200824825 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種雷射輔助放電加工裝置及方法，其兼具 強制排除加工屑及加工速度快等優點。 【先前技術】 ‘200824825 IX. Description of the Invention: [Technical Field] The present invention relates to a laser auxiliary electric discharge machining apparatus and method, which have the advantages of forcibly removing machining chips and processing speed. [Prior Art] ‘
如第七圖所示’習知放電加工機係利用一實心電極71， 間隔-預定距離對-工件91進行放電加工(如第八圖所示，由 淺加工至深），由於放電過程中會在該工件91上形成一溶融區 域913 ’並有加工屬914產生。故通常是在該工件91之_側 邊設置-工作液體供應部72，翻_該轉91之放電加工 區射出工作液體72卜而將加工屑914喷走。其缺點在於： [1]不易將加X·屑排除。制放電加工機固然具有從實 心電極(亦即放電加工部）旁，朝工件喷出工作液體的結構，但 是，這樣的設計，工作液體只會從放電加工部的“其中一旁，， 朝工件喷出，並非由放電加工部朝工件直接“面對面，，喷出， 這樣由旁邊喷液的角度，對於部分死角的加工屑，無法予以有 效排除。 m加工速度較慢1知的放電加卫，單純利用放電將 金屬移除’每次只能移除極少的量，故，加工速度相當慢。特 別是在深孔加工時’由於加工屑不易移除，嚴重影響雷射加工 之速度。 係利用一空心電極 如第九圖所示’另-種習知放電加工機 5 200824825 8二間隔-預定距離對工件別進行放電加卫(如第十圖所示， f又ΙΆ向移動的細加工），同樣在放電過程巾形成一溶融區 域913 ’亚有加工屑914產生。此一習知結構固然可以從該空 〜電極81其空心之通道811直接朝工件9l喷出工作氣體 (也可以疋工作液體），而將加工屬幻4喷走（以工作氣體 812將加工屑914喷走之加工過程可簡稱「氣中放電」技術）。 但其仍會產生以下缺失： [Π不易將加工肩排除。使用空心電極時，雖然可以藉由 空心電極之通道内的工作氣體之喷流作用，增加排除加工屑之 效果，但是隨著空心電極加工深度的增加，加工屑排除的效果 就會逐漸減少，進而降低加工的速度。 [2]加工速度較慢。此氣中放電加讀構，其空心電極 si只以“環狀面積，，來進行放電，空心電極81之中央部位的 通道811部份卻無法進行放電加工，因此，會形成一略為凸起 之殘留區915(如第十圖所示），若是橫向移動空心電極幻，固 然可以丨艾忮消除此殘留區915，但是也因此使整體放電加 工速度變慢了’且魏區915可能是不均㈣姨，極易造成 加工肩9U殘留（光是喷工作氣體812(或是液體），有時並無 法完全將加工屑914吹掉）’另外’殘留區915若未去除時則 會影響整體之表面平整度。 因此，有必要研發出可解決上述習職置問題之新技術。 【發明内容】 200824825 本發月之主要目的，係提供—種雷射辅助放電加工裝置及 方法，其可強制排除加工屑。 本發月之-人目的，係提供—種雷射輔助放電加工裝置及 方法’其使放電加工速度快。 本發明係提供-種雷射輔助放電加工裝置，其包括··一管 狀電極’係至少具有―固定端、—工作端及—中央通道，該工 作端並具有-雜之放絲面； 、、田射光產生部’侧以產生-雷射光束以便經該中央通 道而由該工作端之延伸方向射出； 、 ▲ 一工作流體供應部，係用以供應-功流體由該固定端進 z中央通道’再由该工作端輸出；其中，該工作流體係選自 液體、氣體其中之一；. 放電控制部，係至少具有一用以連接至該管狀電極之第 -極部，及-用以連接至一工件之第二極部； -控制部’侧以朗該放電控綱之供電、該雷射光產 生权雷射絲以及敎作流體供應部供應工作越之流量。 同時，本發明亦提供-種雷射辅助放電加工方法， 下列步驟： 一·準備步驟； —•雷射輔助放電加工步驟；及 三·完成步驟。 7 200824825 本發明之上述目的與優點’不難從下述所選用實施例之詳 細說明與附圖中，獲得深入瞭解。 啟以下列實施例並配合圖式詳細說明本發明於後： 【實施方式】 ' 參閲第一及第二圖，本發明係為一種『雷射輔助放電加工 - 裝置及方法』，其中，該裝置部分至少包括： 一管狀電極10，其具有一固定端11、一工作端12及一中 • 央通道13，該工作端12係具有一環狀之放電表面121 ; -雷射光產生部2G，侧喊生—雷射絲2卜該雷射 光束21係經該中央通道13而由該工作端12之方向射出；當 然’此中央通道13也兼具有導引雷射光束21之方向及限定投 射區域之功能；Λ 一工作流體供應部30，_以供應―卫作流體3卜該工 作流體31係由該固定端u進入該中央通道13，再由該工作 籲 端12輸出該中央通道13;其中，該工作流體31係選自液體、 氣體其中之一； 放電控制440，係具有一用以連接至該管狀電極1〇之 第一極部4卜以及-用以連接至—工件91之第二極部42 ; 控制。P 50 ’係用以控制該放電控制部仙之供電、控制 忒田射光產生4 20發出該雷射光束2卜以及控繼工作流體 供應部30輸出之工作流體31之流量。 如此為本發明之雷射輔助放電加工裝置。 8 200824825 同％啟動§亥雷射光產生部2〇、該工作流體供應部3〇及該 放電控制部40(這個部分，原則上可以藉由該控制部5〇進行 設定控制）；則睛產生下述雷射加工與放電加工動作·· [1] .如第二及第三圖所示’該雷射光產生部2Q發出預定 量的雷射光束21，該雷射光束21由該管狀電極10的固定端 η ’經該中央通道13，而由該卫作端12照射至該工件91;As shown in the seventh figure, the conventional EDM machine uses a solid electrode 71, and the interval-predetermined distance pair-workpiece 91 is subjected to electrical discharge machining (as shown in the eighth figure, from shallow processing to deep), due to the discharge process. A molten region 913' is formed on the workpiece 91 and is produced by the processing genus 914. Therefore, it is common to provide a working liquid supply unit 72 on the side of the workpiece 91, and the electric discharge machining area of the turn 91 emits the working liquid 72 to spray the machining chips 914. The disadvantages are: [1] It is not easy to exclude X· chips. The electric discharge machine has a structure in which a working liquid is sprayed toward the workpiece from the solid electrode (that is, the electric discharge machining portion). However, in such a design, the working liquid is only sprayed from the "one side of the electric