TW200817646A - Heat pipe and method of manufacturing it - Google Patents

Abstract

A heat pipe capable of being remarkably increased in service life by surely exerting sealing effect even under high temperature, and a method of manufacturing the heat pipe. A heat pipe remarkably reduced in cost by increasing productivity and capable of being increased in service life. In the heat pipe (1), an upper plate reinforcement part (50), intermediate plate reinforcement parts (52), reinforcement parts (55) with slits, and a lower plate reinforcement part (60) are fitted to each other in a steam diffusing flow passage (44) facing the peripheral areas of a refrigerant filling hole (4) and an air exhaust hole (5) to form a column structure. Since an external force from a press (75) is supported by the column structure composed of the upper plate reinforcement part (50), the intermediate plate reinforcement parts (52), the reinforcement parts (55) with slits, and the lower plate reinforcement part (60), such disadvantages can be prevented that an upper plate (2) or a lower plate (3) is damaged by the external force, and thereby an internal space (10a) is collapsed.

Description

200817646 IX. Description of the invention: [Technical field to which the invention pertains] In particular, it is suitable for the present invention to be applied to a heat pipe and a heat pipe having a flat shape and a heat pipe. [Prior Art] As a heat pipe, there are those introduced in Japanese Patent Laid-Open Publication No. 2002-039693, and the Japanese Patent Publication No. 20-4-〇. Such a heat pipe is stacked in a plurality of partitions formed of a thin plate having a hole for the medium, and is placed on the upper part of the weight to form a cooling unit body having a refrigerant circulation space therein. 5^ °° ) 'The refrigerant circulation space in the body of the cooling unit is sealed with a refrigerant such as water. Here, the refrigerant in the body of the part is enclosed, for example, on the side or above or below the manifold; $' Gan, sigh' is injected into the interior through the hole, and after the injection, the gap is filled. I pursued the method of closure. In this case, the mountain ^ ^ ^ ^ ; the thin plate-shaped members constitute the heat pipe, so the part of the hole for the medium circulation becomes, and the "removing" of the refrigerants passing through the refrigerants of the Nanfucai βm refrigerant. The capillary is cold, and the σ-media circulation is offset by several advantages. The heat pipe with a sickle movement and good thermal conductivity has several times to several + pull subordinates, shape, and Volume metal ^ 4it FW ^., heat dissipation effect, can be said to be most suitable as CPU (medium clip processing device) or led (lighting - 杌,,,,,,,,,,,,,,,,,,,,,,,,,, Patent Document 1 - Japanese Patent Laid-Open No. 20 02-039 693 Patent Document 2 · Japanese Special Opening 2QQ4 — Q77i2Q Bulletin

L poor content J

[Problems to be Solved by the Invention] In the first step, the water is injected into the body of the cooling unit, for example, as a refrigerant, and the water is injected into the body, and then the sealing member is closed. The material of the cooling unit body: there is solder, but the material of the shell (for example, steel, copper-based material, or the material) and the cold-cooling portion of the inner space of the sealing member may have a local battery effect. There is a PU, even if it is used with sufficient care, for example, without ions (charged = pure water, it is difficult to avoid containing a small amount of ions. By this (two necessarily constitute a local battery to produce a local battery effect, there is a cause =!: rot: then. Therefore, in such a heat pipe, although there is a picture in the past, it is expected to prevent the aging of the battery due to the effect of the local battery. The mouth and the ham, first, when using solder as a sealing member, due to the melting point of the solder Low, = the degree of high temperature to reduce or even eliminate the possibility of fruit, so it is expected that #平古,,西+ _ double effect. ΜP makes it possible to continue to play a certain seal, but it is opened, as above Said The heat pipe and the like described in Japanese Patent Laid-Open Publication No. 2002-039693 No. 2,04-077120, No. 2, and the following plan: 217〇~Q973-pp 6 200817646 Miniaturization and thinning. The mechanical strength of this part is weakened, and it is closed by a sealing member. The refrigerant is injected into the hole and the cooling part is damaged by the refrigerant injection hole. f

In the cooling body, the refrigerant injection hole is disposed at the position of the cooling circulation hole of the corresponding partition plate, and the refrigerant is injected into the hole by the force applied to the sealing member during the process of sealing the sealing member into the refrigerant injection hole. There is a problem that the surrounding area is damaged by crushing or the like, and it is difficult to improve productivity. In addition, in the use process, there is a flaw in the portion of the refrigerant injection hole. The present invention has been made to solve the above problems, and an object thereof is to provide a heat pipe which can continue to exhibit a sealing effect at a high temperature, and which can be used for a longer life than a heat pipe and a method for manufacturing the same. Oh, to provide

Improve the productivity, in order to figure out more habitats, and to increase the heat pipe of the deuteration and long brother. [Means for Solving the Problem] The heat pipe of the present invention includes a cooling unit body formed of a metal that forms a circulation path of a refrigerant in an internal space, and a refrigerant injection hole formed in the cooling unit body. The inner space is filled with the medium and the sealing member, wherein the refrigerant is sealed in the inner door*, and the refrigerant injection hole is closed, wherein the sealing member is a homogenous or similar plastic metal of the cooling unit body. Composition. The heat pipe of the present invention is characterized by comprising: a cooling unit body, wherein the i or a plurality of intermediate plates are disposed between the upper plate and the lower plate, in the inner space: a circulation path of the refrigerant; and the refrigerant injection hole is formed In the cooling body, the refrigerant is injected into the internal space of the cooling unit body; and the member is closed, and the intermediate plate includes: a reinforcing portion, and the structure is 2170-8973-PF 7 200817646, which is adjacent to the refrigerant injection hole. And the hole for the refrigerant, and the portion of the heat pipe of the present invention having a predetermined thickness, and the portion corresponding to the refrigerant injection hole. The refrigerant is formed in the internal space: includes: the cold portion body 'the system; the other is in the cooling unit body, and the upper portion is: the upper two = the sealing member is closed, and the refrigerant is made into fine particles. The refrigerant inlet hole is injected into the above internal space. The heat of the moon s ‘ includes: the body of the cooling unit, which is between the plate and the lower plate! Or a plurality of intermediate plates, the metal phase of the path; the body of the refrigerant, the body of the cooling portion, the body formed in the cooling portion, the sealed inner space, the closed refrigerant injection hole or the like plasticity The metal member=the member is formed in the same manner as the cooling unit body, and is formed in a portion corresponding to the refrigerant injection unit 2: a portion including a reinforcing portion, and/or an entrance hole, and a thickness of =; and a refrigerant The hole is formed in the refrigerant injection portion, and the refrigerant is injected into the internal space by the refrigerant injection hole in the form of fine particles. In the heat pipe of the present invention, the sealing member that closes the refrigerant injection hole is not protruded from the surface of the cooling portion body. In the heat pipe of the invention, the lenticular groove is formed on the inner circumferential surface of the refrigerant injection hole until the sealing member seals the refrigerant injection hole to maintain the external connection with the internal space. 14 The refrigerant injection hole is completely closed. The seal member is sealed by the above sealing member. 217 8 8 973-PF 8 200817646 The heat pipe of the present invention has a nail at the above μ r ^ ^, and the shield path includes the refrigerant as the base milk expansion. The milk diffusion flow path corresponds to the above-mentioned refrigerant injection... In the above-mentioned burial gas diffusion & _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Manufactured in the present invention; Γ:: formed into a slit. The method of the invention is characterized in that: the refrigerant injection hole of the body of the cooling unit formed of a metal is formed, and the inner space of the body of the cooling unit is formed by the medium: ring: diameter: The sealing member is pressed by the cooling member body with the same or the above-mentioned cooling unit body (f), (4), and the sealing member is closed by the sealing member to close the refrigerant column into the hole. The method for manufacturing a hot official of the present invention includes: a step of injecting the refrigerant into the cooling unit main body formed in the cooling passage main body and in the cooling unit body in which the refrigerant is formed; a step of placing a refrigerant injection hole on the sealing member; and a step of sealing the cold remaining manhole (4) by pressurizing the sealing member under vacuum (4), in the above-described injection step, The refrigerant is injected into the internal space through the refrigerant injection hole in the form of fine particles. The manufacturing method of the hot month of the month includes: preparing a circulation path of the refrigerant in the inner space by the i or a plurality of intermediate plates disposed between the upper plate and the lower plate, forming a corresponding formation A reinforcing portion having a predetermined thickness is formed in a portion of the peripheral region of the refrigerant injection hole of the upper plate or the lower plate, and is formed in a portion corresponding to the refrigerant injection hole.

