JP2775698B2 - Dielectric barrier discharge lamp device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to, for example,
The present invention relates to improvement of a vacuum ultraviolet light source used for surface cleaning, sterilization, and the like. In particular, a so-called dielectric barrier discharge lamp that forms excimer molecules by dielectric barrier discharge and uses light emitted from the excimer molecules was used. The present invention relates to an improvement in a dielectric barrier discharge lamp device.

[0002]

2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 2-7353, in which a discharge vessel is filled with a discharge gas for forming excimer molecules, and a dielectric material is filled. Excimer molecules are formed by barrier discharge (also known as ozonizer discharge or silent discharge; see the revised edition of the “Discharge Handbook” published by the Institute of Electrical Engineers of Japan, reprinted in June 2001, page 263), and the light emitted from the excimer molecules is extracted. A radiator, a dielectric barrier discharge lamp, is described. That is, a discharge space is formed by providing two light-transmitting dielectrics such as quartz glass plates facing each other, and the discharge space is filled with a rare gas, deuterium or a mixed gas of a rare gas and a halogen, A configuration / method is known in which an electrode is provided on a surface of the two dielectrics not facing the discharge space, and an AC voltage is applied to the electrode to generate a silent discharge in the discharge space and emit ultraviolet rays. ing. As the dielectric, sapphire, magnesium fluoride, calcium fluoride and the like are known in addition to quartz glass. Dielectric barrier discharge lamps using the above-mentioned rare gas as a discharge gas are not available in conventional low-pressure mercury discharge lamps or high-pressure arc discharge lamps, such as high-efficiency vacuum ultraviolet rays and a high degree of freedom in the shape of the discharge vessel. It is useful because it has various features. However, the dielectric barrier discharge lamp as described above has several kHz to several hundred kHz.
Since it operates at a high frequency and at a high voltage, it has problems in radiating electromagnetic noise radio waves and in safety.

[0003]

SUMMARY OF THE INVENTION An object of the present invention is to provide a dielectric barrier discharge lamp device which emits a small amount of electromagnetic noise radio waves and has high safety.

[0004]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a dielectric material.
Dielectric barrier that emits ultraviolet excimer light by barrier discharge
Lights the rear discharge lamp and this dielectric barrier discharge lamp
Barrier discharge lamp comprising a power supply
In the apparatus, a boosting member of the power supply device may be the induction device.
Housed in the same lamp house with the electrical barrier discharge lamp
And the commercial frequency of the power supply
The frequency converter that converts the frequency into
This is achieved by storing in a separate case. Ma
Further, the lamp house includes the dielectric barrier discharge lamp.
And the case containing the pressure-raising member
Including the case of connecting.

[0005]

The present inventors have conducted various studies for practical use of the dielectric barrier discharge lamp device, and as a result, have found the following with respect to electromagnetic noise radio waves of the dielectric barrier discharge lamp device. Generally, in order for an ultraviolet lamp to be used for industrial purposes, an ultraviolet output of about 1 milliwatt or more per square centimeter of lamp surface area is required.
On the other hand, in order to obtain an ultraviolet output of about 1 milliwatt or more per square centimeter of lamp surface area in a dielectric barrier discharge lamp, a high frequency of several kHz or more and several kilowatts are required.
A high voltage of V or more needs to be applied to the dielectric barrier discharge lamp. The high frequency above several kHz, several k
In addition to the high voltage of V or higher itself serving as an electromagnetic noise radio wave source, the conventional electrodeless or electroded high-frequency discharge arc lamp device, in which discharge is continuously performed in time, is a dielectric material. Since the discharge of the barrier discharge lamp is a minute intermittent discharge, the electromagnetic noise radio wave of the dielectric barrier discharge lamp device is extremely strong. Therefore, in the dielectric barrier discharge lamp device, unlike a conventional electrodeless or electroded high-frequency discharge arc lamp device, a lamp house accommodating a lamp and a power supply device are provided separately from the lamp house, and a high power supply device is provided. When a method of supplying a high frequency and a high voltage from the power supply device to the lamp using a voltage supply cable is adopted, electromagnetic noise radio waves are radiated from the high voltage supply cable. The above phenomenon is unique to a dielectric barrier discharge lamp in which discharge is performed intermittently in time.

