TW200732811A - Focusing device, focusing method and a pattern inspecting apparatus - Google Patents

Focusing device, focusing method and a pattern inspecting apparatus

Info

Publication number
TW200732811A
TW200732811A TW096102702A TW96102702A TW200732811A TW 200732811 A TW200732811 A TW 200732811A TW 096102702 A TW096102702 A TW 096102702A TW 96102702 A TW96102702 A TW 96102702A TW 200732811 A TW200732811 A TW 200732811A
Authority
TW
Taiwan
Prior art keywords
focus
image
sensor
focusing
inspecting apparatus
Prior art date
Application number
TW096102702A
Other languages
English (en)
Chinese (zh)
Other versions
TWI325996B (enExample
Inventor
Hiromi Inoue
Tomohide Watanabe
Satoshi Endo
Masami Ikeda
Original Assignee
Toshiba Kk
Nuflare Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Kk, Nuflare Technology Inc filed Critical Toshiba Kk
Publication of TW200732811A publication Critical patent/TW200732811A/zh
Application granted granted Critical
Publication of TWI325996B publication Critical patent/TWI325996B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70641—Focus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
    • G03B13/32—Means for focusing
    • G03B13/34—Power focusing
    • G03B13/36—Autofocus systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW096102702A 2006-02-28 2007-01-24 Focusing device, focusing method and a pattern inspecting apparatus TW200732811A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006052995A JP2007232930A (ja) 2006-02-28 2006-02-28 フォーカス合わせ装置及びフォーカス合わせ方法

Publications (2)

Publication Number Publication Date
TW200732811A true TW200732811A (en) 2007-09-01
TWI325996B TWI325996B (enExample) 2010-06-11

Family

ID=38443088

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096102702A TW200732811A (en) 2006-02-28 2007-01-24 Focusing device, focusing method and a pattern inspecting apparatus

Country Status (4)

Country Link
US (1) US7394048B2 (enExample)
JP (1) JP2007232930A (enExample)
KR (2) KR100878082B1 (enExample)
TW (1) TW200732811A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115561255A (zh) * 2021-07-02 2023-01-03 深圳中科飞测科技股份有限公司 检测设备及检测方法、检测系统及存储介质

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5498044B2 (ja) * 2009-03-26 2014-05-21 株式会社東芝 自動焦点調節機構及び光学画像取得装置
US8488117B2 (en) * 2010-10-10 2013-07-16 Applied Materials Israel, Ltd. Inspection system and method for fast changes of focus
JP6043583B2 (ja) 2012-10-23 2016-12-14 株式会社ニューフレアテクノロジー 焦点位置検出装置、検査装置、焦点位置検出方法および検査方法
JP5923026B2 (ja) * 2012-10-31 2016-05-24 浜松ホトニクス株式会社 画像取得装置及び画像取得方法
JP6433888B2 (ja) * 2013-04-26 2018-12-05 浜松ホトニクス株式会社 画像取得装置、試料の合焦点情報を取得する方法及びシステム
US10495446B2 (en) * 2015-06-29 2019-12-03 Kla-Tencor Corporation Methods and apparatus for measuring height on a semiconductor wafer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026311A (ja) * 1983-07-22 1985-02-09 Nippon Kogaku Kk <Nikon> 暗視野顕微鏡用焦点検出装置
JPH0949965A (ja) * 1995-08-08 1997-02-18 Nikon Corp 焦点位置検出装置
JP3430002B2 (ja) * 1998-01-26 2003-07-28 株式会社不二越 自動焦点合わせ方法及びその装置
JPH11271597A (ja) 1998-03-25 1999-10-08 Nikon Corp 焦点位置検出装置
JP2005202092A (ja) * 2004-01-15 2005-07-28 Hitachi Kokusai Electric Inc 合焦点検出方法及びそれを用いた光学顕微鏡
JP2005338255A (ja) * 2004-05-25 2005-12-08 Olympus Corp オートフォーカス装置およびそれを用いた顕微鏡
JP2007322482A (ja) * 2006-05-30 2007-12-13 Nuflare Technology Inc フォーカス合わせ装置、フォーカス合わせ方法及び検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115561255A (zh) * 2021-07-02 2023-01-03 深圳中科飞测科技股份有限公司 检测设备及检测方法、检测系统及存储介质

Also Published As

Publication number Publication date
US7394048B2 (en) 2008-07-01
KR100878082B1 (ko) 2009-01-13
JP2007232930A (ja) 2007-09-13
TWI325996B (enExample) 2010-06-11
KR20070089611A (ko) 2007-08-31
US20070200051A1 (en) 2007-08-30
KR20080097167A (ko) 2008-11-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees