200824882 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種轉印微細形狀而在表面具有該微 細的立體形狀之薄片的製造方法及製造裝置。 【先前技術】 在樹脂薄片等表面成形微細的凹凸等立體形狀之方 法，已知有一種方式（專利文獻1 - 2 )，係藉由使已加熱之具 有微細的凹凸之模具加熱樹脂薄片等，來使該凹凸立體形 狀轉印至該樹脂薄片之方法。 但是，該方法在將微細形狀轉印成形至大面積樹脂薄 片時，因爲在轉印面之模具與被加工薄片之間咬入空氣， 會有無法完全地轉印微細的立體形狀而造成轉印不良之問 題。 該咬入空氣之問題係在被處理薄片狀基材厚度不均、 或加壓板的平面性不均時產生。 爲了解決此種問題，上述專利文獻2提案揭示一種方 法及裝置，係在加壓板開始抵接時，使轉印板以對樹脂薄 片突出的方式彎曲，然後藉由在該狀態加壓，邊從賦形面 的中央附近排除空氣、邊使加壓板繼續接觸薄膜，來轉印 微細形狀，具體上，該彎曲係藉由不同彈性的彈簧構件來 實施。 但是，因爲該方法係藉由不同彈性的彈簧來彎曲加壓 板，即便藉由加壓機加壓而平坦化，由於突出部的壓力較 高等，在賦形面會產生面壓分布，因此，在賦形面內之微 200824882 細形狀的轉印精確度不同，結果仍然無法得到均勻的轉印 精確度。這種情形特別是表面形狀越微細時越顯著，又， 因爲面壓分布不同，亦影響所得到加工完成的薄膜的厚 度’乃是不佳。而且欲變形量變化時，每次都必須費時更 換彈簧構件或其支撐器的位置，乃是不實際的。 [專利文獻1 ]特開平5 _ 6 0 9 2 0號公報 [專利文獻2]特開2006-35573號公報 【發明內容】 [發明所欲解決之課題] 鑒於上述問題點，本發明的目的係提供一種微細形狀 轉印片之製法及製造裝置，該微細形狀轉印片之製法係藉 由加熱薄片狀基材及具備有微細凹凸形狀之模具，並使兩 者藉由接觸、加壓，而將微細凹凸形狀賦形於薄片狀基材 表面時，在轉印面不會產生因空氣被咬入模具與薄片狀基 材之間所產生的轉印不良，而能夠將需要的微細凹凸形狀 形成於表面。 [解決課題之手段] 爲了達成上述目的，本發明的微細形狀轉印片之製法 係藉由以下（1 )構成。 (1) 一種微細形狀轉印片之製法，其係加熱具備有薄 片狀基材及微細凹凸形狀之模具，並使兩者藉由接觸、加 壓’而將微細凹凸形狀賦形於薄片狀基材表面之微細形狀 轉印片之製法，其特徵係改變賦形面（藉由以加壓前述薄片 狀基材及模具的方式配置之一對加壓板或模具中之至少一 200824882 者或其組合所構成）的平面性而進行賦形。 又，如此本發明的微細形狀轉印片之製法，更具體地， 較佳是由以下（2)或（3)的構成所構成。 (2) 如上述（1)之微細形狀轉印片之製法，其中在改變 前述賦形面的平面性而進行賦形時，最初係從薄片狀基材 的賦形面內的一點開始加壓，且改變賦形面的平面性來使 加壓力往薄片狀基材的周邊部慢慢地降低。 (3) 如上述（1)或（2)之微細形狀轉印片之製法，其中在 改變前述賦形面的平面性而進行賦形時，在賦形開始後， 改變賦形面的平面性來使賦形面內的加壓力均勻。 又，爲了達成上述的目的，本發明之另外的微細形狀 轉印片之製法，其係由以下（4)的構成所構成之物。 (4) 一種微細形狀轉印片之製法，其係藉由加熱具備 有薄片狀基材及微細凹凸形狀之模具，並使該薄片狀基材 與模具兩者接觸而加壓，來將微細凹凸形狀賦形於薄片狀 基材表面之微細形狀轉印片之製法，其特徵係調整溫度’ 使自賦形面（藉由以加壓前述薄片狀基材及模具的方式配 置之一對加壓板或模具中之至少一者或其組合所構成）內 的一點，往薄片狀基材的周邊部慢慢地降低溫度來進行賦 形。 又，此種本發明的微細形狀轉印片之製法，更具體地’ 係以由以下（5 )或（6 )的構成所構成爲佳。 (5) 如上述（4)之微細形狀轉印片之製法，其中進行調 整溫度，使前述賦形面的平面性比在前述薄片狀基材的賦 200824882 形面之厚度分布的最大値更大。 (6 )如上述（4)或（5 )之微細形狀轉印片之製法，其中在 賦形時之前述模具與前述薄片狀基材接觸時點，前述賦形 面的一點的溫度係以比前述賦形面的其他部位的溫度更 高、且賦形開始後溫度差變小的方式來使其變化。 又，爲了達成上述的目的，本發明的微細形狀轉印片 的裝置，具有以下（7)的構成。 (7) —種微細形狀轉印片之製造裝置，係具備有薄片 狀基材、具有微細凹凸形狀之模具、及用以加熱、加壓該 薄片狀基材及該模具之手段之微細形狀轉印片之製造裝 置，其特徵係賦予模具及/或一對加壓板溫度梯度，使自賦 形面（藉由以加壓前述薄片狀基材及模具的方式配置之一 對加壓板或模具中之至少一者或其組合所構成）內的一 點，往薄片狀基材的周邊部慢慢地降低溫度。 又，此種本發明的微細形狀轉印片之製造裝置，以由 以下（8)〜（14)中任一項的構成所構成爲佳。 (8) 如（7)之微細形狀轉印片之製造裝置，其中在前述 模具設置溫度調整手段，係賦予模具設置溫度梯度，使自 模具的賦形面內的一點往薄片狀基材的周邊部慢慢地降低 溫度。 (9) 如（7)或（8)之微細形狀轉印片之製造裝置，其係具 有加熱該加壓板或該模具之加熱源的功率密度在賦形面內 的一點比在其他位置高的結構。 (10) 如（7 )〜（9 )中任一項之微細形狀轉印片之製造裝 200824882 置，其係具有使用電阻加熱式加熱器做爲加熱該加壓板或 該模具之加熱手段、且設置在加壓板或模具之加熱器配線 的密度在賦形面內的一點比在其他位置高的結構。 (11) 如（7)〜（10)中任一項之微細形狀轉印片之製造 裝置，其係具有使用熱媒做爲加熱該加壓板或該模具之加 熱手段、且設置在加壓板或模具之熱媒流路的密度在賦形 面內的一點比在其他位置高的結構。 (12) 如（7)〜（11)中任一項之微細形狀轉印片之製造 裝置，其中設置有用以使前述加壓板或前述模具在其賦形 面內於廣範圍上升溫度之加熱手段、及用以使任意點上升 溫度之獨立的加熱手段之2種系統。 (13) 如（7)〜（12)中任一項之微細形狀轉印片之製造 裝置，其中設置有用以使前述加壓板或前述模具在其賦形 面內於廣範圍上升溫度之加熱手段、及用以使賦形面的周 邊部下降溫度之獨立的冷卻手段之2種系統。 (14) 如（7)〜（13)中任一項之微細形狀轉印片之製造 % 裝置，其中設置有前述薄片狀基材的厚度測定手段，與用 以發送來自該厚度測定手段的信號來控制前述加熱手段、 及冷卻手段之發信手段。 [發明之效果] 依照本發明方法、裝置時，具有使模具及/或加壓板本 身具有控制平面性（賦形面的平面性）之功能，而能夠按照 模具狀態來操作彎曲量、位置之特徵’且加壓後能夠邊排 除空氣、邊使其移動至均勻面狀態° -10- 200824882 因此，在加壓後使賦形面內的壓力均勻化之同時，因 爲能夠排除空氣，所以不會咬入空氣，而能能夠得到均勻 且高精確度的轉印成形狀態。 依照本發明的微細形狀轉印片之製法、製造裝置時， 能夠良好地製造在表面轉印有微細形狀的薄片。 【實施方式】 以下，邊參照圖示等、邊更詳細地說明本發明的微細 形狀轉印片之製法、及製造裝置。 本發明的微細形狀轉印片之製法係加熱具備有薄片狀 基材及微細凹凸形狀之模具，並使兩者藉由接觸、加壓， 而將微細凹凸形狀賦形於薄片狀基材表面之微細形狀轉印 片之製法，其特徵係改變賦形面（藉由以加壓前述薄片狀基 材及模具的方式配置之一對加壓板或模具中之至少一者或 其組合所構成）的平面性而進行賦形。 在此，「賦形面的平面性」係指「以加壓板與模具之間 的間隙之方式所形成的平板狀空間的平面程度」，「改變平 面性」係指改變其平面性程度。又，在此，該賦形面的平 面性不只是加壓板與模具之組合，在上下使用模具時、而 且在此情況使用加壓板時亦同樣。 於本發明的方法，在改變該賦形面的平面性時，最初 係從薄片狀基材的賦形面內的一點開始加壓，且改變平面 性使加壓力往薄片狀基材的周邊部慢慢地變小。亦即，邊 從賦形面的中央附近排除空氣、邊繼續加壓，特別是最初 的加壓點不必是賦形面的中央中心部，亦可以是位於賦形 -11- 200824882 面的周邊端部附近之一點。從該周邊端部附近之一點開始 加壓時，係改變平面性，使加壓力往位於其相反側之周邊 端部側慢慢地變小。 在此，「改變平面性使加壓力慢慢地變小」係指對賦形 面各單位面積施加的壓力係以慢慢地變小之方式進行。 在改變該賦形面的平面性時，在賦形開始後，改變賦 形面的平面性來使賦形面內的加壓力均勻爲佳。在此所稱 「賦形開始後」係指薄片狀基材的賦形面內的一點係與模 具及/或加壓板接觸且自最初開始加壓的狀態後，在成爲該 狀態之後，進行控制使加壓力均勻係有效的。 如上述的加壓力的一系列的控制係藉由對加壓板或模 具進行部分性加熱，使其產生部分性熱膨脹變形，抵接於 薄片狀基材之模具，能夠藉由最初係在某一點部分抵接， 隨壓加壓而抵接部分往周邊部擴展的方式進行，具體上， 係藉由以下說明之本發明的具體方法來進行。 亦即，本發明的微細形狀轉印片之製法，具體上係藉 % 由加熱具備有薄片狀基材及微細凹凸形狀之模具，並使該 薄片狀基材與模具兩者接觸而加壓，來將前述微細凹凸形 狀賦形於前述薄片狀基材表面之微細形狀轉印片之製法， 其係調整溫度使自賦形面（藉由以加壓前述薄片狀基材及 模具的方式配置之一對加壓板或模具中之至少一者或其組 合所構成）內的一點往薄片狀基材的周邊部慢慢地降低溫 度，來進行賦形之方法。 在如此的方法，較佳是進行調整溫度，使前述賦形面 -12- 200824882 的平面性比在前述薄片狀基材的賦形面之厚度分布的最大 値更大，在此「賦形面的平面性比在前述薄片狀基材的賦 形面之厚度分布的最大値更大」係指平面性程度的數値係 比薄片厚度分布的最大値更大之狀態。 又，較佳是在賦形時之模具與薄片狀基材接觸時點， 前述賦形面的一點的溫度比其他部位的溫度高，且賦形開 始後以溫度差變小的方式使其變化。 本發明之上述的具體方法，能夠藉由以下說明之本發 明的微細形狀轉印片之製造裝置來進行。 亦即，一種微細形狀轉印片之製造裝置，係具備有薄 片狀基材、具有微細凹凸形狀之模具、及用以加熱、加壓 該薄片狀基材及該模具之手段之微細形狀轉印片之製造裝 置，其特徵係賦予模具及/或一對加壓板溫度梯度，使自賦 形面（藉由以加壓前述薄片狀基材及模具的方式配置之一 對加壓板或模具中之至少一者或其組合所構成）內的一點 往薄片狀基材的周邊部慢慢地降低溫度。 第1圖係模式性例示適合用以實施本發明微細形狀轉 印片之製法的本發明微細形狀轉印片之製造裝置的一個實 施態樣之槪略正面圖。第2圖係模式性例示適合用以實施 本發明微細形狀轉印片之製法的本發明微細形狀轉印片之 製造裝置的另外一個實施態樣之槪略正面圖。 在第1圖、第2圖中，1係微細形狀轉印片製造裝置、 2係加壓裝置、3係模具、4係薄片狀基材、5係上溫度調 整板、6係下溫度調整板、7係中央加熱用熱媒流路、8係 -13- 200824882 熱媒循環裝置、9係冷卻水熱循環裝置、1 0係中央加熱用 加熱器’賦予模具及/或一對加壓板溫度梯度，使自賦形面 內的一點往薄片狀基材的周邊部慢慢地降低溫度，在第1 圖的態樣係藉由特別設置之中央加熱用熱媒流路7、在第2 圖的態樣係藉由特別設置之中央加熱用加熱器1 0來實 現。因此，該第1圖、2圖所示之態樣，上溫度調整板5、 及下溫度調整板6係構成在申請專利範圍第1項所稱之加 壓板之物。 第3圖係模式性例示使用第1圖所示實施本發明的微 細形狀轉印片之製造裝置並使賦形面的中央部的加熱狀態 爲ON而加壓後的狀態之槪略正面圖。溫度調整板5、6在 賦形面中央部係顯示膨脹鼓起的狀態。 第4圖係模式性例示使用第3圖所示實施本發明微細 形狀轉印片之製造裝置，使賦形面的中央部的加熱狀態爲 ON而加壓後（亦即賦形開始後）將其OFF，使賦形面均勻溫 度化而平坦化後之狀態之槪略正面圖。 第5圖係模式性說明在第1圖所例示使用實施本發明 微細形狀轉印片之製造裝置的溫度調整板的溫度分布與該 溫度調整板的熱膨脹量之關係的一個例子之槪略正面圖’ 係顯示在後述之實施例1的狀態。如該圖所不’藉由使在 溫度調整板的端部與中央部產生i〇°c的溫度差（100°c〜1〇 °c)，該膨脹量會在垂直方向產生高度差爲15微米（175〜 1 9 0微米）的梯度。利用該梯度差，能夠以不會咬入空氣的 方式使賦形面整體成爲加壓狀態，當該整體成爲加壓狀態 -14- 200824882 時，將中央部之部分性附加加熱O F F，來使該梯度差消滅。 第6圖係模式性顯示本發明微細形狀轉印片之製造裝 置的溫度調整板內的中央部所附設加熱介質狀態之四個例 子之槪略平面圖。在同圖，（a)係中央熱媒配管（並行）方式， (b)係中央熱媒配管（直行）方式，（c)係中央加熱器埋及熱媒 配管方式，（d)係加熱器埋設方式，在（a)〜（d)的各圖，左 側係平面圖，右側係其側面圖。 加熱所使用之熱媒的配管流路或加熱器不一定必須設 置在溫度調整板，亦可直接使用通常的溫度調整板，特別 是亦可在模具內部部分性地設置熱媒的配管流路或加熱器 亦可。第7圖係模式性例示本發明微細形狀轉印片之製造 裝置之另外一個實施態樣例子，係模式性顯示在模具內組 入溫度調整系統而成之裝置例之槪略正面圖。第8圖係模 式性例示使用第7圖所示微細形狀轉印片之製造裝置並使 賦形面的中央部的加熱狀態爲ON而加壓後的狀態之槪略 正面圖。 " 在第9圖所示裝置的態樣例，係設置有測定薄片狀基 材的厚度之手段、及發送來自該厚度測定手段的信號來控 制加熱手段、冷卻手段之發送手段，2 1係薄片厚度測定傳 感器、2 2係薄片搬運輥、2 3係信號演算器，其構成係藉由 該薄片厚度測定傳感器聯機依照順序測定賦形加壓開始前 之薄片狀基材的厚度，基於其測定結果，對該加工批次進 行溫度控制、平面性控制等。 亦即，在本發明的裝置，一種較佳的結構係在模具設 -15- 200824882 置溫度調整手段，並賦予模具溫度梯度使自模具的賦形面 內之一點往周邊部慢慢地降低溫度。設置在模具內時，因 爲溫度調整板能使用通常之物而方便許多。 實現該構成之一個例子，可舉出在內部形成有熱媒流 路之模具或加壓板連接複數個溫度調整系統（使熱媒或冷 媒循環）而成之物。設定使流動於端部之熱媒溫度比中央部 低時，因爲在熱媒溫度低的模具端部之溫度上升較慢，在 加壓成形時能夠賦予溫度梯度，使自模具的中央附近往周 邊部慢慢地降低溫度。又，中央與端部的溫度差亦因加壓 之薄片基材或圖案形狀而異，通常以1〜2 0 °C爲佳，以5 〜1 0 °C的範圍爲更佳。小於1 °C以下時，無法賦予模具溫 度梯度，又，大於2 0 °C以上時，在端部之模具溫度太低薄 片基材的成形性降低之可能性高。 又，較佳是其結構係加熱加壓板或模具之加熱源的功 率密度，係在賦形面內的一點比其他位置高，特別是在此 所稱「賦形面內」係指加熱源係設置在加壓板或/及模具中 任一者時，其結構都是以全加熱源作爲對象，功率密度在 賦形面內的一點比在其他位置高。爲了顯著地得到本發明 的效果，該一點的功率密度以大高於其他部分5kW/m2(0.5 W/cm2)以上爲佳，上限爲達到50 kW/m2(5.0 W/cm2)左右。 因此，雖亦取決於模具等的傳熱性，以高出 1 〇〜3 0 kW/m2(1.0 〜3.0 W/cm2)左右爲佳。 如上述，在本發明的裝置，較佳是其結構係使用電阻 加熱式加熱器作爲加熱加壓板或模具之手段，且設置於加 -16- 200824882 壓板或模具之加熱器配線的密度係在賦形面內的一點比其 他位置高。 又，其結構亦可以是使用熱媒作爲加熱加壓板或模具 之手段，且設置於加壓板或模具之熱媒流路的密度係在賦 形面內的一點比其他位置高。 又，加熱手段以設置2種系統爲佳，包含爲了將加壓 板或模具在其賦形面內於廣闊範圍上升溫度之加熱手段、 及爲了將任意點上升溫度之獨立的加熱手段。 又，設置包含加熱手段及冷卻手段之2種系統爲佳， 包含爲了將加壓板或模具在其賦形面內於廣闊範圍上升溫 度之加熱手段、及爲了降低賦形面的周邊部的溫度之獨立 的冷卻手段。 加壓機係連接油壓泵及油槽（未圖示），藉由油壓泵來 使上溫度調整板5升降動作並控制加壓力。又，在本實施 形態係應用油壓方式的加壓汽缸，但是若能夠控制加壓力 之手段時，可以是任何物。 % 壓力範圍以能夠控制在O.IMPa〜20 MPa的範圍爲 佳，以能夠控制在IMPa〜10 MPa的範圍爲更佳。 加壓機的升壓速度以控制在 〇.〇lMPa/s〜 IMPa/s的 範圍爲佳，以控制〇.〇5MPa/s〜 0.5MPa/s的範圍在爲更佳。 說明本發明所使用的模具3。模具的轉印面係具有微 細圖案之物，在模具形成該圖案之方法有機械加工、雷射 加工、光微影法、電子射線描繪方法等。此，在模具所形 成的「微細凹凸形狀」係以高度爲1 0奈米〜1毫米、周期 -17- 200824882 爲1 〇奈米〜1毫米的範圍周期性重複而成之凸狀。凸狀的 高度以1微米〜100微米爲更佳，周期以1微米〜100微米 的範圍爲更佳。凸狀的例子有三角錐、圓錐、四角錐、及 圓頂狀等爲代表之任意形狀的突起物以離散狀、點狀配置 而成之物、或是剖面以三角、四角、梯形、半圓、及橢圓 等爲代表之任意形狀的突起物以條紋狀配置而成之物等。 模具的材質若是能夠得到加壓時所需要的強度、圖案 加工精確度、薄膜的脫模性時例如含有不鏽鋼、鎳、銅等 之金屬材料、矽、玻璃、陶瓷、樹脂、或是爲了提升此等 表面的脫模性而被覆有機膜而成之物係適合使用。該模具 的微細圖案係對應欲賦予薄片表面的微細凹凸圖案而形成 之物。 溫度調整板以鋁合金製之物爲佳，可藉由鎔鑄於板內 而成的電熱加熱器來控制。又，亦可藉由使已溫度調整過 的流熱介質流動於鎔鑄於溫度調整板內的銅或不鏽鋼配 管、或流動於藉由機械加工加工而成的孔穴內部來進行加 熱控制。而且亦可以由組合兩者而成的裝置所構成。 薄片的厚度測定傳感器以使用放射線式、紅外線式、 光干擾式等爲佳。又，可設置在薄片的搬運方向厚度測定 用及寬度方向測定用共2台等複數台，又，寬度方向的厚 度測定亦可使傳感頭水平移動來進行。又，前述的加熱手 段、及冷卻手段的控制亦可使用預先在另外場所測定薄片 厚度所得到的厚度測定結果。 