CN101209439A - Coating device and method - Google Patents
Coating device and method Download PDFInfo
- Publication number
- CN101209439A CN101209439A CNA2007103073146A CN200710307314A CN101209439A CN 101209439 A CN101209439 A CN 101209439A CN A2007103073146 A CNA2007103073146 A CN A2007103073146A CN 200710307314 A CN200710307314 A CN 200710307314A CN 101209439 A CN101209439 A CN 101209439A
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- Prior art keywords
- coating fluid
- coating
- nozzle
- discharger
- coating liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
- B05C5/0229—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet the valve being a gate valve or a sliding valve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1026—Valves
- B05C11/1031—Gate valves; Sliding valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/22—Electrodes, e.g. special shape, material or configuration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
Abstract
A coating device and coating method, to make a coating liquid expelling device (3) move toward horizontal direction relative to a coated component (13) carried on a bearing platform, and to drive a coating liquid supply device (2) to supply the coating liquid to the coating liquid expelling device (3), and to coat the coating liquid on the coated component (13) through the nozzle of the coating liquid expelling device (3). The coating device includes: a branching pipe (19) linking with a tubing from the coating liquid expelling device (3) to the nozzle; a coating liquid suction device (5) for sucking coating liquid from the nozzle by the branching pipe (19); a control device (6) for driving the coating liquid suction device (5) to suck coating liquid according to the nozzle front end opening part of the coating liquid expellin device (3) to the last coating area of the coated component (13). By means of said device and method, it is easy to regulate, it is hard to generate fault using for a long time, and the coating film thickness of the coating liquid is uniform on the coated component including the last coating position.
Description
Technical field
The present invention relates on the surface of LCD panel, PDP applied members such as (Plasma Display Panel, plasma display panels), form the apparatus for coating and the coating process of the usefulness of filming with coating fluid.
Background technology
In the past, as apparatus for coating, a kind ofly before coating end position or coating close to an end, slot nozzle was descended relatively and make the pump reverse rotation attract the structure (for example with reference to patent documentation 1) of coating fluid thereby disclosed.
Patent documentation 1: TOHKEMY 2002-113411 communique
But, in described apparatus for coating in the past, even make the pump reverse rotation, because the pipe arrangement from pump to slot nozzle is longer, because of the residual compression in the pipe arrangement can't stop the discharge of coating fluid from slot nozzle immediately.Therefore, the film thickness monitoring at the coating fluid that is coated with the end position place is very difficult.In addition, if consider residual compression and make the pump reverse rotation in advance, then must consider coating fluid viscosity and with the influence of the various parameters such as friction of pipe arrangement inner surface, come down to impossible.In addition, applied compulsory load, the short problem of life of product has been arranged by making the pump reverse rotation.
Summary of the invention
Therefore, the invention provides a kind of apparatus for coating and coating process, it is adjusted easily, and long-term the use is difficult to break down, and comprises last coating position and the film thickness distribution that is coated on the coating fluid on the applied member can be made evenly interior.
For achieving the above object, apparatus for coating of the present invention is, with respect to putting the applied member on supporting station the coating fluid discharger is moved to horizontal direction, and the driving coating liquid supplying device supplies to described coating fluid discharger with coating fluid, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member, comprising:
Branched pipe, this branched pipe be communicated with the way from described coating fluid discharger to the pipe arrangement of described nozzle;
The coating fluid suction device, this coating fluid suction device attracts coating fluid by described branched pipe from described nozzle;
Control device, this control device makes described coating fluid suction device begin to carry out the attraction action of coating fluid according to the last dispensing area that the front end opening of the nozzle of described coating fluid discharger arrives described applied member.
Here, so-called last dispensing area is the front end opening of nozzle not only comprises the position of rearmost end before also comprising it from starting end moves to the zone of rearmost end on the surface of applied member a notion.In a word, last dispensing area is then can make thickness become big zone if keep original state that coating fluid is coated with, it is to change according to the difference that the speed that the coating fluid discharger relatively moves to horizontal direction, the kind (especially viscosity) of coating fluid are waited, and can wait according to experiment and determine suitable position.
Utilize this structure, arrive the moment of the last dispensing area of applied member at the coating fluid discharger, utilize special-purpose coating fluid suction device, branched pipe by branch the way of the pipe arrangement from the coating fluid discharger to nozzle attracts coating fluid, so can be difficult to be subjected to the influence of the residual compression in the pipe arrangement.Therefore, can make the recovery member of the drive source of employed pump of coating fluid suction device etc. and syringe etc. small-sized and inexpensive.In this occasion,, then can control traffic attraction if drive source uses pulse motor or servomotor very finely.
In addition, for achieving the above object, apparatus for coating of the present invention is, with respect to putting the applied member on supporting station the coating fluid discharger is moved to horizontal direction, and the driving coating liquid supplying device supplies to described coating fluid discharger with coating fluid, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member, comprising:
Branched pipe, this branched pipe be communicated with the way from described coating fluid discharger to the pipe arrangement of described nozzle;
Opening/closing unit, this opening/closing unit can make the outside air to open of above-mentioned branched pipe put;
Control device, this control device utilizes described opening/closing unit that the outside air to open of branched pipe is put according to the last dispensing area that the front end opening of the nozzle of above-mentioned coating fluid discharger arrives described applied member.
Utilize this structure, arrive the moment of dispensing area behind the work of applied member at the coating fluid discharger, utilize opening/closing unit that the outside air to open of branched pipe is put, so the coating fluid in the nozzle can not be subjected to the harmful effect of the residual compression in the pipe arrangement and be expressed on the surface of applied member, in the end dispensing area obtains good coating state.
Described branched pipe is to the release position of atmosphere, preferably below the front end opening of the nozzle of described coating fluid discharger.
Utilize this structure, can bring into play siphon effect, can not use drive source just can successfully attract coating fluid in addition.
Described branched pipe also preferably can be along the vertical adjustment to the release position of atmosphere.
Utilize this structure,, attraction can be made the suitable value that is suitable for behaviour in service by adjusting the release position.
In addition, for achieving the above object, coating process of the present invention is, with respect to putting the applied member on supporting station the coating fluid discharger is moved to horizontal direction, and the driving coating liquid supplying device supplies to described coating fluid discharger with coating fluid, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member
Arrive the last dispensing area of described applied member according to the front end opening of the nozzle of described coating fluid discharger, by with pipe arrangement way from described coating fluid discharger to described nozzle the attraction that begins to carry out the coating fluid in the described nozzle of the branched pipe that is communicated with move.
For achieving the above object, coating process of the present invention is, with respect to putting the applied member on supporting station the coating fluid discharger is moved to horizontal direction, and the driving coating liquid supplying device supplies to described coating fluid discharger with coating fluid, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member
Arrive the last dispensing area of described applied member according to the front end opening of the nozzle of described coating fluid discharger, make with pipe arrangement way from described coating fluid discharger to described nozzle the branched pipe that is communicated with to atmosphere opening.
Adopt the present invention, owing to by the branched pipe of branch the way of the pipe arrangement from the coating fluid discharger to nozzle coating fluid is attracted, so be difficult to be subjected to the influence of the residual compression in the pipe arrangement.Its result, the coating fluid suction device can use small-sized and inexpensive device, can attract with required traffic attraction reliably, and repeatability is also excellent.
Description of drawings
Fig. 1 is the diagrammatic illustration figure of the apparatus for coating of the 1st example.
Fig. 2 is the supporting station skeleton diagram partly of the apparatus for coating of expression the 2nd example.
The specific embodiment
Below, with reference to description of drawings example of the present invention.
(the 1st example)
Fig. 1 is the diagrammatic illustration figure of the apparatus for coating of this example.This apparatus for coating roughly has: coating flow container 1; Coating liquid supplying device 2; Coating fluid discharger 3; Supporting station 4; Coating fluid suction device 5; Control device 6.
In coating flow container 1, store coating fluid, can supply with coating fluid to coating liquid supplying device at any time.As coating fluid, for example can use the PDP glass cream that is coated on the glass substrate.But, do not limit therewith, according to the kind of applied member 13, also can be from selected suitable coating fluid the known various coating fluid in the past.
Coating liquid supplying device 2 has: the 1st working cylinder 7 cylindraceous; At the 1st working cylinder 7 inner the 1st pistons 8 that move back and forth while sliding; Be used to drive the 1st driving mechanism 9 of the 1st piston.As the 1st working cylinder 7, make with glass, improving inner visuality, but also the metal material of available stainless steel etc. is made.But inner surface must utilize mirror finish etc. to suppress surface roughness less.In addition, as the 1st driving mechanism 9, can use straight moving motor or servomotor.In straight moving motor, on its rotating shaft, form screw thread, the 1st piston 8 is directly moved back and forth.In servomotor, make the ball-screw rotation with its rotating shaft, the 1st piston 8 is moved back and forth along this ball-screw.Here, the internal diameter size of the 1st working cylinder 7 makes 28mm.In addition, being used to make the helical pitch of the screw thread that the 1st piston 8 moves back and forth is 6mm.
Coating feedway 2 is connected with the 1st pipe arrangement 10 that from then on extends by the 1st triple valve 11 near coating flow container 1.By the 1st triple valve is switched, the 1st piston 8 in the 1st working cylinder 7 is moved, thereby the coating fluid in the coating flow container 1 can be attracted in the 1st working cylinder 7, and the coating fluid that is attracted in the 1st working cylinder 7 can be discharged to coating fluid discharger 3 sides.
Described supporting station 4 for example is made of stone platform etc., can be carried out the height of supporting station 4 by the supporting jack 15 in 4 corners of supporting lower surface and regulate.Put applied member 13 on supporting station 4, make along this applied member 13 that described coating fluid discharger 3 is parallel to be moved and by driving described coating liquid supplying device 2, and coating fluid is coated on the surface of applied member 13, formation films 14.
Coating fluid suction device 5 is identical with described coating liquid supplying device 2, has: the 2nd working cylinder 16 cylindraceous; The 2nd piston 17 that slides and move back and forth in the 2nd working cylinder 16 inside; Be used to drive the 2nd driving mechanism 18 of the 2nd piston 17.But the 2nd working cylinder 16 is compared with described coating liquid supplying device 2 employed working cylinders, uses small-sized working cylinder, and here, internal diameter size makes 4mm.In addition, being used to make the helical pitch of the screw thread that the 2nd piston 17 moves back and forth is 2mm.
So, coating fluid suction device 5 can be compared with described coating liquid supplying device 2 that to do very small-sizedly be following reason.That is, coating fluid suction device 5 required abilities only make the coating fluid of small quantity return, and remain on the surface of applied member 13 from the front end opening of slot nozzle 12 to prevent coating fluid.And, the distance of 12 front end opening is compared with (for example TOHKEMY 2002-113411 communique of putting down in writing with reference to background technology) situation in the past and can be shortened (it is difficult differentiating the figure, but is actually as described above) significantly from coating fluid suction device 5 to slot nozzle.Therefore, the coating fluid of attraction is difficult to be subjected to the frictional resistance of pipe arrangement inner peripheral surface, and the tractive of 18 pairs the 2nd pistons 17 of the 2nd driving mechanism does not need big power.In addition, as in the past in the occasion of discharge that is used for coating fluid and attraction, do not need for being coated with required bigger power from 12 pairs of coating fluids of slot nozzle.Therefore, as previously mentioned, can use small-sized coating fluid suction device 5.
Coating fluid suction device 5 is connected in the way by the 2nd triple valve 20 and branched pipe 19.One end of branched pipe 19 is connected with the pipe arrangement that coating fluid is supplied to slot nozzle 12 near coating fluid discharger 3.In addition, the other end of branched pipe 19 is connected with waste liquid tank 22 by U-shaped pipe 21.Thus,, the 2nd piston 17 in the 2nd working cylinder 16 is moved, can coating fluid be attracted in the 2nd working cylinder 16 from slot nozzle 12, and the coating fluid after attracting can be discharged to waste liquid tank 22 by switching the 2nd triple valve 20.
Control device 6 carries out the switching of triple valve 11,20, the driving control of each driving mechanism 9,18 etc., supply to coating fluid discharger 3 and be coated on the surface of applied member 13 being stored in coating fluid in the coating flow container 1, in the end dispensing area attracts coating fluid to stop the increase of local thickness.
Below, the action of the apparatus for coating of said structure is described.
At first, the applied member 13 of configuration on supporting station 4.Applied member 13 correctly is positioned on the assigned position of supporting station 4, or does not take notice of so, after putting, come the detection position and save as coordinate data with not shown sensor to putting the position.Then, position that coating fluid discharger 3 is moved to be predetermined or the position of calculating (below be called initial position) according to coordinate data, the front end opening that makes slot nozzle 12 is relative with one of applied member 13 distolateral edge portion.At this moment, switch the 1st triple valve 11, utilize driving mechanism that the 1st piston 8 is retreated, coating fluid is attracted in the 1st working cylinder 7 of coating liquid supplying device 2 from the coating flow container.After if the coating fluid of ormal weight is attracted in the 1st working cylinder 7, then stop 8 work of the 1st piston.
Then, make coating fluid discharger 3 drop to described initial position (here, coating fluid discharger 3 is descended, but supporting station 4 is risen, or make supporting station 4 rise, make simultaneously coating fluid discharger 3 to descend), the gap size on the surface of the front end opening of slot nozzle 12 and applied member 13 approaches to the position that becomes setting (being 100 μ m) here.In addition, by switching the 1st triple valve 11, the 1st driving mechanism 9 reversed to drive advances the 1st piston 8, and the coating fluids in the 1st working cylinder 7 are supplied to coating fluid discharger 3.And, make coating fluid discharger 3 along the surface of applied member 13 from the parallel last coating position that moves to the other end of the initial position of an end.Thus, on the surface of applied member 13, form successively and film 14.
If coating fluid discharger 3 arrives the position that closes to an end (, with the front 5mm place of set positions for last coating position that close to an end) here, then stop to supply with coating fluid from coating liquid supplying device 2.And, the moment moved given size (being 3mm here) from the position that closes to an end, drive coating fluid suction device 5, begin to carry out attraction action from the coating fluid of slot nozzle 12.That is, drive the motor of the 2nd driving mechanism 18, the 2nd piston 17 is retreated.Thus, coating fluid is attracted in the 2nd working cylinder 16 from slot nozzle 12 by branched pipe 19.Coating fluid after being attracted has stockpiled a certain amount of moment in the 2nd working cylinder 16, switch the 2nd triple valve 20, makes 18 counter-rotatings of the 2nd driving mechanism, and the 2nd piston 17 is advanced, and discharges coating fluid from the 2nd working cylinder 16.The coating fluid of discharging is reclaimed by waste liquid tank 17.Distance from the 2nd working cylinder 16 to slot nozzle 12 is short, and coating fluid is subjected to the influence of frictional resistance of pipe arrangement inner peripheral surface little.Therefore, when stopping coating liquid supplying device 2 driven, also can act on attraction, can suppress to attract the time lag between period of beginning period and practical function attraction coating fluid at the front end opening of slot nozzle 12.In addition, because coating fluid suction device 5 is mainly used in the attraction from the coating fluid of slot nozzle 12, thus except regular discharging operation, do not need the counter-rotating driving as in the past, thereby fault is few, but the good driving condition of long term maintenance.
Yet described last dispensing area is meant the zone till the front end opening of slot nozzle 12 arrives the position that closes to an end that rearmost end is the front of coating position at last.The set positions that closes to an end is for continuing the supply coating fluid if surpass this position, and thickness will become big limit positions.In addition, this position for example also can following such decision according to experiment.
That is, when the front end opening of slot nozzle 12 arrives the front of last coating position, change from the position that coating liquid supplying device 2 is supplied with the position of coating fluids and begun to carry out the attraction of coating fluid, observe 14 the formation state of filming respectively stopping.And according to this result, 14 the position of filming that will obtain optimal thickness is defined as the position that closes to an end.Experimental result is saved as database,,, also can decide the position that closes to an end according to the data in the past that storing if similarity condition is arranged since the coating of next time.In addition, for the described position that closes to an end, repeat described experiment and determine while also can adjust the traffic attraction of the unit interval of coating fluid.
When beginning to attract described coating fluid, coating fluid discharger 3 is descended gradually, the surface that makes the front end opening of slot nozzle 12 approach applied member 13.And, as long as make it in the end be coated with the position the most near (for example 70 μ m).Thus, the surface that further suitably makes applied member 13 in the end 14 the thickness of filming of dispensing area is stable, can realize the homogenising with other parts.
Yet,, must make the motor reverse rotation in order to replace described coating fluid suction device 5 to carry out the attraction of coating fluid with described coating liquid supplying device 2 as in the past.And, in the occasion that traffic attraction is made 0.2cc, the stroke (attraction stroke) of piston must be made 0.32mm, the rotating speed that will be used to obtain the motor of described attraction stroke makes 0.053 to be changeed.On the contrary, if adopt described coating fluid suction device 5, then be the occasion of 0.2cc at traffic attraction, make 16.7mm by attracting stroke, the rotating speed that will be used to obtain the motor of this attractions stroke makes 8.35 commentaries on classics, can be from the coating fluid of slot nozzle 12 attraction necessary amounts.For example, the occasion of 1/100 error of changeing takes place at motor speed, it for the former mode in the past the error of the traffic attraction that can not ignore, so must carry out the rotation control of motor accurately, have to become the structure of high price, if but the structure of this example of the latter can be controlled in negligible error range, available inexpensive structure tackles.
(the 2nd example)
Fig. 2 represents the apparatus for coating of the 2nd example.This apparatus for coating and described the 1st example difference are not have coating fluid suction device 5.In the 2nd example, to omitting with the explanation in addition of the 1st example different piece.
Among Fig. 2, replace coating fluid suction device 5 and the front end of branched pipe 19 is positioned at given size (among Fig. 2 with shown in the A) below of the front end opening position of the slot nozzle 12 that the coating position promptly is coated with, and make it to atmosphere opening.And, open and close valve 23 is set in the way of branched pipe 19.Thus,, attract coating fluids from slot nozzle 12 according to siphon principle as long as open and close valve 23 is open, just can be identical with described the 1st example, prevent that applied member 13 in the end is coated with 14 the thickness thickening of filming of position.
The front position of described branched pipe 19 also can make in the adjustable structure of above-below direction.This position adjustment also can be carried out according to the kind of employed coating fluid, traffic attraction variable parameter from the release position to distance that is coated with the position etc.In addition, also has the structure that to carry out lifting according to this traffic attraction variable parameter automatically.
Claims (6)
1. apparatus for coating, make the coating fluid discharger and move to horizontal direction with respect to putting the applied member on supporting station, and drive coating liquid supplying device coating fluid is supplied to described coating fluid discharger, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member, it is characterized in that, comprising:
Be communicated with the branched pipe, this branched pipe and way from described coating fluid discharger to the pipe arrangement of described nozzle;
The coating fluid suction device, this coating fluid suction device attracts coating fluid by described branched pipe from described nozzle;
Control device, this control device makes described coating fluid suction device begin to carry out the attraction action of coating fluid according to the last dispensing area that the front end opening of the nozzle of described coating fluid discharger arrives described applied member.
2. apparatus for coating, make the coating fluid discharger and move to horizontal direction with respect to putting the applied member on supporting station, and drive coating liquid supplying device coating fluid is supplied to described coating fluid discharger, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member, it is characterized in that, comprising:
Be communicated with the branched pipe, this branched pipe and way from described coating fluid discharger to the pipe arrangement of described nozzle;
Opening/closing unit, this opening/closing unit can make the outside air to open of described branched pipe put;
Control device, this control device utilizes described opening/closing unit that the outside air to open of branched pipe is put according to the last dispensing area that the front end opening of the nozzle of described coating fluid discharger arrives described applied member.
3. apparatus for coating as claimed in claim 2 is characterized in that, the position to atmosphere opening of described branched pipe is below the front end opening of the nozzle of described coating fluid discharger.
4. as claim 2 or 3 described apparatus for coating, it is characterized in that the position to atmosphere opening of described branched pipe can be along the vertical adjustment.
5. coating process, make the coating fluid discharger and move to horizontal direction with respect to putting the applied member on supporting station, and drive coating liquid supplying device coating fluid is supplied to described coating fluid discharger, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member, it is characterized in that
Arrive the last dispensing area of described applied member according to the front end opening of the nozzle of described coating fluid discharger, and by with the way of pipe arrangement from described coating fluid discharger to described nozzle the branched pipe that is communicated with begin to carry out the attraction action of the coating fluid in the described nozzle.
6. coating process, make the coating fluid discharger and move to horizontal direction with respect to putting the applied member on supporting station, and drive coating liquid supplying device coating fluid is supplied to described coating fluid discharger, nozzle by described coating fluid discharger is coated on coating fluid on the described applied member, it is characterized in that
Arrive the last dispensing area of described applied member according to the front end opening of the nozzle of described coating fluid discharger, make with pipe arrangement way from described coating fluid discharger to described nozzle the branched pipe that is communicated with to atmosphere opening.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006350865 | 2006-12-27 | ||
| JP2006350865A JP2008161741A (en) | 2006-12-27 | 2006-12-27 | Coating apparatus and coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101209439A true CN101209439A (en) | 2008-07-02 |
Family
ID=39609793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007103073146A Pending CN101209439A (en) | 2006-12-27 | 2007-12-27 | Coating device and method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008161741A (en) |
| KR (1) | KR20080061318A (en) |
| CN (1) | CN101209439A (en) |
| TW (1) | TWI335246B (en) |
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| JP3483461B2 (en) * | 1997-04-01 | 2004-01-06 | 宮崎沖電気株式会社 | Resist discharge system and resist discharge method |
| JPH1147662A (en) * | 1997-08-07 | 1999-02-23 | Hirata Corp | Formation of coating film and coating film forming device |
| JPH11156270A (en) * | 1997-11-27 | 1999-06-15 | Asahi Chem Ind Co Ltd | Coating device |
| JP2001179156A (en) * | 1999-12-22 | 2001-07-03 | Hirano Tecseed Co Ltd | Discharge type coating device |
| JP4130058B2 (en) * | 2000-10-10 | 2008-08-06 | 東京応化工業株式会社 | Application method |
| JP3811812B2 (en) * | 2000-11-21 | 2006-08-23 | 株式会社ヒラノテクシード | Coating equipment |
| JP2002336763A (en) * | 2001-05-15 | 2002-11-26 | Sony Corp | Coating apparatus and coating method |
| JP4409969B2 (en) * | 2004-01-16 | 2010-02-03 | 株式会社ヒラノテクシード | Coating equipment |
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2006
- 2006-12-27 JP JP2006350865A patent/JP2008161741A/en active Pending
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2007
- 2007-12-19 TW TW096148638A patent/TWI335246B/en active
- 2007-12-27 CN CNA2007103073146A patent/CN101209439A/en active Pending
- 2007-12-27 KR KR1020070138267A patent/KR20080061318A/en not_active Application Discontinuation
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| CN102650774A (en) * | 2012-05-18 | 2012-08-29 | 深圳市华星光电技术有限公司 | Liquid crystal suction device and liquid crystal coating equipment |
| CN103100506A (en) * | 2013-03-04 | 2013-05-15 | 深圳市信宇人科技有限公司 | Extruding-type coating head with precisely controlled head and tail thicknesses |
| CN106413915A (en) * | 2014-03-19 | 2017-02-15 | 东丽株式会社 | Coating device, coating method, and method for manufacturing display component |
| CN106413915B (en) * | 2014-03-19 | 2019-12-24 | 东丽工程株式会社 | Coating method |
| CN104155848A (en) * | 2014-07-22 | 2014-11-19 | 四川虹视显示技术有限公司 | Photoresist coating and recycling device |
| CN106493041A (en) * | 2015-09-07 | 2017-03-15 | 东丽工程株式会社 | Apparatus for coating |
| RU198609U1 (en) * | 2020-03-16 | 2020-07-20 | федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" | DEVICE TO CONTROL THE APPLICATION OF PROTECTIVE COATINGS ON THE INNER SURFACE OF PRODUCTS OF CYLINDRICAL SHAPE |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200909075A (en) | 2009-03-01 |
| JP2008161741A (en) | 2008-07-17 |
| TWI335246B (en) | 2011-01-01 |
| KR20080061318A (en) | 2008-07-02 |
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