200909075 九、發明說明： C 明 屬 3 發明領域 本發明係有關於利用塗布液於液晶顯示器、 5 PDP(plasma Display Panel)等被塗布構件的表面形成塗膜 之塗布裝置及塗布方法。 C先前技術3 發明背景 過去揭示出在塗布結束位置或塗布快結束之前使縫隙 10喷嘴相對性下降，且使泵逆旋轉，以吸引塗布液之構造作 為塗布裝置（例如，參照專利文獻1)。 【專利文獻1】特開2002-113411號 【明内^^】 發明概要 15 發明欲解決之問題 然而，前述習知塗布裝置即使使泵逆旋轉，也由於泵 到縫隙噴嘴的配管較長，而會因配管内之殘壓而無法立刻 使缝隙噴嘴停止吐出塗布液。因此，塗布結束位置之塗布 液的膜厚控制非常困難。又，在考量殘壓而事先使果逆旋 20轉時必須考量塗布液的黏性或與配管内面之摩擦等各種^ 數的影響，而在實質上不可能。再者，會有使果逆旋财 造成過度的負荷而縮短製品壽命的問題。 因此，本發明係提供調整容易且長期使用也不易故障 且可在最後塗布位置亦使塗布於被塗布構件之塗布液的膜 200909075 厚分布均勻之塗布裝置及塗布方法。 解決問題之方法 本發明作為解決前述問題之方法，為一面使塗布液吐 出裝置相對於載置於支持台上之被塗布構件相對地朝水平 5 方向移動，一面驅動塗布液供給裝置將塗布液供給至前述 塗布液吐出裝置，並透過前述塗布液吐出裝置之喷嘴將塗 布液塗布於前述被塗布構件之塗布裝置，且包含： 歧管，係連通於前述塗布液吐出裝置至前述喷嘴之配 管中途； 10 塗布液吸引裝置，透過前述歧管由前述喷嘴吸引塗布 液；及 控制裝置，係藉由前述塗布液吐出裝置之喷嘴的前端 開口部到達前述被塗布構件之最終塗布領域，使由前述塗 布液吸引裝置所進行之塗布液的吸引動作開始。 15 於此，所謂最終塗布領域為喷嘴之前端開口部從被塗 布構件表面之開始端移動至最終端之領域中，不僅最終 端，亦包含其前面一點點的位置之概念。主要是最終塗布 領域為就此塗布塗布液膜厚會變厚的領域，且因使塗布液 吐出裝置相對於被塗布構件相對地朝水平方向移動之速 20 度、塗布液的種類（特別是粘性等）的不同會變動，可藉由實 驗等來決定適當的位置。 藉由該構造，在塗布液吐出裝置到達被塗布構件之最 終塗布領域之時點下，藉由專用之塗布液吸引裝置，透過 塗布液吐出裝置至喷嘴之配管中途分歧出來之歧管來吸引 6 200909075 塗布液，故可不易受到配管内殘壓的影響。因此，可使使 用在塗布液吸引裝置之泵等驅動源或洗滌器等回收構件小 型且便宜。此時，若在驅動源使用脈衝馬達或伺服馬達， 則可極細微地控制吸引量。 5 又，本發明作為解決前述問題之方法，為一面使塗布 液吐出裝置相對於載置於支持台上之被塗布構件相對地朝 水平方向移動，一面驅動塗布液供給裝置將塗布液供給至 刖述塗布液吐出裝置，並透過前述塗布液吐出裝置之噴嘴 將塗布液塗布於前述被塗布構件之塗布裝置，且包含： 10 歧管’係連通於两述塗布液吐出裝置至前述噴嘴之配 管中途； 開關機構’可使前述歧管對外部大氣開放；及 控制裝置，係藉由前述塗布液吐出裝置之嘴嘴的前端 開口部到達前述被塗布構件之最終塗布領域，藉由前述開 15關機構使歧管對外部大氣開放。 '藉由該構造’在塗布液吐出裝置到達被塗布構件之最 終塗布領域之時點下，藉由開關機構使歧管對外部大氣開 故喷嘴内之塗布液不會因配管内殘壓的不良影響而被 推出至被塗布構件表面，而 a塗布狀態。 了奸时麵频到良好的 且不必另外使用驅動 藉由該構造，可發揮虹吸效果 源’而可順利地吸引塗布液。 7 200909075 前述歧管對大氣之開放位置宜可在垂直方向上調整。 根據該構造，藉由調整開放位置，可使吸引力成為符 合使用狀況之適當值。 又，本發明作為解決前述問題之方法，為—面使蜜布 5液吐出裝置相對於載置於支持台上之被塗布構件相對地朝 水平方向移動，一面驅動塗布液供給裝置將塗布液供給至 前述塗布液吐出裝置，並透過前述塗布液吐出裝置之喷嘴 將塗布液塗布於前述被塗布構件之塗布方法’ 且藉由前述塗布液吐出裝置之喷嘴的前端開口部到達 10前述被塗布構件之最終塗布領域，透過連通於前述塗布液 吐出裝置至前述喷嘴之配管中途之歧管，使前述喷嘴内之 塗布液的吸引動作開始。 又，本發明作為解決前述問題之方法，為一面使塗布 液吐出裝置相對於載置於支持台上之被塗布構件相對地朝 15水平方向移動，一面驅動塗布液供給裝置將塗布液供給至 前述塗布液吐出裝置，並透過前述塗布液吐出裝置之喷嘴 將塗布液塗布於前述被塗布構件之塗布方法， 且藉由前述塗布液吐出裝置之噴嘴的前端開口部到達 韵述被塗布構件之最終塗布領域，使連通於前述塗布液吐 20出裝置至前述噴嘴之配管中途之歧管對大氣開放。 發明之效果 根據本發明，由於透過在塗布液吐出裝置至喷嘴之配 管的途中分歧出來之歧管來吸引塗布液，故不易受到配管 内之殘壓的影響。結果，在塗布吸引裝置可使用小型且便 200909075 宜的東西’且可以期望之吸引量確實地吸引，且再現性亦 優異。 L· 較佳實施例之詳細說明 5 以下，針對本發明之實施形態參照所附圖式說明。 (第1實施形態） 第1圖係本實施形態之塗布裝置之概略說明圖。該塗布 裝置大致包含塗布液槽1、塗布液供給裝置2、塗布液吐出 裝置3、支持台4、塗布液吸引裝置5、控制裝置6。 10 塗布液槽1中儲存塗布液，且隨時可將塗布液供給至塗 布液供給裝置2。塗布液可使用例如塗布於玻璃基板上之 PDP用玻璃膏。但’並不限於此’只要因應被塗布構件^ 之種類從f知公知之各種塗布液選擇適t的東西即可。 塗布液供給裝置2包含圓筒狀之第丨缸筒7與在該第丨缸 15离7内邓滑動且往返移動之第1柱塞8與用以驅動該第1柱塞 8之第1驅動機構9。第1缸筒7為提高内部之辨識性，會使用 玻璃製的東西，但亦可以不鏽鋼等金屬製材料形成。但， 内面必須藉由鏡面加工等縮小抑制粗糙度。又，第i驅動機 構9可使用直動馬達或伺服馬達。直動馬達可在其旋轉軸形 2〇成螺絲且使第1柱塞8直接往返移動。伺服馬達可以其旋轉 軸使滾珠螺桿旋轉，且沿著該滾珠螺桿透過螺合於該滾珠 螺桿之支持部使第1柱塞8往返移動。於此，第丨缸筒7之内 =尺寸為28mm。又，用以使第1柱塞8往返移動之螺絲的導 程為。 200909075 塗布液供给製置2在塗布液槽1附近透過第1三向閥11 與自塗布液槽1延伸之第1配管1〇連接。藉由切換第1三向閥 11來移動第1紅筒7内之第1柱塞8，可在第丨缸筒7内吸引塗 布液槽1内之塗布液，又可將吸引至第1缸筒7内之塗布液朝 5塗布液吐出裝置3吐出。 塗布液吐出裳置3在習知公知之構造中，將塗布液透過 缝隙噴嘴12塗布於載置於支持台4上之PDP(Plasma Display Panel)等之被塗布構件13來形成塗膜14(例如參照特開 2002-113411唬、特開平8_229497號）。塗布液吐出裝置3藉 10 由未圖示之升降裝置升降。 前述支持台4例如由石定盤等構成，且可藉由支持下面 4個角之支持起重器15來調整支持台4的高度。在支持台4上 載置被塗布構件13，且沿著該被塗布構件13平行移動前述 塗布液吐出裝置3，一面驅動前述塗布液供給裝置2，藉此 I5將塗布液塗布於被塗布構件13表面，而形成塗膜14。 塗布液吸引裝置5與前述塗布液供給裝置2相同，包含 圓筒狀之第2缸筒16、在該第2缸筒16内部滑動且往返移動 之第2柱塞17、用以驅動該第2柱塞17之第2驅動機構18。 但，在第2缸筒16相較於使用於前述塗布液供給裝置2的東 20西用較小型的東西’於此内徑尺寸為4mm。又，用以使第2 柱塞17往返移動之螺絲之導程為2mm。 如上所述，可使塗布吸引裝置5較前述塗布液供給穿置 2小非常多是基於下述理由。即，塗布吸引裝置5被需要的 能力不過是為了防止塗布液從縫隙喷嘴12之前端開口部殘 200909075 邊於被塗布構件13表面，而可拉回微量的塗布液之吸引力 而已而且·塗布液吸引裝置5至縫隙喷嘴之前端開口部 的距離可比過去（例如參照f景技術所記载之特開 2002-1134U號)短很多(圖式中不易判別，但實際上是如上 5所述）。因此，所吸引之塗布液不易受到配管之内周面的摩 擦阻力，且在第2驅動機構18對第2柱塞17之拉力上也不需 要太大的力量。又’也不需要如過去兼用塗布液之吐出與 吸引時，為從縫隙噴嘴12塗布塗布液而需要大的力量。因 此，如上所述，可使用小型之塗布液吸引裝置5。 10 t布液吸引裝置5透過第2三向閥2G連接於歧管19的中 途。歧官19的其中-端在塗布液吐出裝置3附近連接於將塗 布液供給至縫隙噴嘴12之配管。又，歧管19之另一端透過u 字官21與廢液壺22連接。藉此，切換第2三向闊2〇，且移動 第2缸筒16内之第2柱塞17 ’可從縫隙喷嘴12將塗布液吸引 15至第2缸筒内16，又’可將所吸引之塗布液排出至廢液壺仏 控制裝置6進行三向閥n、2〇之切換、各驅動機構9、 18之驅動控制等，且將儲存於塗布液別的塗布液供給至塗 布液吐出裝置3，並塗布於被塗布構件u表面，且在最終塗 布領域吸引塗布液且阻止部分的膜厚變厚。 20 接著，針對前述構造之塗布裝置的動作來說明。 首先，將被塗布構件13配置於支持台4上。不用太在意 被塗布構件13是不是正確地定位於支持台4之預定位置，即 載置位置’而在載置後先藉由未圖示之感測器檢測位置且 記憶為座標資料。然後，使塗布液吐出裝置3移動至根據預 11 200909075 先決疋之位置或座標資料算出之位置（以下稱初始位置），且 使縫隙噴嘴12之別端開口部與被塗布構件13之其中一端之 邊緣部相向。此時，切換第丨三向閥u ’且藉由驅動機構使 第1柱塞8後退，並從塗布液槽將塗布吸引至塗布液供給襞 5置2之第1缸筒7。若將預定量之塗布液吸引至第1缸筒7内， 則使第1柱塞8停止。 接著，在珂述初始位置使塗布液吐出裝置3下降（於 此，雖然使塗布液吐出裝置3下降，但亦可使支持台4上升， 或使支持台4上升且使塗布液吐出裝置3下降。），且使其接 1〇近縫隙噴嘴12之前端開口部與被塗布構件13表面之間隙大 小為預定值(於此為10〇em)之位置。又，藉由切換第丨三向 閥11，且逆轉驅動第1驅動機構9使第丨柱塞8前進，可將第i 缸筒7内之塗布液供給至塗布液吐出裝置3。然後，使塗布 液吐出裝置3沿著被塗布構件丨3表面從其中一端之初始位 15置平行移動至另一端之最終塗布位置。藉此，依序在被塗 布構件13表面形成塗膜14。 當塗布液吐出裝置3到達即將結束位置（於此將即將結 束位置設在最終塗布位置的前面5mm)，則停止從塗布液供 給裝置2供給塗布液。然後，在從即將結束位置移動預定尺 20寸(於此為3mm)之時點下驅動塗布液吸引裝置5，且開始由 縫隙噴嘴12吸引塗布液。即，驅動第2驅動機構18的馬達， 使第2柱塞17後退。藉此，透過歧管19從縫隙喷嘴12將塗布 液吸引至第2缸筒16内。在所吸引之塗布液在第2缸筒16内 積存一定量之時點下，切換第2三向閥2〇，且逆轉第2驅動 12 200909075 機構18 ’使第2柱塞17前進，拉 错此攸弟2缸筒16排出塗布液。 所排出之塗布液由廢液壺22 口收。另，第2缸筒16至縫隙喷 嘴12之距離較短，且塗布液成 少 又1配s内周面的摩擦阻力的 衫響較小。因此，可與停止^ 5 10 15 20 驅動塗布液供給裝置2同時，在 縫隙噴嘴12之前端開口部亦蚀成^ 使㈣力作用於塗布液，且可 抑制開始吸引時期與實際上 及弓丨力產生作用的時期之間的 時間差。又，由於塗布液吸 ^ 5丨裝置5主要使用在從縫隙喷嘴 ^塗布液’因此在定__作以外不需要如過去 轉驅動，且輯少，財長_持良好的驅動狀態。 :但’前述最終塗布領域為_噴嘴12之前端開口部到達 最、端即最終塗布位置前之即將結束位置的領域。即將結 束4置為若超過该位置仍繼續供給塗布液的話膜厚會變厚之 極限位置。又’触置可例如透過實驗如下所述地決定。 即，在縫隙喷嘴12之前端開口部到達最終塗布位置之 前，變更停止從塗布液供給|置2供給塗布液的位置或開始 吸引塗布液的位置’且分別觀察塗膜14的形成狀態。然後， 根據該結果，將可得到最適當膜厚的塗膜14的位置決定成 即將'纟α束位置。實驗結果先記錄成資料庫，且從下次塗布 起，若有相同條件，則可根據所紀錄之過去資料來決定即 將結束位置。X，前述即將結束位置亦可一面調整塗布液 之每單位時間之吸引量—面反覆前述實驗來決定。 另，且與開始吸引前述塗布液同時使塗布液吐出裝置3 緩緩下降，且使縫隙噴嘴12之前端開口部接近被塗布構件 13表面。並且，可在最終塗布位置使其最為接近(例如70# 13 200909075 m)。藉此，可適當地使被塗布構件13表面之最終塗布領域 中之塗膜14的膜厚更為穩定，亦可使其與其他部分均勻。 但，為了如過去借用前述塗布液供給裝置2來進行原來 由鈾述塗布液吸引裝置5所進行之塗布液的吸引必須逆旋 5轉馬達。並且，當吸引畺為〇.2^時，必須將柱塞之衝程(吸 引衝程)設為〇.32mm，且將用以得到前述吸引衝程之馬達的 轉數設為〇_〇53轉。相對於此，若根據前述塗布液吸引裝置 5，則當吸引罝為0.2cc時，藉由將吸引衝程設為16 7mm， 且將用以得到該吸引衝程之馬達的轉數設為8 35轉，可由 10縫隙喷嘴12吸引必要量的塗布液。當例如在馬達的轉數上 產生1/100轉的誤差時，由於在前述習知方法中會成為不可 忽視之吸引量的誤差而呈現出來，因此必須高精度地進行 馬達之旋轉控制，而不得不變成昂貴的構造，但若是後者 之本實施形態，則可控制在可忽視不管的誤差範圍内，且 15 可以便宜的構造來對應。 (第2實施形態） 第2圖係顯示第2實施形態之塗布裝置。該塗布裝置與 前述第1實施形態不同的地方在於沒有塗布液吸引裂置5。 另，第2實施形態中係省去與第1實施形態不同的部分以外 20的說明。 第2圖中，取代塗布液吸引裝置5，使歧管19前端位於 塗布位置，即塗布中之縫隙喷嘴12之前端開口部的位置下 方預定尺寸（由第2圖中之A表示）的地方且對大氣開放。在 歧管19途中設開關閥23。藉此，僅開放開關閥23，而藉由 14 200909075 虹吸原理從缝隙喷嘴12吸引塗布液，且與前述楚 1實施形態 同樣可防止被塗布構件13之最終塗布位置中之塗膜μ的膜 厚變厚。 另，前述歧管19之前端位置亦可為可朝上下方向啁敕 之構造。該位置調整可根據所使用之塗布液的種類、開放 量變動參數來進行 又， 位置至塗布位置之距離等的吸引 亦可具有可根據該吸引量變動參數自動地升降之構、a 【圖式簡單說明】 第1圖係第1實施形態之塗布裝置的概略說明圖。 10 第2圖係顯示第2實施形態之塗布裝置之支持台部份的 概略圖。 【主要元件符號説明】 1...塗布液槽 13…被塗布構件 2·.·塗布液供給裝置 14…塗膜 3···塗布液吐出裝置 15…支持起重器 4...支持台 16..·第2缸筒 5.·•塗布液吸引裝置 Π...第2柱塞 6...控制裝置 18…第2驅動機構 7...第1缸筒 19…歧管 8...第1柱塞 20…第2三向閥 9...第1驅動機構 21...U字管 10···第1配管 22…廢液壺 11…弟1二向閥 23..·開關閥 12·.·縫隙喷嘴 15In the present invention, there is a coating apparatus and a coating method for forming a coating film on a surface of a member to be coated such as a liquid crystal display or a 5 PDP (plasma display panel) by using a coating liquid. C. Prior Art 3 Background of the Invention It has been disclosed in the past that the nozzle 10 is relatively lowered in the coating end position or the end of coating, and the pump is reversely rotated to attract the coating liquid as a coating device (for example, refer to Patent Document 1). [Patent Document 1] JP-A-2002-113411 [Minge ^^] SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION However, the conventional coating apparatus described above has a long pipe which is pumped to a slit nozzle even if the pump is reversely rotated. The gap nozzle cannot be stopped immediately to discharge the coating liquid due to the residual pressure in the piping. Therefore, the film thickness control of the coating liquid at the application end position is extremely difficult. Further, when the residual pressure is considered and the effect is reversed by 20 turns, it is necessary to consider the influence of the viscosity of the coating liquid or the friction with the inner surface of the pipe, and it is substantially impossible. Furthermore, there is a problem that the product is excessively loaded and the life of the product is shortened. Therefore, the present invention provides a coating apparatus and a coating method which are easy to adjust and which are not easily broken for a long period of time, and which can uniformly distribute the thickness of the film 200909075 applied to the coating liquid of the member to be coated at the final coating position. Means for Solving the Problem As a method for solving the above-described problems, the coating liquid supply device supplies the coating liquid supply device while the coating liquid discharge device is relatively moved in the horizontal direction 5 with respect to the member to be coated placed on the support table. a coating liquid discharge device that applies a coating liquid to the coating device of the member to be coated through a nozzle of the coating liquid discharge device, and includes a manifold that communicates with the pipe of the coating liquid discharge device to the nozzle; a coating liquid suction device that sucks a coating liquid from the nozzle through the manifold; and a control device that reaches a final coating region of the coated member by a front end opening of a nozzle of the coating liquid discharge device to cause the coating liquid The suction operation of the coating liquid by the suction device starts. Here, the final coating field is a concept in which the front end opening of the nozzle moves from the beginning end to the end of the surface of the coated member, not only the final end but also the position of a little bit in front of it. The final application area is a field in which the coating liquid thickness is thickened, and the coating liquid discharge device is moved 20 degrees in the horizontal direction with respect to the member to be coated, and the type of the coating liquid (especially viscosity, etc.) The difference may vary, and the appropriate position can be determined by experiments or the like. With this configuration, when the coating liquid discharge device reaches the final coating area of the member to be coated, the dedicated coating liquid suction device is used to attract the manifold which is separated from the pipe of the nozzle by the coating liquid discharge device to the nozzle. Since the coating liquid is applied, it is less likely to be affected by the residual pressure in the piping. Therefore, it is possible to make the recovery member such as a pump or the like used for the coating liquid suction device small and inexpensive. At this time, if a pulse motor or a servo motor is used for the drive source, the amount of suction can be extremely finely controlled. In addition, the present invention is a method for solving the above-mentioned problem, and the coating liquid supply device drives the coating liquid supply device to supply the coating liquid to the crucible while moving the coating liquid discharge device relative to the member to be coated placed on the support table in the horizontal direction. In the coating liquid discharge device, the coating liquid is applied to the coating device of the member to be coated through the nozzle of the coating liquid discharge device, and includes: 10 manifolds are connected to the pipes of the nozzles from the coating liquid discharge device to the nozzles The switching mechanism 'opens the manifold to the outside atmosphere; and