200928287 , 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種掃描式三角測量系統及方法，尤指一種 包括一掃瞄模組、一第一光檢測器、一第二光檢測器、一分光 裝置及一訊號處理單元，俾能藉由該第一光檢測器及該第二光 檢測器之檢測信號進行運算處理及比對求得該待測物的形貌 尺寸參數者。 ❹ 【先前技術】 由於目前國内的經濟正面臨轉型期，各種高新科技產業崛 起，使得許多關鍵零組件需要更高要求的檢測技術，使廠商於 近年致力於精密量測系統的發展。尤其現今廠商多致力於單件 -計價方式，故需做到百分之百的全檢，不論是IC、LCD、BGA、 -模具、精密零組件…等，產品的外觀尺寸、形貌或表面瑕疵… 等，均為重要檢測参數。 〇 再者，尺寸或位移量測是幾何量測或是物理量測的重要目 標，而傳統的位移和表面形貌的測量方法多為接觸式的探針檢 測，其確實存在有如下所述諸多的缺點： 1. 接觸使工件變形，特別是軟質或易損傷的表面。 2. 探針容易磨損。 3. 存在接觸式的濾波效應。 據此，近代發展出了各種非接觸式的測量技術，其中最為 成功的技術有干涉儀量測系統與雷射式三角探頭等技術。其中 200928287 二角探頭技術具有抗環境干擾能力強，精度高及使用方便等優 點’廣泛為業界使用。 雷射式二角探頭是一種單點式的高精度探頭，依對象及測 量範圍區分，精度從lmm(散射式）到2nm(；反射式）不等。若只針 對政射式的二角探頭而言’是一種成像式的檢測系統’技術的 發展己十分成熟’較著名的廠商有Micr〇trak，Keyence， Hamamatsu ’ Panasonic. ·.等，最高精度可達 〇. 1//Π1。此系統 〇中多採用電荷耦合式感測器（CCD)或位置靈敏感測器（PSD)。一 般產品具有微米等級的精度及5〇KHz抽樣率的能力。特別是原 子力顯微鏡與近場光學顯微鏡都採用位置靈敏感測器為檢測元 件’在小位移量測時具有次奈米的精度，可測量原子的表面形 _狀。 請參看第一圖所示，係習用之非接觸式的三角量測之結 構，其係以一雷射單元（60)(Light Source)經投射之透鏡（61) ❿後投射在待測物（l)(0bject)上，相對於成像透鏡（62)(Image Lens)而言’此一光點為物光點，根據Lambert散射定理形成一 個能量分佈的光錐’經透鏡成像於一光檢測器（63)PSD上。若 待測物（1)位於光軸與雷射光軸的交點上，則成像於該光檢測器 (63)PSD的幾何中心，若待測物（1)移動一段距離d到位置（X) 時，則光斑將在光檢測器（63)PSD上位移一段距離j，這是一 個量測值，是一個電子信號，由第一圖所示的幾何關係中得知： di sinO + ScosO (1) 200928287 其中θ是投影光軸與接收光軸 <間的爽角，d。肩7坐禅肩胃占 到成像透鏡（6〇)的距離（物距），θ . ^ d。為m點 器（63)PSD的距離。⑴式顯示出d與二成像透鏡⑽）到光檢測 係，此亦為三角量測的基本原理/、<間有一個對應之關 請參看第二、三圖所示，為加 採用掃描的方式，即投射光束延著之速度，該習用結構 式⑴必須修正為： ，’根據幾何關係公 ❹ Ο ^{d〇 -jsin^) + 4^sin6> di sin^ + ^cos^ (2) 其中y為橫向掃描的距離，當m 相同 田y U時’公式（2)與公式（1) ，同樣的，d與J為一對一的關得 線性增加，降低了精度。 纟㈣ 基本上，根據幾何光學，雷射光束發出的光線經準直透鏡 (64)後會形成平行於絲的光束。因此，當—道雷射光束經由 -個轉速均句的控制馬達（圖令未示）所帶動的旋轉反射鏡⑽ 反射，形成-個個扇形的掃描光幕，經由^透鏡或準直透鏡 (CL)(65)的作用，形成一平行光軸掃描的掃描光幕。 此一旋轉反射鏡（65)的轉軸與焦點重合，則可造成一個掃 描光束’這也是雷射掃描測量儀的原理，請參見第三圖所厂， 其中的z軸為光轴方向，y軸為垂直光軸的方向。令θ為反射 光束與光轴的夾角，光束的y軸位置與旋轉角度的關係為： J^/tan^ (3) 200928287 其中’ /為準直透鏡（30)CL的焦距。 但由於控制馬達轉速的不穩定、準直透鏡（64)α因幾何轉 換產生的非線性與旋轉反射鏡（65)的離焦誤差等因素的影響， 將造成掃描速度的不均勻。在此利用數學式進行分析與表達。 令準直透鏡（64)的焦距為/，控制馬達的轉速為ω，而射入第 一個準直透鏡（CL) (64)的入射角為0。由於反射鏡的改變角度 使入射光束與反射光束的夾角關係為 、Θ = 2〇)t ⑷ 則掃描速度可表示如下： V(t) = 2/iasec2 (2cot)+ 2ft (2iai)——+tanQ.〇x)—(n—1)Δ/ ( 5 ) at dt _實際的掃描速度F(t)是的非線性的。在此將（5)式的各項分析 ，如下： 2/cysec2(26?〇 (6) ©為透鏡幾何轉換的非線性誤差，一般的解決方案多採用透 鏡’使y與掃描角度呈現戶/θ的關係。請參看第五圖，高度 y，轉角<9與時間的關係。 2/isec2(2«i)~ dt (7) 由於控制馬達轉速的不穩定，—般的解決方案多採用控制馬達 加裝編碼器及回饋控制，或加大控制馬達的負載能力。 200928287 這是多面鏡的離焦誤差等因素的影響，一般的解決方案多採 用銳角入射及增大焦距。 不論是那一項的解決方案都是昂貴及複雜的，因此，本發 明設計一套簡易的雙感測器的測量方案來解決（5)式的問題。 請參看第四圖（a)所示，其中，該光檢測器（63)psD是利 用p-1-N接合橫方向上所產生光電效應，以檢出入射光點照射 位置，該光檢測器（63)(PSD)的結構及等效電路如第四圖（b) ❹所示。其在尚阻抗的基板表面上形成p層，在底層形成N層。a， B是p層上面的兩個端電極。位置檢測元件表面被光束照射後 則會產生電子及電洞對；如果ρ型是均勻性良好的電阻層，則 這些電子及電洞對到達電極接合處的數量與光點入射位置和兩 -電極距離位置有關。因此取得相對應的電流值就可估算入射光 .點的位置。 再請參看第四圖（b)所示，則是光檢測器（63)的等效電路， ©再請參看第四圖（a)所示，其光點照射位置為q，ρ侧電極以 A，B兩者表示之，N側電極以逆偏接地。由於光點在光檢測器 (6 3 )上的不同位置會產生不同的彳§號大小’經過後級的信號處 理玎精準的測量出光點的坐標位置。再以一維位置光檢測器 (1D-PSD)為例，當光點位於光檢測器（63)的幾何中心時，由於 兩邊對稱，因此兩個信號的大小相等。當光點偏離中心點時， 則光點到兩個電極的幾何長度不同，因此等效電阻的大小不 同。而光束的照射點相當於一個光電流源，根據分流定律而分 200928287 配能量。 若以電極A與電極B的中點為中心坐標，則到光點的距離 為X。電極A與電極B間的距離為Z，其間的阻抗為必。假使外 部負載電阻為必。以等效電路模型如第四圖（b)所示，尚有等 效電阻β、β外的存在。若有入射的成像光束，則光電流信號 所產生的就是一個電流源（夕，以人/幻表示）。在不影響正確結 果下進行分析，可以標準電阻的模型近似，使成為與ζ有關的 0相依電阻與相依電容。The invention relates to a scanning triangulation system and method, and more particularly to a scanning module, a first photodetector, a second photodetector, and a second photodetector. A light splitting device and a signal processing unit are configured to perform processing and comparison on the detection signals of the first photodetector and the second photodetector to obtain a shape size parameter of the object to be tested. ❹ 【Prior Art】 As the domestic economy is facing a transition period, the rise of various high-tech industries has made many key components require more demanding detection technologies, which has enabled manufacturers to focus on the development of precision measurement systems in recent years. In particular, today's manufacturers are committed to a single-piece pricing method, so 100% full inspection is required, whether it is IC, LCD, BGA, - mold, precision components, etc., the appearance size, shape or surface flaw of the product... Are all important test parameters. Furthermore, size or displacement measurement is an important target of geometric measurement or physical measurement, while the traditional measurement methods of displacement and surface topography are mostly contact probe detection, which does exist as described below. Disadvantages: 1. Contact deforms the workpiece, especially soft or vulnerable surfaces. 2. The probe is prone to wear. 3. There is a contact filtering effect. Accordingly, various non-contact measurement techniques have been developed in recent times, among which the most successful technologies include interferometer measurement systems and laser-type triangular probes. Among them, 200928287 two-corner probe technology has the advantages of strong resistance to environmental interference, high precision and ease of use, and is widely used in the industry. The laser-type two-angle probe is a single-point high-precision probe that is distinguished by object and measurement range, with accuracy ranging from lmm (scattering) to 2nm (reflective). If it is only for the government-style two-corner probe, the development of the technology of 'image-based detection system' is very mature. The more famous manufacturers include Micr〇trak, Keyence, Hamamatsu ' Panasonic. ·. Daxie. 1//Π1. This system uses a charge-coupled sensor (CCD) or a position sensitive sensor (PSD). Typical products have micron-level accuracy and a 5 kHz sampling rate. In particular, both the atomic force microscope and the near-field optical microscope use a position sensitive sensor as the detection element. The sub-nano precision is measured in small displacement measurements, and the surface shape of the atom can be measured. Please refer to the first figure, which is a non-contact triangulation structure which is projected by a projection unit (61) with a laser unit (60) and projected onto the object to be tested ( l) (0bject), relative to the imaging lens (62) (Image Lens), 'this spot is the object spot, and the light cone forming an energy distribution according to the Lambert scattering theorem' is imaged by a lens on a photodetector (63) PSD. If the object to be tested (1) is located at the intersection of the optical axis and the optical axis of the laser, it is imaged at the geometric center of the PSD of the photodetector (63), and if the object to be tested (1) moves a distance d to the position (X) Then, the spot will be displaced by a distance j on the photodetector (63) PSD, which is a measured value, which is an electronic signal, which is known from the geometric relationship shown in the first figure: di sinO + ScosO (1) 200928287 where θ is the refresh angle between the projection optical axis and the receiving optical axis < d. Shoulder 7 sitting on the shoulder shoulder stomach to occupy the distance of the imaging lens (6 〇) (object distance), θ . ^ d. Is the distance of the m point (63) PSD. (1) shows the d and the two imaging lens (10)) to the light detection system, which is also the basic principle of the triangle measurement /, < there is a corresponding relationship between the two, as shown in the second and third figures, for the use of scanning The mode, that is, the speed at which the projected beam is stretched, the conventional structural formula (1) must be corrected to: , 'According to the geometric relationship Ο ^{d〇-jsin^) + 4^sin6> di sin^ + ^cos^ (2) Where y is the distance of the lateral scan, when m is the same as the field y U 'formula (2) and formula (1), the same, d and J are linearly increasing one-to-one, reducing the precision.纟 (4) Basically, according to geometric optics, the light from the laser beam passes through the collimating lens (64) and forms a beam parallel to the wire. Therefore, when the laser beam is reflected by a rotating mirror (10) driven by a control motor (not shown), a fan-shaped scanning light curtain is formed through a lens or a collimating lens ( The role of CL) (65) forms a scanning light curtain scanned by a parallel optical axis. The rotation axis of this rotating mirror (65) coincides with the focus, which can cause a scanning beam. This is also the principle of the laser scanning measuring instrument. Please refer to the third figure, where the z-axis is the optical axis direction and the y-axis. Is the direction of the vertical optical axis. Let θ be the angle between the reflected beam and the optical axis. The relationship between the y-axis position of the beam and the angle of rotation is: J^/tan^ (3) 200928287 where ' / is the focal length of the collimating lens (30) CL. However, due to the instability of the control motor speed, the nonlinearity of the collimating lens (64)α due to geometrical transformation and the defocusing error of the rotating mirror (65), the scanning speed will be uneven. Here, mathematical analysis is used for analysis and expression. The focal length of the collimating lens (64) is /, the rotational speed of the control motor is ω, and the incident angle of the first collimating lens (CL) (64) is zero. Since the angle of change of the mirror makes the angle between the incident beam and the reflected beam, Θ = 2〇)t (4), the scanning speed can be expressed as follows: V(t) = 2/iasec2 (2cot) + 2ft (2iai) - + tanQ.