CN106466764A - There is the laser cutting head of real-time adjustment technological parameter function - Google Patents
There is the laser cutting head of real-time adjustment technological parameter function Download PDFInfo
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- CN106466764A CN106466764A CN201510492968.5A CN201510492968A CN106466764A CN 106466764 A CN106466764 A CN 106466764A CN 201510492968 A CN201510492968 A CN 201510492968A CN 106466764 A CN106466764 A CN 106466764A
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- housing
- plane
- air chamber
- locating ring
- cutting head
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
Abstract
The present invention discloses a kind of laser cutting head with real-time adjustment technological parameter function, including optical fiber interface, housing, upper locating ring, adapter sleeve, lower locating ring, capacitance sensor and nozzle, the front end of described housing is provided with front port, the end of housing is provided with an inclined-plane installing plate, is provided with lower port positioned at the lower end of shell end；Described optical fiber interface is installed to the front port of housing, variable curvature convex reflecting mirror, curvature mirrors are sequentially installed with from top to bottom on the inclined-plane installing plate of housing cavity end, positioned at the front end in housing cavity and be located at and be provided with a variable curvature concave mirror below front port, described light interface and variable curvature convex reflecting mirror are located at the first plane respectively with variable curvature concave mirror and curvature mirrors and are located in the second plane immediately below the first plane.The present invention both can realize the independent setting of focus size and focal position it is also possible to change simultaneously, and is independent of each other, and the air pressure of cutting head internal cavity will not change simultaneously, optical module life-span length.
Description
Technical field
The present invention relates to a kind of laser cutting head with real-time adjustment technological parameter function, belong to cut
Technical field.
Background technology
Cut, as a kind of processing mode rapidly and efficiently, obtains extensively should in various industrial circles
With.But very high just because of its precise structure, working (machining) efficiency, therefore operator is proposed with higher requirement.
Such as the grasp of focal position, for the raw material of different materials different-thickness, focal position
The deviation of a few tenths of a mm may result in diverse processing effect.The size of another aspect focus is for cutting
Cutting also has conclusive impact, it is often desirable that focus can be little as far as possible during such as thin plate cutting, makes to swash
The energy height of light concentrates on the scope of a very little, so under conditions of not increasing laser output power
Cutting speed can also be made to significantly improve, the heat affected area of workpiece also can reduce so that workpiece will not be subject to simultaneously
Influence of thermal deformation relative position degree and the flatness of workpiece itself.But for thick plates cutting, if burnt
Point is too small, can lead to cut required auxiliary gas cannot reach slot depths so that cutting can not continue or
Person's cutting section is very coarse, and this also becomes the main limit that high power optical fibre laser cutting machine cuts slab
Factor processed.Focus size due to optical-fiber laser cutting machine depends on optical fiber core diameter, collimating mirror focal length, focusing
Three factors of mirror focal length.And because the high cleannes to optical module of its power density have high requirement,
If even if naked eyes sightless dust contamination is likely to cause the damage of unrepairable on optical module.Institute
With the necessary integral sealing of the various optical modules between fiber end face to protective glass in equipment, use in equipment
Scene can not arbitrarily be changed.
Therefore for the cut of increasingly automated degree from now on, no manual intervention to be realized many
Continuously automatically the processing of kind of sheet material and thickness, focal position and focus size independently automatically set be one must
The problem that must solve.At present skill is abroad had been achieved for for the high power thick plates cutting using 1 micron wave length
Art breaks through and steps into the volume production stage.Mainly there are following two forms：
1st, mobile lens group zoom technology
The zoom lens of its principle and photographing unit are quite similar, by arranging multiple lens, phase in cutting head
Mutually compensate.And then realize the independent setting of focal position and focus size.
2nd, switch operating optical fiber
Its principle similar to the working optical fibre of more than one different core diameters of arrangement between resonator cavity and cutting head,
Realize the change of focus size by switch operating optical fiber when needing to change cutting parameter.
Prior art still suffers from following technical problem：
1st, the technological deficiency of mobile lens group scheme
For the scheme using mobile lens group zoom technology, its maximum shortcoming is the saturating of its inside
Mirror quantity is very many.
Taking this type at present certain u s company's scheme relatively more successful as a example, comprise 8 plate curvatures inside it saturating
Mirror.It is divided into three groups of movements.That is three sets of servo control mechanisms will be had to drive the movement of these lens set.Institute
Extremely complex huge with its frame for movement, and gross mass is also big, and the type of belt drive due to laser cutting machine leads to
It is often cascaded structure, and cutting head is generally as afterbody, cutting head quality often increases by 10 kilograms and is accomplished by
The all of driving force of previous stages and mechanical stiffness significantly improve.Once due to structure certain eyeglass sufficiently complex
Being damaged replacing also can be relatively difficult.Simultaneously because number of lenses is changed into 8 from 2, laser often passes through
A piece of eyeglass just has certain loss, and the energy of these losses can be changed into heating, therefore the 6 of increase piece mirror
Piece will additionally consume a lot of laser energies, also increase the burden of cooling system simultaneously.And due to 1 μm of ripple
Mainly using fused quartz lens, this lens are the non-conductors of heat to long laser.When heating reaches to a certain degree
When, eyeglass can produce thermograde, causes deformation to lead to Curvature varying precision to be lost, that is, thermal lenss effect
Should.Because these eyeglasses need often to move, so directly cannot cool down by recirculated water, heat biography can only be leaned on
The mode led successively transfers to its heat in the cooling circuit of cutting head shell.Sealing problem, due to cutting
Head needs tight seal in itself, and when having movable part inside it, its athletic meeting leads to both sides cavity volume
Change, the microscope group of at this moment these movements, just as the piston in cylinder, may lead to tiny under negative pressure state
Granule enters inside cutting head.Because the energy density within optical fiber head is high, the dust that visually cannot find
Once contamination is also likely to cause optical fiber to burn in optic fibre end.Thermal lensing effect as shown in Figure 1, to sum up
Mobile lens group scheme has following distinct disadvantage：
(1), complex structure, bulky, weight are big,
(2), number of lenses is many, and heating is many, but is limited to its motion needs and cannot directly cool down,
(3), thermal lensing effect limits the peak power that it can bear,
(4), the mobile of eyeglass may lead to inside external particle pollution cutting head,
(5), the movement of eyeglass needs certain time, is not suitable with quick frequently parameter switching；
2nd, realize using switch operating optical fiber changing the solution technique defect of focus diameter
The working optical fibre switching different core diameters by beam-switching can also effectively change focus size.But
It is that this scheme has an obvious shortcoming it is simply that the change of its focus diameter is not continuous variable,
It has been typically only capable to two to three setting values.So in suc scheme, still integral cutting system to be cut
The ability of cutting is made and is stressed and accept or reject.But compare the fixing core diameter of tradition solution it had and greatly opened up
Exhibition.Another problem is exactly that this handoff technique needs to make a kind of special working optical fibre, by two differences
The optical fiber combination of core diameter inside and by same termination exports.The technical difficulty of this work is very high,
Cost is also rather high.And working optical fibre, due to being exposed to laser external, belongs to the part of more rapid wear,
Once its maintenance cost that is damaged will be quite surprising.In addition inevitably need to set up beam-switching or tune
Device processed carrys out switch operating optical fiber.The cost of this partial devices is also costly.And due to optical fiber laser
Resonator cavity and working optical fibre are welded together, and the expense being individually replaced is very high.So for having dispatched from the factory
Laser instrument in use cannot use this technology.
To sum up, existing realized using switch operating optical fiber change focus diameter technical scheme mainly have following
Shortcoming：(1) its setting value is unable to continuously adjustabe；(2) the working optical fibre manufacturing cost in twin-core footpath is very high,
Once damage sequence is serious；(3) increased beam-switching.
Content of the invention
It is an object of the present invention to provide a kind of laser cutting head with real-time adjustment technological parameter function, this laser
Cutting head can realize focus size and the independent setting of focal position, when changing one of assignment another
Parameter does not change, and this two values can change simultaneously certainly, and is independent of each other；Using oxygen-free copper eyeglass
Can be cooled down inside eyeglass, eyeglass maintains standard temperature, no thermal lensing effect all the time, it is possible to use
Superpower laser；Due to no-movable part, whole light path part can be with strict seal, simultaneously in cutting head
The air pressure of portion's cavity will not change, optical module life-span length.
