TW200829909A - Device for detecting foreign object on flat panel display - Google Patents

Device for detecting foreign object on flat panel display Download PDF

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Publication number
TW200829909A
TW200829909A TW096108475A TW96108475A TW200829909A TW 200829909 A TW200829909 A TW 200829909A TW 096108475 A TW096108475 A TW 096108475A TW 96108475 A TW96108475 A TW 96108475A TW 200829909 A TW200829909 A TW 200829909A
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TW
Taiwan
Prior art keywords
foreign matter
light
panel display
flat panel
substrate
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TW096108475A
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Chinese (zh)
Inventor
Ho-Min Kang
Dong-Hyuk Kwon
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Snu Precision Co Ltd
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Publication of TW200829909A publication Critical patent/TW200829909A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Abstract

The present invention relates to a device for detecting a foreign object on a flat panel display and the device is applicable to detect the position and size of a foreign object existing on a surface of a substrate. The features of the device include: an inspection light generation unit, which is arranged at one side of the substrate for projecting a light in a horizontal direction toward the object to be inspected; an image forming lens, which is arranged above the substrate for receiving the light that is projected by the inspection light generation unit and reflected by the foreign object; and an image taking device, which is arranged above the image forming lens for displaying the intensity of the light reflected toward the image forming lens.

Description

200829909 九、發明說明： 【發明所屬之技術·婿域】… 本發明涉及-_於檢辭板顯示裝置上異物的異物檢測哭 尤肢涉及-齡製造平板裝置㈣光工料_測光檢測 異物’且料-照明手段在短日销_較少的f崎得正確檢測 結果的異物檢測器。 【先前技術】 • 液晶顯*裝置(叫咖咖如Display，LCD)、等離子顯示裝置 (Plasma Display Pand’PDP)、有機發光二極體(〇rganicUght、200829909 IX. DESCRIPTION OF THE INVENTION: [Technical Fields of the Invention] The present invention relates to the detection of foreign matter in foreign bodies on the display panel display device, the crying of the limbs, the production of flat devices (four), the optical materials, the photometric detection of foreign objects, and Material-lighting means in the short-term sales _ less f saki get the correct detection result of the foreign object detector. [Prior Art] • LCD display device (called display, LCD), plasma display device (Plasma Display Pand’PDP), organic light-emitting diode (〇rganicUght,

Emitting Diodes，0LED)等平板顯示裝置㈣pand叫㈣的製造 過射’進行每-健虹程需錄·每—個工程是否已成功 進行。 那疋因為如果基板存在突出部分或微細粒子將導致最終產物 的不良，因此重要的是在每個工程中分職出這樣的異物及突出 籲部分’亚且事哥進行去除。如果對此疏忽將導致大量的基板產生 不良產品。 尤其疋在平板顯示器面板的製作過程當中，在近接曝光裝置 或者縫隙塗布機(slitcoater) #的處理工序當中，待處理基板與設 備，例如近接曝光裝置的面罩或者縫隙塗布機的缝隙喷嘴之間的 縫隙將維持100 _〜300輝左右距離進行作業。 這樣的結構顯不在圖】及圖2當中。圖！是平板顯示裝置的 曝光工程巾顯示塗布機喊賴，圖2是平板齡裝置的曝光工 5 200829909 程中顯示近接曝光裝置的載面圖。 —' 如圖1所示，塗布機(200)移動在設置於支撐架(600)上·面的基 • 板(100)上面，並在玻璃基板(100)表面進行塗布。此時，為了完美 地進行塗布’塗布機(2〇〇)與玻璃基板(1〇〇)維持一定的近接距離， 向一方向移動。 另外’如圖2所示，近接曝光裝置的面罩(300)以一定近接高 ⑩度配置在玻璃基板(1〇〇)上面，並維持較長時間。 這樣的工程當中所產生的金屬或者玻璃材質的異物(A)置於 _與玻璃基板難之間，給設備帶來損傷，並由此導致大量的 基板產生不良產品。 為了防止這些a又備及玻璃基板受損，在這樣的近接作業裝置 的處理工序之别需要採用一檢測裝置來檢測異物的有無和大小，尤 其是高度等。 _ 讀檢測裝置須要檢測出對設備帶來損傷的-定高度(H)以 的/、物為了達到這一目的，先前曾使用過幾種用於檢測高度 的結構。 