TW200829856A - Method of measuring the surface contour of object by the use of coherence envelope peak detection - Google Patents
Method of measuring the surface contour of object by the use of coherence envelope peak detection Download PDFInfo
- Publication number
- TW200829856A TW200829856A TW96100501A TW96100501A TW200829856A TW 200829856 A TW200829856 A TW 200829856A TW 96100501 A TW96100501 A TW 96100501A TW 96100501 A TW96100501 A TW 96100501A TW 200829856 A TW200829856 A TW 200829856A
- Authority
- TW
- Taiwan
- Prior art keywords
- optical path
- tested
- light
- measuring
- interference wave
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 73
- 238000012360 testing method Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 11
- 238000007796 conventional method Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000015096 spirit Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96100501A TW200829856A (en) | 2007-01-05 | 2007-01-05 | Method of measuring the surface contour of object by the use of coherence envelope peak detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96100501A TW200829856A (en) | 2007-01-05 | 2007-01-05 | Method of measuring the surface contour of object by the use of coherence envelope peak detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200829856A true TW200829856A (en) | 2008-07-16 |
| TWI306150B TWI306150B (enrdf_load_stackoverflow) | 2009-02-11 |
Family
ID=44818112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96100501A TW200829856A (en) | 2007-01-05 | 2007-01-05 | Method of measuring the surface contour of object by the use of coherence envelope peak detection |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200829856A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114001657A (zh) * | 2021-09-26 | 2022-02-01 | 河北大学 | 基于低相干光串联干涉的量块长度校准装置和校准方法 |
-
2007
- 2007-01-05 TW TW96100501A patent/TW200829856A/zh not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114001657A (zh) * | 2021-09-26 | 2022-02-01 | 河北大学 | 基于低相干光串联干涉的量块长度校准装置和校准方法 |
| CN114001657B (zh) * | 2021-09-26 | 2023-06-13 | 河北大学 | 基于低相干光串联干涉的量块长度校准装置和校准方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI306150B (enrdf_load_stackoverflow) | 2009-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4482618B2 (ja) | 膜厚測定装置及び膜厚測定方法 | |
| CN107238484B (zh) | 透明显示屏清晰度的检测方法和检测装置 | |
| KR20120014547A (ko) | 패턴 측정 장치 및 패턴 측정 방법 | |
| CN110268221A (zh) | 线绳测量装置和线绳测量方法 | |
| WO2009113149A1 (ja) | パターン測長装置及びパターン測長方法 | |
| TW200829856A (en) | Method of measuring the surface contour of object by the use of coherence envelope peak detection | |
| JP2010060385A (ja) | 液膜厚の測定装置及び測定方法 | |
| JP3265724B2 (ja) | 荷電粒子線装置 | |
| US6188217B1 (en) | Inductive measurement device for determining dimensions of objects | |
| JP5929518B2 (ja) | 表面形状測定方法および表面形状測定装置 | |
| CN101245993A (zh) | 侦测待测物表面的轮廓的测量方法 | |
| KR100428845B1 (ko) | 포터블용 강판 표면의 스케일층 측정장치 및 방법 | |
| TW200846622A (en) | Measuring method that detects the surface contour of a test object by utilizing the detection of the peak of an interference wave | |
| CN103471505B (zh) | 过孔的检测方法和检测装置 | |
| JP2001264251A (ja) | 光沢計測方法 | |
| KR100363949B1 (ko) | 권선의 외관 불량 검출 장치 | |
| JP7269545B2 (ja) | 検査装置、検査方法及びロール体 | |
| JP2002022667A (ja) | 表面検査装置 | |
| JP3016502B2 (ja) | 表面粗さ計測装置 | |
| CN110918407A (zh) | 一种双面多段涂布自动对位的方法 | |
| JPH0554883B2 (enrdf_load_stackoverflow) | ||
| JP3855502B2 (ja) | 印刷物及びその真偽判別方法並びにその真偽判別装置 | |
| JP3255702B2 (ja) | 二次元測定機における測定結果の表示方法 | |
| JPH10300435A (ja) | 計測方法及び膜厚計測装置 | |
| JPS60242343A (ja) | 複写物の品質評価装置およびその使用方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |