基之一至二個係被 其他的有機側氧基所取代而成者,以例如前述的二烷基膦 酸基、二芳基膦酸基、烷基芳基膦酸基、單烷基膦酸基、 單芳基膦酸基等爲佳。該等之中以二烷基膦酸基、二芳基 膦酸基爲更佳。 前述膦酸基的更佳例子可舉出二乙基膦酸基、二丁基 膦酸基、二苯基膦酸基等。 前述鱗酸根基(-Ρ〇3Η2-、-Ρ03Η-)係如前述,係意味著 來自膦酸基(-P〇3H2)的酸第一解離或酸第二解離之共軛鹼 陰離子基。通常係與相對陽離子一同使用爲佳。此種相對 陽離子能夠適當地選擇通常已知者,例如各種鎗類(例如銨 -19- 200941138 類、鏑類、鱗類、碘鑰類、吖畊鑰類等)' 金屬離子類(例 如 Na+、K+、Ca2+、Zn2 +等)。 前述膦酸根基亦可以是在膦酸基內,羥基被一個有機 側氧基取代而成者的共軛鹼陰離子基,此種的具體例可舉 出前述的單烷基鱗酸基(-P〇3H(alkyl))、單芳基膦酸基 (-P03H(aryl))的共軛鹼基。 Ο❹ C-oxyl, ethoxycarbonylethyloxy, methoxyethoxy, phenoxyethoxy, methoxyethoxyethoxy, ethoxyethoxyethoxy, taste Ethyloxy, morpholinepropoxy, allyloxyethoxyethoxy, phenoxy, tolyloxy, xylyloxy, decyloxy, cumyloxy, A Oxyphenoxy, ethoxyphenoxy, chlorophenoxy, bromophenoxy, ethoxycarbonyl, benzhydryloxy, naphthyloxy, phenylsulfonyloxy, phosphinomethoxy, Phosphonic acid group and the like. The amine group which may also contain a mercapto group (RG8NH-, (RM^rO^n-) may, for example, -16 - 200941138, for example, RM, and RG1() are a base composed of a non-metal atom group other than a hydrogen atom. Further, RM may be bonded to 115 to form a ring. The aforementioned amine group may, for example, be an N-alkylamino group, an N,N-dialkylamino group, an N-arylamino group, an anthracene or a fluorene-diarylamine. , N-alkyl-N-arylamino, decylamino, N-alkylnonylamino, fluorene-aryl decylamino, ureido, Ν'·alkylureido, Ν', Ν'- Alkylureido, Ν'-arylureido, Ν', Ν'-diarylureido, Ν'·alkyl-Ν'-arylureido' Ν-alkylureido, Ν-arylureido, Ν'- Alkyl-oxime-alkylureido, Ν'-alkyl-oxime-arylureido, Ν', Ν'-dialkyl-oxime-alkylurea, Ν'-alkyl-Ν'-arylureido, Ν',Ν'-Dialkyl-oxime-alkylureido, Ν', Ν'-dialkyl-Ν'-arylureido, Ν'-aryl-oxime-alkylureido, Ν'-aryl -Ν-arylureido, Ν', Ν'-diaryl-fluorenyl-alkylurea, Ν', Ν'-diaryl-fluorene-arylureido, Ν'·alkyl-Ν'-aryl -Ν-alkylureido, hydrazine, -alkyl-Ν'-aryl-hydrazine-arylureido, alkoxycarbenamine , aryloxycarbaguanyl, fluorenyl-alkyl-hydrazine-alkoxycarbenylamine, fluorenyl-alkyl-fluorene-aryloxycarbenylamine, fluorene-aryl-hydrazine-alkoxy carbon An amidino group, a fluorenyl-aryl-fluorene-aryloxycarbenylamino group, etc. Examples of the alkyl group and the aryl group include the above-mentioned alkyl group, substituted alkyl group, aryl group and substituted aryl group. The R" group of the fluorenyl group, the fluorenyl-alkylamino group, and the fluorenyl group of the fluorenyl-aryloxy group (R^CO-) is as described above. Among these, the oxime-homoamine group, N, N a dialkylamino group, an N-arylamino group, a decylamino group is more preferable. Specific examples of a preferred amine group include a methylamino group, an ethylamino group, a diethylamino group, a morpholinyl group, a piperidinyl group, Pyrrolidinyl group, anilino group, benzylideneamine group, ethylamino group, etc. The sulfonyl group (Reil-S〇2.) is, for example, a group in which V11 is composed of a monovalent non-metal atomic group. Such a sulfonyl group is preferably, for example, an alkylsulfonyl group, an arylsulfonyl group or the like. -17- 200941138 The alkyl group and the aryl group may be exemplified by the above-mentioned alkyl group, substituted group, and aryl group. And a substituted aryl group. Specific examples of the above sulfonyl group include butyl sulfonyl 'phenyl sulfonyl group, chlorobenzene The above-mentioned sulfonate group (_S〇3-) is as defined above, and means that the conjugated base anion group of the sulfonic acid group (-S03H) is usually used together with the relative cation. The relative cation can be appropriately selected from those generally known, such as guns (e.g., ammonium, anthraquinone, scaly, iron iodide, ruthenium, etc.), metal ions (e.g., Na+, K+, Ca2+, Zn2+). The carbonyl group (R^U-CO-) may, for example, be a base of R*113 which is composed of a monovalent non-goldic atomic group. Examples of such a carbonyl group include a decyl group, a fluorenyl group, a carboxyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, an aminomethyl fluorenyl group, an N-alkylaminocarbamyl group, and an N,N-dialkylamine. A fluorenyl group, an N-arylaminomethyl fluorenyl group, an N,N-diarylaminomethyl fluorenyl group, an N-alkyl-fluorene'-arylaminocarbamyl group, and the like. The alkyl group and the aryl group may be exemplified by the above-mentioned alkyl group, substituted alkyl group, aryl group and substituted aryl group. The aforementioned carbonyl group is a fluorenyl group, a fluorenyl group, a carboxyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, an aminomethyl fluorenyl group, a fluorenyl-alkylaminomethyl fluorenyl group, an anthracene, a fluorenyl-dialkylaminocarbamyl group. Further, a fluorenyl-arylaminomethyl fluorenyl group is preferred, and a fluorenyl group, a fluorenyl group, an alkoxycarbonyl group or an aryloxycarbonyl group is more preferred. Specific examples of the above carbonyl group may be exemplified by a methyl group, an ethyl fluorenyl group, a benzhydryl group, a carboxyl group, a methoxycarbonyl group, an ethoxycarbonyl group, an aryloxycarbonyl group, and a -18-200941138 methylaminophenylvinyl group. Alkylcarbonyl, methoxycarbonylmethoxycarbonyl, N-methylaminomethylmercapto, N-phenylaminocarbamimidyl, N,N-diethylaminomethylguanidinyl, morpholinecarbonyl, and the like. The sulfinyl group (RQ14-SO-) may be a group in which R^14 is composed of a monovalent non-metal atomic group. Examples of such a sulfinyl group include an alkylsulfinyl group, an aryl sulfonate group, an amine sulfinylene group, an N-alkylamine sulfinylene group, and an N,N-dialkylamine sulfinic acid. An anthracenyl group, an N-arylamine sulfinyl group, an N,N-diarylamine sulfinyl group, an N-alkyl-N-arylamine sulfinyl group, and the like. The alkyl group and the aryl group may be mentioned as an alkyl group, a substituted alkyl group, an aryl group or a substituted aryl group. Among these, an alkylsulfinyl group or an arylsulfinyl group is preferred. Specific examples of the above substituted sulfinyl group may, for example, be a hexylsulfinyl group, a benzylsulfinyl group or a tolylsulfinyl group. The above phosphonic acid group means that one to two of the hydroxyl groups on the phosphonic acid group are substituted by another organic sideoxy group, for example, the aforementioned dialkylphosphonic acid group, diarylphosphonic acid group, or alkane. A arylphosphonic acid group, a monoalkylphosphonic acid group, a monoarylphosphonic acid group or the like is preferred. Among these, a dialkylphosphonic acid group or a diarylphosphonic acid group is more preferred. More preferable examples of the phosphonic acid group include a diethylphosphonic acid group, a dibutylphosphonic acid group, a diphenylphosphonic acid group and the like. The aforementioned tartaryl group (-Ρ〇3Η2-, -Ρ03Η-) is as defined above, and means an conjugated base anion group derived from an acid of a phosphonic acid group (-P〇3H2) or a second dissociated acid. It is usually preferred to use it together with a relative cation. Such a relative cation can be appropriately selected from those generally known, for example, various guns (for example, ammonium-19-200941138, anthraquinone, scaly, iodine, sorghum, etc.) metal ions (for example, Na+, K+, Ca2+, Zn2+, etc.). The above phosphonic acid group may be a conjugated base anion group in which a hydroxyl group is substituted by an organic side oxy group in a phosphonic acid group, and specific examples thereof include the aforementioned monoalkyl squaric acid group (-P).共3H(alkyl), a conjugated base of a monoarylphosphonic acid group (-P03H(aryl)). Ο

前述芳香族基能夠藉由將1種以上之含芳香族的自由 基聚合性化合物、與按照必要作爲共聚合成分之1種以上 的其他自由基聚合性化合物,依照通常的自由基聚合法製 造。 前述自由基聚合法例如通常可舉出懸浮聚合法或溶液 聚合法等。 前述含芳香族基之自由基聚合性化合物以例如通式 (A-1)所示之化合物、通式(A-2)所示之化合物爲佳。The aromatic group can be produced by a usual radical polymerization method by using one or more aromatic group-containing radical polymerizable compounds and one or more other radical polymerizable compounds which are required as a copolymerization component. The radical polymerization method is usually, for example, a suspension polymerization method or a solution polymerization method. The aromatic group-containing radically polymerizable compound is preferably a compound represented by the formula (A-1) or a compound represented by the formula (A-2).

Ri RaRi Ra

I I Q·- 通式(A-l) 其中,前述通式(A-l)中,Ri、R2及R3係表示氫原子 或1價的有機基。L係表示有機基且沒有亦可。Ar係表示 亦可含有雜環的芳香族基。I I Q·- General formula (A-1) In the above formula (A-1), Ri, R2 and R3 each represent a hydrogen atom or a monovalent organic group. The L system represents an organic group and is not acceptable. The Ar system represents an aromatic group which may also contain a hetero ring.

其中’前述通式(A-2)中,b、R2、R3及Ar係表示與 前述通式(A-1)同義。 -20- 200941138 前述L的有機基係例如由非金屬原子所構成多價的有 機基,可舉出由1至60個的碳原子、〇至10個的氮原子、 0至50個的氧原子、1至100個的氫原子及0至20個的硫 原子所構成者》 更具體地,前述L的有機基可舉出組合下述結構單位 而構成者、多價萘、多價蒽等。In the above formula (A-2), b, R2, R3 and Ar are synonymous with the above formula (A-1). -20- 200941138 The organic group of the above L is, for example, a polyvalent organic group composed of a non-metal atom, and may be exemplified by 1 to 60 carbon atoms, hydrazine to 10 nitrogen atoms, and 0 to 50 oxygen atoms. More specifically, the organic group of L may be a combination of the following structural units, polyvalent naphthalene, polyvalent hydrazine, or the like.

ten

•δ— 〇•δ— 〇

0-I+-J k Η0-I+-J k Η

前述L的連結基亦可具有取代基,前述取代基可舉出 前述的鹵素原子、羥基、羧基、磺酸根基、硝基、氰基、 醯胺基、胺基、烷基、烯基、炔基、芳基、取代氧基、取 代磺醯基、取代羰基、取代亞磺醯基、磺酸基、膦酸基、 膦酸根基、矽烷基、雜環基。 在前述通式(A-1)所示之化合物及前述通式(a-2)所示 之化合物,就敏感度而言’以通式(A·1)爲佳。又,前述通 式(A-1)之中,就安定性而言,以具有連結基者爲佳,前述 -21- 200941138 L的有機基,就非畫像部的除去性(顯像性)而言,以碳數1 〜4的伸烷基爲佳。 前述通式(A-1)所示之化合物係含有下述通式(A_3)的 結構單位之化合物。又,前述通式(A_2)所示之化合物係 含有下述通式(A-4)的結構單位之化合物。其中,就保存安 定性而言,以通式(A-3)的結構單位爲佳。 〇The linking group of L may have a substituent, and the above substituent may, for example, be a halogen atom, a hydroxyl group, a carboxyl group, a sulfonate group, a nitro group, a cyano group, a decylamino group, an amine group, an alkyl group, an alkenyl group or an alkyne group. A aryl group, an aryl group, a substituted oxy group, a substituted sulfonyl group, a substituted carbonyl group, a substituted sulfinyl group, a sulfonic acid group, a phosphonic acid group, a phosphonic acid group, a decyl group, or a heterocyclic group. The compound represented by the above formula (A-1) and the compound represented by the above formula (a-2) are preferably in the form of sensitivity (A·1). Further, among the above-mentioned general formula (A-1), in terms of stability, it is preferable to have a linking group, and the organic group of the above -21 to 200941138 L is not removable (developing property) of the non-image portion. In other words, an alkylene group having a carbon number of 1 to 4 is preferred. The compound represented by the above formula (A-1) is a compound containing a structural unit of the following formula (A-3). Further, the compound represented by the above formula (A_2) is a compound containing a structural unit of the following formula (A-4). Among them, in terms of preservation stability, the structural unit of the formula (A-3) is preferred. 〇

通式(A-3)General formula (A-3)

通式(A-4) 其中,前述通式(A-3)及通式(Α·4)中,r2、r3及 Ar係表示與前述通式(A-1)及通式(α·2)同義》 在前述通式(Α-3)及通式(Α-4),就非畫像部的除去性 (顯像性)而言,Ri及R2以氫原子,R3以甲基爲佳。 前述通式(A-3)的L’就非畫像部的除去性(顯像性)而 言,以碳數1〜4的伸烷基爲佳。 前述通式(A-1)所示之化合物或通式(Α·2)所示之化合 物沒有特別限制,可舉出例如下述例示化合物(1 )〜(3 〇)。 -22- 200941138 0⑴In the above formula (A-3) and formula (Α·4), r2, r3 and Ar are represented by the above formula (A-1) and formula (α·2). (Synonymous) In the above-mentioned general formula (Α-3) and general formula (Α-4), in terms of the removability (developability) of the non-image portion, Ri and R2 are hydrogen atoms, and R3 is preferably a methyl group. L' of the above formula (A-3) is preferably an alkylene group having 1 to 4 carbon atoms in terms of the removability (developability) of the non-image portion. The compound represented by the above formula (A-1) or the compound represented by the formula (2) is not particularly limited, and examples thereof include the following exemplified compounds (1) to (3). -22- 200941138 0(1)

(10)(10)

(Π)(Π)

(4)(4)

(12)(12)

(13) Ο φ)(13) Ο φ)

(14)(14)

乂 S&lt;CHjCH20乂 S&lt;CHjCH20

(15〕(15)

&quot;^Oj-Ct^CHaO (16) -23- 200941138 ¢17) ch3&quot;^Oj-Ct^CHaO (16) -23- 200941138 ¢17) ch3

m ,c〇r-m ,c〇r-

¢25)¢25)

¢29)¢29)

SiCC 物 前述例示化合物(1)〜(30)之中,以(5)、(6)、(11) 及(2 8)爲佳,該等之中,就保存安定性及顯像性而言, 及(6)爲更佳。 前述亦可含有雜環之芳香族基,在前述黏合劑之 沒有特別限制,將高分子化合物的總結構單位作爲1 、(14) 以(5) :含量 00莫 -24- .200941138 耳%時’前述通式(A-3)所示之結構單位以含有20莫耳%以 上爲佳’以含有30莫耳%〜45莫耳%以上爲更佳。前述含 量小於20莫耳%時’會有保存安定性降低之情形,大於ο 莫耳%時會有顯像性降低之情形。 --乙烯性不飽和鍵-- 前述乙烯性不飽合鍵沒有特別限制,例如以下述通式 (A-5)〜(A-7)所示者爲佳。 © 1Among the above-exemplified compounds (1) to (30), SiCC is preferably (5), (6), (11) and (28), and in terms of storage stability and development properties. , and (6) is better. The aromatic group may further contain a heterocyclic ring, and the binder is not particularly limited, and the total structural unit of the polymer compound is 1 and (14) is (5): the content is 00%-24-.200941138% by volume. The structural unit represented by the above formula (A-3) is preferably contained in an amount of 20 mol% or more, and more preferably 30 mol% to 45 mol% or more. When the content is less than 20 mol%, there is a case where the storage stability is lowered, and when the content is more than ο mol%, the development property is lowered. - Ethylene unsaturated bond - The ethylenic unsaturated bond is not particularly limited, and is preferably, for example, those represented by the following formulas (A-5) to (A-7). © 1

通式(A - 5 ) R* ^ —Y*C~Cs C 通式(A-6) (% ftjf —2—Cr C 通式(A-7) 其中,前述通式(A-5)〜(A-7)中,RpRu係各自獨立 地表示1價的有機基。X及Y係各自獨立地表示氧原子、 硫原子或-N-R4。Z係表示氧原子、硫原子、-N-R4、或伸苯 基。R4係表示氫原子或1價的有機基。 在通式(A-5),R!係各自獨立且以例如氫原子、亦可具 有取代基之烷基等,因爲自由基反應性高,以氫原子、甲 基爲更佳。 -25- 200941138 前述R·2及R3係各自獨立且可舉出例如氫原子、鹵素 原子、胺基、羧基、烷氧基羰基、磺酸基 '硝基、氰基、 亦可具有取代基之烷基、亦可具有取代基之芳基、亦可具 有取代基之烷氧基、亦可具有取代基之芳氧基、亦可具有 取代基之院胺基、亦可具有取代基之芳胺基、亦可具有取 代基之烷基磺醯基、亦可具有取代基之芳基磺醯基等,因 爲自由基反應性高’以氫原子、羧基、烷氧基羰基、亦可 具有取代基之烷基、亦可具有取代基之芳基爲更佳。 前述IU以例如亦可具有取代基之烷基等爲佳,因爲與 自由基反應性高’以氫原子、甲基、乙基、異丙基等爲更 佳。 在此,能夠導入的前述取代基可舉出例如烷基、烯基、 炔基、芳基、烷氧基、芳氧基、鹵素原子、胺基、烷胺基、 芳胺基、羧基、烷氧基羰基、磺酸基、硝基、醯胺基、烷 基磺醯基、芳基磺醯基等。 在前述(A-6),iU〜R8以例如氫原子、鹵素原子、胺基、 二烷胺基、羧基、烷氧基羰基、磺酸基、硝基、氰基、亦 可具有取代基之烷基、亦可具有取代基之芳基、亦可具有 取代基之烷氧基、亦可具有取代基之芳氧基、亦可具有取 代基之烷胺基、亦可具有取代基之芳胺基、亦可具有取代 基之烷基磺醯基、亦可具有取代基之芳基磺醯基等爲佳, 以氫原子、羧基、烷氧基羰基、亦可具有取代基之烷基、 亦可具有取代基之芳基爲更佳。 能夠導入之前述取代基,可例示在前述通式(A-5)所舉 -26- 200941138 出者。 在前述通式(A-7),R9以例如氫原子、亦可具有取代基 之烷基爲隹,因爲自由基反應性高,以氫原子、甲基爲更 佳。 前述R1()、Ru係各自獨立且以例如氫原子、鹵素原子、 胺基、二烷胺基、羧基、烷氧基羰基、磺酸基、硝基、氰 基、亦可具有取代基之烷基、亦可具有取代基之芳基、亦 可具有取代基之烷氧基、亦可具有取代基之芳氧基、亦可 具有取代基之烷胺基、亦可具有取代基之芳胺基、亦可具 有取代基之烷基磺醯基、亦可具有取代基之芳基磺醯基等 爲佳’因爲自由基反應性高,以氫原子、羧基、烷氧基羰 基、亦可具有取代基之烷基、亦可具有取代基之芳基爲更 佳。 在此’能夠導入之前述取代基,可例示在前述通式(A-5) 所舉出者。 前述Z係表示氧原子、硫原子、-Nh 3-、或亦可具有 取代基之伸苯基。R13係表示亦可具有取代基之烷基等,因 爲自由基反應性高,以氫原子、甲基、乙基、異丙基爲佳。 前述通式(A-5)〜(A-7)所示之側鏈乙烯性不飽合鍵之 中’因爲聚合反應高而敏感度變高,以通式(Α·5)者爲更佳。 前述性不飽合鍵在前述高分子化合物之含量沒有 特別限制’以〇_5meq/g〜3.0meq/g爲佳,以1.0meq/g〜 3.0meq/g爲更佳,以i.5meq/g〜2.8meq/g爲特佳。前述含 量小於0.5meq/g時,因爲硬化反應量少會有低敏感度之情 -27- 200941138 形,大於3. Omeq/g時,會有保存安定性變差之情形。 前述含量(meq/g)係能夠藉由例如碘價滴定來測定。 在側鏈導入前述通式(A-5)所示乙烯性不飽合鍵之方 法沒有特別限制,能夠藉由例如使在側鏈具含有羧基之高 分子化合物與具有乙烯性不飽合鍵及環氧基之化合物加成 反應而得到。General formula (A - 5 ) R* ^ - Y*C~Cs C Formula (A-6) (% ftjf - 2 - Cr C Formula (A-7) wherein the above formula (A-5) is In (A-7), RpRu each independently represents a monovalent organic group. X and Y each independently represent an oxygen atom, a sulfur atom or -N-R4. The Z system represents an oxygen atom, a sulfur atom, -N- R4, or a phenyl group. R4 represents a hydrogen atom or a monovalent organic group. In the formula (A-5), R! is each independently and, for example, a hydrogen atom, an alkyl group which may have a substituent, etc., because The radical reactivity is high, and a hydrogen atom or a methyl group is more preferable. -25-200941138 The above R·2 and R3 are each independently and may, for example, be a hydrogen atom, a halogen atom, an amine group, a carboxyl group or an alkoxycarbonyl group. a sulfonic acid group 'nitro group, a cyano group, an alkyl group which may have a substituent, an aryl group which may have a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, or The amine group having a substituent, the arylamine group which may have a substituent, the alkylsulfonyl group which may have a substituent, the arylsulfonyl group which may have a substituent, etc., because the radical reactivity is high' Hydrogen atom A carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are more preferable. The above IU is preferably an alkyl group which may have a substituent, etc., because of reactivity with a radical. Preferably, the hydrogen group is a hydrogen atom, a methyl group, an ethyl group, an isopropyl group or the like. Here, examples of the substituent which can be introduced include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, and an aromatic group. An oxy group, a halogen atom, an amine group, an alkylamino group, an arylamine group, a carboxyl group, an alkoxycarbonyl group, a sulfonic acid group, a nitro group, a decylamino group, an alkylsulfonyl group, an arylsulfonyl group, etc. (A-6), iU to R8 are, for example, a hydrogen atom, a halogen atom, an amine group, a dialkylamino group, a carboxyl group, an alkoxycarbonyl group, a sulfonic acid group, a nitro group, a cyano group, or an alkyl group which may have a substituent An aryl group which may have a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, an alkylamino group which may have a substituent, an arylamine group which may have a substituent, It may preferably be an alkylsulfonyl group having a substituent, an arylsulfonyl group having a substituent, etc., and a hydrogen atom or a carboxyl group. The oxycarbonyl group, the alkyl group which may have a substituent, and the aryl group which may have a substituent are more preferable. The above-mentioned substituent which can be introduced can be exemplified by the above formula (A-5) -26-200941138 In the above formula (A-7), R9 is, for example, a hydrogen atom or an alkyl group which may have a substituent, and is preferably a hydrogen atom or a methyl group because of a high radical reactivity. The above R1() And Ru each independently and, for example, a hydrogen atom, a halogen atom, an amine group, a dialkylamine group, a carboxyl group, an alkoxycarbonyl group, a sulfonic acid group, a nitro group, a cyano group, an alkyl group which may have a substituent, or An aryl group having a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, an alkylamine group which may have a substituent, an arylamine group which may have a substituent, or may have The alkylsulfonyl group of the substituent, the arylsulfonyl group which may have a substituent, etc. are preferable because the radical is highly reactive, and a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, or an alkyl group which may have a substituent Further, an aryl group which may have a substituent is more preferable. Here, the substituent which can be introduced can be exemplified by the above formula (A-5). The above Z system represents an oxygen atom, a sulfur atom, -Nh 3- or a pendant phenyl group which may have a substituent. R13 represents an alkyl group or the like which may have a substituent, and is preferably a hydrogen atom, a methyl group, an ethyl group or an isopropyl group because of its high radical reactivity. Among the side chain ethylenically unsaturated bonds represented by the above formulas (A-5) to (A-7), the sensitivity is high because of the high polymerization reaction, and the formula (Α·5) is more preferable. The content of the aforementioned unsaturated bond in the above polymer compound is not particularly limited to 〇_5meq/g to 3.0 meq/g, more preferably 1.0 meq/g to 3.0 meq/g, and i.5 meq/g. ~2.8meq/g is especially good. When the above content is less than 0.5 meq/g, since the amount of hardening reaction is small, there is a case where the sensitivity is low, and when it is more than 3. Omeq/g, there is a case where the stability of storage is deteriorated. The above content (meq/g) can be measured by, for example, iodine titration. The method of introducing the ethylenic unsaturated bond represented by the above formula (A-5) in the side chain is not particularly limited, and for example, a polymer compound having a carboxyl group in a side chain and an ethylenically unsaturated bond and an epoxy can be used. The compound is obtained by addition reaction of a compound.

在側鏈具含有羧基之高分子化合物,係例如能夠藉由 將1種以上含有羧基之自由基聚合性化合物、與按照必要 作爲共聚合成分之1種以上的其他自由基聚合性化合物, 依照通常的自由基聚合法製造。前述自由基聚合法例如通 常可舉出懸浮聚合法或溶液聚合法等。 前述具有乙烯性不飽合鍵及環氧基之化合物係若具有 該等時,沒有特別限制,以例如下述通式(A-8)所示化合物 及通式(A-9)所示化合物爲佳。 ❹The polymer compound having a carboxyl group in the side chain can be, for example, one or more kinds of other radical polymerizable compounds containing a carboxyl group and one or more other radical polymerizable compounds which are required to be a copolymerization component. Manufactured by free radical polymerization. The radical polymerization method is usually, for example, a suspension polymerization method or a solution polymerization method. The compound having an ethylenic unsaturated bond and an epoxy group is not particularly limited as long as it has such a compound, and for example, a compound represented by the following formula (A-8) and a compound represented by the formula (A-9) are good. ❹

Η 通式(A-8) 其中’前述通式(A-8)中,Ri係表示氫原子或甲基。Ll 係表示有機基。Η General formula (A-8) wherein, in the above formula (A-8), Ri represents a hydrogen atom or a methyl group. Ll represents an organic group.

通式(A-9) 其中,前述通式(A-9)中,R2係表示氫原子或甲基。L2 係表示有機基。W係表示4〜7員環的脂肪族烴基。 前述通式(A-8)所示化合物及通式(A-9)所示化;合物之 -28- .200941138 中’以通式(A-8)所示化合物爲佳,在前述通式(Α·8) ’以 Μ係碳原子數1〜4的伸烷基者爲更佳。 在通式(A-8)所示化合物或通式(A-9)所示化合物,沒有 特別限制,可舉出例如下述例示化合物(3 1)〜(40)。In the above formula (A-9), R2 represents a hydrogen atom or a methyl group. L2 represents an organic group. The W system represents an aliphatic hydrocarbon group of 4 to 7 membered rings. The compound represented by the above formula (A-8) and the compound of the formula (A-9); in the compound -28-.200941138, the compound represented by the formula (A-8) is preferred, The formula (Α·8) 'is more preferably an alkyl group having 1 to 4 carbon atoms. The compound represented by the formula (A-8) or the compound of the formula (A-9) is not particularly limited, and examples thereof include the following exemplified compounds (3 1) to (40).

