TW200916677A - Fluid control device - Google Patents
Fluid control device Download PDFInfo
- Publication number
- TW200916677A TW200916677A TW097119845A TW97119845A TW200916677A TW 200916677 A TW200916677 A TW 200916677A TW 097119845 A TW097119845 A TW 097119845A TW 97119845 A TW97119845 A TW 97119845A TW 200916677 A TW200916677 A TW 200916677A
- Authority
- TW
- Taiwan
- Prior art keywords
- joint
- fluid control
- joint member
- members
- block
- Prior art date
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 40
- 238000007789 sealing Methods 0.000 claims abstract description 16
- 238000003780 insertion Methods 0.000 claims description 9
- 230000037431 insertion Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000011010 flushing procedure Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 3
- 230000013011 mating Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Valve Housings (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007144919A JP2008298177A (ja) | 2007-05-31 | 2007-05-31 | 流体制御装置 |
| PCT/JP2008/059631 WO2008146778A1 (ja) | 2007-05-31 | 2008-05-26 | 流体制御装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200916677A true TW200916677A (en) | 2009-04-16 |
Family
ID=40075019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097119845A TW200916677A (en) | 2007-05-31 | 2008-05-29 | Fluid control device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2008298177A (enExample) |
| TW (1) | TW200916677A (enExample) |
| WO (1) | WO2008146778A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6694618B2 (ja) * | 2016-06-21 | 2020-05-20 | 株式会社フジキン | 流体制御装置 |
| WO2018047907A1 (ja) * | 2016-09-12 | 2018-03-15 | 株式会社フジキン | 流体制御装置、これに用いるベースブロックおよび流体制御装置の製造方法 |
| KR20190075100A (ko) | 2016-10-24 | 2019-06-28 | 가부시키가이샤 후지킨 | 유체제어장치 및 이 유체제어장치를 사용한 제품 제조방법 |
| US20200248310A1 (en) | 2017-08-31 | 2020-08-06 | Fujikin Incorporated | Joint block and manufacturing method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS46614Y1 (enExample) * | 1966-09-14 | 1971-01-11 | ||
| JPS5310573Y2 (enExample) * | 1973-12-11 | 1978-03-22 | ||
| US6951226B2 (en) * | 2001-07-13 | 2005-10-04 | Talon Innovations, Inc. | Shear-resistant modular fluidic blocks |
| JP2008133933A (ja) * | 2006-11-29 | 2008-06-12 | Ckd Corp | 連結用アダプタ |
-
2007
- 2007-05-31 JP JP2007144919A patent/JP2008298177A/ja active Pending
-
2008
- 2008-05-26 WO PCT/JP2008/059631 patent/WO2008146778A1/ja not_active Ceased
- 2008-05-29 TW TW097119845A patent/TW200916677A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008146778A1 (ja) | 2008-12-04 |
| JP2008298177A (ja) | 2008-12-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI387696B (zh) | 流體控制裝置及其組立方法 | |
| TW200912169A (en) | Fluid controlling device | |
| TW524945B (en) | A fluid control device | |
| TW200916678A (en) | Fluid control device | |
| US6273139B1 (en) | Fluid control apparatus | |
| IL130870A (en) | Device for controlling Nigerians | |
| TW200916677A (en) | Fluid control device | |
| JP3780096B2 (ja) | プロセスガス供給ユニット | |
| EP0947753A2 (en) | Fluid coupling | |
| KR20110060841A (ko) | 유체 장치 | |
| JPH1011147A (ja) | 遮断開放器およびこれを備えた流体制御装置 | |
| JP4780555B2 (ja) | 流体制御装置 | |
| CN103003578A (zh) | 阀子座 | |
| JP2007162734A (ja) | 流体制御装置用継手およびそれを用いた流体制御装置 | |
| JP4832428B2 (ja) | 流体制御装置 | |
| JP5437779B2 (ja) | 流体装置 | |
| TW200839132A (en) | Fluid coupling | |
| JP4341052B2 (ja) | 通路ブロックの結合装置 | |
| TWI470160B (zh) | 流體機器單元構造、以及流體機器單元構造之組裝方法 | |
| JPH11153268A (ja) | 特殊ガス機器の接続装置 | |
| JP4352412B2 (ja) | 圧縮機 | |
| JPH09329255A (ja) | 部材の連結構造 | |
| KR20080027285A (ko) | 통로 블록의 결합 장치 | |
| JP2005351584A (ja) | ガス連絡管 | |
| WO2003085267A8 (en) | A unit consisting of a compressor element and a pressure vessel and a connection pipe therefor |