200831423 九、發明說明： 【發明所屬之技術領域】 .本發明有關於對由玻璃、半導體等脆性材料 .刻劃切割線的劃線裝置及劃線方法。 之工件 【先前技術】 在切斷由脆性材料構成的薄板狀工件之 表面上刻劃切割線。沿切割 在工件 達背面而切斷工件。J、，泉弓曲工件，使表面的裂痕到 Γ在工件上刻劃切割線的劃線方法，已知有：將曾般心 刀輪在工件表面上滾動的=面戈=狀態下，將切割 件表面上形成較深的垂直裂痕，因而可 便了在工 但是，切割刀輪在使用期間會劣化。 ^。 可旋轉地保持，在更換切割刀輪時;^:由支擇架 G架令劃線裝置的支撐架安裝面上裝卸。支擇 行於切割刀輪本身的 牙木安裝面（平 仃，對於切割品質構成重大影響。若 ^方向疋否平 刀輪行進之方向呈有偏押备 α刀輪本身對切割 輪施加過大的力，導致工件的切割品質亞中可-對切割刀 施行使支撐架安裝面精度佳地平行於切：。所以，必需 的作業。但是爾後若精度有所改變，仍2輪行進方向 不良影響，因而必需定期確認其是字對切割品質造成 為能使切割刀輪本身的方向與丁 7輪的行進方向呈 312ΧΡ/發明說明書(補件)/97-01/96137409 6 200831423 T:’申請人提案有如圖5所示，組裝 水平面内旋轉的旌銼她姐， 彳7輪1可在 r ., . u 疋轉祛構（擺頭機構）2之查彳 (scnbmg head)(參照專利 吁剝括線碩 由振盡器3振動的轴4盘°該劃線頭中，在藉 5可在水…Λ 撐架5之間，設置有使支撐半 了在料面内相對於轴4旋轉的旋轉機構2 =木 ㈣動經由軸4、支撐架5而傳遞給切割刀輪}3 杳J刀輪1可在水平面内相f 口為切 =刀輪！本身的方向被動地轉為朝向㈣刀輪4 = f利文獻1 ·日本專利特開—3 【發明内容】 b A報 (發明所欲解決之問題） 但疋’上述習知劃線頭中，200831423 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a scribing device and a scribing method for scribing a cutting line from a brittle material such as glass or semiconductor. Workpiece [Prior Art] A cutting line is scored on the surface of a thin plate-shaped workpiece made of a brittle material. Cut along the workpiece to the back of the workpiece to cut off the workpiece. J, the spring bows the workpiece, the surface cracks to the scribe line on the workpiece to scribe the cutting line, known as: the former heart-shaped cutter wheel on the surface of the workpiece = face = state, will A deeper vertical crack is formed on the surface of the cutting member, so that it is convenient to work, however, the cutting wheel deteriorates during use. ^. Rotatingly held, when the cutting wheel is replaced; ^: The support frame mounting surface of the scribing device is loaded and unloaded by the support frame G frame. The choice is made on the cutting surface of the cutting wheel itself (flat, which has a significant impact on the cutting quality. If the direction of the flat wheel is not biased, the alpha cutter wheel itself is oversized on the cutting wheel. The force, which leads to the cutting quality of the workpiece, can be applied to the cutting blade. The mounting surface of the support frame is precisely parallel to the cutting: Therefore, the necessary work. However, if the accuracy is changed, the direction of the two-wheel travel is still adversely affected. Therefore, it is necessary to periodically confirm that it is caused by the word-to-cut quality so that the direction of the cutting blade itself can be 312 行进 in the direction of the D-wheels/invention instructions (supplement)/97-01/96137409 6 200831423 T: 'Applicant proposal As shown in Figure 5, the assembly of the water level in the rotation of her sister, 彳 7 rounds 1 can be in the r., u turn to the 祛 structure (swing head mechanism) 2 scnbmg head (refer to the patent The shaft is a shaft 4 vibrating by the vibrating device 3. In the scribing head, between the water and the bracket 5, the rotation of the support half in the material plane relative to the shaft 4 is provided. Mechanism 2 = wood (four) movement is transmitted to the cutting via the shaft 4 and the support frame 5 Wheel}3 杳J cutter wheel 1 can be in the horizontal plane f port is cut = cutter wheel! The direction of itself is passively turned to the direction (four) cutter wheel 4 = f Li document 1 · Japanese Patent Special Open - 3 [Summary] b A newspaper (the problem that the invention wants to solve), but in the above-mentioned conventional scribe head,
C 介設有軸承7,因而#η為在轴4與支撐架5之間 别即已哀減。因為軸承7 叉存木5之 ι確實可防止振動之衰；=動二的遊 量測數據即知，即使例 -刀』刀輪振動的 構的劃線頭，其振動振h 承7的遊隙，設有擺頭機 頭。 '"田乃較小於未設有擺頭機構的劃線 ,=中當將切割線形成封閉曲線等異形曲線的情況，在 刀輪_ 便將振動傳動至皮帶。切割刀輪的旋轉， 隹皮f振動之下，難以控制切割刀 312XP/發明說明書(補件)/97撕961374〇9 200831423 =的旋轉’且懸掛皮帶本身亦將導致㈣刀輪的振動之衰 .緣是，本發明之目的在純供—種劃線裝置及 ·/’即使在劃線裝置上設置有旋轉機構（擺頭 可將振盪W«在未衰減之情況下傳遞 / (解決問題之手段） “刀 為解決上述問題，申請專利範圍第丨項所記载 二使刀」刀振動的劃線頭’以及使上 面相對移動的移動機構；其中，上述劃線 = =振動的《器;以及將上述振逢器二二 的轴線為中心一起旋轉。丁、上伽-之振動方向 ί> 申請專利範圍第2項所記載的發明，在申 1項所記載的劃線裝”，上述切割刀係可: = 而方疋轉的切割刀輪，且由可裝卸 〜^ 上的切架所保持，當上述振達部 述切剎刀輪圍繞上述軸線周圍而旋轉時二= t述車轴偏離上述振篮器的上述轴線，使二= 上述軸線之周圍而旋轉。 ϋ刀輪、九 312ΧΡ/發明說明書(補件)/97-01/96137409 申: 青專利範圍第3項所記載的發明，在申請專 或2項所記载的劃線裝置中，上述劃線裝置更具備有弟 200831423 驅動源與傳動機構；而該驅動源圍繞上述轴線周圍而旋轉 ，動上述振I器、上述振動傳達部及上述切割刀；該傳動 機構將上述驅動源的轉矩傳遞給承接部，而旋轉上述振盈 振動傳達部及上述切割刀，該承接部承接於上述 、盟心’上述振動傳達部所接觸之側的端部之相反側端 邵。 申:月專利乾圍第4項所記載的發明，在申請專利範圍第 :記載的劃線裝置中，上述劃線頭更具備有··殼 二二軸承、旋轉/往復運動軸承；其中，該殼體收容 器2述振動傳達部之至少-部分;該旋轉軸承 ^ 振盪Α相對於上述殼體而圍繞上述軸線之周圍 二’該旋轉/往復運動軸承則導引上述振動傳達部相對 :二=而圍繞上述轴線周圍旋轉，且在上述軸線方向 丄任彳是運動0 1 ::f利，圍第5項所記載的發明，在申請專利範圍第 壓己載的劃線裝置中’上述劃線頭更具備有：預 構件、内側殼體、外側殼體、及旋轉軸承；其中， ::,¼加構件對上述振盪器施加預壓；該内側殼體 料上述振動傳達部之至少一部分，且設有上述 二:，，外側殼體覆蓋上述内側殼體；該旋轉軸承相對 之=動導引上述内侧殼體而以平行於上述振還器 之振動方向的軸線為中心旋轉。 312XP/發明說明書(補件)/97-01/%137409 申晴專利範圍第6項所記載發明的劃線裝置，係在工件 刻劃切割線的劃線裂置’其具備有：使切割刀振動 9 200831423 的劃線頭’以及使上述劃線頭沿工件 機構·’其中’上述劃線頭具備有：切判力^移動的移動 部、振動傳達部、殼體、旋轉軸承、旋辰盪器、承接 ，支掉架；而，該切割刀可抵接於工件=動軸承、 上述切割刀在與工件表面交又 ，邊振盪器使 接於上述振盪器在振動方向上的一端振動= 亥承接部密 ί於上述振盈器在振動方向上的另一端二振動傳達部密 器之振動傳遞給上述切割刀；該殼:’亚將上述振盪 述承接部之至少一部八乃、双版谷上述振盪器、上 分;該旋轉轴承導5二4器述1動傳達部之至少-部 部，相對於上述殼體而:平行=1::二 振動2線為中心旋轉；該旋轉/往復運動軸承導引上\ :動傳達部而相對於上述殼體，圍繞上述軸線之， 且在上述軸線方向上往復運動；該支浐加—壯。疋 :動傳達部從上述殼體中露出的部分處， 表!Μ Μ所記载發㈣劃線裝置’係在工件 U切割線的劃線裝置’其具備有：使切割刀振動 機及使t述劃線頭沿工件表面相對移動的移動 達部、内侧殼體、預壓施加構件、往；：： :於=面外側殼體、及旋轉轴承;而，該二 古件表面，該振盛器使上述切割刀在與工件表面交又 、向上振動；該承接部密接於上述振盪器在振動方向上 312XP/發明說明書(補件)/97-01/96137409 10 200831423 的一端部；該振動傳達部密接於上述振盪器在振動方向上 的另一端部，並將上述振盪器的振動傳遞給上述切割刀； 該内側殼體收容上述振盪器、上述承接部之至少一部分、 •及上述振動傳達部之一部分；該預壓施加構件設置於上述 内側殼體内，並對上述振盪器施加預壓；該往復運動軸承 導^上述振動傳達部相對於上述内侧殼體，在平行於上述 振盪器之振動方向的軸線方向上往復運動；該支撐架安裝 於上述振動傳達部從上述内側殼體露出之部分處，並保持 k上述切副刀，該外側殼體覆蓋上述内側殼 相，上述外侧殼體，導引上述内側殼體而以平 振盪裔之振動方向的軸線為中心旋轉。 申請專利1請第8顧記歸明_線方法，係使㈣ 刀抵接於工件表面，以振盤器使上述切割刀在與工件表面 二又:方向上振動’同時使上述切割刀沿工件表面相對移 動，而在工件上刻劃切割線的劃線方 切割刀沿工件表面蔣叙夕I _ 社便上述 . 、、、移動之^ ’讀於上述振I器、上述切 =、m_L述振盪II在振動方向上 器的振動傳遞給上述切刦n* 肝上ϋ振盟 m ㈣刀的振動傳達部’可以平行於上 述振盈器之振動方向的轴線為中心而一起旋轉。、 申請專利範圍第9項所記载的發明 8項所記載的劃線方法中月寻扪乾圍弟 . Ύ 在使上述切割刀沿工件表面, 示，對上述振盪器施力^ ^ ^ ^ ^ 夕 旋轉。 頂&的預壓施加構件亦可一起 (發明效果） 312ΧΡ_^明書(補件)/97-01/96137409 11 200831423 根據申清專利圖楚 、 振動傳達部及切割刀-起旋轉斤記因載而的不發明，因為振蘯器、 .、^冓。因為振_振動在振設 減，因此可確實地將振動傳遞給切割刀傳達Μ亚不會哀 根據申凊專利範圍第2項所記 件表面上行進時，^ 壯ϋ 、务月，切割刀輪在工 身的方向自動對準Γ—,女衣知子上的腳輪，切割刀輪本 切dtr輪之進行方向。所以，可省略使 “』刀輪本身之方向平行於切割刀輪之 便 根據申請專利範圍第3 作業。 切割刀的旋轉方向，可將切割線V上明 外，因為傳動機構將驅動 1 =犬此 承接部，因而可防止傳動機構振動。 又據申,月專利範圍第4項所記载 振動傳達部及切割刀一起相對於殼體旋轉。振為、 >根據申請料mnw項所㈣的發明， c 振盈器所施加㈣力作用於旋轉轴承。二 疋“成阻力的遷力不致作用旋轉軸承，因而可輕易地使 刀軎|J刀本身 < 方向被動地對準切割刀進行之方向 =申請專利範圍第6項所記载的發明，因‘振 振動傳達部及切割刀一起旋轉- :旋轉機構。因為《器的振動在振動傳== 減，因此可確實地將振動傳遞給切割刀。 曰又 根據申請專利範圍第7項所記载的發明，因為振盡器、 振動傳達部及切割刀-起旋轉，因而不必在振動傳達部設 312XP/發明說明書(補件)/97-01/96137409 12 200831423 。因為振蘯器的振動在振動傳達部中並不合衰 由’ ^轉振動傳遞給切割刀。且’因為可^ 預屋施加構件對振蓋器所施加的屋力作用於旋轉軸 承，因而可輕易地使切割刀本身 進行之方向。 刀本身之方向破動地對準切割刀 二艮f!請專利範圍第8項所記载的發明，因為振逢哭、 切f、刀一，因而不必在振動傳達部並 疋’目為振盟器的振動在振動傳達部中並不奋 衮減，因此可確實地將振動傳遞給切割刀。 玲 根據申請專利範圍第9項所記載的發明，因為可避免由 預堡施加構件對振所施加的壓力作用於 而可輕易地使切割刀本身之方向被動地對準切割刀’： 之方向。 〜 【實施方式】 以下，根據所附圖式，就本發明一實施形態的劃線 詳細說明。圖1所示係劃線裝置的垂直方向剖視圖/ 劃線裝置具備有··使設置在下端的切割刀輪11在上下 方向上振動的劃線碩i 2、使劃線頭丨2在水平面内的X與 Y轴方向上移動的移動機構J 3、以及吸附·保持工件U 的機台16。移動機構13使基座14在水平面内移動。在 基座14上安裝有劃線頭12。線性導執15導引劃線頭 相對於基座14而在上下方向上滑動。 在劃線裝置的機台16上，利用真空吸附或夾具固定工 件17。使劃線頭12下降到工件17之上面抵接於切割刀 312XP/發明說明書(補件)/97·〇1/961374〇9 13 200831423 輪為止’利用移動機構使劃線頭12沿工件17表面移動， 而在工件17表面上刻劃切割線。切割線由工件17表層上 所形成之垂直裂痕傳播而成。另外，雖未圖示，劃線頭 12亦可利用氣缸等加壓手段加壓工件17。 士剎線頭12的筒狀殼體18中，可使用例如施加外部電壓 日寸產生應變的壓電元件（壓電致動器）作為振盪器19。壓 =几件上連接有電線20。使施加於壓電元件的電壓依既 =須率义化，壓電元件便周期性地伸縮。該壓電元件的伸 2方向即為振動方向L。另外，亦可使用施加磁場時磁性 =產生應變的磁應變元件等磁性材料作為振盪器Μ。使 施加於磁應變元件的磁場依既定頻率變化，磁應變元件便 周期性地伸縮。 使振盛器19振動之前，必需預先施加壓力使其適應 ^ ’再施加電壓而使振19伸縮。在承接部21外側 汉置預壓施加構件3G，輯振Μ|| 19施加預壓。在預壓 c ^加=3G外周加工有公螺紋。在殼體18㈣狀上端 A 二面加工有螺鎖於預壓施加構件30的母螺紋。 旋轉預壓施加構件如鼓& # 30 0 ， 力，依外環抵接於構二：Λ39〇朝下方向的按壓 盪哭19的順岸而Λ 轉轴承23—承接部21—振 •旦°可1敫、，序傳遞。藉由調整預壓施加構件30的旋入 里了凋正靶加於振盪器19之預壓的大小。 2 = 3= 振動方向L的上端部而設置有承接部 " ^部而設置有振動傳達部22。振盪器19 312ΧΡ/發明說明書(補件)/97-〇1/961374〇9 14 200831423 由豕接^ 21與振動傳達部22從振動方向l上之二侧包 ^ 盪19的振動傳遞給振動傳達部22，而承接部21 接^動的反作用。振逢器19、承接部21及振動傳達部 22收容於殼體18中。 承接部在振盡器19的振動方向L上呈轴狀細長延 ::接部21的下端部設有直徑經擴大的大徑部21a。 大徑部21a下面設有承接振盪器19的凹部训。在承 =21中，貫穿有供振盈器19之電線20通過用的貫通 ㈠二承接部21的大徑部21a收容於殼體18内，而上 立而部從殼體18中露屮里士 # 土生 中路出故置有方疋轉驅動承接部21的傳動 $，在该上端部加工有齒輪，並 25。當然，夫讯罢扁如，，* 你u彻上心掛皮▼ 田、、未叹置傳動機構的情況，便無需在承接部Μ 23;:Γΐ齒輪。承接部21由設置在殼體中的旋轉轴承 用。^反^支撐。如上所述，承接部21承接振動的反作 動^3h 接部21—旋轉軸承23的内環23a—滾 3b^#^7^ 23 24_ Λ又脰18的順序而傳遞。 振動傳達部2 2在振堡哭】q的挺i + 延“ 動方向L上呈軸狀細長 二上端部設置有直徑經擴大的大徑 22b 叙仅。卩22a上面設置有承接振盪器19的凹部 旋轉軸ΙιΓ:傳達部22周圍設置有導引振盪器19旋轉的 有門隙 於振動傳達部22與旋轉軸承26之間空出 動二二振大_，與旋轉轴承26相接觸。在振 動傳達422的切部22a與旋轉轴承26的内環咖之間 312XP/發明說明書(補件)/97-01/96137409 15 200831423 設置有盤形彈簧27，作為 按押的彈力構件。使振廬器19'二22朝振…9 =動傳達部22亦振動。藉由設=二:=;9 盪為19的振動追循振動傳 … "χ 隨振動傳達部22的振動而伸縮。2的振動。盤形彈菁27 轉2軸：26广由盤形彈簧27而導巧振動傳達部22旋 動即，上側的旋轉軸承23導力承接部Μ ， 而下側的旋轉軸承26導引振動傳 、ΟΙ , 丁文丨“之奴轉。因為在 枳二 動傳達部22之間包夾有振盪器19,因此， 9之旋轉間接地由一對旋轉轴承23、26導引。捃 盟:^旋轉時’其軸線L平行於振盪器19的振動方向 L(在本貫施形態中為一致）。 達部22不僅圍繞軸線L之周圍而旋轉，亦在轴 餹口錢運動。所以’振動傳達部22無法直接由旋 /由承26支撐。振動傳達部22可旋轉、且可在振動方向 』上往復運動地由S置在殼體18中的旋轉/ 29所支撐。 ％勒釉承 卢圖2所示係旋轉/往復運動軸承29的立體圖。旋轉/往 ^運動軸承29在圓筒形外筒31的内部’組裝有滾珠保持 。。32與滾珠33。外筒3丨的内面被精密地研磨以供滾珠 33滾動運動。圓筒形滾珠保持器32使滾珠33交錯排^， 以使荷重平均。在外筒31内徑的二端設置有擋止環34， 以防止滾珠保持器32超越行程。因為滾珠33與振動傳達 部22、及滾珠33與外筒31内面間為點接觸，因此滚珠 312XP/發明說明書(補件)/97-01/96137409 16 200831423 ===擦係數進行滚動運動。旋轉/往復運動軸承 丨振動傳達部22繞軸線之周圍的旋轉運動、盥 軸線方向上的往復運動。 〃 22如之圖L與V所示’在從殼體18中露出的振動傳達部 ’、從下端處，固定有支撐架保持部36。 =具有，撐架安裝面36a，在該支榜架安裝面= 刀^ 撑^打。支樓架37可旋轉地保持切割 夺支撐架37安裝於支撐架安裝面36a上 牙木文裝面36a與切割刀輪u本身的方向平行。 如圖3所不’切割刀輪u以車軸山為中心旋 二的：軸lla在水平方向上距軸線L既定距離h。 輪η 之㈣而在水平*㈣料，切割刀 尺千面内於半徑h的圓形執道上旋轉。 圖1所不’將劃線頭12的切割刀輪載置於工件 ，振動切割刀輪U並同時沿工 表 Ο 12，在工件17 # 午17表面移動劃線頭 件Π表面行二 劃出切割線。當切割刀輪11沿工 u本身的方:白1’如安裝在椅子上的腳輪般，切割刀輪 會從切割朴丨1#+ # 的進仃方向。因為不 振動，故⑺工牛17施加過大的力’且因切割刀輪 提升切u/形成斷裂與缺損較少的垂直裂痕。所以可 振；刀T 11在水平面内旋轉時，不僅切割刀輪11， 轉。因達部22亦圍繞轴線1之周圍而—起旋 為不必在振動傳達部22設置旋轉切割刀輪 _____彻6ΐ37· 口 200831423 將 ==在振動不因旋轉機構而衰減之情況下， 振動確η地傳遞給切割刀輪u。 ❻况下 當使振盪器19振動時，反作用於m •作用亦傳達至上側的旋轉轴承2 =承接部2卜該反 作用的情況’若以旋轉軸承2 :::以剛體承受反 力導執15等’其質量遠大於振動侧的振動傳:部二 f : I:在割之質量。由於固定側的振動僅極，: Μ因此在㈣軸承23的振動衰減亦僅極輕微。 帶如：：：二點鏈線所示，亦可在承接部21上懸掛皮 源的馬達28旋轉驅動承接部2卜在馬 出轴與承接部21之間，懸掛皮帶25作為傳動 =。用馬達28主動控制切割刀輪11的旋轉方向，即 接=件π呈異形切斷。因為皮帶25懸掛於固定侧的承 接邛21，因此皮帶25亦不會振動。 G二？示第一實施形態的劃線裳置中，藉由調整預壓施 。構件3G的旋人量，可調整對振盪器19所施加之預壓的 大^預壓施加構件30的按壓力經由旋轉軸承㈡傳遞給 振盪19。具體而言’預壓施加構件3〇的按壓力依：外 環抵接構件24—外環23卜滾動體23b—内;裒23a而傳 遞。^若旋轉軸承23所承受的力大於對振盪器19所施加的 預壓，旋轉軸承23便毫無問題地旋轉。但是，若旋轉軸 豕2 3所承又的力較大於對振盪器19所施加的預壓，則對 方疋轉軸承23的旋轉產生阻力。若對旋轉產生阻力，便難 312ΧΡ/發明說明書(補件)/97-01/96137409 18 200831423 以使切副刀輪11本身的方向被動地對準切割刀輪11的進 行方向。 - 為解決該問題，本發明第二實施形態的劃線裝置，將預 • 壓施加構件配置於旋轉軸承23之内側，使連同預壓施加 構件亦旋轉。圖4所示係第二實施形態的劃線裝置。該實 施形恶的劃線裝置亦如同第一實施形態的劃線裝置，具備 有·使切割刀輪11在上下方向上振動的劃線頭41、使書j 線頭41在水平面内移動的移動機構13、以及吸附•保持 f 工件17的機台1 β。 、 劃線頭41由：内侧殼體42、與覆蓋内側殼體42的外 側殼體43構成。在内側殼體42内部設置有：振盪器i 9、 密接於振盪器19下端部並將振盪器19之振動傳遞給切割 刀輪11的振動傳達部22、以及密接於振盪器19上端部 的承接部21。因為振盪器19、承接部21、及振動傳達二 、的構k與上述弟一實施形悲的劃線裝置相同，因此 I賦予相同的元件符號並省略說明。 在内側殼體42的筒狀上端42a螺鎖有預壓施加構件 44。在預壓施加構件44外周面加工有公螺紋。在内側殼 體42的筒狀上端42a内周面，加工有螺鎖於預壓施加構 件44的母螺紋。使預壓施加構件44旋轉時，藉由螺紋的 作用，而使預壓施加構件44下降。預壓施加構件44按壓 承接部Μ，而對振盪器19施加預壓。當預壓量達既定值 時，便停止對筒狀上端42a旋入預壓施加構件44，並利 用螺鎖於預壓施加構件44中的防鬆螺帽45固定預壓施加 312XP/發明說明書(補件)/97·〇1/961374〇9 200831423 構件44。 在内側殼體42與振動傳達部22之間，將設置往復運動 車 =46’相對於内側殼體42而導引振動傳達部22在振 盪器之振動方向上的振動（往復運動）。因為振動傳達部 22僅相對於内側殼體42而往復運動，因此往復運動軸承 46僅導引振動傳達部22的往復運動。 在内側殼體42與外侧殼體43之間，上下設置有二個相 對於外侧殼體43而導引内側殼體42之旋轉的旋轉轴承 48。各旋轉軸承48由··内環48a、外環48c、以及介設於 内環48a與外環48c^間的滾動體他構成。在内側殼體 42中收容有··預壓施加構件44、振盪器19、承接部21 之一部分、以及振動傳達部22之―部分。在振動傳達部 22上，經由支撐架37而安裝有切割刀輪u。該等以平行 於振盪益19之振動方向的軸線為中心一起旋轉。 根據該實施形態的劃線裝置，因為預壓施加構件44配 置於旋轉軸承48的内侧，因此預壓施加構件以對振盪器 19所施加的預壓並不會影響及旋轉軸承48。因為不致對 旋轉轴承48施加過大的壓力，因此切割刀輪u本身的方 向即易於被動地對準行進方向。 另外，本件發明並不僅侷限於上述實施形態，在不變更 主旨的前提下，可依各種實施形態具體化。例如上述實施 形態中，相對於殼體18而旋轉振盪器19、振動傳達部22、 及切割刀輪，但是，振盪器、振動傳達部及切割刀輪亦可 不相對於殼體旋轉，而使收容有振盪器、振動傳達部及切 312XP/發明說明書(補件)/97-01/96137409 20 200831423 割刀輪的殼體整體旋轉。此外，就切割刀々 狀可旋轉的切割刀輪之外，t "*，除昇盤珠 角錐狀切割刀。卜村使用^於切架上的四 Γ 再者，上述實施形態中，使劃線 之方向上移動而形成切割線，但是，亦可使J在= 二：：左右方向上移動。此情況，支撐架與切 於水平面内旋轉90度之方向(即圖3所示方向）。=在 以移動機構移動劃線裝置的機台。 本說明書以讓年10月5日對曰本特許廉提出 =願2006-274456為基礎。該案的内容全部涵蓋於本案 【圖式簡單說明】 圖1為本發明第一實施形態的劃線裝置垂直方向剖視 圖2為旋轉/往復運動軸承的立體圖（包括部分剖視 圖）。 {j 圖3為切割刀輪及支撐架的詳細圖。 圖4為本發明第二實施形態的劃線裝置垂直方向剖視 圖。 圖5為習知劃線裝置的劃線頭垂直方向剖視圖。 【主要元件符號說明】 卜11 切割刀輪 2 旋轉機構（擺頭機構） 3、19 振盪器 312XP/發明說明書(補件)/97-01/96137409 21 200831423 f ί. 4 軸 5 ^ 37 支撐架 6 > 17 工件 7 轴承 11a 車轴 12、41 劃線頭 13 移動機構 14 基座 15 線性導軌 16 機台 18 殼體 18a 、 42a 筒狀上端 20 電線 21 承接部 21a 、 22a 大徑部 21b 、 22b 凹部 21c 貫通孔 22 振動傳達部 23 、 26 、 48 旋轉轴承 23a 、 26a 旋轉軸承的内環 23b 、 48b 滾動體 23c 旋轉軸承的外環 24 外環抵接構件 25 皮帶（傳動機構） 312XP/發明說明書(補件)/97-01/96137409 22 200831423 27 盤形彈簧 28 馬達（驅動源） 29 旋轉/往復運動軸承 30 ^ 44 預壓施加構件 31 外筒 32 滾珠保持器 33 滾珠 34 擋止環 36 支撐架保持部 36a 支撐架安裝面 42 内側殼體 43 外侧殼體 45 防鬆螺帽 46 往復運動軸承 48a 内環 48c 外環 L 振動方向（轴線） 312XP/發明說明書(補件)/97-01/96137409 23C is provided with a bearing 7, so that #η is already sagged between the shaft 4 and the support frame 5. Because the bearing 7 forks the wood 5 can really prevent the vibration from decaying; = the second measurement data of the second is known, even if the stencil of the vibration of the knives of the knives, the vibration vibration h Gap, with a oscillating head. '"Tian Nai is smaller than the line without the oscillating mechanism. = When the cutting line forms a curve with a closed curve or the like, the vibration is transmitted to the belt at the cutter wheel. The rotation of the cutter wheel, under the vibration of the skin f, it is difficult to control the cutter 312XP / invention manual (supplement) / 97 tear 961374 〇 9 200831423 = rotation 'and the suspension belt itself will also cause (four) the vibration of the cutter wheel The reason is that the purpose of the present invention is to provide a rotating mechanism even if the scribing device is provided on the scribing device (the oscillating head can transmit the oscillation W« without attenuation). Means) "Knife in order to solve the above problem, the scribe head of the knives vibrating the knife according to the second paragraph of the patent application, and the moving mechanism for relatively moving the upper surface; wherein the scribe line = = vibration"; And rotating the axis of the above-mentioned oscillating device 22 as a center. The vibration direction of the gamma and the upper gamma is ί> The invention described in the second aspect of the patent application, the scribe line described in the first item, The cutting blade can be: = and the cutting wheel of the rotating wheel is held by the cutting frame on the removable ^^, when the above-mentioned vibrating part of the cutting wheel rotates around the axis, the second = t The axis deviates from the above-mentioned axis of the above-mentioned oscillating basket, so that two = Rotating around the axis. Boring wheel, nine 312 ΧΡ / invention manual (supplement) / 97-01/96137409 Application: The invention described in item 3 of the PCT patent scope, the application described in the application or the two items In the line device, the scribing device further includes a driving source and a transmission mechanism of the child 200831423; and the driving source rotates around the axis to move the vibrator, the vibration transmitting portion and the cutting blade; the transmission mechanism The torque of the drive source is transmitted to the receiving portion, and the vibration vibration transmitting portion and the cutting blade are rotated, and the receiving portion receives the opposite end of the end portion of the side where the vibration transmitting portion is contacted by the center According to the invention described in the fourth aspect of the patent patent, in the scribing device described in the Patent Application No.: the scribing head further includes a housing 22 bearing and a reciprocating bearing; The housing receiving container 2 is at least-portion of the vibration transmitting portion; the rotating bearing is oscillated about the circumference of the axis with respect to the housing. The rotating/reciprocating bearing guides the vibration transmitting portion relative to each other: And rotating around the above-mentioned axis, and in the above-mentioned axial direction, the movement is 0 1::f, and the invention described in the fifth item is in the above-mentioned scribe line device of the patent application. The scribing head further includes: a pre-assembly, an inner casing, an outer casing, and a rotary bearing; wherein, the ::, 1⁄4 adding member applies a preload to the oscillator; the inner casing feeds at least a part of the vibration transmitting portion And providing the above two:, the outer casing covers the inner casing; the rotating bearing rotates relative to the inner casing and rotates around an axis parallel to the vibration direction of the vibrator. 