the control device reaches the final coating field of the coated member by the front end opening of the nozzle of the coating liquid discharge device, by the aforementioned opening mechanism Make the manifold open to the outside atmosphere. By the structure, when the coating liquid discharge device reaches the final coating field of the member to be coated, the manifold is opened to the outside atmosphere by the switching mechanism, so that the coating liquid in the nozzle does not adversely affect the residual pressure in the pipe. It is pushed out to the surface of the member to be coated, and a is coated. When the traitor is used, the surface frequency is good and it is not necessary to use a separate drive. With this configuration, the siphon effect source can be utilized, and the coating liquid can be smoothly sucked. 7 200909075 The open position of the aforementioned manifold to the atmosphere should be adjustable in the vertical direction. According to this configuration, by adjusting the open position, the attractive force can be made to be an appropriate value in accordance with the use condition. Moreover, the present invention provides a coating liquid supply device for driving the coating liquid supply device while moving the coating liquid supply device relative to the member to be coated placed on the support table in a horizontal direction as a method for solving the above problem. The coating liquid discharge device is configured to apply a coating liquid to the coating member by the nozzle of the coating liquid discharge device, and the front end opening of the nozzle of the coating liquid discharge device reaches the coated member. In the final coating field, the suction operation of the coating liquid in the nozzle is started by a manifold that communicates with the pipe of the nozzle from the coating liquid discharge device to the nozzle. Moreover, the present invention provides a coating liquid supply device that supplies the coating liquid to the coating liquid supply device while moving the coating liquid discharge device in the horizontal direction relative to the member to be coated placed on the support table. a coating liquid discharge device that applies a coating liquid to the coating member by a nozzle of the coating liquid discharge device, and reaches a final coating of the coated member by the front end opening of the nozzle of the coating liquid discharge device In the field, the manifold that is connected to the pipe through which the coating liquid is discharged to the nozzle is opened to the atmosphere. According to the present invention, since the coating liquid is sucked through the manifold which is branched in the middle of the pipe from the coating liquid discharge device to the nozzle, it is less likely to be affected by the residual pressure in the pipe. As a result, in the coating suction device, it is possible to use a small and suitable item 200909075, and it is possible to surely attract the desired suction amount, and the reproducibility is also excellent. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. (First Embodiment) Fig. 1 is a schematic explanatory view of a coating apparatus of the present embodiment. This coating apparatus roughly includes a coating liquid tank 1, a coating liquid supply device 2, a coating liquid discharge device 3, a support table 4, a coating liquid suction device 5, and a control device 6. The coating liquid is stored in the coating liquid tank 1, and the coating liquid can be supplied to the coating liquid supply device 2 at any time. For the coating liquid, for example, a glass paste for PDP coated on a glass substrate can be used. However, it is not limited thereto, and it is only necessary to select a suitable t from various known coating liquids according to the type of the member to be coated. The coating liquid supply device 2 includes a cylindrical second cylinder 7 and a first plunger 8 that slides back and forth in the seventh cylinder 15 and reciprocates, and a first drive for driving the first plunger 8 Agency 9. The first cylinder 7 is made of glass, in order to improve the visibility of the interior, but it may be formed of a metal material such as stainless steel. However, the inner surface must be reduced in thickness by mirror processing or the like. Further, the i-th drive mechanism 9 can use a direct drive motor or a servo motor. The direct-acting motor can be screwed in its rotating shaft shape and the first plunger 8 can be directly reciprocated. The servo motor can rotate the ball screw by its rotation shaft, and the first plunger 8 can be reciprocated along the support portion of the ball screw through the ball screw. Here, the inside of the second cylinder 7 has a size of 28 mm. Further, the guide for the screw for reciprocating the first plunger 8 is. 200909075 The coating liquid supply system 2 is connected to the first pipe 1A extending from the coating liquid tank 1 through the first three-way valve 11 in the vicinity of the coating liquid tank 1. By switching the first three-way valve 11 to move the first plunger 8 in the first red cylinder 7, the coating liquid in the coating liquid tank 1 can be sucked into the first cylinder 7 and sucked into the first cylinder. The coating liquid in the cylinder 7 is discharged to the fifth coating liquid discharge device 3. The coating liquid discharge coating 3 is formed in a conventionally known structure, and the coating liquid is applied to the member to be coated 13 such as a PDP (Plasma Display Panel) placed on the support table 4 through the slit nozzle 12 to form a coating film 14 (for example, Refer to JP-A-2002-113411唬, JP-A-8-229497). The coating liquid discharge device 3 is lifted and lowered by a lifting device (not shown). The aforementioned support table 4 is constituted by, for example, a stone fixing plate or the like, and the height of the support table 4 can be adjusted by supporting the jacks 15 supporting the lower four corners. The coating member 13 is placed on the support table 4, and the coating liquid discharge device 3 is moved in parallel along the to-be-coated member 13, and the coating liquid supply device 2 is driven, whereby the coating liquid is applied to the surface of the member to be coated 13 by I5. The coating film 14 is formed. Similarly to the coating liquid supply device 2, the coating liquid suction device 5 includes a cylindrical second cylinder 16 and a second plunger 17 that slides inside the second cylinder 16 and reciprocates, and drives the second cylinder 17 The second drive mechanism 18 of the plunger 17. However, the second cylinder 16 is smaller than the east of the coating liquid supply device 2, and the inner diameter is 4 mm. Further, the lead of the screw for reciprocating the second plunger 17 is 2 mm. As described above, the coating suction device 5 can be made much smaller than the above-described coating liquid supply perforation 2 for the following reasons. In other words, the ability to apply the suction device 5 is merely to prevent the coating liquid from sticking to the surface of the member to be coated 13 from the front end opening portion of the slit nozzle 12, and to pull back the attraction of a small amount of the coating liquid. The distance from the suction device 5 to the opening end of the slit nozzle can be much shorter than that in the past (for example, refer to the special opening 2002-1134U described in the F-Technology) (it is difficult to discriminate in the drawing, but actually it is as described in 5 above). Therefore, the applied coating liquid is less likely to be subjected to the frictional resistance of the inner peripheral surface of the pipe, and the second drive mechanism 18 does not require much force on the tension of the second plunger 17. Further, when it is not necessary to use both the discharge and the suction of the coating liquid in the past, it is necessary to apply a large amount of force to apply the coating liquid from the slit nozzle 12. Therefore, as described above, the small coating liquid suction device 5 can be used. The 10 t cloth liquid suction device 5 is connected to the middle of the manifold 19 through the second three-way valve 2G. The center end of the ejector 19 is connected to a pipe for supplying the coating liquid to the slit nozzle 12 in the vicinity of the coating liquid discharge device 3. Further, the other end of the manifold 19 is connected to the waste liquid tank 22 through the u-shaped officer 21. Thereby, the second three-way width 2〇 is switched, and the second plunger 17' in the second cylinder 16 is moved to suck the coating liquid 15 from the slit nozzle 12 into the second cylinder tube 16, and the The suction coating liquid is discharged to the waste liquid pot control device 6 to switch the three-way valves n and 2, the drive control of each of the drive mechanisms 9, 18, and the like, and the coating liquid stored in the coating liquid is supplied to the coating liquid to be discharged. The device 3 is applied to the surface of the member to be coated u, and the coating liquid is attracted in the final coating area and the film thickness of the blocking portion is increased. 20 Next, the operation of the coating apparatus of the above configuration will be described. First, the member to be coated 13 is placed on the support table 4. It is not necessary to care too much whether the coated member 13 is correctly positioned at a predetermined position of the support table 4, i.e., the placement position, and the position is detected by a sensor (not shown) and stored as coordinate data after being placed. Then, the coating liquid discharge device 3 is moved to a position (hereinafter referred to as an initial position) calculated based on the position or coordinate data of the pre-requisite 11 200909075, and the other end of the slit nozzle 12 and one end of the member to be coated 13 are moved. The edges are facing each other. At this time, the third crucible valve u' is switched, and the first plunger 8 is retracted by the drive mechanism, and the coating is sucked from the coating liquid tank to the first cylinder 7 of the coating liquid supply port. When a predetermined amount of the coating liquid is sucked into the first cylinder 7, the first plunger 8 is stopped. Then, the coating liquid discharge device 3 is lowered at the initial position (where the coating liquid discharge device 3 is lowered, but the support table 4 can be raised, or the support table 4 can be raised and the coating liquid discharge device 3 can be lowered. And the position of the gap between the opening of the front end of the slit nozzle 12 and the surface of the member to be coated 13 is a predetermined value (here, 10 〇em). Further, by switching the third-way three-way valve 11 and reversing the driving of the first drive mechanism 9 to advance the second plunger 8, the coating liquid in the i-th cylinder 7 can be supplied to the coating liquid discharge device 3. Then, the coating liquid discharge device 3 is moved in parallel along the surface of the member to be coated 3 from the initial position 15 of one end thereof to the final coating position of the other end. Thereby, the coating film 14 is formed on the surface of the member to be coated 13 in order. When the coating liquid discharge device 3 reaches the end position (here, the end position is 5 mm in front of the final coating position), the supply of the coating liquid from the coating liquid supply device 2 is stopped. Then, the coating liquid suction device 5 is driven at a position of a predetermined 20 inch (here, 3 mm) from the end position, and the application of the coating liquid by the slit nozzle 12 is started. That is, the motor of the second drive mechanism 18 is driven to retract the second plunger 17. Thereby, the coating liquid is sucked from the slit nozzle 12 through the manifold 19 into the second cylinder tube 16. When the amount of the coating liquid to be sucked is accumulated in the second cylinder 16, a second three-way valve 2 is switched, and the second drive 12 is reversed. 200909075 Mechanism 18' advances the second plunger 17, and the error is pulled. The younger brother 2 cylinder 16 discharges the coating liquid. The discharged coating liquid is taken up by the waste liquid pot 22. Further, the distance from the second cylinder 16 to the slit nozzle 12 is short, and the amount of coating liquid is small, and the frictional resistance of the inner peripheral surface of the first s is small. Therefore, at the same time as stopping the coating liquid supply device 2, the opening portion of the front end of the slit nozzle 12 is also etched to cause the (four) force to act on the coating liquid, and the start of the suction period and the actual bowing can be suppressed. The time difference between the periods when the force acts. Further, since the coating liquid suction device 5 is mainly used in the coating liquid from the slit nozzles, it is not required to be driven as in the past, and the number of copies is small, and the financial length is good. However, the above-mentioned final coating field is a field in which the opening end of the nozzle 12 reaches the most end, that is, the end position immediately before the final coating position. The end position 4 is set to the limit position at which the film thickness becomes thick if the coating liquid is continuously supplied beyond this position. Further, the touch can be determined, for example, by an experiment as described below. In other words, before the slit nozzle 12 reaches the final coating position, the position at which the coating liquid is supplied from the coating liquid supply or the position at which the coating liquid is sucked is stopped, and the formation state of the coating film 14 is observed. Then, based on the result, the position of the coating film 14 at which the optimum film thickness can be obtained is determined to be the position of the '纟α beam. The results of the experiment are first recorded as a database, and from the next coating, if the same conditions are met, the end position can be determined based on the recorded past data. X, the above-mentioned end position can also be determined by adjusting the amount of suction per unit time of the coating liquid. Further, the coating liquid discharge device 3 is gradually lowered while the suction of the coating liquid is started, and the opening end portion of the slit nozzle 12 is brought close to the surface of the member to be coated 13. Also, it can be made closest to the final coating position (eg 70# 13 200909075 m). Thereby, the film thickness of the coating film 14 in the final coating field on the surface of the member to be coated 13 can be appropriately stabilized, and it can be made uniform with other portions. However, in order to carry out the suction of the coating liquid originally carried out by the uranium coating liquid suction device 5 by borrowing the coating liquid supply device 2 in the past, it is necessary to reverse the rotation of the motor. Further, when the suction 畺 is 〇.2^, the stroke of the plunger (suction stroke) must be set to 〇32 mm, and the number of revolutions of the motor for obtaining the aforementioned suction stroke is set to 〇_〇53 rpm. On the other hand, according to the coating liquid suction device 5, when the suction enthalpy is 0.2 cc, the suction stroke is set to 16 7 mm, and the number of revolutions of the motor for obtaining the suction stroke is set to 8 35 rpm. The necessary amount of coating liquid can be attracted by the 10 slit nozzles 12. When, for example, an error of 1/100 rpm is generated in the number of revolutions of the motor, since it is presented as an error of the amount of attraction that cannot be ignored in the aforementioned conventional method, the rotation control of the motor must be performed with high precision, and must not be performed. It does not become an expensive structure, but in the case of the latter embodiment, it can be controlled within an error range that can be ignored, and 15 can be configured to be inexpensive. (Second Embodiment) Fig. 2 shows a coating device according to a second embodiment. The coating apparatus differs from the first embodiment in that there is no coating liquid suction cracking 5 . In the second embodiment, descriptions other than the portions different from the first embodiment will be omitted. In the second drawing, in place of the coating liquid suction device 5, the front end of the manifold 19 is placed at the application position, that is, a predetermined size (indicated by A in Fig. 2) below the position of the opening end portion of the slit nozzle 12 in the application. Open to the atmosphere. An on-off valve 23 is provided in the middle of the manifold 19. Thereby, only the on-off valve 23 is opened, and the coating liquid is sucked from the slit nozzle 12 by the 14200909075 siphon principle, and the film thickness of the coating film μ in the final coating position of the member to be coated 13 can be prevented as in the above-described embodiment. Thicken. Further, the position of the front end of the manifold 19 may be a structure that can be turned up and down. The position adjustment can be performed according to the type of the coating liquid to be used and the opening amount variation parameter, and the suction from the position to the coating position or the like can be automatically raised and lowered according to the suction amount variation parameter, a. Brief Description of the Drawings Fig. 1 is a schematic explanatory view of a coating apparatus according to a first embodiment. Fig. 2 is a schematic view showing a support portion of the coating device of the second embodiment. [Explanation of main component symbols] 1: coating liquid tank 13 ... coated member 2 · coating liquid supply device 14 ... coating film 3 · coating liquid discharging device 15 ... supporting jack 4 ... support table 16.··2nd cylinder 5.●• Coating liquid suction device Π...second plunger 6...control device 18...second drive mechanism 7...first cylinder 19...manifold 8. .. the first plunger 20...the second three-way valve 9...the first drive mechanism 21...the U-tube 10···the first pipe 22...the waste liquid pot 11...the brother 1 two-way valve 23... ·Switching valve 12·.·slot nozzle 15