CN100595071C - Liquid droplet ejection device and operation method thereof - Google Patents

Liquid droplet ejection device and operation method thereof Download PDF

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Publication number
CN100595071C
CN100595071C CN200710091049A CN200710091049A CN100595071C CN 100595071 C CN100595071 C CN 100595071C CN 200710091049 A CN200710091049 A CN 200710091049A CN 200710091049 A CN200710091049 A CN 200710091049A CN 100595071 C CN100595071 C CN 100595071C
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CN
China
Prior art keywords
mentioned
coating liquid
jar
head
box
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Expired - Fee Related
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CN200710091049A
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Chinese (zh)
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CN101054024A (en
Inventor
前川勉
藤井秀俊
飞田悟
町田治
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Ricoh Co Ltd
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Ricoh Printing Systems Ltd
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Publication of CN101054024A publication Critical patent/CN101054024A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
    • B41J2/16526—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head by applying pressure only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517—Cleaning of print head nozzles
    • B41J2/16552—Cleaning of print head nozzles using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/18—Ink recirculation systems

Abstract

The invention provides a droplet ejection device with easy box replacement and good accessibility in usage. The device has the box part (3) with jars (6, 7), the head (4) of the attached part of whichcoating liquid as droplet spouts out. The coating liquid of jar (6) is supplied to the head (4). The coating liquid going through the head (4) returns to coating liquid supply cycle part (2) of jar (7). The washing liquid is supplied to the washing liquid supply part (29) of the head (2) by coating liquid supply cycle part (2). When discharging waste liquor from coating liquid supply cycle part (2) by waste liquor discharge part (33) and using washing liquid to wash the coating liquid supply cycle part (2) and the head (4), the washing liquid supply part is pressurized through gas-pressurized. When cycling the coating liquid by coating liquid supply cycle part (2), pressure switch part decompresses the jar (6, 7). The box part (3) and the coating liquid supply cycle part (2) are able to be replaced.

Description

Droplet ejection apparatus and method of operation thereof
Technical field
The present invention relates to spray the droplet ejection apparatus and the method for operation thereof of drop, relate in particular to and be suitable for spraying the droplet ejection apparatus and the method for operation thereof of mixing and having disperseed the coating liquid of solids such as hollow bead.
Background technology
Liquid crystal indicators etc. are in order to keep the gap of two liquid crystal substrates necessarily, and the spacer of finely particulate is configured between the above-mentioned liquid crystal substrate.All the time, though use atomizing dispersal device etc. is dispersed in spacer on the liquid crystal substrate, but it is uneven that this method is easy to make spacer to disperse, and perhaps can not make the distance maintaining of liquid crystal substrate certain or make a plurality of spacers poly-agglomerating, causes the reduction of display quality.
To be coated with this class shortcoming in order disappearing, in recent years, to develop the drop ejection method of having used ink-jetting style, proposed the multiple technologies scheme.If spray method, can be roughly the spacer of necessary amount be configured in the precalculated position with this drop; In addition, if use ejecting head with a plurality of ejiction openings, can be in a plurality of precalculated positions configuration isolation things simultaneously, have advantage such as can enhance productivity.
In common ink-jet recording apparatus, in order to simplify the processing of the pipe that connects China ink jar and record head, and alleviate owing to be trapped in the influence of the inertia force of the ink in the pipe to record head, the scheme (with reference to patent documentation 1-TOHKEMY 2005-067134 communique) of ink-jet recording apparatus has as shown in figure 10 been proposed.
This ink-jet recording apparatus has head unit 100, this head unit 100 and unit drives usefulness ball-screw 101 threaded engagement in last extensions of direction (main scanning direction) Y of the carriage direction X of same paper used for recording (not shown) quadrature, and two guide rails 102 that utilization and this ball-screw 101 extend in parallel support slidably.Unit drives is connected on the above-mentioned ball-screw 101 with motor (not shown), and above-mentioned head unit 100 moves back and forth on main scanning direction Y through ball-screw 101 by the rotation of this motor.
Head unit 100 has tabular support component 103, record head 104 is fixed on the substantial middle position of this support component 103, be configured in than record head 104 more by right side with auxilliary jar 105 supplying with ink, be configured in than record head 104 more by facing toward the left side of drawing with auxilliary jar 106 and will reclaim ink facing to drawing.
Above-mentioned supply ink, will be supplied with ink and be connected on this ball-screw 107 with drive motor 108 with ball-screw 107 threaded engagement of using auxilliary jar usefulness at the upwardly extending supply ink of upper and lower with auxilliary jar 105.And, utilize above-mentioned ball-screw 107 and drive motor 108, can adjust to the position higher with auxilliary jar 105 with supplying with ink than record head 104.
Above-mentioned recovery ink will reclaim ink and be connected on this ball-screw 109 with drive motor 110 with auxilliary jar 106 and in ball-screw 109 threaded engagement of the upwardly extending recovery ink of upper and lower with auxilliary jar usefulness.And, utilize above-mentioned ball-screw 109 and drive motor 110, can adjust to the position lower with auxilliary jar 106 with reclaiming ink than record head 104.
Bottom printer main body (not shown), be provided with and held ink 111 (in the occasion of color press, C, M, Y, four colors of K monochromatic jar arranged) main jar 112, and these inks 111 are supplied to providing ink on the head unit 100 with auxilliary jar 105 suction lift pump 113 by ink supply conduit 114.
Be contained in the ink 111 in the main ink tank 112, utilize suction lift pump 113 to supply to providing ink with auxilliary jar 105 by ink supply conduit 114.The ink that is contained in auxilliary jar 105 of this providing ink flowed down to record head 104 by communicating pipe 115, and wherein a part becomes drop from record head 104 and is ejected into paper used for recording (not shown) and goes up and form ink dot.By 100 pairs of paper used for recording of this record head are relatively carried out two-dimensional scan, just record the information on the paper used for recording.
Pen Chu ink did not flow down with auxilliary jar 106 to ink recovery by communicating pipe 115, and was trapped in wherein, and the ink that is trapped in auxilliary jar 106 turns back in main jar 112 by ink recovery pipe 116.
Like this, ink 111 just forms the system by following circulated: the auxilliary jar of auxilliary jar 106 → ink recovery pipe 116 of 104 → communicating pipe of 115 → record head, 105 → communicating pipe, 115 → ink recovery of main jar 112 → ink supply conduit 114 → (suction lift pump 113) → providing ink → main jar 112.
In addition, relevant other ink-jet recording apparatus can be enumerated for example patent documentation 2-TOHKEMY 2003-165233 communique, patent documentation 3-TOHKEMY 2003-300331 communique, the international open WO2002/90117 communique of patent documentation 4-; In addition, the blowoff of relevant liquid crystal spacer can be enumerated for example patent documentation 5-Japanese kokai publication hei 05-281562 communique and patent documentation 6-Japanese kokai publication hei 11-007028 communique.
Above-mentioned ink-jet recording apparatus is not considered the manufacture process of measure taked when needing to change in to(for) the kind of coating liquid (at this moment being ink) etc.For example, in above-mentioned liquid crystal indicator, though the spacer of finely particulate is clipped between two liquid crystal substrates, but be attached on the liquid crystal substrate for this spacer is sprayed, drop (spacer) blowoff of the mechanism that has used discharge recording apparatus often is set in the production line of liquid crystal indicator.
Yet, if on the production line of liquid crystal indicator during the kind etc. of the liquid crystal indicator of change manufacturing, corresponding therewith, because the differences such as diameter of employed spacer, thereby in manufacture process, often cause the kind that change mixes and disperseed the coating liquid of spacer.In this state, use drop (spacer) blowoff of the mechanism of above-mentioned ink-jet recording apparatus, can not successfully carry out the change of coating liquid and handle, had problems such as complicated operation, production efficiency difference.