前述含有羧基之自由基聚合性化合物係例如丙儲酸、 甲基丙烯酸、伊康酸、巴豆酸、異巴豆酸、順丁烯二酸、 對羧基苯乙烯等,特佳之物可舉出丙烯酸、甲基丙嫌酸等。 -29- 200941138 導入前述側鏈之反應係例如能夠藉由將三乙胺、苄基 甲胺等的3級胺、氯化十二烷基三甲銨、氯化四甲銨、氯 化四乙銨等的4級銨鹽、吡啶、三苯基氧化膦等作爲觸媒 並在有機溶劑中,在反應溫度50 °C〜150 °C使其反應數小 時〜數十小時來進行。 前述在側鏈具有乙烯性不飽合鍵之結構單位沒有特別 限制,以例如下述通式(A-10)所示結構、通式(A· 11)所示結 構及混合該等所示結構者爲佳。 〇 r?-?T c-ch2 RbC-O-CHsr CH-Lf^O-C Ο 0Η h 通式(A-10)The radically polymerizable compound containing a carboxyl group is, for example, a silicic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid or p-carboxystyrene, and particularly preferred is acrylic acid. Methyl propyl acid and so on. -29- 200941138 The reaction system for introducing the aforementioned side chain can be, for example, a tertiary amine such as triethylamine or benzylmethylamine, dodecyltrimethylammonium chloride, tetramethylammonium chloride or tetraethylammonium chloride. The fourth-order ammonium salt, pyridine, triphenylphosphine oxide or the like is used as a catalyst in an organic solvent at a reaction temperature of 50 ° C to 150 ° C for several hours to several tens of hours. The structural unit having an ethylenic unsaturated bond in the side chain is not particularly limited, and is, for example, a structure represented by the following formula (A-10), a structure represented by the formula (A·11), and a structure in which the structures are mixed. It is better. 〇 r?-?T c-ch2 RbC-O-CHsr CH-Lf^O-C Ο 0Η h General formula (A-10)

RaRc 1¾RaRc 13⁄4

Oh 通式(A-l1) 其中,前述通式(A-10)及通式(A-11)中,Ra〜RC係表 示氫原子或1價的有機基。1係表示氫原子或甲基。^係 表示亦可具有連結基之有機基。 前述通式(A-10)所示結構或通式(A-11)所示結構在高 分子化合物之含量,以20莫耳%以上爲佳,以20莫耳%〜 5 〇莫耳%爲更佳,以2 5莫耳%〜4 5莫耳%爲特佳。前述含 量小於20莫耳%時’因爲硬化反應量少會有低敏感度之情 形’大於50莫耳%時,會有保存安定性變差之情形。 --羧基-- 在本發明的高分子化合物,爲了提升非畫像部除去性 等的各種性能,亦可以具有羧基。 -30- 200941138 前述羧基能夠藉由使其與具有氧基之自 合物共聚合,來賦予至前述高分子化合物。 作爲此種具自由基聚合性之酸基,可舉 磺酸、磷酸基等,特佳爲羧酸。 前述具有羧基之自由基聚合性化合物沒 能夠按照目的適當地選擇,可舉出例如丙烯 酸、伊康酸、巴豆酸、異巴豆酸、順丁烯二 乙烯等,該等之中,以丙烯酸、甲基丙烯酸 ❹ 烯爲佳,該等可單獨使用1種,亦可並用2 前述羧基在黏合劑之含量爲1.0meq/g〜 1.5meq/g〜3.0meq/g爲佳。前述含量小於1. 性變爲不充分,大於4.0meq/g時會有容易受 造成的畫像強度損傷之情形。 爲了提升畫像強度等的各種性能,前述 係除了前述的自由基聚合性化合物以外,以 他的自由基聚合性化合物共聚合爲佳。 ^ 前述其他的自由基聚合性化合物可舉出 酸酯類、甲基丙烯酸酯類、苯乙烯類之自由 物等。 具體上,可舉出丙烯酸烷酯等的丙烯酸 芳酯、甲基丙烯酸烷酯等的甲基丙烯酸酯類 芳酯、苯乙烯、烷基苯乙烯等的苯乙烯類、费 鹵素苯乙烯等。 前述丙烯酸酯類係以烷基的碳原子數1 由基聚合性化 出例如羧酸、 有特別限制, 酸、甲基丙烯 酸、對羧基苯 、對羧酸苯乙 種以上。 -4 . Omeq/g * 以 Omeq/g時顯像 到鹼水顯像所 高分子化合物 進而使其與其 例如選自丙烯 基聚合性化合 酯類、丙烯酸 、甲基丙烯酸 言氧基苯乙烯、 〜20者爲佳, -31- 200941138 可舉出例如丙烯酸甲酯、丙烯酸乙酯、丙烯酸丙酯、丙烯 酸丁醋、丙烯酸戊酯、丙烯酸乙基己酯、丙烯酸辛酯、丙 烯酸·第三辛酯、丙烯酸氯乙酯、丙烯酸2,2-二甲基羥基丙 酯、丙烯酸5-羥基戊酯、三羥甲基丙烷單丙烯酸酯、新戊 四醇單丙烯酸酯、丙烯酸環氧丙酯、丙烯酸苄酯、丙烯酸 甲氧基苄酯、丙烯酸糠酯、丙烯酸四氫糠酯等。 前述丙烯酸芳酯可舉出例如丙烯酸苯酯等。 前述甲基丙烯酸酯類係以烷基的碳原子爲1〜20者爲 ® 佳,可舉出例如甲基丙烯酸甲酯、甲基丙烯酸乙酯、丙烯 酸樹脂丙酯、甲基丙烯酸異丙酯、甲基丙烯酸戊酯、甲基 丙烯酸己酯、甲基丙烯酸環己酯、甲基丙烯酸苄酯、甲基 . 丙烯酸氯苄酯、丙烯酸樹脂辛酯、甲基丙烯酸4-羥基丁酯' 甲基丙烯酸5-羥基戊酯、甲基丙烯酸2,2-二甲基-3-羥基丙 酯、三羥甲基丙烷單甲基丙烯酸酯、新戊四醇單甲基丙烯 酸酯、甲基丙烯酸環氧丙酯、甲基丙烯酸糠酯、甲基丙烯 酸四氫糠酯等。 〇 前述甲基丙烯酸芳酯可舉出例如甲基丙烯酸苯酯、甲 基丙烯酸甲苯酯、甲基丙烯酸萘酯等。 前述苯乙烯類可舉出例如甲基苯乙烯、二甲基苯乙 烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基 苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基 苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、 乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等。 前述烷氧基苯乙烯可舉出例如甲氧基苯乙烯、4-甲氧 -32- .200941138 基-3-甲基苯乙烯、二甲氧基苯乙烯等。 前述鹵素苯乙烯可舉出例如氯苯乙烯、二氯苯 三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯 苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等。 該等自由基聚合性化合物可單獨使用1種,亦 2種以上。 在本發明,合成高分子化合物時所使用的溶劑 v 別限制,能夠按照目的適當地選擇,可舉出例如二氯 環己酮、甲基乙基酮、丙酮、甲醇、乙醇、丙醇、 乙二醇單甲基醚、乙二醇單乙基醚、乙酸2-甲氧基 . 1-甲氧基-2-丙醇、乙酸1-甲氧基-2-丙酯、N,N-二甲 胺、N,N-二甲基乙醯胺、二甲基亞颯、甲苯、乙酸 乳酸甲酯、乳酸乙酯等。該等可單獨使用1種,亦 使用2種以上。 在本發明,高分子化合物的分子量係質量平均 〇 以10,000以上爲佳,以10,000〜50,000爲更佳。前 平均分子量小於10,000時,會有硬化膜強度不足之 大於50,000時會有顯像性低落之傾向。 又,在本發明,在高分子化合物中亦可含有未 單體。此時,前述單體在前述高分子化合物中之含 15質量%以下爲佳。 在本發明,高分子化合物可單獨使用1種,亦 使用2種以上。又,亦可混合其他的高分子化合物而 乙烯、 、一溴 4-三氟 可並用 沒有特 乙烷、 丁醇、 乙酯、 基甲醢 乙酯、 可混合 分子量 述質量 情形, 反應的 量,以 可混合 丨使用。 -33- 200941138 此時,前述其他的高分子化合物在前述本發明的高分子化 合物之含量,以5 〇質量%以下爲佳’以3 0質量%以下爲更 佳。 &lt;環氧丙烯酸酯化合物&gt; 前述環氧丙烯酸酯化合物係指具有來自環氧化合物之 骨架,且在分子中含有乙烯性不飽合鍵及羧基之化合物。 此種化合物,例如能夠藉由使多官能環氧化合物與含羧基 的單體反應,進而加添多元酸酐之方法等來得到。 ® 前述多官能環氧化合物可舉出例如聯二甲苯酚型或雙 酚型環氧樹脂(「YX4000 ; JAPAN EPOXY RESINS公司製」 等)或該等的混合物、具有異三聚氰酸酯骨架等之雜環環氧 樹脂(「TEPIC ;日產化學工業公司製」、「ARALDITE PT810 ; CIBA SPECIALTY CHEMICALS公司製」等)、雙酚A型環 氧樹脂、雙酚F型環氧樹脂、加氫雙酚A型環氧樹脂、雙 酚S型環氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清 漆型環氧樹脂、鹵素化苯酚酚醛清漆型環氧樹脂、環氧丙 ❹ 基胺型環氧樹脂(例如,四環氧丙基二胺基二苯基甲烷 等)、海因型環氧樹脂 '脂環族環氧樹脂、三羥苯基甲烷型 環氧樹脂、雙酚A酚醛清漆型環氧樹脂、四苯酚基乙烷型 環氧樹脂、酞酸環氧丙酯樹脂、四環氧丙基二甲苯酚基乙 烷樹脂、含萘基的環氧樹脂(「ESN-190、ESN-360;新日鐵 化學公司製」、「HP-4032,EXA-4750,EXA-4700 ;大日本 油墨化學工業股份公司製」等、具有二環戊二烯骨架之環 氧樹脂(「HP-7200,HP-7200H ;大日本油墨化學工業股份 -34- 200941138 公司製」等);藉由將苯酚、鄰甲酚、萘酚等苯酚化合物與 具有酚性羥基之芳香族醛進行縮合反應所得到的多酚化合 物、與表氯醇之反應物;將苯酚化合物與二乙烯基苯或二 環戊二烯等的二烯烴化合物藉由加成反應所得到的多酚化 合物、與表氯醇之反應物;將4-乙烯基環己烯-1-氧化物的 開環聚合物使用過乙酸等環氧化而成者;異三聚氰酸三環 氧丙酯等的雜環之環氧樹脂;甲基丙烯酸環氧丙酯共聚合 系環氧樹脂(「CP-50S,CP-50M ;日本油脂股份公司製」 ® 等)、環己基順丁烯二醯亞胺與甲基丙烯酸環氧丙酯之共聚 合環氧樹脂;將選自苯酚及甲酚之1種與對羥基苯甲醯縮 合物加以環氧丙基醚化而成之環氧樹脂;雙(環氧丙氧基苯 . 基)金剛烷型環氧樹脂等。該等可單獨使用1種,亦可並用 2種以上。 又,含羧基的單體可舉出例如(甲基)丙烯酸、乙烯基 苯甲酸、順丁烯二酸、順丁烯二酸單烷酯、反丁烯二酸、 伊康酸、巴豆酸、桂皮酸、山梨酸、α-氰基桂皮酸、丙烯 酸二聚物;及其他(甲基)丙烯酸2-羥基乙酯等具有羥基之 單體與順丁烯二酸酐、酞酸酐、環己烷二羧酸酐等的環狀 酸酐之加成反應物;與含鹵素的羧酸化合物之反應生成 物、ω-羧基-聚己內酯單(甲基)丙烯酸酯等。而且,市售品 能夠使用東亞合成化學工業(股)製的 ARONIX Μ-5300、 Μ-5400 ' Μ5500及Μ-5600、新中村化學工業(股)製的ΝΚ ESTER CB-1及CBX-1、共榮社化學工業(股)製的ΗΟΑ-ΜΡ 及 HOA-MS、大阪有機化學工業股份有限公司製的 -35- .200941138 818&lt;:〇八丁#2 100等。該等可單獨使用1種,亦可並用2種 以上。 又,多元酸酐亦可舉出例如琥珀酸酐、甲基號珀酸酐、 2,3-二甲基琥珀酸酐、2,2_二甲基琥珀酸酐、乙基琥拍酸 酐、十二烷基琥珀酸酐、壬烯基琥珀酸酐、順丁嫌二酸酐、 甲基順丁烯二酸酐、2,3-二甲基順丁烯二酸酐、2_氯順丁嫌 —酸酐、2,3 -一氯順丁嫌二酸酐、溴順丁嫌二酸酐、伊康 酸酐、檸康酸酐、順式烏頭酸(cis-aconitic)酐、駄酸酐、 四氫酞酸酐、四氯酞酸酐、四溴酞酸酐、六氫酞酸酐、甲 基四氫酞酸酐、甲基六氫酞酸酐、內亞甲基四氫駄酸酐、 甲基內亞甲基四氫駄酸酐、氯橋酸(chlorendic)酐及5-(2,5· 二側氧基四氫呋喃基)-3 -甲基-3-環己嫌-1,2 -二殘酸酐等的 二元酸酐’亦可使用1,2,4-苯三甲酸酐、焦蜜石酸酐、 3,3’,4,4’-二苯基酮四羧酸等的多元酸酐等。該等可單獨使 用1種,亦可並用2種以上。 依照順序使各自反應來得到環氧丙烯酸酯,使該等反 應之比率係相對於1當量多官能環氧化合物的環氧基,含 羧基的單體之羧基爲〇_8〜1.2當量,以0.9〜1.1當量爲 佳,多元酸酐爲0.1〜1.0當量,以0.3〜1.0當量爲佳。 又,特開平5-7 0 528號公報所記載之在具有莽骨架之 環氧丙烯酸酯(未具有羧基之化合物),使酸酐加添而得到 的化合物等,亦可利用作爲本發明的環氧丙烯酸酯。 前述環氧丙烯酸酯化合物之分子量以1,000〜1 00,000 爲佳,以2,000〜50,000爲更佳。該分子量小於1,000時, -36- .200941138 會有感光層表面的膠黏性變強之情形,在後述之感光層硬 化後,會有膜質變脆或表面硬度變差之情形,大於100,000 時,會有顯像性變差之情形。又,樹脂的合成亦變爲困難。 前述黏合劑在前述感光性組成物中的固體成分含量以 5〜80質量%爲佳,以10〜70質量%爲更佳。 前述黏合劑在前述感光性組成物中的固體成分含量以 5〜80質量%爲佳,以1〇〜70質量%爲更佳。該固體成分含 量小於5質量%時,會有膜強度容易變差,該感光層表面 V 的膠黏性變差之情形,大於80質量%時,會有曝光敏感度 低落之情形。 (聚合性化合物) • 前述聚合性化合物沒有特別限制,可按照目的適當地 _ 選擇,I/O値的重量平均以0.50以下爲佳。 該聚合性化合物有三環癸烷二甲醇二丙烯酸酯(I/O 値:0.428)、三環癸烷二甲醇二甲基丙烯酸酯(I/O値: 0.385)、三羥_基丙烷三甲基丙烯酸酯(I/O値:0.517)、新 ❹ 戊二醇二丙烯酸酯(I/O値:0.564)、1,10-癸二醇二丙烯酸 酯(I/O 値:0.388)、1,6-己二醇二丙烯酸酯(I/O 値·· 0.443)、 1,9·壬二醇二丙烯酸酯(I/O値:0.413)、新戊二醇二甲基丙 烯酸酯(I/O値:0.477)、1,9-壬二醇二甲基丙烯酸酯(I/O 値:0.3 6 5)等》Oh General Formula (A-1) In the above formula (A-10) and formula (A-11), Ra to RC represents a hydrogen atom or a monovalent organic group. The 1 line represents a hydrogen atom or a methyl group. The ^ system indicates an organic group which may also have a linking group. The structure represented by the above formula (A-10) or the structure represented by the formula (A-11) is preferably 20 mol% or more, and 20 mol% to 5 mol%, based on the content of the polymer compound. More preferably, it is particularly good at 2 5 m% to 4 5 m%. When the content is less than 20 mol%, the case where the amount of hardening reaction is small and the case where the sensitivity is low is more than 50 mol%, the storage stability may be deteriorated. -Carboxyl group - The polymer compound of the present invention may have a carboxyl group in order to improve various properties such as non-image portion removability. -30- 200941138 The above carboxyl group can be imparted to the above polymer compound by copolymerizing it with an organic compound having an oxy group. The acid group having such a radical polymerizable property may, for example, be a sulfonic acid or a phosphoric acid group, and particularly preferably a carboxylic acid. The radically polymerizable compound having a carboxyl group is not appropriately selected according to the purpose, and examples thereof include acrylic acid, itaconic acid, crotonic acid, isocrotonic acid, and maleic ethylene. Among these, acrylic acid, A The base acrylate is preferably used alone or in combination of two. The carboxyl group is preferably used in an amount of from 1.0 meq/g to 1.5 meq/g to 3.0 meq/g. When the content is less than 1. The property is insufficient, and when it is more than 4.0 meq/g, the image strength which is easily damaged may be impaired. In order to enhance various properties such as image strength, it is preferred to copolymerize other radical polymerizable compounds in addition to the above-mentioned radical polymerizable compound. The other radical polymerizable compound may, for example, be a free ester of an acid ester, a methacrylate or a styrene. Specific examples thereof include methacrylate aryl esters such as alkyl acrylates and methacrylate aryl esters such as alkyl methacrylates; styrenes such as styrene and alkylstyrene; and halogen-containing styrenes. The acrylates are polymerized by a group of, for example, a carbon number of an alkyl group. For example, a carboxylic acid is particularly limited, and an acid, a methacrylic acid, a p-carboxybenzene, or a p-carboxylic acid phenylene is used. -4 . Omeq/g * When imaging with Omeq/g to an alkali water-developing polymer compound, it is selected, for example, from a propylene-based polymerizable ester, acrylic acid, methacrylic styrene, 〜 20 is preferred, -31-200941138, for example, methyl acrylate, ethyl acrylate, propyl acrylate, butyl acrylate, amyl acrylate, ethyl hexyl acrylate, octyl acrylate, acrylic acid · third octyl ester, Chloroethyl acrylate, 2,2-dimethylhydroxypropyl acrylate, 5-hydroxypentyl acrylate, trimethylolpropane monoacrylate, neopentyl alcohol monoacrylate, glycidyl acrylate, benzyl acrylate , methoxybenzyl acrylate, decyl acrylate, tetrahydrofurfuryl acrylate, and the like. The acryl aryl ester may, for example, be phenyl acrylate or the like. The methacrylates are preferably those in which the carbon atom of the alkyl group is from 1 to 20, and examples thereof include methyl methacrylate, ethyl methacrylate, propyl acrylate, and isopropyl methacrylate. Amyl methacrylate, hexyl methacrylate, cyclohexyl methacrylate, benzyl methacrylate, methyl. chlorobenzyl acrylate, octyl acrylate, 4-hydroxybutyl methacrylate methacrylate 5-hydroxypentyl ester, 2,2-dimethyl-3-hydroxypropyl methacrylate, trimethylolpropane monomethacrylate, pentaerythritol monomethacrylate, methacrylic acid methacrylate Ester, decyl methacrylate, tetrahydrofurfuryl methacrylate, and the like.前述 The aryl methacrylate may, for example, be phenyl methacrylate, cresyl methacrylate or naphthyl methacrylate. Examples of the styrenes include methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, and hexyl styrene. Cyclohexylstyrene, mercaptostyrene, benzylstyrene, chloromethylstyrene, trifluoromethylstyrene, ethoxymethylstyrene, ethoxymethylmethylstyrene, and the like. The alkoxystyrene may, for example, be methoxystyrene, 4-methoxy-32-.200941138--3-methylstyrene, dimethoxystyrene or the like. The halogen styrene may, for example, be chlorostyrene, dichlorobenzenetrichlorostyrene, tetrachlorostyrene, pentachlorostyrene, bromostyrene styrene, iodine styrene, fluorostyrene, trifluorostyrene, 2 - bromo-methylstyrene, 4-fluoro-3-trifluoromethylstyrene, and the like. These radically polymerizable compounds may be used alone or in combination of two or more. In the present invention, the solvent used in the synthesis of the polymer compound is not particularly limited, and can be appropriately selected according to the purpose, and examples thereof include dichlorocyclohexanone, methyl ethyl ketone, acetone, methanol, ethanol, propanol, and B. Glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyacetic acid. 1-methoxy-2-propanol, 1-methoxy-2-propyl acetate, N, N-di Methylamine, N,N-dimethylacetamide, dimethylhydrazine, toluene, methyl lactate, ethyl lactate, and the like. These may be used alone or in combination of two or more. In the present invention, the molecular weight of the polymer compound is preferably 10,000 or more, more preferably 10,000 to 50,000. When the average molecular weight is less than 10,000, the film strength tends to be low when the strength of the cured film is less than 50,000. Further, in the present invention, a non-monomer may be contained in the polymer compound. In this case, the monomer is preferably 15% by mass or less based on the polymer compound. In the present invention, the polymer compound may be used singly or in combination of two or more. Further, other polymer compounds may be mixed, and ethylene, and monobromo-tetrafluoro may be used in combination with no specific amount of ethylene, butanol, ethyl ester, methyl ethyl phthalate, and a mixture of molecular weights, and the amount of the reaction. It can be mixed and used. In the above-mentioned other polymer compound, the content of the polymer compound of the present invention is preferably 5% by mass or less, and more preferably 3% by mass or less. &lt;Epoxy acrylate compound&gt; The epoxy acrylate compound is a compound having a skeleton derived from an epoxy compound and containing an ethylenically unsaturated bond and a carboxyl group in the molecule. Such a compound can be obtained, for example, by a method in which a polyfunctional epoxy compound is reacted with a carboxyl group-containing monomer, and a polybasic acid anhydride is further added. For example, the above-mentioned polyfunctional epoxy compound may, for example, be a bixylenol type or a bisphenol type epoxy resin ("YX4000; manufactured by JAPAN EPOXY RESINS Co., Ltd."), or a mixture thereof, or an isomeric isocyanate skeleton. Heterocyclic epoxy resin ("TEPIC; manufactured by Nissan Chemical Industry Co., Ltd.", "ARALDITE PT810; manufactured by CIBA SPECIALTY CHEMICALS"), bisphenol A epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol S type epoxy resin, phenol novolak type epoxy resin, cresol novolak type epoxy resin, halogenated phenol novolak type epoxy resin, epoxy acrylamide type epoxy Resin (for example, tetraepoxypropyldiaminediphenylmethane, etc.), hydantoin epoxy resin alicyclic epoxy resin, trishydroxyphenylmethane epoxy resin, bisphenol A novolac type ring Oxygen resin, tetraphenol ethane type epoxy resin, butyl citrate resin, tetra-glycidyl dimethyl phenol ethane resin, naphthalene-containing epoxy resin ("ESN-190, ESN-360" ; Nippon Steel Chemical Co., Ltd., "HP-4032, EXA-4750, EXA-4700; Epoxy resin having a dicyclopentadiene skeleton ("HP-7200, HP-7200H; Dainippon Ink Chemical Industry Co., Ltd. -34-200941138"), etc., by the Japan Ink Chemical Industry Co., Ltd. a polyphenol compound obtained by a condensation reaction between a phenol compound such as phenol, o-cresol or naphthol and an aromatic aldehyde having a phenolic hydroxyl group, and a reaction product with epichlorohydrin; a phenol compound and divinylbenzene or dicyclopentane a polyphenol compound obtained by an addition reaction of a diene compound such as a diene, and a reaction product with epichlorohydrin; a ring-opening polymer of 4-vinylcyclohexene-1-oxide using a ring of peracetic acid or the like Oxidized one; heterocyclic epoxy resin such as triglycidyl isocyanate; epoxy methacrylate copolymerized epoxy resin ("CP-50S, CP-50M; Nippon Oil and Fats Co., Ltd. a copolymerized epoxy resin of cyclohexylm-butyleneimine and glycidyl methacrylate; a condensate selected from the group consisting of phenol and cresol and p-hydroxybenzamide Epoxy resin obtained by etherification of epoxy propyl; double (glycidoxy The phenyl group-based adamantane type epoxy resin, etc. These may be used alone or in combination of two or more. Examples of the carboxyl group-containing monomer include (meth)acrylic acid and vinylbenzoic acid. Maleic acid, maleic acid monoalkyl ester, fumaric acid, itaconic acid, crotonic acid, cinnamic acid, sorbic acid, α-cyano cinnamic acid, acrylic acid dimer; and others (A An addition reaction of a monomer having a hydroxyl group such as 2-hydroxyethyl acrylate with a cyclic acid anhydride such as maleic anhydride, decanoic anhydride or cyclohexane dicarboxylic anhydride; and a reaction with a halogen-containing carboxylic acid compound The product, ω-carboxy-polycaprolactone mono(meth)acrylate, and the like. In addition, the commercial products can use ARONIX Μ-5300, Μ-5400 'Μ5500 and Μ-5600 made by East Asia Synthetic Chemical Industry Co., Ltd., ΝΚ ESTER CB-1 and CBX-1 made by Shin-Nakamura Chemical Industry Co., Ltd. ΗΟΑ-ΜΡ and HOA-MS manufactured by Kyoeisha Chemical Industry Co., Ltd., -35-.200941138 818&lt;: 〇八丁#2 100, manufactured by Osaka Organic Chemical Industry Co., Ltd. These may be used alone or in combination of two or more. Further, examples of the polybasic acid anhydride include succinic anhydride, methyl benzoic anhydride, 2,3-dimethyl succinic anhydride, 2,2-dimethyl succinic anhydride, ethyl succinic anhydride, and dodecyl succinic anhydride. , nonenyl succinic anhydride, cis-succinic anhydride, methyl maleic anhydride, 2,3-dimethyl maleic anhydride, 2-chlorobutane-anhydride, 2,3-chlorochloride Dibutyl dianhydride, brominated dianhydride, itaconic anhydride, citraconic anhydride, cis-aconitic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, tetrachlorophthalic anhydride, tetrabromophthalic anhydride, six Hydrophthalic anhydride, methyltetrahydrophthalic anhydride, methyl hexahydrophthalic anhydride, endomethylene tetrahydrophthalic anhydride, methyl endomethylene tetrahydrophthalic anhydride, chlorendic anhydride and 5-(2) 1,2. Bis-oxytetrahydrofuranyl)-3-methyl-3-cyclohexan-1,2-diresin anhydride, etc. Dibasic anhydrides can also be used 1,2,4-benzenetricarboxylic anhydride, coke honey A polybasic acid anhydride such as petroic anhydride or 3,3',4,4'-diphenyl ketone tetracarboxylic acid. These may be used alone or in combination of two or more. The respective groups are reacted in order to obtain an epoxy acrylate such that the ratio of the reactions is based on the epoxy group of 1 equivalent of the polyfunctional epoxy compound, and the carboxyl group of the carboxyl group-containing monomer is 〇8 to 1.2 equivalents to 0.9. It is preferably 1.1 equivalents, and the polybasic acid anhydride is 0.1 to 1.0 equivalent, preferably 0.3 to 1.0 equivalent. Further, an epoxy acrylate having an anthracene skeleton (a compound having no carboxyl group) and a compound obtained by adding an acid anhydride described in JP-A No. 5-7 0 528 can also be used as the epoxy of the present invention. Acrylate. The epoxy acrylate compound preferably has a molecular weight of 1,000 to 1,000,000 and more preferably 2,000 to 50,000. When the molecular weight is less than 1,000, -36-.200941138 may have a strong adhesiveness on the surface of the photosensitive layer, and after the photosensitive layer is hardened as described later, the film may become brittle or the surface hardness may be deteriorated, and may be more than 100,000. When there is a case where the imaging performance is deteriorated. Moreover, the synthesis of the resin also becomes difficult. The content of the solid content of the above-mentioned binder in the photosensitive composition is preferably 5 to 80% by mass, more preferably 10 to 70% by mass. The content of the solid content of the above-mentioned binder in the photosensitive composition is preferably 5 to 80% by mass, more preferably 1 to 70% by mass. When the content of the solid component is less than 5% by mass, the film strength tends to be deteriorated, and the adhesiveness of the surface V of the photosensitive layer is deteriorated. When the content is more than 80% by mass, the exposure sensitivity may be lowered. (Polymerizable compound) The polymerizable compound is not particularly limited, and may be appropriately selected according to the purpose, and the weight of the I/O値 is preferably 0.50 or less. The polymerizable compound is tricyclodecane dimethanol diacrylate (I/O 値: 0.428), tricyclodecane dimethanol dimethacrylate (I/O 値: 0.385), trihydroxyl-propane trimethyl Acrylate (I/O値: 0.517), neopentyl glycol diacrylate (I/O値: 0.564), 1,10-decanediol diacrylate (I/O 値: 0.388), 1, 6-hexanediol diacrylate (I/O 値·· 0.443), 1,9·nonanediol diacrylate (I/O値: 0.413), neopentyl glycol dimethacrylate (I/O)値:0.477), 1,9-nonanediol dimethacrylate (I/O 値: 0.3 6 5), etc.