〇x)—(n−1)Δ/ ( 5 ) at dt _ The actual scanning speed F(t) is nonlinear. Here, the analysis of (5) is as follows: 2/cysec2 (26?〇(6) © is the nonlinear error of the lens geometry conversion, the general solution is to use the lens 'to make y and scan angle to present / See the fifth graph, height y, corner <9 versus time. 2/isec2(2«i)~ dt (7) Due to the instability of the control motor speed, the general solution is mostly adopted. Control the motor to install the encoder and feedback control, or increase the load capacity of the control motor. 200928287 This is the influence of factors such as the defocus error of the polygon mirror. The general solution mostly adopts acute angle incidence and increases the focal length. The solution of the item is expensive and complicated. Therefore, the present invention designs a simple dual sensor measurement scheme to solve the problem of the formula (5). Please refer to the fourth figure (a), wherein The photodetector (63) psD uses the photoelectric effect generated by the p-1-N junction in the lateral direction to detect the incident position of the incident spot. The structure and equivalent circuit of the photodetector (63) (PSD) are as follows. Figure 4 (b) shows the formation of a p-layer on the surface of the substrate that is still impedance. An N layer is formed on the bottom layer. a, B are the two end electrodes on the p layer. The surface of the position detecting element is irradiated with a beam to generate electron and hole pairs; if the p type is a uniform layer of resistance, these electrons And the number of holes to the junction of the electrodes is related to the position of the spot and the distance between the two electrodes. Therefore, the position of the incident light can be estimated by taking the corresponding current value. See also Figure 4 (b) Shown, it is the equivalent circuit of the photodetector (63), © please refer to the fourth figure (a), the spot illumination position is q, the p side electrode is represented by A, B, N side The electrode is grounded in reverse bias. Since the spot is different at different positions on the photodetector (6 3 ), the size of the spot is generated. After the signal processing of the post stage, the coordinate position of the spot is accurately measured. The position photodetector (1D-PSD) is taken as an example. When the spot is located at the geometric center of the photodetector (63), the two signals are equal in size due to the bilateral symmetry. When the spot is off the center point, the spot is The geometric length to the two electrodes is different, so the equivalent resistance is large The difference between the beam and the beam is equivalent to a photocurrent source, according to the law of shunting, according to 200928287. If the center point of electrode A and electrode B is the center coordinate, the distance to the spot is X. Electrode A and The distance between the electrodes B is Z, and the impedance between them is necessary. If the external load resistance is necessary, the equivalent circuit model, as shown in the fourth figure (b), has the existence of the equivalent resistances β and β. The incident imaging beam, the photocurrent signal produces a current source (in the case of human/phantom). The analysis can be performed without affecting the correct result, and the model of the standard resistance can be approximated to make the 0-dependent Resistance and dependent capacitance.
Ra^ Ρ~^~Α— (9)Ra^ Ρ~^~Α—(9)
--X 拙=p 丄了一 （10) 在此令橫向的總電阻為R，則 ' R=Ra+Rb (11) ‘根據分流定律： _ lQ(Rb+RL) ❹ (Ra + Rb + 2RL) (12) r I〇{Ra+RL) b~ {Ra + Rb + 2RL) (13) 令橫向的總電流為It)，則--X 拙=p 丄一(10) Here, the total horizontal resistance is R, then ' R=Ra+Rb (11) ' according to the shunt law: _ lQ(Rb+RL) ❹ (Ra + Rb + 2RL) (12) r I〇{Ra+RL) b~ {Ra + Rb + 2RL) (13) Let the total current in the lateral direction be It), then
Io = Ib + Ia (14) (15) 200928287 將入射能量做正規化處理： _(R a + R L )_ _+ R _ (j b - I a、 Qb + la) ^ 〇 + R. b -V 2. R L 'y (v? 〇+ R b ^ R L 'y ^ f (R a + R L ) R b -l· R L 1Io = Ib + Ia (14) (15) 200928287 Normalize the incident energy: _(R a + RL )_ _+ R _ (jb - I a, Qb + la) ^ 〇+ R. b -V 2. RL 'y (v? 〇+ R b ^ RL 'y ^ f (R a + RL ) R b -l· RL 1
R b ~l· 1. R. L -/?(? + R b -l· 'Σ R L J (R a — R b ) (i? (7+ R b 2. R L 'y P [ (^ /2 + x) (L /2 - j) j (Λ + 2 Rl) 2 pX_ A (R + 2 R L )R b ~l· 1. R. L -/?(? + R b -l· 'Σ RLJ (R a — R b ) (i? (7+ R b 2. RL 'y P [ (^ /2 + x) (L /2 - j) j (Λ + 2 Rl) 2 pX_ A (R + 2 RL )
x = ^ 2p Xlb + Ia)x = ^ 2p Xlb + Ia)
lb — la lb + la (16) 由上式可以看出等號右式與位置坐標J成正比，而與其它 參數無關，且光檢測器（63)所檢測出來的位置為入射光能量的 .重心位置。只要根據數學式，適當的設計信號處理電路即可測 出光點的重心的坐標位置。 然而在檢測表面形貌或瑕疵時，通常採用平台掃描的方 Φ 式，使得檢測速度被降低，因此習用結構因設計不佳所造成上 述諸多的缺失，確實有再改良的必要。本發明人等承蒙國科會 計晝補助研究，經不斷地努力研發下，終於研發出一種掃描式 的三角量測系統及方法的本發明，不僅可以改善習用結構缺 失，還具有高精度及高測速等之特點。 【發明内容】 本發明之主要目的在於提供一種可以解決三角量測系統逐 點測量的速度問題，故而具有快速檢驗物體形貌的能力，不僅 11. 200928287 可以改善系統的架構與量測方法，而且在不需要精密祠服控制 馬達及透鏡的情況下進行測量，可以獲得在土lmm範圍内對線性 的標準差小於0.G145的精度，@而具有高精度、高測速以及成 本相對低廉等特點的掃描式三角測量系統及方法。 ❹ 本發月達成上述二角量測系統之功效所採用的技術手段 在於，其包括—_模組、—第一光檢測器―第二光檢測器、 一分光裝置及-減處理單元，該掃喃_以產生—平行光 ❹輛掃描的掃描光束’並以該分光裝置將該掃描光束分成至少兩 -為掃描光束由3亥第一光檢測器接收，用以做為位置檢 測與信號補償H該掃描光束則作為三角制的測試光 束’該測試光束經過-待測物後散射，再經由一成像透鏡而成 :像於該第二光檢測器上，且該訊號處理單元分別與該第一光檢 .測器、該第二光檢測器及該掃描模組電性連接以控制該掃描模 組運作’再將該第一光檢測器及該第二光檢測器之檢測信號進 打運算處理及比對，進而求得該待測物的形貌尺寸參數者。 〃本發明達成上述三角量測方法所採用的技術手段在於，其 係以掃瞄模組產生-平行光軸掃描的掃描光束，再以分光裝置 =該掃描光束分成m卿描光知—第—光檢測器 接收而為-參考光信號，再使另-該掃描光束作為三角量測的 測試光束而投射至-待測物後散射，使由該待測物散射後的該 賴光束經由-成像透鏡成像於一第二光檢剛器上而為一檢測 光信號，並將該參考光信號及該檢測光信號進行運算處理及比 12 200928287 ! ' 對’進而求得該待測物的形貌尺寸參數者。 【實施方式】 壹.本發明之基本技術特徵 請參看第六至八圖所示，本發明士 个货月主要係可以解決三角量測 系統逐點測量的速度問題，故而且古 W具有快速檢驗物體形貌的能 力’為達上述功效，本發明之基本技術特徵包括有. -掃描模組⑽，其用以產生平行光軸掃描的掃描光束； Ο 一第一光檢測器（20); 一第二光檢測器（21); -分光裝置⑽，用以將該掃描光束分成至少兩束，其一 該掃描光束由該第-光檢測器⑽接收，用以做為位置檢測與 信號補償，而另-該掃描光束則作為三角量測_試光束，該 .測試光束經過-待測物⑴後散射，再經由一成像透鏡⑽而成 像於該第二光檢測器⑼上，而該分光褒置BS(3〇)之較佳實施 ©例，係為分光菱鏡（30a)(如第六圖所示），以及一繞射元件 (30b)(如第七圖所示）之其中一種；及 一訊號處理單元（50)，該訊號處理單元（5〇)分別與該第一 光檢測器（20)、該第二光檢測器（21)及該掃描模組（1〇)電性連 接，用以控制該掃描模組（1〇)運作，及將該第一光檢測器（2〇) 及該第二光檢測器（21)之檢測信號進行運算處理及比對，進而 求得該待測物（1)的形貌尺寸參數。 明參看第六至八圖所示，本發明主要係可以解決三角量測 13 200928287 系、洗逐點測#的逮度問題，故而具有快速檢驗物體形貌的能 力為達上述功效，本發明量測方法包括有以下步驟： (a) 以掃（丨〇)產生平行光軸掃㈣掃描光束； (b) 以分光裝置⑽）將該掃描光束分成二束或二束以上； (c) 使其-該掃描光束由1 —光檢卿⑽接收而為一 參考光信號； Ο ⑷使另-該掃描光束作為三角量測的測試光束而投射至 一待測物（1)後散射； (e)使由該待測物⑴散射後的該測試光束經由—成像透鏡 (4〇)成像於-第二光檢測器（21)上而為一檢測光信號；及 ⑴以訊號處理單元（5〇)將該參考光錢及該㈣光信號以 一運算程式進行運算處理及比對，進而求得該待測物（1)的形 尺寸參數。 貳.本發明技術特徵之具體實施 ❹ 2.1掃描模組之具體實施 本發明之掃描模組（10)之掃描裝置（12)的實施方式很多， 只要能產生掃描平行光束的裝置或設備均可，例如音又掃插 器’或是聲光掃描器，都是一種可行的實施例。本發明以下所 舉的掃描模組（10)為本發明實驗所具體實施。 請參看第六至八圖所示’該掃描模組（10)包括有一用以發 出光束的光源（11)，一使該光束做掃描動作之掃描褒置（12)， 及一用以將該光束校準而形成該平行光軸掃描的掃描光束之透 200928287 鏡（13)，該光源（11)的實施可以是鹵素燈、LED或雷射光源， 本發明實驗例的實施例係為一雷射光源，該雷射光源係由_雷 射二極體（11a)發出雷射光。另’該透鏡（13)係選自透鏡及 準直透鏡（13a)其中一種，且透過該準直透鏡（i3a)調校時，使 平行光束垂直於該第一光檢測器（20)上，並在該第一光檢測器 (20)的中心軸線上，以提高檢測的精度，並在量測前先調校出 第一光檢測器（20)與第二光檢測器（21)的幾何中心座標。 ❹ 請參看第六圖所示’上述具體實施例中，該掃描裝置（12) 包括有一馬達（120)、一輸出轉轴（121)及一反射鏡（122)，該馬 達（120)經由該輸出轉軸（121)連動該反射鏡（122)做旋轉，該反 射鏡（122)用以反射該光源（11)所發出的光束。 請參看第六圖所示，上述具體實施例中，該掃描裝置（12) 更包括有一信號產生裝置（123)，其與該訊號處理單元（50)電性 連接，用以產生一驅動該馬達（120)運作的鋸齒波信號，使光束 ❹以上中心點（軸）轉向。 2. 2光檢測器之具體實施 請參看第六圖所示，本發明之第一光檢測器（20)與該第二 光檢測器（21)之第一種具體實施例，係為一位置靈敏光檢測器 PSD’用以檢測入射光能量的重心位置’並由該訊號處理單元（50) 進行信號處理即可測出光點的重心的坐標位置。 本發明之第一光檢測器（20)與該第二光檢測器（21)之第二 種具體實施例’該第一光檢測器（20)與該第二光檢測器（21)係 15 200928287 為-高速CCD裝置（圖中未示），用以檢測入射光 . 置’並由該訊號處理單元⑽進行信號處理：：重心位 心的坐標位置。 、j出光點的重 本發明之第—光檢測器（⑻與該第二光檢測 種具體實施例，兮楚 1)之第三 m酬以—光檢測器⑽與該第- 為一 c·裝置（圖中未示），用以檢測入射光能量檢的^⑻係 並由該訊號處理單元進行信號處理即可測出光點的重心位置， ⑮位置。 重,心的坐標 2· 3平台運作之具體實施 本發明更包含有一供該待測物⑴逐步位移的平 示），該平台可供在x軸移動且平行於光束前進方向=圖中未 -號處理單元⑽内建之一記憶單元（圖中未示）記錄=該訊 、可得到一組對應於各個y轴的s曲線，該s曲線包含有，而 光檢測11(20)與該第二光檢測器（21)的非線性誤差與測量^ ❺的光機系統誤差，且該訊號處理單元（5〇)之該運算程式=含= —二維曲線擬合程式，再將結果代入該二維曲線擬合程式，= 可叶算出函數對應關係，再將實際測量的結果代入該函數而可 得該待測物（1)的尺寸數值。 參.本發明具體實施的運作 請參看第五圖所示，理想上γ軸掃描應與掃描角0或時間 t成線性關係，因此，可利用控制控制馬達（12〇)的鋸齒波信號 來確認Y軸的位置，然而實際上Y軸與時間軸之間為非線性關 16 200928287 係’因此無法直接由時間軸來確認Y軸的座標位置。有鑑於此， 本發明採用分光裝置（30)、第一光檢測器（20)及第二光檢測器 (21)的方法解決問題，如第六圖所示。 請參看第六、七圖所示，本發明係利用分光裝置BS(30)， 該分光裝置（3〇)可以是分光菱鏡（3〇a)，亦可為繞射元件 (30b)(如第七圖所示），用以將掃描光束分成至少兩束其中的 反射光束未經過任何待測物（1)，直接射向第一光檢測器（2〇)， ❹田做位置檢測與信號補償的工作。而穿透光則作為三角量測的 測試光束，而直接穿透分光裝置（30)的另一道光束，作為三角 量測中的投射（檢測）光束，在經過待測物（1) ( 〇 b j e c t)後散射， 由成像透鏡（40) ( IL)成像於第二光檢測器（21)上。 . 由於第一光檢測器（20)與第二光檢測器（21)的型號相同， -有相同的特性，經過校正之後，使兩顆的光檢測器（2〇)(2丨）的 光軸重合，因此第二光檢測器（21)可根據第一光檢測器（20)的 © k號確s忍Y座標的大小，並根據檢測結果及公式（2)的關係得 到待測物（1)的參數X。第一光檢測器⑽）的信鎌了可監測光 源的功率外，也同時擷取馬達U20)轉速的訊息，提供了進一步 δ孔號處理及提升精度的依據。 本發明於實際具體運作時，係採用67〇nm的雷射二極體 (11a)及25. 4mmx25. 4mmx25· 4mm立方的分光裝置（3〇),實驗中 採用TEK AFG320信號產生器的鋸齒波作為馬達（12〇)的驅動信 號，並採用 Cambridge Technology 公司，型號 CTI Micr〇Max 671 17 I > 200928287 的帚描振鏡田做掃描的工具，在系統中採用脇麵⑽的位置 靈敏檢測器S3931(lmmx6麵m)做為光檢測器（20)(21)進行檢 測，而做為掃描之透鏡（13)CL的焦距為15〇mm。 明參看第六圖所示，首先將平行光朿與準直透鏡（13a)調 校，使掃描光束與第一光檢測器（20)垂直並在中心線之上，以 提高檢測的精度，並在量測前先調技出第一光檢測器（20)與第 一光檢測器（21)的幾何中心座標，並紀錄下第一光檢測器（2〇) ❹與第二光檢測器（21)的座標參數及相對的差值，作為初始的偏 置（bias)值。而後再採取比對的方式，利用平台逐步位移待測 物（1) ’使在±2mm範圍内以每次0. 1mm的尺度沿X軸移動並記 錄下實驗結果，因此可得一組對應於各個y軸的s曲線，此一 .曲線包含有第一光檢測器（2 0)與第二光檢測器（21)的非線性誤 差與測量系統的光機系統誤差。將此一結果代入並進行二維曲 線擬合的程式計算出函數的對應關係，之後再將實際測量的結 ❹果代入此一函數即可得待測物（1)的尺寸。 請參看第八、九圖所示，係為對應於y=〇及y=lmm位置，在X 軸移動1mm的實驗結果，實驗結果顯示對線性的標準差為 0· 0145，對三階多項式的標準差為0. 0135。 肆.結論 因此，藉由上述結構及方法的建立，使本發明可以解決三 角量測系統逐點測量的速度問題，具有快速檢驗物體形貌的能 力，不僅可以改善系統的架構與量測方法，而且在不需要精密 18. 200928287 伺服控制馬達及透鏡的情況下進行測量，而得以在土1_範圍内 對線性的標準差小於0. 0145，因而具有高精度、高測速以及成 本相對低廉等特點等諸多的特點。 