Summary of the invention
Purpose of the present invention just is to eliminate the shortcoming of this class prior art, provides a kind of replacing of box to be easy to good droplet ejection apparatus and the method for operating thereof of ease of use.
For achieving the above object, the feature of the droplet ejection apparatus of the present invention's first scheme is to possess:
Box portion with the jar that has held coating liquid;
Make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
By the coating liquid in above-mentioned jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with the waste liquid discharge portion of a part of effluent discharge of circulation portions from above-mentioned coating liquid; And
Using when above-mentioned cleaning solution supplying portion cleaning liquid supplied is cleaned above-mentioned coating liquid and supplied with circulation portions and above-mentioned head, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to the pressure switching part that reduces pressure in the above-mentioned jar, and
Auxilliary jar and main jar connect into above-mentioned box portion and above-mentioned coating liquid is supplied with circulation portions can change.
The droplet ejection apparatus of alternative plan of the present invention is characterized in that in first scheme, and above-mentioned box portion is provided with a plurality of boxes with above-mentioned jar, and each box is supplied with circulation portions to above-mentioned coating liquid and switchably connected side by side.
The droplet ejection apparatus of third party's case of the present invention first or alternative plan in, it is characterized in that above-mentioned box portion is arranged on the position higher than above-mentioned head,
Above-mentioned box portion has auxilliary jar that coating liquid is supplied with main jar of above-mentioned head and the coating liquid that passed through above-mentioned head is returned,
Above-mentioned main jar with the auxilliary jar of band of supplying with circulation portions with above-mentioned coating liquid transfer with pump jar between transfer tube be connected,
Make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, keeping above-mentioned auxilliary jar interior pressure by above-mentioned pressure switching part and make it lower than above-mentioned main jar interior pressure.
The droplet ejection apparatus of the cubic case of the present invention is characterized in that in first scheme above-mentioned head is provided with a plurality of heads, and these a plurality of are utilized a tube connector polyphone to connect.
The droplet ejection apparatus of the present invention's the 5th scheme is characterized in that in first scheme above-mentioned coating liquid is the coating liquid that mixes and disperseed solids.
The droplet ejection apparatus of the present invention's the 6th scheme is characterized in that in the 5th scheme the above-mentioned body that is attached is the liquid crystal substrate, and above-mentioned solids are to keep the spacer of two blocks of liquid crystal with the gap of substrate.
The feature of the method for operation of the droplet ejection apparatus of the present invention's the 7th scheme is that this droplet ejection apparatus possesses: make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
Have auxilliary jar that holds main jar of above-mentioned coating liquid and the coating liquid that passed through above-mentioned head is returned, thereby and connect auxilliary jar with the main jar of box portion that coating liquid can be transplanted on main jar from above-mentioned auxilliary jar;
By the coating liquid in above-mentioned main jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned auxilliary jar, thereby make the coating liquid circulation portions of coating liquid circulation;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with from above-mentioned coating liquid circulation portions a part of effluent discharge the waste liquid discharge portion and
When cleaning above-mentioned coating liquid supply circulation portions and above-mentioned head with above-mentioned cleaning fluid, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to switching the pressure switching part of pressure in above-mentioned master jar interior and auxilliary jar with reducing pressure
This method of operation is implemented following operation:
Air/cleaning fluid displacement operation, this operation is, by by above-mentioned pressure switching part with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, thereby make above-mentioned cleaning fluid supply with circulation portions and lead to above-mentioned head from above-mentioned coating liquid, make the cleaning fluid that has passed through this head supply with circulation portions through coating liquid and flow to above-mentioned waste liquid discharge portion, will supply with the air displacement of circulation portions in above-mentioned head from above-mentioned coating liquid is cleaning fluid;
Cleaning fluid/coating liquid displacement operation, this operation is, after this air/cleaning fluid displacement operation, pressurize in above-mentioned main jar by above-mentioned pressure switching part, make above-mentioned coating liquid supply with circulation portions and lead to above-mentioned head from above-mentioned coating liquid, make the coating liquid that has passed through this head supply with circulation portions and flow to above-mentioned waste liquid discharge portion, will supply with the cleaning fluid of circulation portions in above-mentioned head from above-mentioned coating liquid and be replaced into coating liquid through coating liquid; And
Coating liquid is supplied with circulating process, this operation is, after this cleaning fluid/coating liquid displacement operation, reduce pressure in above-mentioned main jar interior and auxilliary jar by above-mentioned pressure switching part, make the coating liquid in above-mentioned main jar supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, make the coating liquid that has passed through this head return above-mentioned auxilliary jar in, in the cyclic process of this coating liquid, coating liquid is become drop from above-mentioned head and is ejected into and is attached on the body.
The present invention the method for operation of the droplet ejection apparatus of case from all directions is characterized in that in the 7th scheme, and above-mentioned box portion is arranged on the position higher than above-mentioned head,
When above-mentioned coating liquid is supplied with circulating process, keep above-mentioned auxilliary jar interior pressure lower than above-mentioned main jar interior pressure by above-mentioned pressure switching part.
The feature of the method for operation of the droplet ejection apparatus of the present invention's the 9th scheme is that this droplet ejection apparatus possesses: make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
Have auxilliary jar that holds main jar of above-mentioned coating liquid and the coating liquid that passed through above-mentioned head is returned, thereby and connect auxilliary jar with the main jar of box portion that coating liquid can be transplanted on main jar from above-mentioned auxilliary jar;
By the coating liquid in above-mentioned main jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned auxilliary jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with the waste liquid discharge portion of a part of effluent discharge of circulation portions from above-mentioned coating liquid; And
When cleaning above-mentioned coating liquid supply circulation portions and above-mentioned head with above-mentioned cleaning fluid, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to switching the pressure switching part of pressure in above-mentioned master jar interior and auxilliary jar with reducing pressure, and
Above-mentioned box portion at least also possesses: have first box of above-mentioned main jar and auxilliary jar and have second box of above-mentioned main jar and auxilliary jar, above-mentioned each auxilliary jar is connected with main jar and above-mentioned coating liquid supply circulation portions, can switch so that above-mentioned first box and second box are supplied with circulation portions to above-mentioned coating liquid;
On main jar of above-mentioned first box and second box main jar, be provided with the liquid level sensor of the liquid level that detects coating liquid;
The identical occasion of composition of the above-mentioned coating liquid that in above-mentioned first box and second box, is held, implement following operation continuously:
Coating liquid is supplied with circulating process, this operation is, above-mentioned first box and above-mentioned coating liquid are supplied with circulation portions to be connected, by reducing pressure in the auxilliary jar that reaches first box in the main jar of above-mentioned pressure switching part to above-mentioned first box, make main jar of interior coating liquid of above-mentioned first box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, and make the coating liquid that has passed through this head turn back to the auxilliary jar of above-mentioned first box, in the cyclic process of this coating liquid, make coating liquid become drop simultaneously and be ejected into above-mentioned being attached on the body from above-mentioned head;
Stop operation, this operation is, supply with in the process of circulating process at this coating liquid,, then stop to supply with the supply circulation from the coating liquid of above-mentioned first box of circulation portions by above-mentioned coating liquid if the liquid level of the coating liquid in main jar of above-mentioned first box, one side is lower than the position of regulation;
Switching process, this operation are that after this stopped operation, the connection of above-mentioned coating liquid being supplied with circulation portions switched to above-mentioned second box from above-mentioned first box;
Coating liquid is supplied with circulating process, this operation is, behind this switching process, by reducing pressure in the auxilliary jar that reaches second box in the main jar of above-mentioned pressure switching part to above-mentioned second box, make main jar of interior coating liquid of above-mentioned second box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, and when making the coating liquid that has passed through this head turn back to above-mentioned second box auxilliary jar, in the cyclic process of this coating liquid, make coating liquid become drop and be ejected into and be attached on the body from above-mentioned head.
