TW200722756A - Apparatus and method for inspecting fine structure and inspection program - Google Patents
Apparatus and method for inspecting fine structure and inspection programInfo
- Publication number
- TW200722756A TW200722756A TW095129641A TW95129641A TW200722756A TW 200722756 A TW200722756 A TW 200722756A TW 095129641 A TW095129641 A TW 095129641A TW 95129641 A TW95129641 A TW 95129641A TW 200722756 A TW200722756 A TW 200722756A
- Authority
- TW
- Taiwan
- Prior art keywords
- measured
- chip
- fine structure
- inspection program
- inspecting fine
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2829—Testing of circuits in sensor or actuator systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
- B81C99/005—Test apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
- G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005233510 | 2005-08-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200722756A true TW200722756A (en) | 2007-06-16 |
TWI293367B TWI293367B (ja) | 2008-02-11 |
Family
ID=37727369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095129641A TW200722756A (en) | 2005-08-11 | 2006-08-11 | Apparatus and method for inspecting fine structure and inspection program |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2007018186A1 (ja) |
TW (1) | TW200722756A (ja) |
WO (1) | WO2007018186A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009139172A (ja) * | 2007-12-05 | 2009-06-25 | Tokyo Electron Ltd | 微小構造体の変位量検出装置 |
CN103018651B (zh) * | 2012-12-06 | 2014-09-03 | 中国电子科技集团公司第十三研究所 | 用于mems器件的在片测试系统及其测试方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0267956A (ja) * | 1988-09-02 | 1990-03-07 | Oki Electric Ind Co Ltd | 電子部品のリード・オープン不良検出装置 |
JP2944056B2 (ja) * | 1990-08-06 | 1999-08-30 | 東京エレクトロン株式会社 | 電気回路測定用探針の接触検知装置及びこの接触検知装置を用いた電気回路測定装置 |
US5251469A (en) * | 1991-04-29 | 1993-10-12 | Rockwell International Corporation | Calibration system |
JPH0534371A (ja) * | 1991-07-31 | 1993-02-09 | Tokai Rika Co Ltd | 半導体加速度センサの感度測定装置 |
JPH06313785A (ja) * | 1993-04-28 | 1994-11-08 | Hioki Ee Corp | 振動による実装部品の半田付け不良検出方法並びに加振装置及び加振、測定プローブユニット |
JPH08327690A (ja) * | 1995-05-31 | 1996-12-13 | Nec Yamagata Ltd | 半導体ウエハ検査装置および半導体ウエハ検査方法 |
JPH08330368A (ja) * | 1995-05-31 | 1996-12-13 | Mitsubishi Electric Corp | 半導体回路装置群及びそのプローブ試験方法 |
JPH0933567A (ja) * | 1995-07-21 | 1997-02-07 | Akebono Brake Ind Co Ltd | 半導体加速度センサのセンサチップ検査方法及び検査装置 |
JP3202669B2 (ja) * | 1997-10-29 | 2001-08-27 | 九州日本電気株式会社 | 電気的特性測定方法 |
JP4841737B2 (ja) * | 2000-08-21 | 2011-12-21 | 東京エレクトロン株式会社 | 検査方法及び検査装置 |
-
2006
- 2006-08-07 JP JP2007529578A patent/JPWO2007018186A1/ja active Pending
- 2006-08-07 WO PCT/JP2006/315610 patent/WO2007018186A1/ja active Application Filing
- 2006-08-11 TW TW095129641A patent/TW200722756A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2007018186A1 (ja) | 2007-02-15 |
TWI293367B (ja) | 2008-02-11 |
JPWO2007018186A1 (ja) | 2009-02-19 |
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