CN101062575A - Scriber - Google Patents

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Publication number
CN101062575A
CN101062575A CN 200710101370 CN200710101370A CN101062575A CN 101062575 A CN101062575 A CN 101062575A CN 200710101370 CN200710101370 CN 200710101370 CN 200710101370 A CN200710101370 A CN 200710101370A CN 101062575 A CN101062575 A CN 101062575A
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CN
China
Prior art keywords
vibration
axle
workpiece
cutting member
motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 200710101370
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Chinese (zh)
Inventor
石川裕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THK Co Ltd
THK Intechs Co Ltd
Original Assignee
THK Co Ltd
Beldex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by THK Co Ltd, Beldex Corp filed Critical THK Co Ltd
Publication of CN101062575A publication Critical patent/CN101062575A/en
Pending legal-status Critical Current

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Abstract

The line drawing device comprises the vibration generation part, a cutting part for the vibration generation part, a shaft extending vertically downward to send the vibration to the cutting part shaft, an introduction unit introducing the linear movement of the shaft along the central axis to the cutting component, a load adjustment device applying load to work pieces, with the said load adjusting device operated by magnetic forces. In this way, introduction unit can guide the vertical hoisting of the load adjustment structure, guiding the vibration of the shaft due to the vibration generated by the working pieces.

