TW200914188A - Laser processing apparatus - Google Patents

Abstract

The present invention provides a laser processing apparatus which has a simple optical system architecture, is easy to adjust, is made of easily accessible material and has high selection freedom in the length of longitudinal axis of beam spots formed thereby or in the width of beam. The laser processing apparatus comprises a laser 13 and an optical component set for directing the laser beam emitted by the laser to the processed surface of an article to be processed and adjusting the shape of beam spots formed on the processed surface. The present invention is characterized in that the optical component set consists of reflective mirrors comprising at least a concave mirror 43 and a convex cylindrical mirror 45 and that lenses or complicated polygonal mirrors are not used to form beam spots with a longitudinal axis.

Description

200914188 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a laser processing apparatus that irradiates a workpiece with a laser beam for processing, and more specifically, can adjust the processing of the object to be processed. A laser processing device in the shape of a beam spot of a laser beam.

The laser processing of the present invention comprises: using a brittle material such as a glass substrate, a ceramic of a sintered material, a single crystal germanium, a semiconductor wafer, or a ceramic substrate to perform thermal stress generated by laser heating at a temperature lower than a softening point. Laser scribing to form a scribe line, and laser ablation processing for heating materials other than brittle materials at temperatures above the melting temperature. ', [Prior Art] + A processing method using a laser for local heating has been practically used. For example, in the field emission melting process, a laser beam is irradiated onto a workpiece to form a beam spot on the processing surface, and the beam is spotted along the trajectory of the beam spot by the stalk. : "The groove is formed. If the laser line is added with I, the laser spot is scanned, and the substrate of the brittle material which is the object to be processed is twisted by the point processing line, then the rod is fired, and the leaf is turned into a mark. ..., Into the cold, so that the thermal stress is generated to form a crack ^ TT7J = . ^ ^ ^ City 0 field shot of the laser beam (also known as the original f shot, Feng reduced the processing width to improve the processing position Directly from the laser shot, the "knowing speed" laser processing device does not directly use the circular laser point into the 4 = beam (original laser) directly on the processing surface (original laser) cross-sectional shape = and Adjusting the laser beam on the optical path to form a beam spot having a shape of a long axis in an elliptical shape, an oblong shape, a long axis, and the like on the processing surface. A method of forming a beam point having a long axis from a circular beam of a circular section to The use of a lens optical system to form a beam point with a long axis. A cylindrical lens and a collecting lens are disposed on the optical path of the laser beam to trim the original beam of the circular cross section of the curved beam into an elliptical laser beam (see, for example, Patent Document 1). A method of forming a beam spot having a substantially long axis by using a polygon mirror that uses a plurality of reflecting surfaces (for example, 64 faces) to rotate at a high speed around a grain axis, that is, by a pair of high-speed rotating materials, The beam diameter has been trimmed into a finer laser beam from a certain direction of illumination, and the laser beam reflects the laser beam in a certain range of angles by the polygons of the polygons, and the rods are repeated every time. In the meantime, the direction in which the laser beam is formed is substantially in the direction of the long axis; and the method of forming the special point (see, for example, [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-289388 (Patent Document 2) Open 2〇〇6_559〇8 Bulletin [Invention] The learning system forms a long axis with elliptical 丨, oblong, etc.: a beam point (hereinafter referred to as a long-axis beam spot), which is basically a laser = The light path between the processing surfaces The concentrating lens (10) is configured as a parallel lens. Then, the length of the long axis of the beam point and the length of the short axis orthogonal to the long axis can be adjusted by adjusting the length of the lens and the path of the illuminating gate. The beam spot adjustment method is very simple and Ww, and it is difficult to use = 200914188: The high-magnitude mirror with high transmittance in the wavelength region of the laser beam must also process the high-priced material into a circular cope with a co2 laser, although it is ' For example, in order to make a high-priced material and use it as a lens material, the 欠 欠 material itself contains toxic substances, so it is quite noticeable. Although it is usually covered with surface 敕#, ^ dangerous. H surface is overall, but when the lens is broken, it is quite f

V. In other respects, the beam spot formed by the method of adjusting the shape of the beam spot by the polygonal mirror is of good quality, and the complicated shape and complicated mechanism are difficult to adjust. Therefore, the purpose of the present invention is to provide an optical system structure that is easy to adjust optically and uses a laser processing apparatus that obtains an early beam spot. In order to adjust the light, the object of the present invention is to provide a laser processing apparatus for adjusting the shape of a beam spot: a shaft length or a short axis length (also referred to as a beam width). In order to solve the above problems, the laser processing apparatus of the present invention includes a "fire emission" and directs a laser beam emitted from the laser to a workpiece surface, and is formed by a laser beam. A group of beam point elements on a machined surface; characterized in that the group of optical elements is composed of a combination of mirror groups including at least a mirror and a convex or concave cylindrical mirror. Here, as the laser beam of the light source, the appropriate type I and I3 may be used depending on the material of the workpiece, the force IS: "laser scribing processing, f-dissolution processing, etc.", for example, when processing a glass substrate, it is preferable to use it. C〇2 laser. 200914188 According to the invention, the shape of the beam spot is adjusted by using a mirror optical system using a plurality of mirrors including a concave mirror and a convex or concave cylindrical mirror. That is, mainly by a concave mirror The laser beam is condensed to set the beam width, mainly by expanding the laser beam in a direction by a cylindrical mirror (if it is a concave cylindrical mirror, it is enlarged by imaging away from the concave focus) The length of the long axis, by setting the beam width and the length of the long axis, sets the shape of the long-axis beam point (the beam point having the long axis of an ellipse, an ellipse, etc.).

Each of the K mirrors can also be coated to increase the reflectance depending on the type of laser being irradiated. Further, an optical element such as a lens that transmits a laser beam is not included in the optical path. According to the present invention, since the optical elements disposed on the optical path for adjusting the shape of the beam spot are constituted by a combination of mirror groups, it is not necessary to use a high-priced laser light transmissive material. An optical system for morphing the shape of the beam spot can be formed from readily available materials. Since the concave mirror or the cylindrical mirror can also be formed with an easy material, a plurality of concave mirrors, convex or concave cylindrical mirrors having different radii of curvature can be prepared, and thus the shape of the beam spot can be adjusted by replacing them. Therefore, the degree of freedom in selecting the shape of the beam spot can be increased. In the above invention, the concave mirror and the cylindrical mirror may be provided with a concave mirror on the optical path close to the laser and a cylindrical mirror on the optical path close to the side of the reinforcing surface. Therefore, although the shape of the laser beam is first reduced by a concave mirror to adjust the beam width 'but the result' can guide the laser beam to the λ face cylindrical mirror while reducing the beam size, and can reduce the cylindrical mirror reflection. The size of the face. In this case, the concave mirror and the cylindrical mirror may be configured such that the concave mirror and the cylindrical surface of the cylinder are set to have a large radius of curvature and a long axis direction and a short axis working surface. A beam spot having a shape larger than a curvature radius direction of a surface of the cylindrical mirror is formed by adding a radius of a convex column brother that is closer to the processing surface side than the processing surface. The large diameter can reduce the expansion of the optical path, and can reduce the size of the reflection surface of each mirror. In the middle of the month, 'the beam point adjustment mechanism can also be provided' by adjusting the light path length between the mouth surface and the concave mirror, and one of the processing surface and the cylindrical mirror to adjust the beam spot in the long axis direction and the short axis direction. The length. In this way, the length of the long axis can be mainly adjusted by changing the optical path length between the processing surface and the cylindrical mirror by changing the optical path length between the processing surface and the concave mirror. In the above invention, the beam spot adjusting mechanism may further include: a first supporting system fixed concave mirror, and fixed to adjust an optical path of any of the laser beams before the concave mirror reflection or the reflected laser beam. The first plane mirror; the second building body 'fixes the cylindrical mirror, and is fixed to adjust the laser beam before the reflection of the cylindrical mirror or the reflected laser beam: the second light path of the laser beam a first support body elevating mechanism for elevating and lowering the second support body with a rod oriented in a vertical direction as a fulcrum; and a second support body elevating mechanism having a rod as a fulcrum and a lower side of the first support body 2 support body lifting. Thereby, the beam visibility can be mainly adjusted by adjusting the height of the first support, and the length of the major axis can be mainly adjusted by adjusting the height of the second support. In the above invention, the concave mirror may further include a concave reflecting plate and a concave deformation mechanism for changing a radius of curvature of the concave surface of the 200914188 reflecting plate; and a beam spot adjusting mechanism for changing the curvature of the concave mirror to the cylindrical surface of the processing surface The light path between the mirrors is long to adjust the beam point in the long axis direction and the length of =. Thereby, the beam width can be mainly adjusted by adjusting the radius of curvature of the concave mirror. The length of the major axis is mainly adjusted by changing the optical path length between the machined surface and the cylindrical mirror.

In the above invention, the beam spot adjusting mechanism may further include: a first supporting body fixed to the concave mirror and fixed to adjust any of the laser beams before the reflection by the concave mirror or the laser beam after the reflection. The first plane mirror of the optical path; the second support body is a fixed cylindrical mirror, and is fixed to adjust the optical path of any of the laser beams before the reflection of the cylindrical mirror or the laser beam after the reflection of the reflected laser beam The flat mirror; the rod is used for fixing the support body of the younger brother 1 and the lifting mechanism of the support body 2 in the vertical direction, and the second support body is raised and lowered on the lower side of the first support body with the rod as a support shaft. Thereby, the beam width can be mainly adjusted by adjusting the radius of curvature of the concave mirror, and the length of the major axis can be mainly adjusted by adjusting the height of the second support. In the above invention, the concave mirror may include a concave reflecting plate and a concave deformation mechanism that changes a radius of curvature of the concave surface of the reflecting plate; and the cylindrical mirror includes a reflecting plate and a curved surface deforming mechanism that changes a radius of curvature of the reflecting plate; There is a beam spot adjustment mechanism for adjusting the length of the beam spot in the long axis direction and the short axis direction by changing the radius of curvature of the concave mirror and the radius of curvature of the cylindrical mirror. Thereby, the width of the beam 200914188 can be mainly adjusted by adjusting the radius of curvature of the concave mirror, and the length of the major axis is mainly adjusted by adjusting the radius of curvature of the brother. In the above invention, the first beam adjustment mechanism may also have: the first support

The body's fixed concave mirror, A port is used to adjust the beam path of the laser beam before the reflection of the concave mirror or the reflected beam of the laser beam after the reflected thunder beam; the second ancient axe touches the tooth, Fixing the cylindrical mirror and fixing the flute 9 plane mirror used to adjust the laser beam before the reflection of the cylindrical mirror and hit + g U β by the laser beam of either the laser beam or the reflected laser beam And the rod is oriented in the vertical direction, and the second support is fixed to the lower side of the i-th support by 'fixing the first support. This eliminates the need for adjustments and adjusts the beam sway and the length of the long axis by simply adjusting the radius of the surface. In the above invention, the (3) 2 laser can also be fabricated, and the surface of the material reflecting mirror for reflecting the laser beam is coated with either gold, tantalum or molybdenum. Therefore, when the CO 2 laser is used, since the reflectance of each of the mirrors can be increased, laser processing with improved heating efficiency can be performed when the glass substrate is processed. In the above invention, when the first support is provided, the attachment position of the first plane mirror and the concave mirror may be interchangeable in the i-th support. Thereby, the degree of freedom in the selection of the beam spot shape can be further improved by changing the mounting position. In the above invention, when the second support is provided, the attachment position of the second mirror and the cylindrical mirror may be interchangeable in the second support. Thereby, by changing the mounting position, the degree of freedom in selecting the shape of the beam spot can be further improved. [Embodiment] 11 200914188 (Embodiment 1) Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is an embodiment of the present invention, taking a laser scribing device for a glass substrate as an example. Fig. 2 is a configuration diagram of a laser scribing apparatus using a laser processing apparatus according to an embodiment of the present invention, and Fig. 2 is a configuration diagram of a laser processing apparatus used in a laser scribing apparatus. Figure 3 is a block diagram showing the construction of the control system of the laser scribing device Lsi of Figure 1. First, the overall configuration of the laser scribing device LS1 will be described with reference to Fig. 1 . A slide table 2 is provided which is movable in a direction parallel to the front side of the paper (hereinafter referred to as the gamma direction) by one of the pair of guide rails 3, 4 arranged in parallel along the horizontal stage i. A lead screw 5 is disposed between the two guide rails 3, 4 in the front-rear direction, and the lead screw 6 fixed to the slide table 2 is screwed to the lead screw 5, and the lead screw 5 is reversely slid by the motor (other than the drawing) Table 2 can be along the guide rails 3, 4 in the Y direction. On the slide table 2, it is arranged to be reciprocated along the guide rail 8 in the figure! A water platform seat 7 in the left-right direction (hereinafter referred to as the X direction). In the bracket 10 fixed to the pedestal 7, the lead screw i 〇a which is rotated by the motor 9 is spliced through the screw.