discharge machining portion" toward the workpiece. It is not directly discharged from the electric discharge machining unit to the workpiece, and it is sprayed out, so that the angle of the liquid spray from the side can not be effectively eliminated for the machining chips of some dead angles. m processing speed is slower. A known discharge is added. The use of discharge to remove metal is only a very small amount. Therefore, the processing speed is quite slow. Especially in deep hole machining, the machining speed is difficult to remove due to machining chips, which seriously affects the speed of laser processing. Using a hollow electrode as shown in the ninth figure, another type of conventional electric discharge machine 5 200824825 8 two intervals - a predetermined distance to discharge the workpiece (as shown in the tenth figure, f is moving to the fine Processing), also in the discharge process towel forming a molten region 913 'there are machining chips 914 produced. Although the conventional structure can directly eject the working gas (which can also be used as the working liquid) from the hollow channel 811 of the empty electrode 81 to the workpiece 9l, the process is sprayed away (the working gas 812 will process the scrapings). The processing of 914 spray can be referred to as "gas discharge" technology. However, it still produces the following defects: [Π It is not easy to exclude the processing shoulder. When the hollow electrode is used, although the effect of removing the machining debris can be increased by the jet action of the working gas in the passage of the hollow electrode, as the processing depth of the hollow electrode increases, the effect of removing the machining debris is gradually reduced. Reduce the speed of processing. [2] The processing speed is slow. In this gas discharge and read configuration, the hollow electrode si is discharged only by the "annular area", and the portion of the channel 811 of the central portion of the hollow electrode 81 cannot be subjected to electrical discharge machining, and therefore, a slightly convex portion is formed. The residual area 915 (as shown in the tenth figure), if the hollow electrode is moved laterally, the residual area 915 can be eliminated by the 丨, but the overall discharge processing speed is slowed down, and the Wei area 915 may be uneven. (4) 姨, it is easy to cause the processing shoulder 9U residue (light is sprayed with working gas 812 (or liquid), sometimes it is not possible to completely blow off the machining debris 914) 'Other' residual zone 915 will affect the overall if not removed Surface flatness. Therefore, it is necessary to develop a new technology that can solve the above problem. [Invention content] 200824825 The main purpose of this month is to provide a laser auxiliary electric discharge machining device and method, which can be forcibly excluded Processing scraps. The purpose of this month is to provide a laser auxiliary electric discharge machining device and method which makes the electric discharge machining speed fast. The present invention provides a laser auxiliary electric discharge machining package. , comprising: a tubular electrode 'having at least a "fixed end, a working end and a - a central passage, the working end having a - miscellaneous flanging surface;", a field light generating portion 'side to generate - a laser beam In order to exit through the central passage by the extending end of the working end; ▲ a working fluid supply portion for supplying the working fluid from the fixed end into the z-channel and then outputting from the working end; wherein, the work The flow system is selected from one of a liquid and a gas; the discharge control portion has at least one first pole portion for connecting to the tubular electrode, and - for connecting to a second pole portion of a workpiece; - a control portion The side is provided by the power supply of the discharge control, the laser light generating weight laser and the supply flow of the working fluid supply portion. Meanwhile, the present invention also provides a laser auxiliary electric discharge machining method, the following steps: - preparation steps; - laser assisted electrical discharge machining steps; and three completion steps. 7 200824825 The above objects and advantages of the present invention are not difficult to obtain from the detailed description and drawings of the selected embodiments described below. The present invention will be described in detail below with reference to the following embodiments: [Embodiment] Referring to the first and second figures, the present invention is a "laser auxiliary discharge machining-device and method", Wherein, the device portion comprises at least: a tubular electrode 10 having a fixed end 11, a working end 12 and a central passage 13 having an annular discharge surface 121; - laser light generation The portion 2G, the side shouting - the laser beam 2 is emitted through the central passage 13 in the direction of the working end 12; of course, the central passage 13 also has the guidance laser beam 21 The direction and the function of defining the projection area; Λ a working fluid supply unit 30, for supplying the "the working fluid 3", the working fluid 31 enters the central passage 13 from the fixed end u, and the working end 12 outputs the The central passage 13; wherein the working fluid 31 is selected from one of a liquid and a gas; the discharge control 440 has a first pole portion 4 for connecting to the tubular electrode 1 and - for connecting to - The second pole portion 42 of the workpiece 91; control. P 50 ' is for controlling the power supply of the discharge control unit, controlling the flow of the laser beam 2 to emit the laser beam 2 and controlling the flow of the working fluid 31 outputted by the working fluid supply unit 30. Thus, the laser assisted electrical discharge machining apparatus of the present invention. 8 200824825 The same as the % start §Hai Lei light generation unit 2〇, the working fluid supply unit 3〇 and the discharge control unit 40 (this part can be set and controlled by the control unit 5〇 in principle); Laser processing and electric discharge machining operation [1] As shown in the second and third figures, the laser light generating unit 2Q emits a predetermined amount of laser beam 21 from the tubular electrode 10 The fixed end η ' passes through the central passage 13 and is illuminated by the guard end 12 to the workpiece 91;