熱介質可使用 BARRELTHREM(松村石油（股））、 200824882[Technical Field] The present invention relates to a method and apparatus for producing a sheet having a fine three-dimensional shape on a surface thereof by transferring a fine shape. [Prior Art] A method of forming a three-dimensional shape such as fine unevenness on a surface of a resin sheet or the like is known (Patent Document 1-2), and a resin sheet or the like is heated by a mold having fine irregularities heated, A method of transferring the concave-convex three-dimensional shape to the resin sheet. However, in this method, when a fine shape is transferred and formed into a large-area resin sheet, since air is trapped between the mold on the transfer surface and the sheet to be processed, a fine three-dimensional shape cannot be completely transferred, resulting in poor transfer. The problem. This problem of biting air is generated when the thickness of the processed sheet-like substrate is uneven or the planarity of the pressure plate is uneven. In order to solve such a problem, the above-mentioned Patent Document 2 proposes a method and apparatus for bending a transfer sheet so as to protrude toward a resin sheet when the pressure plate starts to abut, and then pressurizing in this state. The fine shape is transferred by removing air from the vicinity of the center of the shaping surface and continuing to contact the film with the pressure plate. Specifically, the bending is performed by spring members having different elasticity. However, since the method bends the pressure plate by springs of different elasticity, even if it is flattened by pressurization by a press machine, a surface pressure distribution occurs on the shaping surface due to a high pressure of the protrusions. The transfer accuracy of the fine shape of the micro-200824882 in the shaped surface is different, and as a result, uniform transfer accuracy is still not obtained. This situation is particularly remarkable when the surface shape is finer, and because the surface pressure distribution is different, the thickness of the film to be processed is also affected. Moreover, it is not practical to change the position of the spring member or its holder each time it is necessary to change the amount of deformation. [Patent Document 1] JP-A-2006-35573 (Patent Document 2) JP-A-2006-35573 SUMMARY OF INVENTION [Problems to be Solved by the Invention] In view of the above problems, the object of the present invention is Provided is a method and a manufacturing apparatus for a fine-shaped transfer sheet produced by heating a sheet-like base material and a mold having a fine uneven shape, and bringing the two into contact and pressurizing When the fine uneven shape is formed on the surface of the sheet-like substrate, the transfer unevenness does not occur in the transfer surface due to the air being caught between the mold and the sheet-like substrate, and the desired fine uneven shape can be formed on the surface. surface. [Means for Solving the Problems] In order to achieve the above object, the method for producing a fine-shaped transfer sheet of the present invention is constituted by the following (1). (1) A method for producing a fine-shaped transfer sheet which heats a mold having a sheet-like base material and a fine uneven shape, and causes the fine uneven shape to be formed on the sheet-like base by contact and pressurization a method for producing a fine-shaped transfer sheet of a material surface, characterized in that the shaping surface is changed (by at least one of the pressure plate or the mold, or one of the pressure plate or the mold, which is configured by pressing the sheet-like substrate and the mold, or Forming is performed by the planarity of the combination. Further, the method for producing the fine-shaped transfer sheet of the present invention is more preferably constituted by the following constitutions (2) or (3). (2) The method for producing a fine-shaped transfer sheet according to the above (1), wherein when the shaping is changed by changing the planarity of the shaping surface, the pressing is started from a point in the shaping surface of the sheet-like base material. And changing the planarity of the shaping surface to gradually reduce the pressing force to the peripheral portion of the sheet-like base material. (3) The method for producing a fine-shaped transfer sheet according to the above (1) or (2), wherein, when the shape is changed by changing the planarity of the shaped surface, the planarity of the shaped surface is changed after the shaping starts. To make the pressing force in the shaping surface uniform. Moreover, in order to achieve the above object, the method for producing another fine-shaped transfer sheet of the present invention is constituted by the following constitution (4). (4) A method for producing a fine-shaped transfer sheet by heating a mold having a sheet-like base material and a fine uneven shape, and pressing the sheet-like base material and the mold to pressurize the fine unevenness A method for producing a fine-shaped transfer sheet having a shape formed on a surface of a sheet-like substrate, characterized in that the temperature is adjusted to "self-shape the surface (by pressurizing one of the sheet-like substrate and the mold by pressurizing the sheet-like substrate and the mold) At a point in at least one of the plate or the mold or a combination thereof, the temperature is gradually lowered toward the peripheral portion of the sheet-like substrate to form a shape. Further, the method for producing the fine-shaped transfer sheet of the present invention is more specifically configured by the following constitution (5) or (6). (5) The method for producing a fine-shaped transfer sheet according to the above (4), wherein the temperature is adjusted so that the planarity of the shaped surface is larger than the maximum thickness of the thickness distribution of the 200824882 shaped surface of the sheet-like substrate . (6) The method for producing a fine-shaped transfer sheet according to the above (4) or (5), wherein, when the mold is in contact with the sheet-like substrate at the time of forming, a temperature of a point of the shaping surface is higher than The temperature of other parts of the shaped surface is higher, and the temperature difference becomes smaller after the start of shaping. Moreover, in order to achieve the above object, the apparatus for a fine-shaped transfer sheet of the present invention has the following configuration (7). (7) A manufacturing apparatus for a fine-shaped transfer sheet, comprising a sheet-like base material, a mold having a fine uneven shape, and a fine shape rotating means for heating and pressurizing the sheet-like base material and the mold a printing device for manufacturing a film which is provided with a temperature gradient of a mold and/or a pair of pressure plates, and a self-forming surface (by pressing one of the sheet-like substrate and the mold to pressurize the plate or At a point in at least one of the molds or a combination thereof, the temperature is gradually lowered toward the peripheral portion of the sheet-like substrate. Moreover, it is preferable that the apparatus for producing a fine-shaped transfer sheet of the present invention is constituted by any one of the following (8) to (14). (8) The apparatus for manufacturing a fine-shaped transfer sheet according to (7), wherein the mold is provided with a temperature adjustment means for providing a temperature gradient to the mold so as to extend from a point in the shaping surface of the mold to the periphery of the sheet-like substrate Slowly lower the temperature. (9) The apparatus for manufacturing a fine-shaped transfer sheet according to (7) or (8), wherein the power density of the heating source for heating the pressure plate or the mold is higher in the shaping surface than at other positions Structure. (10) A manufacturing apparatus for a fine-shaped transfer sheet according to any one of (7) to (9), which has a resistance heating heater as a heating means for heating the pressure plate or the mold, Further, the density of the heater wiring provided on the pressure plate or the mold is higher in a point in the shaping surface than in other positions. (11) The apparatus for producing a fine-grained transfer sheet according to any one of (7) to (10), wherein the heat medium is used as a heating means for heating the pressure plate or the mold, and is provided in a pressurization The density of the heat medium flow path of the plate or mold is higher at a point in the shaping surface than at other positions. (12) The apparatus for manufacturing a fine-grained transfer sheet according to any one of (7) to (11), wherein the pressure plate or the mold is heated in a wide range of temperature in the shaping surface thereof. Two systems of means and independent heating means for raising the temperature at any point. (13) The apparatus for producing a fine-grained transfer sheet according to any one of (7) to (12), wherein the pressure plate or the mold is heated in a wide range of temperature in the shaping surface thereof. There are two types of means for the means and the independent cooling means for lowering the temperature of the peripheral portion of the shaped surface. (1) The apparatus for manufacturing a fine-shaped transfer sheet according to any one of (7) to (13), wherein the thickness measuring means for the sheet-like base material and the signal for transmitting the thickness measuring means are provided The heating means and the means for transmitting the cooling means are controlled. [Effects of the Invention] According to the method and apparatus of the present invention, the mold and/or the pressure plate itself have a function of controlling planarity (planarity of the shaping surface), and the amount of bending and position can be operated in accordance with the state of the mold. After the feature is pressed, the air can be removed and moved to a uniform surface state. -10- 200824882 Therefore, the pressure in the shaping surface is made uniform after pressurization, and since air can be excluded, it does not By biting in the air, it is possible to obtain a uniform and highly accurate transfer-formed state. According to the manufacturing method and manufacturing apparatus of the fine-shaped transfer sheet of the present invention, a sheet having a fine shape transferred onto the surface can be favorably produced. [Embodiment] Hereinafter, a method of manufacturing a fine-shaped transfer sheet of the present invention and a manufacturing apparatus will be described in more detail with reference to the drawings and the like. In the method for producing a fine-shaped transfer sheet of the present invention, a mold having a sheet-like base material and a fine uneven shape is heated, and the fine uneven shape is formed on the surface of the sheet-like substrate by contact and pressurization. The method for producing a fine-shaped transfer sheet is characterized in that the shaping surface is changed (consisting of at least one of a pressure plate or a mold or a combination thereof by pressurizing the sheet-like substrate and the mold) Shaped and shaped. Here, the "planarity of the shaped surface" means "the degree of planarity of the flat space formed by the gap between the pressure plate and the mold", and "changing the flatness" means changing the degree of planarity. Here, the flatness of the shaping surface is not limited to the combination of the pressure plate and the mold, and the same applies to the case where the mold is used up and down, and in this case, the pressure plate is used. In the method of the present invention, when the planarity of the shaped surface is changed, the pressure is initially applied from a point in the shaping surface of the sheet-like substrate, and the planarity is changed to apply pressure to the peripheral portion of the sheet-like substrate. Slowly getting smaller. That is, the air is removed from the vicinity of the center of the shaping surface, and the pressing is continued. In particular, the initial pressing point does not have to be the central center portion of the shaping surface, or may be the peripheral end of the forming surface of the shaped -11-200824882. One point near the department. When the pressure is applied from a point near the peripheral end portion, the planarity is changed, and the pressing force is gradually reduced toward the peripheral end side on the opposite side. Here, "changing the planarity to gradually increase the pressing force" means that the pressure applied to each unit area of the shaped surface is gradually reduced. When the planarity of the shaped surface is changed, the planarity of the shaped surface is changed after the shaping starts to make the pressing force in the shaped surface uniform. Here, "after the start of shaping" means that a point in the shaping surface of the sheet-like base material comes into contact with the mold and/or the pressure plate, and is pressurized from the first state, and then after the state is reached, Control makes the applied pressure uniform and effective. The above-mentioned series of pressure control is performed by partially heating the pressure plate or the mold to cause partial thermal expansion deformation, and abutting against the mold of the sheet-like substrate, which can be initially tied at a certain point. The partial contact is carried out in such a manner that the abutting portion expands toward the peripheral portion as the pressure is pressurized, and specifically, the specific method of the present invention described below is carried out. In other words, the method for producing a fine-shaped transfer sheet of the present invention is specifically a method of heating a mold having a sheet-like base material and a fine uneven shape by heating, and pressing the sheet-like base material and the mold to pressurize. The method for producing the fine-shaped transfer sheet having the fine uneven shape formed on the surface of the sheet-like substrate, wherein the temperature is adjusted to a self-forming surface (by arranging the sheet-like substrate and the mold by pressurization) A method in which the temperature is gradually lowered toward the peripheral portion of the sheet-like substrate by a point in at least one of the pair of pressure plates or the mold or a combination thereof to form a shape. In such a method, it is preferred to adjust the temperature so that the planarity of the shaping surface -12-200824882 is larger than the maximum thickness of the thickness distribution of the shaping surface of the sheet-like substrate, and the "shaped surface" The planarity is greater than the maximum 値 of the thickness distribution of the shaped surface of the sheet-like substrate, which means that the number of planarities is greater than the maximum 値 of the thickness distribution of the sheet. Further, it is preferable that the temperature of one point of the shaping surface is higher than the temperature of the other portion at the time of contact between the mold and the sheet-like substrate at the time of shaping, and the temperature difference is changed after the shaping starts. The above specific method of the present invention can be carried out by the apparatus for producing a fine-shaped transfer sheet of the present invention described below. That is, a manufacturing apparatus for a fine-shaped transfer sheet is provided with a sheet-like base material, a mold having a fine uneven shape, and a fine shape transfer for heating and pressing the sheet-like base material and the mold. The manufacturing apparatus of the sheet is characterized in that a temperature gradient of the mold and/or a pair of pressure plates is applied to the self-forming surface (by pressing one of the sheet-like substrate and the mold to pressurize the plate or the mold) A point in at least one of them or a combination thereof gradually decreases the temperature toward the peripheral portion of the sheet-like substrate. Fig. 1 is a schematic front view showing an embodiment of a manufacturing apparatus for a fine-shaped transfer sheet of the present invention which is suitable for carrying out the method for producing a fine-shaped transfer sheet of the present invention. Fig. 2 is a schematic front view showing another embodiment of the apparatus for producing a fine-shaped transfer sheet of the present invention which is suitable for carrying out the method for producing a fine-shaped transfer sheet of the present invention. In the first and second drawings, a 1 type fine transfer sheet manufacturing apparatus, a 2 type press apparatus, a 3 type mold, a 4 series sheet base material, a 5 series upper temperature adjustment plate, and a 6 series lower temperature adjustment plate , 7 series central heating heating medium flow path, 8 series-13-200824882 heat medium circulation device, 9 series cooling water heat cycle device, 10 system central heating heater 'to give mold and / or a pair of pressure plate temperature In the gradient, the temperature in the self-formed surface is gradually lowered to the peripheral portion of the sheet-like substrate, and the pattern in the first embodiment is provided by the central heating heating medium flow path 7 and the second drawing. The pattern is realized by a specially provided central heating heater 10. Therefore, in the first and second aspects, the upper temperature adjustment plate 5 and the lower temperature adjustment plate 6 constitute the object of the pressure plate referred to in the first aspect of the patent application. Fig. 3 is a schematic front view showing a state in which the manufacturing apparatus of the fine-shaped transfer sheet of the present invention shown in Fig. 1 is used and the heating state of the central portion of the shaping surface is turned ON and pressurized. The temperature adjustment plates 5, 6 are in a state in which the expansion bulge is displayed in the center portion of the shaping surface. Fig. 4 is a view schematically showing the use of the apparatus for manufacturing the fine-shaped transfer sheet of the present invention shown in Fig. 3, wherein the heating state of the central portion of the shaping surface is turned ON and pressurized (i.e., after the start of shaping) The OFF is a front view showing a state in which the shaping surface is uniformly heated and flattened. Fig. 5 is a schematic front view showing an example of the relationship between