200845130 九、發明說明·· 【發明所屬之技術領域】 本發明係關於一種防護薄膜組件收納容器，其可收納 、 輸达在吾人製造半導體裝置、印刷基板或是液晶顯示 5 作為防塵器使用的微影用防護薄膜組件。 叩、叩守 【先前技術】 在LSI、超LSI等半導體或是液晶顯示板等產品的製造中 ^光照射半導體晶目或液晶關板以製作形成 所。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Shadow protective film assembly.先前 叩 叩 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 先前 LSI LSI LSI LSI LSI LSI LSI LSI LSI LSI
ί i f „: 5光彎曲，故除了會使轉印的圖案變形、S 保持光罩清係光^ 組件後再進行;光。此時罩 驟中光於 印造成影響。〇木上_義組件上的異物就不會對轉 醋_=薄膜組件，係用透光性良好的硝化纖維辛、 # ♦乙烯4物貝構成防護薄膜組件框 銹 者於該防護薄膜組件框架的上端面著，^ 付黏 層（隔離部）。 、 、+ h以及保濩黏著層的脫模 間雖ΐ:有薄，件_於光罩上後其所形成的封閉空 防護薄膜組件本身果，惟若異物係附著於 著異物。因此，除了 時，便難以防止光罩表面附 、了要未防相馳件本身的高度清紐以外， 200845130 更強烈要求保管、輸送時使用的防護薄膜組件收納容器也呈 潔性的性能。具體而言，要求其防止靜電性能‘異/，、並由 =擦時_量少的材f所構成’且形成能儘量防止防護薄膜址 件間之接觸的構造，以及施加外力時能夠防止變形的 ^防護薄膜組件收納容器通常係將丙烯腈一丁二烯—苯二烯共 呈成形等方式製造而成。利用該等成形方法， 發ί物附著或發塵的罐交少、一體成形無接缝故 ί慮較少、即使物品形狀複雜也能輕易製造、 里產性優異、成本低廉等優點。 ^導咖或印刷基板㈣防護薄膜組件 Sr::3：0：11左右，該等容器通f係湘射出成形 壁厚進變局部處所的厚度’故能《要部位的 的大用於液晶用防護薄膜組件而邊長超過5〇〇mm 方數個:ΐϋ式所製造而成。這是因為，錢用從一個地 式’ f愧流動距離太長而會造成製作上的t難射出成形 空吸引ίΐ形㈢使=以蓋=，樹脂片材，真 式無法形成厚壁，雖易衣传。然而，真空成形方 彎曲相同板厚的片材所強’惟基本上只是 剛性的物品。 衣成的而已，故使_方式仍报難製得高 6 200845130 的。該等肋部的例子，就容器本體而言，如專利文獻1等所例示 用、的補朗肋部，如圖4所示的，基本上外型主要採 ΐ Γ、44b設置的χ字型構件。'然而，該相互交5 在，反而：忐：ίϊί的相反，因為其交叉部（連續部)49的存 -f反，成扭曲方向的剛性非常低，如圖5所 ^ 方對角線扭轉而讓相對頂點靠近的方式彎曲。 以…工成形法所製作的該等肋部， 而 :部而扼殺了效果，其自身還變成“ 剛性::真該等肋部中’交又部的存在會造成 象肋挪扼殺了效果，其自身還變成f曲點⑷，使變形 必項:ί他法確保足夠剛性，如專利文獻2所示的， (/雖^足^=連7以確保剛性。然而’利用其他補強體時， 運用上會產生各種不良的情況。 蘇古二降取嚴、、疋重i的增加，為了確保足夠的剛性，在幾乎 所有的情況下補強體會比容器本體還重。， 旦=手 對捆包、運搬等處理造成極大的不方便。 、重里曰加’ 本的3補=本身而已，還需要用到將補強體連結到容哭 的ΐΐ，於容器本體上的工作流程上 谷裔=之間的間隙洗淨jH/、 容器剛性的方法，其可使蔓薄膜組件收納 /、』使防4溥胲組件收納容器不用補強體而僅 200845130 靠容器本體便能具有足夠剛性。 [專利文獻1]日本特開2000一173887號 [專利文獻日本特開2_-267179號公報 【發明内容】 [發明所欲解決的問題] 依以上所述’本發明之目的在於 一 防護薄膜組件_容器，其細片材成=、，且且低成本的 便具有能承受保管、輪送巾的外力衝擊 2，、他補強體， 納之防護薄膜組件的足夠剛性。 止/、物附著於内部收 [解決問題之技術手段] 本叙月係種防護薄膜組件收納容哭，由 容器本體，其載置防護薄膜 列構件所構成 ，容器本體以周緣部互相嵌合卡I其特^防22件 里脸’係由樹脂片材所成形 ς ^本體以2 ，從平面方向觀察時，與長】形成=外周，， =形+成=50贿以上Υ衫 一 上述長邊與短邊的連接部 、、） 徑40mm以上的圓 弧开平面方向觀察時’形則 再者，容器本體互相平杆的 " 部形成至少具有2段直立面的：也冗= [對知、先别技術之功效] 性’特別是扭財向的容器本體的剛 性的防護薄膜組件收納容器。此^低成本衣得輕量且具備高剛 [實施方式】 200845130 士本發明適用於-邊超過5〇〇mm的大型防護薄膜組件收納容哭 日守特別具有效I然而，並不限於該等大小而已，只要 二 片材成形的防護薄膜組件收納容器，即使是—邊只有綱醜的曰、 型容器也能適用本發明。雖然小型容器很少有剛性的 旦 只要能夠·構造進-步提高剛性的話，就能減少 = 與大型容器一樣，達到輕量化、成本降低的目的。 又 形態以下，根據關説明本發明之防護薄酿件_容器的實施 圖1以及圖2係表示本發明之防護薄膜組件 的二^施·概略説，圖3絲示本發明之防護薄(H) 收納谷器其全體構造的立體圖。又，圖4係表 哭本㉒ ，構造的-個實施例的概略説明圖，圖5係表示:1^哭 本體的角部抬起時的變形態樣。 之谷°。 ^知容器本體（圖4)巾，朝扭轉方向施加外力時， =力量將角部47朝上方抬起時（圖5 )，該容器本體合 44b曲折。此時’原本吾人認為肋部43b應該會對抗該“雖= 對:惟實際上卻發現該肋部43b *交叉位置49被交 ^才 切斷，而無法發揮充分的抵抗力。 邛a 而且，因為交叉肋部43a與對角線44b幾乎一 4ja本身變得最容易彎曲，如圖5所示的成為變形的基準^ 口， 右將_部43a肖彳除的話，除了會導致扭剛生、^ ’ 以外，更會產生容穌體整㈣面度惡㈣不^=卜_性降低 本發明’係為了改善此點的產物，本發， 在比較檢討讀，魏在㈣變科 ^^^狀的 】性，特別是對於提高外周圍部的剛性很重要 並由^ L中所ίίΤ1上載置了防護薄膜組件(未經圖示）， 並由皿體32所復盍。然後，i體與容 圖示）密封固定，或是叫具33物轉w未經 9 200845130 月曰片材的方式製作，惟若考量清潔度、 ’、可利用黏接樹 成形法製作較為理想。又，蓋體:容=的話，還是以真空 ABS、PVC等樹脂中選擇適#材;可從丙烯酸、 物附著，宜使用可防止靜電的材才二淮為了減少靜電所造成的異 體宜更於確認内部情況，容器本 f 盖體32谈合於容器本體31的周緣部上 =已以防止異物從外部侵入。又，嵌合形‘‘ 然後，谷态本體31以及蓋體32，如圖丨所示的 ί 136〇與短^^_14之間的連接部與長邊形成的 必須將該半徑上所補關弧形狀連接，此時， 雖然習知的防護薄膜組件收納容器也 接的實施例存在，但通常其半徑在5〜2(}二左狀連 隹中3成ϊγϊ ’可分散在扭曲時傳到外周長短邊連接部的 :。μ並防止该部分變成彎曲點。是故，扭曲時的變形量減 、真1中的ΑΑ剖面圖所示的，容器本體互相平行的2 Ϊ為時’外周部宜形成至少具有2段直立面的形 為么奴差的问度方向尺寸C或長度方向尺寸心 周部高度尺寸b的大小而適當設定，惟c大約IV的t ，右’ d大約在10〜3〇mm左右比較適當。