WO2008120882A1 - Apparatus for inspection of three-dimensional shape and method for inspection using the same - Google Patents

Apparatus for inspection of three-dimensional shape and method for inspection using the same Download PDF

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Publication number
WO2008120882A1
WO2008120882A1 PCT/KR2008/001635 KR2008001635W WO2008120882A1 WO 2008120882 A1 WO2008120882 A1 WO 2008120882A1 KR 2008001635 W KR2008001635 W KR 2008001635W WO 2008120882 A1 WO2008120882 A1 WO 2008120882A1
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WO
WIPO (PCT)
Prior art keywords
inspection object
pixel
light
inspection
light source
Prior art date
Application number
PCT/KR2008/001635
Other languages
French (fr)
Inventor
Ssang-Gun Lim
Sang-Yun Lee
Mingu Kang
Original Assignee
Intekplus Co., Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intekplus Co., Ltd filed Critical Intekplus Co., Ltd
Publication of WO2008120882A1 publication Critical patent/WO2008120882A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision

Definitions

  • the present invention relates to an apparatus for inspection of a three-dimensional shape and a method for inspection using the same, and more particularly to an apparatus for inspection of a three-dimensional shape, capable of selectively adjusting reflectivity or visibility of the surface of an inspection object, and a method for inspection using the same.
  • the above-mentioned optical method for inspection of a three-dimensional shape requires high-speed, high-precision and non-contact measurement.
  • a representative example of the above-mentioned optical method for inspection of a three-dimensional shape is an optical method for measuring a three-dimensional shape using a moire pattern.
  • the moire pattern is an interference fringe occurring when at least two periodic patterns overlap each other.
  • Moire methods are classified into a shadow moire method and a projection moire method according to a method for forming the moire pattern.
  • FIG. 4 illustrates an exemplary configuration of a conventional apparatus for inspection of a three-dimensional shape.
  • the apparatus for inspection of a three-dimensional shape includes a grid projection unit 1, an inspection object 3, an imaging unit 2 and an analysis unit (not shown).
  • the grid projection unit 1 generates an image having a specific pattern on the surface of the inspection object 3 such as a semiconductor package.
  • the grid projection unit 1 includes a light source 11 which illuminates light, a grid unit 12 which is disposed at the rear of the light source 11 to generate a shadow image having a specific pattern on the surface of the inspection object 3, a projection optical system 13 which is disposed at the rear of the grid unit 12 to project the image generated by the grid unit 12 to the rear end thereof, a reflection mirror 14 which reflects light projected from the projection optical system 13 to the surface of the inspection object 3, and the like.
  • the apparatus may further include a coaxial lighting unit 4 which illuminates coaxial light on the surface of the inspection object and a reflection mirror 5.
  • the grid unit 12 generates interference signals of a grid pattern on the surface of the inspection object 3 while vertically moving by micro-actuation through a PZT actuator.
  • the inspection object 3 is transferred by a transfer unit to be placed on an inspection table.
  • the imaging unit 2 is an image pickup unit which captures an image reflected from the surface of the inspection object 3.
  • the imaging unit 2 includes a CCD camera 21 and an image optical system 22 which condenses light to the CCD camera.
  • the imaging unit 2 transmits the image captured by the CCD camera 21 to the analysis unit (not shown).
  • the analysis unit such as a computer is inputted with the digital signals to analyze the signals. Then, the analysis unit compares the analyzed image with a preset reference image and determines whether there is a defect of the inspection object.
  • the reflected light creates a shadow image having a specific pattern, that is, a grid pattern, on the surface of the inspection object 3. Then, the image is reflected.
  • CCD camera 21 Analog signals of the captured image are converted into digital signals through the analysis unit (not shown).
  • the apparatus should include the grid unit and the PZT actuator.
  • the grid unit is micro- actuated by the PZT actuator to generate interference signals according to the height of the surface of the inspection object such that light emitted from the light source passes through the grid unit to generate a specific grid pattern on the surface of the inspection object. Accordingly, since the apparatus should include both the grid unit and the PZT actuator, there is a drawback that the apparatus has a complicated configuration.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus for inspection of a three- dimensional shape and a method for inspection using the same, wherein a certain pattern is formed for entirely uniform visibility of the surface of an inspection object, or reflectivity of each pixel is controlled for entirely uniform reflectivity of the surface of the inspection object, using a pixel-based display control unit.
  • an apparatus for inspection of a three-dimensional shape comprising: a light source; a grid pattern generating unit which generates a grid pattern on a surface of an inspection object by transforming light generated from the light source and an imaging unit which captures an image reflected from the surface of the inspection object, wherein the three-dimensional shape of the inspection object is measured from the image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the grid pattern generating unit includes a pixel-based display control unit which controls brightness of each pixel according to surface reflectivity of the inspection object to generate a certain grid pattern.
  • an apparatus for inspection of a three-dimensional shape comprising: a light source; a beam splitter which distributes light emitted from the light source to a surface of an inspection object and a reflecting body a projection unit which projects the light emitted from the light source onto the beam splitter and an imaging unit which acquires an optical pattern formed by superposing light reflected from the surface of the inspection object and light reflected from the reflecting body, wherein the three- dimensional shape of the inspection object is measured from an image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the projection unit includes a pixel-based display control unit which controls brightness of light incident on the beam splitter for each pixel to selectively control brightness of each pixel according to surface reflectivity of the inspection object, and the reflecting body includes a pixel-based display control unit which complementarily controls brightness to brightness of each pixel of an optical pattern formed by the projection unit.
  • an apparatus for inspection of a three-dimensional shape comprising: a light source; a beam splitter which guides light emitted from a light source to a surface of an inspection object a projection unit which projects the light emitted from the light source onto the beam splitter and a light interference module which illuminates light emitted from the beam splitter to the surface of the inspection object to form an interference fringe based on light reflected from the surface of the inspection object and an imaging unit which acquires the interference fringe formed by the light interference module, wherein the three-dimensional shape of the inspection object is measured from an image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the projection unit includes a pixel-based display control unit which controls brightness of light for each pixel according to surface reflectivity of the inspection object.