For reaching above-mentioned purpose, the technical solution used in the present invention is：One kind has real-time adjustment technological parameter
The laser cutting head of function, including optical fiber interface, housing, upper locating ring, adapter sleeve, lower locating ring, electricity
Hold sensor and nozzle, the front end of described housing is provided with front port, and the end of housing is provided with an inclined-plane installing plate,
It is provided with lower port positioned at the lower end of shell end；
Described optical fiber interface is installed to the front port of housing, from upper on the inclined-plane installing plate of housing cavity end
Down be sequentially installed with variable curvature convex reflecting mirror, curvature mirrors, the front end in housing cavity and
One variable curvature concave mirror, described light interface and variable curvature convex reflecting mirror are installed below front port
It is located at the first plane respectively with variable curvature concave mirror and curvature mirrors and be located at immediately below the first plane
The second plane on；
Described variable curvature convex reflecting mirror includes convex refractive thin film, the first air chamber and waterway, and described
In the first setting value, the surface of convex refractive thin film is convex conditions to one air chamber internal gas pressure, in work shape
During state, the first air chamber internal gas pressure is more than or equal to the first setting value；
Described variable curvature concave mirror includes concave reflection thin film, the second air chamber and waterway, and described
In the second setting value, the surface of concave reflection thin film is concave surface state to two air chamber internal gas pressures, in work shape
During state, the second air chamber internal gas pressure is less than equal to the second setting value；
Described variable curvature concave mirror includes reflective film, the 3rd air chamber and waterway, and the described 3rd is empty
In three setting values, the surface of reflective film is flat state to air cavity internal gas pressure, when in working order, the
Three air chamber internal gas pressures be greater than, equal to, one of less than the 3rd setting value；
Described upper locating ring, lower locating ring be respectively installed to the upper end of adapter sleeve, on lower end, described adapter sleeve
It is connected by upper locating ring and the lower port of housing between, by lower positioning between described adapter sleeve and a nozzle cage
Ring connects, and a nozzle is installed on the lower end of nozzle cage, and described capacitance sensor is installed in nozzle cage, and one gathers
Burnt convex lenss and protection plane mirror are respectively arranged at the upper and lower end of adapter sleeve, the internal diameter chi of described nozzle cage
The very little outside dimension more than lower locating ring, a left and right pin is respectively embedded into nozzle cage surrounding, and with lower positioning
The wall contacts of ring, when rotating left and right pin, this left and right pin promotes nozzle cage translation.
In technique scheme, further improved technical scheme is as follows：
Preferably, the angle of described inclined-plane installing plate and the first plane is 45 °.
Preferably, described focusing convex lenss are fused quartz glass.
Preferably, described focusing convex lenss and protection plane mirror are all tightly connected with adapter sleeve by sealing ring.
Because technique scheme is used, the present invention compared with prior art has following advantages and effect：
1st, the present invention has the laser cutting head of real-time adjustment technological parameter function, its no-movable part, is not required to
Want the mechanical component of motor and screw mandrel guide rail etc, fault rate is extremely low, without lubricating maintenance；Can set
Focus size, according to the unlike material focus diameter different with thickness of slab setting, solves optical fiber and cannot cut thickness
The problem of plate；Possesses pneumatic servo focusing function, it is only necessary to parameter sets during the workpiece of cutting unlike material thickness
Fixed i.e. adjustable focal position, need not manually adjust；Secondly, its left and right pin is respectively embedded into nozzle cage four
Week, and the wall contacts with lower locating ring, when rotating left and right pin, this left and right pin promotes nozzle
Cover translation, convenient adjustment translates the nozzle cage and nozzle and focus relative position in horizontal plane, it is to avoid nozzle cage
With nozzle by damage from laser.
2nd, the present invention has the laser cutting head of real-time adjustment technological parameter function, and it can realize focus size
With the independent setting of focal position, when changing one of assignment, another parameter does not change.Certainly this
Two values can change simultaneously, and is independent of each other；Can be cooled down inside eyeglass using oxygen-free copper eyeglass,
Eyeglass maintains standard temperature, no thermal lensing effect all the time, it is possible to use superpower laser；Due to non-activity
Part, whole light path part can be with strict seal, and the air pressure of cutting head internal cavity will not change simultaneously,
Optical module life-span length.
3rd, the present invention has the laser cutting head of real-time adjustment technological parameter function, the change of its variable curvature mirror
Stroke only needs to more than ten microns, and therefore action is extremely rapid, can realize Jiao under some complicated technologies need
The high frequency oscillation of point position, and mechanically operated mobile lens set speed of action wants at least one order of magnitude slow,
This setting continuously adjustabe of focus size, can stablize the arbitrary value in the range of stroke；Low cost, Ben Qie
The cost structure cutting head essentially consists in optical module, due to reliably sealing and cooling down the life-span meeting of these assemblies
Very long, do not need the lasting input of consumptive material during use.Due to eliminating the transmission guiding mechanism of complexity,
And corresponding controller driver, so that holistic cost is greatly reduced；Again, its compact conformation due to
Do not need motor and its drive mechanism, whole cutting head is very light and handy, and existing optical-fiber laser can be used directly
Device, need not do any change on laser instrument.