以上所述，僅為本發明之一可行實施例，並非用以限定本 發明之專利範圍，凡舉依據下列申請專利範圍所述之内容、特 徵以及其精神而為之其他變化的等效實施，皆應包含於本發明 之專利範園内。 ⑩ 本發明承蒙國科會計晝補助研究，其所具體界定於申請專 利範圍之結構特徵，未見於同類物品，且具實用性與進步性， 已符合發明專利要件，爰依法具文提出申請，謹請釣局依法 核予專利，以維護本申請人合法之權益。 【圖式簡單說明】 . 第一圖係單點三角量測系統結構圖。 第二圖係掃描式三角量測系統示意圖。 φ 第三圖係掃描系統結構圖。 第四圖（a)係光檢測器聚焦光束之示意圖。 第四圖（b)係光檢測器之等效電路圖。 第五圖係信號產生器之訊號時序關係示意圖。 第六圖係本發明基本系統架構示意圖。 第七圖係本發明基本系統架構之另一實施示意圖。 第八圖係本發明對應於平台移動的示意圖。 第九圖係本發明對應於平台另—移動的示意圖。 200928287 【主要元件符號說明】 (10)掃描模組 (1)待測物 (11a)雷射二極體 (121)輸出轉軸 (13)(61)透鏡 (21)第二光檢測器 (30b)繞射元件 β (60)雷射單元 (12)掃描裝置 (122)(65)反射鏡 (13a)(64)準直透鏡 (30)分光裝置 (40)(66)成像透鏡 (63)光檢測器 (11)光源 (120)馬達 (123)信號產生器 (20)第一光檢測器 (30a)分光菱鏡 (50)訊號處理單元 ❹ 20Lb — la lb + la (16) It can be seen from the above equation that the equal sign right form is proportional to the position coordinate J, and is independent of other parameters, and the position detected by the photodetector (63) is the incident light energy. Center of gravity. The coordinate position of the center of gravity of the spot can be measured by appropriately designing the signal processing circuit according to the mathematical formula. However, when detecting the surface topography or flaws, the Φ type of the platform scan is usually used, so that the detection speed is lowered. Therefore, the conventional structure is neglected due to poor design, and there is indeed a need for further improvement. The inventors of the present invention have been researching the subsidy of the National Accounting Institute, and have been working hard to develop a scanning triangulation system and method, which not only improves the lack of conventional structures, but also has high precision and high speed. And so on. SUMMARY OF THE INVENTION The main object of the present invention is to provide a speed problem that can be solved by point-by-point measurement of a triangulation measurement system, and thus has the ability to quickly check the shape of an object, not only 11. 200928287 can improve the architecture and measurement method of the system, and Measurements can be made without the need for precision control of the motor and lens. It is possible to obtain an accuracy of less than 0.G145 in the range of 1 mm of soil, and a high precision, high speed and relatively low cost. Scanning triangulation system and method. The technical means adopted by the present invention to achieve the effect of the above-mentioned two-corner measurement system is that it includes a module, a first photodetector, a second photodetector, a spectroscopic device, and a subtraction processing unit. Sweeping _ to generate a parallel scan of the scanned scanning beam' and dividing the scanning beam into at least two by the spectroscopic device - the scanning beam is received by the 3H first photodetector for position detection and signal compensation H. The scanning beam is used as a triangular test beam. The test beam is scattered by the object to be tested, and then formed by an imaging lens: like the second photodetector, and the signal processing unit and the first The optical detector, the second photodetector and the scanning module are electrically connected to control the operation of the scanning module, and then the detection signals of the first photodetector and the second photodetector are input into operation. Processing and comparison, and then obtaining the shape size parameter of the object to be tested. The technical means adopted by the present invention to achieve the above-described triangular measurement method is that the scanning beam is generated by the scanning module and scanned by the parallel optical axis, and then the beam splitting device = the scanning beam is divided into m-lights. The photodetector receives the -reference optical signal, and then causes the scanning beam to be projected as a triangulated test beam to the object to be tested for backscattering, so that the ray beam scattered by the object to be tested is imaged The lens is imaged on a second optical detector and is a detection optical signal, and the reference optical signal and the detection optical signal are processed and processed to obtain the shape of the object to be tested. Size parameter. [Embodiment] 基本. The basic technical features of the present invention are shown in Figures 6 to 8. The invention is mainly for solving the speed problem of the point-by-point measurement of the triangulation measurement system, and the ancient W has a quick test. The ability of the topography of the object is to achieve the above-mentioned effects. The basic technical features of the present invention include: a scanning module (10) for generating a scanning beam scanned by a parallel optical axis; Ο a first photodetector (20); a second photodetector (21); a light splitting device (10) for dividing the scanning beam into at least two beams, one of the scanning beams being received by the first photodetector (10) for position detection and signal compensation, In addition, the scanning beam is used as a triangulation _ test beam, and the test beam is scattered by the object to be tested (1), and then imaged on the second photodetector (9) via an imaging lens (10), and the spectroscopic 褒A preferred embodiment of the BS (3〇) is a splitting mirror (30a) (as shown in Figure 6) and a diffractive element (30b) (as shown in Figure 7); And a signal processing unit (50), the signal processing unit (5〇) points The first photodetector (20), the second photodetector (21) and the scanning module (1〇) are electrically connected to control the operation of the scanning module (1〇), and The detection signals of the first photodetector (2〇) and the second photodetector (21) are subjected to arithmetic processing and comparison, and the topography size parameter of the object to be tested (1) is obtained. Referring to the sixth to eighth diagrams, the present invention mainly solves the problem of the triangulation measurement of the 200928287 series and the cleaning point measurement#, so that the ability to quickly check the shape of the object is the above-mentioned effect, and the amount of the invention is The measuring method comprises the following steps: (a) generating a parallel optical axis sweep (four) scanning beam by using a sweep (丨〇); (b) splitting the scanning beam into two or more beams by a spectroscopic device (10); (c) - the scanning beam is received by a photo-inspector (10) as a reference optical signal; Ο (4) causes the other scanning beam to be projected as a triangulated test beam onto a test object (1) and backscattered; (e) The test beam scattered by the object to be tested (1) is imaged on the second photodetector (21) via an imaging lens (4) to be a detection light signal; and (1) is a signal processing unit (5〇) The reference light money and the (four) light signal are processed and compared by an operation program, and the shape size parameter of the object to be tested (1) is obtained.具体. Specific implementation of the technical features of the present invention ❹ 2.1 Implementation of the scanning module The scanning device (12) of the scanning module (10) of the present invention has many embodiments, as long as it can produce a device or device for scanning parallel beams. For example, a sound sweeper or an acousto-optic scanner is a viable embodiment. The scanning module (10) of the present invention is embodied in the experimental embodiment of the present invention. Referring to Figures 6 to 8, the scanning module (10) includes a light source (11) for emitting a light beam, a scanning device (12) for causing the light beam to perform a scanning operation, and a The beam is calibrated to form a scanning beam of the parallel optical axis scanning through the 200928287 mirror (13). The light source (11) can be implemented as a halogen lamp, an LED or a laser source. The embodiment of the experimental example of the present invention is a laser. A light source that emits laser light from a laser diode (11a). Further, the lens (13) is selected from one of a lens and a collimating lens (13a), and is calibrated through the collimating lens (i3a) such that the parallel beam is perpendicular to the first photodetector (20). And on the central axis of the first photodetector (20) to improve the accuracy of the detection, and adjust the geometry of the first photodetector (20) and the second photodetector (21) before the measurement Center coordinates. ❹ Referring to the above-mentioned embodiment, the scanning device (12) includes a motor (120), an output shaft (121) and a mirror (122) via which the motor (120) The output shaft (121) rotates the mirror (122) for reflecting the light beam emitted by the light source (11). Referring to the sixth embodiment, in the above embodiment, the scanning device (12) further includes a signal generating device (123) electrically connected to the signal processing unit (50) for generating a driving motor. (120) The operating sawtooth signal causes the beam to steer above the center point (axis). 