The specific embodiment
The present invention is after refrigerant is injected in the inner space of the cooling end body with refrigerant hand-hole, will with cooling end body homogeneity or similarly the containment member mounting that constituted of ductile metal on the refrigerant hand-hole, by under vacuum, pressurizeing, make sealing member sealing refrigerant hand-hole.In addition, obtain certain sealing effectiveness in order to make the sealing member, make this pressurized, heated by the limit and make the containment member crimping, sealing is fully cooled off hand-hole and is made heat pipe whereby.
Whereby, in heat pipe, the cooling end body constitutes with metal, and containment member is to be constituted with cooling end body homogeneity or similar ductile metal, even cooling end body and containment member contact refrigerant or exposure, can't produce local cell effect, can prevent corrosion, can attempt than prior art longevityization more because of this local cell effect by this cooling end body and containment member.
Again, material as cooling end body and containment member, for example use, during the metal of gold, silver, copper, copper based material, aluminium or aluminium system, because its fusing point height, even still can keep sealing effectiveness at the high temperature of 200-300 ℃ of degree, even and still can positively continue to bring into play sealing effectiveness at high temperature with respect to scolding tin.
In addition, for embodiment described later, as heat pipe, use by sandwich between flat upper plate and the lower plate one or several flat in plates and the cooling end body that forms.This cooling end body is formed with circulating path by the middle plate of or several in inside, and it comprises: make steam to the stream of the outer part side diffusion of this cooling end body (below, this is called the vapor diffusion stream); And with between upper plate and lower plate with upper and lower to institute's apparent time, by the capillarity refrigerant to stream that this above-below direction or incline direction flow (below, this is called the capillary stream).By way of parenthesis, following inner face in upper plate is formed with the depression structure portion that forms with clathrate etc., and via these be formed at the following inner face of upper plate recess (below, this is called upper plate inner face ditch portion), and the recess (below, this is called lower plate inner face ditch portion) that is formed at the last inner face of lower plate is communicated with vapor diffusion stream and capillary stream.
In addition, in each zone that is separated by upper plate inner face structure portion and lower plate inner face ditch portion, being formed with leading section respectively is plane protruding post.At this and since the front end of protruding post be plane can with middle plate adherence.At this, upper plate inner face structure portion and lower plate inner face ditch portion form with clathrate in following embodiment, but can also form other shape patterns such as for example mesh.At this moment, protruding post, it makes its cross section form square, circle, ellipse, polygonal, star with correspondence.
By way of parenthesis, this heat pipe, owing to form radial to periphery by the full-shape bight that the vapor diffusion stream is for example comprised 4 jiaos, can be with all utilization all sidedly of cooling end body and can be effectively with the thermal diffusion of the device that is cooled. heat radiation, can make the heat conduction efficiency height, can say to be suitable as heat pipe most.At this, the shape of vapor diffusion stream can be band shape or trapezoidal shape, perhaps also can be broadened along with width dimensions or narrows down to periphery by central portion, also can be other different shape.
When middle plate is several, can make overlapping vapor diffusion stream overlapping fully, the vapor diffusion stream is offset to cross direction with the hole with the hole.When middle plate was a slice, the vapor diffusion stream became the vapor diffusion stream with hole itself.
When middle plate is several,,, form the capillary stream that is communicated with the vapor diffusion stream by overlapping through hole by overlapping these a few middle plates again.In addition, plate through hole in each has every middle plate is formed situation with different pattern, maybe the situation that all middle plates are formed with identical patterns.Again, when middle plate is 1, through hole itself will become the capillary stream.
That is, it is in full accord to can be the position that makes each through hole of plate in each, shape, size, corresponding in each the through hole of plate constitute mutually with the capillary stream ground of its same position, identical shaped, identical size middle plate be located at form between upper plate and the lower plate.The through hole of this moment, the shape of capillary stream can be for example rectangle (for example square or rectangular), also crooked R can be arranged at the angle.Again, be rectangle on the substrate, that face of the face of part or all at it (inner peripheral surface of capillary stream) can be is wavy, corrugation etc., surface area is broadened also can.Because the wide more cooling effect of the surface area of the inner peripheral surface of capillary stream is strong more.Again, the shape of capillary stream can be hexagon, can be circle, also can be ellipse.
But, with upper plate and lower plate with upper and lower to institute's apparent time, by with the sectional area of the capillary stream of this above-below direction plane orthogonal direction, more ninor feature becomes, then with plate in several,, only make one overlapping by the suitable skew in position that its through hole fits like a glove, then can make the sectional area of the essence of capillary stream, little compared to the sectional area of the parallel direction of each through hole of middle plate.
Particularly, for example middle plate is 2 a situation, the size of the through hole of this middle plate of 2, shape, location gap are identical, make its allocation position (for example to set direction, transverse direction (direction on the one side when through hole is four limit shapes) is offset 1/2nd of its disposition interval, then can make the sectional area of the essence of capillary stream, be reduced into the through hole of plate in each sectional area about 1/2nd.Moreover, the allocation position of the through hole of 2 middle plates to the direction of intersecting with an above-mentioned direction (for example, longitudinal direction (with his edge direction of an edge direction quadrature of through hole) skew then can make the sectional area of the essence of capillary stream, in being reduced into about 1/4th of the sectional area of each through hole of plate.Moreover when being that plate skew through hole disposes in each, refrigerant forms the capillary stream that flows to the direction adipping by on this not only in above-below direction.
The cooling end body, or the upper plate, the lower plate that constitute this cooling end body reach middle plate, and the material of the containment member of sealing refrigerant hand-hole, by the face of heat conductivity, mechanical strength etc., with copper, perhaps copper such as copper alloy is metal the best, but be not to be defined in this, for example also can be, have the aluminum or aluminum alloy of advantages such as fee of material is cheap etc., the aluminum-based metal that contains aluminium also can use Ferrious material, gold, silver such as iron, ferroalloy, stainless steel.
Moreover, be metal when forming with the cooling end body with formation copper such as copper or copper alloys, the outer surface of cooling end body comprises copper or is the surface of the containment member of metal with copper, and nickel plating is arranged usually.
Then, refrigerant can be said with the big water of latent heat (pure water, distilled water etc.) the best, but be not to be defined in water, and is for example also good with ethanol, methyl alcohol, acetone etc.
The refrigerant hand-hole needs only the peristome with the containment member sealing of placing, and is formed at the exhaust ditch formation of inner circumferential surface, when carrying out closed operation with containment member, carries out the intrinsic exhaust of cooling end by this exhaust ditch.
Promptly, in this heat pipe, during with containment member sealing refrigerant hand-hole, can carry out vacuum outgas via the exhaust ditch, even suppose to exist the harmful components of corrosion cooling end body in the inner space, the air of inner space is discharged by the exhaust ditch, can positively remove harmful components by the inner space with this air.Again,, can provide and suppress of the degassing of sealing back, can prevent the heat pipe that reduces because of the life-span of internal corrosion by this inner face by the Impurity removal that will be attached to the inner face of cooling end body in advance.
Then, in this heat pipe, by heating. pressurization is by the containment member that ductile metal constituted, and the limit makes the plastic deformation crimping of sealing member and becomes sealing bolt.Therefore,, also the exhaust ditch positively can be sealed, the refrigerant hand-hole fully can be covered whereby,, can prevent positively that refrigerant from spilling so refrigerant is enclosed the inner space of cooling end body by containment member in this heat pipe.
Moreover, also can be not in the refrigerant hand-hole that refrigerant is injected the inner space with nozzle, establish for example air tap of same degree size in the cooling end body, at this moment, when injecting refrigerant by the refrigerant hand-hole, the air of inner space is deviate from by the air tap, can carry out the injection of refrigerant glidingly.
The supply of refrigerant can be used common nozzle, also can use inkjet nozzle etc. to make refrigerant become trickle refrigerant particle also can in the vaporific injection cooling end body.
Whereby, can prevent periphery that big water droplet is attached to the refrigerant hand-hole covers the refrigerant hand-hole with the surface tension of refrigerant with water droplet state, and can save and prevent to produce the decompression operation that this water droplet makes the inner space decompression.At this moment, nozzle is kept supplying with to good non-contactly with the cooling end body.
Moreover, even do not establish the air tap, also can inject refrigerant, but it is good because the refrigerant injection is carried out more glidingly to be provided with the air tap by the refrigerant hand-hole in the cooling end body.Moreover outer when the cooling end body is established the air tap at the refrigerant hand-hole with the sealing of above-mentioned containment member, not only to the refrigerant hand-hole, also can carry out for the air tap.
By way of parenthesis,, inkjet nozzle is arranged, maybe can make refrigerant become the micro-dispenser of little finely particulate, also can use the dispenser that upgrades of receiving that can further refrigerant be become ultramicron as making refrigerant become the nozzle of vaporific supply.
Yet heat pipe is along with miniaturization, the slimming of the device that is cooled, and require miniaturization, the slimming of cooling end body itself, in response to requiring, then since intensity can die down, so process of sealing with metallic objects such as copper, or use breakage easily at refrigerant hand-hole with the cooling end body.
To this, heat pipe of the present invention, middle plate in the inner space of being located at the cooling end body, establish reinforcement part by part with set thickness in the outer peripheral areas of corresponding refrigerant hand-hole, lifting is the mechanical strength of the outer peripheral areas of this refrigerant hand-hole, can prevent to be the breakage of production process or use, and the low priceization more more of can attempting, the longevityization of can attempting.
When plate was set in the plural number, by whole middle plates is established the reinforcement part, this reinforcement part lamination and adherence forms support construction by strong portion of this can promote the mechanical strength of the outer peripheral areas of refrigerant hand-hole more.Moreover, also can only establish the reinforcement part to the middle plate of a part.
Again, when the part of the outer peripheral areas of corresponding refrigerant hand-hole is established the reinforcement part, the part of corresponding refrigerant hand-hole, it is good that the refrigerant that will be communicated with this refrigerant hand-hole is formed at the reinforcement part with the hole.When injecting refrigerant in the inner space via the refrigerant hand-hole whereby, can by refrigerant with hole and slit make refrigerant be full of all sidedly in plate or lower plate.
Moreover the part of corresponding refrigerant hand-hole in being disposed on the vapor diffusion stream of the formed hollow structure of plate the time, also can the direction when refrigerant becomes steam by the vapor diffusion stream form slit.Whereby, become the refrigerant of the steam that is spread in the vapor diffusion stream, can be diffused into outer part with hindering, can keep radiating effect by the reinforcement part.Moreover, slit, all reinforcement parts of plate in can being formed at also can only be formed at a part of middle plate reinforcement part.
Embodiment
Below, the present invention is described in detail according to illustrated embodiment.
Fig. 1 represents the exterior structure of going up the outside of the heat pipe 1 of embodiment.This heat pipe 1 comprises that the copper with the high high heat conducting material of heat conductivities such as copper or copper alloy is the upper plate 2 and the lower plate 3 of metal forming, in upward the outside 2a cross-under refrigerant hand-hole 4 and the air tap 5 of upper plate 2.The situation of this embodiment, refrigerant hand-hole 4 one of is located at relatively near the corner portion on the one side among the opposite side bight, and air tap 5, be located at the corner portion on this one side near the corner portion of the online right another side in diagonal angle.
These refrigerant hand-holes 4 and air tap 5, keep inner space (aftermentioned) and external communications with this air tap 5, after injecting the refrigerant that is made of water etc. by the 4 pairs of inner spaces of refrigerant hand-hole, making by the copper with upper plate 2 and lower plate 3 homogeneities is the containment member 8 plastic deformations sealing that metal constitutes.