該段差，只要設置 連2 g邊上就會有效果’惟最好還是沿外周圍全部 又置較佺。又，段差的段數，在圖i中的實施例是2段，但 也可以設置成3段等其他段數，只要配合周邊尺寸魏合夾具之 200845130 設計等因素決定即可。 該段差可整體性提高外周部的 U，:工在處理使用時變得比較容易用手抬 體絲體雜㈣灯，更具有纽不會突出 目2及圖2實施例中，频容器本_巾央面μ 狀的肋雜合，便缺—步提高容器的剛性 ii:例 1]明本發明的實施例’惟本發明並非僅限於此。 片材使Ξ :ΐΐ電(黑色胸股)製商品名:1] 以及’製作出如圖7所示形狀的容器本體71 ΪΓ:ΐ後二1長，。73、短邊74 _部位其與長邊If if „: 5 light bends, so in addition to deforming the transfer pattern, S keeps the reticle after the light is removed from the component; light. At this time, the light in the cover is affected by the printing. The foreign matter on the top will not be transferred to the vinegar _=film module, which is made of nitrocellulose with good light transmission, and ♦ styrene 4, which constitutes the rust of the protective film module, on the upper end of the frame of the protective film assembly, ^ The adhesive layer (separation part). , , + h and the release layer of the protective adhesive layer are ΐ: there is a thin, _ _ after the reticle, the closed air protective film component itself, but if the foreign body system It is attached to a foreign object. Therefore, it is difficult to prevent the surface of the reticle from being attached, and the height of the detachment of the detachment member itself is not required. The 200845130 is more strongly required to be used for storage and transportation. Specifically, it is required to prevent the electrostatic performance from being 'different/, and consisting of the material f having a small amount of rubbing' and forming a structure capable of preventing contact between the protective film sites as much as possible, and applying an external force. Protective film capable of preventing deformation The component storage container is usually manufactured by forming a acrylonitrile-butadiene-benzene diene in a co-formed manner, etc. By using these forming methods, the cans which adhere or dust the wick are less, and the integrally formed joints are seamless. Less concern, even if the shape of the item is complicated, it can be easily manufactured, excellent in productivity, low cost, etc. ^Guide coffee or printed substrate (4) Protective film assembly Sr::3:0:11, these containers pass through The thickness of the part where the thickness of the forming wall is changed into a part of the space is changed. Therefore, it is possible to use a protective film module for liquid crystals with a side length of more than 5 mm. The flow distance from a ground type 'f愧 is too long, which will cause the production t to be difficult to shoot out. The shape of the hole is attracted. (3) Make = with cover =, resin sheet, true form can not form thick wall, although easy to pass. The vacuum forming side bends the sheet of the same thickness to be strong, but it is basically only a rigid item. The clothing is only made, so the method is still difficult to produce high 6 200845130. Examples of such ribs are containers. For the main body, as exemplified in Patent Document 1 and the like, The ribs are complemented, as shown in Figure 4. Basically, the outer shape is mainly the χ-shaped member of the 44, 44b. 