TW200928287A - Scanning triangulation system and method thereof - Google Patents
Scanning triangulation system and method thereof Download PDFInfo
- Publication number
- TW200928287A TW200928287A TW96148227A TW96148227A TW200928287A TW 200928287 A TW200928287 A TW 200928287A TW 96148227 A TW96148227 A TW 96148227A TW 96148227 A TW96148227 A TW 96148227A TW 200928287 A TW200928287 A TW 200928287A
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- Prior art keywords
- scanning
- photodetector
- light
- signal
- triangulation
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- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 238000012360 testing method Methods 0.000 claims abstract description 16
- 238000012545 processing Methods 0.000 claims description 32
- 238000005259 measurement Methods 0.000 claims description 28
- 230000005484 gravity Effects 0.000 claims description 14
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000010408 sweeping Methods 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 2
- 210000001747 pupil Anatomy 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 14
- 239000000523 sample Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000000691 measurement method Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000012876 topography Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 241001417527 Pempheridae Species 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96148227A TW200928287A (en) | 2007-12-17 | 2007-12-17 | Scanning triangulation system and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96148227A TW200928287A (en) | 2007-12-17 | 2007-12-17 | Scanning triangulation system and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200928287A true TW200928287A (en) | 2009-07-01 |
| TWI352189B TWI352189B (enExample) | 2011-11-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96148227A TW200928287A (en) | 2007-12-17 | 2007-12-17 | Scanning triangulation system and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200928287A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI614513B (zh) * | 2016-12-22 | 2018-02-11 | 量測移動平台之多自由度誤差之方法及裝置 |
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2007
- 2007-12-17 TW TW96148227A patent/TW200928287A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI352189B (enExample) | 2011-11-11 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |