200935544 九、發明說明 【發明所屬之技術領域】 本發明關於用來載置薄板狀的工件而將其搬運的托盤 ’尤其是關於能積疊複數托盤而將其保管的工件搬運用托 盤。 【先前技術】 例如在薄型顯示裝置的製造步驟等，需要將代表玻璃 基板的薄板狀的物品進行搬運的技術。薄板狀的物品容易 產生扭轉或撓曲等的變形，在搬運中因爲變形而接觸到周 圍’可能讓表面受損或破損。所以爲了搬運，需要能載置 薄板狀物品而不會讓其變形的專用的容器。 藉由將薄板狀的物品一枚一枚搬運而將其載置到個別 的容器，則能防止搬運中的物品變形。可是，使用個別的 容器的話，在搬運途中要暫時進行保管的情況，會有很佔 保管空間的問題。即使在要將容器整合而移送到其他場所 的情況，也會很麻煩。 因此’硏究一種容器，可個別地載置薄板狀的物品， 並且在暫時保管或要移送到其他場所時，能將容器彼此積 疊起來。可是在這種容器，會產生在容器內積聚灰塵，當 進行積疊時會從本身產生灰塵而污染到所載置的物品這樣 的問題。而在將複數個容器積疊起來的情況，全體的重量 會變重，會有保管或搬運不方便的問題。 爲了解決這種問題，硏究出一種工件搬運用托盤（例 如參考專利文獻η ，該工件搬運用托盤，是由：以四支 -4- 200935544 框構件組成的矩形的外框、及架設在框構件之間 部所構成。 在第22圖，顯示了將這種托盤201層疊起 (以下將積疊了複數托盤2 0 1的狀態稱爲「層疊 。托盤201，主要由框部202與複數橋部204所 部202 ’具有：用來支承複數個橋部2〇4的複數 2 1 2、從支承部2 1 2朝向外側變高的傾斜部2 1 3 U 傾斜部2 1 3的上部朝外側延伸的外側平坦部2 1 1 2 0 4上面’例如載置著玻璃基板s。在外側平坦 ' 設置有複數個樹脂塊208。樹脂塊208，是以從 * 到在外側平坦部2 1 1處形成的孔部的狀態而加以 積疊的其他托盤201的樹脂塊208卡合。在複 2 〇 1積疊的狀態，各樹脂塊2 0 8支承著其本身所 盤201的重量，並且也支承著位於上側的其他托 重量。藉由將樹脂塊208的高度設定得較低，則 ❹ 托盤2 01彼此的間距。具體來說，位於上側的 2 〇 1的傾斜部2 1 3伸入到托盤2 0 1的傾斜部2 1 3 收容空間內。 [專利文獻1 ] 曰本特開2007-35761號公報 【發明內容】 [發明欲解決的課題] 在習知的托盤201，樹脂塊208配置在較橋; 的複數橋 來的構造 托盤」） 構成。框 個支承部 、以及從 。在橋部 部 2 1 1， 下方插入 固定，與 數的托盤 固定的托 盤20 1的 能縮小各 其他托盤 的內側的 204更 200935544 高的位置。於是，當起重機將層疊托盤搬出搬入時，起重 機的爪部301需要避免接觸到托盤201的外框傾斜部213 ，而要潛入到層疊托盤的下側。第22圖（a)，是顯示起 重機的叉部的爪部301伸入到層疊托盤的下方的狀態。爪 ' 部301的前端，形成有朝上側延伸的支承部301a。第22 ' 圖（b)是顯示爪部301上升而支承樹脂塊208的狀態。 在該狀態，爪部301的支承部301a支承著樹脂塊208的 0 下面部。 在以上的構造及動作，如圖所示，需要第22圖（a) 的1(框部2 02的最下面與樹脂塊208的下面的上下方向 間隔）以上的行程L。 並且，若爲了確保框部202的強度而提高傾斜部213 的話，圖中的I、Η (支承部3 01 a的高度）、L會分別變 高。也就是玻璃基板S會大型化，而上述問題會變的更明 顯。 ❹ 在兩個層疊托盤之間、或在層疊托盤與使其上下移動 的升降機之間伸入叉部3 01的情況，如果Η很大的話， 則需要確保更大的空間。 在要將層疊托盤直接放置於地面的情況，則必須要準 備用來支承樹脂塊的放置台。 本發明的課題’要提供一種工件搬運用托盤，能容易 將層疊的托盤進行搬出搬入。 [用以解決課題的手段] -6- 200935544 第1發明的工件搬運用托盤，是用於搬運薄板狀的工 件’具備有··工件載置部、矩形的框部、與支承部。工件 載置部具有用來載置工件的工件載置面。支承部，設置於 框部’用來支承工件載置部。框部，具有：其斜率是從支 承部朝外側下降’且下端部較工件載置面更低的傾斜部。 在該托盤，藉由在框部設置傾斜部，則能充分確保框 部的強度。並且，框部的傾斜部的斜率是朝下下降，傾斜 部的下端部的位置較工件載置面更低，因此當將層疊托盤 搬進搬出時’能容易地避免起重機的叉部與傾斜部的接觸 。因此，能容易將層疊托盤搬進搬出。 支承部，也可一體地形成於框部，也可是固定於框部 的其他構件。 第2發明的工件搬運用托盤，針對第1發明，又具備 有包圍構件，該包圍構件，覆蓋工件載置部的工件載置面 周圍，且具有較周圍更高的壁部。 在如習知的工件搬運用托盤，框部的傾斜部的斜率爲 朝外側向上傾斜的情況，傾斜部配置在工件載置部的周圍 ，所以不易產生工件脫離的問題。另一方面，在如第1發 明所記載的工件搬運用托盤，框部的傾斜部的斜率爲朝外 側朝下傾斜的情況，需要處理工件脫離的問題。因此，藉 由在該托盤設置包圍構件，則例如因爲裝置緊急停止而工 件移動，也可防止工件從工件搬運用托盤脫離。 第3發明的工件搬運用托盤，針對第2發明，包圍構 件，一體地形成於框部的傾斜部。 200935544 在該托盤，由於包圍構件是一體地形成於傾斜部，所 以能減少零件數量。 第4發明的工件搬運用托盤’針對第1〜3發明的其 中之一，工件載置部，具有：架設於框部’且在上面具有 ' 工件載置面的細長的複數個載置構件。支承部，具有：固 ' 定於框部且用來支承載置構件的端部的複數個支承構件。 在該托盤，複數個載置構件是藉由複數個支承構件所 0 支承，所以能將全體輕量化。 第5發明的工件搬運用托盤，針對第2或3發明，框 部，又具有：從傾斜部的下端部朝外側延伸的延伸部。托 盤，又具有：設置於延伸部，用來確保，在與其他工件搬 運用托盤重疊的狀態，避免與其他工件搬運用托盤接觸的 空間的間隔部。在傾斜部的內側，形成有：用來將下方所 積疊的其他工件搬運用托盤的包圍構件的至少其中一部分 予以收容的收容空間。 © 在該托盤，在積疊了複數的工件搬運用托盤的狀態， 隔介著間隔部而將各工件搬運用托盤保持爲互相確保有空 間的狀態。在該情況，將下方所積疊的工件搬運用托盤的 包圍構件的至少一部分，收容在：位於上方所積疊的工件 搬運用托盤的傾斜部的內側的收容空間。於是，讓積疊的 托盤之間的間距變小，而可以降低層疊托盤的高度。 [發明效果] 在本發明的工件搬運用托盤，其框部的傾斜部是朝向 -8 - 200935544 外側朝下傾斜，所以層疊托盤容易進行搬出搬入。 【實施方式】 1.第一實施方式 以下參考圖面來詳細說明適用本發明的工件搬運用托 盤的實施方式。 (π工件搬運用托盤的全體構造 第1圖是顯示本發明的工件搬運用托盤1(以下爲「 托盤1」）的一種實施方式的構造的立體圖，第2圖是托 盤1的上視圖。 托盤1是用來載置薄板狀的物品且用來搬運物品。托 盤1主要具備有：矩形的外框2、及在外框2的相對向的 長邊框構件2 a之間處架設的複數個橋部4 (工件載置部 )。而在該實施例，是用玻璃基板S來作爲薄板狀的物品 來說明。 (2)外框的構造 外框2是由：兩支長邊框構件2a與兩支短邊框構件 2b所構成。在本實施例的框構件2a、2b是使用一定厚度 的鋁擠壓構件。 第3圖及第4圖是層疊托盤1的局部立體圖，第5圖 是層疊托盤1的局部縱剖面圖。 框構件2a、2b ’由第5圖的剖面形狀可以看出，具 -9 - 200935544 備有：外側平坦部11、以及在較外側平坦部11更高的位 置形成的內側平坦部1 2，在外側平坦部1 1與內側平坦部 1 2之間設置有傾斜部1 3。內側平坦部1 2從傾斜部1 3的 上端部朝內側延伸’外側平坦部1 1從傾斜部1 3的下端部 朝外側延伸。在外側平坦部1 1，設置有複數處用來安裝 樹脂塊8 (後述）的樹脂塊安裝孔1 7。傾斜部1 3，當形 成外框2時其角度成爲朝向下方擴展的形狀。 傾斜部1 3的高度’在將框構件2a、2b彼此組合成長 方形的外框2的情況，是設定成：爲了將外框2的平面度 維持在預定量以內且保持所需要的強度的高度。因此，傾 斜部13的闻度’有時會超過爲了安全收容一枚基板S所 需要的收容高度。這裡所謂的「安全地收容」，是代表， 在將托盤積疊的狀態，玻璃基板搭載於全部或一部分的托 盤，即使全體因爲預定的移動而產生震動，玻璃基板或橋 部的上面部也不會接觸到上側的橋部。在外框2的形狀大 型化的情況’所要求的強度變大，爲了強化外框2，傾斜 部13的高度變得更高。在用小型外框2而所要求的強度 降低的情況，則可以降低傾斜部1 3。 藉由將框構件2 a、2b彼此接合，而形成本實施例的 外框2。本實施例的外框2，其剖面形狀，如上述，是以 :外側平坦部1 1、從外側平坦部1 1的內側端連續上升的 傾斜部1 3、以及從該傾斜部1 3的上端部連續的內側平坦 部12所形成。作爲所形成的外框2的單體的高度，是以 傾斜部1 3的高度所決定’而在將複數的托盤1積疊的情 "10- 200935544 況’以傾斜部1 3所包圍的部分的一部分，其功能f| 其他托盤進入的收容空間13a (第5圖），而可以f 間距積疊。 長邊框構件2a與短邊框構件2b，其兩端彼此， 12圖所示，藉由第一接合構件28與第二接合構件 接合。第一接合構件28，是L字型的板部，隔介毫 將框構件2a、2b的內側平坦部1 2彼此加以固定。澤 合構件29，是L字型的板部，隔介著鉚釘將框構件 2b的外側平坦部1 1彼此加以固定。 (3 )橋部的構造 在外框2的相對向的長邊框構件2a之間，架額 數的橋部4，構成了玻璃基板S的載置部。在橋部4 了一定厚度的鋁擠壓構件。 在外框2的長邊框構件2a，固定著用來支承槁 的複數的支承構件14。支承構件14，如第5圖所开 板構件，具有：與外框2的傾斜部13的內側相接而 沒有圖示的鉚釘所固定的固定部1 4a、以及從其上端 側延伸的支承部14b。 在第10圖顯示橋部4的其中一端部的放大圖。 4是以：作爲工件載置面的平坦部4 1、形成於其兩個 成剖面门字型的一對側壁部42、以及從各側壁部42 側延伸的一對凸緣部43所構成。藉由以上的形狀， 4，相較於使用平板構件的情況，樑強度更提升，医 Ξ爲讓 ί小的 如第 29來 F鉚釘 ;二接 2a ' 有複 使用 部4 ，是 藉由 朝內 橋部 而作 朝外 橋部 此， -11 - 200935544 在橋部4可使用厚度較薄的材料，而達成橋部4 。在平坦部41的上面部，固定著用來支承玻璃g 複數的載置銷44。載置銷44是以高耐磨損性的 (PEEK (登錄商標））、或超高分子量的聚乙稀 等所形成，即使反覆搭載玻璃基板S，也幾乎不 損造成的灰塵，不會污染玻璃基板S。在平坦部 端，在剖面门字型內配置有支承構件14的支承 兩者是藉由沒有圖示的鉚釘所固定。平坦部41 支承構件14而被支承於外框2。 在該托盤1，外框2的框構件2 a、2b的傾斜 上部與內側平坦部1 2 ’其功能是用來覆蓋橋部 部41的周圍的包圍構件。具體來說，包圍構件 部4的平坦部41更高的壁部。於是，玻璃基板 部是從外部保護。而會成爲：例如即使因爲裝置 而玻璃基板S移動，玻璃基板S從托盤1飛出、 損的情況’破片也不容易飛散到周圍的構造。 (4 )樹脂塊的構造 樹脂塊8，是安裝於框構件2a、2b的外側3 的構件，是用來確保各托盤1彼此的高度方向的 隔部’並且是用來防止各托盤1彼此的位置偏移 置限制構件。 樹脂塊8，爲了成爲與上下積疊的托盤1的 最好是以能抑制灰塵產生的材料來形成。本實施 的輕量化 塞板S的 聚醚醚酮 (UPE ) 會產生磨 41的兩 部 14b， 是隔介由 -部1 3的 4的平坦 ，爲較橋 S的外周 緊急停止 或萬一破 s坦部11 空間的間 的托盤位 接觸部， 例的樹脂 -12- 200935544 塊8，是以高耐磨損性、機械強度優異的PEEK或UP E所 形成。樹脂塊8,即使樹脂塊彼此接觸其磨損也非常少， 即使產生灰塵也不易落下，所以不容易污染搬運的玻璃基 板S。 (5)第一樹脂塊及第二樹脂塊的構造及配置 樹脂塊8，有兩種類的塊體，具有第一樹脂塊8A與 第二樹脂塊8B。下面說明各樹脂塊的構造，來說明配置 方式。 (a )共通構造 第6圖（a)是第一樹脂塊8A的上視圖，第6圖（b )是第一樹脂塊8 A的正視圖，第6圖（c )是第一樹脂塊 8A的底視圖，第6圖（d )是第一樹脂塊8 A的側視圖， 第8圖（a)是第二樹脂塊8B的正視圖，第8圖（b)是 第二樹脂塊8B的底視圖，第8圖（c )是第二樹脂塊8B 的側視圖。 一開始’針對第一樹脂塊8A與第二樹脂塊8B的共 通構造來說明。樹脂塊8A、8B，主要具有約長方體的主 體部20°主體部20，在圖左右方向較長。主體部20的高 度’形成爲：與用來安全收容一枚基板S的收容高度H1 (參考第5圖）相等。在主體部20的上面部設置有凸部 2 1。凸部2 1，形成爲約圓錐形或圓錐梯形。 在主體部20的兩側部，延伸有：當將托盤層疊、抽 -13- 200935544 出時予以支承的作爲接觸部的被支承部23 °在被支 23貫穿有用來將樹脂塊8固定在框構件2a、2b的外 裝孔24，樹脂塊8A、8B，藉由貫穿安裝孔24的螺 螺母19(第13圖）或鉚釘而固定於外框2。第3圖 4圖，是顯示將樹脂塊8A、8B藉由螺栓、螺母、或 固定於框構件2a、2b的狀態的立體圖。樹脂塊8A、 是以：被支承部23的上面部抵接於框構件2a、2b的 平坦部11的下面部，而凸部21與主體部20的上部 脂塊安裝孔1 7突出的狀態，加以固定。樹脂塊8A、 其主體部20的上面部，較框構件2a、2b的外側平 11更高。而主體部20的下面部（後述的凸部25的 部），較外側平坦部1 1的下面部更低。 藉由該配置方式，當在上下方向將托盤1積疊多 ，讓各個托盤1的樹脂塊8A、8B的主體部20的上 與下面部互相相接，托盤1，將樹脂塊8A、8B的主 2 0的高度積疊作爲間距。 如以上所述，本實施例的托盤1，是以不同材料 接觸部也就是樹脂塊8 A、8B與外框2分別形成而加 定的構造。藉此，則可只在接觸部使用能抑制灰塵產 材料，而能容易地加工形成接觸部。另一方面，外框 其他部分，與其他托盤1或設備等幾乎沒有接觸，所 使用相較於抑制灰塵更重視強度的材料，則可將選擇 2的材料的自由度予以提升。 承部 框安 栓、 與第 鉚釘 8B， 外側 從樹 8B， 坦部 下面 層時 面部 體部 ，將 以固 生的 2的 以可 外框 -14- 200935544 (b)不同構造 接著，針對第一樹脂塊8A與第二樹脂塊8B的不同 構造來說明。如桌6圖所不’在第一樹脂塊8A的主體部 20的下面部，設置有凹部22。凹部22形成在：朝主體部 20的長軸方向延伸的一對凸部25之間，是兩端開放的溝 部。凹部22具有與上面部的凸部21對應的剖面形狀。第 7圖是顯示兩個第一樹脂塊8A互相卡合的狀態的側視圖 。在該狀態，第一樹脂塊8A可朝主體部20的長軸方向 相對移動。而第一樹脂塊8A可繞著凸部21的中心軸相 對旋轉。 如第8圖所示，在第二樹脂塊8B的主體部20的下面 部’設置有凹部26。凹部26，是在主體部20的長軸方向 分離的一對凸部27之間形成，朝主體部20的短軸方向開 放。第9圖是顯示兩個第二樹脂塊8B互相卡合的狀態的 局部正視圖。在該狀態，凸部21，在相對於凹部2 6的左 右、前後能確保間隙。利用以上構造，第二樹脂塊8B， 雖然支承著位於上側的托盤1的重量，卻沒有將托盤1彼 此定位。 (c )配置方式 針對第一樹脂塊8A與第二樹脂塊8B的配置方式加 以說明。如第2圖所示，樹脂塊8 A、8 B，在各框構件2 a 、2b各設置有3處總共設置有1 2處。。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] For example, in a manufacturing process of a thin display device, a technique of transporting a thin plate-shaped article representing a glass substrate is required. A thin plate-shaped article is liable to be deformed by twisting or flexing, and is in contact with the periphery due to deformation during transportation. The surface may be damaged or broken. Therefore, in order to carry, a special container capable of placing a thin plate-like article without deforming it is required. By placing the thin-plate-shaped articles one by one and placing them in individual containers, it is possible to prevent the articles being conveyed from being deformed. However, when an individual container is used, it is necessary to temporarily store it during transportation, which may cause a problem of a large storage space. Even if you want to integrate the container and move it to another location, it can be cumbersome. Therefore, a container can be placed on a sheet-like article individually, and the containers can be stacked on each other when temporarily stored or transferred to another place. However, in such a container, there is a problem that dust accumulates in the container, and when it is stacked, dust is generated from itself to contaminate the placed article. On the other hand, when a plurality of containers are stacked, the weight of the whole body becomes heavy, which may cause difficulty in storage or transportation. In order to solve such a problem, a tray for carrying a workpiece is known (for example, refer to Patent Document η, which is a rectangular outer frame composed of four -4-200935544 frame members, and is erected in a frame. In the twenty-fifth view, the tray 201 is stacked (hereinafter, the state in which the plurality of trays 20 1 are stacked is referred to as "stacking. The tray 201 is mainly composed of the frame portion 202 and the plurality of bridges. The portion 202' of the portion 204 has a plurality 2 2 for supporting a plurality of bridge portions 2〇2, an inclined portion 21 3 U which is raised outward from the support portion 2 1 2, and an upper portion of the inclined portion 2 1 3 facing outward The extended outer flat portion 2 1 1 2 0 4 upper surface 'for example, the glass substrate s is placed. The outer side is flat' is provided with a plurality of resin blocks 208. The resin block 208 is from * to the outer flat portion 2 1 1 The resin block 208 of the other tray 201 which is stacked in the state of the formed hole portion is engaged. In the state in which the complex 2 〇 1 is stacked, each of the resin blocks 208 supports the weight of the disk 201 itself, and also supports Other weights on the upper side. By setting the height of the resin block 208 If it is lower, the pitch of the trays 201 is different from each other. Specifically, the inclined portion 2 1 3 of the upper side 2 〇 1 projects into the accommodating space of the inclined portion 2 1 3 of the tray 2 0 1 [Patent Document 1] 。 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 The part and the bottom are inserted and fixed under the bridge portion 2 1 1 , and the number of the trays 20 1 fixed to the plurality of trays can be reduced to a position higher than the inner portion of the other trays at a height of 200935544. Thus, the crane carries the stacked trays out. At the time of loading, the claw portion 301 of the crane needs to be prevented from coming into contact with the outer frame inclined portion 213 of the tray 201, and is to be submerged to the lower side of the stacking tray. Fig. 22(a) is a view showing the claw portion 301 of the fork portion of the crane. In the state of the lower side of the stacking tray, the front end of the claw portion 301 is formed with a support portion 301a extending upward. The 22'' is a state in which the claw portion 301 is raised to support the resin block 208. Support portion 301a of the claw portion 301 In the above structure and operation, as shown in the figure, 1 of Fig. 22(a) (the lowermost portion of the frame portion 022 and the lower surface of the resin block 208 in the vertical direction) are required. In addition, when the inclined portion 213 is raised in order to secure the strength of the frame portion 202, I, Η (the height of the support portion 301a) and L in the figure become higher, that is, the glass substrate S is large. The above problems will become more apparent.情况 In the case where the fork portion 310 is extended between the two stacked trays or between the stacking tray and the elevator that moves it up and down, if the size is large, it is necessary to secure a larger space. In the case where the stacking tray is to be placed directly on the ground, it is necessary to reserve the support table for the resin block. The problem of the present invention is to provide a pallet for workpiece conveyance, which facilitates the loading and unloading of stacked pallets. [Means for Solving the Problems] -6-200935544 The workpiece transporting tray according to the first aspect of the invention is a workpiece for transporting a thin plate, and includes a workpiece mounting portion, a rectangular frame portion, and a support portion. The workpiece mounting portion has a workpiece mounting surface on which the workpiece is placed. The support portion is provided in the frame portion ' for supporting the workpiece mounting portion. The frame portion has an inclined portion whose slope is downward from the support portion and lower end portion than the workpiece mounting surface. In the tray, by providing the inclined portion at the frame portion, the strength of the frame portion can be sufficiently ensured. Further, since the slope of the inclined portion of the frame portion is lowered downward, and the position of the lower end portion of the inclined portion is lower than that of the workpiece mounting surface, the fork portion and the inclined portion of the crane can be easily avoided when the stacking tray is moved in and out. s contact. Therefore, the stacking tray can be easily moved in and out. The support portion may be integrally formed in the frame portion or may be another member fixed to the frame portion. According to the first aspect of the invention, the workpiece transporting tray according to the second aspect of the invention includes the surrounding member that covers the periphery of the workpiece mounting surface of the workpiece mounting portion and has a wall portion higher than the surrounding portion. In the conventional workpiece transport tray, the slope of the inclined portion of the frame portion is inclined upward toward the outside, and the inclined portion is disposed around the workpiece mounting portion, so that the problem of the workpiece being detached is less likely to occur. On the other hand, in the workpiece transporting tray according to the first aspect of the invention, the slope of the inclined portion of the frame portion is inclined downward toward the outer side, and it is necessary to deal with the problem that the workpiece is detached. Therefore, by providing the surrounding member in the tray, the workpiece can be prevented from being detached from the workpiece carrying tray, for example, because the workpiece is moved by the emergency stop of the apparatus. In the workpiece transporting tray according to the third aspect of the invention, the bracket member is integrally formed on the inclined portion of the frame portion. 200935544 In this tray, since the surrounding member is integrally formed on the inclined portion, the number of parts can be reduced. According to a fourth aspect of the invention, the workpiece mounting portion has an elongated plurality of mounting members that are mounted on the frame portion and have a 'work placement surface' on the upper surface of the first to third inventions. The support portion has a plurality of support members fixed to the frame portion and supporting the end portions of the mounting members. In the tray, a plurality of mounting members are supported by a plurality of supporting members 0, so that the entire weight can be reduced. According to a second aspect of the invention, in the second aspect or the third aspect of the invention, the frame further includes an extending portion extending outward from a lower end portion of the inclined portion. The tray is further provided on the extending portion for ensuring a space in which the other workpiece handling tray is overlapped, and a space for contacting the other workpiece conveying tray is avoided. On the inner side of the inclined portion, a housing space for accommodating at least a part of the surrounding members of the other workpiece conveying trays stacked underneath is formed. © In the tray, in the state in which a plurality of workpiece transport trays are stacked, each of the workpiece transport trays is held in a state in which a space is secured therebetween. In this case, at least a part of the enclosing member of the workpiece transport tray stacked underneath is housed in the accommodating space inside the inclined portion of the workpiece transport tray stacked above. Thus, the spacing between the stacked trays is made smaller, and the height of the stacked tray can be lowered. [Effect of the Invention] In the workpiece transporting tray of the present invention, the inclined portion of the frame portion is inclined downward toward the outside of -8 - 200935544, so that the stacking tray is easily carried in and out. [Embodiment] 1. First Embodiment Hereinafter, an embodiment of a workpiece transporting tray to which the present invention is applied will be described in detail with reference to the drawings. (The entire structure of the π workpiece transport tray Fig. 1 is a perspective view showing a structure of an embodiment of the workpiece transport tray 1 (hereinafter referred to as "tray 1") of the present invention, and Fig. 2 is a top view of the tray 1. 1 is for placing a thin plate-shaped article and for carrying the article. The tray 1 mainly includes a rectangular outer frame 2 and a plurality of bridges spanned between the opposing long frame members 2a of the outer frame 2. 4 (workpiece mounting portion). In this embodiment, the glass substrate S is used as a thin plate-shaped article. (2) The outer frame structure 2 is composed of two long frame members 2a and two The frame member 2a, 2b of the present embodiment is an aluminum extrusion member having a constant thickness. Figs. 3 and 4 are partial perspective views of the laminated tray 1, and Fig. 5 is a laminated tray 1. Partial longitudinal section view. The frame members 2a, 2b' can be seen from the cross-sectional shape of Fig. 5, and the -9 - 200935544 is provided with an outer flat portion 11 and an inner flat surface formed at a position higher than the outer flat portion 11 Portion 1 2 between the outer flat portion 1 1 and the inner flat portion 1 2 The inclined portion 13 is provided. The inner flat portion 1 2 extends inward from the upper end portion of the inclined portion 13. The outer flat portion 1 1 extends outward from the lower end portion of the inclined portion 13. The outer flat portion 1 1 is provided with The resin block mounting hole 17 for mounting the resin block 8 (described later) at a plurality of points. The inclined portion 13 has a shape in which the angle is expanded downward when the outer frame 2 is formed. The height of the inclined portion 13 is in the frame member The case where the 2a and 2b are combined with each other into the rectangular outer frame 2 is set so as to maintain the flatness of the outer frame 2 within a predetermined amount and maintain the height of the required strength. Therefore, the smell of the inclined portion 13 has In the case of the "safety storage", the glass substrate is mounted on all or a part of the trays, even if all are reserved. When the movement is generated and the vibration occurs, the upper surface portion of the glass substrate or the bridge portion does not come into contact with the upper bridge portion. When the shape of the outer frame 2 is increased, the required strength is increased, and in order to strengthen the outer frame 2, the inclined portion 13 is provided. The height becomes higher. When the strength required by the small outer frame 2 is lowered, the inclined portion 13 can be lowered. The outer frame 2 of the present embodiment is formed by joining the frame members 2a, 2b to each other. The outer frame 2 of the present embodiment has a cross-sectional shape as follows: the outer flat portion 1 1 , the inclined portion 13 that continuously rises from the inner end of the outer flat portion 1 1 , and the inclined portion 13 from the inclined portion 13 The upper end portion is formed by the continuous inner flat portion 12. The height of the single body of the formed outer frame 2 is determined by the height of the inclined portion 13 and the plurality of trays 1 are stacked. 