[2] ·該工作流體供應部3〇釋出該工作流體31(可以是氣 體/液體）’該工作流體31從該固定端11流進該中央通道13; 再從該工作端12輸出財央通道13，並流向該工件的； [3] ·該放電控制部4〇之第一極部41連接該管狀電極1〇; 該放電控制耗之第二極部42物紅件91，使該管狀電 極10與該工件91間產生電場； 藉此’該雷射光束21於該工件91上加工出一第一加工區 911 ;且該管狀電㈣與該工件91間產生電場，使該放絲 面⑵對該工件91產生放電加工懒工件 表 加工區912。 屬弟一 91受=，二射加工與放電加工係同時進行。至於該工件 又田射加工（第一加工區9J1)與放電加 的加?，職鮮㈣極.巾錢=3=) =1 γ走(如弟四圖所示），不會殘留在該工件幻上: 的講。本發明於該管狀電極内部形成-中央通 9 200824825 道13 ’從該中央通道13流出該工触體13，這樣的設計，使 工作流體31直接從管㈣極1G缸作端12朝讀91流出， 該放電表面⑵對社件91進行放電加卫(形成第二加工區 912)產生的加工屑’立顺卫作流體31帶走(也可以講是沖 走），加工屑不會殘留。 另外，該管狀電極10圓心部位雖設計空心的中央通道 13，但是’本發明亦從該中央通道13朝該工件91照射預 之錄絲21;藉由雷縣賴_辑91精加工(形 成第-加卫區911)，當然’雷射加工產生的金屬碎屑（即加工 屑），亦是被該工作流體31迅速帶走，不會殘留。 該第一加工區911係位於該第二加工區912之中心部位。 此外，參閱第六A圖，調整該雷射光產生部2〇之雷射光 束21之強度’使本發明之雷射加工之移除速度(也可講形成第 加工區911❺速度)可以調整成大約相等於放電加工之移除 速度(也可以講是形成第二加工區912的速度），如此適用於深 孔加工，亦適用於平面加工（銑削一平面）。 其次，參閱第六B圖，調高該雷射光產生部2〇之雷射光 束21之強度，使本發明之雷射加卫之移除速度快於放電加工 之移除速度，此時，該雷射光束21照射之第一加工區的 加工深度較深，相對的放電加工之第二加工區912部分較淺， 當應用於深孔加工時，此較深的第一加工區911形成一前導 200824825 孔，若顧於平面加功細—平面），則可增加整體之加工速 度。 、 當然’也可在粗加坤_第六B圖之方式，以縮短加工 時間，但在需要精密加工時則改用第六A圖之方式，則可_ 時效及表面平整度之要求。 芩閱第五圖，本發明之雷射輔助放電加工方法係包括下 步驟: 一 ·準備步驟61 :準備一雷射辅助放電加工裝置(如第一 及第二圖所示），其係職對—工件91進行加卫，該雷射辅助 放電加工裝置至少包括： 一管狀電極10，其具有一固定端u、一工作端12及 中央通道13 ’该工作端12係具有一環狀之放電表面121 · 一雷射光產生部20，係用以產生一雷射光束21，該 雷射光束21係經該中央通道13而由該工作端12之方向射 出；當然，此中央通道13也兼具有導引雷射光束21之方向及 限定投射區域之功能； 一工作流體供應部30，係用以供應一工作流體31， 该工作流體31係由該固定端11進入該中央通道13，再由兮 工作端12輪出該中央通道13 ;其中，該工作流體31係選自 液體、氣體其中之一； 一放電控制部40，係具有一用以連接至該管狀電極 11 200824825 之第-極部4卜-用以連接至該工件91之第二極部处； 一控制部5G 以控制該放電控制部4()之供電、控制該雷 射光產生部2〇發出該㈣絲21，以及控偷工作流體^ 部30輪出之工作流體31之流量；[2] The working fluid supply unit 3 releases the working fluid 31 (which may be gas/liquid) 'the working fluid 31 flows from the fixed end 11 into the central passage 13; and outputs the fiscal center from the working end 12 a channel 13 and flowing to the workpiece; [3] the first pole portion 41 of the discharge control portion 4 is connected to the tubular electrode 1〇; the discharge control consumes the second pole portion 42 of the object red member 91 to make the tubular An electric field is generated between the electrode 10 and the workpiece 91; thereby, the laser beam 21 is processed on the workpiece 91 by a first processing zone 911; and an electric field is generated between the tubular electric (4) and the workpiece 91 to make the surface (2) The electric discharge machining lazy workpiece table processing area 912 is generated for the workpiece 91. The brother-in-law is subject to the =, the two-shot processing and the electrical discharge machining system are carried out simultaneously. As for the workpiece and the field processing (the first processing zone 9J1) and the discharge plus, the service (four) pole. The towel money = 3 =) =1 γ walk (as shown in the fourth figure), will not remain in the The illusion of the workpiece: the speaking. The invention is formed inside the tubular electrode - the central passage 9 200824825 lane 13 ' flows out of the central contact 13 from the central contact 13 in such a manner that the working fluid 31 flows directly from the tube (four) pole 1G cylinder end 12 toward the reading 91, The discharge surface (2) discharges the machining material (forming the second processing zone 912) and the machining debris generated by the discharge surface (2) is carried away (also referred to as flushing away), and the machining debris does not remain. In addition, although the hollow center channel 13 is designed at the center of the tubular electrode 10, the present invention also irradiates the workpiece 91 from the central passage 13 to the pre-recorded wire 21; by Ray County Lai_91 finishing (formation - Guardian Zone 911), of course, 'metal scraps (ie, machining chips) produced by laser processing are also quickly taken away by the working fluid 31 and will not remain. The first processing zone 911 is located at a central portion of the second