  • the pixel-based display control unit employs a digital optical method to produce an image through a digital micro mirror device having a number of micro drive mirrors integrated and arrayed in a pixel matrix while actuation of each mirror is controlled, and the pixel-based display control unit further includes a colorization unit which imparts color to white light emitted from the light source such that colored light is illuminated on the digital micro mirror device.
  • the pixel-based display control unit may employ an LCD projection method to produce an image through an LCD panel.
  • a method for inspection of a three-dimensional shape comprising: forming a grid pattern on a surface of an inspection object by selectively transforming light emitted from a light source capturing an image reflected from the surface of the inspection object with the grid pattern formed thereon; and analyzing the captured image and determining whether there is a defect of the inspection object, wherein in the step of forming a grid pattern on a surface of an inspection object, brightness of each pixel of the grid pattern is selectively controlled by a pixel-based display control unit.
  • a method for inspection of a three-dimensional shape comprising: illuminating light emitted from a light source to a beam splitter using a projection unit and projecting light rays split from the beam splitter to a surface of an inspection object and a reflecting body such that light reflected from the surface of the inspection object and light reflected from the reflecting body superpose each other to form an interference fringe; capturing the interference fringe; and analyzing the captured image and determining whether there is a defect of the inspection object, wherein the step of forming an interference fringe includes projecting an optical pattern using a projection unit configured as a pixel-based display control unit to provide certain brightness of each pixel of the surface of the inspection object, and forming an optical pattern having brightness complementary to brightness of the optical pattern formed by the projection unit using a reflecting body configured as a pixel-based display control unit.
  • a method for inspection of a three-dimensional shape comprising: forming an interference fringe by reflecting light emitted from a light source from a surface of an inspection object and a reference surface by a light interference module capturing the interference fringe analyzing the captured image and determining whether there is a defect of the inspection object, wherein in the step of forming an interference fringe, each pixel of an optical pattern incident on the light interference module has a certain brightness pattern by a pixel-based display control unit.
  • FIG. 1 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a first embodiment of the present invention
  • FIG. 2 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a second embodiment of the present invention
  • FIG. 3 illustrates a configuration of an apparatus for inspection of a three-di- mensional shape according to a third embodiment of the present invention
  • FIG. 4 illustrates an exemplary configuration of a conventional apparatus for inspection of a three-dimensional shape. Best Mode for Carrying Out the Invention
  • FIG. 1 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a first embodiment of the present invention, which includes a light source 100, a grid pattern generating unit 110 and an imaging unit 120.
  • the grid pattern generating unit 110 generates a grid pattern on the surface of an inspection object P by transforming light generated from the light source.
  • the grid pattern generating unit 110 includes a pixel-based display control unit 111 which controls brightness of each pixel according to surface reflectivity of the inspection object P to generate a certain grid pattern, and a projection lens 112 which projects the grid pattern formed through the pixel-based display control unit 111 onto the surface of the inspection object P.
  • the pixel-based display control unit 111 includes a digital micro mirror device (DMD) having a number of micro drive mirrors integrated and arrayed in a pixel matrix, wherein actuation of each mirror is controlled to produce an image by a digital optical method.
  • DMD digital micro mirror device
  • the apparatus may further include a col- orization unit which imparts color to white light emitted from the light source 100 such that colored light is illuminated on the digital micro mirror device.
  • the digital micro mirror device is a semiconductor chip developed by Texas Instruments, which is a device having a number of micro drive mirrors integrated and arrayed in a pixel matrix, wherein the rotation of each mirror is controlled by each drive means.
  • the pixel-based display control unit 111 may employ an LCD projection method to produce an image through an LCD panel.
  • the imaging unit 120 may include a CCD camera 121 which captures an image reflected from the surface of the inspection object P, and an imaging lens 122 which condenses light to the CCD camera 121, as well known in the art.
  • the method for inspection of a three-dimensional shape according to the first embodiment of the present invention includes forming a grid pattern on the surface of the inspection object by selectively transforming light emitted from the light source capturing an image reflected from the surface of the inspection object with the grid pattern formed thereon; and analyzing the captured image and determining whether there is a defect of the inspection object.
  • brightness of each pixel of the grid pattern is selectively controlled by the pixel-based display control unit.
  • the surface reflectivity of the inspection object P is nonuniform and different according to the respective pixels.
  • reliability of an acquired grid image is deteriorated.
  • light emitted from the light source 100 is illuminated on the surface of the inspection object to form a grid pattern.
  • Brightness of each pixel of the grid pattern is selectively controlled by the pixel-based display control unit 111 to maximize visibility according to the surface reflectivity of the inspection object.
  • the actuation of each mirror of the integrated micro drive mirrors is controlled to change an angle of the mirror. Accordingly, a certain pattern is projected on the surface of inspection object to create a grid pattern.
  • a dark grid pattern is formed on a pixel region having high reflectivity and a bright grid pattern is formed on a pixel region having low reflectivity. Accordingly, it is possible to overcome a difference in reflectivity by compensating visibility according to a difference in brightness of the respective pixels.
  • the first embodiment of the present invention it is possible to form a grid pattern having adequate brightness of each pixel according to the reflectivity of the respective pixels of the surface of the inspection object P using the pixel-based display control unit, thereby providing entirely uniform visibility. Accordingly, it is possible to overcome a conventional problem of deteriorating the accuracy of the acquired image due to a difference in the surface reflectivity of the inspection object P.
  • FIG. 2 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a second embodiment of the present invention, which includes a light source 200, a projection unit 210, a beam splitter 220, and a reflecting body 230 and an imaging unit 240.
  • the projection unit 210 projects light emitted from the light source 200 onto the beam splitter 220.
  • the projection unit 210 includes a pixel-based display control unit 211 which selectively controls brightness of each pixel according to the surface reflectivity of the inspection object P, and a projection lens 212 which projects light having brightness controlled by the pixel-based display control unit 211 onto the beam splitter 220.
  • the reflecting body 230 provides an optical pattern having brightness complementary to an optical pattern projected by the pixel-based display control unit 211 of the projection unit 210.
  • the pixel-based display control unit may employ a digital optical method to produce an image through a digital micro mirror device or an LCD projection method to produce an image through an LCD panel.
  • the imaging unit 240 may include a camera 241 and an imaging lens 242, as well known in the art.
  • the method for inspection of a three-dimensional shape according to the second embodiment of the present invention includes illuminating light emitted from the light source to the beam splitter using the projection unit and projecting the light rays split from the beam splitter to the surface of the inspection object and the reflecting body such that light reflected from the surface of the inspection object and light reflected from the reflecting body superpose each other, thereby forming an interference fringe; capturing the interference fringe; and analyzing the captured image and determining whether there is a defect of the inspection object.
  • the step of forming an interference fringe includes projecting an optical pattern using the projection unit configured as the pixel-based display control unit to provide certain brightness of each pixel of the surface of the inspection object; and forming an optical pattern having brightness complementary to brightness of the optical pattern formed by the projection unit using the reflecting body configured as the pixel-based display control unit.
  • the light emitted from the light source 200 is split into a reference ray
  • the reference ray Rl and the measurement ray Ml are projected onto the reflecting body 230 and the surface of the inspection object P, respectively.
  • the reference ray Rl and the measurement ray Ml are reflected from the reflecting body 230 and the surface of the inspection object P, respectively, and return to the beam splitter 220. Then, a portion of the reference ray Rl and the measurement ray Ml is projected to the imaging unit 240.
  • light emitted from the light source 200 is projected onto the beam splitter 220 while changing a path of light by the projection unit 210, thereby providing an optical pattern having brightness of each pixel, which is selectively controlled according to the surface reflectivity of the inspection object P.
  • an optical pattern having brightness complementary to brightness of the optical pattern provided from the projection unit 210 is reflected using the reflecting body 230.
  • Ml reflected from the surface of the inspection object P and the reference ray Rl reflected from the reflecting body 230 has the maximum visibility by compensating brightness of each pixel.
  • FIG. 3 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a third embodiment of the present invention, which includes a light source 300, a projection unit 310, a beam splitter 320, and a light interference module 330 and an imaging unit 340.
  • the projection unit 310 projects light emitted from the light source 300 onto the beam splitter 320.
  • the beam splitter 320 guides light emitted from the light source 300 to the surface of the inspection object P.
  • the light interference module 330 illuminates light emitted from the beam splitter 320 to the surface of the inspection object to form an interference fringe based on light reflected from the surface of the inspection object.
  • the imaging unit 340 acquires the interference fringe formed by the light interference module 330and may include a camera 341 and an imaging lens 342.
  • the light interference module 330 includes an objective lens 331, a reference surface 332 and a beam splitter 333 to illuminate an optical pattern incident on the beam splitter 333 to the surface of the inspection object.
  • the reference surface 332 forms a reference luminous flux for light condensed by the objective lens 331.
  • the beam splitter 333 forms a measurement luminous flux for measuring the shape and surface roughness of the inspection object P.
  • the reference luminous flux and the measurement luminous flux are incident on the reference surface 332 and the surface of the inspection object P, respectively.
  • a plurality of the luminous fluxes is reflected from the reference surface 332 and the surface of the inspection object P again to form an interference fringe.
  • the projection unit 310 includes a pixel-based display control unit 311 which controls brightness of each pixel according to the surface reflectivity of the inspection object P and a projection lens 312.
  • brightness of each pixel of the optical pattern incident on the light interference module 330 is controlled using the pixel-based display control unit 311, thereby overcoming a difference in visibility due to a difference in the surface reflectivity of the inspection object.
  • the method for inspection of a three-dimensional shape according to the third embodiment of the present invention includes forming an interference fringe by reflecting light emitted from the light source from the surface of the inspection object and the reference surface by the light interference module capturing the interference fringe analyzing the captured image and determining whether there is a defect of the inspection object.
  • each pixel of the optical pattern incident on the light interference module has a certain brightness pattern by the pixel-based display control unit.
  • each pixel of the optical pattern incident on the beam splitter 320 is selectively controlled to have a certain brightness pattern according to the surface reflectivity of the inspection object by the pixel-based display control unit 311.
  • the optical pattern in which each pixel is controlled to have certain brightness by the pixel-based display control unit 311, is incident on the objective lens 331 through the beam splitter 320.
  • the optical pattern is condensed by the objective lens 331 to form a reference luminous flux by the reference surface 332 and form a measurement luminous flux by the beam splitter 333.
  • the reference luminous flux and the measurement luminous flux are incident on the reference surface 332 and the surface of the inspection object P, respectively.
  • a plurality of the luminous fluxes is reflected from the reference surface 332 and the surface of the inspection object P again to form an interference fringe.
  • the interference fringe is captured by the imaging unit to measure a three-dimensional shape of the inspection object.
  • the pixel-based display control unit is used to form a certain pattern for entirely uniform visibility of the surface of the inspection object or to control the reflectivity of each pixel for entirely uniform reflectivity of the surface of the inspection object.

Abstract

An apparatus for inspection of a three-dimensional shape, capable of selectively adjusting reflectivity or visibility of the surface of an inspection object, and a method for inspection using the same are disclosed. The apparatus includes a light source, a grid pattern generating unit which generates a grid pattern on a surface of an inspection object by transforming light generated from the light source, and an imaging unit which captures an image reflected from the surface of the inspection object, wherein the three-dimensional shape of the inspection object is measured from the image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the grid pattern generating unit includes a pixel-based display control unit which controls brightness of each pixel according to surface reflectivity of the inspection object to generate a certain grid pattern.

