KR20080088946A - Apparatus for inspection of three-dimensional shape and method for inspection by the same - Google Patents

Abstract

An apparatus for inspecting a three-dimensional shape and an inspecting method using the same are provided to enhance reliability and accuracy of inspection by adjusting the reflectivity of each pixel. An apparatus for inspecting a three-dimensional shape comprises a light source(100), a grid pattern forming unit(110), and an imaging unit(120). The grid pattern forming unit generates a grid pattern on the surface of an object(P) to be inspected by changing the light generated from the light source. The imaging unit captures an image reflected from the surface. The three-dimensional shape of the object is measured from the captured image to detect whether the object has defects. The grid pattern forming unit includes a display control unit(111) in each pixel to form a predetermined grid pattern by controlling the brightness in each pixel according to the surface reflectivity of the object to be inspected.

Description

Three-dimensional shape inspection apparatus and three-dimensional shape inspection method using the same {APPARATUS FOR INSPECTION OF THREE-DIMENSIONAL SHAPE AND METHOD FOR INSPECTION BY THE SAME}

1 is a block diagram of a three-dimensional shape inspection apparatus according to a first embodiment of the present invention.

2 is a block diagram of a three-dimensional shape inspection apparatus according to a second embodiment of the present invention.

3 is a block diagram of a three-dimensional shape inspection apparatus according to a third embodiment of the present invention.

4 is a configuration diagram showing an example of a three-dimensional shape inspection device according to the prior art.

<Description of the symbols for the main parts of the drawings>

100: light source

110: grid pattern generating means

      111: display control means for each pixel, 112: projection lens

120: imaging means

      121: camera, 122: imaging lens

200: light source

210: projection means

      211: display control means for each pixel, 212: projection lens

220: light splitter

230: reflector

240: imaging means

      241 camera, 242 imaging lens

300: light source

310: projection means

      311: pixel-specific display control means, 312: projection lens

320: optical splitter

330: optical interference module

      331: objective lens, 332: interference plane, 330: optical splitter

340: imaging means

      341 camera, 342 imaging lens

P: Inspection target

The present invention relates to a three-dimensional shape inspection apparatus and an inspection method using the same, and more particularly, to a three-dimensional shape inspection apparatus and a three-dimensional shape inspection method that can arbitrarily adjust the reflectivity or visibility of the inspection target surface.

In general, various components having arbitrary shapes, such as semiconductor memory modules, must be precisely measured in dimensions, shapes, and surface roughness in order to confirm manufacturing conditions.

Therefore, recently, in order to measure a three-dimensional solid shape, the light generated from the light source is patterned as a reference and then projected onto the measurement object, and the shape of the measurement object is measured by comparing the light modified according to the shape of the measurement object with the reference pattern. An optical three-dimensional stereoscopic shape inspection method is used.

Such an optical three-dimensional three-dimensional shape inspection method requires high speed, high precision, and non-contact measurement. As an example of the three-dimensional three-dimensional shape inspection method meeting these conditions, an optical three-dimensional three-dimensional shape measurement method using a moire pattern is proposed. It has been done.

The moiré pattern refers to an interference pattern generated when two or more periodic patterns overlap. The moiré pattern is divided into a shadow moire and a projection moire according to the method of forming the moire pattern.

The projection moiré is a method of obtaining a mother body pattern by irradiating light to scan a lattice pattern on a measurement object, and superimposing a lattice image transformed according to the shape of the object onto a reference lattice having the same pitch as the scanned lattice.

4 is a configuration diagram showing an example of a three-dimensional shape inspection apparatus according to the prior art.

Referring to the drawings, the three-dimensional shape inspection apparatus is composed of a grid projection means 1, an inspection object 3, an imaging means 2, and an analysis means (not shown).