'However, the mutual intersection is 5, instead: 忐: ϊ 的 的 , , , , , , , , The (continuous portion) 49 has a very low rigidity in the twisting direction, and is twisted in a diagonal direction as shown in Fig. 5 to bend the opposing apexes. The ribs are formed by the forming method. , and: the Ministry has killed the effect, and it has become "rigid:: really, the existence of the ribs in the ribs will cause the effect of the ribs, and it will become the f-curve (4), making the deformation necessary. The ί method ensures sufficient rigidity, as shown in Patent Document 2, (/ although ^^^=7 to ensure rigidity. However, when using other reinforcing bodies, there are various disadvantages in use. In the case of Su Gu II, the increase in the weight and the increase in the weight i, in order to ensure sufficient rigidity, in almost all cases, the reinforcement body is heavier than the container body. , Dan = hand caused great inconvenience to the handling of bales, transport and other operations.重 曰 ' 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本It can make the vine membrane module storage/, so that the anti-4溥胲 component storage container does not need a reinforcing body, and only the 200845130 can have sufficient rigidity by the container body. [Patent Document 1] JP-A-2000-173887 [Patent Document Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. The container has a fine sheet of =, and, at a low cost, has sufficient rigidity to withstand the external force impact 2 of the storage, the roller, and the reinforcing film assembly of the reinforcing body.止 / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / I specializes in the prevention of 22 pieces of the face 'made by the resin sheet ς ^ body to 2, when viewed from the plane direction, and the length of the formation = outer circumference, = shape + into = 50 bribes over the length of the shirt When the connection between the side and the short side, and the arc in the direction of the circular opening of 40 mm or more are observed, the shape of the container body is at least two erected surfaces: Known, prior art effects] Sexuality is a rigid protective membrane module storage container for a container body that is twisted. This low-cost garment is lightweight and has high-rigidity. [Embodiment] 200845130 The present invention is applicable to a large-sized protective film module having a side of more than 5 mm, and is particularly effective. However, it is not limited to these. As long as the two-sheet-formed pellicle container storage container is used, the present invention can be applied even if it is only an ugly type container. Although small containers are rarely rigid, they can be reduced as long as they can be constructed in a step-by-step manner. As with large containers, they are lightweight and cost-effective. Further, the following is a description of the protective slabs of the present invention. FIG. 1 and FIG. 2 show the outline of the protective film assembly of the present invention, and FIG. 3 shows the protective film of the present