Description

Description
APPARATUS FOR INSPECTION OF THREE-DIMENSIONAL SHAPE AND METHOD FOR INSPECTION USING THE SAME
Technical Field
[1] The present invention relates to an apparatus for inspection of a three-dimensional shape and a method for inspection using the same, and more particularly to an apparatus for inspection of a three-dimensional shape, capable of selectively adjusting reflectivity or visibility of the surface of an inspection object, and a method for inspection using the same. Background Art
[2] Generally, various parts having random shapes, such as a semiconductor memory module, should undergo accurate measurement of the size, shape, and surface roughness in order to check the manufacture states.
[3] In recent years, there has been widely used an optical method for inspection of a three-dimensional shape, in which a reference pattern of light generated from a light source is projected on a measurement object, and light transformed according to the shape of the measurement object is compared to the reference pattern, thereby measuring the shape of the measurement object.
[4] The above-mentioned optical method for inspection of a three-dimensional shape requires high-speed, high-precision and non-contact measurement. A representative example of the above-mentioned optical method for inspection of a three-dimensional shape is an optical method for measuring a three-dimensional shape using a moire pattern.
[5] The moire pattern is an interference fringe occurring when at least two periodic patterns overlap each other. Moire methods are classified into a shadow moire method and a projection moire method according to a method for forming the moire pattern.
[6] In the projection moire method, light is scanned in a grid pattern onto a measurement object. A grid image transformed according to the shape of the object overlaps with a reference grid having the same pitch as the scanned grid, thereby obtaining the moire pattern.
[7] FIG. 4 illustrates an exemplary configuration of a conventional apparatus for inspection of a three-dimensional shape.
[8] Referring to FIG. 4, the apparatus for inspection of a three-dimensional shape includes a grid projection unit 1, an inspection object 3, an imaging unit 2 and an analysis unit (not shown).
[9] In this case, the grid projection unit 1 generates an image having a specific pattern on the surface of the inspection object 3 such as a semiconductor package. The grid projection unit 1 includes a light source 11 which illuminates light, a grid unit 12 which is disposed at the rear of the light source 11 to generate a shadow image having a specific pattern on the surface of the inspection object 3, a projection optical system 13 which is disposed at the rear of the grid unit 12 to project the image generated by the grid unit 12 to the rear end thereof, a reflection mirror 14 which reflects light projected from the projection optical system 13 to the surface of the inspection object 3, and the like. The apparatus may further include a coaxial lighting unit 4 which illuminates coaxial light on the surface of the inspection object and a reflection mirror 5.
[10] Further, the grid unit 12 generates interference signals of a grid pattern on the surface of the inspection object 3 while vertically moving by micro-actuation through a PZT actuator.
[11] Further, although not shown in the drawings, the inspection object 3 is transferred by a transfer unit to be placed on an inspection table.
[12] Further, the imaging unit 2 is an image pickup unit which captures an image reflected from the surface of the inspection object 3. The imaging unit 2 includes a CCD camera 21 and an image optical system 22 which condenses light to the CCD camera. The imaging unit 2 transmits the image captured by the CCD camera 21 to the analysis unit (not shown).
[13] Further, when analog signals of the image captured by the imaging unit 2 are converted into digital signals by a frame grabber, the analysis unit (not shown) such as a computer is inputted with the digital signals to analyze the signals. Then, the analysis unit compares the analyzed image with a preset reference image and determines whether there is a defect of the inspection object.
[14] The method for inspection using the conventional apparatus for inspection of a three-dimensional shape is explained below. First, when the light source 11 is operated, light emitted from the light source 11 passes through the grid unit 12. Then, the light is projected onto the projection optical system 13 and is reflected by the reflection mirror 14.
[15] The reflected light creates a shadow image having a specific pattern, that is, a grid pattern, on the surface of the inspection object 3. Then, the image is reflected.
[16] The image reflected from the surface of the inspection object 3 is captured by the
CCD camera 21. Analog signals of the captured image are converted into digital signals through the analysis unit (not shown).
[17] Then, it is determined whether there is a defect of the inspection object by comparing the obtained image information with preset reference image information.
[18] In a case of using the above-mentioned apparatus for inspection of a three- dimensional shape, the apparatus should include the grid unit and the PZT actuator. [19] That is, the grid unit is micro- actuated by the PZT actuator to generate interference signals according to the height of the surface of the inspection object such that light emitted from the light source passes through the grid unit to generate a specific grid pattern on the surface of the inspection object. Accordingly, since the apparatus should include both the grid unit and the PZT actuator, there is a drawback that the apparatus has a complicated configuration.
[20] Further, since the reflectivity of the surface of the inspection object is not uniform, it is difficult to accurately acquire an image of a pixel region having high reflectivity.
[21] For example, in a case of inspecting a BGA type package, since light is severely reflected on a central rounded surface of a ball, it is difficult to accurately acquire an image of the central rounded surface. Also, in a case of inspecting a flat type package, since there is severe reflection, it is difficult to accurately acquire an image of the severely reflected portion.
[22] In order to solve the above-mentioned problems, it is possible to employ a method for reducing regular reflectivity of a regular reflection surface to acquire an image by adjusting a filter or a light quantity. However, in this case, the grid pattern of a three- dimensional surface having a high regular reflectivity is visible, whereas the grid pattern of a peripheral region is invisible, thereby deteriorating accuracy in the measurement. Disclosure of Invention
Technical Problem
[23] Therefore, the present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus for inspection of a three- dimensional shape and a method for inspection using the same, wherein a certain pattern is formed for entirely uniform visibility of the surface of an inspection object, or reflectivity of each pixel is controlled for entirely uniform reflectivity of the surface of the inspection object, using a pixel-based display control unit. Technical Solution
[24] In accordance with a first aspect of the present invention, there is provided an apparatus for inspection of a three-dimensional shape comprising: a light source; a grid pattern generating unit which generates a grid pattern on a surface of an inspection object by transforming light generated from the light source and an imaging unit which captures an image reflected from the surface of the inspection object, wherein the three-dimensional shape of the inspection object is measured from the image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the grid pattern generating unit includes a pixel-based display control unit which controls brightness of each pixel according to surface reflectivity of the inspection object to generate a certain grid pattern.
[25] In accordance with a second aspect of the present invention, there is provided an apparatus for inspection of a three-dimensional shape comprising: a light source; a beam splitter which distributes light emitted from the light source to a surface of an inspection object and a reflecting body a projection unit which projects the light emitted from the light source onto the beam splitter and an imaging unit which acquires an optical pattern formed by superposing light reflected from the surface of the inspection object and light reflected from the reflecting body, wherein the three- dimensional shape of the inspection object is measured from an image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the projection unit includes a pixel-based display control unit which controls brightness of light incident on the beam splitter for each pixel to selectively control brightness of each pixel according to surface reflectivity of the inspection object, and the reflecting body includes a pixel-based display control unit which complementarily controls brightness to brightness of each pixel of an optical pattern formed by the projection unit.
[26] In accordance with a third aspect of the present invention, there is provided an apparatus for inspection of a three-dimensional shape comprising: a light source; a beam splitter which guides light emitted from a light source to a surface of an inspection object a projection unit which projects the light emitted from the light source onto the beam splitter and a light interference module which illuminates light emitted from the beam splitter to the surface of the inspection object to form an interference fringe based on light reflected from the surface of the inspection object and an imaging unit which acquires the interference fringe formed by the light interference module, wherein the three-dimensional shape of the inspection object is measured from an image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the projection unit includes a pixel-based display control unit which controls brightness of light for each pixel according to surface reflectivity of the inspection object.
[27] Preferably, the pixel-based display control unit employs a digital optical method to produce an image through a digital micro mirror device having a number of micro drive mirrors integrated and arrayed in a pixel matrix while actuation of each mirror is controlled, and the pixel-based display control unit further includes a colorization unit which imparts color to white light emitted from the light source such that colored light is illuminated on the digital micro mirror device.
[28] Further, the pixel-based display control unit may employ an LCD projection method to produce an image through an LCD panel.
[29] In accordance with a fourth aspect of the present invention, there is provided a method for inspection of a three-dimensional shape comprising: forming a grid pattern on a surface of an inspection object by selectively transforming light emitted from a light source capturing an image reflected from the surface of the inspection object with the grid pattern formed thereon; and analyzing the captured image and determining whether there is a defect of the inspection object, wherein in the step of forming a grid pattern on a surface of an inspection object, brightness of each pixel of the grid pattern is selectively controlled by a pixel-based display control unit.
[30] In accordance with a fifth aspect of the present invention, there is provided a method for inspection of a three-dimensional shape comprising: illuminating light emitted from a light source to a beam splitter using a projection unit and projecting light rays split from the beam splitter to a surface of an inspection object and a reflecting body such that light reflected from the surface of the inspection object and light reflected from the reflecting body superpose each other to form an interference fringe; capturing the interference fringe; and analyzing the captured image and determining whether there is a defect of the inspection object, wherein the step of forming an interference fringe includes projecting an optical pattern using a projection unit configured as a pixel-based display control unit to provide certain brightness of each pixel of the surface of the inspection object, and forming an optical pattern having brightness complementary to brightness of the optical pattern formed by the projection unit using a reflecting body configured as a pixel-based display control unit.
[31] In accordance with a sixth aspect of the present invention, there is provided a method for inspection of a three-dimensional shape comprising: forming an interference fringe by reflecting light emitted from a light source from a surface of an inspection object and a reference surface by a light interference module capturing the interference fringe analyzing the captured image and determining whether there is a defect of the inspection object, wherein in the step of forming an interference fringe, each pixel of an optical pattern incident on the light interference module has a certain brightness pattern by a pixel-based display control unit. Brief Description of the Drawings
[32] The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
[33] FIG. 1 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a first embodiment of the present invention
[34] FIG. 2 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a second embodiment of the present invention
[35] FIG. 3 illustrates a configuration of an apparatus for inspection of a three-di- mensional shape according to a third embodiment of the present invention and [36] FIG. 4 illustrates an exemplary configuration of a conventional apparatus for inspection of a three-dimensional shape. Best Mode for Carrying Out the Invention
[37] FIG. 1 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a first embodiment of the present invention, which includes a light source 100, a grid pattern generating unit 110 and an imaging unit 120.
[38] In this case, the grid pattern generating unit 110 generates a grid pattern on the surface of an inspection object P by transforming light generated from the light source. The grid pattern generating unit 110 includes a pixel-based display control unit 111 which controls brightness of each pixel according to surface reflectivity of the inspection object P to generate a certain grid pattern, and a projection lens 112 which projects the grid pattern formed through the pixel-based display control unit 111 onto the surface of the inspection object P.
[39] In this case, the pixel-based display control unit 111 includes a digital micro mirror device (DMD) having a number of micro drive mirrors integrated and arrayed in a pixel matrix, wherein actuation of each mirror is controlled to produce an image by a digital optical method.
[40] Although not shown in the drawings, the apparatus may further include a col- orization unit which imparts color to white light emitted from the light source 100 such that colored light is illuminated on the digital micro mirror device.
[41] In this case, the digital micro mirror device (DMD) is a semiconductor chip developed by Texas Instruments, which is a device having a number of micro drive mirrors integrated and arrayed in a pixel matrix, wherein the rotation of each mirror is controlled by each drive means.
[42] The respective micro drive mirrors forming the digital micro mirror device, each mirror representing a single pixel, are individually turned on/off by a controller, thereby transmitting adequate image information on the surface of the inspection object. Since the drive method and components of the digital micro mirror device are well-known, detailed description thereof is omitted.