the temperature distribution of the temperature adjustment plate and the amount of thermal expansion of the temperature adjustment plate, which is used in the apparatus for manufacturing the fine shape transfer sheet of the present invention, as exemplified in Fig. 1 . The system is shown in the state of the first embodiment to be described later. As shown in the figure, by causing a temperature difference (100 ° c to 1 〇 ° c) at the end portion and the central portion of the temperature adjustment plate, the amount of expansion causes a height difference of 15 in the vertical direction. A gradient of micron (175 to 1 90 microns). By using the gradient difference, the entire shaping surface can be pressurized without intervening in the air, and when the whole is in the pressurized state -14 to 200824882, the partial portion of the central portion is additionally heated and turned off. The gradient difference is eliminated. Fig. 6 is a schematic plan view showing four examples of the state of the heating medium attached to the central portion of the temperature adjusting plate of the manufacturing apparatus of the fine-shaped transfer sheet of the present invention. In the same figure, (a) is the central heat medium piping (parallel) method, (b) is the central heat medium piping (straight line), (c) is the central heater buried and the heat medium piping method, and (d) is the heater. The embedding method is shown in the drawings of (a) to (d), the left side is a plan view, and the right side is a side view. The piping flow path or the heater for heating the heat medium is not necessarily required to be provided in the temperature adjustment plate, and the usual temperature adjustment plate may be used as it is, in particular, the piping flow path of the heat medium may be partially disposed inside the mold or The heater is also available. Fig. 7 is a schematic front view showing another example of the apparatus for manufacturing a fine-shaped transfer sheet of the present invention, which is a schematic view showing an apparatus example in which a temperature adjustment system is incorporated in a mold. Fig. 8 is a schematic front view showing a state in which the manufacturing apparatus of the fine-shaped transfer sheet shown in Fig. 7 is used, and the heating state of the central portion of the shaping surface is turned ON and pressurized. " In the aspect of the apparatus shown in Fig. 9, a means for measuring the thickness of the sheet-like base material and a means for transmitting the signal from the thickness measuring means to control the heating means and the cooling means are provided. The sheet thickness measuring sensor, the 2 2 sheet conveying roller, and the 23-type signal calculator are configured to measure the thickness of the sheet-like base material before the start of the shaping press by the sheet thickness measuring sensor. As a result, temperature control, planarity control, and the like are performed on the processing batch. That is, in the apparatus of the present invention, a preferred structure is provided with a temperature adjustment means in the mold set -15 - 200824882, and the mold temperature gradient is imparted to slowly lower the temperature from a point in the shaping surface of the mold to the peripheral portion. . When it is placed in the mold, it is much more convenient because the temperature adjustment plate can use the usual items. An example of the configuration is a mold in which a heat medium flow path is formed or a pressure plate is connected to a plurality of temperature adjustment systems (circulation of a heat medium or a refrigerant). When the temperature of the heat medium flowing through the end portion is lower than the center portion, the temperature rises slowly at the end portion of the mold at a low temperature of the heat medium, and a temperature gradient can be imparted at the time of press molding to bring the vicinity of the center of the mold to the periphery. Slowly lower the temperature. Further, the temperature difference between the center and the end portion is also different depending on the shape of the pressed sheet substrate or the pattern, and is usually preferably 1 to 20 ° C and more preferably 5 to 10 ° C. When the temperature is less than 1 °C, the mold temperature gradient cannot be imparted, and when it is more than 20 °C, the mold temperature at the end portion is too low, and the formability of the sheet substrate is likely to be lowered. Further, it is preferable that the power density of the heating source of the heating plate or the mold is higher than the other positions in the shaping surface, and particularly referred to herein as the "heating source" means the heating source. When it is provided in any of the pressure plate or/and the mold, the structure is such that the entire heating source is used, and the power density is higher in the shaping surface than at other positions. In order to remarkably obtain the effect of the present invention, the power density at this point is preferably higher than 5kW/m2 (0.5 W/cm2) or more of the other portions, and the upper limit is about 50 kW/m2 (5.0 W/cm2). Therefore, depending on the heat transfer property of the mold or the like, it is preferably about 1 〇 to 30 kW/m 2 (1.0 to 3.0 W/cm 2 ). As described above, in the apparatus of the present invention, it is preferable that the structure uses a resistance heating heater as a means for heating the pressure plate or the mold, and the density of the heater wiring provided on the press plate or the mold of the addition of -16 to 200824882 is The point inside the shaped surface is higher than the other positions. Further, the structure may be a means for heating the pressure plate or the mold by using a heat medium, and the density of the heat medium flow path provided in the pressure plate or the mold is higher at a point in the shaping surface than at other positions. Further, the heating means is preferably provided with two types of systems, and includes heating means for raising the temperature of the pressurizing plate or the mold in a wide range in the shaping surface thereof, and independent heating means for raising the temperature at an arbitrary point. Further, it is preferable to provide two types of systems including a heating means and a cooling means, and a heating means for increasing the temperature of the pressure plate or the mold in a wide range in the shaping surface thereof, and a temperature for lowering the peripheral portion of the shaping surface. Independent cooling means. The pressurizing machine is connected to a hydraulic pump and an oil groove (not shown), and the upper temperature adjusting plate 5 is moved up and down by a hydraulic pump to control the pressing force. Further, in the present embodiment, a hydraulic cylinder of a hydraulic pressure type is applied. However, any means for controlling the pressure may be used. The % pressure range is preferably controlled in the range of O.IMPa to 20 MPa, and is preferably controlled in the range of IMPa to 10 MPa. The pressurization speed of the press machine is preferably controlled in the range of 〇. 〇lMPa/s to IMPa/s, and is preferably in the range of 〇. 5 MPa/s to 0.5 MPa/s. The mold 3 used in the present invention will be described. The transfer surface of the mold has a fine pattern, and the method of forming the pattern in the mold includes machining, laser processing, photolithography, and electron beam drawing. Here, the "fine concavo-convex shape" formed in the mold is periodically formed in a range of a height of 10 nm to 1 mm and a period of -17 to 200824882 of 1 〇 nanometer to 1 mm. The height of the convex shape is preferably from 1 μm to 100 μm, and the period is preferably in the range of from 1 μm to 100 μm. Examples of the convex shape include a protrusion having an arbitrary shape represented by a triangular pyramid, a cone, a quadrangular pyramid, and a dome shape, which are arranged in a discrete shape or a dot shape, or a cross section of a triangle, a square, a trapezoid, a semicircle, and An ellipse or the like is a member in which irregular protrusions of any shape are arranged in a stripe shape. When the material of the mold is capable of obtaining the strength required for pressurization, the accuracy of pattern processing, and the release property of the film, for example, a metal material such as stainless steel, nickel, or copper, bismuth, glass, ceramic, resin, or the like is used. A material obtained by coating an organic film with the release property of the surface is suitable for use. The fine pattern of the mold corresponds to a fine concavo-convex pattern to be applied to the surface of the sheet. The temperature adjustment plate is preferably made of an aluminum alloy and can be controlled by an electric heater which is cast into a plate. Further, heating control may be performed by flowing a temperature-controlled heat transfer medium to a copper or stainless steel pipe cast in a temperature adjustment plate or flowing inside a hole machined by machining. Furthermore, it may be constituted by a combination of both devices. The thickness measuring sensor of the sheet is preferably a radiation type, an infrared type, an optical interference type or the like. Further, it is possible to provide a plurality of units for measuring the thickness of the sheet in the transport direction and for measuring the width direction, and the thickness measurement in the width direction can also be performed by moving the sensor head horizontally. Further, the above-described heating means and the control means of the cooling means may be a thickness measurement result obtained by measuring the thickness of the sheet in another place in advance. Heat medium can be used BARRELTHREM (松村石油(股)), 200824882