The feature of the method for operation of the droplet ejection apparatus of the present invention's the tenth scheme is that this droplet ejection apparatus possesses: make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
Have auxilliary jar that holds main jar of above-mentioned coating liquid and the coating liquid that passed through above-mentioned head is returned, thereby and connect auxilliary jar with the main jar of box portion that coating liquid can be transplanted on main jar from above-mentioned auxilliary jar;
By the coating liquid in above-mentioned main jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned auxilliary jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with the waste liquid discharge portion of a part of effluent discharge of circulation portions from above-mentioned coating liquid; And
When cleaning above-mentioned coating liquid supply circulation portions and above-mentioned head with above-mentioned cleaning fluid, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to switching the pressure switching part of pressure in above-mentioned master jar interior and auxilliary jar with reducing pressure, and
Above-mentioned box portion at least also possesses: have first box of above-mentioned main jar and auxilliary jar and have second box of above-mentioned main jar and auxilliary jar, above-mentioned each auxilliary jar is connected with main jar and above-mentioned coating liquid supply circulation portions, can switch so that above-mentioned first box and second box are supplied with circulation portions to above-mentioned coating liquid;
On main jar of above-mentioned first box and second box main jar, be provided with the liquid level sensor of the liquid level that detects coating liquid;
The different occasion of composition of the above-mentioned coating liquid that in above-mentioned first box and second box, is held, implement following operation:
Coating liquid is supplied with circulating process, this operation is, above-mentioned first box and above-mentioned coating liquid are supplied with circulation portions to be connected, by reducing pressure in the auxilliary jar that reaches first box in the main jar of above-mentioned pressure switching part to above-mentioned first box, make main jar of interior coating liquid of above-mentioned first box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, and make the coating liquid that has passed through this head turn back to the auxilliary jar of above-mentioned first box, in the cyclic process of this coating liquid, make coating liquid become drop simultaneously and be ejected into and be attached on the body from above-mentioned head;
Stop operation, this operation is, supply with in the process of circulating process at this coating liquid,, then stop to supply with the supply circulation from the coating liquid of above-mentioned first box of circulation portions by above-mentioned coating liquid if the liquid level of the coating liquid in main jar of above-mentioned first box, one side is lower than the position of regulation;
Switching process, this operation are that after this stopped operation, the connection of above-mentioned coating liquid being supplied with circulation portions switched to above-mentioned second box from above-mentioned first box;
Coating liquid is discharged operation, and this operation is, behind this switching process, by above-mentioned pressure switching part above-mentioned gas-pressurized is supplied with circulation portions from above-mentioned coating liquid and leads to above-mentioned head, will supply with the coating liquid of circulation portions in above-mentioned head from above-mentioned coating liquid and discharge;
Matting, this operation is, after this coating liquid is discharged operation, by by above-mentioned pressure switching part with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, thereby make above-mentioned cleaning fluid supply with circulation portions and lead to above-mentioned head from above-mentioned coating liquid, this cleaning fluid that has passed through head is discharged to above-mentioned waste liquid discharge portion, supplies with circulation portions to above-mentioned head to clean from above-mentioned coating liquid;
New coating liquid is supplied with circulating process, this operation is, after this matting, by reducing pressure in the auxilliary jar that reaches second box in the main jar of above-mentioned pressure switching part to above-mentioned second box, make main jar of interior new coating liquid of above-mentioned second box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, when making the coating liquid that has passed through this head return above-mentioned second box auxilliary jar, in the cyclic process of this coating liquid, coating liquid is become drop from above-mentioned head and be ejected into and be attached on the body.
The present invention adopts aforesaid structure, and by coating liquid is supplied with circulation portions, head and pressure switching part are general, and no matter the same substance that consists of of coating liquid still consists of different material, and the replacing of its box is all easy, and ease of use is good.
Description of drawings
Fig. 1 relates to the system diagram of the droplet ejection apparatus of first embodiment of the present invention.
Fig. 2 is the block schematic of this droplet ejection apparatus.
Fig. 3 relates to the system diagram of the droplet ejection apparatus of second embodiment of the present invention.
Fig. 4 relates to the front view of the droplet ejection apparatus of embodiments of the present invention.
Fig. 5 is the side view of this droplet ejection apparatus.
Fig. 6 relates to the exploded perspective view of the head of embodiments of the present invention.
Fig. 7 is the cutaway view of this head after assembling.
Fig. 8 is the profile along the A-A line of Fig. 7.
Fig. 9 is the expression head and has applied the plane of the liquid crystal of spacer with the relation of color filter substrate.
Figure 10 is the key diagram of the ink-jet recording apparatus of prior art.
Among the figure:
1-pressure switching part, 2-coating liquid circulation supply unit, 3-box portion, the 4-head, 5-box 5a-first box, 5b-second box, 6-master's jar, auxilliary jar of 7-, 8-master's jar pressurization/relief pipe, 9-master's jar manifold, 10-master's jar buffer, 11-master's jar pump, 12-master's jar transfer valve, transfer tube between the 13-jar is transferred between the 14-jar and is used pump, 15-uses pressurization/relief pipe for auxilliary jar, the auxilliary jar manifold of 16-, the auxilliary jar buffer of 17-, the auxilliary jar pump of 18-, the auxilliary jar transfer valve of 19-, 20-coating liquid supply pipe, 21-coating liquid supply pipe transfer valve, 22-coating liquid recovery tube, 23-coating liquid recovery tube transfer valve, the 24a-24d-head, 25-liquid level sensor, 26-coating liquid, the 27-agitator, 28-cleaning solution supplying pipe, 29-cleaning fluid tank, 30-cleaning fluid, the 31-liquid level sensor, the 32-sewer pipe, 33-waste liquid tank, 34-liquid level sensor, the 35-gas-pressurized, the 36-pressurization is used manifold, 37-gas-pressurized pipe arrangement, 38-coating liquid/cleaning fluid/gas-pressurized transfer valve, 39-tube connector, 40-cleaning fluid/gas-pressurized transfer valve, 41-pressure sensor, 42-coating liquid/waste liquid transfer valve, 43-first cutout valve, 44-waste liquid one side pipe body, 45-reclaims a side pipe body, 46,47-second cutout valve, 48-liquid crystal substrate, the 49a-49f-connecting portion.
The specific embodiment
Below, with figure embodiments of the present invention are described.Fig. 1 relates to the system diagram of the droplet ejection apparatus of first embodiment of the present invention, and Fig. 2 is the block schematic of this droplet ejection apparatus.
The brief configuration of this droplet ejection apparatus at first, is described with Fig. 2.As shown in Figure 2, droplet ejection apparatus comprises four big parts of dividing from function: pressure switching part 1, and coating liquid is supplied with circulation portions 2, and box portion 3 and head 4 roughly have annexation as shown in the figure.
Above-mentioned box portion 3 is arranged on the position higher than above-mentioned head 4.In addition, the first box 5a and two boxes of the second box 5b are equipped with in above-mentioned box portion 3, and the first box 5a and the second box 5b do paired apparatus main body can change (can install and remove).And this first box 5a makes with above-mentioned coating liquid supply circulation portions 2 with the second box 5b and is connected side by side, can switch mutually.
As shown in Figure 1, above-mentioned box 5a, 5b have main jar 6 and auxilliary jar of (coating liquid circulate and uses surge tank) 7 of coating liquid recovery usefulness of holding the preceding coating liquid of ejection respectively.Be connected with main jar on master's jar 6 and use pressurization/relief pipe 8, master's jar is supplied with circulation portions by coating liquid and is connected the main jar of being located at above-mentioned pressure switching part 1 with pressurization/relief pipe 8 and uses on the manifold 9.Main jar uses pressure buffer 10 to be connected with pump 11 with main jar with manifold 9 by main jar.Be connected with the main jar transfer valve 12 that constitutes by triple valve with pressurization/relief pipe 8 with from main jar of the joint portion that the above-mentioned second box 5b draws at master's jar of drawing with pressurization/relief pipe 8 from the above-mentioned first box 5a.
Transfer tube 13 extends from auxilliary jar 7 to main jar 6 between jar, transfers between jar with pump 14 and is connected between jar transfer tube 13 midway.
Be connected with auxilliary jar pressurization/relief pipe 15 on auxilliary jar 7, auxilliary jar is supplied with circulation portions 2 by coating liquid and is connected the auxilliary jar of being located at above-mentioned pressure switching part 1 with pressurization/relief pipe 15 and uses on the manifold 16.Auxilliary jar uses pressure buffer 17 to be connected with pump 18 with auxilliary jar with manifold 16 by auxilliary jar.Be connected with the auxilliary effective transfer valve 19 that constitutes by triple valve at auxilliary jar that draws from the above-mentioned first box 5a with pressurization/relief pipe 15 with from auxilliary jar of the joint portion that the above-mentioned second box 5b draws with pressurization/relief pipe 15.
Coating liquid supply pipe 20 extends from main jar 6 to head 4, and the joint portion of the coating liquid supply pipe 20 of drawing at the coating liquid supply pipe 20 of drawing from the above-mentioned first box 5a and the above-mentioned second box 5b is connected with the box transfer valve 21 that is made of triple valve.
Coating liquid recovery tube 22 4 is supplied with circulation portions 2 by coating liquid and is extended to auxilliary jar 7 one sides from the head, on the branching portion of coating liquid recovery tube 22 that extends to the above-mentioned first box 5a, one side and the coating liquid recovery tube 22 that extends to the above-mentioned second box 5b, one side, be connected with the coating liquid that constitutes by triple valve and reclaim with transfer valve 23.
On above-mentioned head 4, four stature 24a-24d are configured on the straight line side by side, and each 24a-24d connects with a tube connector 39 polyphones.
Be fixed with on main jar 6 top and utilized hyperacoustic liquid level sensor 25, be used for monitoring the liquid level (surplus) of the coating liquid 26 in main jar 6.On main jar 6 and auxilliary jar 7, but be equipped with, can suitably adjust the revolution of agitator 27 by changing the alternating magnetic field that is applied by apply the agitator 27 that constitutes by magnet of alternating magnetic field rotation from the outside.The stirring action of the rotation by following this agitator 27 can prevent the sedimentation of solia particle (spacer micro-ion) in the coating liquid 26 more reliably.
On coating liquid is supplied with circulation portions 2, be connected with cleaning fluid tank 29 by cleaning solution supplying pipe 28, for example in cleaning fluid tank 29, accommodate cleaning fluids 30 such as isopropyl alcohol.The liquid level (surplus) of the cleaning fluid 30 in the cleaning fluid tank 29 is monitored by liquid level sensor 31.
Above-mentioned coating liquid recovery tube 22 be connected with sewer pipe 32 midway, this sewer pipe 32 extends to waste liquid tank 33.Waste liquid amount in jar is monitored by liquid level sensor 34.
The gas-pressurized 35 that constitutes by nitrogen or air etc., by pressurization with manifold 36 and utilize each gas-pressurized to supply to main jar respectively with manifold 9, auxilliary jar manifold 16, coating liquid supply pipe 20 and cleaning fluid tank 29 1 sides with pipe arrangement 37.
Be provided with the coating liquid/cleaning fluid/gas-pressurized transfer valve 38 that constitutes by triple valve at above-mentioned gas-pressurized with the joint portion with coating liquid supply pipe 20 of pipe arrangement 37.In addition, be provided with the cleaning fluid/gas-pressurized transfer valve 40 that constitutes by triple valve at above-mentioned gas-pressurized with the joint portion of pipe arrangement 37 and cleaning solution supplying pipe 28.Be respectively equipped with pressure sensor 41 with manifold 9, auxilliary jar with manifold 16 and on pressurizeing with manifold 36 at above-mentioned main jar.
Be provided with the coating liquid/waste liquid transfer valve 42 that constitutes by triple valve supplying with the coating liquid supply pipe 20 of drawing and the joint portion of sewer pipe 32 from above-mentioned coating liquid with transfer valve 21.Between above-mentioned coating liquid/waste liquid transfer valve 42 on the coating liquid supply pipe 20 and head 4, be provided with first cutout valve 43 that constitutes by two-port valve.From the head the 4 coating liquid recovery tubes 22 of drawing with the joint portion of sewer pipe 32 near, branch into the waste liquid one side pipe body 44 that extends to sewer pipe 32 1 sides and extend to coating liquid and reclaim 45 two arms of recovery one side pipe body with transfer valve 23 1 sides.And, on above-mentioned waste liquid one side pipe body 44, be provided with second cutout valve 46 that constitutes by two-port valve, on recovery one side pipe body 45, be provided with the 3rd cutout valve 47 that constitutes by two-port valve, as shown in the figure, the 4 coating liquid recovery tubes 22 of drawing are connected between second cutout valve 46 and the 3rd cutout valve 47 from the head.
As shown in the figure, the first box 5a and the second box 5b have been formed the circulating path of coating liquid 26 together by transfer tube 13 (transferring with pump 14 between jar) between main jar of 6 → coating liquid supply pipe, a 20 → 24a-24d → coating liquid recovery tube 22 → auxilliary jar 7 → jar.
The first box 5a and the second box 5b make and can change apparatus main body, among the figure, 49a is the connecting portion of main jar 6 and coating liquid supply pipe 20,49b is main jar 6 and the main jar of connecting portion with pressurization/ relief pipe 8,49c is the connecting portion that main jar 6 and jar are used outlet one side of transfer tube 13,49d is the connecting portion that auxilliary jar 7 and jar are used the inlet side of transfer tube 13, and 49e is auxilliary jar 7 and assists the connecting portion of jar with pressurization/relief pipe 15 that 49f is the connecting portion of auxilliary jar 7 and coating liquid recovery tube 22.In these connecting portions 49a-40f, can change apparatus main body with main jar above-mentioned box 5a, a 5b thereby connect auxilliary jar.
In the first box 5a and the second box 5b main jar 6 and auxilliary jar 7, be injected with the coating liquid 26 of scheduled volume.The example that present embodiment is represented is to be attached to on-chip droplet ejection apparatus from the spherical spacer particle spraying that for example is made of hollow bead etc. of thing as the dice spaced of liquid crystal indicator.
The diameter of spacer particle is VA mode or TN mode and so on and different with the kind of for example liquid crystal indicator, but normally used diameter is about 2 μ m-5 μ m, is 24 the spout diameter that can spray from the beginning.This spacer particle is dispersed in for example concentration about 0.5 weight %-20 weight % in the dispersion liquid of mixed liquor of organic liquid, water or organic liquid and water etc.
What present embodiment was used is that water and ethylene glycol are mixed, and viscosity is adjusted to the degree of 10mPaS, makes its dispersion liquid that can stably spray, and is that the hollow glass bead of 3.5 μ m is distributed in this dispersion liquid by 1.2 weight % with diameter.As required, also can add and be used for bonding agent of keeping the dispersant of spacer dispersion of nano-particles well or the spacer particle being bonded to substrate surface etc.
Below, the operations of this droplet ejection apparatus is described.At first, the situation of using first box 5a ejection coating liquid 26 is described.
The filling operation of coating liquid is as follows.
Under the state that the first box 5a is installed on the droplet ejection apparatus, owing to have air in coating liquid supply pipe 20, each 24a-24d, a tube connector 39 and coating liquid recovery tube 22 etc., thereby, for discharging these air, at first use cleaning fluid 30 displaced air.
Owing to also residual in the coating liquid supply pipe the transfer valve 38 air arranged from main jar 6, thereby, the A side of transfer valve 38 should be opened, the B side closure, transfer valve 21 is placed original state, A side closure, the B side of transfer valve 42 are opened, and shutdown valve 43.In addition, the A side of transfer valve 12 is opened the B side closure.
Then, by making gas-pressurized through gas-pressurized pipe arrangement 37, main jar to supply to master's jar 6 with pressurization/relief pipe 8 with manifold 9, main jar interior to improve interior pressure, utilize should in press and make coating liquid 26 flow through coating liquid supply pipe 20 and sewer pipe 23, thereby coating liquid 26 is filled between them the path of (from main jar 6 to switching 38).
Then, because still residual air in from outlet one side of transfer valve 38 to coating liquid supply pipe 20, each 24a～24d, a tube connector 39, therefore, needing the air displacement in this circulating path be cleaning fluid.
For this reason, open transfer valve 40 the A side, close the B side, close transfer valve 38 the A side, open the B side, open transfer valve 21 the A side, close the B side, open transfer valve 42 the A side, close the B side, and open cutout valve 43, open cutout valve 46, shutdown valve 47.
Then, by gas-pressurized 35 is supplied in the cleaning fluid tank 29 to improve interior pressure with pipe arrangement 37 through gas-pressurized, utilizing a part, coating liquid supply pipe 20, each 24a-24d, a tube connector 39, the part of coating liquid recovery tube 22, the sewer pipe 32 of pressing the cleaning fluids 30 that make in the cleaning fluid tank 29 to flow through cleaning solution supplying pipe 28, gas-pressurized usefulness pipe arrangement 37 in this, is cleaning fluid 30 thereby make air displacement therebetween.By making cleaning fluid 30 flow through the stipulated time, thereby be full of the circulating path that comprises head 4 with cleaning fluid.
Subsequently, by gas-pressurized 35 being supplied in main jar 6 to improve interior pressure, utilize to press in this to make coating liquid 26 flow through a part, the sewer pipe 32 of coating liquid supply pipe 20, each 24a-24d, a tube connector 39, coating liquid recovery tube 22, thereby cleaning fluid 30 is replaced into coating liquid 26.The shutdown valve 46 again, open cutout valve 47, coating liquid 26 is sent to reclaims in the side pipe body 45 and extend in its coating liquid recovery tube 22 in front auxilliary jar 7.Thus, finish the filling operation of coating liquid 26, then carry out the ejection operation of coating liquid 36.
The ejection operation of coating liquid is as follows.
As mentioned above, box portion 3 is arranged on the position higher than head 4, produces water-head between the two.The present invention utilizes this water-head, in that coating liquid 26 during from record head 4 ejection, is always made coating liquid 26 by above-mentioned circulating path circulation, thereby suppressed the sedimentation of coating liquid composition, has then suppressed the sedimentation of spacer particle in the present embodiment.
Yet, if only box portion 3 is arranged on the position higher, because the influence of above-mentioned water-head, can not maintain the meniscus at the spout place of head well than head 4, as prior art, still produce leakage.Therefore, the present invention can also be suitable for making the condition of coating liquid 26 circulations in the meniscus at the spout place that can maintain head well, makes in main jar 6 and in auxilliary jar 7 to be in decompression state.
Particularly, open coating liquid and reclaim A side, close the B side, close second cutout valve 46, open the 3rd cutout valve 47 with transfer valve 23, and open main jar with transfer valve 12 and assist jar with the A side of transfer valve 19, close the B side.Then, drive main jar with pump 11 and auxilliary jar with pump 18, by main jar with pressurization/relief pipe 8 and auxilliary jar with pressurization/relief pipe 15, make in main jar 6 respectively and assist in the jar 7 to be in decompression state.Auxilliary jar 7 interior pressure is controlled by pressure switching part 1, thereby it is always forced down in main jar 6, even the amount of coating liquid 26 changes, both pressure differentials are also always kept necessarily.The surplus of coating liquid 26 can be detected by liquid level sensor 25.
Present embodiment as shown in Figure 1, being set at of parameters: 24 ejection face is about 700mm with the difference of height H of main jar 6 bottom surface, and main jar 6 interior pressure is about-8kPa, and auxilliary jar 7 interior pressure is about-11kPa, two jar 6,7 pressure differential are about 3kPa.Main jar 6 interior pressure is controlled auxilliary jar 7 interior pressure along with the amount of main jar 6 interior coating liquid 26 changes accordingly with its change in pact ± 0.5kPa.
In addition as shown in the figure, the liquid level of auxilliary jar 7 is controlled with pump 14 by driving to transfer between jar, and always the liquid level than main jar 6 is lower to make it, and the circulation of the liquid level official post coating liquid 26 of main jar 6 of utilization and auxilliary jar 7 is successfully carried out.
Coating liquid 26 in main jar 6 utilizes above-mentioned water-head to supply to head 4 by coating liquid supply pipe 20, flow in each balancing gate pit of 24, becomes drop by the driving piezoelectric vibrator and is ejected into liquid crystal with on the precalculated position of substrate 48 from spout.In this sprays attached to on-chip drop, roughly comprise the spacer particle of regulation number (being 3-5 in the present embodiment).In addition, be described further below about 24 internal structure.
There is not the coating liquid 26 of ejection to flow to next stature 24 and with its a part of ejection, finally the residual coating liquid 26 that is not ejected is delivered in auxilliary jar 7 by coating liquid recovery tube 22.Coating liquids 26 in auxilliary jar 7 by transfer between driving jar pass through jar with pump 14 between transfer tube 13 turn back in master's jar 6.Control by transferring between this jar, can make the liquid level difference H of main jar 6 and auxilliary jar 7 always keep suitable value with the rotation of pump 14.
When not spraying coating liquid 26, because 24 piezoelectric vibrator do not drive, thereby coating liquid 26 just passes the inside of each 24a-24d.
Like this, when coating liquid 26 sprays or when ejection all circulate owing to always be in flow regime, thereby can suppress the sedimentation of the spacer particle in constituent, the especially present embodiment of coating liquid.Have, because in the present embodiment, agitator 27 is rotation in main jar 6 and auxilliary jar 7 respectively again, thereby, can further suppress the sedimentation of spacer particle.
The handover operation of box is as follows.
Below, the handover operation to the second box 5b from the first box 5a is described.When liquid level sensor 25 detects main jar 6 liquid level of the first box 5a, one side when also lower than the position of regulation, the coating liquid 26 that then is judged as the first box 5a, one side has consumed.
When the composition of the coating liquid 26 of the first box 5a and the second box 5b is identical, though coating liquid 26 has been filled in the circulating path that comprises head 4, still residual coating liquid supply pipe 20b from main jar 6 to transfer valve 38b and the path from transfer valve 23 to auxilliary jar 7b have an air.
Therefore, close transfer valve 12,19,21,23,42 the A side, open the B side, open transfer valve 38 the A side, close the B side.Then, by gas-pressurized 35 is passed through gas-pressurizeds pipe arrangements 37, use manifold 9 for main jar, main jar supplies in the main jar 6b to improve interior pressure with pressurization/relief pipe 8, utilize to press in it to make coating liquid 26 flow through coating liquid supply pipe 20b and sewer pipe 32, thereby the interior air of coating liquid supply pipe 20b is therebetween discharged.Thereafter, open transfer valve 42 the A side, close the B side, coating liquid 26 is sent to the path from transfer valve 23 to auxilliary jar of 7b.Thus, finish the handover operation of box.The ejection action of this coating liquid 26 is because identical with the situation of the first box 5a, and therefore, the repetitive description thereof will be omitted.
Under the different situation of the composition of the coating liquid 26 in the first box 5a and the second box 5b, for example in the kind change of the LCD of manufacturing, correspondingly, the different occasion of diameter of the spacer particle (hollow bead) in coating liquid, because a kind of coating liquid 26a before in the circulating path that comprises head 4, being filled with, thereby, it must be got rid of fully.
For this reason, at first close transfer valve 38 the A side, open the B side, open transfer valve 21 the A side, close the B side, open transfer valve 42 the A side, close the B side, open first cutout valve 43 and the 3rd cutout valve 47, close second cutout valve 46, and make transfer valve 23 be in the A side open the B side closure state.Then, the A side by closing transfer valve 40, open the B side, gas-pressurized 35 is sent to coating liquid supply pipe 20 by gas-pressurized with pipe arrangement 37.Thus, will remain in the later coating liquid supply pipe 20 of transfer valve 38, each 24a-24d, the coating liquid 26a in auxilliary jar 7 the coating liquid recovery tube 22 of a tube connector 39 and the first box 5a is discharged to auxilliary jar 7.
Secondly, identical state when valve beyond the transfer valve 40 being in discharge with above-mentioned coating liquid 26a, open transfer valve 40 the A side, close the B side, be force feed cleaning fluid 30 specifically.Thus, clean the later coating liquid supply pipe 20 of transfer valve 38, each 24a-24d, auxilliary jar 7 coating liquid recovery tube 22 up to a tube connector 39 and the first box 5a is discharged to those waste liquids in auxilliary jar 7.Like this, when the occasion etc. of the kind of change coating liquid 26, will be at the auxilliary jar 7 of the preceding box 5 that has used as the waste liquid tank utilization.
So, in the discharge of the coating liquid 26a in the current circulatory flow that has used and clean finish after, close the transfer valve 38 of the first box 5a side the A side, open the B side, open the transfer valve 38 of the second box 5b side the A side, close the B side, close transfer valve 21 the A side, open the B side, close transfer valve 23 the A side, open the B side.
By the operation of these valves, the circulatory flow that will comprise head 4 is connected to the second box 5b, one side, in this state, carries out the filling of the coating liquid 26b of the second box 5b, one side.Because the ejection of coating liquid 26b action is same as described above, thereby the repetitive description thereof will be omitted.
Fig. 3 relates to the system diagram of the droplet ejection apparatus of second embodiment of the invention, is with the above-mentioned first embodiment dissimilarity in the present embodiment, and each 24a-24d utilizes a tube connector 39 to connect this point side by side.
As shown in Figure 1, in the occasion that each 24a-24d connects for polyphone, its advantage that has is in each 24a-24d, can carry out equably to the displacement of coating liquid and the circulation of coating liquid from cleaning fluid.On the other hand, as shown in Figure 3, be the occasion that connects side by side at each 24a-24d, its advantage that has is in each 24a-24d, can increase the spray volume of coating liquid, and can improve spouting velocity.
Fig. 4 and Fig. 5 relate to the front view and the side view of the droplet ejection apparatus of embodiments of the present invention.
As shown in these figures, on platform for coating 51, lay and be fixed with two X-axis line slideways 52 that extend in parallel, two X-axis line slideways 53 are installed on this guide rail.Above X-axis line slideway 53, be fixed with workbench 55 by pedestal 54.
On workbench 55, oriented surface is placed the liquid crystal that applies spacer particulate (hollow bead) up with substrate 48, and utilizes detent mechanism (not shown) such as air adsorbing mechanism for example to be fixed in precalculated position on the workbench 55.
Pillar 56,56 extends towards the top from the left and right sides of platform for coating 51, has set up guiding support component 57 in the upper end of pillar 56,56.In the front of guiding support component 57, two Y-axis line slideways that extend in parallel 58 are fixed in the horizontal direction, are supported with Y-axis seat 59 slidably on this Y-axis line slideway 58.On Y-axis seat 59, be fixed with the Z axle bed 60 that extends in vertical direction again, on Z axle bed 60, be supported with Z axle line slideway 61 (with reference to Fig. 4) slidably.
On above-mentioned Y-axis seat 59 and Z axle bed 60, as shown in Figure 5, be equipped with coating liquid ejection mechanism 62.Coating liquid service tank 63 in this coating liquid ejection mechanism 62 carries on Y-axis seat 59, and coating liquid service tank 63 has above-mentioned coating liquid circulation supply unit 2 and box portion 3 as shown in Figure 4.In the present embodiment,,, also can carry one group of combinations thereof though carried the combination of two groups of master's jars 6 and auxilliary jar 7 as above-mentioned box portion 3.On the other hand, the head 4 in the coating liquid ejection mechanism 62 carries on above-mentioned Z axle line slideway 61 (Z axle bed 60) by head slider 64.
Having carried the workbench 55 of above-mentioned liquid crystal with substrate 48, is that drive source is along moving back and forth on the above-mentioned X-axis line slideway 52 with linear electric machine (not shown) for example.The Y-axis seat 59 that has carried above-mentioned Z axle bed 60 for example moves back and forth on above-mentioned Y-axis line slideway 58 as drive source with linear electric machine (not shown).The Z axle line slideway 61 that has carried above-mentioned head 4 is that drive source moves back and forth on above-mentioned Z axle bed 60 with linear electric machine (not shown) for example then.
Also as shown in these figures, coating liquid service tank 63 (coating liquid circulation supply unit 2, box portion 3) is arranged on the position higher than head 4, therefore, coating liquid supplies in the head 4 by coating liquid supply pipe (for example flexible pipe) through coating liquid circulation supply unit 2 naturally from box portion 3, simultaneously the liquid level difference of coating liquid utilization in the head 4 and box portion 3 and always be in pressurized state.Thus, because the leakage that in head 4, might produce coating liquid, thereby, utilize to control in 1 pair of box portion 3 of not shown pressure switching part to make it be in decompression state.
Head 4 and liquid crystal are set by the location-appropriate that is adjusted at the Z axle line slideway 61 on the Z axle bed 60 with the distance of substrate 48.And, during having carried the workbench 55 of liquid crystal and having moved back and forth with substrate 48, ejection by initial setting regularly makes coating liquid 4 become drop and be ejected into liquid crystal with on the precalculated position of substrate 48 from the head, includes the spacer particulate of regulation number in the drop that injection is adhered to.
When making drop spray the position that is attached to necessity by liquid crystal with once moving back and forth of substrate 48, coating liquid ejection mechanism 62 just moves to next coating zone on Y-axis.By repeating these actions, contain the atomic drop of spacer and then spray and be attached to liquid crystal with on whole of substrate 48, carry out spacer atomic bonding after, be transported to the next assembling procedure of liquid crystal indicator.
Fig. 6 is to represent the detailed structure view of type head as required to Fig. 8, and Fig. 6 is the exploded perspective view of head, and Fig. 7 is the cutaway view after the assembling of head, and Fig. 8 is the cutaway view along the A-A line of Fig. 7.
In these figure, label 71 is spouts, the 72nd, and nozzle plate, the 73rd, balancing gate pit, the 74th, pressure chamber plate, the 75th, throttle orifice, the 76th, choke block, the 77th, barrier film, the 78th, filter, the 79th, diaphragm plate, the 80th, hole portion, the 81st, gripper shoe, the 82nd, common liquid passage, the 83rd, shell, the 84th, bonding agent, the 85th, piezoelectric actuator, the 86th, piezoelectric vibrator, the 87th, outer electrode, the 88th, conductive adhesive, the 89th, supporting substrate, the 90th, single electrode, the 91st, common electrode, the 92nd, through hole, the 93rd, liquid ingress pipe.
This head of type as required is made of nozzle plate 72, pressure chamber plate 74, choke block 76, diaphragm plate 79, gripper shoe 81, shell 83 and piezoelectric actuator 85 etc. as shown in Figure 6.