Brief description
Accompanying drawing 1 is existing cut thermal lensing effect structural representation；
Accompanying drawing 2 has the laser cutting head structural representation of real-time adjustment technological parameter function for the present invention；
The analogous diagram that accompanying drawing 3 changes for focal position of the present invention；
Accompanying drawing 4 is test chart of the present invention；
Accompanying drawing 5 (a) is variable curvature convex reflecting mirror structural representation in laser cutting head of the present invention；
Accompanying drawing 5 (b) is variable curvature concave mirror structural representation in laser cutting head of the present invention；
Accompanying drawing 5 (c) is curvature mirrors structural representation in laser cutting head of the present invention.
In the figures above：1st, light interface；2nd, housing；21st, Qian Bu；22nd, Xia Bu；3rd, upper locating ring；
4th, adapter sleeve；5th, lower locating ring；6th, capacitance sensor；7th, nozzle；8th, inclined-plane installing plate；9th, become
Curvature convex reflecting mirror；10th, curvature mirrors；11st, variable curvature concave mirror；12nd, nozzle cage；
13rd, sealing ring；14th, convex lenss are focused on；15th, protect plane mirror；161st, left pin；162nd, right pin；
171st, convex refractive thin film；172nd, concave reflection thin film；173rd, reflective film；181st, the first air chamber；
182nd, the second air chamber；183rd, the 3rd air chamber；191st, the first waterway；192nd, the second waterway；
193rd, the 3rd waterway.
Specific embodiment
With reference to embodiment, the invention will be further described：
Embodiment 1：A kind of laser cutting head with real-time adjustment technological parameter function, including optical fiber interface 1,
Housing 2, upper locating ring 3, adapter sleeve 4, lower locating ring 5, capacitance sensor 6 and nozzle 7, described housing
2 front end is provided with front port 21, and the end of housing 2 is provided with an inclined-plane installing plate 8, positioned at housing 2 end
Lower end is provided with lower port 22；
Described optical fiber interface 1 is installed to the front port 21 of housing 2, and the inclined-plane positioned at housing 2 inner chamber end is installed
Variable curvature convex reflecting mirror 9, curvature mirrors 10 are sequentially installed with plate 8, positioned at housing 2 from top to bottom
The front end of interior intracavity and be located at front port 21 below a variable curvature concave mirror 11, described light interface are installed
1 and variable curvature convex reflecting mirror 9 and variable curvature concave mirror 11 and curvature mirrors 10 be located at the respectively
In one plane and the second plane immediately below the first plane；
Described variable curvature convex reflecting mirror 9 includes convex refractive thin film 171, the first air chamber 181 and the first water
Cold chamber 191, described first air chamber 181 internal gas pressure in the first setting value, the table of convex refractive thin film 171
Face is convex conditions, and when in working order, the first air chamber 181 internal gas pressure is more than or equal to the first setting value；
Described variable curvature concave mirror 11 includes concave reflection thin film 172, the second air chamber 182 and second
Waterway 192, described second air chamber 182 internal gas pressure in the second setting value, concave reflection thin film 172
Surface is concave surface state, and when in working order, the second air chamber 182 internal gas pressure is less than equal to the second setting value；
Described variable curvature concave mirror 11 includes reflective film 173, the 3rd air chamber 183 and the 3rd water-cooled
Chamber 193, in three setting values, the surface of reflective film 173 is flat to described 3rd air chamber 183 internal gas pressure
Surface state, when in working order, the 3rd air chamber 183 internal gas pressure be greater than, equal to, be less than the 3rd setting
One of value；
Described upper locating ring 3, lower locating ring 5 be respectively installed to the upper end of adapter sleeve 4, on lower end, described company
It is connected by upper locating ring 3 between female connector 4 and the lower port 22 of housing 2, described adapter sleeve 4 and a nozzle cage
Connected by lower locating ring 5 between 12, a nozzle 7 is installed on the lower end of nozzle cage 12, described capacitance sensing
Device 6 is installed in nozzle cage 12, and focusing convex lenss 14 and protection plane mirror 15 are respectively arranged in adapter sleeve
At 4 upper and lower end, the internal diameter size of described nozzle cage 12 is more than the outside dimension of lower locating ring 5, one left,
Right pin 161,162 is respectively embedded into nozzle cage 12 surrounding, and the wall contacts with lower locating ring 5, works as rotation
When turning left and right pin 161,162, this left and right pin 161,162 promotes nozzle cage 12 to translate, to protect
Card nozzle 7 and light shaft coaxle.
