200819363 九、發明說明： 【發明所屬之技術領域】 本發明關於包裝用缓衝體及包裝方法，其以在製造半導體裝 置、印刷基板或液晶顯示器等時作為除塵器使用之防護薄膜組 件；尤其以供作液晶顯示器製造的大型防護薄膜組件為對象。 【先前技術】 於LSI等半導體裝置或液晶顯示器等的製造中，係將光線照 射到半導體晶圓或液晶用之素玻璃，以製作圖案。鋏而，者此 ^用?罩或初縮遮罩（以下僅稱光罩）上附著粉塵I由ς該粉 塵使光線遮蔽，或使其折曲，於是發生所轉印之圖案受損的問題。 =此，該等作業通常在無塵室内進行；但即便如此，欲將光 罩、^保持潔淨，實有其困難。從而，就於光罩表面去 言，業者採用貼附防護薄膜組件之方法。九卓表面去除4塵而 刺由於異物並非直脑著於光罩之表面上，_著在防 ίίί ft，因此進行侧技術時，若能將焦點向光罩上的^ 護薄膜組件上之異物不會影響到轉印的狀態。 所开；、夕丄在將防§㈣膜組件貼附到光罩以後，對於異物從盆等 附著ίίί，空間外部往内部人侵，具有防止效果。但是當^物 件本身’且其位於密閉空間的内部時，欲防： 呉物對先罩表面之附著，實有其_。 I技 用在Ξΐ=護_組件本身要求具高料度，係自不待言；使 持其“'ϊί防護_組件的輸送容器亦強烈要求具備可維 舉例送過程中降低的原因而言，可 產生粉塵；防^薄膜組=、、’内^防護薄膜組件殼體相接觸而 因I使#膜組件殼體之變形，使異物入侵等。 吏用於防護薄膜組件之運送的輸送容器，應具有緩衝 6 200819363 2動防ϊϊΐ組:卜納其之防護薄膜組件殼體不會受到 構造} 求 防止勝賴件殼體產生外力的 運送巧防護_組件之防護薄膜組件殼體之 :®4所示，在配置於輸送容器15底面之平 、是衝體11上，載置防護薄膜組件殼體12。 輪送過程中的3 H頂面用緩衝體14，係屬當然。然而， ίϊΐ 擊仍主要域面的緩衝體η所吸收。 如有業者採用防牛殼體收納在同一包裝時，例 防護薄膜緩ί體採用平底的凹陷形狀，且比200819363 IX. The present invention relates to a cushioning body for packaging and a packaging method thereof, which are used as a protective film assembly for use as a dust remover in the manufacture of a semiconductor device, a printed substrate, a liquid crystal display or the like; It is targeted at large protective film modules for the manufacture of liquid crystal displays. [Prior Art] In the manufacture of a semiconductor device such as an LSI or a liquid crystal display or the like, light is irradiated onto a semiconductor wafer or a glass for liquid crystal to form a pattern.铗 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , . =This, these operations are usually carried out in a clean room; but even so, it is difficult to keep the hood and the korea clean. Thus, on the surface of the reticle, the manufacturer uses a method of attaching a protective film module. Nine Zhuo surface removes 4 dust and stabs because the foreign matter is not straight on the surface of the reticle, and it is in the anti- ίί ft, so if you can carry out the side technology, if you can focus the foreign matter on the film assembly on the mask Does not affect the state of the transfer. The 丄 丄 丄 丄 丄 丄 § § 四 四 四 四 四 四 四 四 § § § § § 四 四 四 § § § § § § § § § § § § § § § § § § § § However, when the object itself is 'and it is located inside the confined space, it is intended to prevent: the attachment of the object to the surface of the hood is actually _. I use it in the Ξΐ=protection _ component itself requires a high degree of material, it is self-evident; to enable its "'ϊ 防护 protection _ component of the transport container is also strongly required to have the possibility of reduction in the case of the dimensional delivery process, Dust is generated; anti-film group =,, 'inside the protective film assembly, the shell is in contact with each other, and the membrane assembly is deformed by I, so that foreign matter invades, etc. 输送 The conveying container for the transportation of the protective film module should be With buffering 6 200819363 2 moving tamper-proof group: 纳 其 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 防护 ® ® ® ® ® ® ® ® ® ® ® ® ® ® It is shown that the protective film assembly case 12 is placed on the flat body 11 disposed on the bottom surface of the transport container 15. The 3H top surface buffer body 14 during the transfer process is of course. However, Absorbed by the buffer body η of the main domain. If the manufacturer uses the anti-bovine shell to be stored in the same package, the protective film is a flat-shaped concave shape, and the ratio is