This heat pipe 1, Fig. 2 A as the profile construction of the A-A ' part of the heat pipe 1 of presentation graphs 1, and shown in Fig. 2 B of the profile construction of the B-B ' of the heat pipe 1 of presentation graphs 1 part, for example device HE that is cooled of heater such as IC (semiconductor integrated circuit) or LSI (large scale integrated circuit), CPU is installed in the central portion of the following outside of lower plate 3.
In fact, this heat pipe 1, on lower plate 3 in regular turn in the lamination the 2nd among the plate 7a, the 1st among the plate 6a, the 2nd among the plate 7b and the 1st behind the plate 6b, the further last lamination upper plate 2 of plate 6b in the 1st, integrated by directly engaging based on each the locating hole location that is not shown in figure, form cooling end body 10.
By way of parenthesis, in this so-called directly combination, instigate the state pressurization of the 1st and the 2nd facial adherence of desire joint, by applying heat treatment, by acting on interatomic force between the 1st and the 2nd face atom is engaged mutually securely, need not whereby to use solid and can make the 1st and the 2nd facial integrated.
In the inner space of cooling end body 10 10a, in the mutual lamination the 1st in regular turn plate 6a, 6b, and the 2nd in plate 7a, 7b, formation is shown in Fig. 2 A, because zone relative with the part that is provided with the device HE that is cooled and outer peripheral areas thereof (below, these merging are called the device outer peripheral areas that is cooled) 33a is to the vapor diffusion stream 44 of periphery 12 radial extensions, and shown in Fig. 2 B trickle capillary stream 42.Moreover Fig. 2 A is a profile of dividing into capillary flow road 42 and the area part of vapor diffusion stream 44 in the cooling end body 10, and Fig. 2 B is the profile of the area part that is full of with capillary stream 42 in the cooling end body 10.
In the 10a of the inner space of this cooling end body 10, enclose the refrigerant W that set amount constitutes with water down in decompression, reduce the boiling point of refrigerant W whereby, make refrigerant W become steam and capable of circulation in vapor diffusion stream 44 and capillary stream 42 by the heat slightly of the device HE that is cooled.
Secondly, show in the upper plate the 2, the 1st that is present embodiment each detailed construction of plate 7a, 7b and lower plate 3 among plate 6a, the 6b, the 2nd, at first simple declaration is as follows about vapor diffusion stream 44 and capillary stream 42.Fig. 3 A represents the structure of going up outside 2a of upper plate 2, and Fig. 3 B represents the structure of the following inner face 2b of upper plate 2.Again, Fig. 4 A represents the structure of the following outside 3a of lower plate 3, the structure of last inner face 3b that Fig. 4 B represents lower plate 3.Fig. 5 represent to sandwich upper plate 2 and lower plate 3 the 1st in the structure of plate 6a, 6b, among Fig. 6 and the 1st plate 6a, 6b similarly, expression sandwich upper plate 2 and lower plate 3 the 2nd in the structure of plate 7a, 7b.
Upper plate 2 shown in Fig. 3 B, has by thickness and is the body 21 that roughly square shape constituted of 500 μ m degree for example.In the following inner face 2b of body 21,, be formed with the cancellate upper plate inner face ditch portion 23 of caving in into except the periphery 12 of frame shape.Upper plate 2 is cancellate zone in separating by upper plate inner face ditch portion 23, and being respectively equipped with leading section is plane protruding post 24.
Lower plate 3 shown in Fig. 4 B, has by thickness and is the body 11 that roughly square shape constituted of 500 μ m degree for example.In the last inner face 3b of body 11,, be formed with the cancellate upper plate inner face ditch portion 14 of caving in into except the periphery 12 of frame shape.Lower plate 3 is cancellate zone in separating by upper plate inner face ditch portion 14, and being respectively equipped with leading section is plane protruding post 15.
Again, as shown in Figure 5 the 1st in the body 31 of plate 6a, 6b, and as shown in Figure 6 the 2nd in the body 32 of plate 7a, 7b, by being that metal is constituted with upper plate 2 and lower plate 3 identical copper, thickness is for example 70-200 μ m degree, forms the roughly square shape identical with the body 11 of lower plate 3.
At this, about plate 6a, 6b in the 1st, owing to be to be same size and identical shaped, below, only be conceived to plate 6a explanation among the 1st among plate 6a, the 6b in the 1st.As shown in Figure 5, the body 31 of plate 6a in the 1st is formed with the vapor diffusion stream with hole 34, reaches capillary and forms zone 36.Capillary forms zone 36, the device outer peripheral areas that is cooled 33a, and the vapor diffusion stream of adjacency is made of the regional 33b beyond the device outer peripheral areas 33a that is cooled with the zone in 34 in hole.Moreover, the device outer peripheral areas that is cooled 33a, with body 31 laminations when the body 11 of lower plate 3 with the relative zone of device HE that is cooled of being located at this lower plate 3.The vapor diffusion stream forms band shape with hole 34, by the device outer peripheral areas 33a that is cooled comprise four corners with radial extension wear.
Form zone 36 in capillary, be equipped with several through holes 37 that form capillary stream 42 (Fig. 2 A and Fig. 2 B) with the 1st pattern (aftermentioned).In fact, form zone 36 in this capillary, have cancellate partition wall 38, each zone that separates by this partition wall 38 becomes through hole 37.
Through hole 37 as shown in Figure 7, is made of four limit shapes, as the 1st pattern, dispose regularly with set layout, and each four limit disposes (Fig. 5) abreast with four limits of the outer part 12 of the periphery of body 32 respectively.By way of parenthesis, the situation of this embodiment, the width of through hole 37 can be chosen to be for example 280 μ m degree, and the width of partition wall 38 can be chosen to be for example 70 μ m degree.
