CN201780435U - Liquid crystal drop device - Google Patents
Liquid crystal drop device Download PDFInfo
- Publication number
- CN201780435U CN201780435U CN2010201409624U CN201020140962U CN201780435U CN 201780435 U CN201780435 U CN 201780435U CN 2010201409624 U CN2010201409624 U CN 2010201409624U CN 201020140962 U CN201020140962 U CN 201020140962U CN 201780435 U CN201780435 U CN 201780435U
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- liquid crystal
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- supply pipe
- control device
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Abstract
The utility model aims to provide a liquid crystal drop device which can easily achieve advance preparation such as adjustment and the like and drop liquid crystal agent in right amount onto a glass substrate. In the liquid crystal drop device (1), a nozzle (33) is arranged at the lower part and vertically equipped with a micro-syringe (30); and a liquid crystal tank (20) is connected with a three-way valve (34) disposed between a front end part (30a) and the nozzle through a second supply pipe (23), a buffer tank (21) and a first supply pipe (22). A control device (10) switches the three-way valve (34) to enable the front end part (30a) to be communicated with the second supply pipe (23) and enable a piston (31) to rise up, so that liquid crystal agent (LC) is sucked into the micro-syringe (30) from the liquid crystal tank (20), then, the three-way valve (34) is switched to lead the front end part (30a) to be communicated with the nozzle (33), so that the piston (31) descends and the liquid crystal agent (LC) in the micro-syringe (30) is sprayed out of the nozzle (33). Besides, the control device (10) can calculate the spray volume of liquid crystal agent (LC) according to the movement amount during the descent of the piston (31).
Description
Technical field
The present invention relates to the liquid crystal drop dropping control device of dropping liquid crystal agent on a kind of glass substrate that in the manufacturing of display panels, uses.
Background technology
In the manufacturing process of the display panels that two sheet glass substrates is clipped liquid crystal agent applying, an amount of liquid crystal agent need be dropped onto the operation on the glass substrate.
As the device of dropping liquid crystal agent on glass substrate, a kind of liquid ejection divider is for example disclosed in the patent documentation 1, it possesses needle valve below the jar of storing the liquid crystal agent, and the switching by this needle valve is dripped the liquid crystal agent.
Patent documentation 1:(Japan) spy opens the 2003-164783 communique
But there is following problems in the ejection of disclosed liquid with divider in the patent documentation 1: need a large amount of time in needs carry out the adjustment in advance such as setting of aperture of the responsiveness of pin and needle valve.
Summary of the invention
Therefore, problem of the present invention is, provides a kind of adjust etc. to prepare to be easy to, an amount of liquid crystal agent can be dropped in the liquid crystal drop dropping control device on the glass substrate in advance.
In order to solve described problem, liquid crystal drop dropping control device of the present invention, possess the nozzle of ejection liquid crystal agent can be placed the below and be configured in glass substrate directly over microsyringe, by the decline of the piston liquid crystal agent of dripping, and possesses the control device of calculating the drainage of liquid crystal agent based on the amount of movement of piston.
According to the present invention, can provide to adjust to wait and prepare to be easy to, an amount of liquid crystal agent can be dropped in the liquid crystal drop dropping control device on the glass substrate in advance.
Description of drawings
Fig. 1 is the figure of display panels manufacturing installation that expression possesses the liquid crystal drop dropping control device of present embodiment;
Fig. 2 is the figure of the formation of expression liquid crystal drop dropping control device;
Fig. 3 is a configuration example of expression T-valve and the figure of state, (a) is the figure of expression first state, (b) is the figure of expression second state;
Fig. 4 is the figure of configuration example that expression possesses the liquid crystal drop dropping control device of flowmeter;
Fig. 5 is the figure of configuration example that expression possesses the liquid crystal drop dropping control device of level sensor.
Label declaration
1 liquid crystal drop dropping control device
10 control device
20 liquid crystal jars (liquid crystal supply source)
21 surge tanks (air gas separation unit)
22 first supply pipes (liquid crystal supply pipe)
23 second supply pipes (liquid crystal supply pipe)
30 microsyringes
The 30a leading section
31 pistons
33 nozzles
34 T-valve (valve system)
The 34d spool
The agent of LC liquid crystal
Embodiment
Below, utilize the description of drawings embodiments of the present invention.
Fig. 1 is the display panels manufacturing installation 100 that possesses the liquid crystal drop dropping control device 1 of present embodiment.
As shown in Figure 1, display panels manufacturing installation 100 disposes liquid crystal drop dropping control device 1, Base Plate Lamination Device 101, substrate transfer apparatus 102 etc. on pallet 200, controlled by control device 10.
Base Plate Lamination Device 101 is disposed at the operating area (applying operating area W1) that is surrounded by support 201, and liquid crystal drop dropping control device 1 is supported by support 201 in the outside of applying operating area W1.
The zone that possesses liquid crystal drop dropping control device 1 is called drippage operating area W2.
If the direction (left and right directions of Fig. 1) that applying operating area W1 and drippage operating area W2 arrange is an X-direction, and being located at direction vertical on the surface level (the depth direction of Fig. 1) when the Y direction with X-axis, substrate transfer apparatus 102 comprises X objective table 102a that moves along X-direction and the Y objective table 102b that moves along Y direction.
In addition, establish axle with X-axis and Y-axis quadrature for the Z axle.The Z axle is represented the short transverse of display panels manufacturing installation 100.
X objective table 102a is configured to: move on the moving guide rail 206 that pallet 200 upper edge X-directions are laid by driving motor 205.
For example, constitute ball screw framework by the not shown turning axle and the X objective table 102a of driving motor 205, the rotation by driving motor 205 drives, and X objective table 102a moves along X-direction.
Y objective table 102b is configured on the X objective table 102a, moves along Y direction by driving motor 102d.
In addition, on Y objective table 102b, dispose the rotatable stage 102c that is driven around the rotation of Z axle.Rotatable stage 102c is supported on the Y objective table 102b via swivel bearing 102f, is driven motor 102e and drives and rotate around the Z axle.
And glass substrate 5 is loaded on the substrate stage 102g that is configured on the rotatable stage 102c.
Lower chambers 101a2 with the wall shape around the substrate stage 102g surrounds, and the top is open.
Lower chambers 101a2 is the parts of outside wall portions below that form the vacuum chamber 101a of confined space, be configured in Base Plate Lamination Device 101 on and the 101a1 of upper chamber that forms the outside wall portions top of vacuum chamber 101a combine and form vacuum chamber 101a.
Base Plate Lamination Device 101 also possesses the base plate keeping device 101b that keeps glass substrate 6 up, makes actuator 101c that base plate keeping device 101b and the 101a1 of upper chamber move up and down, regulates the combine barometric control unit 101d etc. of the air pressure in the vacuum chamber 101a that forms of the 101a1 of upper chamber and lower chambers 101a2 except that the above-mentioned 101a1 of upper chamber.
Base plate keeping device 101b is arranged on the inboard of the 101a1 of upper chamber, and is configured in the combine inside of the vacuum chamber 101a that forms of the 101a1 of upper chamber and lower chambers 101a2.
And base plate keeping device 101b constitutes, and moves up and down with the 101a1 of upper chamber by actuator 101c, when the 101a1 of upper chamber and lower chambers 101a2 combine, then moves up and down individually by actuator 101c.
In addition, base plate keeping device 101b is by the maintenance glass substrates 6 such as adhesion of vacuum suction, Electrostatic Absorption, adhesion parts.
In the liquid crystal drop dropping control device 1, drive division 4 drives the piston 31 (with reference to Fig. 2) that microsyringe 30 possesses, from the liquid crystal jar 20 of storing the liquid crystal agent as the liquid crystal supply source liquid crystal agent is sucked microsyringe 30, thereafter, drive division 4 driven plunger 31 are from the nozzle 33 ejection liquid crystal agent that are arranged at the below.
When disposing glass substrate 5 under the nozzle 33, the liquid crystal agent that sprays from nozzle 33 is dropped on the glass substrate 5.
The display panels manufacturing installation 100 of Gou Chenging is with the following sequential system liquid making LCD panel under control device 10 controls like this.
When the substrate stage 102g of substrate transfer apparatus 102 went up, 10 adhesions of passing through vacuum suction, Electrostatic Absorption, adhesion parts of control device etc. kept glass substrates 5 to glass substrate 5 by not shown carrying unit load.
Thereafter, control device 10 makes substrate transfer apparatus 102 move to drippage operating area W2, so that glass substrate 5 is configured under the nozzle 33 of liquid crystal drop dropping control device 1, and then, mobile a little X objective table 102a, Y objective table 102b, rotatable stage 102c carry out contraposition so that the position of the liquid crystal agent of dripping be in nozzle 33 under.
Then, control device 10 drives the drive division 4 of liquid crystal drop dropping control device 1, and the liquid crystal agent is dripped on glass substrate 5.The position of dropping liquid crystal agent is under the situation of many places, and control device 10 suitable mobile X objective table 102a, Y objective table 102b, rotatable stage 102c are dropped in each position on the glass substrate 5 with the liquid crystal agent.
After the drippage of liquid crystal agent finishes, control device 10 moves to applying operating area W1 with substrate transfer apparatus 102, mobile a little X objective table 102a, Y objective table 102b, rotatable stage 102c, make the aligned in position of 101a1 of upper chamber and lower chambers 101a2,101a1 of upper chamber and base plate keeping device 101b are descended, and the 101a1 of upper chamber and lower chambers 101a2 are combined forms vacuum chamber 101a.
Then, control device 10 descends base plate keeping device 101b in the vacuum chamber 101a of vacuum state, and the glass substrate 5 of substrate transfer apparatus 102 carryings and the glass substrate 6 of base plate keeping device 101b maintenance are fitted.
Two sheet glass substrates 5,6 are fitted and the display panels made is carried by not shown carrying unit like this.
As mentioned above, control device 10 another glass substrate 6 of fitting on the glass substrate 5 that has dripped the liquid crystal agent is made display panels.
Therefore, at the drippage operating area of display panels manufacturing installation 100 W2, possesses the liquid crystal drop dropping control device 1 of dropping liquid crystal agent on glass substrate 5.
Below, mainly with reference to Fig. 2, the liquid crystal drop dropping control device 1 of present embodiment is described.
As shown in Figure 2, liquid crystal drop dropping control device 1 comprises: supply with liquid crystal agent LC liquid crystal supply unit 2, liquid crystal agent LC is dropped in liquid crystal drippage portion 3 on the glass substrate 5, drives the drive division 4 of liquid crystal drop dropping control device 1, and control by control device 10.
Liquid crystal supply unit 2 comprises liquid crystal jar 20 and the surge tank 21 of storing liquid crystal agent LC, and liquid crystal jar 20 is connected by first supply pipe 22 with surge tank 21.
During dismounting liquid crystal jar 20, this bubble enters first supply pipe 22 sometimes.
The structure of surge tank 21 is unqualified, for example, is provided with and sucts liquid crystal agent LC and it is sucted liquid crystal agent LC to second supply pipe 23 that liquid crystal drippage portion 3 carries with near the bottom (bottom) from surge tank 21.
Because on the top of surge tank 21, therefore second supply pipe 23 can not comprise air and sucts liquid crystal agent LC density than the low airtrapping of liquid crystal agent LC.
And second supply pipe 23 is connected with T-valve 34, forms the liquid crystal supply pipe by first supply pipe 22 and second supply pipe 23.The details of T-valve 34 as described later.
In addition, the air gas separation unit that liquid crystal supply pipe 2 possesses is not limited to surge tank 21 so long as the air that flows through first supply pipe 22 with liquid crystal agent LC can be got final product with the formation that liquid crystal agent LC separates.
In the liquid crystal drippage portion 3, be provided with from 20 suctions of liquid crystal jar to the liquid crystal agent LC of glass substrate 5 drippages and the microsyringe 30 of interim storage.
And, in the microsyringe 30 in the present embodiment, make the leading section 30a that is connected with nozzle 33 be in the below and configuration vertically.
In addition, by the piston 31 that moves up and down in the microsyringe 30 of arranged perpendicular, the liquid crystal agent LC in the microsyringe 30 is from nozzle 33 ejections.
Specifically, because piston 31 moves (decline) downwards, the pressure of the liquid crystal agent LC in the microsyringe 30 uprises and sprays from nozzle 33.
And, so that nozzle 33 be in glass substrate 5 directly over mode dispose liquid crystal drop dropping control device 1.
Constitute according to this, can make from the liquid crystal agent LC of microsyringe 30 to be dropped on the glass substrate 5 via nozzle 33 ejections.
In addition, in liquid crystal drippage portion 3, possesses T-valve 34 as valve system.T-valve 34 is configured between the leading section 30a and nozzle 33 of microsyringe 30, and liquid crystal jar 20 is connected with T-valve 34 via second supply pipe 23, surge tank 21 and first supply pipe 22.
That is to say that T-valve 34 connects leading section 30a, nozzle 33 and second supply pipe 23 (liquid crystal supply pipe) of microsyringe 30, the nozzle 33 and second supply pipe 23 are connected with leading section 30a via T-valve 34.
Shown in Fig. 3 (a) and (b), T-valve 34 possesses three connector 34a～34c, by the action of spool 34d, can switch connector 34c and close the state (hereinafter referred to as first state) of connector 34a, 34b unlatching simultaneously and two states of state (hereinafter referred to as second state) that connector 34b closes connector 34a, 34c unlatching simultaneously.
In addition, (a) expression first state, (b) expression second state among Fig. 3.
Be connected with the leading section 30a of microsyringe 30 on the connector 34a of T-valve 34, be connected with second supply pipe 23 on the connector 34b, be connected with nozzle 33 on the connector 34c, when T-valve 34 is first state, shut-off nozzle 33 is also opened the leading section 30a of microsyringe 30 and second supply pipe 23 and being communicated with simultaneously, and the leading section 30a and the nozzle 33 of closing second supply pipe 23 when being second state and opening microsyringe 30 simultaneously are communicated with.
Explanation is turned back to Fig. 2.
For example, the rotation amount of motor 40 is delivered to nut body 42 via forming threaded turning axle 41 on the surface, nut body 42 moves at above-below direction along guiding mechanism 44.
Thus, piston 31 moves at above-below direction via linking part 43.
In addition, motor 40 preferred stepping motors, servomotor etc. can correctly position the motor of control.
In addition, for the amount of movement of piston 31, the position data of the linear scale 46 that is read according near the linear scale detection heads 45 that are installed in the nut body 42 by control device 10 monitors.
Liquid crystal drop dropping control device 1 by such formation on glass substrate 5 during dropping liquid crystal agent LC, control device 10 will be drawn into microsyringe 30 and interim storage as initial operation to the liquid crystal agent LC of the suitable amount of the drainage of glass substrate 5 drippages.
Then, control device 10 drives motor 40 rotations, makes piston 31 upward to mobile (rising).The air pressure of microsyringe 30 inside reduces, and the liquid crystal agent LC that is stored in surge tank 21 is inhaled into microsyringe 30 via second supply pipe 23.
At this moment, be stored in the liquid crystal agent LC of liquid crystal jar 20 via first supply pipe, 22 inflow surge tanks 21.
The product (SLu) of the amount of movement (ascending amount Lu) when control device 10 rises according to piston 31 and the sectional area S of microsyringe 30 is calculated the amount (soakage) of the liquid crystal agent LC that is inhaled into microsyringe 30.
And when supply reached the amount (to the drainage of glass substrate 5 drippages) of regulation to the liquid crystal agent LC of microsyringe 30,10 of control device stopped the rising of piston 31.
In addition, the sectional area S of microsyringe 30 is prior specified value (constant), so control device 10 can be calculated the soakage of liquid crystal agent LC.
Then, control device 10 switches to second state with T-valve 34, and microsyringe 30 and nozzle 33 are communicated with.Then, make motor 40 rotations drive and make piston 31 to descend, spray liquid crystal agent LC from nozzle 33.
Be dropped on the glass substrate 5 from the liquid crystal agent LC of nozzle 33 ejections.
For example, during many places dropping liquid crystal agent LC on glass substrate 5, the amount of movement (slippage Ld) when 10 of control device descend based on piston 31 is calculated the amount to the liquid crystal agent LC of place drippage.
That is to say that the product (SLd) of the sectional area S of microsyringe 30 and the slippage Ld of piston 31 is the spray volume of the liquid crystal agent LC of nozzle 33, this spray volume is the drainage to glass substrate 5 drippages.
Then, the slippage Ld of control device 10 regulating pistons 31 is so that be equivalent to the spray volume that the amount of the prior drainage of setting becomes nozzle 33.
After the drippage of the liquid crystal agent LC at one place finished, control device 10 suitably moved substrate transfer apparatus 102 shown in Figure 1, needed position dropping liquid crystal agent LC on glass substrate 5.
The microsyringe 30 of the liquid crystal drop dropping control device 1 of present embodiment as shown in Figure 1 and Figure 2, be configured to nozzle 33 and be positioned at the below, so, glass substrate 5 can be configured in nozzle 33 under, thereby can shorten path till liquid crystal agent LC drops onto on the glass substrate 5.
Thereby the pressure loss till liquid crystal agent LC drops onto on the glass substrate 5 reduces.
As mentioned above, at sectional area is that piston 31 has descended behind the slippage Ld in the microsyringe 30 of S, the spray volume of the liquid crystal agent LC of the leading section 30a of microsyringe 30 is the product (SLd) of sectional area S and slippage Ld, but when the pressure loss till liquid crystal agent LC drops onto on the glass substrate 5 is big, because of the pressure loss makes the drainage of dripping to glass substrate 5 reduce.
In the present embodiment, the pressure loss till liquid crystal agent LC drops onto on the glass substrate 5 can be reduced, the minimizing of the drainage of the liquid crystal agent LC that the pressure loss causes can be suppressed.
That is to say that the spray volume of the liquid crystal agent LC of the nozzle 33 by regulating microsyringe 30 can be regulated the drainage of liquid crystal agent LC to glass substrate 5 drippages accurately.
In addition, as mentioned above, piston 31 is driven by the motor 40 that stepping motor, servomotor etc. can correctly position control.
And the control device 10 of control motor 40 can detect the slippage Ld of piston 31 according to the position data that linear scale detection head 45 reads.
Thereby control device 10 is the slippage Ld of control piston 31 accurately.
As mentioned above, in the liquid crystal drop dropping control device 1 of present embodiment shown in Figure 2, control device 10 is the slippage Ld of control piston 31 accurately, thereby can regulate the spray volume of the liquid crystal agent LC of nozzle 33 accurately.
In addition because the pressure loss of liquid crystal agent LC till dropping onto on the glass substrate 5 is less, so the spray volume of the liquid crystal agent LC of nozzle 33 and on glass substrate 5 drainage of drippage equate.
Thereby, can obtain following excellent results: the liquid crystal agent LC of neither too much nor too little suitable amount is dropped on the glass substrate 5, and can improves the rate that manufactures a finished product of using the display panels that this glass substrate 5 makes.
In addition, in the liquid crystal drop dropping control device 1 of present embodiment, control device 10 detects the drainage of liquid crystal agent LC to glass substrate 5 based on the slippage Ld of piston 31, so, needn't adjust the liquid crystal agent LC that just can make suitable amount in advance and be dropped on the glass substrate 5.
In addition, the liquid crystal drop dropping control device 1 of present embodiment disposes surge tank 21 as shown in Figure 2 between liquid crystal jar 20 and microsyringe 30.
For example, when unloading liquid crystal jar 20 when changing liquid crystal jar 20 etc., air can become bubble and enters first supply pipe 22 sometimes.
When such air enters in the microsyringe 30, produce error, can not on glass substrate 5, drip the liquid crystal agent LC of correct amount with respect to the spray volume of the liquid crystal agent LC of the slippage Ld of piston 31.
That is to say that the small slippage Ld of piston 31 is absorbed by the compression of air, the spray volume of the liquid crystal agent LC of nozzle 33 produces error.
In the present embodiment, between liquid crystal jar 20 and microsyringe 30, possess surge tank 21, form and pass through surge tank 21, prevented that air from entering in the microsyringe 30 air and the formation that liquid crystal agent LC separates as air gas separation unit.
Thereby, can obtain following excellent results:, also the liquid crystal agent LC of correct amount can be dropped on the glass substrate 5 even under the situation that unloads liquid crystal jar 20.
In addition, present embodiment can be carried out suitable design alteration in the scope that does not break away from aim of the present invention.
For example, also can constitute, as shown in Figure 4, configuration flowmeter 24 on second supply pipe 23 that connects surge tank 21 and T-valve 34 is at the flow that detects the liquid crystal agent LC that flows through second supply pipe 23 in microsyringe 30 supply liquid crystal agent LC.
According to this formation, control device 10 can correctly detect the increment of liquid crystal agent LC to microsyringe 30 with the total flow of liquid crystal agent LC that flows through second supply pipe 23 as the increment of liquid crystal agent LC to microsyringe 30.
In addition, also can constitute, replace flowmeter 24 shown in Figure 4, as shown in Figure 5, the hyperacoustic level sensor 25 of configuration using on for example bottom of liquid crystal jar 20.
In addition, though not shown, also can constitute, possess the weight sensor of the weight that detects liquid crystal jar 20, control device 10 is calculated the increment of liquid crystal agent LC to microsyringe 30 based on the minimizing of the weight of liquid crystal jar 20.