By causing the lead screw 10a to be reversed to estimate the production, the B money pedestal 7 moves back and forth along the guide 8 into the universal direction. A rotary table 12 rotatable by a rotating mechanism U is provided thereon, and the rotary table 12 has a glass substrate G of a brittle material substrate to be cut in a horizontal state. The rotation mechanism u is configured to rotate the rotary table 12 about a vertical axis to be able to rotate to an arbitrary rotation angle with respect to the reference position f/right and < also,

The glass substrate G of the object, for example, a J-field and a 5-inch jig, is fixed to the turntable 12. 200914188 Above the rotary table 12, a laser beam 13 (which oscillates a circular beam of a laser beam (original beam)) and a beam spot adjustment mechanism 14 (deform the cross-sectional shape of the original beam to form an elliptical beam spot BS ( The laser processing apparatus 15 constructed as shown in FIG. 3) on the glass substrate G is fixed to the mounting frame 16. The details of the laser processing apparatus 15 will be described later. f ·, .k mounts the cooling nozzle 17 to the beam spot adjustment mechanism 14 at the mounting frame 16'. From this, the cooling nozzle 17 ejects a cooling medium such as cooling water, He gas, or carbonic acid gas onto the glass substrate G. The cooling medium is blown to the vicinity of the beam point of the elliptical shape of the glass substrate G to form the cooling point cs (Fig. 3) on the surface of the glass substrate G. A cutter wheel 19 is attached to the mounting frame 16 through the vertical movement adjustment mechanism 18. The cutter wheel 19 is made of a sintered diamond or a cemented carbide, and has a V-shaped ridge portion having a vertex as a tip on the outer peripheral surface, and the pressure contact force to the glass substrate G is finely adjusted by the vertical movement adjustment mechanism 18. When the initial crack TR is formed on the edge of the glass substrate G, the rim rim 9 is temporarily lowered while moving the pedestal η in the X direction. Further, the mounting frame 16 is further provided with a camera 2 for picking up an alignment mark imprinted on the glass substrate G. Next, the structure of the laser processing apparatus will be described based on Fig. 2 . The laser processing device 15' is constructed by the laser 13 fish 3 and the beam spot adjustment mechanism U as described above. The Laser 13 Series uses a C02 laser. Also * Two body ten f eight workers + 4 + bauxite For C〇2 seedlings use C〇 field shot, excimer laser. The beam spot adjusting mechanism 千 ′′ includes a pair of left and right rods 31, 32 and Π in the axial direction in the vertical direction, and a frame 33 and a lower frame, 糸 3 4 which are fixed to the upper end and the lower end of the pair of rods 31 2 Frame construction 13 200914188 body. Also, the laser 13 is supported by the upper frame 33. Further, in the present embodiment, the mounting frame 16 (Fig. 1) is also used as the upper frame 33. Between the left lever 31 and the right lever 32, a first slide lever 35 (first support body) and a second slide lever 36 (second support body) supported by the lever 31 32 as a fulcrum are supported. . Further, the 'sliding lever 35 is driven by a lifting mechanism 37 composed of a rack & small: wheel mechanism (not shown) and a motor, and the second sliding lever 36 is driven by a rack & pinion mechanism ( The lift-down mechanism 38, which is not shown) and the motor, is driven to independently adjust the height position. In the first slide bar 35 (first support body), for example, the first plane mirror 41 detachably attached to the left fixing portion 42 is attached, and the shape of the beam spot can be further improved by replacing the mounting position. The degree of freedom of choice. The concave mirror 43 is mounted to be detachable through the right fixing portion 44 by locking. The first plane mirror 41 is mounted on a position where the vertically downward laser beam (original beam) emitted from the laser 13 is directly irradiated onto the reflecting surface (plane), and further mounted as a reflecting surface (planar). The shaft angle becomes an angle of L degrees of 45 degrees upward to allow the reflected laser beam to travel in a horizontal direction. On the other hand, the concave mirror 43 is attached to a position where the laser beam reflected by the first plane mirror 41 is directly irradiated onto the reflecting surface (concave surface) of the concave mirror 43, and is further mounted so that the optical axis angle of the reflecting surface (concave surface) becomes The angle of 45 degrees is such that the reflected laser beam travels vertically downward. In addition, the mounting position and the mounting angle of the 平面1 plane mirror 41 and the concave mirror 43 are interchangeable, and the concave mirror U can be directly disposed by the left fixing portion 42 at a position where the vertically downward laser beam emitted from the laser 13 is directly irradiated. The reflecting surface (concave surface) is mounted