On the other hand, plate 7a, 7b in the shown in Figure 6 the 2nd, with the 1st in plate 6a, 6b same size form.Moreover, at this, below, only be conceived to plate 7a explanation among the 2nd among plate 7a, the 7b in the 2nd.Plate 7a in the 2nd, as shown in Figure 6, though with the 1st in plate 6a, 6b similarly be provided with capillary and form zone 36 and vapor diffusion stream with hole 34, be arranged in several through holes 40 that capillary forms zone 36, wear with the 2nd pattern (aftermentioned) different with above-mentioned the 1st pattern.The capillary of plate 7a forms zone 36 in the 2nd, forms cancellate partition wall 41, and each zone that separates by this partition wall 41 becomes through hole 40.As shown in Figure 7, this through hole 40 is made of four limit shapes, as the 2nd pattern, with the 1st pattern similarly, with the configuration of set interval rule ground, and each four limit disposes abreast with four limits of the outer part 12 of body 32 respectively, and with the 1st in each through hole 37 of plate 6a only be offset both set a distance configurations.
At this embodiment, for example with among the plate 6a and the 2nd in the 1st during the lamination of plate 7a location, the through hole 37 of plate 6a in the 1st, the directions X on the limit on one side of the through hole 40 of plate 7a in the 2nd, 1/2nd of skew limit, and to other the Y direction on limit of this directions X quadrature on one side, 1/2nd ground configuration on skew limit.Whereby, 1 of plate 6a through hole 37 in the 1st, with the 2nd in 4 adjacent through holes 40 of plate 7a overlapping, can get 4 capillary streams 42.Whereby, can form majority much smaller than each through hole 37,40 in through hole 37, and separate little capillary stream 42 into trickle surface area.
Yet in heat pipe 1, the mutual in regular turn lamination of plate 6a, 6b among plate 7a, the 7b and the 1st in the 2nd, as shown in Figure 8, through hole 37,40 skews form capillary streams 42, and the vapor diffusion stream is with the hole 34 formation vapor diffusion stream 44 that overlaps each other.Again, these vapor diffusion streams 44 and capillary stream 42 are communicated with (Fig. 2 A and Fig. 2 B) via upper plate inner face ditch portion 23 and lower plate inner face ditch portion 14.
Whereby, in heat pipe 1, shown in Fig. 9 A of sectional side view of A-A ' that expression becomes Fig. 1 that locates that vapor diffusion stream 44 and capillary stream 42 are set, owing in each the capillary stream 42 of device outer peripheral areas 33a that is cooled, exist refrigerant W always, the start vaporizer so the heat that the freezing mask W in each capillary stream 42 will be conducted by the bossing of the device outer peripheral areas 33a that is cooled is absorbed heat rapidly and positively spreads refrigerant W with upper plate inner face ditch portion 23 and lower plate inner face ditch portion 14 by the vapor diffusion stream 44 that extends to outer part 12.
Promptly, refrigerant W, as represent positive surface construction shown in Figure 10 of plate 6a in the 1st, be that center refrigerant W spreads along vapor diffusion stream 44 and upper plate inner face ditch portion 23 and lower plate inner face ditch portion 14 radial equalization and makes outer part 12 with the device HE that is cooled that is located at lower plate 3.
Then, in this heat pipe 1, as be expressed as being full of shown in Fig. 9 B of side profile construction of B-B ' of Fig. 1 of part with capillary stream 42, refrigerant W in condensing liquefaction of heat release such as upper plate inner face ditch portion 23 and lower plate inner face ditch portion 14, outer parts 12, enter capillary stream 42 by upper plate inner face ditch portion 23 and lower plate inner face ditch portion 14, get back to the device outer peripheral areas 33a that is cooled once again by these capillary stream 42 grades.Whereby, refrigerant W, as represent positive surface construction shown in Figure 11 of plate 6a in the 1st, the capillary stream 42 of regional 33b that can be by radial configuration cools off this device HE that is cooled equably by the periphery of the device HE that is cooled.
Secondly, being constructed as follows in the outer peripheral areas of the refrigerant hand-hole 4 of cooling end body 10 of the present invention and air tap 5 is described again.Moreover, because refrigerant hand-hole 4 and air tap 5 form with same configuration, so for convenience of description, below only be conceived to 4 explanations of refrigerant hand-hole.
Figure 12 A is the front elevation of a part of detailed construction of near zone of the refrigerant hand-hole 4 of the expression following inner face 2b that is formed at upper plate 2, and is the profile of front elevation C-C ' part.The following inner face 2b of upper plate 2 is provided with the upper plate reinforcement part 50 that forms toroidal as surrounding refrigerant hand-hole 4 ground in the outer peripheral areas of this refrigerant hand-hole 4.This upper plate reinforcement part 50 has thickness than upper plate inner face ditch portion 23, is chosen to be and is located at the protruding post 24 of upper plate inner face ditch portion 23 and the thickness same thickness of outer part 12.
Situation in this embodiment, refrigerant hand-hole 4 for example is the fine holes of 500-1000 μ m degree in the diameter of the columned peristome 4a at center, forms exhaust ditch 4b in inner peripheral surface, moreover, on these peristomes 4a and exhaust ditch 4b, can place containment member 8 ground unchangeably and form recess 4c.
In the situation of this embodiment, exhaust ditch 4b shown in Figure 15 A of the positive surface construction of expression refrigerant hand-hole 4, is made of the semicircle shape of the diameter little than the diameter of peristome 4a, in the inner peripheral surface of peristome 4a, has the structure uniformly-spaced to dispose 4.
Figure 12 B and Figure 12 D are the front elevations of a part of detailed construction of the near zone of the expression middle plate reinforcement part 52 that is formed at plate 6a, 6b in the 1st.The middle plate reinforcement part 52 of plate 6a forms with identical shaped with original shape and upper plate reinforcement part 50 in the 1st, is formed at the position relative with this upper plate reinforcement part 50.In the situation of this embodiment, middle plate reinforcement part 52 owing to be formed at the vapor diffusion stream with hole 34, is integrally formed in partition wall 38, and the corner part of this vapor diffusion stream with hole 34 separated.Again, plate reinforcement part 52 in this is chosen to be the identical thickness of thickness with partition wall 38 and outer part 12, wears refrigerant in the position relative with the peristome 4a of the refrigerant hand-hole 4 of upper plate 2 with hole 53.
