JP3727108B2 - Pellicle storage case with excellent openability - Google Patents
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- JP3727108B2 JP3727108B2 JP14315796A JP14315796A JP3727108B2 JP 3727108 B2 JP3727108 B2 JP 3727108B2 JP 14315796 A JP14315796 A JP 14315796A JP 14315796 A JP14315796 A JP 14315796A JP 3727108 B2 JP3727108 B2 JP 3727108B2
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
【０００１】
【発明の属する技術分野】
本発明はペリクル収納用ケースに関し、より詳細には、ペリクル収納用ケースからのペリクルの取り出し操作、特に自動開封装置による取り出し操作に於いて、ペリクルに損傷等何等の影響を与えることなく容易、確実、且つ迅速に操作できる開封性に優れたペリクル収納用ケースに関する。
【０００２】
【従来の技術】
従来、半導体集積回路の製造に於けるフォトリソグラフィ工程では、マスク上に塵埃等が付着しこれが半導体ウェハに投影され不良品となるのを防ぐため、マスクパターンを囲う大きさの枠体に透明な薄膜を張設したペリクルを使用する。
【０００３】
ペリクルは、通常、使用に供されるまで、塵埃等が付着したり損傷したりする事のないようにペリクル収納用ケースに入れられて保管、運搬される。このペリクル収納用ケースとしては例えば図９に示すように、中央部にペリクルが位置決めして載置される載置面を有するペリクル収納用ケース本体と、該ペリクル収納用ケース本体上に被せて装着されペリクル枠の周縁を押える押え部を形成したペリクル収容部を有する上蓋とよりなるもの、が一般に使用されている。
【０００４】
ペリクルの使用に際しては、このペリクル収納用ケースを開封し中に収容されているペリクルを取り出し、マスク上に装着するが、近年、省力化と、迅速化を目的として、このケース開封操作は自動化される傾向にあり、自動開封装置による開封が一般的となってきている。
【０００５】
この装置による自動開封の場合にはペリクル収納用ケースの上蓋を把持するためにペリクル収納用ケースを該装置に備えられた治具等により押さえつけることになる。このため、ペリクル収納用ケースの内容積は縮小され、その分だけ内部に封入されていた気体が外部に放出される。
【０００６】
ペリクル収納用ケースは、塵埃混入を防止するために気密性が良好に作られており、ペリクル収納用ケースの上蓋を治具により持ち上げて開封しようとすると、縮小されたペリクル収納用ケースの内容積が元の状態に戻ろうとして、ペリクル収納用ケースの内部が若干減圧状態となるため、該上蓋と共にペリクル収納用ケース本体もそのまま持ち上げられてしまい、ペリクル収納用ケースの蓋取り工程が完了しなかったり、持ち上げられた後に減圧が開放されたりしてペリクル及びペリクル収納用ケースが落下し、内部に収納されたペリクルの位置がずれたり、場合によってはペリクル膜が損傷したりすることもあった。
【０００７】
【発明が解決しようとする課題】
従って、本発明は保管、運搬中等に於ける気密性能を維持しながらペリクル収納用ケースの開封操作、特に自動開封装置を用いた自動開封操作に際して、ペリクル収納用ケース本体の上蓋への付着が回避され、上蓋の取り外しがスムーズに遂行され、ペリクルの位置ずれやペリクル膜の損傷がない、ケース開封性の良好なペリクル収納用ケースを提供することを目的とするものである。
【０００８】
【問題点を解決するための手段】
本発明によれば、枠体にペリクル膜を張設したペリクルが位置決めして載置される載置面を有するペリクル収納用ケース本体と、該ペリクル収納用ケース本体に被せて装着されペリクルを内部に固定収納出来る様に形成されたペリクル収容部を有する上蓋と、よりなるペリクル収納用ケースに於いて、該上蓋の下面側にペリクル収納用ケースを開封する際の減圧を開放するための切込みが少なくとも１ヶ所設けられ、且つ該切込みの一方の端部が該ペリクル収容部の立ち上がり部に接して位置し、もう一方の端部が、該上蓋の外周縁から１ｍｍ以上８０ｍｍ未満内側であり、且つペリクル収容部の内部領域を除く領域に位置していることを特徴とする、ペリクル収納用ケースを開封する際の減圧を開放するための切込みを有するペリクル収納用ケースが提供される。
【０００９】
ここでペリクル収容部とは、上蓋全体からペリクル収納用ケース本体に接する外周側を除いた部分を言い、ペリクルを固定収容するペリクル収容部の内部領域と、外周縁に連続する部分から急激に立ち上がる立ち上がり部とを含む。ペリクル収容部の内部領域とはペリクル収容部からペリクル収容部の立ち上がり部を除いた領域を指し、ペリクル収容部の立ち上がり部とはペリクル収容部からペリクル収容部の内部領域を除いた部位を指す。
切込みの一方の端部がペリクル収容部の立ち上がり部に接するとは、ペリクル収納用ケース本体に上蓋を被せた状態で、ペリクル収納用ケース本体と切込みとが形成する空隙がペリクル収容部の内部領域の空間と連通していることを意味する。
【００１０】
ペリクル収納用ケースを自動開封装置により開封して自動操作で内部に収容されているペリクルを取り出す場合、一般には、まず自動開封装置の治具によりペリクル収納用ケースの上蓋のペリクル収容部を押圧して該ペリクル収容部を把持し、その後上蓋を持ち上げペリクルが載置されたペリクル収納用ケース本体から上蓋を取り除き、ペリクルを取り出す。
【００１１】
この自動開封操作に於ける、治具により上蓋を把持する際に生じる減圧状態を解消するには、ペリクル収納用ケースに減圧を開放する開孔を設けることが考えられるが、ペリクル収容部に開孔を設けたのでは該開孔から保管時や運搬の際等に塵埃が内部に侵入するためペリクル収納用ケース本来の機能が達成出来ない。又、減圧の開放は治具が上蓋を持ち上げる時にタイミング良く機能しなければならない。
【００１２】
本発明では、これを、その一方の端部が上蓋のペリクル収容部の立ち上がり部に接し、もう一方の端部が上蓋の外周縁から１ｍｍ以上８０ｍｍ未満内側に位置する切込みを設けることにより達成したものである。
【００１３】
特に、ペリクル収納用ケースの外周縁が多角形又はほぼ多角形の形状を有し、ペリクル収容部が長方形の場合には、ペリクル収納用ケースを開封する際の減圧開放用の切込みを上蓋のペリクル収容部の立ち上がり部の隅部又はその近傍の立ち上がり部に接する位置から、該隅部から最短距離にある外周縁の隅部近傍に達する特定範囲の位置、即ち、上蓋の外周縁から１ｍｍ以上内側で、且つ、該外周縁の隅部で交わる２辺に平行に各辺からそれぞれ１ｍｍ内側に２つの直線を引いたとき、該２つの直線の交点からの距離が７９ｍｍ未満の位置、に設けることが望ましく、この様な位置、形状に切込みを設けることによりペリクル収納用ケースを自動開封装置により開封して自動操作で内部に収容されているペリクルを取り出す場合、治具の押圧により生じるペリクル収容部内部の減圧状態をタイミング良く解除することが出来る。
【００１４】
ペリクル収容部の立ち上がり部の隅部と、該隅部から最短距離にある外周縁の隅部とを結ぶ直線を中心とした近傍領域に切込みを設けるのが最も望ましい。
【００１５】
ペリクル収容部の立ち上がり部の辺の中点近傍と、該中点近傍から最短距離にある外周縁の辺の中点近傍との間に切込みを設けた場合は、自動開封装置による開封操作に於いて減圧開放のタイミングがやや遅れ、減圧開放効果がやや劣る。
【００１６】
又、ペリクル収納用ケースの一部にはその外周縁の形状が円形又は楕円形のものもあるが、この場合には減圧開放用の切込みは、その一方の端部がペリクル収容部の立ち上がり部に接して位置し、もう一方の端部が、該一方の端部から最短距離にある上蓋の外周縁から１ｍｍ以上８０ｍｍ未満内側でありかつペリクル収容部の内部領域を除く領域に設けられる。
【００１７】
【発明の実施の形態】
以下本発明を添付図面に基づき詳細に説明する。図１は上蓋上に形成される本発明の切込みの位置関係を説明するための模式平面図であって、この図の場合は、上蓋の外周縁（１）の形状は長方形であり、４個の隅部を有している。
【００１８】
本発明では、減圧開放用の切込みは、図１の場合、符号３で示される上蓋のペリクル収容部の立ち上がり部を一方の端部とし、符号５と６とで示される２つの破線で囲まれた領域（ A ）内にもう一方の端部が位置するように形成される。
【００１９】
図２は上蓋の外周縁（１）の形状が隅部が丸められた長方形の場合の、切込みのもう一方の端部の設置領域（ A ）を示した図である。
【００２０】
本発明に於いて、上蓋の外周縁（１）の形状が４個以上の隅部を有する多角形であり、且つペリクル収容部の立ち上がり部の形状が４角形の場合は、図３、図４に示すように切込みの一方の端部は該ペリクル収容部の立ち上がり部の隅部又はその近傍の立ち上がり部に接して位置させ、もう一方の端部は、上蓋の外周縁から１ｍｍ以上、より好ましくは２ｍｍ以上内側で、且つ該一方の端部から最も近い上蓋の外周縁の隅部において交わる２辺に平行に、各辺からそれぞれ１ｍｍ内側に引いた２直線（９、９’）とその交点（１０）を中心点とする半径７９ｍｍ、より好ましくは半径６０ｍｍ、の円弧とで囲まれた領域（A’）内に位置させるのが、減圧を開放する機能の上からより好ましい。ここで図３は上蓋の外周縁の形状が８角形で切込みの形状がほぼ長方形の場合、図４は上蓋の外周縁の形状が長方形で切込みの形状も長方形の場合を示している。
【００２１】
上記の形状の上蓋の場合、特に好ましい切込みは、図５に示したように切込みの一方の端部がペリクル収容部の立ち上がり部の隅部に接し、もう一方の端部が前記２直線（９、９’）の交点（１０）の近傍に位置するように形成されたものである。
【００２２】
上記に於いて、外周縁の隅部が丸められた形状の上蓋で、前記交点（１０）が上蓋の外に位置する場合は、切込みのもう一方の端部は該交点（１０）から最短距離にある外周縁から１ｍｍ以上内側に位置させる。一例を図６に例示する。
【００２３】
図７は、上蓋の外周縁、及びペリクル収容部の立ち上がり部が共にほぼ正方形の場合を例示した図である。
【００２４】
又、ペリクル収納用ケースには、外周縁の形状が円又は楕円形のものがあるが、この様なペリクル収納用ケースの場合は、切込みは、例えば図８に示すように、一方の端部がペリクル収容部の立ち上がり部に接し、もう一方の端部が該一方の端部から最短距離にある上蓋の外周縁から１ｍｍ以上８０ｍｍ未満内側であり且つペリクル収容部の内部領域を除く領域に位置する様に形成される。
【００２５】
本発明に於いて、減圧開放用の切込みの面積は、特に限定的ではないが、その減圧開放機能とペリクル収納用ケースの上蓋の強度特性、密封性能等とのバランスから、通常１００ｍｍ２乃至２５００ｍｍ２、好ましくは２２５ｍｍ２乃至１０００ｍｍ２の範囲である。
【００２６】
切込みの平面形上は、正方形若しくは長方形等の4角形、隅部が丸められた4角形、又は円若しくは楕円等の任意の形状で良く特に限定されるものではないが、正方形若しくは長方形、又は隅部が丸められた正方形若しくは隅が丸められた長方形の形状に形成されることが好ましい。
【００２７】
特に、切込みが正方形又は長方形の場合、該切込みの両端部の間隔が、５ｍｍ以上１００ｍｍ未満、より好ましくは１０ｍｍ以上５０ｍｍ未満、更に好ましくは１５ｍｍ以上２０ｍｍ未満、であることが減圧開放機能の観点からより好ましい。
【００２８】
本発明に於ける切込みの、上蓋の厚さ方向への断面の形状、角度は特に限定されるものではないが、ペリクル収納用ケースの内部への異物混入防止やペリクル収納用ケースの成型性等の観点から、一般に６０乃至８０度、好ましくは６５乃至７５度の角度に形成されることが好ましい。
【００２９】
【実施例】
ほぼ正方形の外周縁と、立ち上がり部が１１０ｍｍ×１１０ｍｍのペリクル収容部を有する図７に示した上蓋形状を有するペリクル収納用ケースを用い、この上蓋に、辺の長さ１５ｍｍの一方の端部の中点がペリクル収容部の立ち上がり部の隅部に接し、辺の長さ１５ｍｍのもう一方の端部の中点が、図７に示した交点（１０）からの距離が４０ｍｍ、且つ図７の２直線（９、９’）から各々等距離離れた上蓋上に位置する様に、深さ３ｍｍの長方形の切込みを設け、これをペリクル収納用ケース本体に被せた（実施例１）。
