TW200846573A - Transporting apparatus - Google Patents

Transporting apparatus Download PDF

Info

Publication number
TW200846573A
TW200846573A TW096118922A TW96118922A TW200846573A TW 200846573 A TW200846573 A TW 200846573A TW 096118922 A TW096118922 A TW 096118922A TW 96118922 A TW96118922 A TW 96118922A TW 200846573 A TW200846573 A TW 200846573A
Authority
TW
Taiwan
Prior art keywords
magnetic
pair
rollers
disk
gear
Prior art date
Application number
TW096118922A
Other languages
English (en)
Chinese (zh)
Inventor
Daisuke Hayasaka
Kingo Kuritani
Original Assignee
Shoei Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shoei Engineering Co Ltd filed Critical Shoei Engineering Co Ltd
Publication of TW200846573A publication Critical patent/TW200846573A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Gear Transmission (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW096118922A 2007-05-16 2007-05-28 Transporting apparatus TW200846573A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007130332A JP4541383B2 (ja) 2007-05-16 2007-05-16 搬送装置

Publications (1)

Publication Number Publication Date
TW200846573A true TW200846573A (en) 2008-12-01

Family

ID=40125312

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096118922A TW200846573A (en) 2007-05-16 2007-05-28 Transporting apparatus

Country Status (4)

Country Link
JP (1) JP4541383B2 (ja)
KR (1) KR20080101606A (ja)
CN (1) CN101309042B (ja)
TW (1) TW200846573A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105438824A (zh) * 2015-12-24 2016-03-30 嵊州市意海电机配件厂 一种石墨片自动装卸装置
JP6697911B2 (ja) * 2016-03-18 2020-05-27 日立造船株式会社 電子線滅菌設備
CN108506456A (zh) * 2018-06-22 2018-09-07 红塔辽宁烟草有限责任公司沈阳卷烟厂 卷烟滤棒接收机转向部磁力啮合齿轮装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2683317B2 (ja) * 1993-11-19 1997-11-26 マルヤス機械株式会社 コンベア
JP2648565B2 (ja) * 1994-06-16 1997-09-03 カネテック株式会社 駆動装置
JP3612978B2 (ja) * 1998-01-21 2005-01-26 セイコーエプソン株式会社 搬送装置、搬送方法、液晶表示装置の製造方法
JP2984999B1 (ja) * 1998-09-08 1999-11-29 株式会社レヨーン工業 基板又はシート表面洗浄における加圧制御機構及びこの機構を具える基板又はシート表面洗浄装置
JP2004056875A (ja) * 2002-07-17 2004-02-19 Noritsu Koki Co Ltd 非接触伝動機構
JP4066894B2 (ja) * 2003-06-25 2008-03-26 住友金属鉱山株式会社 長尺幅広薄板材料の搬送装置及び長尺幅広薄板材料

Also Published As

Publication number Publication date
JP2008285255A (ja) 2008-11-27
CN101309042A (zh) 2008-11-19
JP4541383B2 (ja) 2010-09-08
KR20080101606A (ko) 2008-11-21
CN101309042B (zh) 2012-06-13

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