Above-mentioned focusing convex lenss 14 are fused quartz glass.
Above-mentioned focusing convex lenss 14 and protection plane mirror 15 are all tightly connected with adapter sleeve 4 by sealing ring 13.
Embodiment 2：A kind of laser cutting head with real-time adjustment technological parameter function, including optical fiber interface 1,
Housing 2, upper locating ring 3, adapter sleeve 4, lower locating ring 5, capacitance sensor 6 and nozzle 7, described housing
2 front end is provided with front port 21, and the end of housing 2 is provided with an inclined-plane installing plate 8, positioned at housing 2 end
Lower end is provided with lower port 22；
Described optical fiber interface 1 is installed to the front port 21 of housing 2, and the inclined-plane positioned at housing 2 inner chamber end is installed
Variable curvature convex reflecting mirror 9, curvature mirrors 10 are sequentially installed with plate 8, positioned at housing 2 from top to bottom
The front end of interior intracavity and be located at front port 21 below a variable curvature concave mirror 11, described light interface are installed
1 and variable curvature convex reflecting mirror 9 and variable curvature concave mirror 11 and curvature mirrors 10 be located at the respectively
In one plane and the second plane immediately below the first plane；
Described variable curvature convex reflecting mirror 9 includes convex refractive thin film 171, the first air chamber 181 and the first water
Cold chamber 191, described first air chamber 181 internal gas pressure in the first setting value, the table of convex refractive thin film 171
Face is convex conditions, and when in working order, the first air chamber 181 internal gas pressure is more than or equal to the first setting value；
Described variable curvature concave mirror 11 includes concave reflection thin film 172, the second air chamber 182 and second
Waterway 192, described second air chamber 182 internal gas pressure in the second setting value, concave reflection thin film 172
Surface is concave surface state, and when in working order, the second air chamber 182 internal gas pressure is less than equal to the second setting value；
Described variable curvature concave mirror 11 includes reflective film 173, the 3rd air chamber 183 and the 3rd water-cooled
Chamber 193, in three setting values, the surface of reflective film 173 is flat to described 3rd air chamber 183 internal gas pressure
Surface state, when in working order, the 3rd air chamber 183 internal gas pressure be greater than, equal to, be less than the 3rd setting
One of value；
Described upper locating ring 3, lower locating ring 5 be respectively installed to the upper end of adapter sleeve 4, on lower end, described company
It is connected by upper locating ring 3 between female connector 4 and the lower port 22 of housing 2, described adapter sleeve 4 and a nozzle cage
Connected by lower locating ring 5 between 12, a nozzle 7 is installed on the lower end of nozzle cage 12, described capacitance sensing
Device 6 is installed in nozzle cage 12, and focusing convex lenss 14 and protection plane mirror 15 are respectively arranged in adapter sleeve
At 4 upper and lower end, the internal diameter size of described nozzle cage 12 is more than the outside dimension of lower locating ring 5, one left,
Right pin 161,162 is respectively embedded into nozzle cage 12 surrounding, and the wall contacts with lower locating ring 5, works as rotation
When turning left and right pin 161,162, this left and right pin 161,162 promotes nozzle cage 12 to translate, to protect
Card nozzle 7 and light shaft coaxle.
The angle of above-mentioned inclined-plane installing plate 8 and the first plane is 45 °.
Knowable to accompanying drawing 4, change variable curvature convex reflecting mirror 9, the pressure of variable curvature concave mirror 11 obtains
Different beam diameters, now focal position do not receive impact, change curvature mirrors 10 pressure when, can
To adjust focal position, but now focus diameter is unaffected.
During using the above-mentioned laser cutting head that can individually set and change focus size and focal position, its non-activity
It is not necessary to the mechanical component of motor and screw mandrel guide rail etc, fault rate is extremely low, without lubricating maintenance for part；
Focus size can be set, according to the unlike material focus diameter different with thickness of slab setting, solve optical fiber no
Method cuts the problem of slab；Possesses pneumatic servo focusing function, during the workpiece of cutting unlike material thickness, only
Need parameter setting to can adjust focal position, need not manually adjust；Again, its can realize focus size and
The independent setting of focal position, when changing one of assignment, another parameter does not change.Certainly this two
Individual value can change simultaneously, and is independent of each other；Can be cooled down inside eyeglass using oxygen-free copper eyeglass,
Eyeglass maintains standard temperature, no thermal lensing effect all the time, it is possible to use superpower laser；Due to non-activity
Part, whole light path part can be with strict seal, and the air pressure of cutting head internal cavity will not change simultaneously,
Optical module life-span length.
Above-described embodiment only technology design to illustrate the invention and feature, its object is to allow and is familiar with this skill
The personage of art will appreciate that present disclosure and implements according to this, can not limit the protection model of the present invention with this
Enclose.All equivalence changes made according to spirit of the invention or modification, all should cover the protection in the present invention
Within the scope of.
Claims (5)
1. a kind of laser cutting head with real-time adjustment technological parameter function it is characterised in that：Including optical fiber
Interface (1), housing (2), upper locating ring (3), adapter sleeve (4), lower locating ring (5), capacitance sensing
Device (6) and nozzle (7), the front end of described housing (2) is provided with front port (21), the end of housing (2)
It is provided with an inclined-plane installing plate (8), be provided with lower port (22) positioned at the lower end of housing (2) end；
Described optical fiber interface (1) is installed to the front port (21) of housing (2), positioned at housing (2) inner chamber end
Variable curvature convex reflecting mirror (9), variable curvature are sequentially installed with the inclined-plane installing plate (8) at end anti-from top to bottom
Penetrate mirror (10), the front end of intracavity and be located at below front port (21) that to be provided with a change bent in housing (2)
Rate concave mirror (11), described light interface (1) and variable curvature convex reflecting mirror (9) are recessed with variable curvature
Face reflecting mirror (11) and curvature mirrors (10) be located at respectively the first plane and be located at the first plane just under
In second plane of side；
Described variable curvature convex reflecting mirror (9) includes convex refractive thin film (171), the first air chamber (181)
With the first waterway (191), in the first setting value, convex surface is anti-for described first air chamber (181) internal gas pressure
The surface penetrating thin film (171) is convex conditions, when in working order, the first air chamber (181) internal gas pressure
More than or equal to the first setting value；
Described variable curvature concave mirror (11) includes concave reflection thin film (172), the second air chamber (182)
With the second waterway (192), in the second setting value, concave surface is anti-for described second air chamber (182) internal gas pressure
The surface penetrating thin film (172) is concave surface state, when in working order, the second air chamber (182) internal gas pressure
Less than equal to the second setting value；
Described variable curvature concave mirror (11) include reflective film (173), the 3rd air chamber (183) and
3rd waterway (193), described 3rd air chamber (183) internal gas pressure in three setting values, reflective film
(173) surface be flat state, when in working order, the 3rd air chamber (183) internal gas pressure be more than,
It is equal to, be less than one of the 3rd setting value；
Described upper locating ring (3), lower locating ring (5) are respectively installed to the upper end of adapter sleeve (4), lower end
On, it is connected by upper locating ring (3) between described adapter sleeve (4) and the lower port (22) of housing (2),
It is connected by lower locating ring (5) between described adapter sleeve (4) and a nozzle cage (12), a nozzle (7)
It is installed on the lower end of nozzle cage (12), described capacitance sensor (6) is installed in nozzle cage (12), one
Focus on convex lenss (14) and protection plane mirror (15) be respectively arranged at the upper and lower end of adapter sleeve (4),
The internal diameter size of described nozzle cage (12) is more than the outside dimension of lower locating ring (5), a left and right pin (161,
162) it is respectively embedded into nozzle cage (12) surrounding, and the wall contacts with lower locating ring (5), when rotation is left,
During right pin (161,162), this left and right pin (161,162) promotes nozzle cage (12) translation.
2. laser cutting head according to claim 1 it is characterised in that：Described inclined-plane installing plate (8)
Angle with the first plane is 45 °.
3. laser cutting head according to claim 1 it is characterised in that：Described focusing convex lenss (14)
For fused quartz glass.
4. laser cutting head according to claim 1 it is characterised in that：Described focusing convex lenss (14)
All it is tightly connected with adapter sleeve (4) by sealing ring (13) with protection plane mirror (15).
5. laser cutting head according to claim 1 it is characterised in that：Described convex refractive thin film
(171), concave reflection thin film (172) and reflective film (173) are anaerobic Copper thin film.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114160960A (en) * | 2021-06-15 | 2022-03-11 | 苏州创鑫激光科技有限公司 | Laser processing method and device |
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Application publication date: 20170301 |