It is possible in principle to electromagnetically shield the high-voltage power supply cable. However, since the high-voltage power supply cable supplies a high frequency and a high voltage, the distance between the shield member and the high-voltage power supply cable is sufficient to provide sufficient electrical insulation between the shield member and the high-voltage power supply cable. Therefore, there is a disadvantage that the shield member becomes very large and handling becomes inconvenient, or when the shield is performed by a small member, the shield member and the high-voltage power supply are required. The disadvantage is that the electrical insulation between the cables becomes difficult and the safety decreases, and the leakage current flows through the capacitance between the shield member and the high-voltage power supply cable, thereby reducing the efficiency of the entire power supply device. Occurs.

[0008] Ultraviolet excimer light by dielectric barrier discharge
A dielectric barrier discharge lamp that emits
Dielectric consisting of a power supply device that turns on the discharge lamp
In the body barrier discharge lamp device, the power supply device
The boosting member is the same as the dielectric barrier discharge lamp.
It is housed in the lamp house and
Of which is a frequency converter that converts commercial frequency to high frequency
Can be stored in a separate box from the lamphouse.
And electromagnetic noise radiated from the high voltage part of the booster
This prevents the frequency converter from malfunctioning.
A highly safe dielectric barrier discharge lamp device.
You.

[0010]

1 is a schematic view of a dielectric barrier discharge lamp device according to a first embodiment of the present invention. FIG. 1 shows a coaxial cylindrical dielectric barrier discharge lamp used in the dielectric barrier discharge lamp device. A schematic diagram is shown in FIG. In FIG. 2, a discharge vessel 1 is made of synthetic quartz glass having a total length of about 150 mm, and an inner tube 2 having an outer diameter D ₁ of 14 mm and a wall thickness of 1 mm, an outer tube 3 of an inner diameter D ₂ of about 24 mm and a wall thickness of 1 mm are coaxially arranged. In this arrangement, a hollow cylindrical discharge space 18 is formed. Outer tube 3
The electrode also serves as a dielectric barrier for the dielectric barrier discharge and a light extraction window member, and an electrode 4 formed of a conductive net that transmits light is provided on the outer surface thereof. On the outer surface of the inner tube 2, there is provided an aluminum thin film electrode 5 which also serves as a light reflection plate and a dielectric barrier discharge electrode. The aluminum thin film electrode 5
Was coated with boron nitride 20 to protect the aluminum thin film electrode 5 chemically and mechanically. Insulating caps 10 and 11 are provided at both ends of the discharge vessel 1. Xenon gas of 250 Torr was sealed in the discharge space 18 of the discharge vessel as a discharge gas. Surface area 1 of the dielectric barrier discharge lamp
The power supply 8 was turned on with an input power per square centimeter of 0.2 watts. As a result, ultraviolet light having a maximum value at a wavelength of 172 nm was efficiently emitted.

