TW200841125A - Method of producing photosensitive resin film, transfer material, substrate with pixel separation wall, color filter and production method thereof, and display device - Google Patents

Method of producing photosensitive resin film, transfer material, substrate with pixel separation wall, color filter and production method thereof, and display device Download PDF

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Publication number
TW200841125A
TW200841125A TW096149632A TW96149632A TW200841125A TW 200841125 A TW200841125 A TW 200841125A TW 096149632 A TW096149632 A TW 096149632A TW 96149632 A TW96149632 A TW 96149632A TW 200841125 A TW200841125 A TW 200841125A
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Taiwan
Prior art keywords
photosensitive resin
forming
ink
substrate
color filter
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TW096149632A
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Chinese (zh)
Inventor
Akihiko Takeda
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Fujifilm Corp
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Priority claimed from JP2007067234A external-priority patent/JP2008225361A/en
Priority claimed from JP2007076853A external-priority patent/JP5013913B2/en
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of TW200841125A publication Critical patent/TW200841125A/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0046Photosensitive materials with perfluoro compounds, e.g. for dry lithography

Abstract

The invention provides a method of producing a photosensitive resin film comprising a process of preparing, by adding an ink repellent agent, a photosensitive resin composition having a difference in surface energy before and after the addition of the ink repellent agent of 2 mN/m or more, and a process of forming a photosensitive resin film by applying the photosensitive resin composition onto a substrate or a temporal support and vacuum drying the composition; a method of producing a photosensitive resin film comprising a process of drying a film formed by applying a photosensitive resin composition containing an ink repellent agent at an air flow rate of 0.5 m/s or less at 0.5 cm above the film surface; a transfer material; a substrate with a pixel separation wall; a color filter and a production method thereof; and a display device.

Description

200841125 九、發明說明: 【發明所屬之技術領域】 ..... 一 本發明關於感光性樹脂膜之形成方法、感光性轉印材 料、附有離畫壁的基板、彩色濾光片及其製法、以及顯示 裝置。 【先前技術】 近年來’個人電腦用液晶顯7K器、液晶彩色電視的需要 係有增加的傾向,對於如此的顯示器中不可欠缺的彩色濾 光片之特性提高及成本降低的要求係增高。 目刖’作爲彩色濾光片的製造方法,實施染色法、顏料 分散法、電沈積法、印刷法等。 例如,染色法係於透明基板上形成染色用的材料之水溶 性高分子材料層,藉由微影步驟將其圖案化成所欲的形狀 後’將所得到的圖案浸漬在染色浴中以得到著色圖案。藉 由重複此步驟3次,可形成由R(紅)、G(綠)、B(藍)的3色 著色部所成的著色層。 又,顏料分散法係近年盛行的方法,藉由在透明基板上 形成分散有顏料的感光性樹脂層,將其圖案化可得到單色 的圖案。藉由重複此步驟3次,可形成由R、G、B的3色 著色部所成的著色層。 另外’電沈積法係爲在透明基板上將透明電極圖案化, 浸漬於加有顏料、樹脂、電解液等的電沈積塗裝液中,以 將第一色電沈積者,藉由重複此步驟3次,可得到由R、g、 B的3色著色部所成的著色層,最後作煅燒。印刷法係爲在 200841125 熱硬化型的樹脂中分散顏料,藉由重複印刷3次,分別塗 布R、G、b後,使樹脂熱硬化而形成著色層者。 此等方法由於形成紅色、綠色、藍色的3色畫素,必須 重複同一步驟3次,成本高爲共通點。又,由於步驟數多, 亦有產率容易降低的問題。 鑒於上述,近年來檢討以顏料分散法來形成黑色矩陣 (離畫壁),以噴墨法來形成RGB畫素的彩色濾光片製法。 該噴墨法,例如係在劃分畫素間的離畫壁即黑色矩陣所圍 繞的凹部,依序給予R、G、B各色的液體,而形成著色區 域(例如畫素)。利用噴墨法的方法,係有製程簡單且低成本 的優點。 又,噴墨法係不限於彩色濾光片的製造,亦可應用於電 致發光元件等其它光學元件的製造。 於前述噴墨法中,必須防止毗鄰的畫素區域間之印墨混 色等的發生、或指定區域以外的部分中IT 0溶液或金屬溶 液凝固而附著的現象。因此,要求黑色矩陣等的離畫壁具 有排斥噴墨法所吐出的塗出液之水或有機溶劑等的性質, 即所謂的撥水、撥油性。 與撥水、撥油性有關聯,有揭示含氟烷基的(甲基)丙烯 酸酯單體與含矽氧鏈的乙烯性不飽和單體之共聚物的光阻 組成物,記載對於光阻組成物固體成分而言,添加0.001〜 0.05質量%之範圍的共聚物(例如參照特開平9-54432號公 報)。 - 另外,有揭示一種塗覆用組成物,其包含將含有具氟烷 200841125 基的乙嫌系單體之單體組成物聚合而得之乙矯系聚合物、 感光性樹脂及有機溶劑(特開2004-2733號公報),及揭示一 種光阻組成物,其包含將含有具碳數4〜6的氟烷基之乙烯 系單體的單體組成物聚合而得之乙烯系聚合物、感光體(例 如特開2 0 0 5 - 3 1 5 9 8 4號公報)。 【發明內容】 發明所欲解決的問顆 然而,就上述光阻組成物或塗覆用組成物等的組成物而 言’不僅塗膜形成時的撥水、撥油性不充分,而且隨著撥 墨化,塗膜的膜面控制變困難,在塗布後的乾燥等之步驟 容易發生膜內變動。圖案形成以前的膜本身的厚度若不均 勻’則由無法保持由該膜所形成的圖案之面內均一性,對 均一圖案的形成造成障礙。因此,得不到可顯示無顯示不 均的高畫質顯像之彩色濾光片或顯示裝置。 本發明鑒於上述習知問題點,目的爲提供:在形成圖案 畫像(例如離畫壁)之前,可減小感光性樹脂膜的面內膜,厚變 動的感光性樹脂膜之形成方法,及具有優異的所轉印形成 的圖案畫像(例如離畫壁)之撥水性及撥墨性以及面內均一 性的感光性樹脂膜之感光性轉印材料。 又,本發明之目的爲提供:於預先使用含有撥墨劑的樹 脂組成物來塗布形成用於構成畫素群的劃分畫素間之黑色 矩陣等.的離畫壁時,具有可防止印墨對離畫壁的蔓延之良 好撥墨性,可形成膜厚變動經抑制的離畫壁形成用之樹脂 膜,可得到高度(height)不齊小的離畫壁之感光性樹脂膜的 200841125 形成方法及感光性轉印材料。 再,本發明之目的爲提供:混色、色不均等的發生 &gt;皮抑一 制的高品位之彩色濾光片及其製造方法,以及顯示不均的 發生經抑制的可顯示高品位影像之顯示裝置。 達成上述課題的具體手段係如以下。 &lt; 1 &gt; 一種感光性樹脂膜之形成方法,其具有:添加撥 墨劑’調製撥墨劑的添加前與添加後的表面能之差爲 2mN/m以上的感光性樹脂組成物之步驟;及,將前述感光 性樹脂組成物塗布在基板上或臨時支持體上,作真空乾燥 以形成感光性樹脂膜之步驟。 &lt; 2 &gt;如前述&lt; 1 &gt;記載的感光性樹脂膜之形成方法,其 中前述真空乾燥係在真空度l(T3Pa以下進行。 &lt;3&gt;如前述&lt; 1&gt;記載的感光性樹脂膜之形成方法,其 中前述撥墨劑含有(a)在側鏈至少具有氟原子的重複單位, (b)在側鏈具有聚醚構造的重複單位,及(c)在側鏈具有羧基 的重複單位。 &lt;4&gt;如前述&lt;3&gt;記載的感光性樹脂膜之形成方法,其 中前述(b)在側鏈具有聚醚構造的重複單位係在側鏈具有封 端型的聚醚構造之重複單位。 &lt;5&gt;前述&lt;1&gt;記載的感光性樹脂膜之形成方法,其中 前述撥墨劑的添加量,對於感光性樹脂組成物的總固體成 分而,係0·5質量%以上。 &lt; 6 &gt; —種感光性轉印材料,其具有藉由前述&lt; 1 &gt;記載 的感光性樹脂膜之形成方法在臨時支持體上所形成的感光 200841125 性樹脂層。 &lt;7&gt;—種彩色濾光片之製法,其具有使用前述&lt;1 &gt;記 載的感光性樹脂膜之形成方法、或前述&lt; 6 &gt;記載的感光性 轉印材料,在基板上形成離畫壁的步驟;及,於由前述離 畫壁所劃分的基板上之凹部,使用噴墨方式形成著色區域 之步驟。 &lt; 8 &gt; —種彩色濾光片,其係由前述&lt; 7 &gt;記載的彩色濾 光片之製法所製造。 ® &lt;9&gt; 一種顯示裝置,其具備前述&lt;8&gt;記載的彩色濾光 片。 &lt; 1 0 &gt; —種感光性樹脂膜之形成方法,其具有:塗布含 撥墨劑的感光性樹脂組成物之塗布步驟;及,以自膜面起 的高度〇.5cm之氣體的流速爲〇· 5 m/s以下,使所塗布形成 的塗布膜乾燥之乾燥步驟。 &lt; 11 &gt;如前述&lt; 1 0 &gt;記載的感光性樹脂膜之形成方 法,其中前述乾燥係以風速〇 . 5 m/ S以下的流速的乾燥風來 ^ 吹塗布膜的表面而進行。 &lt; 1 2 &gt;如前述&lt; 1 0 &gt;記載的感光性樹脂膜之形成方 法,其中在以真空度成爲1(T3 Pa以下的方式,進行真空吸 氣而使乾燥。 &lt; 1 3 &gt;如前述&lt; 1 0 &gt;記載的感光性樹脂膜之形成方 法,其中前述撥墨劑含有(a)在側鏈至少具有氟原子的重複 單位,(b)在側鏈具有聚醚構造的重複單位,及(c)在側鏈具 有羧基的重複單位。 200841125 &lt; 1 4 &gt;如前述&lt; 1 3 &gt;記載的感光性樹脂膜之形成方 法,其中前述(b)在側鏈具有聚醚構造的重複單位係具有封 端型的聚醚構造。 &lt; 1 5 &gt; ~種感光性轉印材料,其係在臨時支持體上具有 由前述&lt; 1 0 &gt;記載的感光性樹脂膜之形成方法所形成的感 光性樹脂層。 &lt; 16&gt;—種附有離晝壁之基板,其係在基板上具有含撥 墨劑且面內膜厚均一性爲±5 %以內的樹脂離畫壁膜。 • &lt;17&gt; —種彩色濾光片之製法,其具有使用前述&lt;1〇&gt; 記載的感光性樹脂膜之形成方法、或前述&lt; 1 5 &gt;記載的感 光性轉印材料,在基板上形成感光性樹脂層的層形成步 驟’通過光罩將所形成的感光性樹·脂層曝光成圖案狀,顯 像而形成離畫壁的離畫壁形成步驟,及在前述離畫壁所劃 分的基板上之凹部,藉由噴墨法來給予著色液體組成物, 以形成著色區域的著色區域形成步驟。 &lt;18&gt;—種彩色濾光片,其係由前述&lt;17&gt;記載的彩色 ® 濾光片之製法所製作。 &lt; 1 9 &gt; 一種顯示裝置,其具備前述&lt; i 8 &gt;記載的彩色濾 光片。 【實施方式】 實施發明的最佳形態 U T詳細說明本發明的感光性樹脂膜之形成方法、以及 使用其的感光性轉印材料、附有離畫壁之基板、彩色濾光 片及其製法、顯示裝置。 -10- 200841125 &lt;感光性樹脂膜的形成方法&gt; 本發明的第1實施形態之感光性樹脂膜的形成方法,係 設有以下步驟而構成者:調製撥墨劑的添加前與添加後的 表面能之差爲2mN/m以上的感光性樹脂組成物之步驟; 及,將該感光性樹脂組成物塗布在基板上或臨時支持體 上,作真空乾燥以形成感光性樹脂膜之步驟。 本發明的第2實施形態之感光性樹脂膜的形成方法,,係 設有以下步驟而構成者:塗布含撥墨劑的感光性樹脂組成 φ 物之塗布步驟;及,以自膜面起的高度〇.5cm之氣體的流 速爲0.5 m/s以下,使所塗布形成的塗布膜乾燥之乾燥步驟。 本發明的第1及第2實施形態之感光性樹脂膜的形成方 法,按照需要可設置其它步驟而構成。 〜感光性樹脂組成物〜 本發明的感光性樹脂組成物係至少含有1種以上的撥墨 劑而成者,視需要更可使用引發劑、黏結劑、乙烯性不飽 和化合物、色材、及其它添加劑來構成。 # 感光性樹脂組成物,由含有撥墨劑而構成,故可提高使 用感光性樹脂組成物所形成的圖像表面之撥水、撥墨性。 而且,此感光性樹脂組成物係適用於本發明的感光性樹脂 膜之形成方法,使用含撥墨劑的樹脂組成物,可容易進行 膜形成時的膜面操作,邊給予撥水·撥墨性’邊得到面內 均一性高的塗布膜。 由於含有撥墨劑,於依照JIS R3 2 5 7記載的方法來測定 水接觸角時,以施予加熱處理前的圖像表面之水接觸角當 -11- 200841125 作A°,以在24 0 °C 50分鐘的條件下加熱處理 冷卻後的圖像表面的水接觸角當作8°時,可 (B°-A。)爲20°以上的撥水、撥墨性能。水接 如後述。 又,由於含有撥墨劑,可邊保持使用感光 所形成的離畫壁表面之撥水、撥墨性,邊良 畫壁與形成有該離畫壁的基板之密接性。再 所圍繞的凹部,給予著色液體組成物以形成 # 製作彩色濾光片時,可抑制混色、色不均等&amp; 就本發明的第1實施形態之感光性樹脂組 墨劑的添加前與添加後的表面能差爲2mN/m 性、膜厚均一性之點來看,前述表面能差較ίΐ 上且4mN/m以下,更佳爲2.1mN/m以上且3, 藉由使撥墨劑的添加前與添加後的感光 之表面能差爲2mN/m以上,則對使用加有撥 樹脂組成物所形成的感光性樹脂膜進行曝光 ® 處理,可使基板上所形成的圖案畫像之撥水 爲良好。又,藉由作真空乾燥以形成感光性 抑制基板上所塗布或轉印形成的感光性樹脂 變動的發生。 一般地,撥墨劑的添加會降低感光性樹脂 能。因此,撥墨劑之添加前與添加後的表面 由添加前的表面能扣除添加後的表面能之數1 前述表面能例如可藉由表面張力計來測定 ,1小時放置 給予接觸角差 觸角的詳細係 性樹脂組成物 好地保持該離 者,於離畫壁 著色區域,而 勺發生。 成物而言,撥 以上。從塗布 爲2mN/m以 .5 mN/m 以下。 性樹脂組成物 墨劑的感光性 、顯像、加熱 性及撥墨性成 樹脂膜,則可 膜之面內膜厚 組成物的表面 能差,係意味 m 〇 -12- 200841125 又’例如可藉由對感光性樹脂組成物的總固體成分而 言’添加0.01〜30質量%的後述撥墨劑,而使其前述表面 能差在前述範圍內。 於本發明中,從撥墨性之點來看,撥墨劑的添加量,對 於感光性樹脂組成物的總固體成分而言,較佳爲〇 . i質量% 以上’尤佳爲0.2質量%以上且10質量%以下,更佳爲〇.5 質量%以上且t質量%以下。 1)撥墨劑 # 本發明的感光性樹脂組成物含有至少1種的撥墨劑。撥 墨劑較佳爲與構成黑色矩陣等的離畫壁之材料所含有的黏 結劑等之樹脂成分親和性少的含矽原子或氟原子的化合 物,更佳爲含氟原子的化合物。 作爲前述含矽原子的化合物,例如可舉出以具有下述重 複單位的分子量數千〜數十萬的線狀有機聚矽氧烷當作主 成分者。 # [ t ' --Si—Ο--200841125 IX. Description of the Invention: [Technical Field of the Invention] A method for forming a photosensitive resin film, a photosensitive transfer material, a substrate with a painting wall, a color filter, and the like System and display device. [Prior Art] In recent years, the demand for liquid crystal display 7K devices and liquid crystal color televisions for personal computers has been increasing, and the demand for improved color characteristics and cost reduction of such color filters which are indispensable for such displays has increased. As a method of producing a color filter, a dyeing method, a pigment dispersion method, an electrodeposition method, a printing method, and the like are carried out. For example, the dyeing method is to form a water-soluble polymer material layer of a dyeing material on a transparent substrate, and after patterning it into a desired shape by a lithography step, the resulting pattern is immersed in a dyeing bath to obtain a coloring. pattern. By repeating this step three times, a coloring layer formed of three coloring portions of R (red), G (green), and B (blue) can be formed. Further, the pigment dispersion method is a method which has been popular in recent years, and a photosensitive resin layer in which a pigment is dispersed is formed on a transparent substrate, and patterned to obtain a monochromatic pattern. By repeating this step three times, a coloring layer formed of three coloring portions of R, G, and B can be formed. In addition, the electrodeposition method is to pattern a transparent electrode on a transparent substrate, and immerse it in an electrodeposition coating liquid to which a pigment, a resin, an electrolyte or the like is added, to electrode the first color, and repeat this step. Three times, a coloring layer formed of three coloring portions of R, g, and B was obtained, and finally, calcination was performed. The printing method is a method in which a pigment is dispersed in a thermosetting resin of 200841125, and R, G, and b are respectively applied by repeating printing three times, and then the resin is thermally cured to form a colored layer. Since these methods form three-color pixels of red, green, and blue, the same step must be repeated three times, and the cost is high. Moreover, since the number of steps is large, there is also a problem that the yield is easily lowered. In view of the above, in recent years, a color filter manufacturing method in which a black matrix (a painting wall) is formed by a pigment dispersion method and an RGB pixel is formed by an inkjet method is reviewed. In the ink jet method, for example, a concave portion surrounded by a black matrix which is a dividing wall between the pixels, and a liquid of each of R, G, and B colors are sequentially applied to form a colored region (e.g., a pixel). The method using the ink jet method has the advantages of simple process and low cost. Further, the ink jet method is not limited to the production of a color filter, and can be applied to the manufacture of other optical elements such as an electroluminescence element. In the ink jet method described above, it is necessary to prevent the occurrence of ink color mixing or the like between adjacent pixel regions or the phenomenon in which the IT 0 solution or the metal solution in the portion other than the designated region is solidified and adhered. Therefore, it is required that the drawing wall such as a black matrix has a property of repelling water or an organic solvent of the coating liquid discharged by the inkjet method, that is, so-called water repellency and oil repellency. In connection with water repellency and oil repellency, there is a photoresist composition which reveals a copolymer of a fluoroalkyl group-containing (meth) acrylate monomer and a hydrazine chain-containing ethylenically unsaturated monomer, and is described for the photoresist composition. In the solid content of the solid, a copolymer in a range of 0.001 to 0.05% by mass is added (for example, see JP-A-9-54432). Further, there is disclosed a coating composition comprising an ethylenic polymer, a photosensitive resin, and an organic solvent obtained by polymerizing a monomer composition containing an alkylene monomer having a fluorocarbon 200841125 group. Japanese Patent Publication No. 2004-2733, and discloses a photoresist composition comprising a vinyl polymer obtained by polymerizing a monomer composition containing a vinyl monomer having a fluoroalkyl group having 4 to 6 carbon atoms, and sensitizing Body (for example, Japanese Patent Publication No. 2 0 0 5 - 3 1 5 9 8 4). According to the composition of the photoresist composition or the coating composition, the water-repellent property and the oil-repellent property are not sufficient when the coating film is formed, and Inking, the film surface control of the coating film becomes difficult, and the film variation is likely to occur in the step of drying after application. If the thickness of the film itself before pattern formation is not uniform, the in-plane uniformity of the pattern formed by the film cannot be maintained, which hinders the formation of a uniform pattern. Therefore, a color filter or a display device capable of displaying high-quality image without display unevenness is not obtained. The present invention has been made in view of the above problems, and an object of the invention is to provide a method for forming an in-plane film of a photosensitive resin film, a method of forming a photosensitive resin film having a large thickness, and a method for forming a pattern image (for example, a wall) The photosensitive transfer material of the photosensitive resin film which is excellent in the water-repellent and ink-repellent characteristics of the image pattern formed by the transfer (for example, the painting wall) and the in-plane uniformity. Moreover, an object of the present invention is to provide an ink-preventing ink when a paint wall for forming a black matrix or the like for forming a pixel group for forming a pixel group is used in advance by using a resin composition containing an ink-repellent agent. It is possible to form a resin film for forming a wall which is suppressed in film thickness variation by a good ink repellency from the spread of the wall, and it is possible to obtain a film of a photosensitive resin film having a small height unevenness from the wall. Method and photosensitive transfer material. Further, an object of the present invention is to provide a high-grade color filter which produces color mixing, uneven color, and the like, and a method for manufacturing the same, and a high-quality image which can suppress the occurrence of unevenness in display. Display device. The specific means for achieving the above problems are as follows. &lt; 1 &gt; A method of forming a photosensitive resin film comprising the step of adding a photosensitive resin composition having a difference in surface energy between the surface of the ink-repellent agent and the surface energy after the addition of 2 mN/m or more And a step of applying the photosensitive resin composition onto a substrate or a temporary support and vacuum drying to form a photosensitive resin film. The method of forming a photosensitive resin film according to the above-mentioned item, wherein the vacuum drying is performed at a degree of vacuum of 1 (T3Pa or less). <3> Photosensitive property as described in the above &lt;1&gt; A method of forming a resin film, wherein the ink-repellent agent comprises (a) a repeating unit having at least a fluorine atom in a side chain, (b) a repeating unit having a polyether structure in a side chain, and (c) a carboxyl group in a side chain; The method for forming a photosensitive resin film according to the above <3>, wherein the (b) repeating unit having a polyether structure in a side chain has a blocked polyether structure in a side chain. The method of forming a photosensitive resin film according to the above-mentioned item, wherein the amount of the ink-repellent agent added is 0.5% by mass based on the total solid content of the photosensitive resin composition. The photosensitive photosensitive material layer formed on the temporary support by the method of forming the photosensitive resin film according to the above &lt;1&gt; is &lt;6&gt;7&gt; - a method of producing a color filter, The method of forming a photosensitive resin film according to the above &lt;1&gt;, or the photosensitive transfer material according to the above &lt;6&gt;, forming a painting wall on a substrate; and The step of forming the colored region by the inkjet method in the concave portion on the substrate divided by the wall. <8> A color filter manufactured by the method for producing a color filter according to the above &lt;7&gt; A display device comprising the color filter according to the above <8>. <10> A method for forming a photosensitive resin film, comprising: applying a photosensitive agent containing an ink repellent And a coating step of drying the coating film formed by applying a gas having a height of 〇5 cm from the film surface of 〇·5 m/s or less. &lt;11 &gt; The method of forming a photosensitive resin film according to the above-mentioned item, wherein the drying is performed by blowing the surface of the coating film at a flow rate of a wind speed of 0.5 m/s or less. &gt; Formation of the photosensitive resin film as described in the above &lt;10&gt; In the method of forming a photosensitive resin film, the method of forming a photosensitive resin film according to the above <1>, wherein the vacuum degree is 1 (T3 Pa or less). The ink-repellent contains (a) a repeating unit having at least a fluorine atom in a side chain, (b) a repeating unit having a polyether structure in a side chain, and (c) a repeating unit having a carboxyl group in a side chain. The method of forming a photosensitive resin film according to the above-mentioned item (1), wherein the (b) repeating unit having a polyether structure in a side chain has a blocked polyether structure. &lt; 1 5 &gt; A photosensitive transfer material having a photosensitive resin layer formed by the method for forming a photosensitive resin film according to the above &lt;10&gt;&lt;16&gt; A substrate with a wall away from the crucible, which is provided with a resin-coated wall film containing an ink-repellent agent and having an in-plane film thickness uniformity of ±5 % or less. &lt;17&gt; A method of producing a color filter, which comprises the method of forming a photosensitive resin film according to the above &lt;1&gt;, or the photosensitive transfer material described in &lt;15&gt; a layer forming step of forming a photosensitive resin layer on a substrate, a step of exposing the formed photosensitive tree/lipid layer into a pattern by a photomask, and forming a separation wall forming step from the image wall, and the above-mentioned painting The concave portion on the substrate divided by the wall is subjected to a coloring liquid composition by an inkjet method to form a colored region forming step of the colored region. &lt;18&gt; A color filter produced by the method of producing the color ® filter described in the above &lt;17&gt;. &lt; 1 9 &gt; A display device comprising the color filter described in the above &lt; i 8 &gt; BEST MODE FOR CARRYING OUT THE INVENTION A method for forming a photosensitive resin film of the present invention, a photosensitive transfer material using the same, a substrate with a paint removing wall, a color filter, and a method for producing the same, Display device. -10-200841125 &lt;Formation Method of Photosensitive Resin Film&gt; The method for forming a photosensitive resin film according to the first embodiment of the present invention includes the following steps: before and after the addition of the ink-repellent agent a step of forming a photosensitive resin composition having a difference in surface energy of 2 mN/m or more; and coating the photosensitive resin composition on a substrate or a temporary support and vacuum drying to form a photosensitive resin film. In the method for forming a photosensitive resin film according to the second embodiment of the present invention, a coating step of applying a photosensitive resin composition containing an ink-repellent agent to a substance φ is provided, and a coating step from the film surface A drying step in which the flow rate of the coating film formed by coating is formed by a flow rate of 0.5 m/s or less of a height of 0.5 cm. The method of forming the photosensitive resin film according to the first and second embodiments of the present invention may be carried out by providing other steps as needed. - Photosensitive resin composition - The photosensitive resin composition of the present invention contains at least one type of ink-repellent agent, and an initiator, a binder, an ethylenically unsaturated compound, a color material, and It is composed of other additives. # The photosensitive resin composition is composed of an ink-repellent agent, so that the water-repellent and ink-repellent properties of the image surface formed by using the photosensitive resin composition can be improved. Further, the photosensitive resin composition is suitable for the method for forming a photosensitive resin film of the present invention, and a resin composition containing an ink-repellent agent can be used, and the film surface operation at the time of film formation can be easily performed, and water-repellent and ink-repellent can be given. A coating film having high in-plane uniformity is obtained. Since the water contact angle is measured by the method described in JIS R3 2 5 7 by containing the ink-repellent, the water contact angle of the image surface before the heat treatment is applied as -11-200841125 as A°, at 24 0 °C For 50 minutes, the water contact angle of the image surface after cooling treatment is regarded as 8°, and (B°-A.) is 20° or more for water repellency and ink repellency. The water connection is as follows. Further, since the ink repellent is contained, the water repellency and the ink repellency of the surface of the painting wall formed by the use of the photosensitive light can be maintained, and the adhesion between the wall and the substrate on which the painting wall is formed can be maintained. In the recessed portion, the coloring liquid composition is applied to form a color filter, and color mixing, color unevenness, and the like can be suppressed, and the photosensitive resin group ink of the first embodiment of the present invention is added before and after the addition. When the surface energy difference is 2 mN/m and the film thickness uniformity, the surface energy difference is more than 4 mN/m, more preferably 2.1 mN/m or more and 3, by making an ink-repellent agent. Before the surface energy difference between the addition and the added photosensitive surface is 2 mN/m or more, the photosensitive resin film formed by using the resin composition is subjected to exposure treatment, and the pattern image formed on the substrate can be dialed. The water is good. Further, by vacuum drying, the occurrence of variations in the photosensitive resin formed by coating or transfer on the photosensitive suppression substrate is formed. In general, the addition of an ink repellency reduces the sensitivity of the photosensitive resin. Therefore, before and after the addition of the ink-repellent agent, the surface energy before the addition can be subtracted from the surface energy after the addition. The surface energy can be determined by, for example, a surface tension meter, and the contact angle difference antenna is given for 1 hour. The detailed resin composition maintains the detachment well, in the colored area of the painted wall, and the scoop occurs. For the sake of things, dial the above. The coating is from 2 mN/m to less than .5 mN/m. Resin composition The photosensitivity, development, heat and ink repellency of the ink are formed into a resin film, so that the surface energy of the film thickness in the surface of the film can be poor, which means that m 〇-12- 200841125 By adding 0.01 to 30% by mass of an ink-repellent to be described later to the total solid content of the photosensitive resin composition, the surface energy difference is within the above range. In the present invention, the amount of the ink-repellent agent added is preferably 〇.% by mass or more, and particularly preferably 0.2% by mass, based on the total solid content of the photosensitive resin composition. The above is 10% by mass or less, and more preferably 5% by mass or more and t% by mass or less. 1) Ink-repellent agent # The photosensitive resin composition of the present invention contains at least one type of ink-repellent agent. The ink-repellent agent is preferably a compound containing a halogen atom or a fluorine atom having a small affinity for a resin component such as a binder which is contained in a material such as a black matrix or the like, and more preferably a fluorine atom-containing compound. The above-mentioned ruthenium atom-containing compound may, for example, be a linear organopolysiloxane having a molecular weight of several thousand to several hundreds of thousands in the following repeating units. # [ t ' --Si—Ο--

I R 」η 於前述重複單位中,η表示2以上的整數’ R各自獨立 地表示碳數1〜1〇的烷基、烯基、或苯基。藉由稀疏地交 聯如此的線狀有機聚矽氧烷以得到矽氧橡膠。交聯所用的 交聯劑,係所謂室溫(低溫)硬化型的矽氧橡膠所使用的乙醯 200841125 氧基矽院、酮肟矽院、烷氧基砂院、胺基砂院、醯胺基矽 烷、烯氧基矽烷等,通常與線狀的有機聚矽氧烷之末端爲 羥基者組合,分別得到脫乙酸型、脫肟型、脫醇型、脫胺 型、脫醯胺型、脫酮型的矽氧橡膠。又,於矽氧橡膠中, 添加作爲觸媒的少量有機錫化合物等。 作爲前述含氟原子的化合物,可合適地舉出含有具氟原 子的重複單位之化合物,從撥墨性之點來看,較佳爲含有(a) 在側鏈至少具有氟原子的重複單位、(b)在側鏈具有聚醚構 # 造的重複單位及(c)在側鏈具有羧基的重複單位的含氟化合 物。 以下以前述含氟化合物爲中心作詳細說明。 〜(a)在側鏈至少具有氟原子的重複單位〜 本發明的含氟化合物較佳爲含有(a)在側鏈至少具有氟 原子的重複單位。藉此,可給予撥水·撥墨性。作爲在側 鏈至少具有氟原子的重複單位,較佳爲總碳數4〜8的具氟 化烷基的重複單位,氟化烷基可爲直鏈或支鏈。更佳可舉 ® 出下述構造式(A)。 R1I R ′η η In the above repeating unit, η represents an integer of 2 or more. R each independently represents an alkyl group, an alkenyl group or a phenyl group having 1 to 1 carbon atoms. Such a linear organopolyoxane is sparsely crosslinked to obtain a silicone rubber. Crosslinking agent used for cross-linking is a so-called room temperature (low temperature) hardening type of silicone rubber. Ethylene 200841125 Oxygen enamel, ketone broth, alkoxy sand, amine sand, guanamine A decyl alkane or an oxy oxane or the like is usually combined with a hydroxyl group at the end of a linear organopolyoxane to obtain a deacetic acid type, a deamination type, a dealcoholization type, a deamination type, a dealuamine type, and a deacetylation type. Ketone type silicone rubber. Further, a small amount of an organic tin compound or the like as a catalyst is added to the silicone rubber. The compound containing a fluorine atom-containing repeating unit is preferably a compound containing a repeating unit having a fluorine atom, and preferably contains (a) a repeating unit having at least a fluorine atom in a side chain, from the viewpoint of ink repellent property. (b) a fluorine-containing compound having a repeating unit of a polyether structure in the side chain and (c) a repeating unit having a carboxyl group in a side chain. Hereinafter, the fluorine-containing compound will be described in detail. - (a) a repeating unit having at least a fluorine atom in a side chain - The fluorine-containing compound of the present invention preferably contains (a) a repeating unit having at least a fluorine atom in a side chain. Thereby, water repellency and ink repellency can be given. As the repeating unit having at least a fluorine atom in the side chain, a repeating unit having a fluorinated alkyl group having a total carbon number of 4 to 8 is preferable, and the fluorinated alkyl group may be a straight chain or a branched chain. More preferably, the following structural formula (A) is used. R1

X—L^Rf 構造式(A) -14- 200841125 前述構造式(A)中’ Rl表示氫原子、或碳數1〜5的烷基。 於碳數1〜5的院基,例如可含有甲基、乙基等。 前述構造式(A)中’ a表示在含氟化合物之總質量中所佔 有的構造式(A)之質量比率(質量%)。a的具體範圍係如後 述。 前述構造式(A)中、X1表示醚基、酯基、醯胺基、伸芳 基、或2價的雜環殘基。 作爲X 1所表示的伸芳基’較佳爲總碳數6〜2 0的伸芳 Φ 基,例如可舉出伸苯基、伸萘基、伸蒽基、伸聯苯基,此 等亦可經〇-、p-、m-取代。其中,更佳爲碳數6〜12的伸 芳基,特佳爲伸苯基、伸聯苯基。 作爲X1所表示的雜環殘基,例如較佳爲從含有氮原子 或串/原子當作環的構成貝之5貝或6員雜環而來的2價雜 環殘基。作爲具體例子,卩比B定環、_ π定環、啦哄環、噻嗖環、 苯并噻唑環、噚唑環、苯并噚唑環、異噚唑環、吡嗤環、咪 口坐環、嗤n林環、噻二d坐環等係合適,從啦D定環、噻二哇環 ^ 等而來的2價雜環殘基爲更佳。 於上述中,作爲X1,較佳爲下述連結基或具有下述構造 的連結基。X—L^Rf Structural Formula (A) -14- 200841125 In the above structural formula (A), R1 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. The hospital base having a carbon number of 1 to 5 may contain, for example, a methyl group or an ethyl group. In the above structural formula (A), 'a' represents a mass ratio (% by mass) of the structural formula (A) which is present in the total mass of the fluorine-containing compound. The specific range of a is as follows. In the above structural formula (A), X1 represents an ether group, an ester group, a decylamino group, an extended aryl group, or a divalent heterocyclic residue. The exoaryl group represented by X 1 is preferably an exo-aryl group having a total carbon number of 6 to 20, and examples thereof include a phenyl group, a naphthyl group, a fluorene group, and a biphenyl group. It can be substituted by 〇-, p-, m-. Among them, an aryl group having a carbon number of 6 to 12 is more preferred, and a phenyl group and a phenyl group are particularly preferred. The heterocyclic residue represented by X1 is, for example, preferably a divalent heterocyclic residue derived from a 5-shell or 6-membered heterocyclic ring containing a nitrogen atom or a string/atom as a ring. As a specific example, the oxime ratio B ring, _ π ring, oxime ring, thioxan ring, benzothiazole ring, carbazole ring, benzoxazole ring, isoxazole ring, pyridinium ring, ip mouth The ring, the 嗤n forest ring, the thiadipine d ring, and the like are suitable, and the divalent heterocyclic residue derived from the D ring, the thiophene ring, etc. is more preferable. In the above, X1 is preferably a linking group or a linking group having the following structure.

200841125 此處,Rx表示氫原子、總碳數1〜12的烷基、或總碳數 6〜2 0的芳基。 作爲Rx所表示的總碳數1〜1 2的烷基,例如可舉出甲 基、乙基,丙基'丁基、己基、辛基、十二基的無取代烷 基、以及具有醚基、硫醚基、酯基、醯胺基、胺基、胺甲 酸酯基、羥基等的取代基之取代烷基。其中,較佳爲總碳 數1〜8的烷基,更佳爲甲基、丁基、辛基。 作爲Rx所表示的總碳數6〜20的芳基,例如可舉出苯 基、萘基、甲基苯基、甲氧基苯基、壬基苯基。其中,較 佳爲總碳數6〜1 5的芳基,更佳爲苯基、壬基苯基。 於前述構造式(A)中,作爲L1,較佳爲下述連結基或具 有下述構造的連結基。Here, Rx represents a hydrogen atom, an alkyl group having a total carbon number of 1 to 12, or an aryl group having a total carbon number of 6 to 20%. Examples of the alkyl group having a total carbon number of 1 to 12 represented by Rx include a methyl group, an ethyl group, a propyl 'butyl group, a hexyl group, an octyl group, an unsubstituted alkyl group having a dodecyl group, and an ether group. a substituted alkyl group having a substituent of a thioether group, an ester group, a decylamino group, an amine group, a urethane group, a hydroxyl group or the like. Among them, an alkyl group having a total carbon number of 1 to 8 is preferred, and a methyl group, a butyl group or an octyl group is more preferred. Examples of the aryl group having a total carbon number of 6 to 20 represented by Rx include a phenyl group, a naphthyl group, a methylphenyl group, a methoxyphenyl group, and a nonylphenyl group. Among them, an aryl group having a total carbon number of 6 to 15 is more preferable, and a phenyl group or a nonylphenyl group is more preferable. In the above structural formula (A), as L1, the following linking group or a linking group having the following structure is preferable.

RY表示氫原子、甲基。 η表示2〜20的整數,較佳表示4〜12的整數。 Υ更佳爲單鍵、下述連結基、或具有下述構造的連結基。 200841125RY represents a hydrogen atom or a methyl group. η represents an integer of 2 to 20, preferably an integer of 4 to 12. The ruthenium is preferably a single bond, a linking group described below, or a linking group having the following structure. 200841125

n表示2〜20的整數’較佳表示4〜12的整數。 R3表示氫原子或碳數1〜5的烷基,較佳爲氫原子。 前述構造式(Α)中,Rf表示含氟的基。Rf較佳爲下述構 造的含氟基、或具有下述構造的基之含氟基。 十 CmF 況F j 況H] [/CF3] 7cf3 乂 -CmF2nT-CF €F3 — 一 xcf3 jn represents an integer of 2 to 20', and preferably represents an integer of 4 to 12. R3 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, preferably a hydrogen atom. In the above structural formula (Α), Rf represents a fluorine-containing group. Rf is preferably a fluorine-containing group having the following structure or a fluorine-containing group having a group having the following structure. Ten CmF condition F j condition H] [/CF3] 7cf3 乂 -CmF2nT-CF €F3 — one xcf3 j

m表示1〜20的整數,較佳表示4〜12的整數。 於上述構造式(A)之中,R1爲氫原子,χΐ爲酯基,Li爲 下述連結基或具有下述構造的連結基(RY、η、及Y係如前 述,較佳的態樣亦與前述同樣),Rf爲前述構造的含氟基、 或具有前述構造的基之含氟基的情況係較佳。 -17- 200841125m represents an integer of 1 to 20, preferably an integer of 4 to 12. In the above structural formula (A), R1 is a hydrogen atom, ruthenium is an ester group, and Li is a linking group or a linking group having the following structure (RY, η, and Y are as described above, and preferred aspect) Also in the same manner as described above, it is preferred that Rf is a fluorine-containing group having the above structure or a fluorine-containing group having a group having the above structure. -17- 200841125

〜(b)在側鏈具有聚醚構造的重複單位〜 本發明的含氟化合物更佳爲含有(b)在側鏈具有聚醚構 造的重複單位。由於含有此重複單位’可提高由含有含氟 化合物的感光性樹脂組成物所形成的硬化膜與基板之間的 密接性。作爲聚醚構造,可舉出聚環氧乙烷、聚環氧丙烷、 聚四氫呋喃等,此等亦可複數地組合。 更佳可舉出下述構造式(B)。 f R2j b 構造式(B) n 前述構造式(B)中,R2表示氫原子、碳數1〜5的烷基, 較佳表示氫原子、甲基、羥甲基。 前述構造式(B)中,η較佳爲4〜40,更佳爲9〜30,特 佳爲12〜24。 前述構造式(Β )中,b表示在含氟化合物的總全質量中所 佔有的構造式(B )之質量比率(質量%)。b的具體範圍係如後 200841125 述。 2價連結基。作爲2 2價連結基。作爲 前述構造式(B)中,L2較佳爲單鍵或 價連結基,更佳爲以下構造式所表示的 構造式(B)中的L2,更佳爲單鍵。~ (b) a repeating unit having a polyether structure in a side chain - The fluorine-containing compound of the present invention more preferably contains (b) a repeating unit having a polyether structure in a side chain. By including this repeating unit', the adhesion between the cured film formed of the photosensitive resin composition containing a fluorine-containing compound and the substrate can be improved. Examples of the polyether structure include polyethylene oxide, polypropylene oxide, polytetrahydrofuran, and the like, and these may be combined in plural. More preferably, the following structural formula (B) is mentioned. f R2j b Structural Formula (B) n In the above structural formula (B), R2 represents a hydrogen atom and an alkyl group having 1 to 5 carbon atoms, and preferably represents a hydrogen atom, a methyl group or a hydroxymethyl group. In the above structural formula (B), η is preferably from 4 to 40, more preferably from 9 to 30, particularly preferably from 12 to 24. In the above structural formula (Β), b represents a mass ratio (% by mass) of the structural formula (B) which is present in the total total mass of the fluorine-containing compound. The specific range of b is as described in 200841125. 2-valent linkage. As a 2 2 valent linking group. In the above structural formula (B), L2 is preferably a single bond or a valent linking group, and more preferably L2 in the structural formula (B) represented by the following structural formula, more preferably a single bond.

ΗΗ

前述構造式(Β)中,μ示聚環氧乙院的重複單位聚 環氧丙烷的重複單位、或聚四氫呋喃的重複單位。再者, 作爲Μ,更佳爲具有下述構造的基。In the above structural formula (Β), μ represents a repeating unit of a repeating unit of polypropylene oxide, or a repeating unit of polytetrahydrofuran. Further, as the ruthenium, a group having the following structure is more preferable.

(c)(c)

R5表示氫原子或碳數1〜5的烷基。1表牙0 π不2〜20的整 數,更佳表示4〜12的整數。 作爲Μ ’較佳爲前述(a)所表示的環氧乙燒 711 _ ’ R5 較佳 爲’氫原子。 前述構造式(B)中,R4表示氫原子、碳數!〜 20的烷基、 或6〜15的芳基,該烷基及該芳基可爲無取代 哉具有取代 基。 作爲R4所表示的烷基,可舉出甲基、乙基 楚、丙基、己 基、辛基、十八基等,更佳爲甲基、辛基。 -1 9 - 200841125 作爲R4所表示的芳基,可舉出苯基、甲基苯基、壬基 苯基、甲氧基苯基等,較佳爲苯基、壬基苯基。 本發明的(b)在側鏈具有聚醚構造的重複單位,從撥墨性 之點來看,該聚醚構造較佳爲封端型。此處,聚醚構造爲 封端型係指重複單位中的聚醚構造之離主鏈的遠方之末端 爲羥基以外的烷基或芳基。具體地,例如指前述構造式(B) 中的R4爲烷基或芳基。 於本發明中,R4更佳爲甲基或苯基。 Φ 於上述構造式(B)之中,R2爲氫原子、甲基、或羥甲基, L2爲單鍵,Μ爲環氧乙烷鏈或下述基(R5表示氫原子。1表 示2〜20的整數),R4爲烷基或芳基之具封端型的聚醚構 造,η較佳爲1 2〜2 4的重複單位。R5 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. 1 tooth 0 π is not an integer of 2 to 20, more preferably an integer of 4 to 12. Preferably, the epoxicone 711 _ ' R5 represented by the above (a) is preferably a hydrogen atom. In the above structural formula (B), R4 represents a hydrogen atom and a carbon number! The alkyl group of -20, or the aryl group of 6-15, the alkyl group and the aryl group may be unsubstituted and have a substituent. The alkyl group represented by R4 may, for example, be a methyl group, an ethyl group, a propyl group, a hexyl group, an octyl group or an octadecyl group, and more preferably a methyl group or an octyl group. -1 9 - 200841125 The aryl group represented by R4 may, for example, be a phenyl group, a methylphenyl group, a nonylphenyl group or a methoxyphenyl group, and a phenyl group or a nonylphenyl group is preferred. The (b) repeating unit having a polyether structure in the side chain of the present invention is preferably a blocked type from the viewpoint of ink repellent property. Here, the term "polyether structure" as a capped type means an alkyl group or an aryl group other than a hydroxyl group at the distal end of the main chain from the polyether structure in the repeating unit. Specifically, for example, R4 in the above structural formula (B) is an alkyl group or an aryl group. In the present invention, R4 is more preferably a methyl group or a phenyl group. Φ In the above structural formula (B), R2 is a hydrogen atom, a methyl group or a methylol group, L2 is a single bond, and hydrazine is an ethylene oxide chain or a group (R5 represents a hydrogen atom. 1 represents 2~) An integer of 20), R4 is a blocked polyether structure of an alkyl group or an aryl group, and η is preferably a repeating unit of 1 2 to 2 4 .

作爲具有前述聚醚構造的乙烯基化合物之市售品,可舉 出日本油月旨(股)製:Blenmer ΡΜΕ200、ΡΜΕ550、ΡΜΕ1000、 50POEP-800P、ALE800、PE 1 3 00、ANE 1 3 00、PSE- 1 3 00、 PMEP- 1 200B04 1 ΜΑ、ΡΕ3 5 0、ΡΡ 800、新中村化學(股)製:Ν K Ester AM 1 30G、M23 0G、M90G、M40G、AMP-60G、 OC-18E、A-SAL-9E、A-CMP-5E、共榮社(股)製:Light Ester 04 1 ΜA 等。 〜(c)在側鏈具有羧基的重複單位〜 本發明的含氟化合物更佳爲含有(c)在側鏈具有羧基的 -20- 200841125 重複單位。作爲在側鏈具有羧基的重複單位,並沒有特別 的限制,可從眾所周知者中適當地選擇,例如可舉出(甲基) 丙烯酸'乙烯基苯甲酸、馬來酸、馬來酸單烷酯、富馬酸.、 伊康酸、巴豆酸、肉桂酸、山梨酸、氰基肉桂酸、丙烯酸 二聚物、具羥基的單體與環狀酸酐的加成反應物、ω-羧基-聚己內酯單(甲基)丙烯酸酯等。此等可以使用適宜製造者及 巾售品中任一者。 作爲前述具羥基的單體與環狀酸酐的加成反應物所用 的具羥基的單體,例如可舉出(甲基)丙烯酸2-羥乙酯等。作 爲前述環狀酸酐,例如可舉出馬來酸酐、苯二甲酸酐、環 己烷二羧酸酐等。 作爲前述市售品,可舉出東亞合成化學工業(股)製: A r ο n i X Μ- 5 3 00、Aronix M-5 4 00、Aronix M-5500、Aronix M-5 600、新中村化學工業(股)製:NK酯 CB-1、NK Ester CBX-1、共榮社油脂化學工業(股)製:hOA-MP、HOA-MS、A commercially available product of the vinyl compound having the polyether structure is exemplified by Nippon Oil Co., Ltd.: Blenmer® 200, ΡΜΕ550, ΡΜΕ1000, 50POEP-800P, ALE800, PE 1 3 00, ANE 1 3 00, PSE- 1 3 00, PMEP- 1 200B04 1 ΜΑ, ΡΕ3 5 0, ΡΡ 800, Xinzhongcun Chemical Co., Ltd.: Ν K Ester AM 1 30G, M23 0G, M90G, M40G, AMP-60G, OC-18E, A-SAL-9E, A-CMP-5E, and Kyoeisha Co., Ltd.: Light Ester 04 1 ΜA, etc. ~ (c) a repeating unit having a carboxyl group in a side chain - The fluorine-containing compound of the present invention more preferably contains (c) a repeating unit of -20-200841125 having a carboxyl group in a side chain. The repeating unit having a carboxyl group in the side chain is not particularly limited and may be appropriately selected from those skilled in the art, and examples thereof include (meth)acrylic acid 'vinyl benzoic acid, maleic acid, and monoalkyl maleate. , fumaric acid, itaconic acid, crotonic acid, cinnamic acid, sorbic acid, cyanocinnamic acid, acrylic acid dimer, addition reaction of hydroxyl group-containing monomer with cyclic anhydride, ω-carboxy-poly Lactone mono(meth)acrylate and the like. These can be used with any of the manufacturer and the towel. The hydroxyl group-containing monomer used for the addition reaction of the hydroxyl group-containing monomer and the cyclic acid anhydride may, for example, be 2-hydroxyethyl (meth)acrylate. Examples of the cyclic acid anhydride include maleic anhydride, phthalic anhydride, and cyclohexanedicarboxylic anhydride. As the above-mentioned commercial products, the East Asian Synthetic Chemical Industry Co., Ltd. system can be cited: A r ο ni X Μ - 5 3 00, Aronix M-5 4 00, Aronix M-5500, Aronix M-5 600, Xinzhongcun Chemical Industrial (stock) system: NK ester CB-1, NK Ester CBX-1, Kyoritsu Oil and Fat Chemical Industry Co., Ltd.: hOA-MP, HOA-MS,

大阪有機化學工業(股)製:Biscoat #2100等。於此等之 中’從顯像性優異、低成本之點來看,較佳爲下述構造式(C) 所表示的重複單位、(甲基)丙烯酸等。Osaka Organic Chemical Industry Co., Ltd.: Biscoat #2100 and so on. Among these, 'the repeating unit represented by the following structural formula (C), (meth)acrylic acid, etc. are preferable from the viewpoint of excellent imaging performance and low cost.

構造式(C) 前述構造式(C)中,R6表示氫原子或甲基。 又’構造式(C)中,c表示含氟化合物之全質量中所佔有 -21 -In the above structural formula (C), R6 represents a hydrogen atom or a methyl group. Further, in the structural formula (C), c represents the total mass of the fluorine-containing compound - 21 -

200841125 的構造式(C)之質量比率(質量%)。c的具體範圍係如 於本發明的含氟化合物含有前述構造式(A)時, (A) 中的a之具體範圍較佳爲4〇〜85質量%,更佳爲 質量%,最佳爲5 0〜8 0質量%。 於本發明的含氟化合物含有前述構造式(B)時, (B) 中的b之具體範圍較佳爲10〜5〇質量%,更佳爲 質量%,最佳爲2 0〜5 0質量%。 於本發明的含氟化合物含有前述構造式(C)時, (C) 中的C之具體範圍較佳爲〇」〜5〇質量%,更佳| 質量%,最佳爲1〜3 0質量%。 含氟化合物中的氟原子含有率較佳爲3 6〜7 0質 佳爲3 6〜6 5質量%,最佳爲3 6〜60質量%。含氟化 的氟原子含有率若爲3 6質量%以上,則在著色區 RGB等的著色畫素)形成時,於給予著色液體組成牧 之際’可防止印墨在離畫壁上的蔓延、及合成時含 物的析出,而若爲60質量%以下,則可更提高含壽 的感光性樹脂組成物之溶解性。 含氟化合物在感光性樹脂組成物中的含量,對方^ 的總固體成分而言,較佳爲0.0 1〜3 0質量%,尤佳 〜20質量%,更佳爲0.1〜1〇質量%。含氟化合物序 若在前述範圍內,則在著色區域(例如RGB等的著 形成時,於給予著色液體組成物的液滴之際,可K 在離畫壁上的蔓延,得到與基板的密接性及離畫壁 作爲本發明的撥墨劑之含氟化合物,從撥墨 1後述。 構造式 5 0 〜8 5 構造式 15-50 構造式 I 1 〜40 量%,更 ;合物中 域(例如 J的液滴 氟化合 ^化合物 ^組成物 爲 0.05 3添加量 色畫素) Ϊ止印墨 濃度。 Ξ之點來 -22- 200841125 看,前述(a)的重複單位爲50〜75質量%,前述(b)的重複單 位爲20〜50質量%,前述(c)的重複單位爲1〜30質量%的 情況係較佳。 本發明的含氟化合物之分子量,以凝膠滲透層析術 (GPC)所得到的聚苯乙烯換算之重量平均分子量較佳爲 2000 〜3〇〇〇〇,更佳爲 3000 〜20000。 以下顯示本發明的含氟化合物之具體例子[例示化合物 (1)〜(2 6)]。但是,於本發明中,不受此等所限制。再者, ® 關於各成分的組成比(a、b、c) ’可在前述較佳的組成比之 範圍內選擇。Mass ratio (% by mass) of the structural formula (C) of 200841125. The specific range of c is such that when the fluorine-containing compound of the present invention contains the above structural formula (A), the specific range of a in (A) is preferably from 4 to 85% by mass, more preferably from % by mass, most preferably 5 0 to 8 0% by mass. When the fluorine-containing compound of the present invention contains the above structural formula (B), the specific range of b in (B) is preferably 10 to 5 % by mass, more preferably % by mass, most preferably 2 to 50% by mass. %. When the fluorine-containing compound of the present invention contains the above structural formula (C), the specific range of C in (C) is preferably 〇" to 5 〇 mass%, more preferably | mass%, most preferably 1 to 30 mass. %. The fluorine atom content in the fluorine-containing compound is preferably from 3 6 to 7 0, preferably from 3 6 to 65% by mass, most preferably from 3 6 to 60% by mass. When the content of the fluorinated fluorine atom is 36% by mass or more, when the coloring RGB such as the colored region RGB is formed, the ink can be prevented from spreading on the paint wall when the coloring liquid is administered. In the case of the precipitation of the content during the synthesis, the solubility of the photosensitive resin composition having a longevity can be further improved if it is 60% by mass or less. The content of the fluorine-containing compound in the photosensitive resin composition is preferably from 0.01 to 30% by mass, particularly preferably from 20 to 20% by mass, more preferably from 0.1 to 1% by mass, based on the total solid content of the compound. When the fluorine-containing compound is in the above range, in the case where the colored region (for example, RGB or the like is formed, when the liquid droplet of the colored liquid composition is applied, K can be spread on the drawing wall to obtain adhesion to the substrate. The fluorochemical compound of the ink-repellent agent of the present invention is described later from the ink-repellent agent 1. Structural formula 5 0 to 8 5 Structural formula 15-50 Structural formula I 1 to 40 % by weight, more; (For example, J droplet fluorination compound ^ composition is 0.05 3 added amount of color pixels) Ϊ stop printing ink concentration. Ξ之点来-22- 200841125 See, the above (a) repeat unit is 50~75 mass %, the repeating unit of the above (b) is 20 to 50% by mass, and the repeating unit of the above (c) is preferably 1 to 30% by mass. The molecular weight of the fluorine-containing compound of the present invention is determined by gel permeation chromatography. The polystyrene-equivalent weight average molecular weight obtained by the technique (GPC) is preferably from 2,000 to 3 Å, more preferably from 3,000 to 20,000. Specific examples of the fluorine-containing compound of the present invention are shown below [exemplary compound (1) ~(2 6)] However, in the present invention, it is not limited thereto. Who, ® on the composition ratio of the components (a, b, c) 'may be selected in the range of the preferred ratio of the composition.

-23- 200841125 〔例示化合物(υ〕-23- 200841125 [Illustrative compound (υ]

a 斗 ch3 ο 9a bucket ch3 ο 9

c OH 〔例示化合物(3)〕c OH [exemplified compound (3)]

[例示化合物(4)〕 ◦^\^C6F13 ο 卜CH3〇 23[Exemplary Compound (4)] ◦^\^C6F13 ο Bu CH3〇 23

c OH 〔例示化合物(5)〕 a 〔例示化合物(6)〕c OH [exemplified compound (5)] a [exemplified compound (6)]

ia O o-f^s/0 c 、CH3 〇八〇23 k^cv〇Ia O o-f^s/0 c , CH3 〇 gossip 23 k^cv〇

COOHCOOH

ch3 0^0 23 k^COOH -24 - 200841125 〔例示化合物(7)〕 aCh3 0^0 23 k^COOH -24 - 200841125 [exemplary compound (7)] a

q^〇^Y^C6F13〇^〇 OHq^〇^Y^C6F13〇^〇 OH

〔例示化合物(8)〕[Illustrative Compound (8)]

a C6F13 〔例示化合物(9)〕 Οa C6F13 [Exemplified Compound (9)] Ο

&quot;CH3 ο^οη 23 a&quot;CH3 ο^οη 23 a

•CF fcF o^o^c4f8- CF〒3 〇^〇 〔例示化合物(1 0)〕 ο&quot; a iJ 5 〇^v^C6Fi3 o^o C例示化合物(1 1 )〕• CF fcF o^o^c4f8- CF〒3 〇^〇 [Exemplified compound (1 0)] ο&quot; a iJ 5 〇^v^C6Fi3 o^o C exemplified compound (1 1 )]

J a 〔例示化合物(1 2 )〕 b 0-J a [exemplified compound (1 2 )] b 0-

.0 .0 2§H3.0 .0 2§H3

c OHc OH

c ch3 o^oh 30c ch3 o^oh 30

〇 b 外 CH^^OH 45 -25 - 200841125 〔例示化合物(1 3 )〕 a _ 0^〇^\^C6F13 〇^〇·|^ν^〇 〔例示化合物(1 4 )〕〇 b 外 CH^^OH 45 -25 - 200841125 [Exemplified Compound (1 3 )] a _ 0^〇^\^C6F13 〇^〇·|^ν^〇 [Exemplified Compound (1 4 )]

i c 、CH3 o八OH 91i c , CH3 o eight OH 91

a C例示化合物(1 5)〕 a Q 人 Q^n^C6F13 〇 〔例示化合物(1 6)〕a C exemplified compound (1 5)] a Q person Q^n^C6F13 〇 [exemplary compound (16)]

bb

b 0,'0 〔例示化合物(1 7)〕b 0, '0 [exemplary compound (1 7)]

a Ο^Ό 4a Ο^Ό 4

ΌΌ

匸6「13 〇 丄 ,C6F13 30 b C例示化合物(1 8)〕匸6"13 〇 丄 , C6F13 30 b C exemplified compound (18)

c OH 30 -26 - 200841125 〔例示化合物(1 9)〕 a F:3c OH 30 -26 - 200841125 [exemplary compound (1 9)] a F: 3

[例示化合物(2 Ο)〕[Illustrative compound (2 Ο)]

a Nb 〇人〇a Nb 〇人〇

〔例示化合物(2 1 )〕[Illustrative Compound (2 1 )]

(例示化合物(2 2 )〕(Illustrated Compound (2 2 )]

aa

、〇a^C6F13 〔例示化合物(2 3 )〕 a 〇^〇-^^C6F13 q&lt; [例示化合物(2 4 )〕, 〇 a^C6F13 [exemplified compound (2 3 )] a 〇^〇-^^C6F13 q&lt; [exemplary compound (2 4 )]

a 0,、0a 0,,0

Jb 斗c8h17 οΊη 18Jb bucket c8h17 οΊη 18

Jb r i C 、〇f^0卜iC13H27 〇人〇H 9 c nJb r i C , 〇f^0卜iC13H27 〇人〇H 9 c n

0、J^、C8Hl7 0人0H -27 - 200841125 [例示化合物(2 5)〕0, J^, C8Hl7 0 people 0H -27 - 200841125 [exemplary compound (2 5)]

卜fb『 〇人 O^O^Y^C6F13卜fb『 〇人 O^O^Y^C6F13

OHOH

2)引發劑 本發明的感光性樹脂組成物可以使用至少1種的引發劑 來構成。 作爲使感光性樹脂組成物硬化的方法,一般爲用熱引發 劑的熱引發系統或用光引發劑的光引發系統,但於本發明 中由於使硬化後的離畫壁成爲如後述的形狀係重要的,故 較佳爲使用光引發系統。 光聚合引發劑係藉由可見光線、紫外線、遠紫外線、電 子線、X射線等的輻射線之照射(亦稱爲曝光),而可以產生 引發後述的乙烯性不飽和化合物(多官能性單體)之聚合的 活性種的化合物’可從眾所周知的光聚合引發劑或光聚合 引發劑系中作適當地選擇。 作爲光聚合引發劑或光聚合引發劑系,例如含三鹵甲基 的化合物、吖啶系化合物、苯乙酮系化合物、雙咪唑系化 合物、三哄系化合物、苯偶姻系化合物、二苯甲酮系化合物、 -28- 200841125 α -二酮系化合物、多核醌系化合物、咕噸酮系化合物、重氮 系化合物等。 具體地’可舉出特開200 1 - 1 1 723 0公報中記載的三鹵甲 基取代的三鹵甲基噚唑衍生物或s-三畊衍生物、美國專利第 423985〇號說明書中記載的三鹵甲基-s-三阱化合物、美國專 利第42 1 2976號說明書中的記載的三鹵甲基噚二唑化合物 等之含三鹵甲基的化合物; 9-苯基吖啶、9-吡啶基吖啶、9-吡哄基吖啶、L2-雙(9-11丫 口定 基)乙烷、1,3-雙(9-吖啶基)丙烷、ΐ,4-雙(9-吖啶基)丁烷、 1,5-雙(9-吖啶基)戊烷、1,6-雙(9-吖啶基)己烷、17-雙(9_ 吖啶基)庚烷、1,8-雙(9-吖啶基)辛烷、ΐ,9-雙(9-dTu定基)壬 烷、1,1〇-雙(9·吖啶基)癸烷、1511_雙(9-吖啶基)十一院、 1,1 2 -雙(9 -吖啶基)十二烷等的雙(9-吖啶基)烷類等的吖啶 系化合物;· 6-(對甲氧基苯基)-2,4-雙(三氯甲基)-s·三阱、6-[對(n,N-雙 (乙氧羰基甲基)胺基)苯基]-2,4-雙(三氯甲基)_s_三畊等的三 哄系化合物;以及’ 9,10-二甲基苯并啡哄、米蚩酮、二苯甲 酮/米蚩酮、六方基雙咪π坐/疏基苯并咪嗤、节基二甲基縮 酮、噻噸酮/胺、2,2,-雙(2,4-二氯苯基)-4,4^5,5^四苯基 •1,2’-雙咪唑等。 於上述之中,較佳爲從三鹵甲基含有化合物、吖啶系化 合物、本乙酮系化合物、雙咪唑系化合物、三阱系化合物所 :¾出的至少一種,特佳爲含有從含三鹵甲基的化合物及吖 啶系化合物中所選出的至少一種。三鹵甲基含有化合物、 -29- 200841125 吖D定系化合物在通用性且廉價之點亦有用的。 特佳地,前述含三鹵甲基的化合物係2 -三氯甲基-5 -(對 苯乙烯基苯乙烯基)-1,3,4-噚二唑、2-(對丁氧基苯乙烯 基)-5-三氯甲基-1,3,4-噚二唑,前述三阱系化合物係6_[對 (N,N-雙(乙氧羰基甲基)胺基)苯基]-2,4-雙(三氯甲基)_s_三 哄,前述吖啶系化合物係9-苯基吖啶,前述苯乙酮系化合物 係米蚩酮,前述雙咪唑系化合物係2,2,-雙(2,4-二氯苯 基)-4,4’,5,5’-四苯基-1,2’-雙咪哩。 前述光聚合引發劑可單獨地使用或倂用2種以上。 引發劑(尤其光聚合引發劑)在樹脂組成物中的總量,較 佳爲樹脂組成物的總固體成分(質量)之0.1〜20質量%,特 佳爲〇 . 5〜1 0質量%。前述總量若爲〇 · 1質量%以上,則可 高效率地進行樹脂組成物的光硬化,而若爲20質量%以下, 則可得到顯像時不發生脫落或表面龜裂的畫像圖案。 再者’於本發明中,感光性樹脂組成物的總固體成分(質 量)係意味感光性樹脂組成物中溶劑以外的全部成分。 前述光聚合引發劑亦可倂用供氫體而構成。作爲該供氫 體,從感度可更良化之點來看,較佳爲下述硫醇系化合物、 胺系化合物等。此處的「供氫體」係指對於藉由曝光而從 前述光聚合引發劑所產生的自由基,可供給氫原子的化合 物。 前述硫醇系化合物係以苯環或雜環當作母核,具有1個 以上的锍基直接鍵結於該母核的化合物(以下稱爲「硫醇系 供氫體」),該疏基較佳爲1〜3個,更佳爲1〜2個。又, -30- 200841125 前述胺系化合物係以苯環或雜環當作母核,具有1個以上 的胺基接鍵結於該母核的化合物(以下稱爲「胺系供氫 體」),該胺基較佳爲1〜3個,更佳爲1〜2個。再者,此 等供氫體亦可同時具有巯基及胺基。 作爲上述硫醇系供氫體的具體例子,可舉出2-巯基苯并 噻唑、2-锍基苯并噚唑、2-锍基苯并咪唑、2,5-二锍基-m 噻二唑、2-锍基-2,5-二甲基胺基吡啶等。於此等之中,較 佳爲2-锍基苯并噻唑、2-锍基苯并曙唑,特佳爲2_巯基苯 _ 并噻唑。 作爲上述胺系供氫體的具體例子,可舉出4,4’-雙(二甲 基胺基)二苯甲酮、4,4’-雙(二乙胺基)二苯甲酮、4·二乙胺 基苯乙酮、4-二甲基胺基苯丙酮、乙基-4-二甲基胺基苯甲 酸酯、4-二甲基胺基苯甲酸、4-二甲基胺基苯甲氰等。於此 等之中,較佳爲4,4’-雙(二甲基胺基)二苯甲酮、4,4,_雙(二 乙胺基)二苯甲酮,特佳爲4,4’-雙(二乙胺基)二苯甲酮。 前述供氫體可爲單獨或混合2種以上來使用,從所:$成 ^ 的畫像在顯像時不易自永久支持體上脫落,且強度及感度 亦可提高之點來看,較佳爲組合1種以上的硫醇系供氫體 與1種以上的胺系供氫體來使用。 作爲前述硫醇系供氫體與胺系供氫體的組合之具體例 子,可舉出2-锍基苯并噻唑/4,4’-雙(二甲基胺基)二苯甲 酮、2-锍基苯并噻唑/4,4’-雙(二乙胺基)二苯甲酮、2_疏基 苯并噚唑/4,4’-雙(二甲基胺基)二苯甲酮、2-锍基苯并_唑 /4,4’·雙(二乙胺基)二苯甲酮等。更佳的組合爲2_锍基苯并 -31- 200841125 噻唑/4,4,-雙(二乙胺基)二苯甲酮、2-巯基苯并噚唑/4,4’-雙 (二乙胺基)二苯甲酮,特佳的組合爲2_锍基苯并噻哇/4,4’_ 雙(二乙胺基)二苯甲酮。 於組合前述硫醇系供氫體與胺系供氫體時’硫醇系供氫 體(M)與胺系供氫體(A)的質量比(Μ: A),通常爲1 ·· 1〜1 :4, 更佳爲1 :1〜1 :3。前述供氫體在感光性樹脂組成物中的總 量,較佳爲感光性樹脂組成物的總固體成分(質量)之〇·1〜 2 0質量%,特佳爲0.5〜1 0質量%。 # 3)黏結劑 本發明的感光性樹脂組成物可合適地使用至少1種的黏 結劑來構成。 作爲黏結劑,較佳爲在側鏈具有羧酸基或羧酸鹽基等的 極性基之聚合物。作爲其例子,可舉出特開昭5 9-446 1 5號 公報、特公昭54-34327號公報、特公昭58-12577號公報、 特公昭54-25 957號公報、特開昭5 9-5 3 8 3 6號公報、及特開 昭59-7 1 (M8號公報中記載的甲基丙烯酸共聚物、丙烯酸共 ^ 聚物、伊康酸共聚物、巴豆酸共聚物、馬來酸共聚物、部 分酯化馬來酸共聚物等。又,亦可舉出在側鏈具有羧酸基 的纖維素衍生物。此外,在具有羥基的聚合物附加有環狀 酸酐者亦可被較佳地使用。 又’作爲特佳的例子,可舉出美國專利第4 1 3 93 9 1號說 明書中記載的(甲基)丙烯酸苄酯與(甲基)丙烯酸的共聚 物 '或(甲基)丙烯酸苄酯與(甲基)丙烯酸和其它單體的多元 共聚物。此等具有極性基的黏結劑聚合物可被單獨使用, -32- 200841125 或亦可以與通常的膜形成性聚合物倂用而成組成物的狀態 使用。 黏結劑在樹脂組成物中的含量,對於樹脂組成物的總固 體成分而言,一般爲20〜50質量%,較佳爲25〜45質量%。 4)乙烯性不飽和化合物 本發明的感光性樹脂組成物可以使用至少1種的乙烯性 不飽和化合物來構成。作爲乙烯性不飽和化合物,可單獨 地或與其它單體組合而使用下述化合物。 • 具體地,可舉出(甲基)丙烯酸第三丁酯、乙二醇二(甲基) 丙烯酸酯、(甲基)丙烯酸2-羥丙酯、三乙二醇二(甲基)丙烯 酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、2-乙基-2-丁基丙二 醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四 醇四(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、二季 戊四醇五(甲基)丙烯酸酯、聚氧乙基化三羥甲基丙烷三(甲 基)丙烯酸酯、三(2-(甲基)丙烯醯氧基乙基)異氰尿酸酯、 1,4-二異丙烯基苯、1,4-二羥基苯二(甲基)丙烯酸酯、八亞 ® 甲基二醇二(甲基)丙烯酸酯、苯乙烯、富馬酸二烯丙酯、偏 苯三酸三烯丙酯、(甲基)丙烯酸月桂酯、(甲基)丙烯醯胺、 苯二甲基雙(甲基)丙烯醯胺等。 又,亦可使用(甲基)丙烯酸2-羥乙酯、(甲基)丙烯酸2-羥丙酯、聚乙二醇單(甲基)丙烯酸酯等之具羥基的化合物與 六亞甲' 基二異氰酸酯、甲苯二異氰酸酯、二甲苯二異氰酸 酯等之與二異氰酸酯的反應物。 於此等之中,特佳爲季戊四醇四丙烯酸酯、二季戊四醇 -33- 200841125 六丙烯酸酯、二季戊四醇五丙烯酸酯、三(2-丙烯醯氧基乙 基)異氰尿酸酯。 乙烯性不飽和化合物在樹脂組成物中的含量,對於樹脂 組成物的總固體成分(質量)而言,較佳爲5〜80質量%,特 佳爲1 0〜70質量%。乙烯性不飽和化合物的含量若在前述 範圍內,則可確保組成物的曝光部對鹼顯像液的耐性,作 爲樹脂組成物時,可抑制膠黏性的增加而確保操作性。 5)色材 # 本發明的感光性樹脂組成物可以使用至少1種的色材來 構成。 作爲色材,可以使用眾所周知的著色劑(染料、顏料等), 具體地可合適地使用特開 2005-17716號公報[0038]〜 [005 4]中記載的顏料及染料、或特開2004-3 6 1 447號公報 [006 8]〜[0072]中記載的顏料、特開 2005 - 1 752 1號公報 [0080]〜[008 8]中記載的著色劑等。 於本發明的感光性樹脂組成物中,可合適地使用有機顏 ^ 料、無機顏料、染料等。特別地,於以本發明的感光性樹 脂組成物來構成遮光性的離畫壁形成用時,可以使用碳材 料(碳黑等)、氧化鈦、四氧化三鐵等的金屬氧化物粉、金屬 硫化物粉、金屬粉等的遮光材料、及紅、藍、綠色等的顏 料之混合物等。其中,較佳爲碳黑。 於使用顏料時,較佳爲使均勻分散於感光性樹脂組成物 中〇 色材在樹脂組成物中的含量,從縮短顯像時間的觀點來 -34- 200841125 看’對於樹脂組成物的總固體成分而言,較佳爲3 0〜7 0質 量%,尤佳爲4 0〜6 0質量%,更佳爲5 0〜5 5質量%。 顏料較佳爲當作分散液來使用。該分散液係可藉由將顔 料與顔料分散劑預先混合而得的組成物,添加及分散在後 述的有機溶劑(或媒液)中而調製成。上述媒液係指在塗料成 液體狀態時使顔料分散的媒質部分,包括與液狀的上述顔 料結合而鞏固塗膜的部分(黏結劑)、及用於溶解稀釋它的成 分(有機溶劑)。作爲使上述顔料分散時而使用的分散機,並 ® 沒有特別的限制,例如可舉出「顏料的事典」(朝倉邦造著、 第一版、朝倉書店、2000年、第438頁)中所記載的捏合機、 輥磨機、立式球磨機、超級硏磨機、溶解器、均質混合機、 砂磨機等習知的分散機。再者,亦可藉由該文獻第310頁 記載的機械磨碎,利用摩擦力作微粉碎。 色材(顏料)的粒徑,從分散安定性的觀點來看,數平均 粒徑較佳爲0.001〜Ο.ίμιη,更佳爲0.01〜0.08μπι。再者, 「粒徑」係指以微粒子的電子顯微鏡照片影像當作同面積 ® 的圓時之直徑,「數平均粒徑」係指求得1 00個粒子的粒 徑,將其平均之平均値。 6)其它成分 於感光性樹脂組成物中,除了前述1)〜5)的成分,亦可 添加下述的溶劑、界面活性劑、熱聚合防止劑、紫外線吸 收劑等。此外,可含有特開平1 1 - 1 3 3 600號公報中所記載的 「黏著助劑」或其它添加劑等。 •溶劑 -35 - 200841125 於本發明的感光性樹脂組成物中,除了前述成分,亦可 更使用有機溶劑。作爲溶劑的例子,可舉出甲基乙基酮、 丙二醇單甲基醚、丙二醇單甲基醚醋酸酯、環己酮、環己 醇、甲基異丁基酮、乳酸乙酯、乳酸甲酯、己內醯胺等。 •界面活性劑 於本發明的感光性樹脂組成物中,從可控制均一的膜 厚、有效果地防止塗布不均之觀點來看,較佳爲該感光性 樹脂組成物中適當地含有界面活性劑。 Φ 作爲上述界面活性劑,合適者例如是特開2 0 0 3 - 3 3 7 4 2 4 號公報、特開平1 1 - 1 3 3 600號公報中所揭示的界面活性劑。 •熱聚合防止劑 本發明的感光性樹脂組成物較佳爲含有熱聚合防止劑。 作爲熱聚合防止劑的例子,可舉出氫醌、氫醌單甲基醚、 對甲氧基酚、二第三丁基對甲酚、焦培酚、第三丁基兒茶 酚、苯醌、4,4’-硫雙(3-甲基-6-第三丁基酚)、2,2’-亞甲基 雙(4-甲基-6-第三丁基酚)、2-锍基苯并咪唑、啡噻阱等。 β ·紫外線吸收劑 於本發明的感光性樹脂組成物中,視需要可含有紫外,線 吸收劑。作爲紫外線吸收劑,可舉出特開平5-72724號公報 記載的化合物、以及水楊酸酯系、二苯甲酮系、苯幷三口坐 系、氰基丙烯酸酯系、鎳螯合物系、受阻胺系等。2) Initiator The photosensitive resin composition of the present invention can be constituted by using at least one type of initiator. As a method of curing the photosensitive resin composition, a thermal initiation system using a thermal initiator or a photoinitiator using a photoinitiator is generally used. However, in the present invention, the image-removed wall after hardening is a shape system as described later. Importantly, it is preferred to use a photoinitiation system. The photopolymerization initiator is irradiated with radiation (also referred to as exposure) of visible light, ultraviolet rays, far ultraviolet rays, electron beams, X-rays, or the like, and can generate an ethylenically unsaturated compound (polyfunctional monomer) which will be described later. The compound 'the polymerized active species' can be appropriately selected from a well-known photopolymerization initiator or photopolymerization initiator system. Examples of the photopolymerization initiator or the photopolymerization initiator include a trihalomethyl group-containing compound, an acridine compound, an acetophenone compound, a bisimidazole compound, a triterpenoid compound, a benzoin compound, and a diphenyl group. A ketone-based compound, a -28-200841125 α-diketone compound, a polynuclear oxime compound, a xanthone compound, a diazo compound, or the like. Specifically, the trihalomethyl-substituted trihalomethylcarbazole derivative or the s-tri-negative derivative described in JP-A-200 1 - 1 1 723 0 can be cited in the specification of US Pat. No. 423,985. a trihalomethyl-s-tripper compound, a trihalomethyl-containing compound such as a trihalomethyloxadiazole compound described in the specification of U.S. Patent No. 4,221,976; 9-phenyl acridine, 9 -pyridyl acridine, 9-pyridyl acridine, L2-bis(9-11丫口) ethane, 1,3-bis(9-acridinyl)propane, hydrazine, 4-double (9- Acridine)butane, 1,5-bis(9-acridinyl)pentane, 1,6-bis(9-acridinyl)hexane, 17-bis(9-acridinyl)heptane, 1 , 8-bis(9-acridinyl)octane, anthracene, 9-bis(9-dTu-decyl)decane, 1,1 fluorene-bis(9.acridinyl)decane, 1511_bis (9- An acridine compound such as a bis(9-acridinyl)alkane such as a decyl group or a 1,1 2 -bis(9-acridinyl)dodecane; 6-(p-methoxy Phenyl)-2,4-bis(trichloromethyl)-s·tripper, 6-[p-(n,N-bis(ethoxycarbonylmethyl)amino)phenyl]-2,4- Double (trichloromethane) )_s_Sansui et al., and '9,10-dimethylbenzophenanthrene, Michler's ketone, benzophenone/Minone, Hexagonal bis-pilycol/Siliary benzophenone Dimethoate, benzyl ketal, thioxanthone/amine, 2,2,-bis(2,4-dichlorophenyl)-4,4^5,5^tetraphenyl•1,2' - Bimidazole and the like. Among the above, at least one selected from the group consisting of a trihalomethyl group-containing compound, an acridine compound, a methyl ethyl ketone compound, a bisimidazole compound, and a triple well compound is preferable. At least one selected from the group consisting of a trihalomethyl compound and an acridine compound. Trihalomethyl-containing compounds, -29-200841125 吖D-based compounds are also useful in general and inexpensive. Particularly preferably, the aforementioned trihalomethyl-containing compound is 2-trichloromethyl-5-(p-styrylstyryl)-1,3,4-oxadiazole, 2-(p-butoxybenzene) Vinyl)-5-trichloromethyl-1,3,4-oxadiazole, the aforementioned tritrap system is 6-[p-(N,N-bis(ethoxycarbonylmethyl)amino)phenyl]- 2,4-bis(trichloromethyl)_s_triazine, the acridine compound is 9-phenyl acridine, the acetophenone compound is Michler's ketone, and the biimidazole compound is 2, 2, - bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-bisimidine. The photopolymerization initiator may be used singly or in combination of two or more. The total amount of the initiator (particularly the photopolymerization initiator) in the resin composition is preferably from 0.1 to 20% by mass, based on the total solid content (mass) of the resin composition, particularly preferably from 0.5 to 10% by mass. When the total amount is 〇·1 mass% or more, the resin composition can be photocured with high efficiency, and if it is 20% by mass or less, an image pattern in which no peeling or surface cracking occurs during development can be obtained. In the present invention, the total solid content (mass) of the photosensitive resin composition means all components other than the solvent in the photosensitive resin composition. The photopolymerization initiator may be formed by using a hydrogen donor. The hydrogen donor is preferably a thiol compound or an amine compound as described above from the viewpoint that the sensitivity can be further improved. The term "hydrogen donor" as used herein refers to a compound which can supply a hydrogen atom to a radical generated from the photopolymerization initiator by exposure. The thiol compound is a compound having a benzene ring or a hetero ring as a nucleus and having one or more sulfhydryl groups directly bonded to the nucleus (hereinafter referred to as "thiol hydrogen donor"). It is preferably 1 to 3, more preferably 1 to 2. Further, -30-200841125 The amine-based compound is a compound having a benzene ring or a heterocyclic ring as a nucleus and having one or more amine groups bonded to the nucleus (hereinafter referred to as "amine-based hydrogen donor"). The amine group is preferably from 1 to 3, more preferably from 1 to 2. Further, these hydrogen donors may have both a mercapto group and an amine group. Specific examples of the above-mentioned thiol-based hydrogen donor include 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzimidazole, and 2,5-dimercapto-m thiazide. Oxazole, 2-mercapto-2,5-dimethylaminopyridine, and the like. Among them, 2-mercaptobenzothiazole and 2-mercaptobenzoxazole are preferred, and 2-nonylbenzene-thiazole is particularly preferred. Specific examples of the amine-based hydrogen donor include 4,4'-bis(dimethylamino)benzophenone and 4,4'-bis(diethylamino)benzophenone, and 4 Diethylaminoacetophenone, 4-dimethylaminopropiophenone, ethyl-4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid, 4-dimethylamine Benzoic acid cyanide and the like. Among them, preferred are 4,4'-bis(dimethylamino)benzophenone, 4,4,-bis(diethylamino)benzophenone, and particularly preferably 4,4. '-Bis(diethylamino)benzophenone. The hydrogen donor may be used alone or in combination of two or more. It is preferable that the image of the image is not easily peeled off from the permanent support during development, and the strength and sensitivity are also improved. One or more kinds of thiol-based hydrogen donors and one or more kinds of amine-based hydrogen donors are used in combination. Specific examples of the combination of the above-described thiol-based hydrogen donor and the amine-based hydrogen donor include 2-mercaptobenzothiazole/4,4'-bis(dimethylamino)benzophenone, and 2 -mercaptobenzothiazole/4,4'-bis(diethylamino)benzophenone, 2-phenylthioxazole/4,4'-bis(dimethylamino)benzophenone 2-mercaptobenzoxazole/4,4'-bis(diethylamino)benzophenone. A more preferred combination is 2_mercaptobenzo-31- 200841125 thiazole/4,4,-bis(diethylamino)benzophenone, 2-mercaptobenzoxazole/4,4'-double (two A particularly preferred combination of ethylamino)benzophenone is 2-mercaptobenzothiazol/4,4'-bis(diethylamino)benzophenone. When the thiol-based hydrogen donor and the amine-based hydrogen donor are combined, the mass ratio of the thiol-based hydrogen donor (M) to the amine-based hydrogen donor (A) (Μ: A) is usually 1··1. ~1:4, more preferably 1:1~1:3. The total amount of the hydrogen donor in the photosensitive resin composition is preferably from 1 to 20% by mass, particularly preferably from 0.5 to 10% by mass, based on the total solid content (mass) of the photosensitive resin composition. #3) Adhesive The photosensitive resin composition of the present invention can be suitably used by using at least one type of binder. As the binder, a polymer having a polar group such as a carboxylic acid group or a carboxylate group in a side chain is preferred. For example, JP-A-59-446-15, JP-A-54-34327, JP-A-58-12577, JP-A-54-25 957, and JP-A-59- 5 3 8 3 No. 6 and JP-A 59-7 1 (Methylacrylic acid copolymer, acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer described in M8) And a partially esterified maleic acid copolymer, etc. Further, a cellulose derivative having a carboxylic acid group in a side chain may be mentioned. Further, a cyclic acid anhydride may be preferably added to a polymer having a hydroxyl group. Further, as a particularly preferable example, a copolymer of benzyl (meth)acrylate and (meth)acrylic acid described in the specification of U.S. Patent No. 4 1 3 93 9 1 or (meth) may be mentioned. a multicomponent copolymer of benzyl acrylate and (meth)acrylic acid and other monomers. These polar group-containing binder polymers can be used alone, -32-200841125 or can also be used with conventional film-forming polymers. The state of the composition is used. The content of the binder in the resin composition, for the tree The total solid content of the composition is generally 20 to 50% by mass, preferably 25 to 45% by mass. 4) Ethylene unsaturated compound The photosensitive resin composition of the present invention may use at least one kind of ethylenicity. It is composed of a saturated compound. As the ethylenically unsaturated compound, the following compounds may be used singly or in combination with other monomers. • Specific examples thereof include tert-butyl (meth)acrylate, ethylene glycol di(meth)acrylate, 2-hydroxypropyl (meth)acrylate, and triethylene glycol di(meth)acrylate. , trimethylolpropane tri (meth) acrylate, 2-ethyl-2-butyl propylene glycol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, Dipentaerythritol hexa(meth) acrylate, dipentaerythritol penta (meth) acrylate, polyoxyethylated trimethylolpropane tri(meth) acrylate, tris(2-(meth) propylene decyloxy Ethyl)isocyanurate, 1,4-diisopropenylbenzene, 1,4-dihydroxybenzenedi(meth)acrylate, VIII® methyl glycol di(meth)acrylate, benzene Ethylene, diallyl fumarate, triallyl trimellitate, lauryl (meth)acrylate, (meth)acrylamide, benzyldimethylbis(meth)acrylamide, and the like. Further, a compound having a hydroxyl group such as 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate or polyethylene glycol mono(meth)acrylate may be used, and a hexamethylene group may be used. A reaction product with a diisocyanate such as diisocyanate, toluene diisocyanate or xylene diisocyanate. Among them, particularly preferred are pentaerythritol tetraacrylate, dipentaerythritol-33-200841125 hexaacrylate, dipentaerythritol pentaacrylate, and tris(2-propenyloxyethyl)isocyanurate. The content of the ethylenically unsaturated compound in the resin composition is preferably from 5 to 80% by mass, particularly preferably from 10 to 70% by mass, based on the total solid content (mass) of the resin composition. When the content of the ethylenically unsaturated compound is within the above range, the resistance of the exposed portion of the composition to the alkali developing solution can be ensured, and when it is a resin composition, the increase in the adhesiveness can be suppressed to ensure the workability. 5) Color material # The photosensitive resin composition of the present invention can be formed using at least one color material. As the color material, a well-known coloring agent (dye, pigment, etc.) can be used, and specifically, the pigments and dyes described in JP-A-2005-17716 [0038] to [0054], or the special opening 2004- can be suitably used. The pigments described in JP-A-2005- 1 752 1 [0080] to [0088], and the like. In the photosensitive resin composition of the present invention, an organic pigment, an inorganic pigment, a dye or the like can be suitably used. In particular, when forming a light-blocking paint wall using the photosensitive resin composition of the present invention, a metal oxide powder such as a carbon material (such as carbon black), titanium oxide or triiron tetroxide, or a metal can be used. A light-shielding material such as a sulfide powder or a metal powder, or a mixture of pigments such as red, blue, and green. Among them, carbon black is preferred. When the pigment is used, it is preferred to uniformly disperse the content of the bismuth material in the resin composition in the photosensitive resin composition, from the viewpoint of shortening the development time - 34-200841125 See 'Total solids of the resin composition The content of the component is preferably from 30 to 70% by mass, particularly preferably from 40 to 60% by mass, more preferably from 50 to 5% by mass. The pigment is preferably used as a dispersion. The dispersion can be prepared by adding and dispersing a composition obtained by preliminarily mixing a pigment and a pigment dispersant in an organic solvent (or a vehicle) to be described later. The vehicle liquid refers to a medium portion which disperses the pigment when the coating material is in a liquid state, and includes a portion (adhesive agent) which is combined with the liquid pigment to solidify the coating film, and a component (organic solvent) for dissolving and diluting the pigment. The dispersing machine used for dispersing the above-mentioned pigments is not particularly limited, and for example, it is described in the "Pigment of the Pigment" (asakura, the first edition, the Asakura Bookstore, 2000, p. 438). Conventional dispersers such as kneaders, roll mills, vertical ball mills, super honing machines, dissolvers, homomixers, sand mills, and the like. Further, it can also be finely pulverized by frictional force by mechanical grinding as described on page 310 of the document. The particle diameter of the color material (pigment) is preferably from 0.001 to Ο. ίμιη, more preferably from 0.01 to 0.08 μm, from the viewpoint of dispersion stability. In addition, "particle size" refers to the diameter when the electron micrograph of the microparticles is taken as the circle of the same area®, and the "number average particle diameter" refers to the particle diameter of 100 particles, which is averaged on average. value. 6) Other components In the photosensitive resin composition, the following solvents, surfactants, thermal polymerization inhibitors, ultraviolet absorbers, and the like may be added in addition to the components of the above 1) to 5). Further, the "adhesive aid" described in JP-A No. 1 1 - 1 3 3 600 or other additives may be contained. - Solvent -35 - 200841125 In the photosensitive resin composition of the present invention, an organic solvent may be further used in addition to the above components. Examples of the solvent include methyl ethyl ketone, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, cyclohexanone, cyclohexanol, methyl isobutyl ketone, ethyl lactate, and methyl lactate. , caprolactam and the like. • Surfactant In the photosensitive resin composition of the present invention, from the viewpoint of controlling the uniform film thickness and effectively preventing coating unevenness, it is preferred that the photosensitive resin composition appropriately contains interfacial activity. Agent. Φ As the above-mentioned surfactant, a surfactant disclosed in Japanese Laid-Open Patent Publication No. H03- 3 3 7 4 2 4 or JP-A No. 1 1 - 1 3 3 600 is suitable. • Thermal polymerization inhibitor The photosensitive resin composition of the present invention preferably contains a thermal polymerization inhibitor. Examples of the thermal polymerization inhibitor include hydroquinone, hydroquinone monomethyl ether, p-methoxyphenol, di-tert-butyl-p-cresol, pyrophenol, tert-butylcatechol, and benzoquinone. , 4,4'-thiobis(3-methyl-6-tert-butylphenol), 2,2'-methylenebis(4-methyl-6-tert-butylphenol), 2-锍Benzimidazole, morphine trap and the like. β·Ultraviolet absorber In the photosensitive resin composition of the present invention, an ultraviolet absorber or a line absorber may be contained as needed. Examples of the ultraviolet ray absorbing agent include a compound described in JP-A-H05-72724, a salicylate-based system, a benzophenone-based compound, a benzoquinone-based system, a cyanoacrylate-based compound, and a nickel chelate compound. Hindered amines and the like.

具體地,可舉出水楊酸苯酯、4-第三丁基苯基水楊酸 酯、2,4-二第三丁基苯基-3’,5’-二第三-4’-羥基苯甲酸酯、 4-第三丁基苯基水楊酸酯、2,4-二羥基二苯甲酮、2-羥基-I -36 - 200841125 甲氧基二苯甲酮、2-羥基-4-正辛氧基二苯甲酮、2-(2,-羥基 -5’-甲基苯基)苯并三唑、2-(2,_羥基-3,_第三丁基_5,_甲基苯 基)-5-氯苯并三唑、乙基-2-氰基-3,3-二苯基丙烯酸酯、2,2,-經基-4-甲氧基二苯甲酮、鎳二丁基二硫代胺甲酸酯、雙 (2,2,6,6-四甲基·4·吡啶)-癸二酸酯、4-第三丁基苯基水楊酸 酯、水楊酸苯酯、4 -羥基·2,2,6,6 -四甲基哌阱縮合物、琥珀 酸-雙(2,2,6,6-四甲基-4-哌啶基)·酯、2-[2 -羥基- 3,5-雙(α,α-二甲基苄基)苯基]-2Η-苯并三唑、7-{ [4-氯- 6-(二乙胺基)-5-φ 三畊基]胺基}_3·苯基香豆素等。 一塗布步驟一 於塗布步驟中’至少塗布前述含有撥墨劑的感光性樹脂 組成物。 作爲塗布方法,有於永久支持體所成的基板之上塗布基 板上而直接形成離畫壁的方法,及將後述的在成感光性轉 印材料的臨時支持體之上所塗布形成的感光性樹脂組成物 所成的層’轉印到永久支持體所成的基板上,以形成離畫 ® 壁的方法。 因此,藉由在基板的至少一面使用前述的感光性樹脂組 成物,或藉由使用後述的本發明之感光性轉印材料,可形 成感光性樹脂層。 感光性樹脂組成物的塗布係沒有特別的限定,例如縫塗 布、桿塗布、簾幕塗布等眾所周知的塗布方法來進行。 於本發明中,作爲基板(永久支持體),可以使用玻璃、 陶瓷、合成樹脂薄膜等。特佳可舉出透明性且尺寸安定性 -37- 200841125 良好的玻璃或合成樹脂薄膜等的透明基板。 於所欲的基板上塗布時,在供應給後述的乾燥步驟後, 於該基板上直接形成感光性樹脂膜(感光性樹脂層)。又,於 所欲的臨時支持體上塗布時,在供應給後述的乾燥#,驟 後,轉印乾燥後的感光性樹脂膜,在所欲的基板上形成感 光性樹脂層。 於臨時支持體上塗布時,一般以輥狀的轉印材料爲標 的,由於使用長條的臨時支持體來進行塗布,藉由棉網搬 • 運時,塗布時的輸送速度比較快。因此,爲了抑制膜厚變 動(面內均一性良好),得到高度的變動小之離畫壁,不僅必 須考慮後述的乾燥步驟,而且亦必須考慮依賴於塗布速度 的連帶風量。 〜感光性轉印材料〜 本發明的感光性轉印材料,係使用前述本發明的感光性 樹脂膜之形成方法’在臨時支持體上設置感光性樹脂層而 構成者,視需要在臨時支持體與感光性樹脂層之間,更可 ® 設置熱塑性樹脂層、能隔氧的保護層(以下亦稱爲「隔氧層」) 等之其它層而構成。藉由使用感光性轉印材料,可容易且 低成本地形成離畫壁。 作爲使用感光性轉印材料在基板上轉印形成感光性樹 脂層的方法,例如可舉出以下步驟者。 1)於臨時支持體上,從該臨時支持體側,準備依順序設 有(熱塑性樹脂層)隔氧層、感光性樹脂層、保護該感光性樹 脂層的覆蓋片的感光性轉印材料。 -38- 200841125 2) 剝離去除覆蓋片,將所露出的感光性樹脂層之表面貼 合在永久支持體即基板上,通過層合機等作加熱、加壓而 積層(積層體)。作爲層合機,可以使用從習知的層合機、真 空層合機等中所適當選出者,爲了更提高生產性,亦可使 用自動切割層合機。 3) 於臨時支持體與隔氧層(或熱塑性樹脂層)之間剝離, 從前述積層體去除臨時支持體,而在基板上轉印形成感光 性樹脂層與隔氧層(及熱塑性樹脂層)。 ® 使用隔氧層時,感光性樹脂層由於被隔氧層保護而防止 大氣,故自動地成爲貧氧氣氛下。因此,有曝光不必在惰 性氣體下或減壓下進行,可照原樣地利用現狀的步驟,可 高感度化、高硬度化的優點。如後述地,亦可使用臨時支 持體當作「能阻氧的保護層」,該情況係不必設置隔氧層, 有助於步驟數目的減少。 於感光性轉印材料中,在臨時支持體與感光性樹脂層之 間,或具有隔氧層時在臨時支持體與隔氧層之間,亦可設 ^ 置熱塑性樹脂層。熱塑性樹脂層係爲具有鹼可溶性,至少 含有實質軟化點爲8 0 °C以下的樹脂成分,具備緩衝性的 層。藉由設置如此的熱塑性樹脂層,、可得到與永久支持體 良好的密接性。 作爲軟化點爲8 0 °C以下的鹼可溶性熱塑性樹脂,可舉出 乙烯與丙烯酸酯共聚物的皂化物、苯乙烯與(甲基)丙烯酸酯 共聚物的皂化物、乙烯基甲苯與(甲基)丙烯酸酯共聚物的皂 化物、聚(甲基)丙烯酸酯、(甲基)丙烯酸丁酯與醋酸乙烯酯 -39- 200841125 等的(甲基)丙烯酸酯共聚物等之皂化物等。 於熱塑性樹脂層中,可適當地選擇使用上述熱塑性樹脂 中的至少一種,再者可以使用「塑膠性能便覽」(日本塑膠 工業聯盟,全日本塑膠成形工業連合會編著,工業調査會 發行,1 9 6 8年1 0月2 5日發行)之軟化點約8 0 °c以下的有機 高分子之內的可溶於鹼水溶液者。 又,就軟化點爲80°C以上的有機高分子物質而言,藉由 在該有機高分子物質中添加與該高分子物質有相溶性的各 ^ 種可塑劑,可將實質的軟化點降低到80°C以下也可使用。 再者,於此等的有機高分子物質中,以調節與臨時支持體 的黏著力爲目的,在實質的軟化點不超過80°C的範圍內, 亦可添加各種聚合物或過冷卻物質、密接改良劑或界面活 性劑、脫模劑等。 作爲較佳的可塑劑之具體例子,可舉出聚丙二醇、聚乙 二醇、酞酸二辛酯、酞酸二庚酯、酞酸二丁酯、磷酸三甲 苯酯、磷酸甲苯基二苯酯、磷酸聯苯基二苯酯等。 ^ 作爲構成感光性轉印材料的臨時支持體,可從化學且熱 安定的可撓性物質所構成者中作適當的選擇。具體地,較 佳爲鐵氟龍(註冊商標)、聚對酞酸乙二酯、聚碳酸酯、聚乙 烯、聚丙烯、聚酯等、薄片或此等的積層體。上述臨時支 持體的厚度適當地係5〜3 00 μπι,較佳係20〜150 μιη。其厚 度若在前述範圍內,則可以不破壞臨時支持體的方式而容 易剝離,亦可隔著臨時支持體而進行解像度良好的曝光。 上述具體例子中,特佳爲2軸拉伸聚對酞酸乙二酯薄膜。 -40- 200841125 於感光性樹脂層之上’爲了保護以防止儲存時的污染或 損傷’較佳爲設置薄的覆蓋片。覆蓋片雖然可由與臨時支 持體相同或類似的材料所形/成,但是必須與感光性樹脂層 能容易分離。作爲覆蓋片材料,例如聚矽氧紙、聚烯烴或 聚四氟乙烯片係適當的。再者,覆蓋片的厚度一般爲4〜 40μπι,較佳爲5〜30μπι,特佳爲1〇〜25μιη。 於本發明的第2實施形態中,藉由在臨時支持體之上, 於前述塗布步驟中塗布至少含有撥墨劑的感光性樹脂組成 ® 物,於後述的乾燥步驟中,以自膜面起的高度〇.5cm之氣 體的流速爲0.5 m/s以下,使所塗布形成的塗布膜乾燥,在 臨時支持體上設置感光性樹脂層(感光性樹脂膜)而構成。 感光性轉印材料,於使用含有撥墨劑的樹脂組成物來設 置感光性樹脂層時,若使用撥墨劑,則塗布膜面的平滑操 作變困難,不易得到均一厚度。然而,於本發明的第1實 施形態中,可具有良好的撥墨性,同時可抑制膜厚變動, 形成膜內均一性高的離畫壁形成用之樹脂膜。藉此,可得 ^ 到高度不齊小的離畫壁(黑色矩陣等),進而能提供顯示不均 經抑制的可顯示影像之彩色濾光片及顯示裝置。 一乾燥步驟一 於本發明的第1實施形態之乾燥步驟中,將基板或臨時 支持體上所塗布的感光性樹脂組成物作真空乾燥而形成感 光性樹脂膜。前述真空乾燥,從所形成的感光性樹脂膜的 膜厚均一性之點來看,真空度較佳爲l(T3Pa以下,真空度 更佳爲l(T4Pa以下。真空乾燥亦可在真空狀態下於加熱狀 -41 - 200841125 態進行。加熱溫度例如可爲25〜1 00°C。於該情況下,從所 形成的感光性樹脂膜的膜厚均一性之點來看,較佳爲 1(T3 Pa以下真空度、30〜80 °C的乾燥溫度下作真空乾燥。 於本發明的第2實施形態之乾燥步驟中,以自膜面起的 高度〇.5cm之氣體的流速爲〇.5m/s以下的範圍,使前述塗 布步驟所塗布形成的塗布膜乾燥。於本步驟中,藉由使氣 體的流速成爲〇 · 5 m/s以下而作乾燥,可有效地防止由於含 有撥墨劑而使得膜面操作,具體地由於稍微的外力,而在 • 膜面發生塗布液的對流等,即膜面不均一的發生,可將塗 布膜的面內均一性壓低在±5 %以內。藉此,可形成高度不齊 少的離畫壁(黑色矩陣等)。換言之,氣體的流速若超過 0 · 5 m / s ’則塗布膜的面內均一性超過± 5 %,無法安定地形成 均一厚度的離畫壁。 前述氣體的流速,係爲在離塗布膜的膜表面〇.5cm的位 置(自膜表面起的高度爲0 · 5 cm)所測定的流速,爲使用、 SYSTEM 6243(KANOMAX(股)製)所測定之値。 ^ 氣體的流速,從乾燥時間等的生產性之觀點來看,較佳 爲 O.lm/s 〜0.5m/s〇 此處的氣體,係爲接觸塗布膜所存在的空間內所存在的 膜表面之氣體。又,氣體的流速,係由於膜表面附近所存 在的氣體被真空吸氣等所移動而發生的流動速度,或者相 反地亦可能是爲了從外部來乾燥,可供應給膜表面的氣體 (例如空氣等的乾燥風)之氣體的流動速度。 本步驟的乾燥係:(1)可將所供給的乾燥風以直接接觸或 -42- 200841125 不接觸膜面的方式來供給而進行’(2)亦可在保持或不保持 溫度下作真空吸氣而進行。 於前述(υ的情況中,適當地選擇乾燥風的溫度、含水 量、風向來進行。 於前述(2)的情況中’較佳爲以真空度成爲l(T3Pa以下 的方式作真空吸氣。真空度若爲1(T3 Pa以下,則可邊保持 膜內均一性,邊迅速地進行乾燥。於真空乾燥中,亦可在 真空狀態下及加熱狀態下進行真空乾燥。加熱溫度可爲2 5 • 〜1 0 0 °C。於本發明中,從所形成的感光性樹脂膜的膜厚均 一性之點來看,較佳爲在W4Pa以下的真空度、30〜80°C 的乾燥溫度作真空乾燥。 真空度的測定係可以使用一般的真空度計來測定,具體 地,可以使用皮拉尼(Pirani)真空計或膜片型真空計(例如日 本MKS(股)製的BarraUon真空計等)等來測定。 &lt;附有離畫壁之基板&gt; 本發明的附有離畫壁之基板,係經由使用本發明的感光 ® 性樹脂膜之形成方法、或本發明的感光性轉印材料,在基 板上形成感光性樹脂層的感光性樹脂層形成步驟,及使所 形成的感光性樹脂層,通過光罩曝光成圖案狀,顯像而形 成離畫壁的離畫壁形成步驟來製作。 本發明的第2實施形態之附有離畫壁之基板,係由在基 板(較佳爲透明基板)上,設置含有撥墨劑、面內膜厚均一性 爲±5 %以內的樹脂離畫壁膜而構成者。由於樹脂離畫壁膜的 面內膜厚均一性爲土5 %以內,故可得到離畫壁(黑色矩陣等) -43- 200841125 的高度不齊少’面內均一性高的彩色濾光片,可防止畫像 顯示時的顯示不均。本發明的附有離畫壁之基板係最適合 藉由前述本發明的感光性樹脂膜之形成方法來獲得。 &lt;彩色濾光片及其製造方法&gt; 本發明的彩色濾光片之製造方法,係可設置以下步驟而 構成:使用前述本發明的感光性樹脂膜之形成方法、或本 發明的感7½性轉印材料,在基板上形成感光性樹脂層的層 形成步驟’通過光罩將所形成的感光性樹脂層曝光成圖案 狀’顯像而形成離畫壁的離畫壁形成步驟,及及在前述離 畫壁所劃分的基板上之凹部,藉由噴墨法來給予著色液體 組成物,以形成著色區域的著色區域形成步驟。本發明的 離畫壁一般多爲黑色(濃色),但不限定於黑色。濃色的著色 物較佳爲有機物(染料、顏料等的各種色素)。 -感光性樹脂層形成步驟- 於感光性樹脂層形成步驟中,使用前述本發明的感光性 樹脂膜之形成方法、或前述本發明的感光性轉印材料,在 • 基板上形成感光性樹脂層,而成爲積層體。關於感光性樹 脂層的形成,詳細係如前述。 -離畫壁形成步驟- 離畫壁形成步驟,係藉由設置將前述感光性樹脂層形成 步驟所形成的感光性樹脂層,通過光罩曝光成圖案狀(曝光 步驟),再作顯像的顯像步驟而形成離畫壁。 於曝光步驟中,前述層形成步驟所得之積層體與所欲的 光罩(例如石英曝光光罩),以感光性樹脂層(使用感光性轉 -44- 200841125 印材料時,爲去除臨時支持體後的去除面(隔氧層面))與光 罩呈面對面的方式作配置,例如於感光性樹脂層與光罩在 垂直豎立的狀態下,適當地設定光罩面與感光性樹脂層之 間的距離(例如200μιη),作曝光。 曝光例如係使用具有超高壓水銀燈的近接型曝光機(例 如曰立高科技電子工程(股)製)等來進行,曝光量可適宜(例 如3 00mJ/cm2)地選擇。 作爲曝光所用的光源,可舉出中壓〜超高壓水銀燈、氙 # 燈、金屬鹵化物燈等。 離畫壁,從提高光感度即硬化度之點來看,較佳爲在貧 氧氣氛下使感光性樹脂層曝光,然後顯像而形成。此處, 貧氧雰圍氣下係指在惰性氣體下、減壓下、能隔氧的保護 層(以下亦稱爲「隔氧層」)下,詳細係如以下。 前述惰性氣體下係指暴露於N2、H2、co2等的惰性氣體 或He、Ne、Ar等的稀有氣體類等的氣氛中。其中,從安全 性或取得的容易性、成本的問題來看,惰性氣體較佳爲Ν2。 ^ 前述減壓下係指在5 00hPa以下、較佳在l〇〇hPa以下的 狀態。 作爲前述能隔氧的保護層,例如可舉出特開昭46-2121 號或特公昭56-40824號的各公報中所記載的聚乙烯醚/馬 來酸酐聚合物、羧烷基纖維素的水溶性鹽、水溶性纖維素 醚類、羧烷基澱粉的水溶性鹽、聚乙烯醇、聚乙烯吡咯啶 酮、各種聚丙烯醯胺類、各種水溶性聚醯胺、聚丙烯酸的 水溶性鹽、明膠、環氧乙烷聚合物、各種澱粉及其類似物 -45- 200841125 所組成族群之水溶性鹽、苯乙烯/馬來酸的共聚合物、馬來 酸酯樹脂、及此等之二種以上的組合等。於此等之中,特 佳爲聚乙烯醇與聚乙烯吡咯啶酮的組合。 又,聚乙烯醇的皂化率較佳爲80%以上,聚乙烯吡咯啶 酮的含量,對於鹼可溶性感光性樹脂層的固體成分而言’ 較佳爲1〜75質量%,尤佳爲1〜50質量%,更佳爲10〜40 質量%。 又,於隔氧層中可以使用各種薄膜。例如,以PET爲首 # 的聚酯類、以耐隆爲首的聚醯胺類、乙烯-醋酸乙烯酯共聚 物(EVA類)亦可適用。此等薄膜視需要亦可被拉伸,厚度爲 5〜300μιη係適當,較佳爲20〜150μιη。 特別地,於使用感光性轉印材料來形成離畫壁時,可合 適地使用臨時支持體當作能隔氧的保護層。 於使用臨時支持體當作隔氧層時,臨時支持體係殘留著 (不剝離),以該臨時支持體與所欲的光罩(例如石英曝光光 罩)成面對面的方式作配置,使積層體與光罩在垂直豎立的 ^ 狀態下,適當地設定曝光光罩面與該臨時支持體之間的距 離(例如200μιη),作曝光。 能隔氧的保護層(隔氧層)之透氧係數較佳爲2 0 0 0 c m3 / (m2.dayatm)以下,更佳爲 l〇〇cm3/(m2.day.atm)以下,最 佳爲 5〇cm3/(m2.day.atm)以下。 透氧率若在前述範圍內,則由於隔氧而良好地進行光硬 化,有效地將離畫壁形成所欲的形狀。透氧率若多於 2 00 〇cm3/(m2 · day · atm),由於無法有效率地隔氧,故難以將 -46 - 200841125 離畫壁形成所欲的形狀。 其次,施予顯像步驟,使用指定的顯像液對曝光後的感 光性樹脂層進行顯像處理。接著,按照需要,作水洗處理, 得到圖案畫像(離畫壁圖案)。再者,於顯像之前,較佳爲將 純水從噴淋器噴嘴噴霧,以使感光性樹脂層或隔氧層的表 面被均勻潤濕。 作爲顯像處理所用的顯像液,使用鹼性物質的稀薄水溶 液,但亦可少量添加與水有混和性的有機溶劑。 Φ 作爲前述鹼性物質,可舉出鹼金屬氫氧化物類(例如氫 氧化鈉、氫氧化鉀)、鹼金屬碳酸鹽類(例如碳酸鈉、碳酸 鉀)、鹼金屬重碳酸鹽類(例如碳酸氫鈉、碳酸氫鉀)、鹼金 屬矽酸鹽類(例如矽酸鈉、矽酸鉀)、鹼金屬偏矽酸鹽類(例 如偏矽酸鈉、偏矽酸鉀)、三乙醇胺、二乙醇胺、單乙醇胺、 嗎啉、氫氧化四烷銨類(例如氫氧化四甲銨)、磷酸三鈉等。 鹼性物質的濃度較佳爲0.01〜30質量%,pH較佳爲8〜14。 作爲前述「與水有混和性的有機溶劑」,例如可舉出甲 • 醇、乙醇、2-丙醇、1-丙醇、丁醇、二丙酮醇、乙二醇單甲 基醚、乙二醇單乙基醚、乙二醇單正丁基醚、苯甲醇、丙 酮、甲基乙基酮、環己酮、ε-己內酯、γ-丁內酯、二甲基甲 醯胺、二甲基乙醯胺、六甲基磺醯胺、乳酸乙酯、乳酸甲 酯、ε-己內醯胺、Ν-甲基吡咯啶酮等。與水有混和性的有機 溶劑之濃度較佳爲0.1〜30質量%。 再者,亦可添加習知的界面活性劑,該界面活性劑的濃 度較佳爲0. 〇 1〜1 0質量%。 -47 - 200841125 顯像液亦可作爲浴液或作爲噴霧液使用。 於去除感光性樹脂層的未硬化部分之情況,可在顯像液 中組合回轉刷或濕潤海綿來刷擦等之方法。顯像液的液溫 度較佳爲從通常室溫(2 0 °C )附近到4 0 °C。顯像時間係視感 光性樹脂層的組成、顯像液的鹼性或溫度、添加有機溶劑 時其之種類和濃度等而定,但通常爲10秒〜2分鐘左右。 顯像時間若在前述範圍內,則非硬化部(負型時的非曝光部) 之顯像進行爲良好,硬化部(負型時爲曝光部)亦不被飩刻, # 在得到良好形狀的離畫壁之點係有效。 又,於顯像處理後,亦可加入水洗步驟。 〜加熱處理步驟〜 藉由加熱處理(亦稱爲烘烤處理)顯像步驟所得之感光性 樹脂層所成的圖案畫像(離畫壁圖案),可得到撥水、撥墨性 更優異的離畫壁。 加熱處理係封曝光及顯像所形成的圖案畫像(離畫壁圖 案)作加熱使硬化,同時以熱使氟官能基在表面上排列,可 ® 藉由含氟化合物而更發揮撥水·撥墨性。特別地,使用前 述具有重複單位(a)〜(c)的含氟化合物係有效。 作爲加熱處理的方法,可以使用習知的各種方法。即, 例如將複數片的基板收納在卡匣內,藉由對流烘箱處理的 方法’以加熱板來處理每1片的方法,以紅外線加熱器來 處理的方法等。 又’烘烤溫度(加熱溫度)通常爲150〜2 80°C,較佳爲180 〜250°C。加熱時間係可依照前述烘烤溫度來適當選擇,例 -48- 200841125 如烘烤溫度爲24 0°C時,較佳爲10〜120分鐘,更佳爲30 〜9 0分鐘。 另外,於離畫壁的形成方法之加熱處理步驟中,對於前 述曝光、顯像步驟所形成的離畫壁圖案,從防止不均勻的 膜減薄,防止感光性樹脂層中所含有UV吸收劑等的成分之 析出的觀點來看,在加熱處理前亦可進行後曝光。於施予 加熱處理前,若進行後曝光,則層合時可有效地防止所咬 入的微小異物之隆起而成爲缺陷。 • 此處,簡單說明前述之後曝光。 作爲後曝光所用的光源,只要能照射可使感光性樹脂層 硬化的波長範圍之光(例如3 6 5nm、405nm)即可,可適當地 選擇。 具體地,可舉出超高壓水銀燈、高壓水銀燈、金屬鹵化 物燈等。 作爲曝光量,只要能補充前述曝光的曝光量即可,通常 爲 50 〜5000mJ/cm2,較佳爲 200 〜2000mJ/cm2,更佳爲 500 參〜1 000mJ/cm2。 由本發明的離畫壁之形成方法所可製作的離晝壁,較佳 爲在5 5 5 n m,具有高的光學濃度。特別地,於形成作爲離畫 壁的構成彩色濾光片的黑色矩陣時,從賦予遮光性而可顯 示更鮮明且清晰的多色影像之觀點來看,光學濃度較佳爲 2.5以上,尤佳爲2.5〜10.0,更佳爲2.5〜6.0,特佳爲3.0 〜5.0 〇 又,感光性樹脂層由於較佳爲藉由光引發系統來硬化, 49 - 200841125 對於曝光波長(一般爲紫外區域)而言,光學濃度亦重要。 即,其値較佳爲2 . 〇〜1〇.〇,更佳爲2.5〜6.〇,特佳爲3.0 〜5.0。若在前述較佳範圍,則可形成所欲形狀的離畫壁。 另外,就離畫壁的寬度及高度而言,寬度(即形成彩色 濾光片時的畫素與畫素之間隔)較佳爲15〜1〇〇 μιη,高度(即 自基板法線方向中的基板面到離畫壁的頂點爲止之距離)較 佳爲 1.0 〜5·0μιη。 離畫壁的形狀’如特開2006- 1 54804號公報的段落編號 Φ [ 〇 〇 5 4 ]〜[0 0 5 5 ]中所記載的形狀,亦適合於本發明。 〜離畫壁的接觸角測定〜 加熱處理(烘烤處理)前後的離畫壁(例如黑色矩陣)之印 墨接觸角及水接觸角的變化係重要。此處的接觸角之測定 方法係依照財團法人·日本規格協會的j IS規格之方法,具 體地採用JIS R3 2 5 7「基板玻璃表面的潤濕性試驗方法」內 的「6·靜滴法」所記載的方法。 更具體地,使用接觸角測定器(協和界面科學(股)製的接 ^ 觸角計CA-A),製作2〇刻度之大小的墨滴、水滴,從針尖 滴出印滴、水滴,使與形成圖案狀的離畫壁上面接觸,形 成墨滴、水滴,靜置1 〇秒後,由接觸角計的窺視孔來觀察 墨滴、水滴的形狀,求得2 5 °C的接觸角θ。又,此處的「加 熱處理後」係指在2 4 0 °C加熱5 0分鐘後,在室溫1小時放 置冷卻後者。 〜接觸角値〜 感光性樹脂組成物,於藉由前述方法來測定使用該感光 -50- 200841125 性樹脂組成物所形成的離畫壁表面之水接觸角時,以施予 加熱處理之前的離畫壁圖案表面之水接觸角當作A。,以在 240°C加熱50分鐘放置冷卻1小時後的離畫壁表面之水接 觸角當作8°時,接觸角差(B°-A°)可成爲20°以上。接觸角 差(B°-AQ)更佳爲30°以上,最佳爲40。以上。 又,作爲A。,從提高離畫壁與基板的密接性之觀點來 看,較佳爲〇〜6(Τ,更佳爲0〜55°,特佳爲0〜50°。作爲 Β °,從更有效果地抑制彩色濾光片之製作時的混色之觀點 來看,較佳爲65〜180%更佳爲80〜180%特佳爲90〜180°。 此處,參照第1圖來說明離畫壁的上面。 離畫壁的上面係指離畫壁的表面中,與基板接觸的面之 相反側的露出面(第1圖的上面4)。再者,離畫壁的側面係 指離畫壁的露出表面中,離畫壁之上面以外的表面(第1圖 的側面5)。又,基板上的凹部係指離畫壁所圍繞的由離畫 壁側面與基板的不形成離畫壁之基板面所構成的凹狀區域 (第1圖的凹部3)。 -著色區域形成步驟一 _ 著色區域形成步驟,係於由前述離畫壁形成步驟所形成 的離畫壁所劃分的基板上之凹部’藉由噴墨來給予著色液 體組成物而形成著色區域。於本步驟中,對離畫壁所劃分 的基板上之凹部(著色區域形成用的區域),給予(較佳爲2 色以上的)著色液體組成物,可形成(較佳爲2色以上的)複 數的著色區域(例如紅、綠、藍、白、紫等的著色畫素等)。 關於本發明的彩色濾光片之製造方法,係於前述使用具 200841125 有本發明的彩色濾光片用感光性組成物之離畫壁(例如黑色 矩陣)之基板上,給予著色液體組成物,形成著色區域’故 可回避印墨在離畫壁上的蔓延等所伴隨的混色,由於亦可 抑制離畫壁的剝落或缺陷的發生’故可製作混色、色不均' 泛白等的畫像故障經抑制的高品位之彩色濾光片。 本發明的彩色濾光片,由於亦具有使用前述本發明的彩 色濾光片用感光性組成物的離畫壁,故無色不均而色純度 高,抑制泛白等的畫像故障,具有鮮明且清晰的顯示特性° • 作爲噴墨法,可以採用將經帶電的印墨連續地噴射’藉 由電場來控制的方法,使用壓電元件間歇地噴出印墨之方 法,將印墨加熱,利用其之發泡間歇地噴射之方法等各種 的方法。 印墨可使用油性、水性中任一者。又,含該印墨的著色 劑可與染料、顏料一起使用,從耐久性的方面來看,更佳 爲使用顏料。又,於亦可使用習知的彩色濾光片之製作時 的塗布所用的著色印墨(例如特開2005-3 86 1號公報的段落 ® 編號[0034]〜[0063 ]中記載的著色樹脂組成物)、或特開 2 004-32 5 7 3 6號公報中記載的著色印墨、特開2002-3726 1 3 號公報中記載的印墨等習知的印墨。 於使用噴墨法的印墨中,考慮給予後的步驟,可經由加 熱進行硬化,或添加紫外線等的能量線可硬化的成分。作 爲加熱硬化的成分,廣泛使用各種熱硬化性樹脂,作爲能 量線可硬化的成分,例如可舉出在丙烯酸酯衍生物或甲基 丙烯酸酯衍生物中加有光反應引發劑者。特別地,考慮耐 -52- ,200841125 熱性,更佳爲分子內具有複數的丙烯醯基、甲基丙烯醯基 者。此等丙烯酸酯衍生物、甲基丙烯酸酯衍生物較佳爲使 用水溶性者,即使爲水中難溶性者,也可使用乳化等。 於該情況下,可合適地使用含有前述感光性組成物所舉 出的顏料等的著色劑之感光性組成物。 本發明的彩色濾光片,較佳爲藉由噴墨法將著色液體組 成物的液滴吐出到基板上,而形成有著色區域(例如畫素) 的彩色濾光片,較佳爲具有由噴墨法所吐出的至少RGB 3 • 色印墨之至少3色的著色畫素之彩色濾光片。 彩色濾光片的圖案形狀係沒有特別的限定,一般係爲黑 色矩陣形狀或線條狀,亦可爲格子狀,或(5 (delta)排列狀。 於所製作的彩色濾光片中,爲了提高耐性,有全面設置 罩面層的情況。罩面層係可保護著色區域(例如R G B畫素), 同時將表面平坦化。但是,從增加步驟數目的觀點來看, 較佳爲不設置。 作爲用於形成罩面層的樹脂(OC劑),可舉出丙烯酸系樹 ® 脂組成物、環氧樹脂組成物、聚醯亞胺樹脂組成物等。其 中,可見光範圍的透明性優異、構成彩色濾光片的硬化性 組成物之樹脂成分一般係含有丙烯酸系樹脂當主成分,從 密接性優異來看,丙烯酸系樹脂組成物係較宜。作爲罩面 層的例子,可舉出特開2003 -2876 1 8號公報的段落編號 [0 0 1 8 ]〜[0 0 2 8 ]中記載者,罩面劑的市售品如j s R公司製的 「Optmer SS6699G」。 又,於著色區域(例如RGB畫素)上,視需要亦可設置透 -53 - 200841125 明電極、配向膜等。作爲透明電極的具體例子,可舉出ιτ〇 膜。又,作爲配向膜的具體例子,可舉出聚醯亞胺。 &lt;顯示裝置&gt; . 本發明的顯示裝置係設置前述本發明的彩色濾光片而 構成者。由於具備本發明的彩色濾光片,可抑制影像顯示 時的顯示不均,可得到影像品質良好的顯示影像。 由本發明的彩色濾光片之製造方法所得到的彩色濾光 片’係可用作爲液晶顯示元件、電泳動顯示元件、電色顯 ® 示元件、與PLZT等組合的顯示元件。亦可使用於彩色電視 攝像機或其它使用彩色濾光片的用途。 作爲顯示裝置,可舉出液晶顯示裝置、電漿顯示器顯示 裝置、EL顯示裝置、CRT顯示裝置等的顯示裝置等。顯示 裝置的定義或各顯示裝置的說明在例如「電子顯示裝置(佐 佐木昭夫著,工業調査會(股)1 990年發行)」、「顯示裝置(伊 吹順章著,産業圖書(股)平成元年發行)」等中有記載。 作爲設有本發明的彩色濾光片而構成的顯示裝置,較佳 ^ 爲液晶顯示裝置。關於液晶顯示裝置,例如在「次世代液 晶顯示器技術(內田龍男編集,工業調査會(股)1 994年發 行)」中有記載。 本發明可適用的液晶顯示裝置係沒有特別的限制,例如 可適用於上述「次世代液晶顯示器技術」中所記載的各種 方式之液晶顯示裝置。其中,特別有效於針對彩色TFT方 式的液晶顯示裝置。關於彩色TFT方式的液晶顯示裝置, 例如在「彩色TFT液晶顯示器(共立出版(股)1 996年發行) -54- 200841125 中有記載。再者,本發明亦可適用於IPS等之橫電場驅動方 式、MVA等之畫素分割方式等的視角被擴大之液晶顯示裝 置。關於這些方式,例如在「EL、PDF、LCD顯示器技術和 市場的最新動向(東麗硏究中心調査硏究部門 200 1年發 行)」的第43頁中有記載。 液晶顯示裝置,除了由彩色濾光片,亦由電極基板、偏 光膜、相位差膜、背光、間隔物、視角補償膜等各式各樣 的構件所構成。本發明的彩色濾光片係可適用於由這些習 # 知構件所構成的液晶顯示裝置。這些構件例如記載於「’ 94 液晶顯示器周邊材料•化學品的市場(島健太郎,MCC(股) 1 994年發行)」、「2003液晶關聯市場的現狀與將來展望(下 卷)(表良吉,(股)富士 Chimera總硏 2003等發行)」中。 作爲用途,可適用於電視、個人電腦、液晶投影機、遊 戲機、攜帶型電話等的攜帶終端、數位式照相機、車輛導 航系統等之用途,而沒有特別的限制。 [實施例] ® 以下藉由實施例來更具體說明本發明。本發明只要不超 出其主旨,係不受以下的實施例所限定。再者,分子量表 示由凝膠滲透層析術(GP C)所測定的聚苯乙烯換算之重量 平均分子量,而且只要沒有預先指明,則「%」及「份」係 以質量爲基準。 (實施例1) 如下述地來合成上述本發明的含氟化合物之例示化合 物(1 )。再者,關於此處所合成的例示化合物以外的其它本 -55- 200841125 發明之含氟化合物,亦可藉由類似的方法來合成。又,含 氟化合物中的氟原子含有率表示由構造式所推定的氟量。 -撥墨劑(例示化合物(1))的合成- 於氮氣流下,將30克丙二醇單甲基醚醋酸酯[MMPG-Ac, DAICEL化學工業(股)製]置入設有冷卻管的3 00ml之三口 燒瓶內,於加有石鱲的水浴中將內溫加熱到70°C爲止。於 其中,更藉由柱塞泵費2小時分別滴下在35克MMPG-Ac 中溶解有2·5克丙烯酸[AA,東京化成工業(股)製]、25克 # 2-(全氟己基)-乙基丙烯酸酯[FAAC6,ΝΟΚ(股)製]、22.5克 末端甲基聚環氧乙烷單體[P ME 1000,日本油脂(股)製,ΡΕΟ 的重複數23,末端甲基]及0.70克月桂基硫醇[LM,東京化 成工業(股)製]的溶液、以及在1〇克MMPG-Ac中溶解有 0.2 8 5克2,2’-偶氮雙(異戊腈)[V65,和光純藥工業(股)製] 的溶液。滴下結束後,攪拌5小時。 如以上地,使2-(全氟己基)-乙基丙烯酸酯[FAAC6]、丙 烯酸[AA]、及聚環氧乙烷單體[PME 1 000]共聚合,而合成 Φ FAAC6/AA/PME 1 00 0 = 5 0/5/4 5 (質量比)的例示化合物(l)。例 示化合物(1)的重量平均分子量爲1 ·3萬,例示化合物(1)中 的氟原子含有率爲36%。 -感光性樹脂組成物的調製- 首先,量取表1中所記載之量的K顏料分散物1、丙二 醇單甲基酸醋酸醋’於溫度24C (士 2C)混合,在150rpm擾 拌10分鐘,接著分別量取表1中所記載之量的甲基乙基 酮、黏結劑2、氫醌單甲基醚、DPHA液、2,4_雙(三氯甲 -56- 200841125 基)-6-[4’-(N,N-二乙氧羰基甲基胺基)-3溴苯基]-s-三阱、 下述界面活性劑1、當作撥墨劑的上述例示化合物(1 ),於 溫度 25°C (:t2°C )依該順序添加,在溫度 40°C (土2°C )於 1 5 Orpm攪拌3 0分鐘而得到感光性樹脂組成物K 1。再者, 表1中所記載之量爲質量份,詳細爲以下組成。此處,J發 墨劑的添加量對於感光性樹脂組成物的總固體成分而言胃 1%。 &lt; Κ顏料分散物1 &gt;Specifically, phenyl salicylate, 4-t-butylphenyl salicylate, 2,4-di-t-butylphenyl-3', 5'-di-third-4'- Hydroxybenzoate, 4-tert-butylphenyl salicylate, 2,4-dihydroxybenzophenone, 2-hydroxy-I-36 - 200841125 methoxybenzophenone, 2-hydroxyl 4-n-octyloxybenzophenone, 2-(2,-hydroxy-5'-methylphenyl)benzotriazole, 2-(2,-hydroxy-3,_t-butyl- 5 , _methylphenyl)-5-chlorobenzotriazole, ethyl-2-cyano-3,3-diphenyl acrylate, 2,2,-radio-4-methoxybenzophenone Ketone, nickel dibutyl dithiocarbamate, bis(2,2,6,6-tetramethyl·4·pyridine)-sebacate, 4-tert-butylphenyl salicylate , phenyl salicylate, 4-hydroxy-2,2,6,6-tetramethylpiperane condensate, succinic acid-bis(2,2,6,6-tetramethyl-4-piperidinyl) · Ester, 2-[2-hydroxy-3,5-bis(α,α-dimethylbenzyl)phenyl]-2Η-benzotriazole, 7-{[4-chloro-6-(di-B Amino)-5-φ tri-cultivation]amino}}3 phenylcoumarin. In a coating step, at least the aforementioned photosensitive resin composition containing an ink repellent is applied in the coating step. As a coating method, there is a method of directly forming a drawing wall by coating a substrate on a substrate formed of a permanent support, and a photosensitive property formed by coating a temporary support which is a photosensitive support material to be described later. The layer formed by the resin composition is transferred onto a substrate formed of a permanent support to form a method of drawing the walls. Therefore, the photosensitive resin layer can be formed by using the above-described photosensitive resin composition on at least one side of the substrate or by using the photosensitive transfer material of the present invention to be described later. The coating system of the photosensitive resin composition is not particularly limited, and is carried out by a known coating method such as slit coating, rod coating, or curtain coating. In the present invention, as the substrate (permanent support), glass, ceramic, synthetic resin film or the like can be used. Particularly preferred is transparency and dimensional stability -37- 200841125 A transparent substrate such as a good glass or synthetic resin film. When it is applied to a desired substrate, a photosensitive resin film (photosensitive resin layer) is directly formed on the substrate after being supplied to a drying step to be described later. Further, when it is applied to a desired temporary support, the photosensitive resin film after drying is transferred to a photosensitive resin film to be described later, and a photosensitive resin layer is formed on the desired substrate. When coating on a temporary support, it is generally based on a roll-shaped transfer material. When a long temporary support is used for coating, when transported by a cotton web, the transport speed during coating is relatively fast. Therefore, in order to suppress film thickness variation (good in in-plane uniformity), it is necessary to consider not only the drying step described later but also the amount of associated air depending on the coating speed in order to obtain a wall having a small variation in height. ~Photosensitive transfer material ~ The photosensitive transfer material of the present invention is a method of forming a photosensitive resin film according to the present invention, and a photosensitive resin layer is provided on the temporary support, and a temporary support is provided as needed. Further, a layer other than a thermoplastic resin layer and an oxygen barrier layer (hereinafter also referred to as an "oxygen barrier layer") may be provided between the photosensitive resin layer and the photosensitive resin layer. By using a photosensitive transfer material, the paint wall can be formed easily and at low cost. As a method of transferring a photosensitive resin layer onto a substrate by using a photosensitive transfer material, for example, the following steps can be mentioned. 1) On the temporary support, a photosensitive transfer material having a (thermoplastic resin layer) oxygen barrier layer, a photosensitive resin layer, and a cover sheet for protecting the photosensitive resin layer is provided in this order. -38-200841125 2) The cover sheet is peeled off, and the surface of the exposed photosensitive resin layer is bonded to a substrate which is a permanent support, and laminated (laminated body) by heating or pressurization by a laminator or the like. As the laminator, those selected from conventional laminators, vacuum laminators, and the like can be suitably used, and in order to further improve productivity, an automatic cutting laminator can also be used. 3) peeling off between the temporary support and the oxygen barrier layer (or thermoplastic resin layer), removing the temporary support from the laminate, and transferring the photosensitive resin layer and the oxygen barrier layer (and the thermoplastic resin layer) onto the substrate . ® When the oxygen barrier layer is used, the photosensitive resin layer is protected from the atmosphere by the oxygen barrier layer, so it automatically becomes an oxygen-poor atmosphere. Therefore, the exposure does not have to be performed under an inert gas or under reduced pressure, and the current step can be utilized as it is, and the advantages of high sensitivity and high hardness can be obtained. As will be described later, the temporary support can also be used as a "protective layer capable of resisting oxygen". In this case, it is not necessary to provide an oxygen barrier layer, which contributes to a reduction in the number of steps. In the photosensitive transfer material, a thermoplastic resin layer may be provided between the temporary support and the oxygen barrier layer between the temporary support and the photosensitive resin layer or when the oxygen barrier layer is provided. The thermoplastic resin layer is a resin component which is alkali-soluble and contains at least a resin component having a substantial softening point of 80 ° C or less, and has a cushioning property. By providing such a thermoplastic resin layer, good adhesion to the permanent support can be obtained. Examples of the alkali-soluble thermoplastic resin having a softening point of 80 ° C or less include a saponified product of an ethylene and an acrylate copolymer, a saponified product of a styrene and a (meth) acrylate copolymer, a vinyl toluene and a (methyl group). a saponified product of a saponified product of an acrylate copolymer, a poly(meth)acrylate, a butyl (meth)acrylate, or a (meth)acrylate copolymer such as vinyl acetate-39-200841125. In the thermoplastic resin layer, at least one of the above thermoplastic resins can be appropriately selected, and a "Plastic Performance Fact Sheet" can be used. (The Japan Plastics Industry Alliance, the All-Japan Plastic Forming Industry Association, edited by the Industrial Research Association, 1 9 6 It is available in the organic polymer of the softening point of about 80 ° C or less in the 8th year of October 8th. Further, in the case of an organic polymer material having a softening point of 80 ° C or higher, a substantial softening point can be lowered by adding each of the organic polymer materials to each of the plastic materials compatible with the polymer material. It can also be used up to 80 °C. Further, in the organic polymer material, for the purpose of adjusting the adhesion to the temporary support, various polymers or supercooled substances may be added in a range where the substantial softening point does not exceed 80 ° C. Adhesive modifier, surfactant, release agent, etc. Specific examples of preferred plasticizers include polypropylene glycol, polyethylene glycol, dioctyl phthalate, diheptyl phthalate, dibutyl phthalate, tricresyl phosphate, and tolyl diphenyl phosphate. , biphenyl diphenyl phosphate and the like. ^ As a temporary support constituting a photosensitive transfer material, it can be suitably selected from those composed of chemically and thermally stable flexible materials. Specifically, it is preferably a Teflon (registered trademark), a polyethylene terephthalate, a polycarbonate, a polyethylene, a polypropylene, a polyester, or the like, a sheet or a laminate thereof. The thickness of the temporary support is suitably 5 to 30,000 μm, preferably 20 to 150 μm. When the thickness is within the above range, peeling can be easily performed without damaging the temporary support, and exposure with good resolution can be performed via the temporary support. In the above specific examples, a 2-axis stretched polyethylene terephthalate film is particularly preferred. -40- 200841125 It is preferable to provide a thin cover sheet on the photosensitive resin layer for protection against contamination or damage during storage. Although the cover sheet may be formed of the same or similar material as the temporary support, it must be easily separated from the photosensitive resin layer. As the cover sheet material, for example, a polyoxynitride paper, a polyolefin or a polytetrafluoroethylene sheet is suitable. Further, the thickness of the cover sheet is generally 4 to 40 μm, preferably 5 to 30 μm, and particularly preferably 1 to 25 μm. In the second embodiment of the present invention, a photosensitive resin composition containing at least an ink-repellent agent is applied to the temporary support in the coating step, and in the drying step described later, from the film surface The flow rate of the gas of 5 cm is 0.5 m/s or less, and the coating film formed by coating is dried, and a photosensitive resin layer (photosensitive resin film) is provided on the temporary support. In the photosensitive transfer material, when a photosensitive resin layer is provided using a resin composition containing an ink repellent, if a toner is used, smooth operation of the coated film surface becomes difficult, and it is difficult to obtain a uniform thickness. However, in the first embodiment of the present invention, the ink repellent property can be improved, and the film thickness variation can be suppressed, and the resin film for forming the paint wall having high uniformity in the film can be formed. Thereby, a picture wall (black matrix or the like) having a small height is obtained, and a color filter and a display device which can display a display image with uneven suppression can be provided. In the drying step of the first embodiment of the present invention, the photosensitive resin composition applied on the substrate or the temporary support is vacuum dried to form a photosensitive resin film. In the vacuum drying, the degree of vacuum is preferably 1 (T3 Pa or less, and the degree of vacuum is preferably 1 (T4 Pa or less) from the viewpoint of uniformity of film thickness of the photosensitive resin film to be formed. Vacuum drying can also be under vacuum. The heating temperature is, for example, from -41 to 200841125. The heating temperature is, for example, from 25 to 100 ° C. In this case, from the viewpoint of film thickness uniformity of the photosensitive resin film to be formed, it is preferably 1 ( In the drying step of the second embodiment of the present invention, the flow rate of the gas having a height of 〇5 cm from the film surface is 〇.5 m in the drying step of the vacuum of 30 to 80 ° C in the second embodiment of the present invention. In the range of /s or less, the coating film formed by the coating step is dried. In this step, by drying the gas at a flow rate of 〇·5 m/s or less, it is possible to effectively prevent the ink from being contained. When the film surface is operated, specifically, due to a slight external force, convection of the coating liquid occurs on the film surface, that is, the film surface is uneven, and the in-plane uniformity of the coating film can be lowered to within ±5 %. Therefore, a wall with a high degree of irregularity can be formed (black moment) In other words, if the flow rate of the gas exceeds 0.5 m / s ', the in-plane uniformity of the coated film exceeds ± 5 %, and the uniform thickness of the drawn wall cannot be stably formed. The flow rate measured at a position of the film surface of the coating film of 55 cm (the height from the surface of the film was 0.5 cm) was measured by the use of SYSTEM 6243 (manufactured by KANOMAX Co., Ltd.) ^ The flow rate of the gas, From the viewpoint of productivity such as drying time, it is preferable that the gas of O.lm/s to 0.5 m/s 〇 is a gas which is in contact with the surface of the film existing in the space in which the coating film exists. The flow rate of the gas is a flow rate which occurs due to the movement of the gas existing near the surface of the membrane by vacuum suction or the like, or conversely, may be supplied to the surface of the membrane (for example, air, etc.) for drying from the outside. The flow rate of the gas in the dry air. The drying system in this step: (1) The supplied dry air can be supplied by direct contact or -42- 200841125 without contacting the film surface. Do it with or without maintaining temperature In the case of the above, (the temperature of the dry air, the water content, and the wind direction are appropriately selected. In the case of the above (2), it is preferable that the degree of vacuum is 1 (T3Pa or less). The method is vacuum suction. When the degree of vacuum is 1 (less than T3 Pa, the film can be uniformly dried while maintaining uniformity in the film. In vacuum drying, vacuum drying can also be carried out under vacuum and under heating. The heating temperature may be from 2 5 • to 1 0 0 ° C. In the present invention, from the viewpoint of uniformity of film thickness of the photosensitive resin film to be formed, a vacuum of not less than W4 Pa, 30 to 80 is preferable. The drying temperature of °C is vacuum dried. The measurement of the degree of vacuum can be measured using a general vacuum meter. Specifically, a Pirani vacuum gauge or a diaphragm type vacuum gauge (for example, a BarraUon vacuum gauge manufactured by MKS Co., Ltd., etc.) can be used. Determination. &lt;Substrate with a wall attached to the drawing&gt; The substrate with the image-drawing wall of the present invention is formed on the substrate by using the method of forming the photosensitive resin film of the present invention or the photosensitive transfer material of the present invention. The photosensitive resin layer forming step of forming the photosensitive resin layer is formed by exposing the formed photosensitive resin layer to a pattern by a mask, and developing the image forming wall from the drawing wall. In the second embodiment of the present invention, the substrate having the image-removing wall is provided with a resin containing an ink-repellent agent and having an in-plane film thickness uniformity of ±5 % or less on a substrate (preferably a transparent substrate). It is composed of a wall membrane. Since the in-plane film thickness uniformity of the resin is less than 5% of the soil, it is possible to obtain a color filter having a high degree of inhomogeneity from the wall (black matrix, etc.) -43-200841125. This prevents uneven display when the image is displayed. The substrate with the paint wall of the present invention is most preferably obtained by the method for forming a photosensitive resin film of the present invention. &lt;Color filter and method for producing the same&gt; The method for producing a color filter of the present invention can be configured by using the method for forming a photosensitive resin film of the present invention or the feeling of the present invention. a step of forming a photosensitive resin layer on a substrate, a step of forming a photosensitive resin layer by exposing the formed photosensitive resin layer to a patterned image by a photomask to form an off-painting wall forming step, and In the concave portion on the substrate divided by the drawing wall, the colored liquid composition is applied by an inkjet method to form a colored region forming step of the colored region. The painting wall of the present invention is generally black (dark), but is not limited to black. The colored coloring matter is preferably an organic substance (a variety of pigments such as dyes and pigments). - Photosensitive resin layer forming step - In the photosensitive resin layer forming step, a photosensitive resin layer is formed on the substrate by using the above-described method for forming a photosensitive resin film of the present invention or the photosensitive transfer material of the present invention described above And become a layered body. The details of the formation of the photosensitive resin layer are as described above. -Drawing wall forming step - The drawing wall forming step is performed by providing a photosensitive resin layer formed by the photosensitive resin layer forming step, and exposing it to a pattern by a mask (exposure step), and then performing development The imaging step forms a wall away from the painting. In the exposure step, the layered body obtained by the layer forming step and the desired mask (for example, a quartz exposure mask) are used as a photosensitive resin layer (the photosensitive support is used to remove the temporary support when using the photosensitive material - 44-200841125) The rear removal surface (the oxygen barrier layer) is disposed in such a manner as to face the mask. For example, when the photosensitive resin layer and the mask are vertically erected, the gap between the mask surface and the photosensitive resin layer is appropriately set. The distance (for example, 200 μm) is used for exposure. The exposure is carried out, for example, by using a proximity type exposure machine having an ultrahigh pressure mercury lamp (for example, manufactured by Hi-Tech Electronics Co., Ltd.), and the exposure amount can be selected suitably (for example, 300 mJ/cm2). Examples of the light source used for the exposure include a medium pressure to an ultrahigh pressure mercury lamp, a xenon lamp, a metal halide lamp, and the like. From the viewpoint of improving the light sensitivity, i.e., the degree of hardening, it is preferred to expose the photosensitive resin layer in a lean oxygen atmosphere and then develop it. Here, in the case of an oxygen-poor atmosphere, the protective layer (hereinafter also referred to as "the oxygen barrier layer") which is capable of blocking oxygen under an inert gas and under reduced pressure is as follows. The inert gas means an atmosphere which is exposed to an inert gas such as N2, H2 or co2 or a rare gas such as He, Ne or Ar. Among them, the inert gas is preferably Ν2 in view of safety, ease of availability, and cost. ^ The above-mentioned reduced pressure means a state below 500 hPa, preferably below l〇〇hPa. For example, the polyvinyl ether/maleic anhydride polymer or the carboxyalkyl cellulose described in each of the publications of JP-A-46-2121 or JP-A-56-40824 can be mentioned. Water-soluble salts, water-soluble cellulose ethers, water-soluble salts of carboxyalkyl starch, polyvinyl alcohol, polyvinylpyrrolidone, various polypropylene decylamines, various water-soluble polyamines, water-soluble salts of polyacrylic acid , gelatin, ethylene oxide polymer, various starches and the like -45- 200841125 The water-soluble salt of the group, the copolymer of styrene/maleic acid, the maleate resin, and the like Combinations of the above and the like. Among these, a combination of polyvinyl alcohol and polyvinylpyrrolidone is particularly preferred. Further, the saponification ratio of the polyvinyl alcohol is preferably 80% or more, and the content of the polyvinylpyrrolidone is preferably from 1 to 75% by mass, particularly preferably 1%, to the solid content of the alkali-soluble photosensitive resin layer. 50% by mass, more preferably 10 to 40% by mass. Further, various films can be used in the oxygen barrier layer. For example, polyesters such as PET, polyamines such as Nile, and ethylene-vinyl acetate copolymers (EVA) can also be used. These films may also be stretched as needed, and have a thickness of 5 to 300 μm, preferably 20 to 150 μm. In particular, when a photosensitive transfer material is used to form a paint wall, a temporary support can be suitably used as a protective layer capable of blocking oxygen. When the temporary support is used as the oxygen barrier layer, the temporary support system remains (not peeled off), and the temporary support is disposed in a face-to-face manner with a desired mask (for example, a quartz exposure mask) to make the laminate The distance between the exposure mask surface and the temporary support (for example, 200 μm) is appropriately set in the state where the reticle is vertically erected for exposure. The oxygen permeability coefficient of the oxygen barrier layer (the oxygen barrier layer) is preferably 2,0 0 c m3 / (m2.dayatm) or less, more preferably 1〇〇cm3/(m2.day.atm) or less, most Good is below 5〇cm3/(m2.day.atm). When the oxygen permeability is within the above range, light hardening is favorably performed by oxygen barrier, and the desired wall shape is effectively formed. If the oxygen permeability is more than 200 〇cm3/(m2 · day · atm), it is difficult to efficiently separate oxygen from the wall by -46 - 200841125. Next, a developing step is applied, and the exposed photosensitive resin layer is subjected to development processing using a predetermined developing solution. Next, as needed, a water washing process is performed to obtain a pattern image (a pattern of a wall). Further, before development, it is preferred to spray pure water from the shower nozzle so that the surface of the photosensitive resin layer or the oxygen barrier layer is uniformly wetted. As the developing solution used for the development processing, a thin aqueous solution of an alkaline substance is used, but an organic solvent which is miscible with water may be added in a small amount. Φ Examples of the basic substance include alkali metal hydroxides (for example, sodium hydroxide or potassium hydroxide), alkali metal carbonates (for example, sodium carbonate and potassium carbonate), and alkali metal bicarbonates (for example, carbonic acid). Sodium hydrogencarbonate, potassium bicarbonate), alkali metal silicates (such as sodium citrate, potassium citrate), alkali metal bismuth citrates (such as sodium metasilicate, potassium metasilicate), triethanolamine, diethanolamine Monoethanolamine, morpholine, tetraammonium hydroxide (for example, tetramethylammonium hydroxide), trisodium phosphate, and the like. The concentration of the alkaline substance is preferably 0.01 to 30% by mass, and the pH is preferably 8 to 14. Examples of the "organic solvent which is miscible with water" include methyl alcohol, ethanol, 2-propanol, 1-propanol, butanol, diacetone alcohol, ethylene glycol monomethyl ether, and ethylene. Alcohol monoethyl ether, ethylene glycol mono-n-butyl ether, benzyl alcohol, acetone, methyl ethyl ketone, cyclohexanone, ε-caprolactone, γ-butyrolactone, dimethylformamide, two Methylacetamide, hexamethylsulfonamide, ethyl lactate, methyl lactate, ε-caprolactam, Ν-methylpyrrolidone, and the like. The concentration of the organic solvent which is miscible with water is preferably from 0.1 to 30% by mass. Furthermore, the concentration of the surfactant is preferably 0. 〇 1 to 1 0% by mass. -47 - 200841125 The developing solution can also be used as a bath or as a spray. In the case where the uncured portion of the photosensitive resin layer is removed, a method of combining a rotary brush or a wet sponge to brush or the like can be used in the developing liquid. The liquid temperature of the developing solution is preferably from the vicinity of the usual room temperature (20 ° C) to 40 ° C. The development time depends on the composition of the photosensitive resin layer, the alkalinity or temperature of the developing solution, the type and concentration of the organic solvent, and the like, but it is usually about 10 seconds to 2 minutes. When the development time is within the above range, the development of the non-hardened portion (non-exposed portion in the negative type) is good, and the cured portion (the exposed portion in the case of the negative type) is not engraved, and # is in a good shape. The point of the painting wall is effective. Further, after the development process, a water washing step may also be added. - Heat treatment step - By the heat treatment (also referred to as baking treatment), the pattern image (from the pattern wall pattern) formed by the photosensitive resin layer obtained in the developing step, the water-repellent and ink-repellent properties are further improved. Painting the wall. Heat treatment seals the image pattern formed by exposure and development (from the wall pattern) for heating to harden, while arranging the fluorine functional groups on the surface by heat, which can be used to dial water and dial Ink. In particular, the use of the above-mentioned fluorine-containing compound having repeating units (a) to (c) is effective. As a method of heat treatment, various conventional methods can be used. In other words, for example, a method in which a plurality of substrates are housed in a cassette, a method of treating the sheet by a method of convection oven, a method of processing each sheet by a hot plate, and the like is performed by an infrared heater. Further, the baking temperature (heating temperature) is usually 150 to 2 80 ° C, preferably 180 to 250 ° C. The heating time can be appropriately selected in accordance with the aforementioned baking temperature, for example, -48-200841125, for example, when the baking temperature is 240 ° C, preferably 10 to 120 minutes, more preferably 30 to 90 minutes. Further, in the heat treatment step of the method of forming the wall, the film is formed by the exposure and development steps, and the film is prevented from being thinned by unevenness, thereby preventing the UV absorber from being contained in the photosensitive resin layer. From the viewpoint of precipitation of components, etc., post-exposure can also be performed before the heat treatment. When the post-exposure is applied before the heat treatment, it is possible to effectively prevent the bulging of the tiny foreign matter that is bitten during the lamination to become a defect. • Here, a brief description of the aforementioned exposure is given. The light source used for the post-exposure may be appropriately selected as long as it can irradiate light having a wavelength range (for example, 365 nm or 405 nm) which can cure the photosensitive resin layer. Specifically, an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, or the like can be given. The exposure amount is usually 50 to 5000 mJ/cm2, preferably 200 to 2000 mJ/cm2, more preferably 500 to 1 000 mJ/cm2, as long as it can supplement the exposure amount of the exposure. The detachment wall which can be produced by the method for forming the paint wall of the present invention preferably has a high optical density of 5 5 5 n m. In particular, when a black matrix constituting a color filter as a drawing wall is formed, the optical density is preferably 2.5 or more from the viewpoint of providing a more vivid and clear multicolor image by providing light shielding properties. It is 2.5 to 10.0, more preferably 2.5 to 6.0, and particularly preferably 3.0 to 5.0. Further, the photosensitive resin layer is preferably hardened by a photoinitiating system, 49 - 200841125 for an exposure wavelength (generally an ultraviolet region) In other words, optical concentration is also important. That is, the 値 is preferably 2. 〇~1〇.〇, more preferably 2.5 to 6. 〇, particularly preferably 3.0 to 5.0. If in the above preferred range, the desired wall of the desired shape can be formed. In addition, in terms of the width and height of the painting wall, the width (that is, the interval between the pixel and the pixel when the color filter is formed) is preferably 15 to 1 〇〇 μιη, and the height (ie, from the normal direction of the substrate) The distance from the substrate surface to the apex of the wall is preferably 1.0 to 5·0 μm. The shape described in the paragraph Φ [ 〇 〇 5 4 ] to [0 0 5 5 ] of the shape of the drawing wall is also suitable for the present invention. ~ Measurement of the contact angle from the wall of the painting ~ The change in the ink contact angle and the water contact angle of the paint wall (for example, the black matrix) before and after the heat treatment (baking treatment) is important. The measurement method of the contact angle is based on the method of the j IS specification of the Japan Standards Association, and specifically, the "6. Instillation method" in JIS R3 2 5 7 "Test method for wettability of the surface of a substrate glass". The method described. More specifically, using a contact angle measuring device (a contact angle meter CA-A manufactured by Kyowa Interface Science Co., Ltd.), ink droplets and water droplets of a size of 2 〇 are produced, and ink droplets and water droplets are dripped from the needle tip to make The pattern-shaped upper surface of the painting wall was placed in contact with each other to form ink droplets and water droplets. After standing for 1 second, the shape of the ink droplets and water droplets was observed by the peephole of the contact angle meter, and the contact angle θ of 25 ° C was obtained. Here, "after heat treatment" means that after heating at 250 ° C for 50 minutes, the latter is placed at room temperature for 1 hour. ~ contact angle 値~ photosensitive resin composition, when the water contact angle of the surface of the painted wall formed by using the photosensitive-50-200841125 resin composition is measured by the above method, before the heat treatment is applied The water contact angle of the surface of the painted wall pattern is regarded as A. When the water contact angle of the surface of the painted wall after cooling at 240 ° C for 50 minutes was taken as 8 °, the contact angle difference (B ° - A °) may be 20 or more. The contact angle difference (B°-AQ) is preferably 30 or more, and most preferably 40. the above. Also, as A. From the viewpoint of improving the adhesion between the painting wall and the substrate, it is preferably 〇~6 (Τ, more preferably 0 to 55°, particularly preferably 0 to 50°. As Β °, it is more effective From the viewpoint of suppressing the color mixture in the production of the color filter, it is preferably from 65 to 180%, more preferably from 80 to 180%, particularly preferably from 90 to 180°. Here, referring to Fig. 1, the wall is illustrated. The upper surface of the painting wall refers to the exposed surface on the opposite side of the surface contacting the substrate from the surface of the painting wall (the upper surface 4 of Fig. 1). Further, the side of the painting wall refers to the wall away from the painting wall. a surface other than the upper surface of the painted wall (the side surface 5 of Fig. 1) in the exposed surface. Further, the concave portion on the substrate refers to a substrate which is surrounded by the drawing wall and which is not formed by the side wall of the drawing wall and the substrate. a concave region (a recess 3 in Fig. 1) formed by a surface. - a colored region forming step 1 - a colored region forming step is a recess on a substrate defined by the above-described off-wall forming step 'Forming a colored liquid composition by inkjet to form a colored region. In this step, on the substrate divided by the wall of the painting The concave portion (the region for forming the colored region) is given a color liquid composition (preferably two or more colors), and a plurality of colored regions (for example, two or more colors) (for example, red, green, blue, white, and the like) can be formed. The coloring filter of purple or the like is used. The method for producing a color filter according to the present invention is the above-described painting wall (for example, a black matrix) using the photosensitive composition for a color filter of the present invention having 200841125. On the substrate, the colored liquid composition is applied to form a colored region, so that the color mixing accompanying the spread of the ink on the drawing wall can be avoided, and the occurrence of peeling off of the wall or the occurrence of defects can be suppressed, so that color mixing can be produced. High-quality color filter in which image failure such as whitening is suppressed, such as whitening. The color filter of the present invention also has a painting wall using the photosensitive composition for a color filter of the present invention. Therefore, the colorlessness is uneven and the color purity is high, and the image failure such as whitening is suppressed, and the display characteristic is clear and clear. • As the inkjet method, the charged ink can be continuously ejected by the electric The method of controlling, using a method in which a piezoelectric element intermittently ejects ink, a method of heating an ink, and a method of intermittently ejecting the foam by using the same, etc. The ink can be either oily or water-based. The coloring agent containing the ink can be used together with a dye or a pigment, and it is more preferable to use a pigment from the viewpoint of durability, and it is also possible to use a coating for the production of a conventional color filter. The colored ink (for example, the colored resin composition described in paragraphs [0034] to [0063] of JP-A-2005-3 86 1), or the publication described in JP-A-2-004-32 5736 A conventional ink such as ink printed in JP-A-2002-37261-3. In the ink using the inkjet method, it is possible to cure by heating or to add ultraviolet rays in consideration of the step after the application. The energy line can be hardened. As the component which is heat-hardened, various thermosetting resins are widely used, and as a component which can be hardened by the energy ray, for example, a photoreaction initiator is added to the acrylate derivative or the methacrylate derivative. In particular, considering the heat resistance of -52-, 200841125, it is more preferable to have a plurality of acrylonitrile groups and methacrylonitrile groups in the molecule. These acrylate derivatives and methacrylate derivatives are preferably those which are water-soluble, and those which are poorly soluble in water may be emulsified or the like. In this case, a photosensitive composition containing a coloring agent such as a pigment of the photosensitive composition can be suitably used. In the color filter of the present invention, it is preferable that a color filter of a colored liquid composition is ejected onto a substrate by an inkjet method to form a color filter having a colored region (for example, a pixel), preferably having a color filter. A color filter of at least three color-colored pixels of at least RGB 3 • color ink discharged by the inkjet method. The pattern shape of the color filter is not particularly limited, and is generally a black matrix shape or a line shape, and may be a lattice shape or a (5 (delta) arrangement. In the color filter produced, in order to improve Patience, there is a case where the overcoat layer is provided in a comprehensive manner. The overcoat layer protects the colored region (for example, RGB pixels) while flattening the surface. However, from the viewpoint of increasing the number of steps, it is preferably not provided. The resin (OC agent) for forming the overcoat layer may, for example, be an acrylic resin composition, an epoxy resin composition, or a polyimine resin composition. Among them, transparency in the visible light range is excellent, and color is formed. The resin component of the curable composition of the filter generally contains an acrylic resin as a main component, and an acrylic resin composition is preferable from the viewpoint of excellent adhesion. As an example of the overcoat layer, JP-A 2003 In the paragraph No. [0 0 1 8 ] to [0 0 2 8] of the publication No. 2-8, the commercial product of the overcoating agent is "Optmer SS6699G" manufactured by JS R Co., Ltd. Such as RGB pixels In the above, a transparent electrode, an alignment film, etc. may be provided as needed. Specific examples of the transparent electrode include an oxime film. Further, specific examples of the alignment film include polyimine. &lt;Display device&gt; The display device of the present invention is configured by providing the color filter of the present invention described above. According to the color filter of the present invention, display unevenness during image display can be suppressed, and a display image with good image quality can be obtained. The color filter 'obtained by the method for producing a color filter of the present invention can be used as a display element in combination with a liquid crystal display element, an electrophoretic dynamic display element, an electrochromic display element, and a PLZT. It can also be used for color TV cameras or other uses that use color filters. Examples of the display device include a display device such as a liquid crystal display device, a plasma display device, an EL display device, and a CRT display device. The definition of the display device or the description of each display device is, for example, "electronic display device (sasaki Sasaki, Industrial Research Association (share) issued in 990)", "display device (Ibuki Shunzhang, industrial book (share)) It is recorded in the annual issue). A display device comprising the color filter of the present invention is preferably a liquid crystal display device. The liquid crystal display device is described in, for example, "Second-generation liquid crystal display technology (edited by Uchida Ryuo, Industrial Research Association (issued) in 1994). The liquid crystal display device to which the present invention is applicable is not particularly limited, and can be applied to, for example, various types of liquid crystal display devices described in the "Second Generation Liquid Crystal Display Technology". Among them, it is particularly effective for a liquid crystal display device for a color TFT method. The color TFT liquid crystal display device is described in, for example, "Color TFT liquid crystal display (Kyoritsu Publishing Co., Ltd., issued 996) - 54-200841125. Further, the present invention is also applicable to horizontal electric field driving such as IPS. A liquid crystal display device in which the viewing angle of the method such as the MVA or the like is expanded. For these methods, for example, "EL, PDF, LCD display technology, and the latest trends in the market (Dongli Research Center Survey Research Department 2001 1 It is described on page 43 of the annual issue). The liquid crystal display device is composed of a wide variety of members such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, and a viewing angle compensation film, in addition to the color filter. The color filter of the present invention can be applied to a liquid crystal display device composed of these conventional members. These components are described, for example, in '94 LCD Peripherals and Chemicals Markets (Island Kentaro, MCC (shares) issued in 1994), and "2003 LCD-related market status and future prospects (volumes)" (Shares Fuji Chimera, 硏 2003, etc.). The use is applicable to portable terminals such as televisions, personal computers, liquid crystal projectors, game machines, portable telephones, digital cameras, vehicle navigation systems, and the like, and is not particularly limited. [Examples] The present invention will be more specifically described below by way of examples. The present invention is not limited by the following examples as long as it does not exceed the gist of the invention. Further, the molecular weight indicates the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GP C), and "%" and "parts" are based on mass unless otherwise specified. (Example 1) An exemplary compound (1) of the above fluorine-containing compound of the present invention was synthesized as follows. Further, the fluorine-containing compound of the present invention other than the exemplary compound synthesized herein may be synthesized by a similar method. Further, the fluorine atom content in the fluorine-containing compound indicates the amount of fluorine estimated by the structural formula. - Synthesis of the ink-repellent (exemplified compound (1)) - 30 g of propylene glycol monomethyl ether acetate [MMPG-Ac, manufactured by DAICEL Chemical Industry Co., Ltd.] was placed in a cooling tube of 300 ml under a nitrogen stream. In the three-necked flask, the internal temperature was heated to 70 ° C in a water bath with a stone mortar. Among them, 25% of acrylic acid [AA, Tokyo Chemical Industry Co., Ltd.], 25 g # 2-(perfluorohexyl) was dissolved in 35 g of MMPG-Ac by a plunger pump for 2 hours. -ethyl acrylate [FAAC6, manufactured by ΝΟΚ), 22.5 g of terminal methyl polyethylene oxide monomer [P ME 1000, manufactured by Nippon Oil & Fats Co., Ltd., repeat number 23 of yttrium, terminal methyl group] A solution of 0.70 g of lauryl mercaptan [LM, manufactured by Tokyo Chemical Industry Co., Ltd.], and 0.28 5 g of 2,2'-azobis(isovaleronitrile) dissolved in 1 g of MMPG-Ac [V65 , and the solution of Wako Pure Chemical Industries Co., Ltd.]. After the completion of the dropwise addition, the mixture was stirred for 5 hours. As described above, 2-(perfluorohexyl)-ethyl acrylate [FAAC6], acrylic acid [AA], and polyethylene oxide monomer [PME 1 000] were copolymerized to synthesize Φ FAAC6/AA/PME 1 00 0 = 5 0/5/4 5 (mass ratio) of the exemplified compound (l). The weight average molecular weight of the compound (1) is 13,000, and the fluorine atom content in the compound (1) is 36%. - Preparation of photosensitive resin composition - First, the amount of K pigment dispersion 1 and propylene glycol monomethyl acetate acetate vinegar described in Table 1 were mixed at a temperature of 24 C (±2 C), and spoiled at 150 rpm for 10 minutes. Then, the amounts of methyl ethyl ketone, binder 2, hydroquinone monomethyl ether, DPHA liquid, 2, 4 bis (trichloromethyl-56-200841125)-6 were measured in the amounts shown in Table 1, respectively. -[4'-(N,N-Diethoxycarbonylmethylamino)-3bromophenyl]-s-tripper, the following surfactant 1, the above-exemplified compound (1) as an ink-repellent The mixture was added in this order at a temperature of 25 ° C (: t 2 ° C), and stirred at 150 ° C (soil 2 ° C) at 150 ° C for 30 minutes to obtain a photosensitive resin composition K 1 . In addition, the quantity shown in Table 1 is a mass part, and it is the following composition in detail. Here, the amount of the J ink added is 1% of the stomach of the total solid content of the photosensitive resin composition. &lt; Κ pigment dispersion 1 &gt;

{ •碳黑(Degussa 公司窫 Nipex35) 13.1% •下述分散劑1 〇·65% •聚合物(甲基丙烯酸苄酯/甲基丙烯酸=72/28莫耳比的無 規共聚合物,分子量3.7萬) 6.72% •丙二醇單甲基醚醋酸酯 79·53% 分散劑1{ • Carbon black (Degussa 窫Nipex35) 13.1% • Dispersant 1 〇·65% • Polymer (benzyl methacrylate/methacrylic acid = 72/28 molar ratio of random copolymer, molecular weight 3.7 million) 6.72% • Propylene glycol monomethyl ether acetate 79.53% dispersant 1

&lt;黏結劑2&gt; •聚合物(甲基丙烯酸苄酯/甲基丙烯酸= 7 2/2 8莫耳比的並 規共聚合物,分子量3.8萬) 27% •丙二醇單甲基醚醋酸酯 73% -57- 200841125&lt;Binder 2&gt; • Polymer (benzyl methacrylate/methacrylic acid = 7 2/2 8 molar ratio of a homopolymer, molecular weight 38,000) 27% • Propylene glycol monomethyl ether acetate 73 % -57- 200841125

&lt; D Ρ Η A 液 &gt;&lt; D Ρ Η A liquid &gt;

.二季戊四醇六丙烯酸酯(含有5 OOppm的聚合抑制劑 MEHQ,日本化藥(股)製, 商品名稱:KAYARAD DPHA) 7 6% •丙二醇單甲基醚醋酸酯 24% &lt;界面活性劑1 &gt; •下述構造物1 3 0% •甲基乙基酮 7 0% 構造物1 —(CH^H)4(r-OC 〇〇Η2〇Η2ΟηΡ2η+1 -(CH2-CH)x— -(CHa-CH)^- 0=6 οά O(P0)7H 0(E0)7H (n = 6,x = 55,y = 5,Mw = 3 3940,M w/Mn = 2.5 5 PO :環氧丙烷,EO ··環氧乙烷) [表l] 感光性樹脂組成物 Κ1 K顔料分散物1 30 丙二醇單甲基醚醋酸酯 15 甲基乙基酮 34 黏結劑2 、 13 DPHA 液 5.5 2,4-雙(三氯甲基)-6-[4,-(Ν,Ν-雙乙氧羰基 甲基胺基)-3’-溴苯基]-s-三畊 0.2 氫醌單甲基醚 0.006 界面活性劑1 0.06 例示化合物(1) 0.35 質量份 -58- 200841125 《離畫壁的形成》 藉由UV洗淨裝置來洗淨無鹼玻璃基板後,使用洗淨劑 刷洗乾淨,再用超純水作超音波洗淨。對該基板在1 20 °c施 予3分鐘熱處理,以使表面狀態安定化。 將該基板冷卻,調溫到23 °C後,藉由具有縫狀噴嘴的玻 璃基板用塗布機(FAS亞洲公司製,商品名稱:MH- 1 600), 塗布上表中記載組成所構成的感光性組成物K 1。接著,在 真空度爲1(T5 Pa、溫度爲100 °C的真空乾燥裝置中作2分鐘 # 乾燥,得到約膜厚2.3 μηι的感光性樹脂組成物層K 1。 使用具有超高壓水銀燈的近接型曝光機(日立高科技電 子工程株式會社製),在基板與光罩(具有畫像圖案的石英曝 光光罩)成垂直豎立的狀態下,將光罩面與感光性樹脂組成 物層Κ1的間的距離設定在200μιη,在氮氣氣氛下,以曝光 量300mJ/cm2作圖案曝光。 接著,將純水從噴淋器噴嘴噴霧,以使感光性組成物層 K1的表面被均勻潤濕後,將KOH系顯像液(含.有KOH、非 ® 離子界面活性劑,商品名稱:CDK-1,富士薄膜電子材料(股) 製)經100倍稀釋者,在扁平噴嘴壓力0.04MPa下,於23 °C噴淋顯像80秒,以得到圖案化畫像。然後,藉由超高壓 洗淨噴嘴,在9· 8MPa的壓力下噴射超純水以去除殘渣,在 大氣下以曝光量2000mJ/cm2進行後曝光,接著在240°C進 行50分鐘的後烘烤(加熱處理),得到具有膜厚2·0 μιη、光 學濃度4.0、ΙΟΟμπι寬的開口部之條帶狀黑色矩陣(離畫 壁)。以下,將形成有離畫壁的玻璃基板稱爲「附有離畫壁 -59- 200841125 的基板」。 《彩色濾光片的製作》 &lt;畫素用著色印墨組成物之調製&gt; 於下述的成分中,首先混合顏料、高分子分散劑及溶 劑’使用二輥及珠磨機來得到顏料分散液。邊以溶解器等 來充分攪拌該顏料分散液,邊少量添加其它材料,以調製 紅色(R)畫素用著色印墨組成物。 (紅色畫素用著色印墨組成物的組成) •顏料(C.I·顏料紅254) 5份 •局分子分散劑 (日本 LUBRIZOL 公司製 Solspass 24000) 1 份 •黏結劑(甲基丙烯酸苄酯/甲基丙烯酸=72/28莫耳比的無規 共聚合物,分子量3.7萬) 3份 •第一環氧樹脂(醛酚清漆型環氧樹脂,油化殼牌公司製 Epicoat 154) 2 份 •第二環氧樹脂 (新戊二醇二縮水甘油基醚) 5份 •硬化劑(偏苯三酸) 4份 •溶劑:3 -乙氧基丙酸乙酯 8 〇份 再者,除了.代替上述組成中的C.I.顏料紅254,使用同 量的C · I.顏料綠3 6以外,與紅色畫素用著色印墨組成物的 情況同樣地,調製綠色(G)畫素用著色印墨組成物。 再者,除了代替上述組成中的C.I·顏料紅254,使用同 量的C.I·顏料藍15:6以外,與紅色畫素用著色印墨組成物 -60- 200841125 的情況同樣地,調製藍色(B)畫素用著色印墨組成物。 接著,使用上述記載的R、G、B的畫素用著色印墨組成 物’於上述所得之附有離晝壁的基板之離畫壁所劃分的區 域內(離畫壁與基板所圍繞的凹部),使用噴墨方式的記錄裝 置(例如DIMATIX公司製的Apollo II),以成爲所欲的濃度 爲止,進行印墨組成物的吐出,製作由R、G、B的圖案所 構成的彩色濾光片。畫像著色後的彩色濾光片係在23 0°C烘 箱中被烘烤3 0分鐘,而得到離畫壁、各畫素皆完全硬化的 # 彩色濾光片基板。 《液晶顯示裝置的製作》 於上述所得到的彩色濾光片基板之R畫素、G畫素、及 B畫素以及離畫壁之上,更藉由濺鍍來形成ΐτο(銦錫氧化 物)的透明電極。 &lt;柱狀間隔物圖案的形成&gt; 藉由與上述同樣的縫塗機,將下述間隔物用的感光性樹 脂層用塗布液塗布在前述彩色攄光片的1 τ 〇上,作乾燥而 ® 形成感光性樹脂層SP1。 (感光性樹脂層用塗布液的處方SP 1) 重 甲基丙烯酸/甲基丙烯酸烯丙酯共聚物 量平均分子量40000 ;高分子物質) 莫耳比=20/80, 108份Dipentaerythritol hexaacrylate (containing 500 ppm polymerization inhibitor MEHQ, manufactured by Nippon Chemical Co., Ltd., trade name: KAYARAD DPHA) 7 6% • Propylene glycol monomethyl ether acetate 24% &lt; surfactant 1 &gt • The following structure 1 3 0% • Methyl ethyl ketone 7 0% Structure 1 —(CH^H)4(r-OC 〇〇Η2〇Η2ΟηΡ2η+1 -(CH2-CH)x— ( CHa-CH)^- 0=6 οά O(P0)7H 0(E0)7H (n = 6,x = 55,y = 5, Mw = 3 3940, M w/Mn = 2.5 5 PO : propylene oxide , EO ··Ethylene oxide) [Table 1] Photosensitive resin composition Κ1 K Pigment dispersion 1 30 Propylene glycol monomethyl ether acetate 15 Methyl ethyl ketone 34 Adhesive 2, 13 DPHA liquid 5.5 2, 4 -Bis(trichloromethyl)-6-[4,-(Ν,Ν-bisethoxycarbonylmethylamino)-3'-bromophenyl]-s-three tillage 0.2 hydroquinone monomethyl ether 0.006 Surfactant 1 0.06 Illustrative compound (1) 0.35 parts by mass - 58 - 200841125 "Formation of the wall of the painting" After washing the alkali-free glass substrate with a UV cleaning device, it is washed with a detergent and then ultrapure. The water is ultrasonically washed. The substrate is heated at 10 ° C for 3 minutes. In order to stabilize the surface state, the substrate was cooled, and the temperature was adjusted to 23 ° C, and then coated with a glass substrate coater (manufactured by FAS Asia, trade name: MH-1600) having a slit nozzle. In the above table, the photosensitive composition K 1 having the composition is described. Then, it is dried in a vacuum drying apparatus having a degree of vacuum of 1 (T5 Pa and a temperature of 100 ° C for 2 minutes) to obtain a photosensitive film having a film thickness of 2.3 μm. The resin composition layer K 1 is used in a state in which the substrate and the photomask (the quartz exposure mask having the image pattern) are vertically erected using a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Co., Ltd.) having an ultrahigh pressure mercury lamp. The distance between the mask surface and the photosensitive resin composition layer 设定1 was set to 200 μm, and the pattern was exposed to an exposure amount of 300 mJ/cm 2 in a nitrogen atmosphere. Next, pure water was sprayed from the shower nozzle so that After the surface of the photosensitive composition layer K1 is uniformly wetted, a KOH-based developing solution (containing KOH, a non-ION ion surfactant, trade name: CDK-1, Fuji Film Electronic Material Co., Ltd.) is used. 100 times diluted The image was sprayed at a flat nozzle pressure of 0.04 MPa for 80 seconds at 23 ° C to obtain a patterned image. Then, ultrapure water was sprayed at a pressure of 9.8 MPa to remove the residue by an ultrahigh pressure washing nozzle. Post-exposure was performed at an exposure amount of 2000 mJ/cm 2 in the air, followed by post-baking (heat treatment) at 240 ° C for 50 minutes to obtain an opening having a film thickness of 2.0 μm, an optical density of 4.0, and a width of ΙΟΟμπι. Ribbon black matrix (away from the wall). Hereinafter, the glass substrate on which the drawing wall is formed is referred to as "substrate with the drawing wall -59-200841125". <<Preparation of Color Filter>> &lt;Preparation of Composition for Colored Ink for Illustrator&gt; First, a pigment, a polymer dispersant, and a solvent are mixed in the following components to obtain a pigment using a two-roll and bead mill. Dispersions. The pigment dispersion liquid was sufficiently stirred with a dissolver or the like, and other materials were added in a small amount to prepare a colored ink composition for red (R) pixels. (The composition of the composition of the pigmented ink for the red pixel) • Pigment (CI·Pigment Red 254) 5 parts • The molecular dispersant (Solspass 24000, manufactured by LUBRIZOL, Japan) 1 part • Adhesive (benzyl methacrylate/A) Acrylic acid = 72/28 molar ratio of random copolymer, molecular weight 37,000) 3 parts • First epoxy resin (aldehyde varnish type epoxy resin, Oilcoat EI company Epicoat 154) 2 copies • Second Epoxy resin (neopentyl glycol diglycidyl ether) 5 parts • Hardener (trimellitic acid) 4 parts • Solvent: Ethyl 3-ethoxypropionate 8 parts, in addition to the above composition In the case of the CI Pigment Red 254, the same amount of C.I. Pigment Green 3 6 was used, and the colored ink composition for green (G) pixels was prepared in the same manner as in the case of the colored ink composition of the red pixel. In addition, in place of the CI·Pigment Red 254 in the above composition, the same amount of CI·Pigment Blue 15:6 is used, and the blue color is modulated in the same manner as in the case of the colored ink composition of the red pixel-60-200841125. (B) A pigmented ink composition for a pixel. Next, the coloring ink composition for pixels of R, G, and B described above is used in the region of the above-mentioned substrate from which the wall of the substrate is attached (the wall surrounded by the substrate and the substrate) In the concave portion, an ink jet type recording device (for example, Apollo II manufactured by DIMATIX Co., Ltd.) is used to discharge the ink composition at a desired concentration, and a color filter composed of patterns of R, G, and B is produced. Light film. The colored filter after the image was baked was baked in a 30 ° C oven for 30 minutes to obtain a # color filter substrate which was completely hardened from the wall and each of the pixels. <<Production of Liquid Crystal Display Device>> On the R pixel, G pixel, and B pixel of the color filter substrate obtained above, and on the off-paint wall, ΐτο (indium tin oxide) is formed by sputtering. Transparent electrode. &lt;Formation of Columnar Spacer Pattern&gt; The coating liquid for a photosensitive resin layer for the following spacers is applied onto 1 τ 前述 of the color light-emitting sheet by a slit coater similar to the above, and dried. And ® forms the photosensitive resin layer SP1. (Prescription SP 1 for coating liquid for photosensitive resin layer) Heavy methacrylic acid/allyl methacrylate copolymer, average molecular weight: 40000; high molecular weight) Mohr ratio = 20/80, 108 parts

(聚合性單體) 6 4.7份 •2,4-雙(三氯甲基)-6-[4’-(&gt;1,1^雙乙氧羰基甲基胺基)_3,-溴苯基]-s-三阱 6.24份 -61 - 200841125 0.0336 份 •氫醌單甲基醚 •維多利亞藍BOHM(保土谷化學公司製) 0.874份(Polymerizable monomer) 6 4.7 parts • 2,4-bis(trichloromethyl)-6-[4'-(&gt;1,1^bisethoxycarbonylmethylamino)_3,-bromophenyl ]-s-Triple well 6.24 parts-61 - 200841125 0.0336 parts • Hydroquinone monomethyl ether • Victoria Blue BOHM (made by Baotu Valley Chemical Co., Ltd.) 0.874

• Megafac F780F (大日本油墨化學工業(股)製;界面活性劑) 0.8 5 6份 328份 475份 •甲基乙基酮 • 1-甲氧基-2-丙基醋酸酯 •甲醇 16.6 份 其次,隔著指定的光罩,藉由超高壓水銀燈以300mJ/cm2 • 作近接曝光。曝光後,使用K0H顯像液[CDK-1 (商品名)的 100倍稀釋液(pH=l 1 · 8)、富士照相軟片(股)製]溶解去除未 曝光部分的感光性樹脂層。 接著,在23 0 °C烘烤30分鐘,以在玻璃基板上的位於 ITO膜上之離畫壁的上部之部分形成直徑16 μπι、平均高度 3.7 μιη的柱狀間隔物圖案。再於其上設置由聚醯亞胺所成的 配向膜。 &lt;液晶配向分割用突起的形成〉 # 藉由與上述同樣的縫塗機,將下述的突起用感光性樹脂 層用塗布液塗布在前述彩色濾光片基板的IΤ 0上,作乾燥 而形成突起用感光性樹脂層。 接著,在突起用感光性樹脂層上,使用下述處方Ρ1的 中間層用塗布液,設置乾燥膜厚爲1 · 6 μ m的中間層。 (突起用感光性樹脂層用塗布液:處方A) •正型光阻液 5 3 · 3份 (富士薄膜電子材料(股)製,FH_24 13 F) -62- 200841125 •甲基乙基酮 4 6.7份 •前述界面活性劑1 0.04份 (中間層用塗布液:處方P 1 ) •聚乙烯醇 (PVA2 05,可樂麗(股)製,皂化度88%,聚合度5 50) 32.2 份 •聚乙烯吡咯啶酮(ISP ·日本公司製,K· 30) 14.9份 •蒸餾水 524份• Megafac F780F (Daily Ink Chemical Industry Co., Ltd.; surfactant) 0.8 5 6 parts 328 parts 475 parts • methyl ethyl ketone • 1-methoxy-2-propyl acetate • methanol 16.6 parts , through a specified mask, with a high-pressure mercury lamp at 300mJ / cm2 • for proximity exposure. After the exposure, the photosensitive resin layer of the unexposed portion was dissolved and removed by using a K0H developing solution [CDK-1 (trade name) 100-fold dilution (pH = 1·8), Fuji Photo Film Co., Ltd.]. Subsequently, it was baked at 23 ° C for 30 minutes to form a columnar spacer pattern having a diameter of 16 μm and an average height of 3.7 μm on the portion of the glass substrate which was on the upper portion of the ED film. Further, an alignment film made of polyimide is provided thereon. &lt;Formation of protrusions for liquid crystal alignment division> # The following coating liquid for a photosensitive resin layer for protrusions is applied onto I Τ 0 of the color filter substrate by a slit coater similar to the above, and dried. A photosensitive resin layer for protrusions is formed. Next, an intermediate layer having a dry film thickness of 1.6 μm was provided on the photosensitive resin layer for protrusions using the coating liquid for an intermediate layer of the following prescription Ρ1. (Coating liquid for photosensitive resin layer for protrusions: Prescription A) • Positive photoresist liquid 5 3 · 3 parts (made by Fuji Film Electronic Materials Co., Ltd., FH_24 13 F) -62- 200841125 • Methyl ethyl ketone 4 6.7 parts • The above surfactant 1 0.04 parts (coating solution for intermediate layer: prescription P 1 ) • Polyvinyl alcohol (PVA2 05, manufactured by Kuraray Co., Ltd., saponification degree 88%, polymerization degree 5 50) 32.2 parts • Poly Vinylpyrrolidone (ISP·Japan, K·30) 14.9 parts • 524 parts of distilled water

•甲醇 429份 接著,以光罩與突起用感光性樹脂層的表面之距離成爲 1 00 μιη的方式,配置近接曝光機,隔著該光罩,藉由超高壓 水銀燈以照射能量150mJ/cm2。然後,藉由噴啉式顯像裝 置,邊將2.3 8 %氫氧化四甲銨水溶液在33°C噴灑基板30秒 邊顯像,以顯像去除突起用感光性樹脂層的不要部分(曝光 部分)。如此,在前述彩色濾光片基板的位於ITO膜上的R、 G、B之畫素的上部的部分,形成以所欲形狀所圖案化的感 光性樹脂層所成的突起。接著,藉由將形成有該突起的彩 色濾光片基板在240 °C下烘烤50分鐘,而可在彩色濾光片 基板上形成高度1 · 5 μπι、縱截面形狀爲魚板狀的配向分割用 突起。 再者,對於由前述所得之彩色濾光片基板,藉由組合驅 動側基板及液晶材料,以製作配向分割垂直配向型液晶顯 示元件。即,作爲驅動側基板,準備排列形成有ΤΤΤ與畫 素電極(導電層)的TFT基板,將該TFT基板與由上述所得 -63 - 200841125 之彩色濾光片基板,以該TFT基板的設置有畫素電極等之 側的表面、與彩色濾光片基板之形成有配向分割用突起之 側的表面成相對地方式作配置,藉由前述所形成的間隔物 來設置且固定間隙。於該間隙內封入液晶材料,而成爲設 置有擔任影像顯示的液晶層之液晶胞。於如此所得到的液 晶胞之兩面,黏貼(股)Sanritz製的偏光板HLC2-2518。接 著,構築冷陰極管的背光,配置在前述設置有偏光板的液 晶胞之背面側,成爲配向分割垂直配向型液晶顯示裝置。 ® (實施例2) 除了於實施例1的感光性樹脂組成物之調製中,將撥墨 劑的添加量對於感光性樹脂組成物的總固體成分而言從1 % 變更爲5 %以外,與實施例1同樣地,製作附有離畫壁的基 板、彩色濾光片及液晶顯不裝置。其次,與實施例1同樣 地進行評價。 (實施例3) 除了於實施例1的離畫壁之形成中,將真空乾燥裝置的 • 真空度從l〇-5Pa變更成l(T4Pa以外,與實施例1同樣地, 製作附有離畫壁的基板、彩色濾光片及液晶顯示裝置。其 次,與實施例1同樣地進行評價。 (實施例4) 除了於實施例1的離畫壁之形成中,將真空乾燥裝置的 真空度從l(T5Pa變更成l(T3Pa以外,與實施例〗同樣地, 製作附有離畫壁的基板、彩色濾光片及液晶顯示裝置。其 次,·與實施例1同樣地進行評價。 -64- 200841125 (實施例5) 《感光性轉印材料K 1的製法》 於厚度75 μηι的聚對酞酸乙二酯薄膜臨時支持體之上, 使用縫狀噴嘴來塗布由下述處方Η 1所組成的熱塑性樹脂層 用塗布液,及使乾燥。接著’塗布由下述處方Ρ 1所組成的 中間層用塗布液,及使乾燥。再者,塗布實施例1所調製 的感光性樹脂組成物Κ1,及使乾燥。如此地,在臨時支持 體之上,層合乾燥膜厚爲14.6μπι的熱塑性樹脂層、乾燥膜 Φ 厚爲1 · 6 μηι的中間層、及乾燥膜厚爲2 · 3 μηι的感光性樹脂 組成物層,最後壓黏保護薄膜(厚度12μιη的聚丙烯薄膜)。 如此地,製作由臨時支持體、熱塑性樹脂層、中間層(隔 氧膜)和黑(Κ)的感光性樹脂組成物層所一體化成的感光性 轉印材料,樣品名稱爲感光性轉印材料Κ1。 &lt;熱塑性樹脂層用塗布液:處方Η 1 &gt; •甲醇 1 1 · 1份 •丙二醇單甲基醚醋酸酯 6.36份• Methanol 429 parts Next, a proximity exposure machine was placed so that the distance between the mask and the surface of the photosensitive resin layer for protrusions was 100 μm, and the irradiation energy was 150 mJ/cm 2 by an ultrahigh pressure mercury lamp through the mask. Then, the substrate was sprayed with a 2.38% aqueous solution of tetramethylammonium hydroxide at 33 ° C for 30 seconds by a spray-type developing device to remove unnecessary portions of the photosensitive resin layer for protrusion (exposure portion). ). As described above, in the portion of the color filter substrate on the upper portion of the R, G, and B pixels on the ITO film, protrusions formed of the photosensitive resin layer patterned in a desired shape are formed. Then, by baking the color filter substrate on which the protrusions are formed at 240 ° C for 50 minutes, an alignment of a height of 1 · 5 μm and a longitudinal cross-sectional shape in a fish plate shape can be formed on the color filter substrate. A protrusion for division. Further, with respect to the color filter substrate obtained as described above, the side-by-side substrate and the liquid crystal material are combined to form an alignment-divided vertical alignment type liquid crystal display element. In other words, as the driving side substrate, a TFT substrate on which a pixel electrode and a pixel electrode (conductive layer) are arranged is arranged, and the TFT substrate and the color filter substrate obtained in the above-mentioned -63 - 200841125 are provided with the TFT substrate. The surface on the side of the pixel electrode or the like is disposed so as to face the surface on the side of the color filter substrate on which the protrusion for the division is formed, and the gap is provided by the spacer formed as described above. The liquid crystal material is sealed in the gap to form a liquid crystal cell provided with a liquid crystal layer for image display. On both sides of the thus obtained liquid crystal cell, a polarizing plate HLC2-2518 manufactured by Sanritz was adhered. Then, the backlight of the cold cathode tube is placed on the back side of the liquid crystal cell on which the polarizing plate is provided, and the alignment is a vertical alignment type liquid crystal display device. ® (Example 2) In addition to the preparation of the photosensitive resin composition of Example 1, the amount of the ink-repellent added was changed from 1% to 5% of the total solid content of the photosensitive resin composition, and In the same manner as in the first embodiment, a substrate with a painting wall, a color filter, and a liquid crystal display device were produced. Next, evaluation was carried out in the same manner as in Example 1. (Example 3) In the same manner as in Example 1, except that the degree of vacuum of the vacuum drying apparatus was changed from l〇-5Pa to 1 (T4Pa) in the formation of the drawing wall of Example 1, The substrate of the wall, the color filter, and the liquid crystal display device were evaluated in the same manner as in Example 1. (Example 4) In addition to the formation of the paint wall of Example 1, the vacuum degree of the vacuum drying device was changed from (T5Pa was changed to 1 (T3Pa, except for T3Pa, a substrate with a painting wall, a color filter, and a liquid crystal display device were produced.) Next, evaluation was performed in the same manner as in Example 1. -64- 200841125 (Example 5) "Manufacturing method of photosensitive transfer material K1" On a polyethylene phthalate film temporary support having a thickness of 75 μm, a slit nozzle was used for coating by the following prescription Η 1 The coating liquid for the thermoplastic resin layer was dried, and then the coating liquid for the intermediate layer composed of the following formulation Ρ 1 was applied and dried. Further, the photosensitive resin composition prepared in Example 1 was applied. And make it dry. So, in temporary support On top, a thermoplastic resin layer having a dry film thickness of 14.6 μm, an intermediate layer having a dry film Φ thickness of 1.6 μm, and a photosensitive resin composition layer having a dry film thickness of 2·3 μηι are laminated, and finally a pressure-sensitive protection layer is applied. Film (polypropylene film having a thickness of 12 μm). Thus, photosensitive transfer by integrating a temporary support, a thermoplastic resin layer, an intermediate layer (oxygen barrier film), and a black photosensitive resin composition layer was prepared. Material, sample name is photosensitive transfer material Κ 1. &lt;coating solution for thermoplastic resin layer: prescription Η 1 &gt; • methanol 1 1 · 1 part • propylene glycol monomethyl ether acetate 6.36 parts

•甲基乙基酮 52.4份 •甲基丙烯酸甲酯/丙烯酸乙基己酯/甲基丙烯酸苄酯/甲 基丙烯酸共聚物(共聚合組成比(莫耳比)= 5 5/ 1 1.7/4.5/2 8.8, 分子量=10萬,Tg与7(TC) 5.83份 •苯乙烯/丙烯酸共聚物(共聚合組成比(莫耳比)=63/37,分 子量=1萬,Tg与loot: ) 13·6份 • 2,2-雙[4-(甲嫌丙醯氧基聚乙氧基)苯基]丙院(新中村化學 工業(股)製) 9 j份 -65- 200841125 •前述界面活性劑1 〇 . 5 4份 &lt;中間層用塗布液:處方Pl&gt; •聚乙烯醇 (PVA205,可樂麗(股)製,皂化度=88%,聚合度5 5 0) 32.2 份 •聚乙烯吡咯啶酮(ISP ·日本公司製,Κ-30) 14·9份 •蒸餾水 524份 •甲醇 429份 ^ 邊藉由噴淋器將經調整到2 5 °C的玻璃洗淨劑液噴灑到 無鹼玻璃基板2 0秒,邊用具有耐隆毛的回轉刷來洗淨,以 純水噴淋洗淨後,藉由噴淋器來噴灑矽烷偶合液(Ν_β (胺乙 基)γ-胺丙基三甲氧基矽烷0.3質量%水溶液,商品名稱: ΚΒΜ603,信越化學工業)20秒,進行純水噴淋洗淨。藉由 基板預備加熱裝置在100 °C加熱該基板2分鐘。 對於所得到之矽烷偶合處理玻璃基板,將從上述製法所 製作的感光性轉印材料K1去除覆蓋膜,以去除後所露出的 感光性樹脂組成物層之表面與前述矽烷偶合處理玻璃基板 之表面成接觸地作重疊,使用積層機·(日立工業股份有限公 司製(LamicII型)),對於前述在l〇〇°C經2分鐘加熱過的基 板,以橡膠輥溫度130°C、線壓100N/cm、輸送速度2.2m/ 分鐘作層合。接著,將聚對酞酸乙二酯薄膜臨時支持體, 在與熱塑性樹脂層的界面作剝離,以去除臨時支持體。將 臨時支持體剝離後,藉由具有超高壓水銀燈的近接型曝光 機(日立高科技電子股份有限公司製),使基板與光罩(具有 -66- 200841125 畫像圖案的石英曝光光罩)成垂直豎立的狀態,將光罩面與 感光性樹脂組成物層之間的距離設定爲200 μπι,以曝光量 70mJ/cm2作圖案曝光。 其次,以KOH顯像液[CDK-1(商品名)的100倍稀釋液 (pH=ll.8),富士照相軟片(股)製]來顯像,去除感光性樹脂 組成物層的未曝光部分及其下的中間層、熱塑性樹脂層, 得到在玻璃基板上的圖案化畫像。接著,於大氣下藉由校 準機(aligner),自基板的表側,對基板的全面以20 00m J/cm2 # 作後曝光,然後在240°C進行50分鐘的後烘烤,得到光學 濃度4.0的黑色矩陣(離畫壁)。 接著,與實施例1同樣地,製作彩色濾光片、液晶顯示 裝置。 (比較例1) 除了於實施例1中,在感光性樹脂組成物的調製時不添 加撥墨劑以外,與實施例1同樣地,製作附有離畫的基板、 彩色濾光片及液晶顯示裝置。 ® (比較例2) 除了於實施例1中,在感光性樹脂組成物的調製時,將 撥墨劑的添加量對於感光性樹脂組成物的總固體成分而言 從1 %變更成0.5 %以外,與實施例1同樣地,製作附有離畫 壁的基板、彩色濾光片及液晶顯示裝置。 (比較例3) 除了於實施例1中,在離畫壁的形成時不用真空乾燥裝 置,而在大氣壓下進行乾燥以外,與實施例1同樣地,製 -67 - 200841125 作附有離畫壁的基板、彩色濾光片及液晶顯示裝置。 (實施例6) 除了於實施例1中,感光性樹脂組成物K1之塗布後的 乾燥,係在裝置內乾燥風量爲〇.5m/s ’於溫度100°C的乾燥 裝置中進行2分鐘,得到膜厚約2.3 μ m的感光性樹脂組成 物層K1以外,與實施例1同樣地,製作附有黑色矩陣(離 畫壁)的基板、彩色濾光片及液晶顯示裝置。此時,裝置內 乾燥風量係爲自感光性樹脂組成物層K 1的層表面起0.5 cm Φ 的高度之風量,使用SYSTEM6243(KANOMAX公司製)來測 定。 (實施例7〜1 1) 除了於實施例6中,將撥墨劑的含量、乾燥溫度、乾燥 時間、乾燥風量、及乾燥方法變更成下述表2所示者以外, 與實施例6同樣地,製作附有黑色矩陣(離畫壁)的基板、彩 色濾光片及液晶顯示裝置。 (實施例12〜14) ^ 除了於實施例6中,將撥墨劑的含量、乾燥溫度、乾燥 時間、乾燥風量、及乾燥方法變更成下述表2所示者,而 且將離畫壁之形成時所用的「〇 · 5 m / s的溫度1 0 0 °C之乾燥裝 置」換成真空乾燥烘箱DP-22(YAMATO(股)製),以下述表 2中所示的真空度來進行塗布膜的乾燥以外,與實施例1同 樣地’製作附有黑色矩陣(離畫壁)的基板、彩色瀘光片及液 晶顯示裝置。 再者’真空度的測定係使用日本MKS(股)製的Barratron -68- 200841125 真空計。 (比較例4〜7 ) 除了於實施例6中,將撥墨劑的含量、乾燥溫度、乾燥 時間、乾燥風量、及乾燥方法變更成下述表2所示者以外, 與實施例6同樣,製作附有黑色矩陣(離畫壁)的基板、彩色 濾光片及液晶顯示裝置。 (實施例15) 除了於實施例5中,感光性樹脂組成物K1之塗布後的 φ 乾燥,係在裝置內乾燥風量爲〇.5m/s,於溫度l〇〇°C的乾燥 裝置中進行2分鐘,得到膜厚約2.3 μιη的感光性樹脂組成 物層Κ1以外,與實施例5同樣地,製作感光性轉印材料 Κ 1。此時,裝置內乾燥風量係爲自感光性樹脂組成物層Κ 1 的層表面起〇.5cm的高度之風量,使用SYSTEM6243 (ΚΑΝΟΜΑΧ公司製)來測定。 &lt;評價&gt; 1) 感光性樹脂組成物的表面能 • 使用表面張力計(協和界面科學公司製的CBVP_ A3)’在 2 5 °C分別測定實施例1〜5及比較例1〜3中,添加撥墨劑 前的感光性樹脂組成物的表面能、及添加撥墨劑後的感光 性樹脂組成物之表面能。表2中顯示結果。 2) 離畫壁上的撥水/撥墨性(接觸角) 除了於實施例1〜1 5及比較例1〜7中’在感光性樹脂 組成物層K1的形成時不使用光罩以外,藉由與實施例1〜 1 5及比較例1〜7同樣的方法作曝光,然後在同樣的條件下 -69 - 200841125 進行到烘烤處理(加熱處理步驟)爲止的操作,得到試驗用感 光性樹脂組成物層。 將此試驗用感光性樹脂組成物層在後烘烤處理後於室 溫放置1小時冷卻後,使用接觸角測定器(協和界面科學(股) 製的接觸角計CA-A),使實施例1所調製的紅色(1^畫素用 著色印墨組成物當作20刻度大小的液體試料(印墨試料)從 針尖出來,使接觸試驗用感光性樹脂組成物層,而在試驗 用感光性樹脂組成物層上形成R畫素用著色印墨組成物的 # 液滴(印墨滴)。 由接觸角計的窺視孔來觀察該墨滴的形狀,在2 5 t下從 著滴開始放置1 〇秒後,求得墨滴的印墨接觸角Θ。 於實施例6〜15及比較例4〜7中,將上述墨滴變更爲 水滴,以同樣的程序測定後烘烤後的水接觸角。表2中顯 示結果。 3) 面內均一性(膜厚變動率) 在任意點5個地方測定實施例6〜1 5及比較例4〜7所 ® 製作的黑色矩陣(離畫壁)之厚度,算出平均値Lav。於5個 地方的厚度中,以與平均値Lav的差爲最大者當作Lm,由 下式來求得膜厚變動率(%),以面內均一性當作評價指標。 下表2中顯示結果。 膜厚變動率(%) = Lm/Lav 4) 液晶顯示裝置的顯示不均 對由實施例1〜1 5及比較例1〜7所製作的液晶顯示裝 置,輸入灰色的試驗信號時,目視觀察灰顯示,依照下述 -70- 200841125 評價基準來評價有無發生顯示不均。下表2中顯示結果結 果。 &lt;評價基準&gt; • A :無顯示不均,得到非常良好的顯示影像。 • B :玻璃基板的邊緣部分有些微的不均,但對顯示部沒有 影響,顯示影像爲良好。 • C :在顯示部見到些微的不均,但爲在實用上容許的範圍 內。 • D :在顯示部見到不均,顯示影像稍差。 • E :在顯示部看到強烈不均,顯示影像非常差。 -71 - 200841125• Methyl ethyl ketone 52.4 parts • Methyl methacrylate / Ethyl hexyl acrylate / Benzyl methacrylate / methacrylic acid copolymer (copolymerization composition ratio (Morby ratio) = 5 5 / 1 1.7/4.5 /2 8.8, molecular weight = 100,000, Tg and 7 (TC) 5.83 parts • styrene/acrylic acid copolymer (copolymerization composition ratio (mole ratio) = 63/37, molecular weight = 10,000, Tg and loot: ) 13 ·6 parts • 2,2-bis[4-(A propyl ethoxylated polyethoxy) phenyl] propyl compound (manufactured by Shin-Nakamura Chemical Industry Co., Ltd.) 9 j parts -65- 200841125 • The aforementioned interface activity Agent 1 〇. 5 4 parts &lt; Coating solution for intermediate layer: Prescription Pl&gt; • Polyvinyl alcohol (PVA205, manufactured by Kuraray Co., Ltd., saponification degree = 88%, degree of polymerization 5 5 0) 32.2 parts • Polyvinylpyrrole Pyridone (ISP · Japan, Κ-30) 14·9 parts • 524 parts of distilled water • 429 parts of methanol ^ Spray the glass detergent solution adjusted to 25 °C to the alkali-free by a shower The glass substrate was washed for 20 seconds while being washed with a rotating brush having a bristles, washed with pure water spray, and then sprayed with a decane coupling solution (Ν_β (amine ethyl) γ-aminopropyl group) by a shower. Trimethoxy sulfonium 0.3 mass% aqueous solution, trade name: ΚΒΜ603, Shin-Etsu Chemical Industry Co., Ltd. for 20 seconds, pure water spray washing. The substrate was heated at 100 ° C for 2 minutes by a substrate preliminary heating device. The obtained decane coupling treatment glass substrate The cover film is removed from the photosensitive transfer material K1 produced by the above-described production method, and the surface of the photosensitive resin composition layer exposed after the removal is overlapped with the surface of the decane coupling treatment glass substrate, and a laminator is used. (Manufactured by Hitachi Industrial Co., Ltd. (Lamic II type)), the substrate heated at 1 ° C for 2 minutes has a rubber roller temperature of 130 ° C, a linear pressure of 100 N/cm, and a conveying speed of 2.2 m / min. Then, the polyethylene terephthalate film temporary support is peeled off at the interface with the thermoplastic resin layer to remove the temporary support. After the temporary support is peeled off, by the proximity of the ultrahigh pressure mercury lamp Type exposure machine (made by Hitachi High-Tech Electronics Co., Ltd.), which makes the substrate perpendicular to the reticle (quartz exposure reticle with -66-200841125 portrait pattern) In the standing state, the distance between the mask surface and the photosensitive resin composition layer is set to 200 μm, and the exposure amount is 70 mJ/cm 2 for pattern exposure. Next, the KOH developing solution [CDK-1 (trade name)) 100-fold dilution (pH=ll.8), Fuji Photo Film (manufactured by Fuji Photo Film) was used to develop the unexposed portion of the photosensitive resin composition layer and the underlying intermediate layer and the thermoplastic resin layer to obtain a glass substrate. Patterned portrait on the. Then, under the atmosphere, an aligner is used to expose the substrate to 200 00 m J/cm 2 # from the front side of the substrate, and then post-bake at 240 ° C for 50 minutes to obtain an optical density of 4.0. Black matrix (away from the wall). Next, in the same manner as in the first embodiment, a color filter or a liquid crystal display device was produced. (Comparative Example 1) In the same manner as in Example 1, except that the ink-repellent was not added in the preparation of the photosensitive resin composition, a substrate with a drawing, a color filter, and a liquid crystal display were produced. Device. (Comparative Example 2) In addition to the first embodiment, in the preparation of the photosensitive resin composition, the amount of the ink-repellent added is changed from 1% to 0.5% based on the total solid content of the photosensitive resin composition. In the same manner as in the first embodiment, a substrate with a painting wall, a color filter, and a liquid crystal display device were produced. (Comparative Example 3) In the same manner as in the first embodiment, in the same manner as in the first embodiment, in the same manner as in the first embodiment, the -67 - 200841125 was attached to the wall except for the case where the drawing wall was formed without using a vacuum drying device. Substrate, color filter and liquid crystal display device. (Example 6) Except that in Example 1, drying of the photosensitive resin composition K1 after application was carried out for 2 minutes in a drying apparatus having a drying air volume of 〇.5 m/s in a device at a temperature of 100 °C. A substrate, a color filter, and a liquid crystal display device with a black matrix (painting wall) were produced in the same manner as in Example 1 except that the photosensitive resin composition layer K1 having a film thickness of about 2.3 μm was obtained. At this time, the amount of dry air in the apparatus was measured at a height of 0.5 cm Φ from the layer surface of the photosensitive resin composition layer K 1 and measured using SYSTEM6243 (manufactured by KANOMAX Co., Ltd.). (Examples 7 to 1 1) In the same manner as in Example 6, except that the content of the ink-repellent, the drying temperature, the drying time, the dry air volume, and the drying method were changed to those shown in Table 2 below. A substrate, a color filter, and a liquid crystal display device with a black matrix (out of the wall) are prepared. (Examples 12 to 14) ^ In addition to Example 6, the content of the ink-repellent, the drying temperature, the drying time, the dry air volume, and the drying method were changed to those shown in Table 2 below, and the painting wall was removed. The drying apparatus of "〇·5 m / s temperature of 100 °C" used in the formation was replaced with a vacuum drying oven DP-22 (manufactured by YAMATO Co., Ltd.), and the degree of vacuum shown in Table 2 below was used. In the same manner as in Example 1, except that the coating film was dried, a substrate with a black matrix (painting wall), a color light-emitting sheet, and a liquid crystal display device were produced. Further, the measurement of the degree of vacuum was carried out using a Barratron-68-200841125 vacuum gauge manufactured by MKS Co., Ltd., Japan. (Comparative Examples 4 to 7) In the same manner as in Example 6, except that the content of the ink-repellent, the drying temperature, the drying time, the dry air volume, and the drying method were changed to those shown in Table 2 below. A substrate, a color filter, and a liquid crystal display device with a black matrix (out of the wall) are prepared. (Example 15) Except that in Example 5, the φ after the application of the photosensitive resin composition K1 was dried, and the dry air volume in the apparatus was 〇.5 m/s, and it was carried out in a drying apparatus at a temperature of 10 ° C. A photosensitive transfer material Κ 1 was produced in the same manner as in Example 5 except that the photosensitive resin composition layer Κ1 having a film thickness of about 2.3 μm was obtained in 2 minutes. In this case, the air volume in the apparatus was measured at a height of 55 cm from the surface of the layer of the photosensitive resin composition layer Κ1, and was measured using SYSTEM6243 (manufactured by Seiko Instruments Inc.). &lt;Evaluation&gt; 1) Surface energy of the photosensitive resin composition. Measurements of Examples 1 to 5 and Comparative Examples 1 to 3 were carried out at 25 ° C using a surface tension meter (CBVP_A3, manufactured by Kyowa Interface Science Co., Ltd.). The surface energy of the photosensitive resin composition before the addition of the ink-repellent agent and the surface energy of the photosensitive resin composition after the addition of the ink-repellent agent. The results are shown in Table 2. 2) Water-repellent/inking property (contact angle) on the wall of the painting, except in the first to fifth embodiments and the first to seventh embodiments, in the case where the photosensitive resin composition layer K1 is formed, the mask is not used. The exposure was carried out in the same manner as in Examples 1 to 15 and Comparative Examples 1 to 7, and then subjected to a baking treatment (heat treatment step) under the same conditions -69 - 200841125 to obtain a test sensitivity. Resin composition layer. After the post-baking treatment, the photosensitive resin composition layer was allowed to stand at room temperature for 1 hour, and then cooled, and then subjected to a contact angle measuring device (contact angle meter CA-A manufactured by Kyowa Interface Science Co., Ltd.) to give an example. 1 red color (1^ pixel is used as a liquid sample (ink sample) of 20 scales as a liquid sample (ink sample), and the photosensitive resin composition layer for contact test is used, and the photosensitive property is tested. The # droplet (ink drop) of the colored ink composition for R pixel was formed on the resin composition layer. The shape of the ink droplet was observed by the peephole of the contact angle meter, and the drop was placed at 25 t under the drop. After 1 sec., the ink contact angle 墨 of the ink droplets was determined. In Examples 6 to 15 and Comparative Examples 4 to 7, the ink droplets were changed to water droplets, and the water contact after the post-baking was measured by the same procedure. The results are shown in Table 2. 3) In-plane uniformity (film thickness variation rate) The black matrix (out of the wall) produced in Examples 6 to 15 and Comparative Examples 4 to 7 was measured at 5 points at any point. The thickness is calculated as the average 値Lav. Among the thicknesses of the five places, the difference between the average 値Lav and the average 値Lav was taken as Lm, and the film thickness variation rate (%) was obtained by the following formula, and the in-plane uniformity was used as an evaluation index. The results are shown in Table 2 below. Film thickness variation rate (%) = Lm/Lav 4) Display unevenness of liquid crystal display device When a test signal of gray is input to the liquid crystal display devices produced in Examples 1 to 15 and Comparative Examples 1 to 7, visual observation is performed. Gray display, according to the following -70-200841125 evaluation criteria to evaluate the occurrence of display unevenness. The results are shown in Table 2 below. &lt;Evaluation Criteria&gt; • A: No display unevenness, and a very good display image was obtained. • B: The edge of the glass substrate is slightly uneven, but it has no effect on the display and the image is good. • C : There is a slight unevenness in the display section, but it is within the range that is practically permissible. • D : Unevenness is seen on the display, and the displayed image is slightly worse. • E : Strong unevenness is seen on the display, and the displayed image is very poor. -71 - 200841125