The nozzle plate 72 that is formed with a plurality of spouts 71 of row is by with the electroforming processing method of nickel material, be made with the precision pressure processing method of stainless steel material etc. or laser processing method etc.On pressure chamber plate 74, be formed with number and above-mentioned spout 71 corresponding balancing gate pits 73, and be communicated with above-mentioned spout 71.Choke block 76 be formed with common liquid passage 82 and 73 connections of above-mentioned balancing gate pit, and control is to the throttle orifice 75 of the liquid injection rate of balancing gate pit 73 as shown in Figure 7.Pressure chamber plate 74 and choke block 76 utilize the etching processing method of stainless steel material or the making such as electroforming processing method of nickel material.
Being formed with the pressure that is used for piezoelectric vibrator 86 on diaphragm plate 79 passes to the barrier film 77 of balancing gate pit 73 effectively and removes the filter 78 that is injected into impurity in the liquid the throttle orifice 75 etc. from common liquid passage 82.Diaphragm plate 79 utilizes the etching processing method of stainless steel material or the making such as electroforming processing method of nickel material.
Form porose 80 on the gripper shoe 81, this hole portion 80 is used for bonding agent 84 fixedly when barrier film 77 and piezoelectric vibrator 86, the position of the vibrational system stiff end of control barrier film 77, and the bonding agent that restriction is extruded from bonding location is expanded at barrier film 77.Gripper shoe 81 is utilized the etching processing method of stainless steel material or the making such as electroforming processing method of nickel material.On the shell of making of metal or synthetic resin 83, be provided with common liquid passage 82, on this common liquid road 82, be connected with an above-mentioned coating liquid supply pipe 20 or a tube connector 39.The coating liquid of supplying with from coating liquid supply pipe 20 or a tube connector 39 flows to throttle orifice 75, balancing gate pit 73, spout 71 in the centre of the common liquid passage 82 of head successively by filter 78.Make piezoelectric vibrator 86 flexible by the pulse voltage that applies regulation between single electrode 90 and common electrode 91, when stopping to apply pulse voltage, piezoelectric vibrator 86 just turns back to flexible preceding state.Because the distortion that piezoelectric vibrator 86 is so just applies instantaneous pressure to the coating liquids in the balancing gate pit 73, coating liquid becomes drop and sprays and be attached to liquid crystal with on the substrate 48 from spout.
Fig. 9 is the expression head and has applied the plane of the liquid crystal of spacer with the relation of color filter substrate.As shown in Figure 9, with on the surface of color filter substrate 48, formed the pixel cell 95 of R, G, B clocklike, on the cross section of this liquid crystal, be coated with a plurality of spacers 97 with the photomask 96 of color filter substrate 48 at liquid crystal.
As shown in Figure 9, the spacing with P1 on 24 is formed with spout 71, in contrast to this, on substrate 48 the spacing P2 of bonding spacer 97 different with the kind of liquid crystal indicator.For this reason, adjust a tilt angle theta of 24, make by an interval of 24 ejections consistent with the spacing P2 of spacer 97.
Though above-mentioned embodiment is illustrated the situation of liquid crystal indicator manufacturing, but the present invention is not limited thereto, also can be applied to the manufacturing of the printed circuit board (PCB) of the manufacturing of electroluminescent part for example or the ink that printing contains Titanium particles, use the electronic component of the high concentration of easy sedimentation or cohesion to wait other technical field with the manufacturing of the electronic component of the multi-layered ceramic electronic component of ink manufacturing or high-frequency electronic parts and so on.
In addition, though the present invention mixes ejection and disperseed the situation of the coating liquid of solia particle to be illustrated, the present invention is not limited thereto, and the ejection that yet goes for ink-jet recording apparatus for example etc. does not contain the occasion of the coating liquid of solia particle.

Claims (10)

1. droplet ejection apparatus is characterized in that possessing:
Box portion with the jar that has held coating liquid;
Make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
By the coating liquid in above-mentioned jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with the waste liquid discharge portion of a part of effluent discharge of circulation portions from above-mentioned coating liquid; And
Using when above-mentioned cleaning solution supplying portion cleaning liquid supplied is cleaned above-mentioned coating liquid and supplied with circulation portions and above-mentioned head, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to the pressure switching part that reduces pressure in the above-mentioned jar, and
Above-mentioned box portion connects into and above-mentioned coating liquid is supplied with circulation portions can change.
2. droplet ejection apparatus according to claim 1 is characterized in that,
Above-mentioned box portion is provided with a plurality of boxes with above-mentioned jar, and each box is supplied with circulation portions to above-mentioned coating liquid and switchably connected side by side.
3. droplet ejection apparatus is characterized in that possessing:
Box portion with the jar that has held coating liquid;
Make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
By the coating liquid in above-mentioned jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with the waste liquid discharge portion of a part of effluent discharge of circulation portions from above-mentioned coating liquid; And
Using when above-mentioned cleaning solution supplying portion cleaning liquid supplied is cleaned above-mentioned coating liquid and supplied with circulation portions and above-mentioned head, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to the pressure switching part that reduces pressure in the above-mentioned jar, and
Above-mentioned box portion connects into and above-mentioned coating liquid is supplied with circulation portions can change,
Above-mentioned box portion is arranged on the position higher than above-mentioned head,
Above-mentioned box portion has auxilliary jar that coating liquid is supplied with main jar of above-mentioned head and the coating liquid that passed through above-mentioned head is returned,
Above-mentioned main jar with the auxilliary jar of band of supplying with circulation portions with above-mentioned coating liquid transfer with pump jar between transfer tube be connected,
Make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, keeping above-mentioned auxilliary jar interior pressure by above-mentioned pressure switching part and make it lower than above-mentioned main jar interior pressure.
4. droplet ejection apparatus according to claim 1 is characterized in that,
Above-mentioned head is provided with a plurality of heads, and these a plurality of are utilized a tube connector polyphone to connect.
5. droplet ejection apparatus according to claim 1 is characterized in that,
Above-mentioned coating liquid is the coating liquid that mixes and disperseed solids.
6. droplet ejection apparatus according to claim 5 is characterized in that,
The above-mentioned body that is attached is the liquid crystal substrate, and above-mentioned solids are to keep the spacer of two blocks of liquid crystal with the gap of substrate.
7. the method for operation of a droplet ejection apparatus is characterized in that,
This droplet ejection apparatus possesses:
Make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
Have auxilliary jar that holds main jar of above-mentioned coating liquid and the coating liquid that passed through above-mentioned head is returned, thereby and connect auxilliary jar with the main jar of box portion that coating liquid can be transplanted on main jar from above-mentioned auxilliary jar;
By the coating liquid in above-mentioned main jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned auxilliary jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with from above-mentioned coating liquid circulation portions a part of effluent discharge the waste liquid discharge portion and
When cleaning above-mentioned coating liquid supply circulation portions and above-mentioned head with above-mentioned cleaning fluid, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time supplying with circulation portions, to the pressure switching part of switching pressure in above-mentioned main jar and in auxilliary jar by above-mentioned coating liquid with reducing pressure
This method of operation is implemented following operation:
Air/cleaning fluid displacement operation, this operation is, by by above-mentioned pressure switching part with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, thereby make above-mentioned cleaning fluid supply with circulation portions and lead to above-mentioned head from above-mentioned coating liquid, make the cleaning fluid that has passed through this head supply with circulation portions through coating liquid and flow to above-mentioned waste liquid discharge portion, will supply with the air displacement of circulation portions in above-mentioned head from above-mentioned coating liquid is cleaning fluid;
Cleaning fluid/coating liquid displacement operation, this operation is, after this air/cleaning fluid displacement operation, pressurize in above-mentioned main jar by above-mentioned pressure switching part, make above-mentioned coating liquid supply with circulation portions and lead to above-mentioned head from above-mentioned coating liquid, make the coating liquid that has passed through this head supply with circulation portions and flow to above-mentioned waste liquid discharge portion, will supply with the cleaning fluid of circulation portions in above-mentioned head from above-mentioned coating liquid and be replaced into coating liquid through coating liquid; And
Coating liquid is supplied with circulating process, this operation is, after this cleaning fluid/coating liquid displacement operation, reduce pressure in above-mentioned main jar interior and auxilliary jar by above-mentioned pressure switching part, make the coating liquid in above-mentioned main jar supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, make the coating liquid that has passed through this head return above-mentioned auxilliary jar in, in the cyclic process of this coating liquid, coating liquid is become drop from above-mentioned head and is ejected into and is attached on the body.