NeOSK-OIL(綜硏TECNIX(股））等，又，亦可使已加熱至100 °C以上的水循環。而且，爲了能夠效率良好地傳熱，配管 內部的雷諾數（Reynold ’ s number)以在 l.OxlO4 〜12xl04 的範圍爲佳。 適用於本發明的方法、裝置之薄片狀基材之玻璃轉移 溫度Tg爲40〜180 °C，以50〜160 °C爲更佳，以50〜120 °C之熱塑性樹脂作爲主成分之薄膜爲最佳。玻璃轉移溫度 小於此範圍時，因爲成形品的耐熱性降低、形狀產生經時 變化，乃是不佳。又，高於此範圍時，不得不提高成形溫 度，在能源上係非效率的，又，因薄膜的加熱/冷卻時的體 -積變動變大、薄膜咬入模具中而無法脫模，又，即便能夠 脫模，基於有時亦會產生圖案精確度低落、或部分性缺少 圖案之缺點等理由，乃是不佳。 適合應用於本發明之以熱塑性樹脂爲主成分的薄片狀 基材’具體上較佳是由聚對酞酸乙二酯、聚2,6-萘二甲酸 乙二酯、聚對酞酸丙二酯、聚對酞酸丁二酯等聚酯系樹脂、 聚乙烯、苯乙烯、聚丙烯、聚異丁烯、聚丁烯、聚甲基戊 烯等聚烯烴系樹脂、聚醯胺系樹脂、聚醯亞胺系樹脂、聚 醚系樹脂、聚酯型醯胺系樹脂、聚醚酯系樹脂、丙烯酸系 樹脂、聚胺基甲酸酯系樹脂、聚碳酸酯系樹脂、或是聚氯 乙烯系樹脂等所構成之物。其中，因共聚合之單體種類多， 且因此容易調整材料物性等理由，特別是以選自聚酯系樹 脂、聚烴系樹脂、聚醯胺系樹脂、丙烯酸系樹脂、或其 等的混合物之熱塑性樹脂爲主所形成之物爲佳。由5 〇重量 -19- 200824882 %以上之上述熱塑性樹脂所構成爲更佳。 適用於本發明之薄膜可以是由上述樹脂單體所構成的 薄膜，亦可以是由複數樹脂層所構成的積層體。此時’與 單體薄膜比較，能夠賦予易滑性、耐摩擦性等表面特性、 或機械強度、耐熱性等。如此，由複數樹脂層所構成的積 層體時，以薄片整體滿足前述的必要條件爲佳，即便薄片 整體無法滿足前述的必要條件，至少以滿足前述必要條件 的層來形成表層，能夠容易地形成表面。 又，適用於本發明之薄膜的較佳厚度（厚度、膜厚度） 以在〇 · 〇 1〜1毫米的範圍爲佳。小於〇. 〇 1毫米以下時，用 以成形之厚度不充分，又，大於1毫米以上時，由於薄膜 的剛性，通常難以搬運。但是，若是單片式處理之薄片時， 爲了抑制搬運彎曲等，以具有〇 · 3毫米以上、更佳是1毫 米以上的厚度之板狀體爲佳。 適用於本發明之薄膜的形成方法，例如單體薄片時， 可舉出將薄片形成用材料在擠壓機內加熱熔融，並從噴嘴 擠出至已冷卻的鑄塑轉筒上而加工成薄片狀之方法（熔融 鑄塑法）。其他方法亦可舉出使薄片形成用材料溶解在溶劑 中，並將該溶液從噴嘴擠出至鑄塑轉筒、環狀皮帶等支撐 體上而成爲膜狀，接著，從如此的膜層乾燥除去溶劑而加 工成爲薄片狀之方法（溶液流延法）等。 又，積層體的製造方法可舉出將二種不同的熱塑性樹 脂投入二台擠壓機，並熔融而從噴嘴共擠出至已冷卻的鑄 塑轉筒上，來加工成薄片狀之方法（共擠出法）；將被覆層 -20- 200824882 原料投入擠壓機而熔融擠壓而邊從噴嘴擠出邊層壓於單膜 所製成的薄片上之方法（熔融層壓法）；將單膜所製造的薄 片及易表面賦形性薄片各自分別地單膜製造，並藉由已加 熱的輥群等進行熱壓黏之方法（熱層壓法）；此外有將薄片 形成用材料溶解在溶劑中，並將該溶液塗布在薄片上之方 法（塗布法）等。又，在易表面賦型性薄片積層體時，亦能 夠使用上述的熔融層壓法、熱層壓法、塗布法。如此的基 材，亦可以是施加過基底調整劑、或底塗劑等處理過之物。 又，亦可以是與具有其他功能的基材的複合體之構成。 又，適用於本發明之薄膜在聚合時或聚合後，亦可添 加各種添加劑。能夠添加調配之添加劑可舉出例如有機微 粒子、無機微粒子、分散劑、染料、螢光增白劑、抗氧化 劑、耐候劑、防靜電劑、脫模劑、增黏劑、可塑劑、pH調 整劑及鹽等。特是在聚合時可進行少量添加長鏈羧酸、或 長鏈羧酸鹽等低表面張力的羧酸或其衍生物、及長鏈醇或 其衍生物、改性矽油等低表面張力的醇化合物等作爲脫膜 劑爲佳。 又，適用於本發明之薄片（薄膜），在成形層的表面， 以更層積有脫膜層之構成爲佳。薄膜的最表面、亦即藉由 在與模具接觸面預先設置脫膜層，能夠提升形成在模具表 面之脫模塗層的耐久性（重複使用次數），即便部分性喪失 脫模效果時亦能夠無問題而均勻地脫模。又，即便模具完 全沒有施加脫膜處理，藉由在薄膜側預先形成脫模層亦能 夠脫模，能夠削減模具脫膜處理成本，乃是較佳。又.，因 -21 - 200824882 爲在將成形薄片從模具脫模時，能夠防止因樹脂黏著所造 成的成形圖案崩潰，或是能夠在更高溫脫膜、使循環時間 縮短，就成形精確度、生產力而言，亦是較佳。又，藉由 更提升成形薄片表面的滑性，因爲能夠提升耐擦傷性、且 亦能夠減少在製程等所產生的缺點，乃是較佳。 成形層係以支撐層爲中心而層積在兩最外層時，可以 在任一側的成形層表面設置脫膜層，亦可以在兩最外層設 置脫膜層。 構成脫膜層之樹脂沒有特別限定，以矽系樹脂、氟系 樹脂、脂肪酸系樹脂、聚酯系樹脂、烯烴系樹脂、或三聚 氰胺系樹脂作爲主成分而構成爲佳，此等之中，以矽系樹 月旨、每系樹脂、或脂肪酸系樹脂爲更佳。又，在脫膜層， 除了上述的樹脂以外，亦能夠調配例如丙烯酸樹脂、胺基 甲酸酯樹脂、環氧樹脂、脲樹脂、或酚樹脂等，亦能夠調 配各種添加劑、例如防靜電劑、界面活性劑、抗氧化劑、 耐熱安定劑、耐候安定劑、紫外線吸收劑、顏料、染料、 有或無機的微粒子、塡料、核劑、交聯劑等。又，脫膜層 的厚度沒有特別限定，以0 · 0 1〜5微米爲佳。該脫膜層的 厚度小於0 · 0 1微米時，因爲有時上述脫模性的提升效果會 下降，必須加以注意。 开夕成脫膜層之方法沒有特別限定，能夠使用例如逆輥 塗布法、凹版塗布法、桿塗布法、棒塗布法、模頭塗布法、 或噴霧塗布法。而且，從生產力、塗布均勻性的而言，以 同時進行上述塗布及製膜之聯機塗布爲佳。 -22- 200824882 [實施例] 以下’基於實施例來說明本發明的方法、及裝置之具 體構成、及效果。 在以下的各實施例，係藉由（1 )〜（1 0 )所示規格之模具 或加壓裝置、加工條件對各自進行微細形狀的賦予加工， 並進行製造微細形狀轉印片。 實施例1 (1) 模具尺寸：5 00毫米（薄膜厚度方向）χ8 〇〇毫米（薄膜 行進方向）χ20毫米（厚度）。 (2) 模具材質：銅。 (3) 微細形狀：使用間距50微米、凸部寬度25微米、 凸部高度5 0微米、且從薄膜行進方向觀察時剖面爲矩形形 狀之物。 (4) 加壓裝置：最大能夠加壓至3 000kN，且藉由油壓泵 加壓。 (5) 在加壓裝置內上下安裝2片鋁合金製且尺寸爲700 毫米（薄膜厚度方向）xl〇〇〇毫米（薄膜行進方向）的溫度調整 板，各自連結至加熱裝置、冷卻裝置。又，模具係安裝在 下側的溫度調整板。加熱裝置係熱媒循環裝置、且熱媒係 使用BARRELTHERM #400(松村石油股份公司製），使加熱 至150 °C之物以100升/分鐘的流量流動。又，冷卻裝置係 冷卻水循環裝置，且使冷卻至20 °C之水以150升/分鐘的流 量流動。NeOSK-OIL (combined TECNIX) can also circulate water that has been heated to above 100 °C. Further, in order to efficiently transfer heat, the Reynold's number inside the pipe is preferably in the range of l.OxlO4 to 12x10. The sheet-like substrate suitable for use in the method and apparatus of the present invention has a glass transition temperature Tg of 40 to 180 ° C, preferably 50 to 160 ° C, and a film of a thermoplastic resin having a temperature of 50 to 120 ° C as a main component. optimal. When the glass transition temperature is less than this range, it is not preferable because the heat resistance of the molded article is lowered and the shape is changed with time. Further, when the temperature is higher than this range, the molding temperature has to be increased, the energy is not efficient, and the body-product variation at the time of heating/cooling of the film is large, and the film is bitten into the mold and cannot be demolded. Even if it can be demolded, it is not preferable because of the disadvantage that the pattern accuracy is low or the pattern is partially missing. A sheet-like substrate which is preferably used as a main component of the thermoplastic resin of the present invention is specifically preferably polyethylene terephthalate, polyethylene 2,6-naphthalate or polyethylene terephthalate. Polyester resin such as ester or polybutylene terephthalate, polyolefin resin such as polyethylene, styrene, polypropylene, polyisobutylene, polybutene or polymethylpentene, polyamine resin, polyfluorene Imine resin, polyether resin, polyester phthalamide resin, polyether ester resin, acrylic resin, polyurethane resin, polycarbonate resin, or polyvinyl chloride resin Etc. Among them, the number of monomers to be copolymerized is large, and therefore, it is easy to adjust the physical properties of the material, and the like, in particular, a mixture selected from a polyester resin, a polyhydrocarbon resin, a polyamine resin, an acrylic resin, or the like. It is preferred that the thermoplastic resin is mainly formed. It is preferably composed of the above thermoplastic resin of 5 〇 weight -19-200824882% or more. The film to be used in the present invention may be a film composed of the above resin monomers, or may be a laminate composed of a plurality of resin layers. At this time, surface characteristics such as slipperiness and abrasion resistance, mechanical strength, heat resistance, and the like can be imparted as compared with the monomer film. In the case of the laminated body composed of the plurality of resin layers, it is preferable that the entire sheet satisfies the above-described requirements, and even if the entire sheet cannot satisfy the above-described requirements, the surface layer can be formed at least to satisfy the above-described requirements, and the surface layer can be easily formed. surface. Further, the preferred thickness (thickness, film thickness) of the film suitable for use in the present invention is preferably in the range of 〜 · 〇 1 to 1 mm. When it is less than 〇. 〇 1 mm or less, the thickness for forming is insufficient, and when it is more than 1 mm, it is usually difficult to handle due to the rigidity of the film. However, in the case of a sheet which is processed by a single sheet, it is preferable to have a plate-like body having a thickness of 〇 3 mm or more, more preferably 1 mm or more, in order to suppress conveyance and the like. A method for forming a film of the present invention, for example, a monomer sheet, which is obtained by heating and melting a sheet forming material in an extruder and extruding it from a nozzle onto a cooled casting drum to form a sheet. Method (melt casting method). In another method, a sheet forming material may be dissolved in a solvent, and the solution may be extruded from a nozzle onto a support such as a casting drum or an endless belt to form a film, and then dried from such a film layer. A method (solution casting method) or the like which is processed into a sheet form by removing the solvent. Further, the method for producing a laminate may be a method in which two different thermoplastic resins are put into two extruders, melted, and co-extruded from a nozzle onto a cooled casting drum to be processed into a sheet shape ( Co-extrusion method; a method in which a coating layer -20-200824882 is put into an extruder and melt-extruded while being extruded from a nozzle and laminated on a sheet made of a single film (melt lamination method); Each of the sheet produced by the single film and the easy-to-surface-formable sheet is separately produced by a single film, and is