[43] Further, the pixel-based display control unit 111 may employ an LCD projection method to produce an image through an LCD panel.
[44] Meanwhile, the imaging unit 120 may include a CCD camera 121 which captures an image reflected from the surface of the inspection object P, and an imaging lens 122 which condenses light to the CCD camera 121, as well known in the art.
[45] A method for inspection of a three-dimensional shape using the apparatus for inspection of a three-dimensional shape according to the first embodiment of the present invention will be described in brief.
[46] The method for inspection of a three-dimensional shape according to the first embodiment of the present invention includes forming a grid pattern on the surface of the inspection object by selectively transforming light emitted from the light source capturing an image reflected from the surface of the inspection object with the grid pattern formed thereon; and analyzing the captured image and determining whether there is a defect of the inspection object. In the step of forming a grid pattern on the surface of the inspection object, brightness of each pixel of the grid pattern is selectively controlled by the pixel-based display control unit.
[47] Specifically, the surface reflectivity of the inspection object P is nonuniform and different according to the respective pixels. In a case of forming a grid pattern having the same brightness on the inspection object having different reflectivity according to the respective pixels, reliability of an acquired grid image is deteriorated.
[48] Accordingly, in the first embodiment of the present invention, light emitted from the light source 100 is illuminated on the surface of the inspection object to form a grid pattern. Brightness of each pixel of the grid pattern is selectively controlled by the pixel-based display control unit 111 to maximize visibility according to the surface reflectivity of the inspection object.
[49] In a case of using the pixel-based display control unit 111 as a digital micro mirror device, the actuation of each mirror of the integrated micro drive mirrors is controlled to change an angle of the mirror. Accordingly, a certain pattern is projected on the surface of inspection object to create a grid pattern.
[50] In this case, brightness of each pixel of the pattern projected on the surface of the inspection object is adequately and selectively set according to the surface reflectivity of the inspection object. Accordingly, the image captured by the imaging unit can have uniform visibility, thereby improving the measurement accuracy.
[51] For example, a dark grid pattern is formed on a pixel region having high reflectivity and a bright grid pattern is formed on a pixel region having low reflectivity. Accordingly, it is possible to overcome a difference in reflectivity by compensating visibility according to a difference in brightness of the respective pixels.
[52] Further, in the present invention, it is possible to control a colorization method of the grid pattern according to the color of the surface of the inspection object P.
[53] For example, in a case of forming a strong red (R) grid pattern on a strong red (R) pixel region of the surface of the inspection object, since the acquired grid pattern has low visibility, it is preferable to form a grid pattern with a weak red color and other strong colors.
[54] According to the first embodiment of the present invention, it is possible to form a grid pattern having adequate brightness of each pixel according to the reflectivity of the respective pixels of the surface of the inspection object P using the pixel-based display control unit, thereby providing entirely uniform visibility. Accordingly, it is possible to overcome a conventional problem of deteriorating the accuracy of the acquired image due to a difference in the surface reflectivity of the inspection object P.
[55] Further, conventionally, since a grid pattern is formed on the surface of the inspection object using a grid unit and a PZT actuator, a configuration of the apparatus is complicated. However, the present invention has a simple configuration of the apparatus since the grid unit and the PZT actuator are not necessary.
[56] FIG. 2 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a second embodiment of the present invention, which includes a light source 200, a projection unit 210, a beam splitter 220, and a reflecting body 230 and an imaging unit 240.
[57] In this case, the projection unit 210 projects light emitted from the light source 200 onto the beam splitter 220. The projection unit 210 includes a pixel-based display control unit 211 which selectively controls brightness of each pixel according to the surface reflectivity of the inspection object P, and a projection lens 212 which projects light having brightness controlled by the pixel-based display control unit 211 onto the beam splitter 220.
[58] Further, the reflecting body 230 provides an optical pattern having brightness complementary to an optical pattern projected by the pixel-based display control unit 211 of the projection unit 210.
[59] In this case, the pixel-based display control unit may employ a digital optical method to produce an image through a digital micro mirror device or an LCD projection method to produce an image through an LCD panel.
[60] The imaging unit 240may include a camera 241 and an imaging lens 242, as well known in the art.
[61] Hereinafter, a method for inspection using the apparatus for inspection of a three- dimensional shape according to the second embodiment of the present invention will be described in brief.
[62] The method for inspection of a three-dimensional shape according to the second embodiment of the present invention includes illuminating light emitted from the light source to the beam splitter using the projection unit and projecting the light rays split from the beam splitter to the surface of the inspection object and the reflecting body such that light reflected from the surface of the inspection object and light reflected from the reflecting body superpose each other, thereby forming an interference fringe; capturing the interference fringe; and analyzing the captured image and determining whether there is a defect of the inspection object.
[63] The step of forming an interference fringe includes projecting an optical pattern using the projection unit configured as the pixel-based display control unit to provide certain brightness of each pixel of the surface of the inspection object; and forming an optical pattern having brightness complementary to brightness of the optical pattern formed by the projection unit using the reflecting body configured as the pixel-based display control unit.
[64] Specifically, the light emitted from the light source 200 is split into a reference ray
Rl and a measurement ray Ml through the beam splitter 220. The reference ray Rl and the measurement ray Ml are projected onto the reflecting body 230 and the surface of the inspection object P, respectively.
[65] Further, the reference ray Rl and the measurement ray Ml are reflected from the reflecting body 230 and the surface of the inspection object P, respectively, and return to the beam splitter 220. Then, a portion of the reference ray Rl and the measurement ray Ml is projected to the imaging unit 240.
[66] The projected reference ray Rl and the measurement ray Ml superpose each other, thereby forming an interference fringe.
[67] In the second embodiment of the present invention, light emitted from the light source 200 is projected onto the beam splitter 220 while changing a path of light by the projection unit 210, thereby providing an optical pattern having brightness of each pixel, which is selectively controlled according to the surface reflectivity of the inspection object P.
[68] Further, an optical pattern having brightness complementary to brightness of the optical pattern provided from the projection unit 210 is reflected using the reflecting body 230.
[69] Accordingly, the interference fringe formed by superposing the measurement ray
Ml reflected from the surface of the inspection object P and the reference ray Rl reflected from the reflecting body 230 has the maximum visibility by compensating brightness of each pixel.
[70] FIG. 3 illustrates a configuration of an apparatus for inspection of a three-dimensional shape according to a third embodiment of the present invention, which includes a light source 300, a projection unit 310, a beam splitter 320, and a light interference module 330 and an imaging unit 340.
[71] In this case, the projection unit 310projects light emitted from the light source 300 onto the beam splitter 320. The beam splitter 320 guides light emitted from the light source 300 to the surface of the inspection object P.
[72] Further, the light interference module 330 illuminates light emitted from the beam splitter 320 to the surface of the inspection object to form an interference fringe based on light reflected from the surface of the inspection object. The imaging unit 340 acquires the interference fringe formed by the light interference module 330and may include a camera 341 and an imaging lens 342.
[73] Specifically, the light interference module 330 includes an objective lens 331, a reference surface 332 and a beam splitter 333 to illuminate an optical pattern incident on the beam splitter 333 to the surface of the inspection object. The reference surface 332 forms a reference luminous flux for light condensed by the objective lens 331. The beam splitter 333 forms a measurement luminous flux for measuring the shape and surface roughness of the inspection object P.
[74] The reference luminous flux and the measurement luminous flux are incident on the reference surface 332 and the surface of the inspection object P, respectively. A plurality of the luminous fluxes is reflected from the reference surface 332 and the surface of the inspection object P again to form an interference fringe.
[75] Meanwhile, the projection unit 310 includes a pixel-based display control unit 311 which controls brightness of each pixel according to the surface reflectivity of the inspection object P and a projection lens 312.
[76] Accordingly, in the present invention, brightness of each pixel of the optical pattern incident on the light interference module 330 is controlled using the pixel-based display control unit 311, thereby overcoming a difference in visibility due to a difference in the surface reflectivity of the inspection object.
[77] Hereinafter, a method for inspection using the apparatus for inspection of a three- dimensional shape according to the third embodiment of the present invention will be described in brief.
[78] The method for inspection of a three-dimensional shape according to the third embodiment of the present invention includes forming an interference fringe by reflecting light emitted from the light source from the surface of the inspection object and the reference surface by the light interference module capturing the interference fringe analyzing the captured image and determining whether there is a defect of the inspection object. In the step of forming an interference fringe, each pixel of the optical pattern incident on the light interference module has a certain brightness pattern by the pixel-based display control unit.
[79] In other words, each pixel of the optical pattern incident on the beam splitter 320is selectively controlled to have a certain brightness pattern according to the surface reflectivity of the inspection object by the pixel-based display control unit 311.
[80] The optical pattern, in which each pixel is controlled to have certain brightness by the pixel-based display control unit 311, is incident on the objective lens 331 through the beam splitter 320.
[81] The optical pattern is condensed by the objective lens 331 to form a reference luminous flux by the reference surface 332 and form a measurement luminous flux by the beam splitter 333. [82] The reference luminous flux and the measurement luminous flux are incident on the reference surface 332 and the surface of the inspection object P, respectively. A plurality of the luminous fluxes is reflected from the reference surface 332 and the surface of the inspection object P again to form an interference fringe. Then, the interference fringe is captured by the imaging unit to measure a three-dimensional shape of the inspection object. Industrial Applicability
[83] According to the present invention, the pixel-based display control unit is used to form a certain pattern for entirely uniform visibility of the surface of the inspection object or to control the reflectivity of each pixel for entirely uniform reflectivity of the surface of the inspection object. Thus, it is possible to prevent a reduction in accuracy of inspection due to a difference in lighting reflectivity or a difference in visibility, thereby improving reliability of inspection.
[84] Although the preferred embodiment of the present invention has been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Claims

Claims
[1] An apparatus for inspection of a three-dimensional shape comprising: a light source; a grid pattern generating unit which generates a grid pattern on a surface of an inspection object by transforming light generated from the light source and an imaging unit which captures an image reflected from the surface of the inspection object, wherein the three-dimensional shape of the inspection object is measured from the image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the grid pattern generating unit includes a pixel-based display control unit which controls brightness of each pixel according to surface reflectivity of the inspection object to generate a certain grid pattern.
[2] An apparatus for inspection of a three-dimensional shape comprising: a light source; a beam splitter which distributes light emitted from the light source to a surface of an inspection object and a reflecting body a projection unit which projects the light emitted from the light source onto the beam splitter and an imaging unit which acquires an optical pattern formed by superposing light reflected from the surface of the inspection object and light reflected from the reflecting body, wherein the three-dimensional shape of the inspection object is measured from an image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the projection unit includes a pixel-based display control unit which controls brightness of light incident on the beam splitter for each pixel to selectively control brightness of each pixel according to surface reflectivity of the inspection object, and the reflecting body includes a pixel-based display control unit which complementarily controls brightness to brightness of each pixel of an optical pattern formed by the projection unit.
[3] An apparatus for inspection of a three-dimensional shape comprising: a light source; a beam splitter which guides light emitted from a light source to a surface of an inspection object a projection unit which projects the light emitted from the light source onto the beam splitter and a light interference module which illuminates light emitted from the beam splitter to the surface of the inspection object to form an interference fringe based on light reflected from the surface of the inspection object and an imaging unit which acquires the interference fringe formed by the light interference module, wherein the three-dimensional shape of the inspection object is measured from an image captured by the imaging unit to determine whether there is a defect of the inspection object based on measurement results, and wherein the projection unit includes a pixel-based display control unit which controls brightness of light for each pixel according to surface reflectivity of the inspection object.
