CN103118802B - Automated liquid supply mechanism and coater provided with same - Google Patents
Automated liquid supply mechanism and coater provided with same Download PDFInfo
- Publication number
- CN103118802B CN103118802B CN201180042922.3A CN201180042922A CN103118802B CN 103118802 B CN103118802 B CN 103118802B CN 201180042922 A CN201180042922 A CN 201180042922A CN 103118802 B CN103118802 B CN 103118802B
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- CN
- China
- Prior art keywords
- liquid
- supply
- fluent material
- discharging fixed
- receiving portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
Abstract
[Problem] To provide an automated liquid supply mechanism eliminating the need to physically connect a liquid material storage portion and a discharging device and capable of effectively preventing generation and mixing of particles, and a coater provided with the automated liquid supply mechanism. [Solution] An automated liquid supply mechanism characterized by comprising: a liquid storage portion for storing a liquid material; a supply portion having a supply port for supplying the liquid material stored in the liquid storage portion; a receiving portion having a bubble removing mechanism and a receiving port for receiving the liquid material discharged from the supply portion; and a receiving portion driving device for driving the receiving portion, wherein the receiving portion moves to a receiving position with the receiving port located immediately below the supply port, receives the liquid material supplied in drops from the supply port, and supplies, to the discharging device, the liquid material from which bubbles have been removed by the bubble removing mechanism, and a coater provided with the automated liquid supply mechanism.
Description
Technical field
It is prevented from being mixed in a liquid bubble or the liquid of particle automatically feeds mechanism and possesses the present invention relates to a kind of
Its apparatus for coating.
Background technology
In the operation of manufacture liquid crystal display, existing makes two pieces of relative baseplate-laminatings and therebetween formation liquid crystal layer
Panel operation（Also referred to as cell processes）.Particularly when large-scale panel is manufactured, carry out before it will arrive laminating under liquid crystal drop
The injection method that drips fitted after one substrate.
In the injection method that drips, in order to such device to substrate, will have been used under liquid crystal drop, i.e., with storage liquid crystal
Container, and spued by ormal weight every time from the nozzle for being arranged on the container by the effect of gas pressure or the pressure of machinery
Distributor.
In recent years, along with the maximization of liquid crystal display, become its basic substrate and also maximizing.If substrate is big
Type, then because the usage amount of liquid crystal also increases, therefore in the past in the little hold-up vessel as the use of distributor institute（Injection
Device）In become to be difficult to tackle.Reason is that liquid crystal is finished at once in little hold-up vessel, to be replaced as frequently as container etc., because
This, efficiency can be reduced in terms of productivity, workability.In addition, when hold-up vessel is changed, being also mixed into bubble or foreign matter
（Hereinafter referred to as " particle "）Worry.
In this regard, carrying out various trials：By arranging large-scale tank outside device, and fluent material is supplied therefrom solving
These problems.
For example, in patent document 1, liquid drop jetting apparatus are disclosed, it is characterised in that possess apparatus main body, can load
The mounting portion of workpiece, the head unit with the multiple drop head portions to workpiece discharge drop, the head of support head unit
Portion's unit supporting mass, the travel mechanism for making workpiece mounting portion and head unit supporting mass relative movement, storage spue from each drop
Head spue discharge liquid and can be changed and/or the liquid that spued supplement with least one tanks tank system
Unite, be fixedly disposed relative to head unit supporting mass and flow into the secondary tank of discharge liquid, can system of connection from a tank
A stream and connecting secondary tank and head unit of discharge liquid are supplied with secondary tank and from a can system to secondary tank
And respectively a plurality of secondary stream of discharge liquid being supplied to each drop head portion from secondary tank, the bar number of a stream compares Secondary Flow
The bar number on road is few.
In addition, in patent document 2, disclosing liquid crystal dripping device, it is characterised in that be configured to, comprising：Substrate institute
The workbench that is located at, by can by the distributor header for possessing syringe and nozzle under liquid crystal drop or in the way of being applied to substrate,
The periphery of workbench is provided in supporting the head rest supporting component of distributor header, will drip or is applied to the liquid crystal supply of substrate
Supply lines to the syringe of distributor header, be linked to distributor header syringe supply and demand circuit and in supply
Heterogeneous logistics when circuit is provided in either side and prevents these circuits interconnected or separate with the connecting portion of supply and demand circuit enters
Heterogeneous thing prevents lid, is separated from the top of workbench by head rest supporting component and distributor header and is moved to supply lines institute
The side being located at, so as to supply and demand circuit is linked to supply lines and liquid crystal can be filled to syringe from liquid crystal feeder.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2004-167430 publications
Patent document 2：Japanese Unexamined Patent Publication 2009-172585 publications
The content of the invention
Invent technical problem to be solved
However, in the device of document 1, liquid supply line（Pipe）Head is connected to from tank, thus bubble or particle are difficult
In to be mixed into liquid, on the other hand, pipe is also moved together during head relative movement, therefore, it is necessary to predict moving range and prolong
Long tube, and keep surplus to arrange.In addition, pipe also moves together the original that can also become pipe accelerated deterioration during head relative movement
Cause.
In addition, in the device of document 2, constituted in the way of it can separate link in the midway of pipe arrangement, hence without
Liquid supply line（Pipe）, on the other hand, there is such technical problem in involved the problems referred to above：Due to becoming in linking part
The mechanism of contact, thus become the reason for the partial frictional produces particle.And, constitute heterogeneous thing prevent the hinge that covers or
The parts such as cam can also become particle Producing reason from action part friction.
Additionally, in the device of document 2, there is such technical problem：In linking part, become by liquid from it is upper directly
The mechanism of syringe is injected into, thus the liquid level of the liquid for accumulating in lower section is beaten from the liquid of upper injection, now bubble can be mixed
Enter.
Therefore, it is an object of the present invention to provide a kind of liquid for solving above-mentioned technical problem automatically feeds mechanism and tool
Standby its apparatus for coating.
Solve the technological means of technical problem
Inventor is in order to eliminate because temporarily or physically connecting liquid store materials portion and device for discharging fixed always causing
Disadvantage, employing makes fluent material reservoir and device for discharging fixed detached structure always.It is furthermore possible to also provide a kind of by arranging
Eliminate by the bubble removing mechanism of the disadvantage of the bubble for making fluent material reservoir separate always with device for discharging fixed and produce to make
Bubble is not flowed into the liquid of device for discharging fixed and automatically feeds mechanism and possess its apparatus for coating.
That is, the 1st invention is related to a kind of liquid and automatically feeds mechanism, it is characterised in that possess：The liquid of storing liquid material
Reservoir；The supply unit of the supply mouth of the fluent material of liquid storage part is stored in supply；With acceptance from supply unit row
The receiving port of the fluent material for going out and the receiving portion of bubble removing mechanism；And make receiving portion move receiving portion driving means,
Receiving portion is moved to receiving port and receives position positioned at the underface of supply mouth, is not connected to supply mouth and receiving port, from detached
The supply of dripping of position receptive liquid material, and the fluent material supply discharge dress that bubble is eliminated by bubble removing mechanism
Put.
2nd invention, it is characterised in that in the 1st invention, bubble removing mechanism possesses：The bubble of storing liquid material is removed
Go to be impregnated in container, one end be stored in the liquid of bubble removing container and inflow pipe that the other end is connected with receiving port,
And one end impregnated in and be stored in the liquid of bubble removing container and effuser that the other end is connected with device for discharging fixed.
3rd invention, it is characterised in that in the 2nd invention, bubble removing mechanism possesses：To bubble removing container decompression
Pump installation and the working gas in one end is connected to pump installation and the other end is configured in bubble removing container space supply
To pipe.
4th invention, it is characterised in that in the 2nd or the 3rd invention, possesses detection liquid storage part and/or bubble is removed and used
The detection means of the amount of the fluent material in container.
5th invention, it is characterised in that in any one invention in the 1st～4, receiving port has expanding opening, and is
The shape of a certain amount of fluent material can temporarily be stored.
6th invention, it is characterised in that in any one invention in the 1st～5, possesses in the underface in supply mouth
The 1st position and 2nd position different from the 1st position mobile fluent material of retreating receive component.
7th invention, it is characterised in that in any one invention in the 1st～6, possesses control from liquid storage part to confession
The quantity delivered of fluent material of the pinch valve and/or control to the quantity delivered of the fluent material in portion from receiving portion to device for discharging fixed
Pinch valve.
8th invention is related to a kind of apparatus for coating, it is characterised in that possess：It is equipped with the pallet of the workbench for keeping workpiece；
The device for discharging fixed of the nozzle with discharge fluent material；Make the driving means of device for discharging fixed and workbench relative movement；And the 1st
The liquid involved by any one invention in～7 automatically feeds mechanism.
9th invention, it is characterised in that in the 8th invention, possesses the beam that is equipped with multiple device for discharging fixed and makes respectively to tell
Go out the spitting unit driving means that device is moved freely along the extended direction of beam, the receiving portion arranges phase with device for discharging fixed
Same quantity.
10th invention, it is characterised in that in the 9th invention, the supply unit is equipped multiple.
11st invention, it is characterised in that in any one invention in the 8th～10, possesses covering workbench and the dress that spues
The lid put.
12nd invention, it is characterised in that in the 11st invention, the liquid storage part is disposed in the outside of the lid.
The effect of invention
According to the present invention, due to by fluent material reservoir and device for discharging fixed physical connection, and companion need not be equipped with
With the variable liquid supply line of the mobile shape of device for discharging fixed（Pipe）, when arranging liquid supply line therefore, it is possible to eliminate
Space problem or liquid supply line deterioration problem.
Further, since do not make fluent material reservoir side and device for discharging fixed side contacts and supply fluent material, therefore, it is possible to
It is effectively prevented the generation of particle and is mixed into.
Further, since bubble removing mechanism is set, therefore, it is possible to prevent bubble to be flowed into device for discharging fixed.
Description of the drawings
Fig. 1 is to illustrate that liquid involved in the present invention automatically feeds the schematic diagram of mechanism.
Fig. 2 is the approximate three-dimensional map of the apparatus for coating that the liquid possessed involved by embodiment automatically feeds mechanism.
Fig. 3 is the enlarged drawing of the major part that the liquid being exaggerated involved by embodiment automatically feeds mechanism.
Fig. 4 is the side view of the other modes for representing the bubble removing mechanism involved by embodiment.
The explanation of symbol
1：Liquid automatically feed mechanism, 2：Supply unit, 3：Receiving portion, 4：Tank（Fluent material reservoir）、5：Compressed gas
Supply pipe, 6：Liquid send pipe, 7：Detection means, 8：Pipe arrangement, 9：Valve A, 10：Valve B, 11：Valve C, 12：Supply mouth, 13：Supply
Pipe, 14：Supporting member, 15：Baffle plate（shutter）、16：Receiving port, 17：Funnel, 18：Bottle（Bubble removing container）、19：Stream
Enter pipe, 20：Effuser, 21：Working gas supply pipe, 22：Upper limit sensor, 23：Lower limited sensor, 24：Device for discharging fixed, 25：
Apparatus for coating, 26：Fluent material, 27：Coating object（Workpiece）、28：Workbench, 29：Pallet, 30：Beam, 31：Beam movement side
To, 32：Device for discharging fixed moving direction, 33：Lid, 34：Air cleaning device, 35：Piston, 36：Measurement unit, 37：Switching valve,
38：Nozzle, 39：Discharge opening, 40：Inflow entrance, 41：Bubble removing mechanism, 42：Particle, 43：Receiving portion driving means（X drives dress
Put）、44：Beam driving means（Y driving means）
Specific embodiment
Hereinafter, a mode for implementing the present invention is illustrated.
Fig. 1 represents that explanation liquid involved in the present invention automatically feeds the schematic diagram of mechanism.In the figure, the arrow of blacking
The flowing of liquid is represented, blank arrow represents the flowing of gas.
Liquid automatically feeds mechanism 1 with the big tank of the capacity of storing liquid material 26（Fluent material reservoir）4th, possesses row
Go out the supply mouth 12 of the fluent material 26 sent from tank 4 supply unit 2, in the top of device for discharging fixed 24 and device for discharging fixed 24 integratedly
Arrange and receive from supply unit 2 discharge fluent material 26 receiving portion 3 and make receiving portion 3 move receiving portion drive dress
It is set to main inscape.In the middle of these, link from tank 4 to supply unit 2 with pipe arrangement 8A, from receiving portion 3 to device for discharging fixed
24 are linked with pipe arrangement 8B, 8C.With baffle plate between supply unit 2 and receiving portion 3（shutter）15 degree for being free to pass through are divided
From.In addition, the pipe arrangement 8A in the way of tank 4 and supply unit 2, controlling the valve A9 of the flowing to supply unit 2, to be arranged on supply unit 2 attached
Closely, in tank 4, it is provided with the detection means 7 for detecting the surplus of the fluent material 26 in tank 4.By arranging detection means 7,
Can be based on when fluent material 26 is less than ormal weight and send alarm come the signal of self-test device 7.Here, as detection means
7, it is possible to use weighing unit for for example being detected by weight etc..In addition, it is also possible to use ultrasound examination liquid level
Ultrasonic sensor, according to optical sensors of the presence or absence of different detection liquid etc. of light quantity.
In supply unit 2, the supply pipe 13 for possessing the supply mouth 12 that the fluent material 26 that will be sent from tank 4 is discharged is provided with.
Supply pipe 13 is bent downwardly in discharge side, and fluent material 26 is vertically supplied（Drip supply）To receiving portion 3.Supply unit 2
Link without pipe arrangement with receiving portion 3, do not have that supply unit 2 declines or receiving portion 3 rises.That is, supply mouth 12 do not connect
By mouth 16, fluent material is supplied under contactless state from detached position, thus prevent the generation itself of particle, and prevented
Grain is mixed into fluent material 26.In addition, below supply pipe 13, possessing when unnecessary fluent material 26 is hung down from supply mouth 12
For receiving its baffle plate 15.Baffle plate 15 has upper opening of storage recess, and it is dynamic to enter line slip along horizontal direction
Make, supply when beyond, positioned at the underface of supply mouth 12.In addition, baffle plate 15 is not contacted with supply mouth 12 and receiving port 16.This
As described above, also for not producing particle.