Figure 12 C and Figure 12 E are the front elevations of a part of detail ground formation of the expression near zone that is formed at the reinforcement part with slit 55 of plate 7a, 7b in the 2nd.The reinforcement part with slit 55 of plate 7a, 7b is integrally formed with partition wall 41 in the 2nd, be formed be communicated with the vapor diffusion stream with the slit 56 in hole 34 in addition with the 1st in the middle plate reinforcement part 52 of plate 6a, 6b have identical construction.Refrigerant is with hole 57, is arranged in the relative position of peristome 4a with the refrigerant hand-hole 4 of upper plate 2, has the structure that is communicated with slit 56.
In fact, reinforcement part 55 with slit, be that along steam the vapor diffusion stream forms slit 56 with the dispersal direction of the diffusion in hole 34 (at this moment, by the central point of plate 7a, 7b in the 2nd direction to corner portion) D, be communicated with hole 34 with the vapor diffusion stream to make vapor diffusion to the corner.Moreover this slit 56 for example forms linearity, and its width is chosen to be the 0.3mm degree.
Figure 12 F is the front elevation of a part of detailed construction of near zone of the lower plate reinforcement part 60 of the expression last inner face 3b that is formed at lower plate 3.In the last inner face 3b of lower plate 3,, be provided with the lower plate reinforcement part 60 that forms toroidal with middle plate reinforcement part 52 and have the relative zone, reinforcement part 55 of slit.In this lower plate reinforcement part 60, have thickness than lower plate inner face ditch portion 14, be chosen to be the identical thickness of thickness with the protruding post 15 of being located at 14 in lower plate inner face ditch portion and outer part 12.In this lower plate reinforcement part 60, be formed with the slit subtend ditch 61 and the central indentation 62 that are communicated with lower plate inner face ditch portion 14.Slit subtend ditch 61, for example width is 300 μ m degree, with slit 56 relatively linearity be formed at lower plate reinforcement part 60.Central indentation 62 forms at the part circular shape relative with the peristome 4a of the refrigerant hand-hole 4 of upper plate 2.
At this, Figure 13 is shown on the lower plate 3 in regular turn in the lamination the 2nd among the plate 7a, the 1st among the plate 6a, the 2nd among the plate 7b and the 1st behind the plate 6b profile of the detailed construction of upper plate reinforcement part 50, middle plate reinforcement part 52, the reinforcement part 55 with slit and lower plate reinforcement part 60 when further plate 6b goes up lamination upper plate 2 in the 1st.
In the outer peripheral areas below of the refrigerant hand-hole 4 of upper plate 2, but by upper plate reinforcement part 50, middle plate reinforcement part 52, the reinforcement part 55 with slit and 60 adherences of lower plate reinforcement part form support construction and elevating mechanism intensity.
Again, by 70 pairs of refrigerant hand-holes 4 of nozzle, the refrigerant particle W1 that 11 ground high speed (for example per second is 1000) is dripped continuously, refrigerant by plate 6b among the peristome 4a, the 1st of upper plate 2 is used hole 57 etc. with the refrigerant of plate 7b in the hole 53 and the 2nd, arrive the slit subtend ditch 61 and the central indentation 62 of lower plate 3, and arrive inner space 10a (Fig. 2 A) the universe ground formation of cooling end body 10 via each slit 56.
Secondly, illustrate about the manufacture method of heat pipe 1 as follows.Figure 14 A-Figure 14 E, Figure 16 A and Figure 16 B, expression is about an example of the manufacture method of heat pipe 1, shown in Figure 14 A, at first on lower plate 3, plate 6b and upper plate 2 among the plate 7b, the 1st among the plate 6a, the 2nd among the plate 7a, the 1st in the lamination the 2nd in regular turn.
Plate 7a, 7b among plate 6a, the 6b and the 2nd in the 1st have the joint that protrudes above to form the frame shape with projection 72 along outer part 12.Again, in lower plate 3, the joint that has the last inner face 3b by body 11 to protrude forms the frame shape with protruding 73 along outer part 12.
Then, with plate 6b and upper plate 2 among the plate 7b, the 1st among the plate 6a, the 2nd among the plate 7a, the 1st in the 2nd with the location overlap lamination of the best in lower plate 3, with these upper plate 2 and lower plate 3, plate 7a, 7b among plate 6a, the 6b and the 2nd in the 1st, heat with the temperature below the fusing point, and pressurization directly engages via engaging with projection 72,73.
So plate 7a, 7b among plate 6a, the 6b and the 2nd in upper plate 2, the lower plate the 3, the 1st as shown in Figure 14B, obtain incorporate cooling end body 10 by direct joint.At this moment, cooling end body 10, one-tenth only makes the state of inner space 10a and external communications via refrigerant hand-hole 4 that is formed at upper plate 2 and air tap 5.
By way of parenthesis, plate 7a, 7b and lower plate 3 among plate 6a, the 6b, the 2nd in this grade in an imperial examination 1, be provided with projection 74 respectively at four limit circumferential position with the relative middle body of device HE that is cooled, not only outer part 12, in the location about of the device outer peripheral areas 33a that is cooled etc. also with projection 74 directly in conjunction with integrated to scheme.At cooling end body 10 so, also establish support construction elevating mechanism intensity in the device outer peripheral areas 33a that is cooled etc., prevent to produce the phenomenon that the heat of providing cooling device HE for oneself makes the refrigerant thermal expansion and outwards expanded by substantial middle portion (below, this is called the puffed rice phenomenon), it is own to destroy cooling end body 10.