Description

Chalker
Technical field
The present invention relates to a kind of chalker or a kind of be used for one by friable material, for example form the scriber of (marking) line on the workpiece made such as glass, semiconductor.
Background technology
The known chalker that is used on surface workpiece or work piece, forming a line.In operation, when the cutting member that is being vibrated is pressed on the surface of the work, to on surface of the work, produce vertical crackle, thereby and extend along the thickness of workpiece, in this case, when cutting member moves, will on surface of the work, produce a continuous line (crackle) on surface of the work.After such stroke (marking) line, disconnect by make workpiece along this line curved workpieces.
Fig. 7 shows a chalker, and it has traditional structure and is provided with a line body 2 that is used to vibrate cutting member 1.Line body 2 has a shell, accommodates the piezoelectric element that generates part as vibration in this shell.Axle 4 so is provided with, thereby as shown in the figure, extend downwards its bottom from above-mentioned shell, and is suitable for by a guiding piece vertically-guided that places shell 3.Above-mentioned cutting member 1 is installed on the bottom of axle 4.As cutting member 1, can use the diamond tool of square pyramidal shaped at this.When piezoelectric element, axle 4 is just with cutting member 1 vibration.
Shell 3 links to each other with slide block 5, and this slide block is by a guiding piece 7, and for example linear guide spare is installed on the workbench 6.Operation guide spare 7 is linear movement mode with axle 4 and cutting member 1 about workbench 6 with guide shoe 5, shell 3 and line body 2 and moves.Workbench 6 is by a motion, and promptly driving mechanism 10 is with respect to workpiece (work piece) 9 motions.
Be installed on line body 2 sides respectively and pair of magnet 8a and 8b on workbench 6 sides mutually exclusive, be applied to dead load on the workpiece 9 thereby regulate cutting member 1.When cutting member 1 is lifted by the repulsive interaction of magnet 8a and 8b, can regulate dead load (that is, when vibration generates element and do not vibrate, being applied to load on the workpiece) by cutting member.At this moment, line the moving both vertically of body 2 (lift or float) is subjected to the guiding of guiding piece 7.
Press the chalker of said structure, cutting member 1 can vibrate, and is applied to dead load on the workpiece 9 so can suitably regulate by cutting member 1 according to kind, type or the thickness of workpiece to be cut.
Yet in having traditional chalker of above-mentioned feature and structure, the guiding piece that is used for guiding the guiding piece that lifts motion 7 of line body 2 and is used for the vibration of leading axle 4 is separately located in respectively at Fig. 7 each other by the position of lateral separation distance L.Therefore, when axle 4 vibrations, on guiding piece 7, produce a torque load (moment load), this guiding piece sling line body 2.
If produce such torque load, then cutting member 1 along continuous straight runs vibration, also vertically vibration simultaneously, as shown in Figure 7.When cutting member 1 horizontal vibration, will produce a horizontal component to the load that is applied to by cutting member 1 on the workpiece 9, according to such component, will on the surface of workpiece 9, produce horizontal crackle, thereby destroy workpiece 9, be inconvenient therefore.
In addition, when vibration generated vibration of element, line body 2 and cutting member 1 also vibrated.Yet guiding piece 7 action subsequently is owing to the torque load that is applied on the guiding piece 7 becomes even worse, and corresponding, also produces resistance in 2 vibrations of line body.
In addition, be used to guide the independent of guiding piece 7 that lifts motion and the guiding piece that is used to vibrate, promptly independently the position make the line body complex structure and increased its weight.Have relatively poor flatness or cutting member at workpiece 9 moves under the situation about intersecting with line in the past, line body 2 vertically lifts and puts down, thereby when the whole weight of line body increases, the inertia force of line body also increases, and therefore causes being applied to by cutting member 1 the big vibration of the load on the workpiece 9.
Summary of the invention
Therefore, the objective of the invention is to eliminate basically the defective or the inconvenience that run in the above-mentioned prior art, and provide a kind of chalker, it can suppress the horizontal vibration of cutting member in chalker basically, and makes the simple structure only vertically vibration of cutting member to have the oscillating component that reduces weight.
Above-mentioned and other purpose can realize that on the one hand, the chalker by providing to be used for forming line on workpiece comprises by the present invention:
One is used for vibrative vibration and generates part;
One by utilizing this vibration to generate the cutting member of the vibration cut workpiece of part;
Thereby one generates part from this vibration and extends the axle that the vibration that will vibrate the generation part passes to this cutting member vertically downward;
One is used for the linear movement of axle is guided guidance unit to cutting member along its central axial direction; With
One is used to regulate the load governor motion that is imposed on the load of workpiece by cutting member, and described load governor motion is operated,
Wherein, described guidance unit is usually as the device of the vibration that generates the part leading axle by described vibration and the conduct device by the motion of described load governor motion leading axle.
By of the present invention this on the one hand, guidance unit is realized simultaneously guiding by the operation vibration and is generated the function of vibration of the axle that part causes and the function by the moving upward of load governor motion leading axle (lift or float).Correspondingly and since needn't be as prior art independent (separately) two guiding pieces be set realize above-mentioned two kinds of functions respectively, so no longer cause any torque load.Therefore, prevent to produce the horizontal vibration of cutting member, and only vertically stationary vibration of cutting member.