2170-8973-PF 200817646 Preparation step of the cooling unit body for the hole for the media hole_Injecting step of injecting the refrigerant into the internal space of the cold portion main body; and placing the sealing member on the refrigerant injection hole And a sealing step of closing the injection hole by the sealing member by pressurizing the sealing member under vacuum. The j# of the 埶 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本a preparation step of forming a cooling portion body having a thickness reinforcing portion and a metal having a refrigerant hole formed in a portion corresponding to the refrigerant injection hole in a portion of a peripheral region of the upper plate or the lower plate t hole; The medium hole is placed on the above-mentioned cooling Qiu Taihao A 4 7 Office W into the "P forest body internal space injected into the above-mentioned refrigerant of the above-mentioned cooling unit body homogenous or similar plasticity metal is sealed" placed under the above-mentioned cold straight ☆hh The loading step of the medium injection hole: and by: main: 1. The sealing member pressurizes the sealing member to close the refrigerant: a sealing step of the second step, wherein: in the injection step, the upper, ^M particle shape is The above refrigerant injection space. a few / king into the above-mentioned internal system of the invention; raw ^r ^, t in the above sealed structure;; === in the above sealing step, until the Μ 1 1 dry 70 Wang closed the above refrigerant injection into the above-mentioned cold 婵, the main into the Gong% to the shape of the hole hole, through the shape of the medium left into the hole in the inner peripheral surface of the venting groove internal space connected state. ...and the above-mentioned manufacturing method of the heat pipe according to the above, wherein the above sealing step is borrowed. Pressing the sealing member under pressure to pre-seal the sealing member:

2170-8973-PF 10 200817646 ΐ: After the two holes ‘ By continuously heating the sealing member, the sealing member completely seals the refrigerant injection hole. [Effect of the Invention] 虞 The application of the heat pipe of the first paragraph of the patent scope and the heat pipe of the sixth item can provide longevity even if the fruit is hot, and the patent can be used to improve the sealing effect. The four items of heat pipes can provide a heat pipe that is more profitable than the previous ones and that is capable of plotting a longer price. [Embodiment] The present invention relates to an internal hollow structure of a cooling portion body having cold independence: q λ U > AM/main entrance hole [a plastic metal sealing member which is homogenous or similar to the cooling portion body is placed on the refrigerant On the injection hole, the refrigerant injection hole is sealed by the seal member by vacuum pressing. Then, the sealing effect is obtained, and the heat pipe is manufactured by sealing the sealing member by pressurizing the sealing member. Thereby, the heat pipe, the cooling system is made of metal and the sealing member is made of a plastic metal which is homogenous or similar to the body of the cooling portion, and even if the body and the sealing member are in contact with the refrigerant or exposed, there is no occurrence of The partial battery function of the forest body and the sealing member can prevent corrosion due to the action of the local battery, and can be designed to be longer and longer than before. In addition, as the metal of the cooling unit body and the sealing member, for example, -, silver, copper, copper-based materials, or metal of the Ming or Ming system, the two 'with respect to the solder even in the 2〇〇~3 generation The high temperature can still maintain the sealing effect of 2170-8973-PF 11 200817646, and the sealing effect can be surely continued even at high temperatures. The following is an example of the embodiment described below as a heat pipe, and a crotch body formed by sandwiching a plate or a plurality of flat plates between a flat plate, a plate, and a lower plate is used. The body portion of the material is formed by a 1 or a plurality of rafts: a circulation path is formed, which includes a flow path for diffusing the vapor toward the side portion (hereinafter, referred to as a vapor diffusion flow path) ;= When the upper and lower sides of the board are viewed as the 'flow path through the capillary phenomenon refrigerant flowing in the direction of the production path (hereinafter referred to as the capillary version), 〇 ;; ten nr ^ , The inner surface of the plate is formed in a lattice shape or the like (the lower portion of the lower surface of the upper plate is referred to as a concave portion of the inner surface of the upper plate), and the inner surface and the capillary flow formed on the lower plate. The road (the inner groove of the lower plate) communicates with each region of the vapor diffusion flow path, and is separated by the inner surface of the upper plate and the inner surface of the lower plate - or " Bump = the front end of the column is flat and can be attached to the middle plate. Here, the following facts = two, the upper plate inner surface portion and the lower plate inner surface groove portion are formed in a lattice shape, but are formed into other shapes such as a mesh shape: main, corresponding to the cross section thereof It is a square, a circle, a rounded polygon, and a star. In the case of the vapor diffusion flow path, for example, the vapor diffusion flow path is formed to have a radial shape in the peripheral portion, the cooling portion body can be used to effectively cool the cooled heat. High heat transfer efficiency, can be said to be most suitable as a heat pipe:

2170-8973-PF 12 200817646 The shape of the 耽 diffusion flow path may be wide toward the peripheral portion; Λ may also be centered. The visibility size is widened or narrowed, and may be other types of ::: complex number to allow overlapping vapor diffusion channels:,:: The vapor diffusion channel is shifted in the width direction. The middle plate...the hole for the diffusion flow path itself becomes a vapor diffusion flow path. When the stack is over, the ®! plate is a number of turns. By overlapping the plurality of plates, the capillary flow path connecting the vapor diffusion flow paths is formed by the weight two or two, or all the middle plates are formed in different patterns. , the case where the same pattern is formed on the board. At the same time, the through hole itself will become a capillary flow path. The middle plate is a piece of all-::=! The position, shape, and size of each through-hole of each intermediate plate are the same as those of the same position and the same size of the capillary flow path. On the upper and lower =: aspect. In the through hole at this time, the capillary flow path = for example, a rectangle (for example, a square rectangle) may be curved at an angle, 4 is (4), and a surface (capillary surface) of a part or all of the surface may be Waves, enemies, etc., can widen the surface area. ,: "The wider the surface area of the inner surface of the L path, the stronger the cooling effect. The shape of the round burr road can be hexagonal, round, or direction::: upper: square and: When the upper and lower sides of the plate are viewed from the top and bottom, the cross-sectional area of the plurality of intermediate plates:::: the official flow path is smaller, and the position of the beacon hole is completely matched.

2170-8973-PF 13 200817646 Private, only one overlap, the capillary flow path can be compared to the cross-sectional area of the parallel direction of each through hole: the sectional area, specifically, for example, the middle plate is 2 pieces The size, shape, and positional spacing of the through-holes are the same, so that the direction of the middle plate is fixed (for example, 'the transverse direction (the §= when the through-hole is quadrangular: the offset of the arrangement spacing is 2 points) The square phantom area of the hair side is reduced to the cross section of the through hole of each middle plate = go again, about 1/1 of the collar on 9 μ 〇 r

The placement position of the through hole of the middle plate is in the direction of the above-mentioned direction and the direction of the direction (in the case of the mouth, the longitudinal direction (the V of the side plate orthogonal to the direction of the one side of the through hole: the capillary flow path can be made) The substantial sectional area is reduced to the middle two: the sectional area of the through hole is about 4.... In addition, in the middle plate: when the two through holes are arranged, the refrigerant is formed not only in the up and down direction but also in the oblique direction from the upper opening Flowing capillary flow path. The body of the cooling unit, or the material of the sealing member constituting the upper plate of the cooling unit body, the lower plate 2 and the closed refrigerant injection hole, is made of copper or copper alloy by heat conductivity, strength, etc. The copper-based metal is the best, but it can be, for example, the aluminum alloy with aluminum, such as the S, Lvkoujin, etc., which have the advantages of low material cost, and can also use iron-based metals such as iron and iron alloy, and gold. In addition, when the body of the cooling portion is formed of copper or copper alloy, the surface of the 'cooling unit body> >" y body surface contains copper or a copper-based metal sealing member. Usually there is nickel plating. Then, the refrigerant can be said to be latent埶 ★ ..., large water (pure water, water, etc.) is not limited to water, such as j, ethanol, methanol, acetone, etc.

2170-8973-PF 14 200817646 The refrigerant injection hole 'is constituted by the opening of the sealing member to be closed and the exhaust groove formed on the inner circumferential surface thereof, and is cooled by the exhaust groove when the sealing member is operated in the bucket. Exhaust in the body. In this heat pipe, when the refrigerant is injected into the seal member by the sealing member, the vacuum is degassed by the exhaust groove, and even if the harmful components of the inner and the second body are assumed, the air in the inner space is transmitted: gas: :: Cold can be used with this air - to remove harmful components from the interior space. Further, the impurities adhering to the inner surface of the main body of the cooling unit are removed in advance, and the inner surface is degassed after being sealed, thereby preventing the heat pipe from being lowered by the internal rot.卞ί丨牛 Then 'in the heat pipe, by heating. Pressurized by the plastic metal = seal structure', the side (four) (four) members plastically crimped into a seal, because the heat officer 'fine seal member can also The exhaust gas is closed, and the refrigerant injection hole can be completely shielded, so that the refrigerant is sealed in the internal space of the body portion to reliably prevent the refrigerant from leaking out. Furthermore, it is also possible to provide, for example, an air row of the same size as the cooling unit body that injects the refrigerant into the internal space by the nozzle: when the refrigerant is injected into the hole, the (second) two-milk discharge hole is detached and smoothly smoothed. Injecting refrigerant. The refrigerant can be supplied by a normal nozzle, or the (four) refrigerant can be injected into the cooling unit in a mist form, and the large water droplets can be prevented from adhering to the surface of the refrigerant injection hole. Covering the state, and saving 2170-8973-PF 15 200817646 to prevent the occurrence of this time, the nozzle will be preserved: Λ, the internal space decompression and decompression operation. It is preferable that the cooling unit body is supplied in a non-contact manner.婵, the main inlet hole, the main body, even if there is no air discharge hole in the cooling unit body, the cold injection hole can be injected into the 屯々 屯々 惟 又 又 又 又 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气 空气Further, when the refrigerant injection hole is outside the cooling portion hole, the fourth sealing member (for the above-mentioned sealing member) may be used not only for the refrigerant but also for the air discharge hole. Only π is also used to make the refrigerant into a nozzle-like black nozzle, or to make the refrigerant into a small particle-shaped micro-dispenser, and to use a nano-level dispenser that can further improve the refrigerant into a super (four) sub-segment. . However, the heat official's miniaturization and thinning of the cooling device require the miniaturization and thinning of the main body of the cooling unit, and the strength is weakened as required, so I (10), person " It is easy to seal the refrigerant injection hole of the main body of the crotch portion with a metal such as copper, or use 35 steps to break. In the heat pipe of the present invention, the heat pipe provided in the inner space of the main body of the cooling unit is provided with a reinforcing portion having a thickness corresponding to the peripheral portion of the corresponding refrigerant injection hole, and is raised in a peripheral region of the refrigerant injection hole. The mechanical strength can prevent damage during the production process or the use process, and can be plotted at a lower price than before, and can be designed to be long-lived. When a plurality of intermediate plates are provided, the reinforcing portion is provided by providing a reinforcing portion for all the intermediate plates. The crucible is stacked and the structure of the pillar is formed by the strong portion of the portion, so that the mechanical strength of the peripheral region of the refrigerant injection hole can be further enhanced. Furthermore, it is also possible to provide a reinforcing portion only for a part of the middle plate. Further, in the portion corresponding to the peripheral region of the refrigerant injection hole, the reinforcing portion 2170-8973-PF 16 200817646 ^ corresponds to the portion of the medium injection hole, and the refrigerant hole for communicating with the refrigerant injection hole is preferably formed in the reinforcing portion. . When the refrigerant is injected into the internal space through the refrigerant injection hole, the refrigerant can be completely filled with the intermediate plate or the lower plate by the refrigerant hole and the slit. Further, the portion corresponding to the refrigerant injection hole is disposed in the vapor-forming diffusion path of the structure: the slit may be formed in a direction in which the refrigerant passes through the therapeutic gas diffusion flow path. By this, it becomes a diffusion

The refrigerant of the vapor of the diffusion channel is not diffused to the peripheral portion by the reinforcing portion, and the heat dissipation effect can be maintained. Further, the slit may be formed in all of the reinforcing portions of the intermediate plate, or may be formed only in a part of the intermediate plate reinforcing portion. EXAMPLES Hereinafter, the invention will be described in detail in accordance with the illustrated embodiments. Fig. 1 is a view showing the appearance of the outer surface of the heat pipe 1 of the embodiment. The heat pipe 1 includes a copper metal-based upper plate 2 and a lower plate 3 which are made of high (four) (four) materials having high thermal conductivity such as copper or a copper alloy, and the refrigerant injection hole 4 and the air discharge hole are formed in the outer surface 2a of the upper plate 2 5. In the case of this embodiment, refrigerant injection? 1 4, is disposed near the corner of the opposite side of the opposite corner, and the empty row φ 3 c , the hole 5 ' is not diagonally opposite to the side of the side Near the corner of the other side. The refrigerant injection hole 4 and the air discharge hole 5 are connected to the outside by the internal air space (described later) in the air discharge hole 5, and the refrigerant is injected into the internal space by the refrigerant injection hole 4, and then the upper and lower sides are filled with the refrigerant. The sealing member 8 made of a copper-based metal of the same shape of the plate 2 and the lower plate 3 is plastically deformed and sealed. The heat pipe 1, such as the AA of the heat pipe 1 of Fig. 1, the section 217〇8973_PF 17 200817646: Fig. 2A' and the BB of the heat pipe 1 of Fig. 1, the sectional structure of the part is shown in Fig. 2B, A cooling device HE such as a 1C (semiconductor integrated circuit), an LSI (large integrated circuit), or a heating element such as c叩 is mounted on the central portion of the lower surface of the lower plate 3, for example. Actually, the heat pipe 1 is formed by sequentially laminating the second intermediate plate 7a, the first intermediate plate 6a, the second intermediate plate 7b, and the second intermediate plate (9) on the lower plate 3, and then proceeding to the first step: The upper plate 2 is laminated on the plate 6b, and the cooling unit body 1 is formed by directly joining and integrating based on the clamp holes not shown in the drawings. The term "direct bonding" as used herein refers to pressing a state in which the first and second faces α to be joined are pressed, and by applying heat treatment, an atom is applied to the atom between the first and second faces. The two sides are integrated with each other without using an adhesive. In the internal space l〇a of the cooling unit body 10, the first intermediate plate 63, 61) and the second intermediate plate 7.713 are alternately stacked in sequence, as shown in FIG. A portion of the device HE that faces the region and its peripheral region (hereinafter, referred to as the peripheral region of the device to be cooled) 33 & a vapor diffusion channel 44 that radially extends toward the peripheral portion 12, and a fine portion as shown in FIG. 2β Capillary flow path 42. 2A is a cross-sectional view of a portion of the cooling unit body 1 that is divided into a capillary flow path 42 and a vapor diffusion flow path 44, and FIG. 2B is a portion of a portion of the cooling portion body 10 that is filled with the capillary flow path 42. Surface map. In the internal space 丨〇a of the cooling unit body 1 , a refrigerant W having a predetermined amount of water is sealed under reduced pressure, thereby reducing the amount of heat of the refrigerant w. As a vapor, it can be circulated at 2170-8973-PF 18 200817646 vapor diffusion flow path 4 4 and capillary flow path 4 2 . Next, the respective fine structures of the upper plate 2, the first intermediate plates 6a and 6b, the middle plates 7a, 7b, and the lower plate 3 of the present embodiment are shown. First, the vapor diffusion flow path 44 and the capillary flow path will be briefly described. 42 is as follows. Fig. 3A shows the structure of the outer surface 2a above the upper plate 2, and Fig. 3B shows the structure of the inner surface 2b of the upper plate 2. Further, Fig. 4A shows the structure of the lower surface 3& of the lower plate 3, and Fig. 4B shows the structure of the inner surface of the lower plate 3. Figure 5 shows the first part of the upper plate 2 and the lower plate 3! The structure of the intermediate plates 6a and 6b is the same as that of the first intermediate plates 6a and 6b, and shows the structure of the second intermediate plates 7a and 7b sandwiching the upper plate 2 and the lower plate 3. As shown in FIG. 3B, the upper plate 2 has a body portion 21 formed of a substantially square shape having a thickness of, for example, 5". The inner surface 2b below the body portion 21, except for the peripheral portion of the frame shape, 4 shouts 1丄z, an upper inner groove portion 23 recessed in a lattice shape is formed. The upper plate 2' is formed in a lattice-shaped region by the upper inner groove portion 23, and is provided with a convex column whose front end portion is planar. 24. The lower plate 3, as shown in Fig. 4B, has a body + a mouth P11 which is formed by a substantially square shape having a thickness of, for example, 500 // m, as shown in Fig. 4B. Above the body portion 11. In the inner surface 3b, in addition to the frame-shaped peripheral portion U, an upper inner surface groove portion 14 recessed in a lattice shape is formed. The lower plate 3 is provided in a region in which the upper inner groove portion 14 is partitioned into a lattice shape. The other first (1) the convex portion of the flat portion of the crotch portion is 5, the first intermediate plate 6a of the figure 5, the main body portion 3 of the crotch, and the main body portion 32 of the second intermediate plate as shown in FIG. It is composed of the same copper-based metal as the upper plate 2170-8973-PF 19 200817646 2 and the lower plate 3, and has a thickness of, for example, 7〇2 to 2〇〇^m. The first intermediate plate 6a and 6b are the same size and the same shape 'below, and the first middle plate 6a and 6b are focused on the first middle plate 6a, 6b. As shown in Fig. 5, the main body portion 31 of the first intermediate plate 6a is formed with a breast milk diffusion channel hole 34 and a capillary forming region %. The capillary forming region 36 is surrounded by the cooling device. Area 33a, with adjacent steaming