Then, in the inner space of cooling end body 10 10a, each vapor diffusion stream of plate 7a, 7b overlaps to form vapor diffusion stream 44 with hole 34 among plate 6a, the 6b and the 2nd by making in the 1st, and form overlapping several capillary streams 42 that also forms of regional 36 by capillary, obtain the circulating path (Fig. 9 A and Fig. 9 B) that is constituted by vapor diffusion stream 44 and capillary stream 42 whereby.
This moment is in the outer peripheral areas below of refrigerant hand-hole 4 and air tap 5, by making upper plate reinforcement part 50, middle plate reinforcement part 52, the reinforcement part 55 with slit and 60 adherences of lower plate reinforcement part can form support construction.
Then, as Figure 14 C of the manufacture method of representing heat pipe 1 in regular turn, in the inner space of cooling end body 10 10a, refrigerant W1 (for example water) uses nozzle 70 to inject set amount by refrigerant hand-hole 4 down in atmospheric pressure.At this moment, air tap 5, the air outlet when becoming the refrigerant supply can make refrigerant sliding suitable to the injection of inner space 10a.Moreover refrigerant for example is the situation of water, and enclosed volume is good with the cumulative volume that is equivalent to be equal to through hole 37,40, and for making the high lifeization of heat pipe 1, the ultra-pure water that does not particularly have ionic soil is good.Again, at this moment, vacuumize, then can make the better slyness of injection of refrigerant in air tap 5.
Secondly, for example will prepare both determined number in advance, as Figure 14 D of the manufacture method of representing heat pipe 1 in regular turn, in refrigerant hand-hole 4 and air tap 5 mounting containment members 8 with the containment member 8 that orbicule forms.At this, refrigerant hand-hole 4 and air tap 5, shown in Figure 15 A, inner peripheral surface in peristome 4a is formed with several exhaust ditches 4b, even so containment member 8 of mounting orbicule, shown in Figure 15 B, keep the inner space 10a and the external communications of cooling end body 10 by exhaust ditch 4b and know state, and can carry out the interior exhaust of inner space 10a of cooling end body 10.
Then, shown in Figure 14 E of manufacture method of expression heat pipe 1, under normal temperature, carry out for example 10 minutes degree, by the vacuum outgas of decompression by exhaust ditch 4b with this state.In this step, by carrying out vacuum outgas via exhaust ditch 4b, the air in the 10a of inner space is discharged by exhaust ditch 4b, removes harmful components with this air by inner space 10a, can reduce the degassing.Moreover the arrow among Figure 14 E is represented the direction of the degassing (exhaust).
Afterwards, as Figure 16 A of the manufacture method of representing heat pipe 1 in regular turn, in the normal temperature state, the low temperature pressurizing and deformation that containment member 8 minute is made by last pressurization number by press 75.By so the cryogenic vacuum pressurized treatments is pre-sealed with refrigerant post hand-hole 4 and air tap 5 with containment member 8.This moment, refrigerant post hand-hole 4 and air tap 5 were with containment member 8 sealings.
In this relative part of outer peripheral areas with refrigerant post hand-hole 4 and air tap 5, because by making upper plate reinforcement part 50, middle plate reinforcement part 52, reinforcement part 55 and 60 adherences of lower plate reinforcement part form support construction with slit, so during with press 75 pressurization members 8, to bear with support construction from the external force of press 75, can not make 10a conquassation ground, inner space, positively containment member 8 be pressurizeed with the external force of necessity by press 75.
By way of parenthesis, with than the high temperature pressurization member 8 of normal temperature the time, because the steam of refrigerant, for example steam is easily to external leaks and not good.Therefore, be good as the temperature of carrying out vacuum outgas with the normal temperature of 25 ℃ of degree.
Secondly, when the cryogenic vacuum pressurized treatments finishes, 10 minutes degree for example then, in making vacuum under the high temperature for behind the 0.5KPa for example, further with press 75 with containment member 8 by last pressurization.Whereby, containment member 8 high-temperature pressurizing distortion invades to become in refrigerant post hand-hole 4 and the air tap 5 with the further closed state of crimping securely of containment member 8 dearly.
That is, containment member 8 is mainly done plastic deformation by pressurization, and auxiliary ground (being secondary) can will comprise refrigerant post hand- hole 4 and 5 sealings of air tap of exhaust ditch 4b by the heating plastic sex change.And, shown in Figure 15 C and Figure 16 B, the containment member 8 of orbicule is by the shape of plastic deformation one-tenth thought refrigerant post hand-hole 4 and air tap 5, be crimped on refrigerant post hand- hole 4 and 5 one-tenth sealing bolts of air tap in fact, with the inner space 10a sealing of cooling end body 10.So finish with containment member 8 sealing refrigerant post hand-hole 4 and air taps 5, then stop to heat, stop to vacuumize and separate pressurization, finish this pressurization, heat, vacuumize processing divided by press.
Moreover at this moment, the outer surface of containment member 8 forms with the outer surface of cooling end body 10 to become on the roughly same plane for good.Because the flatness of the outer surface of maintenance heat pipe 1 makes heat pipe itself good with the adherence of the coolers such as for example fan that are installed on it whereby, and the heat conductivity between unhinderedly improving.
Afterwards, the outer surface of cooling end body 10 is antirust etc., nickel plating.At this, when supposing that use is sealed refrigerant post hand-hole 4 and air tap 5 with the containment member that scolding tin was constituted, owing to can follow and be difficult to scolding tin is done good nickel plating, so can produce the discomfort that to carry out good nickel plating in the part of sealing refrigerant post hand-hole 4 and air tap 5.
To this, in the present invention, because using the copper identical with cooling end body 10 is containment member 8 sealing refrigerant post hand-hole 4 and the air taps 5 that metal constitutes, so so discomfort can not take place, also can do good nickel plating in the part of sealing refrigerant post hand-hole 4 and air tap 5.
By way of parenthesis, according to manufacture method of heat pipe 1 (refrigerant inclosure method) so, under vacuum, arrange several heat pipes 1, refrigerant post hand-hole 4 and air tap 5 mounting containment members 8 in each heat pipe 1, carry out exhaust together for these heat pipes 1, or the pressurization of containment member 8 and heating, 8 plastic deformations of all containment members can be sealed refrigerant together.And, can improve the production of heat pipe 1, again by improving the low priceization that production also can be attempted heat pipe 1 compared to 4 of each refrigerant hand-holes not being carried out previous calking operation or welding, the encapsulating method of the operation of trouble such as following.
Moreover, in this heat pipe 1, be decompression state (when refrigerant is water, for example 0.5KPa degree) by making inner space 10a, the boiling point of refrigerant is reduced, even for example high a little temperature (for example 30 ℃ of-35 ℃ of degree) refrigerant solution infantile feverish perspiration gas than the normal temperature below 50 ℃.Whereby heat pipe 1 is formed, even the circulating phenomenon that still can make refrigerant with the heat slightly from the device HE that is cooled continuously and easily repeatedly.
Be above structure, in heat pipe 1, use is the cooling end body that constitutes of metal 10 and the containment member that ductile metal constituted 8 of homogeneity by copper, sealing refrigerant hand-hole 4 and air board portal 5, even cooling end body 10 and containment member 8 contact or be exposed to refrigerant, this cooling end body 10 and containment member 8 can't produce local cell effect, result, owing to can prevent corrosion, longevityization more more so part can have been attempted because of this local cell effect.
Again, when using ductile metal as the material of cooling end body 10 and containment member 8, because its fusing point height, even still can continue positively to bring into play sealing effectiveness at the high temperature of 200-300 ℃ of degree.
By way of parenthesis, when using scolding tin, because scolding tin contains lead as harmful matter as containment member 8, so composition with the required management of lead-tight etc., but the present invention is because to use copper as the material of containment member 8 be metal, so administrative institute's need cost that need not lead, this part can be attempted and be reduced cost.
Again, because copper is metal fever conductivity height, can make the heat diffusivity height, so it is preferable to say that cooling end body 10 is with copper that metal forms, but be metal when forming with cooling end body 10 with copper, is that antirust grade is understood the outer surface nickel plating at this cooling end body 10 usually.When this refrigerant hand-hole 4 with cooling end body 10 seals with scolding tin, be etched in the pre-treatment scolding tin of nickel plating, the electroplated film a little less than forming adherence in this scolding tin surface can produce the problem that the adherence that makes it plated nickel film that the back forms and bottom dies down.
To this, in heat pipe 1 of the present invention, owing to being that metal forms with cooling end body 10 with copper, the containment member 8 that will seal refrigerant hand-hole 4 again is that metal forms with copper, so externally week all positively be implemented good nickel plating.
Again, in this heat pipe 1, make the containment member 8 of orbicule cooperate the shape of refrigerant post hand-hole 4 and air tap 5 to make the moulding sealing bolt that is deformed into, so containment member 8 is not easy to be protruded by the outside of going up of heat pipe 1, the flatness of the outside of heat pipe 1 can be prevented to diminish, and the free degree can be promoted the structure dress of mobile phone or small-sized machine because of sealing.
Promptly, in this heat pipe 1, for example CPU and light emitting diode (LED) etc. need the electronic component of heat release etc., be installed on one side, when another avris is installed fan or other cooler (radiator), because the outer surface of containment member 8 can't protrude by the outer surface of cooling end body 10, so can lifting and the adherence of electronic component or cooler etc., heat conductivity between can making it is good, and then the heat that can effectively electronic component etc. be produced is dispelled the heat effectively.
Moreover in this heat pipe 1, the inner peripheral surface in the peristome 4a of refrigerant post hand-hole 4 and air tap 5 is provided with exhaust ditch 4b in addition.Containment member 8 mountings that will become sealing bolt whereby are on refrigerant post hand-hole 4 and air tap 5 time, even containment member 8 beginning fusions and when carrying out slightly sealing, refrigerant post hand-hole 4 and air tap 5 can't seal by sealed member 8, can positively carry out the inner space 10a exhaust by heat pipe 1.
Then, in this heat pipe 1, by under vacuum, containment member being pressurizeed, with refrigerant hand-hole 4 with sealing member 8 pre-sealed after, further containment member 8 is continued pressurized, heated,, cooperate the warpage of exhaust ditch 4b by the containment member 8 moulding distortion that ductile metal constitutes, so exhaust ditch 4b also can positively seal by containment member 8, and then the spilling of refrigerant W that can prevent to enclose inner space 10a.
Again, in heat pipe 1, be the part of the outer peripheral areas of corresponding refrigerant post hand-hole 4 and air tap 5, by making upper plate reinforcement part 50, middle plate reinforcement part 52, reinforcement part 55 and 60 adherences of lower plate reinforcement part form support construction with slit, promote the mechanical strength of the outer peripheral areas of refrigerant post hand-hole 4 and air tap 5, the external force of the press 75 that the external force that can prevent inner space 10a reason upper plate 2 applies containment member 8 and conquassation equals the breakage of manufacture process, promote productivity, theobromine low production cost as a result.Again, the use after making can prevent various external force that inner space 10a reason upper plate 2 or lower plate 3 apply and conquassation, the longevityization that can attempt heat pipe 1.
Particularly in the situation of this embodiment, miniaturization and slimming for edge graph scheme heat pipe 1 obtain the efficient better heat radiating effect, and 10 are formed with vapor diffusion stream 44 and capillary stream 42 as circulating path in the inner space.Then, wherein the vapor diffusion stream 44, for thermal diffusion is dispelled the heat effectively to the outer part 12 of cooling end body 10, are configured to extend to corner portion from farthest four limits by central part.