In addition, because the effect of single guiding piece is to realize above-mentioned two kinds of guiding functions simultaneously, the structure of this guidance unit can become simply, and weight can lighten, so makes a spot of load change be applied on the cutting member.
For such guidance unit, preferably use for example linear guide spare, globe daisy key guiding piece, ball lining guiding piece or sliding bearing guiding piece.
At this on the one hand, can adopt following preferred exemplary.
This chalker also comprises a cutting member motion that is used for along the workpiece motion s cutting member.
This axle is formed with rolling member rolling part on its outer surface, this guidance unit comprise one with this equipped outer sleeve, this sleeve is formed with rolling member rolling part on the perimeter surface within it, and comprises and be formed at roll part and be formed at rolling member rolled portion on the outer sleeve several rolling members between dividing of rolling member on the axle.This rolling member can be a ball, and this rolling member rolling part that is formed on the axle can be a groove with the rolling member rolling part that is formed on the outer sleeve.
This vibration generates part and has a center line, and this has the center line that a cardinal principle is alignd with the center line of vibration generation part.
This vibration generates part and is contained in the shell, and an awl dish spring is arranged in this shell, be in the position between axle and the vibration generation part, thereby the vibration that vibration generates part is followed in the vibration of axle.
Chalker can also be provided with one can be with respect to the workbench of workpiece motion s, and this guidance unit is installed on this workbench, and this workbench moves by this motion.
This load governor motion can comprise a pair of magnet, a piezoelectric element or supermagnetic device that is intervally installed along the shaft vibration direction.
By these preferred exemplary, cutting member can mark a line well by moving along surface of the work with on surface of the work.
Because axle is mounted in the outer sleeve, thereby around the periphery of living axle, when shaft vibration, this axle can vertically lead smoothly and stably.In addition, owing between axle and outer sleeve, be provided with rolling member, so the resistance that causes when shaft vibration can reduce.
In addition, the vibration that vibration generates part can pass to axle efficiently along its central axial direction, and can not bring disadvantageous torque load to axle.
Being provided with of awl dish spring will be easy to only transmit along vertical (axially) direction.
In another aspect of this invention, also provide a chalker that is used on workpiece, forming line, having comprised:
Being arranged to for one can be with respect to the workbench of workpiece motion s;
The motion of this workbench that is used to move;
One is used for vibrative vibration and generates part;
One by utilizing this vibration to generate the cutting member of the vibration cut workpiece of part;
Thereby one generates part from this vibration and extends the axle that the vibration that will vibrate the generation part passes to this cutting member vertically downward;
One is installed in and is used on this workbench along the guidance unit of the linear movement of its central axial direction leading axle; With
One is used to regulate the load governor motion that is imposed on the load of workpiece by cutting member, described load governor motion,
Wherein, the center line of described vibration generation part and the center line of described axle align mutually.
This magnet comprises a pair of magnet piece that is intervally installed along the shaft vibration direction.
By this on the one hand, can realize for example above-mentioned identical favourable function and effect substantially referring to first embodiment.
From following structure the description of the drawings, will know essence of the present invention and further feature more.
Description of drawings
In the accompanying drawings:
Fig. 1 is a front view that shows by the chalker of first embodiment of the invention;
Fig. 2 is the side view of Fig. 1 chalker;
Fig. 3 is the perspective view of the guiding piece of Fig. 1 chalker;
Fig. 4 is a front view, has shown the guiding piece of Fig. 3 with the part face of land, cross section;
Fig. 5 is a side view, has shown the guiding piece of Fig. 3 with the part face of land, cross section;
Fig. 6 is a vertical cross-section diagram, shows a chalker by second embodiment of the invention; With
Fig. 7 is one and shows a front view with chalker of traditional structure.
The specific embodiment
At first, chalker shown in Fig. 1 and 2 has showed the first embodiment of the present invention, its be used for plate-shaped, by friable material, for example mark line on workpiece (or work piece) 11 surfaces that glass, semiconductor, pottery etc. are made, thereby and extend along its thickness direction.This chalker comprises that thereby a vibration generates part 14, one and generates 1, one of the cutting member that vibration that bottom that part 14 15, one on vertically extending axles are installed in axle 15 is subjected to passing axle 15 generates the vibration of part 14 from vibration and be used for along the guiding piece 28 and a pair of the magnet 17a and the 17b as load adjustment device that utilizes magnetic force of the linear movement of its central axial direction leading axle.Guiding piece 28 be installed in one can workbench 18 by motion or driving mechanism 19 motion on, the effect of this driving mechanism is a motion workbench 18, thus along workpiece 11 along two dimension (X-Y) direction or three-dimensional (X-Y-Z) direction motion cutting members 12.
In the state that has assembled, when driving chalker, the end of cutting member 1 (front end) abuts against on the surface of workpiece 9, as shown in Figure 1, simultaneously in this state, when driving vibration generation part 14 with vibration cutting member 12, on the surface of workpiece 11, produce vertical crack, when cutting member 12 moved on workpiece 11 surfaces, these crackles just coupled together and form a continuous crackle, draw (marking) line 13 thereby form then.
As cutting member 12, can use the diamond tool of square pyramidal shaped.The workpiece that square pyramidal shaped diamond tool although it is so is used to have thin thickness is effectively, but has big thickness at workpiece, and for example under the situation of glass, the wheeled instrument with abacus bead shape is effective.
One for example causes the piezoelectric element of distortion when applying external electric field, for example piezo-activator is used for vibration generation part 14.When using piezoelectric element 14, it be with predetermined frequency shift voltage to be applied the cycle expand and shrink.By applying external electric field, on piezoelectric element, produce pressure, this pressure is passed on the cutting member 12.When this pressure is applied on the cutting member 12, just on the surface of workpiece 11, form the recess and vertical crackle of square pyramidal shaped simultaneously.
Be used for will vibration generating the axle 15 that vibration that part 14 produces passes to cutting member 12 and on cross section, have circular shape, and be subjected to the support of guiding piece 28, with along its central axial direction linear movement.Axle 15 is provided with an instrument maintaining part 20 (tool retainer) in its bottom, and on the other hand, its upper end generates part 14 with vibration and links to each other.
Shown in Fig. 3 and 4, the rolling member rolling path of several ball rolling groove forms row 15a is formed on the periphery of axle 15, thereby extends vertically.In addition, except have circular cross section the axle part, can also use other have the polygon cross section the axle part.In addition, also can use the axle that axially has varying cross-section along it.In addition, solid shafting and hollow shaft can be used as the axle 15 of chalker of the present invention.
Vibration generates that the center line of the center line of part 14 and axle 15 is in alignment with each other basically, thereby effectively along the vibration of its axis direction transmitter shaft.On the contrary, if these center lines stagger each other, then torque load will be applied on the axle 15.
Be used for comprising an outer cylinder or sleeve 21 along the guiding piece 28 of the linear movement of its axis direction leading axle 15, its cover axle 15 and several balls 22,22,---periphery, these balls are arranged between outer sleeve 21 and the axle 15 as rolling element.Such guiding piece 28 is installed on the workbench 18 by support.This guiding piece 28 is realized the motion of leading axle 15, for example lifts the function of the vibration of the function of motion and guiding is generated part 14 generations by vibration axle 15.
Fig. 3-5 has showed an example of guiding piece 28.Referring to these accompanying drawings, axle 15 constitutes as being formed with the spline shaft of number row along the rolling groove 15a of its axis direction extension.On the other hand, the outer sleeve 21 equipped mutually with axle 15 is formed with the ball rolling groove 21a as the rolling member rolling path that several extend along axis direction on the perimeter surface within it, thereby consistent with the rolling groove 15a of axle 15.Several balls 22,22,---place between these ball rolling groove 15a and the 21a, and roll betwixt.In outer sleeve 21 inboards, be formed with an annular be used for along its circulation ball 22,22,---circulating path, one is used to keep the keeper 34 of ball 22 also to be assembled in wherein.Ball 22 consistently rolls and moves about the linear movement of outer sleeve 21 with axle 15 between outer sleeve 21 and axle 15.Ball 22 is along the circulating path circulation of annular, simultaneously along its rolling.In addition, consider that axle 15 has little amplitude, so under the situation of the circulating path that does not form annular, also can adopt limited circulating path.In addition, the guiding piece 28 of said structure can be with other various types of can leading axle 15 reciprocating, and for example linear guide spare, ball lining guiding piece or sliding bearing guiding piece constitute.
Referring to Fig. 1, lift or the magnet 17a of unsteady power and the direction of vibration permanent magnet separated from one another that 17b comprises a pair of edge axle 15 by utilizing magnetic force to provide to cutting member 12.A 17a in these magnet is installed to a side of workbench 18, (that is, in this embodiment, being installed in one holds shell and another piece 17b wherein is installed to a side of the line body 23 of chalker, be on the shell 24, in this shell, accommodate vibration and generate part 14).A support 25 is fixed on workbench 18 and the magnet 17a, and another support 26 is fixed on the shell 24.Magnet 17b is installed on this support 26.In the embodiment shown, though magnet 17b is fixed on the shell 24, magnet 17b also can be installed on arbitrary part of vibration line body 23 sides, for example, and on the axle 15.Magnet 17a and 17b so are set, thus identical magnetic pole, and for example the N utmost point is put toward each other, thereby by can reduce to be applied to dead load on the workpiece 11 by cutting member 12 at the repulsive interaction that produces between these magnet 17a and the 17b.
In a remodeling embodiment, magnet 17a can be by a unshowned position adjusting mechanism, for example changes the micrometer that is applied to the dead load on the workpiece 11 from cutting member 12 by regulating its height thus and substitutes.In addition, permanent magnet 17a and 17b also can be made of the electromagnet that can regulate magnetic force.In addition, magnet 17a and 17b also can so constitute, thereby each all has annular shape, on the center line that is centered close to axle of this annular.
Vibration generates part 14 and is contained in the shell 24.Vibration generates part 14 and abuts a keeper 27 of the upper end that is installed in axle 15 with its bottom, and abuts an adjusting screw element 38 that is positioned at shell 24 tops with its upper end.A spring 29 is arranged in the bottom of shell 24, thereby the vibration that vibration generates part 14 is followed in the vibration of axle 15.This spring is the awl dish type, has a continuous circumference cross section, its effect is upwards to promote keeper 27 and at keeper 27 be installed between the adjusting screw element 38 on the shell 24 and generate part 14 to vibration and provide and preload (that is, be pressed in a vibration along its axial direction generate power on the part 14) by himself elastic force.In order to prevent that cutting member 12 from lifting from workpiece 11 in the vibration processes of vibration generation part 14, can provide a thing heavy to shell 24, perhaps spring or magnet can be set, thereby promote shell 24 downwards.
Also we can say, the chalker of this embodiment has showed a model, the thing with mass M 1 (quality of the quality of bearing 5 and cutting member 12) is heavy and the thing with mass M 2 (quality of shell 24 and the anti-heavy quality of thing of floating) is heavy wherein to have one, and vibration generates part 14 between these two things are heavy.For this reason, generate the pressure that part 14 produces in order to transmit by vibration to cutting member 12 effectively, importantly setting is positioned at the heavy balance of the thing with mass M 1 and M2 that vibration generates part 14 both sides best.Usually, by making mass M 2 greater than mass M 1, the pressure that is generated part 14 generations by vibration can be passed to cutting member 12 effectively.
The chalker of said structure and feature can use and use in the following manner.
At first, workpiece 11 is set up and is placed on the horizontally disposed pedestal 30.Then, workbench 18 is by motion 19 and with respect to 11 horizontal ground motions of the workpiece on the pedestal 30.After cutting member 12 was installed on the line body that abuts workpiece 11 edges, cutting member 12 just moved on the upper surface of workpiece, when cutting member 12 moves on workpiece 11, just applied dead load by cutting member 12 to workpiece 11.At this moment, by the height of regulating magnet, owing to magnet is reduced, therefore can regulate dead load corresponding to the dead load of the amount of repulsion.Excessively increasing under the situation of dead load, can on the surface of workpiece 11, form horizontal crackle, on the contrary, excessively reducing under the situation of dead load, when 23 vibrations of line body.Cutting member 12 floats from the surface of workpiece 11, and workpiece 11 is damaged thus.The size of dead load is according to material and its thickness setting of workpiece 11.
After obtaining that be scheduled to or required dead load, generate part 14 to vibration and apply radio-frequency field, make its periodic vibration thus.The vibration that vibration generates part 14 passes to cutting member 12 by axle 15, when cutting member 12 vibrations, forms a recess at workpiece surface, on workpiece 11, form then one with the continuous vertical crack of this recess.
As mentioned above, by the first embodiment of the present invention, because the vibration guiding piece 28 that comes self-excited oscillation to generate part 14 is used as the member of leading axle 15 vibrations simultaneously and lifts the member of motion by magnet 17a and 17b leading axle 15.Therefore, can not produce is the torque loads that produce in the independent traditional chalker that is provided with separately at these guiding pieces for example, can prevent to produce the horizontal vibration of cutting member 12 thus, so only vertically vibration of cutting member 12.
In addition, when workbench 18 vibrates cutting member 12 simultaneously by the motion of motion 19 along continuous straight runs, form stroke (marking) line 13 that constitutes by vertical crack on the surface of workpiece 11, pull down the workpiece 11 that it is formed with line 13 from pedestal 30 then, utilize unshowned disconnecting apparatus to disconnect workpiece afterwards along line.
Fig. 6 shows a chalker by second embodiment of the invention.The chalker of this second embodiment also comprise vibrative vibration generate part 14, from vibration generate part 14 vertically extending axles 15, thereby the bottom that is installed in axle 15 generates cutting member 12 that part 14 vibrate through axle 15, is used for guiding piece 28 and a pair of unshowned magnet as load governor motion of leading axle along its centerline direction linear movement by vibration, this magnet utilizes the magnetic force adjusting to be imposed on the load of workpiece 11 by cutting member 12.Guiding piece 28 is installed on the unshowned workbench, and it can be by motion 19 and motion.
In this second embodiment, vibration generates part 14 and makes by using magnetic material, and this causes magnet distortion when applying magnetic field, more specifically says use to be had the supermagnetic device 31 of big displacement.
Around supermagnetic device 31 winding arounds 32, thereby produce magnetic field, this supermagnetic device 31 also is accommodated in the shell 24.The lower end of this supermagnetic device 31 abuts the keeper 27 that is positioned at axle 15 upper ends, and on the other hand, the upper end of supermagnetic device 31 abuts the top of shell 24.Spring 29 is arranged in the bottom of shell 24, thereby the vibration of supermagnetic device 31 is followed in the vibration of axle 15.This spring is the awl dish type, has constant shape of cross section on its circumferencial direction.Spring 29 upwards promotes keeper 27 and provides between keeper 27 and shell 24 tops to preload (in axial direction being pressed in the power on the supermagnetic device 31) by the elastic restoring force of himself.
When the magnetic field that imposes on supermagnetic device 31 changed with preset frequency, supermagnetic device 31 periodically expanded or shrinks.That is to say that make supermagnetic device 31 produce pressure by applying external magnetic field, this pressure is delivered to cutting member 12 then.Usually, because the pressure that the pressure that supermagnetic device produces produces greater than piezoelectric element, so need when cutting member 12 transmits big pressure, will be used for cutting material, for example glass effectively by supermagnetic device.
According to this second embodiment, can realize for example above-mentioned favourable function and effect referring to first embodiment.
In addition, should be noted that the present invention is not limited to described embodiment, can carry out many changes and modification under the situation of the category that the present invention asks for protection after not breaking away from.