processing zone 912. Further, referring to FIG. 6A, adjusting the intensity of the laser beam 21 of the laser light generating portion 2 can make the removal speed of the laser processing of the present invention (also referred to as forming the first processing region 911 speed) can be adjusted to approximately The phase is equal to the removal speed of the electrical discharge machining (also referred to as the speed at which the second machining zone 912 is formed), which is suitable for deep hole machining and also for planar machining (milling a plane). Next, referring to FIG. 6B, the intensity of the laser beam 21 of the laser light generating unit 2 is increased, so that the laser blasting speed of the present invention is faster than the removal speed of the electric discharge machining. The processing depth of the first processing region irradiated by the laser beam 21 is deep, and the portion of the second processing region 912 of the opposite electrical discharge machining is shallow. When applied to deep hole processing, the deeper first processing region 911 forms a preamble. 200824825 Holes, if you focus on the plane plus work-plane, can increase the overall processing speed. Of course, it is also possible to shorten the processing time by thickening the _ _ sixth B diagram, but when it is necessary to use the sixth A diagram when precision machining is required, the aging and surface flatness requirements can be met. Referring to the fifth figure, the laser auxiliary electric discharge machining method of the present invention comprises the following steps: 1. Preparation step 61: preparing a laser auxiliary electric discharge machining device (as shown in the first and second figures), The workpiece 91 is modified. The laser auxiliary electric discharge machining apparatus comprises at least: a tubular electrode 10 having a fixed end u, a working end 12 and a central passage 13'. The working end 12 has a ring-shaped discharge surface 121. A laser light generating unit 20 is configured to generate a laser beam 21 which is emitted through the central passage 13 in the direction of the working end 12; of course, the central passage 13 also has The function of guiding the direction of the laser beam 21 and defining the projection area; a working fluid supply portion 30 for supplying a working fluid 31, the working fluid 31 entering the central passage 13 from the fixed end 11, and The working end 12 rotates the central passage 13; wherein the working fluid 31 is selected from one of a liquid and a gas; and a discharge control unit 40 has a first-pole portion 4 for connecting to the tubular electrode 11 200824825 Bu - used to connect to the a second pole portion of the member 91; a control portion 5G for controlling the power supply of the discharge control portion 4), controlling the laser light generating portion 2 to emit the (four) wire 21, and controlling the stolen working fluid portion 30 to rotate The flow rate of the working fluid 31;