邻，#蔣度，木，以將防護薄膜組件殼體收納於苴内 4 =此重疊而I納複數個（龄照專利文獻υ。U 專利文獻1】日本專利特開2005_75428號公報 【發明内容】 左右之ΐΐ選擇適當的硬度，則於邊長2〇〇麵 時，·或即使屬液晶用者，而邊 吸收撞擊的=/、㈣護薄膜組件殼體時’將可獲得耐實用且 的大型防護於用所採之邊長超過500刪 顯然可知，運=上f獲侍充分之吸收撞擊的效果。而且 本發明ΪΞ件將受損傷’或被污染。 200819363 動、撞擊，能保護防護薄膜組件及護 !止該等結構與零件產生粉塵’以保持於冥= 悲，且可於此狀態下將其安全地運送。顿、、且件於轉之狀 解決課顳之手段 本發明之防護薄膜組件包裝用緩衝 護薄膜組件殼體的表面設置凹 利^=為.在接觸防 各個凹凸部的高低差，可設定為凹I或f部項^述 以上，而且在2〇mm以上（申請專利範圍第3 你兮☆倍 體載置防㈣麻件殼體時之接觸_ #=緩衝 殼體之底面全部面積的以上版下j專件 本發明之防護薄膜組件包裝方法，忍:n，4項）。 内部底面配置上述防護薄膜植件;:寺^為.方;輸送容器的 =_置厚編以上之緩衝體，i將防4體 由各緩衝體所環繞的内部空間（申tn、、且件叙體收納在 上部以相懸做置各緩衝體 防 ^由於其 以-層-層麵疊收納（申請專 ^件殼體加 膜組件殼體之頂 軛阗弟6項），則不會對防護薄 納於1個輸送^器。自而可將複數之防護薄膜組件殼體收 面所=膜組件殼體側面之緩衝體的頂 撐平板的特別機構。 、則热須在輪送容器設置用以支 之包it明之賴細組件包制緩衝體，以及使用此緩靜 ίί二 =於保管和 而不受污染之狀能下，蔣f叹/參版組件上未附著異物 【實施方式】Τ將其保持潔㈣狀態而保管和運送。 200819363 實施發明~^最佳形㉟ #發明者等人研究出如下現象，且完 器内之防護薄膜組件殼體大型化，且防=生晏放入輸送容 緩衝體二者的接觸面積變大時，；ϊ；但輯底面及 承文來自防護薄膜組件殼體之每單并^、、且包叙用緩衝體 於缓衝賴肖之相针，而且由 定之缓衝功能。 p#j而、交成無法發揮既 =下:依據附加圖式，以說明本發明。 辦，地顯示使用本發明之防護薄膜紅件包装用 體將防濩薄膜組件收納於輸送容器 能 、、是衝 意地顯示本發明之防護薄膜組件包裝 ’圖2係示 如圖卜圖2所示’本發明之防護薄立體圖。 下簡?緩衝體”係在表面設有凹凸部/的結構牛。。衣用緩衝體(以 有防護薄膜組件（未圖示）之防護薄膜缸：於將收納 時，係將緩衝體1之設有凹凸部23收納於輪送容器 體3之底面配置。*凹凸2的表面抵接到防護薄件殼 該緩衝體1之表面所設置的凹凸部2 較少粉塵，故較佳如圖2所示，採用配置許^圓錐果且產生 =他:適料酌緩衝能力及製造方法，該形狀選 等。又，此些例亦可並非分別如圖示地 、此時，該各別凹凸部的高低差（圖2中之h)較佳 或凸部之最大寬度（圖2中之W)的〇.5倍以上。若在Q' 凹4 ^緩衝能力低，安裝上凹凸部的效果變小。又，該夂下， 南低差h較佳為，設定於20刪以上。若未滿2〇咖^字無法獲^ 200819363 希望之缓衝功能，故尤佳為30mm以上。 而且，載置防護薄膜組件殼體到緩衝體時，緩 較佳為’佔防護薄膜組件殼體之底面全部W: =凸部接觸面積的總和小於30%時，儘管防護 ;重2部”不太變形的狀態。亦即，顯示緩 擊時，亦無法獲得所希望之緩衝效t"度堅硬心貫際發生撞 i反地，於該凸部接觸面積的總和 ㈣由ΐ以ΐ所述情況，針對缓衝體1所設置的凹凸部2之雜、 上、戶f收納之防護薄膜组件殼體的重量、面積，考慮 1目作適虽決定，俾於獲得所希望之缓衝效果。 心 1 ^ ^ ^ ^^>^(urethane foam) > IL#l4&?〇lrlyfeth^r 呈古H 體（ex foam)等之發泡體適當選擇；作是料 具有適宜的緩衝功能，並秘於該特質。H仁疋“ 體的結ί。針&本發明所為的包裝方法，說明其中之輸送容器整 側面，ϋ::面fCf體^及所有防護薄膜組件殼體3的 則配置有頂面用緩，在防護薄膜組件殼體3的頂面， 之材質所構成的孚;。$外，於其上又配置著由不同於缓衝體 之頂面的高度上，，二^接觸到防護薄膜組件殼體3 於兮早把7 P ^層地重豐其他防護薄膜組件殼體。 收納有:段的防護薄二 之=己置各緩衝體’且 體3不會由於輸送二係為了使防護薄膜組件殼 而大幅振動，以致碰撞平板7。 10 200819363 此外，於該等緩衝體卜4、5及平板7之最外軏，女认、、， 器6 ;於其上部有頂蓋8 ;而於其下部則配置"又有輪迗容 8、=容器6、托板9三者係由複數之綑束帶i ^’ :頁盍 ，面用緩，4係防備側面碰撞，其厚度較佳為f :以 士。又，與防護薄膜組件殼體3之接觸面相同於緩衝體f，亦= 置凹凸部。然而，由於較大的撞擊通常 亦了叹 薄膜組件殼體3之側方面積較]、，因此即二^板，，且防護 獲得充分的緩衝性。故通常採用平板即可。 —，仍然可 ，板7較佳為，設計成由側面用緩衝體4的頂 此一來，不但輪送容器6不須平板支 ^支铋如 體4所形成的緩衝效果。 ^且將㈢有侧面用缓衝 平板7必須具備充分的剛性，俾於不合择曲而斜 =惰，《，且較佳為皁具有不二 合板(Pl卿d)、強化瓦楞紙板、塑膠瓦榜紙板等。 的. 的門緩衝體5若能充填防護薄膜組件殼體3及平板7 -者 :間f「可，可與緩衝體1相同，採用凹凸表面；亦 ^ :分，卜並非覆蓋防護薄膜組件殼體之頂面整 裝容器，時，防護薄膜組件殼體將受J多事故勒生而包 成；iiHnr &91者可由具充分強度的材質所構 採用。/ 、綠板、歸瓦楞輸等的材質則可適當Neighboring, #蒋度,木, in order to accommodate the protective film module housing in the crucible 4 = this overlap and the number of the multiples (I. Patent Document No. 1) Japanese Patent Laid-Open Publication No. 2005-75428 】 Selecting the appropriate hardness for the left and right sides, when the side length is 2 ,, or even if it is a liquid crystal user, while absorbing the impact of the / /, (4) protective film module housing 'will be practical and practical It is obvious that the large-scale protection uses the side length of more than 500. It is known that the upper part of the invention is sufficient to absorb the impact. Moreover, the element of the invention will be damaged or contaminated. 