TW200801237A - Method for fabricating film-formed body by aerosol deposition - Google Patents

Method for fabricating film-formed body by aerosol deposition

Info

Publication number
TW200801237A
TW200801237A TW96108517A TW96108517A TW200801237A TW 200801237 A TW200801237 A TW 200801237A TW 96108517 A TW96108517 A TW 96108517A TW 96108517 A TW96108517 A TW 96108517A TW 200801237 A TW200801237 A TW 200801237A
Authority
TW
Taiwan
Prior art keywords
formed body
film
aerosol deposition
fabricating
fabricating film
Prior art date
Application number
TW96108517A
Other languages
Chinese (zh)
Inventor
Seiichi Yokoyama
Michiyori Miura
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200801237A publication Critical patent/TW200801237A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/214—Al2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/17—Deposition methods from a solid phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating
    • C03C2218/33—Partly or completely removing a coating by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemically Coating (AREA)

Abstract

There is provided a method for stably fabricating a film-formed body having a thick film by aerosol deposition. Raw material microparticles are sprayed from a plurality of nozzles toward a substantially identical area on a deposition substrate and the incident angle on the substrate is controlled, thereby forming the film-formed body while etching the deposited film.
TW96108517A 2006-03-13 2007-03-13 Method for fabricating film-formed body by aerosol deposition TW200801237A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006068424A JP2009132945A (en) 2006-03-13 2006-03-13 Method for forming film-formed body by aerosol deposition process

Publications (1)

Publication Number Publication Date
TW200801237A true TW200801237A (en) 2008-01-01

Family

ID=38509491

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96108517A TW200801237A (en) 2006-03-13 2007-03-13 Method for fabricating film-formed body by aerosol deposition

Country Status (3)

Country Link
JP (1) JP2009132945A (en)
TW (1) TW200801237A (en)
WO (1) WO2007105670A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2545481A (en) * 2015-12-18 2017-06-21 Rolls Royce Plc An assembly and a method of using the assembly
JP6992673B2 (en) * 2018-05-14 2022-01-13 トヨタ自動車株式会社 Surface treatment method and surface treatment equipment
JP7204276B2 (en) * 2018-12-06 2023-01-16 エルジー・ケム・リミテッド DISCHARGED APPARATUS, FORMING APPARATUS, AND METHOD FOR MANUFACTURING MOLDED BODY

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3265481B2 (en) * 1999-04-23 2002-03-11 独立行政法人産業技術総合研究所 Low temperature molding of brittle material ultrafine particles
JP3740523B2 (en) * 1999-05-21 2006-02-01 独立行政法人産業技術総合研究所 Ultrafine particle material flattening method
JP4075745B2 (en) * 2003-09-02 2008-04-16 Ｔｏｔｏ株式会社 Composite structure manufacturing equipment

Also Published As

Publication number Publication date
JP2009132945A (en) 2009-06-18
WO2007105670A1 (en) 2007-09-20

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