200937492 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種主要是產業用的紫外線照射裝 置’特別是有關於一種使用介電質屏蔽放電準分子燈等的 裝置。 【先前技術】 Φ 使用於上述產業用的紫外線照射裝置光源之一有例如 專利文獻1所記載的具有172nm發光波長的氙氣準分子 燈’為液晶面板用基板的乾洗淨等所經常使用。準分子燈 係經常使用雙重燈管構造的燈，發光部沿轴方向延伸成管 狀。在基板洗淨時’被照射對象物的基板係以既定的速度 在輸送器上移動’至少在基板的稍微上方，在與輸送器流 動方向正交的方向上設置燈。由於一 口氣照射被照射對象 物的寬度全體，同時以既定的速度移動基板，所以可對基 〇 板全體作均一的處理。 另一方面，在半導體處理的領域中，在各製程中，也 多半使用紫外光進行半導體晶圓表面的加工、改質等。因 此’配合各工程而使用波長172nm的氣氣準分子發光、波 長22 2nm的氪與氣的準分子發光、或者是水銀共鳴線的 254nm等的紫外光。 在如此的紫外光燈中，放電方式經常使用介電質屏蔽 放電，在專利文獻2中，記載著介電質屏蔽放電的紫外線 照射裝置。在專利文獻2中，為了減低介電質屏蔽放電所 5 2258-l〇21l-PF;Chentf 200937492 引起的電磁雜訊電波，並提高安全性，在燈殼内設置升壓 元件，另一方面將商用頻率轉換成高頻的頻率轉換器係收 納於其他的殼體中。 專利文獻1曰本專利第3170952號公報 專利文獻2日本專利第2775698號公報 【發明内容】 發明所欲解決的問題 ❹ 上述專利文獻2的介電質屏蔽放電燈裝置基本上具有 降低介電質屏蔽放電所引起的電磁雜訊電波的效果。但根 據申請人進行的更詳細的實驗，確認了產生由以上述專利 文獻2的方法所無法解決的問題。 在1知的雙重管方式的燈中，其將内側電極形成於内 側管的内側表面，將外部電極形成於外側管的外側表面。 當在雙方的電極間施加數kv的高頻電壓時，在内側管與外 ❹侧管之間的放電空間襄產生介電質屏蔽放電。由於在電極 間施加數kV的高電壓，因此每次在兩電極間極性反轉時會 產生的激烈的電磁雜訊。 介電質屏蔽放電，當施加電壓時的電壓起升速度越 快’發光效率越好。因此，為了進行快速起升的矩形波驅 動，使FET #的切才奐元件將直流電壓轉換成交流矩形 波，而將驅動電壓施加於燈上。 但疋，根據申請人的詳細的實驗，瞭解了燈點亮時發 生數個重要問題。藉由使電壓快速起升，在該瞬間，放電 2258-10211-PF;Chentf 6 200937492 係瞬間且短時間連續產生，並且電虔變化越大，隨著產生 的放電的電磁雜訊也越大。 根據實驗，切換電路與燈的距離偏離時，會有無法得 到高發光效率裝置的問題此乃推測為當被加上中途的'導電 線、框體及規線的外覆材、與接地電位之間的容量成分的 影響時’最終施加於燈的電壓波形會產生變化。除此之外 還有下述問題。藉由交流矩形波電壓流過導電線，電磁雜 ❹訊電波通過導電線而放射至外部，會妨礙對框體内部的控 制電路。而且，電磁雜訊電波通過電源線而傳遞至商用線 路。 、 在上述雙重管燈中，内側電極位於外側電極之内，由 於外側電極為-般的接地電位，在放電部分 訊電波也容易被遮蔽。另一方面，在準分子燈中也有電= 式燈，在該單管燈中，沿著燈管的轴方向，在燈管的外面 形成帶狀的-對電極，在電極之間施加高電壓。然而，在 e 單管燈中，由於兩電極都形成於外面，在放電部分產生的 電磁雜訊電波無法被遮蔽而放射至周邊空間。因此，在介 電質屏蔽放電燈中（特別是單管式燈），必須要有應付電磁 雜訊的對策。 解決問題的手段 本發明的紫外線照射裝置，對被照射物照射紫外線， 包括：放電燈，由介電質屏蔽放電而放射準分子光之紫外 線；燈殼’收納放電燈，並具有供紫外線穿透至外部的窗 部；以及電源’點亮放電燈’其中在燈殼内或燈殼附近， 2258-10211-PF;Chentf 7 200937492 設有將成為電源的一部份的直流電壓轉換成高頻率的切換 元件’以及將成為電源的一部份的低電壓升高至高電壓的 升壓機構。例如，在上述燈殼之外，設置低頻率低壓交流 電源或低麼直流電源。 於此’設置於燈殼的附近表示實質上與設置於燈殼内 部得到同等效果之位置，例如為僅容納放電燈的燈殼與容 納切換元件、升壓元件的框體鄰接設置的構造。又，也包 含在燈殼内設置隔板，分別容納於獨自的殼體的構造。 放電燈，例如在單管的軸的兩側設置帶狀的電極，而 對電極對施加略呈矩形波的交流電壓。與雙管式的放電燈 相比，容易放射至外部的電磁雜訊也確實由上述構造而被 屏蔽。將燈殼連接至低壓直流電源時，升壓機構由例如變 壓器所構成。又，在低頻交流電源時，升壓機構由例如科 克羅夫特電路所構成。 發明的效果 © 根據本發明，即使由略呈矩形波的高頻波、高電壓而 點亮放電燈，也可確實防止電磁雜訊的產生，而實現可靠 度高的紫外線照射裝置。又由於施加電壓夠高，可實現放 射照度高的紫外線照射裝置。特別是，由於即使在單管的 放電燈中也可以防止雜訊發生，因此可提供比較小型的廉 價的紫外線照射裝置。 【實施方式】 以下，參照圖式說明本發明的實施形態。 2258-l〇2H-pF;Chentf 8 200937492 第1圖為第一實施形態的紫外線照射裝置的示意圖。 紫外線照射裝置具有由金屬製框體所構成的燈殼1〇。 在燈殼10的内部’設有放電燈12。放電燈12為合成石英 製的介電質屏蔽放電燈’形成雙重圓筒形的構造。即，構 成介電質屏蔽的内側管與外側管（未圖示）係同軸配置，中 空圓筒狀的放電空間形成於其間。 在外側管的外面，設有透光的導電性網的電極（未圖 示），在内侧管的内侧設有薄膜電極（未圖示）。在放電空間 中封入稀有氣體的單體或稀有氣體與鹵素氣體的混合氣 體。做為燈殼10的一部份的照射窗14係由石英板構成， 設於與放電燈12相向的位置上。 在燈殼10的外部，配置有具備電源控制電路的低壓直 流電源20。另一方面，在燈殼内部，設有放電燈12之 同時也設有由FET等所構成的切換電路16與升壓變壓器 18。低壓直流電源20係經由纜線22而與燈殼1 〇内的切換 φ 電路16連接，藉此電源供電。 切換電路1 6係將低壓直流電源2 0所供給的低麗直流 電壓的波形轉換成高頻的交流矩形波。例如，切換電路i 6 包括4個切換元件所構成的全橋式轉換器（fuU bridge circuit)以及由2個切換元件所構成的推挽式轉換器 (push pul 1 circuit)。而且，也可以組合一個切換元件與 升壓變壓器而構成馳返式換流器（flyback inverter)。 升壓變壓器18係將經由纜線17從切換電路16輸送的 父流矩形波電壓升壓至數kv。然後，升壓後的高頻電壓經 2258-10211-PF;Chentf 9 200937492 由纜線15施加於放電燈12。在放電燈12 _，由介電質屏 蔽放電而產生準分子光，由此，紫外線通過照射窗14而放 射至外部。 由於在放電燈12中施加電壓時的電壓變化越大發光 效率越好，切換電路丨6將直流電壓盡可能地轉換成起升速 度快或電壓變化大的矩形波交流電壓。結果，雖然在施加 電壓時產生激烈的電磁雜訊電波，由於做為電源機構的一 ❹部份的切換電路16、升壓變壓器18設置於燈殼1〇内部， 搭載於升壓變壓器18、缓線15等的電磁雜訊電波被屏蔽， 而可防止放射、傳遞至燈殼外部。 又’由於切換電路16設於燈殼10内部，交流矩形波 電壓不會流過位於燈殼1〇外部的纜線22。因此，電磁雜 訊不會搭載於導電線上而漏出’可防止通過電源線而傳遞 至商用線路。而且，由於切換電路16與放電燈12的距離 近，朝放電燈12施加的電壓波形穩定，發光效率提升。 〇 而且也可構成為，在低壓直流電源20内部設有控制切 換電路16的控制電路，藉由將控制訊號發送至切換電路 16而進行調光控制。藉由提高頻率，可實現進一步的高頻 驅動而得到高照度。 接著，使用第2圖說明第二實施形態的紫外線照射裝 置。在第二實施形態中，設置交流電源之同時，設置單管 式的放電燈。除了此特徵以外的構造，實質上與第一實施 形態相同。 第2圖為第二實施形態的紫外線照射裝置的示意圖。 2258-10211-pF;chentf 10 200937492 紫外線照射裝置具有燈殼3〇，在燈殼3〇的内部設有 放電燈32、科克羅夫特電路36、以及切換電路^。在燈 殼30的外部設有低壓交流電源4〇，經由纜線42而連接於 科克羅夫特電路36 » 放電燈32為產生介電質屏蔽放電的單管式燈，其於石 英製的燈容器外面，沿著容器的轴方向形成帶狀的一對電 極（未圖示）。科克羅夫特電路36係由二極體與電容器構 ⑮成，其具有升壓機構及整流電路的功能。切換電路38具有 控制電路3 9，由控制電路3 9調整矩形波。 由低壓交流電源40經由纜線42將商用電力供給至燈 殼30的科克羅夫特電路36。科克羅夫特電路36係將交流 電壓轉換成直流的高電壓，經由纜線3 7輸送至切換電路 38。切換電路38係將直流高電壓轉換成交流矩形波的高頻 電壓。當急速起升並波形未崩潰的矩形波電壓經由纜線35 施加於放電燈32的電極時，紫外光通過照射窗34而放射 ❿ 至外部。而且’切換電路38串聯複數個FET，藉由同時進 行ON-OFF而可實現耐高電壓的動作。 即使在第一實施形態中，由於施加高頻的矩形波電壓 於燈32，放電區域變多，而實現放射輸出大的穩定的點燈 動作’而可進行發光效率佳的紫外線照射。又，即使在單 管的放電燈32中’也可以與第一實施形態同樣地屏蔽電磁 雜訊，可防止雜訊電波朝燈殼外部放射。 在第一、第二實施形態中，雖然低壓的直流或交流電 源設置於燈殼外部，不過將低壓電源配置於燈殼内部亦 2258-10211-PF;Chentf 11 200937492 可。又，放電燈與切換電路及升壓變壓器等的電路機構之 間作分隔，將該等電路機構收納於別的殼體中，與放電燈 接近排列亦可。又，容納升壓變壓器等的電路機構的框體 設置於僅容納放電燈的燈殼附近，用較短的缆線連接亦可。 不將商用電源的頻率不變只進行升壓，將低頻交流電 麗供給至燈殼内亦可。此時’在燈殼内，由全波整流電路 轉換成直流電壓，由切換電路轉換成高頻的矩形波電壓 後’藉由升壓機構升壓亦可。 介電質屏蔽放電燈的種類並不限於第一、第二實施形 態’例如也可以是封入氙氣與氣氣的混合氣體而放出3〇8nmBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet ray irradiation apparatus which is mainly used in the industry, and particularly relates to a device using a dielectric shield discharge excimer lamp or the like. [Prior Art] Φ One of the light sources of the ultraviolet irradiation device used in the above-mentioned industrial use is, for example, a xenon excimer lamp having an emission wavelength of 172 nm described in Patent Document 1, which is used for dry cleaning of a substrate for a liquid crystal panel. The excimer lamp system often uses a lamp having a double lamp structure, and the light-emitting portion extends in a tubular shape in the axial direction. When the substrate is cleaned, the substrate of the object to be irradiated moves on the conveyor at a predetermined speed. At least slightly above the substrate, the lamp is placed in a direction orthogonal to the direction in which the conveyor flows. Since the entire width of the object to be irradiated is irradiated with one breath, and the substrate is moved at a predetermined speed, the entire substrate can be uniformly processed. On the other hand, in the field of semiconductor processing, processing and modification of the surface of a semiconductor wafer are often performed using ultraviolet light in each process. Therefore, the gas-excimer excimer emission having a wavelength of 172 nm, the excimer light emission of krypton gas having a wavelength of 22 nm, or the ultraviolet light of 254 nm such as a mercury resonance line is used in combination with each project. In such an ultraviolet lamp, a dielectric shielding discharge is often used for the discharge method, and Patent Document 2 describes an ultraviolet irradiation device for dielectric barrier discharge. In Patent Document 2, in order to reduce the electromagnetic noise wave caused by the dielectric shield discharge 5 2258-l〇21l-PF; and the Chent 200937492, and to improve safety, a boosting element is provided in the lamp housing, and on the other hand, A frequency converter that converts a commercial frequency into a high frequency is housed in another housing. [Patent Document 1] Patent No. 3,170,952, Patent Document 2, Japanese Patent No. 2775698, SUMMARY OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION The dielectric shield discharge lamp device of Patent Document 2 basically has a dielectric barrier reduction. The effect of electromagnetic noise waves caused by discharge. However, according to a more detailed experiment conducted by the applicant, it was confirmed that the problem which could not be solved by the method of the above Patent