8. the method for operation of droplet ejection apparatus according to claim 7 is characterized in that,
Above-mentioned box portion is arranged on the position higher than above-mentioned head,
When stating coating liquid supply circulating process on the implementation, keep above-mentioned auxilliary jar interior pressure lower than above-mentioned main jar interior pressure by above-mentioned pressure switching part.
9. the method for operation of a droplet ejection apparatus is characterized in that,
This droplet ejection apparatus possesses:
Make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
Have auxilliary jar that holds main jar of above-mentioned coating liquid and the coating liquid that passed through above-mentioned head is returned, thereby and connect auxilliary jar with the main jar of box portion that coating liquid can be transplanted on main jar from above-mentioned auxilliary jar;
By the coating liquid in above-mentioned main jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned auxilliary jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with the waste liquid discharge portion of a part of effluent discharge of circulation portions from above-mentioned coating liquid; And
When cleaning above-mentioned coating liquid supply circulation portions and above-mentioned head with above-mentioned cleaning fluid, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to switching the pressure switching part of pressure in above-mentioned master jar interior and auxilliary jar with reducing pressure, and
Above-mentioned box portion at least also possesses: have first box of above-mentioned main jar and auxilliary jar and have second box of above-mentioned main jar and auxilliary jar, above-mentioned each auxilliary jar is connected with main jar and above-mentioned coating liquid supply circulation portions, can switch so that above-mentioned first box and second box are supplied with circulation portions to above-mentioned coating liquid;
On main jar of above-mentioned first box and second box main jar, be provided with the liquid level sensor of the liquid level that detects coating liquid;
The identical occasion of composition of the above-mentioned coating liquid that in above-mentioned first box and second box, is held, implement following operation continuously:
Coating liquid is supplied with circulating process, this operation is, above-mentioned first box and above-mentioned coating liquid are supplied with circulation portions to be connected, by reducing pressure in the auxilliary jar that reaches first box in the main jar of above-mentioned pressure switching part to above-mentioned first box, make main jar of interior coating liquid of above-mentioned first box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, and make the coating liquid that has passed through this head turn back to the auxilliary jar of above-mentioned first box, in the cyclic process of this coating liquid, make coating liquid become drop simultaneously and be ejected into and be attached on the body from above-mentioned head;
Stop operation, this operation is, supply with in the process of circulating process at this coating liquid,, then stop to supply with the supply circulation from the coating liquid of above-mentioned first box of circulation portions by above-mentioned coating liquid if the liquid level of the coating liquid in main jar of above-mentioned first box, one side is lower than the position of regulation;
Switching process, this operation are that after this stopped operation, the connection of above-mentioned coating liquid being supplied with circulation portions switched to above-mentioned second box from above-mentioned first box; And
Coating liquid is supplied with circulating process, this operation is, behind this switching process, by reducing pressure in the auxilliary jar that reaches second box in the main jar of above-mentioned pressure switching part to above-mentioned second box, make main jar of interior coating liquid of above-mentioned second box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, and make the coating liquid that has passed through this head turn back to the auxilliary jar of above-mentioned second box, in the cyclic process of this coating liquid, make coating liquid become drop simultaneously and be ejected into and be attached on the body from above-mentioned head.
10. the method for operation of a droplet ejection apparatus is characterized in that,
This droplet ejection apparatus possesses:
Make above-mentioned coating liquid become drop and be ejected into the head that is attached on the body;
Have auxilliary jar that holds main jar of above-mentioned coating liquid and the coating liquid that passed through above-mentioned head is returned, thereby and connect auxilliary jar with the main jar of box portion that coating liquid can be transplanted on main jar from above-mentioned auxilliary jar;
By the coating liquid in above-mentioned main jar is supplied with above-mentioned head, and make the coating liquid that has passed through this head return above-mentioned auxilliary jar, thereby make the coating liquid of coating liquid circulation supply with circulation portions;
Supply with the cleaning solution supplying portion of circulation portions via above-mentioned coating liquid with the above-mentioned head of cleaning solution supplying;
Supply with the waste liquid discharge portion of a part of effluent discharge of circulation portions from above-mentioned coating liquid; And
When cleaning above-mentioned coating liquid supply circulation portions and above-mentioned head with above-mentioned cleaning fluid, with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, make the coating liquid circulation time by above-mentioned coating liquid supply circulation portions, to switching the pressure switching part of pressure in above-mentioned master jar interior and auxilliary jar with reducing pressure, and
Above-mentioned box portion at least also possesses: have first box of above-mentioned main jar and auxilliary jar and have second box of above-mentioned main jar and auxilliary jar, above-mentioned each auxilliary jar is connected with main jar and above-mentioned coating liquid supply circulation portions, can switch so that above-mentioned first box and second box are supplied with circulation portions to above-mentioned coating liquid;
On main jar of above-mentioned first box and second box main jar, be provided with the liquid level sensor of the liquid level that detects coating liquid;
The different occasion of composition of the above-mentioned coating liquid that in above-mentioned first box and second box, is held, implement following operation:
Coating liquid is supplied with circulating process, this operation is, above-mentioned first box and above-mentioned coating liquid are supplied with circulation portions to be connected, by reducing pressure in the auxilliary jar that reaches first box in the main jar of above-mentioned pressure switching part to above-mentioned first box, make main jar of interior coating liquid of above-mentioned first box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, and make the coating liquid that has passed through this head turn back to the auxilliary jar of above-mentioned first box, in the cyclic process of this coating liquid, make coating liquid become drop simultaneously and be ejected into and be attached on the body from above-mentioned head;
Stop operation, this operation is, supply with in the process of circulating process at this coating liquid,, then stop to supply with the supply circulation from the coating liquid of above-mentioned first box of circulation portions by above-mentioned coating liquid if the liquid level of the coating liquid in main jar of above-mentioned first box, one side is lower than the position of regulation;
Switching process, this operation are that after this stopped operation, the connection of above-mentioned coating liquid being supplied with circulation portions switched to above-mentioned second box from above-mentioned first box;
Coating liquid is discharged operation, and this operation is, behind this switching process, by above-mentioned pressure switching part above-mentioned gas-pressurized is supplied with circulation portions from above-mentioned coating liquid and leads to above-mentioned head, will supply with the coating liquid of circulation portions in above-mentioned head from above-mentioned coating liquid and discharge;
Matting, this operation is, after this coating liquid is discharged operation, by by above-mentioned pressure switching part with gas-pressurized to pressurizeing in the above-mentioned cleaning solution supplying portion, thereby make above-mentioned cleaning fluid supply with circulation portions and lead to above-mentioned head from above-mentioned coating liquid, this cleaning fluid that has passed through head is discharged to above-mentioned waste liquid discharge portion, supplies with circulation portions to above-mentioned head to clean from above-mentioned coating liquid;
New coating liquid is supplied with circulating process, this operation is, after this matting, by reducing pressure in the auxilliary jar that reaches second box in the main jar of above-mentioned pressure switching part to above-mentioned second box, make main jar of interior new coating liquid of above-mentioned second box supply with circulation portions towards above-mentioned head from above-mentioned coating liquid, when making the coating liquid that has passed through this head return above-mentioned second box auxilliary jar, in the cyclic process of this coating liquid, coating liquid is become drop from above-mentioned head and be ejected into and be attached on the body.
CN200710091049A 2006-04-10 2007-04-06 Liquid droplet ejection device and operation method thereof Expired - Fee Related CN100595071C (en)

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