200935544 A part of the portion surrounded by the inclined portion 13 has a function f| the accommodating space 13a (Fig. 5) into which the other tray enters, and can be stacked at an interval of f. The long bezel member 2a and the short bezel member 2b are joined to each other at their two ends, 12, by the first engaging member 28 and the second engaging member. The first joint member 28 is an L-shaped plate portion, and the inner flat portions 1 2 of the frame members 2a and 2b are fixed to each other. The sealing member 29 is an L-shaped plate portion, and the outer flat portions 1 1 of the frame member 2b are fixed to each other via a rivet. (3) Structure of the bridge portion The bridge portion 4 of the number of shelves between the opposing long frame members 2a of the outer frame 2 constitutes a mounting portion of the glass substrate S. An aluminum extrusion member having a certain thickness is formed in the bridge portion 4. In the long frame member 2a of the outer frame 2, a plurality of support members 14 for supporting the cymbals are fixed. The support member 14, as shown in Fig. 5, has a fixing portion 14a that is fixed to the inner side of the inclined portion 13 of the outer frame 2 and is fixed by a rivet (not shown), and a support portion extending from the upper end side thereof. 14b. An enlarged view of one end portion of the bridge portion 4 is shown in Fig. 10. 4 is a flat portion 41 which is a workpiece mounting surface, a pair of side wall portions 42 formed in two cross-sectional gate shapes, and a pair of flange portions 43 extending from the side wall portions 42 side. With the above shape, 4, the beam strength is improved compared to the case of using the flat member, the doctor's order is to make the ί small as the 29th F rivet; the second is 2a 'there is the use part 4, by The inner bridge portion is used as the outer bridge portion. -11 - 200935544 The thin portion of the material can be used in the bridge portion 4 to reach the bridge portion 4. On the upper surface portion of the flat portion 41, a mounting pin 44 for supporting a plurality of glass g is fixed. The mounting pin 44 is formed of high abrasion resistance (PEEK (registered trademark)) or ultra-high molecular weight polyethylene, and even if the glass substrate S is repeatedly mounted, dust is hardly damaged and contamination is not caused. Glass substrate S. At the flat end, the support of the support member 14 disposed in the cross-sectional gate shape is fixed by a rivet (not shown). The flat portion 41 is supported by the outer frame 2 by the support member 14. In the tray 1, the inclined upper portion and the inner flat portion 1 2 ' of the frame members 2a, 2b of the outer frame 2 function as a surrounding member for covering the periphery of the bridge portion 41. Specifically, the flat portion 41 of the surrounding member portion 4 has a higher wall portion. Thus, the glass substrate portion is protected from the outside. For example, even if the glass substrate S moves due to the device, the glass substrate S flies out of the tray 1 and is damaged. The fragment does not easily scatter to the surrounding structure. (4) The structural resin block 8 of the resin block is a member attached to the outer side 3 of the frame members 2a and 2b, and is a partition portion 'for ensuring the height direction of each of the trays 1 and is for preventing each of the trays 1 from each other. The position is offset to limit the member. The resin block 8 is preferably formed of a material capable of suppressing the generation of dust in order to form the tray 1 stacked up and down. The polyetheretherketone (UPE) of the lightweight plug plate S of the present embodiment generates the two portions 14b of the grinding 41, which is the flat of the partitioning portion 4, and is an emergency stop or a break in the outer periphery of the bridge S. In the tray position contact portion between the steen portions 11 and the space, the resin -12-200935544 block 8 is formed of PEEK or UP E which is excellent in abrasion resistance and mechanical strength. The resin block 8 has very little wear even if the resin blocks are in contact with each other, and is hard to fall even if dust is generated, so that the glass substrate S to be conveyed is not easily contaminated. (5) Structure and arrangement of the first resin block and the second resin block The resin block 8 has two types of blocks, and has a first resin block 8A and a second resin block 8B. The configuration of each resin block will be described below to explain the arrangement. (a) Common Structure Fig. 6(a) is a top view of the first resin block 8A, Fig. 6(b) is a front view of the first resin block 8A, and Fig. 6(c) is a first resin block 8A Bottom view, Fig. 6(d) is a side view of the first resin block 8A, Fig. 8(a) is a front view of the second resin block 8B, and Fig. 8(b) is a second resin block 8B The bottom view, Fig. 8(c) is a side view of the second resin block 8B. Initially, the common structure of the first resin block 8A and the second resin block 8B will be described. The resin blocks 8A and 8B mainly have a main body portion 20 of a rectangular parallelepiped shape, and the main body portion 20 is long in the horizontal direction. The height ' of the main body portion 20 is formed to be equal to the housing height H1 (refer to Fig. 5) for safely accommodating one substrate S. A convex portion 2 1 is provided on the upper surface portion of the main body portion 20. The convex portion 21 is formed into a conical shape or a conical trapezoidal shape. In the both side portions of the main body portion 20, a supported portion 23 as a contact portion which is supported when the tray is stacked and pulled out - 13 to 35,354, is inserted through the support 23 to fix the resin block 8 to the frame. The outer holes 24 of the members 2a and 2b and the resin blocks 8A and 8B are fixed to the outer frame 2 by a nut 19 (Fig. 13) or a rivet penetrating the mounting hole 24. Fig. 3 is a perspective view showing a state in which the resin blocks 8A, 8B are fixed to the frame members 2a, 2b by bolts, nuts, or the like. In the resin block 8A, the upper surface portion of the support portion 23 abuts against the lower surface portion of the flat portion 11 of the frame members 2a and 2b, and the convex portion 21 and the upper lip mounting hole 17 of the main body portion 20 protrude. Fixed. The resin block 8A and the upper surface portion of the main body portion 20 are higher than the outer surface 11 of the frame members 2a and 2b. The lower surface portion of the main body portion 20 (the portion of the convex portion 25 to be described later) is lower than the lower surface portion of the outer flat portion 1 1 . With this arrangement, when the trays 1 are stacked in the up and down direction, the upper and lower portions of the main body portion 20 of the resin blocks 8A, 8B of the respective trays 1 are brought into contact with each other, and the tray 1 is made of the resin blocks 8A, 8B. The height of the main 20 is stacked as a pitch. As described above, the tray 1 of the present embodiment has a configuration in which the contact portions of the different materials, that is, the resin blocks 8 A, 8B and the outer frame 2 are respectively formed. Thereby, it is possible to easily form the contact portion by using only the contact portion to suppress the dust-producing material. On the other hand, other parts of the outer frame have almost no contact with other trays 1 or equipment, and the degree of freedom of the material of the selection 2 can be improved by using a material which is more important in strength than dust suppression. The frame frame anchor bolt, with the rivet 8B, the outer side from the tree 8B, the lower part of the face portion of the face, will be different from the solid frame 2 to the outer frame-14-200935544 (b), for the first The different configurations of the resin block 8A and the second resin block 8B will be described. The recessed portion 22 is provided in the lower surface portion of the main body portion 20 of the first resin block 8A as shown in the table 6. The concave portion 22 is formed between the pair of convex portions 25 extending in the longitudinal direction of the main body portion 20, and is a groove portion whose both ends are open. The recess 22 has a cross-sectional shape corresponding to the convex portion 21 of the upper surface portion. Fig. 7 is a side view showing a state in which the two first resin blocks 8A are engaged with each other. In this state, the first resin block 8A is relatively movable in the longitudinal direction of the main body portion 20. The first resin block 8A is relatively rotatable about the central axis of the convex portion 21. As shown in Fig. 8, a concave portion 26 is provided in the lower portion ' of the main body portion 20 of the second resin block 8B. The concave portion 26 is formed between the pair of convex portions 27 separated in the longitudinal direction of the main body portion 20, and is opened in the short-axis direction of the main body portion 20. Fig. 9 is a partial front elevational view showing a state in which the two second resin blocks 8B are engaged with each other. In this state, the convex portion 21 can secure a gap with respect to the left and right of the concave portion 26 and before and after. With the above configuration, the second resin block 8B, although supporting the weight of the tray 1 on the upper side, does not position the trays 1 to each other. (c) Arrangement Mode The arrangement of the first resin block 8A and the second resin block 8B will be described. As shown in Fig. 2, the resin blocks 8 A and 8 B are provided at a total of 12 places in each of the frame members 2 a and 2 b.
第一樹脂塊8A，配置在第2圖的A位置、B位置、C -15- 200935544 位置三處。A位置、B位置，是圖下側的短邊框構件2b 的兩端側。C位置，是圖左側的長邊框構件2a上的從圖 下側的短邊框構件2b分離側。A位置的第一樹脂塊8A與 B位置的第一樹脂塊8 A配置在相同的短邊框構件2b，凹 部22的方向也相同。相對的，C位置的第一樹脂塊8 A， 並沒有配置在將A位置的第一樹脂塊8A與B位置的第一 樹脂塊8A連結的直線上，並且凹部22的方向也與兩者 的凹部22的方向不同。在剩餘的9處位置，配置有第二 樹脂塊8B。 藉由以上所述的構造，則可進行積疊也不會因爲零件 精度或組裝精度的誤差而受到影響。在積疊後也以最小限 度的間隙，限制第一樹脂塊8A彼此的移動。於是，在積 疊狀態而在搬運中緊急停止時，也能將托盤1的偏移的累 積控制在最小限度。 在托盤1的尺寸較大，且在爲了輕量化而讓外框2的 強度沒有很強的情況，第2圖的位置D的第二樹脂塊8B ，也可替換爲第一樹脂塊8A°D位置，是圖左側的長邊 框構件2a上的靠近圖下側的短邊框構件2b側。在該情況 ，能夠有效地限制因爲外框的彈性變形導致樹脂塊8間的 位置變化。 (6 )基板定位構件的構造 接著說明用來將於托盤1搭載的玻璃基板S定位的基 板定位構件3 0。 -16- 200935544 第11圖是基板定位構件30的立體圖，第12圖是外 框2的框構件2a、2b的角部分的局部上視圖，第1 3圖是 包含基板定位構件3 0的外框2週邊的托盤1的剖面圖。 基板定位構件3 0 ’是固定於外框2的角部，用來防 止玻璃基板S朝平面方向移動的構件。基板定位構件30 ，是樹脂製，具有：平坦部31、從平坦部31朝下方延伸 的柱部32、從平坦部31的其中一端朝上方延伸的壁部34 、從其上端平緩地連續而直線狀延伸的傾斜部35、以及 從其下端進一步延伸的平坦部36。在平坦部36形成有球 型凸狀的基板載置部37。在平坦部31及柱部32形成有 螺栓孔3 3。 基板定位構件3〇，如第12圖所示，設置在外框2的 各角部的兩處位置，更具體來說，配置成從各框構件2a 、2b的兩端位置直角地朝框構件的長軸方向延伸。基板 定位構件3 0的平坦部3 1的上面部，抵接於外框2的內側 平坦部12的下面部，壁部34抵接於內側平坦部12的前 端面。在該狀態，藉由例如將螺栓螺合於螺栓孔33，而 將基板定位構件3 0固定在內側平坦部1 2。結果，平坦部 3 6位於較內側平坦部1 2更內側下方，在基板載置部3 7 載置著玻璃基板S。在該狀態，傾斜部3 5進行基板S的 定位。傾斜部35，配置成：相對於實際的玻璃基板S的 尺寸在單側例如能確保1〜3mm的餘隙。 當將玻璃基板S搭載於托盤1上時，藉由傾斜部3 5 來導引玻璃基板S端面，來修正位置偏移情形。 -17- 200935544 基板定位構件30是將習知的防止脫落構件與載置銷 一體化的構造’所以玻璃基板S與外框2之間的間隙小於 習知構造。結果’與習知的托盤相比能達成外框的小型化 〇 基板定位構件30’是以高耐磨損性的peek或UPE 所形成’即使爲了定位而基板S反覆接觸，也幾乎不會產 生因磨損造成的灰塵，而不易污染基板S。 (7)層疊托盤的構造 在第3圖及第4圖，是顯示在上下方向將托盤1重疊 複數枚的狀態。而在第5圖顯示積疊5枚托盤1的剖面圖 。如第5圖所示，從上面載置的其他托盤1的傾斜部i 3 是積疊覆蓋下側的托盤1的傾斜部1 3。換言之，下側的 托盤1的包圍構件（外框2的框構件2a、2b的傾斜部1 3 的上部與內側平坦部1 2 )伸入到上側的托盤1的傾斜部 1 3的內側的收容空間1 3 a內。因此，當積疊時能以小空 間來保管很多的托盤1。 本實施例的托盤1，是在只於外框2固定的樹脂塊8 的主體部20的上面部與下面部互相相接的狀態而層疊。 樹脂塊8的高度，爲安全地收容一枚玻璃基板s的收容高 度H1，托盤1的外框2的其他部分及橋部4，當層疊時 沒有與上下的托盤1接觸。因此，托盤1’以藉由樹脂塊 8所限定的高度，也就是將收容高度Η1作爲間距而層疊 。當托盤1以藉由樹脂塊8所限定的收容高度Η1的間距 -18- 200935544 層疊時，下側的托盤1的外框2伸入到上側的托盤1的外 框2內。即使爲了提高外框2的強度而將提高了傾斜部 13的高度的托盤1層疊，只要傾斜部13收容於上側的托 盤1的傾斜部1 3的收容空間1 3 a內，就對於全體高度沒 有影響。本實施例的托盤1，藉由在上側的托盤1的傾斜 部1 3，設置：讓下側的其他托盤1的傾斜部1 3伸入的收 容空間1 3 a，則即使在將傾斜部1 3的高度變更的情況， u 也能以較平常更小的間距來層疊。 如上述，當本實施例的托盤1在上下方向層疊時，在 上下的托盤1之間，只有樹脂塊8互相接觸，外框2與橋 部4完全沒有與其他托盤1接觸。因爲樹脂塊8以PEEK 或UPE所形成，所以即使接觸也幾乎不會產生灰塵。而 因爲外框2與橋部4沒有與其他托盤1接觸，所以不會產 生灰塵。本實施例的托盤1即使層疊也幾乎不會產生灰塵 ，對基板S的污染非常少。 〇 本實施例的托盤1，其構造是讓樹脂塊8支承上面所 層疊的托盤1的重量，上側的托盤1的重量並沒有施加在 外框2。因此’外框2只要具備有能夠支承本身的重量、 與所載置的基板S的重量的強度即可，與採用藉由外框2 來支承上面所層疊的托盤1的情況比較，所要求的強度較 小。因此’能夠容易地得到外框2所要求的強度，而能達 成輕量化。 (8)將層疊托盤進行搬運的動作 -19- 200935544 接著’針對以叉部將層疊托盤進行搬運時的動作來加 以說明。第14圖是顯示將叉部ιοί的一對爪部i〇la配置 於層疊托盤的下部的狀態的立體圖，第15圖是側視圖， 第16圖是正視圖。第17圖是第15圖的局部放大圖。 叉部101的一對爪部l〇la，朝一方向長長地延伸， 分別在前端與根部具有支承部l〇lb。支承部l〇lb，配置 成可將於各框構件2a、2b的兩端側設置的樹脂塊8予以 支承。支承部101b’具有：可將樹脂塊8的下端部的外 周予以支承的兩對斜面' 以及與樹脂塊8的下面部相接而 承受荷重的平坦部。 在該托盤1，樹脂塊8配置在較橋部4的平坦部41 ( 工件載置面）更低的位置。於是，與習知方式不同，可以 降低支承部101b的高度，而爪部的朝上方的行程不需要 作得很大。並且’起重機的叉部變得容易操作，具體來說 ’減少了習知技術的問題（例如叉部的爪部3 0 1可能會碰 撞到外框下面部），能提升作業效率。 並且不需要托盤1所構成的層疊托盤所專用的放置台 2.其他實施方式 以上雖然在實施例詳細說明了本發明的具體例子，而 只不過是舉例，並不是限定申請專利的範圍。在申請專利 範圍所記載的技術，也包含有將以上所舉例的具體例子予 以變形、變更的技術。 -20- 200935544 (1 )各構件的接合 外框的邊構件彼此的接合方法或接合部位 部的接合方法或接合部位，可配合所搭載的薄 的大小或重量而作適當變更。 (2 )各構件的構造 外框的形狀、樹脂塊的形狀或配置方式， 作用效果的範圍，可加以變更。 (3 )外框的變形例The first resin block 8A is disposed at three positions of the A position, the B position, and the C-15-200935544 position in Fig. 2 . The A position and the B position are both end sides of the short frame member 2b on the lower side of the figure. The C position is the side of the long bezel member 2a on the left side of the drawing which is separated from the short bezel member 2b on the lower side of the drawing. The first resin block 8A at the A position and the first resin block 8A at the B position are disposed in the same short frame member 2b, and the direction of the concave portion 22 is also the same. In contrast, the first resin block 8 A at the C position is not disposed on a straight line connecting the first resin block 8A at the A position and the first resin block 8A at the B position, and the direction of the concave portion 22 is also The direction of the recess 22 is different. At the remaining nine positions, the second resin block 8B is disposed. With the above-described configuration, stacking can be performed without being affected by errors in part accuracy or assembly accuracy. The movement of the first resin blocks 8A to each other is also restricted with a minimum gap after the stacking. Therefore, the accumulation of the offset of the tray 1 can be minimized even when the battery is in an accumulated state and is suddenly stopped during transportation. The size of the tray 1 is large, and the strength of the outer frame 2 is not strong for the purpose of weight reduction. The second resin block 8B at the position D of Fig. 2 can also be replaced with the first resin block 8A°D. The position is the side of the short bezel member 2b on the long bezel member 2a on the left side of the drawing near the lower side of the figure. In this case, the positional change between the resin blocks 8 due to the elastic deformation of the outer frame can be effectively restricted. (6) Structure of substrate positioning member Next, the substrate positioning member 30 for positioning the glass substrate S mounted on the tray 1 will be described. -16- 200935544 Fig. 11 is a perspective view of the substrate positioning member 30, Fig. 12 is a partial top view of the corner portion of the frame members 2a, 2b of the outer frame 2, and Fig. 13 is a frame including the substrate positioning member 30 2 section view of the tray 1 around. The substrate positioning member 30' is a member fixed to the corner of the outer frame 2 to prevent the glass substrate S from moving in the planar direction. The substrate positioning member 30 is made of a resin, and has a flat portion 31, a column portion 32 that extends downward from the flat portion 31, and a wall portion 34 that extends upward from one end of the flat portion 31, and is smoothly continuous from the upper end thereof. An inclined portion 35 extending in a shape and a flat portion 36 extending further from a lower end thereof. A substrate mounting portion 37 having a spherical convex shape is formed in the flat portion 36. Bolt holes 33 are formed in the flat portion 31 and the column portion 32. The substrate positioning member 3, as shown in Fig. 12, is disposed at two positions of the corner portions of the outer frame 2, and more specifically, is disposed at right angles from the both end positions of the respective frame members 2a, 2b toward the frame member. Extended in the long axis direction. The upper surface portion of the flat portion 31 of the substrate positioning member 30 abuts against the lower surface portion of the inner flat portion 12 of the outer frame 2, and the wall portion 34 abuts against the front end surface of the inner flat portion 12. In this state, the substrate positioning member 30 is fixed to the inner flat portion 1 2 by, for example, screwing a bolt to the bolt hole 33. As a result, the flat portion 36 is located further below the inner flat portion 1 2, and the glass substrate S is placed on the substrate mounting portion 37. In this state, the inclined portion 35 performs positioning of the substrate S. The inclined portion 35 is disposed such that, for example, a clearance of 1 to 3 mm can be secured on one side with respect to the size of the actual glass substrate S. When the glass substrate S is mounted on the tray 1, the end surface of the glass substrate S is guided by the inclined portion 35 to correct the positional shift. -17- 200935544 The substrate positioning member 30 is a structure in which a conventional separation preventing member and a mounting pin are integrated. Therefore, the gap between the glass substrate S and the outer frame 2 is smaller than a conventional structure. As a result, the miniaturization of the outer frame can be achieved as compared with the conventional tray. The substrate positioning member 30' is formed of peek or UPE having high wear resistance. Even if the substrate S is repeatedly contacted for positioning, it hardly occurs. Dust caused by abrasion does not easily contaminate the substrate S. (7) Structure of the laminated tray In the third and fourth figures, a state in which the plurality of trays 1 are stacked in the vertical direction is shown. In Fig. 5, a sectional view of the stack of five trays 1 is shown. As shown in Fig. 5, the inclined portion i 3 of the other tray 1 placed from above is an inclined portion 13 of the tray 1 covering the lower side. In other words, the surrounding member of the lower tray 1 (the upper portion and the inner flat portion 1 2 of the inclined portion 13 of the frame members 2a and 2b of the outer frame 2) are inserted into the inner side of the inclined portion 13 of the upper tray 1. Space 1 3 a. Therefore, a large number of trays 1 can be stored in a small space when stacked. The tray 1 of the present embodiment is stacked in a state in which the upper surface portion and the lower surface portion of the main body portion 20 of the resin block 8 fixed only to the outer frame 2 are in contact with each other. The height of the resin block 8 is such that the height H1 of one glass substrate s is safely accommodated, and the other portion of the outer frame 2 of the tray 1 and the bridge portion 4 are not in contact with the upper and lower trays 1 when stacked. Therefore, the tray 1' is laminated at a height defined by the resin block 8, that is, the housing height Η1 is used as a pitch. When the trays 1 are stacked at a pitch -18 - 200935544 of the storage height Η 1 defined by the resin blocks 8, the outer frame 2 of the lower tray 1 projects into the outer frame 2 of the upper tray 1. Even if the tray 1 having the height of the inclined portion 13 is stacked in order to increase the strength of the outer frame 2, the inclined portion 13 is accommodated in the accommodating space 13a of the inclined portion 13 of the upper tray 1, and there is no height for the entire height. influences. In the tray 1 of the present embodiment, by providing the accommodating space 1 3 a in which the inclined portion 13 of the other tray 1 on the lower side is inserted in the inclined portion 13 of the upper tray 1, even if the inclined portion 1 is to be In the case where the height of 3 is changed, u can also be stacked at a smaller pitch than usual. As described above, when the trays 1 of the present embodiment are stacked in the vertical direction, only the resin blocks 8 are in contact with each other between the upper and lower trays 1, and the outer frame 2 and the bridge portion 4 are not in contact with the other trays 1 at all. Since the resin block 8 is formed of PEEK or UPE, dust is hardly generated even if it is in contact. Since the outer frame 2 and the bridge portion 4 are not in contact with the other trays 1, no dust is generated. The tray 1 of the present embodiment hardly generates dust even when laminated, and the contamination of the substrate S is extremely small. The tray 1 of the present embodiment is constructed such that the resin block 8 supports the weight of the tray 1 stacked thereon, and the weight of the upper tray 1 is not applied to the outer frame 2. Therefore, the outer frame 2 is required to have a weight capable of supporting itself and the weight of the substrate S placed thereon, and is required to be used in comparison with the case where the tray 1 stacked on the outer frame 2 is supported. Less strength. Therefore, the strength required for the outer frame 2 can be easily obtained, and the weight can be reduced. (8) Operation of transporting the stacking tray -19- 200935544 Next, the operation when the stacking tray is transported by the fork portion will be described. Fig. 14 is a perspective view showing a state in which a pair of claw portions i〇1a of the fork portion ιοί are disposed on a lower portion of the stacking tray, Fig. 15 is a side view, and Fig. 16 is a front view. Figure 17 is a partial enlarged view of Fig. 15. The pair of claw portions 10a of the fork portion 101 extend long in one direction, and have support portions l1b at the front end and the root portion, respectively. The support portion 100b is disposed so as to be supported by the resin block 8 provided on both end sides of each of the frame members 2a and 2b. The support portion 101b' has two pairs of inclined surfaces which can support the outer periphery of the lower end portion of the resin block 8, and a flat portion that comes into contact with the lower surface portion of the resin block 8 and receives the load. In the tray 1, the resin block 8 is disposed at a position lower than the flat portion 41 (work placement surface) of the bridge portion 4. Thus, unlike the conventional method, the height of the support portion 101b can be lowered, and the upward stroke of the claw portion does not need to be made large. Moreover, the fork portion of the crane becomes easy to handle, specifically, the problem of the prior art is reduced (for example, the claw portion 310 of the fork may collide with the lower portion of the outer frame), and the work efficiency can be improved. Further, a placement table dedicated to the stacking tray constituted by the tray 1 is not required. Other Embodiments Although the specific examples of the present invention have been described in detail in the above embodiments, they are merely examples and are not intended to limit the scope of the claims. The technology described in the scope of the patent application also includes a technique for modifying and changing the specific examples exemplified above. -20- 200935544 (1) Joining of each member The joining method of the side members of the outer frame or the joining method or joining portion of the joining portion can be appropriately changed in accordance with the size or weight of the thin member to be mounted. (2) Structure of each member The shape of the outer frame, the shape or arrangement of the resin block, and the range of the effect can be changed. (3) Modification of the outer frame
第1 8圖，是其他實施例的外框的剖面形 ’，除了上述實施方式的構造之外，還具有： 部1 1的外側緣朝下方延伸的延長部1 5、與從 外側延伸的凸緣1 6。藉由該具有剖面二次力 讓外框2 ’的剛性高於上述實施方式的外框2 E (4 )樹脂塊的變形例 第19圖（a)是其他實施方式的第三樹脂 視圖，第19圖（b)是第三樹脂塊1〇8的縱 20圖是第三樹脂塊1 08的側視圖。 第三樹脂塊108，主要具有約長方體的主 主體部1 20的高度，形成爲：與用來安全地收 S的收容高度H1相等。在主體部120的上面 、外框與橋 板狀的物品 在不損害其 狀。外框2 從外側平坦 其下端部朝 矩的構造， j勺剛性。 塊1 08的上 剖面圖。第 體部120。 容一枚基板 部設置凸部 -21 - 200935544 121。 凸部121，形成爲圓錐梯形。在主體部120的兩側 部，延伸出：當將托盤層疊、抽出時用來予以支承的作爲 接觸部的被支承部123。在被支承部123，貫穿有用來將 樹脂塊8固定到框構件的外框安裝孔1 24。 第三樹脂塊1〇8，藉由鉚釘或螺栓而固定到外框。第 三樹脂塊108，其被支承部123的上面部抵接於框構件的 外側平坦部的下面部，在凸部1 2 1與主體部1 2 0的上部從 樹脂塊安裝孔突出的狀態加以固定。 藉由這種配置方式，將工件搬運用托盤在上下方向層 疊多層時，各個托盤的第三樹脂塊108的主體部120的上 面部與下面部會互相相接，而工件搬運用托盤，會以第三 樹脂塊1 08的主體部1 20的高度爲間距來積疊。 在第三樹脂塊108的主體部120的下面部設置有凹部 122。 凹部122是與凸部121約相同形狀及尺寸的孔部， 凹部與凸部的間隙確保爲所需要最小限度的第2 1圖，是 顯不兩個第三樹脂塊108互相卡合的關係的側視圖。在該 狀態，第三樹脂塊1 08雖然大致不能朝左右、前後方向移 動，可是在旋轉方向能無限制地移動。 第三樹脂塊108，安裝在托盤的全部部位也可以，將 上述實施方式的第一樹脂塊8A或第二樹脂塊8A適當組 合也可以。 (5 )包圍構件的變形例 在上述實施方式，包圍橋部4的周圍的構件，雖然與 -22- 200935544 框構件2a、2b的傾斜部13 —體形成，而也可以是不同構 件，而也可固定在樹脂塊8而不是框構件2a、2b。在上 述實施方式雖然包圍構件具有朝內側延伸的內側平坦部， 而不一定需要具有像這樣朝內側延伸的部分。 (6 )外框及橋部的材料的變形例 在上述實施方式’框構件是以鋁擠壓加工所形成，而 也可藉由板金加工’將一定厚度的鋼材（例如SUS3 04 ) 加工成同一剖面形狀。 (7 )支承構件的變形例 在上述實施方式，支承構件是固定於框構件，而支承 構件’與內側平坦部同樣地，一體地形成於傾斜部也可以 〇 用來將支承構件與橋部固定的鉚釘的數量，並不限爲 一個。鉚釘也可以是複數個。 【圖式簡單說明】 第1圖是本發明的一種實施方式的工件搬運用托盤的 立體圖。 第2圖是工件搬運用托盤的俯視圖。 第3圖是層疊托盤的角部的立體圖。 第4圖是層疊托盤的角部的立體圖。 第5圖是層疊托盤的局部剖面圖。 -23- 200935544 第6圖是第一樹脂塊的各圖。 第7圖是顯示第一樹脂塊彼此的載置情形的側視圖。 第8圖是第二樹脂塊的各圖。 第9圖是用來顯示第二樹脂塊彼此的載置情形的側視 第10圖是橋部的局部立體圖。 第1 1圖是定位構件的立體圖。Fig. 18 is a cross-sectional shape ' of the outer frame of the other embodiment. In addition to the configuration of the above-described embodiment, the present invention has an extension portion 15 extending outward from the outer edge of the portion 1 1 and a projection extending from the outer side. Edge 1 6. A modification of the outer frame 2 E (4 ) resin block having the rigidity of the outer frame 2 ′ having the cross-sectional secondary force is a third resin view of the other embodiment, 19(b) is a side view of the third resin block 108 in the longitudinal direction of the third resin block 1A8. The third resin block 108 mainly has a height of the main body portion 120 of about a rectangular parallelepiped, and is formed to be equal to the accommodation height H1 for safely receiving S. The upper surface of the main body portion 120, the outer frame and the bridge-like article are not damaged. The outer frame 2 is flat from the outside and its lower end is oriented toward the moment. The upper section of block 108. The first body portion 120. A base portion is provided with a convex portion -21 - 200935544 121. The convex portion 121 is formed in a conical trapezoidal shape. On both sides of the main body portion 120, a supported portion 123 as a contact portion for supporting the tray when it is stacked and taken out is extended. An outer frame mounting hole 1 24 for fixing the resin block 8 to the frame member is inserted into the supported portion 123. The third resin block 1〇8 is fixed to the outer frame by rivets or bolts. The third resin block 108 is in contact with the lower surface portion of the outer flat portion of the frame member by the upper surface portion of the support portion 123, and is protruded from the resin block mounting hole in the upper portion of the convex portion 1 21 and the main body portion 120. fixed. According to this arrangement, when the workpiece transport tray is stacked in the vertical direction, the upper surface portion and the lower surface portion of the main body portion 120 of the third resin block 108 of each tray are in contact with each other, and the workpiece transport tray is The height of the main body portion 120 of the third resin block 108 is stacked at a pitch. A concave portion 122 is provided at a lower portion of the main body portion 120 of the third resin block 108. The concave portion 122 is a hole portion having the same shape and size as the convex portion 121, and the gap between the concave portion and the convex portion is ensured to be the minimum required second figure, and the relationship between the two third resin blocks 108 is shown to be engaged with each other. Side view. In this state, the third resin block 108 is substantially not movable in the right and left and the front and rear directions, but can be moved in the rotation direction without restriction. The third resin block 108 may be attached to all portions of the tray, and the first resin block 8A or the second resin block 8A of the above-described embodiment may be combined as appropriate. (5) Modification of the surrounding member In the above embodiment, the member surrounding the bridge portion 4 may be formed separately from the inclined portion 13 of the frame members 2a and 2b of -22-200935544, but may be different members. It can be fixed to the resin block 8 instead of the frame members 2a, 2b. In the above embodiment, the surrounding member has an inner flat portion extending inward, and it is not always necessary to have a portion extending inward as described above. (6) Modification of the material of the outer frame and the bridge portion In the above-described embodiment, the frame member is formed by aluminum extrusion processing, and the steel material of a certain thickness (for example, SUS3 04) may be processed into the same sheet by sheet metal processing. Profile shape. (7) Modification of Supporting Member In the above embodiment, the supporting member is fixed to the frame member, and the supporting member 'is integrally formed with the inclined portion in the same manner as the inner flat portion, and may be used to fix the supporting member and the bridge portion. The number of rivets is not limited to one. The rivets can also be plural. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a workpiece handling tray according to an embodiment of the present invention. Fig. 2 is a plan view of the workpiece carrying tray. Fig. 3 is a perspective view of a corner portion of the laminated tray. Fig. 4 is a perspective view of a corner portion of the laminated tray. Fig. 5 is a partial cross-sectional view of the laminated tray. -23- 200935544 Figure 6 is a diagram of the first resin block. Fig. 7 is a side view showing a state in which the first resin blocks are placed on each other. Figure 8 is a view of each of the second resin blocks. Fig. 9 is a side view for showing a state in which the second resin blocks are placed on each other. Fig. 10 is a partial perspective view of the bridge portion. Fig. 1 is a perspective view of the positioning member.
第1 2圖是工件搬運用托盤的局部俯視圖。 第1 3圖是定位構件的剖面圖。 第14圖是顯示將叉部的爪部配置在層疊托盤的下部 的狀態的立體圖。 第15圖是顯示將叉部的爪部配置在層疊托盤的下部 的狀態的側視圖。 第16圖是顯示將叉部的爪部配置在層疊托盤的下部 的狀態的正視圖。 第17圖是第15圖的局部放大圖。 第18圖是其他實施方式的外框的剖面圖。 第19圖是其他實施方式的樹脂塊的各圖。 第20圖是其他實施方式的樹脂塊的側視圖。 第21圖是顯示其他實施方式的樹脂塊彼此的卡合情 形的局部剖面圖。 第22圖是用來說明習知技術的以叉部的爪部將層疊 托盤抬起時的動作的說明圖。 -24- 200935544 【主要元件符號說明】 1 :工件搬運用托盤 2 :外框 2 a :長邊框構件 • 2b :短邊框構件 • 4 :橋部 8 :樹脂塊 1 1 :外側平坦部 1 2 :內側平坦部 1 3 :傾斜部 1 3 a :收容空間 20 :主體部 2 1 :凸部 22 :凹部 2 3 :被支承部 -25-Fig. 1 is a partial plan view of the workpiece carrying tray. Figure 13 is a cross-sectional view of the positioning member. Fig. 14 is a perspective view showing a state in which the claw portions of the fork portion are disposed on the lower portion of the stacking tray. Fig. 15 is a side view showing a state in which the claw portions of the fork portion are disposed on the lower portion of the stacking tray. Fig. 16 is a front elevational view showing a state in which the claw portions of the fork portion are disposed on the lower portion of the stacking tray. Figure 17 is a partial enlarged view of Fig. 15. Figure 18 is a cross-sectional view of the outer frame of another embodiment. Fig. 19 is a view showing each of the resin blocks of the other embodiment. Fig. 20 is a side view of the resin block of another embodiment. Fig. 21 is a partial cross-sectional view showing the engagement of the resin blocks of the other embodiments. Fig. 22 is an explanatory view for explaining an operation when the stacked tray is lifted by the claw portion of the fork portion in the prior art. -24- 200935544 [Description of main component symbols] 1 : Pallet for workpiece handling 2 : Frame 2 a : Long frame member • 2b : Short frame member • 4 : Bridge 8 : Resin block 1 1 : Outer flat part 1 2 : Inner flat portion 1 3 : inclined portion 1 3 a : accommodating space 20 : main body portion 2 1 : convex portion 22 : concave portion 2 3 : supported portion - 25 -