upward by 45 degrees, and the first flat mirror 41 is mounted at an angle of 45 degrees downward by the right fixing portion 44 14 200914188. Since the length of the optical path between the concave mirror 43 and the glass substrate G can be changed by changing the mounting position of the first plane mirror 41 and the concave mirror 43, the adjustment range of the shape of the beam spot (long axis length, beam width) can be changed. Fig. 4 (4) is a perspective view of the concave mirror 43, and Fig. 4 (b) is a sectional view. The concave mirror 43' can be formed of, for example, a stainless steel material of a mass-produced material, and the reflective surface 43a (concave surface) is coated with gold (or bismuth, molybdenum) to reflect the reflectance of the laser beam from the c〇2 laser u. Becomes high. Alternatively, instead of a stainless steel material or the like, a commercially available lens (a lens that is not specially ordered) may be used for processing of gold. Further, since the concave mirror 43 can be formed of a mass-produced material, a plurality of concave mirrors having a radius of curvature of the reflecting surface (concave surface) of 1 〇〇 to 5 〇〇〇 can be prepared and replaced by appropriate replacement. A second cylindrical mirror 47 that can be detached by the left fixing portion 46 is attached to the second sliding lever 36 (second supporting body), and a convex cylindrical surface 45 that can be detached by the right fixing portion 46 is attached. Wherein, the convex cylindrical mirror 45 is mounted on the 'laser beam (the collected beam) which is reflected by the concave mirror 43 and travels in the vertical downward direction, directly irradiates the position of the reflecting surface (convex surface), and is further mounted to reflect The optical axis angle of the plane (plane) is an angle of 45 degrees upward so that the reflected laser beam travels a little while centering on the horizontal direction. On the other hand, the second plane mirror 47 is attached to a position where the laser beam reflected by the convex cylindrical mirror 45 is directly irradiated onto the reflection surface (plane) of the second plane mirror 47, and is further mounted as a reflection surface (plane). The optical axis angle is an angle of 45 degrees downward so that the reflected laser beam travels a little while centering on the vertical downward direction 15 200914188. In addition, the mounting position and the mounting angle of the convex cylindrical mirror 45 and the second planar mirror 47 are also interchangeable, and the vertically downward laser beam (the concentrated beam) reflected from the concave mirror 43 can be directly irradiated. The second flat mirror 47 is attached to the reflecting surface (plane) by 45 degrees by the right fixing portion 46, and the convex cylindrical mirror 45 is attached at an angle of 45 degrees downward by the left fixing portion 48. At this time, since the optical path length between the convex cylindrical mirror 45 and the glass substrate G can be changed by changing the mounting position of the second plane mirror 47 and the convex cylindrical mirror 45, the shape of the beam spot can be changed (long axis length, Beam width) adjustment range. Figure 5 is a perspective view of a convex cylindrical mirror 45. The convex cylindrical mirror 45 can also be formed of a stainless steel material of a mass-produced material, and gold is applied to the reflecting surface (convex surface) 45a to make the reflectance of the laser beam from the C〇2 laser π variable. Moreover, since the convex cylindrical mirror 45 can also be formed of a mass-produced material, it is possible to prepare a plurality of convex cylindrical mirrors having a radius of curvature of the reflecting surface (convex surface) of 1 〇 to 丨〇〇, and then appropriately replace the mounting. . Here, the relationship between the optical path of the laser beam and the beam spot regulated by the respective optical elements of the beam spot adjusting mechanism 14 will be described. Fig. 6 is a view showing the relationship between the optical number specified by the concave mirror 43, the convex cylindrical mirror 45, and the second plane mirror 47 and the optical path of the laser beam. In addition, the laser beam of the circular cross section (original beam B〇) emitted from the laser beam 3 is reflected by the second plane mirror 4 (Fig. 2) and reaches the concave mirror 43, since it is the same as the original beam B〇. The passage of the laser beam of a cross-section, thus omitting the illustration of the second plane mirror 2009 16 200914188. The original beam B0 of a circular cross section is parallel-straight, and is incident on the concave mirror 43 at an incident angle of 45 degrees (approximately 45 degrees except for the central beam) and is reflected. The reflected laser beam B1 (concentrated beam B1) travels while collecting light. At this time, three focal points appear in the concentrated light beam B1. That is, on the optical path, the width of the beam section in the X direction is the smallest focus, on the XY side.