invention (H). A perspective view of the overall structure of the storage barn. Further, Fig. 4 is a schematic explanatory view of a structure of a crying book 22, and a structure of Fig. 5, and Fig. 5 shows a modified form when the corner portion of the body is raised. Valley °. When the external force is applied to the twisting direction of the container body (Fig. 4), when the force raises the corner portion 47 upward (Fig. 5), the container body 44b is bent. At this time, 'I originally thought that the rib 43b should be against the "though = right: but actually found that the rib 43b * intersection 49 was cut off, and could not exert sufficient resistance. 邛a Moreover, Since the cross rib 43a and the diagonal 44b become almost the same as the 4ja itself, as shown in FIG. 5, it becomes a reference for deformation, and if the right portion _ portion 43a is removed, it will cause a twist, ^ In addition to the other, there will be a continuation of the body (four) face evil (four) no ^ = _ _ reduce the nature of the invention 'in order to improve the product of this point, the hair, in the comparative review read, Wei in (four) change department ^ ^ ^ shape Sexuality, especially for improving the rigidity of the outer peripheral portion, and the protective film assembly (not shown) is placed on the ίίΤ1 in the L, and is reclaimed by the dish 32. Then, the body and the volume are As shown in the figure), it is sealed or fixed, or it is made by means of a sheet of material that has not been smashed by 9 200845130. However, if the degree of cleanliness is considered, ', it can be made by the method of bonding tree forming. Also, the cover body: If it is Rong, it is still selected from the resin such as vacuum ABS or PVC; it can be attached from acrylic acid It is preferable to use a material that can prevent static electricity. In order to reduce the static electricity, it is preferable to confirm the internal condition. The container cover 32 is attached to the peripheral portion of the container body 31 to prevent foreign matter from entering from the outside. Further, the fitting shape '', then, the valley state body 31 and the lid body 32, as shown in FIG. 的, the connection between the ί 136 〇 and the short ^^_14 and the long side must be complemented by the radius In the case of the arc-shaped connection, at this time, although the conventional embodiment of the pellicle container storage container is also present, the radius is usually 5 to 2 (the two left-handed flails are 30% ϊγϊ' can be dispersed in the distortion It is transmitted to the outer peripheral short-side connecting part: μ and prevents the part from becoming a bending point. Therefore, the amount of deformation when twisting is reduced, and the 本体 section in the true 1 is shown, and the container bodies are parallel to each other. The outer peripheral portion should be appropriately formed by the size of the question direction dimension C or the length dimension of the core circumference height dimension b having at least two erect faces, but c is about IV of the IV, and the right 'd is about 10~3〇mm is more appropriate. The difference is as long as 2 There will be an effect on the edge of g. 'But it is better to set it all along the outer circumference. Also, the number of segments of the step is two in the embodiment of Figure i, but it can also be set to other segments such as 3 segments. It can be determined by factors such as the design of the surrounding size of the Weihe fixture 200845130. The difference can improve the U of the outer circumference as a whole, and it becomes easier to handle the body and body (four) lamps when handling. In the embodiment of FIG. 2 and the embodiment of FIG. 2, the ribs of the frequency container μ 央 , , , , 杂 杂 杂 提高 提高 提高 提高 提高 提高 提高 提高 提高 例 例 例 例 例 例 例 例 例 例 例 例 例 例 例 例 例 例 例 例 例It is not limited to this. The sheet is made of ΐΐ: ΐΐ (black breast) manufactured by the trade name: 1] and 'the container body 71 having the shape shown in Fig. 7 ΪΓ: ΐ 2 and 1 long. 73, short side 74 _ part and long side
C 外周邱的古it m。又，外周設置連續的段差，該尺寸為 15r^n。—38mm，段差的两度C = 2〇mm，向内長度d= 之防了將防護薄膜組件固定於該容器本體内，配合收納 的is 組件的位置將聚苯硫（pGlyphenylene sulflde; PPS )掣 及_製的插銷支撐部76用螺栓(未經圖^ 疋插銷75插人插銷支推部76中，以便受到支撐，並 在防濩溥馭組件77側面上的夾具孔（未經圖示）的構且 觸的面上安裝了用來防止發塵的環狀氟化橡 圖;^、緩衝構件DuPontElastomers (股）製商品名：Vit〇n](未經 二哉til在無塵室内用清淨的純水洗淨，實際將防護薄膜^ 載置於完成的容器本體上，並用固定插銷75固定。 11 200845130 個角落部水平11缝上，試著將容器本體的1 變形，°結果’容器本體雖然有數麵的扭曲 膜組件^7=£=匕7=，將固定插銷乃卸下，觀察被防護薄 後，該容器本體重量i 3.2kg1的夾具孔，並未發現任何污染。然 [實施例2] 利用iiijj例使用防止靜電(黑色)片材，並 了在容器本體8Γ中^1置的狀態會變成圖3那樣，除 以外，其他地方與實二j 起面度2〇職的肋部83、84 的形狀，應將1於署#产士 狀凡全相同。在此，注意該肋部 方向發揮抗效:卻》是:置點’且雖然朝扭曲 不會交叉互相靖的形狀。纟曲折的對驗上，而且各肋部間 淨，塵室崎淨的純水洗 人固=插銷支撐=^牛的固的定^本體上，再用插 本體it個 平固定盤上，試著朝上方猶微抬起 現任何變化。又，將:在谷為本體的表面上，並未發 固定插銷85所插入的夹^二觀察防護薄膜組件87之 本體重量為3.2kg。 亚未魏任何污染。然後，該容器 [比較例1] 的防;器：七^^^如圖”斤示形狀 冷，並實際將防護薄臈組㈣載置於完』;== 12 200845130 定插銷94固定。 施例綱’將該容器本體水平靜置後， 96，(ί, ^ 薄膜組件96的夾具孔將固定插鎖94拔出後，=二=J 插銷強力摩擦而產生很多即使在螢 i ς 物t=fr峨娜啦 與上述實施例丨、2、比較例丨同樣，利用直命 制 =6 ^形，防護薄敵件收納容器本體6;，並在該容$ ^上女衣固定插銷62以及插銷支撐部63。又， _ = I f r° 6；：：6 (i；C The ancient it m of the outer Qiu. Further, a continuous step is set on the outer circumference, and the size is 15 r^n. - 38mm, two degrees of step difference C = 2〇mm, the inward length d= prevents the pellicle assembly from being fixed in the container body, and the polystyrene (pGlyphenylene sulflde; PPS) is placed at the position of the contained is component The latch support portion 76 is bolted (not shown in the plug pin 76 to be supported, and the jig hole on the side of the anti-tamper assembly 77 (not shown) The annular fluorinated rubber sheet used to prevent dust generation is installed on the surface of the touch; the cushion member DuPontElastomers (trade name) is manufactured under the trade name: Vit〇n] (without the 哉 til cleaned in the clean room) The pure water is washed, and the protective film is actually placed on the finished container body and fixed by the fixing pin 75. 11 200845130 The corners of the corners are 11 stitched, and the container body 1 is deformed, and the result is 'container body Although there are several faces of the twisted film assembly ^7=£=匕7=, the fixed plug is removed, and after observing the protective thin, the container body weight i 3.2kg1 of the jig hole, no pollution is found. 