Claims (10)

1. one is used for forming the chalker of ruling on workpiece, comprising:
One is used for vibrative vibration and generates part;
One by utilizing this vibration to generate the cutting member of the vibration cut workpiece of part;
Thereby one generates part from this vibration and extends the axle that the vibration that will vibrate the generation part passes to this cutting member vertically downward;
One is used for the linear movement of axle is guided guidance unit to cutting member along its central axial direction; With
One is used to regulate the load governor motion that is imposed on the load of workpiece by cutting member, and described load governor motion is operated,
It is characterized in that described guidance unit is usually as the device of the vibration that generates the part leading axle by described vibration and the conduct device by the motion of described load governor motion leading axle.
2. by the described chalker of claim 1, also comprise a cutting member motion that is used for along the workpiece motion s cutting member.
3. by claim 1 or 2 described chalkers, it is characterized in that, described axle is formed with rolling member rolling part on its outer surface, described guidance unit comprises an outer sleeve that is equipped with described axle, described sleeve is formed with rolling member rolling part on the perimeter surface within it, and comprises and be formed at roll part and be formed at rolling member rolled portion on the outer sleeve several rolling members between dividing of rolling member on the axle.
4. by the described chalker of claim 3, it is characterized in that described rolling member is a ball, the described rolling member rolling part that is formed on the axle is a groove with the rolling member rolling part that is formed on the outer sleeve.
5. by claim 1 or 2 described chalkers, it is characterized in that described vibration generates part and has a center line, described axle has a center line that aligns mutually with the center line of vibration generation part.
6. by claim 1 or 2 described chalkers, it is characterized in that described vibration generates part and is contained in the shell, an awl dish spring is arranged in described shell, be in the position between axle and the vibration generation part, thereby the vibration that vibration generates part is followed in the vibration of axle.
7. by the described chalker of claim 2, also comprise one can be with respect to the workbench of workpiece motion s, described guidance unit is installed on this workbench, this workbench moves by described motion.
8. by claim 1 or 2 described chalkers, it is characterized in that described vibration generates part and comprises a piezoelectric element.
9. by claim 1 or 2 described chalkers, it is characterized in that described vibration generates part and comprises a supermagnetic device.
10. one is used for forming the chalker of ruling on workpiece, comprising:
Being arranged to for one can be with respect to the workbench of workpiece motion s;
The motion of this workbench that is used to move;
One is used for vibrative vibration and generates part;
One by utilizing this vibration to generate the cutting member of the vibration cut workpiece of part;
Thereby one generates part from this vibration and extends the axle that the vibration that will vibrate the generation part passes to this cutting member vertically downward;
One is installed in the guidance unit that is used on the workbench along the linear movement of its central axial direction leading axle; With
One is used to regulate the load governor motion that is imposed on the load of workpiece by cutting member, described load governor motion,
Wherein, the center line of described vibration generation part and the center line of described axle align mutually.
CN 200710101370 2003-01-15 2003-01-15 Scriber Pending CN101062575A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB031015905A CN100396448C (en) 2003-01-15 2003-01-15 Marking machine

