TW200916677A - Fluid control device - Google Patents

Fluid control device Download PDF

Info

Publication number
TW200916677A
TW200916677A TW097119845A TW97119845A TW200916677A TW 200916677 A TW200916677 A TW 200916677A TW 097119845 A TW097119845 A TW 097119845A TW 97119845 A TW97119845 A TW 97119845A TW 200916677 A TW200916677 A TW 200916677A
Authority
TW
Taiwan
Prior art keywords
joint
fluid control
joint member
members
block
Prior art date
Application number
TW097119845A
Other languages
English (en)
Chinese (zh)
Inventor
Tomohiro Nakata
Tsutomu Shinohara
Michio Yamaji
Wataru Okase
Shuji Moriya
Original Assignee
Fujikin Kk
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk, Tokyo Electron Ltd filed Critical Fujikin Kk
Publication of TW200916677A publication Critical patent/TW200916677A/zh

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/003Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Chemical Vapour Deposition (AREA)
TW097119845A 2007-05-31 2008-05-29 Fluid control device TW200916677A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007144919A JP2008298177A (ja) 2007-05-31 2007-05-31 流体制御装置
PCT/JP2008/059631 WO2008146778A1 (ja) 2007-05-31 2008-05-26 流体制御装置

Publications (1)

Publication Number Publication Date
TW200916677A true TW200916677A (en) 2009-04-16

Family

ID=40075019

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097119845A TW200916677A (en) 2007-05-31 2008-05-29 Fluid control device

Country Status (3)

Country Link
JP (1) JP2008298177A (enExample)
TW (1) TW200916677A (enExample)
WO (1) WO2008146778A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6694618B2 (ja) * 2016-06-21 2020-05-20 株式会社フジキン 流体制御装置
WO2018047907A1 (ja) * 2016-09-12 2018-03-15 株式会社フジキン 流体制御装置、これに用いるベースブロックおよび流体制御装置の製造方法
KR20190075100A (ko) 2016-10-24 2019-06-28 가부시키가이샤 후지킨 유체제어장치 및 이 유체제어장치를 사용한 제품 제조방법
US20200248310A1 (en) 2017-08-31 2020-08-06 Fujikin Incorporated Joint block and manufacturing method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (enExample) * 1966-09-14 1971-01-11
JPS5310573Y2 (enExample) * 1973-12-11 1978-03-22
US6951226B2 (en) * 2001-07-13 2005-10-04 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (ja) * 2006-11-29 2008-06-12 Ckd Corp 連結用アダプタ

Also Published As

Publication number Publication date
WO2008146778A1 (ja) 2008-12-04
JP2008298177A (ja) 2008-12-11

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