2. The specific implementation of the photodetector is shown in the sixth figure. The first specific embodiment of the first photodetector (20) and the second photodetector (21) of the present invention is a position. The sensitive photodetector PSD' is used to detect the position of the center of gravity of the incident light energy and is processed by the signal processing unit (50) to measure the coordinate position of the center of gravity of the spot. A second embodiment of the first photodetector (20) and the second photodetector (21) of the present invention, the first photodetector (20) and the second photodetector (21) are 15 200928287 is a high-speed CCD device (not shown) for detecting incident light. The signal processing is performed by the signal processing unit (10): the coordinate position of the center of gravity. , the light exit point of the present invention - the photodetector ((8) and the second light detecting species specific embodiment, the first one), the third m reward - the photodetector (10) and the first - a c · The device (not shown) is used to detect the incident light energy detection (8) system and the signal processing unit performs signal processing to measure the position of the center of gravity of the light spot, 15 positions. The embodiment of the present invention further comprises a flat display for the stepwise displacement of the object to be tested (1), the platform is movable in the x-axis and parallel to the direction of travel of the beam = not in the figure - The processing unit (10) has a built-in memory unit (not shown) recording = the signal, and a set of s curves corresponding to the respective y-axis are obtained, and the s-curve includes, and the light detecting 11 (20) and the first The nonlinear error of the two-photodetector (21) is different from the optical system error of the measurement, and the operation program of the signal processing unit (5〇)=== two-dimensional curve fitting program, and then the result is substituted into the The two-dimensional curve fitting program, = can calculate the correspondence relationship of the leaf, and then substitute the actual measured result into the function to obtain the size value of the object to be tested (1). For the operation of the specific implementation of the present invention, please refer to the fifth figure. Ideally, the γ-axis scan should be linear with the scan angle 0 or time t. Therefore, it can be confirmed by the sawtooth signal of the control motor (12〇). The position of the Y-axis, but in fact the nonlinearity between the Y-axis and the time axis is 16 200928287. Therefore, the coordinate position of the Y-axis cannot be confirmed directly from the time axis. In view of this, the present invention solves the problem by the method of the spectroscopic device (30), the first photodetector (20) and the second photodetector (21), as shown in the sixth figure. Referring to Figures 6 and 7, the present invention utilizes a beam splitting device BS (30), which may be a beam splitting mirror (3〇a) or a diffractive element (30b) (e.g. The seventh figure shows that the reflected beam is divided into at least two beams, and the reflected beam does not pass through any object to be tested (1), and directly faces the first photodetector (2〇), and the position detection and signal are made in Putian. Compensation work. The penetrating light acts as a triangulated test beam, and directly passes through another beam of the spectroscopic device (30) as a projection (detection) beam in the triangulation measurement, after passing through the object to be tested (1) (〇bject) Backscattering is imaged by an imaging lens (40) (IL) onto a second photodetector (21). Since the first photodetector (20) and the second photodetector (21) are of the same type, - have the same characteristics, after the correction, the two photodetectors (2 〇) (2 丨) light The axes coincide, so the second photodetector (21) can determine the size of the Y coordinate according to the © k of the first photodetector (20), and obtain the object to be tested according to the relationship between the detection result and the formula (2) ( 1) The parameter X. The signal from the first photodetector (10) is used to monitor the power of the light source, and also captures the speed of the motor U20), providing a basis for further δ hole number processing and lifting accuracy. In the actual operation of the present invention, a 67 〇nm laser diode (11a) and a 25. 4 mm×25. 