TW200938792A - Process for low temperature air fractionation - Google Patents

Process for low temperature air fractionation Download PDF

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Publication number
TW200938792A
TW200938792A TW097141104A TW97141104A TW200938792A TW 200938792 A TW200938792 A TW 200938792A TW 097141104 A TW097141104 A TW 097141104A TW 97141104 A TW97141104 A TW 97141104A TW 200938792 A TW200938792 A TW 200938792A
Authority
TW
Taiwan
Prior art keywords
heat exchanger
main heat
oxygen
fluid
nitrogen
Prior art date
Application number
TW097141104A
Other languages
English (en)
Inventor
Stefan Lochner
Original Assignee
Linde Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Linde Ag filed Critical Linde Ag
Publication of TW200938792A publication Critical patent/TW200938792A/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04406—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system
    • F25J3/0443—A main column system not otherwise provided, e.g. a modified double column flowsheet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04048—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of cold gaseous streams, e.g. intermediate or oxygen enriched (waste) streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04078—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression
    • F25J3/0409—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression of oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04254—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using the cold stored in external cryogenic fluids
    • F25J3/0426—The cryogenic component does not participate in the fractionation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/90—Details relating to column internals, e.g. structured packing, gas or liquid distribution
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/90—Details relating to column internals, e.g. structured packing, gas or liquid distribution
    • F25J2200/94—Details relating to the withdrawal point
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/50—Oxygen or special cases, e.g. isotope-mixtures or low purity O2
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/50—Oxygen or special cases, e.g. isotope-mixtures or low purity O2
    • F25J2215/56—Ultra high purity oxygen, i.e. generally more than 99,9% O2
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2220/00—Processes or apparatus involving steps for the removal of impurities
    • F25J2220/50—Separating low boiling, i.e. more volatile components from oxygen, e.g. N2, Ar
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2245/00—Processes or apparatus involving steps for recycling of process streams
    • F25J2245/02—Recycle of a stream in general, e.g. a by-pass stream
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2250/00—Details related to the use of reboiler-condensers
    • F25J2250/02—Bath type boiler-condenser using thermo-siphon effect, e.g. with natural or forced circulation or pool boiling, i.e. core-in-kettle heat exchanger
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2250/00—Details related to the use of reboiler-condensers
    • F25J2250/20—Boiler-condenser with multiple exchanger cores in parallel or with multiple re-boiling or condensing streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
    • F25J2290/62—Details of storing a fluid in a tank

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Description

200938792 九、發明說明： 【發明所屬之技術領域】 本發明係關於根據請求項1之前言之低溫空氣分餾之方 法。 【先前技術】 低溫空氣分餾之方法及裝置係（例如）自Hausen/Linde， Tieftemperaturtechnik [Cryogenic engineering]，1985 第二 版，第4章（第281至337頁）已知的。在歐洲專利第EP 〇 412793 B2號、歐洲專利第EP 773417 B1號、歐洲專利第EP 780648 B1號、歐洲專利第EP 807792 B1號、歐洲專利第 EP 932004 A2號及美國專利第US 2007204652 A1號中描述 前言（SPECTRA)中所描述之空氣分餾方法之類型實例。在 該等方法中已知自單塔收回第一富氧殘餘镏分，將其汽化 並以作功方式在膨脹機中膨脹至少一部分汽化殘餘餾分以 產生彌補交換損失所需之冷却且（若需要）用於產品液化。 第一殘餘餾分係在膨脹機之出口壓力下排出，其通常係處 ^ 於近似大氣壓力，且因而大體上僅用作純化進料空氣之吸 附器具的再生氣體。