[4] The apparatus according to any one of claims 1 to 3, wherein the pixel-based display control unit employs a digital optical method to produce an image through a digital micro mirror device having a number of micro drive mirrors integrated and arrayed in a pixel matrix while actuation of each mirror is controlled.
[5] The apparatus according to claim 4, wherein the pixel-based display control unit further includes a colorization unit which imparts color to white light emitted from the light source such that colored light is illuminated on the digital micro mirror device.
[6] The apparatus according to any one of claims 1 to 3, wherein the pixel-based display control unit employs an LCD projection method to produce an image through an LCD panel.
[7] A method for inspection of a three-dimensional shape comprising: forming a grid pattern on a surface of an inspection object by selectively transforming light emitted from a light source; capturing an image reflected from the surface of the inspection object with the grid pattern formed thereon; and analyzing the captured image and determining whether there is a defect of the inspection object, wherein in the step of forming a grid pattern on a surface of an inspection object, brightness of each pixel of the grid pattern is selectively controlled by a pixel- based display control unit.
[8] A method for inspection of a three-dimensional shape comprising: illuminating light emitted from a light source to a beam splitter using a projection unit and projecting light rays split from the beam splitter to a surface of an inspection object and a reflecting body such that light reflected from the surface of the inspection object and light reflected from the reflecting body superpose each other to form an interference fringe; capturing the interference fringe; and analyzing the captured image and determining whether there is a defect of the inspection object, wherein the step of forming an interference fringe includes projecting an optical pattern using a projection unit configured as a pixel-based display control unit to provide certain brightness of each pixel of the surface of the inspection object, and forming an optical pattern having brightness complementary to brightness of the optical pattern formed by the projection unit using a reflecting body configured as a pixel-based display control unit.
[9] A method for inspection of a three-dimensional shape comprising: forming an interference fringe by reflecting light emitted from a light source from a surface of an inspection object and a reference surface by alight interference module; capturing the interference fringe; analyzing the captured image and determining whether there is a defect of the inspection object, wherein in the step of forming an interference fringe, each pixel of an optical pattern incident on the light interference module has a certain brightness pattern by a pixel-based display control unit.
[10] The method according to any one of claims 7 to 9, wherein the step of forming an interference fringe employs a digital optical method to produce an image through a digital micro mirror device having a number of micro drive mirrors integrated and arrayed in a pixel matrix while actuation of each mirror is controlled.
[11] The method according to claim 10, wherein the step of forming an interference fringe further employs a colorization unit which imparts color to white light emitted from the light source such that colored light is illuminated on the digital micro mirror device.
[12] The method according to any one of claims 7 to 9, wherein the step of forming an interference fringe employs an LCD projection method to produce an image through an LCD panel.
PCT/KR2008/001635 2007-03-30 2008-03-24 Apparatus for inspection of three-dimensional shape and method for inspection using the same WO2008120882A1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016040634A1 (en) * 2014-09-11 2016-03-17 Cyberoptics Corporation Point cloud merging from multiple cameras and sources in three-dimensional profilometry
KR101865338B1 (en) * 2016-09-08 2018-06-08 에스엔유 프리시젼 주식회사 Apparatus for measuring critical dimension of Pattern and method thereof
CN115165920A (en) * 2022-09-06 2022-10-11 南昌昂坤半导体设备有限公司 Three-dimensional defect detection method and detection equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102350544B1 (en) 2020-10-14 2022-01-17 주식회사 지엠지 Optical module for semiconductor packaging inspection process

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6084712A (en) * 1998-11-03 2000-07-04 Dynamic Measurement And Inspection,Llc Three dimensional imaging using a refractive optic design
KR20000053779A (en) * 2000-04-10 2000-09-05 김성식 Three dimension measuring system using two dimensional linear grid patterns
KR20030056971A (en) * 2001-12-28 2003-07-04 (주) 인텍플러스 Tree demensional shape/surface illumination measuring apparatus
KR20050026949A (en) * 2005-02-16 2005-03-16 이석한 3d depth imaging apparatus with flash ir source
KR20060087714A (en) * 2005-01-31 2006-08-03 (주)펨트론 System for measurement of thickness and surface profile

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6084712A (en) * 1998-11-03 2000-07-04 Dynamic Measurement And Inspection,Llc Three dimensional imaging using a refractive optic design
KR20000053779A (en) * 2000-04-10 2000-09-05 김성식 Three dimension measuring system using two dimensional linear grid patterns
KR20030056971A (en) * 2001-12-28 2003-07-04 (주) 인텍플러스 Tree demensional shape/surface illumination measuring apparatus
KR20060087714A (en) * 2005-01-31 2006-08-03 (주)펨트론 System for measurement of thickness and surface profile
KR20050026949A (en) * 2005-02-16 2005-03-16 이석한 3d depth imaging apparatus with flash ir source

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016040634A1 (en) * 2014-09-11 2016-03-17 Cyberoptics Corporation Point cloud merging from multiple cameras and sources in three-dimensional profilometry
CN106796721A (en) * 2014-09-11 2017-05-31 赛博光学公司 Point cloud in measuring three-dimensional profile according to multiple cameras and source merges
US10346963B2 (en) 2014-09-11 2019-07-09 Cyberoptics Corporation Point cloud merging from multiple cameras and sources in three-dimensional profilometry
CN106796721B (en) * 2014-09-11 2021-05-04 赛博光学公司 Point cloud merging from multiple cameras and sources in three-dimensional profile measurement
KR101865338B1 (en) * 2016-09-08 2018-06-08 에스엔유 프리시젼 주식회사 Apparatus for measuring critical dimension of Pattern and method thereof
CN115165920A (en) * 2022-09-06 2022-10-11 南昌昂坤半导体设备有限公司 Three-dimensional defect detection method and detection equipment

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