CN101278384A - Method and apparatus for transferring and receiving article on overhead hoist transport carrier - Google Patents
Method and apparatus for transferring and receiving article on overhead hoist transport carrier Download PDFInfo
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- CN101278384A CN101278384A CNA2006800364586A CN200680036458A CN101278384A CN 101278384 A CN101278384 A CN 101278384A CN A2006800364586 A CNA2006800364586 A CN A2006800364586A CN 200680036458 A CN200680036458 A CN 200680036458A CN 101278384 A CN101278384 A CN 101278384A
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- suspension type
- foup
- conveying trolley
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/026—Racks equipped with a displaceable load carrying surface to facilitate loading or unloading
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
A method and an apparatus for transferring and receiving articles by overhead hoist transportation carrier are provided, structure of the device is that, a hoist mechanism of the overhead hoist transportation carrier and a pair of slide plates (10by), (10cy) which advance and retract in a horizontal direction within the hoist range can exchange a FOUP (9a) at a process station (5) which uses carrying-in/carrying out port (5a) to load and receive a substrate processed on the process station (5) with a FOUP (9b) above the FOUP (9a) which uses the overhead hoist transportation carrier to transport and receive the substrate which is about to be processed on the process station (5).
Description
Technical field
The present invention relates to a kind of take out of with article with move into the handover method of article and the device that is used to implement this method, this take out of with article be loaded into be arranged on along suspension type lifting conveying trolley (below be referred to as " in-process of OHT (Overhead Hoist Transport) and the regulation place of inter process annular orbit; plug is accommodated in the article that substrate (wafer; liquid crystal board etc.) in the article (FOUP (Front-OpeningUnified Pod) etc.) carries out the workbench (below be referred to as " work of treatment platform ") of various processing (cleaning; except the CVD (Chemical Vapor Deposition)) freely moves into/take out of on the bateau; this is moved into and is positioned at this with article and takes out of top with article, and be the article of carrying to by the above-mentioned work of treatment platform of OHT chassis clamping.And the present invention is particularly suitable for the carrying of containing box FOUP (Front-Opening Unified Pod).
Background technology
In recent years, the most employing along in-process in the clean room and the configuration of inter process annular orbit, implement the necessary OHT chassis of handling usefulness at a succession of work of treatment platform of wafer being implemented various surface treatments (forming film, photoetching, cleaning, etching, detection etc.), and take in the FOUP of above-mentioned wafer with the carrying of OHT chassis.
The treatment process of substrate adopts taking in the label of installing on the FOUP of substrate and is managed, and the content of label is also along with the progress of substrate processing operation is progressively upgraded.The substrate processing operation is specific by the label information that is attached to FOUP, and later necessity is handled according to this label information by computer management.
At this moment, each platform of dealing with the work makes the time of required processing different according to the difference of treatment types, therefore needs to adjust activity time, and is provided for making the stacker of the temporary transient standby of FOUP.
This stacker is equipped with: a plurality of FOUP load and use frame; With move into FOUP to the frame of regulation or take out of the stakcer crane of FOUP from the frame of regulation.
In addition, above-mentioned stacker and the work of treatment platform of implementing various processing are along the annular orbit configuration of OHT chassis.
And this annular orbit is provided with a plurality of according to the scale of semiconductor manufacturing facility.Each annular orbit is made of with getting in touch the inter process annular orbit the in-process annular orbit.On these tracks, the OHT chassis is subjected to the stable control of travelling, and often travels along fixed-direction, and the FOUP that substrates such as wafer have been taken in carrying is carried to the stacker of regulation or the platform of dealing with the work.
And, use the OHT chassis to be as the reason of the FOUP Handling device in the clean room: can guarantee to increase along the temporary transient standby of a plurality of work of treatment platforms of serving as various processing of this OHT chassis travel route configuration or FOUP with each equipment disposition such as stackers in ground design freedom, and the problem of secure context.
; OHT chassis clamping on one side FOUP travels on above-mentioned in-process annular orbit or inter process annular orbit on one side; for plug (for example is accommodated on this FOUP many pieces freely; 25 pieces) substrate such as wafer handles (forming film, photoetching, cleaning, etching, detection etc.) according to necessity of processing step, and the OHT chassis is stopped with position that moving into/take out of the bateau subtend at the FOUP with the workbench of regulation.
Then, the FOUP that the decline clamping is loaded in moving into/taking out of on the bateau of afore mentioned rules workbench with it.
The substrate that the FOUP that is loaded the moving into of this work of treatment platform/carry on the bateau takes in, by means of the manipulator of workbench place equipment, predetermined process is accepted in each one piece of introducing workbench inside.
Handling the required time of this substrate has nothing in common with each other because of the kind of handling, but need the corresponding time, therefore the OHT chassis of removing the FOUP that is over is after loading FOUP, and other carrying instruction is carried out in indication according to the handling system controller, thereby prevents the reduction of entire system running efficiency.
But, after the processing of work of treatment platform finishes, the order of the operation of FOUP such as following (1)～(5).
(1) the work of treatment platform is finished dealing with afterwards FOUP to be sent at the handling system controller and is return requirement.
(2) near system controller empty OHT chassis of standby this work of treatment platform sends and returns instruction.
(3) received the OHT chassis of returning instruction and arrived this work of treatment platform after, clamping adorned and moved into/take out of the FOUP of bateau, and it is carried to the indicated carrying target ground of system controller.
(4) after system controller is confirmed to return from the FOUP that this work of treatment platform is finished processing, to will be in stacker etc. certainly new FOUP other sky OHT chassis of being carried to standby on the track of this work of treatment platform send instruction.
(5) receive the OHT chassis of carrying instruction the new FOUP of middle keepings such as stacker is carried to this work of treatment platform.
Thereby, return the OHT chassis of handling the FOUP that is over and the OHT chassis of supplying with new FOUP from the work of treatment platform and will distinguish to some extent.
On the other hand, handle returning and supplying with of the FOUP be over, then can expect to realize returning and supplying with the simplification of operation and the shortening of handling time if just can carry out by this platform of dealing with the work with an OHT chassis.
But, if implement such scheme by prior art, certainly the OHT chassis of new FOUP in carrying stacker etc. then, FOUP be descended be loaded into the moving into of work of treatment platform/when taking out of bateau, will take place on this bateau and accident that FOUP that the processing of not returning as yet is over collides.
Therefore, by the FOUP of predetermined processing workbench move into/take out of on the bateau loading and the FOUP that taken in the substrate after the processing of this work of treatment platform finishes with by the OHT chassis clamping and the exchange of having taken in the FOUP of the substrate that will handle at this platform of dealing with the work, be difficult to realize with an OHT chassis.
, as the technology of implementing such FOUP exchange with an OHT chassis, existing following patent documentation 1.
The FOUP that finishes dealing with of this work of treatment platform that this patent documentation 1 discloses is that a kind of will moving at predetermined process workbench FOUP/take out of on the bateau loaded, each substrate is possessed in inside and take in the technology that the FOUP that will accept the substrate of above-mentioned processing at this predetermined process workbench exchanges.
Particularly, enumerate five examples, setting the OHT chassis with a pair of FOUP clamping hook mechanism is the execution mode of main body.Below, the summary of these execution modes is described.
Execution mode 1:
Shown in Figure 3 as patent documentation 1, OHT chassis 1 is equipped with the 18a of hook mechanism, the 18b of a pair of FOUP clamping along its travel direction.And, constitute two dops (FOUP) 20a, 20b with clamping one by one respectively, the mode of opening control.
And treatment facility 2 has dop and moves into/take out of with bateau 8.Move into/take out of with on the bateau 8 at this dop, be equipped with and advance and retreat mobilely in the travel direction of OHT chassis 1, and the substrate orientation in the dop can be born workbench 46 in the each one piece shipment bateau 21 of implementing predetermined processing.
By said structure, at first, carry out at 2 pairs of substrates of processing unit of taking in useful Fig. 3 by the 18b of hook mechanism clamping under the state of dop 20b of predetermined process, OHT conveying trolley 1 arrives dop and moves into/take out of the top position of using bateau 8 from stacker or other processing unit that the travel route along OHT chassis 1 is provided with.
Then, follow emitting of lifting belt 16, clamping sheet mechanism 17 descends, and takes in processing unit 2 and handles the substrate that is over, and be clamped in the dop 20a that bears loading on the workbench 45 by the 18a of hook mechanism.
In this case, clamping sheet mechanism 17 a little rises, make to bear between workbench 46 and the dop 20a and form the space, move to the following quadrate part of above-mentioned dop 20b and to bear workbench 45, the decline clamping sheet mechanism, dop 20b is loaded into bears on the workbench 45, thereby remove the clamp position of the dop 20b that realizes by the 18b of hook mechanism.
In the above start, can bear on the workbench 46, exchange take in useful processing unit 2 finish processing substrate dop 20a with take in the substrate dop 20b that useful processing unit 2 carries out predetermined process.
Execution mode 2:
Omit the workbench 46 that bears shown in Figure 3 in the execution mode 1, realize patent documentation 1 shown in Figure 6 simplifying the structure.