312XP/发明 发明 发明 发明 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 The scribing head of 200831423 and the scribing head are provided with a moving portion, a vibration transmitting portion, a casing, a rotary bearing, a rotary squirrel, Undertake, take off the frame; and, the cutting knife Abutting on the workpiece=moving bearing, the cutting blade is in contact with the surface of the workpiece, and the side oscillator vibrates at one end of the oscillator in the vibration direction=the receiving portion is dense with the vibrating direction of the vibrator The vibration of the other end of the second vibration transmitting unit is transmitted to the cutting blade; the shell: the at least one of the above-mentioned oscillating bearing receiving portions, the oscillator, and the upper portion; the rotating bearing guide 5 4: at least a portion of the first transmission unit, relative to the housing: parallel = 1:: two vibrations 2 lines as a center rotation; the rotary / reciprocating bearing guides the upper side: The housing surrounds the axis and reciprocates in the axial direction; the support is strong.疋: the portion of the movement transmitting portion that is exposed from the casing, and the scriber device that is described in Table Μ ( 四 四 四 四 系 系 系 系 系 系 系 划线 划线 划线 划线 划线 划线 划线 划线 划线 划线 划线 划线 划线a moving portion of the scribe head relatively moving along the surface of the workpiece, an inner casing, a preloading member, and a bearing;;: : a face outer casing, and a rotary bearing; and, the surface of the second piece, the vibration The container causes the cutting blade to vibrate upward and upward with the surface of the workpiece; the receiving portion is in close contact with one end of the oscillator in the direction of vibration 312XP/invention specification (supplement)/97-01/96137409 10 200831423; a portion is closely connected to the other end of the oscillator in the vibration direction, and transmits the vibration of the oscillator to the cutting blade; the inner casing houses the oscillator, at least a part of the receiving portion, and the vibration transmitting portion a part of the preloading member disposed in the inner casing and applying a preload to the oscillator; the reciprocating bearing guiding the vibration transmitting portion relative to the inner casing parallel to the Reciprocating in the axial direction of the vibration direction of the swinging device; the support frame is attached to a portion of the vibration transmitting portion exposed from the inner casing, and holds k the cutting sub-knife, the outer casing covering the inner casing phase, The outer casing guides the inner casing and rotates around an axis of the vibration direction of the flat oscillator. Patent application 1 Please refer to the _ line method to make the (4) knife abut against the surface of the workpiece, and use the vibrating plate to vibrate the above-mentioned cutting blade in the direction of the workpiece surface while making the cutting blade along the workpiece. The surface moves relatively, and the scribe line cutting blade on which the cutting line is scribed on the workpiece along the surface of the workpiece is the same as that of the above-mentioned.,,, and moving ^ 'reading the above-mentioned vibration device, the above-mentioned cutting =, m_L The vibration of the oscillation II in the vibration direction is transmitted to the above-mentioned smashing n* liver. The vibration transmitting portion of the ϋ ϋ 盟 m (4) knives can be rotated together with the axis parallel to the vibration direction of the vibrator. In the scribing method described in the eighth aspect of the invention described in the ninth aspect of the invention, the slashing method is used to apply the force to the above-mentioned oscillator along the surface of the workpiece. ^ ^ ^ ^ ^ 夕旋转. Top & preloading member can also be used together (invention effect) 312ΧΡ_^明书(补件)/97-01/96137409 11 200831423 According to Shen Qing patent map Chu, vibration transmission part and cutting knife It is not invented because of the vibrator, . Because the vibration_vibration is reduced in the vibration, it can be surely transmitted to the cutting blade to convey the Μ 不会 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不 不The wheel is automatically aligned in the direction of the work body—the caster on the woman's clothes, and the cutting wheel is cut in the direction of the dtr wheel. Therefore, it can be omitted to make the direction of the "knife wheel itself parallel to the cutting wheel. According to the third application of the patent application range. The direction of rotation of the cutting blade can make the cutting line V clear, because the transmission will drive 1 = dog The receiving portion can prevent the transmission mechanism from vibrating. According to the application, the vibration transmitting portion and the cutting blade described in item 4 of the monthly patent range rotate together with respect to the casing. The vibration is > according to the application material mnw item (4) Invented, c (the) force applied by the vibrator acts on the rotating bearing. Secondly, the force of the resistance does not act on the rotating bearing, so the blade can be easily aligned with the cutting blade. Direction = The invention described in claim 6 is rotated by the vibration vibration transmitting portion and the cutter - a rotating mechanism. Because the vibration of the device is reduced by the vibration transmission ==, the vibration can be reliably transmitted to the cutting blade. According to the invention described in the seventh paragraph of the patent application, since the vibrator, the vibration transmitting unit, and the cutter are rotated, it is not necessary to provide the 312XP/invention specification (supplement)/97-01/ in the vibration transmission unit. 96137409 12 200831423. Since the vibration of the vibrator does not converge in the vibration transmitting portion, the vibration is transmitted to the cutter. And because the housing force applied to the vibrator by the pre-house application member acts on the rotating bearing, the direction in which the cutting blade itself can be easily made. The direction of the knife itself is broken and the cutting knife is smashed. The invention described in the eighth item of the patent scope, because it is crying, cutting, and knife, it is not necessary to vibrate in the vibration transmission unit. The vibration of the device is not diminished in the vibration transmitting portion, so that the vibration can be surely transmitted to the cutting blade. According to the invention recited in claim 9, the direction of the cutting blade itself can be easily passively aligned with the direction of the cutting blade by avoiding the pressure exerted on the vibration by the precasting member. [Embodiment] Hereinafter, a scribe line according to an embodiment of the present invention will be described in detail based on the drawings. The vertical cross-sectional view of the scribing device shown in Fig. 1 / the scribing device is provided with a scribing line 2 for vibrating the cutting wheel 11 provided at the lower end in the vertical direction. 2. The scribing head 丨 2 is in the horizontal plane. The moving mechanism J 3 that moves in the X and Y directions, and the machine 16 that sucks and holds the workpiece U. The moving mechanism 13 moves the base 14 in a horizontal plane. A scribing head 12 is mounted on the base 14. The linear guide 15 guides the scribing head to slide in the up and down direction with respect to the base 14. On the machine table 16 of the scribing device, the workpiece 17 is fixed by vacuum suction or a jig. Lowering the scribing head 12 onto the upper surface of the workpiece 17 abuts against the cutting blade 312XP / invention manual (supplement) / 97 · 〇 1 / 961 374 〇 9 13 200831423 rounds 'with the moving mechanism to make the scribing head 12 along the surface of the workpiece 17 Moving, the cutting line is scored on the surface of the workpiece 17. The cutting line is formed by the vertical cracks formed on the surface of the workpiece 17. Further, although not shown, the scribing head 12 can press the workpiece 17 by a pressurizing means such as an air cylinder. In the cylindrical casing 18 of the brake wire head 12, for example, a piezoelectric element (piezoelectric actuator) that generates strain by applying an external voltage can be used as the oscillator 19. Pressure = Several wires are connected to the wire 20. The voltage applied to the piezoelectric element is normalized by the ratio of the required voltage, and the piezoelectric element is periodically expanded and contracted. The direction in which the piezoelectric element extends is the vibration direction L. Further, a magnetic material such as a magnetic strain element in which magnetic field is generated when a magnetic field is applied may be used as the oscillator. The magnetic field applied to the magnetic strain element changes at a predetermined frequency, and the magnetic strain element periodically expands and contracts. Before the vibrator 19 is vibrated, it is necessary to apply pressure in advance to adapt the voltage to re-expand the vibrating 19. The preloading application member 3G is placed outside the receiving portion 21, and the pre-compression is applied by the vibration Μ||19. The male thread is machined on the outer circumference of the pre-compression c ^ plus = 3G. A female thread that is screwed to the preload applying member 30 is machined on both sides of the upper end A of the casing 18 (four). Rotating preloading application member such as drum &# 30 0 , force, according to the outer ring abutting on the second: Λ 39 〇 downward direction of the pressing of the crying 19 on the other side of the turn bearing 23 - receiving part 21 - Zhen Dan ° can be 1敫, the order is passed. The magnitude of the preload applied to the oscillator 19 by the positive target is adjusted by adjusting the screwing of the preload applying member 30. 