前述I/O値係將亦被稱爲(無機性値)/(有機性値)之各 種有機化合物的極性,有機槪念地處理而成之値,係對各 官能基設定參數之官能基貢獻法之一種。詳細地,前述I/O -37- 200941138 値在有機槪念圖(甲田善生著、三共出版( 1 984)); KUMAMOTO PHARMACEUTICAL BULLETIN(醫藥學報), 第1期、第1〜16項(1954年);化學領域、第11卷、第 10 期、第 719 〜725 項(1957 年);FRA GRACE JOURNAL(芳 香期刊)、第34期、第97〜111項(1979年);FRAGRACE JOURNAL(芳香期刊)、第50期、第79〜82項(1981年)等 的文獻有詳細的說明。 前述I/O値的槪念係將化合物的性質區分爲表示共價 〇 鍵性之有機性基及表示離子鍵之無機性基,並將全部的有 機化合物,定位於取名爲有機軸及無機軸的直行座標上各 一點來表不者。 . 前述無機性値係將有機化合物所具有的各種取代基或 鍵等對沸點的影響力之大小,以羥基作爲基準而數値化而 成者。具體上,因爲將直鏈醇的沸點曲線與直鏈石蠟的沸 點曲線之距離,在碳數5附近取得時爲約100 °c,所以將1 個羥基的影響力以數値規定爲100,基於該數値,將各種 〇 取代基或各種鍵等對沸點的影響力數値化而成之値係有機 化合物所具有的取代基之無機性値。例如,-COOH基的無 機性値爲150,雙鍵的無機性値爲2。因此,某種有機化合 物之無機性値係意味著該化合物所具有的各種取代基或鍵 等的無機性値之總和。 前述有機性値係指以分子內的亞甲基作爲單位,並將 代表該亞甲基之碳原子對沸點的影響力作爲基準而規定的 値。亦即,因爲直鏈飽和烴化合物在碳數5〜1 0附近增加 -38- 200941138 1個碳原子之沸點上升的平均値20°C,以此作爲基準,將 1個碳原子的有機性値規定爲20,並以此作爲基準,且將 各種取代基或鍵等對沸點之影響力數値化而成之値爲有機 性値。例如,硝基(-N02)有機性値爲70。 前述I/O値越接近0,係顯示非極性(疏水性、有機性 大)的有機化合物。越大時係顯示極性(親水性、無機性大) 的有機化合物。 又,I/O値的重量平均係例如將聚合性化合物A以a 〇 重量%、B以 b重量%之比率混合聚合性化合物而使用時 (a + b=100), I/O値的重量平均=(A的I/O値xa/100 + B的 I/O値xb/100)來計算。 . 以下,說明前述I/O値的計算方法之一個例子。 新戊四醇四丙烯酸酯的I/O値係依照以下的方法計 算,並藉由計算(無機性値)/(有機性値)來求得。 因爲新戊四醇四丙烯酸酯係具有17個碳原子,新戊四 醇四丙烯酸酯的有機性値能夠如下計算得到,亦即2 0(碳原 ® 子的有機性値)x 1 7(碳原子數)= 340。 新戊四醇四丙烯酸酯的無機性値係因爲新戊四醇四丙 烯酸酯具有4個羧基、4個雙鍵,所以,新戊四醇四丙烯 酸酯的無機性値爲 60(酯基的無機性値)χ4(酯基的個 數)+ 2(雙鍵的無機性値)Χ4(雙鍵的個數)=248。 據此’得知新戊四醇四丙烯酸酯的I/O値爲248(前述 共聚物的無機性値)/340(前述共聚物的有機性値)= 0.729。 又’在本發明之「聚合性化合物」係未包含在黏合劑 -39- 200941138 所包含的聚合性化合物。 前述聚合性化合物在前述感光性組成物中的固體成分 含量以5質量%〜50質量%爲佳,以1〇質量%〜40質量% 爲更佳。該固體成分含量小於5質量%時,會有產生顯像 性變差、曝光敏感度低落等問題之情形’大於50質量%時, 會有感光層的黏著性變強之情形,乃是不佳。 (肟衍生物) 前述肟衍生物係由下述通式(1)所示。The above-mentioned I/O lanthanum is also known as the polarity of various organic compounds of (inorganic 値)/(organic 値), and is treated organically, and is a functional group contribution to the parameter setting of each functional group. One of the laws. In detail, the aforementioned I/O -37-200941138 is in the organic memorial map (Katata Satoshi, San Gong Publishing (1 984)); KUMAMOTO PHARMACEUTICAL BULLETIN (Journal of Medicine), No. 1, Item 1 to 16 (1954) ); Chemistry, Vol. 11, No. 10, No. 719-725 (1957); FRA GRACE JOURNAL (Aromatic Journal), No. 34, No. 97-111 (1979); FRAGRACE JOURNAL ), the 50th issue, the 79th to 82nd (1981) and other documents are described in detail. The entanglement of the above I/O値 distinguishes the properties of the compound into an organic group representing a covalent bond bond and an inorganic group representing an ionic bond, and positions all the organic compounds in the name organic axis and none. Each point on the straight-line coordinates of the crankshaft is not shown. The inorganic lanthanum is obtained by varying the influence of various substituents or bonds of the organic compound on the boiling point and using a hydroxyl group as a reference. Specifically, since the distance between the boiling point curve of the linear alcohol and the boiling point curve of the linear paraffin is about 100 ° C when it is obtained in the vicinity of the carbon number of 5, the influence of one hydroxyl group is determined to be 100, based on the number of In this case, the inorganic enthalpy of the substituent of the fluorene-based organic compound obtained by decomposing the influence of various hydrazine substituents or various kinds of bonds on the boiling point. For example, the inorganic enthalpy of the -COOH group is 150, and the inorganic enthalpy of the double bond is 2. Therefore, the inorganic lanthanide of an organic compound means the sum of inorganic ruthenium of various substituents or bonds which the compound has. The above-mentioned organic oxime means a ruthenium which is defined by the influence of the influence of the carbon atom representing the methylene group on the boiling point in units of methylene groups in the molecule. That is, since the linear saturated hydrocarbon compound increases the average 値20 ° C of the boiling point of one carbon atom of -38 to 200941138 near the carbon number of 5 to 10 0, the organic enthalpy of one carbon atom is used as a reference. The formula is 20, and based on this, the influence of various substituents or bonds on the boiling point is made into an organic enthalpy. For example, the nitro (-N02) organic enthalpy is 70. The closer the I/O 接近 is to 0, the non-polar (hydrophobic, organic) organic compound is shown. When it is larger, it exhibits an organic compound having a polarity (hydrophilic, inorganic). In addition, the weight average of the I/O値 is, for example, when the polymerizable compound A is mixed with a polymerizable compound in a ratio of a 〇 wt% and B b wt% (a + b = 100), and the weight of the I/O 値The average = (I I / O 値 xa / 100 + B I / O 値 xb / 100) to calculate. Hereinafter, an example of the calculation method of the aforementioned I/O値 will be described. The I/O system of pentaerythritol tetraacrylate was calculated by the following method and calculated by calculation (inorganic enthalpy) / (organic enthalpy). Since pentaerythritol tetraacrylate has 17 carbon atoms, the organic enthalpy of neopentyltetraol tetraacrylate can be calculated as follows, that is, 20 (organic 値 of carbon source) x 1 7 (carbon) Atomic number) = 340. Inorganic lanthanide of pentaerythritol tetraacrylate Since neopentyltetraol tetraacrylate has 4 carboxyl groups and 4 double bonds, the intrinsic enthalpy of neopentyltetraol tetraacrylate is 60 (ester-based inorganic値)) 4 (number of ester groups) + 2 (inorganic enthalpy of double bond) Χ 4 (number of double bonds) = 248. From this, it was found that the I/O 新 of pentaerythritol tetraacrylate was 248 (inorganic enthalpy of the above copolymer) / 340 (organic enthalpy of the above copolymer) = 0.729. Further, the "polymerizable compound" of the present invention does not contain the polymerizable compound contained in the binder -39-200941138. The content of the solid content of the polymerizable compound in the photosensitive composition is preferably 5% by mass to 50% by mass, more preferably 1% by mass to 40% by mass. When the content of the solid content is less than 5% by mass, there is a problem that the developing property is deteriorated and the exposure sensitivity is lowered. When the content is more than 50% by mass, the adhesion of the photosensitive layer becomes strong, which is not preferable. . (Anthracene Derivative) The above anthracene derivative is represented by the following formula (1).

其中,上述通式(1)中,R1係表示氫原子、亦可具有取 代基之醯基、烷氧基羰基及芳氧基羰基之任一者,R2係各 自獨立地表示鹵素原子、烷基、芳基、烷氧基、芳氧基、 院硫基、方硫基及胺基之任~•者。m係表不0〜4的整數, 2以上時係互相亦可連結而形成環。A係表示4、5、6及7 員環之任一者。 該肟衍生物係保存安定性優良、高敏感度,藉由添加 該肟衍生物,保存時係保存安定性優良而不會產生聚合, 且容易處理’藉由能量線、特別是照射光線產生活性自由 基而有效率地開始聚合,該聚合性化合物能夠在短時間有 效率地聚合而得到高敏感度的聚合性組成物。 又,前述肟衍生物以下通式(2)所示之肟衍生物爲更 佳。 -40- 200941138In the above formula (1), R1 represents a hydrogen atom, a mercapto group which may have a substituent, an alkoxycarbonyl group and an aryloxycarbonyl group, and R2 each independently represents a halogen atom or an alkyl group. , aryl, alkoxy, aryloxy, thiol, thiol and amine. The m series is not an integer of 0 to 4, and when it is 2 or more, it may be linked to each other to form a ring. Line A indicates any of the 4, 5, 6 and 7 member rings. The anthracene derivative is excellent in stability and high sensitivity, and by adding the anthracene derivative, it is excellent in preservation stability without polymerization, and is easy to handle 'activating by energy rays, particularly irradiation light. The polymerization is started efficiently by radicals, and the polymerizable compound can be efficiently polymerized in a short time to obtain a highly sensitive polymerizable composition. Further, the anthracene derivative of the above formula (2) is more preferably an anthracene derivative. -40- 200941138

〇—R1 通式(2) 其中,上述通式(2)中,R1係表示氫原子、亦可具有取 代基之醯基、烷氧基羰基及芳氧基羰基之任一者,R2係各 自獨立地表示鹵素原子、烷基、芳基、烷氧基、芳氧基、 烷硫基、芳硫基及胺基之任一者,m係表示0〜4的整數。 X係表示CH2、〇、及S之任一者。1係表示1〜3的整數。 又,前述肟衍生物以下述通式(3)及(4)之任一者所示之 肟衍生物爲更佳。In the above formula (2), R1 represents a hydrogen atom, a sulfhydryl group which may have a substituent, an alkoxycarbonyl group and an aryloxycarbonyl group, and R2 each Each of a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amine group is independently represented, and m represents an integer of 0 to 4. The X system indicates any of CH2, 〇, and S. The 1 line represents an integer of 1 to 3. Further, the anthracene derivative is more preferably an anthracene derivative represented by any one of the following general formulae (3) and (4).

通式(3)General formula (3)

❹ 其中,上述通式(3)及(4)中,R1係表示氫原子、亦可 具有取代基之烷基、烷氧基羰基及芳氧基羰基之任一者’ R2係各自獨立地表示鹵素原子、烷基、芳基、烷氧基 '芳 氧基、烷硫基、芳硫基及胺基之任一者’ m係表示0〜4的 整數。X係表示CH2、〇、及S之任一·者。1係表示1〜3 的整數。 -41- 200941138 前述(2)至(4)之任一者所記載之肟衍生物,係以通式 (2)、(3)及(4)中,X爲Ο及S之任一者,1爲1及2之任一 者,R1爲亦可具有取代基之醯基及烷氧基羰基之任一者爲 佳。 前述通式(1)、(2)、(3)及(4)中,R1係亦可具有取代基 之醯基、烷氧基羰基及芳氧基羰基之任一者。 醯基可以是脂肪族、芳香族及雜環之任一者。以總碳 數爲2〜30者爲佳,以總碳數爲2〜20者爲更佳,以總碳 ® 數爲2〜16者爲特佳。前述醯基亦可更具有取代基。取代 基以烷氧基、芳氧基及鹵素原子之任一者爲佳。 醯基亦可具有取代基,可舉出例如乙醯基、正丙醯基、 . 異丙醯基、甲基丙醯基、丁醯基、三甲基乙醯基、己醯基、 環己烷羰基、辛醯基、癸醯基、十二烷醯基、十八烷醯基、 苄基羰基、苯氧基乙醯基、2-乙基己醯基、氯乙醯基'苯 甲醯基、甲苯羰基、對甲氧基苯甲醯基、2,5-二丁氧基苯 甲醢基、1-萘醯基、2-萘醯基、吡啶基羰基、甲基丙烯醯 基、丙烯醯基等。 烷氧基羰基亦可具有取代基,以總碳數2〜30者爲 佳,以總碳數2〜20者爲更佳,以總碳數2〜16者爲特佳。 此種烷氧基羰基可舉出例如甲氧基羰基、乙氧基羰基、異 丙氧基羰基、丁氧基基羰基、異丁氧基羰基、芳氧基羰基、 辛氧基羰基、十二烷氧基羰基、乙氧基乙氧基羰基。 芳氧基羰基亦可具有取代基,以總碳數7〜30的芳氧 基碳基爲佳,以總碳數7〜20者爲更佳,以總碳數7〜i6 -42- 200941138 者爲特佳。此種芳氧基羰基可舉出例如苯氧基鑛基、 氧基羰基、對甲氧基苯氧基羰基、2,5-二乙氧基苯氧 基、對氯苯氧基羰基、對硝基苯氧基幾基、對氰基苯 羰基。 , 前述通式(1)、(2)、(3)及(4)中’ r2係各自獨立且 出鹵素原子、烷基、芳基、烷氧基、芳氧基、院硫基 硫基及胺基之任一者,特別是可舉出脂肪族、芳香族 芳香族、鹵素原子、-OR3、-SR3、-nr3r4。R3及R4係 亦可連結而形成環。又,以及r4係各自獨立地表示氫 或脂肪族基、芳香族基、雜芳香族基之任—者。m爲 上,互相連結而形成環時,各自獨立的R2之間亦可 環,亦可透過R3及R4之至少任一者而形成環。 透過前述取代基R2而形成環時可舉出以下的結| 2-萘 甘 γμι 悬療 氧基 可舉 、芳 、雜 互相 原子 2以 形成In the above formulae (3) and (4), R1 represents a hydrogen atom, or an alkyl group, an alkoxycarbonyl group or an aryloxycarbonyl group which may have a substituent, and R2 each independently represents Any one of a halogen atom, an alkyl group, an aryl group, an alkoxy 'aryloxy group, an alkylthio group, an arylthio group and an amine group' m represents an integer of 0 to 4. The X system indicates any one of CH2, 〇, and S. The 1 series represents an integer of 1 to 3. -41-200941138 The anthracene derivative described in any one of the above (2) to (4), wherein X is Ο and S in the general formulae (2), (3) and (4), 1 is 1 or 2, and R1 is preferably any of an anthracenyl group and an alkoxycarbonyl group which may have a substituent. In the above formulae (1), (2), (3) and (4), R1 may have any one of a substituent group, an alkoxycarbonyl group and an aryloxycarbonyl group. The thiol group may be any of an aliphatic, an aromatic, and a heterocyclic ring. It is preferable that the total carbon number is 2 to 30, and the total carbon number is 2 to 20, and the total carbon number is 2 to 16. The aforementioned fluorenyl group may further have a substituent. The substituent is preferably an alkoxy group, an aryloxy group or a halogen atom. The mercapto group may have a substituent, and examples thereof include an ethyl fluorenyl group, a n-propyl fluorenyl group, an isopropenyl group, a methyl propyl fluorenyl group, a butyl fluorenyl group, a trimethyl ethenyl group, a hexyl fluorenyl group, and a cyclohexane carbonyl group. , octyl, decyl, dodecyl fluorenyl, octadecyl fluorenyl, benzylcarbonyl, phenoxyethyl hydrazino, 2-ethylhexyl decyl, chloroethyl benzyl benzyl thiol, toluene carbonyl , p-methoxybenzhydryl, 2,5-dibutoxybenzylidene, 1-naphthylfluorenyl, 2-naphthylfluorenyl, pyridylcarbonyl, methacrylinyl, acrylonitrile, and the like. The alkoxycarbonyl group may have a substituent, preferably having a total carbon number of 2 to 30, more preferably 2 to 20 in total carbon, and particularly preferably 2 to 16 in total carbon. The alkoxycarbonyl group may, for example, be a methoxycarbonyl group, an ethoxycarbonyl group, an isopropoxycarbonyl group, a butoxycarbonyl group, an isobutoxycarbonyl group, an aryloxycarbonyl group, an octyloxycarbonyl group, or twelve. Alkoxycarbonyl, ethoxyethoxycarbonyl. The aryloxycarbonyl group may have a substituent, preferably an aryloxy carbon group having a total carbon number of 7 to 30, more preferably a total carbon number of 7 to 20, and a total carbon number of 7 to i6 -42 to 200941138. It is especially good. Examples of such an aryloxycarbonyl group include a phenoxy mineral group, an oxycarbonyl group, a p-methoxyphenoxycarbonyl group, a 2,5-diethoxyphenoxy group, a p-chlorophenoxycarbonyl group, and a p-nitrobenzene group. Phenoxy group, p-cyanobenzenecarbonyl. In the above formulae (1), (2), (3) and (4), the 'r2 groups are each independently a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a thiol group and Any of the amine groups may, in particular, be an aliphatic, aromatic aromatic, halogen atom, -OR3, -SR3 or -nr3r4. R3 and R4 can also be joined to form a ring. Further, the r4 system independently represents hydrogen or an aliphatic group, an aromatic group or a heteroaromatic group. When m is the upper side and is connected to each other to form a ring, the independent R2 may be a ring or may form a ring through at least either of R3 and R4. When the ring is formed by the above-mentioned substituent R2, the following knots can be exemplified. 2-Naphthalene γμι Suspend The oxy group can be formed by argon and heteroatoms.

前述結構式中’ y及z係表示CH2、-〇-、-s-;g 之任一者。 烷基亦可具有取代基,以總碳數1〜18者爲佳, 碳數1〜ίο者爲爲特佳。此種烷基可舉出甲基、乙3 丙基、異丙基、正丁基、異丁基、第二丁基、第三Ί -NR- 以總 、正 基、 -43- .200941138 正己基、正辛基、第三辛基、正癸基。 芳基亦可具有取代基’以總碳數6〜20者爲佳’以總 碳數6〜12者爲爲特佳。此種芳基可舉出苯基、聯苯基、 萘基、氯苯基、甲氧基苯基。 烷氧基亦可具有取代基,以總碳數1〜1 8者爲佳’以 總碳數1〜12者爲特佳。此種烷氧基可舉出甲氧基、乙氧 基、正丙氧基、異丙氧基、正丁氧基、第三丁氧基、2_乙 基己氧基、正癸氧基、苯乙基氧基、苯氧基乙氧基。 〇 芳氧基亦可具有取代基,以總碳數6〜20者爲佳’以 總碳數6〜12者爲爲特佳。此種芳氧基可舉出苯氧基、萘 氧基、氯苯氧基、甲氧基苯氧基。 . 烷硫基亦可具有取代基,以總碳數1〜18者爲佳’以 總碳數1〜12者爲爲特佳。此種烷硫基可舉出甲硫基、乙 硫基、異丙硫基、正丁硫基、正辛硫基、正十二烷硫基、 2-乙基己硫基。 芳硫基亦可具有取代基,以總碳數6〜20者爲佳,以 W 總碳數6〜12者爲爲特佳。此種芳硫基可舉出苯硫基、甲 苯硫基、氯苯硫基、乙氧基羰基苯硫基。 胺基亦可具有取代基,可被烷基及芳基之至少一者取 代,以總碳數1〜2 0者爲佳,以總碳數1〜1 2者爲爲特佳。 此種胺基可舉出-NH2基、二乙胺基、二苯胺基、甲基苯胺 基。 R2、R3及R4的脂肪族基、芳香族基及雜芳香族基之具 體例可舉出與前述R1同樣者。 -44- .200941138 前述通式(1)〜(4)所示之肟衍生物的具體例可舉出下述 結構式(1)〜(52)所示之化合物,但是本發明未限定於該等。 ❹In the above structural formula, 'y and z are each of CH2, -〇-, -s-;g. The alkyl group may have a substituent, and it is preferably one having a total carbon number of from 1 to 18, and particularly preferably having a carbon number of from 1 to ί. Such an alkyl group may, for example, be a methyl group, a propylidene group, an isopropyl group, an n-butyl group, an isobutyl group, a second butyl group, a third fluorene-NR- group, a total group, a fluorenyl group, a -43-.200941138 n-hexyl group. , Zheng Xinji, third octyl, and ruthenium. The aryl group may have a substituent ', preferably 6 to 20 in total carbon number', and is particularly preferably a total carbon number of 6 to 12. Examples of such an aryl group include a phenyl group, a biphenyl group, a naphthyl group, a chlorophenyl group, and a methoxyphenyl group. The alkoxy group may have a substituent, and it is preferably one having a total carbon number of from 1 to 18, and particularly preferably having a total carbon number of from 1 to 12. The alkoxy group may, for example, be a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group, a third butoxy group, a 2-ethylhexyloxy group or a n-decyloxy group. Phenylethyloxy, phenoxyethoxy. The aryloxy group may have a substituent, and it is preferably a total carbon number of 6 to 20, which is particularly preferably a total carbon number of 6 to 12. Examples of such an aryloxy group include a phenoxy group, a naphthyloxy group, a chlorophenoxy group, and a methoxyphenoxy group. The alkylthio group may have a substituent, and preferably has a total carbon number of from 1 to 18, and is particularly preferably a total carbon number of from 1 to 12. Examples of such an alkylthio group include a methylthio group, an ethylthio group, an isopropylthio group, a n-butylthio group, a n-octylthio group, a n-dodecylthio group, and a 2-ethylhexylthio group. The arylthio group may have a substituent, and it is preferably a total carbon number of 6 to 20, and particularly preferably a total carbon number of 6 to 12. Examples of such an arylthio group include a phenylthio group, a toluenethio group, a chlorophenylthio group, and an ethoxycarbonylphenylthio group. The amine group may have a substituent, and may be substituted by at least one of an alkyl group and an aryl group, preferably having a total carbon number of 1 to 2 0, and particularly preferably having a total carbon number of 1 to 12. Examples of such an amine group include a -NH2 group, a diethylamino group, a diphenylamino group, and a methylanilino group. Specific examples of the aliphatic group, the aromatic group and the heteroaromatic group of R2, R3 and R4 are the same as those of the above R1. -44-.200941138 Specific examples of the anthracene derivatives represented by the above formulas (1) to (4) include the compounds represented by the following structural formulae (1) to (52), but the present invention is not limited thereto. Wait. ❹

-45- 200941138-45- 200941138

結構式(1)Structural formula (1)

結構式(2)Structural formula (2)

結構式(4)Structural formula (4)

結構式(5)Structural formula (5)

結構式⑹Structural formula (6)

結構式(7) 結構式(8)Structural formula (7) Structural formula (8)

結構式(11) 結構式(12)Structural formula (11) Structural formula (12)

結構式(13) 結構式(14) 結構式(15) 結構式(16) 結構式(17) 結構式(18)Structural formula (13) Structural formula (14) Structural formula (15) Structural formula (16) Structural formula (17) Structural formula (18)

妒OAG 結構式(19) 結構式(20) 結構式(21) 結構式(22)妒OAG structural formula (19) structural formula (20) structural formula (21) structural formula (22)

,QA&lt;!, QA&lt;!

結構式(23) 結構式(24) 結構式(25) 結構式(26) 結構式(27) 結構式(28)Structural formula (23) Structural formula (24) Structural formula (25) Structural formula (26) Structural formula (27) Structural formula (28)

結構式(29)結構式(30) 結構式(31) 結構式(32) 結構式(33) 結構式(34) -46- 200941138 mStructural formula (29) Structural formula (30) Structural formula (31) Structural formula (32) Structural formula (33) Structural formula (34) -46- 200941138 m

結構式(35)結構式(36) 結構式(37) 結構式(38) 結構式(39) ^.oJLo.p*, |f ο γΟΗStructural formula (35) Structural formula (36) Structural formula (37) Structural formula (38) Structural formula (39) ^.oJLo.p*, |f ο γΟΗ

纖式(40)織式(41) 結構式(42) 雜式(43) 纖式(44)結構式(45)Fiber type (40) weave type (41) structure type (42) type (43) fiber type (44) structure type (45)

結構式(46)結構式(47) 結構式(48)結構式(49)結構式(5(〇結構式¢51) 結構式(52) 又,該肟衍生物能夠以測定1H-NMR譜、UV-vis吸收 光譜來鑑定。 (肟衍生物的製造方法) 前述肟衍生物的製造方法藉由將對應該肟衍生物的起 始材料之肟衍生物(以下稱爲材料肟衍生物)及醯氯化物或 酐,在鹼(例如二乙胺、吡啶)的存在下,於THF、DMF、 乙腈等惰性溶劑中,或如吡啶的鹼性溶劑中使其反應而容 易地合成。目I]述反應溫度以-10·'60°C爲佳。 又,藉由使用氯甲酸酯、烷基磺醯氯、芳基磺醯氯作 爲前述醯氯化物,能夠合成對應的各種肟酯化合物。 作爲製造該肟衍生物時所使用的材料肟衍生物的合成 方法,能夠藉由在標準化學教科書(例如,J. March, Advanced Organic Chemistry(高等有機化學)第 4 版, -47- •200941138Structural formula (46) Structural formula (47) Structural formula (48) Structural formula (49) Structural formula (5 (〇 structural formula ¢ 51) Structural formula (52) Further, the anthracene derivative can be measured by 1H-NMR spectrum, Identification by UV-vis absorption spectroscopy (manufacturing method of anthracene derivative) The above-described method for producing an anthracene derivative is obtained by using an anthracene derivative (hereinafter referred to as a material indole derivative) and a crucible of a starting material corresponding to an anthracene derivative. The chloride or anhydride is easily synthesized in the presence of a base (for example, diethylamine or pyridine) in an inert solvent such as THF, DMF or acetonitrile or an alkaline solvent such as pyridine. The reaction temperature is preferably -10·'60 ° C. Further, by using chloroformate, alkylsulfonium chloride or arylsulfonium chloride as the above-mentioned ruthenium chloride, various corresponding oxime ester compounds can be synthesized. The method for synthesizing the hydrazine derivative used in the production of the hydrazine derivative can be carried out in standard chemistry textbooks (for example, J. March, Advanced Organic Chemistry, 4th edition, -47- • 200941138)