先蝻利用光三角法或者干涉計等的高度測定方法雖然精度 好’但疋在要求的時軸對全體面積進行檢測，在費用及技術方 面存在一定的限制。 另夕卜’先韵利用錯射測微計(laser micr〇meter)等進行的檢測 方法’考慮到麵基板均雜等問題時，存在著對其性能的可靠 6 200829909 性下降的問題。檢測存在於基板上面異物的先前技術之一例，參 照圖3間早說明如下。一〜 圖3疋一種用於檢測平板顯示裝置上異物的先前鐳射裝置截 面圖。如圖3所示，由支撐架(_)支撐的玻璃基板(1〇〇)的一側 配置有顯愤生器(4⑽），另-側配置有錯射接收器(5〇〇) 。如果鐳 射發生為(400)發生镭射，鐳射接收器(5〇〇)就會接收該肺，但是 土板（100)上面存在異物或者突起(A)時，卩能接收部分錯射。 这樣通過所發生的鐳射和所接收的錯射之間的差異，就可測 出異物或者突起(A)的高度。 但是玻璃基板(100)在製魏程可能發生平域絲的誤差， 而且所要㈣的突越度也則、，目此存在著把玻璃基板平坦度 誤差誤認為是突起而檢出的問題。 這樣，通過先前技術檢測玻璃基板上異物的高度，存在耗時、 耗費、誤檢等問題。 【發明内容】 本發明ϋ於上述提出，其目的在於提供—種，在要求 時間内能夠可靠地檢出-定高度以上異物的平板顯示裝置的異物 檢測器。 另外，本！X明的另-個目的在於提供一種，可通過常規的二 維檢測攝像錢，雜地檢測異物的平板顯示裝制異物檢測器。 為了實現如上所述目的，本發明提供一種平板顯示裝置的異 物監測裝置，該裝置適用於撿測出基板表面上異物的位置及大 200829909 本l月的#徵在於其包括：測光發生單元，其配置在基板的 :丨用於朝被測物照射水平光線;成像鏡頭，其配置在基板上部，」 •用於接收由所述測光發生單元所照射、並被異物所反射的光線； 攝像衣置’其’在所述絲麵的上部，麟顯示反射到所述 成像鏡頭之光線的強度。 此時，所述攝像裝置由电荷耦合器件（charge c〇upled Device， CCD)構成為佳。 # 並且，所述攝像裝置由金属氧化物半導體(ComplementaryEmitting Diodes, 0LED) and other flat panel display devices (4) Pand called (4) Manufactured by ejector's for each----------------------------------------------------------- That is because if there is a protruding portion or fine particles on the substrate, which will result in a bad result of the final product, it is important to separate such foreign matter and highlight the part in each project. If this negligence will result in a large number of substrates producing defective products. In particular, during the manufacturing process of the flat panel display panel, between the substrate and the device to be processed, such as the mask of the proximity exposure device or the slit nozzle of the slit coater, in the process of the proximity exposure device or the slit coater # The gap will maintain a distance of 100 _~300 hui to work. Such a structure is not shown in the figure and in Figure 2. Figure! It is the exposure engineering towel of the flat panel display device that shows the coating machine screaming, and FIG. 2 is the exposure surface of the bare-length exposure device. — As shown in Fig. 1, the coater (200) is moved over the base plate (100) provided on the upper surface of the support frame (600), and coated on the surface of the glass substrate (100). At this time, in order to perfectly perform the coating, the coating machine (2〇〇) and the glass substrate (1〇〇) maintain a certain close distance and move in one direction. Further, as shown in Fig. 2, the mask (300) of the proximity exposure device is placed on the glass substrate (1 inch) at a certain height of 10 degrees, and is maintained for a long time. The metal or glass foreign matter (A) generated in such a project is placed between _ and the glass substrate, causing damage to the device, and thus causing a large number of substrates to produce defective products. In order to prevent damage to these materials and the glass substrate, it is necessary to use a detecting device to detect the presence or absence of foreign matter, particularly the height, etc., in the processing procedure of such a proximity working device. _ The read detection device is required to detect a certain height (H) that causes damage to the device. In order to achieve this, several structures for detecting height have been used previously. First, the height measurement method using an optical trigonometry method or an interferometer is excellent in accuracy, but the total time is detected on the required time axis, and there are certain limitations in terms of cost and technology. In addition, when the detection method by the laser micr 〇 meter or the like is used in consideration of the problem that the surface substrate is mixed, there is a problem that the performance is reliable. An example of the prior art for detecting foreign matter present on the substrate is described below with reference to Fig. 3. A ~ Figure 3 is a cross-sectional view of a prior laser device for detecting foreign matter on a flat panel display device. As shown in Fig. 3, one side of the glass substrate (1) supported by the support frame (_) is provided with an erecting device (4 (10)), and the other side is provided with a mis-reflecting receiver (5 〇〇). If the laser occurs at (400), the laser receiver (5〇〇) will receive the lung, but when there is foreign matter or protrusion (A) on the soil plate (100), the 卩 can receive a partial misalignment. Thus, the height of the foreign matter or the protrusion (A) can be measured by the difference between the generated laser light and the received misalignment. However, the glass substrate (100) may have a flat field filament error in the manufacturing process, and the protrusion degree of the (4) is also required. Therefore, there is a problem in that the glass substrate flatness error is mistaken as a protrusion. Thus, the detection of the height of the foreign matter on the glass substrate by the prior art has problems such as time consuming, costly, and false detection. SUMMARY OF THE INVENTION The present invention has been made in view of the above, and it is an object of the invention to provide a foreign matter detector capable of reliably detecting a foreign matter of a predetermined height or more within a required time period. In addition, this! Another object of the present invention is to provide a flat-panel display foreign matter detector which can detect foreign matter by conventional two-dimensional inspection. In order to achieve the above object, the present invention provides a foreign matter monitoring device for a flat panel display device, which is suitable for detecting a position of a foreign object on a surface of a substrate and a large sign of 200829909, which includes: a photometry generating unit, The substrate is disposed on the substrate: 丨 is used to illuminate the object to be irradiated with horizontal light; the imaging lens is disposed on the upper portion of the substrate,” • for receiving light that is irradiated by the photometric generating unit and reflected by the foreign object; 'It' is on the upper part of the silk surface, and the lining shows the intensity of the light reflected to the imaging lens. At this time, the imaging device is preferably constituted by a charge coupled device (CCD). #且, The camera device is made of a metal oxide semiconductor (Complementary