二·雷射辅助放電加工步·2:該雷射光產生部2〇發出 預定量之雷射光束21，該雷縣束21由鮮狀電極心固 定端π經該中央通道13，而由該工作端12對該工件91進行 雷射加工出—第—加工區911;該管狀電極ig係間隔一預定 間隙對該1件91進行放電加H二加卫區粑； 輔助該管狀電極 —元成步驟63 :完成以該雷射光束21 10對該工件91進行加工。 如此為本發明之雷射辅助放電加工方法。 實務上’本發日聽―步包括不_雷射輔助加工方式如 參閱第六A圖’調整該雷射光產生部2()之雷射光束^之 強度，使該f射光束21 _工件91雷射加1轉—加j 911的速度，大約相等於管狀電極1〇對該工件9丨放電加工^ 該第二加工區912的速度’如此適用於深孔加翻於 面加工（銑削一平面）。 k用於十 再如第六B騎示，調高該雜歧生部2q之 之強度，使雷射光束21對該工件91進行雷射加工出第一 12 21 200824825 加工區911的速度，快於該管狀電極10對該工件91放電加工 出該第二加工區912的速度，如此，該雷射光束21照射之第 一加工區911的加工深度較深，相對的放電加工之第二加工區 912部分較淺，當應用於深孔加工時，此較深的第一加工區9 ^ 形成一前導孔，若應用於平面加工(銑削一平面），則可增加整 體之加工速度。2. Laser assisted discharge machining step 2: The laser light generating portion 2 emits a predetermined amount of the laser beam 21, and the Leixian beam 21 is passed from the fixed end of the fresh electrode core through the central passage 13 by the work The end portion 12 performs laser processing on the workpiece 91 - a processing region 911; the tubular electrode ig is discharged by a predetermined gap to add a H-addition zone to the one piece 91; assisting the tubular electrode - element forming step 63: Finishing the workpiece 91 with the laser beam 21 10 . Thus, the laser assisted electrical discharge machining method of the present invention. In practice, the 'this day's listening step includes the laser-assisted processing method, as shown in FIG. 6A' to adjust the intensity of the laser beam 2 of the laser light generating portion 2, so that the f-beam 21_workpiece 91 Laser plus 1 revolution - plus j 911 speed, approximately equal to the tubular electrode 1 〇 9 丨 discharge machining of the workpiece ^ the speed of the second processing zone 912 'is suitable for deep hole plus turning surface machining (milling a plane ). k is used for tenth, as in the sixth B riding, to increase the intensity of the heterogeneous portion 2q, so that the laser beam 21 laser-processes the workpiece 91 to the speed of the first 12 21 200824825 processing zone 911, fast The tubular electrode 10 discharges the workpiece 91 to the speed of the second processing zone 912. Thus, the processing depth of the first processing zone 911 irradiated by the laser beam 21 is deep, and the second processing zone of the opposite electrical discharge machining Part 912 is shallow. When applied to deep hole machining, the deeper first machining zone 9^ forms a leading hole. If applied to planar machining (milling a plane), the overall machining speed can be increased.
當然’依實際加工需要’也可單對工件91進行雷射加工。 實務上’不論是上述之裝置或方法中，該中央通道13係 至少具有下述兩種型態： ♦第-種型態’該中央通道13具有預定之開口直徑叫如 第二圖所示），該開Π直徑dl係介於數微米至數亳米之間。 第二種型態’該中央通道係為漸縮錐狀結構且具有一預定 之開口直徑，該開口直徑係介於數微来至數毫米之間(圖面未 示，合先陳明）。 兮第二2^述之裝置或方法巾，該第—極部41係為負極； 以 一 2係為正極；且在有些情況下，該 部41與42领實際加工需要而作相互切換。弟一極 又可方法中，雷翻助放電加工裝置 工件91做相触Γ 可用以使該管狀電極1〇與該 鈾n 動而進行加工，例如X轴、γ軸、2軸盆中之 ㈤續轉）。 13 200824825 本發明之優點及功效如下所述： Π]強制排除加1屑。本發明於管狀電極之圓心部位形成 空心的中央通道’藉由中央通道朝工件被加工的部位，“面對 面”直接噴出工作流體，使放電及雷射加工過程中產生的任何 加工屑，都在進行放電及雷射加工的同時，迅速被帶走，強制 排除加工屑。 [2]加工速度快。本發明從空心的中央通道，朝工件照射 預定量之f射絲’藉由餘絲對轉進行雷射加工，加快 放電加工的速度，故，加工速度快。 以上僅是藉她佳實施餅細朗本㈣，獅該實_ 所做的任何鮮修改鍵化，料麟本㈣之騎與範圍。 2以上詳細綱，可錢知本項聽细瞭本發明的確可 達成前述目的，實已符合專利法之規定，爰提出發明專利申請。 【圖式簡單說明】 第一圖係本發明之實施例示意圖 第二圖係本發明進行雷射加工及放電加工之示意圖 第三圖係第二圖之部分結構放大示意圖一 第四圖係第二圖之部分結構放大示意圖二 第五圖係本發明之流程示意圖 14 200824825 弟六A圖係本發明之加 结 、 YN 工過程之示意圖一 弟，、B圖係本發明之加 工過裎之示意圖二 Γ圖係第—種習吨術之加卫過程之示意圖-=\圖係第-调知技術之加卫過程之示意圖二 »九圖係第一種習知技術之加工過程之示意圖一 第十圖係第—種習知技術之加卫過程之示意圖二 【主要元件符號說明】 10管狀電極 11固定端 工作端 121放電表面 13中央通道 20雷射光產生部 21雷射光束 30工作流體供應部 31工作流體 40放電控制部 41第一極部 42第二極部 50控制部 61準備步驟 62雷射輔助玫電加工步驟63完成步驟 71實心電極 721工作液體 811通道 91工件 72工作液體供應部 81空心電極 812工作氣體 911第一加工區 912第二加工區 913熔融區域 914加工屑 915殘留區 92相對移動部 dl開口直徑 15Of course, the workpiece 91 can be laser processed only by the actual processing needs. In practice, in the above apparatus or method, the central passage 13 has at least the following two types: ♦ the first type 'the central passage 13 has a predetermined opening diameter as shown in the second figure) The opening diameter dl is between