【００３０】
このペリクル収納用ケースの上蓋のペリクル収容部の中心付近に上から２０ｍｍΦの治具により、６ｋｇ／ｃｍ２の押圧力で、３秒間押さえつけ、押圧解除１秒後、上蓋を持ち上げた。この時、ペリクル収納用ケース本体は全く持ち上がらず、良好な開封操作が可能であった。
【００３１】
切込みの両端部の辺の長さを１５ｍｍから１０ｍｍに替えた以外は前記実施例１と同様の位置に切込みを設け、実施例１と同様に処理した（実施例２）。結果を表１に示す。
【００３２】
更に、実施例１と同じペリクル収納用ケースの上蓋に、両端部の辺の長さを１５ｍｍとし、その一方の端部をペリクル収容部の立ち上がり部の辺の中点から外側に１０ｍｍ離れて位置させ、そこから上蓋の外周縁の方向に延び、且つ前記交点（１０）から外周縁に平行に引いた直線からの距離が１０ｍｍの位置にもう一方の端部を位置させた長方形状の切込みを上蓋の下面側に設けたペリクル収納用ケース（比較例１）を前記実施例１と同様に処理し、上蓋開封時の状態を観察した。結果を表１に示す。
【００３３】
又更に、切込みの両端部の辺の長さを１５ｍｍから１０ｍｍに替えた以外は比較例１と同様の位置に切込みを設け、実施例１と同様に処理し、上蓋開封時の状態を観察した（比較例２）。結果を表１に示す。
表１
【００３４】
【発明の効果】
本発明は、上記のように、ペリクル収納用ケースの上蓋の特定位置に、開封する際の減圧開放用の切込みが設けられていることにより、ペリクル収納用ケースを自動開封装置により自動開封する際、タイミング良く減圧が開放され、内部に収容されているペリクルに損傷を与えることなく、且つ自動開封操作をスムーズに遂行することが出来る。
【図面の簡単な説明】
【図１】 本発明のペリクル収納用ケースの、切込みの設けられる上蓋上の領域を模式的に示した図。
【図２】 本発明の他の形状のペリクル収納用ケースの、切込みの設けられる上蓋上の領域を模式的に示した図。
【図３】 ペリクル収納用ケースが多角形である場合の、切込みの好適な位置を示した図。
【図４】 ペリクル収納用ケースが４角形である場合の、切込みの好適な位置を示した図。
【図５】 本発明のペリクル収納用ケースの、１態様を示した図。
【図６】 本発明のペリクル収納用ケースの、他の態様を示した図。
【図７】 本発明のペリクル収納用ケースの、別の態様を示した図。
【図８】 楕円形の外周縁形状を有するペリクル収納用ケースの場合の、本発明の切込みの設けられる位置を例示した図。
【図９】 従来のペリクル収納用ケースの形状の１例を示した図。
【符号の説明】
１ 外周縁
２ ペリクル収容部
３ ペリクル収容部の立ち上がり部
４ 切込み
５ 外周縁から１ｍｍ内側を示す破線
６ 外周縁から８０ｍｍ内側を示す破線
７ 切込みのもう一方の端部が位置する領域（A）
８ 切込みのもう一方の端部が位置する、より好適な領域（A ’）
９、９’ 外周縁に平行に、外周縁からそれぞれ１ｍｍ内側に引いた２つの直線
１０ ２つの直線（９、９’）の交点[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a pellicle accommodating case, and more particularly, taking out operation of the pellicle from the pellicle accommodating case, especially at the take-out operation by the automatic opening device, easily without affecting what such damage or the like to the pellicle, ensure relates and quickly excellent pellicle accommodating case opening sealing property that can be operated.