2] Using iiijj to prevent the use of static (black) sheets, and The state of the body of the main body 8 is set to be as shown in Fig. 3, except for the shape of the ribs 83, 84 of the other places and the face of the real two, which should be 1 Here, note that the direction of the ribs is effective: but it is: "set" and although the twist does not cross each other's shape. The twists and turns of the test, and the ribs between the net, the dust chamber is clean Pure water wash people = plug support = ^ cow's solid fixed ^ body, then use the body to put it on a flat fixed plate, try to lift up any changes now upwards. Also, will: in the valley for the body On the surface, the weight of the body of the protective film assembly 87, which is not inserted into the fixing pin 85, is 3.2 kg. Any contamination of the sub-Wei Wei. Then, the container [Comparative Example 1] is protected; ^^ As shown in the figure, the shape is cold, and the protective thin-twist group (4) is actually placed in the end; == 12 200845130 The fixed pin 94 is fixed. The example of the case is that the container body is horizontally placed, 96, (ί , ^ The clamp hole of the film assembly 96 will be pulled out after the fixed latch 94 is pulled out, =========================================================== r峨娜啦 is the same as the above-mentioned embodiment 丨 2, the comparative example ,, using the direct life system = 6 ^ shape, protecting the thin enemy container storage container body 6; and the female clothing fixing pin 62 and the latch on the capacity $ ^ Support portion 63. Again, _ = I fr° 6;::6 (i;
樹脂製的插銷支擇部63、補強體固定具64 = fS 連結，完成容器本體。 及谷的本體61緊密 之後，在無塵室内用清淨的純水洗淨， 一 件^載置於完成，器本體上，再用固定插銷=:濩缚膜組 、本體的_ _ ==起置=平 ，定在容器本體表面上，並未發現任何^ 3版、、且件仍牢牢 J!!膜組件67的夾具孔將固定插銷62拔出？“室=2防 硯祭，發現夾具孔周邊仍然很清淨。 9至内用鹵素燈 然後，該容器本體重量為4.2kg。 [產業利用性] 剛性的大 若依本發明，則由於能將樹脂片材製成輕量且具備 13 200845130 型防護義組躲齡n且錢形步财能 方法，故能以低廉的成本大量生產大型防護 ^、ς 用防護薄膜組件的技術領域貢獻报大。 、、且件合為，對淨J 【圖式簡單說明】 器本體一實 圖1係表示本發明之防護薄膜組件收納容器 施例的概略説明圖。 °/、谷 圖 其容器本體的、變化實财ΐί ί之时賴岭收納容器 圖3係表示本發明之防護_組件_容雜體構造的立體 造的峰㈣容1紅1讀之肋部構 態的防護細組件收納容器其容器本體之變化形 容器喻納容器其 個實之防賴敝件ι·轉㉗本體的- mir之時薄戯件_抑其郎本體的- 圖 個實施例的概略説明圖 哭本=知使⑽部構造的防護細組件㈣容器a容 w本體的一個貫施例的概略説明圖。 ，、奋 【主要元件符號說明】 11防護薄膜組件收納容器本體 12防護薄膜組件載置台 13外周（長邊） 14外周（短邊） 14 200845130 a外周連接部之邊與長邊所形成的角度 b 外周部高度尺寸 c 段差的南度方向尺寸 d 段差的長度方向尺寸 A-A 剖面線 L外周連接部的邊長 21防護薄膜組件收納容器本體 22防護薄膜組件載置台 23外周（長邊） 24 外周（短邊） R外周連接部的半徑 31防護薄膜組件收納容器本體 32蓋體 33夾具 41防護薄膜組件收納容器本體 42防護薄膜組件載置台 43a、43b 肋部 44a、44b根據容器本體外形的對角線 45、46、47、48 容器本體角落部 49肋部的交叉點 61防護薄膜組件收納容器本體 62 防護薄膜組件固定銷 63插銷支撐部 64補強體固定具 65鋁合金製補強體（短） 66鋁製補強體（長） 67 防護薄膜組件 71防護薄膜組件收納容器本體 72防護薄膜組件載置台 15 200845130 73外周（長邊） 74 外周（短邊） 75 防護薄膜組件固定銷 76插銷支撐部 77防護薄膜組件 81防護薄膜組件收納容器本體 82防護薄膜組件載置台 83 肋部 84肋部 85 防護薄膜組件固定銷 86插銷支撐部 87防護薄膜組件 91防護薄膜組件收納容器本體 92防護薄膜組件載置台 93 肋部 94防護薄膜組件固定銷 95插銷支撐部 96 防護薄膜組件The resin-made plug retaining portion 63 and the reinforcing body fixture 64 = fS are connected to complete the container body. After the body 61 of the valley is tight, it is washed with clean pure water in the clean room, and one piece is placed on the finished body, and then the fixed pin =: 濩 膜 组, _ _ = = Set = flat, fixed on the surface of the container body, did not find any ^ 3 version, and the piece is still firmly J!! The jig hole of the film assembly 67 pulls out the fixing pin 62? "Room = 2 anti-sacrificial offering, it is found that the periphery of the jig hole is still very clean. 