subjected to a thermocompression bonding method by a heated roll group or the like (thermal lamination method); in addition, a sheet forming material is dissolved. A method (coating method) or the like in which a solution is applied to a sheet in a solvent. Further, in the case of a surface-formable sheet laminate, the above-described melt lamination method, hot lamination method, or coating method can also be used. Such a substrate may also be a treated article such as a substrate conditioner or a primer. Further, it may be a composite of a substrate having another function. Further, various additives may be added to the film of the present invention at the time of polymerization or after polymerization. The additive which can be added to the formulation may, for example, be an organic fine particle, an inorganic fine particle, a dispersant, a dye, a fluorescent whitening agent, an antioxidant, a weathering agent, an antistatic agent, a mold release agent, a tackifier, a plasticizer, a pH adjuster. And salt. In particular, a small surface-added carboxylic acid or a derivative thereof having a low surface tension such as a long-chain carboxylic acid or a long-chain carboxylate, a long-chain alcohol or a derivative thereof, or a low surface tension alcohol such as a modified eucalyptus oil may be added during the polymerization. A compound or the like is preferred as the release agent. Further, it is preferable that the sheet (film) to which the present invention is applied has a structure in which a release layer is further laminated on the surface of the formed layer. The outermost surface of the film, that is, by providing a release layer in advance on the contact surface with the mold, can improve the durability (reuse times) of the release coating formed on the surface of the mold, even when the mold release effect is partially lost. Release the mold evenly without problems. Further, even if the mold is not subjected to the release treatment at all, the release layer can be released in advance on the film side, and the mold release treatment cost can be reduced, which is preferable. Further, because -21 - 200824882, when the formed sheet is released from the mold, it is possible to prevent the formation pattern from being collapsed due to resin adhesion, or to remove the film at a higher temperature and to shorten the cycle time, thereby forming precision, In terms of productivity, it is also better. Further, by further improving the smoothness of the surface of the formed sheet, it is preferable because the scratch resistance can be improved and the disadvantages caused by the process and the like can be reduced. When the forming layer is laminated on the outermost layer with the support layer as the center, the release layer may be provided on the surface of the forming layer on either side, or the release layer may be provided on both outermost layers. The resin constituting the release layer is not particularly limited, and is preferably composed of a lanthanoid resin, a fluorine resin, a fatty acid resin, a polyester resin, an olefin resin, or a melamine resin as a main component. It is more preferable that the system is a resin, a resin of each type, or a fatty acid resin. Further, in the release layer, in addition to the above-mentioned resin, for example, an acrylic resin, a urethane resin, an epoxy resin, a urea resin, or a phenol resin can be blended, and various additives such as an antistatic agent can be formulated. Surfactants, antioxidants, heat stabilizers, weather stabilizers, UV absorbers, pigments, dyes, microparticles with or with inorganic pigments, sputum, nucleating agents, crosslinkers, and the like. Further, the thickness of the release layer is not particularly limited, and is preferably 0·0 1 to 5 μm. When the thickness of the release layer is less than 0 · 0 1 μm, it is necessary to pay attention to the fact that the above-mentioned release property lifting effect may be lowered. The method of forming the release layer is not particularly limited, and for example, a reverse roll coating method, a gravure coating method, a rod coating method, a bar coating method, a die coating method, or a spray coating method can be used. Further, in terms of productivity and coating uniformity, it is preferred to carry out the above-described coating and film-forming in-line coating. -22- 200824882 [Embodiment] Hereinafter, the specific configuration and effects of the method and apparatus of the present invention will be described based on the embodiments. In each of the following embodiments, a fine shape transfer sheet is produced by applying a fine shape to each of the molds, pressurizing devices, and processing conditions of the specifications shown in (1) to (10). Example 1 (1) Mold size: 500 mm (film thickness direction) χ 8 mm (film traveling direction) χ 20 mm (thickness). (2) Mold material: copper. (3) Fine shape: a shape having a pitch of 50 μm, a convex portion width of 25 μm, a convex portion height of 50 μm, and a rectangular cross section when viewed from the film traveling direction. (4) Pressurizing device: It can be pressurized up to 3 000 kN and pressurized by a hydraulic pump. (5) Two temperature-adjusting plates made of aluminum alloy and having a size of 700 mm (film thickness direction) x l 〇〇〇 mm (film traveling direction) are attached to the upper and lower sides of the pressurizing device, and are connected to a heating device and a cooling device, respectively. Further, the mold is attached to the lower temperature adjustment plate. The heating device was a heat medium circulation device, and the heat medium was flowed at a flow rate of 100 liter/min using a BARRELTHERM #400 (made by Matsumura Oil Co., Ltd.). Further, the cooling device was a cooling water circulation device, and water cooled to 20 ° C was flowed at a flow rate of 150 liter / minute.
(6) 而且，在上下溫度調整板的中央附近係埋設有7kW -23 - 200824882 的電熱加熱器，與熱媒加熱裝置能夠各別調整溫度。 (7) 薄片：由聚對酞酸乙二酯樹脂所構成，厚度爲1〇〇 微米（厚度不均：±7微米）、寬度爲520毫米。 (8) 動作方法：使用上述的裝置，如下述進行成型。預 先將樹脂薄片放置在模具上，接著，將溫度調整板，上下 都是加溫至中央部爲ll〇°C、周邊部爲100°C後，將上側板 下降，來開始薄膜加壓。加壓係模具表面爲5MPa並進行 3 0秒。又，在加壓中只有使溫度調整板的電熱加熱器爲 OFF(關）。隨後，在繼續加壓的狀態，冷卻上下的溫度調整 板。在各溫度調整板成爲60 °C時停止冷卻。上下都冷卻完 成時，放開加壓。隨後將薄片從模具脫模。 重複上述的動作，來製造1 〇片成型薄膜。目視評價成 型面，結果得到無空氣咬入、或轉印不良等、且整面均勻 地被轉印之成型薄片。 (9) 使用上述條件各別地測定加壓前的溫度調整板的 變形之結果，能夠確認在中央附近爲1 9 0微米、周邊部附 % 近爲175微米，且係被加壓成爲中央凸出15微米的狀態。 測定上述的加壓變形係使用KEYENCE公司製之雷射 聚焦位移計LT 8 100來進行。將傳感頭放置溫度調整板上 方，在板的整面測定2 0點的變位。又，測定板變形可使用 已隔熱前端之刻度盤指示器（dial gauge)來測定。 板表面的溫度控制係藉由插入板內部之熱電偶的溫度 來進行。預先將熱電偶貼在板表面，並掌握板表面溫度與 板的內部溫度的相互關係，基於該相互關係藉由板內部的 -24- 200824882 溫度來控制。 又，在以下的實施例、比較例，亦同樣地進行來測定 板變形及控制板表面的溫度。 實施例2 (1) 模具尺寸：500毫米（薄膜厚度方向）x800毫米（薄膜 行進方向）x20毫米（厚度）。 (2) 模具材質：銅。 (3) 微細形狀：使用間距50微米、凸部寬度25微米、 凸部高度50微米、且從薄膜行進方向觀察時剖面爲矩形形 狀之物。 (4) 加壓裝置：最大能夠加壓至3 00 OkN，且藉由油壓泵 加壓。 (5) 在加壓裝置內上下安裝2片鋁合金製且尺寸爲7〇0 毫米（薄膜厚度方向）x 1 000毫米（薄膜行進方向）的溫度調整 板，各自連結至加熱裝置、冷卻裝置。又，模具係安裝在 下側的溫度調整板。加熱裝置係熱媒循環裝置、且熱媒係 使用BARRELTHERM #400(松村石油股份公司製），使加熱 至1 5 0 °C之物以1 〇 〇升/分鐘的流量流動。又’冷卻裝置係 冷卻水循環裝置，且使冷卻至20 °C之水以150升/分鐘的流 量流動。 (6) 而且，在上下溫度調整板的中央附近’加熱用熱媒 流路係設置各別的熱媒流路，並以15〇。(：、20升/分鐘的流 量使熱媒（BARRELTHERM #400)流動。 (7) 薄片：由聚對酞酸乙二酯樹脂所構成，厚度爲100 -25 - 200824882 微米（厚度不均：±ι〇微米）、寬度爲520毫米。 (8) 動作方法：使用上述的裝置’如下述進行成型。預 先將樹脂薄片放置在模具上，接著，將溫度調整板，上下 都是加溫至中央部爲110°c、周邊部爲l〇〇°C後，將上側板 下降，來開始薄膜加壓。加壓係模具表面爲5MPa並進行 3 0秒。又，在加壓中只有使溫度調整板的電熱加熱器爲 OFF(關）。隨後，在繼續力D壓的狀態，冷卻上下的溫度調整 板。在各溫度調整板成爲6 0 °C時停止冷卻。上下都冷卻完 成時，放開加壓。隨後將薄片從模具脫模。 重複上述的動作，來製造1 〇片成型薄膜。目視評價成 型面，結果得到無空氣咬入、或轉印不良等、且整面均勻 地被轉印之成型薄片。 (9) 使用上述條件各別地測定加壓前的溫度調整板的 變形之結果，能夠確認在中央附近爲2 0 0微米、周邊部附 近爲1 7 0微米，且係被加壓成爲中央凸出3 0微米的狀態。 實施例3 (1) 模具尺寸：500毫米（薄膜厚度方向）x800毫米（薄膜 行進方向）χ40毫米（厚度）。、 (2) 模具材質：銅。 (3) 微細形狀：使用間距50微米、凸部寬度25微米、 凸部高度5 0微米、且從薄膜行進方向觀察時剖面爲矩形形 狀之物。 (4) 加壓裝置：最大能夠加壓至3 000kN，且藉由油壓泵 加壓。 -26 - 200824882 (5) 在加壓裝置內上下安裝2片鋁合金製且尺寸爲700 毫米（薄膜厚度方向）χ1000毫米（薄膜行進方向）的溫度調整 板，各自連結至加熱裝置、冷卻裝置。又，模具係安裝在 下側的溫度調整板。加熱裝置係熱媒循環裝置、且熱媒係 使用BARRELTHERM #400(松村石油股份公司製），使加熱 至150°C之物以100升/分鐘的流量流動。又，冷卻裝置係 冷卻水循環裝置，且使冷卻至2 (TC之水以1 5 0升/分鐘的流 量流動。 (6) 而且，在模具內部設置熱媒配管用以加熱模具的中 央附近，使加熱至1 2 0 °C的熱媒以1 0升/分鐘的流量流動。 (7) 薄片：由聚對酞酸乙二酯樹脂所構成，厚度爲80 微米（厚度不均：±4微米）、寬度爲520毫米。 (8) 動作方法：使用上述的裝置，如下述進行成型。預 先將樹脂薄片放置在模具上，接著，將溫度調整板，上下 都是以11 〇 °c設定而調溫，並藉由使模具中央流動熱媒來 加熱至模具中央的溫度爲1 1 2 °c、周邊部爲1 0 5 °c後，將上 V 側板下降，來開始薄膜加壓。加壓係模具表面爲5MPa並 進行3 0秒。又，在加熱中停止模具的熱媒循環。隨後，在 繼續加壓的狀態，冷卻上下的溫度調整板。在各溫度調整 板成爲60 °C時停止冷卻。上下都冷卻完成時，放開加壓。 隨後將薄片從模具脫模。 重複上述的動作，來製造1 0片成型薄膜。目視評價成 型面，結果得到無空氣咬入、或轉印不良等、且整面均句 地被轉印之成型薄片。 27 - 200824882 (9)使用上述條件各別地測定加壓前的溫度調整板的 變形之結果，能夠確認在中央附近爲8 0微米、周邊部附近 爲71微米，且係被加壓成爲中央凸出9微米的狀態。 實施例4 (1) 模具尺寸：500毫米（薄膜厚度方向）x800毫米（薄膜 行進方向）x20毫米（厚度）。 (2) 模具材質：銅。 (3 )微細形狀：使用間距5 0微米、凸部寬度2 5微米、 凸部高度5 0微米、且從薄膜行進方向觀察時剖面爲矩形形 狀之物。 (4) 加壓裝置：最大能夠加壓至3 000kN，且藉由油壓泵 加壓。 (5) 在加壓裝置內上下安裝2片鋁合金製且尺寸爲700 毫米（薄膜厚度方向）χ1000毫米（薄膜行進方向）的溫度調整 板’各自連結至加熱裝置、冷卻裝置。又，模具係安裝在 下側的溫度調整板。加熱裝置係熱媒循環裝置、且熱媒係 使用BARRELTHERM #400(松村石油股份公司製），使加熱 至150°C之物以10()升/分鐘的流量流動。