The three focal points, such as the focal point F, having the same length and the beam cross section being a circular cross section, and the focal length Fi in the γ direction being the smallest. Fig. 7 is a view showing five different positions H1 to H5 on the optical path when the original beam B is reflected by the concave mirror 43 alone, and Fig. 8 is a sectional view showing the laser beam B1 at the position H1 to H5 of Fig. 7. Schematic diagram. Here, the position H2 is a position corresponding to the focus F-i, the position H3 is a position corresponding to the focus & the position H5 is a position corresponding to the focus Fi. As shown in Fig. 8, the cross-sectional shape is continuously changed in the γ direction of the γ direction by the change in the height position on the optical path. Next, in H2, the width in the X direction is an ellipse which is small, and in H5, the ellipse in which the width in the γ direction is the smallest. "As described above, as the position of the laser beam Β1 on the optical path is different, the cross-sectional shape of the field beam Β1 is also different, so in Fig. 6, by making the position on the ray=beam Β1 in the convex cylindrical mirror 45 The reflecting surface reflection, that is, the shape of the beam of the laser beam Β2 after the month t is changed. For example, if the beam width of the beam spot Bs irradiated to the glass substrate G is to be minimized, the adjustment is made from the concave mirror 43 via the concave mirror 43 The convex cylindrical mirror 45 and the second flat mirror 47 reach the total distance of the glass substrate g, and the surface of the broken substrate 6 becomes the position hscf of FIG. 7). Also 17 200914188 is the 'convex cylindrical mirror 45 and the second Since the plane mirror 47 is simply reflected as a plane mirror with respect to the γ direction, the position corresponding to the position Η5 having the smallest width in the Υ direction in FIG. 7 may be set to the position of the glass substrate G of FIG. 6. The beam point adjustment mechanism 14 is configured by setting the beam diameter L of the original beam, the radius of curvature rl of the concave mirror 43, the radius of curvature r2 of the convex cylindrical mirror 45, and the concave/convex surface. The vertical distance Μ (that is, the distance 凹 between the concave mirror 43 and the convex cylindrical mirror Μ), the vertical distance between the table/convex mirror Ν (that is, the vertical distance between the table and the convex cylindrical mirror Ν), and the horizontal/convex mirror level The distance 〇 (that is, the horizontal distance 〇 between the second plane mirror 47 and the convex cylindrical mirror 45) is determined by the six parameters of the glass substrate G formed on the stage without any deviation. The beam diameter L of the middle and the original beam, and the horizontal distance 平面 between the plane/convex mirror are, in principle, fixed parameters that are not changed. The radius of curvature rl of the concave mirror and the radius of curvature r2 of the convex cylindrical mirror 45 are intended to make the shape of the beam point large. The coarse adjustment parameter that is changed when the concave mirror 43 and the convex cylindrical mirror 45 are replaced in the case of a change, etc. On the other hand, the 'transparent/convex mirror vertical distance Μ, the table/convex mirror vertical distance Ν is adjusted by adjusting the first sliding The parameter of changing the position of the lever 35 and the second slide lever 36. Specifically, the concave mirror 43 is adjusted to the stage (correctly, the surface of the glass) by adjusting the position of the first slide cymbal 35 The length of the light path is long + Ν + 0 Further, the length of the N + O of the optical path length 200914188 of the convex cylindrical mirror 45 to the stage is adjusted by the position of the second sliding buckle. The concave mirror 43 of the first sliding rod 35 is to the stage ( Correctly, the adjustment of the optical path length m+n+〇 of the surface of the glass substrate G is mainly used to adjust the beam width of the beam spot formed on the glass substrate G as described above (in the direction perpendicular to the paper surface of FIG. 6) On the other hand, by adjusting the convex cylindrical mirror 45 of the second sliding rod 36 to the optical path length N+O of the stage, the magnification of the convex surface of the convex cylindrical mirror 45 is adjusted 'mainly It is used to adjust the length of the beam spot (10) formed on the glass substrate G in the long axis direction. ^ It-in, indicating the length of the long axis of the beam spot BS and the specificity of the beam width. Week i method. The beam spot shape is determined without deviation by six parameters, so the right beam point BS "long axis length is set to Da, beam width is set to Db", Da, Db' is the beam diameter L, and the curvature of the concave mirror 43 is used. The radius η, the convex column, the rate radius Γ2, the concave surface, the vertical distance between the convex mirrors, the vertical distance between the table/convex mirrors, and the horizontal distance between the plane/convex mirrors are the functions f丨. F2.

Da = fl(L, rl, r2, Μ, N, 〇) (1)

Db = f2(L, rl, r2, Μ, N, 0) (2) The functional formulas (1), (2) 'specifically, by setting the position or direction of each optical element to the coordinates, and performing Geometric analysis to find out. As described above, the beam diameter L and the horizontal distance between the plane/convex mirrors in the six parameters are fixed values, and can be set as a fixed number. The curvature radius rl of the concave mirror 43 and the curvature radius r2 of the convex cylindrical mirror 45 can also be regarded as a fixed number if they are not replaced. Therefore, the long axis length of the beam spot BS and the beam width 19 200914188 degrees Db can be expressed as a suburb _ human form when the vertical distance between the concave/convex surface is 垂直 and the vertical distance between the table/convex mirror is variable.

Da=fl(M, N) (3)

Db = f2(M, N) (4) Concave/convex mirrors 垂吉N The distance between the summer and the vertical distance between the table/convex mirrors is obtained from the height position of the first sliding 35^ 咕35, 苐2 sliding rod 36 Therefore, when the long axis length Da and the beam width Db of the desired length are to be set, how to set the height position of the first slider 3 B > the α motion 35 and the second slider 36 can be unbiased Decide. That is, if the function formula (), (2), and the beam diameter l, the horizontal distance between the plane/convex mirror 〇, the radius of curvature η of the concave mirror 43, and the curvature half of the convex cylinder 45's 45+ are stored as parameters, Or first save the function formula (7), (4) 'by setting the beam spot Bs <long sleeve length ^ and the beam width Db to be adjusted, it is possible to calculate the vertical (four) μ between the concave/convex mirrors, and the vertical distance between the mirrors/convex = mirrors (four)' Adjust the number in the above way! The sliding rod 3 5 and the second sliding rod 3 6 can also be used as an automatic machine... , _ α | In this embodiment, it can be automatically set by the control system. This point is left to be described later. Next, the control system will be described based on Fig. 3 . The laser scribing device LS1 has a control (four) 50. The control unit 50 performs various η (four) 5G system control by driving various data, setting parameters, and programs (software) and cpu stored in the memory: for driving the motor (Motor 9 etc.) (for the part: positioning, moving with °2, pedestal 7, or rotating table 12), laser driving unit 52 for driving laser irradiation, driving for controlling 20 200914188 cooling nozzle The nozzle drive unit 53 of the 16-cold coal injection switch valve (not shown), the cutter drive unit 54 that forms the initial crack by the wheel 19 on the glass base, and the camera 20 are photographed and printed on the glass. Each of the drive units such as the camera drive unit 55 for positioning the substrate g is used. X. The control unit 50 is connected to an input port 构成% composed of a keyboard, a mouse, and the like, and a display unit 57' for displaying various displays on the display screen to display desired information on the face and inputting necessary information. Instructions or settings. f