Wiley InterSCience,1 992年),或專門硏究論文(例如,S.R. Sanler &amp; W. Karo,Organic functional group preparations (有機吕能基製備),第3卷,Academic Press)所記載之各 式各樣的方法來得到。 前述材料肟衍生物以特佳合成方法,可舉出例如將醛 或酮與羥基胺或其鹽,在如乙醇或乙醇水之極性溶劑中使 其反應之方法。此時,係添加如乙酸鈉或吡啶的鹼來控制 反應混合物的pH。反應速度係PH依存性,鹼基能夠在反 © 應開始時或在反應中連續地添加係眾所周知。 亦能夠將如吡啶之鹸性溶劑作爲鹼及/或溶劑或助溶 劑使用。 前述反應溫度係通常以混合物的回流溫度亦即約60〜 1 2 0 °C爲佳。 前述材料肟衍生物的其他較佳合成方法,可舉出使用 亞硝酸或亞硝酸烷酯之「活性」亞甲基的亞硝基化方法。 例如在 Organic Syntheses(有機合成)coll. Vol. VI(J. ® Wiley&amp;Sons, New York, 1 988), pp. 199 and 840 所記載的鹸 性條件,及例如在 Organic Syntheses coll· Vol· ρρ· 32 and 3 73, coll. Vol. Ill, pp. 191 and 513, coll. Vol. II, pp. 202, 204 and 3 63所記載的酸性條件之雙方,都適合於合成在本 發明作爲起始材料所使用的材料肟衍生物。 前述亞硝酸通常係由亞硝酸鈉所生成》 前述亞硝酸烷酯可舉出例如亞硝酸甲酯、亞硝酸乙 酯、亞硝酸異丙酯、亞硝酸丁酯或亞硝酸異戊酯。 -48- 200941138 前述肟酯的基亦可以是以2種類的立體配置(z)或(E) 存在者。可依照常用方法將異構體分離,亦可以將異構體 混合物直接使用作爲光引發用的原料。因此,該肟衍生物 亦可以是前述結構式(1)〜(52)的化合物的立體配置上的異 構體之混合物》 由於前述肟衍生物係保存安定性優良、高敏感度,藉 由添加在聚合性組成物,保存安定性優良,保存時係保存 安定性優良而不會產生聚合,藉由能量線、特別是照射光 ® 線產生活性自由基而有效率地開始聚合,該聚合性化合物 能夠在短時間有效率地聚合而得到高敏感度的聚合性組成 物。因此,該肟衍生物能夠作爲自由基產生劑並添加在印 . 刷油墨、透明加工材料、粉末塗覆材料、建築物的標記或 導路標記’照片複製手法、全息攝影記錄的材料、畫像記 錄手法、能夠使用有機溶劑或水性鹸顯像的印刷原版之製 造、用以製造網版印刷遮罩之日光硬化性塗覆材料、牙科 塡充用組成物、黏著劑、感壓性黏著劑、積層用樹脂、液 Θ 體及薄膜狀的蝕刻光阻、焊錫阻劑、電鍍阻劑、永久阻劑、 印刷電路板或電子電路用的光構成性介電體等而使用。 又’能夠使用於各式各樣用途用材料、在電漿顯示面板或 電發光顯示裝置的製程之形成結構的材料、彩色德光片、 光學開關、光學晶格(干擾晶格)、光電路製造用材料、大 量硬化(使用透明成形用模具之UV硬化)或依照立體微影 手法之三維性物品的製造材料、苯乙烯系聚酯等的複合材 料’及其他厚層組成物的製造用材料、電子組件及積層電 -49 - 200941138 路的塗覆或密封用的抗鈾劑、光纖形成用材料、光學透鏡 製造用塗覆材料等。而且,亦可使用於製造具有醫用機器、 輔助器具、移植材料'製造具有向熱特性之凝膠。特別地, 本發明的感光性組成物可適合使用。 又,該肟衍生物能夠使用作爲用以乳化聚合、粒狀聚 合、懸浮聚合之引發劑。又’亦可使用作爲用以固定液體 的單體、低聚物的規則性狀態之聚合引發劑,及作爲用以 使染料固定在有機材料之引發劑而追加性地使用。 〇 (離子吸附劑) 前述離子吸附劑沒有特別限制,能夠按照目的而適當 地選擇,例如有磷酸锆、五氧化銻水合物、三氧化銻、水 滑石(hydro tal cite)等等。在本發明,從絕緣信賴性的観點, 以使用磷酸鉻爲特佳。 能夠利用之市售的離子吸附劑可舉出例如IXE-1 〇〇、 IXE-700F(以上、東亞合成股份公司製)、DHA-4A-2(協和界 面科學工業公司製)。 ^ 該離子吸附劑可單獨使用1種,亦可混合使用2種以 上。 (塡料) 前述塡料沒有特別限制’能夠從眾所周知之物適當地 選擇。可舉出例如高嶺土、硫酸鋇' 鈦酸鋇、氧化砂粉、 微粉狀氧化矽、氣相法二氧化矽、非晶二氧化砍、結晶性 二氧化矽、熔融二氧化矽、球狀二氧化矽、滑石、黏土、 碳酸鎂、碳酸鈣、氧化鋁、氫氧化銘、雲母等。 -50- 200941138 該塡料可單獨使用1種,亦可混合使用2種以上。 前述塡料的平均粒徑以小於3微米爲佳,以〇.1微米 〜2微米爲更佳。前述平均粒徑係3微米以上時,會有因 光彌射致使解像度變差之情形。 前述塡料的添加量以5質量%〜7 5質量%爲佳,以8 質量%〜70質量%爲較佳,以1〇質量%〜65質量%爲更佳。 前述添加量小於5質量%時,會有無法使線膨脹係數充分 降低之情形,大於90質量%時,在感光層表面形成硬化膜 ^ 時’該硬化膜的膜質變脆,在使用永久圖案形成配線時, 會有損害作爲配線的保護膜的功能之情形。 前述塡料亦能夠進而按照必要添加有機微粒子。適當 - 的有機微粒子沒有特別限制,能夠按照目的適當地選擇, 可舉出例如三聚氰胺樹脂、苯并胍胺樹脂、交聯聚苯乙烯 樹脂等。能夠使用平均粒徑爲由0.1微米〜2微米、吸油量 100平方公尺/克〜200平方公尺/克之二氧化矽、交聯性樹 脂所構成之球狀多孔質微粒子等。 因爲前述塡料係含有平均粒徑爲0.1微米〜2微米的 粒子,隨著印刷配線基板的薄型化,即便將永久圖案薄層 化至厚度爲5微米至20微米,塡料亦不會將永久圖案的表 背兩面交聯,結果,在加速度試驗(HAST)不會產生離子移 行’能夠作爲耐熱性、耐濕性優良的永久圖案。 (熱交聯劑) 前述熱交聯劑沒有特別限制,能夠按照目的而適當地 選擇’爲了改使用前述感光性薄膜所形成的感光層之硬化 -51- 200941138 後膜強,在不會對顯像性等造成不良影響之範圍,例如能 夠使用在 1分子內具有至少2個環氧乙烷基之環氧化合 物,及在1分子內具有至少2個氧雜環丁烷基之氧雜環丁 烷化合物。 前述在1分子中具有至少2個環氧乙烷基之環氧化合 物沒有特別限制,能夠按照目的而適當地選擇,可舉出例 如聯二甲苯酚型或雙酚型環氧樹脂(「YX4000 ; JAPAN EPOXY RES INS公司製」等)或該等的混合物、具有異三聚 Ο 氰酸酯骨架等之雜環環氧樹脂(「TEPIC ;日產化學工業公 司製」、「ARALDITEPT810; CIBA SPECIALTY CHEMICALS 公司製」等)、雙酚A型環氧樹脂、酚醛清漆型環氧樹脂、 . 雙酚F型環氧樹脂、加氫雙酚A型環氧樹脂、雙酚S型環 氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧 樹脂、鹵素化苯酚酚醛清漆型環氧樹脂(例如,低溴化環氧 樹脂、高鹵化環氧樹脂、溴化苯酚酚醛清漆型環氧樹脂 等)、含烯丙基的雙酚A型環氧樹脂、三苯酚甲烷型環氧樹 0 ¥ 脂、二苯基二甲醇型環氧樹脂、苯酚伸聯苯基型環氧樹脂、 二環戊二烯型環氧樹脂(「HP-7200、HP-7200H ;大日本油 墨化學工業股份公司製」等)、環氧丙基胺型環氧樹脂(二 胺基二苯基甲烷型環氧樹脂、二環氧丙基苯胺、三環氧丙 基胺基苯酚等)、環氧丙酯型環氧樹脂(酞酸二環氧丙酯、 己二酸二環氧丙酯、六氫酞酸二環氧丙酯、二聚二環氧丙 酯等)海因型環氧樹脂、脂環族環氧樹脂(3,4-環氧環己基甲 基-3’,4’-環氧環己烷羧酸酯、己二酸雙(3,4-環氧環己基甲 -52- 200941138 基)酯、二環戊二烯二環氧化物、「GT-300、GT-400、 ZEHPE3150 ; DAICEL化學工業股份公司製」等)、醯亞胺 型脂環族環氧樹脂、三羥苯基甲烷型環氧樹脂、雙酚A酚 醛清漆型環氧樹脂、四苯酚基乙烷型環氧樹脂、酞酸環氧 丙酯樹脂、四環氧丙基二甲苯酚基乙烷樹脂、含萘基的環 氧樹脂(萘酚芳烷基型環氧樹脂、萘酚酚醛清漆型環氧樹 脂、4官能萘型環氧樹脂(市售品有「ESN-190、ESN-3 60 ; 新日鐵化學股份公司製」、「HP·4032,EXA-4750 ’ Ο EXA-4700 ;大曰本油墨化學工業股份公司製」等、藉由苯 酚化合物與二乙烯基苯或二環戊二烯等的二烯烴化合物之 加成反應所得到的多酚化合物、與表氯醇之反應物;將4-乙烯基環己烯-1-氧化物的開環聚合物使用過乙酸等環氧 化而成者;具有線狀含磷結構之環氧樹脂' 具有環狀含磷 結構之環氧樹脂、α_甲基底型液晶環氧樹脂、二苯甲酿氧 基苯型液晶環氧樹脂、偶氮苯基型液晶環氧樹脂、甲亞胺 苯基型液晶環氧樹脂、萘型液晶環氧樹脂、V哄型環氧樹 Ο 脂、環氧丙基甲基丙烯酸酯共聚合系環氧樹脂CP-50S ’ CP-50M;日本油脂股份公司製」等)、環己基順丁嫌二酿亞 胺與甲基丙烯酸環氧丙酯之共聚合環氧樹脂;將選自苯酚 及甲酚之1種與對羥基苯甲醯縮合物加以環氧丙基魅化•而 成之環氧樹脂;雙(環氧丙氧基苯基)金剛院型環氧樹脂 等。該等可單獨使用1種,亦可並用2種以上。 又,除了在1分子在1分子中具有至少2個環氧乙院 基之前述環氧化合物以外’亦可使用在1分子中至少含有 -53- 200941138 2個在β位置具有烷基的環氧基之環氧化合物,以含有p 位置係被烷基取代的環氧基(更具體地,係β-烷基取代環氧 丙基等)之化合物爲特佳。 前述至少含有在β位置具有烷基的環氧基之環氧化合 物,可以是在1分子中所含有2個以上的環氧基係全部爲 Ρ-烷基取代環氧丙基,亦可以是至少1個環氧基爲β-烷基 取代環氧丙基。 前述含有在β位置具有烷基的環氧基之環氧化合物, 〇 從在室溫之保存安定性的觀點,在前述感光性組成物中所 含有之前述環氧化合物總量中,總環氧基中的Ρ·烷基取代 環氧丙基之比率以30%以上爲佳,以40%以上爲較佳,以 . 5 0%以上爲更佳。 前述β-烷基取代環氧丙基沒有特別限制,能夠按照目 的而適當地選擇,可舉出例如β·甲基環氧丙基、β·乙基環 氧丙基、β_丙基環氧丙基、β-丁基環氧丙基等,該等之中, 從提升前述感光性組成物的保存安定性的觀點及合成的容 v 易性之觀點’以Ρ-甲基環氧丙基爲佳。 前述含有在β位置具有烷基的環氧基之環氧化合物係 例如以由多元酣化合物及卩-院基表鹵醇所衍生之環氧化合 物爲佳。 前述β-烷基表鹵醇沒有特別限制,能夠按照目的而適 當地選擇,可舉出例如β-甲基表氯醇、β-甲基表溴醇、β-甲基表氟醇等的β_甲基表鹵醇;乙基表氯醇、卜乙基表 溴醇、β-乙基表氟醇等的β-乙基表鹵醇;Ρ-丙基表氣醇' -54- .200941138 丙基表溴醇、β-丙基表氟醇等的β-丙基表鹵醇;β-丁基表 氯醇、β-丁基表溴醇、β-丁基表氟醇等的ρ-丁基表鹵醇等。 該等之中,從與前述多元酚之反應性及流動性之觀點,以 β-甲基表鹵醇爲佳。 前述多元酚化合物若是在1分子中含有2個以上的芳 香族羥基之化合物時,沒有特別限制,能夠按照目的而適 當地選擇,可舉出例如雙酚A、雙酚F、雙酚S等的雙酚 化合物、聯苯酚、四甲基聯苯酚等的聯苯酚化合物、二羥 ® 基萘、雙萘酚等的萘酚化合物、苯酚-甲醛縮聚物等的苯酚 酚醛清漆樹脂、甲酚-甲醛縮聚物等的碳數1〜10的單烷基 取代苯酚-甲醛縮聚物、二甲苯酚-甲醛縮聚物等的碳數1 • 〜10的二烷基取代苯酚-甲醛縮聚物、雙酚A-甲醛縮聚物 等的雙酚化合物-甲醛縮聚物、苯酚與碳數1〜10的單烷基 取代苯酚與甲醛的共縮聚物、苯酚化合物與二乙烯基苯的 聚合加成物等。該等之中,爲了提升流動性及保存安定性 之目的而選擇時,以前述雙酚化合物爲佳。 ® 前述含有在β位置具有烷基的環氧基之環氧化合物可 舉出例如雙酚Α的二- β-烷基環氧丙基醚、雙酚F的二·β_ 烷基環氧丙基醚、雙酚S的二- β-烷基環氧丙基醚等雙酚化 合物的二- β-烷基環氧丙基醚;聯苯酚的二- β-烷基環氧丙基 醚、四甲基聯苯酚的二- β-烷基環氧丙基醚等聯苯酚化合物 的二-β·烷基環氧丙基醚;二羥基萘的二-β_烷基環氧丙基 醚、聯萘酚的二- β-烷基環氧丙基醚等萘酚化合物的Ρ•院基 環氧丙基醚;苯酚甲醛縮聚物的聚_β·烷基環氧丙基酸;甲 -55- 200941138 酚甲醛縮聚物的聚-β-烷基環氧丙基醚等碳數1〜10的單烷 基取代苯酚甲醛縮聚物的聚-β-烷基環氧丙基醚;二甲苯酚 -甲醛縮聚物的聚-β-烷基環氧丙基醚等碳數1〜10的二烷 基取代苯酚-甲醛縮聚物的聚-Ρ-烷基環氧丙基醚;雙酚Α-甲醛縮聚物的聚-β-烷基環氧丙基醚等雙酚化合物-甲醛縮 聚物的聚-β·烷基環氧丙基醚;苯酚化合物與二乙烯基苯的 聚合加成物的聚-β-烷基環氧丙基醚等。 該等之中’以下述通式(D-1)所示之雙酚化合物、及由 ® 其與表氯醇等所得到的聚合物所衍生之β -烷基環氧丙醚、 及下述通式(D-2)所示苯酚化合物-甲醛縮聚物的聚-ρ_烷基 環氧基醚爲佳。Wiley InterSCience, 992), or a variety of methods described in specialized research papers (eg, SR Sanler &amp; W. Karo, Organic functional group preparations, Vol. 3, Academic Press). Come and get. The above-mentioned material hydrazine derivative may be, for example, a method of reacting an aldehyde or a ketone with a hydroxylamine or a salt thereof in a polar solvent such as ethanol or ethanol water. At this time, a base such as sodium acetate or pyridine is added to control the pH of the reaction mixture. The reaction rate is pH-dependent, and it is known that bases can be continuously added at the beginning of the reaction or during the reaction. It is also possible to use an inert solvent such as pyridine as a base and/or a solvent or a solubilizing agent. The above reaction temperature is usually preferably from the reflux temperature of the mixture, i.e., about 60 to 120 ° C. Other preferred synthesis methods of the above-mentioned material hydrazine derivative include a nitrosylation method using an "active" methylene group of nitrous acid or an alkyl nitrite. For example, in Organic Syntheses coll. Vol. VI (J. ® Wiley &amp; Sons, New York, 1 988), pp. 199 and 840, and for example in Organic Syntheses coll· Vol· ρρ · 32 and 3 73, coll. Vol. Ill, pp. 191 and 513, coll. Vol. II, pp. 202, 204 and 3 63 are both acidic conditions suitable for synthesis in the present invention as a starting point The material used for the material is a hydrazine derivative. The above nitrous acid is usually produced by sodium nitrite. The aforementioned alkyl nitrite may, for example, be methyl nitrite, ethyl nitrite, isopropyl nitrite, butyl nitrite or isoamyl nitrite. -48- 200941138 The base of the above oxime ester may also be present in two types of stereoscopic configurations (z) or (E). The isomers can be isolated according to a usual method, and the isomer mixture can also be used as a raw material for photoinitiation. Therefore, the anthracene derivative may be a mixture of isomers in a stereo configuration of the compounds of the above structural formulas (1) to (52). Since the above anthracene derivative is excellent in storage stability and high sensitivity, by adding In the polymerizable composition, the storage stability is excellent, and the storage stability is excellent without storage, and the polymerization is efficiently started by the energy ray, particularly the illuminating light ray, and the polymerizable compound is efficiently polymerized. It is possible to efficiently polymerize in a short time to obtain a highly sensitive polymerizable composition. Therefore, the anthracene derivative can be used as a radical generator and added to printing inks, transparent processing materials, powder coating materials, building markings or guide markings, photo copying methods, holographic recording materials, and portrait recordings. Manufacturing method, printing original plate capable of using organic solvent or water-based enamel development, solar hardening coating material for producing screen printing mask, dental enamel filling composition, adhesive, pressure-sensitive adhesive, laminated layer Resin, liquid enthalpy and film-like etching photoresist, solder resist, plating resist, permanent resist, printed circuit board, or light-constituting dielectric for electronic circuits are used. Moreover, it can be used for various materials for use, materials for forming structures in a plasma display panel or an electroluminescence display device, color light sheets, optical switches, optical lattices (interference lattices), optical circuits A material for manufacturing, a large amount of hardening (UV curing using a mold for transparent molding), a material for manufacturing a three-dimensional article according to a stereolithography method, a composite material such as styrene-based polyester, and a material for manufacturing other thick layer compositions , electronic components and laminated electric-49 - 200941138 Road anti-uranium agent for coating or sealing, fiber forming material, coating material for optical lens manufacturing, etc. Moreover, it can also be used in the manufacture of medical devices, auxiliary devices, and graft materials to produce gels having thermal properties. In particular, the photosensitive composition of the present invention can be suitably used. Further, the anthracene derivative can be used as an initiator for emulsion polymerization, particulate polymerization, or suspension polymerization. Further, a polymerization initiator which is a regular state of a monomer or an oligomer for fixing a liquid, and an initiator for fixing a dye to an organic material may be used in addition. 〇 (Ion Adsorbent) The ion adsorbent is not particularly limited and may be appropriately selected according to the purpose, and examples thereof include zirconium phosphate, ruthenium pentoxide hydrate, antimony trioxide, hydrotalcite, and the like. In the present invention, it is particularly preferable to use chromium phosphate from the viewpoint of insulation reliability. For example, IXE-1 〇〇, IXE-700F (above, manufactured by Toagosei Co., Ltd.), and DHA-4A-2 (manufactured by Kyowa Interface Science Co., Ltd.) can be used. ^ The ion adsorbent may be used singly or in combination of two or more. (Digest) The above-mentioned dip is not particularly limited, and can be appropriately selected from well-known materials. For example, kaolin, barium sulfate 'barium titanate, oxidized sand powder, fine powdered cerium oxide, gas phase cerium oxide, amorphous oxidized chopping, crystalline cerium oxide, molten cerium oxide, spherical two Antimony oxide, talc, clay, magnesium carbonate, calcium carbonate, alumina, hydrazine, mica, and the like. -50- 200941138 This material can be used singly or in combination of two or more. The average particle size of the aforementioned dip is preferably less than 3 μm, more preferably 〇1 μm to 2 μm. When the average particle diameter is 3 μm or more, the resolution may be deteriorated due to light irradiation. The amount of the above-mentioned kneaded material is preferably 5% by mass to 7.5 mass%, more preferably 8% by mass to 70% by mass, even more preferably 1% by mass to 65% by mass. When the amount of addition is less than 5% by mass, the linear expansion coefficient may not be sufficiently lowered. When the amount is more than 90% by mass, when the cured film is formed on the surface of the photosensitive layer, the film quality of the cured film becomes brittle and is formed by using a permanent pattern. When wiring, there is a case where the function as a protective film for wiring is impaired. The aforementioned dip can also add organic microparticles as necessary. The organic fine particles of the appropriate type are not particularly limited, and can be appropriately selected according to the purpose, and examples thereof include a melamine resin, a benzoguanamine resin, and a crosslinked polystyrene resin. A spherical porous fine particle composed of a ceria or a cross-linking resin having an average particle diameter of 0.1 μm to 2 μm, an oil absorption of 100 m 2 /g to 200 m 2 /g, or the like can be used. Since the above-mentioned tanning material contains particles having an average particle diameter of 0.1 μm to 2 μm, even if the permanent pattern is thinned to a thickness of 5 μm to 20 μm as the printed wiring substrate is thinned, the tanning material will not be permanently The surface of the back of the pattern is cross-linked on both sides, and as a result, no ion migration in the acceleration test (HAST) can be used as a permanent pattern excellent in heat resistance and moisture resistance. (Thermal cross-linking agent) The thermal cross-linking agent is not particularly limited, and can be appropriately selected according to the purpose of the film layer formed by the hardening of the photosensitive layer formed by the use of the photosensitive film-51-200941138. The range in which the image or the like adversely affects, for example, an epoxy compound having at least two ethylene oxide groups in one molecule and an oxetane having at least two oxetanyl groups in one molecule can be used. Alkane compound. The epoxy compound having at least two ethylene oxide groups in one molecule is not particularly limited, and can be appropriately selected according to the purpose, and examples thereof include a bixylenol type or a bisphenol type epoxy resin ("YX4000; Heterocyclic epoxy resin having a heterotrimeric phthalocyanate skeleton, etc. ("TEPIC; manufactured by Nissan Chemical Industries, Ltd.", "ARALDITEPT810; manufactured by CIBA SPECIALTY CHEMICALS Co., Ltd.) , etc.), bisphenol A type epoxy resin, novolak type epoxy resin, . Bisphenol F type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol S type epoxy resin, phenol novolac type Epoxy resin, cresol novolak type epoxy resin, halogenated phenol novolak type epoxy resin (for example, low brominated epoxy resin, high halogenated epoxy resin, brominated phenol novolak type epoxy resin, etc.), Allyl-containing bisphenol A type epoxy resin, trisphenol methane type epoxy tree 0 ¥ fat, diphenyl dimethanol type epoxy resin, phenol extended biphenyl type epoxy resin, dicyclopentadiene type Epoxy resin ("HP-7200, HP-72 00H; manufactured by Dainippon Ink Chemical Industry Co., Ltd., epoxy propylamine type epoxy resin (diaminodiphenylmethane type epoxy resin, diepoxypropyl aniline, triepoxypropylamino group) Phenol, etc., propylene glycol ester type epoxy resin (diglycidyl citrate, diglycidyl adipate, diglycidyl hexahydrophthalate, di- diglycidyl ester, etc.) Epoxy resin, cycloaliphatic epoxy resin (3,4-epoxycyclohexylmethyl-3', 4'-epoxycyclohexane carboxylate, adipic acid bis(3,4-epoxy) Cyclohexyl-52-200941138 base ester, dicyclopentadiene diepoxide, "GT-300, GT-400, ZEHPE3150; manufactured by DAICEL Chemical Industry Co., Ltd.", etc., quinone imine type alicyclic ring Oxygen resin, trishydroxyphenylmethane type epoxy resin, bisphenol A novolak type epoxy resin, tetraphenol ethane type epoxy resin, butyl phthalate resin, tetra-glycidyl dimethyl phenol group Ethane resin, naphthalene-containing epoxy resin (naphthol aralkyl type epoxy resin, naphthol novolac type epoxy resin, 4-functional naphthalene type epoxy resin (commercial product "ESN-190" ESN-3 60; manufactured by Nippon Steel Chemical Co., Ltd., "HP·4032, EXA-4750' Ο EXA-4700; manufactured by Otsuka Ink Chemical Industry Co., Ltd.", etc., by phenol compound and divinylbenzene or a polyphenol compound obtained by an addition reaction of a diolefin compound such as dicyclopentadiene or a reaction product with epichlorohydrin; a peracetic acid using a ring-opening polymer of 4-vinylcyclohexene-1-oxide Epoxidized one; epoxy resin having a linear phosphorus-containing structure' epoxy resin having a ring-shaped phosphorus structure, α-methyl bottom type liquid crystal epoxy resin, and diphenyl styrene oxybenzene type liquid crystal ring Oxygen resin, azophenyl liquid crystal epoxy resin, methylimine phenyl liquid crystal epoxy resin, naphthalene liquid crystal epoxy resin, V哄 type epoxy resin, epoxy methacrylate copolymerization Epoxy resin CP-50S 'CP-50M; made by Nippon Oil & Fat Co., Ltd.), copolymerized epoxy resin of cyclohexyl cis-butyl amide and glycidyl methacrylate; Epoxy resin made of one kind of cresol and p-hydroxybenzamide condensate Glycidyloxyphenyl) adamantane type epoxy resins and the like homes. These may be used alone or in combination of two or more. Further, in addition to the above epoxy compound having at least two epoxy groups in one molecule, it is also possible to use at least -53 to 200941138 in one molecule and two epoxy groups having an alkyl group at the β position. The epoxy compound of the group is particularly preferably a compound containing an epoxy group in which the p position is substituted with an alkyl group (more specifically, a β-alkyl-substituted epoxypropyl group or the like). The epoxy compound containing at least an epoxy group having an alkyl group at the β position may be one or more epoxy groups contained in one molecule, all of which may be a fluorenyl-alkyl-substituted epoxy propyl group, or may be at least One epoxy group is a β-alkyl substituted epoxypropyl group. The epoxy compound containing an epoxy group having an alkyl group at the β position, and the total epoxy resin in the total amount of the epoxy compound contained in the photosensitive composition, from the viewpoint of storage stability at room temperature The ratio of the fluorene-substituted alkyl group in the group is preferably 30% or more, more preferably 40% or more, and more preferably 5% or more. The β-alkyl substituted epoxypropyl group is not particularly limited, and can be appropriately selected according to the purpose, and examples thereof include β·methyl epoxypropyl group, β·ethyl epoxypropyl group, and β-propyl epoxy group. Among the above, from the viewpoint of enhancing the storage stability of the photosensitive composition and the ease of synthesis, among them, propyl-methyl epoxypropyl group It is better. The above epoxy compound containing an epoxy group having an alkyl group at the β position is preferably, for example, an epoxide derived from a polyvalent fluorene compound and a fluorene-terminated epihalohydrin. The β-alkyl epihalohydrin is not particularly limited and can be appropriately selected according to the purpose, and examples thereof include β-methylepichlorohydrin, β-methylepibromohydrin, and β-methylepifluorohydrin. _Methyl epihalohydrin; β-ethyl epihalohydrin such as ethyl epichlorohydrin, ethyl ethyl bromide, β-ethyl epifluorohydrin, etc.; Ρ-propyl epigas alcohol '-54- .200941138 propyl Β-propyl epihalohydrin such as epibromohydrin or β-propyl epifluorohydrin; ρ-butyl such as β-butylepichlorohydrin, β-butyleprobromohydrin or β-butylepifluorohydrin Epihalohydrin and the like. Among these, a β-methyl epihalohydrin is preferred from the viewpoint of reactivity with the polyhydric phenol and fluidity. When the polyhydric phenol compound is a compound containing two or more aromatic hydroxy groups in one molecule, it is not particularly limited, and can be appropriately selected according to the purpose, and examples thereof include bisphenol A, bisphenol F, and bisphenol S. Biphenol compound, biphenol compound such as biphenol or tetramethylbiphenol, naphthol compound such as dihydroxyphthalenyl or bisphthol, phenol novolak resin such as phenol-formaldehyde polycondensate, cresol-formaldehyde polycondensation a carbon number of 1 to 10, a monoalkyl-substituted phenol-formaldehyde polycondensate, a xylenol-formaldehyde polycondensate, etc., a carbon number of 1 to 10, a dialkyl-substituted phenol-formaldehyde polycondensate, and a bisphenol A-formaldehyde A bisphenol compound-formaldehyde polycondensate such as a polycondensate, a copolycondensate of phenol and a monoalkyl-substituted phenol having 1 to 10 carbon atoms, and a polymerized adduct of a phenol compound and divinylbenzene. Among these, in order to improve fluidity and preserve stability, the bisphenol compound is preferred. ® The above epoxy compound containing an epoxy group having an alkyl group at the β position may, for example, be a di-β-alkylepoxypropyl ether of bisphenolphthalein or a di-β-alkylepoxypropyl group of bisphenol F. Di-β-alkylepoxypropyl ether of bisphenol compound such as di-β-alkylepoxypropyl ether of bisphenol S; di-β-alkylepoxypropyl ether of biphenol, four Di-β-alkylepoxypropyl ether of a biphenol compound such as di-β-alkylepoxypropyl ether of methylbiphenol; di-β-alkylepoxypropyl ether of dihydroxynaphthalene, a naphthol compound such as a naphthol compound such as a di-β-alkylepoxypropyl ether; a poly-β-alkylepoxypropyl acid of a phenol formaldehyde polycondensate; A-55- 200941138 poly-β-alkylepoxypropyl ether of phenol formaldehyde polycondensate, poly-β-alkylepoxypropyl ether of monoalkyl-substituted phenol formaldehyde polycondensate of carbon number 1~10; xylenol-formaldehyde Poly-β-alkylepoxypropyl ether of a polycondensate, poly-fluorene-alkylepoxypropyl ether of a dialkyl-substituted phenol-formaldehyde polycondensate having a carbon number of 1 to 10; bisphenol oxime-formaldehyde polycondensate Bisphenol compound such as poly-β-alkylepoxypropyl ether Poly-β-alkylepoxypropyl ether of a polymer; poly-β-alkylepoxypropyl ether of a polymerized adduct of a phenol compound and divinylbenzene. Among these, a bisphenol compound represented by the following formula (D-1), and a β-alkyl epoxidized ether derived from a polymer obtained by using it with epichlorohydrin or the like, and the following The poly-ρ-alkyl epoxy ether of the phenol compound-formaldehyde polycondensate represented by the formula (D-2) is preferred.

0-CH2-CH-CH 0Η0-CH2-CH-CH 0Η

0 Ο-ΟΗ^-^Α R 通式(D-1) ❹0 Ο-ΟΗ^-^Α R General formula (D-1) ❹

的烷基之任一者。η係表示〇 通式(D-2) R係表示氫原子及碳數 〜20的整數。 1〜6 R係表示氫原子及碳數1〜6 其中,前述通式(D-2)中 的院基之任一者 R係表示氫原子及CH3之任一者,η係 表示0〜20的整數。 -56- 200941138 該等含有在β位置具有烷基的環氧基之環氧化合物可 單獨使用1種,亦可並用2種以上。又,亦可並用在1分 子中具有至少2個環氧乙烷環之環氧化合物、及含有在β 位置具有烷基的環氧基之環氧化合物。 前述環氧化合物的骨架以選自雙酚型環氧樹脂、酚醛 清漆型環氧樹脂、脂環族含有型環氧樹脂及難溶性環氧樹 脂之至少1種爲佳。 前述氧雜環丁烷化合物可舉出例如雙[(3-甲基-3-氧雑 ® 環丁烷基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁烷基甲 氧基)甲基]醚、1,4-雙[3-甲基-3-氧雜環丁烷基甲氧基)甲基] 苯、1,4-雙[3-乙基-3-氧雜環丁烷基甲氧基)甲基]苯、丙烯 酸(3-甲基-3·氧雜環丁烷基)甲酯、丙烯酸(3-乙基-3-氧雜環 丁烷基)甲酯、甲基丙烯酸(3-甲基-3-氧雜環丁烷基)甲酯、 甲基丙烯酸(3-乙基-3-氧雜環丁烷基)甲酯或該等的低聚物 或共聚物等的多官能氧雜環丁烷類,及其他具有氧雜環丁 烷基的化合物與酚醛清漆樹脂、聚(對羥基苯乙烯)、卡爾 〇 ¥ #(Cardo)型雙酚類、杯芳烴(calixarene)類、杯間苯二酚芳 烴(calix resorcinarene)類、倍半矽氧院.(silsesquioxane)等 具有羥基之樹脂等之醚化合物,此外亦可舉出具有氧雜環 丁烷環之不飽和單體與(甲基)丙烯酸烷酯之共聚物等。 又,爲了促進前述環氧化合物或前述氧雜環丁烷化合 物的熱硬化,可使用例如胺化合物(例如二氰基二胺、苄基 二甲胺、4-(二甲基胺基)-N,N-二甲基苄胺、4-甲氧基-N,M-二甲基苄胺、4-甲基-N,N-二甲基苄胺等)、4級銨氯化合物 57· 200941138 (例如,氯化二乙基苄銨等)、封端基異氰酸酯化合物(例如, 二甲胺等)、咪唑衍生物二環脒化合物或其鹽(例如,咪哇、 2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪 唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-(2·氰基乙 基&gt;-2-乙基-4-甲基咪唑等)、磷化合物(例如,三苯基隣等)、 胍胺化合物(例如,三聚氰胺、胍胺、乙醯胍胺、苯并胍胺 等)、S-三阱衍生物(例如,2,4-二胺基-6-甲基丙烯醯乙基-8-三阱、2-乙烯基-2,4-二胺基-8-三阱、2-乙烯基-4,6-二胺 ® 基-S-三畊·異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醢 乙基-S-三哄•異三聚氰酸加成物等)等。該等可單獨使用1 種,亦可並用2種以上。又,前述環氧樹脂化合物或前述 . 氧雜環丁烷化合物的硬化觸媒、或能夠促進該等與羧基的 反應之物時,沒有特別限制,亦可使用上述以外之能夠促 進熱硬化之化合物。 能夠促進前述環氧化合物、前述氧雜環丁烷化合物及 該等與羧酸的熱硬化之化合物,在前述感光性組成物固體 ® 成分中的固體成分含量通常以0.01質量%〜15質量%爲佳。 又,前述熱交聯劑能夠使用特開平5-9407號公報所記 載之聚異氰酸酯化合物,該聚異氰酸酯化合物可以由含有 至少2個異氰酸酯基之脂肪族、環式脂肪族或芳香族取代 脂肪族化合物衍生。具體上,可舉出2官能異氰酸酯(例如, 1,3-二異氰酸苯酯與1,4-二異氰酸伸苯酯之混合物、2,4-及2,6-二異氰酸甲苯酯、1,3-及1,4-二異氰酸苯二甲酯、雙 (4 _異氰酸酯-苯基)甲烷、雙(4-異氰酸酯環己基)甲烷、異 -58- 200941138 佛爾酮二異氰酸酯、六亞甲基二異氰酸酯.、三甲基六亞甲 基二異氰酸酯等)、該2官能異氰酸酯與三羥甲基丙烷、新 戊四醇、甘油等多官能醇;該多官能醇的環氧烷加成物、 與前述2官能異氰酸酯的加成物;六亞甲基二異氰酸酯、 六亞甲基-1,6 -二異氰酸酯及其衍生物等的環式三聚物等。 又,前述聚異氰酸酯化合物的市售品可舉出例如BL3 17 (住 友BAYER URETHANE股份公司製)等。 而且,爲了提升保存性等之目的,亦可使用使前述聚 © 異氰酸酯及其衍生物的異氰酸酯基與封端劑反應而得到的 化合物。 前述異氰酸酯基封端劑可舉出醇類(例如,異丙醇、第 . 三丁醇等)、內醯胺類(例如,ε-己內醯胺等)、苯酚類(例如, 苯酚、甲酚、對第三丁基苯酚、對第二丁基苯酹、對第二 戊基苯酚、對辛基苯酚、對壬基苯酚等)、雜環羥基化合物 (例如,3-羥基吡啶、8-羥基喹啉等)、活性亞甲基化合物(例 如,丙二酸二烷酯、甲基乙基酮肟、乙醯基丙酮、烷基乙 醯乙酸酯肟、乙醯肟、環己酮肟等)等。該等以外,可使用 特開平6-295060號公報所記載之在分子內具有至少1個能 夠聚合的雙鍵及至少1個封端型異氰酸酯基之任一者之化 合物等。 又,前述熱交聯劑能夠使用三聚氰胺衍生物》該三聚 氰胺衍生物可舉出例如羥甲基三聚氰胺、烷基化羥甲基三 聚氟胺(使用甲基、乙基、丁基等將羥甲基醚化而成之化合 物)等。該等可單獨使用1種,亦可並用2種以上。該等之 -59- 200941138 好Ϊ基 良身甲 性本經 定度化 安強基 存膜甲 保的六 就膜以 , 化 , 中硬佳 或爲 度胺 硬氰 面聚 表三 的基 層甲 光羥。 感化佳二特 提烷爲 地以胺 效’氟 前述熱交聯劑在前述感光性組成物固體成分中的固體 成分含量,以1質量%〜50質量%爲佳,以3質量%〜30 質量%爲更佳。前述固體成分含量小於1質量%時,無法觀 察到硬化膜的膜強度提升,大於50質量%時,會有產生顯 像性低落或曝光敏感度低落之情形。 ® (其他成分) 前述其他成分可舉出例如熱聚合抑制劑、可塑劑、著 色劑(著色顏料或染料)等,而且亦可並用對基材表面之黏 . 附促進劑及其他助劑類(例如,導電性粒子、消泡劑、難燃 劑、調平劑、剝離促進劑、抗氧化劑、香料、表面張力調 整劑、鏈轉移劑等)。藉由適當地含有該等,能夠調整目標 感光性薄膜的安定性、照相性、膜物等的性質。 &lt;熱聚合抑制劑&gt; 前述熱聚合抑制劑可舉出例如4-甲氧基苯酚、氫醌、 烷基或芳基取代氫醌、第三丁基兒茶酚、五倍子酚、2-羥 基二苯基酮、4-甲氧基-2-羥基二苯基酮、氯化亞銅、啡噻 畊、氯醌、萘胺、β-萘酚、2,6-二第三丁基-4-甲酚、2,2,-亞甲基雙(4-甲基-6-第三丁基苯酚)、吡啶、硝基苯、二硝 基苯、苦味酸、4-甲苯胺、亞甲基藍、銅與有機鉗合劑反 應物、柳酸甲酯及啡噻阱、亞硝基化合物、亞硝基化合物 與Α1的鉗合劑等。 -60- .200941138 相對於前述聚合性化合物,前述熱聚合抑制劑的含量 以0 · 0 0 1質量%〜5質量%爲佳,以0.0 0 5質量%〜2質量% 爲較佳,以〇·〇1質量%〜1質量%爲更佳。前述含量小於 0.001質量%時,會有保存時的安定性低落之情形,大於5 質量%時,會有對活性能量線的敏感度低落之情形。 &lt;敏化劑&gt; 前述感光性組成物亦可含有敏化劑。 從在將前述感光層曝光且顯像時,在該曝光及顯像 ® 後,不會使該感光層的曝光部分之厚度產生變化而提升前 記光線的最小能量(敏感度)之觀點,前述敏化劑以倂用爲 特佳。 . 前述敏化劑能夠配合前述光照射手段(例如,可見光線 或紫外光線及可見光雷射等)而適當地選擇。 前述敏化劑係藉由活性能量線呈激發狀態,藉由與其 他物質(例如,自由基產生劑、酸產生劑等)互相作用(例如, 能量移動、電子移動等),能夠產生自由基或酸等有用基。 V 前述敏化劑係含有選自縮環化合物、胺基苯基酮系化 合物、多核芳香族類、具有酸性核者、具有鹼性核者、具 有螢光增白劑核者之至少1種,且亦可按照必要含有其他 的敏化劑。從提升敏感度而言,敏化劑以雜縮環系化合物、 胺基二苯基酮系化合物爲更佳,以雜縮環系化合物爲特佳。 •-縮環系化合物-- 在前述例示化合物之中,芳香族環或雜環縮環而成的 化合物(縮環系化合物)以雜縮環系化合物爲佳。前述雜環 .200941138 縮環系化合物係意味著在環中具有雜元素之多環化合物’ 在前述環之中,以含有氮原子者爲佳。前述雜縮環系化合 物可舉出例如雜縮環系酮化合物。前述雜縮環系酮化合物 之中,以吖啶酮化合物及噻噸酮化合物爲更佳,該等之中, 以噻噸酮化合物爲特佳。 前述雜縮環系酮化合物具體上可舉出例如吖啶酮、氯 吖啶酮、N -甲基UT啶酮、N-丁基UT啶酮等的吖啶酮化合物; 噻噸酮、異丙基噻噸酮、2,4-二乙基噻噸酮、1-氯-4_丙氧 © 基噻噸酮、Quantacure QTX等的噻噸酮化合物;3-(2-苯并 呋喃甲醯基)-7-二乙基胺基香豆素、3·(2-苯并呋喃甲醯 基)-7-(1-吡咯啶基)香豆素、3 -苯甲醯基-7-二乙基胺基香豆 素、3-(2-甲氧基苯甲醯基)-7-二乙基胺基香豆素、3-(4-二 甲胺基苯甲醯基)-7-二乙胺基香豆素、3,3’-羰基雙(5,7-二-正丙氧基香豆素)、3,3’-羰基雙(7-二乙胺基香豆素)、3-苯 甲醯基-7-甲氧基香豆素、3-(2·呋喃甲醯基)-7-二乙胺基香 豆素、3-(4-二乙胺基肉桂醯基)-7·二乙胺基香豆素、7-甲 ® 氧基-3-(3-吡啶基羰基)香豆素、3-苯甲醯基-5,7-二丙氧基 香豆素、7-苯并三唑-2-基-香豆素、7-二乙胺基-4-甲基香 豆素,又,可舉出特開平5-19475號、特開平7-2)1028號、 特開 2002-363206 號、特開 2002-363207 號、特開 2002-363208號、特開2002-363209號公報等所記載之香豆 素化合物等的香豆素類等。 又,可舉出眾所周知的多核芳香族類(例如芘、茈 (perylene)、三鄰亞苯)、咕噸類(例如螢光素、曙紅、赤藻 -62- 200941138 辛(erythrosine)、若丹明B、玫瑰紅)、花青苷類(例如,吲 哚碳花青、噻碳花青、氧雜碳花青)、部花青素類(例如部 花青素、碳部花青素)、噻畊類(例如硫僅、亞甲基藍、甲 苯胺藍)、蒽醌類(例如,蒽醌)、角鯊鑰類(例如,角鯊鎗) 等。 相對於前述感光性組成物的總固體成分,前述敏化劑 的含量以0.01質量%〜4質量%爲佳,以0.02質量%〜2質 量%爲更佳,以0.05質量%〜1質量%爲特佳。 〇 ❹ 前述含量小於0.01質量%時,會有敏感度低落之情 形,大於4質量%時,會有圖案的形狀變差之情形。 在前述感光性組成物之前述敏化劑與光聚合引發劑的 含量之質量比,以[(敏化劑)/(肟衍生物)]=1/0.1〜1/100爲 佳,以1/1〜1/50爲更佳。 前述敏化劑的含量與前述光聚合引發劑的含量之質量 比在上述範圍外時,會有敏感度低落且敏感度的經時變化 變差之情形。 &lt;可塑劑&gt; 前述可塑劑可舉出例如酞酸二甲酯、酞酸二丁酯、酞 酸二異丁酯、酞酸二庚酯、駄酸二辛酯、酞酸二環己酯、 酞酸十三烷酯、酞酸丁基苄酯、酞酸二異癸酯、酞酸二苯 酯、酞酸二烯丙酯、酞酸辛基辛酯等的酞酸酯類;三甘醇 二乙酸酯、四甘醇二乙酸酯、酞酸二甲基乙二酯、乙基酞 醯基乙基乙醇酸酯、甲基酞醯基乙基乙醇酸酯、丁基酞醯 基丁基乙醇酸酯、三甘醇二辛酸酯等的二醇酯類;磷酸三 -63- 200941138 甲苯酯、磷酸三苯酯等的磷酸酯類;4 -甲苯磺醯胺、苯擴 醯胺、N-正丁基苯磺醯胺、N-正丁基乙醯胺等的醯胺類; 己二酸二異丁酯、己二酸二辛酯、癸二酸二甲酯、癸二酸 二丁酯 '癸二酸二辛酯、壬二酸二辛酯、順丁烯二酸二丁 酯等的脂肪族二元酸酯類:檸檬酸三乙酯、檸檬酸三丁醋、 甘油三乙醯酯、月桂酸丁酯、4,5-二環氧環己烷-1,2-二殘 酸二辛酯等、聚乙二醇、聚丙二醇等的二醇類。 相對於前述感光性組成物的總成分’前述可塑劑的含 〇 量以0 · 1質量%〜5 0質量%爲佳,以0.5質量%〜4 0質量 爲較佳,以1質量%〜30質量%爲更佳。 &lt;著色顏料&gt; 前述著色顏料沒有特別限制,能夠按照目的而適當地 選擇,可舉出例如維多利亞純藍-BO(C.1.42595)、阿拉明 (Auramine)(C.1.41000)、脂溶黑 HB(C.1.26 1 50)、莫諾賴特 黃(Monolite yellow)GT(C.I_ 顏料黃 12)、永久黃 GR(C.I.顔 料黃17)、C.I.顔料黃55、永久黃HR(C.I.顏料黃83)、永 ® 久胭脂紅FBB(C.I.顏料紅146)、霍斯特永久紅(Hoster Perm Red) ESB(C.I.顏料紫19)、永久紅寶石FBH(C.I.顏料紅 11)、堅牢粉紅B超級(C.I·顏料紅81)、莫納斯特(M’onastral) 堅牢藍(C.I.顏料藍15)、莫諾賴特堅牢黑B(C.I.顏料黑1)、 碳黑、C.I.顔料紅97、C.I.顔料紅122、C.I.顔料紅149、 C.I.顔料紅168、C.I.顏料紅177、C.I.顏料紅180、C.I.顏 料紅192、C.I.顏料紅215、C.I.顏料綠7、C.I·顏料綠36、 C.I.顏料藍15: 1、C.I.顔料藍15: 3、C.I.顏料藍15: 4、 -64 - 200941138 C.I.顏料藍15: 6、C.I.顏料藍22、C.I.顏料藍60、C.I.顏 料藍64等。該等可單獨使用1種,亦可並用2種以上。能 夠使用按照目的適當地選自眾所周知的染料中之染料。 前述著色顏料在前述感光性組成物中的固體成分含 量,能夠考慮形成永久圖案時的感光層之曝光強度、解像 性等而決定,因前述著色顏料的種類而異’通常以0.01質 量%〜1 0質量%爲佳,以〇. 〇 5質量%〜5質量%爲更佳。 &lt;黏附促進劑&gt; 〇 爲了提升各層間的黏附性或感光層與基體的黏附性, 能夠在各層使用眾所周知之所謂的黏附促進劑。 前述黏附促進劑可適合舉出特開平5-11439號公報、 特開平5-34 1 532號公報及特開平6-4363 8號公報所記載之 黏附促進劑。具體上,可舉出苯并咪唑、苯并噚嗖、苯并 噻哩、2-疏基苯并咪哩、2-疏基苯并曙哩、2-疏基苯并噻哩、 3-味啉甲基-5-苯基-噚二唑-2-硫酮、5-胺基-3-味啉甲基-噻 二唑-2-硫酮、2-锍基-5-甲硫基·噻二唑、三唑、四唑、苯 并三唑、羧基苯并三唑、含胺基的苯并三·哩、矽烷偶合劑 等。 相對於前述感光層的總成分’前述黏附促進劑的含量 以0.0 0 1質量%〜2 0質量%爲佳,以0.0 1質量%〜1 0質量% 爲更佳,以0 · 1質量%〜5質量%爲特佳。 (感光性薄膜) 本發明的感光性薄膜係在支撐體積層由感光性組成物 所構成之感光層而構成。以在前述感光層上積層保護層而 -65- 200941138 構成爲佳,而且可按照必要積層緩衝層、氧隔離層(PC層) 等其他的層》 前述感光性薄膜的形態沒有特別限制,能夠按照目的 而適當地選擇,可舉出例如在前述支撐體上,依照順序具 有前述感光層、前述保護層而構成之形態;在前述支撐體 上,依照順序具有前述PC層、前述感光層、前述保護層而 構成之形態;及在前述支撐體上,依照順序具有前述緩衝 層、前述PC層、前述感光層、前述保護層而構成之形態。 〇 又,前述感光層可以是單層,亦可以是複數層。 &lt;感光層&gt; 前述感光層在前述感光性薄膜所設置的位置,沒有特 別限制,能夠按照目的而適當地選擇,通常係積層於前述 支撐體上。 前述感光層在後述的曝光製程,藉由具有η個描繪部 之光調變手段來接受從光照射手段的光線並射出,在使來 自前述光照射手段的光線調變後,以使用通過配列有微透 鏡而成的微透鏡陣列之光線來曝光爲佳,該微透鏡具有非 球面其能夠修正在藉由光調變手段將光線調變後,因在前 述描繪部的射出面的變形所產生的偏差。 在將前述感光層曝光且顯像時,不會使該感光層的曝 光部分的厚度在該曝光及顯像後產生變化之前記曝光所使 用光線的最小能量,以100mJ/cm2以下爲佳,以70mJ/cxn2 以下爲更佳。在前述曝光所使用的光線的最小能量大於 lOOmJ/cm2時,因爲膠黏時間增長,乃是不佳。 -66- 200941138 在此,「不會使該感光層的曝光部分的厚度在該曝光及 顯像後產生變化之前記曝光所使用光線的最小能量」係指 所謂的顯像敏感度,例如能夠從顯示將前述感光層曝光時 在前述曝光所使用的能量(曝光量)與隨著前述曝光而藉由 顯像處理所生成的前述硬塗層的厚度之關係(敏感度曲線) 來求得。 前述硬化層的厚度係隨著前述曝光量而逐漸增加,隨 後,與前述曝光前的前述感光層的厚度大致相同且大致一 〇 定。前述顯像敏感度係藉由讀取前述硬化層的厚度成爲大 致一定時之最小曝光量所得到的値。 在此,前述硬化劑的厚度與前述曝光前的前述感光層 . 的厚度爲±1微米以內時,前述硬塗層的厚度可視爲未因曝 光及顯像而產生變化。 測定前述硬塗層及前述曝光前的前述感光層的厚度之 方法,沒有特別限制,能夠按照目的而適當地選擇,可舉 出使用膜厚度測定裝置、表面粗糙度測定機(例如, 0 ~ SURFCOM 1400D(東京精密公司製))等來測定之方法。 前述感光層的厚度沒有特別限制,能夠按照目的而適 當地選擇,例如以3微米〜100微米爲佳,以5微米〜70 微米爲更佳。 前述感光層的形成方法可舉出使本發明的前述感光性 組成物溶解、乳化或分散於水或溶劑來調製感光性組成物 溶液,並將該溶液直接塗布在前述支撐體上,且藉由使其 乾燥來積層之方法。 -67- 200941138 前述感光性組成物的溶劑沒有特別限制,能 的而適當地選擇,可舉出例如甲醇、乙醇、正丙 醇、正丁醇、第二丁醇、正己醇等的烷類;丙酮 基酮、甲基異丁基酮、環己酮、二異丁基酮等的 酸乙酯、乙酸丁酯、乙酸正戊酯、硫酸甲醋、丙 酞酸二甲酯、苯甲酸乙酯及乙酸甲氧基丙酯等的 苯、二甲苯、苯、乙苯等的芳香族烴類;四氯化 乙烯、氯仿、1,1,1-三氯乙烷、二氯甲烷、單氯苯 ® 烴類;四氫呋喃、二乙醚、乙二醇單甲基醚、乙 基醚、1-甲氧基-2-丙醇等的醚類;二甲醯胺、二 胺、二甲基亞碾、環丁碾等。該等可單獨使用1 . 並用2種以上。又,亦可添加眾所周知的界面活 前述塗布的方法沒有特別限制,能夠按照目 地選擇,可舉出例如使用旋轉塗布器、狹縫塗布 布器、模頭塗布器、簾流塗布器等直接塗布在前 之方法。 〇 前述乾燥條件依因各成分、溶劑的種類、使 而異,通常係在60°c〜110°c的溫度,30秒〜15女 在本發明,前述感光層係含有黏合劑、聚合值 肟衍生物及離子吸附劑而構成,而且亦可按照必 有其他成分的感光性組成物來形成。 &lt;支撐體&gt; 前述支撐體沒有特別限制,能夠按照目的而 擇,以能夠將前述感光層剝離,且光線的透射性 夠按照目 醇、異丙 、甲基乙 酮類;乙 酸乙酯、 酯類;甲 碳、三氯 等的鹵化 二醇單乙 甲基乙醯 種,亦可 性劑。 的而適當 器、輥塗 述支撐體 用比率等 h鐘左右。 三化合物、 要,由含 適當地選 良好者爲 -68- 200941138 佳,而且以表面的平滑性良好爲更佳。 前述支撐體以合成樹脂製且透明者爲佳,可舉出例如 聚對酞酸乙二酯、聚萘二甲酸乙二酯、聚丙烯、聚乙烯、 三乙酸纖維素、二乙酸纖維素、聚(甲基)丙烯酸烷酯、聚(甲 基)丙烯酸酯共聚物、聚氯乙烯、聚乙烯醇、聚碳酸酯、聚 苯乙烯、玻璃紙(Cellophane)、聚偏二氯乙烯共聚物、聚醯 胺、聚醯亞胺、氯乙烯-乙酸乙烯酯共聚物、聚四氫呋喃、 聚三氯乙烯、纖維素系薄膜、耐綸薄膜等各種的塑膠薄膜’ ® 該等之中,聚對酞酸乙二酯爲特佳。該等可單獨使用〗種’ 亦可並用2種以上。 前述支撐體的厚度沒有特別限制,能夠按照目的而適 - 當地選擇,例如以2微米〜150微米爲佳,以5微米〜1〇〇 微米爲更佳,以8微米〜50微米爲特佳。前述支撐體可以 是單層,亦可以具有多層構成。 前述支撐體的形狀沒有特別限制,能夠按照目的而適 當地選擇,以長條狀爲佳。前述長條狀支撐體的長度沒有 特別限制,可舉出例如10公尺〜20,000公尺的長度者。 &lt;保護層&gt; 前述感光性薄膜亦可形成在前述感光層上形成保護 層。 前述保護層係例如在前述支撐體所使用者,可舉出 紙、聚乙烯、聚丙烯所層壓而成的紙等,該等之中’以聚 乙烯薄膜、聚丙烯薄膜爲佳。 前述保護層的厚度沒有特別限制,能夠按照目的而適 -69- 200941138 當地選擇,例如以5微米〜1 00微米爲佳’以8微米〜50 微米爲更佳,以1〇微米〜30微米爲特佳。 前述支撐體與保護層之組合(支撐體/保護層)可舉出例 如聚對酞酸乙二酯/聚丙烯、聚對酞酸乙二酯/聚乙烯、聚 氯乙烯/玻璃紙、聚醯亞胺/聚丙烯、聚對酞酸乙二酯/聚對 酞酸乙二酯等。又,藉由處理支撐體及保護層之至少任一 者,能夠調整層黏合力。前述支撐體的表面處理亦可用以 提高與前述感光層的黏合力而施加,可舉出例如塗設底塗 ^ 層、電暈放電處理、火焰處理、紫外線照射處理、高頻照 射處理、輝光放電照射處理、活性電漿處理、雷射光線照 射處理等。 - 又,前述支撐體與前述保護層的靜摩擦係數以0.3〜 1.4爲佳,以0.5〜1.2爲更佳。 前述靜摩擦係數小於0.3時,因爲太滑,會有成爲卷 物狀時產生卷取偏移之情形,大於1.4時,會有難以卷取 _ 成爲良好的卷物之情形。 前述感光性薄膜係例如卷取於圓筒狀的卷芯並且長條 狀且卷物狀地被卷取而保管爲佳。前述長條狀的感光性薄 膜之長度沒有特別限制,例如能夠從10公尺〜20,000公尺 的範圍適當地選擇。又,亦可以使用者容易使用的方式進 行切條加工,來將100公尺〜1,000公尺的長條體卷取成爲 卷物狀。而且,此時,以該支撐體爲最外側的方式卷取爲 佳。又,亦可將前述卷物狀的感光性薄膜切條成爲薄片狀。 從保管時之保護端面、防止邊緣熔化之觀點,以在端面設 -70- .200941138 置分離物(特別是具防濕性者、裝入乾燥劑者)爲佳。又, 捆包亦以使用透濕性較低的材料爲佳。 爲了調整前述保護層與前述感光層之黏合性前述保護 層亦可表面處理。前述表面處理係例如能夠使由聚有機矽 氧烷、氟化聚烯烴、聚氟乙烯、聚乙烯醇等的所構成的底 塗層形成在前述保護層的表面。該底塗層的形成係藉由將 前述聚合物的塗布液塗布在前述保護層的表面後,使其在 30 °C〜150 °C乾燥1分鐘〜30分鐘來形成。前述乾燥時之 ® 溫度以50°C〜120°C爲特佳。 &lt;其他的層&gt; 在前述感光性薄膜之其他的層沒有特別限制,能夠按 . 照目的而適當地選擇,例如可以是具有緩衝層、氧隔離層 (PC層)、剝離層、黏合層、光吸收層、表面保護層等之層。 該等層可單獨具有1層,亦可具有2層以上。又,亦可在 上述感光層上具有保護層。 &lt;感光性薄膜的製造方法&gt; ❹ 前述感光性薄膜係例如能夠如以下進行來製造。 首先,將前述感光性組成物所含有的材料使其溶解、 乳化或分散於水或溶劑來調製感光性薄膜用的感光性組成 物溶液。 前述溶劑可舉出與前述感光性組成物溶液的溶劑同樣 者。 接著,將前述感光性組成物溶液塗布在前述支撐體 上,並使其乾燥形成感光層’能夠製造感光性薄膜。 -71- 200941138 前述感光性組成物溶液的塗布方法可舉出上述的方 法。 因爲前述感光性薄膜係使用前述感光性組成物,耐鍍 敷性、敏感度、顯像性及黏附性良好,能夠適合使用於保 護膜、層間絕緣膜及防焊阻劑圖案等的永久圖案等的各種 圖案形成用、彩色濾光片、柱材、肋材、間隙物、隔牆等 的液晶結構構件的製造用、全息照像、微型機器、樣張(proof) 等圖案的形成用等,特別是能夠適合使用於印刷基板的永 〇 久圖案形成用。 特別是因爲前述感光性薄膜之該薄膜的厚度均勻,在 形成永久圖案時,即便將永久圖案(保護膜、層間絕緣膜、 , 防焊阻劑等)薄層化,在高加速度試驗(HAST),亦不會產生 樹突狀晶體(dendrite),而能夠得到耐熱性、耐濕性優良之 高精細的永久圖案,所以能夠更精細地積層於基材。 (感光性積層體) 前述感光性積層體係在基體上至少具有前述感光層, w 且按照目的積層適當地選擇之其他的層而構成。 &lt;基體&gt; 前述基體係形成感光層之被處理基體,或是轉印本發 明的感光性薄膜的至少感光層之被轉印體,沒有特別限 制,能夠按照目的而適當地選擇,例如能夠任意地選擇具 有高表面平滑性者至凹凸的表面者。板狀的基體以使用所 謂基板爲佳。具體上,可舉出眾所周知的印刷配線板製造 用的基板(印刷基板)、玻璃板(鈉鈣玻璃等)、合成樹脂性的 -72- ‘200941138 薄膜、紙、金屬板等。 &lt;感光性積層體的製造方法&gt; 前述感光性積層體的製造方法,可舉出將前述感光性 組成物塗布在前述基體並乾燥之方法作爲第1態樣,將前 述感光性薄膜之至少感光層邊進行加熱及加壓之至少任一 者邊轉印而積層之方法作爲第2態樣。 前述第1態樣的感光性積層體之製造方法,係在前述 基體上將前述感光性組成物塗布及乾燥來形成感光層。 ® 前述塗布及乾燥方法沒有特別限制,能夠按照目的而 適當地選擇,可舉出例如將前述感光性組成物溶解、乳化 或分散於水或溶劑來調製感光性組成物溶液,並將該溶液 . 直接塗布在前述基體的表面,且藉由使其乾燥來積層之方 法。 前述塗布方法及乾燥條件沒有特別限制,能夠按照目 的而適當地選擇,能夠使用與前述感光性薄膜所使用者相 同方法及條來進行。 前述第2態樣的感光性積層體之製造方法,係在前述 基體的表面,將本發明的感光性薄膜藉由邊進行加熱或加 壓之至少任一者邊積層。又’前述感光性薄膜係具有前述 保護層時,以剝離該保護層’並將前述感光層重疊在前述 基體的方式進行爲佳。 前述加熱溫度沒有特別限制,能夠按照目的而適當地 選擇,例如以15〜180 °C爲佳,以60〜140。(:爲更佳。 前述加壓的壓力沒有特別限制,能夠按照目的而適當 -73- 200941138 地選擇,例如以0.1〜l.OMPa爲佳’以0.2〜0.8MPa爲更 佳。· 進行前述加熱之至少任一者之裝置沒有特別限制’能 夠按照目的而適當地選擇’例如可適合舉出層壓機(例如’ 大成 LAMINATOR 公司製 VP-II、NICHIGO-MORTON(股) 製 VP130)等。 因爲前述感光性薄膜及前述感光性積層體係使用前述 感光性組成物,敏感度、顯像性及黏附性良好’能夠效率 〇 良好地形成高精細的永久圖案’能夠適合使用於保護膜、 層間絕緣膜及防焊阻劑圖案等的永久圖案等的各種圖案形 成用、彩色濾光片、柱材、肋材、間隙物、隔牆等的液晶 . 結構構件的製造用、全息照像、微型機器、樣張(proof)等 圖案的形成用等,特別是能夠適合使用於印刷基板的永久 圖案形成用。 特別是因爲前述感光性薄膜之該薄膜的厚度均勻,在 形成永久圖案時,即便將永久圖案(保護膜、層間絕緣膜、 ¥ 防焊阻劑等)薄層化’在高度加速耐用期限試驗(HAST),亦 不會產生樹突狀晶體(dendrite),而能夠得到耐熱性、耐濕 性優良之高精細的永久圖案,所以能夠更精細地積層於基 材。 (永久圖案形成方法) 前述永久圖案形成方法係至少包含曝光製程,且包含 適當選擇顯像製程等的其他製程。 又,透過前述圖案形成方法之說明,能夠清楚明白圖 -74- 200941138 案形成裝置,係具備前述感光性積層體,且至少具有光照 射手段及光調變手段》 &lt;曝光製程&gt; 前述曝光製程係對前述感光層進行曝光之製程。關於 前述感光層及基體的材料係如上述。 前述曝光的對象,只要是前述感光層,沒有特別限制, 能夠按照目的而適當地選擇,例如如上述,以對在感光性 積層體之感光層進行爲佳,該感光性積層體係在基體上將 ® 感光性薄膜邊進行加熱或加壓之至少任一者邊積層而形 成。 前述曝光沒有特別限制,能夠按照目的而適當地選 . 擇,可舉出數位曝光、類比曝光等,該等之中,以數位曝 光爲佳。 前述類比曝光沒有特別限制,能夠按照目的而適當地 選擇,可舉出例如透過具有規定圖案之光罩,並使用(超) 高壓水銀燈、氙燈、鹵素燈等來進行曝光之方法。Any of the alkyl groups. The η system represents 〇 Formula (D-2) R represents a hydrogen atom and an integer of -20 carbon atoms. 1 to 6 R represents a hydrogen atom and a carbon number of 1 to 6 wherein R of the above-mentioned general formula (D-2) represents either a hydrogen atom or CH3, and η represents 0 to 20 The integer. -56-200941138 These epoxy compounds containing an epoxy group having an alkyl group at the β-position may be used singly or in combination of two or more. Further, an epoxy compound having at least two oxirane rings in one molecule and an epoxy compound containing an epoxy group having an alkyl group at the β position may be used in combination. The skeleton of the epoxy compound is preferably at least one selected from the group consisting of a bisphenol type epoxy resin, a novolak type epoxy resin, an alicyclic type epoxy resin, and a poorly soluble epoxy resin. The oxetane compound may, for example, be bis[(3-methyl-3-oxonium®cyclobutanemethoxy)methyl]ether or bis[(3-ethyl-3-oxocycle). Butyryl methoxy)methyl]ether, 1,4-bis[3-methyl-3-oxetanylmethoxy)methyl]benzene, 1,4-bis[3-ethyl 3-oxetanylmethoxy)methyl]benzene, (3-methyl-3.oxetanyl)methyl acrylate, acrylic acid (3-ethyl-3-oxetane) Alkyl)methyl ester, (3-methyl-3-oxetanyl)methyl methacrylate, (3-ethyl-3-oxetanyl)methyl methacrylate or such Polyfunctional oxetane such as oligomer or copolymer, and other compounds having an oxetane group, a novolac resin, a poly(p-hydroxystyrene), or a Caro type An ether compound such as a phenol having a hydroxyl group such as a bisphenol, a calixarene, a calix resorcinarene or a silsesquioxane, and an oxygen compound A copolymer of an unsaturated monomer of a cyclobutane ring and an alkyl (meth)acrylate, and the like. Further, in order to promote thermal hardening of the aforementioned epoxy compound or the aforementioned oxetane compound, for example, an amine compound (for example, dicyanodiamine, benzyldimethylamine, 4-(dimethylamino)-N may be used. , N-dimethylbenzylamine, 4-methoxy-N,M-dimethylbenzylamine, 4-methyl-N,N-dimethylbenzylamine, etc.), 4-grade ammonium chloride compound 57· 200941138 (for example, diethylbenzylammonium chloride or the like), a blocked isocyanate compound (for example, dimethylamine, etc.), an imidazole derivative bicyclic guanidine compound or a salt thereof (for example, imiline, 2-methylimidazole, 2 -ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-(2·cyanoethyl) &gt;-2-ethyl-4-methylimidazole, etc.), a phosphorus compound (for example, triphenyl phthalate), a guanamine compound (for example, melamine, guanamine, acetamide, benzoguanamine, etc.) , S-tripper derivative (for example, 2,4-diamino-6-methylpropenylethyl-8-tripper, 2-vinyl-2,4-diamino-8-tripper, 2-vinyl-4,6-diamine®-based-S-three-pile, iso-cyanuric acid adduct, 2,4-diamino-6- The above-mentioned epoxy resin compound or the above-mentioned oxa compound may be used alone or in combination of two or more. The curing catalyst of the cyclobutane compound or the compound capable of promoting the reaction with the carboxyl group is not particularly limited, and a compound capable of promoting thermal curing other than the above may be used. The epoxy compound and the oxygen heterocycle described above can be promoted. The content of the solid content of the butane compound and the thermosetting compound with the carboxylic acid in the photosensitive composition solid® component is usually 0.01% by mass to 15% by mass. Further, the above-mentioned thermal crosslinking agent can be used. The polyisocyanate compound described in JP-A-5-9407, which may be derived from an aliphatic, cyclic aliphatic or aromatic substituted aliphatic compound containing at least two isocyanate groups. Specifically, 2 Functional isocyanates (for example, a mixture of 1,3-diisocyanate and 1,4-diisocyanate), 2,4- and 2,6-diisocyanate, 1,3- And 1,4-diisocyanatobenzene Ester, bis(4-isocyanate-phenyl)methane, bis(4-isocyanatecyclohexyl)methane, iso-58- 200941138 phorone diisocyanate, hexamethylene diisocyanate, trimethylhexamethylene di Isocyanate or the like), a polyfunctional alcohol such as a bifunctional isocyanate and trimethylolpropane, neopentyl alcohol or glycerin; an alkylene oxide adduct of the polyfunctional alcohol; and an adduct of the bifunctional isocyanate; A cyclic trimer such as methyl diisocyanate or hexamethylene-1,6-diisocyanate or a derivative thereof, etc. Further, a commercial product of the polyisocyanate compound may, for example, be BL3 17 (Sumitomo BAYER URETHANE) Company system) and so on. Further, for the purpose of improving the preservability and the like, a compound obtained by reacting an isocyanate group of the above-mentioned polyisocyanate and a derivative thereof with a blocking agent can also be used. Examples of the isocyanate group blocking agent include alcohols (for example, isopropyl alcohol, ternary butanol, etc.), indoleamines (for example, ε-caprolactam, etc.), and phenols (for example, phenol, A). Phenol, p-tert-butylphenol, p-tert-butylphenylhydrazine, p-second amylphenol, p-octylphenol, p-nonylphenol, etc.), heterocyclic hydroxy compound (for example, 3-hydroxypyridine, 8- Hydroxyquinoline, etc., active methylene compound (for example, dialkyl malonate, methyl ethyl ketone oxime, acetyl ketone, alkyl acetoacetate oxime, acetamidine, cyclohexanone oxime) and many more. In addition to the above, a compound having at least one polymerizable double bond and at least one blocked isocyanate group in the molecule described in JP-A-6-295060 can be used. Further, the melamine derivative can be used as the thermal crosslinking agent. The melamine derivative may, for example, be methylol melamine or alkylated hydroxymethyl tripoly fluoroamine (methyl group, ethyl group, butyl group or the like). A compound obtained by etherification). These may be used alone or in combination of two or more. The -59-200941138 is a good foundation for the body of the body. The six layers of the film are fixed, medium-hard or good for the amine-hard cyanide surface. hydroxyl. The content of the solid content of the thermal crosslinking agent in the solid content of the photosensitive composition is preferably 1% by mass to 50% by mass, and preferably 3% by mass to 30% by mass. % is better. When the content of the solid content is less than 1% by mass, the film strength of the cured film is not observed to be improved, and when it is more than 50% by mass, the image forming property may be lowered or the exposure sensitivity may be lowered. ® (Other Ingredients) The above other components may, for example, be a thermal polymerization inhibitor, a plasticizer, a coloring agent (coloring pigment or dye), or the like, and may be used in combination with a surface of a substrate. For example, conductive particles, antifoaming agents, flame retardants, leveling agents, peeling accelerators, antioxidants, perfumes, surface tension modifiers, chain transfer agents, and the like. By appropriately including these, the properties of the target photosensitive film, such as stability, photographic properties, and film properties, can be adjusted. &lt;Thermal polymerization inhibitor&gt; The above-mentioned thermal polymerization inhibitor may, for example, be 4-methoxyphenol, hydroquinone, alkyl or aryl-substituted hydroquinone, tert-butylcatechol, gallic phenol, 2-hydroxyl group Diphenyl ketone, 4-methoxy-2-hydroxydiphenyl ketone, cuprous chloride, thiophene, chloranil, naphthylamine, β-naphthol, 2,6-di-t-butyl-4 -cresol, 2,2,-methylenebis(4-methyl-6-tert-butylphenol), pyridine, nitrobenzene, dinitrobenzene, picric acid, 4-toluidine, methylene blue, copper A compounding agent with an organic chelating agent, methyl urate and a thiophene trap, a nitroso compound, a nitroso compound, and a chelating agent for hydrazine 1. -60-.200941138 The content of the thermal polymerization inhibitor is preferably from 0. 01% by mass to 5% by mass, more preferably from 0.05% by mass to 2% by mass, based on the polymerizable compound. · 〇 1% by mass to 1% by mass is more preferable. When the content is less than 0.001% by mass, the stability at the time of storage may be lowered. When the content is more than 5% by mass, the sensitivity to the active energy ray may be lowered. &lt;Sensitizer&gt; The photosensitive composition may further contain a sensitizer. From the viewpoint of exposing and developing the photosensitive layer, after the exposure and development, the thickness of the exposed portion of the photosensitive layer is not changed to enhance the minimum energy (sensitivity) of the pre-recorded light, The agent is particularly preferred for use. The sensitizer can be appropriately selected in combination with the above-described light irradiation means (for example, visible light or ultraviolet light, visible light laser, etc.). The sensitizer is excited by an active energy ray and can generate free radicals by interacting with other substances (for example, a radical generator, an acid generator, etc.) (for example, energy movement, electron movement, etc.). Useful groups such as acid. V The sensitizer contains at least one selected from the group consisting of a condensed ring compound, an aminophenyl ketone compound, a polynuclear aromatic compound, an acid nucleus, a basic nucleus, and a fluorescent whitening agent nucleus. It may also contain other sensitizers as necessary. The sensitizer is preferably a heterocyclic ring compound or an aminodiphenyl ketone compound, and is particularly preferably a heterocyclic ring compound. • A condensed ring compound— Among the above-exemplified compounds, a compound obtained by condensing an aromatic ring or a heterocyclic ring (condensed ring compound) is preferably a heterocyclic ring compound. The above heterocyclic ring .200941138 condensed ring compound means a polycyclic compound having a hetero element in the ring. Among the above rings, a nitrogen atom is preferred. The above heterocyclic ring compound may, for example, be a heterocyclic ketone compound. Among the above-mentioned heterocyclic ketone compounds, an acridone compound and a thioxanthone compound are more preferable, and among these, a thioxanthone compound is particularly preferable. Specific examples of the heterocyclic ketone compound include an acridone compound such as acridone, chloroacridone, N-methyl UT ketone or N-butyl UT ketone; thioxanthone and isopropyl Thiophenone compounds such as thioxanthone, 2,4-diethylthioxanthone, 1-chloro-4-propoxy thioxanthone, Quantacure QTX, etc.; 3-(2-benzofurancarbenyl) )-7-diethylamino coumarin, 3 (2-benzofuranyl)-7-(1-pyrrolidinyl)coumarin, 3-benzylidene-7-diethyl Amino coumarin, 3-(2-methoxybenzimidyl)-7-diethylamino coumarin, 3-(4-dimethylamidobenzylidene)-7-di Ethyl coumarin, 3,3'-carbonyl bis(5,7-di-n-propoxycoumarin), 3,3'-carbonyl bis(7-diethylaminocoumarin), 3 -benzimidyl-7-methoxycoumarin, 3-(2·furanyl)-7-diethylaminocoumarin, 3-(4-diethylaminocinnamyl)- 7. Diethylamine coumarin, 7-methyl ethoxy-3-(3-pyridylcarbonyl) coumarin, 3-benzylidene-5,7-dipropoxycoumarin, 7 -benzotriazol-2-yl-coumarin, 7-diethylamino-4-methylcoumarin, again, The incense described in Japanese Unexamined Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. A coumarin or the like such as a soybean compound. Further, well-known polynuclear aromatics (for example, perylene, tri-ortylene), xanthene (for example, luciferin, eosin, red algae-62-200941138 erythrosine, if Danming B, rose red), anthocyanins (for example, phthalocyanine, thiocarbocyanine, oxacarbon cyanine), procyanidins (such as procyanidins, carbon anthocyanins) ), tidal farming (eg, sulfur only, methylene blue, toluidine blue), terpenoids (eg, sputum), snails (eg, shark guns), and the like. The content of the sensitizer is preferably 0.01% by mass to 4% by mass, more preferably 0.02% by mass to 2% by mass, and preferably 0.05% by mass to 1% by mass based on the total solid content of the photosensitive composition. Very good. 〇 ❹ When the content is less than 0.01% by mass, the sensitivity may be lowered. When the content is more than 4% by mass, the shape of the pattern may be deteriorated. The mass ratio of the sensitizer to the photopolymerization initiator in the photosensitive composition is preferably [(sensitizer) / (deuterium derivative)] = 1/0.1 to 1/100, and is 1/ 1 to 1/50 is better. When the mass ratio of the content of the sensitizer to the content of the photopolymerization initiator is outside the above range, there is a case where the sensitivity is lowered and the temporal change in sensitivity is deteriorated. &lt;Plasticizer&gt; The aforementioned plasticizer may, for example, be dimethyl phthalate, dibutyl phthalate, diisobutyl phthalate, diheptyl phthalate, dioctyl phthalate or dicyclohexyl phthalate. , tridecyl citrate, butyl benzyl citrate, diisononyl phthalate, diphenyl phthalate, diallyl citrate, octyl octyl phthalate, etc.; triethylene glycol Diacetate, tetraethylene glycol diacetate, dimethylethylene citrate, ethyl decyl ethyl glycolate, methyl decyl ethyl glycolate, butyl decyl butyl Glycol esters such as glycolic acid esters and triethylene glycol dicaprylate; phosphates such as tris-63-200941138 toluene ester and triphenyl phosphate; 4-toluenesulfonamide, benzene-expansion amine, Amidoxime such as N-n-butylbenzenesulfonamide or N-n-butylacetamide; diisobutyl adipate, dioctyl adipate, dimethyl sebacate, sebacic acid Aliphatic dibasic acid esters such as dioctyl phthalate dioctyl phthalate, dioctyl sebacate, dibutyl maleate, etc.: triethyl citrate, tributyl citrate, triglyceride Oxime ester, butyl laurate, 4,5-diepoxycyclohexane a glycol such as di-octyl diacrylate or polyethylene glycol or polypropylene glycol. The content of the plasticizer in the total composition of the photosensitive composition is preferably from 0.1% by mass to 50% by mass, preferably from 0.5% by mass to 40% by mass, and from 1% by mass to 30% by mass. The mass % is better. &lt;Coloring Pigment&gt; The coloring pigment is not particularly limited, and can be appropriately selected according to the purpose, and examples thereof include Victoria Pure Blue-BO (C.1.42595), Auramine (C.1.41000), and fat-soluble black. HB (C.1.26 1 50), Monolite yellow GT (C.I_ Pigment Yellow 12), Permanent Yellow GR (CI Pigment Yellow 17), CI Pigment Yellow 55, Permanent Yellow HR (CI Pigment Yellow) 83), Yong® Long Curd FBB (CI Pigment Red 146), Hoster Perm Red ESB (CI Pigment Violet 19), Permanent Ruby FBH (CI Pigment Red 11), Fast Pink B Super (CI · Pigment Red 81), Monaster (M'onastral) Fast Blue (CI Pigment Blue 15), Mono Wright Strong Black B (CI Pigment Black 1), Carbon Black, CI Pigment Red 97, CI Pigment Red 122 , CI Pigment Red 149, CI Pigment Red 168, CI Pigment Red 177, CI Pigment Red 180, CI Pigment Red 192, CI Pigment Red 215, CI Pigment Green 7, CI·Pigment Green 36, CI Pigment Blue 15: 1, CI Pigment Blue 15: 3, CI Pigment Blue 15: 4, -64 - 200941138 CI Pigment Blue 15: 6, CI Pigment Blue 22, CI Pigment Blue 60, CI Pigment Blue 64, and the like. These may be used alone or in combination of two or more. A dye which is appropriately selected from known dyes according to the purpose can be used. The content of the solid content of the coloring pigment in the photosensitive composition can be determined in consideration of the exposure strength, resolution, and the like of the photosensitive layer when a permanent pattern is formed, and is usually 0.01% by mass depending on the type of the coloring pigment. 10% by mass is preferred, and 〇.5% by mass to 5% by mass is more preferably. &lt;Adhesion Promoter&gt; 〇 In order to improve the adhesion between the layers or the adhesion between the photosensitive layer and the substrate, a so-called adhesion promoter which is well known can be used for each layer. The adhesion promoters described in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. Specific examples thereof include benzimidazole, benzopyrene, benzothiazepine, 2-sulfenylbenzimidazole, 2-sulfenylbenzopyrene, 2-sulfenylbenzothiazepine, and 2-flavor Phenylmethyl-5-phenyl-oxadiazol-2-thione, 5-amino-3-glyphosylmethyl-thiadiazole-2-thione, 2-mercapto-5-methylthio Thiadiazole, triazole, tetrazole, benzotriazole, carboxybenzotriazole, amine-containing benzotriazole, decane coupling agent, and the like. The content of the above-mentioned adhesion promoter relative to the total composition of the photosensitive layer is preferably 0.001% by mass to 20% by mass, more preferably 0.01% by mass to 10% by mass, and more preferably 0.1% by mass. 5% by mass is particularly good. (Photosensitive film) The photosensitive film of the present invention is composed of a photosensitive layer composed of a photosensitive composition in a support volume layer. It is preferable that a protective layer is laminated on the photosensitive layer, and -65-200941138 is preferable, and another layer such as a buffer layer or an oxygen barrier layer (PC layer) may be laminated as necessary. The form of the photosensitive film is not particularly limited, and For example, the support layer may have a configuration in which the photosensitive layer and the protective layer are provided in this order, and the support layer has the PC layer, the photosensitive layer, and the protective layer in this order. And a configuration in which the buffer layer, the PC layer, the photosensitive layer, and the protective layer are provided in this order. Further, the photosensitive layer may be a single layer or a plurality of layers. &lt;Photosensitive layer&gt; The photosensitive layer is not particularly limited in position at which the photosensitive film is provided, and can be appropriately selected according to the purpose, and is usually laminated on the support. In the exposure process described later, the light-receiving means having n drawing portions receives light emitted from the light-irradiating means and emits the light, and after the light from the light-irradiating means is modulated, the photosensitive layer is used. Preferably, the microlens of the microlens array is exposed to light, and the microlens has an aspherical surface which is capable of correcting deformation of the exit surface of the drawing portion after the light is modulated by the optical modulation means. deviation. When the photosensitive layer is exposed and developed, the minimum energy of the light used for exposure is not made before the exposure and development of the photosensitive layer is changed to 100 mJ/cm 2 or less. 70mJ/cxn2 or less is better. When the minimum energy of the light used for the foregoing exposure is more than 100 mJ/cm2, it is not preferable because the adhesive time is increased. -66- 200941138 Here, "the minimum energy of the light used for exposure before the thickness of the exposed portion of the photosensitive layer is changed after the exposure and development" means the so-called development sensitivity, for example, The relationship (sensitivity curve) of the energy (exposure amount) used for the above-described exposure at the time of exposing the photosensitive layer to the thickness of the hard coat layer formed by the development process with the above-described exposure is shown. The thickness of the hardened layer gradually increases with the exposure amount, and is then substantially the same as the thickness of the photosensitive layer before the exposure, and is substantially constant. The aforementioned development sensitivity is obtained by reading the thickness of the hardened layer to a minimum amount of exposure at a certain time. Here, when the thickness of the curing agent and the thickness of the photosensitive layer before the exposure are within ±1 μm, the thickness of the hard coat layer may be regarded as not being changed by exposure and development. The method of measuring the thickness of the hard coat layer and the photosensitive layer before the exposure is not particularly limited, and can be appropriately selected according to the purpose, and a film thickness measuring device and a surface roughness measuring machine (for example, 0 to SURFCOM) can be used. Measured by 1400D (manufactured by Tokyo Seimitsu Co., Ltd.). The thickness of the photosensitive layer is not particularly limited and can be appropriately selected depending on the purpose, and is preferably, for example, 3 μm to 100 μm, more preferably 5 μm to 70 μm. In the method for forming the photosensitive layer, the photosensitive composition of the present invention is dissolved, emulsified or dispersed in water or a solvent to prepare a photosensitive composition solution, and the solution is directly coated on the support, and by A method of drying it to laminate. -67-200941138 The solvent of the photosensitive composition is not particularly limited, and may be appropriately selected, and examples thereof include alkane such as methanol, ethanol, n-propanol, n-butanol, second butanol or n-hexanol; Ethyl acetate, methyl isobutyl ketone, cyclohexanone, diisobutyl ketone, etc., ethyl butyl acetate, n-amyl acetate, methyl acetonate, dimethyl propyl citrate, ethyl benzoate And aromatic hydrocarbons such as benzene, xylene, benzene, and ethylbenzene such as methoxypropyl acetate; ethylene tetrachloride, chloroform, 1,1,1-trichloroethane, dichloromethane, and monochlorobenzene. ® hydrocarbons; ethers such as tetrahydrofuran, diethyl ether, ethylene glycol monomethyl ether, ethyl ether, 1-methoxy-2-propanol; dimethyl hydrazine, diamine, dimethyl sub-grinding, Ring and other mills. These may be used alone or in combination of two or more. Further, a method of applying the well-known interface to the above-mentioned coating may be added, and the method of coating may be carried out according to the purpose, and may be directly applied to, for example, a spin coater, a slit coater, a die coater, a curtain coater, or the like. The former method. 〇 The drying conditions are different depending on the type of each component and the solvent, and are usually in the range of 60 ° C to 110 ° C, and 30 seconds to 15 in the present invention. The photosensitive layer contains a binder and a polymerization value. It is composed of a derivative and an ion adsorbent, and may be formed in accordance with a photosensitive composition having other components. &lt;Support&gt; The support is not particularly limited, and can be selected according to the purpose, so that the photosensitive layer can be peeled off, and the light transmittance can be sufficient according to the alcohol, isopropyl, methyl ethyl ketone; ethyl acetate; Esters; halogenated diols such as methyl carbahydrate, trichloroethylene, etc., may also be used as an agent. The appropriate applicator and the roller are used to coat the support with a ratio of about h clock. The three compounds, preferably, are preferably selected from -68 to 200941138, and are preferably better in surface smoothness. The support is preferably made of a synthetic resin and is transparent, and examples thereof include polyethylene terephthalate, polyethylene naphthalate, polypropylene, polyethylene, cellulose triacetate, cellulose diacetate, and poly. (meth)acrylic acid alkyl ester, poly(meth)acrylate copolymer, polyvinyl chloride, polyvinyl alcohol, polycarbonate, polystyrene, cellophane, polyvinylidene chloride copolymer, polyamine , plastic polyimide film, polyvinyl chloride-vinyl acetate copolymer, polytetrahydrofuran, polytrichloroethylene, cellulose film, nylon film, etc. 'In these, polyethylene terephthalate It is especially good. These may be used alone or in combination of two or more. The thickness of the aforementioned support is not particularly limited and can be appropriately selected depending on the purpose, for example, preferably 2 μm to 150 μm, more preferably 5 μm to 1 μm, and particularly preferably 8 μm to 50 μm. The support may be a single layer or may have a multilayer structure. The shape of the support body is not particularly limited, and can be appropriately selected according to the purpose, and is preferably a long strip shape. The length of the long strip-shaped support is not particularly limited, and may be, for example, a length of 10 to 20,000 meters. &lt;Protective layer&gt; The photosensitive film may be formed on the photosensitive layer to form a protective layer. The protective layer is, for example, a paper obtained by laminating paper, polyethylene or polypropylene, and the like, and a polyethylene film or a polypropylene film is preferable. The thickness of the protective layer is not particularly limited, and can be locally selected according to the purpose, for example, preferably from 5 μm to 100 μm, preferably from 8 μm to 50 μm, and from 1 μm to 30 μm. Very good. The combination of the support and the protective layer (support/protective layer) may, for example, be polyethylene terephthalate/polypropylene, polyethylene terephthalate/polyethylene, polyvinyl chloride/cellophane, polyphthalate. Amine/polypropylene, polyethylene terephthalate/polyethylene terephthalate, and the like. Further, by processing at least one of the support and the protective layer, the layer adhesion can be adjusted. The surface treatment of the support may be applied to increase the adhesion to the photosensitive layer, and examples thereof include a primer coating layer, a corona discharge treatment, a flame treatment, an ultraviolet irradiation treatment, a high-frequency irradiation treatment, and a glow discharge. Irradiation treatment, active plasma treatment, laser irradiation treatment, and the like. Further, the static friction coefficient of the support body and the protective layer is preferably 0.3 to 1.4, more preferably 0.5 to 1.2. When the static friction coefficient is less than 0.3, since it is too slippery, a winding offset may occur in the form of a roll, and when it is more than 1.4, it may be difficult to take up a good roll. The photosensitive film is preferably wound up in a cylindrical core and wound up in a roll shape and stored in a roll shape. The length of the long photosensitive film is not particularly limited, and can be appropriately selected, for example, from 10 meters to 20,000 meters. Further, it is also possible to carry out slitting processing in a manner that is easy for the user to use, and to wind up the elongated body of 100 to 1,000 meters into a roll shape. Further, at this time, it is preferable to wind up the support so as to be the outermost side. Further, the roll-shaped photosensitive film may be cut into a sheet shape. From the viewpoint of protecting the end face during storage and preventing the edge from melting, it is preferable to provide a separator (especially those having moisture resistance and desiccant) on the end surface of -70-.200941138. Moreover, it is preferred that the bale is made of a material having a low moisture permeability. In order to adjust the adhesion between the protective layer and the photosensitive layer, the protective layer may be surface-treated. The surface treatment can be formed, for example, on the surface of the protective layer by an undercoat layer composed of polyorganosiloxane, fluorinated polyolefin, polyvinyl fluoride or polyvinyl alcohol. The undercoat layer is formed by applying the coating liquid of the polymer onto the surface of the protective layer and drying it at 30 ° C to 150 ° C for 1 minute to 30 minutes. The above-mentioned drying temperature is particularly preferably 50 ° C to 120 ° C. &lt;Other Layers&gt; The other layer of the photosensitive film is not particularly limited, and may be appropriately selected according to the purpose, and may have, for example, a buffer layer, an oxygen barrier layer (PC layer), a release layer, and an adhesive layer. a layer of a light absorbing layer, a surface protective layer, or the like. The layers may have one layer alone or two or more layers. Further, a protective layer may be provided on the photosensitive layer. &lt;Method for Producing Photosensitive Film&gt; 前述 The photosensitive film can be produced, for example, as follows. First, a photosensitive composition solution for a photosensitive film is prepared by dissolving, emulsifying or dispersing a material contained in the photosensitive composition in water or a solvent. The solvent is the same as the solvent of the photosensitive composition solution. Next, the photosensitive composition solution is applied onto the support and dried to form a photosensitive layer. A photosensitive film can be produced. -71- 200941138 The method of applying the photosensitive composition solution is as described above. In the photosensitive film, the photosensitive composition is excellent in plating resistance, sensitivity, developability, and adhesion, and can be suitably used for a permanent pattern such as a protective film, an interlayer insulating film, and a solder resist pattern. For the formation of liquid crystal structural members such as various pattern forming, color filters, pillars, ribs, spacers, partition walls, etc., holograms, micro-machines, proofs, etc. It is suitable for permanent pattern formation for use in printed substrates. In particular, since the thickness of the film of the photosensitive film is uniform, even when a permanent pattern (protective film, interlayer insulating film, solder resist, etc.) is thinned, a high acceleration test (HAST) is performed. Further, dendrites are not produced, and a high-definition permanent pattern excellent in heat resistance and moisture resistance can be obtained, so that the substrate can be laminated more finely. (Photosensitive Laminate) The photosensitive layered system has at least the above-mentioned photosensitive layer on the substrate, and is formed by appropriately arranging other layers appropriately selected according to the purpose. &lt;Substrate&gt; The substrate to be processed to form the photosensitive layer or the transferable body to which at least the photosensitive layer of the photosensitive film of the present invention is transferred is not particularly limited, and can be appropriately selected according to the purpose, and can be optionally used, for example. The surface having a high surface smoothness to the uneven surface is selected. The plate-shaped substrate is preferably a substrate. Specifically, a substrate (printing substrate) for producing a printed wiring board, a glass plate (such as soda lime glass), a synthetic resin-72- ‘200941138 film, paper, a metal plate, or the like can be given. &lt;Manufacturing Method of Photosensitive Laminates&gt; The method for producing the photosensitive laminate is a method in which the photosensitive composition is applied onto the substrate and dried, and the photosensitive film is at least a first aspect, and at least the photosensitive film is used. A method of laminating at least one of heating and pressurization of the photosensitive layer is used as the second aspect. In the method for producing a photosensitive laminate according to the first aspect, the photosensitive composition is applied and dried on the substrate to form a photosensitive layer. The coating and drying method is not particularly limited, and can be appropriately selected according to the purpose, and for example, the photosensitive composition is prepared by dissolving, emulsifying or dispersing the photosensitive composition in water or a solvent, and preparing the solution. A method of directly coating the surface of the aforementioned substrate and laminating it by drying it. The coating method and the drying conditions are not particularly limited, and can be appropriately selected according to the purpose, and can be carried out by the same method and strip as the user of the photosensitive film. In the method for producing a photosensitive laminate according to the second aspect, the photosensitive film of the present invention is laminated on at least one of the surface of the substrate by heating or pressing. Further, when the photosensitive film has the protective layer, it is preferable to remove the protective layer and to superimpose the photosensitive layer on the substrate. The heating temperature is not particularly limited and can be appropriately selected according to the purpose, and is preferably, for example, 15 to 180 ° C and 60 to 140. (The pressure is not particularly limited, and may be appropriately selected according to the purpose - 73 - 200941138, for example, preferably 0.1 to 1.0 MPa, preferably 0.2 to 0.8 MPa.) The device of at least one of the devices is not particularly limited, and can be appropriately selected according to the purpose. For example, a laminating machine (for example, 'VP VP-II manufactured by Daisei LAMINATOR Co., Ltd., VP130 manufactured by NICHIGO-MORTON Co., Ltd.) can be suitably used. In the photosensitive film and the photosensitive layered system, the photosensitive composition is excellent in sensitivity, developability, and adhesion, and a high-precision permanent pattern can be formed with high efficiency. It can be suitably used for a protective film or an interlayer insulating film. Liquid crystals such as various patterns such as permanent patterns such as solder resist patterns, color filters, pillars, ribs, spacers, partition walls, etc. Manufacture of structural members, holograms, micromachines, For forming a pattern such as proof, etc., it is particularly suitable for use in forming a permanent pattern of a printed substrate. In particular, the film of the photosensitive film is Uniform thickness, even when forming a permanent pattern, even if the permanent pattern (protective film, interlayer insulating film, ¥ solder resist, etc.) is thinned, 'the dendritic crystal will not be produced in the height accelerated durability test (HAST) (dendrite), since a high-definition permanent pattern excellent in heat resistance and moisture resistance can be obtained, it can be laminated more finely on a substrate. (Permanent pattern forming method) The permanent pattern forming method includes at least an exposure process and includes Further, other processes such as a development process can be appropriately selected. Further, by the description of the pattern forming method, it is possible to clearly understand that the image forming apparatus of Fig. 74-200941138 includes the photosensitive laminated body and has at least light irradiation means and light modulation. [Exposure Process] The exposure process is a process for exposing the photosensitive layer. The material of the photosensitive layer and the substrate is as described above. The object to be exposed is not particularly limited as long as it is the photosensitive layer, and can be followed. The purpose is appropriately selected, for example, as described above, preferably for the photosensitive layer in the photosensitive laminate. The photosensitive layering system is formed by laminating at least one of the photosensitive film on the substrate while heating or pressurizing the film. The exposure is not particularly limited, and may be appropriately selected according to the purpose, and may be digitally exposed. The analog exposure is preferably a digital exposure. The analog exposure is not particularly limited, and can be appropriately selected according to the purpose, and for example, a photomask having a predetermined pattern can be used, and a (super) high pressure mercury lamp can be used. , Xenon lamps, halogen lamps, etc. to expose the method.