[0002]
[Prior art]
Conventionally, in in a photolithography process manufacturing a semiconductor integrated circuit, to prevent the dust or the like Re deposited Sico on the mask becomes defective projected onto the semiconductor wafer, the size of the frame surrounding the mask pattern Use a pellicle with a transparent thin film on the body.
[0003]
The pellicle is usually until ready for use, storage encased in the pellicle accommodating case so as not to dust or the like or damaged adhered is conveyed. As shown in the pellicle for housing as the case for example FIG. 9, and the pellicle accommodating case body having a mounting surface pellicle in the central portion is placed in position, it is put onto the pellicle accommodating case body mounting It is made more an upper lid having a pellicle housing portion forming a pressing portion for pressing the periphery of the pellicle frame, but are commonly used.
[0004]
When using the pellicle, the pellicle storage case is opened and the pellicle stored in the pellicle is taken out and mounted on the mask. However, in recent years, this case opening operation has been automated for the purpose of saving labor and speed. Opening with an automatic opening device has become common.
[0005]
It will be pressed by a jig or the like provided in the device pellicle accommodating case for gripping the lid on the pellicle accommodating case in the case of automatic opening of this device. For this reason, the internal volume of the pellicle storage case is reduced, and the gas sealed inside is released to the outside accordingly.
[0006]
Pellicle accommodating case is airtight made good in order to prevent dust contamination and the upper lid of the pellicle accommodating case attempts to open sealed by lifting the jig, of the reduced small pellicle accommodating case as wax back to the internal volume the original state, the inside of the pellicle accommodating case is slightly reduced pressure state, the pellicle accommodating case body together with the upper cover even cause lifted it, cover-up step of the pellicle accommodating case is completed or not, that vacuum after being lifted is or are opened pellicle and a pellicle for housing case falls, the position of the pellicle housed within Ri is not, the pellicle film is damaged in some cases There was also.
[0007]
[Problems to be solved by the invention]
Accordingly, the present invention is stored, the adhesion of the in airtightness to transport secondary maintain while opening operation of the pellicle accommodating case, in particular, automatic opening operation using an automatic opening device, the lid on the pellicle accommodating case body There is avoided, removal of the upper lid is performed smoothly, there is no damage to the positional deviation or the pellicle film of the pellicle, it is an object to provide a casing opening seal of good pellicle accommodating case.
[0008]
[Means for solving problems]
According to the present invention, a pellicle accommodating case body having a mounting surface on which the pellicle was stretched a pellicle membrane to the frame is mounted by positioning, is mounted over the said pellicle accommodating case body pellicle a top cover having a pellicle receiving portion formed so as be fixed housed in the, in the more becomes the pellicle accommodating case, for opening the vacuum at the time of opening the case for pellicle housed on the lower surface of the upper lid cutting body is provided at least one place, and one end the cut Mino is located against the rising part of the pellicle receiving portion, the other end, 1 mm from the outer peripheral edge of the upper lid above 80mm less than is the inner, and is characterized in that located in the region other than the interior region of the pellicle receiving portion, the pellicle housing having a cutting body for opening the vacuum at the time of opening the case for pellicle housing A case is provided.
[0009]
Here, the pellicle housing portion refers to a portion excluding the outer peripheral side that contacts the pellicle housing case body from the entire upper lid, and suddenly rises from the inner region of the pellicle housing portion for fixedly housing the pellicle and the portion continuous to the outer periphery. And a rising part. The internal region of the pellicle housing portion refers to a region obtained by removing the rising portion of the pellicle housing portion from the pellicle housing portion, and the rising portion of the pellicle housing portion refers to a portion of the pellicle housing portion excluding the internal region of the pellicle housing portion.
One end of the incision is in contact with the rising portion of the pellicle housing part. The gap formed by the pellicle housing case body and the notch in the state where the pellicle housing case body is covered is an internal region of the pellicle housing part. It means communicating with the space.
[0010]
When taking out the pellicle the pellicle accommodating case it is opened by the automatic opening device is housed inside the automatic operation, in general, first presses the pellicle receiving portion of the upper lid of the pellicle accommodating case by a jig of the automatic opening device Te grips the pellicle accommodating portion, remove the upper lid from pellicle accommodating case body pellicle is placed to lift the lid after its take out the pellicle.
[0011]
In this automatic opening operation, to eliminate the vacuum state that occurs when gripping the by Ri lid jig, it is conceivable to provide an opening for releasing a reduced pressure in the pellicle accommodating case, the pellicle than it is provided an opening in the housing part original function case pellicle housing for dust during such storage or transported or from the open hole entering the interior can not be achieved. Moreover, decompression of open jig must timely functioning when Ru lift the top cover.
[0012]
In the present invention, this one end thereof is against the rising part of the pellicle yield capacity of the upper lid, the cutting body to the other end portion is located inside than at least 1 mm 80mm from the outer peripheral edge of the upper cover This is achieved by providing.
[0013]
In particular, the outer peripheral edge of the pellicle accommodating case has a polygonal or substantially polygonal shape, when the pellicle receiving portion of the rectangular, the cutting body for vacuum opening when opening the case for pellicle housing from a position in contact with the rising portion of the corner or near the rising portion of the pellicle receiving portion of the upper cover, the position of the specific range that reaches the corner portion near the outer peripheral edge at the shortest distance from the 該隅portion, i.e., from the outer peripheral edge of the upper cover in at least 1 mm inside, and, when minus two straight on a flat row two sides that Majiwa at the corners of the outer periphery, each 1 mm inward from each side, the distance from the intersection of the two straight lines 79 position of less than mm, it is desirable to provide a, such a position, if the pellicle accommodating case by providing a cutting body in the shape it is opened by the automatic opening device is taken out of the pellicle contained therein in automatic operation The jig It is possible to release timely vacuum state inside the pellicle receiving portion caused by pressure.
[0014]
A corner of the rising portion of the pellicle accommodating portion, for providing a cut himself in the neighboring region around the straight line connecting the corner portion of the outer peripheral edge at the shortest distance is most desirable from the該隅unit.
[0015]
The midpoint vicinity of the side of the rising portion of the pellicle accommodating portion, the case of providing the cut himself in between near middle point between the middle point near the outer periphery side in the shortest distance, opened steering by automatic opening device In the operation, the decompression release timing is slightly delayed, and the decompression release effect is slightly inferior.
[0016]
Further, a part of the pellicle accommodating case the shape of the outer peripheral edge there is also a circular or elliptical, Hiroyoshi cutting the pressure-reducing opening in this case, its one end of the pellicle receiving portion positioned in contact with the rising portion, the other end portion is provided in a region excluding the inner region of the outer peripheral edge from a 80mm less or more inside 1mm and pellicle accommodating portion of the upper lid in the shortest distance from one end the It is done.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
The present invention will be described based-out in details in the attached drawings. 1 I schematic plan view der for explaining the cutting Mino positional relationship of the present invention formed on the upper lid, in the case of this figure, the shape of the outer peripheral edge of the upper lid (1) is Ah rectangular And has four corners.
[0018]
In the present invention, Hiroyoshi cutting for vacuum opening, in the case of FIG. 1, and the rising portion of the pellicle receiving portion of the upper cover, indicated at 3 and one end, with two broken lines indicated by reference numeral 5 and 6 the other end portion is formed so as to be positioned in a region surrounded by (a).
[0019]
Figure 2 is a diagram shape shown in the case of rectangular corners rounded, set depositing area of the other end portion of the cut (A) is the outer peripheral edge of the upper lid (1).