The laser drive unit 52 is composed of a light source drive unit 52a that oscillates the laser beam 13 and a beam spot adjustment unit 52b that drives the beam spot adjustment mechanism. The beam spot adjustment unit 52b is sent from the control unit 5 When the setting signal of the height position of the i-th sliding lever 35 and the second sliding #36 is set, the first sliding lever 35 and the second sliding lever 36 are adjusted to a desired height position according to the setting signal '. Further, the beam spot adjusting section 52b, in advance, the parameters of the functional formulas (1), (2), and the beam diameter L, the horizontal distance between the plane/convex mirror, the radius of curvature rl of the concave mirror, and the radius of curvature r2 of the convex cylindrical mirror 45 are stored in the memory. When the setting signal of the long axis length Da and the beam width Db is sent from the control unit 50, the height position of the first sliding cup 35 and the second sliding rod 36 required to form the beam spot BS of the shape is calculated and adjusted. The height position is calculated. Next, the scribe line operation of the laser scribing device LS 1 will be described. Initially, the shape of the beam spot BS is adjusted. When the 疋 is automatically set, the long axis length to be set is input from the input unit 56. Household 21 200914188

Da beam width Db for setting operation. Then, the beam spot is adjusted by 5 2b, and the first sliding rod 3 for calculating the long axis length Da and the beam width Db of the present invention is calculated using the functional formulas (丨), (2) and related parameters. 5 and the height position of the second slide bar 36. Next, the elevating mechanisms 37, 38 are driven to the south position of the exit, and as a result, the concave mirror 43 or the convex cylindrical mirror 45 is moved to the necessary height position. In addition, when the operator inputs the long axis length Da and the beam width Db from

When the height position of the first slide bar 35 and the 滑动2 slide bar 36 is sighed, the operator also pre-sets the final of the two α-movers on the setting screen displayed by the member 彳 57 (Fig. 3). The position of the twist, or automatically set after confirming whether the beam can be formed in advance. For example, when the long axis length Da and the beam width Db are input, and the vertical distance M between the concave/convex mirror and the vertical distance N between the convex/convex mirrors are successfully calculated, that is, the message "beam forming 〇κ" is displayed on the setting screen. And the calculated value of the vertical distance 凹 between the concave/convex mirrors and the vertical distance 台 between the table and the convex mirror are displayed on the setting screen, and the first slide lever 35 and the second slide lever 36 are moved to the calculated The location corresponding to the value. Further, when the input length of the long axis Da and the beam width Db cannot form an appropriate beam spot, the confirmation message "Unable to set (NG)" may be displayed to prompt the operator to re-enter. Alternatively, after inputting the major axis length Da and the beam width Db, the vertical distance between the concave/convex mirrors M and the vertical between the mesa/convex mirrors can be calculated: The M, N < value calculated from the Ν' sub-display is displayed on the setting screen. The operator displays a confirmation message of "(10)". Next, the operator can confirm whether the values of M and N are appropriate, and the process of moving the first slide lever 35 and the second slide lever 36 to the position corresponding to the calculated value when 〇 κ, NG The time starts from the setting of Da and Db. In addition, when the automatic setting is not performed, or when the automatic adjustment is performed, the input unit 56 performs an input operation to perform the upward movement of the first slide lever 35 and the second slide lever 36. Micro. As described above, the i-th slide bar 35 (concave mirror 43) and the second slide bar 36 (convex cylindrical mirror 45) can be adjusted to reach a desired high sound position on the glass substrate g. Thereafter, the normal scribing operation of the laser scribing device LS1 is performed. That is, the rotary table 12 returns to the origin (below the camera 2A of FIG. i), and the camera drive unit 55 is activated to detect the alignment mark of the glass substrate G carried on the rotary second 12 by the camera 2 'And according to the results: 1 ... to slide ..., pedestal 7, rotation ... move to I: ^ stand. After the positioning is completed, the cutter driving portion 54 performs a process of forming the initial crack (starting point) on the substrate end by the boring wheel. Then, after returning to the origin, the laser drive unit 52 and the nozzle drive unit Μ—:: the laser irradiation below the k melt temperature and the cold coal nozzle, and the substrate G is moved by a 51, so that the light travels &; 9 port drive board. , this light / Λ cooling point CS# is depicted on the substrate by Λ /. The first beam point and the cooling point ^ track shape. The laser line is described so far, although - line. Below the melting temperature, the extension is heated by the illuminating radiation and sighs to melt the melting condition of the substrate, which can be used. At this time, cold coal nozzle injection is not performed. '〃雷射消炼加 23 200914188 (Embodiment 2) Fig. 9 is a view showing a laser processing apparatus 15a according to another embodiment of the present invention. The same components as those of the laser processing skirt 15 of Figs. 2 and 2 are given the same symbol E, and a part of the description is omitted. In the present embodiment, the beam spot adjusting mechanism 14a adjusts the position of the second slide bar 36 and the radius of curvature of the curved blade 60. In other words, instead of the structure (10) 2) in which the elevating mechanism 37 is provided (the ith sliding lever 35 is moved up and down in order to adjust the distance between the concave mirror Μ and the convex cylindrical mirror 45), the positions of the mounting opposing rods 31, 32 are fixed. The first fixing rod 35&, the concave mirror 6 having the curvature radius adjusting function is fixed to the first fixing rod 35 by the right fixing portion (in addition, "fixed" here means that the beam spot is fixedly used. Meaning, does not include the case where the lifting mechanism 37 is moved for other purposes). The figure shows a cross-sectional view of a concave mirror 6 with an adjustment function of the radius of curvature. The concave mirror 60 has a concave mirror body 61 formed of a thin plate made of a non-recording steel (having a gold coating film). The peripheral portion of the concave mirror body 61 is fixed by a casing 62, and a telescopic mechanism 63 is attached to a bottom portion of the concave mirror body 61. The telescopic mechanism 63 uses, for example, a piezoelectric element or an electric cylinder. The drive unit 64 that operates the expansion/contraction mechanism 53 is attached to the telescopic mechanism 〇, and the linear expansion mechanism 63 is actuated to change the trajectory diameter. Next, the mirror 6 is rotated, and the relationship between the setting condition of the driving jaw 64 and the radius of curvature is determined in advance, and the driving unit 64 can be adjusted to be set to a desired radius of curvature. The setting of the drive unit 64 is adjusted by the elevating mechanism W of the second slide lever % and the beam spot adjustment unit 52b (Fig. 3). 24 200914188 In the present embodiment, the length axis Da and the beam width Db of the beam spot bs are adjusted according to the relational expressions (1) and (2), but the beam diameter L of the six parameters and the concave/convex mirror are vertical. The horizontal distance between the Μ and the plane/convex mirror is fixed and can be set as a fixed number. The radius of curvature r2 of the convex cylindrical mirror 45 can also be regarded as a constant if it is not replaced. Therefore, the major axis length Da and the beam width Db of the beam spot BS can be adjusted by using the curvature radius rl of the concave mirror 43 and the vertical distance N between the table/convex mirrors as variables. Further, although the concave mirror 6 is attached to the right fixing portion 44 in Fig. 9, the concave mirror 60 and the second plane mirror 41 may be replaced, which is the same as the embodiment of Fig. 1. (Embodiment 3) Fig. 11 is a view showing the configuration of a laser processing apparatus 1 according to another embodiment of the present invention. The same components as those of the laser processing apparatus 15 of Figs. 1, 2, and 9 are denoted by the same reference numerals, and a part of the description will be omitted. This implementation