D 前述數位曝光若是未使用前述光罩而進行時沒有特別 限制,能夠按照目的而適當地選擇,例如以使至少具備光 照射手段及光調變手段的曝光單元、及前述感光層之至少 一者邊移動,邊將從前述光照射手段所射出的光線使用前 述光調變手段且按照圖案資訊調變,邊從前述曝光頭對前 述感光層照射來進行爲佳。 在前述數位曝光所使用的光源,若是發射紫外線至紅 外線之光源時,沒有特別限制,能夠按照目的而適當地選 -75- .200941138 擇,可舉出例如(超)高壓水銀燈、氙燈、碳弧燈及影印機 用等的螢光管、或雷射光等眾所周知的光源,該等之中, 以(超)高壓水銀燈、雷射光爲佳,以雷射光爲更佳。 (超)高壓水銀燈係在石英玻璃管等封入水銀而成之放 電燈,係將水銀的蒸氣壓設定在高値來提高發光效率者。 明線光譜之中,可採用ND濾光器等而只使用1種波長之 明線光譜,亦可使用具有複數的明線光譜之光線。 前述雷射光的「雷射」係 Light Amplification by © Stimulated Emission of Radiation(利用光的受激發射之光 的放大)的大寫字母。發出前述雷射光之裝置可適合舉出利 用在具有反轉分布之物質中所產生的誘導放出之現象,且 . 藉由光波的放大、振蕩來製造干擾性及指向性更強的單色 光之振蕩器及放大器》 前述雷射光的激發介質有結晶、玻璃、液體 '色料、 氣體等,能夠從該等介質使用固體雷射、液體雷射、氣體 雷射、半導體雷射等眾所周知的雷射》 ^ 具體上,氣體雷射可舉出Ar離子雷射(3 64奈米、351 奈米)、Kr離子雷射(356奈米、351奈米)、He-Cd雷射(325 奈米),固體雷射可舉出YAG雷射、YV〇4雷射(1,〇64奈米)、 丫八0雷射或¥乂04雷射的2倍波(532奈米)、3倍波(3 55奈 米)、4倍波(266奈米)、導波型波長變換元件與AlGaAs、 InGaAs半導體之組合(380奈米〜400奈米)、導波型波長變 換元件與AlGalnP或AlGaAs半導體t之組合(300奈米〜 350奈米)、AlGaInN(350奈米〜470奈米)等。該等之中’ -76- .200941138 從成本方面而言,較佳的雷射光可舉出AlGalnN半導體雷 射(市售InGaN系半導體雷射3 75奈米或405奈米),從生 產性方面而言,可舉出高輸出功率的355奈米雷射。 前述雷射光的波長係例如以200奈米〜1,500奈米爲 佳,以300奈米〜800奈米爲較佳,以330奈米〜500奈米 爲更佳,以350奈米〜420奈米爲特佳。 -光調變手段- 前述光調變手段之代表性的方法可舉出具有η個描繪 ® 部,並按照前述圖案資訊來控制前述描繪部之方法。具體 上,可舉出數位微鏡元件(DMD; digital micromirror.device) 或 MEMS(微電子機械系統;Micro Electro Mechanical Systems)型式的空間光調變元件(SLM ; Spacial Light Modulator)、藉由電光學效果來調變透射光之光學元件 (PLZT元件)、液晶光開閉器(FLC)等。該等之中,可適合 舉出DMD。 使用前述DMD時,來自光源的光線由適當的光學系統 ® 而照射在前述DMD上,來自在前述DMD二維排列的各鏡 之反射光係經過各自的光學系統等而在感光層上,形成二 維排列的光點之像。此狀態時雖然光點與光點之間未被曝 光,但是相對於二維排列方向,藉由使前述二維排列的光 點之像往稍微傾斜的方向移動時,能夠將感光層的全面曝 光。前述DMD藉由控制各鏡的角度且ON-OFF控制前述光 點,能夠形成畫像圖案。藉由排列具有此種DMD之曝光頭 而使用,能夠對應各式各樣的基板。 -77- 200941138 前述DMD時,雖然前述光點的亮度只有〇N或OFF的 2灰階,但是使用鏡灰階型空間調變元件時,能夠進行256 灰階的曝光。 又,前述光調變手段以具有基於所形成的圖案資訊來 生成控制信號之圖案信號生成手段爲佳。此時,前述光調 變手段係按照前述圖案信號生成手段生成的控制信號來使 光線調變。 前述控制信號沒有特別限制,能夠按照目的而適當地 © 選擇,例如可舉出數位信號。 另一方面,前述光調變手段的另外代表方法可舉出使 用多角鏡(polygon mirror)之方法。在此,多角鏡(polygon . mirror)係在周圍具有一系列的平面反射面之旋轉構件。雖 然前述多角鏡係將來自光源的光線反射而照射至感光層 上,但是反射光的光點係藉由該平面鏡的旋轉來掃描。相 對於該掃描方向,藉由使基板直角地移動,能夠將基板上 的感光層之全面曝光。而且,藉由適當的方法將來自光源 〇 的光線之強度on-off,或中間調地控制,能夠形成畫像圖 案。此時’藉由使來自光源的光線爲複數條,能夠縮短掃 描時間。 前述光調變手段除此以外,亦可舉出特開平5-150175 號公報所記載的多角鏡來進行描繪之例子,特表 2004-523101號公報(國際公開第2002/039793小冊子)所記 載之視覺性地取得下部層的畫像之一部分,並藉由使用多 角鏡的裝置將上述層的位置與下部的層位置一致而曝光之 -78· 200941138 例子;特開2004-56080號公報所記載之具有DMD的曝光 之例子;特表2002-523905公報所記載之具備多角鏡之曝 光裝置;特開2001 -255661公報所記載之具備多角鏡之曝 光裝置;特開2003-50469公報所記載之組合DMD、LD、 多重曝光之例子;特開2003- 1 56853公報所記載之依照基 板的部位而改變曝光量之曝光方法之例子;特開 200 5-4 3 5 76公報所記載之進行調整位置偏移之曝光方法之 例子等。 ® -光照射手段- 前述光照射手段亦即光的照射方法沒有特別限制,能 夠按照目的而適當地選擇前述曝光光源,以合成2個以上 . 來自該等光源的光線而照射爲佳,特別適合舉出照射合成 2個以上光線而成的雷射光(合波雷射光)。 前述合波雷射光的照射方法沒有特別限制,能夠按照 目的而適當地選擇,可適合舉出藉由複數雷射光源及多模 式光纖,將從該複數雷射光源所照射的雷射光聚光並使其 〇 ¥ 結合於前述多模式光纖之集合光學系統來構成合波雷射光 而照射之方法。 前述雷射光射束的直徑沒有特別限制,能夠按照目的 而適當地選擇,從濃色隔離牆的解像度之観點’高斯射束 的ι/e2値以5微米〜30微米爲佳’以7微米〜20微米爲更 佳。 以按照畫像數據空間光調變前述雷射光爲佳。因此, 爲了該目的,以使用空間光調變元件之前述DMD爲佳。 -79· 200941138 具有前述光調變手段及前述光照射手段之曝光裝置能 夠使用例如特開平 2005-222039 號公報、特開平 2005-258431號公報、特開2006-300966號公報等所記載之 裝置,但是前述曝光裝置未限定於此。 &lt;顯像製程&gt; 前述顯像係藉由除去前述感光層的未曝光部分來進 行。 除去前述未硬化區域之方法沒有特別限制,能夠按照 0 目的而適當地選擇,可舉出例如使用顯像液去除之方法等。 前述顯像液沒有特別限制,能夠按照目的而適當地選 擇,可舉出例如鹼性水溶液、水系顯像液、有機溶劑等, . 該等之中,以弱鹼性的水溶液爲佳。該弱鹼性水溶液的鹼 成分可舉出例如氫氧化鋰、氫氧化鈉、氫氧化鉀、碳酸鋰、 碳酸鈉、碳酸鉀、碳酸氫鋰、碳酸氫鈉、碳酸氫鉀、磷酸 鈉、磷酸鉀、脯胺酸鈉、脯胺酸鉀、硼砂等。 前述弱鹼性的水溶液之pH係例如以約8〜12爲佳,以 # 約9〜11爲更佳。前述弱鹼性的水溶液可舉出例如0.1質 量%〜5質量%的碳酸鈉水溶液或碳酸鉀水溶液等。 前述顯像液的溫度能夠配合前述感光層的顯像性而適 當地選擇,例如以約25 °C〜40 °C爲佳。 前述顯像液亦可並用界面活性劑、消泡劑' 有機鹼(例 如,伸乙二胺、乙醇胺、氫氧化四甲銨、二伸乙三胺、三 伸乙五胺、味啉、三乙醇胺等)、或用以促進顯像之有機溶 劑(例如醇類、酮類、酯類、醚類、醯胺類、內酯類)等。 -80- 200941138 又,前述顯像液亦可以是混合水或鹸水溶液與有機溶劑而 成的水系顯像液,亦可以是有機溶劑單獨。 前述圖案的形成係例如亦可含有硬化處理製程、蝕刻 製程、鑛敷製程等。該該可單獨使用1種,亦可並用2種 以上。 &lt;硬化處理製程&gt; 前述圖案的形成方法係進行形成保護膜、層間絕緣 膜、防焊阻劑圖案等的永久圖案、或彩色感光性組成物之 © 永久圖案的形成之永久圖案形成方法時,以具備在前述顯 像製程後,對感光層進行硬脂酸之硬脂酸製程爲佳。 前述硬脂酸製程沒有特別限制,能夠按照目的而適當 , 地選擇,可適合舉出例如全面曝光處理、全面加熱處理等。 前述全面曝光處理的方法可舉出例如在前述顯像後, 將形成有前述永久圖案而成之前述積層體上的全面曝光之 方法。藉由該全面曝光,能夠促進形成前述感光層之感光 性組成物中的樹脂之硬化,能夠將前述永久圖案的表面硬 ν 化。 進行前述全面曝光之裝置沒有特別限制,能夠按照目 的而適當地選擇,可適合舉出例如超高壓水銀燈等的UV 曝光機、使用氙燈的曝光機、雷射曝光機等。曝光量通常 爲 10mJ/cm2 〜2,000mJ/cm2。 前述全面加熱處理方法可舉出在前述顯像後,加熱形 成有前述永久圖案之前述積層體上的全面之方法。藉由該 全面加熱,能夠提高前述永久圖案的表面之膜厚度。 -81 - .200941138 前述全面加熱之加熱溫度以120°C〜250°C爲佳,以 120°C〜200°C爲更佳。該加熱溫度小於120°C時,會有無 法藉由加熱處理來提升膜強度之情形,大於25 0 °C時,前 述感光性組成物中的樹脂產生分解,會有膜質稍微變脆之 情形。 在前述全面加熱之加熱時間以10分鐘〜120分鐘爲 佳,以1 5分鐘〜60分鐘爲更佳。 進行前述全面加熱之裝置沒有特別限制,能夠從眾所 © 周知的裝置中,能夠按照目的而適當地選擇,可舉出例如 乾式烘箱、熱板、IR加熱器等。 在使用40 5奈米的雷射曝光之直接描繪,前述圖案的 . 形成方法能夠使用於必須防止因氧引起感光層的敏感度降 低之各種圖案的形成等,且可適合使用於兼具高密度化及 高生產性之圖案的形成。 在前述永久圖案形成方法,依照前述永久圖案形成方 法所形成之永久圖案係前述保護膜或述層間絕緣膜時,能 ^ 夠保護配線避免受到來自外部的衝擊或彎曲,特別是前述 層間絕緣膜時,例如在多層配線基板或組裝配線基板等高 密度封裝半導體或組件係有用的。 因爲前述永久圖案形成方法係使用前述感光性組成 物,可適合使用於保護膜、層間絕緣膜及防焊阻劑圖案等 永久圖案等各種圖案形成用、彩色濾光片、柱材、肋材、 間隙物、隔牆等的液晶結構構件的製造、全息照像、微型 機器、樣張等的製造,特別是能夠適合使用於印刷基板的 -82- 200941138 永久圖案形成用。 實施例 以下藉由實施例更具體地說明本發明’但是本發明只 要未離脫其主旨,未限定於以下的實施例。又’只要未特 別地預先告知,「份」係質量基準° [實施例1] (感光性薄膜的製造)D The digital exposure is not particularly limited as long as it is not used, and can be appropriately selected according to the purpose, for example, at least one of an exposure unit including at least a light irradiation means and a light modulation means, and the photosensitive layer. While moving, the light emitted from the light irradiation means is preferably irradiated with the photosensitive layer from the exposure head by using the light modulation means and changing the pattern information. The light source used for the above-mentioned digital exposure is not particularly limited as long as it emits a light source that emits ultraviolet light to infrared light, and can be appropriately selected according to the purpose - for example, (super) high pressure mercury lamp, xenon lamp, carbon arc. A fluorescent tube such as a lamp or a photocopier or a well-known light source such as laser light is preferable, and among these, (ultra) high pressure mercury lamp and laser light are preferable, and laser light is more preferable. (Super) high-pressure mercury lamp is a discharge lamp in which mercury is sealed in a quartz glass tube or the like, and the vapor pressure of mercury is set to sorghum to improve luminous efficiency. In the bright line spectrum, an ND filter or the like can be used, and only an open line spectrum of one wavelength can be used, and a light having a complex open line spectrum can also be used. The "laser" of the aforementioned laser light is a capital letter of Light Amplification by © Stimulated Emission of Radiation. The device for emitting the aforementioned laser light can be suitably used for the phenomenon of induced emission caused by a substance having a reversed distribution, and the monochromatic light having stronger interference and directivity is produced by amplification and oscillation of light waves. Oscillator and Amplifier The excitation medium of the above-mentioned laser light includes crystal, glass, liquid 'color material, gas, etc., from which well-known lasers such as solid laser, liquid laser, gas laser, semiconductor laser, etc. can be used. 》 ^ Specifically, gas lasers can be Ar ion laser (3 64 nm, 351 nm), Kr ion laser (356 nm, 351 nm), He-Cd laser (325 nm) The solid-state laser can be represented by a YAG laser, a YV〇4 laser (1, 〇64 nm), a 丫80 laser or a 乂04 laser with a 2x wave (532 nm) and a 3x wave ( 3 55 nm), 4 times wave (266 nm), combination of guided wave type wavelength conversion element and AlGaAs, InGaAs semiconductor (380 nm to 400 nm), guided wave type wavelength conversion element and AlGalnP or AlGaAs semiconductor t The combination (300 nm ~ 350 nm), AlGaInN (350 nm ~ 470 nm) and so on. Among these, '-76-.200941138 In terms of cost, the preferred laser light can be AlGalnN semiconductor laser (commercially available InGaN-based semiconductor laser 3 75 nm or 405 nm), in terms of productivity. For example, a 355 nm laser with high output can be cited. The wavelength of the aforementioned laser light is preferably, for example, 200 nm to 1,500 nm, preferably 300 nm to 800 nm, and more preferably 330 nm to 500 nm, and 350 nm to 420 nm. Nano is especially good. - Light Modulation means - A representative method of the above-described light modulation means is a method of having n drawing parts and controlling the drawing part in accordance with the pattern information. Specifically, a digital micromirror device (DMD) or a MEMS (Micro Electro Mechanical Systems) type spatial light modulation device (SLM; Spacial Light Modulator) may be cited, and electro-optical The effect is to modulate the transmitted optical element (PLZT element), liquid crystal light shutter (FLC), and the like. Among these, a DMD can be cited. When the DMD is used, the light from the light source is irradiated onto the DMD by a suitable optical system®, and the reflected light from each of the two-dimensional arrays of the DMD is passed through a respective optical system or the like on the photosensitive layer to form two An image of a light spot arranged in a dimension. In this state, although the light spot and the light spot are not exposed, the full exposure of the photosensitive layer can be performed by moving the image of the two-dimensionally arranged light spot in a slightly inclined direction with respect to the two-dimensional array direction. . The DMD can form an image pattern by controlling the angle of each mirror and ON-OFF controlling the light spot. By arranging an exposure head having such a DMD, it is possible to correspond to a wide variety of substrates. -77- 200941138 In the DMD described above, although the brightness of the above-mentioned light spot is only 2 gray scales of 〇N or OFF, when the mirror gray scale type spatial modulation element is used, 256 gray scale exposure can be performed. Further, it is preferable that the optical modulation means has a pattern signal generating means for generating a control signal based on the formed pattern information. In this case, the optical modulation means modulates the light according to a control signal generated by the pattern signal generating means. The control signal is not particularly limited, and can be appropriately selected according to the purpose, and for example, a digital signal can be cited. On the other hand, another representative method of the optical modulation means may be a method using a polygon mirror. Here, a polygon mirror is a rotating member having a series of planar reflecting surfaces around it. Although the polygon mirror reflects light from the light source and illuminates the photosensitive layer, the spot of the reflected light is scanned by the rotation of the plane mirror. With respect to the scanning direction, the photosensitive layer on the substrate can be fully exposed by moving the substrate at right angles. Moreover, the image pattern can be formed by controlling the intensity of the light from the light source on on-off or by intermediate adjustment by an appropriate method. At this time, the scanning time can be shortened by making the light rays from the light source into a plurality of stripes. In addition to the above-described optical modulation means, an example of the polygon mirror described in Japanese Laid-Open Patent Publication No. Hei 5-150175 is also known, and it is described in Japanese Laid-Open Patent Publication No. 2004-523101 (International Publication No. 2002/039793 pamphlet). A part of the image of the lower layer is visually obtained, and the position of the layer is aligned with the position of the lower layer by means of a device using a polygon mirror, which is disclosed in Japanese Patent Application Publication No. 2004-56080. An example of the exposure of the DMD; the exposure apparatus provided with the polygon mirror of the Unexamined-Japanese-Patent No. 2002-523905; the exposure apparatus provided with the polygon mirror of the Unexamined-Japanese-Patent No. 2001-255661. An example of an exposure method in which an exposure amount is changed in accordance with a portion of a substrate described in Japanese Laid-Open Patent Publication No. 2003- 1 56853, and an adjustment position shift described in JP-A-200-5-4 3 5 76 Examples of exposure methods, and the like. In the light irradiation means, the light irradiation method is not particularly limited, and the exposure light source can be appropriately selected according to the purpose to synthesize two or more. It is preferable to irradiate light from the light sources, which is particularly suitable. A laser beam (combined laser light) obtained by combining two or more rays of light is irradiated. The method of irradiating the combined laser light is not particularly limited, and can be appropriately selected according to the purpose, and it is preferable to condense the laser light irradiated from the plurality of laser light sources by a plurality of laser light sources and multimode optical fibers. The method of combining the optical system of the multimode optical fiber to form a combined laser light and irradiating it. The diameter of the aforementioned laser beam is not particularly limited and can be appropriately selected according to the purpose. From the resolution of the rich color wall, the ι/e2 of the Gaussian beam is preferably 5 μm to 30 μm to 7 μm. ~20 microns is better. It is preferable to modulate the aforementioned laser light according to the image data space. Therefore, for this purpose, it is preferable to use the aforementioned DMD of the spatial light modulation element. In the above-mentioned apparatus, the apparatus described in the above-mentioned Japanese Patent Application Laid-Open No. Hei. No. Hei. No. Hei. However, the above exposure apparatus is not limited to this. &lt;Developing Process&gt; The above-described image development is carried out by removing the unexposed portion of the photosensitive layer. The method of removing the uncured region is not particularly limited, and can be appropriately selected for the purpose of 0, and examples thereof include a method of removing using a developing solution. The developing solution is not particularly limited, and can be appropriately selected according to the purpose, and examples thereof include an alkaline aqueous solution, a water-based developing solution, and an organic solvent. Among them, a weakly alkaline aqueous solution is preferred. The alkali component of the weakly alkaline aqueous solution may, for example, be lithium hydroxide, sodium hydroxide, potassium hydroxide, lithium carbonate, sodium carbonate, potassium carbonate, lithium hydrogencarbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium phosphate or potassium phosphate. , sodium citrate, potassium glutamate, borax, and the like. The pH of the aforementioned weakly alkaline aqueous solution is preferably, for example, about 8 to 12, more preferably about 9 to 11. The weakly alkaline aqueous solution may, for example, be a 0.1% by mass to 5% by mass aqueous sodium carbonate solution or a potassium carbonate aqueous solution. The temperature of the developing solution can be appropriately selected in accordance with the developability of the photosensitive layer, and is preferably, for example, about 25 ° C to 40 ° C. The above-mentioned developing solution may also be used in combination with a surfactant, an antifoaming agent 'organic base (for example, ethylenediamine, ethanolamine, tetramethylammonium hydroxide, diethylenetriamine, triethyleneamine, sulphate, triethanolamine). Or an organic solvent (for example, an alcohol, a ketone, an ester, an ether, a guanamine, a lactone) or the like for promoting development. Further, the developing liquid may be a water-based developing liquid obtained by mixing water or an aqueous hydrazine solution with an organic solvent, or may be an organic solvent alone. The formation of the aforementioned pattern may, for example, also include a hardening treatment process, an etching process, a mineralizing process, and the like. One type may be used alone or two or more types may be used in combination. &lt;Hardening treatment process&gt; The method of forming the pattern is a permanent pattern forming method of forming a permanent pattern such as a protective film, an interlayer insulating film, or a solder resist pattern, or a permanent pattern of a color photosensitive composition. It is preferred to have a stearic acid stearic acid process for the photosensitive layer after the above-mentioned developing process. The stearic acid process is not particularly limited, and can be appropriately selected according to the purpose, and may be, for example, a full exposure treatment or a total heat treatment. The method of the overall exposure treatment may be, for example, a method of performing overall exposure on the layered body in which the permanent pattern is formed after the development. By the overall exposure, the curing of the resin in the photosensitive composition forming the photosensitive layer can be promoted, and the surface of the permanent pattern can be hardened. The apparatus for performing the above-described overall exposure is not particularly limited, and can be appropriately selected according to the purpose, and a UV exposure machine such as an ultrahigh pressure mercury lamp, an exposure machine using a xenon lamp, a laser exposure machine, or the like can be suitably used. The exposure amount is usually from 10 mJ/cm 2 to 2,000 mJ/cm 2 . The overall heat treatment method may be a method of heating the entire laminate on which the permanent pattern is formed after the development. By this overall heating, the film thickness of the surface of the aforementioned permanent pattern can be increased. -81 - .200941138 The heating temperature for the above-mentioned overall heating is preferably from 120 ° C to 250 ° C, more preferably from 120 ° C to 200 ° C. When the heating temperature is less than 120 °C, the film strength may not be increased by heat treatment. When the temperature is higher than 25 °C, the resin in the photosensitive composition is decomposed and the film quality is slightly brittle. The heating time for the above-mentioned overall heating is preferably from 10 minutes to 120 minutes, more preferably from 15 minutes to 60 minutes. The apparatus for performing the above-described overall heating is not particularly limited, and can be appropriately selected according to the purpose of the known device, and examples thereof include a dry oven, a hot plate, and an IR heater. In the direct drawing using a laser exposure of 40 5 nm, the formation method of the aforementioned pattern can be used for the formation of various patterns which must be prevented from being lowered in sensitivity of the photosensitive layer due to oxygen, and can be suitably used for high density. The formation of a pattern of high productivity. In the permanent pattern forming method described above, when the permanent pattern formed by the permanent pattern forming method is the protective film or the interlayer insulating film, the wiring can be protected from impact or bending from the outside, particularly in the case of the interlayer insulating film. For example, it is useful for high-density packaging semiconductors or components such as multilayer wiring boards or assembly wiring boards. Since the permanent pattern forming method uses the photosensitive composition, it can be suitably used for various pattern formations such as a protective film, an interlayer insulating film, and a permanent pattern such as a solder resist pattern, a color filter, a pillar, and a rib. The production of a liquid crystal structural member such as a spacer or a partition wall, the production of a hologram, a micromachine, a sample, and the like can be suitably used for forming a permanent pattern of -82 to 200941138 for a printed circuit board. EXAMPLES Hereinafter, the present invention will be specifically described by way of examples, but the present invention is not intended to be limited thereto, and is not limited to the following examples. Further, as long as it is not specifically notified in advance, "parts" are mass standards. [Example 1] (Manufacture of photosensitive film)