Receiving portion 3 is equipped with the funnel 17 with the receiving port 16 for receiving the fluent material 26 from the supply of supply unit 2, temporarily
Collect supplied fluent material 26 go forward side by side bubble removing bottle 18 that promoting the circulation of qi bubble removes and control liquid flowing valve
B10 and valve C11, and linked with pipe arrangement 8 respectively.For valve A～C, it is contemplated that maintainability, preferably use by will be with pipe clamp
Enter and make pipe arrangement elastic deformation carry out the pinch valve of the opening and closing of stream（pinch valve）.Due to pinch valve valve itself not
Contact liq, therefore operation is easily carried out when carrying out replacing of pipe arrangement etc..In addition, also will not be mixed into being produced by valve events sometimes
Particle.Here, valve B10 controls the inflow to bottle 18, and valve C11 controls the outflow from bottle 18.From funnel 17 to the liquid of bottle 18
The inflow Jing of material 26 flows into pipe 19 and carries out, from bottle 18 to the sending Jing effusers 20 of the fluent material 26 of device for discharging fixed 24
Carry out.Further, since funnel 17 is disposed in into the position higher than bottle 18, even if therefore fluent material 26 not by pressure etc.
Can naturally flow down, can collect in the bottle less than the capacity of tank 4（Bubble removing container）18.
The bottle 18 of bubble removing and be connected to working gas supply pipe 21 plus drawdown pump（It is not shown）Gas is constituted together
Bubble removing mechanism 41.Plus drawdown pump supply act on when fluent material 26 is sent to device for discharging fixed 24 from bottle 18 compressed gas,
And the vacuum acted in the bubble for removing the fluent material 26 in 18 in bottle.Plus drawdown pump can also be also used as in work
Make the vacuum source for adsorbing workpiece on platform.In addition, in the attracting mechanism that can pass through device for discharging fixed side（Such as piston）Suction bottle 18
In the case of interior fluent material, it is also possible to substitute and add drawdown pump and use drawdown pump.Bottle 18 by glass or hard resin etc.
Transparent material makes, and the liquid level position or bubble for being able to confirm that the fluent material that inside is filled is mixed into situation.In addition, in bottle 18
Lateral surface near, detect that the sensor of liquid level in bottle 18 is arranged on upper limit position（Symbol 22）And lower position（Symbol
23）.Here, as sensor, it is possible to use detect optical sensor of the presence or absence of liquid etc. according to the difference of light quantity.As be described hereinafter
Like that, it is being connected in the relation of various pipes of bottle 18, the position of preferred liquid level is correctly caught.
Receiving portion 3 can be moved by receiving portion driving means along horizontal direction, and can obtain receiving port 16
Supply position of the central authorities positioned at the underface of supply mouth 12.In the lower section of receiving portion 3, device for discharging fixed 24 is equipped with, uses pipe arrangement 8C
Link with receiving portion 3.Device for discharging fixed 24 is supplied to the fluent material 26 being removed in the bubble of receiving portion 3, is carried out by nozzle 38
The discharge of fluent material 26.
Then, automatically feed mechanism 1 for the liquid till above-mentioned and how to work and illustrate.
First, fluent material 26 is filled to tank 4, connects compressed gas supply pipe 5 and liquid sends pipe 6（Step 1）.
Not directly to the liquid filling body material 26 of tank 4, but the tank 4 for having had been filled with fluent material 26 can be set.Then, supply to tank 4
Compressed gas are being pressurizeed（Step 2）.Now, valve A9 is closed.Then, make receiving portion 3 and device for discharging fixed 24 to supply unit 2 it
Under supply position movement（Step 3）.After movement, baffle plate 15 is retreated, open valve A9（Step 4）.Then, from the row of supply mouth 12
Go out fluent material 26, the receiving port 16 of Jing receiving portions 3 is injected into funnel 17（Step 5）.Now, valve B10 and valve C11 is opened.Its
Afterwards, fluent material 26 is flowed into bottle 18 by valve B10 from pipe 19 is flowed into（Step 6）.Here, as described above, fluent material 26
Naturally flow down, if but shutoff valve C11, to the interior suction vacuum of bottle 18, then can accelerate feed speed.Then, if the liquid in bottle 18
Body material 26 reaches the position of upper limit sensor 22, then shutoff valve A9, valve B10 and valve C11, enter baffle plate 15, and by tank 4
Pressurization is set to close（OFF）（Step 7）.Then, suction vacuum is carried out by working gas supply pipe 21, carries out the liquid material in bottle 18
The bubble of material 26 is removed（Step 8）.Bubble is removed after terminating, and is this time entered by the supplying compressed gas of working gas supply pipe 21
Row pressurization（Step 9）.Then, valve C11 is opened, the fluent material 26 in bottle 18 is sent to device for discharging fixed 24 from effuser 20
（Step 10）.If complete in the filling of the fluent material 26 of device for discharging fixed 24, shutoff valve C11, and by the pressurization to bottle 18
It is set to close（Step 11）.Then, discharge execution is carried out by device for discharging fixed 24（Step 12）.Now, the liquid in bottle 18
Till body material 26 reaches the position of lower limited sensor 23, the repeat the above steps when fluent material 26 in device for discharging fixed 24 tails off
9 arrive step 11, to the liquid filling body material 26 of device for discharging fixed 24.In addition, if the fluent material 26 in bottle 18 reaches lower limit sensing
The position of device 23, then perform again above-mentioned steps 2 to step 8, and fluent material 26 is supplied to receiving portion 3（Step 13）.In tank 4
The management of liquid residue amount carried out by detection means 7.The supplement of the fluent material 26 of tank 4 is if in beyond during supply action
Then can carry out.