Usually, the OHT chassis travels in the other direction and can enlarge markedly the dangerous of trolley impact and reduce handling efficiency, and this is forbidden as general knowledge.In this execution mode 2, need take in the dop 20b of the substrate of predetermined process with the hook mechanisms grip that is positioned at " B " among patent documentation 1 Fig. 5, and in different treatment facility 2, the swap operation of dop clamping and loading all appends operations such as returning stacker each time, causes being difficult to continuity ground and implements.
Execution mode 3:
Shown in Figure 7 as patent documentation 1, the 18a of hook mechanism, the 18b that in the structure of execution mode 1, are positioned at " A ", " B " respectively can be by independently lifting belt 15a, 16b independent-lifting control ground constitute.
By aforesaid structure, improve the degree of freedom of equipment, a plurality of loading attachments can not have influence on other loading attachment, thereby can move freely, and consequently, the handling efficiency of location, OHT chassis is improved easily.
Execution mode 4:
Shown in Figure 8 as patent documentation 1, basic structure is identical with above-mentioned execution mode 2, and same with above-mentioned execution mode 2, and the 18a of hook mechanism, the 18b that are positioned at " A ", " B " can be respectively by independently lifting belt 16a, 16b constitute independent-lifting control.
Execution mode 5:
By patent documentation 1 structure shown in Figure 10, hold at OHT chassis 1 under the state of dop 18, also constitute the structure that the position of dop can be moved to " B " position from " A " position.
By this additional structure, in the structure shown in the above-mentioned execution mode 2,4 (structure of bearing workbench that does not have travel direction and the rightabout thereof shown in the execution mode 1,3 to move freely) along OHT conveying trolley 1, even temporarily return stacker, but in continuously different processing unit 2, also can realize taking in the exchange of dop 20a with the dop 20b of the substrate of taking in predetermined process of the substrate of finishing processing.
Japanese documentation 1: the spy opens 2005-22539
Summary of the invention
As mentioned above, along the in-process track configurations, to the substrate in the FOUP implement except that clean, the platform of respectively dealing with the work of particular procedure among the multiple class the CVD, all have FOUP with moving into/take out of bateau.
Move into the FOUP that takes in respective handling workbench predetermined process substrate with moving into/take out of bateau for this FOUP with the OHT chassis.
Then, the substrate that is accommodated in the FOUP is implemented predetermined processing for each one piece,,, this FOUP is carried to other predetermined process workbench with the OHT chassis then for stacking or processing thereafter if all substrate is finished predetermined processing, returned in the FOUP.
But, the FOUP of work of treatment platform is with moving into/take out of on the bateau, the FOUP that is realized by the OHT chassis moves into/takes out of in the operation, the just OHT chassis of the FOUP of the substrate of acceptance processing of this work of treatment platform is taken in clamping, is to be difficult to directly exchange the FOUP of this clamping and to be loaded into this work of treatment platform take in the FOUP that handles the substrate that is over.
Therefore, the FOUP of a work of treatment platform is with moving into/take out of in the bateau, need respectively with another OHT chassis take out of take in processing be over substrate FOUP with move into the FOUP that takes in unprocessed substrate.
Thereby after whole substrates of a work of treatment platform were finished predetermined processing, the FOUP that takes in these substrates and install to the work of treatment platform took out of by the empty HOT chassis that does not have clamping FOUP in the inter process annular orbit travels with the FOUP that moves into/take out of on the bateau.
Then, take in the FOUP at the substrate of this work of treatment platform predetermined process, by other OHT chassis in the in-process annular orbit travels, the FOUP that moves into this work of treatment platform is with moving into/take out of bateau.
Its result causes moving into, having lost when taking out of the suitable time with the FOUP that moves into/take out of bateau at the FOUP of work of treatment platform, exists and reduces the possibility that FOUP takes in the treatment effeciency of substrate.
It is the technology of main target that above-mentioned patent documentation 1 has to address the above problem.
Disclosed technology on this patent documentation 1, it is characterized in that and to take out of simultaneously and to move into, take out of be loaded in the predetermined processing workbench FOUP with moving into/take out of on the bateau, and whole substrates that take in its inside and handle the FOUP of the substrate that is over this work of treatment platform, move into taken in the FOUP that to be ready accepting the substrate handled at this workbench to above-mentioned FOUP with moving into/taking out of on the bateau.
In order to realize technique scheme, Fig. 3 of OHT chassis such as patent documentation, Fig. 6, Fig. 7, shown in Figure 8 along the traffic direction of OHT chassis, use the OHT chassis of the special requirement of the film clamping machine device with two FOUP clampings.
And then, do not shift to the work of treatment platform of accepting different disposal continuously in case do not return stacker, as Fig. 3 of patent documentation 1, shown in Figure 7, therefore need on the travel direction of OHT chassis 1, be provided with move freely bear workbench 45, perhaps as shown in figure 10, need be under by the state of OHT conveying trolley clamping, the structure that the FOUP of clamp position is moved.
As mentioned above, disclosed technology on the patent documentation 1, can utilize FOUP that a unique OHT chassis is loaded in the predetermined processing workbench with moving into/take out of on the bateau, take in the FOUP of the substrate that predetermined processing finishes and take in the swap operation of the FOUP of the substrate that to be ready accepting predetermined processing.
But therefore, can not use the higher OHT conveying trolley of aforesaid versatility, cause the cost of OHT conveying trolley to increase, need the extremely complicated mechanism of additional mobile FOUP simultaneously.
Therefore, the objective of the invention is to, a kind of lifting/carrying of using a general OHT chassis to bear a FOUP is provided, the commutative FOUP that takes at the work of treatment platform substrate of finishing dealing with and take at this work of treatment platform and to be ready accepting the method for giving and accepting of FOUP of substrate of processing and the device that is used to implement this method, this FOUP that takes in the substrate of finishing dealing with is loaded in along the in-process annular orbit and disposes, to being accommodated in FOUP that substrate in the FOUP implements the necessary work of treatment platform of handling with moving into/take out of on the bateau, this FOUP that takes in the substrate that to be ready accepting processing is by this OHT chassis clamping.
In order to address the above problem, according to a first aspect of the invention, provide the article handover method on a kind of suspension type lifting carrying (OHT) chassis, wherein, this handover method has following operation:
Use above-mentioned clamping part clamping to the moving into article and make it to descend of regulation workbench, be loaded into the operation of first parts of the temporary transient storage rack of suspension type that first, second parts arrange along the vertical direction;
Taking out of of loading on the bateau moved into/taken out of to the article that use above-mentioned clamping part to be clamped in the afore mentioned rules workbench with article and make it to rise, and is loaded into the operation of second parts of the temporary transient storage rack of above-mentioned suspension type;
That uses above-mentioned clamping part to be clamped in to load on first parts of the temporary transient storage rack of above-mentioned suspension type moves into article and makes it to descend, and is loaded into the operation that bateau was moved into/taken out of to above-mentioned article; And
That uses above-mentioned clamping part to be clamped in to load on second parts of the temporary transient storage rack of above-mentioned suspension type takes out of with article and the operation that makes it to rise.
According to a first aspect of the invention, by the control of lifting only have only an above-mentioned OHT chassis just can take into account by along the in-process annular orbit in the OHT chassis clamping of the control of being travelled on the prescribed direction and be loaded in the predetermined processing workbench and be ready accepting the article handled and the article of the platform of dealing with the work at afore mentioned rules and take out of/move into the exchange of the article that load on the bateau and be in the processing of predetermined processing workbench and the function of the temporary transient storage rack of suspension type.
Thereby, can use article from bateau to the article of predetermined processing workbench that move into/take out of to move into jointly to take out of with the article of moving into/take out of bateau from these article and use the OHT chassis with the OHT chassis.And the OHT chassis also can be to use the universal architecture of a clamping, lifting, article of carrying.And then, do not need to make the OHT chassis of special requirement.So, can effectively implement to the article of work of treatment platform and move into/take out of the article of moving on the bateau after being untreated article and taking out of processing.
Article handover method on the OHT conveying trolley of a second aspect of the present invention record, wherein, above-mentioned article are taken in the containing box of Semiconductor substrate freely for plug,
Above-mentioned workbench can also be the appropriate location that is disposed at along the annular orbit of above-mentioned suspension type lifting conveying trolley, and is accommodated in the semiconductor substrate surface treatment facility in the above-mentioned containing box.
According to a second aspect of the invention, it is self-evident before to have quoted the related invention effect of first aspect, if the containing box (FOUP) of taking out of at the predetermined processing workbench loads with moving into/taking out of on the bateau, and take in the containing box of the substrate after this work of treatment platform is handled, will take in the FOUP that is about to the substrate of acceptance processing at this work of treatment platform after just can not delaying and be loaded in above-mentioned FOUP with moving into/taking out of on the bateau.
Thereby, can more effectively implement various processing (forming film, photoetching, cleaning, etching, detection etc.) to the substrate of taking in the FOUP.