在作爲支撐體之厚度16微米的聚對酞酸乙二酯薄膜 〇 (TORAY股份公司製、16FB50)上,塗布由下述組成的所構 成的感光性組成物溶液並使其乾燥’而在前述支撐體上形 成厚度爲28微米的感光層。在前述感光層上’積層厚度爲 . 20微米的聚丙烯薄膜(王子特殊紙股份公司製、ALFAN E-200)作爲保護層,來製造感光性薄膜。 &lt;感光性組成物溶劑 &gt;的組成 下述的黏合劑-1的溶液........ 1〇〇質量份 三環癸烷二丙烯酸酯(商品名:NK ESTER A-DCP) (C-1、I/O 値= 0.428) ........ 18 質量份 下述式A-1所示之光聚合引發劑···· 1.0質量份 下述式S-1所示之敏化劑....... 〇_7質量份 EPOTOHTO YDF170(環氧等量170g/eq.東都化成股份公司 製、雙酚F系環氧樹脂)........ 8.9質量份 二氰基二醯胺............ 0.5質量份 顔料分散液............. 80.21質量份 MEGAFAC F-78 0F(大日本油墨股份公司製)的30質量%甲 -83 - 200941138 基乙基酮溶液....... 0.2質量份 IXE-100(東亞合成股份公司製)及IXE-700F(東亞合成股份 公司製)的1: 1(質量比)混合物....... 4.0質量份On the polyethylene terephthalate film crucible (manufactured by TORAY Co., Ltd., 16FB50) having a thickness of 16 μm as a support, a photosensitive composition solution composed of the following composition was applied and dried. A photosensitive layer having a thickness of 28 μm was formed on the support. A photosensitive film was produced by using a polypropylene film (manufactured by Oji Paper Co., Ltd., ALFAN E-200) having a thickness of 20 μm on the photosensitive layer as a protective layer. &lt;Photosensitive composition solvent&gt; Composition of the following adhesive-1: 1 part by mass of tricyclodecane diacrylate (trade name: NK ESTER A-DCP) (C-1, I/O 値 = 0.428) ........ 18 parts by mass of the photopolymerization initiator represented by the following formula A-1: 1.0 part by mass of the following formula S-1 Show sensitizer....... 〇_7 parts by mass of EPOTOHTO YDF170 (epoxy equivalent 170g / eq. Dongdu Chemical Co., Ltd., bisphenol F-based epoxy resin)........ 8.9 parts by mass of dicyanodiamine....... 0.5 parts by mass of pigment dispersion............. 80.21 parts by mass of MEGAFAC F-78 0F (large 30% by mass of A-83 - 200941138 base ethyl ketone solution made by Nippon Ink Co., Ltd. 0.2 parts by mass of IXE-100 (manufactured by Toagosei Co., Ltd.) and IXE-700F (manufactured by Toagos Corporation) 1:1 (mass ratio) mixture....... 4.0 parts by mass

S-1 &lt;&lt;黏合劑-1的合成&gt;&gt; 在1,000毫升的三口燒瓶,添加159克1-甲氧基-2-丙 醇’並在氮氣流下加熱至85 °C。在此,以2小時滴加63.4 克甲基丙烯酸苄酯、72.3克甲基丙烯酸、4.15克V-601(和 光純藥製)的159克1-甲氧基-2-丙醇溶液。滴加結束後, 進而加熱5小時使其反應。接著,停止加熱而得到甲基丙 烯酸苄酯/甲基丙烯酸(3 0/70莫耳%比)的共聚物。 接著,前述聚合物溶液之中,將120.0克移至300毫 升三口燒瓶’並添加16·6克甲基丙烯酸環氧丙酯、〇.16克 對甲氧基苯酚’使其攪拌並溶解。溶解後,添加3.0克三 苯基膦,且加熱至1〇〇 °C來進行加成反應。使用氣體層析 -84 - 200941138 儀確認甲基丙烯酸環氧丙酯已消失後,停止加熱。添加38 克卜甲氧基-2-丙醇,來調製酸價爲112mgKOH/g、質量平 均分子量爲15,000、固體成分爲30質量%之黏合劑-1的溶 液。 又,前述顏料分散液係預先混合30質量份硫酸鋇(堺 化學股份公司製B30)、50質量份前述黏合劑-1的溶液、0.16 質量份酞菁藍、及0.07質量份蒽醌系黃色顏料(PV24)後, 藉由MOTOR MILL M-250(Eiger公司製)並使用直徑爲1.0 © 毫米的锆顆粒,且以風速9公尺/秒分散3小時來調製。 &lt;積層在基體&gt; 前述基體係對覆銅積層板(無通孔,銅厚度爲12微米) . 的表面,施加化學硏磨處理來調製而成。在該覆銅積層板 上以前述感光性薄膜的感光層係接觸前述覆銅積層板的方 式,邊剝下前述感光性薄膜邊使用真空層壓機 (NICHIGO-MORTON(股)製、VP130)來使其積層,得到依照 順序積層前述覆銅積層板、前述感光層及前述聚對酞酸乙S-1 &lt;&lt;Synthesis of Adhesive-1&gt;&gt; In a 1,000 ml three-necked flask, 159 g of 1-methoxy-2-propanol was added and heated to 85 ° C under a nitrogen stream. Here, a solution of 63.4 g of benzyl methacrylate, 72.3 g of methacrylic acid, 4.15 g of V-601 (manufactured by Wako Pure Chemical Industries, Ltd.) in 159 g of 1-methoxy-2-propanol was added dropwise over 2 hours. After completion of the dropwise addition, the mixture was further heated for 5 hours to cause a reaction. Then, the heating was stopped to obtain a copolymer of benzyl methacrylate/methacrylic acid (30/70 mol%). Next, 120.0 g of the above polymer solution was transferred to a 300 ml three-necked flask', and 16.6 g of glycidyl methacrylate and 16.16 g of p-methoxyphenol were added and stirred and dissolved. After the dissolution, 3.0 g of triphenylphosphine was added and heated to 1 ° C to carry out an addition reaction. After confirming that the glycidyl methacrylate has disappeared using gas chromatography -84 - 200941138, stop heating. 38 g of methoxy-2-propanol was added to prepare a solution of the binder-1 having an acid value of 112 mgKOH/g, a mass average molecular weight of 15,000, and a solid content of 30% by mass. Further, the pigment dispersion liquid is previously mixed with 30 parts by mass of barium sulfate (B30 manufactured by Seiko Chemical Co., Ltd.), 50 parts by mass of the solution of the binder-1, 0.16 parts by mass of phthalocyanine blue, and 0.07 parts by mass of an anthraquinone yellow pigment. After (PV24), it was prepared by using MOTOR MILL M-250 (manufactured by Eiger Co., Ltd.) and using zirconium particles having a diameter of 1.0 mm, and dispersing at a wind speed of 9 m/s for 3 hours. &lt;Laminating in a substrate&gt; The base system was prepared by applying a chemical honing treatment to a surface of a copper clad laminate (without via holes and a copper thickness of 12 μm). On the copper-clad laminate, a vacuum laminator (NICHIGO-MORTON Co., Ltd., VP130) was used to peel off the photosensitive film while the photosensitive layer of the photosensitive film was in contact with the copper-clad laminate. Laying the layer to obtain the copper-clad laminate, the photosensitive layer, and the aforementioned poly-paraic acid B