200819363 Dynamic, impact, protective film Components and protection! Stop the construction of parts and parts to generate dust' to keep it in the dark, and safely transport it in this state. The means of solving the problem in the form of the rotation of the invention The surface of the cushioning film assembly for the film module packaging is provided with a concave surface. The difference between the height and the contact of the concave and convex portions can be set as the concave I or f portion, and is more than 2 mm (application) The scope of patents is 3rd. (4) contact when the shell of the hemp piece is _ #= the upper plate of the entire area of the bottom surface of the buffer case. The j-piece of the protective film assembly of the present invention, forbearance: n, 4 items). Planting parts;: Temple ^ is the square; the container of the container = _ thicker than the buffer body, i will prevent the 4 body from the internal space surrounded by the buffer body (application tn, and the body is stored in the upper part The suspension can be placed in the buffer body. Because it is stored in a layer-layer stack (applicable to the top yoke of the shell of the membrane module assembly), it will not be used for one transport. The device can be used to cover a plurality of protective film assembly casings. The special mechanism of the cushioning plate of the buffer body on the side of the membrane module housing. The heat must be placed in the shipping container to support the package. The thin component is packaged in the buffer body, and the use of this slow-moving ίί===================================================================================== And storage and transportation. 200819363 Implementation of the invention ~ ^ best form 35 # Inventors and others have studied the following phenomenon And the protective film assembly housing in the finisher is enlarged, and the contact area of the protective container is increased when the sputum is placed into the transport volume buffer; ϊ; but the bottom surface and the text are from the protective film assembly housing. The combination of the buffer and the buffer is used to buffer the phase of the phase, and the buffer function is determined by the function of the buffer. p#j, the combination cannot be played as follows: The following figure is used to explain the present invention. It is shown that the protective film red-package body of the present invention is used to store the tamper-proof film component in the transport container, and the protective film component package of the present invention is schematically shown. FIG. 2 is a schematic view of FIG. The protective thin section of the present invention. The lower simple buffer body is a structural cow having a concavo-convex portion on the surface. . A cushioning body for clothing (a protective film cylinder having a protective film unit (not shown)) is disposed in a bottom surface