Document 2 was generated. In the known double tube type lamp, the inner electrode is formed on the inner side surface of the inner tube, and the outer electrode is formed on the outer side surface of the outer tube. When a high-frequency voltage of several kv is applied between the electrodes of the both sides, a dielectric shield discharge is generated in the discharge space between the inner tube and the outer side tube. Since a high voltage of several kV is applied between the electrodes, intense electromagnetic noise is generated each time the polarity is reversed between the electrodes. The dielectric barrier discharge, the faster the voltage rises when a voltage is applied, the better the luminous efficiency. Therefore, in order to perform a fast-rising rectangular wave drive, the FET #'s switching element converts the DC voltage into an AC rectangular wave, and applies a driving voltage to the lamp. However, according to the applicant's detailed experiments, it is known that several important problems occur when the lamp is lit. By rapidly raising the voltage, at this instant, the discharge 2258-10211-PF; Chentf 6 200937492 is continuously generated in an instant and for a short time, and the electric enthalpy change is larger, and the electromagnetic noise accompanying the generated discharge is also larger. According to the experiment, when the distance between the switching circuit and the lamp is deviated, there is a problem that a high luminous efficiency device cannot be obtained. This is presumed to be the addition of the conductive material, the frame and the outer covering of the frame, and the ground potential. When the influence of the capacity component is between, the voltage waveform finally applied to the lamp changes. In addition to the above, there are the following problems. By the AC rectangular wave voltage flowing through the conductive line, the electromagnetic noise wave is radiated to the outside through the conductive wire, which hinders the control circuit inside the frame. Moreover, electromagnetic noise waves are transmitted to the commercial line through the power line. In the double tube lamp, the inner electrode is located inside the outer electrode, and the outer electrode has a ground potential of a general level, and the electric wave is easily blocked in the discharge portion. On the other hand, there is also an electric lamp in the excimer lamp, in which a strip-shaped electrode is formed on the outer surface of the tube along the axial direction of the tube, and a high voltage is applied between the electrodes. . However, in the e single tube lamp, since both electrodes are formed outside, electromagnetic noise waves generated in the discharge portion cannot be shielded and radiated to the surrounding space. Therefore, in dielectric shielded discharge lamps (especially single-tube lamps), countermeasures against electromagnetic noise must be available. Means for Solving the Problem An ultraviolet ray irradiation apparatus according to the present invention emits ultraviolet ray to an object to be irradiated, and includes a discharge lamp that emits ultraviolet rays of excimer light by a dielectric shield discharge, and a lamp housing that houses a discharge lamp and has ultraviolet light penetration. Window to the outside; and power supply 'lighting discharge lamp' in the lamp housing or near the lamp housing, 2258-10211-PF; Chentf 7 200937492 is equipped with a DC voltage that will become part of the power supply to convert to high frequency The switching element 'and the boosting mechanism that raises the low voltage that is part of the power supply to a high voltage. For example, in addition to the above lamp housing, a low frequency low voltage AC power source or a low DC power source is provided. Here, the vicinity of the lamp housing indicates a position substantially equivalent to that provided inside the lamp housing, and for example, a structure in which only the lamp housing accommodating the discharge lamp is adjacent to the housing that accommodates the switching element and the boosting element. Further, it also includes a structure in which a partition plate is provided in the lamp housing and is housed in a separate casing. For the discharge lamp, for example, a strip-shaped electrode is provided on both sides of the shaft of the single tube, and an alternating voltage of a slightly rectangular wave is applied to the pair of electrodes. Electromagnetic noise that is easily radiated to the outside is indeed shielded by the above configuration as compared with the double-tube type discharge lamp. When the lamp housing is connected to a low voltage DC power source, the boosting mechanism is constituted by, for example, a transformer. Further, in the case of a low frequency AC power supply, the boosting mechanism is constituted by, for example, a Crocroft circuit. According to the present invention, even if the discharge lamp is lit by a high-frequency wave having a substantially rectangular wave or a high voltage, the generation of electromagnetic noise can be surely prevented, and a highly reliable ultraviolet irradiation device can be realized. Further, since the applied voltage is high enough, an ultraviolet ray irradiation apparatus having a high illuminance can be realized. In particular, since noise can be prevented even in a single-tube discharge lamp, a relatively inexpensive and inexpensive ultraviolet irradiation device can be provided. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. 2258-l〇2H-pF; Chentf 8 200937492 Fig. 1 is a schematic view of the ultraviolet irradiation device of the first embodiment. The ultraviolet irradiation device has a lamp housing 1A made of a metal frame. A discharge lamp 12 is provided inside the lamp housing 10. The discharge lamp 12 is a dielectric-shielded discharge lamp made of synthetic quartz, which has a double cylindrical structure. That is, the inner tube constituting the dielectric shield is disposed coaxially with the outer tube (not shown), and a hollow cylindrical discharge space is formed therebetween. An electrode (not shown) having a light-transmitting conductive mesh is provided on the outer surface of the outer tube, and a thin film electrode (not shown) is provided inside the inner tube. A monomer of a rare gas or a mixed gas of a rare gas and a halogen gas is sealed in the discharge space. The illumination window 14 as a part of the lamp housing 10 is composed of a quartz plate and is disposed at a position facing the discharge lamp 12. A low-voltage DC power supply 20 including a power supply control circuit is disposed outside the lamp housing 10. On the other hand, the discharge lamp 12 is provided inside the lamp housing, and a switching circuit 16 composed of an FET or the like and a step-up transformer 18 are also provided. The low-voltage DC power source 20 is connected to the switching φ circuit 16 in the lamp housing 1 via the