Here, the grid projection means 1 is to generate a predetermined pattern of image on the surface of the inspection object 3, for example, a semiconductor package, the rear end of the light source 11 and the light source 11 for irradiating light A lattice means 12 arranged on the surface of the inspection object 3 to generate a predetermined shadow image, and a rear end of the lattice means 12 to project an image generated by the lattice means 12 to the rear end. And a coaxial illumination means for irradiating coaxial illumination to the surface to be inspected, comprising a projection optical system 16 to be reflected, and a reflection mirror 14 to reflect the light projected from the projection optical system 16 to the surface of the inspection object 3. (4) and the reflection mirror 5 may be further provided.

In addition, the grating means 12 generates an interference signal having a lattice pattern on the surface of the inspection object 3 while moving up and down through fine driving by the PZT driver.

In addition, the inspection object 3 is not shown in the figure is transferred through the conveying means and placed on the inspection table.

The photographing means 2 is composed of a CCD camera 21 and an image optical system 22 for condensing light with a CCD camera as imaging means for capturing an image reflected from the surface of the inspection object 3. ) To the analysis means (not shown).

In addition, the analysis means (not shown), when the image analog signal photographed by the photographing means 2 is converted into a digital signal through a frame grabber and inputted, the analyzed image and the preset reference image are analyzed by analyzing the signal. The computer which compares with each other and determines whether the test object is defective is shown.

Looking at the inspection method using such a conventional three-dimensional shape inspection apparatus, first, when the light source 11 is operated, the light from the light source 11 passes through the grating means 12 is projected to the projection optical system 16, and then reflected Reflected by the mirror 14.

The reflected light is reflected on the surface of the inspection object 3 after forming a certain pattern of shadow images, that is, a lattice pattern.

In this way, the image reflected from the surface of the inspection object 3 is imaged through the CCD camera 21, and an analog signal of the captured image is obtained as a digital signal through analysis means (not shown).

Thereafter, the acquired image information and the preset reference image information are compared with each other to determine whether the inspection target is defective.

By the way, when using such a three-dimensional shape inspection apparatus must be provided with a grating means and a PZT driver.

That is, since the light from the light source passes through the grating means to generate a certain lattice pattern on the inspection target surface, a fine driving of the grating means using the PZT driver generates an interference signal according to the height of the inspection target surface. In addition, since the grating means and the PZT must be provided at the same time, there is a disadvantage in that the device becomes complicated.

In addition, since the reflectivity of the surface to be inspected is not uniform, there is a problem that it is difficult to accurately obtain an image of a pixel region having high reflectivity.

For example, when the BGA type is inspected, the BGA type is difficult to accurately acquire the image from the center rounding surface because the reflection on the center rounding surface of the ball is severe. Therefore, there is a disadvantage in that it is difficult to accurately acquire the image of the highly reflective part.

In order to solve this problem, a method of acquiring an image by reducing the specular reflection of the specular reflection surface by using a filter or an amount of light is used. It did not appear well, causing a problem of poor measurement accuracy.

 An object of the present invention for solving the problems according to the prior art, by using a display control means for each pixel to form a random pattern so that the overall visibility of the surface to be inspected uniformly, or inspection by adjusting the reflectivity for each pixel It is to provide a three-dimensional shape inspection apparatus and a three-dimensional shape inspection method for making the overall reflectivity of the target surface uniform.

The three-dimensional shape inspection apparatus according to the first aspect of the present invention for solving the above technical problem, the grid pattern generating means for generating a grid pattern on the surface of the inspection target (P) by modifying the light source and the light generated from the light source, and An image pickup means for picking up an image reflected from the surface of the inspection object P, and a three-dimensional shape inspection device for measuring a three-dimensional shape of the measurement target from the image picked up by the image pickup means and determining the presence or absence of a defect in the inspection target through a measurement result. The present invention relates to a grid pattern generating means including pixel-specific display control means for generating an arbitrary grid pattern by performing brightness control for each pixel according to the surface reflectivity of the inspection object (P).

Further, the three-dimensional shape inspection device according to the second aspect of the present invention includes a beam splitter for distributing a light source and light from the light source to an inspection target surface and a reflector, and a projection for projecting light from the light source to the beam splitter. Means, an image pickup means for obtaining a light pattern reflected and superimposed from the surface of the inspection object P and a reflector, and measuring a three-dimensional shape of the measurement object from an image captured by the image pickup means, and measuring a defect of the inspection object through a measurement result. A three-dimensional shape inspection apparatus for determining the presence or absence, the projection means is a pixel for controlling the brightness of the light for each pixel incident to the beam splitter so that arbitrary brightness control is performed for each pixel according to the surface reflectivity of the inspection target (P) A star display control means, wherein the reflector is complementary to the pixel-by-pixel brightness of the projection means. To a pixel by the display control means to the control group.

Moreover, the three-dimensional shape inspection apparatus which concerns on 3rd aspect of this invention is a beam splitter which guides a light source and the light from the said light source to the inspection object surface direction, and projection means which projects the light from the said light source to the said beam splitter; And an optical interference module for irradiating light from the beam splitter to a surface to be inspected and forming an interference light pattern based on light reflected from the surface to be inspected, and an image pickup means for obtaining the interference light pattern formed by the optical interference module. And a three-dimensional shape inspection device for measuring a three-dimensional shape of a measurement object from an image picked up by the image pickup means, and determining the presence or absence of a defect of the inspection object through a measurement result. It includes a pixel-by-pixel display control means for adjusting the brightness of the pixel-by-pixel light according to the pixel-by-pixel reflectivity.

According to various aspects of the present invention, the display control means for each pixel uses a digital optical technology method of generating an image through a digital micromirror element in which a plurality of fine driving mirrors in which a pixel matrix is arranged and driving is controlled are integrated. The display control means for each pixel may further include a color realization means for irradiating the digital micromirror element by implementing color on the white light emitted from the light source.

Alternatively, the display control means for each pixel may use an LCD projector method of generating an image through an LCD panel.

In addition, the three-dimensional shape inspection method according to the first aspect of the present invention for solving the above technical problem is a step of forming a lattice pattern on the surface to be inspected by arbitrarily modifying the light emitted from the light source, A three-dimensional shape inspection method comprising the step of imaging the image reflected from the formed inspection object surface, and analyzing the captured image and determining the presence or absence of defects of the inspection object, the three-dimensional shape inspection method on the surface of the inspection object The forming step is to perform arbitrary brightness control for each pixel of the grid pattern by using the display control means for each pixel.

In addition, the three-dimensional shape inspection method according to the second aspect of the present invention for solving the above technical problem is to irradiate the light emitted from the light source with a beam splitter by using a projection means to the light to be divided in the beam splitter and the inspection target surface Projecting the reflector to overlap the light reflected from the surface to be inspected with the light reflected from the reflector to form an interference light pattern, imaging the interference light pattern, analyzing the captured image, and analyzing the The three-dimensional shape inspection method comprising the step of determining whether there is a defect, wherein the step of forming the interference light pattern is a light so as to have an arbitrary brightness for each pixel of the inspection target surface by using a projection means consisting of display control means for each pixel Projecting the pattern, and complementarity with brightness of the light pattern formed by the projection means It is made of a process of forming the brightness using the light reflector made of a pattern in each pixel of the display control means.

In addition, the three-dimensional shape inspection method according to the third aspect of the present invention for solving the above technical problem, the step that the light emitted from the light source is reflected by the optical interference module from the inspection target surface and the reference surface to form an interference light pattern And imaging the interference light pattern, and analyzing the picked-up image and determining whether there is a defect of an object to be inspected, wherein the forming of the interference light pattern is performed on a pixel-by-pixel basis. By using the display control means to have a predetermined brightness pattern for each pixel of the light pattern incident to the optical interference module.

The invention will become more apparent through the preferred embodiments described below with reference to the accompanying drawings. Hereinafter will be described in detail to enable those skilled in the art to easily understand and reproduce through embodiments of the present invention.

1 is a block diagram of a three-dimensional shape inspection apparatus according to a first embodiment of the present invention, which includes a light source 100, a grid pattern generating unit 110, and an imaging unit 120.

Here, the lattice pattern generating means 110 generates a lattice pattern on the surface of the inspection object P by deforming the light generated from the light source, and performs brightness control for each pixel according to the surface reflectivity of the inspection object P. And a projection lens 112 for projecting the lattice pattern formed through the pixel-by-pixel display control means 111 onto the surface of the inspection target P. .

In this case, the pixel-specific display control unit 111 uses a digital optical technology that generates an image by using a digital micromirror element in which a plurality of fine driving mirrors each of which is arranged in a pixel matrix and whose driving is controlled are integrated.

In addition to this, although not shown in the drawing, a color implementer may be further provided to implement color on the white light emitted from the light source 100 and irradiate the digital micromirror element.

Here, a digital micro mirror device (DMD) is a semiconductor chip developed by Texas Instruments Inc., and is a device in which a plurality of micro drive mirrors in which a pixel matrix is arranged and rotation is controlled by respective drive means are integrated.

Each of the fine driving mirrors constituting the digital fine mirror element represents a single pixel and is individually turned on and off according to a control device to transfer appropriate image information to the surface of the inspection object. Since it is already known, a detailed description thereof will be omitted.

In addition, the pixel-specific display control unit 111 may use an LCD projector method for generating an image through the LCD panel.

On the other hand, the imaging means 120 is composed of a CCD camera 121 for imaging the image reflected from the surface of the inspection target (P) as a known technique, and an imaging lens 122 for condensing light with the CCD camera 121. Can be.

Such a three-dimensional shape inspection method using the three-dimensional shape inspection apparatus according to the first embodiment of the present invention will be briefly described as follows.

The three-dimensional shape inspection method according to the first embodiment of the present invention comprises the steps of forming a lattice pattern on the surface of the inspection object by arbitrarily modifying the light emitted from the light source, and the image reflected from the inspection object surface on which the lattice pattern is formed. The method relates to a three-dimensional shape inspection method comprising the steps of imaging and analyzing the captured image and determining the presence or absence of defects in the inspection object, wherein the forming of the grid pattern on the surface of the inspection object uses display control means for each pixel. By controlling the brightness of each pixel of the grid pattern.

In more detail, the inspection object P is not uniform in its overall reflectivity and shows a difference for each pixel. When the inspection object P forms a grid pattern having the same brightness on the inspection object having a difference in reflectance for each pixel, Grid images are not reliable.

Thus, in the first embodiment of the present invention, the light from the light source 100 is irradiated to the surface to be inspected to form a grid pattern, the display control means for each pixel so that the visibility can be maximized according to the reflectivity of the surface to be inspected Brightness is arbitrarily controlled for each pixel by using 111.

Here, in the case of using the digital micromirror element as the display control means 111 for each pixel, the grid pattern is generated by projecting an arbitrary pattern on the surface of the inspection object by changing the angle by controlling the driving of each integrated microdrive mirror. Be sure to

At this time, the brightness for each pixel of the pattern projected onto the surface of the inspection object is arbitrarily set appropriately according to the reflectivity of the inspection object surface, so that the visibility of the image captured by the imaging means appears uniformly, thereby improving measurement accuracy. Can be.

For example, a pixel region having high reflectivity forms a grid pattern having a low brightness and a pixel region having a low reflectivity forms a grid pattern having a bright brightness to compensate for the difference caused by the difference in brightness for each pixel to overcome the difference in reflectivity.

In addition, the present invention can control the color implementation method of the grid pattern irradiated according to the color of the surface of the inspection target (P) through the color implementation.

For example, in the pixel area where the red (R) is strong on the surface to be inspected, when the red (R) forms a strong lattice pattern, the red (R) is weak in this case because the visibility of the obtained lattice pattern is low. It is preferable to form a lattice pattern in which colors other than that appear strongly.

As described above, the first embodiment of the present invention forms a grid pattern having appropriate brightness for each pixel according to the difference in reflectivity of each pixel on the surface of the inspection object P by using the pixel-by-pixel display control means, thereby making the overall visibility uniform. By doing so, it is possible to solve the problem of the prior art that the accuracy of the obtained image due to the difference in reflectivity of the surface of the inspection object (P) is reduced.

In addition, conventionally, since the grid pattern is generated on the surface to be inspected using the grid means and the PZT driver, the configuration of the equipment is complicated, but the present invention does not require a separate grid means and the PZT driver, thereby simplifying the equipment configuration.

2 is a block diagram of a three-dimensional shape inspection apparatus according to a second embodiment of the present invention, which includes a light source 200, a projection means 210, a beam splitter 220, a reflector 230, and an imaging unit 240. It is configured to include).

Here, the projection means 210 projects the light from the light source 200 to the beam splitter 220, and the display control means for each pixel to perform arbitrary brightness control for each pixel according to the surface reflectivity of the inspection target P. 211 and a projection lens 212 for projecting the light subjected to brightness control by the pixel-specific display control means 211 to the beam splitter 220.

In addition, the reflector 230 provides a light pattern having a brightness complementary to the light pattern emitted from the display control means 211 for each pixel constituting the projection means 210.

Here, the display control means for each pixel may use a digital optical technology method for generating an image through a digital micromirror element or an LCD projector method for generating an image through an LCD panel.

The imaging means 240 comprises a camera 241 and an imaging lens 242 as already known in the art.

Hereinafter, a brief description of a method using a three-dimensional shape inspection apparatus according to the second embodiment of the present invention.

According to a second embodiment of the present invention, light emitted from a light source is irradiated to a beam splitter by using a projection means to project light split by the beam splitter onto a surface to be inspected and a reflector to reflect light from the surface to be inspected and a reflector. It relates to a three-dimensional shape inspection method comprising the step of overlapping the reflected light to form an interference light pattern, imaging the interference light pattern, and analyzing the captured image and determining the presence of defects of the inspection object The forming of the interference light pattern includes the steps of projecting the light pattern to have an arbitrary brightness for each pixel of the inspection target surface by using a projection means composed of pixel-by-pixel display control means, and the brightness of the light pattern formed by the projection means. Complementary brightness of light pattern using a reflector composed of display control means for each pixel It is made of a process of sex.

More specifically, the light emitted from the light source 200 is divided into the reference light beam R1 and the measurement light beam M1 through the beam splitter 220, and the light emitted from the light source 200 is reflected on the reflector 230 and the surface of the inspection object P, respectively. Incident.

Then, the reference light beam R1 and the measurement light beam M1 are respectively reflected on the reflector 230 and the inspection target P surface and returned to the beam splitter 220, and a part of the reference light beam R1 and the measurement light beam M1 are emitted to the imaging means 240, respectively. .

The reference light beam R1 and the measurement light beam M1 thus emitted are superposed with each other to form an interference fringe.

At this time, the second embodiment of the present invention changes the path of the light from the light source 200 to the projection means 210 and enters the beam splitter 220 according to the characteristic aspect, but reflects the reflectivity of the surface of the inspection object P. Accordingly, a light pattern controlled to have an arbitrary brightness for each pixel is provided.

Then, the reflector 230 is used to reflect the light pattern having a brightness complementary to the brightness of the light pattern provided by the projection means 210.

Accordingly, the interference fringe formed by the overlap of the measurement light beam M1 reflected from the surface of the inspection object P and the measurement light beam R1 reflected from the reflector 230 is compensated for brightness of each pixel to maximize visibility.

3 is a block diagram showing a three-dimensional shape inspection apparatus according to a third embodiment of the present invention, the light source 300, the projection means 310, the beam splitter 320, the optical interference module 330 and the imaging And means 340.

Here, the projection means 310 projects the light from the light source 300 to the beam splitter 320, and the beam splitter 320 guides the light from the light source 300 in the direction of the inspection object P surface.

In addition, the optical interference module 330 irradiates the light from the beam splitter 320 to the surface to be inspected and forms an interference light pattern based on the light reflected from the surface to be inspected. Acquiring the interference light pattern formed by 330, it may be composed of a camera 341 and the imaging lens 342.