在SPECTRA方法中，在該情况下，第 -二殘餘餾分可與第一殘餘餾分一起自單塔中取出並至少部 分汽化；或者，兩殘餘餾分可在單塔之不同點處收回且彼 此個別汽化，例如在單塔之頂端冷凝器之不同通道中。 【發明内容】 本發明之目的係尤其有利且經濟地操作該方法及該裝 置。 135381.doc 200938792 此目的係藉由請求項1之特徵化特點實現。 液槽之外部流體未按照常例藉由外置熱交換器（例如， 水冷蒸發器或空溫式蒸發器）加溫，而在主熱交換器中冷 却用於蒸餾塔系統之進料空氣。以此方式，外部流體中所 存在之冷可藉由將其傳送至主熱交換器之進料空氣而回收 用於分餾方法中。 源於"外源"之流體，即非源自用於氮氧分離之蒸餾塔系 統之分離塔中之一者，或連接用於氮-氧分離之蒸餾塔系 統下游之分離塔。較佳為，其係（例如）藉由一槽自用於產 生液化氣體之另一設備傳送。在此情况下，其可係一具有 用於氮-氧分離之蒸餾塔系統之產品流中之一者之化學組 成的流體。然而，該流體較佳係具有與該等產品流不同之 組成並且係由（例如）氬氣或氫氣所組成。藉此如本發明之 方法係適宜的，尤其係用於供應工業氣體給半導體工業工 廠°該等經常需要低量之氬氣及/或純氧而不適宜連接一 ❷ 用於獲得氮-氧分離之蒸餾塔系統之氬氣下游之步驟。此 外’氣體如未在空氣分餾設備中獲得之氫氣之冷係用於空 氣分館且藉此降低分餾之能量消耗。 該"主熱交換器"較佳係藉由單個熱交換模塊所形成。在 相對大型工廠中，可有利地藉由複數個在溫度進程中並聯 連接之輪組執行主熱交換器，其中該等輪組係由彼此分離 放置之組成元件所形成。原則上，該等輪組各者之熱交換 器可由串聯連接之兩或更多個模塊形成。 流體之壓力在液槽與主熱交換器之間有利地係無增加β 135381.doc 200938792 較佳地，流體係在不高於液槽之操作壓力之壓力下引入 主熱交換器中。液槽之操作壓力可固定或波動的，例如在 槽與氣體收回系統中維持壓力之情况下。如果液槽之操作 壓力波動，文中所指為瞬間操作壓力。 液槽之操作壓力有利地係高於大氣壓力之至少1巴，較 佳為高於氣態附帶產物之產品壓力之至少1巴，其中在該 產品壓力下，該附帶產物係被排出至一應用或一再壓縮單 元中。液槽之操作壓力係（例如）2至36巴，較佳為5至16 巴。超大氣壓力可藉由任何已知方法，例如藉由在對應壓 力下裝載一流體或藉由加壓汽化形成。 本發明之其他較佳實施例係詳細說明在附屬請求項5至 11中。該等特徵之更詳細說明係在同時申請之德國專利申 請案第10200705 11 84.3(申請人之内部文件號碼：P07164_ DE/AVA=EM-GTG1267a)中進行且其對應申請案亦可應用 於文中所描述之方法與對應裝置。 此外，本發明係關於根據請求項12之裝置。 本發明以及本發明之更多細節將參考圖示中概略顯示之 示範實施例而更詳細地描述於下文中》 【實施方式】 示範實施例之蒸餾塔系統具有單塔12及純氧塔38 ^ (本 發明同樣可應用於無純氧塔之類似方法中）。大氣1係經由 過遽器2藉由空氣壓縮器吸入並被壓縮至6至2〇巴，較佳為 約9巴之絕對壓力。在流經後冷却器4和脫水器5之後，壓 縮空氣6在淨化裝置7中淨化，該淨化裝置7具有一對充滿 135381.doc 200938792 吸附材料，較佳為分子筛之容器。淨化空氣8係在主熱交 換器9中冷却至約露點並部分被液化。冷空氣1〇之第一部 分11係經由節流閥51引入單塔12中。較佳係將該冷空氣餵 入底層上方之一些實際或理論板中。 單塔12(頂端）之操作壓力係6至2〇巴，較佳為約9巴。其 頂端冷凝器係藉由第二殘餘餾分18和第一殘餘餾分14冷 却。第一殘餘餾分14係由單塔12之底部移除，第二殘餘餾 分18係由空氣進給上方之一些實際或理論板之中間點或與 其相同高度處移除。 作為單塔12之主要產品，氣態氮15、16係由頂端移除， 在主熱交換器9中加溫至近似環境溫度並最後以加壓氣體 產物（PGAN)形式經由管線17移除。頂端冷凝器13之冷凝 物52之一部分53可以產物液態氮（pLIN)形式獲得；殘餘物 54係用作至單塔頂端之回流。 第二殘餘餾分18係在頂端冷凝器13中2至9巴，較佳為約 4巴之壓力下汽化，並在氣體狀態下經由管線29流入製冷 壓縮器30中，其中其係經再壓縮至近似單塔之操作壓力。 再壓縮殘餘館分31係在主熱交換器9中冷却回塔溫並最後 經由管線32餵回至單塔12底部。 第一殘餘餾分14係在頂端冷凝器13中2至9巴，較佳為約 4巴之壓力下汽化，並在氣體狀態下經由管線19流入主熱 交換器9之冷端。在中等溫度下再度收回（管線20)第一殘餘 館分之第一部分2〇。第二部分係保留在主熱交換器9十， 經再次加溫至近似環境溫度並經由管線60以氣體不純氧氣 135381.doc •10- 200938792 產品（GOX-lmp.)