cable 22, thereby supplying power from the power source. The switching circuit 16 converts the waveform of the low DC voltage supplied from the low-voltage DC power supply 20 into a high-frequency AC rectangular wave. For example, the switching circuit i 6 includes a full-bridge converter (fuU bridge circuit) composed of four switching elements and a push pul 1 circuit composed of two switching elements. Moreover, it is also possible to combine a switching element and a step-up transformer to form a flyback inverter. The step-up transformer 18 boosts the parent-receiving rectangular wave voltage delivered from the switching circuit 16 via the cable 17 to a number kv. Then, the boosted high frequency voltage is applied to the discharge lamp 12 via the cable 15 via 2258-10211-PF; Chentf 9 200937492. In the discharge lamp 12_, excimer light is generated by the dielectric shielding discharge, whereby the ultraviolet rays are radiated to the outside through the irradiation window 14. Since the voltage change when the voltage is applied to the discharge lamp 12 is larger, the switching efficiency is better, and the switching circuit 丨6 converts the DC voltage as much as possible into a rectangular wave AC voltage having a fast rising speed or a large voltage variation. As a result, although a strong electromagnetic noise wave is generated when a voltage is applied, the switching circuit 16 and the step-up transformer 18, which are a part of the power supply mechanism, are disposed inside the lamp housing 1 and are mounted on the step-up transformer 18, which is slowed down. Electromagnetic noise waves such as line 15 are shielded to prevent radiation from being transmitted to the outside of the lamp envelope. Further, since the switching circuit 16 is provided inside the lamp housing 10, the AC rectangular wave voltage does not flow through the cable 22 located outside the lamp housing 1〇. Therefore, electromagnetic noise is not carried on the conductive line and leaks out to prevent transmission to the commercial line through the power line. Further, since the distance between the switching circuit 16 and the discharge lamp 12 is short, the voltage waveform applied to the discharge lamp 12 is stabilized, and the luminous efficiency is improved. Further, a control circuit for controlling the switching circuit 16 may be provided inside the low-voltage DC power supply 20, and the dimming control may be performed by transmitting a control signal to the switching circuit 16. By increasing the frequency, further high frequency driving can be achieved to obtain high illumination. Next, the ultraviolet irradiation apparatus of the second embodiment will be described using Fig. 2 . In the second embodiment, a single-tube type discharge lamp is provided while an AC power source is provided. The configuration other than this feature is substantially the same as the first embodiment. Fig. 2 is a schematic view showing an ultraviolet irradiation apparatus according to a second embodiment. 