TW200737392A - Method and apparatus for transferring and receiving article by overhead hoist transport carrier - Google Patents

Method and apparatus for transferring and receiving article by overhead hoist transport carrier

Info

Publication number
TW200737392A
TW200737392A TW095136217A TW95136217A TW200737392A TW 200737392 A TW200737392 A TW 200737392A TW 095136217 A TW095136217 A TW 095136217A TW 95136217 A TW95136217 A TW 95136217A TW 200737392 A TW200737392 A TW 200737392A
Authority
TW
Taiwan
Prior art keywords
foup
transport carrier
overhead hoist
hoist transport
transferring
Prior art date
Application number
TW095136217A
Other languages
Chinese (zh)
Inventor
Mitsuhiro Ando
Susumu Maetaki
Original Assignee
Asyst Shinko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Shinko Inc filed Critical Asyst Shinko Inc
Publication of TW200737392A publication Critical patent/TW200737392A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/026—Racks equipped with a displaceable load carrying surface to facilitate loading or unloading
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

A FOUP (9a) is placed on a FOUP carry in/out port (5a) on a process station (5) and stores a processed substrate on the process station (5). A FOUP (9b) is positioned above the FOUP (9a), and stores a substrate which is transferred by an overhead hoist transport carrier and is to be processed on the process station (5). The FOUP (9a) and the FOUP (9b) are so configured as to be replaced by operation of a lift mechanism of the overhead hoist transport carrier and a pair of slide boards (10by, 10cy) which advance and retract in a horizontal direction in a lift area of the lift mechanism.
TW095136217A 2005-09-30 2006-09-29 Method and apparatus for transferring and receiving article by overhead hoist transport carrier TW200737392A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005285718A JP2007096140A (en) 2005-09-30 2005-09-30 Article giving/receiving method and apparatus in suspended ascending/descending carrier truck

Publications (1)

Publication Number Publication Date
TW200737392A true TW200737392A (en) 2007-10-01

Family

ID=37899817

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095136217A TW200737392A (en) 2005-09-30 2006-09-29 Method and apparatus for transferring and receiving article by overhead hoist transport carrier

Country Status (5)

Country Link
JP (1) JP2007096140A (en)
KR (1) KR20080072817A (en)
CN (1) CN101278384A (en)
TW (1) TW200737392A (en)
WO (1) WO2007037397A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI414469B (en) * 2007-07-23 2013-11-11 Murata Machinery Ltd Transporting apparatus, transporting system, and elongation mechanism
US8622682B2 (en) 2007-10-18 2014-01-07 Murata Machinery, Ltd. Storage, storage set and transporting system
TWI836195B (en) * 2020-03-13 2024-03-21 日商村田機械股份有限公司 Clamping device, transport vehicle and transport method

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* Cited by examiner, † Cited by third party
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JP4796024B2 (en) * 2007-08-30 2011-10-19 東京エレクトロン株式会社 Container exchange system and container exchange method
JP5228504B2 (en) * 2008-01-24 2013-07-03 村田機械株式会社 Storage and entry / exit methods
JP5217416B2 (en) * 2007-12-25 2013-06-19 村田機械株式会社 Storage and entry / exit methods
KR101015225B1 (en) 2008-07-07 2011-02-18 세메스 주식회사 Substrate processing apparatus and method for transferring substrate of the same
KR101077566B1 (en) 2008-08-20 2011-10-28 세메스 주식회사 Substrate processing apparatus and method for transferring substrate of the same
KR101019212B1 (en) 2008-08-21 2011-03-04 세메스 주식회사 Method and equipment for treating substrate
JP4720932B2 (en) * 2009-02-10 2011-07-13 ムラテックオートメーション株式会社 Transfer equipment
JP5347652B2 (en) * 2009-03-30 2013-11-20 株式会社Ｉｈｉ Substrate lifting / lowering transfer apparatus and substrate processing / transfer system
JP5083278B2 (en) * 2009-06-15 2012-11-28 村田機械株式会社 Automatic warehouse in front of equipment
KR101533366B1 (en) * 2010-11-04 2015-07-02 무라다기카이가부시끼가이샤 Conveying system and conveying method
JP5674041B2 (en) 2011-08-11 2015-02-18 株式会社ダイフク Goods transport equipment
WO2015046062A1 (en) * 2013-09-30 2015-04-02 株式会社日立国際電気 Substrate processing device, manufacturing method for semiconductor device, and recording medium
JP6149805B2 (en) * 2014-06-05 2017-06-21 株式会社ダイフク Transport device
JP6132165B2 (en) * 2014-09-25 2017-05-24 村田機械株式会社 Temporary storage device and temporary storage method
JP6048686B2 (en) * 2014-09-25 2016-12-21 村田機械株式会社 Temporary storage device, transport system and temporary storage method
KR102207870B1 (en) * 2014-12-02 2021-01-26 세메스 주식회사 Unit for supporting a gripping part and apparatus for transferring a carrier having the unit
US10177020B2 (en) * 2015-02-07 2019-01-08 Kla-Tencor Corporation System and method for high throughput work-in-process buffer
JP6505851B2 (en) * 2015-08-28 2019-04-24 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing apparatus and method of manufacturing semiconductor device
JP2018177376A (en) * 2015-09-09 2018-11-15 村田機械株式会社 Conveying system and conveying method
KR102453197B1 (en) * 2015-10-30 2022-10-12 삼성전자주식회사 Apparatus for loading substrate storage container
KR102020234B1 (en) * 2017-09-08 2019-09-11 세메스 주식회사 Raceway unit and OHT having the raceway unit
CN108001459B (en) * 2017-12-08 2023-09-08 杭州久智自动化技术有限公司 Rail car access structure
JP6927007B2 (en) * 2017-12-12 2021-08-25 株式会社ダイフク Transfer equipment, transfer method
CN109110497B (en) 2018-08-31 2021-06-11 惠科股份有限公司 Conveying system and conveying method for display panel
JP7213056B2 (en) * 2018-10-18 2023-01-26 東京エレクトロン株式会社 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
JP6814412B2 (en) * 2018-10-23 2021-01-20 村田機械株式会社 Transport system
KR102480674B1 (en) * 2018-11-06 2022-12-23 무라다기카이가부시끼가이샤 ceiling hanging shelf
DE102019133074A1 (en) * 2019-12-04 2021-06-10 L.O.A. Srl Storage system
JP7327425B2 (en) * 2021-02-19 2023-08-16 株式会社ダイフク Conveyor equipment
US11912512B2 (en) * 2021-05-13 2024-02-27 HighRes Biosolutions, Inc. Overhead labware transport system
CN114906571B (en) * 2022-05-25 2024-03-19 广汽本田汽车有限公司 Engine conveying monitoring method and conveying line

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3622101B2 (en) * 1997-03-13 2005-02-23 村田機械株式会社 Overhead traveling vehicle system
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
JP2004307125A (en) * 2003-04-04 2004-11-04 Asyst Shinko Inc Storage shelf device
JP2005150129A (en) * 2003-11-11 2005-06-09 Asyst Shinko Inc Transfer apparatus and transfer system
JP4337683B2 (en) * 2004-08-16 2009-09-30 村田機械株式会社 Transport system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI414469B (en) * 2007-07-23 2013-11-11 Murata Machinery Ltd Transporting apparatus, transporting system, and elongation mechanism
US8622682B2 (en) 2007-10-18 2014-01-07 Murata Machinery, Ltd. Storage, storage set and transporting system
TWI450850B (en) * 2007-10-18 2014-09-01 Murata Machinery Ltd Storage, storage set and transporting system
TWI836195B (en) * 2020-03-13 2024-03-21 日商村田機械股份有限公司 Clamping device, transport vehicle and transport method

Also Published As

Publication number Publication date
JP2007096140A (en) 2007-04-12
CN101278384A (en) 2008-10-01
WO2007037397A1 (en) 2007-04-05
KR20080072817A (en) 2008-08-07

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