In the form, the beam spot adjusting mechanism 14b adjusts the curvature radius of the concave mirror and the curvature radius of the convex cylindrical mirror. κ~田别训丄1甲, the second sliding jaw 36 is replaced by the distance of the lowering mechanism 38 (in order to adjust the surface of the cylindrical mirror 45 and the rotating table is correct). The structure of the lifting and lowering is installed with the fixed position of the second fixed rod J6a (where "Zhouzhong U疋" is used for the purpose of adjusting the beam spot privately. For other purposes, the lifting mechanism 38 is provided. In the case of movement, the convex cylindrical mirror 7 having the adjustment function is fixed to the second fixing rod 36a by the right fixing portion 46. 25 200914188 Fig. 12 is a cross-sectional view of a convex cylindrical mirror 70 showing a convex cylindrical mirror having a function of adjusting the radius of curvature, and the convex cylindrical mirror body 71 is formed of a thin plate made of stainless steel (having a gold coating film). . The peripheral portion of the convex cylindrical mirror body 71 is fixed by a casing 72, and a telescopic mechanism 73 is attached to a bottom portion of the convex cylindrical mirror body 71. The telescopic mechanism 73 uses, for example, a piezoelectric element or an electric cylinder. The driving unit 74 that activates the telescopic mechanism 73 is attached to the vicinity of the telescopic mechanism 73, and the radius of curvature can be changed by operating the telescopic mechanism 73. Next, the convex cylindrical mirror 70 can determine the setting of the driving portion 74 and set the desired radius of curvature by determining the relationship between the setting condition of the driving portion 74 and the radius of curvature in advance. The setting of the drive unit 74 is adjusted by the setting of the drive unit 64 of the concave mirror 60 and the beam spot adjustment unit 52b (Fig. 3).

In the present embodiment, the long axis length Da and the beam width Db of the beam spot BS are adjusted according to the relational expressions (1) and (2), but the beam diameter L· and the concave/convex mirror vertical distance among the six parameters. The vertical distance between the M, the table/convex mirror, and the horizontal distance between the plane/convex mirror are fixed, and can be set as a fixed number. Therefore, the curvature of the concave mirror 43 can be increased. The radius r2 of the convex surface only mirror r1 and the convex cylindrical mirror 45 are variable, and the long axis length Da and the beam width Db of the beam spot bs are adjusted.

In addition, in FIG. 11, although the right fixed portion 44A# female" A has a convex cylindrical mirror 70, the convex cylindrical mirror 70 and the first flat mirror 47 may be replaced by w′. The embodiment is the same as that of Figs. 1 and 9 . (Embodiment 4) Fig. 1 is a diagram showing a structure in which a laser twisting garment of another embodiment of the present invention is set to 15 c. The same components as those of the laser processing apparatus i5 described with reference to Figs. 1 and 2 are denoted by the same reference numerals, and a part of the description will be omitted. In the present embodiment, a concave cylindrical mirror 49 is attached instead of the convex cylindrical mirror 45 (Fig. 2). In other words, in the first embodiment to the third embodiment described above, the beam length in the X direction is increased by the convex cylindrical mirror 4 attached to the second slide bar 36. However, even if the concave cylindrical mirror 49 is used, Since the optical path is once again expanded after the focus F is concentrated once, the optical system is adjusted so that the processed surface becomes a position away from the focal point F by a certain distance, and as in the case of using the convex surface detecting mirror 45, the χ can be enlarged. The beam length of the direction. Further, in the third embodiment, the convex cylindrical mirror 70' having the curvature radius can be attached. However, similarly to the case where the convex cylindrical mirror 45 is replaced with the concave cylindrical mirror 49 in the fourth embodiment, the convex cylindrical surface can also be used. The mirror 7 is replaced by a concave cylindrical mirror with an adjustable radius of curvature. The present invention can be utilized in a laser processing apparatus that performs local heating by laser irradiation. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the configuration of a laser scribing apparatus for laser processing according to an embodiment of the present invention. Figure 2 is a perspective view of a laser processing apparatus according to the present invention. The laser processing apparatus of the laser marking apparatus of the first embodiment is shown in Fig. 3. FIG. 4 is a perspective view and a cross-sectional view of a concave mirror. 27 200914188 Figure 5 is a perspective view of the && A face cylinder mirror. Fig. 6 shows the relationship between the optical path defined by the concave mirror and the convex cylindrical mirror, and the optical path of each beam. Fig. 7 is a diagram of assuming that the concave mirror is used alone to make the original beam path. Light at the time of reflection of the second plane mirror B 0 Fig. 8 is a view showing the shape of a beam spot of the laser beams b i H1 to H5 of Fig. 7. Location on the light path Figure 9