2 = 3 = The upper end portion of the vibration direction L is provided with a receiving portion " ^ portion and the vibration transmitting portion 22 is provided. Oscillator 19 312ΧΡ/Invention Manual (Replenishment)/97-〇1/961374〇9 14 200831423 The vibration transmitted from the two sides of the vibration direction l to the vibration transmitting portion 22 is transmitted to the vibration transmission The portion 22, and the receiving portion 21 is connected to the reaction. The oscillating device 19, the receiving portion 21, and the vibration transmitting portion 22 are housed in the casing 18. The receiving portion is axially elongated in the vibration direction L of the oscillating device 19. The lower end portion of the connecting portion 21 is provided with a large-diameter portion 21a having an enlarged diameter. A recessed portion that receives the oscillator 19 is provided below the large diameter portion 21a. In the chassis 21, the large-diameter portion 21a of the through-hole (one) two receiving portion 21 through which the electric wire 20 for the vibrator 19 is passed is housed in the casing 18, and the upper portion is exposed from the casing 18士# The local middle road is equipped with a transmission $ of the square drive transmission receiving portion 21, and a gear is machined at the upper end portion, and 25. Of course, the husband's message is flat, and you can't sneak into the transmission mechanism, you don't need to be in the receiving department. The receiving portion 21 is used for a rotary bearing provided in the housing. ^Reverse ^ support. As described above, the receiving portion 21 receives the vibration-inverting action portion 3 - the inner ring 23a of the rotary bearing 23 - the roller 3b^#^7^ 23 24_ Λ and the 脰 18 are transmitted in the order. The vibration transmitting unit 2 2 is crying in the vibrating section of the vibrating body. The length of the shaft is elongated and the upper end portion is provided with a large diameter 22b having an enlarged diameter. The upper surface of the cymbal 22a is provided with an oscillator 19 The concave portion rotation axis ΙιΓ: a door gap provided around the transmission portion 22 with the rotation of the pilot oscillator 19 is vacated between the vibration transmission portion 22 and the rotary bearing 26, and is in contact with the rotary bearing 26. The vibration is transmitted. Between the cut portion 22a of the 422 and the inner ring of the rotary bearing 26, 312XP/Invention Manual (Supplement)/97-01/96137409 15 200831423 A disc spring 27 is provided as a resilient member for pressing. The vibrator 19 is provided. '二22朝振...9=The motion transmitting unit 22 also vibrates. The vibration is transmitted by the vibration of the setting = two:=;9 to 19... "χ The vibration is expanded and contracted with the vibration of the vibration transmitting unit 22. The vibration of 2 The disc-shaped elastic crystal 27 turns 2 shafts: 26 wide is rotated by the disc spring 27 and the vibration transmitting portion 22 is rotated, that is, the upper rotating bearing 23 is guided by the receiving portion Μ, and the lower rotating bearing 26 is guided for vibration transmission. , ΟΙ , 丁文丨 "The slaves turn. Since the oscillator 19 is sandwiched between the second moving portions 22, the rotation of 9 is indirectly guided by the pair of rotary bearings 23, 26.捃: When rotating, its axis L is parallel to the vibration direction L of the oscillator 19 (consistent in the present embodiment). The portion 22 not only rotates around the circumference of the axis L, but also moves in the shaft. Therefore, the vibration transmitting portion 22 cannot be directly supported by the screw/support 26 . The vibration transmitting portion 22 is rotatable and reciprocable in the vibration direction to be supported by the rotation / 29 of the S placed in the casing 18. A perspective view of the rotating/reciprocating bearing 29 shown in Figure 2 is shown. The rotary/toward motion bearing 29 is assembled with ball retaining inside the cylindrical outer cylinder 31. . 32 with balls 33. The inner surface of the outer cylinder 3 is precisely ground for the rolling motion of the balls 33. The cylindrical ball retainer 32 staggers the balls 33 to average the load. A stopper ring 34 is provided at both ends of the inner diameter of the outer cylinder 31 to prevent the ball cage 32 from overrunning. Since the ball 33 and the vibration transmitting portion 22, and the inner surface of the ball 33 and the outer tube 31 are in point contact, the ball 312XP/invention specification (supplement)/97-01/96137409 16 200831423 === the rubbing coefficient performs the rolling motion. The rotary/reciprocating bearing 丨 the vibration transmitting portion 22 has a rotational motion around the axis and a reciprocating motion in the 轴线 axis direction. As shown in Figs. L and V, the support holder holding portion 36 is fixed from the lower end of the vibration transmitting portion exposed from the casing 18. = has, the bracket mounting surface 36a, in the mounting surface of the