of the container body 3 in which the concave-convex portion 23 of the cushion body 1 is housed. The surface abuts against the protective thin member shell. The uneven portion 2 provided on the surface of the buffer body 1 is less dusty. Therefore, as shown in FIG. 2, it is preferably configured with a conical fruit and produced = he: suitable for buffering capacity And the manufacturing method, the shape is selected, etc. Further, in these examples, the height difference (h in FIG. 2) or the maximum width of the convex portion may be different from each other as shown in the figure. In Fig. 2, W) is more than 5 times. If the Q' concave 4 ^ buffering capacity is low, the effect of attaching the uneven portion becomes small. Also, the underarm, the south low difference h is preferably set to 20 If you are not able to get the buffer function of 200819363, it is especially good for 30mm or more. Moreover, when placing the protective film module housing to the buffer body, it is better to use the protective film. The bottom surface of the component housing is all W: = the sum of the contact areas of the convex portions is less than 30%, although it is protected; the two parts are less deformed. That is to say, when the slamming is displayed, the desired buffering effect is not obtained. The degree of contact between the hardened and the heart is reversed, and the sum of the contact areas of the convex portion (4) is buffered by the situation described above. The weight and area of the protective film assembly housing of the uneven portion 2 provided on the body 1 and the upper and lower housings are determined in consideration of the first order, and the desired cushioning effect is obtained. Heart 1 ^ ^ ^ ^^>^(urethane foam) >IL#l4&?〇lrlyfeth^r Appropriate selection of foams such as ex foam; the material has a suitable buffering function and is secretive to this trait H 疋 疋 体 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针Slowly, on the top surface of the pellicle frame 3, the material is made of a material other than the height of the top surface of the buffer body, and the protective film is contacted. The component housing 3 has a 7 P ^ layer in the early stage, and the other protective film assembly shells are housed. Each of the buffers is disposed and the body 3 is not vibrated by the transporting system in order to cause the protective film module casing to vibrate so as to collide with the flat plate 7. 10 200819363 In addition, in the outermost of the buffer bodies 4, 5 and the plate 7, The female recognizes, and the device 6 has a top cover 8 on the upper part thereof; and the lower part is disposed in the lower part, and there are also a rim capacity 8, a container 6, and a pallet 9 which are bundled with a plurality of bundles i ^' : Page 盍, the surface is slow, the 4 series is prepared for side collision, and the thickness thereof is preferably f: yoke. Further, the contact surface with the pellicle frame 3 is the same as the buffer body f, and the uneven portion is also provided. However, since a large impact usually sighs on the side of the film module case 3, it is a