several micrometers and several millimeters. The second type 'the central passageway is a tapered tapered structure and has a predetermined opening diameter which is between a few micrometers and a few millimeters (not shown in the drawings). In the apparatus or method of the second aspect, the first pole portion 41 is a negative pole; and the second pole portion is a positive pole; and in some cases, the portions 41 and 42 are required to be mutually switched for actual processing. In the one-and-a-half method, the workpiece 91 of the lightning-assisting electric discharge machining device can be used to make the tubular electrode 1〇 and the uranium n-process, for example, in the X-axis, the γ-axis, and the 2-axis basin (5) Continued). 13 200824825 The advantages and effects of the present invention are as follows: Π] Forced removal of 1 chip. The invention forms a hollow central passage at the center of the tubular electrode. The surface of the workpiece is processed by the central passage, and the working fluid is directly sprayed "face-to-face" so that any machining debris generated during the discharge and laser processing is performed. At the same time of discharge and laser processing, it was quickly taken away, forcibly removing machining chips. [2] Processing speed is fast. According to the present invention, a predetermined amount of the f-ray is irradiated from the hollow central passage toward the workpiece by the laser processing of the counter-rotation to accelerate the speed of the electric discharge machining, so that the processing speed is fast. The above is only by her good implementation of the cake fine (four), the lion should be _ any fresh modification of the key, the material of Lin (four) riding and scope. 2 or more detailed outlines, you can understand that the present invention can achieve the above objectives, and it has already met the requirements of the Patent Law, and has filed an invention patent application. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a schematic view of an embodiment of the present invention. The second drawing is a schematic view of the laser processing and the electric discharge machining of the present invention. The third drawing is a partial enlarged structure of the second drawing. The fourth drawing is the second drawing. FIG. 5 is a schematic diagram of the flow of the present invention. Schematic diagram of the first process of the cultivating process of the syllabus -=\Graphic system - Schematic diagram of the process of cultivating the technology of the tweaking technique»The nine figure is the schematic diagram of the processing process of the first conventional technology Fig. 2 is a schematic diagram of the urging process of the prior art [main element symbol description] 10 tubular electrode 11 fixed end working end 121 discharge surface 13 central passage 20 laser light generating portion 21 laser beam 30 working fluid supply portion 31 Working fluid 40 discharge control unit 41 first pole portion 42 second pole portion 50 control portion 61 preparation step 62 laser assisted laser processing step 63 completes step 71 solid electrode 721 working liquid 811 72 the working fluid supply portion 81 of the hollow electrode 91 of the workpiece 812 911 working gas processing zone 912 first zone 913 second molten processed region 92 relatively moving portions dl 914 915 residual machining chips opening diameter region 15