Fig. 10 is a cross-sectional view of a concave mirror having a variable radius of curvature. Fig. 10 is a view showing a configuration of a laser beam processing apparatus according to another embodiment of the present invention. Figure 11 is a diagram of another embodiment of the present invention. Structure of the Jet Processing Apparatus Fig. 12 is a front view of a convex cylindrical mirror having a variable radius of curvature. Figure 13 is a view showing the configuration of a laser processing garment 1 according to another embodiment of the present invention [main component representative symbol] 12 rotary table 13 laser 14, 14a, 14b beam spot adjustment mechanism 15a, 15b laser processing device 16 mounting arm 31 bar (left lever) 32 lever (right lever) 33 upper frame 28 200914188 34 lower frame 35 first slide lever 35a first fixed lever 36 second slide lever 36a second fixed lever 37, 38 lift mechanism 41 first plane mirror 42, 48 Left fixing portion 43 concave mirror 44, 46 right fixing portion 45 convex cylindrical mirror 47 second plane mirror 50 control portion 52 laser driving portion 52a light source driving portion 52b beam spot adjusting portion 60 concave mirror 70 convex cylindrical mirror rl concave mirror curvature radius r2 convex surface Cylindrical radius of curvature L Laser beam radius (original beam radius) M Concave/convex mirror vertical distance N/convex mirror vertical distance 0 Plane/convex mirror horizontal distance 29

Claims (1)

200914188 X. Patent application scope: , and will be from the laser, and adjusted by the laser component group; characterized by 1. A laser processing device having: a laser beam emitted by a laser is guided to a workpiece The optical shape of the beam spot formed on the machined surface of the machined surface is: + The combination of the mirror group of the armor 7L 柱 fresh cylindrical mirror 2 2. The laser processing device of the patent _1, wherein the 兮Γ mirror In the cylindrical mirror, a cylindrical mirror is disposed on an optical path that is close to the processing surface side on an optical path that is close to the laser side. 3. If the laser processing tool of the second application of the patent scope is used, the concave mirror and the cylindrical mirror are arranged, and the radius of curvature of the concave mirror is larger than the radius of curvature of the curved surface of the cylindrical mirror. Beam spots are formed on the machined surface. The shape of the vehicle and the direction of the short axis: 2: Patented 1 item of laser processing device, which is provided with light by changing the optical path between the working surface and the concave mirror and the optical path between the cylindrical mirror To adjust the length of the beam point in the long axis direction and the short axis direction. U-beam patent (4) Item 4 of the #射加前束点调调机构 has: , 守, the first support body 'fixes the concave mirror, and the laser beam before reflection or the reflected laser beam The second plane mirror of the beam path of the beam; the first beam of the beam - the support of the laser brother 2, which is fixed to the cylindrical mirror, and fixed to adjust the laser beam or reflection before the reflection of the 30200914188 cylinder mirror a second plane mirror of an optical path of any of the laser beams of the rear laser beam; the first support body elevating mechanism' elevates the first support body with a rod oriented in a vertical direction as a fulcrum; and a second support lifting mechanism 'With the rod as a fulcrum, the second support body is raised and lowered on the lower side of the first support body. 6. The laser processing apparatus according to claim 1, wherein the concave mirror comprises a concave reflecting plate and a concave deformation mechanism for changing a radius of curvature of the concave surface of the reflecting plate; and a beam spot adjusting mechanism is provided; The length of the beam spot in the major axis direction and the minor axis direction is adjusted by changing the radius of curvature of the concave mirror and the optical path length between the machined surface and the cylindrical mirror. 7. The laser processing apparatus of claim 6, wherein the beam spot adjustment mechanism has: a first support body that fixes the concave mirror and is fixed to adjust a laser beam before being reflected by the concave mirror or The reflected laser beam is the first plane mirror of the optical path of the laser beam; the second support is fixed to the cylindrical mirror, and i is fixed to adjust the laser beam or reflection after being reflected by the cylindrical mirror The laser beam is the second plane mirror of the optical path of the laser beam; the rod is oriented in the vertical direction to fix the first! The support body and the second support body elevating mechanism use the rod as a fulcrum to raise and lower the second support body on the lower side of the second support body. 8. The laser processing apparatus of claim i, wherein the 31 200914188 concave mirror comprises a concave reflecting plate and a concave deformation mechanism for changing a radius of curvature of a concave surface of the reflecting plate; the cylindrical mirror having a reflecting plate and a curved surface deforming mechanism for changing a radius of curvature of the reflecting plate; and a beam spot adjusting mechanism for adjusting a beam radius in a long axis direction by changing a radius of curvature of the concave mirror and a radius of curvature of the cylindrical mirror The length of the short axis direction. 9) The laser processing apparatus of claim 8, wherein the beam spot adjustment mechanism has: the first support body fixes the concave mirror, and is fixed to adjust a laser beam or reflection before being reflected by the concave mirror. a first plane mirror of the optical path of any of the laser beams of the rear laser beam; the second support body fixes the cylindrical mirror and is fixed to adjust the laser beam or the reflected thunder before being reflected by the cylindrical mirror a second plane mirror of the optical path of any of the laser beams; and a rod ' is oriented in a vertical direction for fixing the first support and fixing the second support to the lower side of the first support. I. The laser processing apparatus of claim 1, wherein the C〇2 laser is used, and the surface of each of the mirrors for reflecting the laser beam is made of gold, germanium or molybdenum. Coating. A laser processing garment according to any one of claims 5, 7, and 9, wherein the mounting position of the jth plane mirror and the concave mirror is interchangeable with the second support. I2. Laser processing according to any one of the claims 5, 7, and 9 of the invention, wherein the second support body is interchangeable. XI. Schema: as the next page 33