On the other hand, refrigerant post hand-hole 4 and air tap 5, carry out easily for making refrigerant opposite heat tube 1 inner all supply slynesses, refrigerant hand-hole 4 is disposed at the corner portion on one side of heat pipe 1, air tap 5 is disposed at the corner portion of corner portion with this one side online relative another side in the diagonal angle.And then, owing to becoming configuration refrigerant post hand-hole 4 and air tap 5 on the vapor diffusion stream 44 of hollow structure.Therefore if the zone maintenance hollow structure relative with refrigerant post hand-hole 4 and air tap 5, then mounting containment member 8 on these refrigerant post hand-holes 4 and the air tap 5 is suppressed, then will only bear, so the anxiety that makes these upper plate 2 breakages is arranged from the external force of press 75 with upper plate 2.
To this, heat pipe 1 of the present invention, by in the vapor diffusion stream 44 relative with the outer peripheral areas of refrigerant post hand-hole 4 and air tap 5, make upper plate reinforcement part 50, middle plate reinforcement part 52, reinforcement part 55 and 60 adherences of lower plate reinforcement part form support construction with slit, bear external force, can prevent that upper plate 2 or lower plate 3 from making inner space 10a conquassation because of this external force breakage from this press 75.
Again, in upper plate reinforcement part 50, middle plate reinforcement part 52, reinforcement part 55 and lower plate reinforcement part 60 with slit, part at the refrigerant hand-hole 4 of corresponding upper plate 2, be formed with the refrigerant that is communicated with this refrigerant hand-hole 4 respectively and use hole 53,57, when injecting refrigerant W, via slit 56 etc. refrigerant is arrived all every nook and crannys of cooling end body 10 with hole 53,57 by these refrigerants via the 4 couples of inner space 10a of refrigerant hand-hole.
Moreover, at this moment, reinforcement part 55 with slit, form slit 56 by the dispersal direction D in refrigerant W diffusion vapor diffusion stream 44, refrigerant W can be guided to the corner portion of cooling end body 10 by this slit 56, the every nook and cranny that is diffused into inner space 10a that makes and can dispelling the heat effectively.
More than, illustrate about embodiments of the invention, but the present invention is subject to embodiment, can there be all distortion to implement, also can use the containment member that ductile metal constituted of similar cooling end body 10, also can obtain and above-mentioned same effect this moment.
Again, as shown in figure 17, for example use inkjet head 80, when being supplied in refrigerant in the cooling end body 10,, can use not have the air tap as cooling end body 10.Omit the shape of the circulating path of inner space 10a, the illustrated explanation of structure in this embodiment.
Particularly, make refrigerant (for example pure water), for example become imperceptible refrigerant particle (water particle) W2, about 1,000 11 squeeze into continuously of per second with diameter 50 μ m-300 μ m by inkjet head 80.Like this then trickle emboliform refrigerant particle W2 will be supplied in the inner space 10a of cooling end body 10 in online arrangement regularly always.At this moment, even 11 very micro-since for example with about 1000 continuous high speeds of per second squeeze into, so the refrigerant efficiency of supply is high.
So, when using inkjet nozzle 80, can make refrigerant is imperceptible refrigerant particle W2, can 11 squeeze at high speed and supply with, thus can omit the above-mentioned vacuum drawn operation of carrying out with the air tap, and then the reduction of the manufacturing cost of this operation of omission of can attempting.Again, at this moment, for example control of the charging quantity of the refrigerant of the minute quantity of 1-5mg degree, also can by to the ejection number of inkjet nozzle with numerically controlled mechanism, accuracy that can 1 unit is simply and filling at high speed.
Figure 18 and Figure 19 represent the plane with the reinforcement part with slit 81,85 of other embodiment, with the reinforcement part with slit 55 of the foregoing description, and the shape difference of slit 56.As shown in figure 18, have the reinforcement part 81 of slit, with the periphery that the middle mind-set in hole 82 has the reinforcement part 81 of slit the width dimensions of slit 83 is formed gradually with broadening by the refrigerant that constitutes with toroidal.Again, as shown in figure 19, have the reinforcement part 85 of slit, with the periphery that the middle mind-set in hole 86 has the reinforcement part 85 of slit the width dimensions of slit 87 is formed gradually with narrowing down by the refrigerant that constitutes with toroidal.With these reinforcement parts 81,85, also can obtain the effect same with the reinforcement part with slit 55 of the foregoing description with slit.Moreover, the width of slit 56,81,85, also can be in each plate inhomogeneous.
Again, at the foregoing description, the refrigerant post hand-hole 4 that forms with the state of the exhaust ditch 4a that establishes 4 semicircle shapes in the inner peripheral surface of columned peristome 4a and the situation narration of air tap 5, but the present invention is defined in this, also can use Figure 20 A as the positive surface construction of expression refrigerant hand-hole or air tap, and shown in Figure 20 B of expression side profile construction, the footpath of upper end is big, followingly more diminish gradually, directly become minimum contrary trapezoidal cone shape refrigerant hand-hole 90a and air tap 90b in the lower end.With shown in Figure 20 C of the appearance of containment member 8 sealing, in this situation, the containment member 8 of orbicule also can cooperate that the shape of refrigerant hand-hole 90a and air tap 90b is moulding to be deformed into flat condition and positively the inner space to be sealed as expression.
Again, as refrigerant post hand-hole and the air tap of embodiment with other, also can use Figure 21 A as the positive surface construction of expression refrigerant hand-hole or air tap, and shown in Figure 21 B of expression side profile construction, has the top 92 that the short cylindrical shape by big footpath constitutes, and by the bottom that short cylindrical shape constituted 93 of path, top 92 and bottom 93 are via section portion 94 integrally formed refrigerant hand-hole 91a and air tap 91b.
In this situation, as Figure 21 C of expression with the appearance of containment member 8 sealings, when containment member 8 plastic deformations were imbedded bottom 93 fully, the nubbin of containment member 8 closed at the top 92 in big footpath, can prevent that whereby containment member 8 from forming flat condition by the outside protrusion of going up of heat pipe 1.Moreover, in Figure 20 A and Figure 20 B, with any example shown in Figure 21 A and Figure 21 B, all effect that can be same with the foregoing description.