The area between the hole expansion machine passage holes 34 is constituted by a region 33b other than the peripheral portion of the cooling device. Further, the center of the peripheral portion of the cooling device is a region opposed to the portion to be cooled HE provided on the lower plate 3 when the main body portion 31 is laminated on the main portion u of the lower plate 3. The hole for the vapor diffusion flow path is formed in a strip shape, and is bored by the peripheral portion 33 of the cooling device. The four corners are formed in the capillary forming region 36, and the H i pattern (described later) is provided with a plurality of through holes 37 forming the capillary flow path 42 (Figs. 2A and 2B). Actually, the capillary forming region 36 has a lattice-shaped partition wall 38; each of the regions partitioned by the partition wall 38 serves as a through hole 37. As shown in FIG. 7, the through-holes 37 are formed in a quadrangular shape, and are arranged in a predetermined space as a jade pattern, and each of the four sides is arranged in parallel with the four sides of the peripheral portion 12 of the outer circumference of the main body 呷32 (Fig. Incidentally, in the case of this embodiment, the width of the through hole 37 may be selected, for example, to a degree, and the width of the partition wall 38 may be selected to be, for example, a cardiac output. In addition, the second aspect shown in Fig. 6 The plates 7a and 7b are formed in the same size as the middle plates 6a and 6b. Further, the force test is here, and the following is only the view of the 2170-8973-PF 20 200817646 in the second intermediate plates 7a and 7b. In the second intermediate plate 7a, as shown in Fig. 6, the capillary forming region 36 and the vapor diffusion channel hole 34 are provided in the same manner as the first intermediate plates 6a and 6b, but are disposed in the capillary tube. The plurality of through holes 4A forming the region 36 are bored in a second pattern (described later) different from the i-th pattern. The capillary forming region 36 of the second intermediate plate 7a is

The lattice-shaped partition wall 41 is formed, and the regions partitioned by the partition wall 41 are penetrated. L 40. As shown in Fig. 7, the through-holes 4' are formed in a quadrangular shape as a second figure f, and are arranged regularly at a predetermined interval as in the i-th pattern, and each of the four sides is adjacent to the peripheral portion of the body portion 32. Μ : : : 平行 平行 平行 平行 平行 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In this embodiment, for example, when the first intermediate plate 6a and the second intermediate plate are stacked, the through hole 37' of the i-th intermediate plate 6a is directed to the through hole 4 of the second intermediate plate. The χ direction of the edge of one side, the 2 point of the offset side. The x direction of the ^ side of the ^ side is the Y direction of the other side, and the offset side Μ : 2 ΐΤ?. ' ' 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于. To the contrary, the through holes 37, 40 can be formed in the through holes 37, and the interval is a fine table ^Bei... tube i, by = capillary flow path 42. ... g 丄 由 由 由 由 由 弟 弟 中 中 中 中 中 中 中 中 中 中 中 中 , , , , , , , , , , , , , , , , , , , , , ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ The road hole 9 is a vapor diffusion flow path. Further, the vapor diffusion flow: 4:= stack! The flow path '2' is connected via the upper inner groove portion 23 and the lower inner groove portion:

2170-8973-PF 21 200817646 2A and Figure 2B). In the heat pipe 1, as shown in Fig. 9A of the side view of the figure kA-A' where the vapor expansion and the capillary flow path 42 are provided, the capillary flow in the peripheral region 33a of the device to be cooled is shown. There is a refrigerant w in the path 42. Therefore, the cold film w in each capillary channel 42 will rapidly and surely absorb heat from the convex portion of the peripheral portion 33a of the cooling device to start evaporating by extending to the peripheral portion 12 The vapor diffusion flow path 44, the upper plate inner surface groove portion 23, and the lower plate inner surface groove portion 14 will

In other words, as shown in Fig. 10 showing the front structure of the first and middle plates 6 & the refrigerant W as the center of the cooling device HE provided on the lower plate 3, along the vapor diffusion flow path 44 and the inner surface groove portion of the upper plate 23 and the lower inner groove portion i4 are uniformly diffused radially to diffuse the peripheral portion 1 2 . Then, as shown in FIG. 9B of the side cross-sectional structure of FIG. 1B-B' where the heat pipe 1' is filled with the capillary flow path 42, the upper plate inner surface groove portion 23 and the lower plate inner surface groove portion 14 and the periphery are provided. The refrigerant W that has been condensed and condensed by the portion 12 enters the capillary channel 42 from the upper plate inner surface groove portion 23 and the lower plate inner surface groove portion μ, and is returned to the cooling device peripheral region 33a by the capillary flow path 42 or the like. Thereby, the refrigerant w, as shown in Fig. 11 showing the front structure of the i-th middle plate 6&, can be uniformly cooled by the periphery of the cooled device HE by the capillary flow path 42 of the radially disposed region 33b.

Set HE. I. Next, the structure of the peripheral portion of the refrigerant injection hole 4 and the air discharge hole 5 of the cooling unit main body 1 of the present invention will be described below. In addition, since the refrigerant injection hole 4 and the air discharge & 5 are the same structure, it is described as 2170-8973-PF 22 200817646. Hereinafter, only the refrigerant injection hole 4 will be described below. Fig. 12A is a front view showing a portion of the vicinity of the refrigerant injection hole 4 of the inner surface 2b of the upper plate 2, a front view of the fine structure of the P-knife, and a portion of the front view C-C'. Sectional view. The lower inner surface 2b of the upper plate 2 is surrounded by the refrigerant injection hole 4, and is formed in a circular shape above the peripheral portion of the inlet hole 4, and is formed in a circular shape. The plate reinforcement portion is 50 〇兮μ Μ* The reinforcing portion 50 has a thickness larger than that of the upper inner groove portion 23, and is selected to have the same thickness as the thickness of the convex column 24 and the peripheral portion 12 of the upper inner groove portion 23. In the case of this embodiment, the person is gamma-like into the hole 4, in the center of the column

The diameter of the opening 4a is, for example, a fine hole of about 500 to 10 m in R horse, and is formed into an exhaust groove 4b on the inner peripheral surface ,, and is further provided in the special opening 4a and the exhaust groove in the stalk. A recess 4c is formed on the 4b by stably placing the sealing member 8. In the case of this embodiment, the sister and the dying small sulcus 4b are as shown in Fig. 15 A of the front structure of the refrigerant injection hole 4, rtt > 0 day ^ Λ not, by the opening The portion 4a has a semicircular shape with a small diameter and has four structures arranged at equal intervals on the inner circumferential surface of the opening 4. Figs. 10(10) and 10(10) are front elevational views showing a partial detailed structure of a region in the vicinity of the plate reinforcing portion 52 formed in the p-plate. In the first intermediate plate 6a, the plate reinforcing portion 52, # is the same as the upper plate reinforcing portion 50, and is formed in the same shape as the upper plate reinforcing portion 50. Part 5 〇 relative position. In the case of the embodiment, the intermediate plate reinforcing portion 52 is formed in the air-discharging (four) flow path hole 34, and is formed in the partition wall 38, and the corner portion of the vapor diffusion-path hole 34 is partitioned. Further, the intermediate plate reinforcing portion is selected to have the same thickness as that of the partition wall 38 and the peripheral portion 12, and is located at the opening portion 4a# of the refrigerant injection hole 4 of the plate 2 of 2170-8973-pp 23 200817646 The refrigerant hole 53 is formed. Fig. 12C and Fig. 12E are front views showing a part of the vicinity of the reinforcing portion 55 having the slit formed in the second intermediate plates 7 & 7 and 7b. The second intermediate plate 7a is formed. The slit-reinforcing portion 55 of the step 7b and the partition wall 41 are formed in the same manner as the slit 56 in which the vapor diffusion passage hole % is formed, and the first intermediate plate 6a is the same as the plate reinforcing portion 52. The refrigerant hole 57 is formed so as to penetrate the opening portion 4a of the refrigerant injection hole 4 of the upper plate 2, and has a structure in which the slit % is connected. Actually, the reinforcing portion 55' having the slit is along The vapor is in the diffusion direction of the diffusion of the vapor diffusion channel 34 (in this case, the direction from the center point of the second intermediate plates 7a and 7b to the corner portion) 1}, and the slit is formed in the vapor diffusion channel. The 34 connection allows the vapor to diffuse to the corners. Further, the slit 56 is formed, for example, in a straight line, & width Fig. 12F shows a front view showing a detailed structure of a portion of the inner surface of the lower plate 3 which is formed in the vicinity of the lower plate reinforcing portion 60. The inner surface 3b of the lower plate 3 is attached to the middle plate 3b. The plate reinforcing portion 52 and the region ′ with the slit reinforcing portion 55 are formed as a circular lower plate reinforcing portion 6〇. The lower plate reinforcing portion 6G has a thickness smaller than the lower plate inner surface groove portion 14 and is selected and designed. The thickness of the raised column 15 and the peripheral portion 12 between the inner surface groove portions 14 of the lower plate is the same thickness. The lower plate reinforcing portion 6 is formed to communicate with the inside of the lower plate: the slit opposing groove 61 and the central concave portion of the groove portion 14. 62. The slit opposing groove η, in the case of the example 4, is about 300 // m, and is formed linearly with the slit 56 in the lower plate reinforcing portion 60. The central concave portion 62 is attached to the refrigerant of the upper plate 2 2170-8973-PF 24 200817646 The opening portion 4 of the entrance hole 4 is formed in a partial circular shape. 13 is a view showing the sequential layer (4) $7a, the first intermediate plate 6a, the second intermediate plate 7b, and the first intermediate plate 6b on the lower plate 3, and further stacking the upper plate 2 on the first intermediate plate 6b. A detailed cross-sectional view of the upper plate reinforcing portion 5 〇, the intermediate plate reinforcing portion 52, the slit reinforcing portion 55, and the lower plate reinforcing portion 6A. Below the peripheral region of the refrigerant injection hole 4 of the upper plate 2, the upper plate reinforcing portion 50, the intermediate plate reinforcing portion 52, the reinforcing portion having the slit, and the lower plate (the reinforcing portion 60 is formed to closely form the pillar structure) In addition, the refrigerant particles W1 continuously dropped by the nozzle 70 to the refrigerant injection hole 4, " commercial " high speed (for example, 1,000 drops per second) pass through the opening 4a of the upper plate 2 and the first intermediate plate The refrigerant hole 53 of the 6b and the refrigerant hole 57 of the second intermediate plate 7b reach the slit opposing groove 61 and the central recess 62 of the lower plate 3, and reach the internal space of the cooling unit body via the slits 56. Next, the manufacturing method of the heat pipe 1 is as follows. Fig. 14A to Fig. 14E, Fig. 16A and Fig. 16B' show an example of the manufacturing method of the heat pipe 1 as shown in Fig. 14A. As shown in the figure, first, the second intermediate plate 7a, the first intermediate plate 6a, the second intermediate plate 7b, the i-th intermediate plate 6b, and the upper plate 2 are laminated on the lower plate 3. The first intermediate plates 6a, 6b are formed. And the second intermediate plates 7a and 7b, the projection projections 72 having the upper projections are formed in a frame shape along the peripheral portion 12. Further, the lower plate 3 is provided by the upper portion 3. 3b protruding engagement projections 73 > 7 openings around the peripheral portion 12 are formed in a frame shape. Next, 'the second intermediate plate 7a, the first intermediate plate 6a, the second intermediate plate 7b, 2170-8 97 3-PF 25 200817646 The first intermediate plate 6b and the upper plate 2 are stacked on the lower plate 3 at an optimum position, and the upper plate 2 and the lower plate 3, the first intermediate plates 6a, 6b and the second intermediate plates 7a, 7b are stacked. Heating at a temperature equal to or lower than the melting point, and pressurizing, directly joining through the bonding bumps 723, 273. Thus, the upper plate 2, the lower plate 3, the first intermediate plates 6a, 6b, and the second intermediate plates 7a, 7b, As shown in FIG. 14B, the integrated cooling unit body 10 is obtained by direct joining. At this time, the cooling unit body 1() is formed only on the upper plate 2 via

The refrigerant injection hole 4 and the air discharge hole 5 connect the internal space i 〇a to the outside. Incidentally, the first intermediate plates 6a and 6b, the second intermediate plate 7a, and the lower plate 3 are provided with projections 74 at the outer peripheral positions of the central portions facing the portion to be cooled ,, not only the peripheral portions. 12, the position around the peripheral portion 33a of the device to be cooled, and the like are also directly joined by the projections 74 to form an integral body 2. In such a cooling unit body 10', a pillar structure is provided in the peripheral region of the cooling device, such as a temple, to increase the mechanical strength, and to prevent the heat generated by the self-contained cooling device HE from thermally expanding the refrigerant and expanding outward from the substantially central portion (hereinafter 'This is called the popcorn phenomenon), destroying the body of the cooling unit itself. In the inner space of the cooling unit main body, the air diffusion channel of each of the first and second intermediate plates 7a'7b is formed by the helium diffusion channel 44. < Overlap also forms a plurality of capillary channels 4 and 2: "and the capillary channel 42 is formed by the vapor diffusion channel at this time in the refrigerant injection hole 4 and: = Fig. 9A and Fig. Upper plate reinforcing portion 50, ^=peripheral region of the hole 5, middle plate reinforcing portion 52, having a slit

2170-8973-PF 200817646 The reinforcing portion 5 5 and the lower plate reinforcing portion 60 are densely formed to form a pillar structure. Next, as shown in Fig. 14C showing the manufacturing method of the heat pipe 1, the refrigerant W1 (for example, water) is injected into the refrigerant injection hole 4 by atmospheric pressure at a constant pressure in the internal space 1 Oa of the cooling unit body 1 . At this time, the air discharge hole 5' serves as an air discharge port at the time of supply of the refrigerant, and the injection of the refrigerant into the internal space 1Oa can be made smooth. Further, in the case where the refrigerant is, for example, water, the amount of sealing is preferably equal to the total volume of the equivalent through holes 37, 40, and it is preferable to increase the life of the heat pipe, particularly ultrapure water which is free from ion contamination. Further, at this time, the vacuum is applied to the air discharge hole 5, so that the injection of the refrigerant can be made smoother. For example, the sealing member 8 formed of a spheroid is prepared in advance by a predetermined number of months as indicated in order of heat pipes! In the diagram of the manufacturing method, the sealing member 8 is placed on the refrigerant injection hole 4 and the air discharge hole 5. Here, the refrigerant injection hole 4 and the air discharge hole 5 are formed as shown in the figure, and a plurality of exhaust grooves 4b 1 are formed on the inner circumferential surface of the opening 4a. The internal space 1〇a is connected to the outside, and is placed in the vicinity of the internal space i 0a of the body 10 . Then, the cold portion can be introduced. Then, the state of the heat pipe 1 is displayed at a normal temperature, and the vacuum is degassed by the evacuation. In this step, by the air degassing by the air, the air in the internal space 10a is exhausted through the helium groove 4b, and the air is discharged from the internal space 10a to the K and the exhausting groove 4b. Furthermore, the arrows in Fig. 14E indicate the components of the 聣▲, which can reduce degassing. After that, the direction of the exhaust pipe is indicated in order. Method of the circle〗 6A, Yu Chang

2170-8973-PF 27 200817646 In a warm state, the sealing member 8 is pressed by the presser for a few minutes to be subjected to low temperature pressurization deformation. The refrigerant column inlet hole 4 and the air discharge hole 5 are pre-sealed by the sealing member 8 by such a low-tie vacuum pressure treatment. At this time, the refrigerant column inlet hole 4 and the air discharge hole 5 are closed by the sealing member 8. Here, the upper plate is reinforced by the upper plate portion 4 and the peripheral portion of the air discharge hole 5. The intermediate plate reinforcing portion 52 and the strong portion 55 and the lower plate reinforcing portion 60 are formed in close contact with each other to form a pillar structure: Therefore, the sealing member 75 is used to seal the member "the temple, and the external force from the factory-made machine 75 is supported by the pillar structure". The inner space is smashed, and the sealing member 8 is surely applied by the pressing machine 75 with the necessary external force. Incidentally, when the sealing member 8 is applied at a temperature higher than the normal temperature, due to the refrigerant gas, for example, It is preferable that the water vapor is easily outwardly dissipated as the temperature at which the vacuum degassing is performed at a normal temperature of about 25 t. Next, when the low-temperature vacuum pressurization treatment is completed, for example, the degree of vacuum is made, for example, at a high temperature for one minute. After .5Kpa,

The machine 75 deforms the sealing member 8 from the top to the bottom, and deeply invades the cold-column column. In the sealing member 8, the two temperature-plus-sealing members 8 are stepped into the air and are vented to the air. Closed state. That is, a child sealing member 8 is mainly plastically deformed by pressurization: and is also subjected to thermoplastic denaturation, and the enthalpy including the exhaust groove and the air discharge hole 5 can be closed. Further, as shown in Fig. W and the hole: and: gas: Γ, sealing member 8, formed by plastic deformation, only the shape of the refrigerant column and ...::, substantially connected to the refrigerant column inlet hole 4 and the working gas discharge hole When the result is 50%, the person/, is in the sealing, and the internal space of the cold body 10