In addition, also can constitute, drive piston 31 shown in Figure 2 without the rotation driving of motor 40 and with not shown actuator.
In addition, though it is not shown, but also can constitute, as valve system, replace T-valve 34 and possess the open and close valve of switching second supply pipe 23 respectively and the open and close valve of switching nozzle 33, when microsyringe 30 sucks liquid crystal agent LC, open second supply pipe 23 and while shut-off nozzle 33 (first state), and on glass substrate 5, during dropping liquid crystal agent LC, then close second supply pipe 23 and open nozzle 33 (second state) simultaneously.
Claims (3)
1. liquid crystal drop dropping control device is characterized in that possessing:
Microsyringe makes the leading section that nozzle is installed be positioned at ground, below arranged perpendicular;
The liquid crystal supply source is supplied with the liquid crystal agent to described microsyringe;
The liquid crystal supply pipe connects described liquid crystal supply source and described leading section; And
Valve system can be closed first state that simultaneously described leading section and described liquid crystal supply pipe open and described liquid crystal supply pipe at described nozzle and be closed between second state that described leading section and described nozzle are opened simultaneously and switch,
When described valve system is in the state that switches to described first state, the piston that described microsyringe possesses rises and the liquid crystal agent is sucked this microsyringe from described liquid crystal supply source, when described valve system was in the state that switches to described second state, described piston descended and sprays the liquid crystal agent from described nozzle.
2. liquid crystal drop dropping control device as claimed in claim 1 is characterized in that, possesses will to become bubble and flow through the air gas separation unit that the air of described liquid crystal supply pipe separates with the liquid crystal agent together with the liquid crystal agent.
3. as claim 1 or the described liquid crystal drop dropping control device of claim 2, it is characterized in that,
Described valve system connects described leading section, described nozzle and described liquid crystal supply pipe,
Described valve system is the T-valve that possesses the structure of spool, the following action of described spool: when described first state, make described nozzle close and make described leading section and described liquid crystal supply pipe to be communicated with, when described second state, make described liquid crystal supply pipe close and make described leading section and described nozzle to be communicated with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201409624U CN201780435U (en) | 2010-03-15 | 2010-03-15 | Liquid crystal drop device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201409624U CN201780435U (en) | 2010-03-15 | 2010-03-15 | Liquid crystal drop device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201780435U true CN201780435U (en) | 2011-03-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201409624U Expired - Fee Related CN201780435U (en) | 2010-03-15 | 2010-03-15 | Liquid crystal drop device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201780435U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106950754A (en) * | 2017-04-06 | 2017-07-14 | 安徽熙泰智能科技有限公司 | A kind of liquid crystal pouring device for liquid crystal on silicon (LCOS) display device |
| CN107367871A (en) * | 2017-09-19 | 2017-11-21 | 京东方科技集团股份有限公司 | Liquid crystal pump, liquid crystal drip-injection system and liquid crystal drip-injection method |
| CN109085705A (en) * | 2018-07-13 | 2018-12-25 | 深圳市华星光电技术有限公司 | Liquid crystal coating apparatus and liquid crystal coating method |
-
2010
- 2010-03-15 CN CN2010201409624U patent/CN201780435U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106950754A (en) * | 2017-04-06 | 2017-07-14 | 安徽熙泰智能科技有限公司 | A kind of liquid crystal pouring device for liquid crystal on silicon (LCOS) display device |
| CN107367871A (en) * | 2017-09-19 | 2017-11-21 | 京东方科技集团股份有限公司 | Liquid crystal pump, liquid crystal drip-injection system and liquid crystal drip-injection method |
| CN107367871B (en) * | 2017-09-19 | 2020-05-05 | 京东方科技集团股份有限公司 | Liquid crystal pump, liquid crystal dripping system and liquid crystal dripping method |
| CN109085705A (en) * | 2018-07-13 | 2018-12-25 | 深圳市华星光电技术有限公司 | Liquid crystal coating apparatus and liquid crystal coating method |
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Owner name: HITACHI,LTD. Free format text: FORMER OWNER: HITACHI PLANT TECHNOLOGIES LTD. Effective date: 20140317 |
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| C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20140317 Address after: Tokyo, Japan Patentee after: Hitachi Ltd. Address before: Tokyo, Japan, Japan Patentee before: Hitachi Plant Technologies Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110330 Termination date: 20170315 |
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| CF01 | Termination of patent right due to non-payment of annual fee |