A third aspect of the present invention provides the article connection device on a kind of suspension type conveying trolley, wherein, comprising:
Suspension type lifting conveying trolley, it has clamping and moves into/take out of the clamping part of using article;
At least one workbench, it has along the regulation place of above-mentioned suspension type lifting conveying trolley travel route and is provided with, and loads above-mentioned taking out of and move into/take out of bateau with article; And
Temporary transient storage rack, it has first parts and second parts of configuration along the vertical direction, and is positioned at above-mentioned the moving into of above-mentioned each workbench/the take out of top of bateau,
First parts of above-mentioned temporary transient storage rack, second parts have first slide plate, second slide plate respectively,
Above-mentioned first slide plate, second slide plate be respectively,
Only keeping/taking-ups is above-mentioned to be moved into when using article implementing, and above-mentioned first slide plate is advanced and retreat, so that join article to suspension type lifting conveying trolley,
Only keeping/taking-ups is above-mentioned takes out of when using article implementing, and above-mentioned second slide plate is advanced and retreat, so that join article to suspension type lifting conveying trolley,
In the time of in addition, provide the article connection device of suspension type lifting conveying trolley, allow the lifting start of drive controlling suspension type lifting conveying trolley.
The invention of third aspect present invention is the device that is used to implement relevant first aspect invention, with regard to the invention effect, is equal to the invention effect of above-mentioned first aspect, so avoid its explanation of repetition.
Article connection device on the OHT conveying trolley of a fourth aspect of the present invention record, wherein, above-mentioned article are taken in the containing box (FOUP) of Semiconductor substrate freely for plug,
Above-mentioned workbench is along the configuration of the annular orbit appropriate location of above-mentioned suspension type lifting conveying trolley, and the article connection device on the suspension type lifting conveying trolley of putting down in writing as the third aspect that is accommodated in the semiconductor substrate surface treatment facility in the above-mentioned containing box.
According to the fourth aspect of invention, the invention effect of before having quoted the third aspect is self-evident, also can reach the effect that is equal to second aspect.
Description of drawings
Fig. 1 uses system of the present invention vertical view for expression.
Fig. 2 is for being used to implement major part structure chart of the present invention.
Fig. 3 is the frame plate schematic configuration diagram of expression suspension type frame involved in the present invention.
Fig. 4 is used to illustrate the FOUP loading condition typical figure on the suspension type frame of the inventive method for expression.
Label declaration
2 in-process annular orbits
5 work of treatment platforms
5a FOUP is with moving into/take out of bateau
7 OHT chassis
7d lifting belt
7f hook mechanism
9a、9b FOUP
10 suspension type rack devices
10b, 10c frame parts
10bx, 10cx fixed head
10by, 10cy slide plate
20 OHB controllers
Embodiment
Below, limit limit with reference to the accompanying drawings illustrates preferred implementation of the present invention.
At first, the summary of accompanying drawing is described, Fig. 1 uses system of the present invention vertical view for expression, Fig. 2 is for being used to implement major part structure chart of the present invention, Fig. 3 is the frame plate schematic configuration diagram of expression suspension type frame involved in the present invention, and Fig. 4 is used to illustrate the FOUP loading condition typical figure on the suspension type frame of the inventive method for expression.
Then, use entire system structure of the present invention with reference to figure 1 explanation.
Among Fig. 1,1 is bay, walks abreast to set up continuous a plurality of zones.Be equipped with the in-process annular orbit 2 of the guiding OHT chassis that travels described later in each bay 1.Each in-process annular orbit 2 is kept in touch by inter process annular orbit 4 via fork track 3.The OHT chassis constitutes, the above-mentioned track 2,3 and 4 of direction running that can be according to the rules.
5 are the work of treatment platform, along 2 configurations of in-process annular orbit.The work of treatment platform is implemented a certain processing that forms film, photoetching, cleaning, etching, detection etc. to the Semiconductor substrate such as wafer that are accommodated in FOUP.And, work of treatment platform 5 is configured to along the in-process annular orbit 2 of each bay 1 laying, be consistent with the order of handling as much as possible.In addition, each work of treatment platform 5 has FOUP with moving into/take out of bateau 5a.This FOUP takes in the predetermined FOUP that carries out the substrate of predetermined processing with moving into/take out of bateau 5a OHT chassis, bear to move into, and bears and takes out of the FOUP that takes in the substrate that predetermined processing is over.
6 is stacker, and it is disposed at the appropriate location of in-process annular orbit 2.The FOUP that the substrate that whole processing are over is taken in stacker 6 keeping perhaps takes care of the predetermined FOUP that carries out the substrate of predetermined processing of taking in of standby.And stacker 6 has FOUP with moving into bateau 6a and taking out of bateau 6b.