More specifically, the optical interference module 330 is composed of the objective lens 331, the reference plane 332 and the beam splitter 333 to irradiate the light pattern incident on the beam splitter 333 to the surface to be inspected. The reference surface 332 forms a reference beam for the light collected by the objective lens 331, and the beam splitter 333 forms a measurement beam for measuring the shape / surface roughness of the inspection target P.

Thus, the formed reference light beam and the measurement light beam are incident on the reference plane 332 and the surface of the inspection object P, respectively, and the plurality of light beams are reflected by the reference plane 332 and the surface of the inspection object P to reflect the interference light pattern. To form.

On the other hand, the projection means 310 includes a pixel-by-pixel display control means 311 and a projection lens 312 to adjust the brightness of the pixel-specific light according to the pixel-by-pixel reflectivity of the inspection target (P) surface.

Accordingly, the present invention controls the brightness of the light pattern incident to the optical interference module 330 for each pixel using the display control means 310 for each pixel, thereby overcoming the difference in visibility caused by the difference in reflectance of the surface to be inspected. can do.

Hereinafter, a brief description of a method using a three-dimensional shape inspection apparatus according to the third embodiment of the present invention.

According to a third embodiment of the present invention, light emitted from a light source is reflected from an inspection target surface and a reference plane by an optical interference module to form an interference light pattern, and imaging the interference light pattern; A three dimensional shape inspection method comprising analyzing an image and determining a defect of an inspection object, wherein the forming of the interference light pattern comprises a method for determining the interference pattern of the light pattern incident to the optical interference module using a pixel-specific display control means. Each pixel has an arbitrary brightness pattern.

In other words, the light pattern incident on the beam splitter 320 is controlled to have an arbitrary brightness for each pixel in the inspection object surface reflectivity using the pixel-specific display control means 311.

In this way, the light pattern formed by the pixel-by-pixel display control unit 311 to have an arbitrary brightness for each pixel is incident to the objective lens 331 through the beam splitter 320.

The light pattern is collected by the objective lens 331 to form the reference light beam by the reference plane 332, and the measurement light beam by the beam splitter 333.

The reference reference beam and the measurement beam thus formed are incident on the reference plane 332 and the surface of the inspection object P, respectively, and the plurality of beams are reflected by the reference plane 332 and the surface of the inspection object P to reflect the interference light pattern. Since it forms, the interference light pattern is picked up through an imaging means and the three-dimensional shape of a test object is measured.

 As described above, the present invention uses a display control means for each pixel to form a random pattern such that the overall visibility of the surface to be inspected is uniform, or by uniformizing the total reflectivity of the surface to be inspected by adjusting the reflectivity for each pixel. In addition, there is an advantage in that inspection reliability can be improved by preventing a decrease in inspection accuracy due to a difference in illumination reflectivity or a difference in visibility.

Although the present invention has been described with reference to the accompanying drawings, it will be apparent to those skilled in the art that many different and obvious modifications are possible without departing from the scope of the invention from this description. Therefore, the scope of the invention should be construed by the claims described to include many such variations.

Claims (12)