&lt;Ν嗽 備註 塗布 劍 |塗布I 塗布 轉印 塗布 厂塗布I 1塗布1 1塗布1 1塗布 塗布 塗布 塗布 塗布 塗布 塗布 塗布 轉印 剝 鲴 塗布 塗布 If &lt; &lt; PQ PQ &lt; m Q PQ CQ &lt; U &lt; u u &lt; &lt; &lt; PQ w Q Q Q 膜厚變 動率 % 1 1 1 1 1 1 1 1 CN cn κη (N &lt;N Ο) r—^ vn — H (N s i r—Η cn (N m ^T) in 乾燥條件 乾燥 風量 m/s 1 1 1 1 1 1 1 1 vn o’ m Ο d (N 〇 o 〇 (N o CN 〇 &lt;N 〇 vn o v〇 〇 &lt;N (N VO o 乾燥 時間 秒 1 1 1 1 1 I 1 ! o 04 S τ—1; s i—Hi r-H o m o o (N 〇 (N 〇 (N 〇 〇〇 o CN 11- 1 1 1 1 1 1 1 1 o o Ο ο o o (N o o o o o m o o 〇 o 〇 o 〇 H o T—i 印墨接 觸角 υη 〇〇 in cn 0 Ο ?: o 的 ο νο to 〇 κη trv o v〇 m o On rn 寸 〇 vo trv in o ON •TV O 〇 o o o m 水接 觸角 Ο 〇 ON ON 〇 (N ON o 〇 ?n 卜 ο g 1 1 1 1 1 1 1 1 1 1 1 1 1 1 ’真空度 Pa τ 一 T—H rn τ 4 r—H t—H r—^ 1 1 1 1 1 1 1 rn rr&gt; rn r-H 1 1 1 1 1 表面能(mN/m) 表面能差 ①-②. m (N CO ro CN m &lt;N (N 〇 〇 vq m &lt;Ν 1 1 1 1 1 1 1 1 1 1 1 1 1 1 腾 麵(¾ O csi οο Os r—I 〇 〇 (N O m rri CSJ 卜 ο 1 1 1 1 1 1 I 1 I 1 1 1 1 1 撥墨劑添 加前 ① m 一 (N m CM m CN m (N m (N m CN m &lt;N m rr; (Μ ! 1 I I 1 1 1 1 1 I 1 I I 1 vn i_B _H r—H 〇 in d ^—4 ▼—H 1—H m o t—H m o t~t 實施例1 實施例2 實施例3 實施例4 實施例5 比較例1 比較例2 : 比較例3 實施例6 丨實施例7 實施例8 實施例9 實施例10 實施例11 實施例12 實施例13 實施例14 實施例15 比較例4 比較例5 比較例6 比較例7 第1實 施形態 第2實 施形態 ,1广— 200841125 、, 如表2所示地,使用本發明的第1實施形態之感光性樹 脂膜的形成方法於製作離畫壁、彩色濾光片、及液晶顯示 裝置時(實施例1〜5),顯示不均爲良好。 另一方面,就不含撥墨劑的比較例1、及撥墨劑之添加 前後的表面能差低於2mN/m的比較例2、不用真空乾燥的 比較例3而言,顯示不均係惡化,超過容許範圍。 又,使用本發明的第2實施形態之感光性樹脂膜的形成 方法以製作離畫壁、彩色濾光片、及液晶顯示裝置時(實施 9 例6〜1 5 ),塗布所形成的膜之面內均一性高,所形成的黑 色矩陣之高度不均被抑制,可得到面內均一性高(或在容許 ' 範圍內)的彩色濾光片。使用此彩色濾光片的液晶顯示裝 置,影像顯示時的顯示不均係被防止,可得到高品質的影 像。 另一方面,於不含撥墨劑的比較例4中,不撥墨性差, 而且面內均一性亦差。又,以超過0.5m/s的乾燥風量進行 乾燥的比較例5及6之面內均一性亦差,黑色矩陣高度不 ® 齊係沒有被抑制。因此,使用彩色濾光片及液晶顯示裝置 於影像顯示時,顯示不均係惡化,高品質的影像顯示係困 難。 於上述實施例中,雖然以使用例示化合物(丨)作爲撥墨劑 的例子當作中心來說明,但於使用其它撥墨劑時,或組合 使用2種以上時,亦可與本實施例同樣地藉由真空乾燥來 形成感光性樹脂膜,而可發揮與實施例1同樣的效果,與 上述同樣地抑制顯示不均。 -73- ‘200841125 如上述地,依照本發明的第1實施形態的感光性樹脂膜 之形成方法’在形成圖案畫像(例如離畫壁)之目u ’可減小感 光性樹脂膜的面內膜厚變動。 - 又,依照本發明的第1實施形態的感光性樹脂膜之形成 方法,可提供具有感光性樹脂膜的感光性轉印材料,其中 所轉印形成的圖案畫像(例如離畫壁)之上面的撥水性及撥 墨性優異,可良好地保持該圖案畫像與形成有該圖案畫像 的基板之密接性。 % 再者,依照本發明的第1實施形態的感光性樹脂膜之形 成方法,可提供混色、色不均等之發生經抑制的高品位彩 色濾光片及其簡易的製造方法,以及顯示不均的發生經抑 制的可顯示高品位影像的顯示裝置。 依照本發明的第2實施形態的感光性樹脂膜之形成方 法,可提供於預先使用含有撥墨劑的樹脂組成物來塗布形 成用於構成畫素群的劃分畫素間之黑色矩陣等的離畫壁 時,具有可防止印墨蔓延之良好撥墨性,可形成膜厚變動(較 • 佳爲塗布膜的面內均一性在±5%以內)經抑制的離畫壁形成 用之樹脂膜,可得到高度不齊小的離畫壁之感光性樹脂 ' 膜,及使用其的感光性轉印材料。 依照本發明的第2實施形態的感光性樹脂膜之形成方 法,可提供能防止混色、色不均等,抑制顯示影像中的顯 示不均之可進行高品位影像顯示的附有離畫壁之基板,彩 色濾光片及其製造方法,以及顯示裝置。 【圖式簡單說明】 -74- .200841125 第1圖係用於說明離畫壁的上面、側面以及基板上的凹 部等之彩色濾光片的截面圖。 【主要元件符號說明】 1 離畫壁 2 著色液體組成物 3 凹部 4 上面 5 側面 馨 6 基板&lt;Ν嗽Note coating sword|Coat I coating transfer coater coating I 1 coating 1 1 coating 1 1 coating coating coating coating coating coating coating transfer strip coating coating If &lt;&lt; PQ PQ &lt; m Q PQ CQ &lt; U &lt; uu &lt;&lt;&lt; PQ w QQQ Film thickness variation rate % 1 1 1 1 1 1 1 1 CN cn κη (N &lt;N Ο) r—^ vn — H (N sir—Η Cn (N m ^T) in dry condition dry air volume m/s 1 1 1 1 1 1 1 1 vn o' m Ο d (N CNo 〇(N o CN 〇&lt;N 〇vn ov〇〇&lt;N (N VO o drying time seconds 1 1 1 1 1 I 1 ! o 04 S τ—1; si—Hi rH omoo (N 〇(N 〇〇〇(N 〇〇〇o CN 11- 1 1 1 1 1 1 1 1 Oo Ο ο oo (N ooooomoo 〇o 〇o 〇H o T—i Ink contact angle υη in cn 0 Ο ?: o ο νο to 〇κη trv ov〇mo On rn inch 〇 tr tr in o ON • TV O 〇ooom Water contact angle Ο ON ON 〇 (N ON o 〇?n 卜 g 1 1 1 1 1 1 1 1 1 1 1 1 1 1 'vacuum degree Pa τ a T-H rn τ 4 r —H t—H r—^ 1 1 1 1 1 1 1 rn rr&gt; rn rH 1 1 1 1 1 Surface (mN/m) Surface energy difference 1-2. m (N CO ro CN m &lt;N (N 〇〇vq m &lt;Ν 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Teng surface (3⁄4 O Csi οο Os r—I 〇〇(NO m rri CSJ ο 1 1 1 1 1 1 I 1 I 1 1 1 1 1 1 m before the ink addition (N m CM m CN m (N m (N m CN m &lt;N m rr; (Μ ! 1 II 1 1 1 1 1 I 1 II 1 vn i_B _H r—H 〇in d ^—4 ▼—H 1—H mot—H mot~t Example 1 Implementation Example 2 Example 3 Example 4 Example 5 Comparative Example 1 Comparative Example 2: Comparative Example 3 Example 6 丨 Example 7 Example 8 Example 9 Example 10 Example 11 Example 12 Example 13 Example 14 Implementation Example 15 Comparative Example 4 Comparative Example 5 Comparative Example 6 Comparative Example 7 In the second embodiment, the first embodiment, the first embodiment, the photosensitive resin film of the first embodiment of the present invention, is used as shown in Table 2 When the formation method was used to produce a paint wall, a color filter, and a liquid crystal display device (Examples 1 to 5), the display was not good. On the other hand, in Comparative Example 1 in which no ink-repellent was contained, and Comparative Example 2 in which the surface energy difference before and after the addition of the ink-repellent agent was less than 2 mN/m, Comparative Example 3 in which vacuum drying was not performed showed unevenness. Deterioration, exceeding the allowable range. Moreover, when the method for forming a photosensitive resin film according to the second embodiment of the present invention is used to form a paint removing wall, a color filter, and a liquid crystal display device (9 cases of 6 to 15), the formed film is applied. The in-plane uniformity is high, and the height unevenness of the formed black matrix is suppressed, and a color filter having high in-plane uniformity (or within the allowable range) can be obtained. The liquid crystal display device using the color filter can prevent display unevenness during image display, and can obtain high-quality images. On the other hand, in Comparative Example 4 containing no ink-repellent, the ink-repellent property was poor, and the in-plane uniformity was also inferior. Further, in Comparative Examples 5 and 6 which were dried at a dry air volume of more than 0.5 m/s, the in-plane uniformity was also inferior, and the black matrix height was not suppressed. Therefore, when color filters and liquid crystal display devices are used for image display, display unevenness is deteriorated, and high-quality image display is difficult. In the above-mentioned embodiment, the example in which the exemplary compound (丨) is used as the ink-repellent agent is described as a center. However, when other ink-repellent agents are used, or two or more types are used in combination, the same as in the present embodiment. By forming a photosensitive resin film by vacuum drying, the same effect as in the first embodiment can be obtained, and display unevenness can be suppressed in the same manner as described above. -73- '200841125 As described above, the method for forming a photosensitive resin film according to the first embodiment of the present invention can reduce the in-plane of the photosensitive resin film by forming a pattern image (for example, a wall) The film thickness changes. Further, according to the method of forming a photosensitive resin film according to the first embodiment of the present invention, it is possible to provide a photosensitive transfer material having a photosensitive resin film on which a pattern image (for example, a wall) is formed by transfer The water repellency and the ink repellency are excellent, and the adhesion between the pattern image and the substrate on which the pattern image is formed can be satisfactorily maintained. In addition, according to the method for forming a photosensitive resin film according to the first embodiment of the present invention, it is possible to provide a high-grade color filter in which color mixture and color unevenness are suppressed, a simple manufacturing method thereof, and display unevenness. A display device that suppresses the display of high-quality images. According to the method of forming a photosensitive resin film according to the second embodiment of the present invention, it is possible to provide a black matrix or the like between the divided pixels for forming a pixel group by using a resin composition containing an ink-repellent agent in advance. When the wall is painted, it has a good ink repellency that prevents the ink from spreading, and can form a resin film for suppressing the formation of the paint wall by changing the film thickness (more preferably within ±5% of the in-plane uniformity of the coating film). A photosensitive resin' film which is highly irregular and has a small height and a photosensitive transfer material using the same can be obtained. According to the method of forming a photosensitive resin film according to the second embodiment of the present invention, it is possible to provide a substrate with a painting wall capable of preventing high-quality image display by preventing color mixture, color unevenness, and the like from being suppressed in display images. , a color filter and a method of manufacturing the same, and a display device. BRIEF DESCRIPTION OF THE DRAWINGS -74-.200841125 Fig. 1 is a cross-sectional view for explaining a color filter such as a top surface, a side surface, and a concave portion on a substrate. [Description of main component symbols] 1 Off-paint wall 2 Colored liquid composition 3 Concave part 4 Upper side 5 Side framing 6 Substrate

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Claims (1)

200841125 十、申請專利範圍: 1.一種感光性樹脂膜之形成方法’其係具有: 添加撥墨劑,調製撥墨劑的添加前與添加後的表面能之 差爲2mN/m以上的感光性樹脂組成物之步驟;及, 將該感光性樹脂組成物塗布在基板上或臨時支持體 上,作真空乾燥以形成感光性樹脂膜之步驟。 2 .如申請專利範圍第1項之感光性樹脂膜之形成方法,其中 該真空乾燥係在真空度l(T3Pa以下進行。 # 3 .如申請專利範圍第1項之感光性樹脂膜之形成方法,其中 該撥墨劑含有(a)在側鏈至少具有氟原子的重複單位,(b) 在側鏈具有聚醚構造的重複單位,及(c)在側鏈具有羧基 的重複單位。 4 .如申請專利範圍第3項之感光性樹脂膜之形成方法,其中 該(b)在側鏈具有聚醚構造的重複單位係在側鏈具有封端 型的聚醚構造之重複單位。 5 .如申請專利範圍第1項之感光性樹脂.膜之形成方法,其中 ^ 該撥墨劑的添加量,對於感光性樹脂組成物的總固體成分 而係0.5質量%以上。 6 · —種感光性轉印材料,其具有藉由如申請專利範圍第1項 之感光性樹脂膜之形成方法在臨時支持體上所形成的感 光性樹脂層。 7 · —種彩色濾光片之製法,其係具有: 使用如申s靑專利範圍第1項之感光性樹脂膜之形成方 法、或如申請專利範圍第6項之感光性轉印材料,在基板 -76- 200841125 上形成離畫壁的步驟;及, 於由該離晝壁所劃分的基板上之凹部,使用噴墨方式形 成著色區域之步驟。 8 · —種彩色濾光片,其係由如申請專利範圍第7項之彩色濾 光片之製法所製造。 9·一種顯示裝置,其具備如申請專利範圍第8項之彩色濾光 1 〇.—種感光性樹脂膜之形成方法,其係具有: 塗布含撥墨劑的感光性樹脂組成物之塗布步驟;及, 以自膜面起的高度〇.5cm之氣體的流速爲〇.5m/s以 下,使所塗布形成的塗布膜乾燥之乾燥步驟。 1 1 ·如申if專利範圍第1 〇項之感光性樹脂膜之形成方法,其 中該乾燥係以風速〇.5m/s以下的流速的乾燥風來吹塗布 膜的表面而進行。 1 2 .如申|靑專利範圍弟1 0項之感光性樹脂膜之形成方法,其 中在以真空度成爲1(T3 Pa以下的方式,進行真空吸氣而 使乾燥(真空吸氣=「比大氣壓還低的空間」)。 1 3 ·如申g靑專利範圍第1 〇項之感光性樹脂膜之形成方法,其 中該撥墨劑含有(a)在側鏈至少具有氟原子的重複單位, (b)在側鏈具有聚醚構造的重複單位,及(c)在側鏈具有羧 基的重複單位。 14·如申請專利範圍第13項之感光性樹脂膜之形成方法,其 中該(b)在側鏈具有聚醚構造的重複單位係具有封端型的 聚醚構造。 -77- 200841125 1 5 ·—種感光性轉印材料,其係在臨時支持體上具有由如申請 專利範圍第1 〇項之感光性樹脂膜之形成方法所形成的感 光性樹脂層。 16.—種附有離畫壁之基板,其係在基板上具有含撥墨劑且面 內膜厚均一性爲±5 %以內的樹脂離畫壁膜。 1 7 · —種彩色濾光片之製法,其係具有: 使用如申請專利範圍第1 〇項之感光性樹脂膜之形成方 法、或如申請專利範圍第1 5項之感光性轉印材料,在基 板上形成感光性樹脂層的層形成步驟, 通過光罩將所形成的感光性樹脂層曝光成圖案狀,顯像 而形成離畫壁的離畫壁形成步驟,及 在該離畫壁所劃分的基板上之凹部,藉由噴墨法來給予 著色液體組成物,以形成著色區域的著色區域形成步驟。 1 8 · —種彩色濾光片,其係由如申請專利範圍第1 7項之彩色 濾光片之製法所製作。 1 9·一種顯示裝置,其係具備如申請專利範圍第1 8項之彩色 濾光片。 -78-200841125 X. Patent application scope: 1. A method for forming a photosensitive resin film, which comprises: adding an ink-repellent agent, and sensitizing the difference between the surface energy of the ink-repellent agent before and after the addition is 2 mN/m or more a step of forming a resin composition; and coating the photosensitive resin composition on a substrate or a temporary support and vacuum drying to form a photosensitive resin film. 2. The method of forming a photosensitive resin film according to the first aspect of the invention, wherein the vacuum drying is performed at a degree of vacuum of 1 (T3Pa or less. #3. A method of forming a photosensitive resin film according to claim 1 of the patent application. Wherein the ink-repellent contains (a) a repeating unit having at least a fluorine atom in a side chain, (b) a repeating unit having a polyether structure in a side chain, and (c) a repeating unit having a carboxyl group in a side chain. The method for forming a photosensitive resin film according to the third aspect of the invention, wherein the (b) repeating unit having a polyether structure in a side chain is a repeating unit having a blocked polyether structure in a side chain. The method of forming a photosensitive resin film according to the first aspect of the invention, wherein the amount of the ink-repellent added is 0.5% by mass or more based on the total solid content of the photosensitive resin composition. A printing material comprising a photosensitive resin layer formed on a temporary support by a method for forming a photosensitive resin film according to claim 1 of the patent application. 7 - A method for producing a color filter, comprising: Use such as Shen The method for forming a photosensitive resin film according to the first aspect of the patent range or the photosensitive transfer material of claim 6 of the patent application, the step of forming a wall away from the substrate on the substrate-76-200841125; The step of forming the colored region by the ink jet method from the concave portion on the substrate divided by the crucible wall. 8 - A color filter manufactured by the method of producing the color filter of claim 7 of the patent application. A display device comprising the color filter of the eighth aspect of the patent application, wherein the photosensitive resin film is formed by coating a photosensitive resin composition containing an ink-repellent agent. And a drying step of drying the coated coating film by a flow rate of 〇5 cm/s from a height of 膜5 cm/s from the film surface. 1 1 ·If the patent scope of the application is the first item A method of forming a photosensitive resin film, wherein the drying is performed by blowing a surface of the coating film with a dry air having a flow rate of 0.5 m/s or less. 1 2 . Photosensitivity of the patent range of the patent application a method of forming a resin film, wherein The degree of vacuum is 1 (T3 Pa or less), and vacuuming is performed to dry (vacuum suction = "space lower than atmospheric pressure"). 1 3 · Photosensitive resin of the first paragraph of the application A method of forming a film, wherein the ink-repellent contains (a) a repeating unit having at least a fluorine atom in a side chain, (b) a repeating unit having a polyether structure in a side chain, and (c) a repeat having a carboxyl group in a side chain The method for forming a photosensitive resin film according to claim 13, wherein the (b) repeating unit having a polyether structure in a side chain has a blocked polyether structure. -77- 200841125 1 A photosensitive transfer material comprising a photosensitive resin layer formed by the method for forming a photosensitive resin film according to the first aspect of the invention. 16. A substrate having a wall attached to the wall, the resin having a resin-coated wall film having an ink-repellent agent and having an in-plane film thickness uniformity of ±5 % or less. The method for producing a color filter, comprising: a method for forming a photosensitive resin film according to the first aspect of the patent application, or a photosensitive transfer material according to claim 15 of the patent application, a step of forming a layer of a photosensitive resin layer on a substrate, exposing the formed photosensitive resin layer to a pattern by a photomask, and developing a process of forming an off-paint wall from the image wall, and The recessed portion on the divided substrate is subjected to a coloring liquid composition by an inkjet method to form a colored region forming step of the colored region. 1 8 - A color filter produced by the method of producing a color filter of claim 17 of the patent application. A display device comprising a color filter as disclosed in claim 18 of the patent application. -78-
TW096149632A 2007-03-15 2007-12-24 Method of producing photosensitive resin film, transfer material, substrate with pixel separation wall, color filter and production method thereof, and display device TW200841125A (en)

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JP2007067234A JP2008225361A (en) 2007-03-15 2007-03-15 Method for forming photosensitive resin film, photosensitive transfer material, color filter and method for manufacturing the same, and display device
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