形式離開設備》第一殘餘餾分之第一部分 20係膨脹至高於大氣壓力約300毫巴以便在膨脹機21中產 生功，其中該膨脹機在實例中係被構造成渦輪膨脹機。膨 脹機係以機械方式耦接至製冷壓縮器3〇及制動器具22中， 在示範實施例中，該制動器具係由油壓制動器所形成。已 膨脹第一殘餘餾分23係在主熱交換器9中加溫至近似環境 溫度。將溫的第一殘餘餾分24吹入大氣（管線25)中及/或在 淨化裝置7中用作再生氣體26、27，若需要在加熱器28中 © 加熱之後進行。或者，或另外，不純氧氣產品可由已再壓 縮第二殘餘餾分31分支出來並在主熱交換器9中加溫至近 似環境溫度。 大體上不含低揮發性不純物之含氧氣流36係以液體狀態 由單塔12之中間點移除，該中間點係經配置在空氣進給上 方之5至25理論或實際板上。若需要，將含氧氣流％在純 氧塔38之底部蒸發器37中低溫冷却並經由管線39及節流閥 ❹ 40施加於純氧塔38之頂端。純氧塔38(頂端）之操作壓力係 1.3至4巴，較佳為約25巴。 純氧塔38之底部蒸發器37係另外藉由已冷却進料空氣ι〇 •之第二部分42冷却。在此情况下，進料空氣流42至少部 分，例如全部冷凝並經由管線43流至單塔12中其中其大 致係由剩餘進料空氣1丨之進給之高度處引入。 純氧產品流41係以液體狀態自純氧塔38之底部收回，藉 由泵55處於2至1〇〇巴，較佳為約12巴之高壓，經由管線託 通至主熱交換器9之冷端，在高壓下汽化且加溫至約環境 135381.doc 200938792 溫度並最後經由管線57以氣體產物（GOX-IC)形式獲得。 將純氧塔38之塔頂氣58混入已膨脹第一殘餘餾分23。若 需要，一部分進料空氣經由旁通管線59穿過其進口以泵送 保護製冷壓縮器30(抗喘振控制）。
若需要’液態氧可以液體產物形式由泵55之設備上游及/ 或下游收回（圖式中無顯示）。此外，外部液體，例如源自 液槽之液態氣、液態氮或液態氧可在主熱交換器9中與進 料空氣間接熱交換而汽化（圖式中無顯示）Q 液槽70係充滿有時以"流體"形式源自一槽之液態氬，，。 在約12巴（該液槽之操作壓力）下引入該流體。液態流體係 在約12巴下經由管線71連續收回，在主熱交換器9中此壓 力下汽化及加溫且最後以氣態附帶產物形式經由管線72與 73移除。 另外’液體加壓流體之另一氣流74可由液槽70收回，在 ?泰發器7 5中；K化’其中該蒸發器7 5係藉由外部加熱載截 (例如’大氣或水）方式受熱並經由管線76添加至氣態附帶 產物中。然而’萬一喪失主熱交換器9，蒸發器75亦可用 於緊急供應。流量係藉由閥77與78設定。 根據本發明方法及對應裝置可尤其有利地用於半導體工 業或在不僅需要氮氣而且需要不純氧氣且若需要以純氧作 為產品之熱解矽酸製造中。 【圖式簡單說明】 圖1顯示本發明之示範實施例之蒸館塔系統。 【主要元件符號說明】 135381.doc 12 200938792 Ο ❹ 1 大氣 2 過濾器 4 後冷却器 5 脫水器 6 壓縮空氣 7 淨化裝置 8 進料空氣 9 主熱交換器 10 冷空氣 11 第一部分 12 單塔 13 頂端冷凝器 14 第一殘餘餾分 15 氣態氮 16 氣態氮 17 管線 18 第二殘餘餾分 19 第一殘餘餾分 20 第一殘餘餾分 21 膨脹機 22 制動器具 23 已膨脹之第一殘餘餾分 24 第一殘餘餾分 25 管線 135381.doc -13 200938792 參 26 再生氣體 27 再生氣體 28 加熱器 29 管線 30 製冷壓縮器 31 已再壓縮殘餘餾分 32 管線 36 含氧氣流 37 蒸發器 38 純氧塔 39 管線 40 節流閥 41 純乳產品流 42 第二部分 43 管線 51 節流閥 52 冷凝物 53 一部分 54 殘餘物 55 泵 56 管線 57 氣體產物 58 塔頂氣 59 旁通管線 135381.doc -14· 200938792 60 氣體不純氧氣產品 70 液槽 71 管線 72 管線 73 管線 74 氣流 75 蒸發器 76 管線 77 閥 78 閥 Ο 135381.doc -15-

Claims (1)

  1. 200938792 十、申請專利範園： 1. 一種低溫空氣分餾之方法，其中 -進料空氣（8)係在一主熱交換器（9)中冷却並引入一用 於氮·氧分離（11、43)之蒸館塔系統中，該系統具有至 少一用於獲得氮氣之單塔（12)， _至少一富氮或富氧產品流（15、16、17; 53 ; 51、56、 57 ; 19、60)係由用於氮·氧分離之該蒸餾塔系統收回 並在該主熱交換器（9)中加溫， i -該單塔（12)具有一頂端冷凝器（13),其中源自該單塔 之該上部區域之蒸汽至少部分冷凝， •第一殘餘餾分（14、19)係以液體狀態由該單塔（12)之 下部區域收回並至少部分地在該頂端冷凝器（13)中汽 化， •該第一殘餘餾分（19)之至少第一部分（2〇)係在膨脹機 (21)中該頂端冷凝器〇3)下游膨脹以產生功，且其中 | _第二殘餘餾分（18、29)係由該單塔（12)之該下部或中 間區域收回、再壓縮（30)且隨後將至少一第一部分轉 回（32)至該單塔（12)， 其特徵為： _源自一外源之流體至少有時流入-液槽（70)，及 -流體㈤至少有時係以液體狀態由該液槽（7〇)收回， 在該主熱交換器⑼中汽化且以氣態附帶產物（72、73) 升y式獲得’其中源自該外源之該流體或該氣態附帶產 物（73)旮不與源自該蒸餾塔系統之產品混合。 135381.doc 200938792 · f 2.如請求们之方法’其特徵為在液槽⑽與主熱交換器 (9)之間該流體（71)之壓力無增加。 3·如請求項！或2之方法，其特徵為該流體⑺）係在不高於 ㈣槽之㈣㈣力之心下^人該域交換9 中。 4. 5. ❹ 6. 如請求項1、2或3之方法，其特徵為該液槽（7〇)之該操作 麼力係高於大氣展力至少1巴。 如請求項!至4中任一項之方法’其特徵為該第二殘餘館 分（18、29)係藉由一製冷壓縮器（3〇)再壓縮。 如明求項1至5中任一項之方法，其特徵為以該作功膨脹 (21)所產生之機械能量至少部分用於再麼縮㈣該第二 殘餘餾分。 如請求項1至6中任-項之方法，其特徵為該第一殘餘德 分（19)之第二部分未在該頂端冷凝器⑼下游被引入該 膨脹機（21)中，而係以氣體不純氧氣產品⑽形式移 φ 除’及/或該第二殘餘館分之第二部分係在該再壓縮(30) 下游以氣體不純氧氣產品（16〇)形式移除。 8.如請求項1至7中任一項之方法，其特徵為 -一含氧蒸汽（36)係由該單塔（12) 一巾間點處收回並轉 (39)至一純氧塔（38)中，及 -一純氧產品流（41)係以液體狀態由該純氧塔（38)之該 下部區域收回， -該純氧產品流（41、56)(若適當，在壓力升高（55)後）係 以液體狀態在該主熱交換器（9)中相對進料空氣（8)被 135381.doc 200938792 .， 汽化及加溫， -及最後以氣體產物（57)形式獲得。 9.如請求項⑴中任一項之方法’其特徵為該第一殘餘顧 分（14)係在該單塔（12)之該底部移除。 1 10.如請求们至9中卜項之方法’其特徵為該第二殘餘餾 分（18)係自該單塔（12)之中間點移除，其巾該巾間點係 經配置在該底部上方，尤其係在收回該第一殘餘餾分 〇4)之該點上方。 ❿ u·如請求項1至10中任一項之方法，其特徵為該主熱交換 器（9)和該頂端冷凝器（13)係藉由彼此分離之裝置形成。 12. —種低溫空氣分餾之裝置，其具有 -用於氮-氧分離之蒸餾塔系統，其具有至少一用於獲得 氮氣之單塔（12)， -用於冷却進料空氣（8)之主熱交換器（9)， -用於將已冷却的進料空氣引入用於氮_氧分離之蒸餾塔 @ 系統内之進料空氣線（11 ,43)， -將源自用於氮-氧分離之該蒸餾塔系統之富氮或富氧產 品流（15、16、17 ; 53 ; 51、56、57 ; 19、60)餵入該 主熱交換器（9)之構件， -用於至少部分冷凝源自該單塔之該上部區域之蒸汽之 頂端冷凝器U3)， -將源自該單塔（12)之該下部區域之第一液髏殘餘餾分 (14、19)餵入該頂端冷凝器（13)之構件， -用於該第一殘餘餾分〇 9)之至少第一部分（2〇)在該頂 135381.doc 200938792 端冷凝器（13)下游作功膨脹之膨脹機（21)， -用於再壓縮源自該單塔（12)之下部或中間區域之第二 殘餘餾分（18、29)之再壓縮器（30)， •及具有用於將該已再壓縮的第二殘餘餾分之至少第一 部分引入該單塔（12)内之構件。 其特徵為： -用於儲存源自一外源之流體之液槽，及 -用於至少有時由該液槽（70)以液體狀態收回流體 (71)、在該主熱交換器（9)中汽化該流體並以氣態附帶 產物（72、73)形式獲得該流體之構件， -其中該裝置不具有用於混合源自該外源或該氣態附帶 產物（72、73)之該流體與源自該蒸餾塔系統之產物之 器具。 135381.doc
TW097141104A 2007-10-25 2008-10-24 Process for low temperature air fractionation TW200938792A (en)

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