2258-10211-pF;chentf 10 200937492 The ultraviolet irradiation device has a lamp housing 3〇, and a discharge lamp 32, a Crocroft circuit 36, and a switching circuit are provided inside the lamp housing 3〇. A low-voltage AC power supply 4 is provided outside the lamp housing 30, and is connected to the Cockcroft circuit 36 via the cable 42. The discharge lamp 32 is a single-tube lamp that generates a dielectric shield discharge, which is made of quartz. On the outside of the lamp vessel, a pair of strip-shaped electrodes (not shown) are formed along the axial direction of the container. The Cockcroft circuit 36 is composed of a diode and a capacitor structure, and has a function of a boosting mechanism and a rectifying circuit. The switching circuit 38 has a control circuit 39, and the rectangular circuit is adjusted by the control circuit 39. Commercial power is supplied to the Cockcroft circuit 36 of the lamp housing 30 via the cable 42 by the low voltage AC power source 40. The Cockcroft circuit 36 converts the AC voltage into a high voltage of DC and delivers it to the switching circuit 38 via the cable 37. The switching circuit 38 converts the DC high voltage into a high frequency voltage of an AC rectangular wave. When a rectangular wave voltage which is rapidly lifted and the waveform is not collapsed is applied to the electrode of the discharge lamp 32 via the cable 35, the ultraviolet light is radiated to the outside through the irradiation window 34. Further, the switching circuit 38 is connected in series with a plurality of FETs, and the high voltage resistance operation can be realized by simultaneously performing ON-OFF. In the first embodiment, since a high-frequency rectangular wave voltage is applied to the lamp 32, the discharge area is increased, and a stable lighting operation with a large radiation output is realized, and ultraviolet light having excellent luminous efficiency can be performed. Further, even in the single-discharge lamp lamp 32, electromagnetic noise can be shielded in the same manner as in the first embodiment, and noise waves can be prevented from being radiated to the outside of the lamp envelope. In the first and second embodiments, although a low-voltage DC or AC power source is provided outside the lamp housing, the low-voltage power source is disposed inside the lamp housing 2258-10211-PF; Chentf 11 200937492. Further, the discharge lamp is separated from the circuit means such as the switching circuit and the step-up transformer, and the circuit means is housed in another casing and arranged in close proximity to the discharge lamp. Further, the casing for accommodating the circuit mechanism such as the step-up transformer may be provided in the vicinity of the lamp housing in which only the discharge lamp is housed, and may be connected by a short cable. It is also possible to supply the low-frequency AC power to the lamp housing without boosting the frequency of the commercial power supply. At this time, in the lamp housing, the full-wave rectifying circuit converts the voltage into a DC voltage, and the switching circuit converts it into a high-frequency rectangular wave voltage, which can be boosted by the boosting mechanism. The type of the dielectric barrier discharge lamp is not limited to the first and second embodiments. For example, a mixed gas of helium and gas may be enclosed to emit 3 〇 8 nm.
【圖式簡單說明】[Simple description of the map]
第1 第2 【主要元件符號說明】 12、32〜放電燈； 15、17〜纜線； 18〜升壓變壓器； 2 2〜纜線； 37〜纜線； 40〜低壓交流電源。 10、30〜燈殼； 14、34〜照射窗； 16、38〜切換電路； 20〜低壓直流電源； 36〜科克羅夫特電路； 3 9〜控制電路； 2258~1〇2H-PF；Chentf1st 2nd [Description of main component symbols] 12, 32~ discharge lamp; 15, 17~ cable; 18~ step-up transformer; 2 2~ cable; 37~ cable; 40~ low voltage AC power supply. 10, 30 ~ lamp housing; 14, 34 ~ illumination window; 16, 38 ~ switching circuit; 20 ~ low voltage DC power supply; 36 ~ Cokecroft circuit; 3 9 ~ control circuit; 2258 ~ 1 〇 2H-PF; Chentf