7 is the OHT chassis, and it has along above-mentioned in-process annular orbit 2, fork track 3 and the inter process annular orbit 4 lifting/holding function to FOUP under the driving function of prescribed direction and clamp position.8 is system controller, the indication of management OHT conveying trolley 7 vehicle lines or the control of travelling that prevents OHT conveying trolleys such as controlling of anticollision.
In addition, Fig. 2 of referential expression major part structure of the present invention, Fig. 3 concrete example that execution mode is described.Among Fig. 2,9a, 9b are FOUP, and FOUP9a is loaded in the FOUP of work of treatment platform 5 with moving into/take out of on the bateau 5a.
And, the substrate of not implementing predetermined processing that take in this FOUP9a inside at this work of treatment platform, handle a slice by not shown manipulator at every turn, all substrate then is in the holding state that other work of treatment platform 5 or the stacker 6 (with reference to figure 1) of predetermined predetermined processing are implemented carrying after predetermined processing finishes.
Above-mentioned OHT chassis 7 comprises: the driving/traveling mechanism 7a that all cooperates with in-process annular orbit 2, fork track 3 and inter process annular orbit 4 (Fig. 2 state representation in-process annular orbit 2); Chassis position adjusting mechanism 7b; Elevating mechanism 7c; Lifting belt 7d; Clamping sheet mechanism 7e and the 7f of hook mechanism.
And specifically shown in patent documentation 1, above-mentioned driving/traveling mechanism 7a receives the electric power of non-contact power supply, presses the linear motor principle and obtains motive force, and the control of travelling that realizes by system controller 8 (with reference to figure 1) is limited travel direction.
Above-mentioned FOUP9 takes at the predetermined process workbench 5 predetermined substrates of accepting processing.And, this FOUP9b be positioned at the work of treatment platform 5 FOUP with moving into/take out of the corresponding position of bateau 5a.At this moment, FOUP9b uses the 7f of hook mechanism of conveying trolley 7, thus the flange portion clamping OHT chassis by this FOUP9b of clamping.
10 for the suspension type rack device (below be referred to as that " OHB (Overhead Hoist Buffer) is provided with bilevel parts 10b, 10c to the column 10a that extends from ceiling downwards.And these parts 10b is made of fixed head 10bx and slide plate 10by, and frame parts 10c is made of fixed head 10cx and slide plate 10cy.
Above-mentioned parts 10b, 10c are same structure, are that example is with reference to figure 4 its detailed structures of explanation with frame parts 10b.Among Fig. 4,10d is a removable pin, and this removable pin 10d is embedded on the bottom surface of this FOUP9a, 9b in the formed hole only when FOUP9a, 9b normally are loaded on the plane of slide plate 10by.The normal chimerism in hole that forms on this removable pin 10d and the FOUP bottom surface is that the transducer 10e that is provided with on the surface by slide plate 10by measures.
10f is a gear, and it is arranged at the appropriate location of fixed head 10bx side, uses not shown motorized reducer by OHB controller 20 (with reference to figure 1) control rotary speed and direction of rotation.
10g is a linear gear, is arranged at the advance and retreat direction that slide plate 10by bottom surface portions is exactly this slide plate 10by, the position that is meshed with said gear 10f.
And, though omit the guiding mechanism details of slide plate 10by, suitable well known device can be set to fixed head 10bx.
By this structure, the dotted portion of slide plate 10by, 10cy such as Fig. 2 is advanced and retreat to OHT chassis 7 sides from the position that is contained in OHB 10 as can be known.
In the said structure, the OHT chassis 7 that travels for the in-process annular orbit of laying along a bay in Fig. 1 overall structure 13, clamping FOUP9b arrives the work of treatment platform 5 of predetermined process substrate always, and, as shown in Figure 2, will take in FOUP that the FOUP9a that handles the substrate that is at this work of treatment platform 5 installs to work of treatment platform 5 with the situation of moving into/taking out of on the bateau 5a, also the configuration with reference to the above-mentioned FOUP9a of figure 4 explanations and FOUP9b exchanges start.
The slide plate 10by of the frame parts 10b of start 1:OHB 10 extends to the position of Fig. 2 dotted line.
Start 2: emit the lifting belt 7d of OHT chassis 7, FOUP9b is loaded into above-mentioned the slide plate 10by on the parts 10b.
Start 3: determined that by transducer 10e if the removable pin 10d shown in Fig. 3 is the suitable state that cooperates with the bottom surface of FOUP9b, the 7f of hook mechanism of releasing OHT chassis 7 cooperates with the flange of FOUP9b, coiling lifting belt 7d rises the 7f of hook mechanism a little.