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CNB031015905A Division CN100396448C (en) 2003-01-15 2003-01-15 Marking machine

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Publication Number Publication Date
CN101062575A true CN101062575A (en) 2007-10-31

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CN 200710101370 Pending CN101062575A (en) 2003-01-15 2003-01-15 Scriber

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Publication number Priority date Publication date Assignee Title
JP4938650B2 (en) * 2005-03-23 2012-05-23 Thkインテックス株式会社 Scribing equipment
JP5165577B2 (en) * 2006-10-05 2013-03-21 Thk株式会社 Scribing equipment
JP2009274434A (en) * 2008-04-16 2009-11-26 Thk Co Ltd Scribing apparatus and multi-shaft scribing apparatus
JP5332344B2 (en) * 2008-06-30 2013-11-06 三星ダイヤモンド工業株式会社 Chip holder and holder unit
JP5603608B2 (en) * 2010-01-29 2014-10-08 株式会社アマダ Marking method, marking tool, punch press

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US6470782B1 (en) * 1997-09-25 2002-10-29 Beldex Corporation Scribe device
EP1074517B1 (en) * 1999-08-06 2005-12-14 THK Co., Ltd. Scribing apparatus
JP3420204B2 (en) * 2000-11-17 2003-06-23 Thk株式会社 Guidance device

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CN1517186A (en) 2004-08-04

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Effective date of registration: 20090925

Address after: Tokyo, Japan

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Co-applicant after: Thk Intechs Co., Ltd.

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Open date: 20071031