4 mm×25·4 mm cubic spectroscopy device (3 〇) are used, and the sawtooth wave of the TEK AFG320 signal generator is used in the experiment. As the driving signal of the motor (12〇), and using the scanning technology of Cambridge Technology Co., model CTI Micr〇Max 671 17 I > 200928287, the position sensitive sensor S3931 of the threat surface (10) is used in the system. (lmmx6 face m) is detected as the photodetector (20) (21), and the focal length of the lens (13) CL as a scan is 15 mm. Referring to the sixth figure, the parallel pupil and the collimating lens (13a) are first calibrated so that the scanning beam is perpendicular to the first photodetector (20) and above the center line to improve the detection accuracy, and Before the measurement, the geometric center coordinates of the first photodetector (20) and the first photodetector (21) are first adjusted, and the first photodetector (2〇) and the second photodetector are recorded ( 21) The coordinate parameters and relative differences are used as the initial bias value. Then take the comparison method, use the platform to gradually shift the object to be tested (1) 'to move in the range of ±2mm on the scale of 0. 1mm along the X axis and record the experimental results, so a set of corresponding The s-curve of each y-axis, which includes the nonlinear error of the first photodetector (20) and the second photodetector (21) and the optomechanical error of the measurement system. Substituting this result into a two-dimensional curve fitting program calculates the correspondence of the functions, and then substituting the actual measured result into this function to obtain the size of the object to be tested (1). Please refer to the eighth and ninth figures, which are the experimental results corresponding to the position of y=〇 and y=lmm, and move 1mm on the X-axis. The experimental results show that the standard deviation of linearity is 0·0145, for the third-order polynomial The standard deviation is 0. 0135.结论. Conclusion Therefore, with the establishment of the above structure and method, the present invention can solve the speed problem of point-by-point measurement of the triangulation measurement system, and has the ability to quickly check the shape of the object, which can not only improve the system architecture and measurement method, Moreover, the measurement is performed without the need of precision 18. 200928287 servo-controlled motor and lens, and the standard deviation of linearity in the soil 1_ range is less than 0. 0145, thus having high precision, high speed measurement and relatively low cost. And many other features. The above is only one of the possible embodiments of the present invention, and is not intended to limit the scope of the patents of the present invention, and the equivalents of other variations of the contents, the features and the spirit of the following claims. All should be included in the patent garden of the present invention. 10 The invention is subject to the research of the National Accounting and Subsidy Grant, which is specifically defined in the structural characteristics of the scope of application for patents. It is not found in similar articles, and has practicality and progress. It has met the requirements of invention patents, and has submitted applications according to law. The fishing bureau is required to grant a patent in accordance with the law to protect the lawful rights and interests of the applicant. [Simple description of the diagram] The first diagram is a structural diagram of the single-point triangulation measurement system. The second picture is a schematic diagram of a scanning triangulation system. φ The third figure is the structure diagram of the scanning system. The fourth figure (a) is a schematic diagram of the light detector focusing the light beam. The fourth figure (b) is an equivalent circuit diagram of the photodetector. The fifth figure is a schematic diagram of the signal timing relationship of the signal generator. The sixth figure is a schematic diagram of the basic system architecture of the present invention. The seventh figure is another schematic diagram of another embodiment of the basic system architecture of the present invention. The eighth figure is a schematic diagram of the present invention corresponding to platform movement. The ninth diagram is a schematic diagram of the present invention corresponding to the other movement of the platform. 200928287 [Explanation of main component symbols] (10) Scanning module (1) Object to be tested (11a) Laser diode (121) Output shaft (13) (61) Lens (21) Second photodetector (30b) Diffraction element β (60) Laser unit (12) Scanning device (122) (65) Mirror (13a) (64) Collimating lens (30) Beam splitting device (40) (66) Imaging lens (63) Light detecting (11) light source (120) motor (123) signal generator (20) first photodetector (30a) beam splitting mirror (50) signal processing unit ❹ 20