Start 4: above-mentioned slide plate 10by makes above-mentioned slide plate 10by along the direction slip overlapping with fixed head 10bx by the driving of gear 10f shown in Figure 3.The OHB10 of this moment becomes the state of Fig. 4 (A).
Start 5: emit the lifting belt 7d of OHT chassis 7, the FOUP of the 7f of hook mechanism decline and arrival work of treatment platform 5 is with the flange portion of moving into/take out of the FOUP9a on the bateau 5a, with the hook 7f of mechanism clamping FOUP9a.
Start 6: by coiling lifting belt, the basal surface position that makes FOUP9a rise to FOUP9a at least is higher than the plan position approach of the slide plate 10cy of frame parts 10c.
Start 7: under this state, the slide plate 10cy of the frame parts 10c of OHB extends to the position of dotted line.
Start 8: determine by transducer 10e, if removable pin 10d shown in Figure 3 is the suitable total state that cooperates with the bottom surface of FOUP9a, the 7f of hook mechanism of releasing OHT chassis 7 cooperates with the flange of FOUP9a, and coiling lifting belt 7d rises the 7f of hook mechanism a little.
Start 9: above-mentioned slide plate 10by makes above-mentioned slide plate 10by along the direction slip overlapping with fixed head 10ax by the driving of gear 10f shown in Figure 3.The suspension type rack device 10 of this moment becomes the state of Fig. 4 (B).
Start 10: coiling lifting belt 7d makes the 7f of hook mechanism rise to highest order.
The slide plate 10by of the frame parts 10b of start 11:OHB10 extends to the position of dotted line under the state that has loaded FOUP9b.
Start 12: emit the lifting belt 7d of OHT chassis, make the 7f of hook mechanism drop to the flange portion that slide plate 10by goes up the FOUP9a that loads, with the hook 7f of mechanism clamping FOUP9a.
Start 13: the lifting belt 7d that reels a little, FOUP9a is moved upward a bit, releasing FOUP9a cooperates with removable pin 10d's.
Start 14: above-mentioned slide plate 10by makes above-mentioned slide plate 10by along the direction slip overlapping with fixed head 10bx by the driving of gear 10f shown in Figure 3.
Start 15: emit lifting belt 7d, decline FOUP9a makes this FOUP9a be loaded in the FOUP of work of treatment platform 5 with moving into/take out of on the bateau 5a.The OHB10 of this moment becomes the state of Fig. 4 (C).
Start 16: remove the flange of FOUP9a and cooperating of the 7f of hook mechanism, the lowest position that makes OHT conveying trolley 7 rise to the 7f of hook mechanism at least is higher than the high-order bit of the flange that is loaded in the FOUP9a on the slide plate 10cy and puts.
The slide plate 10cy of the frame parts 10c of start 17:OHB10 is being mounted with the position that extends to dotted line under the state of FOUP9a.
Start 18: the decline hook 7f of mechanism, clamping slide plate 10cy goes up the flange portion of the FOUP9a that loads, and rises once more.
Start 19: above-mentioned slide plate 10cy makes above-mentioned slide plate 10cy along the direction slip overlapping with fixed head 10cx by the driving of gear 10f shown in Figure 3.The OHB10 of this moment becomes the state of Fig. 4 (D).
Above-mentioned each start 1～19 is carried out successively continuously according to the signal from OHB controller 20, therefore can realize efficiently and effectively: the FOUP at work of treatment platform 5 loads with moving into/take out of on the bateau 5a, and the exchange of FOUP9a and the FOUP9a that takes at the substrate that is about to the acceptance processing of these work of treatment platforms 5 of having finished the substrate of predetermined processing at this work of treatment platform 5 is taken in its inside.
More than, preferred forms of the present invention has been described, but being not limited to these, the present invention also various execution modes can be arranged, for example among Fig. 2, OHB10 constitutes the structure that hangs from ceiling by the column 10a that hangs on ceiling on the direction perpendicular to in-process annular orbit 2, even but form OHB10 and in-process annular orbit 2 parallel and also with the support portion, top of column 10a as the in-process annular orbit, and with OHB10 be arranged at in-process annular orbit 2 under structure also without a doubt.From the space utilization aspect of clean room, according to occasion, it also is useful sometimes the hanger bracket device being set under this in-process annular orbit.
In addition, OHB controller 20 is for to control a plurality of OHB with an OHB controller, but also can dispose OHB one by one respectively, independent each OHB of control.
Though understand the present invention in detail with reference to specific execution mode, obviously, those skilled in the art can make variations and modifications not breaking away from design of the present invention and scope.
The application is based on the Japanese patent application (special hope 2005-285718) of application on September 30th, 2005, and its content is incorporated into this for your guidance.
The application of industrial aspect
Can jointly use article from bateau to the article of predetermined processing workbench that move into/take out of to move into Take out of with the article of moving into/take out of bateau from these article with the OHT chassis and to use the OHT chassis. And, The OHT chassis can be to come the universal of clamping, lifting/article of carrying with one, therefore, Do not need to make the OHT chassis of special requirement. And then, can more effectively implement to processing the worker The article of moving on the bateau after being untreated article and taking out of processing are moved into/taken out of to the article of making platform.
Claims (4)
1. the article handover method on the suspension type lifting conveying trolley, comprising:
Use described clamping part clamping to the moving into article and make it to descend of regulation workbench, be loaded into the operation of first parts of the temporary transient storage rack of suspension type that first parts, second parts arrange along the vertical direction;
Taking out of of loading on the bateau moved into/taken out of to the article that use described clamping part to be clamped in described regulation workbench with article and make it to rise, and is loaded into the operation of second parts of the temporary transient storage rack of described suspension type;
That uses described clamping part to be clamped in to load on first parts of the temporary transient storage rack of described suspension type moves into article and makes it to descend, and is loaded into the operation that bateau was moved into/taken out of to described article; And
That uses described clamping part to be clamped in to load on second parts of the temporary transient storage rack of described suspension type takes out of with article and the operation that makes it to rise.
2. the article handover method on the suspension type lifting conveying trolley of putting down in writing as claim 1 is characterized in that;
Described article are taken in the containing box of Semiconductor substrate freely for plug,
Described workbench is the annular orbit appropriate location configuration along described suspension type lifting conveying trolley, and is accommodated in the semiconductor substrate surface treatment facility in the described containing box.
3. the article connection device on the suspension type conveying trolley is characterized in that having:
Suspension type lifting conveying trolley, it has clamping and moves into/take out of the clamping part of using article;
At least one workbench, it has along the regulation place of described suspension type lifting conveying trolley travel route and is provided with, and loads described taking out of and move into/take out of bateau with article; And
Temporary transient storage rack, it has first parts and second parts of configuration along the vertical direction, and is positioned at described the moving into of described each workbench/the take out of top of bateau,
First parts of described temporary transient storage rack, second parts have first slide plate, second slide plate respectively,
Described first, second slide plate is,
Only keeping/taking-ups is described to be moved into when using article implementing, and described first slide plate is advanced and retreat, so that join article to suspension type lifting conveying trolley,
Only keeping/taking-up is described takes out of when using article implementing, and described second slide plate is advanced and retreat, so that to the suspension type lifting conveying trolley article of giving and accepting,
In the time of in addition, provide the article connection device of suspension type lifting conveying trolley, allow the lifting start of drive controlling suspension type lifting conveying trolley.
4. the article connection device on the suspension type lifting conveying trolley of putting down in writing as claim 3 is characterized in that described article take in the containing box of Semiconductor substrate freely for plug,
Described workbench is the annular orbit appropriate location configuration along described suspension type lifting conveying trolley, and is accommodated in the semiconductor substrate surface treatment facility of described containing box.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005285718A JP2007096140A (en) | 2005-09-30 | 2005-09-30 | Article giving/receiving method and apparatus in suspended ascending/descending carrier truck |
| JP285718/2005 | 2005-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101278384A true CN101278384A (en) | 2008-10-01 |
Family
ID=37899817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800364586A Pending CN101278384A (en) | 2005-09-30 | 2006-09-29 | Method and apparatus for transferring and receiving article on overhead hoist transport carrier |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2007096140A (en) |
| KR (1) | KR20080072817A (en) |
| CN (1) | CN101278384A (en) |
| TW (1) | TW200737392A (en) |
| WO (1) | WO2007037397A1 (en) |
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- 2006-09-29 CN CNA2006800364586A patent/CN101278384A/en active Pending
- 2006-09-29 TW TW095136217A patent/TW200737392A/en unknown
- 2006-09-29 KR KR1020087007731A patent/KR20080072817A/en not_active Application Discontinuation
- 2006-09-29 WO PCT/JP2006/319512 patent/WO2007037397A1/en active Application Filing
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20080072817A (en) | 2008-08-07 |
| JP2007096140A (en) | 2007-04-12 |
| TW200737392A (en) | 2007-10-01 |
| WO2007037397A1 (en) | 2007-04-05 |
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Open date: 20081001 |