又，冷卻裝置係 冷卻水循環裝置，且使冷卻至2 0 °C之水以1 5 0升/分鐘的流 量流動。 (6) 而且，在上下溫度調整板的中央附近係埋設有7kw % β B力D熱器，與熱媒加熱裝置能夠各別調整溫度。 (7) 薄片：由聚對酞酸乙二酯樹脂所構成，厚度爲1〇〇 微米（厚度不均·· ±7微米）、寬度爲520毫米。 -28- 200824882 (8) 厚度計：在加壓側固定設置X射線式的薄片厚度測 定傳感器，來測定薄片搬運方向的厚度。厚度分布爲14微 米。 (9) 動作方法：使用上述的裝置，如下述進行成型。邊 使用厚度傳感器測定薄片的厚度、邊安裝在模具上。接著， 將溫度調整板，上下都是加溫至中央部爲1 1 0 °C、周邊部 爲1 〇 0 °C後，將上側板下降，來開始薄膜加壓。加壓係模 具表面爲5MPa並進行30秒。又，在加壓中只有使溫度調 整板的電熱加熱器爲OFF(關）。隨後，在繼續加壓的狀態， 冷卻上下的溫度調整板。在各溫度調整板成爲6 0 °C時停止 冷卻。上下都冷卻完成時，放開加壓。隨後將薄片從模具 脫模。 重複上述的動作，來製造1 0片成型薄膜。目視評價成 型面，結果得到無空氣咬入、或轉印不良等、且整面均勻 地被轉印之成型薄片。 (1 0)使用上述條件各別地測定加壓前的溫度調整板的 " 變形之結果，能夠確認在中央附近爲1 9 0微米、周邊部附 近爲1 7 5微米，且係被加壓成爲中央凸出1 5微米的狀態。 比較例1 使用與實施例1的裝置相同裝置，但是未使用中央加 熱用加熱器，並藉由實施例1同一條件加壓，結果在薄膜 中央部因空氣咬入而產生非轉印部。以相同條件製造1 0片 成型薄膜，但是在全部薄片都產生非轉印部。 【圖式簡單說明】 -29- 200824882 第1圖係模式性例示適合用以實施本發明微細形狀轉 印片之製法的本發明微細形狀轉印片之製造裝置之一個實 施態樣之槪略正面圖。 第2圖係模式性例示適合用以實施本發明微細形狀轉 印片之製法的本發明微細形狀轉印片之製造裝置之另外一 個實施態樣之槪略正面圖。 第3圖係模式性例示使用第1圖所示實施本發明的微 細形狀轉印片之製造裝置並使賦形面的中央部的加熱狀態 爲ON而加壓後的狀態之槪略正面圖。 第4圖係模式性例示使用第3圖所示實施本發明微細 形狀轉印片之製造裝置，使賦形面的中央部的加熱狀態爲 〇 N而加壓後將其Ο F F，使賦形面均勻溫度化而平坦化後之 加壓狀態之槪略正面圖。 第5圖係模式性說明在第1圖所例示使用實施本發明 微細形狀轉印片之製造裝置的溫度調整板的溫度分布與該 溫度調整板的熱膨脹量之關係的一個例子之槪略正面圖。 第6圖係模式性顯示本發明微細形狀轉印片之製造裝 置的溫度調整板內的中央部所附設加熱介質的各種態樣例 之槪略平面圖，在同圖（a)係中央熱媒配管（並行）方式，（b) 係中央熱媒配管（直行）方式，（c)係中央加熱器埋設及熱媒 配管方式，（d)係加熱器埋設方式，在（a)〜（d)的各圖，左 側係平面圖，右側係其側面圖。 第7圖係模式性例示適合用以實施本發明微細形狀轉 印片之製法的本發明微細形狀轉印片之製造裝置之另外一 -30- 200824882 個實施態樣例子，係模式性顯示在模具內組入溫度調整系 統而成之裝置例之槪略正面圖。 第8圖係模式性例示使用第7圖所示實施本發明的微 細形狀轉印片之製造裝置並使賦形面的中央部的加熱狀態 爲ON而加壓後的狀態之槪略正面圖。 第9 圖 係 模 式 性 例 示 在 狀轉 印片 之 製 造 裝 置 ， 附 加 冷卻 手段 之 構 成 而 成 之 本 發 置之 另外 — 個 實 施 態 樣 之 槪 【主 要元 件 符 號 說 明 ] 1 微 細 形 狀 轉 印 片 之 製 2 加 壓 裝 置 3 模 具 4 薄 片 狀 基 材 5 上 溫 度 調 整 板 6 下 溫 度 調 整 板 7 中 央 加 熱 用 溫 度 調 整 8 熱 媒 循 1¾ 裝 置 9 冷 卻 水 熱 循 iceea. 裝 置 10 中 央 加 熱 用 溫 度 三田 δ周 整 2 1 薄 片 厚 度 測 定 傳 感 器 22 薄 片 搬 運 輥 23 信 號 演 算 器 板 板 第1圖所示實施本發明微細形 按照薄片厚度控制加熱手段、 明的微細形狀轉印片之製造裝 略正面圖。 造裝置(6) In addition, an electric heater of 7 kW -23 - 200824882 is embedded in the vicinity of the center of the upper and lower temperature adjustment plates, and the temperature can be adjusted separately from the heat medium heating device. (7) Sheet: It consists of a polyethylene terephthalate resin having a thickness of 1 μm (uneven thickness: ± 7 μm) and a width of 520 mm. (8) Method of operation: Using the above apparatus, molding was carried out as follows. The resin sheet was placed on the mold in advance, and then the temperature adjustment plate was heated up and down to a central portion of ll 〇 ° C, and the peripheral portion was 100 ° C, and then the upper side plate was lowered to start film pressurization. The surface of the pressurizing mold was 5 MPa and was carried out for 30 seconds. Further, only the electrothermal heater of the temperature adjustment plate is turned OFF during the pressurization. Subsequently, the upper and lower temperature adjustment plates are cooled while the pressurization is continued. The cooling was stopped when each temperature adjustment plate became 60 °C. Release the pressure when the upper and lower sides are cooled. The sheet is then released from the mold. The above operation was repeated to manufacture a 1-sheet formed film. The molded surface was visually evaluated, and as a result, a molded sheet having no air biting or poor transfer, and uniformly transferred over the entire surface was obtained. (9) The results of the deformation of the temperature adjustment plate before pressurization were measured for each of the above conditions, and it was confirmed that the vicinity of the center was 190 μm, the peripheral portion was approximately 175 μm, and was pressed to become the center convex. Out of the 15 micron state. The above-described pressurization deformation was measured using a laser focus displacement meter LT 8 100 manufactured by KEYENCE. Place the sensor head on the temperature adjustment board and measure the displacement of 20 points on the entire surface of the board. Further, the deformation of the measuring plate can be measured using a dial gauge of the insulated front end. The temperature control of the surface of the board is carried out by the temperature of the thermocouple inserted inside the board. The thermocouple is attached to the surface of the board in advance, and the relationship between the surface temperature of the board and the internal temperature of the board is grasped, and the relationship is controlled by the temperature of -24-200824882 inside the board. Further, in the following examples and comparative examples, the deformation of the sheet and the temperature of the surface of the control panel were measured in the same manner. Example 2 (1) Mold size: 500 mm (film thickness direction) x 800 mm (film traveling direction) x 20 mm (thickness). (2) Mold material: copper. (3) Fine shape: a shape having a pitch of 50 μm, a convex portion width of 25 μm, a convex portion height of 50 μm, and a rectangular cross section when viewed from the film advancing direction. (4) Pressurizing device: It can be pressurized to a maximum of 300 OkN and pressurized by a hydraulic pump. (5) Two temperature-adjusting plates made of aluminum alloy and having a size of 7 mm mm (film thickness direction) x 1 000 mm (film traveling direction) were attached to the pressurizing device, and connected to a heating device and a cooling device, respectively. Further, the mold is attached to the lower temperature adjustment plate. The heating device was a heat medium circulation device, and the heat medium was flowed at a flow rate of 1 Torr/min using a BARRELTHERM #400 (made by Matsumura Oil Co., Ltd.). Further, the cooling device was a cooling water circulation device, and water cooled to 20 ° C was flowed at a flow rate of 150 liter / minute. (6) Further, in the vicinity of the center of the upper and lower temperature adjustment plates, the respective heat medium flow paths are provided with a heat medium flow path of 15 Torr. (:, 20 liters / minute flow rate to make the heat medium (BARRELTHERM #400) flow. (7) Sheet: composed of polyethylene terephthalate resin, thickness 100 -25 - 200824882 micron (thickness unevenness: ± 〇〇micron), width 520 mm. (8) Method of operation: Using the above-mentioned device 'molding as follows. The resin sheet is placed on the mold in advance, and then the temperature adjustment plate is heated up and down to the center. After the temperature was 110 ° C and the peripheral portion was 10 ° C, the upper side plate was lowered to start the film pressurization. The surface of the press mold was 5 MPa and was carried out for 30 seconds. Further, only the temperature adjustment plate was used during pressurization. The electric heater is turned OFF. Then, in the state where the force D is continued, the upper and lower temperature adjustment plates are cooled. When each temperature adjustment plate becomes 60 °C, the cooling is stopped. When the cooling is completed, the release is performed. Then, the sheet was released from the mold. The above operation was repeated to produce a sheet-forming film. The molding surface was visually evaluated, and as a result, no air biting, poor transfer, and the like were obtained, and the entire surface was uniformly transferred. Forming sheets. (9) Using the above conditions When the deformation of the temperature adjustment plate before the pressurization was measured, it was confirmed that the vicinity of the center was 200 μm, the vicinity of the peripheral portion was 170 μm, and the pressure was raised to a central convexity of 30 μm. Example 3 (1) Mold size: 500 mm (film thickness direction) x 800 mm (film traveling direction) χ 40 mm (thickness)., (2) Mold material: copper. (3) Fine shape: using a pitch of 50 μm, convex The width of the portion is 25 μm, the height of the convex portion is 50 μm, and the cross section is rectangular when viewed from the direction in which the film travels. (4) Pressurizing device: It can be pressurized up to 3 000 kN and pressurized by a hydraulic pump. -26 - 200824882 (5) Two temperature-adjusting plates made of aluminum alloy and having a size of 700 mm (film thickness direction) χ 1000 mm (film traveling direction) are attached to the upper and lower sides of the pressurizing device, and are connected to a heating device and a cooling device. In addition, the mold is attached to the lower temperature adjustment plate. The heating device is a heat medium circulation device, and the heat medium is BARRELTHERM #400 (made by Matsumura Oil Co., Ltd.), and the object heated to 150 ° C is 100 liters / minute. Further, the cooling device is a cooling water circulation device, and is cooled to 2 (TC water flows at a flow rate of 150 liters/min. (6) Further, a heat medium pipe is provided inside the mold to heat the center of the mold. In the vicinity, the heat medium heated to 120 ° C was flowed at a flow rate of 10 liters / minute. (7) Sheet: consisting of polyethylene terephthalate resin, thickness 80 μm (uneven thickness: ± 4 μm), width 520 mm. (8) Method of operation: Using the above apparatus, molding is carried out as follows. The resin sheet is placed on the mold in advance, and then the temperature adjustment plate is adjusted to a temperature of 11 〇°c above and below, and is heated to a temperature of 1 1 2 ° in the center of the mold by flowing a heat medium in the center of the mold. c. After the peripheral portion is 1 0 5 °c, the upper V side plate is lowered to start film pressurization. The surface of the pressurizing mold was 5 MPa and was carried out for 30 seconds. Further, the heat medium circulation of the mold is stopped during heating. Subsequently, the upper and lower temperature adjustment plates are cooled while continuing to be pressurized. The cooling was stopped when each temperature adjustment plate became 60 °C. When the cooling is completed, the pressure is released. The sheet is then released from the mold. The above operation was repeated to produce 10 formed films. The molded surface was visually evaluated, and as a result, a molded sheet having no air biting or poor transfer, and the entire surface was transferred was obtained. 27 - 200824882 (9) The results of the deformation of the temperature adjustment plate before pressurization were measured using the above conditions, and it was confirmed that the vicinity of the center was 80 μm, the vicinity of the peripheral portion was 71 μm, and it was pressurized to become a central convex. 9 micron state. Example 4 (1) Mold size: 500 mm (film thickness direction) x 800 mm (film traveling direction) x 20 mm (thickness). (2) Mold material: copper. (3) Fine shape: a shape having a pitch of 50 μm, a convex portion width of 25 μm, a convex portion height of 50 μm, and a rectangular cross section when viewed from the film advancing direction. (4) Pressurizing device: It can be pressurized up to 3 000 kN and pressurized by a hydraulic pump. (5) Two temperature-adjusting plates made of aluminum alloy and having a size of 700 mm (film thickness direction) χ 1000 mm (film traveling direction) are attached to the heating device and the cooling device. Further, the mold is attached to the lower temperature adjustment plate. The heating device was a heat medium circulation device, and the heat medium was flowed at a flow rate of 10 () liter/min using a BARRELTHERM #400 (manufactured by Matsumura Oil Co., Ltd.). Further, the cooling device was a cooling water circulation device, and water cooled to 20 °C was flowed at a flow rate of 150 liters/min. (6) Further, a 7kw % β B force D heater is embedded in the vicinity of the center of the upper and lower temperature adjustment plates, and the temperature can be adjusted separately from the heat medium heating device. (7) Sheet: It consists of a polyethylene terephthalate resin having a thickness of 1 μm (thickness of thickness ± 7 μm) and a width of 520 mm. -28- 200824882 (8) Thickness gauge: An X-ray sheet thickness measuring sensor is fixedly attached to the pressurizing side to measure the thickness of the sheet conveying direction. The thickness distribution is 14 microns. (9) Method of operation: Using the above apparatus, molding was carried out as follows. The thickness of the sheet was measured using a thickness sensor and mounted on a mold. Next, the temperature adjustment plate was heated up and down to a center portion of 1 10 ° C, and the peripheral portion was 1 〇 0 ° C, and then the upper side plate was lowered to start film pressurization. The surface of the pressurizing mold was 5 MPa and was carried out for 30 seconds. Further, only the electric heater for adjusting the temperature is turned OFF during the pressurization. Subsequently, the upper and lower temperature adjustment plates are cooled while the pressurization is continued. The cooling was stopped when each temperature adjustment plate became 60 °C. When the cooling is completed, the pressure is released. The sheet is then released from the mold. The above operation was repeated to produce 10 formed films. The molded surface was visually evaluated, and as a result, a molded sheet having no air biting or poor transfer, and uniformly transferred over the entire surface was obtained. (10) The results of the deformation of the temperature adjustment plate before pressurization were measured using the above conditions, and it was confirmed that the vicinity of the center was 190 μm, and the vicinity of the peripheral portion was 175 μm, and it was pressurized. It becomes a state in which the center protrudes by 15 μm. Comparative Example 1 The same apparatus as that of the apparatus of Example 1 was used. However, the central heating heater was not used and pressurized under the same conditions as in Example 1, and as a result, a non-transfer portion was generated at the center of the film by air entrapment. Ten molded films were produced under the same conditions, but a non-transfer portion was produced on all the sheets. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing an embodiment of an apparatus for manufacturing a fine-shaped transfer sheet of the present invention which is suitable for carrying out the method for producing a fine-shaped transfer sheet of the present invention. Figure. Fig. 2 is a schematic front view showing another embodiment of the apparatus for manufacturing a fine-shaped transfer sheet of the present invention which is suitable for carrying out the method for producing the fine-formed transfer sheet of the present invention. Fig. 3 is a schematic front view showing a state in which the manufacturing apparatus of the fine-shaped transfer sheet of the present invention shown in Fig. 1 is used and the heating state of the central portion of the shaping surface is turned ON and pressurized. Fig. 4 is a view schematically showing a manufacturing apparatus for carrying out the fine-shaped transfer sheet of the present invention, as shown in Fig. 3, in which the heating state of the central portion of the shaping surface is 〇N and pressurization, and then ΟFF The front view of the pressurized state after the surface is uniformly heated and flattened. Fig. 5 is a schematic front view showing an example of the relationship between the temperature distribution of the temperature adjustment plate and the amount of thermal expansion of the temperature adjustment plate, which is used in the apparatus for manufacturing the fine shape transfer sheet of the present invention, as exemplified in Fig. 1 . . Fig. 6 is a schematic plan view showing various aspects of a heating medium attached to a central portion of a temperature adjustment plate of a manufacturing apparatus for a fine-shaped transfer sheet of the present invention, and is a central heat medium pipe in the same drawing (a). (parallel) method, (b) central heat medium piping (straight line), (c) central heater burying and heat medium piping, (d) heater burying method, (a) to (d) In each figure, the left side is a plan view, and the right side is a side view. Fig. 7 is a view schematically showing another example of the embodiment of the apparatus for manufacturing a fine-shaped transfer sheet of the present invention which is suitable for carrying out the method for producing the fine-shaped transfer sheet of the present invention, which is schematically shown in the mold. A schematic front view of a device example in which a temperature adjustment system is incorporated. Fig. 8 is a schematic front view showing a state in which the apparatus for manufacturing a fine-shaped transfer sheet of the present invention shown in Fig. 7 is used, and the heating state of the central portion of the shaping surface is turned ON and pressurized. Fig. 9 is a schematic diagram showing the manufacturing apparatus of the transfer sheet, and the additional cooling means, which is the other embodiment of the present invention. [Main component symbol description] 1 Micro-transfer transfer sheet 2 Pressing device 3 Mold 4 Sheet-like substrate 5 Upper temperature adjustment plate 6 Lower temperature adjustment plate 7 Temperature adjustment for central heating 8 Heat medium circulation 13⁄4 Device 9 Cooling water heat according to iceea. Device 10 Central heating temperature Mita δ week 2 1 Sheet thickness measuring sensor 22 Sheet conveying roller 23 Signal calculator board Fig. 1 is a front view showing the manufacturing of the fine shape transfer sheet according to the sheet thickness control heating means and the fine shape transfer sheet shown in Fig. 1 . Manufacturing device