2170-8973-PF 28 200817646 1 0 a gift. Thus, the air outlet hole 5, (4): (4) member 8 closes the refrigerant column inlet hole 4 and the pressurization of the machine, the social bundle: two force 17 temperature, stop vacuuming and release the π beam to pressurize, heat, Vacuum treatment. Further, at this time, it is preferable that the outer surface of the outer surface of the sealing member 8 is substantially the surface of the outer surface of the outer surface. Because, the heat pipe i is kept: a s property 'by taking the heat pipe itself and the wind installed thereto, for example. The outer surface of the cold portion main body 10 is rust-proof and the like, and nickel plating is performed after the heat conduction between the cold portion body 10 is good. When the sealing member made of solder is used to close the refrigerant column inlet hole 4 and the discharge hole 5, it is difficult to weld the solder to the hole 4 and the air discharge hole. Part 5 carries a good disability of money nickel. In the present invention, since the sealing member 8 made of the same copper bismuth metal as the cooling portion body 10 is used to close the refrigerant column inlet hole 4 and the air is discharged, 5' does not cause such discomfort to the closed refrigerant column inlet hole. 4 and part of the air discharge hole 5 can also be made of good nickel plating. Incidentally, according to the manufacturing method of the heat pipe (the refrigerant sealing method), the plurality of heat pipes are arranged under vacuum, and the sealing member 8 is placed on the refrigerant column inlet holes 4 and the air discharge holes 5 of the heat pipes, for the plural The heat pipe ^ together with the exhaust 'or pressurization and heating of the sealing member 8' plastically deforms all the sealing members 8 to seal the refrigerant together. Moreover, the mass production of the heat pipe can be improved compared to the previous sealing operation for each of the refrigerant injection holes 4 or the welding operation of the welding, and then the troublesome operation, and the 2170-8973-PF 29 200817646 The increase in mass production can also be used to reduce the cost of the heat pipe 1. Further, in the heat pipe 1, when the internal space i 〇 a is decompressed (when the refrigerant is water, for example, about 5 KPa), the boiling point of the refrigerant is lowered, for example, even if it is slightly higher than 5 (normal temperature below TC) The temperature of the refrigerant (for example, 3 〇 < t 〜 35 ° C) changes the vapor of the refrigerant solution, thereby forming the heat pipe , so that the circulation of the refrigerant can be continued even with a slight heat from the q-packed i HE In the above-mentioned structure, in the heat pipe 1, a sealing member 8 made of a metal portion of a crotch portion body 1Q made of a copper-based metal is used, and a refrigerant injection & 4 and an air card outlet hole are sealed. 5. Even if the cooling portion body sealing member 8 is in contact with or exposed to the refrigerant, the cooling portion body 1 and the sealing member 8 do not cause local battery action. As a result, since the local battery function can be prevented, the portion is The plot can be more long-term than before. Q唧Shao body 1〇 and the sealing member plastic gold eyebrows, the gentleman knows ^丨丹丨丁. Use, can,, high melting point, even in 200~30 (Tc production Gu Wen can still continue to play a sealing effect. In addition, when the solder is used as the 宓# @牛8, since the solder contains the lead of the harmful substance, it is known as the seal member 8 as the seal member 8 but the hair, ^ ^ The material used in the shell is made of copper metal, so the cost of the helmet must be 兮&, the shoulder 4 lead can be reduced to reduce the cost. Also, because of the copper metal heat, the cooling unit body j / μ Since the thermal diffusivity is high, it is preferable that the copper-based metal is formed, but when the cooling of the adjacent body 10 is made of a copper-based metal P, the rust-proofing is usually performed in the cooling section 2170-8. 97 3~pp 30 200817646 " Nickel on the outer surface of the spoon. When the refrigerant injection hole 4 of the cooling unit body l is closed with fresh tin, the pre-treated solder on the nickel plating is eroded, and the solder is formed on the surface of the solder. The weakly coated plating film has a problem that the adhesion between the nickel-plated film formed later and the underlying layer is weakened. In this case, in the heat pipe of the present invention, since the main body of the cooling portion is formed, The sealing member 8 that closes the refrigerant injection hole 4 is formed by one genus, so that it can be reliably implemented all the way to the periphery. In this inference, the money member 8 of the spheroid body is fitted with the shape of the refrigerant column enclosure 侔t air discharge hole 5 to form a sealing 拴, so the Miffin 8 is not easily damaged by the 埶 tube 1 ~ '" 1 is convex on the outside, which prevents the flatness of the outer surface due to the seal...&1; the freedom of the structure of the machine.

To put:, for example, LED (light-emitting diode) and other electronic parts that need to be placed, etc., when mounted on the side H or other cooler (heat sink), due to the sealing member surface:: := part body: ° Since the outer surface is convex, the adhesion to the second and the like can be improved, and the thermal conductivity between the two can be improved, and the heat generated by the electronic component or the like can be efficiently dissipated. Furthermore, the heat pipe is additionally connected to the opening of the refrigerant column hole 5. ‘ *Sigh is now discharged. The inner circumferential surface is provided with an exhaust groove 4 b. Dream of the spleen ^ Sealing member of the sealing plug 8 (3) 匕 will become a close-packed 7 7 media column hole 4 and air venting r r Ning ' even if the sealing member 8 begins to melt and slightly sealed: the hole 4 and the air Discharge hole 5 will not be ~ media

Through the heat ... internal space ... exhaust closed, can be confirmed 2170-8973-PF 200817646 Then, in the heat pipe 1, by pressing the sealing member under vacuum, the media main entrance hole 4 will be the sealing member g After the pre-sealing, the sealing member 8 is further heated and pressurized, and the sealing member 8 made of a plastic metal is deformed and deformed in accordance with the shape of the exhaust groove 4b, so that the exhaust groove 4b can also be reliably closed by the sealing member 8. Further, it is possible to prevent leakage of the refrigerant W enclosed in the internal space 1〇. Further, in the heat officer 1, the upper plate reinforcing portion 5A, the intermediate plate reinforcing portion 52, the slit reinforcing portion 55 and the lower portion are provided in the portions corresponding to the peripheral regions of the refrigerant column inlet hole 4 and the air discharge hole 5. The plate reinforcing portion 6 is closely formed to form a pillar structure 'boosting the mechanical strength of the peripheral portion of the refrigerant column manhole 4 and the air core 5' to prevent the internal space Fb1 10a from being applied to the sealing member 2 by the external force of the upper plate 2 75 external force and crushing is equal to the damage of the manufacturing process, improving productivity, and the result is low alkalinity production cost. Further, in the use process after the manufacture, the internal space 1〇a can be prevented from being crushed by various external forces applied from the upper plate 2 or the lower plate 3, and the long life of the heat pipe can be reduced. In particular, in the case of this embodiment, in order to reduce the size and thickness of the heat pipe, an efficient heat dissipation effect is obtained, and a vapor diffusion channel 44 and a capillary channel 42 are formed in the internal space as a circulation path. Then, the vapor diffusion flow path 44 is configured to diffuse heat to the peripheral portion 1 2 of the cooling portion main body 〇 to efficiently dissipate heat, and is disposed so as to extend from the center portion to the corner portions farthest from the four sides. On the other hand, the refrigerant column inlet hole 4 and the air discharge hole 5 are easily formed by making the supply of the refrigerant to the entire inside of the heat pipe 1 smooth, and the refrigerant injection hole 4 is disposed at the corner portion of the heat pipe k side, and the air discharge hole is provided. 5 is configured in

2170-8973-PF 200817646 The corner portion of the other side opposite to the diagonal portion of the one side. Further, the refrigerant column inlet hole 4 and the air discharge hole 5 are disposed in the vapor diffusion passage 44 which is a hollow structure. Therefore, if the hollow structure is maintained in the region facing the refrigerant column inlet hole 4 and the air discharge hole 5, the sealing member 8 is placed on the refrigerant column inlet hole 4 and the air discharge hole 5, and the force is only the upper plate 2 Bear, and then. When the pressing is performed, the upper plate 2 is broken, and the heat pipe of the present invention is placed in the vapor diffusion flow path 44 opposite to the peripheral region of the refrigerant column inlet hole 4 and the empty discharge hole 5. The upper plate reinforcing portion 50, the intermediate plate reinforcing portion 52, the reinforcing portion having the slit, and the lower plate reinforcing member 6 are closely formed to form a pillar structure, and the force from the press machine 75 is received to prevent the upper plate 2 or the lower plate 3 from being affected. The internal force is broken and the internal space 1 〇a is crushed. The upper plate reinforcing portion 50, the intermediate plate reinforcing portion 5 2, the slit reinforcing portion 55, and the lower plate reinforcing portion 60 are injected into the refrigerant corresponding to the upper plate 2. When the refrigerant holes 53 and 57 that are connected to the refrigerant injection holes 4 are formed into the refrigerant space through the refrigerant injection holes 4, the refrigerant holes 53' 57 through the refrigerant holes 53' 57 are narrowed. The slit 56 or the like reaches the refrigerant to reach each corner of the entire cooling unit body 10. Further, at this time, the reinforcing portion 55 having the slit is formed by the diffusion direction D in the diffusion diffusion channel 44 along the refrigerant. The slit 56 can guide the refrigerant W to the side of the cooling unit body 1 through the slit 56 The portion is diffused into each corner of the internal space 10a to efficiently dissipate heat. The above description is directed to the embodiment of the present invention, but the present invention is not limited to 2170~8973-pf 200817646. The deformable body 1 may be made of a plasticity metal, or a sealing member similar to the cooling unit described above may be used. Alternatively, as shown in FIG. 17, for example, the cooling unit body may be used as the shower head 8G, and the refrigerant may be used.曰 曰 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷 冷In other words, by inkjet spraying or by using a refrigerant (for example, pure water), for example, very fine refrigerant particles (water particles) W2 having a diameter of 50/zm to 300 #m mt hi, the mother seconds are about 1 〇〇〇. In this case, the fine particles of the refrigerant particles W2 and Λ are regularly arranged on the straight line and are supplied to the internal space of the cooling unit body 10, and η. Keep, even 1 drop and 1 drop are very mysterious, due to the example For example, in the mother's second, about 1000 drops of continuous high-methanol supply efficiency is extremely high.,,,,, so cold, so use the inkjet nozzle 8 Π 0 士 ^, person # for (10) day, the refrigerant can be extremely fine The cerium particles W2 can be driven by one drop and one drop at a high speed, and m is fed in. Therefore, the vacuum pumping operation by the empty rolling discharge hole can be omitted, and the manufacturing cost of the work can be omitted. In addition, this, the person, the cow is low and at this time, for example: the control of the filling amount of the refrigerant in the extreme range of 1~5mg, and also the control of the number of the ejection of the inkjet nozzle by digital control The mechanism, | 1 self-gas Fu J is simple and high-speed filling with a precision of 1 drop. Figs. 18 and 19 show that the plan view of the reinforcing member having the slits in other embodiments is different from the shape of the slit portion of the above-described embodiment. As shown in Fig. 18, the sturdy 2170-8973-PF 34 200817646 portion 81 having a slit is formed by a circular shape, and the slit 83 is formed in the outer periphery of the reinforcing portion 81 having the slit in the center of the hole. The width and the size of the visibility are gradually widened. Further, as shown in Fig. 19, the right/slit-reinforcing portion 85 is formed by the center of the refrigerant hole 86 formed in a circular shape toward the right side of the reinforcing portion 85 having the slit. The width is narrowed, and the width of the slit 87 is gradually narrowed. The same effect as the reinforcing portion 55 having the slit of the above-described embodiment can be obtained by the reinforcing portions 8 and 85' having the slits. Furthermore, the width of the slits 56, 185, and 85 may also be uneven for each of the middle plates. Further, in the above-described embodiment, the refrigerant column inlet hole ' and the air outlet hole 5 in the state in which four semicircular exhaust ports 4a are provided on the inner circumferential surface of the cylindrical opening are described, but the present invention The present invention is not limited to this, and FIG. 2A showing the front structure of the refrigerant injection hole or the air discharge hole, and FIG. 2B showing the side cross-sectional structure, the diameter of the upper end is large, and the lower side gradually becomes smaller. The reverse trapezoidal conical refrigerant/main inlet hole 90 a and the air discharge hole 9 〇b are formed at the lower end. As shown in Fig. 20C showing the state in which the sealing member 8 is sealed, in this case, the sealing member 8 of the spherical body can be deformed into a flat shape and surely with the shape of the refrigerant injection hole 9〇a and the air discharge hole 90b. Seal the internal space. Further, as the refrigerant column inlet hole and the air discharge hole of the other embodiments, FIG. 21A showing a front structure of a refrigerant injection hole or an air discharge hole, and FIG. 21B showing a side cross-sectional structure may be used. The short-cylindrical shape of the large diameter constitutes the upper portion 92, and the refrigerant injection hole 91a and the air discharge hole integrally formed by the short portion of the small diameter and the lower portion 9 2 and the lower portion 9 3 are integrally formed via the segment portion 94. 91b. 2170-8973-PF 35 200817646 In this case, as shown in FIG. 21C showing the state in which the sealing member 8 is sealed, when the plastic deformation of the sealing member 8 is completely buried in the lower portion 93, the remaining portion of the sealing member 8 is received in the upper portion 92 of the large diameter. Thereby, the sealing member 8 can be prevented from being protruded from the upper surface of the heat pipe 1 to be flat. Further, in Figs. 2A and 20B, and any of the examples shown in Figs. 21A and 21B, the same effects as those of the above embodiment can be obtained. [Simple description of the map]

Fig. 1 is a perspective view showing the appearance of a heat pipe of the present invention. Figure 2A is shown in the figure! FIG. 2B is a cross-sectional view showing a cross-sectional structure of the heat pipe of FIG. 3A. FIG. 3A is a schematic view showing a front structure of the upper surface of the upper plate. Fig. 3B is a schematic view showing the front structure of the inner surface below the upper plate. Fig. 4A is a schematic view showing the front structure of the lower surface of the lower plate. Fig. 4B is a schematic view showing the front structure of the inner surface on the lower plate. Fig. 5 is a schematic view showing a front structure of a first intermediate plate. Fig. 6 is a schematic view showing a front structure of a second intermediate plate. Fig. 7 is a schematic view showing the arrangement of the through holes of the first intermediate plate and the through holes of the second intermediate plate in Table 7^. Fig. 8 is a view showing the structure of the first flow path and the capillary flow path. Fig. 9A is a schematic view showing the formation of the t-plate and the second intermediate plate. Shows the circulation of the refrigerant. The phenomenon of the phenomenon (1) vapor diffusion detailed side profile

2170-8973-PF 36 200817646 Fig. 9B is a detailed side cross-sectional view showing the phenomenon of the circulation phenomenon of no refrigerant (2). Fig. 10 is a schematic view showing a state in which the refrigerant diffuses from the center portion to the peripheral portion. Fig. 11 is a schematic view showing how the refrigerant returns from the peripheral portion to the center portion. Fig. 12A is a front elevational view showing a detailed configuration of a portion of a vicinity of a refrigerant injection hole formed on the inner surface of the upper plate, and a sectional view showing a front view d and a portion. Fig. 12B is a front elevational view showing a part of the detailed structure (1) formed in the vicinity of the plate reinforcing portion in the j-th intermediate plate. Fig. 12C is a front elevational view showing a part of the detailed structure (丨) of the vicinity of the reinforcing portion having the slit formed in the second intermediate plate. Fig. 1 2D is a front view showing a part of the detailed structure (2) formed in the vicinity of the plate reinforcing portion in the i-th middle plate. Fig. 12E is a front elevational view showing a part of the detailed structure (2) of the vicinity of the reinforcing portion having the slit formed in the second intermediate plate. Fig. 12F is a front elevational view showing a part of a detailed structure of a region in the vicinity of the inner surface of the lower plate. Fig. 13 is a cross-sectional view showing a detailed structure of an upper plate reinforcing portion, a middle plate reinforcing portion, a slit reinforcing portion, and a lower plate reinforcing portion. Fig. 14A shows a section 2170-8973-PF 37 200817646 which is an example of the manufacturing method of the heat pipe. Fig. 14B shows a section (?) of the manufacturing method of the heat pipe. Fig. 14C shows the manufacture of the heat pipe. Fig. 14D is a cross-sectional view showing a method of manufacturing a heat pipe. Fig. 14E is a cross-sectional view showing an example (5) of a method for manufacturing a heat pipe. Fig. 15A shows a refrigerant & A schematic diagram of the frontal structure of the human eve 7^/wang into the hole. Fig. 1 5 is a schematic view showing the refrigerant injection μ鄱. 7 is a schematic view of the case where the sealing member is placed on the hole/king hole. Fig. 15C is a view showing the state in which the refrigerant injection hole is closed by the sealing member. Figure 16 is a cross-sectional view showing the method of manufacturing the heat pipe - (6)