D 二酯薄膜(支撐體)而成之積層體》 壓黏條件爲真空吸引時間爲40秒、壓黏溫度爲70°C、 壓黏壓力爲〇.2MPa、加壓時間爲1〇秒。 如以下進行,對前述積層體進行敏感度評價。 &lt;敏感度&gt; 將前述積層體在室溫(23°C、55%RH)靜置10分鐘。在 所得到的前述積層體的感光層表面,使用 INPREX IP-3000(富士軟片公司製、像素間距=1.0微米),對L/S (線 -85- 200941138 /間隙)= 50微米/ 50微米的圖案數據,以21/2倍間隔照射從 0.5mJ/cm2至5 00mJ/cm2之不同光能量的光線而曝光,來使 L/S(線/間隙)=50微米/50微米線圖案硬化。在室溫靜置1〇 分鐘後,從前述感光性積層體將述支撐體剝取,並對覆銅 積層板上的感光層的全面使用3 (TC的1質量%碳酸鈉水溶 液且在噴霧壓0.15MPa,以最短顯像時間的2〜3倍時間(或 40〜60秒)進行噴霧顯像,來除去未硬化的區域。使用雷射 顯微鏡(VK·9500、KEYENCE公司製;物鏡爲50倍)測定如 Ο 此進行所得到的L = 50微米的圖案之線寬,將線寬爲50微 米之曝光量作爲敏感度(最佳曝光量)。結果如表1所示。 &lt;顯像及硬化處理&gt; 從前述積層體剝取聚對酞酸乙二酯薄膜(支撐體),並 前述感光層的全面使用30 °c的1質量%碳酸鈉水溶液且在 噴霧壓0.15 MPa進行噴霧60秒,來除去未硬化的區域。隨 後,水洗並使其乾燥,來形成永久圖案。 &lt;絕緣信賴性的評價1(條件1)&gt; ® 對除了前述基材係使用將銅厚度爲12微米的覆銅積 層板以線/間隙=50微米/50微米的方式梳狀地形成配線而 成者以外,與前述永久圖案的形成方法同樣地進行而製作 的永久圖案,進行高速加速耐用期限試驗(HAST試驗)並評 價樹突狀晶體(dendrite)及絕緣電阻(Ω)。HAST試驗用高加 速度試驗器,將電子零件組件在溫度130°C且相對濕度爲 85%的環境中,施加電壓10V 200小時後,在同條件下測定 導體凸塊的絕緣電阻(Ω),隨後,進行導體凸塊的樹突狀晶 -86 - .200941138 體觀察並如以下評價。結果如表1所示。 [評價基準] ◎:配線完全無變化 〇:雖然未觀察到樹突狀晶體,但陽極配線稍微變化 △:雖然未觀察到樹突狀晶體,但陽極配線難以辨識 X :有樹突狀晶體 &lt;絕緣信賴性的評價2(條件2)&gt; 對除了前述基材係使用將銅厚度爲12微米的覆銅積 Ο 層板以線/間隙=50微米/50微米的方式梳狀地形成配線而 成者以外,與前述永久圖案的形成方法同樣地進行而製作 的永久圖案,進行高速加速耐用期限試驗(HAST試驗)並評 . 價樹突狀晶體(dendrite)及絕緣電阻(Ω)。HAST試驗用高加 速度試驗器,將電子零件組件在溫度1 30°C且相對濕度爲 8 5%的環境中,施加電壓50 V 200小時後,在同條件下測定 導體凸塊的絕緣電阻(Ω),隨後,進行導體凸塊的樹突狀晶 體觀察並如以下評價。結果如表1所示。 [評價基準] ◎:配線完全無變化 〇:雖然未觀察到樹突狀晶體,但陽極配線稍微變化 △:雖然未觀察到樹突狀晶體,但陽極配線難以辨識 X :有樹突狀晶體 &lt;活性保存性的評價&gt; 將前述積層體在室溫(23°C、55%RH)密閉於防濕袋(黑 色聚乙烯製的筒狀袋、膜厚度:80微米、水蒸氣透過率: -87- 200941138 25克/平方公尺·24小時以下)後,於40 °C保存3天後,藉 由與前述最短顯像時間的評價同樣方法來測定前述最短顯 像時間,將在前述最短顯像時間的評價所得到的値作爲 U,將保存3天後之前述最短顯像時間的値作爲tl,並算 出n/to的値。但是,在U測定時即便進行噴霧現像60秒 亦無法除去前述感光層時,記入「x」。所得到的値越接近 1時,係意味著活性保存性越優良。結果如表1所示。 [實施例2] Ο 除了將離子吸附劑變更爲B-2以外,與實施例1同樣 地進行來製造積層體及永久圖案,與實施例1同樣地進行 來評價敏感度、絕緣信賴性(條件1及條件2)、及活性保存 . 性。結果如表1所示。又,該離子吸附劑B-2係1XE-100(東 亞合成股份公司製)與DHA-4A-2(協和界面化學工業公司 製)之1 : 1(質量比)的混合物。 [實施例3] 除了將離子吸附劑變更爲B-3以外,與實施例1同樣 ¥ 地進行來製造積層體及永久圖案,與實施例1同樣地進行 來評價敏感度、絕緣信賴性(條件1及條件2)、及活性保存 性。結果如表1所示。又,該離子吸附劑B-3係DHA-4A-2(協 和界面化學工業公司製)。 [實施例4] 除了將聚合性化合物變更爲C_2以外,與實施例1同 樣地進行來製造積層體及永久圖案,與實施例1同樣地進 行來評價敏感度、絕緣信賴性(條件1及條件2)、及活性保 -88- 200941138 存性。結果如表1所示。又,該聚合性化合物C_2 癸院一甲醇一甲基丙嫌酸醋。該聚合性化合物C_2 値爲0.385 。 [實施例5] 除了將聚合性化合物變更爲C-3以外,與實施 樣地進行來製造積層體及永久圖案,與實施例1同 行來評價敏感度、絕緣信賴性(條件1及條件2)、及 存性。結果如表1所示。又,該聚合性化合物C-3 0 甲基丙烷三甲基丙烯酸酯。該聚合性化合物C-3的 爲 0.5 1 7。 [實施例6] . 除了將肟衍生物(引發劑)變更爲A-2以外,與養 同樣地進行來製造積層體及永久圖案,與實施例1 進行來評價敏感度、絕緣信賴性(條件1及條件2)、 保存性。結果如表1所示。又,肟衍生物A-2係下翅 所示者。The D-diester film (support) is a laminate. The pressure-bonding conditions are a vacuum suction time of 40 seconds, a pressure-bonding temperature of 70 ° C, a pressure-bonding pressure of 〇. 2 MPa, and a pressurization time of 1 sec. The laminate was subjected to sensitivity evaluation as follows. &lt;Sensitivity&gt; The laminate was allowed to stand at room temperature (23 ° C, 55% RH) for 10 minutes. On the surface of the photosensitive layer of the obtained laminate, INPREX IP-3000 (manufactured by Fujifilm Co., Ltd., pixel pitch = 1.0 μm) was used, and L/S (line -85 - 200941138 / gap) = 50 μm / 50 μm The pattern data was exposed by irradiating light of different light energies from 0.5 mJ/cm 2 to 500 mJ/cm 2 at intervals of 2 1/2 times to harden the L/S (line/gap) = 50 μm / 50 μm line pattern. After standing at room temperature for 1 minute, the support was peeled off from the photosensitive laminate, and the photosensitive layer on the copper-clad laminate was used in a comprehensive manner 3 (TC 1% by mass aqueous sodium carbonate solution and spray pressure) 0.15 MPa, spray imaging was performed 2 to 3 times (or 40 to 60 seconds) of the shortest development time to remove the unhardened area. Using a laser microscope (VK·9500, manufactured by KEYENCE, Inc.; objective lens 50 times) The measurement was as follows: The line width of the obtained L = 50 μm pattern was measured, and the exposure amount of the line width of 50 μm was taken as the sensitivity (optimum exposure amount). The results are shown in Table 1. &lt;Development and Hardening treatment&gt; A polyethylene terephthalate film (support) was peeled off from the laminate, and the photosensitive layer was entirely sprayed with a 1% by mass aqueous sodium carbonate solution at 30 ° C and sprayed at a spray pressure of 0.15 MPa for 60 seconds. Then, the uncured region is removed. Then, it is washed with water and dried to form a permanent pattern. <Evaluation of Insulation Reliability 1 (Condition 1)&gt; ® For a substrate thickness other than the above, a copper thickness of 12 μm is used. Copper clad laminate with line/gap = 50 microns / 50 microns A permanent pattern produced in the same manner as the method of forming the permanent pattern described above was formed in the form of a comb, and a high-speed accelerated durability test (HAST test) was performed to evaluate a dendrite and an insulation resistance (Ω). The HAST test uses a high-acceleration tester to measure the insulation resistance (Ω) of the conductor bump under the same conditions after applying a voltage of 10 V for 200 hours in an environment of a temperature of 130 ° C and a relative humidity of 85%. Subsequently, the dendritic crystals of the conductor bumps were observed and evaluated as follows. The results are shown in Table 1. [Evaluation criteria] ◎: The wiring was completely unchanged 〇: although no dendrites were observed Crystal, but the anode wiring slightly changed. Δ: Although no dendritic crystals were observed, the anode wiring was difficult to recognize X: dendritic crystals &lt; evaluation of insulation reliability 2 (condition 2)&gt; In the same manner as the method of forming the permanent pattern, the copper-clad laminate having a copper thickness of 12 μm is formed by comb-forming a wire with a line/gap=50 μm/50 μm. Permanent pattern for high speed accelerated durability test (HAST test) and evaluation of dendrites and insulation resistance (Ω). HAST test with high acceleration tester, electronic components at temperature 1 30 ° In an environment where the relative humidity is 8 5%, after applying a voltage of 50 V for 200 hours, the insulation resistance (Ω) of the conductor bump is measured under the same conditions, and then the dendritic crystal of the conductor bump is observed and as follows The results are shown in Table 1. [Evaluation Criteria] ◎: The wiring was completely unchanged. 树: Although no dendritic crystals were observed, the anode wiring slightly changed. Δ: Although no dendritic crystals were observed, the anode wiring was difficult. Identification X: Dendritic crystals &lt;Evaluation of activity preservability&gt; The laminate was sealed at a room temperature (23 ° C, 55% RH) in a moisture-proof bag (black polyethylene tubular bag, film thickness) : 80 μm, water vapor transmission rate: -87-200941138 25 g/m 2 ·24 hours or less), after storing at 40 ° C for 3 days, the above method was measured in the same manner as the evaluation of the shortest development time described above. The shortest imaging time will be in front The enthalpy obtained by the evaluation of the shortest development time is U, and the 最 of the shortest development time after 3 days is stored as tl, and n of n/to is calculated. However, in the case of U measurement, even if the photosensitive layer could not be removed even if the image was sprayed for 60 seconds, "x" was recorded. The closer the obtained enthalpy is to 1, the more excellent the activity preservability. The results are shown in Table 1. [Example 2] 积 In the same manner as in Example 1, except that the ion adsorbent was changed to B-2, the laminate and the permanent pattern were produced, and the sensitivity and insulation reliability were evaluated in the same manner as in Example 1. 1 and condition 2), and active preservation. The results are shown in Table 1. Further, the ion adsorbent B-2 is a mixture of 1 : 1 (mass ratio) of 1XE-100 (manufactured by Toray Synthetic Co., Ltd.) and DHA-4A-2 (manufactured by Kyowa Interface Chemical Co., Ltd.). [Example 3] A laminate and a permanent pattern were produced in the same manner as in Example 1 except that the ion adsorbent was changed to B-3, and sensitivity and insulation reliability were evaluated in the same manner as in Example 1. 1 and condition 2), and active storage. The results are shown in Table 1. Further, the ion adsorbent B-3 is DHA-4A-2 (manufactured by Kyowa Interface Chemical Co., Ltd.). [Example 4] A laminate and a permanent pattern were produced in the same manner as in Example 1 except that the polymerizable compound was changed to C 2 , and sensitivity and insulation reliability were evaluated in the same manner as in Example 1 (Condition 1 and conditions) 2), and active insurance -88- 200941138 deposit. The results are shown in Table 1. Further, the polymerizable compound C_2 is brothel-methanol-methyl propyl vinegar. The polymerizable compound C 2 値 was 0.385. [Example 5] In addition to changing the polymerizable compound to C-3, the laminate and the permanent pattern were produced in the same manner as in Example 1, and the sensitivity and insulation reliability were evaluated in the same manner as in Example 1 (Condition 1 and Condition 2). And existence. The results are shown in Table 1. Further, the polymerizable compound C-3 0 methylpropane trimethacrylate. The polymerizable compound C-3 was 0.5 17 . [Example 6] In addition to the change of the anthracene derivative (initiator) to A-2, the laminate and the permanent pattern were produced in the same manner as in the culture, and the sensitivity and insulation reliability were evaluated in the first example (conditions). 1 and condition 2), preservation. The results are shown in Table 1. Further, the anthracene derivative A-2 is shown in the lower wing.

係三環 的I/O 例1同 樣地進 活性保 係三羥 I/O値 施例1 同樣地 及活性 式A-2The tricyclic I/O example 1 is similarly activated. The trihydroxyl I/O is the same as in the first embodiment and the active form A-2.

A - 2 [實施例7] 除了將肟衍生物(引發劑)變更爲A-3以外,與1 同樣地進行來製造積層體及永久圖案,與實施例1 施例1 同樣地 -89- ,200941138 進行來評價敏感度、絕緣信賴性(條件1及條件2)、及活性 保存性。結果如表1所示。又’肟衍生物 A-3係 IRGACURE250(CIBA SPECIALTY CHEMICALS 公司製)。 [實施例8] 除了將肟衍生物(引發劑)變更爲A-4以外,與實施例1 同樣地進行來製造積層體及永久圖案,與實施例1同樣地 進行來評價敏感度、絕緣信賴性(條件1及條件2)、及活性 保存性。結果如表1所示。又,肟衍生物A-4係2-苄基-2-© 二甲胺-1-(4-味啉苯基)-丁酮-1。 [實施例9] 除了將離子吸附劑變更爲B-4,將聚合性化合物變更 爲C-3以外,與實施例1同樣地進行來製造積層體及永久 圖案,與實施例1同樣地進行來評價敏感度、絕緣信賴性(條 件1及條件2 )、及活性保存性。結果如表1所示。又,離 子吸附劑B-4係五氧化銨水合物。聚合性化合物c-3係與 實施例5所使用者同樣。 ® [實施例10] 除了將離子吸附劑變更爲B-5,將聚合性化合物變更 爲C-3以外’與實施例1同樣地進行來製造積層體及永久 圖案,與實施例1同樣地進行來評價敏感度、絕緣信賴性(條 件1及條件2)、及活性保存性。結果如表1所示。又,離 子吸附劑B - 5係三氧化錄。聚合性化合物C - 3係與實施例 5所使用者同樣。 [比較例1] -90- 200941138 除了未使用離子吸附劑且將聚合性化合物變更爲C-3 以外,與實施例1同樣地進行來製造積層體及永久圖案, 與實施例1同樣地進行來評價敏感度、絕緣信賴性(條件1 及條件2)、及活性保存性。結果如表1所示。聚合性化合 物C-3與實施例5所使用者同樣。 ❹ ❹ [表1] 肟衍生物 (引發劑) 離子 吸附劑 聚潍 化雜 敏感度 絕緣 信賴性 (條件1) 絕緣 信賴性 (條件2) 活性 保存性 實施例1 A-1 B-1 C-1 30 ◎ ◎ 〇 實施例2 A-1 B-2 C-1 30 ◎ ◎ 〇 實施例3 'A-1 B-3 C-1 30 〇 Δ 〇 實施例4 A-1 B-1 C-2 30 ◎ ◎ 〇 實施例5 A-1 B-1 C-3 30 〇 〇 〇 實施例6 A-2 B-1 C-1 50 ◎ ◎ 〇 實施例7 A-3 B-1 C-1 100 Δ X 〇 實施例8 A-4 B-1 C-1 200 ◎ 〇 X 實施例9 A-1 B-4 C-3 30 Δ X 〇 實施例10 A-1 B-5 C-3 30 △ X 〇 比較例1 A-1 dice. 那 C-3 30 X X ◦ [產業上之利用可能性] 因爲本發明的感光性薄膜在維持顯像性之同時能夠提 升絕緣信賴性,能夠效率良好地形成高精細的永久圖案, 能夠適合使用於保護膜、層間絕緣膜及防焊阻劑圖案等的 永久圖案等的各種圖案形成用、彩色濾光片、柱材、肋材、 .91 - 200941138 間隙物、隔牆等的液晶結構構件的製造、全息照像、微型 機器、樣張等圖案的形成用等,特別是能夠適合使用於印 刷基板的永久圖案形成用。 因爲本發明的圖案形成方法係使用前述感光性組成 物,能夠適合使用於保護膜、層間絕緣膜及防焊阻劑圖案 等的永久圖案等的各種圖案形成用、彩色濾光片 '柱材、 肋材、間隙物、隔牆等的液晶結構構件的製造、全息照像、 微型機器、樣張等圖案的形成用等,特別是能夠適合使用 © 於印刷基板的永久圖案形成。 【圓式簡單說明】 Λητ. 無0 【主要元件符號說明】 &gt;frrr 無0A - 2 [Example 7] A laminate and a permanent pattern were produced in the same manner as 1 except that the anthracene derivative (initiator) was changed to A-3, and -89- was the same as in Example 1 of Example 1. 200941138 Conducted to evaluate sensitivity, insulation reliability (Condition 1 and Condition 2), and active storage. The results are shown in Table 1. Further, the anthracene derivative A-3 is IRGACURE 250 (manufactured by CIBA SPECIALTY CHEMICALS). [Example 8] A laminate and a permanent pattern were produced in the same manner as in Example 1 except that the anthracene derivative (initiator) was changed to A-4, and sensitivity and insulation reliability were evaluated in the same manner as in Example 1. Properties (Condition 1 and Condition 2) and active storage. The results are shown in Table 1. Further, the anthracene derivative A-4 is 2-benzyl-2-ydimethylamine-1-(4-morpholinylphenyl)-butanone-1. [Example 9] A laminate and a permanent pattern were produced in the same manner as in Example 1 except that the ion-adsorbing agent was changed to B-4, and the polymerizable compound was changed to C-3, and the same procedure as in Example 1 was carried out. Evaluation of sensitivity, insulation reliability (Condition 1 and Condition 2), and activity preservability. The results are shown in Table 1. Further, the ionic adsorbent B-4 is an ammonium pentoxide hydrate. The polymerizable compound c-3 was the same as that of the user of Example 5. [Example 10] A laminate and a permanent pattern were produced in the same manner as in Example 1 except that the ion-adsorbing agent was changed to B-5, and the polymerizable compound was changed to C-3, and the same procedure as in Example 1 was carried out. To evaluate sensitivity, insulation reliability (Condition 1 and Condition 2), and activity preservability. The results are shown in Table 1. Further, the ionic adsorbent B-5 is a trioxide record. The polymerizable compound C-3 was the same as that of the user of Example 5. [Comparative Example 1] -90-200941138 A laminate and a permanent pattern were produced in the same manner as in Example 1 except that the ionizable adsorbent was not used and the polymerizable compound was changed to C-3, and the same procedure as in Example 1 was carried out. Evaluation of sensitivity, insulation reliability (Condition 1 and Condition 2), and activity preservability. The results are shown in Table 1. The polymerizable compound C-3 was the same as that of the user of Example 5. ❹ ❹ [Table 1] Antimony Derivative (Initiator) Ion Adsorbent Polymerization Hybrid Sensitivity Insulation Reliability (Condition 1) Insulation Reliability (Condition 2) Activity Preservation Example 1 A-1 B-1 C- 1 30 ◎ ◎ 〇 Example 2 A-1 B-2 C-1 30 ◎ ◎ 〇 Example 3 'A-1 B-3 C-1 30 〇Δ 〇 Example 4 A-1 B-1 C-2 30 ◎ ◎ 〇 Example 5 A-1 B-1 C-3 30 〇〇〇 Example 6 A-2 B-1 C-1 50 ◎ ◎ 〇 Example 7 A-3 B-1 C-1 100 Δ X 〇 Example 8 A-4 B-1 C-1 200 ◎ 〇 X Example 9 A-1 B-4 C-3 30 Δ X 〇 Example 10 A-1 B-5 C-3 30 △ X 〇 Comparative Example 1 A-1 dice. That C-3 30 XX ◦ [Industrial Applicability] The photosensitive film of the present invention can improve the reliability of the insulation while maintaining the development performance, and can form high-definition efficiently. The permanent pattern can be suitably used for various pattern formations such as a protective film, an interlayer insulating film, and a permanent pattern such as a solder resist pattern, a color filter, a pillar, a rib, and a spacer. Manufacturing of liquid crystal structural members such as walls, holograms, micro For forming a pattern such as a machine or a sample, it is particularly suitable for forming a permanent pattern for use in a printed substrate. In the pattern forming method of the present invention, the photosensitive composition can be suitably used for various pattern formations such as a protective film, an interlayer insulating film, and a permanent pattern such as a solder resist pattern, and a color filter 'column. The production of liquid crystal structural members such as ribs, spacers, and partition walls, formation of holograms, micro-machines, and patterns such as proofs can be suitably formed using a permanent pattern from a printed circuit board. [Circular simple description] Λητ. No 0 [Main component symbol description] &gt;frrr No 0

Claims (1)

200941138 七、申請專利範圍: 1. 一種感光性組成物,其特徵係含有黏合劑、聚合性化合 物、肟衍生物及離子吸附劑而構成。 2. 如申請專利範圍第1項之感光性組成物,其中離子吸附 劑含有磷酸銷》 3. 如申請專利範圍第1項之感光性組成物,其中更含有塡 料。 4. 如申請專利範圍第1項之感光性組成物,其中更含有熱 © 交聯劑。 5 .如申請專利範圍第1項之感光性組成物,其中肟衍生物 係如下述通式(1)所示, N 一〇—R1 (R2)m || C^: 通式(1 ) 其中,上述通式(1)中,R1係表示氫原子、亦可具有 取代基之醯基、烷氧基羰基及芳氧基羰基之任一者,R2 係各自獨立地表示鹵素原子、烷基、芳基、烷氧基、芳 氧基、烷硫基、芳硫基及胺基之任一者,m係表示〇〜4 的整數,2個以上時亦可互相連結而形成環,A係表示 4、5、6及7員環之任一者。 6.如申請專利範圍第5項之感光性組成物,其中肟衍生物 係如下述通式(2)所示, -93- 200941138200941138 VII. Patent application scope: 1. A photosensitive composition characterized by comprising a binder, a polymerizable compound, an anthracene derivative and an ion adsorbent. 2. The photosensitive composition of claim 1, wherein the ion adsorbent comprises a phosphoric acid pin. 3. The photosensitive composition according to claim 1 of the patent application, further comprising a binder. 4. For example, the photosensitive composition of claim 1 of the patent scope further contains heat © crosslinker. 5. The photosensitive composition according to claim 1, wherein the anthracene derivative is represented by the following formula (1): N 〇-R1 (R2)m || C^: Formula (1) wherein In the above formula (1), R1 represents a hydrogen atom, a thiol group which may have a substituent, an alkoxycarbonyl group and an aryloxycarbonyl group, and R2 each independently represents a halogen atom or an alkyl group. Any one of an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amine group, m represents an integer of 〇~4, and two or more may be bonded to each other to form a ring, and A represents Any of the 4, 5, 6 and 7 member rings. 6. The photosensitive composition of claim 5, wherein the anthracene derivative is as shown in the following formula (2), -93- 200941138 通式(2) 其中,上述通式(2)中,R1係表示氫原子 '亦可具有取 代基之醯基、烷氧基羰基及芳氧基羰基之任一者,R2係 各自獨立地表示鹵素原子、烷基、芳基、烷氧基、芳氧 基、院硫基、芳硫基及胺基之任一者’ m係表示0〜4 © 的整數,X係表示ch2、o及S之任一者’1係表示1〜 3的整數。 7.如申請專利範圍第5項之感光性組成物’其中肟衍生物 爲以下述通式(3)及(4)之任一者所示’In the above formula (2), R1 represents any one of a hydrazine group, an alkoxycarbonyl group and an aryloxycarbonyl group which may have a substituent of a hydrogen atom, and R2 each independently represents Any one of a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a thiol group, an arylthio group and an amine group 'm series means an integer of 0 to 4 ©, and X means ch2, o and S Any one of '1' represents an integer of 1 to 3. 7. The photosensitive composition of claim 5, wherein the anthracene derivative is represented by any one of the following general formulae (3) and (4). N^〇—R1 通式(3) 通式(4) 其中,上述通式(3)及(4)中’ Rl係表示氫原子 '亦可具 有取代基之酿基、烷氧基羰基及芳氧基羰基之任一者, R2係各自獨立地表示鹵素原子、院基、芳基、院氧基、 芳氧基、燒硫基、芳硫基及胺基之任一者’ m係表示0 -94- 200941138 , * 〜4的整數,χ係表示Ch2、0及S之任一者,1係表示 1〜3的整數。 8. 如申請專利範圍第6項之感光性組成物,其中通式(2) 中,X係表示〇及S之任一者,1係1及2之任一者, R1係表亦可具有取代基之醯基及烷氧基羰基之任一者。 9. 如申請專利範圍第7項之感光性組成物,其中通式(3) 及(4)中,X係表示〇及S之任一者,1係1及2之任一 者,R1係表亦可具有取代基之醯基及烷氧基羰基之任一 © 者。 1〇·如申請專利範圍第1項之感光性組成物,其中聚合性化 合物的I/O値的重量平均爲0.5以下。 . 11. 一種感光性薄膜,其特徵係在支撐體上具有由如申請專 利範圍第1項之感光性組成物所構成之感光層而構成。 12. —種感光性積層體,其特徵係在基體上具有由如申請專 利範圍第1項之感光性組成物所構成之感光層而構成。 13. —種永久圖案形成方法,其特徵係至少含有對使用如申 0 請專利範圍第1項之感光性組成物所形成的感光層進行 曝光。 14. 如申請專利範圍第13項之永久圖案形成方法,其中曝 光係通過配列微透鏡而成的微透鏡陣列來進行,該微透 鏡具有能夠修正在藉由光調變手段將光線調變後因在 該光調變手段之描繪部的射出面的變形所產生的偏差 之非球面。 15. 如申請專利範圍第13項之永久圖案形成方法,其中進 -95- 200941138 · ' 行曝光後,進行感光層的顯像。 16.如申請專利範圍第13項之永久圖案形成方法,其中進 行顯像後,進行感光層的硬化處理。 1 7 . —種印刷基板,其特徵係依照如申請專利範圍第1 3項 之永久圖案形成方法來形成永久圖案。N^〇—R1 Formula (3) Formula (4) wherein, in the above formulas (3) and (4), 'Rl represents a hydrogen atom' may also have a substituent, alkoxycarbonyl and aryl Any of the oxycarbonyl groups, R2 each independently represents a halogen atom, a aryl group, an aryl group, an aristocratic group, an aryloxy group, a sulfur-sulfur group, an arylthio group, and an amine group. -94- 200941138, * An integer of ~4, χ indicates any of Ch2, 0, and S, and 1 indicates an integer of 1 to 3. 8. The photosensitive composition of claim 6, wherein in the formula (2), the X system represents any one of 〇 and S, and any of the 1 series 1 and 2, the R1 series may have Any one of a substituent thiol group and an alkoxycarbonyl group. 9. The photosensitive composition of claim 7, wherein in the general formulae (3) and (4), the X system represents any one of 〇 and S, and any of the 1 series 1 and 2, the R1 system The watch may also have any one of a substituent thiol group and an alkoxycarbonyl group. The photosensitive composition of claim 1, wherein the weight of the I/O値 of the polymerizable compound is 0.5 or less on average. A photosensitive film comprising a photosensitive layer composed of a photosensitive composition according to item 1 of the patent application of the patent application. A photosensitive laminate comprising a photosensitive layer comprising a photosensitive composition according to the first item of the patent application of the patent application. A permanent pattern forming method characterized by comprising at least a photosensitive layer formed by using a photosensitive composition of the first aspect of the application. 14. The permanent pattern forming method according to claim 13, wherein the exposure is performed by a microlens array formed by arranging microlenses, the microlens having the ability to correct the light modulation by means of optical modulation The aspherical surface of the deviation caused by the deformation of the exit surface of the drawing portion of the light modulation means. 15. The method of forming a permanent pattern according to claim 13 of the patent application, wherein the exposure of the photosensitive layer is performed after exposure to -95-200941138. 16. The permanent pattern forming method according to claim 13, wherein after the development, the photosensitive layer is subjected to a hardening treatment. A printed circuit board characterized in that a permanent pattern is formed in accordance with the permanent pattern forming method of claim 13 of the patent application. -96- .200941138 四、指定代表圖: (一) 本案指定代表圖為:無。 (二) 本代表圖之元件符號簡單說明: Μ 〇 a、、-96- .200941138 IV. Designated representative map: (1) The representative representative of the case is: None. (2) A brief description of the symbol of the representative figure: Μ 〇 a, 五、本案若有化學式時,請揭示最能顯示發明特徵的化學式:5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention:
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Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4258687B2 (en) * 1998-11-30 2009-04-30 日立化成工業株式会社 Photosensitive resin composition
JP2006011395A (en) * 2004-05-26 2006-01-12 Showa Denko Kk Photosensitive resin composition, and cured product and use thereof
JP2006309202A (en) * 2005-03-29 2006-11-09 Toray Ind Inc Photosensitive resin composition and semiconductor device using the same
JP2007017814A (en) * 2005-07-08 2007-01-25 Fujifilm Holdings Corp Pattern forming material, pattern forming apparatus, and permanent pattern forming method
JP5312743B2 (en) * 2006-02-01 2013-10-09 富士フイルム株式会社 Oxime compound and photosensitive composition containing the same
JP4711886B2 (en) * 2006-05-26 2011-06-29 富士フイルム株式会社 Photosensitive composition, photosensitive film and printed circuit board

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