The light source 100, Grid pattern generating means 110 for generating a grid pattern on the surface of the inspection object (P) by modifying the light generated from the light source 100, Imaging means 120 for imaging an image reflected from the surface of the inspection object P; In the three-dimensional shape inspection apparatus for measuring the three-dimensional shape of the object to be measured from the image captured by the imaging means 120 to determine the presence or absence of defects of the inspection object through the measurement results The grid pattern generating means (110); And a display control means (111) for each pixel for generating an arbitrary grid pattern by controlling brightness for each pixel according to the surface reflectivity of the inspection target (P). A light source 200, A beam splitter 220 for distributing the light from the light source 200 to the surface of the object P and the reflector 230; Projection means 210 for projecting light from the light source 200 onto the beam splitter 220; Imaging means 240 for obtaining a light pattern reflected from the surface of the inspection object (P) and the reflector 230 and overlapping, In the three-dimensional shape inspection apparatus for measuring the three-dimensional shape of the object to be measured from the image captured by the imaging means 240 to determine the presence or absence of defects of the inspection object through the measurement results The projection means (210); And a pixel-specific display control unit 211 for controlling brightness of pixel-by-pixel light incident on the beam splitter 220 so that an arbitrary brightness control is performed for each pixel according to the surface reflectivity of the inspection object P. The reflector (230) is a three-dimensional shape inspection device characterized in that it comprises a pixel-specific display control means (231) for complementary brightness control for the pixel-by-pixel brightness of the projection means (210). A light source 300, A beam splitter 320 for guiding the light from the light source 300 toward the inspection target surface; Projection means (310) for projecting light from the light source (300) onto the beam splitter (320), An optical interference module 330 for irradiating light from the beam splitter 320 to a surface to be inspected and forming an interference light pattern based on light reflected from the surface to be inspected; An imaging unit 340 for acquiring an interference light pattern formed by the optical interference module 330; In the three-dimensional shape inspection apparatus for measuring the three-dimensional shape of the object to be measured from the image captured by the imaging means 340 to determine the presence or absence of defects of the inspection object through the measurement result, The projection means (310); And per-pixel display control means (311) for controlling brightness of per-pixel light according to the per-pixel reflectivity of the inspection target (P) surface. The method according to any one of claims 1 to 3, The pixel-specific display control means (111, 211, 311); And a digital optical technique for generating an image through a digital micromirror element in which a plurality of fine driving mirrors each of which is arranged in a pixel matrix and whose driving is controlled are integrated. The method of claim 4, wherein The pixel-specific display control means (111, 211, 311); And a color realization means (211) for implementing color on the white light emitted from the light source (100, 200, 300) and irradiating the digital micromirror element (212). The method according to any one of claims 1 to 3, The pixel-specific display control means (111, 211, 311); 3D shape inspection apparatus characterized by using the LCD projector method for generating an image through the LCD panel. Arbitrarily modifying the light emitted from the light source to form a lattice pattern on the surface to be inspected; Photographing an image reflected from an inspection target surface on which the grid pattern is formed; In the three-dimensional shape inspection method comprising the step of analyzing the captured image and determining the presence or absence of a defect of the inspection object, Forming a lattice pattern on the surface of the inspection object; And an arbitrary brightness control for each pixel of the grid pattern using the pixel-by-pixel display control means. The light emitted from the light source is irradiated to the beam splitter by using a projection means to project the light split from the beam splitter onto the surface to be inspected and the reflector so that the light reflected from the surface to be inspected overlaps with the light reflected from the reflector, thereby causing interference light patterns. Forming a; Imaging the interference light pattern; In the three-dimensional shape inspection method comprising the step of analyzing the captured image and determining the presence or absence of a defect of the inspection object, Forming the interference light pattern; Projecting a light pattern to have an arbitrary brightness for each pixel of the inspection target surface by using projection means formed of pixel-by-pixel display control means; And forming a light pattern having a brightness complementary to that of the light pattern formed by the projection means by using a reflector composed of display control means for each pixel. The light emitted from the light source is reflected by the optical interference module from the surface to be inspected and the reference plane to form an interference light pattern; Imaging the interference light pattern; In the three-dimensional shape inspection method comprising the step of analyzing the captured image and determining the presence or absence of a defect of the inspection object, Forming the interference light pattern; And a predetermined brightness pattern for each pixel of the light pattern incident to the optical interference module by using the pixel-specific display control means. The method according to any one of claims 7 to 9, Forming the interference light pattern; And a digital optical technique for generating an image through a digital micromirror element in which a plurality of fine drive mirrors each of which is arranged in a pixel matrix and in which driving is controlled are integrated. The method of claim 10, Forming the interference light pattern; 3. The method of claim 3, further comprising color implementing means for implementing color on the white light emitted from the light source and irradiating the digital micromirror element. The method according to any one of claims 7 to 9, Forming the interference light pattern; The three-dimensional shape inspection method characterized by using an LCD projector method for generating an image through the LCD panel.

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