truss = knife ^ ^ ^. The truss 37 is rotatably held to be mounted. The support frame 37 is mounted on the support mounting surface 36a. The ivory surface 36a is parallel to the direction of the cutting wheel u itself. As shown in Fig. 3, the cutting wheel u is rotated about the axle mountain: the shaft 11a is at a predetermined distance h from the axis L in the horizontal direction. The wheel η (4) is rotated in the horizontal * (four) material, and the cutting blade is on the circular path of the radius h. Figure 1 does not 'clip the cutting wheel of the scribing head 12 on the workpiece, vibrating the cutting wheel U and simultaneously along the work surface Ο 12, moving the surface of the workpiece 17 17 noon 17 Cutting line. When the cutter wheel 11 is along the side of the work u: white 1' such as a caster mounted on a chair, the cutter wheel will cut from the direction of the cutting of the 1#+#. Since it does not vibrate, (7) the working bull 17 exerts an excessive force 'and the cutting wheel raises the cutting/forming of vertical cracks with less breakage and defects. Therefore, it is vibrating; when the knife T 11 is rotated in the horizontal plane, not only the cutter wheel 11 but also the cutter wheel 11 is rotated. The indirect portion 22 also rotates around the circumference of the axis 1 so that it is not necessary to provide a rotary cutter wheel in the vibration transmitting portion 22. _____ 6:37. Port 200831423 == If the vibration is not attenuated by the rotating mechanism, The vibration is transmitted η to the cutter wheel u. When the oscillator 19 is vibrated, the reaction is reacted to m. • The action is also transmitted to the upper side of the rotary bearing 2 = the receiving part 2 is in the case of the reaction 'If the rotary bearing 2 ::: the rigid body is subjected to the reaction force guide 15 Waiting for 'the mass is much larger than the vibration on the vibration side: part two f: I: the quality of the cut. Since the vibration on the fixed side is only extreme, Μ Therefore, the vibration attenuation of the bearing 23 is only slightly slight. As shown by the :: two-point chain line, the motor 28 that suspends the leather source on the receiving portion 21 can also rotationally drive the receiving portion 2 between the horse shaft and the receiving portion 21, and suspend the belt 25 as a transmission =. The direction of rotation of the cutter wheel 11 is actively controlled by the motor 28, i.e., the contact member π is shaped to be cut. Since the belt 25 is suspended from the receiving jaw 21 on the fixed side, the belt 25 does not vibrate. G two? In the scribing skirt of the first embodiment, the preloading is adjusted. The amount of rotation of the member 3G is adjusted to the preload of the oscillator 19, and the pressing force of the preload applying member 30 is transmitted to the oscillation 19 via the rotary bearing (2). Specifically, the pressing force of the preload applying member 3 is transmitted by the outer ring abutting member 24 - the outer ring 23 and the rolling body 23b. If the force received by the rotary bearing 23 is greater than the preload applied to the oscillator 19, the rotary bearing 23 rotates without any problem. However, if the rotational force of the rotary shaft 豕2 3 is larger than the preload applied to the oscillator 19, resistance to the rotation of the square turn bearing 23 is generated. If resistance is generated to the rotation, it is difficult to passively align the direction of the cutting wheel 11 itself with the direction of the cutting wheel 11 itself. In order to solve this problem, in the scribing device according to the second embodiment of the present invention, the pre-pressure applying member is disposed inside the rotary bearing 23, and the pre-pressure applying member is also rotated. Fig. 4 shows a scribing device of the second embodiment. The scribing device of the first embodiment is also provided with a scribing head 41 that vibrates the cutter wheel 11 in the vertical direction, and moves the book j-wire head 41 in the horizontal plane. The mechanism 13 and the machine 1 β that adsorbs and holds the workpiece 17 are f. The scribing head 41 is composed of an inner casing 42 and an outer casing 43 that covers the inner casing 42. Inside the inner casing 42, an oscillator i9, a vibration transmitting portion 22 that is in close contact with the lower end portion of the oscillator 19 and transmits the vibration of the oscillator 19 to the cutter wheel 11, and a receiving portion that is in close contact with the upper end of the oscillator 19 are provided. Department 21. Since the structure of the oscillator 19, the receiving portion 21, and the vibration transmission 2 is the same as that of the above-described singularly scribed scribing device, I denote the same reference numerals and will not be described. A preload applying member 44 is screwed to the cylindrical upper end 42a of the inner casing 42. A male thread is machined on the outer peripheral surface of the preload applying member 44. On the inner peripheral surface of the cylindrical upper end 42a of the inner casing 42, a female thread that is screwed to the preload applying member 44 is machined. When the preload applying member 44 is rotated, the preload applying member 44 is lowered by the action of the screw. The preload applying member 44 presses the receiving portion Μ to apply a preload to the oscillator 19. When the preload amount reaches a predetermined value, the screwing upper end 42a is stopped from being screwed into the preload applying member 44, and the preloading application 312XP/invention specification is fixed by the anti-loose nut 45 screwed into the preload applying member 44 ( Supplement) /97·〇1/961374〇9 200831423 Member 44. Between the inner casing 42 and the vibration transmitting portion 22, a reciprocating vehicle = 46' is provided to guide the vibration (reciprocation) of the vibration transmitting portion 22 in the vibration direction of the oscillator with respect to the inner casing 42. Since the vibration transmitting portion 22 reciprocates only with respect to the inner casing 42, the reciprocating bearing 46 guides only the reciprocating motion of the vibration transmitting portion 22. Between the inner casing 42 and the outer casing 43, two rotary bearings 48 for guiding the rotation of the inner casing 42 with respect to the outer casing 43 are provided above and below. Each of the rotary bearings 48 is composed of an inner ring 48a, an outer ring 48c, and a rolling element interposed between the inner ring 48a and the outer ring 48c. The inner casing 42 houses a portion of the preloading member 44, the oscillator 19, a part of the receiving portion 21, and the vibration transmitting portion 22. A cutter wheel u is attached to the vibration transmitting portion 22 via a support frame 37. These are rotated together centered on the axis parallel to the vibration direction of the oscillation benefit 19. According to the scribing device of this embodiment, since the preload applying member 44 is disposed inside the rotary bearing 48, the preloading applied to the oscillator 19 by the preloading member does not affect the rotary bearing 48. Since excessive pressure is not applied to the rotary bearing 48, the direction of the cutter wheel u itself is easily passively aligned with the traveling direction. Further, the present invention is not limited to the above-described embodiments, and may be embodied in various embodiments without departing from the scope of the invention. For example, in the above embodiment, the oscillator 19, the vibration transmitting portion 22, and the cutter wheel are rotated with respect to the casing 18. However, the oscillator, the vibration transmitting portion, and the cutter wheel may be rotated without being rotated with respect to the casing. There are oscillators, vibration transmission parts, and cutting 312XP/invention manual (supplement)/97-01/96137409 20 200831423 The housing of the cutter wheel rotates as a whole. In addition, in addition to the cutting knife-shaped rotatable cutter wheel, t "*, in addition to the rising bead angle cutter. Bucun uses the four on the cutting frame. In the above embodiment, the cutting line is formed by moving the direction of the scribe line. However, it is also possible to move J in the left-right direction. In this case, the support frame is rotated 90 degrees in the horizontal plane (i.e., the direction shown in Fig. 3). = The machine that moves the scribing device with the moving mechanism. This manual is based on the October 5th issue of the franchise of the franchise. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a vertical cross-sectional view of a scribing apparatus according to a first embodiment of the present invention. Fig. 2 is a perspective view (including a partial cross-sectional view) of a revolving/reciprocating bearing. {j Figure 3 is a detailed view of the cutter wheel and support frame. Fig. 4 is a vertical cross-sectional view showing a scribing apparatus according to a second embodiment of the present invention. Fig. 5 is a vertical cross-sectional view of a scribing head of a conventional scribing apparatus. [Description of main component symbols] 卜11 Cutting wheel 2 Rotating mechanism (swinging mechanism) 3,19 Oscillator 312XP/Invention manual (supplement)/97-01/96137409 21 200831423 f ί. 4 Axis 5 ^ 37 Support frame 6 > 17 Workpiece 7 Bearing 11a Axle 12, 41 Scriber 13 Moving mechanism 14 Base 15 Linear guide 16 Machine 18 Housing 18a, 42a Cylindrical upper end 20 Wire 21 Receiving portion 21a, 22a Large diameter portion 21b, 22b recess 21c through hole 22 vibration transmitting portion 23, 26, 48 rotary bearing 23a, 26a inner ring 23b, 48b of rotary bearing rolling element 23c outer ring 24 of rotary bearing outer ring abutment member 25 belt (transmission mechanism) 312XP / invention Instruction manual (supplement) / 97-01/96137409 22 200831423 27 Disc spring 28 Motor (drive source) 29 Rotary/reciprocating bearing 30 ^ 44 Preload application member 31 Outer cylinder 32 Ball holder 33 Ball 34 Stop ring 36 Support frame holding portion 36a Support frame mounting surface 42 Inner case 43 Outer case 45 Lock nut 46 Reciprocating bearing 48a Inner ring 48c Outer ring L Vibration direction (axis) 312XP/Invention Manual (supplement)/97-01/96137409 23