plate, and the protection is sufficiently cushioned. Therefore, it is usually used as a flat plate. Preferably, the plate 7 is preferably designed to be supported by the top of the buffer body 4 for the side, not only for the container 6 but also for the cushioning effect of the body 4 such as the body 4. ^ And will (3) have a side buffer plate 7 must have sufficient rigidity, 不 不 不 不 = = 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰 惰List of cardboard and so on. If the door buffer body 5 can be filled with the protective film module housing 3 and the flat plate 7 - the same as the buffer body 1, the concave and convex surface can be used; When the top surface of the body is filled with containers, the protective film module housing will be covered by J accidents; iiHnr & 91 can be constructed of materials with sufficient strength. /, Green board, returning to the wall, etc. Material is appropriate
綑束帶10 -般採聚3丙烯(二生二W 構構件之重量崎當選擇。 py ne)_但可依各結 不會在運送時受到絲防護薄膜組件，而 #里罩的〜θ。因此，防濩薄膜組件上不 11 200819363 會有異物附著而被污染，且能保持潔淨狀態而運送。 狹而又如21，本發明對於大型防護薄膜組件之效果尤其大。 心=習知的使用平板狀緩衝體之輸送容器，即使適用於 之半導體用防護薄膜組件或小型的液晶用防 4溥胲、、且件，仍可具有較佳的緩衝能力。 實施例 以I，說明本發明之實施例，但本發明並不限定於此。 部滿m、凸部為·67Gmmx89Gmm、厚（底面-凸頂 點之形’基底（最大直徑)部的直徑約6G_，而各個頂 於此狀態下’凸部彼此無間隙地排列於緩衝 立H 该材料的硬度約13kgf(依jis κ 6侧測試方法）。 =緩衝體丨配置到如圖丨所示的輸送容器，且於其上載置 防二，該殼_納著經核對膜上之異物之潔淨的 防1 ί組件殼體3之大小係860隨64〇麵高5〇麵，而包括 4f οΓ重量約3kg。側面用緩衝體4設定為寬8G咖、長 i 且配置4個於防護薄顺件殼體3的周圍。頂 面=衝體5係將配置在防護薄膜組件殼體3底面之緩衝A貝 f的4之上部，載置以強化瓦榜紙板(厚度約 俨：浐逆一,敕、^幾近相同結構而收納其他防護薄膜組件殼 輸送谷斋整體而言，採用共可收納3個防護薄膜組件殼體 又:外側之輸送容器6採強化瓦榜紙板(厚 下二板(厚度約15咖)、托板9亦採強化瓦楞紙板(ΐ 下板之居度4 15_)。而連結該等部分之綑束帶1{)係採聚丙稀製 12 200819363 品，以4條綑束帶牢固地連結成井字狀。 又，為了測定防護薄膜組件殼體 之各防護薄膜組件殼體的頂面 ^^里^，故於所包裝 從空中降落之測試，以取代實㈣於胃目〜盗的性能，進行 τ吊起到高度L 101處，並使其底面^體^時著容器整 膜上^卩^找卿㈣膜崎’於錢室岐暗 出異曾：：所片，其中2片幾乎看不 可進行吹痛而六二ί i 者兩個’m左右之異物，但此 膜組件㈣皆:20GJ^。。又’震動感測器的值在任—個防護薄 ^ Q u 文义成平面’以進行相同的實驗。其結果，於邮丨 物，且片^數百個數則‘左右之ϊ t用又，晨動感測器的值顯示出約6〇g。 【圖式簡單說明】 威用、、友衝體之輸送容器之狀態的示意剖面圖。 意立=軸林剌之防朗膜組件包裝賴衝體之—例的示 凹凸〜3⑷係顯示本發明之防護薄膜組件包裝用緩衝體之 =狀與配置之例的示意部分立體圖。 回4係顯示習知的輸送容器之一例的示意剖面圖。 【元件符號說明】 '防護薄膜組件包裝用緩衝體 13 200819363 2〜凹凸部 2A〜凸部 3〜防護薄膜組件殼體 4〜侧面用緩衝體 5〜頂面用緩衝體 6〜輸送容器 7〜平板 8〜頂蓋 9〜托板 10〜綑束帶 11〜平板狀之緩衝體 12〜防護薄膜組件殼體 13〜側面用緩衝體 14〜頂面用缓衝體 15〜輸送容器 h〜各別凹凸部的高低差 w〜凹部或凸部之最大寬度 14The bundle 10 is generally made of polypropylene (the weight of the two-component W-component is selected. py ne)_ but the knot can not be subjected to the wire protection film assembly during transportation, and ~ θ . Therefore, the anti-mite film assembly is not contaminated by foreign matter, and it can be kept clean and transported. Narrow and as such, the invention is particularly effective for large protective film modules. Heart = a conventional transfer container using a flat buffer, even if it is applied to a semiconductor protective film unit or a small liquid crystal, it has a good buffering ability. EXAMPLES Examples of the present invention will be described with reference to I, but the present invention is not limited thereto. The portion is full m, the convex portion is 67 Gmm x 89 Gmm, and the thickness (bottom-convex vertex shape) base (maximum diameter) portion has a diameter of about 6 G_, and each of the top portions is in a state where the convex