[0020]
In the present invention, when the shape of the outer peripheral edge (1) of the upper lid is a polygon having four or more corners, and the shape of the rising part of the pellicle housing part is a quadrangle, FIGS. one end cut Mino as shown in the is positioned in contact with the rising portion of the corner or near the rising portion of the pellicle accommodating portion, the other end, 1 mm from the outer peripheral edge of the upper cover or more, more preferably 2mm or more on the inside, the flat row two sides intersect at the corners of the outer peripheral edge of the nearest upper lid from且one said one end, two lines drawn 1mm inward from each side (9 , 9 ') and a radius 79 mm to the intersection (10) and the center point, more preferably a radius 60 mm, an arc and in a region surrounded by the (a' that is positioned within) the function of opening the vacuum More preferable from above. Here, FIG. 3 shows a case where the shape of the outer periphery of the upper lid is octagonal and the cut shape is substantially rectangular, and FIG. 4 shows a case where the shape of the outer periphery of the upper lid is rectangular and the shape of the cut is also rectangular.
[0021]
For the upper lid of the shape described above, Hiroyoshi particularly preferred cut, the end of one cut Mino as shown in FIG. 5 is in contact with the corner portion of the rising portion of the pellicle receiving portion, the other end and it is formed so as to be located in the vicinity of the intersection (10) of the two straight lines (9, 9 ').
[0022]
In the above, in the top cover shape corners of the outer peripheral edge is rounded, when the intersection (10) is located outside of the upper cover, the shortest distance other end of the cut from the intersection point (10) 1 mm or more from the outer periphery. An example is illustrated in FIG.
[0023]
Figure 7 is a diagram rising part are both exemplified case of substantially square outer periphery, and the pellicle accommodating portion of the upper cover.
[0024]
Further, the pellicle accommodating case, although the shape of the outer peripheral edge there is a circle or an oval, in the case of such a pellicle accommodating case, cutting optic lobe, for example, as shown in FIG. 8, of one end Gape trickle accommodating portion of the contact with the rising portion, excluding the inner area of the outer peripheral edge from a 80mm less or more inside 1mm and pellicle accommodating portion of the top cover with the other end to the shortest distance from one end the It is formed so as to be located in the region .
[0025]
In the present invention, cut Mino area for vacuum opening is not particularly limited, the strength properties of the upper lid of the vacuum release function and the pellicle accommodating case, balance or al the sealing performance and the like, usually It is in the range of 100 mm 2 to 2500 mm 2 , preferably 225 mm 2 to 1000 mm 2 .
[0026]
Cutting Mino plane shape, quadrangle such as square or rectangular shapes, but not particularly limited may be arbitrary shape quadrangle or circle or ellipse corners rounded, square or rectangular or corners are preferably formed in a rectangular shape with rounded rounded square or corners.
[0027]
In particular, when cutting only is square or rectangular, the interval of the ends of該切inclusive is less than 5mm above 100 mm, more preferably less than 50mm or more 10 mm, more preferably less than 20mm or more 15 mm, it is a reduced pressure release function is More preferable from the viewpoint.
[0028]
Of in the incision to the present invention, the shape of the cross-sectional surface in the thickness direction of the top cover, but the angle is not particularly limited, formation type tamper-resistant or pellicle accommodating case to the inside of the pellicle accommodating case From the viewpoint of properties and the like, it is generally preferable to form at an angle of 60 to 80 degrees, preferably 65 to 75 degrees.
[0029]
【Example】
A pellicle storage case having a top lid shape shown in FIG. 7 having a substantially square outer periphery and a pellicle storage portion having a rising portion of 110 mm × 110 mm is used, and one end portion having a side length of 15 mm is used on the upper cover. midpoint is in contact with the corner portion of the rising portion of the pellicle receiving portion, the midpoint of the other end of the length 15mm sides, the distance from the intersection point (10) shown in FIG. 7 40 mm, and in FIG. 7 in the two straight lines (9, 9 ') as you position on each equidistant apart top cover from a rectangular cut depth 3mm provided, which was placed over the pellicle for housing the case body (example 1).