Metal Oxide SemieGiiductor，CMOS)構成為佳。 另外，本發明之所述平板顯示裝置的異物檢測器，所述測光發 生單兀在基板的四個侧面中至少要配置在兩個以上侧面為佳，以 便更有效地測定突起。 【實施方式】 下面參照附圖詳細說明本發明一個較佳實施例所涉及的平板 • 顯示裝置的異物檢測器。 首先，參照圖4詳細說明本發明一個較佳實施例所涉及的異 物檢測器的結構。 圖4是表示本發明實施例的平板顯示裝置的異物檢測器的示 意圖。 如圖4所示，本發明實施例的平板顯示裝置的異物檢測器包 括測光發生單元(20)、成像鏡頭(30)和攝像裝置(4〇)。 平板顯不衣置或者其中間組裝體基板(1〇)由玻璃薄板製成，大 200829909 體上疋平板形狀。戎玻璃基板(10)水平放置在支撐架(50)上。 玻璃基板(10)的一側或者兩侧配置測光發生單元（20)，其用 —於朝玻璃基板(10)以水平方向照射光線。測光發生單元(20)用於檢 測玻璃基板(10)上異物(A)，從測光發生單元(2〇)發射的光線，碰 到附著於玻璃基板(1〇)上面的玻璃碎片（Glass chip)和其他雜質等 異物(A)而反射或者散射。測光發生單元(2〇)的光軸配置成與平板 狀玻璃基板(10)上面保持水平為佳，以便更容易地測定異物(A)的 ⑩南度。 成像鏡頭(30)配置在玻璃基板(1〇)的上部並與之隔開一定距 離，其用於接收從測光發生單元(2〇)照射到異物並被反射的光 線。成像鏡頭(30)多數配置在玻璃基板(10)的上部一定區域，從突 起(A)反射的光線將進入到位於突起(a)上部領域的成像鏡頭(3〇) 裏。 攝像裝置(40)配置在所述成像鏡頭(3〇)的上部，用於顯示從測 光發生單元(20)照射並被異物反射的光線。即，攝像裝置(4〇)配置 在玻璃基板(10)的上方，用於獲得玻璃基板(1〇)的突起或者異物(A) 的映射。 此時，攝像裝置(40)可以包括電荷耦合器件(Charge Coupled Device，CCD)。另外，攝像裝置（40)也可以包括CMOS (Complementary Metal Oxide Semiconductor)- 當採用CCD時，雖然其單價昂貴，但能夠作出幾乎沒有雜像 200829909 (noise)的乾淨晝質。與此相反，當採用CM〇s時，雖然其單價便宜 但雜像多。整體來說CCD比CMOS亮三倍左右，並且能夠體現 尚旦貝，但是CCD比CMOS消耗更多的電力。 通過如此結構，測光發生單元(20)發射的光線可經過多種路 徑，但由測光發生單元(20)發射的光線被突起（A)反射，而與光 線的進行方向垂直的方向，即向上反射的光線將通過成像鏡頭(3〇) 及攝像裝置(40)顯示。 通過上述結構，通過和顯示在CCD或CMOS攝像裝置(40) 上的映射大小，即與圖元個數或者寬度的比例關係，能夠測定並 計算出異物的高度。 其次’參照圖5及圖6比較說明本發明實施例之平板顯示裝 置的異物檢測器工作原理。 圖5是本發明實施例之平板顯示裝置的異物檢測器中，顯示 第一光線路徑的截面圖，圖6是本發明實施例之平板顯示裝置的 異物檢測器中，顯示第二光線路徑的戴面圖。 如圖5所示，突起的高度為H1時，在測光發生單元(20)發射 的光線(L)即第-光線在聽⑷反射，其巾與光線的進行方向垂直 的方向’即反射到上方的光線(υ)將通過成像鏡頭(3〇)映在攝像裝Metal Oxide SemieGiiductor, CMOS) is better. Further, in the foreign matter detector of the flat panel display device of the present invention, it is preferable that the photometric generating unit is disposed on at least two side faces of the four side faces of the substrate to more effectively measure the projections. [Embodiment] A foreign matter detector of a flat panel display device according to a preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. First, the structure of a foreign matter detector according to a preferred embodiment of the present invention will be described in detail with reference to FIG. Fig. 4 is a view showing a foreign matter detector of the flat panel display device of the embodiment of the invention. As shown in Fig. 4, the foreign matter detector of the flat panel display device of the embodiment of the present invention includes a photometry generating unit (20), an imaging lens (30), and an image pickup device (4A). The flat panel display or the intermediate assembly substrate (1 inch) is made of a thin glass plate, and the large 200829909 has a flat plate shape. The neodymium glass substrate (10) is placed horizontally on the support frame (50). A photometric generating unit (20) is disposed on one side or both sides of the glass substrate (10) for illuminating the light in a horizontal direction toward the glass substrate (10). The photometry generating unit (20) is configured to detect the foreign matter (A) on the glass substrate (10), and the light emitted from the photometric generating unit (2〇) hits a glass chip attached to the glass substrate (1〇). It is reflected or scattered by foreign matter (A) such as other impurities. The optical axis of the photometric generating unit (2〇) is preferably arranged to maintain a level with the upper surface of the flat glass substrate (10) to more easily measure the southness of the foreign matter (A). The imaging lens (30) is disposed at an upper portion of the glass substrate (1 〇) at a distance therefrom for receiving the light irradiated from the photometry generating unit (2〇) to the foreign matter and reflected. Most of the imaging lens (30) is disposed in a certain upper portion of the glass substrate (10), and light reflected from the protrusion (A) will enter the imaging lens (3〇) located in the upper field of the protrusion (a). An image pickup device (40) is disposed at an upper portion of the imaging lens (3) for displaying light that is irradiated from the light detecting unit (20) and reflected by foreign matter. That is, the imaging device (4A) is disposed above the glass substrate (10) for obtaining a projection of the glass substrate (1) or a foreign matter (A). At this time, the imaging device (40) may include a Charge Coupled Device (CCD). Further, the imaging device (40) may include CMOS (Complementary Metal Oxide Semiconductor) - when the CCD is used, although the unit price is expensive, it is possible to make a clean enamel with almost no murmur 200829909 (noise). In contrast, when CM〇s is used, although the unit price is cheap, there are many murmurs. Overall, the CCD is about three times brighter than CMOS, and it can reflect Shangdanbei, but the CCD consumes more power than CMOS. With such a configuration, the light emitted by the photometric generating unit (20) can pass through various paths, but the light emitted by the photometric generating unit (20) is reflected by the protrusion (A), and is directed upward in the direction perpendicular to the direction in which the light is conducted, that is, upwardly reflected. Light will be displayed through the imaging lens (3〇) and the camera unit (40). With the above configuration, the height of the foreign matter can be measured and calculated by the map size on the CCD or CMOS image pickup device (40), that is, the ratio of the number of pixels or the width. Next, the operation principle of the foreign matter detector of the flat panel display device according to the embodiment of the present invention will be described with reference to Figs. 5 and 6. 5 is a cross-sectional view showing a first light path in the foreign matter detector of the flat panel display device according to the embodiment of the present invention, and FIG. 6 is a view showing the second light path in the foreign matter detector of the flat panel display device according to the embodiment of the present invention; Surface map. As shown in FIG. 5, when the height of the protrusion is H1, the light (L) emitted by the photometry generating unit (20), that is, the first light is reflected at the hearing (4), and the direction of the towel is perpendicular to the direction in which the light is proceeding, that is, reflected upward. The light (υ) will be reflected in the camera through the imaging lens (3〇)

置（40)，即 CCD (Charge Coupled Device)或者 CMOS (Complementary MetalOxide Semiconductor)上。 從玻璃基板(10)到突起的高度(H1)越高，反射到突起的光線(L，) 200829909 也越多’因而映到攝像裝置(4〇)，即CCD及CMOS的映射也變得Set (40), that is, CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor). The higher the height (H1) from the glass substrate (10) to the protrusions, the more light (L,) 200829909 is reflected to the protrusions, and thus the imaging device (4〇), that is, the mapping between CCD and CMOS becomes

更大更亮。 -—X 另一方面，如圖6所示，突起的高度為H2(假定小於H1)時也 是相同’在測光發生單元(2〇)進行的光線(M)即第二光線反射到突 起(A) ’其中與光線的進行方向垂直的方向，即反射到上方的光線 (Mf)將通過成像鏡頭(3〇)映在攝像裝置(4〇)。 參圖5及圖6假設照射第一光線時(圖5)的突起高度(hi)大 於照射第二光線時(圖6)的突起高度(H2)，則照射第一光線時反射 到突起的光線多於照射第二光線時反射到突起的光線，因此照射 第一光線時映在攝像裝置(4〇)CCD或者CMOS的映射也顯得更大 更亮。 而且，假設突起為半球形，那麼突起高度與顯示在攝像裝置 (40)，即CCD或者CMOS的映射的大小，即與圖元(piXEL)個數形 成比例。因此，通過找出比想要檢出的、與突起的高度相對應出 現的圖元的個數及亮度更大的圖元，就能夠檢測出所希望的突起。 如此對於想要檢出的異物利用側面照明裝置和上部成像裝 置，能夠知道映在攝像裝置(4〇)即映射感測器上的一定大小以上異 物的映射圖7L(PIXEL)及亮度，並通過這個能夠簡單地檢測出一定 大小以上的異物。 並且’通财發咐闕之平_稍置的祕檢測器，利 用測光能夠檢測出一定大小以上的異物， 因此可以節省基板檢測 11 200829909 所需的時間和費用。 Λ 上述内容只是對本發明較佳實施例的說明，但本發明並不限- . 於此’在本發明的申請專利範圍内以多種形式實施例來體現。在 本發明申請專利範圍内本發明所屬之技術領域，本領域技術人員 可做各中變更及修飾，毋庸置疑這也屬於本發明的範圍之内。 如此構成的平板顯示裝置的異物檢測器，和先前技術不同，可 以在要求時間内可靠地檢測出一定高度以上的異物。 _ 並且，通過本發明實施例之平板顯示裝置的異物檢測器，利 用測光可以檢測出―定大小以上的異物，因此可以節省基板檢測 所需的時間及費用。 亚且，利用常規的二維檢測攝像裝置，能夠簡單容易地檢測 出存在於基板上的異物。 【圖式簡單說明】 圖1是平板顯示裝置曝光工程中塗布機的截面 » 圖2是平板顯稀置曝紅程巾近接曝錄置的截__ —圖3是先前技術之平板顯示裝置，表示檢測異物的錯射^面 圖4是本發明實施例的平板顯示裝置的異物檢測器示意圖。 圖5平板顯示裝置是本發明實施例的平板顯示裝置 測器，表示第一光線路徑的截^^ ^ 圖6是本發明實施例的平板顯示袭置的異物檢測器，表示第 二光線路徑的截面圖。 12 200829909Bigger and brighter. -X On the other hand, as shown in Fig. 6, the height of the protrusion is H2 (assuming less than H1) is also the same 'light rays (M) in the photometric generating unit (2〇), that is, the second light is reflected to the protrusion (A ) 'The direction perpendicular to the direction in which the light is directed, that is, the light reflected upward (Mf) will be reflected on the imaging device (4〇) through the imaging lens (3〇). 5 and FIG. 6 assume that the height of the protrusion (hi) when the first light is irradiated (FIG. 5) is larger than the height (H2) of the protrusion when the second light is irradiated (FIG. 6), and the light that is reflected to the protrusion when the first light is irradiated More light is reflected to the protrusions when the second light is irradiated, so the mapping of the CCD or CMOS reflected on the imaging device when the first light is irradiated is also larger and brighter. Moreover, assuming that the protrusion is hemispherical, the height of the protrusion is proportional to the size of the map displayed on the image pickup device (40), i.e., CCD or CMOS, i.e., the number of primitives (piXEL). Therefore, by finding the number of primitives and the brightness which are larger than the height of the protrusion to be detected, the desired protrusion can be detected. By using the side illumination device and the upper imaging device for the foreign matter to be detected, it is possible to know the map 7L (PIXEL) and the brightness of the foreign matter of a certain size or more reflected on the imaging device, that is, the image sensor (4〇), and pass through the image. This can easily detect foreign objects of a certain size or more. And the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The above is only a description of the preferred embodiments of the present invention, but the present invention is not limited thereto. The present invention is embodied in various forms and embodiments within the scope of the present invention. It is to be understood that those skilled in the art can make various changes and modifications within the scope of the present invention within the scope of the present invention. The foreign matter detector of the flat panel display device thus constructed is different from the prior art in that foreign matter of a certain height or more can be reliably detected within a required time. Further, the foreign matter detector of the flat panel display device according to the embodiment of the present invention can detect a foreign matter having a size larger than a predetermined size by using photometry, thereby saving time and cost required for substrate detection. In addition, it is possible to easily and easily detect foreign matter existing on the substrate by using a conventional two-dimensional detection imaging device. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-section of a coating machine in a flat panel display device exposure project. FIG. 2 is a cross-sectional view of a flat exposure display red exposure towel. FIG. 3 is a prior art flat panel display device. FIG. 4 is a schematic view showing a foreign matter detector of the flat panel display device of the embodiment of the present invention. The flat panel display device of FIG. 5 is a flat panel display device of the embodiment of the present invention, and shows a cut-off of the first light path. FIG. 6 is a foreign matter detector of the flat panel display according to the embodiment of the present invention, showing the second light path. Sectional view. 12 200829909

【主要元件符號說明】 A L 第一光線的路徑 L， 反射到上方的光線 Μ 第二光線的路徑 Μ， 反射到上方的光線 Η 近接距離，近接高度 HI 突起的南度 Η2 突起的南度 10 基板 100 基板 20 測光發生單元 200 塗布機(coater) 30 成像鏡頭 300 圖像形成面罩 40 攝像裝置 400 鐳射發生器 50 支撐架 500 鐳射接收器 600 支撐架 13[Main component symbol description] AL The path L of the first light, the light reflected to the upper side Μ The path of the second light Μ, the light reflected to the upper side Η Close distance, the proximity HI of the height HI protrusion Η 2 The south of the protrusion 10 substrate 100 substrate 20 photometric generating unit 200 coater 30 imaging lens 300 image forming mask 40 imaging device 400 laser generator 50 support frame 500 laser receiver 600 support frame 13

Claims (1)

200829909 十、申請專利範圍： 了… 1、一種平板顯示裝置的異物檢測器，該裝置適用於檢測基板_ 表面上異物的位置及大小，其特徵在於，包括： 測光發生單元，其配置在基板的側面，用於朝被測物照射水 平光線； 成像鏡頭，其配置在基板上部，用於接收從所述測光發生單 元照射並被異物反射的光線； _ 攝像裝置，其配置在所述成像鏡頭的上部，肖於顯示所述成 像鏡頭所接收的光線的強度。 2、 如申請專利範圍第丨項所述之平板顯示裝置的異物檢測 器，其特徵在於： 所述攝像裝置由电荷耦合器件（Charge C〇upled Device，CCD) 構成。 3、 如申請專利範圍第1項所述之平板顯示裝置的異物檢測 • 器’其特徵在於·· 所述攝像衣置由金属氧化物半導體(C〇mpiementary Metal Oxide Semiconductor)構成。 4、 如申請專利範圍第2項或第3項所述之平板顯示裝置的異 物檢測器，其特徵在於·· 所述測光發生單元在基板的四個側面中至少配置在兩個側 面。 14200829909 X. Patent application scope: 1. A foreign matter detector for a flat panel display device, which is suitable for detecting the position and size of a foreign object on a substrate _ surface, characterized in that it comprises: a photometric generating unit disposed on the substrate a side surface for illuminating the horizontal light toward the object to be measured; an imaging lens disposed at an upper portion of the substrate for receiving light that is irradiated from the light metering unit and reflected by the foreign matter; _ an image pickup device disposed on the imaging lens The upper part shows the intensity of the light received by the imaging lens. 2. The foreign object detector of the flat panel display device according to the above aspect of the invention, characterized in that the image pickup device is constituted by a charge coupled device (CCD). 3. The foreign matter detecting device of the flat panel display device according to claim 1, wherein the image forming device is made of a metal oxide semiconductor (C〇mpiementary Metal Oxide Semiconductor). 4. The foreign matter detector of the flat panel display device according to claim 2, wherein the photometric generating unit is disposed on at least two side faces of the four side faces of the substrate. 14
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