Fig. 16 is a view showing an example of a method of manufacturing a heat pipe. Fig. 17 is a schematic view showing a state in which a refrigerant is supplied to a body of a cooling unit by using an ink jet nozzle. & Fig. 18 is a schematic view showing a construction (1) having a slit reinforcing portion according to another embodiment. Fig. 19 is a schematic view showing a slit reinforcing portion (2) according to another embodiment. Fig. 20A is a schematic view showing a front structure (1) of a refrigerant injection hole and an air row 2170-8973-PF 38 200817646 of another embodiment. Fig. 20B is a cross-sectional view showing a side cross-sectional structure (1) of a refrigerant injection hole and an air discharge hole of another embodiment. Fig. 20C is a cross-sectional view showing the state in which the refrigerant injection hole and the air discharge hole of the other embodiment are closed by the sealing member. Fig. 21A is a schematic view showing the front structure (2) of the refrigerant injection hole and the air discharge hole of the embodiment. Fig. 21B is a cross-sectional view showing the side cross-sectional structure (2) of the refrigerant injection hole and the air discharge hole of the other embodiment. Fig. 21C is a cross-sectional view showing a state in which the refrigerant injection hole and the air discharge hole of the other embodiment are closed by a sealing member. [Main component symbol description] 1~ heat pipe; 2~ upper plate; 2a~ upper outer; 2b~ lower inner face; 3~ lower plate; 3a~ lower outer; 3b~ upper inner face; 4~ refrigerant injection hole; 4 a~ opening 4b~exhaust groove; 5~air discharge hole; 2170-8973-PF 39 200817646 6a, 6b~1nd middle plate; 7a, 7b~2nd middle plate; 8~ sealing member; 1 0~cooling body 10a~internal space; 11~body part; 12~peripheral part; 14~ upper plate inner groove; 1 5~ boss column; 21~ body part; 23~ upper plate inner groove; 2 4~ boss column; ~ body portion; 33a~ peripheral area of cooling device; 3 3 b~ area, 3 4~ vapor diffusion flow path hole; 36~ capillary formation area; 3 7~ through hole; 3 8~ partition wall; 4 0~ through hole 41~ partition wall; 4 2~ capillary flow path; 44~vapor diffusion flow path; 5 0~ upper plate reinforcement;

2170-8973-PF 40 200817646 5 2~ medium plate reinforcement; 55~ reinforcement with slit; 5 6~ slit; 5 7~ refrigerant hole; 6 0~ plate reinforcement; 61~ slit orientation Groove; 6 2~ central recess; 70~nozzle; 74~protrusion; 75~pressing machine; 81, 8 5~reinforcing part; 8 2~ refrigerant hole; 8 7~ slit; 9 0 a~ refrigerant injection hole 90b~ air discharge hole; 91 a~ refrigerant injection hole; 91b~ air discharge hole; 92~ upper portion; 93~ lower portion; 94~ segment portion; HE~cooled device; W~ refrigerant; W1, W2~ refrigerant particles . 2170-8973-PF 41

Claims (1)

200817646, the scope of application for patents: 1 · A heat pipe, comprising: · a cold portion body, which is formed by a cycle in which a refrigerant is formed in an internal space to the metal of the inner diameter; and - a / main entrance hole, which is formed in The cooling unit main body is filled with the refrigerant in a space; and the internal space encloses the male sealing member, and the refrigerant is sealed in the refrigerant injection hole, and the sealing member is similar to the cooling unit. Made of plastic metal.忒 2 2 — 种 种 · · · · · · · · · · · · · 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 本体 & 种 本体 本体 本体 本体 本体 本体 本体 本体 本体 · · 本体 · :Ml in TT / JL... /, is formed in the internal space of the main body of the cooling unit. "Let the king enter the above-mentioned refrigerant hunting. The characteristics are: ^ 苒仵 closed, in the above middle plate And comprising: a reinforcing portion, a portion of the peripheral region of the medium injection hole, having a predetermined thickness = the above-mentioned cold hole, which is formed corresponding to the refrigerant injection: and the refrigerant 3 · a heat pipe, including ·· h. Q The main body is composed of a metal having an inner space diameter; and a recirculating passage refrigerant injection hole of the v-forming medium is formed in the main body of the upper cold portion, and the inner portion is 2170-8973-PF 42 200817646 The space injecting the refrigerant is sealed by a sealing member, and the refrigerant is injected into the internal space of the refrigerant in the form of fine particles. 4. The above-mentioned 4. A heat pipe including: an internal forest body Set on And the middle plate between the lower plates is formed by a metal forming a circulation path of the refrigerant in the internal space; the plurality of refrigerant injection holes are formed in the cooling unit body to inject the internal space of the cold body; and the vp sealing member And sealing the refrigerant into the inner space to seal the refrigerant injection hole, wherein the sealing member is made of a plastic metal which is homogenous or similar to the cooling unit body, <T the middle plate includes a reinforcing portion formed in a portion corresponding to a peripheral region of the injection hole and having a predetermined thickness; and a refrigerant hole formed in a portion corresponding to the refrigerant injection hole, wherein the refrigerant is formed into fine particles Injecting the internal space of the refrigerant. The heat pipe according to any one of the first to fourth aspects of the patent scope of the present invention, wherein the sealing member of the refrigerant injection hole is closed, the surface of the body is convex. & 6. In the item of the first item of the patent scope, wherein the inner peripheral surface of the refrigerant injection hole is formed with a moire groove, 2170-8973-PF 43 200817646 ΜThe above-mentioned sealing member Jiang 1 is outside the Qiu and the medium injection hole is completely closed, and the state in which the external port is connected to the internal management stomach is maintained, and when the refrigerant injection hole is completely closed, In the state, the sealing member is closed by the above-mentioned sealing member. The heat pipe according to any one of Items 2 to 4 of the Japanese Patent Application No. 2 to 4, the production route: the passage of the % path includes the vapor diffusion of the refrigerant into the vapor diffusion. The portion of the manhole is disposed in the vapor diffusion channel 'in the reinforcing portion.. ^^α, the refrigerant is formed in the vapor diffusion channel as a slit in the diffusion direction of the gas diffusion. 8. A method of manufacturing a heat pipe, comprising: a refrigerant injection hole formed in a cooling unit body made of a metal, and an injection step of injecting the refrigerant into an internal space of the cooling unit body in which a refrigerant circulation path is formed ^ by /, the cold portion of the body of the same or similar plastic metal structure, the sealing member, placed in the above-mentioned refrigerant injection hole loading step; and, by the actual work of pressing the sealing member The sealing step of closing the refrigerant column into the hole by the sealing member. 9. A method of manufacturing a heat pipe, comprising: a step of injecting the refrigerant into an internal space of the cooling unit body in which a refrigerant passes through a refrigerant path formed in a cooling unit main body; 7 ” a step of placing the injection hole on the sealing member; and a sealing step of closing the refrigerant column into the hole by pressurizing the sealing member by A, characterized in that: 2170-8973-PF 44 200817646 In the above-described injection step, the refrigerant is injected into the internal space through the refrigerant injection hole in a micro-plate shape. The method for manufacturing a heat pipe includes: preparing to be disposed between the upper plate and the lower plate The plurality of intermediate plates form a circulation path of the refrigerant in the internal space. The F, +, and μ k I γ are formed in a portion corresponding to the peripheral region of the refrigerant injection hole forming the plate or the lower plate to form a predetermined thickness.刀之邙八# + female X II in preparation for the refrigerant injection hole ... forming a cooling unit body for the refrigerant hole; a step of injecting the hole into the cooling medium into the cooling portion; q injecting the refrigerant into the hole by vacuuming the lower part of the refrigerant; and pressing the sealing member to pressurize the refrigerant column into the hole The closed step of closure. The sealing member will be U. A method for manufacturing a heat pipe, comprising: preparing a circulation or a number of intermediate plates formed by the upper plate and the lower space to form a refrigerant, and internally on the upper plate or the upper plate; Forming a part corresponding to the formation of a portion having a predetermined thickness opposite to the peripheral region of the media main entrance hole is formed cold: a strong portion, and corresponding to the refrigerant injection hole preparation step; 'the cooling unit body formed by the metal of the hole is admitted to the refrigerant; the inlet hole is in contact with the internal space of the cooling unit body; Injection, a sealing structure composed of a plastic-like metal, a homogenous portion of the above-mentioned portion or a mounting step of the sealing member; and 2170-8 973-PF 45 200817646 by pressurizing the sealing member under vacuum to seal the refrigerant a step of closing the column-in hole; wherein, in the step of injecting, the upper medium, the manganese, and the refrigerant are in the form of fine particles, and the Q medium injection hole is injected into the internal space. 12. The method of claim 1, wherein the sealing member is in a state in which the sealing member is completely closed to the refrigerant injection hole. It can maintain the external state through the venting groove formed in the refrigerant and the inner peripheral surface of the inlet hole. The shape in which the internal space is connected to the above-mentioned internal space 13 is as in the manufacturing method of the ninth aspect of the invention, and the sealing step on the heat pipe r according to any one of the above-mentioned items (2) is due to the direct sealing member Pressurizing the sealing member to pre-seal the refrigerant. After the main sealing hole is continuously applied to the sealing member, the refrigerant injection hole is bored. The mold member Wang Xiong, the seal 2170-8973-PF 46