[0030]
The jig 20mmΦ from top to near the center of the pellicle receiving portion of the lid on this pellicle accommodating case, the pressing force of 6 kg / cm 2, pressed for 3 seconds, after the pressure release one second, lifted the top cover. At this time, the pellicle storage case main body did not lift up at all, and a satisfactory opening operation was possible.
[0031]
Except for changing the length of the cut Mino both end portions of the side from 15mm to 10mm are cut provided at the same position as in Example 1 was treated in the same manner as in Example 1 (Example 2). The results are shown in Table 1.
[0032]
Furthermore, the upper cover of the same pellicle accommodating case as in Example 1, the length of the sides of both end portions and 15 mm, away 10mm its one end from the midpoint of the side of the rising portion of the pellicle yield capacity portion outwardly is positioned, and from there extends in the direction of the outer peripheral edge of the upper lid, and the intersection point (10) from the distance from a line drawn on the flat row in the outer peripheral edge rectangular which positions the other end to the position of 10mm the pellicle accommodating case provided with a cutting body on the lower surface side of the upper cover (Comparative example 1) was treated in the same manner as in example 1, was observed a state when the top cover opened. The results are shown in Table 1.
[0033]
Still further, except for changing the length of the cut Mino both end portions of the side from 15mm to 10mm is provided a cut at the same position as in Comparative Example 1 was processed as in Example 1, the state at the time the top cover opened Observed (Comparative Example 2 ). The results are shown in Table 1.
Table 1
[0034]
【The invention's effect】
The present invention, as described above, automatic opening at a specific position of the upper cover of the pellicle accommodating case, by being provided with notches only for vacuum opening in the event of opening, the case for pellicle housing by an automatic opening device In this case, the decompression is released in a timely manner, and the automatic opening operation can be smoothly performed without damaging the pellicle accommodated therein.
[Brief description of the drawings]
[1] pellicle accommodating case according to the present invention, FIG. The realm of the upper lid provided with notches only shown schematically.
[2] Other shapes of the pellicle accommodating case according to the present invention, FIG. The realm of the upper lid provided with notches only shown schematically.
[3] when the pellicle accommodating case has a polygonal shape, shows a preferred position of the cutting body.
[Figure 4] when the pellicle accommodating case is square, shows the preferred position of the cutting body.
[Figure 5] pellicle accommodating case according to the present invention, illustrates one embodiment.
[6] of the pellicle accommodating case according to the present invention, illustrates another aspect.
[Figure 7] pellicle accommodating case according to the present invention, illustrates another aspect.
[8] in the case of a pellicle accommodating case having an oval outer peripheral edge shape, illustrated FIG position provided the cut only of the present invention.
FIG. 9 is a diagram showing an example of the shape of a conventional pellicle storage case.
[Explanation of symbols]
Rising portion of the first outer peripheral edge 2 pellicle yield capacity portion 3 pellicle accommodating portion
4 cut seen
5 Broken line indicating 1 mm inside from the outer periphery
6 Broken line showing 80mm inside from outer periphery
7 cut Mino other regions one end portion is positioned (A)
8 cutting Mino other end portion is positioned, more preferred region (A ')
9, 9 'parallel to the outer peripheral edge, the two straight line drawn from the outer periphery to 1mm inside areas
10 Intersection of two straight lines (9, 9 ')
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14315796A JP3727108B2 (en) | 1996-06-05 | 1996-06-05 | Pellicle storage case with excellent openability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14315796A JP3727108B2 (en) | 1996-06-05 | 1996-06-05 | Pellicle storage case with excellent openability |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09325471A JPH09325471A (en) | 1997-12-16 |
| JP3727108B2 true JP3727108B2 (en) | 2005-12-14 |
Family
ID=15332253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14315796A Expired - Fee Related JP3727108B2 (en) | 1996-06-05 | 1996-06-05 | Pellicle storage case with excellent openability |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3727108B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4955449B2 (en) * | 2007-05-10 | 2012-06-20 | 信越化学工業株式会社 | Pellicle storage container |
-
1996
- 1996-06-05 JP JP14315796A patent/JP3727108B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09325471A (en) | 1997-12-16 |
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