In FIG. 1, the dielectric barrier discharge lamp 41 described above is a lamp house 42 having an irradiation window 43.
Mounted inside. 44 is a light reflection plate. The commercial frequency voltage supplied by the power cord 45 is converted to a high frequency by the frequency converter 46 and supplied to the step-up transformer 50 as a step-up member by the high-frequency power supply cable 48. The high frequency and high voltage boosted by the step-up transformer 50 are applied to the dielectric barrier discharge lamp 41 by the high voltage power supply cable 49, and the dielectric barrier discharge lamp 41 is turned on. 47 is a power supply box. Although not shown, the atmosphere in the lamp house 42 is replaced by nitrogen gas. When oxygen is removed from the lamp house in this manner, the transmission of ultraviolet rays is improved. Since the high voltage power supply cable 49 and the step-up transformer 50 carrying the high frequency / high voltage and the high frequency electromagnetic noise generated by the dielectric barrier discharge are housed in the lamp house 42, the high frequency electromagnetic noise is shielded. Since the frequency converter 46 of the power supply device was housed in a box housing the step-up transformer 50, that is, in a power supply box 47 separate from the lamp house 42,
The frequency converter 46 does not malfunction due to the electromagnetic noise radio waves radiated from the high voltage portion of the step-up transformer 50. Therefore, the radiation of the electromagnetic noise radio waves is small,
In addition, a highly safe dielectric barrier discharge lamp device was obtained. Here, the frequency converter according to the present invention is:
Means a set of elements with that function, and surrounds the set
Does not include the housing. That is, the power supply box 47 is very
Small and almost the same size as the frequency converter 46
Even if it is placed outside the lamp house 42
means. Also, the step-up transformer 50 is a step-up to a high voltage.
Means the transformer itself that has the function of
Even if the transformer 50 is stored in any case,
Is not included in the transformer of the present invention.

FIG. 3 is a schematic view of a dielectric barrier discharge lamp device according to a second embodiment of the present invention. In this embodiment, the step-up transformer 50 is provided in the transformer storage box 2.
3 and placed in close proximity to the dielectric barrier discharge lamp 41. Transformer storage box 23 and lamp house 4
2 are connected by a flexible metal tube 21 having a diameter of 30 mm,
A high voltage power supply cable 49 covered with a 6 mm thick silicon rubber tube 22 was passed through the metal tube 21. The length of the high-voltage power supply cable 49 connecting the step-up transformer 50 and the dielectric barrier discharge lamp 41 is 40 cm. Since the step-up transformer 50 is installed in close proximity to the dielectric barrier discharge lamp 41, the high-voltage power supply cable 49 is shortened, so that electrical insulation of the high-voltage power supply cable is facilitated, and the high-voltage power supply cable is provided. Since it becomes easy to shield the cable electromagnetically, the radiation of electromagnetic noise radio waves is small, and
A highly safe dielectric barrier discharge lamp device was obtained.

[0014]

As described above, according to the present invention, it is possible to provide a dielectric barrier discharge lamp device which emits less electromagnetic noise radio waves and has high safety.

[Brief description of the drawings]

FIG. 1 is an explanatory view of an embodiment of a dielectric barrier discharge lamp device of the present invention.

FIG. 2 is an explanatory view of an embodiment of the dielectric barrier discharge lamp of the present invention.

FIG. 3 is an explanatory view of another embodiment of the dielectric barrier discharge lamp device of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 discharge vessel 2 inner tube 3 outer tube 4 conductive mesh electrode 5 conductive thin film electrode 8 power supply 10 base 11 base 18 discharge space 20 boron nitride film 21 metal tube 22 silicon rubber tube 23 transformer storage box 41 dielectric barrier discharge lamp 42 Lamp house 45 Power cord 46 Frequency converter 48 High frequency power supply cable 49 High voltage power supply cable 50 Step-up transformer

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Kunio Kasagi 1194 Sado, Bessho-cho, Himeji-shi, Hyogo Ushio Electric Co., Ltd. Examiner Hiroshi Ogawa (56) References JP-A-2-7353 (JP, A) JP-A-63-62187 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) H01J 65/00 G21K 5/00

Claims (2)

(57) [Claims] 1. An ultraviolet excimer light generated by a dielectric barrier discharge.
A dielectric barrier discharge lamp that emits
Dielectric consisting of a power supply for lighting the discharge lamp
In the body barrier discharge lamp device, the boosting member of the power supply device is the dielectric barrier discharge lamp.
It is housed in the same lamp house with the lamp
In the power supply device, a frequency for converting a commercial frequency into a high frequency
Converters are included in a separate case from the lamp house.
Dielectric barrier discharge lamp characterized by being contained
apparatus. 2. The lamp house according to claim 1 , wherein said dielectric barrier discharge is provided.
A case containing the electric lamp and the booster member
2. The case of claim 1, wherein the cases are connected.
Dielectric barrier discharge lamp device.