portions are arranged in the buffer vertical H without gaps. The hardness of the material is about 13kgf (according to the jis κ 6 side test method). The buffer body is placed in the transport container as shown in Fig. ,, and the anti-two is placed on the shell, and the shell is subjected to the foreign matter on the membrane. The size of the clean shell 1 is 860 with a height of 5 inches, and includes 4f οΓ and a weight of about 3 kg. The side buffer 4 is set to a width of 8 G coffee, a length i and a configuration of 4 protective skins. The periphery of the component housing 3. The top surface = the punching body 5 is disposed on the upper portion of the buffer A of the bottom surface of the protective film module housing 3, and is placed to reinforce the tile board (thickness: 浐: 浐反一, 敕, ^ almost the same structure and accommodate other protective film components shell conveyor Gu Zhai overall, the use of a total of 3 protective film module shell can be accommodated: the outer transport container 6 mining reinforced tile board (thickness second board) (thickness is about 15 coffee), and the pallet 9 is also made of reinforced corrugated cardboard (the size of the lower slab 4 15_). Part of the bundle 1{) is made of polypropylene 12 12,219,363 and is firmly joined into a well pattern by four bundles. In addition, in order to measure the top surface of each of the protective film assembly shells of the protective film module housing ^ ^里^, so the test of the landing from the air, in order to replace the real (four) in the stomach to the performance of the stolen, carry out the τ hang to the height L 101, and make the bottom of the body ^ when the container is on the film ^卩^找卿(四)膜崎' in the money room 岐 出 : : : : : : : : : : : : : : : : : : : : : : : : , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , :20GJ^.. And the value of the 'vibration sensor is in any protective thin film ^ Q u Wenyi into a plane' to carry out the same experiment. The result is in the post, and the number of pieces is hundreds of ' After t, the value of the morning sensor shows about 6〇g. [Simple description of the diagram] Schematic cross-sectional view of the state of the conveyor container for the use of Wei, and the friend. The embossing of the smear film assembly is shown in the example of the embossing of the protective film assembly of the present invention. Fig. 4 is a schematic cross-sectional view showing an example of a conventional transport container. [Explanation of the component symbols] 'The protective film assembly packaging buffer 13 200819363 2 - the uneven portion 2A to the convex portion 3 to the protective film The module case 4 to the side surface buffer body 5 to the top surface buffer body 6 to the transport container 7 to the flat plate 8 to the top cover 9 to the support plate 10 to the binding band 11 to the flat plate cushion body 12 to the pellicle assembly 13 to the side surface buffer body 14 to the top surface buffer body 15 to the transport container h to the height difference of each of the uneven portions w to the maximum width of the concave portion or the convex portion 14