9 to the internal halogen lamp, then the weight of the container body is 4.2 kg. [Industrial Applicability] The rigidity of the large according to the present invention, due to the resin The sheet is made of lightweight and has the protection concept of 13 200845130, and the money-shaped step-financing method, so it can contribute to the large-scale production of large-scale protection and the use of protective film components at low cost. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic explanatory view showing an embodiment of a protective film unit storage container of the present invention. ΐ 赖 赖 赖 赖 收纳 收纳 收纳 图 图 图 图 图 图 图 图 图 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖The change-shaped container is a container of the real thing. The ι·转 27 body - mir time thin play piece _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Protective thin component (4) container a BRIEF DESCRIPTION OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE STRUCTURE OF THE SECURITY MEMBRANE ASSEMBLY CONTAINER Angle formed by the long side b Height dimension of the outer circumference c Degree of the south direction of the step difference d The length dimension of the section AA The length of the outer peripheral connection portion of the section line L 21 The protective film unit storage container body 22 The outer periphery of the protective film module mounting table 23 Long side) 24 outer circumference (short side) R radius of peripheral connection portion 31 pellicle pack storage container body 32 cover 33 jig 41 pellicle assembly storage container body 42 pellicle assembly mounting table 43a, 43b ribs 44a, 44b according to the container Diagonal lines 45, 46, 47, 48 of the body shape Corners of the container body corner portion 49 ribs 61 Protective film assembly storage container body 62 Protective film assembly fixing pin 63 Pin support portion 64 Reinforcing body fixing device 65 Aluminum alloy reinforcement Body (short) 66 aluminum reinforcement (long) 67 protective film assembly 71 protective film assembly storage container body 72 protective film Article mounting table 15 200845130 73 outer circumference (long side) 74 outer circumference (short side) 75 pellicle assembly fixing pin 76 pin support portion 77 pellicle assembly 81 pellicle assembly container body 82 pellicle assembly mounting table 83 rib 84 rib 85 Protective film assembly fixing pin 86 Pin support portion 87 Protective film assembly 91 Protective film assembly Storage container body 92 Protective film assembly Mounting table 93 Rib 94 Protective film assembly Fixing pin 95 Pin support portion 96 Protective film assembly
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