As previously discussed, even if not linking pipe arrangement 8 and vertically supplying from upper, because the bottle 18 for the time being in receiving portion 3 enters
Promoting the circulation of qi bubble removes backward device for discharging fixed 24 and supplies, therefore bubble is not flowed into device for discharging fixed 24.In addition, by not linking pipe arrangement 8
And vertically supply from upper, contact, friction etc. are not had during so as to supplying, particle will not be produced.Thereby, it is possible to using not being mixed into
The liquid of bubble or particle, it is thus possible to carry out the discharge of precise volume or the coating to correct position.
The present invention can be applied to liquid crystal, ink, organic EL Material, solvent（Ethanol, acetone etc.）, ultraviolet hardening resin
Deng viscosity for below 10000cps fluent material, be particularly suitable for viscosity be below 1000cps fluent material.In bubble
In removing mechanism, according to the species of fluent material, apply the negative pressure of about 50～90kPa about 1～5 minute.
Hereinafter, the present invention is explained in more detail by embodiment, but the present invention is at all not limited to embodiment.
Embodiment
Embodiment is related to a kind of apparatus for coating, be make device for discharging fixed with keep workpiece workbench relative movement while
Liquid crystal is coated into the apparatus for coating of workpiece, and is referred to as the so-called bench type that beam is moved on the table.
Fig. 2 represents that the liquid possessed involved by embodiment automatically feeds the approximate three-dimensional map of the apparatus for coating of mechanism, Fig. 3 tables
Show the figure for being exaggerated the major part for automatically feeding mechanism involved by embodiment.Hereinafter, when illustrating Fig. 2, will be provided with sometimes
The side of tank 4 is referred to as " left side ", by its opposition side（The side of symbol 9）Referred to as " right side ", the side for being provided with device for discharging fixed 24 is referred to as
" front ", its opposition side is referred to as " afterwards ".In addition, with left and right directions as " X-direction ", with fore-and-aft direction as " Y-direction ".
As shown in Fig. 2 apparatus for coating 25 possesses the coating object 27 of mounting coating fluent material 26 on pallet 29（With
Under, referred to as workpiece）Workbench 28, and possessing makes the device for discharging fixed 24 of discharge fluent material 26 move relative to workbench 28 is relative
Dynamic beam driving means（Y driving means）44 and receiving portion driving means（X driving means）43.Y driving means 44 have supporting
The slide block of beam 30 and the take-up housing being disposed on pallet 29, make the beam 30 can be along fore-and-aft direction on workbench 28（Symbol 31）
It is mobile.Device for discharging fixed 24, can be on beam 30 along left and right directions by being arranged on the X driving means 43 of beam 30（Symbol 32）Move
It is dynamic.Device for discharging fixed 24 has multiple identical device for discharging fixed, and all of device for discharging fixed can be moved along beam.Further, the dress that spues
Put 24 quantity to be determined from the method for the coating to workpiece 27, the number being not limited to shown in Fig. 2.
Additionally, apparatus for coating 25 possesses the lid 33 of the periphery for covering these each devices.In the lid 33 illustrated with dotted line,
For door leaf of the operator into inside（It is not shown）Front face side is arranged on, is made when the upkeep operation of the grade of device for discharging fixed 24 is carried out
With.In addition, possess being arranged on the top plate portion of lid 33 and that the air for eliminating particle is supplied into air to lid 33 is clean
Cleaning device 34.Here, as air cleaning device 34, it is possible to use such as fan filter unit, that is, possesses HEPA, ULPA mistake
Small-sized pressure fan of filter etc. etc..Thus, the cleannes in the space of the top that workbench 28 is particularly in lid 33 are kept.But
It is to be arranged on toilet in apparatus for coating 25（Clean Room）Interior situation is arranged on feelings with this equal clean space
Under condition, it is also possible to be not provided with air cleaning device 34, and form big opening in top board or remove top board, be taken into and maintain cleaning
The air of degree.Further, lid 33 and pallet 29 can also be integrally formed, and cover each key element on pallet 29.
Liquid automatically feed mechanism 1 with above-mentioned Fig. 1 structure, with receive fluent material 26 tank 4, possess discharge from
The supply unit 2 of the supply mouth 12 of the fluent material 26 that tank 4 is sent, it is integrally provided on the top of device for discharging fixed 24 and device for discharging fixed 24
And the receiving portion 3 of the fluent material 26 for receiving to be discharged from supply unit 2 and make the X of receiving portion 3 and the relative movement of device for discharging fixed 24
Driving means 43 and Y driving means 44 are main inscape.Automatically feed in mechanism 1 in liquid, fluent material will be received
26 tank 4 is removably secured the outside for being arranged on lid 33, will be provided with the supply unit 2 of the supply mouth 12 of discharge fluent material 26
It is fixedly installed on the inner side of lid 33.In addition, as shown in figure 3, in the top of device for discharging fixed 24, receiving what is discharged from supply unit 2
The receiving portion 3 of fluent material 26 is integrally provided with device for discharging fixed 24 and is integratedly moved by X driving means 43.By Y
Make to become one with device for discharging fixed 24 till driving means 44 make beam 30 be moved to the vicinity of receiving portion 3 and by X driving means 43
The receiving portion 3 of body is moved to the supply position till the lower section of supply unit 2, and receiving portion 3 is from the receptive liquid material 26 of supply unit 2
Supply.In the case where multiple device for discharging fixed 24 are arranged as shown in Figure 2, receiving portion 3 is set in each device for discharging fixed 24.
Link from tank 4 to supply unit 2 with pipe arrangement 8A, link from receiving portion 3 to device for discharging fixed 24 with pipe arrangement 8B, 8C, supply
Separate between portion 2 and receiving portion 3.Between tank 4 and supply unit 2, the valve A9 for controlling the flowing to supply unit 2 is fixedly installed on lid
Near the corresponding supply unit 2 of the inner side of body 33.Under tank 4, the surplus for detecting the fluent material 26 in tank 4 is provided with
Detection means 7.From tank 4 to the pipe arrangement 8 of supply unit 2, insertion lid 33 is immediated vicinity in tank 4, entered in lid 33.
That is, only tank 4 and detection means 7 are arranged on outside lid 33.By the way that the tank 4 for being continually filled or changing etc. operation is arranged
Outside lid 3, can as best one can reduce and bring particle in lid 33 into.And, even if apparatus for coating 25 is in coating action
Operation can also be carried out to tank 4.
Liquid automatically feeds the number of the supply mouth 12 in mechanism 1 and changes preferably according to the number of device for discharging fixed 24.It is former
Because being, when multiple device for discharging fixed 24 are nuzzled into the side for being arranged in beam 30 stroke that width exceedes left and right directions is amounted to
（Stroke）During the half of length, even if a place on beam arranges supply mouth 12, also cannot be by all of device for discharging fixed
24 move to the supply mouth 12.In this case, in two local arrangement above supply mouths 12, multiple device for discharging fixed 24 can
Move to any one supply mouth 12.
As previously discussed, in the apparatus for coating 25 of embodiment, separate between supply unit 2 and receiving portion 3, thus pipe arrangement 8
Will not move together with device for discharging fixed 24 or spitting unit driving means.Therefore, will not produce and extend matching somebody with somebody for smooth driving
Pipe is arranging, or the problem of accelerated deterioration etc. due to pipe arrangement movement.
Below, while with reference to Fig. 3 on one side prescribed liquid automatic supplying machine structures 1 in detail.In the figure, the arrow of blacking is represented
The flowing of liquid, blank arrow represents the flowing of gas.It is provided with supply unit 2 and possesses the fluent material that will be sent from tank 4
The supply pipe 13 of 26 supply mouths 12 discharged.Supply pipe 13 is on the way supported by component 14 and supports, near supply mouth 12 downwards
Bending.Here made by the material of the holding shape of metal etc. from supply mouth 12 to the part of supporting member 14.In supply pipe 14
Lower section, possess when unnecessary fluent material 26 is hung down from supply mouth 12 for receive baffle plate 15.Baffle plate 15 is to open above
The baler shape of mouth（Utensil shape with handle）, carry out sliding action, supply when beyond be located at supply mouth 12 underface.
Receiving portion 3 is made up of three positions, is equipped with the liquid material received from the supply of supply unit 2 in highest position
The funnel 17 of the receiving port 16 of material 26, it is equipped in minimum position and temporarily collect supplied fluent material 26 and go forward side by side promoting the circulation of qi bubble
The bottle 18 of removing.Furthermore, it is equipped with the valve B10 and valve of the flowing of control liquid side by side in the position of funnel 17 Yu the centre of bottle 18
C11.The opening in the way of upper end becomes receiving port 16 of funnel 17, fluent material 26 drips supply from supply mouth 12.Here, lid
Cleanliness factor is remain in 33, thus, even if receiving port 16 to upper opening, there will not be the worry that particle is mixed into.
The bottle 18 of bubble removing and be connected to working gas supply pipe 21 plus drawdown pump（It is not shown）Gas is constituted together
Bubble removing mechanism 41.Plus drawdown pump supply act on when fluent material 26 is sent to device for discharging fixed 24 from bottle 18 compressed gas,
And the vacuum acted in the bubble for removing the fluent material 26 in 18 in bottle.
In addition, near the lateral surface of bottle 18, the sensor for detecting the liquid level in bottle 18 is arranged on upper limit position（Symbol
22）And lower position（Symbol 23）.Upper limit sensor 22 is configured in the position for exporting further down than working gas supply pipe 21,
Lower limited sensor 23 is configured in the entrance position more up than effuser 20.By doing so it is possible, being prevented from from working gas
Supply pipe 21 sucks fluent material 26, or sucks gas from effuser 20.
Receiving portion 3 be in the position lower than supply unit 2, and be arranged at when supply unit 2 moves to the lower section of receiving portion 3 with
The discontiguous position of supply unit 2.Device for discharging fixed 24 is integrally disposed the lower section of receiving portion 3.Bubble is removed in receiving portion 3
Fluent material 26 is supplied to device for discharging fixed 24, carries out the discharge to workpiece 27.In the present embodiment, illustrate as device for discharging fixed 24
Piston type device for discharging fixed, but the self-evident device for discharging fixed that can be used beyond piston type device for discharging fixed.As can be suitable for
Device for discharging fixed, exemplified with the air after pressure regulation to be put on fluent material only institute's phase for having in front end in the syringe of nozzle
The air type of prestige time, the duct type with flat tube mechanism or rotating pipe mechanism, by the rotation discharge liquid of screw rod
The screw of material, the control that spued by the opening and closing of valve are applied with valve type of fluent material of desired pressure etc..
The piston type device for discharging fixed 24 of the present embodiment has measurement unit 36, the interior piston for being connected to measurement unit 36 of tube shape
35th, possess nozzle 38 and switching measurement unit 36 and nozzle 38 and measurement unit 36 and the connection of inflow entrance 40 of discharge opening 39
Switching valve.Furthermore, making to be closely contacted in measurement unit 36 carries out retreating mobile piston 35 at high speed into movement, so that liquid material
Material 26 spues from the flight of discharge opening 39.
Being mixed into for bubble can also be reliably prevented by arranging multiple bubble removing mechanisms 41.
Alternatively, it is also possible to substitute or dual-purpose the present embodiment bubble removing mechanism 14, possess and do not have as shown in Figure 4 plus-minus
The easy bubble removing mechanism of press pump.By the way that the entrance of effuser 20 to be arranged on the bottom surface point with bubble removing container 18
From top such that it is able to prevent from being deposited in bottom surface or the particle 42 raised floated near bottom surface being inhaled into.Involved is easy
Bubble removing mechanism is effective in the case where being necessary to seek the miniaturization of receiving portion 3.
Claims (14)
1. a kind of liquid automatically feeds mechanism, possesses the liquid storage part of storing liquid material, liquid storage is stored in supply
The supply unit and the receiving port with the fluent material for receiving to be discharged from supply unit for depositing the supply mouth of the fluent material in portion is gentle
The receiving portion of bubble removing mechanism, it is characterised in that
Possess the receiving portion driving means for making receiving portion move along horizontal direction,
Receiving portion is moved to receiving port and receives position positioned at the underface of supply mouth, is not connected to supply unit and receiving portion, from point
From position receptive liquid material supply of dripping, and bubble is supplied to telling by the fluent material that bubble removing mechanism is eliminated
Go out device.
2. liquid according to claim 1 automatically feeds mechanism, it is characterised in that
Bubble removing mechanism possesses：The bubble removing container of storing liquid material, one end impregnated in and be stored in bubble removing use
In the liquid of container and flowing into of connect with receiving port of the other end is managed and one end impregnated in and be stored in bubble removing container
In liquid and the effuser that connects with device for discharging fixed of the other end.
3. liquid according to claim 2 automatically feeds mechanism, it is characterised in that
Bubble removing mechanism possesses：Pump installation and one end to bubble removing container decompression is connected to pump installation and another
End is configured at the working gas supply pipe in the space in bubble removing container.
4. the liquid according to Claims 2 or 3 automatically feeds mechanism, it is characterised in that
Possesses the detection means of the amount of detection liquid storage part and/or the fluent material in bubble removing container.
5. the liquid according to any one of claims 1 to 3 automatically feeds mechanism, it is characterised in that
Receiving port has expanding opening, and is the shape that can temporarily store a certain amount of fluent material.
6. the liquid according to any one of claims 1 to 3 automatically feeds mechanism, it is characterised in that
Possess fluent material and receive component, the fluent material receive component in supply mouth underface the 1st position and
2nd position different from the 1st position is retreated movement, and carries out sliding action along horizontal direction, and not with supply mouth and
Receiving port is contacted.
7. the liquid according to any one of claims 1 to 3 automatically feeds mechanism, it is characterised in that
Possess the quantity delivered of fluent material of the control from pinch valve from liquid storage part to supply unit and/or control from receiving portion to
The pinch valve of the quantity delivered of the fluent material of device for discharging fixed.
8. a kind of apparatus for coating, it is characterised in that
Possess：
Pallet, is equipped with the workbench for keeping workpiece；
Device for discharging fixed, the nozzle with discharge fluent material；
Driving means, make device for discharging fixed and workbench relative movement；And
Liquid described in any one of claims 1 to 3 automatically feeds mechanism.
9. apparatus for coating according to claim 8, it is characterised in that
Possess the beam that is equipped with multiple device for discharging fixed and make what each device for discharging fixed was moved freely along the extended direction of beam
Spitting unit driving means,
The receiving portion arranges equal number with device for discharging fixed.
10. apparatus for coating according to claim 9, it is characterised in that
The supply unit is equipped multiple.
11. apparatus for coating according to claim 8, it is characterised in that
Possesses the lid for covering workbench and device for discharging fixed.
12. apparatus for coating according to claim 9, it is characterised in that
Possesses the lid for covering workbench and device for discharging fixed.
13. apparatus for coating according to claim 11, it is characterised in that
The liquid storage part is disposed in the outside of the lid.
14. apparatus for coating according to claim 12, it is characterised in that
The liquid storage part is disposed in the outside of the lid.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-207775 | 2010-09-16 | ||
| JP2010207775A JP5566829B2 (en) | 2010-09-16 | 2010-09-16 | Liquid automatic supply mechanism and coating apparatus provided with the same |
| PCT/JP2011/070920 WO2012036179A1 (en) | 2010-09-16 | 2011-09-14 | Automated liquid supply mechanism and coater provided with same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103118802A CN103118802A (en) | 2013-05-22 |
| CN103118802B true CN103118802B (en) | 2017-04-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180042922.3A Active CN103118802B (en) | 2010-09-16 | 2011-09-14 | Automated liquid supply mechanism and coater provided with same |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5566829B2 (en) |
| KR (1) | KR101795612B1 (en) |
| CN (1) | CN103118802B (en) |
| TW (1) | TWI573628B (en) |
| WO (1) | WO2012036179A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6218219B2 (en) * | 2013-07-12 | 2017-10-25 | 東レエンジニアリング株式会社 | Air vent system |
| JP2015182039A (en) * | 2014-03-25 | 2015-10-22 | 株式会社Ｓｃｒｅｅｎホールディングス | Coating applicator and defoaming method |
| EP2954958B1 (en) * | 2014-06-11 | 2018-01-10 | Umicore AG & Co. KG | Apparatus for coating a substrate |
| JP6244421B1 (en) * | 2016-07-27 | 2017-12-06 | 株式会社キャタラー | Exhaust gas purification catalyst manufacturing method and manufacturing apparatus |
| JP6993276B2 (en) * | 2018-03-27 | 2022-01-13 | 株式会社Ｉｈｉ回転機械エンジニアリング | Liquid material supply device |
| JP7277127B2 (en) * | 2018-04-11 | 2023-05-18 | キヤノン株式会社 | Ejection Material Filling Method, Ejection Material Ejection Apparatus, and Imprint Apparatus |
| CN111036442B (en) * | 2019-10-08 | 2023-04-11 | 吉林大学 | Cotton swab processor for animal experiment unhairing process |
| CN111290178B (en) * | 2020-02-25 | 2022-08-05 | 深圳市华星光电半导体显示技术有限公司 | Liquid crystal dripping device |
| CN113198643B (en) * | 2021-04-25 | 2022-04-22 | 浙江中聚材料有限公司 | Solar backboard coating device |
| CN116273729B (en) * | 2023-01-28 | 2023-10-20 | 中山市美速光电技术有限公司 | Adhesive dispensing device for ultra-fine pitch optical fiber array |
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| JP3259309B2 (en) * | 1992-01-23 | 2002-02-25 | カシオ計算機株式会社 | Method and apparatus for defoaming liquid resin |
| US6431670B1 (en) * | 2000-02-14 | 2002-08-13 | Hewlett-Packard Company | Ink level sensing method and apparatus |
| JP2001267339A (en) * | 2000-03-15 | 2001-09-28 | Sanyu Rec Co Ltd | Apparatus and method of manufacturing electronic component |
| JP4330295B2 (en) * | 2001-09-10 | 2009-09-16 | 大日本印刷株式会社 | Paste application method |
| JP2005209778A (en) * | 2004-01-21 | 2005-08-04 | Hitachi Maxell Ltd | Resist applying system, photoresist applying method, and manufacturing method for optical disc |
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- 2011-09-14 CN CN201180042922.3A patent/CN103118802B/en active Active
- 2011-09-14 KR KR1020137006402A patent/KR101795612B1/en active IP Right Grant
- 2011-09-16 TW TW100133333A patent/TWI573628B/en active
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2012036179A1 (en) | 2012-03-22 |
| TW201221229A (en) | 2012-06-01 |
| JP5566829B2 (en) | 2014-08-06 |
| JP2012061424A (en) | 2012-03-29 |
| KR20130143560A (en) | 2013-12-31 |
| TWI573628B (en) | 2017-03-11 |
| CN103118802A (en) | 2013-05-22 |
| KR101795612B1 (en) | 2017-11-08 |
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